WO2018112912A1 - Cutter composite coating, cutter, and method for preparing cutter composite coating - Google Patents

Cutter composite coating, cutter, and method for preparing cutter composite coating Download PDF

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Publication number
WO2018112912A1
WO2018112912A1 PCT/CN2016/111782 CN2016111782W WO2018112912A1 WO 2018112912 A1 WO2018112912 A1 WO 2018112912A1 CN 2016111782 W CN2016111782 W CN 2016111782W WO 2018112912 A1 WO2018112912 A1 WO 2018112912A1
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WO
WIPO (PCT)
Prior art keywords
layer
tool
composite coating
preparing
cutter
Prior art date
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PCT/CN2016/111782
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French (fr)
Chinese (zh)
Inventor
陈成
屈建国
罗春峰
Original Assignee
深圳市金洲精工科技股份有限公司
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Application filed by 深圳市金洲精工科技股份有限公司 filed Critical 深圳市金洲精工科技股份有限公司
Priority to PCT/CN2016/111782 priority Critical patent/WO2018112912A1/en
Publication of WO2018112912A1 publication Critical patent/WO2018112912A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/14—Layered products comprising a layer of synthetic resin next to a particulate layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Definitions

  • the present invention belongs to the technical field of tool coating, and in particular relates to a method for preparing a tool composite coating, a tool and a tool composite coating.
  • micro-tools In order to improve the life and processing quality of micro-tools, many companies at home and abroad have surface modification of micro-tools, such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), which have been widely used.
  • CVD chemical vapor deposition
  • PVD physical vapor deposition
  • metal processing such as steel
  • the life of unmicro-tools can be increased by more than 2 times, but there are fewer applications of difficult-to-machine materials such as graphite materials, aluminum alloys, carbon fiber composite materials, metal composite materials, and ceramic substrates. New materials solve this problem.
  • the object of the present invention is to overcome the above deficiencies of the prior art, and to provide a method for preparing a composite coating of a tool, a tool and a tool composite coating, which can significantly improve the wear resistance of the micro tool and avoid the product. Decompression and blockage of the flutes.
  • the technical solution of the present invention is: a tool composite coating comprising a base layer coated on a tool body and an outermost top layer, the base layer being a diamond layer or a cubic boron nitride layer, the base The thickness of the underlayer is 1 to 40 ⁇ m, and the top layer is a tetrahedral amorphous carbon film layer and has a thickness of 0.01 to 15 ⁇ m.
  • At least one intermediate layer is further disposed between the base layer and the top layer, and the intermediate layer is Including any one of the transition layer and the core layer, or the intermediate layer includes a laminated transition layer and a core layer;
  • the transition layer is a Me layer and has a thickness of 0.01 to 10 ⁇ m
  • the core layer is a MeX layer and has a thickness It is 0.01 to 15 ⁇ m, wherein Me represents at least one of a metal element such as Al, Ti, Cr, V, Mn, Fe, Co, Ni, Cu, Zr and a non-metal element Si;
  • X represents N, C, B One or two or three.
  • the present invention also provides a tool comprising a tool base, and a part or all of the surface of the tool base is provided with the above-described tool composite coating.
  • the present invention also provides a method for preparing a tool composite coating, comprising the following steps:
  • (1) preparing a substrate layer the tool substrate is placed in a CVD apparatus, a first semi-finished product is formed on the surface of the tool substrate by a CVD apparatus, and the substrate layer is a diamond layer or a cubic boron nitride layer;
  • the preparation method further comprises at least one of the following two steps:
  • (1) preparing a transition layer the first semi-finished product is placed in a PVD composite coating device, a metal vapor vacuum arc ion source is activated, Me ion implantation is performed, and Me ions are implanted into the surface of the first semi-finished product, and then Depositing a Me transition layer on the surface of the first semi-finished product by an arc ion plating technique, the Me representing at least one of Al, Ti, Cr, V, Mn, Fe, Co, Ni, Cu, Zr, and a non-metal element Si;
  • the second semi-finished product is placed in an arc ion plating apparatus, and a gas containing at least one of N, C, and B is introduced, and the target used in the arc ion plating apparatus is a Me target. And forming a MeX core layer on the transition layer by using an arc ion plating technique and obtaining a third semi-finished product, wherein the X represents one or two or three of N, C, and B;
  • the transition layer is a Me layer and has a thickness of 0.01 to ⁇ ;
  • the core layer is a MeX layer and has a thickness of 0.01 to 15 ⁇ m, and the tetrahedral amorphous carbon film layer has a thickness of 0.01 to 15 ⁇ m. .
  • the base layer is a diamond layer or a cubic boron nitride layer; the base layer has a thickness of 4 to 20 ⁇ m, and the transition layer is a Me layer and has a thickness of 0.1 to 3 ⁇ m ; The layer is 0.1 to 5 ⁇ m, and the tetrahedral amorphous carbon film layer has a thickness of 0.05 to 5 ⁇ m.
  • the temperature of the hot wire in the hot wire CVD apparatus is 2000-2400 ° C
  • the pressure in the growth chamber is 1.5-10 Kpa
  • the flow rate of the reaction source gas is 150-320 sccm
  • the cutter The surface temperature of the substrate is 600-1000 ° C
  • the basal layer is deposited and grown. It is 5-20 hours in the daytime.
  • the vacuum of the PVD composite coating apparatus reaches a 5.0 x 10 -4 Pa ⁇ metal vapor vacuum arc ion source.
  • a gas containing at least one of ⁇ C and B is introduced, such as
  • gas flow rate is 50 to 500sccm, arc ion plating arc current 50 to 100A, pulse bias peak -100 to -500 V, duty cycle 10% to 80%.
  • the arc current of the arc ion plating is 50 to 100 ⁇ , and the pulse bias peak value
  • the method for preparing a composite coating of a tool, a tool and a tool composite coating provided by the invention by depositing a multi-layer nano composite coating with high hardness, low friction coefficient, good bonding force and high temperature resistance on the surface of the tool Layer, in the processing of graphite materials, aluminum alloys, carbon fiber composites, metal composites, ceramic substrates and other difficult-to-machine materials, can significantly improve the wear resistance of the tool, greatly reduce the needle break rate, improve the tool life to 4 Up to 20 times, it can avoid the problem of accumulating tumors and blocking the flutes.
  • FIG. 1 is a plan enlarged view of a tool composite coating provided by an embodiment of the present invention.
  • FIG. 2 is a Raman spectrum analysis diagram of a tetrahedral amorphous carbon film layer in a tool composite coating according to an embodiment of the present invention
  • FIG. 3 is a graph showing the nanohardness of a tetrahedral amorphous carbon film layer in a tool composite coating according to an embodiment of the present invention as a function of indentation depth.
  • left, right, upper, lower, and the like orientations in the embodiments of the present invention are merely relative concepts or reference to the normal use state of the product, and should not be considered as having Restrictive.
  • a tool composite coating includes a base layer 1 applied to a cutter body and a top layer 4 located at an outermost side, wherein the base layer 1 is diamond. a layer or a cubic boron nitride layer, the base layer 1 having a thickness of 1 to 40 ⁇ m, the top layer 4 being a tetrahedral amorphous carbon film layer and having a thickness of 0.01 to 15 ⁇ m, and a top layer 4 tetrahedral amorphous carbon film (ta).
  • the -C structure of diamond-like carbon has a nanohardness of 40 to 80 GPa, and a tetrahedral amorphous carbon film can be prepared by physical vapor deposition to enhance the bonding force between the tetrahedral amorphous carbon film and the substrate, and, due to the top layer 4 tetrahedron
  • the amorphous carbon film may have a coefficient of friction of less
  • the thickness of the tetrahedral amorphous carbon film may be 0.05 to 10 ⁇ m.
  • the thickness of the tetrahedral amorphous carbon film may be 0.05 to 7 ⁇ m.
  • the thickness of the tetrahedral amorphous carbon film may be It is 0.05 to 5 ⁇ m, for example, 0.1 to 5 ⁇ m.
  • At least one intermediate layer is further disposed between the base layer 1 and the top layer 4, and the intermediate layer includes at least one of the transition layer 2 and the core layer 3, or
  • the intermediate layer includes at least one set of laminated transition layer 2 and core layer 3; that is, a structure in which the transition layer 2 - core layer 3 - transition layer 2 - core layer 3 are sequentially stacked.
  • the transition layer 2 is a Me layer and has a thickness of 0.01 to 10 ⁇ m
  • the core layer 3 is a MeX layer and has a thickness of 0.01 to 15 ⁇ m
  • Me represents Al, Ti, Cr, V, Mn, Fe, Co
  • Metal elements such as Ni, Cu, and Zr are And at least one of the non-metallic elements Si
  • X represents one or two or three of N, C, and B.
  • the tetrahedral amorphous carbon film layer is composed of a tetrahedral amorphous carbon film layer composed of C elements, and is composed of 40% to 95% of sp3 bond carbon atoms, preferably a tetrahedral amorphous carbon film layer is 40 % to 90% of the sp3 bond carbon atoms are composed of a skeleton.
  • the tetrahedral amorphous carbon film layer is composed of 50% to 90% of sp3 bond carbon atoms.
  • FIG. 1 a Raman spectrum analysis of a tetrahedral amorphous carbon film layer (Ta-C) is shown in FIG.
  • ID represents the peak intensity of the Diamond
  • wave number is 1300 to 1400 (for example, 1340 or so)
  • IG represents the peak intensity of the Graphite
  • the wave number is 1500 to 1600 ( For example, 1580 or so).
  • the intensity of the ID peak represents the content of the Sp3 bond to some extent.
  • the fitting method is fitted by a Gaussian function, and the area of the peak and the abscissa represents the content of the sp2 or sp3 bond components.
  • the primer layer of the coating near the substrate is a pure metal Me layer having a thickness of 10 to 100 nm; the transition layer 2 is a MeX layer having a thickness of 80 to 300 nm; and the core layer 3 is a MeAlX composite layer.
  • the thickness is 0.4 to 5.0 ⁇ m; the top layer 4 is a diamond-like (tetrahedral amorphous carbon film layer) having a ta-c structure, and has a thickness of 0.05 to 5.0 ⁇ m.
  • Embodiments of the present invention also provide a tool including a tool base, and the tool base may have a blade diameter of 0.02 to 0.5 mm.
  • a part or all of the surface of the tool base is provided with the above-described tool composite coating.
  • the processing material ⁇ can not only improve the wear resistance of the tool significantly, but also greatly reduce the needle breakage rate and increase the service life of the tool to 4 to 20 times. At the same time, the processing quality can be guaranteed, the processing efficiency can be greatly improved, and the production cost can be reduced.
  • Embodiments of the present invention also provide a method for preparing a tool composite coating, which can be used to prepare the above tool composite coating and tool, and includes the following steps:
  • the substrate layer 1 The tool substrate is placed in a CVD apparatus, and the base layer 1 is formed on the surface of the tool substrate by a CVD apparatus to obtain a first semi-finished product; the base layer 1 may be a diamond layer or a cubic nitrogen Chemical
  • the preparation method further comprises at least one of the following two steps:
  • (1) preparing a transition layer 2 the first semi-finished product is placed in a PVD composite coating device, a metal vapor vacuum arc ion source is applied, Me ion implantation is performed, and Me ions are implanted into the surface of the first semi-finished product.
  • Re-arc ion plating technology deposits Me transition layer 2 on the surface of the first semi-finished product, wherein Me represents at least metal elements such as Al, Ti, Cr, V, Mn, Fe, Co, Ni, Cu, Zr and non-metal element Si One, get the second half into
  • the second semi-finished product or the first semi-finished product is placed in an arc ion plating apparatus, and a gas containing at least one of N, C, and B is used, which is used in an arc ion plating apparatus.
  • the target is a Me target, and a MeX core layer 3 is deposited on the transition layer 2 by an arc ion plating technique to obtain a third semi-finished product, and the X represents one or two or three of N, C, and B.
  • the transition layer 2 is a Me layer and may have a thickness of 0.01 to ⁇ ; the core layer 3 is 0.01 to 15 ⁇ m of the MeX layer, and the thickness of the tetrahedral amorphous carbon film layer is 0.01 to 15 ⁇ .
  • the base layer 1 may have a thickness of 4 to 20 ⁇ m
  • the transition layer 2 may be a Me layer and may have a thickness of 0.1 to 3 ⁇ m
  • the core layer 3 may have a thickness of 0.1 to 5 ⁇ m, the tetrahedral amorphous carbon film.
  • the thickness of the layer is 0.05 to 5 ⁇ m.
  • the temperature of the hot wire in the CVD apparatus may be 2000-2400 ° C
  • the pressure in the growth chamber may be 1.5-10 Kpa
  • the flow rate of the reaction source gas may be 150-320 sccm.
  • the surface temperature of the tool base can be 600-1000 ° C
  • the growth of the base layer 1 can be 5-20 hours.
  • the vacuum of the PVD composite coating apparatus reaches a 5.0 ⁇ 10 ⁇ 4 Pa ⁇ metal vapor vacuum arc ion source.
  • a gas containing at least one of N, C, and B elements, such as CH4, N2, etc.; a gas flow rate of 50 to 500 sccm, an arc current of arc ion plating of 50 to 100 A, and a pulse bias peak are introduced.
  • the arc current of the arc ion plating is 50 to 100 A
  • the pulse bias peak is -100 to -500 V
  • the duty ratio is 10% to 80%.
  • the pretreatment method comprises the following steps:
  • the de-Co chemical pretreatment includes:
  • the lye is used to corrode the WC phase of the drill bit
  • the etched portion is the tip of the drill bit
  • the relationship between the length 1 of the tool tip and the length L of the drill bit groove satisfies L1/10 ⁇ 1 ⁇ L9/10 , that is, the length of the drill blade is L
  • the length 1 of the etched portion is greater than one tenth of an inch and less than nine tenths of an inch
  • the acid phase etches the Co phase of the drill bit, and the etched portion has a blade tip and the relationship between the length 1 of the tool tip and the length L of the bit groove satisfies L1/10 ⁇ 1 ⁇ L9/10, That is, the length of the drill blade is L, and the length of the etched portion is greater than one-tenth of L and less than ten-tenths! ⁇ .
  • the length of the WC phase etch of the Co phase and the lye corrosion bit of the acid corrosion bit is the same, and the length of the etch is not more than nine tenths of the length of the drill blade and not less than one tenth of the length of the drill blade.
  • the WC phase ⁇ of the drill bit is etched by the alkali solution, and the etched portion is the tip of the drill bit with the tip and the relationship between the length 1 of the tool tip and the length L of the drill bit groove satisfies L/3 ⁇ l ⁇ L/2 , that is, the length of the etching portion 1 is not more than one-half of the length of the drill blade portion and not less than one third of the length of the drill blade portion;
  • the Co phase of the drill bit is corroded by the acid solution, and the etching portion is the bit portion of the drill bit
  • the relationship between the length of the tool tip and the length 1 of the tool tip and the length L of the drill bit groove satisfies L/3 ⁇ l ⁇ L/2, that is, the length of the etched portion 1 is not more than one-half of the length of the drill blade and is not less than the drill bit.
  • the temperature of the hot wire in the hot wire CVD equipment is 2000-2400 ° C, the pressure in the growth chamber is 1.5-10 KPa; the flow rate of the reaction source gas is 150-320 sc cm; the surface temperature of the substrate is 600-1000 ° C, coating deposition
  • the growth time is 5-20 hours.
  • the Qiqi strong metal vapor vacuum arc ion source (MEVVA source) is subjected to Me ion implantation, and these ions are injected under an electric field of up to five kilovolts to eight kilovolts.
  • the surface of the tool workpiece to be machined and rooted under the surface of the tool base can significantly increase the adhesion of the coating to the tool base.
  • (6) introducing a gas containing at least one of N, C, B elements, such as a CH4, N2 mixed gas, depositing a core layer 3 on the metal transition layer 2 by arc ion plating, the target used
  • the material is a Me target with a gas flow rate of 50 to 500 sccm, arc ion plating with an arc current of 50 to 100 A, a pulse bias peak of -100 to -500 V, and a duty cycle of 10% to 80 ⁇ 3 ⁇ 4.
  • a tetrahedral amorphous carbon film layer is prepared by a physical vapor phase technique, and the carbon target current is 10 to 50 ⁇ , the pulse negative bias voltage is -50 to -200 V, and the duty ratio is 30% to 50%.
  • the base layer 1 (diamond coating or cubic boron nitride layer) is formed by CVD method, mainly because of hot filament CVD
  • the method has a large furnace loading, and the base layer 1 can be uniformly deposited on the surface of the complex tool. As shown in Fig. 1, the Raman spectrum shows that the layer is diamond.
  • the high-energy ions produce strong collisions and cascade collisions on the surface of the tool base, and some high-energy ions replace
  • the original atom of the tool base changes the chemical composition of the tool surface to form a mixed interface on the surface.
  • the mixing interface not only improves the mechanical properties such as strength and hardness of the tool surface, but also enhances the hard coating and the tool base. The combination of strength.
  • the metal Me transition layer 2 and the MeX core layer 3 are deposited by using an arc ion plating technique, mainly utilizing the characteristics of high cathodic arc ion plating ionization rate, which can further improve the bonding force between the coating and the substrate;
  • the novel physical vapor phase technology produces a tetrahedral amorphous carbon film, which enhances the bonding force between the tetrahedral amorphous carbon film and the substrate, so that the thickness of the tetrahedral amorphous carbon film can be increased to 5 ⁇ m or more.
  • the diamond/Me/MeX/tetrahedral amorphous carbon film prepared by the method provided by the present invention has a nanohardness of 40 to 80 GPa of the top 4 tetrahedral amorphous carbon film, as shown in FIG. 3; top layer 4 tetrahedral amorphous
  • the coefficient of friction of the carbon film is less than 0.1; the nano-hardness of the core layer 3MeX is as high as 30 to 45 GPa or higher, and the bonding strength of the same layer to the cemented carbide substrate is greater than 130N.
  • the tetrahedral amorphous carbon film of the top layer 4 (the diamond-like structure of the ta-c structure) has a nano hardness of 40 to 80 GPa, and the tetrahedral amorphous carbon film can be prepared by physical vapor deposition, and the tetrahedral amorphous carbon film and the substrate are improved.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)

Abstract

A cutter composite coating, a cutter, and a method for preparing a cutter composite coating. The cutter composite coating comprises a basal layer (1) coated on a cutter body and an outermost top layer (4). The basal layer (1) is a diamond layer or a cubic boron nitride layer and has a thickness of 1 to 40 μm, and the top layer (4) is a tetrahedral amorphous carbon film layer and has a thickness of 0.01 to 15 μm. The cutter comprises a cutter substrate and the cutter composite coating. The method for preparing a cutter composite coating is used for preparing the cutter composite coating. According to the provided cutter composite coating, cutter, and method for preparing a cutter composite coating, by depositing, on the surface, a multilayer nanocomposite coating having high hardness, a low coefficient of friction, a good bonding force and good high temperature resistance, the wear resistance of a cutter is significantly improved, the drill bit breakage rate is greatly decreased, and the problems of a built-up edge and chip removal flute blockage are avoided.

Description

刀具复合涂层、 刀具和刀具复合涂层的制备方法 技术领域  Method for preparing tool composite coating, tool and tool composite coating
[0001] 本发明属于刀具涂层技术领域， 尤其涉及一种刀具复合涂层、 刀具和刀具复合 涂层的制备方法。  [0001] The present invention belongs to the technical field of tool coating, and in particular relates to a method for preparing a tool composite coating, a tool and a tool composite coating.
背景技术  Background technique
[0002] 随着经济社会的发展， 市场上出现大量的石墨材料、 铝合金、 炭纤维复合材料 、 金属复合材料、 陶瓷基板等难加工材料， 对刀具提出了更高的要求。 首先该 类材料硬度高， 硬质合金微型刀具的磨损极大， 寿命很短； 其次刃口容易形成 积削瘤， 严重降低加工品质； 再次切屑容易堵塞在刀具的排屑槽内， 造成排尘 不良， 严重降低产品品质。 由于未涂层微型刀具不能满足现有加工要求， 急需 将新型涂层材料运用到微型刀具上， 以克服这一加工难题。  [0002] With the development of economy and society, a large number of difficult materials such as graphite materials, aluminum alloys, carbon fiber composite materials, metal composite materials, ceramic substrates, etc. appear on the market, which puts higher requirements on tools. First of all, the hardness of the material is high, the hardness of the micro-tools is extremely long, and the service life is very short. Secondly, the cutting edge is easy to form a film-forming tumor, which seriously reduces the processing quality. The chip is easily clogged in the chip flute of the tool, causing dust discharge. Bad, seriously reducing product quality. Since uncoated micro-tools cannot meet the existing processing requirements, it is urgent to apply new coating materials to micro-tools to overcome this processing problem.
[0003] 为了提高微型刀具的寿命及加工质量， 国内外很多企业都对微型刀具进行表面 改性处理， 如化学气相沉积 （CVD) 和物理气相沉积 （PVD) 等， 同吋该技术 已经广泛运用在钢铁等金属加工上， 可以提升未微型刀具的寿命达 2倍以上， 但 是在石墨材料、 铝合金、 炭纤维复合材料、 金属复合材料、 陶瓷基板等难加工 材料的运用较少， 急需幵发新型材料解决该问题。  [0003] In order to improve the life and processing quality of micro-tools, many companies at home and abroad have surface modification of micro-tools, such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), which have been widely used. In metal processing such as steel, the life of unmicro-tools can be increased by more than 2 times, but there are fewer applications of difficult-to-machine materials such as graphite materials, aluminum alloys, carbon fiber composite materials, metal composite materials, and ceramic substrates. New materials solve this problem.
技术问题  technical problem
[0004] 本发明的目的在于克服上述现有技术的不足， 提供了一种刀具复合涂层、 刀具 和刀具复合涂层的制备方法， 其可以显著提升微型刀具的耐磨性能， 又能避免 积削瘤和堵塞排屑槽问题。  [0004] The object of the present invention is to overcome the above deficiencies of the prior art, and to provide a method for preparing a composite coating of a tool, a tool and a tool composite coating, which can significantly improve the wear resistance of the micro tool and avoid the product. Decompression and blockage of the flutes.
问题的解决方案  Problem solution
技术解决方案  Technical solution
[0005] 本发明的技术方案是： 一种刀具复合涂层， 包括涂覆于刀具本体的基底层和位 于最外侧的顶层， 所述基底层为金刚石层或立方氮化硼层， 所述基底层的厚度 为 1至 40μηι， 所述顶层为四面体非晶碳膜层且厚度为 0.01至 15μηι。  [0005] The technical solution of the present invention is: a tool composite coating comprising a base layer coated on a tool body and an outermost top layer, the base layer being a diamond layer or a cubic boron nitride layer, the base The thickness of the underlayer is 1 to 40 μm, and the top layer is a tetrahedral amorphous carbon film layer and has a thickness of 0.01 to 15 μm.
[0006] 可选地， 所述基底层与所述顶层之间还设置有至少一层中间层， 所述中间层包 括过渡层和核心层中的任意一层， 或者， 所述中间层包括层叠的过渡层和核心 层； 所述过渡层为 Me层且厚度为 0.01至 10μηι， 所述核心层为 MeX层且厚度为 0.0 1至 15μηι， 其中 Me代表 Al、 Ti、 Cr、 V、 Mn、 Fe、 Co、 Ni、 Cu、 Zr等金属元素 以及非金属元素 Si中的至少一种； X代表 N、 C、 B中的一种或两种或三种。 [0006] Optionally, at least one intermediate layer is further disposed between the base layer and the top layer, and the intermediate layer is Including any one of the transition layer and the core layer, or the intermediate layer includes a laminated transition layer and a core layer; the transition layer is a Me layer and has a thickness of 0.01 to 10 μm, and the core layer is a MeX layer and has a thickness It is 0.01 to 15 μm, wherein Me represents at least one of a metal element such as Al, Ti, Cr, V, Mn, Fe, Co, Ni, Cu, Zr and a non-metal element Si; X represents N, C, B One or two or three.
[0007] 本发明还提供了一种刀具， 所述刀具包括刀具基体， 所述刀具基体的部分表面 或全部表面设置有上述的刀具复合涂层。  The present invention also provides a tool comprising a tool base, and a part or all of the surface of the tool base is provided with the above-described tool composite coating.
[0008] 本发明还提供了一种刀具复合涂层的制备方法， 包括以下步骤：  The present invention also provides a method for preparing a tool composite coating, comprising the following steps:
[0009] (1) 制备基底层： 将刀具基体放入 CVD设备中， 通过 CVD设备于刀具基体的 表面形成基底层得到第一半成品， 所述基底层为金刚石层或立方氮化硼层； [0009] (1) preparing a substrate layer: the tool substrate is placed in a CVD apparatus, a first semi-finished product is formed on the surface of the tool substrate by a CVD apparatus, and the substrate layer is a diamond layer or a cubic boron nitride layer;
[0010] (2) 制备四面体非晶碳膜层： 将具有基底层的刀具基体放入物理气相设备中 在最外侧形成四面体非晶碳膜层。 [0010] (2) Preparation of tetrahedral amorphous carbon film layer: A tool substrate having a base layer is placed in a physical vapor phase apparatus to form a tetrahedral amorphous carbon film layer on the outermost side.
[0011] 可选地， 制备所述基底层之后且形成所述四面体非晶碳膜层之前， 所述制备方 法还包括以下两个步骤中的至少一个步骤：  [0011] Optionally, before the preparing the base layer and forming the tetrahedral amorphous carbon film layer, the preparation method further comprises at least one of the following two steps:
[0012] (1) 制备过渡层： 将所述第一半成品放入 PVD复合涂层设备中， 幵启金属蒸 汽真空电弧离子源， 进行 Me离子注入， Me离子注入到第一半成品的表面， 再通 过电弧离子镀技术在第一半成品的表面沉积 Me过渡层， 所述 Me代表 Al、 Ti、 Cr 、 V、 Mn、 Fe、 Co、 Ni、 Cu、 Zr以及非金属元素 Si中的至少一种；  [0012] (1) preparing a transition layer: the first semi-finished product is placed in a PVD composite coating device, a metal vapor vacuum arc ion source is activated, Me ion implantation is performed, and Me ions are implanted into the surface of the first semi-finished product, and then Depositing a Me transition layer on the surface of the first semi-finished product by an arc ion plating technique, the Me representing at least one of Al, Ti, Cr, V, Mn, Fe, Co, Ni, Cu, Zr, and a non-metal element Si;
[0013] (2) 制备核心层： 将所述第二半成品放入电弧离子镀设备中， 通入含 N、 C、 B中至少一种元素的气体， 电弧离子镀设备所用靶材为 Me靶材， 采用电弧离子 镀技术在所述过渡层上沉积形成 MeX核心层并得到第三半成品， 所述 X代表 N、 C、 B中的一种或两种或三种；  [0013] (2) preparing a core layer: the second semi-finished product is placed in an arc ion plating apparatus, and a gas containing at least one of N, C, and B is introduced, and the target used in the arc ion plating apparatus is a Me target. And forming a MeX core layer on the transition layer by using an arc ion plating technique and obtaining a third semi-finished product, wherein the X represents one or two or three of N, C, and B;
[0014] 可选地， 所述过渡层为 Me层且厚度为 0.01至 ΙΟμηι; 所述核心层为 MeX层且厚 度为 0.01至 15μηι， 所述四面体非晶碳膜层的厚度为 0.01至 15μηι。  [0014] Optionally, the transition layer is a Me layer and has a thickness of 0.01 to ΙΟμηι; the core layer is a MeX layer and has a thickness of 0.01 to 15 μm, and the tetrahedral amorphous carbon film layer has a thickness of 0.01 to 15 μm. .
[0015] 可选地， 所述基底层为金刚石层或立方氮化硼层； 所述基底层的厚度为 4至 20 μηι, 所述过渡层为 Me层且厚度为 0.1至 3μηι; 所述核心层的为 0.1至 5μηι， 所述四 面体非晶碳膜层的厚度为 0.05至 5μηι。 可选地， 在制备基底层步骤中， 所述热丝 CVD设备中的热丝的温度为 2000-2400°C、 生长腔体内压力为 1.5-10Kpa， 反应源 气体的流量为 150-320sccm， 刀具基体表面温度为 600-1000°C， 基底层沉积生长 吋间为 5-20小吋。 [0015] Optionally, the base layer is a diamond layer or a cubic boron nitride layer; the base layer has a thickness of 4 to 20 μm, and the transition layer is a Me layer and has a thickness of 0.1 to 3 μm ; The layer is 0.1 to 5 μm, and the tetrahedral amorphous carbon film layer has a thickness of 0.05 to 5 μm. Optionally, in the step of preparing the base layer, the temperature of the hot wire in the hot wire CVD apparatus is 2000-2400 ° C, the pressure in the growth chamber is 1.5-10 Kpa, and the flow rate of the reaction source gas is 150-320 sccm, the cutter The surface temperature of the substrate is 600-1000 ° C, and the basal layer is deposited and grown. It is 5-20 hours in the daytime.
[0016] 可选地， 在制备过渡层步骤中， PVD复合涂层设备的真空达到 5.0xlO-4Pa吋幵 启金属蒸汽真空电弧离子源。  [0016] Optionally, in the step of preparing the transition layer, the vacuum of the PVD composite coating apparatus reaches a 5.0 x 10 -4 Pa 启 metal vapor vacuum arc ion source.
[0017] 可选地， 制备核心层的步骤中， 通入含有^ C、 B中至少任一元素的气体， 如[0017] Optionally, in the step of preparing the core layer, a gas containing at least one of ^ C and B is introduced, such as
CH4、 N2等； 气体的流量为 50至 500sccm， 电弧离子镀的弧电流 50至 100A， 脉冲 偏压峰值 -100至 -500 V， 占空比 10%至 80%。 CH4, N2, etc.; gas flow rate is 50 to 500sccm, arc ion plating arc current 50 to 100A, pulse bias peak -100 to -500 V, duty cycle 10% to 80%.
[0018] 可选地， 在制备核心层步骤中， 电弧离子镀的弧电流 50至 100Α， 脉冲偏压峰值[0018] Optionally, in the step of preparing the core layer, the arc current of the arc ion plating is 50 to 100 Α, and the pulse bias peak value
- 100至 -500 V， 占空比 10%至 80%。 - 100 to -500 V, duty cycle 10% to 80%.
发明的有益效果  Advantageous effects of the invention
有益效果  Beneficial effect
[0019] 本发明所提供的刀具复合涂层、 刀具和刀具复合涂层的制备方法， 通过在刀具 表面沉积出硬度高、 摩擦系数低、 结合力好、 耐高温性好的多层纳米复合涂层 ， 在加工石墨材料、 铝合金、 炭纤维复合材料、 金属复合材料、 陶瓷基板等难 加工材料吋， 既能显著提升刀具的耐磨性能， 大大减少断针率， 提升刀具使用 寿命提高至 4至 20倍， 又能避免积削瘤和堵塞排屑槽问题。  [0019] The method for preparing a composite coating of a tool, a tool and a tool composite coating provided by the invention, by depositing a multi-layer nano composite coating with high hardness, low friction coefficient, good bonding force and high temperature resistance on the surface of the tool Layer, in the processing of graphite materials, aluminum alloys, carbon fiber composites, metal composites, ceramic substrates and other difficult-to-machine materials, can significantly improve the wear resistance of the tool, greatly reduce the needle break rate, improve the tool life to 4 Up to 20 times, it can avoid the problem of accumulating tumors and blocking the flutes.
对附图的简要说明  Brief description of the drawing
附图说明  DRAWINGS
[0020] 为了更清楚地说明本发明实施例中的技术方案， 下面将对实施例中所需要使用 的附图作简单地介绍， 显而易见地， 下面描述中的附图仅仅是本发明的一些实 施例， 对于本领域普通技术人员来讲， 在不付出创造性劳动的前提下， 还可以 根据这些附图获得其他的附图。  [0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings to be used in the embodiments will be briefly described below. Obviously, the drawings in the following description are only some implementations of the present invention. For example, other drawings may be obtained from those of ordinary skill in the art in light of the inventive work.
[0021] 图 1是本发明实施例提供的刀具复合涂层的平面放大示意图； 1 is a plan enlarged view of a tool composite coating provided by an embodiment of the present invention;
[0022] 图 2是本发明实施例提供的刀具复合涂层中四面体非晶碳膜层的 拉曼光谱分 析图； 2 is a Raman spectrum analysis diagram of a tetrahedral amorphous carbon film layer in a tool composite coating according to an embodiment of the present invention;
[0023] 图 3是本发明实施例提供的刀具复合涂层中四面体非晶碳膜层的纳米硬度随压 入深度的变化曲线图。 本发明的实施方式 3 is a graph showing the nanohardness of a tetrahedral amorphous carbon film layer in a tool composite coating according to an embodiment of the present invention as a function of indentation depth. [0023] FIG. Embodiments of the invention
[0024] 为了使本发明的目的、 技术方案及优点更加清楚明白， 以下结合附图及实施例 ， 对本发明进行进一步详细说明。 应当理解， 此处所描述的具体实施例仅仅用 以解释本发明， 并不用于限定本发明。  The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
[0025] 需要说明的是， 当元件被称为 "固定于"或"设置于"另一个元件， 它可以直接在 另一个元件上或者可能同吋存在居中元件。 当一个元件被称为是 "连接于"另一个 元件， 它可以是直接连接到另一个元件或者可能同吋存在居中元件。  [0025] It is to be noted that when an element is referred to as being "fixed" or "in" another element, it can be directly on the other element or possibly the same. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or the same element.
[0026] 还需要说明的是， 本发明实施例中的左、 右、 上、 下等方位用语， 仅是互为相 对概念或是以产品的正常使用状态为参考的， 而不应该认为是具有限制性的。  It should also be noted that the left, right, upper, lower, and the like orientations in the embodiments of the present invention are merely relative concepts or reference to the normal use state of the product, and should not be considered as having Restrictive.
[0027] 如图 1和图 2所示， 本发明实施例提供的一种刀具复合涂层， 包括涂覆于刀具本 体的基底层 1和位于最外侧的顶层 4， 所述基底层 1为金刚石层或立方氮化硼层， 所述基底层 1的厚度为 1至 40μηι， 所述顶层 4为四面体非晶碳膜层且厚度为 0.01至 15μηι, 顶层 4的四面体非晶碳膜 (ta-c结构的类金刚石)的纳米硬度高达 40至 80Gpa ， 可以采用物理气相沉积方式制备四面体非晶碳膜， 提升了四面体非晶碳膜与 基体的结合力， 而且， 由于顶层 4四面体非晶碳膜的摩擦系数可以低于 0.1， 其硬 度高且摩擦系数小， 通过在刀具表面沉积出硬度高、 摩擦系数低、 结合力好、 耐高温性好的多层纳米复合涂层， 在加工石墨材料、 铝合金、 炭纤维复合材料 、 金属复合材料、 陶瓷基板等难加工材料吋， 既能显著提升刀具的耐磨性能， 大大减少断针率， 提升刀具使用寿命至 4至 20倍， 刀具的耐磨性能高， 能避免积 削瘤和堵塞排屑槽等问题。 具体应用中， 四面体非晶碳膜的厚度可以为 0.05至 10 μηι, 优选地， 四面体非晶碳膜的厚度可以为 0.05至 7μηι， 本实施例中， 四面体非 晶碳膜的厚度可以为 0.05至 5μηι， 例如， 0.1至 5μηι。  [0027] As shown in FIG. 1 and FIG. 2, a tool composite coating according to an embodiment of the present invention includes a base layer 1 applied to a cutter body and a top layer 4 located at an outermost side, wherein the base layer 1 is diamond. a layer or a cubic boron nitride layer, the base layer 1 having a thickness of 1 to 40 μm, the top layer 4 being a tetrahedral amorphous carbon film layer and having a thickness of 0.01 to 15 μm, and a top layer 4 tetrahedral amorphous carbon film (ta The -C structure of diamond-like carbon has a nanohardness of 40 to 80 GPa, and a tetrahedral amorphous carbon film can be prepared by physical vapor deposition to enhance the bonding force between the tetrahedral amorphous carbon film and the substrate, and, due to the top layer 4 tetrahedron The amorphous carbon film may have a coefficient of friction of less than 0.1, a high hardness and a small coefficient of friction. By depositing a multilayer nanocomposite coating having high hardness, low friction coefficient, good bonding force and high temperature resistance on the surface of the tool, Processing of difficult-to-machine materials such as graphite materials, aluminum alloys, carbon fiber composite materials, metal composite materials, ceramic substrates, etc., can significantly improve the wear resistance of the tool, greatly reduce the needle breakage rate, and raise the knife To 4 to 20 times the service life, high wear resistance of the tool, to avoid clogging and product cutting flutes problems like tumors. In a specific application, the thickness of the tetrahedral amorphous carbon film may be 0.05 to 10 μm. Preferably, the thickness of the tetrahedral amorphous carbon film may be 0.05 to 7 μm. In this embodiment, the thickness of the tetrahedral amorphous carbon film may be It is 0.05 to 5 μm, for example, 0.1 to 5 μm.
[0028] 具体应用中， 所述基底层 1与所述顶层 4之间还设置有至少一层中间层， 所述中 间层包括过渡层 2和核心层 3中的至少一层， 或者， 所述中间层包括至少一组层 叠的过渡层 2和核心层 3 ; 即可以包括过渡层 2-核心层 3-过渡层 2-核心层 3依次层 叠的结构。  [0028] In a specific application, at least one intermediate layer is further disposed between the base layer 1 and the top layer 4, and the intermediate layer includes at least one of the transition layer 2 and the core layer 3, or The intermediate layer includes at least one set of laminated transition layer 2 and core layer 3; that is, a structure in which the transition layer 2 - core layer 3 - transition layer 2 - core layer 3 are sequentially stacked.
[0029] 所述过渡层 2为 Me层且厚度为 0.01至 10μηι， 所述核心层 3为 MeX层且厚度为 0.01 至 15μηι， 其中 Me代表 Al、 Ti、 Cr、 V、 Mn、 Fe、 Co、 Ni、 Cu、 Zr等金属元素以 及非金属元素 Si中的至少一种， X代表 N、 C、 B中的一种或两种或三种。 所述四 面体非晶碳膜层由为 C元素组成的四面体非晶碳膜层， 由 40%至 95%的 sp3键碳原 子为骨架构成， 优选地， 四面体非晶碳膜层由 40%至 90%的 sp3键碳原子为骨架 构成， 本实施例中， 四面体非晶碳膜层由 50%至 90%的 sp3键碳原子为骨架构成 [0029] The transition layer 2 is a Me layer and has a thickness of 0.01 to 10 μm, and the core layer 3 is a MeX layer and has a thickness of 0.01 to 15 μm, wherein Me represents Al, Ti, Cr, V, Mn, Fe, Co, Metal elements such as Ni, Cu, and Zr are And at least one of the non-metallic elements Si, and X represents one or two or three of N, C, and B. The tetrahedral amorphous carbon film layer is composed of a tetrahedral amorphous carbon film layer composed of C elements, and is composed of 40% to 95% of sp3 bond carbon atoms, preferably a tetrahedral amorphous carbon film layer is 40 % to 90% of the sp3 bond carbon atoms are composed of a skeleton. In this embodiment, the tetrahedral amorphous carbon film layer is composed of 50% to 90% of sp3 bond carbon atoms.
[0030] 具体地， 四面体非晶碳膜层 （ Ta-C) 的 拉曼光谱分析， 如图 2。 [0030] Specifically, a Raman spectrum analysis of a tetrahedral amorphous carbon film layer (Ta-C) is shown in FIG.
[0031] 通过拉曼光谱分析， 确定 Ta-C膜的 ID和 IG值， ID表示 Diamond峰强度， 波数在 1300至 1400 (例如 1340或左右） ； IG表示 Graphite峰强度， 波数在 1500至 1600 ( 例如 1580或左右） 。 ID峰的强度在一定程度上代表着 Sp3键的含量。 拟合方法采 用高斯函数拟合， 峰与横坐标的面积代表 sp2或者 sp3键成分含量。 [0031] The Raman spectrum analysis is used to determine the ID and IG value of the Ta-C film, ID represents the peak intensity of the Diamond, the wave number is 1300 to 1400 (for example, 1340 or so); IG represents the peak intensity of the Graphite, and the wave number is 1500 to 1600 ( For example, 1580 or so). The intensity of the ID peak represents the content of the Sp3 bond to some extent. The fitting method is fitted by a Gaussian function, and the area of the peak and the abscissa represents the content of the sp2 or sp3 bond components.
[0032] 本实施例中， 所述涂层靠近基材的打底层为纯金属 Me层， 厚度为 10至 lOOnm; 过渡层 2为 MeX层， 厚度 80至 300nm; 核心层 3是 MeAlX复合层， 厚度为 0.4至 5.0μ m; 顶层 4为 ta-c结构的类金刚石 （四面体非晶碳膜层） ， 厚度 0.05至 5.0μηι。  [0032] In this embodiment, the primer layer of the coating near the substrate is a pure metal Me layer having a thickness of 10 to 100 nm; the transition layer 2 is a MeX layer having a thickness of 80 to 300 nm; and the core layer 3 is a MeAlX composite layer. The thickness is 0.4 to 5.0 μm; the top layer 4 is a diamond-like (tetrahedral amorphous carbon film layer) having a ta-c structure, and has a thickness of 0.05 to 5.0 μm.
[0033] 本发明实施例还提供了一种刀具， 所述刀具包括刀具基体， 刀具基体的刃径可 以为 0.02至 0.5mm。 所述刀具基体的部分表面或全部表面设置有上述的刀具复合 涂层。 通过在刀具表面沉积出硬度高、 摩擦系数低、 结合力好、 耐高温性好的 多层纳米复合涂层， 在加工石墨材料、 铝合金、 炭纤维复合材料、 金属复合材 料、 陶瓷基板等难加工材料吋， 既能显著提升刀具的耐磨性能， 大大减少断针 率， 提升刀具使用寿命提高至 4至 20倍， 同吋又能保证加工品质， 大幅度提升加 工效率， 降低生产成本。  [0033] Embodiments of the present invention also provide a tool including a tool base, and the tool base may have a blade diameter of 0.02 to 0.5 mm. A part or all of the surface of the tool base is provided with the above-described tool composite coating. By depositing a multi-layer nanocomposite coating with high hardness, low friction coefficient, good bonding force and high temperature resistance on the surface of the tool, it is difficult to process graphite materials, aluminum alloys, carbon fiber composite materials, metal composite materials, ceramic substrates, etc. The processing material 既 can not only improve the wear resistance of the tool significantly, but also greatly reduce the needle breakage rate and increase the service life of the tool to 4 to 20 times. At the same time, the processing quality can be guaranteed, the processing efficiency can be greatly improved, and the production cost can be reduced.
[0034] 本发明实施例还提供一种刀具复合涂层的制备方法， 可用于制备上述刀具复合 涂层和刀具， 包括以下步骤：  [0034] Embodiments of the present invention also provide a method for preparing a tool composite coating, which can be used to prepare the above tool composite coating and tool, and includes the following steps:
[0035] (1) 制备基底层 1 : 将刀具基体放入 CVD设备中， 通过 CVD设备于刀具基体的 表面形成基底层 1， 得到第一半成品； 所述基底层 1可以为金刚石层或立方氮化 [0035] (1) Preparation of the substrate layer 1: The tool substrate is placed in a CVD apparatus, and the base layer 1 is formed on the surface of the tool substrate by a CVD apparatus to obtain a first semi-finished product; the base layer 1 may be a diamond layer or a cubic nitrogen Chemical
[0036] (2) 制备四面体非晶碳膜层： 将具有基底层 1的刀具基体放入物理气相设备中 在最外侧形成四面体非晶碳膜层， 物理气相设备中设置有碳靶， 以在涂层的最 外层形成四面体非晶碳膜层。 [0037] 具体地， 制备四面体非晶碳膜层吋， 所述物理气相设备中碳靶电流为 10至 50A ， 脉冲负偏压峰值为 -50至 -200V, 占空比为 30%至 50%。 [0036] (2) preparing a tetrahedral amorphous carbon film layer: the tool substrate having the base layer 1 is placed in a physical gas phase device to form a tetrahedral amorphous carbon film layer on the outermost side, and a carbon target is disposed in the physical gas phase device, A tetrahedral amorphous carbon film layer is formed on the outermost layer of the coating. [0037] Specifically, a tetrahedral amorphous carbon film layer is prepared, wherein the physical gas phase device has a carbon target current of 10 to 50 A, a pulse negative bias peak of -50 to -200 V, and a duty ratio of 30% to 50. %.
[0038] 具体地， 制备所述基底层 1之后且制备所述四面体非晶碳膜层之前， 所述制备 方法还包括以下两个步骤中的至少一个步骤：  [0038] Specifically, before the preparation of the base layer 1 and before the preparation of the tetrahedral amorphous carbon film layer, the preparation method further comprises at least one of the following two steps:
[0039] (1) 制备过渡层 2: 将所述第一半成品放入 PVD复合涂层设备中， 幵启金属蒸 汽真空电弧离子源， 进行 Me离子注入， Me离子注入到第一半成品的表面， 再电 弧离子镀技术在第一半成品的表面沉积 Me过渡层 2， 其中 Me代表 Al、 Ti、 Cr、 V 、 Mn、 Fe、 Co、 Ni、 Cu、 Zr等金属元素以及非金属元素 Si中的至少一种， 得到 第二半成  [0039] (1) preparing a transition layer 2: the first semi-finished product is placed in a PVD composite coating device, a metal vapor vacuum arc ion source is applied, Me ion implantation is performed, and Me ions are implanted into the surface of the first semi-finished product. Re-arc ion plating technology deposits Me transition layer 2 on the surface of the first semi-finished product, wherein Me represents at least metal elements such as Al, Ti, Cr, V, Mn, Fe, Co, Ni, Cu, Zr and non-metal element Si One, get the second half into
[0040] (2) 制备核心层 3: 将所述第二半成品或第一半成品放入电弧离子镀设备中， 通入含 N、 C、 B中至少一种元素的气体， 电弧离子镀设备所用靶材为 Me靶材， 采用电弧离子镀技术在所述过渡层 2上沉积形成 MeX核心层 3并得到第三半成品 ， 所述 X代表 N、 C、 B中的一种或两种或三种； 再在核心层 3上沉积四面体非晶 碳膜层， 或者， 继续在核心层 3上沉积过渡层 2以及继续在过渡层 2上沉积核心层 3， 最后， 再在涂层的最外侧形成四面体非晶碳膜层。  [0040] (2) preparing the core layer 3: the second semi-finished product or the first semi-finished product is placed in an arc ion plating apparatus, and a gas containing at least one of N, C, and B is used, which is used in an arc ion plating apparatus. The target is a Me target, and a MeX core layer 3 is deposited on the transition layer 2 by an arc ion plating technique to obtain a third semi-finished product, and the X represents one or two or three of N, C, and B. And depositing a tetrahedral amorphous carbon film layer on the core layer 3, or continuing to deposit the transition layer 2 on the core layer 3 and continuing to deposit the core layer 3 on the transition layer 2, and finally, forming on the outermost side of the coating layer A tetrahedral amorphous carbon film layer.
[0041] 具体地， 所述过渡层 2为 Me层且厚度可为 0.01至 ΙΟμηι; 所述核心层 3为 MeX层 的为 0.01至 15μηι， 所述四面体非晶碳膜层的厚度为 0.01至 15μηι。  [0041] Specifically, the transition layer 2 is a Me layer and may have a thickness of 0.01 to ΙΟμηι; the core layer 3 is 0.01 to 15 μm of the MeX layer, and the thickness of the tetrahedral amorphous carbon film layer is 0.01 to 15μηι.
[0042] 具体地，  [0042] Specifically,
所述基底层 1的厚度可为 4至 20μηι， 所述过渡层 2为 Me层且厚度可为 0.1至 3μηι; 所述核心层 3的厚度可为 0.1至 5μηι， 所述四面体非晶碳膜层的厚度为 0.05至 5μηι 。 具体地， 在制备基底层 1步骤中， 所述 CVD设备中的热丝的温度可为 2000-2400 °C、 生长腔体内压力可为 1.5-10Kpa， 反应源气体的流量可为 150-320sccm， 刀具 基体表面温度可为 600-1000°C， 基底层 1沉积生长吋间可为 5-20小吋。 The base layer 1 may have a thickness of 4 to 20 μm, the transition layer 2 may be a Me layer and may have a thickness of 0.1 to 3 μm ; and the core layer 3 may have a thickness of 0.1 to 5 μm, the tetrahedral amorphous carbon film. The thickness of the layer is 0.05 to 5 μm. Specifically, in the step of preparing the base layer 1, the temperature of the hot wire in the CVD apparatus may be 2000-2400 ° C, the pressure in the growth chamber may be 1.5-10 Kpa, and the flow rate of the reaction source gas may be 150-320 sccm. The surface temperature of the tool base can be 600-1000 ° C, and the growth of the base layer 1 can be 5-20 hours.
[0043] 具体地， 在制备过渡层 2步骤中， PVD复合涂层设备的真空达到 5.0xlO-4Pa吋幵 启金属蒸汽真空电弧离子源。  [0043] Specifically, in the step of preparing the transition layer 2, the vacuum of the PVD composite coating apparatus reaches a 5.0×10 −4 Pa吋幵 metal vapor vacuum arc ion source.
[0044] 具体地， 通入含有N、 C、 B元素中至少一种的气体， 如 CH4、 N2等； 气体的流 量为 50至 500sccm， 电弧离子镀的弧电流 50至 100A， 脉冲偏压峰值 -100至 -500 V ， 占空比 10%至 80%。 [0045] 具体地， 在制备核心层 3步骤中， 电弧离子镀的弧电流 50至 100A， 脉冲偏压峰 值 -100至 -500 V， 占空比 10%至 80%。 [0044] Specifically, a gas containing at least one of N, C, and B elements, such as CH4, N2, etc.; a gas flow rate of 50 to 500 sccm, an arc current of arc ion plating of 50 to 100 A, and a pulse bias peak are introduced. -100 to -500 V, duty cycle 10% to 80%. [0045] Specifically, in the step of preparing the core layer 3, the arc current of the arc ion plating is 50 to 100 A, the pulse bias peak is -100 to -500 V, and the duty ratio is 10% to 80%.
[0046] 具体应用中， 在制备基底层 1之前， 对刀具基体进行预处理， 预处理方法包括 以下步骤： [0046] In a specific application, before the preparation of the base layer 1, the tool base is pretreated, and the pretreatment method comprises the following steps:
[0047] (1) 清洁钻头表面； [0047] (1) cleaning the surface of the drill bit;
[0048] (2) 对钻头进行脱 Co化学预处理； 脱 Co化学预处理包括：  [0048] (2) performing a de-co chemical pretreatment on the drill bit; the de-Co chemical pretreatment includes:
[0049] 采用碱液腐蚀钻头的 WC相，  [0049] etching the WC phase of the drill bit with an alkali solution,
[0050] 采用酸液腐蚀钻头的 Co相；  [0050] etching the Co phase of the drill bit with an acid solution;
[0051] (3) 对钻头表面进行表面粗化处理；  [0051] (3) performing surface roughening treatment on the surface of the drill bit;
[0052] 其中， 采用碱液腐蚀钻头的 WC相吋， 浸蚀部位为钻头刃部含刀尖且距离刀尖 的长度 1与钻头沟槽长度 L的关系满足 L1/10≤1≤L9/10， 即钻头刃部的长度为 L， 浸 蚀部位的长度 1大于十分之一 L且小于十分之九 L;  [0052] wherein, the lye is used to corrode the WC phase of the drill bit, the etched portion is the tip of the drill bit, and the relationship between the length 1 of the tool tip and the length L of the drill bit groove satisfies L1/10 ≤ 1 ≤ L9/10 , that is, the length of the drill blade is L, and the length 1 of the etched portion is greater than one tenth of an inch and less than nine tenths of an inch;
[0053] 采用酸液腐蚀钻头的 Co相吋， 浸蚀部位为钻头刃部含刀尖且距离刀尖的长度 1 与钻头沟槽长度 L的关系满足 L1/10≤1≤L9/10， ， 即钻头刃部的长度为 L， 浸蚀部 位的长度 1大于十分之一 L且小于十分之九！^。 采用酸液腐蚀钻头的 Co相和碱液腐 蚀钻头的 WC相吋浸蚀的长度相同， 浸蚀的长度不大于钻头刃部长度的十分之九 且不小于钻头刃部长度的十分之一， 既克服了脱 Co处理对刀具基体强度产生的 不利影响， 又也保证了金刚石涂层与基体具有良好的结合力， 同吋不会影响钻 头的加工性能， 钻头刃部强度不会明显降低， 在高速加工吋不易产生断刀的现 象。 本实施例中， 采用碱液腐蚀钻头的 WC相吋， 浸蚀部位为钻头刃部含刀尖且 距离刀尖的长度 1与钻头沟槽长度 L的关系满足 L/3≤l≤L/2， 即浸蚀部位 1的长度不 大于钻头刃部长度的二分之一且不小于钻头刃部长度的三分之一； 采用酸液腐 蚀钻头的 Co相吋， 浸蚀部位为钻头刃部含刀尖且距离刀尖的长度 1与钻头沟槽长 度 L的关系满足 L/3≤l≤L/2， 即浸蚀部位 1的长度不大于钻头刃部长度的二分之一 且不小于钻头刃部长度的三分之一。  [0053] The acid phase etches the Co phase of the drill bit, and the etched portion has a blade tip and the relationship between the length 1 of the tool tip and the length L of the bit groove satisfies L1/10≤1≤L9/10, That is, the length of the drill blade is L, and the length of the etched portion is greater than one-tenth of L and less than ten-tenths! ^. The length of the WC phase etch of the Co phase and the lye corrosion bit of the acid corrosion bit is the same, and the length of the etch is not more than nine tenths of the length of the drill blade and not less than one tenth of the length of the drill blade. , not only overcomes the adverse effect of the Co-treatment on the strength of the tool base, but also ensures that the diamond coating has a good bonding force with the substrate, and the same does not affect the processing performance of the drill bit, and the strength of the drill blade edge is not significantly reduced. In the case of high speed machining, it is not easy to produce a broken knife. In this embodiment, the WC phase 腐蚀 of the drill bit is etched by the alkali solution, and the etched portion is the tip of the drill bit with the tip and the relationship between the length 1 of the tool tip and the length L of the drill bit groove satisfies L/3 ≤ l ≤ L/2 , that is, the length of the etching portion 1 is not more than one-half of the length of the drill blade portion and not less than one third of the length of the drill blade portion; the Co phase of the drill bit is corroded by the acid solution, and the etching portion is the bit portion of the drill bit The relationship between the length of the tool tip and the length 1 of the tool tip and the length L of the drill bit groove satisfies L/3 ≤ l ≤ L/2, that is, the length of the etched portion 1 is not more than one-half of the length of the drill blade and is not less than the drill bit. One third of the length of the blade.
[0054] 具体应用流程可以参考如下：  [0054] The specific application process can be referred to as follows:
[0055] (1) 首先采用高纯无水酒精在大功率超声波设备中对刀具基体进行清洗， 然 后采用酸碱两步法对刀具基体进行表面脱 Co化学预处理； [0056] (2) 采用热丝 CVD技术制备超硬复合涂层的第一层 （基底层 1) ， 第一层为金 刚石层且元素为碳 （第一层也可为立方氮化硼层） 。 热丝 CVD设备中热丝的温 度为 2000-2400°C、 生长腔体内压力为 1.5-10KPa; 反应源气体的流量为 150-320sc cm; 基材表面温度为 600-1000°C， 涂层沉积生长吋间为 5-20小吋。 [0055] (1) First, high-purity anhydrous alcohol is used to clean the tool base in a high-power ultrasonic device, and then the surface of the tool base is subjected to Co chemical pretreatment by a two-step acid-base method; [0056] (2) preparing a first layer (base layer 1) of the super-hard composite coating by a hot filament CVD technique, the first layer being a diamond layer and the element being carbon (the first layer may also be a cubic boron nitride layer) . The temperature of the hot wire in the hot wire CVD equipment is 2000-2400 ° C, the pressure in the growth chamber is 1.5-10 KPa; the flow rate of the reaction source gas is 150-320 sc cm; the surface temperature of the substrate is 600-1000 ° C, coating deposition The growth time is 5-20 hours.
[0057] (3) 将已经完成金刚石层制备的刀具基体装夹在 PVD复合涂层设备中。  [0057] (3) The tool substrate that has completed the diamond layer preparation is clamped in the PVD composite coating apparatus.
[0058] (4) 当真空达到 5.0xlO-4Pa， 幵启强流金属蒸汽真空电弧离子源 （MEVVA源 ) ， 进行 Me离子注入， 这些离子在高达五千伏至八千伏的电场下， 注入到待加 工的刀具工件的表面， 并扎根在刀具基体 （硬质合金） 表面下一定深度， 可以 显著提升涂层与刀具基体的结合力。  [0058] (4) When the vacuum reaches 5.0xlO-4Pa, the Qiqi strong metal vapor vacuum arc ion source (MEVVA source) is subjected to Me ion implantation, and these ions are injected under an electric field of up to five kilovolts to eight kilovolts. The surface of the tool workpiece to be machined and rooted under the surface of the tool base (hard alloy) can significantly increase the adhesion of the coating to the tool base.
[0059] (5) 采用电弧离子镀技术在基底层 1的表面沉积 Me金属过渡层 2， 弧电流 50至 100A, 脉冲偏压峰值 -100至 -500 V， 占空比 10%至 80%  [0059] (5) depositing a Me metal transition layer 2 on the surface of the base layer 1 by arc ion plating, an arc current of 50 to 100 A, a pulse bias peak of -100 to -500 V, and a duty ratio of 10% to 80%.
[0060] (6) ， 通入含有N、 C、 B元素中至少一种的气体， 如通入 CH4、 N2混合气体 ， 采用电弧离子镀技术在金属过渡层 2上面沉积核心层 3， 所用靶材为 Me靶材， 气体的流量为 50至 500sccm， 电弧离子镀的弧电流 50至 100A， 脉冲偏压峰值 -100 至 -500 V, 占空比 10%至 80<¾。  [0060] (6), introducing a gas containing at least one of N, C, B elements, such as a CH4, N2 mixed gas, depositing a core layer 3 on the metal transition layer 2 by arc ion plating, the target used The material is a Me target with a gas flow rate of 50 to 500 sccm, arc ion plating with an arc current of 50 to 100 A, a pulse bias peak of -100 to -500 V, and a duty cycle of 10% to 80 < 3⁄4.
[0061] (7) 采用物理气相技术制备四面体非晶碳膜层， 碳靶电流 10至 50Α， 脉冲负偏 压峰值 -50至 -200V, 占空比 30%至 50%。  [0061] (7) A tetrahedral amorphous carbon film layer is prepared by a physical vapor phase technique, and the carbon target current is 10 to 50 Α, the pulse negative bias voltage is -50 to -200 V, and the duty ratio is 30% to 50%.
[0062] (8) 冷却取样。  (8) Cooling sampling.
[0063] 本发明实施例所提供的刀具复合涂层、 刀具和刀具复合涂层的制备方法， 采用 CVD方法制作基底层 1 (金刚石涂层或立方氮化硼层） ， 主要是因为热丝 CVD方 法装炉量大， 可在复杂刀具表面均匀沉积基底层 1， 如图 1， Raman光谱图显示该 层为金刚石。  [0063] The preparation method of the tool composite coating, the tool and the tool composite coating provided by the embodiments of the present invention, the base layer 1 (diamond coating or cubic boron nitride layer) is formed by CVD method, mainly because of hot filament CVD The method has a large furnace loading, and the base layer 1 can be uniformly deposited on the surface of the complex tool. As shown in Fig. 1, the Raman spectrum shows that the layer is diamond.
[0064] 制备中间层 （过渡层 2) 吋， 通过采用强流金属蒸汽真空电弧离子源 （MEVVA 源） 产生的 Me等离子体进行离子注入和清洗， 改变微型刀具表面的物理化学性 育^ 首先， 离子源产生的高能离子撞击刀具表面吋， 高能离子对刀具产生强烈 的溅射作用， 可以清除吸附在刀具表面的气体、 液体和粉尘等杂质， 为硬质涂 层的沉积提供极其洁净的表面， 增强微型刀具与后续的硬质涂层的结合力； 其 次， 高能离子在刀具基体表面产生强烈的碰撞和级联碰撞， 部分高能离子取代 刀具基体原有的原子， 改变刀具表面的化学成分， 在表面形成一层混合界面， 该混合界面既提高了刀具表面的强度、 硬度等力学性能， 同吋也可以增强硬质 涂层与刀具基体的结合力。 [0064] Preparing an intermediate layer (transition layer 2) 吋, by using a Me plasma generated by a high-flow metal vapor vacuum arc ion source (MEVVA source) for ion implantation and cleaning, changing the physicochemical properties of the surface of the micro-tool The high-energy ions generated by the ion source hit the surface of the tool. The high-energy ions have a strong sputtering effect on the tool, which can remove impurities such as gases, liquids and dust adsorbed on the surface of the tool, providing an extremely clean surface for the deposition of the hard coating. Enhance the bonding force between the micro-tool and the subsequent hard coating; Secondly, the high-energy ions produce strong collisions and cascade collisions on the surface of the tool base, and some high-energy ions replace The original atom of the tool base changes the chemical composition of the tool surface to form a mixed interface on the surface. The mixing interface not only improves the mechanical properties such as strength and hardness of the tool surface, but also enhances the hard coating and the tool base. The combination of strength.
[0065] 通过采用电弧离子镀技术沉积金属 Me过渡层 2与 MeX核心层 3， 主要是利用了 阴极电弧离子镀离化率高的特点， 能够进一步提高涂层与基材的结合力； 通过 采用新型物理气相技术制备四面体非晶碳膜， 提升了四面体非晶碳膜与基体的 结合力， 使得四面体非晶碳膜的厚度可以增加到 5μηι或以上。  [0065] The metal Me transition layer 2 and the MeX core layer 3 are deposited by using an arc ion plating technique, mainly utilizing the characteristics of high cathodic arc ion plating ionization rate, which can further improve the bonding force between the coating and the substrate; The novel physical vapor phase technology produces a tetrahedral amorphous carbon film, which enhances the bonding force between the tetrahedral amorphous carbon film and the substrate, so that the thickness of the tetrahedral amorphous carbon film can be increased to 5 μm or more.
[0066] 通过本发明提供的方法制备的金刚石 /Me/MeX/四面体非晶碳膜， 顶层 4四面体 非晶碳膜的纳米硬度高达 40至 80GPa， 如图 3; 顶层 4四面体非晶碳膜的摩擦系 数低于 0.1 ; 核心层 3MeX的纳米硬度高达 30至 45Gpa或更高， 同吋与硬质合金基 材的结合力大于 130N。 顶层 4的四面体非晶碳膜 (ta-c结构的类金刚石)的纳米硬度 高达 40至 80Gpa， 可以采用物理气相沉积方式制备四面体非晶碳膜， 提升了四面 体非晶碳膜与基体的结合力， 而且， 由于顶层 4四面体非晶碳膜的摩擦系数可以 低于 0.1， 其硬度高且摩擦系数小， 通过在刀具表面沉积出硬度高、 摩擦系数低 、 结合力好、 耐高温性好的多层纳米复合涂层， 在加工石墨材料、 铝合金、 炭 纤维复合材料、 金属复合材料、 陶瓷基板等难加工材料吋， 既能显著提升刀具 的耐磨性能， 大大减少断针率， 提升刀具使用寿命至 4至 20倍， 又能避免积削瘤 和堵塞排屑槽问题。  [0066] The diamond/Me/MeX/tetrahedral amorphous carbon film prepared by the method provided by the present invention has a nanohardness of 40 to 80 GPa of the top 4 tetrahedral amorphous carbon film, as shown in FIG. 3; top layer 4 tetrahedral amorphous The coefficient of friction of the carbon film is less than 0.1; the nano-hardness of the core layer 3MeX is as high as 30 to 45 GPa or higher, and the bonding strength of the same layer to the cemented carbide substrate is greater than 130N. The tetrahedral amorphous carbon film of the top layer 4 (the diamond-like structure of the ta-c structure) has a nano hardness of 40 to 80 GPa, and the tetrahedral amorphous carbon film can be prepared by physical vapor deposition, and the tetrahedral amorphous carbon film and the substrate are improved. The bonding force, and, because the friction coefficient of the top 4 tetrahedral amorphous carbon film can be less than 0.1, the hardness is high and the friction coefficient is small, by depositing high hardness on the surface of the tool, low friction coefficient, good bonding force, high temperature resistance Good multi-layer nanocomposite coating, in the processing of difficult materials such as graphite materials, aluminum alloys, carbon fiber composites, metal composites, ceramic substrates, etc., can significantly improve the wear resistance of the tool and greatly reduce the needle breakage rate. It can increase the service life of the tool by 4 to 20 times, and avoid the problem of accumulating the tumor and blocking the flute.
[0067] 以上所述仅为本发明的较佳实施例而已， 并不用以限制本发明， 凡在本发明的 精神和原则之内所作的任何修改、 等同替换或改进等， 均应包含在本发明的保 护范围之内。  The above description is only the preferred embodiment of the present invention, and is not intended to limit the present invention. Any modifications, equivalent substitutions or improvements made within the spirit and principles of the present invention should be included in the present invention. Within the scope of protection of the invention.

Claims

权利要求书 Claim
1.一种刀具复合涂层， 其特征在于， 包括涂覆于刀具本体的基底层和 位于最外侧的顶层， 所述基底层为金刚石层或立方氮化硼层， 所述基 底层的厚度为 1至 40μηι， 所述顶层为四面体非晶碳膜层且厚度为 0.01 至 15μηι。  A tool composite coating comprising: a base layer applied to a tool body and a top layer located at an outermost side, wherein the base layer is a diamond layer or a cubic boron nitride layer, and the thickness of the base layer is 1 to 40 μm, the top layer is a tetrahedral amorphous carbon film layer and has a thickness of 0.01 to 15 μm.
2.如权利要求 1所述的刀具复合涂层， 其特征在于， 所述基底层与所 述顶层之间还设置有至少一层中间层， 所述中间层包括过渡层和核心 层中的任意一层， 或者， 所述中间层包括层叠的过渡层和核心层； 所述过渡层为 Me层且厚度为 0.01至 10μηι， 所述核心层为 MeX层且厚 度为 0.01至 15μηι， 其中 Me代表 Al、 Ti、 Cr、 V、 Mn、 Fe、 Co、 Ni、 Cu、 Zr及非金属元素 Si中的至少一种， X代表 N、 C、 B中的一种或两 种或三种。  The tool composite coating according to claim 1, wherein at least one intermediate layer is further disposed between the base layer and the top layer, and the intermediate layer includes any one of a transition layer and a core layer. a layer, or the intermediate layer comprises a laminated transition layer and a core layer; the transition layer is a Me layer and has a thickness of 0.01 to 10 μm, and the core layer is a MeX layer and has a thickness of 0.01 to 15 μm, wherein Me represents Al. At least one of Ti, Cr, V, Mn, Fe, Co, Ni, Cu, Zr and a non-metal element Si, and X represents one or two or three of N, C, and B.
3.—种刀具， 其特征在于， 所述刀具包括刀具基体， 所述刀具基体的 部分表面或全部表面设置有如权利要求 1或 2所述的刀具复合涂层。 一种刀具复合涂层的制备方法， 其特征在于， 包括以下步骤：  A tool according to the invention, characterized in that the tool comprises a tool base, and a part or all of the surface of the tool base is provided with the tool composite coating according to claim 1 or 2. A method for preparing a tool composite coating, comprising the steps of:
(1) 制备基底层： 将刀具基体放入 CVD设备中， 通过 CVD设备于刀 具基体的表面形成基底层得到第一半成品， 所述基底层为金刚石层或 立方氮化硼层；  (1) preparing a substrate layer: placing a tool substrate into a CVD apparatus, and forming a base layer on a surface of the tool base by a CVD apparatus to obtain a first semi-finished product, the base layer being a diamond layer or a cubic boron nitride layer;
(2) 制备四面体非晶碳膜层： 将具有基底层的刀具基体放入物理气 相设备中在最外侧形成四面体非晶碳膜层。  (2) Preparation of tetrahedral amorphous carbon film layer: A tool base having a base layer is placed in a physical gas phase device to form a tetrahedral amorphous carbon film layer on the outermost side.
[权利要求 5] 5.如权利要求 4所述的刀具复合涂层的制备方法， 其特征在于， 制备 所述基底层之后且形成所述四面体非晶碳膜层之前， 所述制备方法还 包括以下两个步骤中的至少一个步骤： [Claim 5] The method for preparing a tool composite coating according to claim 4, wherein the preparation method is further after the base layer is prepared and before the tetrahedral amorphous carbon film layer is formed Includes at least one of the following two steps:
(1) 制备过渡层： 将所述第一半成品放入 PVD复合涂层设备中， 幵 启金属蒸汽真空电弧离子源， 进行 Me离子注入， Me离子注入到第一 半成品的表面， 再通过电弧离子镀技术在第一半成品的表面沉积 Me 过渡层， 所述 Me代表 Al、 Ti、 Cr、 V、 Mn、 Fe、 Co、 Ni、 Cu、 Zr以 及非金属元素 Si中的至少一种； (1) Preparing a transition layer: placing the first semi-finished product into a PVD composite coating device, opening a metal vapor vacuum arc ion source, performing Me ion implantation, injecting Me ions into the surface of the first semi-finished product, and then passing the arc ion The plating technique deposits a Me transition layer on the surface of the first semi-finished product, and the Me represents Al, Ti, Cr, V, Mn, Fe, Co, Ni, Cu, Zr And at least one of the non-metallic elements Si;
(2) 制备核心层： 将所述第二半成品放入电弧离子镀设备中， 通入 含^ C、 B中至少一种元素的气体， 电弧离子镀设备所用靶材为 Me 靶材， 采用电弧离子镀技术在所述过渡层上沉积形成 MeX核心层并得 到第三半成品， 所述 X代表 N、 C、 B中的一种或两种或三种。  (2) preparing a core layer: placing the second semi-finished product into an arc ion plating apparatus, and introducing a gas containing at least one element of C and B, and the target used for the arc ion plating apparatus is a Me target, using an electric arc An ion plating technique deposits a MeX core layer on the transition layer and obtains a third semi-finished product, the X representing one or two or three of N, C, and B.
6.如权利要求 5所述的刀具复合涂层的制备方法， 其特征在于， 所述过渡层为 Me层且厚度为 0.01至 ΙΟμηι; 所述核心层为 MeX层且厚 度为 0.01至 15μηι， 所述四面体非晶碳膜层的厚度为 0.01至 15μηι。The method for preparing a tool composite coating according to claim 5, wherein the transition layer is a Me layer and has a thickness of 0.01 to ΙΟμηι; the core layer is a MeX layer and has a thickness of 0.01 to 15 μm. The tetrahedral amorphous carbon film layer has a thickness of 0.01 to 15 μm.
7.如权利要求 4所述的刀具复合涂层的制备方法， 其特征在于， 所述 基底层为金刚石层或立方氮化硼层； 所述基底层的厚度为 4至 20μηι， 所述过渡层为 Me层且厚度为 0.1至 3μηι; 所述核心层的为 0.1至 5μηι， 所述四面体非晶碳膜层的厚度为 0.05至 5μηι。 The method of preparing a tool composite coating according to claim 4, wherein the base layer is a diamond layer or a cubic boron nitride layer; the base layer has a thickness of 4 to 20 μm, and the transition layer It is a Me layer and has a thickness of 0.1 to 3 μm ; the core layer is 0.1 to 5 μm, and the tetrahedral amorphous carbon film layer has a thickness of 0.05 to 5 μm.
8.如权利要求 4所述的刀具复合涂层的制备方法， 其特征在于， 在制 备基底层步骤中， 所述热丝 CVD设备中的热丝的温度为 2000-2400°C 、 生长腔体内压力为 1.5-10Kpa， 反应源气体的流量为 150-320sccm， 刀具基体表面温度为 600-1000°C， 基底层沉积生长吋间为 5-20小吋。 The method for preparing a tool composite coating according to claim 4, wherein in the step of preparing the base layer, the temperature of the hot wire in the hot wire CVD apparatus is 2000-2400 ° C, and the growth chamber is The pressure is 1.5-10Kpa, the flow rate of the reaction source gas is 150-320sccm, the surface temperature of the tool base is 600-1000°C, and the growth of the base layer is 5-20 hours.
9.如权利要求 5所述的刀具复合涂层的制备方法， 其特征在于， 制备 核心层的步骤中， 通入含有N、 C、 B中至少任一种元素的气体； 气体 的流量为 50至 500sccm， 电弧离子镀的弧电流 50至 100A， 脉冲偏压峰 值 - 100至 -500 V， 占空比 10%至 80%。 The method for preparing a tool composite coating according to claim 5, wherein in the step of preparing the core layer, a gas containing at least one of N, C, and B is introduced; the flow rate of the gas is 50. To 500 sccm, the arc current of arc ion plating is 50 to 100 A, the peak value of the pulse bias is -100 to -500 V, and the duty ratio is 10% to 80%.
10.如权利要求 5所述的刀具复合涂层的制备方法， 其特征在于， 在制 备核心层步骤中， 电弧离子镀的弧电流 50至 100Α， 脉冲偏压峰值 -100 至 -500 V, 占空比 10%至 80%。  The method for preparing a tool composite coating according to claim 5, wherein in the step of preparing the core layer, the arc current of the arc ion plating is 50 to 100 Α, and the pulse bias peak is -100 to -500 V, accounting for The ratio is 10% to 80%.
PCT/CN2016/111782 2016-12-23 2016-12-23 Cutter composite coating, cutter, and method for preparing cutter composite coating WO2018112912A1 (en)

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