WO2018110034A1 - Inkjet head, inkjet head manufacturing method and inkjet recording device - Google Patents

Inkjet head, inkjet head manufacturing method and inkjet recording device Download PDF

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Publication number
WO2018110034A1
WO2018110034A1 PCT/JP2017/035732 JP2017035732W WO2018110034A1 WO 2018110034 A1 WO2018110034 A1 WO 2018110034A1 JP 2017035732 W JP2017035732 W JP 2017035732W WO 2018110034 A1 WO2018110034 A1 WO 2018110034A1
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WO
WIPO (PCT)
Prior art keywords
nozzle
ink
ink jet
manufacturing
layer
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PCT/JP2017/035732
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French (fr)
Japanese (ja)
Inventor
下村　明久
綾子 鈴木
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コニカミノルタ株式会社
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Priority to JP2018556199A priority Critical patent/JPWO2018110034A1/en
Publication of WO2018110034A1 publication Critical patent/WO2018110034A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles

Definitions

  • the present invention relates to an inkjet head, a method for manufacturing an inkjet head, and an inkjet recording apparatus. More specifically, a liquid repellent layer capable of maintaining sufficient reliability and durability is formed on a nozzle surface to prevent liquid from adhering to the nozzle surface.
  • the present invention relates to an ink jet head capable of discharging excellent droplets, an ink jet head manufacturing method, and an ink jet recording apparatus.
  • an ink jet recording apparatus (ink jet printer) that forms an image on a recording medium by ejecting ink droplets from nozzles of an ink jet head.
  • ink jet printer when ink droplets are ejected, the ink adheres to the nozzle surface (around the nozzle ejection side opening) due to the effects of ink mist generated in the printer and ink rebound from the recording medium. May end up. It is known that when ink is adhered to the nozzle surface, the ejection angle is bent due to the influence of the ink adhered to the nozzle surface when ink droplets are ejected from the nozzle.
  • liquid repellent layer fluorine is removed by a dehydration condensation reaction by silane coupling ([—OH] + [HO—Si—RF] ⁇ [H 2 O] + [— O—Si—RF]).
  • a film formed by bonding an organic functional group is known (Patent Document 1).
  • a layer having improved durability using a diamond-like carbon (DLC) film containing fluorine has been proposed (Patent Documents 2 and 3).
  • JP 2007-230061 A JP 2012-091380 A Japanese Patent Laying-Open No. 2015-085616
  • the liquid repellency of the liquid repellent layer as described above depends on the fluorine doping amount. Since the liquid repellency only needs to be expressed on the surface of the liquid repellent layer, fluorine may be contained only in the vicinity of the surface of the liquid repellent layer. However, in the liquid repellent layer in the conventional ink jet head, since the entire liquid repellent layer contains fluorine uniformly, the reliability and durability of the entire liquid repellent layer may not be sufficiently maintained.
  • the present invention forms a liquid repellent layer that can maintain sufficient reliability and durability on the nozzle surface facing the recording medium, prevents the liquid from adhering to the nozzle surface, and discharges excellent droplets. It is an object of the present invention to provide an inkjet head, an inkjet head manufacturing method, and an inkjet recording apparatus that can be performed.
  • An inkjet head having a nozzle plate on which at least one nozzle is formed and ejecting droplets from the nozzle to form an image on a recording medium
  • a liquid repellent layer in which a first layer made of a non-single-crystal carbon film and a second layer made of a fluorine-containing non-single-crystal carbon film are laminated is formed around the discharge side opening of the nozzle head.
  • a method of manufacturing an inkjet head having a nozzle plate on which at least one nozzle is formed, and ejecting droplets from the nozzle to form an image on a recording medium Forming the nozzle, A first layer made of a non-single crystal carbon film is formed around the discharge side opening of the nozzle, A liquid repellent layer is formed by laminating a second layer made of a fluorine-containing non-single-crystal carbon film on the first layer, A method of manufacturing an ink jet head, wherein the surface of the liquid repellent layer is masked to perform a process of eliminating liquid repellency on the inner wall surface of the nozzle. 9.
  • 14 The method of manufacturing an ink jet head according to any one of 8 to 11, wherein the nozzle is formed by laser processing on a flat nozzle plate material.
  • 15. The method of manufacturing an ink jet head according to any one of 8 to 12 and 14, wherein the nozzle plate is formed of stainless steel. 16.
  • a liquid repellent layer capable of maintaining sufficient reliability and durability is formed on the nozzle surface facing the recording medium, preventing liquid from adhering to the nozzle surface, and good droplet discharge.
  • the perspective view (a) and bottom view (b) which show the ink jet head concerning the present invention 1 is an exploded perspective view showing the main part of the inkjet head shown in FIG.
  • FIG. 2 is an exploded perspective view schematically showing the head chip and the wiring board shown in FIG.
  • FIG. 2 is a plan view schematically showing the head chip shown in FIG. Sectional drawing which shows the structure of the nozzle plate of the inkjet head shown in FIG.
  • the figure explaining the manufacturing method of the inkjet head which concerns on this invention The figure explaining the other example of the manufacturing method of the inkjet head which concerns on this invention Sectional drawing which shows the manifold with which the inkjet head shown in FIG. 1 is equipped
  • the perspective view which shows the structure of the principal part of the inkjet recording device which concerns on this invention.
  • FIG. 1 is a perspective view (a) and a bottom view (b) showing an inkjet head 100 according to the present invention.
  • FIG. 2 is an exploded perspective view showing a main part of the inkjet head 100.
  • FIG. 3 is an exploded perspective view schematically showing the head chip and the wiring board shown in FIG.
  • the ink discharge direction from the nozzle 11a (see FIG. 3) of the inkjet head 100 is referred to as “downward”, and the arrangement direction of the plurality of nozzles 11a is referred to as “channel row direction” or “nozzle row direction”.
  • the horizontal direction orthogonal to the “channel row direction” is referred to as “side”.
  • “Upper” and “lower” mean “upper vertical direction” and “lower vertical direction”.
  • the use state of the ink jet head 100 of the present invention is not limited to the state in which the ink discharge surface faces downward in the vertical direction, and may be used while being inclined.
  • the ink jet head 100 of this embodiment is mounted on an ink jet recording apparatus (ink jet printer) described later.
  • the inkjet head 100 has a head chip 1 having a plurality of channels 13 in which nozzles 11 a communicate with each other.
  • Ink is introduced from the manifold 5 into the channel 13 of the head chip 1.
  • the manifold 5 is housed inside the housing 6.
  • the housing 6 covers the periphery of the head chip 1.
  • a common ink chamber is formed for storing ink and supplying ink to each channel 13.
  • the bottom surface of the housing 6 is opened, and the bottom surface opening is closed by attaching the cap receiving plate 7.
  • a cover member 9 is attached to the housing 6 as shown in FIG.
  • the manifold 5 is provided with an ink supply tube 5a and an ink recovery tube 5b. Connection portions 7a and 7b are attached to the ink supply tube 5a and the ink recovery tube 5b, respectively.
  • the ink jet head 100 has a wiring board 2 on which a wiring pattern for supplying power to the head chip 1 is formed.
  • a drive circuit board 4 is connected to the wiring board 2 via a flexible board 3.
  • the wiring board 2 is a glass substrate, for example.
  • the wiring board 2 may be arranged on either the manifold 5 (common ink chamber) side or the nozzle 11a side of the head chip 1.
  • FIG. 4 is a plan view schematically showing the head chip 1 shown in FIG.
  • the head chip 1 is a substantially quadrangular prism-like member that is long in the channel row direction, and a plurality of nozzles 11 a that serve as ink discharge ports are formed on the lower surface of the head chip 1.
  • An established nozzle plate 11 is arranged.
  • the nozzle 11a is a through hole that allows the channel 13 to communicate with the outside (downward).
  • the nozzle 11a serves as a flow path for ink discharged from the inside of each channel 13 to the outside (downward).
  • the nozzle plate 11 is preferably formed of stainless steel, nickel or other metal material, polyimide resin material or other organic material, or silicon material.
  • stainless steel and polyimide resin materials are superior.
  • stainless steel and polyimide resin materials are superior.
  • silicon materials are superior.
  • polyimide resin material is excellent.
  • the head chip 1 is composed of two actuator members 1a and 1a.
  • the actuator member 1a is made of a piezoelectric material that is displaced by application of a voltage.
  • the actuator member 1 a has a plurality of channels (pressure chambers) 13 and a plurality of dummy channels (pseudo pressure chambers) 14 formed by a plurality of partition walls 12.
  • Each partition 12 is formed in a comb-teeth shape that is open vertically and laterally.
  • a space between the partition walls 12 is a channel 13 or a dummy channel 14.
  • a side wall member 15 is disposed along the side surface of the actuator member 1a.
  • the side wall member 15 is abutted against the front end surface of each partition wall portion 12 formed in a comb-teeth shape, and each channel 13 and each dummy channel 14 are through holes extending from the upper surface portion to the lower surface portion of the actuator member 1a.
  • the configuration of the head chip 1 is not limited to that described above, and the comb teeth formed by the partition walls 12 of the two actuator members 1a and 1a are opened in the same direction.
  • the comb-shaped tip of the member 1 a may be butted against the flat side surface of the other actuator member 1 a, and the comb-shaped tip of the other actuator member 1 a may be butted against the side surface of the side wall member 15. .
  • the comb teeth formed by the partition walls 12 of the two actuator members 1a and 1a are opened toward the outer sides that are separated from each other, and the side wall members 15 are disposed on these outer sides, respectively. Also good.
  • the channel 13 and the dummy channel 14 are not formed by the comb-like partition wall 12 and the side wall member 15, but may be formed as a through hole in the actuator member 1a.
  • the number of channel rows is not limited to two, and three or more actuator members 1a may be provided to make three or more rows.
  • the pitch between dots formed on the recording medium can be reduced without reducing the pitch between the ink channels 13.
  • Each channel 13 has a substantially rectangular opening cross section, and is formed with the vertical direction as the longitudinal direction.
  • Each channel 13 is a straight type whose size and shape are not substantially changed in the longitudinal direction (vertical direction) from the inlet (upper end) to the outlet (lower end).
  • Each channel 13 and each dummy channel 14 are parallel to each other and arranged in one direction (channel column direction) to form a channel column.
  • Each channel 13 has an upper end communicating with the inside of the manifold 5 (common ink chamber) through an opening 22 provided in the wiring board 2 corresponding to each channel 13.
  • Each channel 13 is filled with ink supplied from the inside of the manifold 5 through each opening 22.
  • the lower end of each channel 13 communicates outward (downward) via the nozzle 11a.
  • Each dummy channel 14 is closed by the wiring board 2 at the upper end and closed by the nozzle plate 11 at the lower end to form a sealed air chamber.
  • a driving electrode (not shown) for driving the partition wall 12 is provided on the inner surface of each channel 13.
  • the drive electrode is an independent metal film for each channel 13 and is connected to the wiring pattern of the wiring substrate 2 attached to the upper surface of the head chip 1.
  • the partition wall 12 forms both walls of each channel 13. Since the partition wall portion 12 is made of a piezoelectric material, the partition wall portion 12 is shear-deformed when a voltage is applied from the drive circuit boards 4 and 4 through the wiring patterns and drive electrodes of the flexible boards 3 and 3 and the wiring board 2. .
  • volume fluctuation (expansion or contraction) of the channel 13 occurs. Due to volume fluctuation (expansion or contraction) of the channel 13, pressure is applied to the ink in the channel 13, and this ink is ejected through the nozzle 11a. In the head chip 1, the ink discharge amount is adjusted by adjusting the vertical length (height) of the channel 13.
  • the silicon material is a hard material.
  • the vicinity of the channel 13 is made thin, crosstalk to the adjacent channel 13 due to the driving of the partition wall portion 12 is prevented. be able to.
  • each channel 13 Two partition walls 12, 12 are provided for each channel 13, and form both walls of each channel 13. There is a gap between the partition wall portion 12 constituting the wall portion of one channel 13 and the partition wall portion 12 constituting the wall portion of the adjacent channel 13, and this gap is the dummy channel 14. Thus, each channel 13 can be driven (expanded or contracted) independently.
  • the dummy channel 14 is located on both sides of at least the channel 13, and the volume fluctuation occurs with the volume fluctuation of the adjacent channel 13.
  • the channels 13 and the dummy channels 14 are alternately arranged one by one, so that the dummy channels 14 are positioned on both sides of each channel 13.
  • the ink jet head 100 may be configured such that the adjacent channels 13 and 13 share one partition 12 without providing the dummy channel 14. In this case, since each channel 13 cannot be driven (expanded or contracted) independently, so-called three-cycle driving is performed.
  • the wiring substrate 2 disposed on the upper surface of the head chip 1 is formed in a substantially rectangular plate shape that is long in the channel row direction, as shown in FIGS. Each width of the wiring substrate 2 in the channel row direction and the lateral direction is formed larger than that of the head chip 1.
  • the wiring board 2 has a plurality of openings 22, and the upper ends of the channels 13 are communicated with the inside of the manifold 5 (common ink chamber) through these openings 22.
  • the openings 22 are formed corresponding to the channels 13 and arranged in the channel row direction.
  • the lower end portion of the manifold 5 is attached and fixed to the outer edge portion of the wiring board 2 by bonding.
  • the opening 22 of the wiring board 2 may be a single opening formed so that all the channels 13 face the manifold 5 side.
  • the two flexible boards 3 and 3 connected to the drive circuit boards 4 and 4 are connected to both side edges of the wiring board 2.
  • the flexible board 3 has a plurality of wirings that are electrically connected to the drive circuit board 4, and the wirings and the wiring pattern of the wiring board 2 are electrically connected to each other. As a result, a signal from the drive circuit board 4 is applied to the drive electrode in each channel 13 via the flexible board 3.
  • FIG. 5 is a cross-sectional view showing the configuration of the nozzle plate of the inkjet head shown in FIG.
  • an ink repellent ink that is a liquid repellent layer.
  • a conductive coating layer 60 is formed.
  • the ink repellent coating layer 60 is configured by laminating a first layer 61 made of a non-single crystal carbon film and a second layer 62 made of a fluorine-containing non-single crystal carbon film.
  • the first layer 61 does not contain fluorine.
  • the interface between the first layer 61 and the second layer 62 preferably has no Si—O bond.
  • At least one of the first layer 61 and the second layer 62 is a diamond-like carbon (DLC) film.
  • the diamond-like carbon film is an amorphous film having characteristics similar to diamond.
  • the interface between the first layer 61 and the second layer 62 does not have a Si—O bond due to a silane coupling agent.
  • the ink repellency is not deteriorated and the durability is high.
  • the entire second layer 62 has no Si—O bond, the durability under the use of alkaline ink becomes better.
  • the second layer 62 is a diamond-like carbon (DLC) film, the mechanical hardness is high, and the nozzle surface P is in contact with the recording medium M or when the nozzle surface P is maintained (wiped).
  • the ink repellent coating layer 60 is difficult to peel off and has high durability.
  • the ink repellent coating layer 60 is preferably formed on the entire lower surface of the nozzle plate 11 from the viewpoint of durability, but may be formed only on the periphery of the discharge side opening of the nozzle 11a. The reason why the ink discharge angle is bent is because the ink adheres to the periphery of the discharge side opening of the nozzle 11a.
  • water-based ink such as disperse dye ink or sublimation ink
  • a water-based ink has an alkaline property by containing an additive such as a dispersant.
  • a fabric coated with a pretreatment agent having a liquid property of alkaline may be used to improve color developability.
  • the liquidity is often alkaline for the purpose of preventing penetration into paper.
  • the liquid repellent layer that has secured adhesion by silane coupling is hydrolyzed ([H 2 O] + [— O—Si—R—F] ⁇ [—OH] + [ HO—Si—R—F]) is promoted, and sufficient reliability and durability cannot be maintained.
  • Alkaline pretreatment agents on the fabric surface for raising treatments often affect the reliability and durability of the liquid repellent layer.
  • the nozzle surface is wiped off with paper, cloth or a resin blade.
  • the liquid repellent layer is easily peeled off, and the reliability and durability are lowered.
  • the ink repellent coating layer 60 has a remarkable effect, particularly when the droplets ejected from the nozzle 11a are alkaline ink droplets.
  • the ink-repellent coating layer 60 in the present invention has no Si—O bond at the interface between the first layer 61 and the second layer 62, the ink-repellent deterioration is observed even when alkaline ink is used. It is not durable. Further, if the entire second layer 62 has no Si—O bond, the durability under the use of alkaline ink becomes better. In this ink jet head, even when the maintenance for wiping the nozzle surface P with paper, cloth, resin blade or the like is performed in an alkaline environment, the liquid repellent layer 60 is not peeled off, and the reliability and durability are high.
  • FIG. 6 is a diagram for explaining a method of manufacturing an ink jet head according to the present invention.
  • a flat nozzle plate material 11b is formed of stainless steel, nickel or other metal material, polyimide resin material or other organic material, or silicon material.
  • the nozzle plate 11 is formed by forming the nozzle 11a on the nozzle plate material.
  • the nozzle 11a can be formed by laser processing on the nozzle plate material.
  • the nozzle 11a can be formed by polishing the periphery of the hole after punching the nozzle plate material by punching.
  • the nozzle plate 11 having the nozzles 11a can be directly formed by electroforming. When the nozzle plate 11 is formed by electroforming, nickel is preferably used as the material.
  • a first layer 61 made of a non-single-crystal carbon film is formed on the nozzle surface P (the peripheral portion of the discharge side opening of the nozzle 11a).
  • a CVD (Chemical Vapor Deposition) method thermal CVD, photo CVD, plasma CVD) or a PVD (Physical Vapor Deposition) method can be preferably employed.
  • a plasma CVD method is employed.
  • the PVD method is a method in which a high-energy atomic argon or its ion is collided with a solid metal target such as aluminum or titanium in a high vacuum, the metal atom is blown off, and the metal atom is deposited in a layered manner on the workpiece surface. .
  • the first layer 61 As a diamond-like carbon film, a hydrocarbon gas such as acetylene (C 2 H 2 ) is used as a raw material gas, and the raw material gas is turned into plasma in the chamber, and the gas-phase synthesized hydrocarbon is used. Vapor deposition is performed on the surface of the nozzle plate 11.
  • a hydrocarbon gas such as acetylene (C 2 H 2 ) is used as a raw material gas, and the raw material gas is turned into plasma in the chamber, and the gas-phase synthesized hydrocarbon is used. Vapor deposition is performed on the surface of the nozzle plate 11.
  • a second layer 62 made of a fluorine-containing non-single-crystal carbon film is formed on the first layer 61 to form an ink-repellent coating layer 60.
  • a plasma CVD method or a PVD method can be preferably employed.
  • the second layer 62 has liquid repellency by containing fluorine.
  • a gas containing fluorine is used as a source gas during film formation, or the surface of the non-single-crystal carbon film using a gas containing fluorine after film formation.
  • a method of modifying the surface of the non-single-crystal carbon film with fluorine can be employed by a method such as treating the surface.
  • fluorine can be introduced to the surface of the non-single-crystal carbon film using a surface treatment agent containing a very stable perfluoroalkyl radical as an active component without using fluorine gas.
  • the ink repellent coating layer 60 is such that the second layer 62 does not have a Si—O bond due to the silane coupling agent, and the Si—O bond is formed at the interface between the first layer 61 and the second layer 62. It is preferable to have no bond.
  • at least one of the first layer 61 and the second layer 62 is preferably a diamond-like carbon (DLC) film.
  • the surface of the ink-repellent coating layer 60 is masked to perform a process of eliminating the liquid repellency on the inner wall surface of the nozzle 11a.
  • the treatment for eliminating the liquid repellency it is preferable to employ a plasma treatment containing oxygen.
  • the ink repellent coating layer 60 is formed by masking the peripheral portion of the inlet side opening of the nozzle 11a (the back surface of the nozzle surface P), the process of eliminating the liquid repellency on this portion is unnecessary.
  • the first layer 61 and the second layer 62 do not need to be separated at a clear interface, and the fluorine content gradually increases toward the surface in the thickness direction of the ink-repellent coating layer 60.
  • the layer having a fluorine content of less than a predetermined value may be used as the first layer 61, and the layer having a fluorine content of a predetermined value or more may be used as the second layer 62.
  • Such an ink-repellent coating layer 60 gradually increases the fluorine concentration in the raw material gas from the middle during the film formation of the first layer 61, and continues from the point when the fluorine concentration exceeds a predetermined value.
  • the two layers 62 can be formed by the film formation process.
  • FIG. 7 is a diagram for explaining another example of a method for manufacturing an ink jet head according to the present invention.
  • the nozzle 11a is formed after the ink repellent coating layer 60 is formed on the flat nozzle plate material 11b. It may be.
  • FIG. 7 (a) As shown in FIG. 7 (b), the nozzle surface P of the nozzle plate material 11b (periphery of the portion where the discharge side opening of the nozzle 11a is formed) is shown.
  • the first layer 61 is formed as described above.
  • the second layer 62 is laminated on the first layer 61 as described above to form the ink repellent coating layer 60.
  • the nozzle 11 a is formed on the nozzle plate material 11 b on which the ink-repellent coating layer 60 is formed to form the nozzle plate 11.
  • the nozzle 11a can be formed by any of laser processing, punching and polishing, and electroforming. However, when the nozzle 11a is formed after the ink repellent coating layer 60 is formed in this way, it is preferable to form the nozzle 11a by laser processing using a nozzle plate material made of stainless steel or polyimide.
  • the nozzle 11a is formed after the ink-repellent coating layer 60 is formed, it is not necessary to perform the process of eliminating the liquid repellency on the inner wall surface of the nozzle 11a.
  • FIG. 8 is a cross-sectional view showing a manifold provided in the ink jet head shown in FIG.
  • the manifold 5 As shown in FIGS. 2 and 8, the manifold 5 is made of a synthetic resin material or the like into a horizontally long box shape having an opening 51a on the lower surface. In the manifold 5, the opening 51 a is closed by the wiring substrate 2 bonded to the lower surface portion.
  • the internal space of the manifold 5 is a common ink chamber 51 in which ink supplied from the ink tank 201 in the ink jet recording apparatus 200 is stored.
  • an ink supply pipe 5a serving as a flow path for supplying ink into the common ink chamber 51 is connected.
  • the ink supply pipe 5 a communicates with the common ink chamber 51 on the side farther from the wiring board 2 (upper side).
  • a connecting portion 7a is provided on the upper end side of the ink supply pipe 5a.
  • the connecting portion 7a is detachably connected to the connecting portion 206a on the ink jet recording apparatus 200 side.
  • the connecting portion 206 a on the ink jet recording apparatus 200 side communicates with the ink transfer tube 202.
  • the common ink chamber 51 is provided with an ink collection pipe 5b serving as a flow path for collecting ink from the common ink chamber 51.
  • the ink recovery tube 5 b communicates with the common ink chamber 51 on the side farther from the wiring board 2 (upper side).
  • a connecting portion 7b is provided on the upper end side of the ink recovery tube 5b.
  • the connecting portion 7b is detachably connected to the connecting portion 206b on the ink jet recording apparatus 200 side.
  • the connecting portion 206 b on the ink jet recording apparatus 200 side communicates with the ink return pipe 203. As a result, the ink jet head 100 can return ink to the ink jet recording apparatus 200.
  • the ink supply pipe 5a and the ink recovery pipe 5b are arranged apart from both ends of the common ink chamber 51 in the longitudinal direction.
  • the ink supply pipe 5a is disposed at the left end portion in FIG. 8 on the upper surface side of the manifold 5, and the ink recovery tube 5b is disposed on the right end portion in FIG. Is arranged.
  • the ink supplied from the ink supply pipe 5a to the common ink chamber 51 can flow toward the ink recovery pipe 5b throughout the common ink chamber 51. Accordingly, it is difficult to form a portion where the ink stays in the common ink chamber 51, and bubbles in the ink can be more efficiently eliminated.
  • FIG. 9 is a perspective view showing a configuration of a main part of the ink jet recording apparatus according to the present invention.
  • the inkjet recording apparatus includes the inkjet head 100 described above, a head support member 206 that supports the casing 6 of the inkjet head 100, and a control unit that controls the inkjet head 100. 204.
  • the ink jet recording apparatus 200 records an image by forming dots by ejecting ink from the ink jet head 100 on a recording medium M conveyed in a certain direction (sub-scanning direction) by a moving operation means (not shown).
  • a so-called one-pass ink jet recording apparatus the ink jet head 100 is fixedly arranged, and in the process of transporting the recording medium M, ink is ejected from the nozzles 11 a toward the recording medium M to record an image.
  • the ink jet head 1 is mounted on a head support member (carriage) 206, and the head support member 206 is reciprocated in the main scanning direction by a moving operation means. Ink is ejected from the nozzle 11a toward the recording medium M to record an image.
  • the ink jet recording apparatus 200 discharges from the nozzle 11a if the ink repellent coating layer 60 of the ink jet head 1 has no Si—O bond at the interface between the first layer 61 and the second layer 62.
  • the droplets are alkaline ink droplets and the fabric is used as the recording medium M, the effect of the ink repellent coating layer 60 is exhibited.
  • the liquid repellent layer whose adhesion is secured by silane coupling is hydrolyzed ([H 2 O] + [— O—Si -RF] ⁇ [-OH] + [HO-Si-RF]) is promoted, and sufficient reliability and durability cannot be maintained, but the ink repellent coating layer 60 is bonded to Si-O. If the ink does not have the ink, the ink repellency is not deteriorated even when the alkaline ink is used, and the durability is high.
  • the inkjet recording apparatus 200 has colors such as yellow (Y), magenta (M), cyan (C), and black (K).
  • a plurality of ink jet heads 1 for ink are mounted.
  • an ink tank 201 that stores ink and a common ink chamber 51 of the ink jet head 100 are communicated with each other by an ink transfer pipe 202 and an ink return pipe 203.
  • a transfer pump 205 serving as a flow path pressure applying means that is driven and controlled by the control unit 104 of the inkjet recording apparatus 200 is provided.
  • the transfer pump 205 is driven, the ink in the ink tank 201 is transferred to the inkjet head 100 via the ink transfer pipe 202. Further, when the transfer pump 205 is driven, the ink in the inkjet head 100 is returned to the ink tank 201 via the ink return pipe 203.
  • the transfer pump 205 performs transfer of the ink in the ink tank 201 to the inkjet head 100 and recovery of the ink transferred to the common ink chamber 51.
  • the ink tank 201 is not particularly limited, but is preferably partitioned into an ink transfer chamber 201b and an ink return chamber 201c by a partition plate 201a that does not reach the bottom surface of the tank.
  • one end of the ink transfer tube 202 is disposed in the ink transfer chamber 201b
  • one end of the ink return tube 203 is disposed in the ink return chamber 201c.
  • the partition plate 201a is provided to sufficiently degas the ink so that bubbles contained in the ink returned to the ink return chamber 201c do not flow into the ink transfer pipe 202 again. Since the bubbles themselves have high buoyancy, the bubbles are restricted from passing under the partition plate 201a and flowing into the ink transfer chamber 201b.
  • Such an embodiment is a preferred embodiment when the ink is circulated.
  • the total of these flow path resistances is taken into consideration. Under these conditions, conditions such as pressure applied by the transfer pump 205 are determined so that meniscus breakage from the nozzle 11a does not occur. Further, the total of the flow resistances of the individual ink discharge paths 11b and 11b is defined in consideration of conditions such as pressure applied by the transfer pump 205 so as not to cause a meniscus break from the nozzle 11a.
  • Each of the individual ink discharge paths 11b and 11b can have an opening area and a length appropriately set as long as the total of the flow resistance does not deviate from a predetermined value.
  • the present invention is not limited to the above-described embodiments, and various improvements and design changes may be made without departing from the spirit of the present invention.
  • the partition walls 12 and the channels 13 made of a piezoelectric material are alternately arranged in parallel, and the partition wall 12 is sheared by applying a voltage to the drive electrode of the partition wall 12.
  • the configuration of the head chip 1 is not limited to this.
  • the channel 13 has a channel 13 arranged side by side or two-dimensionally, and provided with an inlet and an outlet above and below in the direction perpendicular to the arrangement direction, and pressure is applied to the channel 13 by contraction of the piezoelectric element.
  • any head chip may be used as long as the ink is ejected from the nozzle 11 a communicating with the outlet of the channel 13.
  • the inkjet head 100 configured such that the ink discharge direction is substantially parallel to the vertical direction is shown, but the ink discharge direction may be any direction, for example, an inclination You may comprise so that it may become a direction or a horizontal direction.
  • a liquid repellent layer capable of maintaining sufficient reliability and durability is formed on the nozzle surface facing the recording medium, and liquid adhesion to the nozzle surface is prevented, which is favorable.
  • An ink jet head capable of discharging droplets, an ink jet head manufacturing method, and an ink jet recording apparatus can be provided.

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Abstract

The purpose of the present invention is to provide an inkjet head in which a liquid repellent layer maintaining sufficient reliability and durability is formed on a nozzle surface opposite of a recording medium, and which prevents adhesion of liquids on the nozzle surface and can discharge excellent droplets, and to provide an inkjet head manufacturing method and an inkjet recording device. In this inkjet head for forming an image on a recording medium by discharging droplets from nozzles 11a formed in a nozzle plate 11, a liquid repellent layer 60 is formed around discharge-side openings of the nozzles 11a by laminating a first layer 61 formed from a non-single crystal carbon film and a second layer 62 formed from a fluorine-containing non-single crystal carbon film.

Description

インクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録装置Inkjet head, inkjet head manufacturing method, and inkjet recording apparatus
　本発明は、インクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録装置に関し、詳しくは、ノズル面に十分な信頼性、耐久性を維持できる撥液層が形成され、ノズル面への液体の付着が防止され、良好な液滴の吐出を行うことができるインクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録装置に関する。 The present invention relates to an inkjet head, a method for manufacturing an inkjet head, and an inkjet recording apparatus. More specifically, a liquid repellent layer capable of maintaining sufficient reliability and durability is formed on a nozzle surface to prevent liquid from adhering to the nozzle surface. The present invention relates to an ink jet head capable of discharging excellent droplets, an ink jet head manufacturing method, and an ink jet recording apparatus.
　従来、インクジェットヘッドのノズルからインク滴を吐出して、記録媒体上に画像形成を行うインクジェット記録装置（インクジェットプリンタ）が提案されている。インクジェットヘッドにおいては、インク滴を吐出したときに、プリンタ内に発生するインクミストや、記録媒体からのインクの跳ね返り等の影響により、ノズル面（ノズルの吐出側開口の周囲）にインクが付着してしまうことがある。ノズル面にインクが付着していると、ノズルからインク滴を吐出するときに、ノズル面に付着したインクの影響を受けて、吐出角度が曲がってしまうことが知られている。 Conventionally, an ink jet recording apparatus (ink jet printer) that forms an image on a recording medium by ejecting ink droplets from nozzles of an ink jet head has been proposed. In an inkjet head, when ink droplets are ejected, the ink adheres to the nozzle surface (around the nozzle ejection side opening) due to the effects of ink mist generated in the printer and ink rebound from the recording medium. May end up. It is known that when ink is adhered to the nozzle surface, the ejection angle is bent due to the influence of the ink adhered to the nozzle surface when ink droplets are ejected from the nozzle.
　ノズル面へのインクの付着を抑制する手段として、ノズル面に撥液性のコーティングを行って撥液層を形成することが知られている。 As a means for suppressing the adhesion of ink to the nozzle surface, it is known to form a liquid repellent layer by performing a liquid repellent coating on the nozzle surface.
　撥液層としては、シランカップリングによる脱水縮合反応（〔-ＯＨ〕＋〔ＨＯ－Ｓｉ－Ｒ－Ｆ〕→〔Ｈ２Ｏ〕＋〔－Ｏ－Ｓｉ－Ｒ－Ｆ〕）により、フッ素を含んだ有機官能基を結合させて成膜したものが知られている（特許文献１）。また、撥液層としては、フッ素を含んだダイヤモンドライクカーボン（ＤＬＣ：diamond-like carbon）膜を用いて、耐久性を向上させたものが提案されている（特許文献２、特許文献３） As the liquid repellent layer, fluorine is removed by a dehydration condensation reaction by silane coupling ([—OH] + [HO—Si—RF] → [H 2 O] + [— O—Si—RF]). A film formed by bonding an organic functional group is known (Patent Document 1). In addition, as the liquid repellent layer, a layer having improved durability using a diamond-like carbon (DLC) film containing fluorine has been proposed (Patent Documents 2 and 3).
特開２００７－２３００６１号公報JP 2007-230061 A 特開２０１２－０９１３８０号公報JP 2012-091380 A 特開２０１５－０８５６１６号公報Japanese Patent Laying-Open No. 2015-085616
　前述のような撥液層の撥液性は、フッ素ドープ量に依存することが知られている。撥液性は、撥液層の表面のみにおいて発現されればよいので、フッ素は、撥液層の表面近傍のみに含有されていればよい。しかし、従来のインクジェットヘッドにおける撥液層においては、撥液層全体に一様にフッ素が含有されているため、撥液層全体の信頼性、耐久性が十分に維持されない虞があった。 It is known that the liquid repellency of the liquid repellent layer as described above depends on the fluorine doping amount. Since the liquid repellency only needs to be expressed on the surface of the liquid repellent layer, fluorine may be contained only in the vicinity of the surface of the liquid repellent layer. However, in the liquid repellent layer in the conventional ink jet head, since the entire liquid repellent layer contains fluorine uniformly, the reliability and durability of the entire liquid repellent layer may not be sufficiently maintained.
　そこで、本発明は、記録媒体に対向されるノズル面に十分な信頼性、耐久性を維持できる撥液層が形成され、ノズル面への液体の付着が防止され、良好な液滴の吐出を行うことができるインクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録装置を提供することを課題とする。 Therefore, the present invention forms a liquid repellent layer that can maintain sufficient reliability and durability on the nozzle surface facing the recording medium, prevents the liquid from adhering to the nozzle surface, and discharges excellent droplets. It is an object of the present invention to provide an inkjet head, an inkjet head manufacturing method, and an inkjet recording apparatus that can be performed.
　本発明の他の課題は、以下の記載により明らかとなる。 Other problems of the present invention will become apparent from the following description.
　上記課題は、以下の各発明によって解決される。 The above problems are solved by the following inventions.
１．
　少なくとも１つのノズルが形成されたノズルプレートを有し、該ノズルから液滴を吐出して記録媒体上に画像形成を行うインクジェットヘッドであって、
　前記ノズルの吐出側開口の周囲部には、非単結晶炭素膜からなる第１層と、フッ素含有非単結晶炭素膜からなる第２層とが積層された撥液層が形成されているインクジェットヘッド。
２．
　前記非単結晶炭素膜及び前記フッ素含有非単結晶炭素膜の少なくとも何れか一方は、ダイヤモンドライクカーボン膜である前記１記載のインクジェットヘッド。
３．
　前記非単結晶炭素膜及び前記フッ素含有非単結晶炭素膜の界面において、Ｓｉ－Ｏ結合を有しない前記１又は２記載のインクジェットヘッド。
４．
　前記ノズルから吐出する液滴は、アルカリ性インク滴である前記３記載のインクジェットヘッド。
５．
　前記ノズルプレートをなす材料は、ステンレスである前記１～４の何れかに記載のインクジェットヘッド。
６．
　前記ノズルプレートをなす材料は、ニッケルである前記１～４の何れかに記載のインクジェットヘッド。
７．
　前記ノズルプレートをなす材料は、ポリイミド樹脂である前記１～４の何れかに記載のインクジェットヘッド。
８．
　少なくとも１つのノズルが形成されたノズルプレートを有し、該ノズルから液滴を吐出して記録媒体上に画像形成を行うインクジェットヘッドを製造する方法であって、
　前記ノズルを形成し、
　前記ノズルの吐出側開口の周囲部に対し、非単結晶炭素膜からなる第１層を形成し、
　前記第１層上にフッ素含有非単結晶炭素膜からなる第２層を積層させて形成して撥液層とし、
　前記撥液層の表面をマスクして、前記ノズルの内壁面に対して撥液性を消失させる処理を行うインクジェットヘッドの製造方法。
９．
　前記ノズルの入口側開口の周囲部に対しても撥液性を消失させる処理を行う前記８記載のインクジェットヘッドの製造方法。
１０．
　前記撥液性を消失させる処理は、酸素を含有したプラズマ処理である前記８又は９記載のインクジェットヘッドの製造方法。
１１．
　少なくとも１つのノズルが形成されたノズルプレートを有し、該ノズルから液滴を吐出して記録媒体上に画像形成を行うインクジェットヘッドを製造する方法であって、
　前記ノズルの吐出側開口が形成される箇所の周囲部に対し、非単結晶炭素膜からなる第１層を形成し、
　前記第１層上にフッ素含有非単結晶炭素膜からなる第２層を積層させて形成して撥液層とし、
　前記ノズルを形成するインクジェットヘッドの製造方法。
１２．
　前記ノズルは、平板状のノズルプレート素材に対するポンチ加工による穴開けの後に、穴周辺を研磨して形成する前記８、９又は１０記載のインクジェットヘッドの製造方法。
１３．
　前記ノズルプレートを電鋳加工により形成する前記８、９又は１０記載のインクジェットヘッドの製造方法。
１４．
　前記ノズルは、平板状のノズルプレート素材に対するレーザ加工により形成する前記８～１１の何れかに記載のインクジェットヘッドの製造方法。
１５．
　前記ノズルプレートを、ステンレスにより形成する前記８～１２及び１４の何れかに記載のインクジェットヘッドの製造方法。
１６．
　前記ノズルプレートを、ニッケルにより形成する前記８～１４の何れかに記載のインクジェットヘッドの製造方法。
１７．
　前記ノズルプレートを、ポリイミド樹脂により形成する前記８～１１及び１４の何れかに記載のインクジェットヘッドの製造方法。
１８．
　前記３記載のインクジェットヘッドと、
　前記インクジェットヘッドと前記記録媒体とを相対移動させる移動操作手段とを備え、
　前記ノズルから吐出する液滴は、アルカリ性インク滴であり、
　前記記録媒体として、布地を用い、
　前記インクジェットヘッドと前記布地とを相対移動させて前記布地上に画像形成を行うインクジェット記録装置。 1.
An inkjet head having a nozzle plate on which at least one nozzle is formed and ejecting droplets from the nozzle to form an image on a recording medium,
An inkjet in which a liquid repellent layer in which a first layer made of a non-single-crystal carbon film and a second layer made of a fluorine-containing non-single-crystal carbon film are laminated is formed around the discharge side opening of the nozzle head.
2.
2. The inkjet head according to 1, wherein at least one of the non-single-crystal carbon film and the fluorine-containing non-single-crystal carbon film is a diamond-like carbon film.
3.
3. The ink jet head according to 1 or 2, wherein an Si—O bond is not present at an interface between the non-single crystal carbon film and the fluorine-containing non-single crystal carbon film.
4).
4. The ink jet head according to 3, wherein the liquid droplets ejected from the nozzle are alkaline ink droplets.
5).
5. The ink jet head according to any one of 1 to 4, wherein the material forming the nozzle plate is stainless steel.
6).
5. The ink jet head according to any one of 1 to 4, wherein the material forming the nozzle plate is nickel.
7).
5. The ink jet head according to any one of 1 to 4, wherein the material forming the nozzle plate is polyimide resin.
8).
A method of manufacturing an inkjet head having a nozzle plate on which at least one nozzle is formed, and ejecting droplets from the nozzle to form an image on a recording medium,
Forming the nozzle,
A first layer made of a non-single crystal carbon film is formed around the discharge side opening of the nozzle,
A liquid repellent layer is formed by laminating a second layer made of a fluorine-containing non-single-crystal carbon film on the first layer,
A method of manufacturing an ink jet head, wherein the surface of the liquid repellent layer is masked to perform a process of eliminating liquid repellency on the inner wall surface of the nozzle.
9.
9. The method of manufacturing an ink jet head according to 8, wherein the liquid repellency is also lost to the periphery of the inlet side opening of the nozzle.
10.
10. The method of manufacturing an ink jet head according to 8 or 9, wherein the treatment for eliminating the liquid repellency is a plasma treatment containing oxygen.
11.
A method of manufacturing an inkjet head having a nozzle plate on which at least one nozzle is formed, and ejecting droplets from the nozzle to form an image on a recording medium,
Forming a first layer made of a non-single-crystal carbon film on the periphery of the portion where the discharge side opening of the nozzle is formed;
A liquid repellent layer is formed by laminating a second layer made of a fluorine-containing non-single-crystal carbon film on the first layer,
A method of manufacturing an inkjet head for forming the nozzle.
12
11. The method of manufacturing an ink jet head according to 8, 9, or 10, wherein the nozzle is formed by punching a hole in a flat nozzle plate material by punching and then polishing the periphery of the hole.
13.
11. The method of manufacturing an ink jet head according to 8, 9, or 10, wherein the nozzle plate is formed by electroforming.
14
12. The method of manufacturing an ink jet head according to any one of 8 to 11, wherein the nozzle is formed by laser processing on a flat nozzle plate material.
15.
15. The method of manufacturing an ink jet head according to any one of 8 to 12 and 14, wherein the nozzle plate is formed of stainless steel.
16.
15. The method for manufacturing an ink jet head according to any one of 8 to 14, wherein the nozzle plate is formed of nickel.
17.
15. The method for producing an ink jet head according to any one of 8 to 11 and 14, wherein the nozzle plate is formed of a polyimide resin.
18.
The inkjet head according to 3;
Moving operation means for relatively moving the inkjet head and the recording medium,
The droplets discharged from the nozzle are alkaline ink droplets,
As the recording medium, fabric is used,
An inkjet recording apparatus that forms an image on the fabric by relatively moving the inkjet head and the fabric.
　本発明によれば、記録媒体に対向されるノズル面に十分な信頼性、耐久性を維持できる撥液層が形成され、ノズル面への液体の付着が防止され、良好な液滴の吐出を行うことができるインクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録装置を提供することができる。 According to the present invention, a liquid repellent layer capable of maintaining sufficient reliability and durability is formed on the nozzle surface facing the recording medium, preventing liquid from adhering to the nozzle surface, and good droplet discharge. An ink jet head, a method for manufacturing the ink jet head, and an ink jet recording apparatus can be provided.
本発明に係るインクジェットヘッドを示す斜視図（ａ）及び底面図（ｂ）The perspective view (a) and bottom view (b) which show the ink jet head concerning the present invention 図１に示すインクジェットヘッドの要部を示す分解斜視図1 is an exploded perspective view showing the main part of the inkjet head shown in FIG. 図２に示すヘッドチップ及び配線基板を模式的に示す分解斜視図FIG. 2 is an exploded perspective view schematically showing the head chip and the wiring board shown in FIG. 図２に示すヘッドチップを模式的に示す平面図FIG. 2 is a plan view schematically showing the head chip shown in FIG. 図１に示すインクジェットヘッドのノズルプレートの構成を示す断面図Sectional drawing which shows the structure of the nozzle plate of the inkjet head shown in FIG. 本発明に係るインクジェットヘッドの製造方法を説明する図The figure explaining the manufacturing method of the inkjet head which concerns on this invention 本発明に係るインクジェットヘッドの製造方法の他の例を説明する図The figure explaining the other example of the manufacturing method of the inkjet head which concerns on this invention 図１に示すインクジェットヘッドに備わるマニホールドを示す断面図Sectional drawing which shows the manifold with which the inkjet head shown in FIG. 1 is equipped 本発明に係るインクジェット記録装置の要部の構成を示す斜視図The perspective view which shows the structure of the principal part of the inkjet recording device which concerns on this invention.
　以下、本発明の実施の形態について図面を用いて詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
〔インクジェットヘッドの構成〕
　図１は、本発明に係るインクジェットヘッド１００を示す斜視図（ａ）及び底面図（ｂ）である。
　図２は、インクジェットヘッド１００の要部を示す分解斜視図である。
　図３は、図２に示すヘッドチップ及び配線基板を模式的に示す分解斜視図である。 [Configuration of inkjet head]
FIG. 1 is a perspective view (a) and a bottom view (b) showing an inkjet head 100 according to the present invention.
FIG. 2 is an exploded perspective view showing a main part of the inkjet head 100.
FIG. 3 is an exploded perspective view schematically showing the head chip and the wiring board shown in FIG.
　本明細書において、インクジェットヘッド１００のノズル１１ａ（図３参照）からのインク吐出方向を「下方」とし、複数のノズル１１ａの並び方向を「チャネル列方向」又は「ノズル列方向」といい、「チャネル列方向」に直交する水平方向を「側方」という。「上方」及び「下方」は、「鉛直方向上側」及び「鉛直方向下側」を意味する。ただし、本発明のインクジェットヘッド１００の使用状態は、インク吐出面を鉛直方向下側に向ける状態に限定されず、傾けて使用してもよい。 In this specification, the ink discharge direction from the nozzle 11a (see FIG. 3) of the inkjet head 100 is referred to as “downward”, and the arrangement direction of the plurality of nozzles 11a is referred to as “channel row direction” or “nozzle row direction”. The horizontal direction orthogonal to the “channel row direction” is referred to as “side”. “Upper” and “lower” mean “upper vertical direction” and “lower vertical direction”. However, the use state of the ink jet head 100 of the present invention is not limited to the state in which the ink discharge surface faces downward in the vertical direction, and may be used while being inclined.
　本実施形態のインクジェットヘッド１００は、後述するインクジェット記録装置（インクジェットプリンタ）に搭載されるものである。インクジェットヘッド１００は、図２及び図３に示すように、ノズル１１ａが連通した複数のチャネル１３を有するヘッドチップ１を有している。ヘッドチップ１のチャネル１３には、マニホールド５から、インクが導入される。マニホールド５は、筐体６の内側に収納されている。この筐体６は、ヘッドチップ１の周囲を覆っている。マニホールド５内には、インクを貯留し、各チャネル１３へインクを供給する共通インク室が形成されている。筐体６は、底面が開口されており、キャップ受板７が取り付けられることにより底面開口を塞がれている。筐体６には、図１に示すように、カバー部材９が取り付けられている。 The ink jet head 100 of this embodiment is mounted on an ink jet recording apparatus (ink jet printer) described later. As shown in FIGS. 2 and 3, the inkjet head 100 has a head chip 1 having a plurality of channels 13 in which nozzles 11 a communicate with each other. Ink is introduced from the manifold 5 into the channel 13 of the head chip 1. The manifold 5 is housed inside the housing 6. The housing 6 covers the periphery of the head chip 1. In the manifold 5, a common ink chamber is formed for storing ink and supplying ink to each channel 13. The bottom surface of the housing 6 is opened, and the bottom surface opening is closed by attaching the cap receiving plate 7. A cover member 9 is attached to the housing 6 as shown in FIG.
　マニホールド５には、図２に示すように、インク供給管５ａ及びインク回収管５ｂが設けられている。インク供給管５ａ及びインク回収管５ｂには、それぞれ接続部７ａ、７ｂが取り付けられている。 As shown in FIG. 2, the manifold 5 is provided with an ink supply tube 5a and an ink recovery tube 5b. Connection portions 7a and 7b are attached to the ink supply tube 5a and the ink recovery tube 5b, respectively.
　また、インクジェットヘッド１００は、ヘッドチップ１に給電するための配線パターンが形成された配線基板２を有している。配線基板２には、フレキシブル基板３を介して駆動回路基板４が接続されている。配線基板２は、例えばガラス基板である。配線基板２は、ヘッドチップ１のマニホールド５（共通インク室）側及びノズル１１ａ側の何れに配置してもよい。 The ink jet head 100 has a wiring board 2 on which a wiring pattern for supplying power to the head chip 1 is formed. A drive circuit board 4 is connected to the wiring board 2 via a flexible board 3. The wiring board 2 is a glass substrate, for example. The wiring board 2 may be arranged on either the manifold 5 (common ink chamber) side or the nozzle 11a side of the head chip 1.
〔ヘッドチップ及び配線基板〕
　ヘッドチップ１及び配線基板２について、図２、図３及び図４を参照して説明する。 [Head chip and wiring board]
The head chip 1 and the wiring board 2 will be described with reference to FIG. 2, FIG. 3, and FIG.
　図４は、図２に示すヘッドチップ１を模式的に示す平面図である。 FIG. 4 is a plan view schematically showing the head chip 1 shown in FIG.
　ヘッドチップ１は、図３及び図４に示すように、チャネル列方向に長尺な略四角柱状の部材であり、このヘッドチップ１の下面には、インクの吐出口となる複数のノズル１１ａが開設されたノズルプレート１１が配設されている。ノズル１１ａは、チャネル１３を外部（下方）に連通させる透孔である。ノズル１１ａは、各チャネル１３内から外部（下方）に吐出されるインクの流路となる。 As shown in FIGS. 3 and 4, the head chip 1 is a substantially quadrangular prism-like member that is long in the channel row direction, and a plurality of nozzles 11 a that serve as ink discharge ports are formed on the lower surface of the head chip 1. An established nozzle plate 11 is arranged. The nozzle 11a is a through hole that allows the channel 13 to communicate with the outside (downward). The nozzle 11a serves as a flow path for ink discharged from the inside of each channel 13 to the outside (downward).
　ノズルプレート１１は、ステンレス、ニッケル又はその他の金属材料、ポリイミド樹脂材料又はその他の有機物材料、あるいは、シリコン材料により形成することが好ましい。価格の点（安価であること）では、ステンレス、ポリイミド樹脂材料が優れており、加工の容易性では、ステンレス、ポリイミド樹脂材料が優れており、加工精度では、シリコン材料が優れており、化学的安定性では、ポリイミド樹脂材料が優れている。 The nozzle plate 11 is preferably formed of stainless steel, nickel or other metal material, polyimide resin material or other organic material, or silicon material. In terms of price (being inexpensive), stainless steel and polyimide resin materials are superior. In terms of ease of processing, stainless steel and polyimide resin materials are superior. In terms of processing accuracy, silicon materials are superior. In terms of stability, the polyimide resin material is excellent.
　ヘッドチップ１は、２個のアクチュエータ部材１ａ、１ａから構成されている。アクチュエータ部材１ａは、電圧の印加によって変位する圧電材料から形成されている。アクチュエータ部材１ａは、複数の隔壁部１２により形成された複数のチャネル（圧力室）１３及び複数のダミーチャネル（擬似圧力室）１４を有している。各隔壁部１２は、上下及び側方に開放された櫛歯状に形成されている。これら隔壁部１２同士の間がチャネル１３又はダミーチャネル１４となる。このアクチュエータ部材１ａの側面に沿って、側壁部材１５が配置されている。側壁部材１５は、櫛歯状に形成された各隔壁部１２の先端面に突き合わされ、各チャネル１３及び各ダミーチャネル１４を、アクチュエータ部材１ａの上面部から下面部に至る透孔としている。 The head chip 1 is composed of two actuator members 1a and 1a. The actuator member 1a is made of a piezoelectric material that is displaced by application of a voltage. The actuator member 1 a has a plurality of channels (pressure chambers) 13 and a plurality of dummy channels (pseudo pressure chambers) 14 formed by a plurality of partition walls 12. Each partition 12 is formed in a comb-teeth shape that is open vertically and laterally. A space between the partition walls 12 is a channel 13 or a dummy channel 14. A side wall member 15 is disposed along the side surface of the actuator member 1a. The side wall member 15 is abutted against the front end surface of each partition wall portion 12 formed in a comb-teeth shape, and each channel 13 and each dummy channel 14 are through holes extending from the upper surface portion to the lower surface portion of the actuator member 1a.
　ヘッドチップ１の構成は、前述のものに限定されず、２個のアクチュエータ部材１ａ、１ａの各隔壁部１２のなす櫛歯形状を、互いに同一方向に向けて開放されたものとし、一方のアクチュエータ部材１ａの櫛歯形状の先端部を他方のアクチュエータ部材１ａの平坦な側面部に突き合わせ、他方のアクチュエータ部材１ａの櫛歯形状の先端部を側壁部材１５の側面部に突き合わせて構成してもよい。さらに、２個のアクチュエータ部材１ａ、１ａの各隔壁部１２のなす櫛歯形状を、互いに離反する外側側に向けて開放されたものとし、これらの外側側にそれぞれ側壁部材１５を配置することとしてもよい。 The configuration of the head chip 1 is not limited to that described above, and the comb teeth formed by the partition walls 12 of the two actuator members 1a and 1a are opened in the same direction. The comb-shaped tip of the member 1 a may be butted against the flat side surface of the other actuator member 1 a, and the comb-shaped tip of the other actuator member 1 a may be butted against the side surface of the side wall member 15. . Furthermore, it is assumed that the comb teeth formed by the partition walls 12 of the two actuator members 1a and 1a are opened toward the outer sides that are separated from each other, and the side wall members 15 are disposed on these outer sides, respectively. Also good.
　さらに、チャネル１３及びダミーチャネル１４は、櫛歯状の隔壁部１２及び側壁部材１５により形成されるものではなく、アクチュエータ部材１ａに透孔として形成されたものでもよい。 Furthermore, the channel 13 and the dummy channel 14 are not formed by the comb-like partition wall 12 and the side wall member 15, but may be formed as a through hole in the actuator member 1a.
　なお、チャネル列の数は、２列に限定されず、アクチュエータ部材１ａを３個以上設けて３列以上としてもよい。チャネル列の数を増やすことにより、インクチャネル１３間のピッチを狭めることなく、記録媒体上に形成するドット間のピッチを狭めることができる。 Note that the number of channel rows is not limited to two, and three or more actuator members 1a may be provided to make three or more rows. By increasing the number of channel rows, the pitch between dots formed on the recording medium can be reduced without reducing the pitch between the ink channels 13.
　各チャネル１３は、略矩形状の開口横断面を有し、上下方向を長手方向として形成されている。各チャネル１３は、入口（上端）から出口（下端）に亘る長手方向（上下方向）で大きさ及び形状がほぼ変わらないストレートタイプである。 Each channel 13 has a substantially rectangular opening cross section, and is formed with the vertical direction as the longitudinal direction. Each channel 13 is a straight type whose size and shape are not substantially changed in the longitudinal direction (vertical direction) from the inlet (upper end) to the outlet (lower end).
　各チャネル１３及び各ダミーチャネル１４は、互いに平行とされ、一方向（チャネル列方向）に配列されてチャネル列を構成している。各チャネル１３は、各チャネル１３に対応して配線基板２に開設された開口部２２を介して、上端がマニホールド５内（共通インク室）に連通している。各チャネル１３は、各開口部２２を介して、マニホールド５内からインクが供給されて充填される。各チャネル１３の下端は、ノズル１１ａを介して外方（下方）に連通している。各ダミーチャネル１４は、上端を配線基板２により閉蓋され、下端をノズルプレート１１により閉蓋されて、密閉された空気室となっている。 Each channel 13 and each dummy channel 14 are parallel to each other and arranged in one direction (channel column direction) to form a channel column. Each channel 13 has an upper end communicating with the inside of the manifold 5 (common ink chamber) through an opening 22 provided in the wiring board 2 corresponding to each channel 13. Each channel 13 is filled with ink supplied from the inside of the manifold 5 through each opening 22. The lower end of each channel 13 communicates outward (downward) via the nozzle 11a. Each dummy channel 14 is closed by the wiring board 2 at the upper end and closed by the nozzle plate 11 at the lower end to form a sealed air chamber.
　各チャネル１３の内面には、隔壁部１２を駆動させるための図示しない駆動電極が設けられている。駆動電極は、各チャネル１３毎に独立した金属被膜であり、ヘッドチップ１の上面に取り付けられた配線基板２の配線パターンに接続されている。隔壁部１２は、各チャネル１３の両壁部をなしている。隔壁部１２は、圧電材料により構成されているので、駆動回路基板４、４からフレキシブル基板３、３、配線基板２の配線パターン及び駆動電極を介して電圧を印加されることによって、せん断変形する。 A driving electrode (not shown) for driving the partition wall 12 is provided on the inner surface of each channel 13. The drive electrode is an independent metal film for each channel 13 and is connected to the wiring pattern of the wiring substrate 2 attached to the upper surface of the head chip 1. The partition wall 12 forms both walls of each channel 13. Since the partition wall portion 12 is made of a piezoelectric material, the partition wall portion 12 is shear-deformed when a voltage is applied from the drive circuit boards 4 and 4 through the wiring patterns and drive electrodes of the flexible boards 3 and 3 and the wiring board 2. .
　チャネル１３の両壁部をなす隔壁部１２がせん断変形することにより、チャネル１３の容積変動（膨張又は収縮）が生じる。チャネル１３の容積変動（膨張又は収縮）により、チャネル１３内のインクに圧力が付与され、このインクがノズル１１ａを介して吐出される。このヘッドチップ１において、インクの吐出量を調整する場合には、チャネル１３の上下方向の長さ（高さ）を調整することにより行う。 When the partition wall 12 forming both walls of the channel 13 undergoes shear deformation, volume fluctuation (expansion or contraction) of the channel 13 occurs. Due to volume fluctuation (expansion or contraction) of the channel 13, pressure is applied to the ink in the channel 13, and this ink is ejected through the nozzle 11a. In the head chip 1, the ink discharge amount is adjusted by adjusting the vertical length (height) of the channel 13.
　なお、ノズルプレート１１をシリコン材料により形成する場合において、シリコン材料は硬質材料であるが、チャネル１３の付近を薄く作成すれば、隔壁部１２の駆動による隣接するチャネル１３へのクロストークを防止することができる。 In the case where the nozzle plate 11 is formed of a silicon material, the silicon material is a hard material. However, if the vicinity of the channel 13 is made thin, crosstalk to the adjacent channel 13 due to the driving of the partition wall portion 12 is prevented. be able to.
　隔壁部１２，１２は、一つのチャネル１３あたり２枚（一対）が設けられており、各チャネル１３それぞれの両壁部をなしている。一のチャネル１３の壁部を構成する隔壁部１２と、隣接するチャネル１３の壁部を構成する隔壁部１２との間には空隙があり、この空隙がダミーチャネル１４である。したがって、各チャネル１３は、独立して駆動（膨張又は収縮）することができる。 Two partition walls 12, 12 are provided for each channel 13, and form both walls of each channel 13. There is a gap between the partition wall portion 12 constituting the wall portion of one channel 13 and the partition wall portion 12 constituting the wall portion of the adjacent channel 13, and this gap is the dummy channel 14. Thus, each channel 13 can be driven (expanded or contracted) independently.
　ダミーチャネル１４は、少なくともチャネル１３を挟んで両隣に位置し、隣接するチャネル１３の容積変動に伴って容積変動を生ずる。本実施形態においては、チャネル１３とダミーチャネル１４とが１つずつ交互に配列されることにより、ダミーチャネル１４が各チャネル１３を挟んで両隣に位置する状態になっている。 The dummy channel 14 is located on both sides of at least the channel 13, and the volume fluctuation occurs with the volume fluctuation of the adjacent channel 13. In the present embodiment, the channels 13 and the dummy channels 14 are alternately arranged one by one, so that the dummy channels 14 are positioned on both sides of each channel 13.
　なお、このインクジェットヘッド１００は、ダミーチャネル１４を設けずに、隣接するチャネル１３，１３が１枚の隔壁部１２を共用するように構成してもよい。この場合には、各チャネル１３が独立して駆動（膨張又は収縮）することはできないので、いわゆる３サイクル駆動を行う。 The ink jet head 100 may be configured such that the adjacent channels 13 and 13 share one partition 12 without providing the dummy channel 14. In this case, since each channel 13 cannot be driven (expanded or contracted) independently, so-called three-cycle driving is performed.
　ヘッドチップ１の上面に配設された配線基板２は、図２及び図３に示すように、チャネル列方向に長尺な略矩形板状に形成されている。配線基板２のチャネル列方向及び側方方向の各幅は、ヘッドチップ１に対してそれぞれ大きく形成されている。配線基板２は、複数の開口部２２を有し、これら開口部２２を介してチャネル１３の上端をマニホールド５内（共通インク室）に連通させている。各開口部２２は、各チャネル１３に対応して、チャネル列方向に配列されて形成されている。配線基板２の外縁部には、マニホールド５の下端部が接着により取り付け固定されている。 The wiring substrate 2 disposed on the upper surface of the head chip 1 is formed in a substantially rectangular plate shape that is long in the channel row direction, as shown in FIGS. Each width of the wiring substrate 2 in the channel row direction and the lateral direction is formed larger than that of the head chip 1. The wiring board 2 has a plurality of openings 22, and the upper ends of the channels 13 are communicated with the inside of the manifold 5 (common ink chamber) through these openings 22. The openings 22 are formed corresponding to the channels 13 and arranged in the channel row direction. The lower end portion of the manifold 5 is attached and fixed to the outer edge portion of the wiring board 2 by bonding.
　なお、ダミーチャネル１４を設けない場合には、配線基板２の開口部２２は、全てのチャネル１３をマニホールド５側に臨ませるように形成された１個の開口部としてよい。 When the dummy channel 14 is not provided, the opening 22 of the wiring board 2 may be a single opening formed so that all the channels 13 face the manifold 5 side.
　配線基板２の両側縁部には、駆動回路基板４、４に接続された２枚のフレキシブル基板３、３が接続されている。フレキシブル基板３は、駆動回路基板４と電気的に接続される複数の配線を有し、この配線と配線基板２の配線パターンとがそれぞれ電気的に接続されている。これにより、駆動回路基板４からの信号が、フレキシブル基板３を介して各チャネル１３内の駆動電極に印加される。 The two flexible boards 3 and 3 connected to the drive circuit boards 4 and 4 are connected to both side edges of the wiring board 2. The flexible board 3 has a plurality of wirings that are electrically connected to the drive circuit board 4, and the wirings and the wiring pattern of the wiring board 2 are electrically connected to each other. As a result, a signal from the drive circuit board 4 is applied to the drive electrode in each channel 13 via the flexible board 3.
〔ノズルプレート〕
　図５は、図１に示すインクジェットヘッドのノズルプレートの構成を示す断面図である。 [Nozzle plate]
FIG. 5 is a cross-sectional view showing the configuration of the nozzle plate of the inkjet head shown in FIG.
　図５に示すように、記録媒体Ｍに対向するノズルプレート１１の下面、すなわち、ノズル１１ａの吐出側開口の周囲部（以下「ノズル面Ｐ」という。）には、撥液層である撥インク性コーティング層６０が形成されている。撥インク性コーティング層６０は、非単結晶炭素膜からなる第１層６１と、フッ素含有非単結晶炭素膜からなる第２層６２とが積層されて構成されている。第１層６１は、フッ素非含有である。第１層６１及び第２層６２の界面においては、Ｓｉ－Ｏ結合を有しないことが好ましい。 As shown in FIG. 5, on the lower surface of the nozzle plate 11 facing the recording medium M, that is, around the discharge side opening of the nozzle 11a (hereinafter referred to as “nozzle surface P”), an ink repellent ink that is a liquid repellent layer. A conductive coating layer 60 is formed. The ink repellent coating layer 60 is configured by laminating a first layer 61 made of a non-single crystal carbon film and a second layer 62 made of a fluorine-containing non-single crystal carbon film. The first layer 61 does not contain fluorine. The interface between the first layer 61 and the second layer 62 preferably has no Si—O bond.
　第１層６１及び第２層６２の少なくとも何れか一方は、ダイヤモンドライクカーボン（ＤＬＣ：diamond-like carbon）膜であることが好ましい。ダイヤモンドライクカーボン膜は、ダイヤモンドに近い特性を持つ非結晶(アモルファス)の皮膜である。 It is preferable that at least one of the first layer 61 and the second layer 62 is a diamond-like carbon (DLC) film. The diamond-like carbon film is an amorphous film having characteristics similar to diamond.
　第１層６１及び第２層６２の界面には、シランカップリング剤によるＳｉ－Ｏ結合を有しないことが好ましい。この場合には、アルカリ性インク使用下においても撥インク性の劣化が見られず、耐久性が高い。また、第２層６２の全体においてＳｉ－Ｏ結合を有しないようにすれば、アルカリ性インク使用下における耐久性は、より良好となる。また、第２層６２をダイヤモンドライクカーボン（ＤＬＣ）膜とすれば、機械的硬度が高く、記録媒体Ｍにノズル面Ｐが接触したり、ノズル面Ｐのメンテナンス（拭き取り）を行った場合にも、撥インク性コーティング層６０が剥がれ難く、耐久性が高い。 It is preferable that the interface between the first layer 61 and the second layer 62 does not have a Si—O bond due to a silane coupling agent. In this case, even when alkaline ink is used, the ink repellency is not deteriorated and the durability is high. Further, if the entire second layer 62 has no Si—O bond, the durability under the use of alkaline ink becomes better. In addition, if the second layer 62 is a diamond-like carbon (DLC) film, the mechanical hardness is high, and the nozzle surface P is in contact with the recording medium M or when the nozzle surface P is maintained (wiped). The ink repellent coating layer 60 is difficult to peel off and has high durability.
　なお、撥インク性コーティング層６０は、耐久性の観点からノズルプレート１１の下面全面に形成することが好ましいが、ノズル１１ａの吐出側開口の周囲部のみに形成してもよい。インクの吐出角度の曲がり等の問題を生じさせるのは、ノズル１１ａの吐出側開口の周囲部へのインクの付着だからである。 The ink repellent coating layer 60 is preferably formed on the entire lower surface of the nozzle plate 11 from the viewpoint of durability, but may be formed only on the periphery of the discharge side opening of the nozzle 11a. The reason why the ink discharge angle is bent is because the ink adheres to the periphery of the discharge side opening of the nozzle 11a.
　ところで、近年、テキスタイル分野におけるインクジェット記録装置の使用が拡大しており、布地を記録媒体としてインクジェットヘッドにより画像形成を行うことが多くなってきている。インクジェットヘッドによる画像形成においては、旧来の捺染法に比較して、版を作る必要が無いことから少数ロットへの対応が可能であり、インク廃液の量も少ないというメリットがある。 By the way, in recent years, the use of ink jet recording apparatuses in the textile field has been expanded, and image formation by an ink jet head using a cloth as a recording medium is increasing. In image formation by an ink jet head, compared to the conventional textile printing method, there is an advantage that it is possible to cope with a small number of lots and a small amount of ink waste liquid because it is not necessary to make a plate.
　ポリエステル等の合成繊維からなる布地にインクジェットヘッドにより画像形成を行う場合には、分散染料インクや昇華性インクなどの水系インクが用いられる。このような水系インクは、分散剤などの添加剤を含むことにより、液性がアルカリ性となっている。また、インクそのものの液性が中性や弱アルカリ性であっても、発色性改善等のために、液性がアルカリ性である前処理剤を塗布した布地を用いることがある。なお、普通紙用の水性インクにおいても、紙への浸透防止等の目的のため、液性がアルカリ性となっていることは多い。 When forming an image on a cloth made of synthetic fiber such as polyester by an inkjet head, water-based ink such as disperse dye ink or sublimation ink is used. Such a water-based ink has an alkaline property by containing an additive such as a dispersant. In addition, even if the liquid property of the ink itself is neutral or weakly alkaline, a fabric coated with a pretreatment agent having a liquid property of alkaline may be used to improve color developability. Even in the case of water-based ink for plain paper, the liquidity is often alkaline for the purpose of preventing penetration into paper.
　このようなアルカリ性環境下では、シランカップリングにより密着性を確保している撥液層は、加水分解（〔Ｈ２Ｏ〕＋〔－Ｏ－Ｓｉ－Ｒ－Ｆ〕→〔-ＯＨ〕＋〔ＨＯ－Ｓｉ－Ｒ－Ｆ〕）が促進されてしまい、十分な信頼性、耐久性を維持できないという問題がある。起毛処理等のための布地表面のアルカリ性前処理剤が、撥液層の信頼性、耐久性に影響を及ぼすことも多い。 Under such an alkaline environment, the liquid repellent layer that has secured adhesion by silane coupling is hydrolyzed ([H 2 O] + [— O—Si—R—F] → [—OH] + [ HO—Si—R—F]) is promoted, and sufficient reliability and durability cannot be maintained. Alkaline pretreatment agents on the fabric surface for raising treatments often affect the reliability and durability of the liquid repellent layer.
　さらに、インクジェットヘッドにおいては、メンテナンスとして、ノズル面を紙、布地又は樹脂ブレードなどで拭き取ることが行われる。このようなメンテナンスをアルカリ性環境下で行うと、撥液層が剥がれ易く、信頼性、耐久性が低くなってしまう。 Furthermore, in the ink jet head, as a maintenance, the nozzle surface is wiped off with paper, cloth or a resin blade. When such maintenance is performed in an alkaline environment, the liquid repellent layer is easily peeled off, and the reliability and durability are lowered.
　本発明に係るインクジェットヘッド１００は、特に、ノズル１１ａから吐出する液滴をアルカリ性インク滴としたときに、撥インク性コーティング層６０の顕著な効果が得られる。すなわち、本発明における撥インク性コーティング層６０において、第１層６１及び第２層６２の界面においてＳｉ－Ｏ結合を有しないようにすれば、アルカリ性インク使用下においても撥インク性の劣化が見られず、耐久性が高いのである。また、第２層６２の全体においてＳｉ－Ｏ結合を有しないようにすれば、アルカリ性インク使用下における耐久性は、より良好となる。このインクジェットヘッドにおいては、ノズル面Ｐを紙、布地又は樹脂ブレードなどで拭き取るメンテナンスをアルカリ性環境下で行っても、撥液層６０が剥がれることがなく、信頼性、耐久性が高い。 In the inkjet head 100 according to the present invention, the ink repellent coating layer 60 has a remarkable effect, particularly when the droplets ejected from the nozzle 11a are alkaline ink droplets. In other words, if the ink-repellent coating layer 60 in the present invention has no Si—O bond at the interface between the first layer 61 and the second layer 62, the ink-repellent deterioration is observed even when alkaline ink is used. It is not durable. Further, if the entire second layer 62 has no Si—O bond, the durability under the use of alkaline ink becomes better. In this ink jet head, even when the maintenance for wiping the nozzle surface P with paper, cloth, resin blade or the like is performed in an alkaline environment, the liquid repellent layer 60 is not peeled off, and the reliability and durability are high.
〔ノズルプレート及び撥インク性コーティング層の製造方法〕
　このインクジェットヘッド１００の製造方法として、ノズルプレート１１及び撥インク性コーティング層６０の製造方法について説明する。 [Manufacturing method of nozzle plate and ink repellent coating layer]
As a method for manufacturing the inkjet head 100, a method for manufacturing the nozzle plate 11 and the ink repellent coating layer 60 will be described.
　図６は、本発明に係るインクジェットヘッドの製造方法を説明する図である。 FIG. 6 is a diagram for explaining a method of manufacturing an ink jet head according to the present invention.
　まず、図６（ａ）に示すように、平板状のノズルプレート素材１１ｂを、ステンレス、ニッケル又はその他の金属材料、ポリイミド樹脂材料又はその他の有機物材料、あるいは、シリコン材料により形成する。 First, as shown in FIG. 6A, a flat nozzle plate material 11b is formed of stainless steel, nickel or other metal material, polyimide resin material or other organic material, or silicon material.
　次に、図６（ｂ）に示すように、ノズルプレート素材に、ノズル１１ａを形成してノズルプレート１１とする。ノズル１１ａは、ノズルプレート素材に対するレーザ加工により形成することができる。また、ノズル１１ａは、ノズルプレート素材に対するポンチ加工による穴開けの後に、穴周辺を研磨して形成することができる。ノズル１１ａをポンチ加工により形成する場合には、ステンレスからなるノズルプレート素材を用いることが好ましい。ノズル１１ａの形成には、これらの何れの方法を採用してもよい。さらに、ノズル１１ａを有するノズルプレート１１を、電鋳加工により直接形成することもできる。ノズルプレート１１を電鋳加工により形成する場合には、材料としてニッケルを用いることが好ましい。 Next, as shown in FIG. 6B, the nozzle plate 11 is formed by forming the nozzle 11a on the nozzle plate material. The nozzle 11a can be formed by laser processing on the nozzle plate material. The nozzle 11a can be formed by polishing the periphery of the hole after punching the nozzle plate material by punching. When the nozzle 11a is formed by punching, it is preferable to use a nozzle plate material made of stainless steel. Any of these methods may be adopted for forming the nozzle 11a. Furthermore, the nozzle plate 11 having the nozzles 11a can be directly formed by electroforming. When the nozzle plate 11 is formed by electroforming, nickel is preferably used as the material.
　次に、図６（ｃ）に示すように、ノズル面Ｐ（ノズル１１ａの吐出側開口の周囲部）に対し、非単結晶炭素膜からなる第１層６１を形成する。 Next, as shown in FIG. 6C, a first layer 61 made of a non-single-crystal carbon film is formed on the nozzle surface P (the peripheral portion of the discharge side opening of the nozzle 11a).
　第１層６１の形成には、ＣＶＤ（Chemical Vapor Deposition）法（熱ＣＶＤ、光ＣＶＤ、プラズマＣＶＤ）や、ＰＶＤ（Physical Vapor Deposition）法を好ましく採用することができる。第１層６１をダイヤモンドライクカーボン膜とする場合には、プラズマＣＶＤ法を採用する。 For the formation of the first layer 61, a CVD (Chemical Vapor Deposition) method (thermal CVD, photo CVD, plasma CVD) or a PVD (Physical Vapor Deposition) method can be preferably employed. When the first layer 61 is a diamond-like carbon film, a plasma CVD method is employed.
　ＣＶＤ法は、ガスや液体を気化させてガス化し、熱や光によってエネルギーを与え、又は、高周波でプラズマ化し、原料物質をラジカル化させ基板上に吸着させて堆積させるものである。ＰＶＤ法は、高真空中で、固体のアルミニウムやチタン等の金属ターゲットに高エネルギーの原子アルゴンやそのイオンを衝突させ、金属原子を飛ばし、その金属原子をワーク表面に層状に付着させるものである。 In the CVD method, gas or liquid is vaporized and gasified, energy is applied by heat or light, or plasma is generated at high frequency, and the raw material is radicalized and adsorbed on the substrate for deposition. The PVD method is a method in which a high-energy atomic argon or its ion is collided with a solid metal target such as aluminum or titanium in a high vacuum, the metal atom is blown off, and the metal atom is deposited in a layered manner on the workpiece surface. .
　第１層６１をダイヤモンドライクカーボン膜として成膜するには、原料ガスとしてアセチレン（Ｃ２Ｈ２）などの炭化水素ガスを使い、チャンバー内で原料ガスをプラズマ化し、気相合成した炭化水素をノズルプレート１１の表面に蒸着させる。 In order to form the first layer 61 as a diamond-like carbon film, a hydrocarbon gas such as acetylene (C 2 H 2 ) is used as a raw material gas, and the raw material gas is turned into plasma in the chamber, and the gas-phase synthesized hydrocarbon is used. Vapor deposition is performed on the surface of the nozzle plate 11.
　次に、図６（ｄ）に示すように、第１層６１上に、フッ素含有非単結晶炭素膜からなる第２層６２を積層させて形成し、撥インク性コーティング層６０とする。 Next, as shown in FIG. 6 (d), a second layer 62 made of a fluorine-containing non-single-crystal carbon film is formed on the first layer 61 to form an ink-repellent coating layer 60.
　第２層６２の形成にも、第１層６１と同様に、プラズマＣＶＤ法や、ＰＶＤ法を好ましく採用することができる。 Also in the formation of the second layer 62, as in the first layer 61, a plasma CVD method or a PVD method can be preferably employed.
　第２層６２は、フッ素を含有することにより、撥液性を有している。第２層６２にフッ素を含有させるには、例えば、成膜時の原料ガスにフッ素を含有するガスを用いるか、又は、成膜後にフッ素を含有するガスを用いて非単結晶炭素膜の表面を処理する等の方法により、非単結晶炭素膜の表面をフッ素で修飾する手法を採用することができる。また、フッ素ガスを用いずに、極安定パーフルオロアルキルラジカルを有効成分とする表面処理剤を用いて、非単結晶炭素膜の表面にフッ素を導入することもできる。 The second layer 62 has liquid repellency by containing fluorine. In order to contain fluorine in the second layer 62, for example, a gas containing fluorine is used as a source gas during film formation, or the surface of the non-single-crystal carbon film using a gas containing fluorine after film formation. A method of modifying the surface of the non-single-crystal carbon film with fluorine can be employed by a method such as treating the surface. Alternatively, fluorine can be introduced to the surface of the non-single-crystal carbon film using a surface treatment agent containing a very stable perfluoroalkyl radical as an active component without using fluorine gas.
　この撥インク性コーティング層６０は、前述したように、第２層６２がシランカップリング剤によるＳｉ－Ｏ結合を有しないものとし、第１層６１及び第２層６２の界面において、Ｓｉ－Ｏ結合を有しないものとすることが好ましい。また、第１層６１及び第２層６２の少なくとも何れか一方は、ダイヤモンドライクカーボン（ＤＬＣ）膜とすることが好ましい。 As described above, the ink repellent coating layer 60 is such that the second layer 62 does not have a Si—O bond due to the silane coupling agent, and the Si—O bond is formed at the interface between the first layer 61 and the second layer 62. It is preferable to have no bond. In addition, at least one of the first layer 61 and the second layer 62 is preferably a diamond-like carbon (DLC) film.
　次に、撥インク性コーティング層６０の表面をマスクして、ノズル１１ａの内壁面に対して撥液性を消失させる処理を行う。撥液性を消失させる処理としては、酸素を含有したプラズマ処理を採用することが好ましい。このとき、ノズル１１ａの入口側開口（チャネル１３側の開口）の周囲部（ノズル面Ｐの裏面）に対しても撥液性を消失させる処理を行うことが好ましい。ただし、ノズル１１ａの入口側開口の周囲部（ノズル面Ｐの裏面）をマスクして撥インク性コーティング層６０を成膜すれば、この部分への撥液性を消失させる処理は不要である。 Next, the surface of the ink-repellent coating layer 60 is masked to perform a process of eliminating the liquid repellency on the inner wall surface of the nozzle 11a. As the treatment for eliminating the liquid repellency, it is preferable to employ a plasma treatment containing oxygen. At this time, it is preferable to perform the process of eliminating the liquid repellency also on the peripheral portion (the back surface of the nozzle surface P) of the inlet side opening (opening on the channel 13 side) of the nozzle 11a. However, if the ink repellent coating layer 60 is formed by masking the peripheral portion of the inlet side opening of the nozzle 11a (the back surface of the nozzle surface P), the process of eliminating the liquid repellency on this portion is unnecessary.
　なお、第１層６１と第２層６２とは、明確な界面において分離されている必要はなく、撥インク性コーティング層６０の厚み方向について、表面に向けてフッ素の含有量が徐々に大きくなるように成膜し、フッ素の含有量が所定値未満の層を第１層６１とし、フッ素の含有量が所定値以上の層を第２層６２としてもよい。 The first layer 61 and the second layer 62 do not need to be separated at a clear interface, and the fluorine content gradually increases toward the surface in the thickness direction of the ink-repellent coating layer 60. The layer having a fluorine content of less than a predetermined value may be used as the first layer 61, and the layer having a fluorine content of a predetermined value or more may be used as the second layer 62.
　このような撥インク性コーティング層６０は、第１層６１の成膜の過程で、途中から原料ガス中のフッ素濃度を徐々に増加させ、フッ素濃度が所定値を超えた時点から連続的に第２層６２の成膜過程とすることにより形成することができる。 Such an ink-repellent coating layer 60 gradually increases the fluorine concentration in the raw material gas from the middle during the film formation of the first layer 61, and continues from the point when the fluorine concentration exceeds a predetermined value. The two layers 62 can be formed by the film formation process.
　図７は、本発明に係るインクジェットヘッドの製造方法の他の例を説明する図である。 FIG. 7 is a diagram for explaining another example of a method for manufacturing an ink jet head according to the present invention.
　また、ノズルプレート１１及び撥インク性コーティング層６０の製造方法としては、図７に示すように、平板状のノズルプレート素材１１ｂに撥インク性コーティング層６０を形成した後に、ノズル１１ａを形成するようにしてもよい。 Further, as a method for manufacturing the nozzle plate 11 and the ink repellent coating layer 60, as shown in FIG. 7, the nozzle 11a is formed after the ink repellent coating layer 60 is formed on the flat nozzle plate material 11b. It may be.
　すなわち、先ず、図７（ａ）に示すように、ノズルプレート素材１１ｂのノズル面Ｐ（ノズル１１ａの吐出側開口が形成される箇所の周囲部）に対し、図７（ｂ）に示すように、前述のように第１層６１を形成する。次に、図７（ｃ）に示すように、第１層６１上に、前述のように第２層６２を積層させて形成し、撥インク性コーティング層６０とする。次に、図７（ｄ）に示すように、撥インク性コーティング層６０が形成されたノズルプレート素材１１ｂに対して、ノズル１１ａを形成してノズルプレート１１とする。 That is, first, as shown in FIG. 7 (a), as shown in FIG. 7 (b), the nozzle surface P of the nozzle plate material 11b (periphery of the portion where the discharge side opening of the nozzle 11a is formed) is shown. The first layer 61 is formed as described above. Next, as shown in FIG. 7C, the second layer 62 is laminated on the first layer 61 as described above to form the ink repellent coating layer 60. Next, as illustrated in FIG. 7D, the nozzle 11 a is formed on the nozzle plate material 11 b on which the ink-repellent coating layer 60 is formed to form the nozzle plate 11.
　ノズル１１ａは、前述したように、レーザ加工、ポンチ加工及び研磨、電鋳加工の何れの方法によっても形成することができる。ただし、このように撥インク性コーティング層６０の形成後にノズル１１ａを形成する場合には、ステンレス又はポリイミドからなるノズルプレート素材を用いて、レーザ加工によりノズル１１ａを形成することが好ましい。 As described above, the nozzle 11a can be formed by any of laser processing, punching and polishing, and electroforming. However, when the nozzle 11a is formed after the ink repellent coating layer 60 is formed in this way, it is preferable to form the nozzle 11a by laser processing using a nozzle plate material made of stainless steel or polyimide.
　このように、撥インク性コーティング層６０を形成した後に、ノズル１１ａを形成するようにした場合には、ノズル１１ａの内壁面に対して撥液性を消失させる処理を行うことは不要である。 As described above, when the nozzle 11a is formed after the ink-repellent coating layer 60 is formed, it is not necessary to perform the process of eliminating the liquid repellency on the inner wall surface of the nozzle 11a.
〔マニホールド〕
　図８は、図１に示すインクジェットヘッドに備わるマニホールドを示す断面図である。 [Manifold]
FIG. 8 is a cross-sectional view showing a manifold provided in the ink jet head shown in FIG.
　次に、マニホールド５について説明する。マニホールド５は、図２及び図８に示すように、合成樹脂材料等によって、下面部に開口部５１ａを有する横長の箱型に形成されている。このマニホールド５は、開口部５１ａを、下面部に接着された配線基板２によって塞がれている。マニホールド５の内部空間は、インクジェット記録装置２００内のインクタンク２０１から供給されるインクが貯留される共通インク室５１となっている。 Next, the manifold 5 will be described. As shown in FIGS. 2 and 8, the manifold 5 is made of a synthetic resin material or the like into a horizontally long box shape having an opening 51a on the lower surface. In the manifold 5, the opening 51 a is closed by the wiring substrate 2 bonded to the lower surface portion. The internal space of the manifold 5 is a common ink chamber 51 in which ink supplied from the ink tank 201 in the ink jet recording apparatus 200 is stored.
　共通インク室５１には、この共通インク室５１内にインクを供給する流路となるインク供給管５ａが連設されている。このインク供給管５ａは、配線基板２から遠い側（上側）において、共通インク室５１に連通されている。このインク供給管５ａの上端側には、接続部７ａが設けられている。この接続部７ａは、インクジェット記録装置２００側の接続部２０６ａに着脱可能に接続される。インクジェット記録装置２００側の接続部２０６ａは、インク移送管２０２に連通している。これにより、インクジェットヘッド１００は、インクジェット記録装置２００からのインクの移送が可能となる。 In the common ink chamber 51, an ink supply pipe 5a serving as a flow path for supplying ink into the common ink chamber 51 is connected. The ink supply pipe 5 a communicates with the common ink chamber 51 on the side farther from the wiring board 2 (upper side). A connecting portion 7a is provided on the upper end side of the ink supply pipe 5a. The connecting portion 7a is detachably connected to the connecting portion 206a on the ink jet recording apparatus 200 side. The connecting portion 206 a on the ink jet recording apparatus 200 side communicates with the ink transfer tube 202. As a result, the ink jet head 100 can transfer ink from the ink jet recording apparatus 200.
　また、共通インク室５１には、この共通インク室５１内からインクを回収する流路となるインク回収管５ｂが連設されている。このインク回収管５ｂは、配線基板２から遠い側（上側）において、共通インク室５１に連通されている。このインク回収管５ｂの上端側には、接続部７ｂが設けられている。この接続部７ｂは、インクジェット記録装置２００側の接続部２０６ｂに着脱可能に接続される。インクジェット記録装置２００側の接続部２０６ｂは、インク返送管２０３に連通している。これにより、インクジェットヘッド１００は、インクジェット記録装置２００へのインクの返送が可能となる。 In addition, the common ink chamber 51 is provided with an ink collection pipe 5b serving as a flow path for collecting ink from the common ink chamber 51. The ink recovery tube 5 b communicates with the common ink chamber 51 on the side farther from the wiring board 2 (upper side). A connecting portion 7b is provided on the upper end side of the ink recovery tube 5b. The connecting portion 7b is detachably connected to the connecting portion 206b on the ink jet recording apparatus 200 side. The connecting portion 206 b on the ink jet recording apparatus 200 side communicates with the ink return pipe 203. As a result, the ink jet head 100 can return ink to the ink jet recording apparatus 200.
　インク供給管５ａとインク回収管５ｂとは、共通インク室５１の長手方向の両端部に離して配置することが好ましい。本実施形態におけるインク供給管５ａは、マニホールド５の上面側における図８中の左側の端部に配置され、また、インク回収管５ｂは、マニホールド５の上面側における図８中の右側の端部に配置されている。これにより、インク供給管５ａから共通インク室５１に供給されたインクを、インク回収管５ｂに向けて、共通インク室５１内の全体に亘って流すことができる。従って、共通インク室５１内にインクが滞留する部位が形成されにくく、インク中の気泡をより効率良く排除することができる。 It is preferable that the ink supply pipe 5a and the ink recovery pipe 5b are arranged apart from both ends of the common ink chamber 51 in the longitudinal direction. In the present embodiment, the ink supply pipe 5a is disposed at the left end portion in FIG. 8 on the upper surface side of the manifold 5, and the ink recovery tube 5b is disposed on the right end portion in FIG. Is arranged. As a result, the ink supplied from the ink supply pipe 5a to the common ink chamber 51 can flow toward the ink recovery pipe 5b throughout the common ink chamber 51. Accordingly, it is difficult to form a portion where the ink stays in the common ink chamber 51, and bubbles in the ink can be more efficiently eliminated.
〔インクジェット記録装置の構成〕
　図９は、本発明に係るインクジェット記録装置の要部の構成を示す斜視図である。 [Configuration of inkjet recording apparatus]
FIG. 9 is a perspective view showing a configuration of a main part of the ink jet recording apparatus according to the present invention.
　本発明に係るインクジェット記録装置は、図８及び図９に示すように、前述したインクジェットヘッド１００と、インクジェットヘッド１００の筐体６を支持するヘッド支持部材２０６と、インクジェットヘッド１００を制御する制御手段２０４とを備えて構成される。 As shown in FIGS. 8 and 9, the inkjet recording apparatus according to the present invention includes the inkjet head 100 described above, a head support member 206 that supports the casing 6 of the inkjet head 100, and a control unit that controls the inkjet head 100. 204.
　このインクジェット記録装置２００は、図示しない移動操作手段によって一定方向（副走査方向）に搬送される記録媒体Ｍ上に、インクジェットヘッド１００からインクを吐出してドットを形成して画像を記録する。いわゆるワンパス方式のインクジェット記録装置においては、インクジェットヘッド１００は固定して配置され、記録媒体Ｍが搬送される過程で、ノズル１１ａから記録媒体Ｍに向けてインクを吐出し画像を記録する。また、いわゆるスキャン方式のインクジェット記録装置においては、インクジェットヘッド１は、ヘッド支持部材（キャリッジ）２０６に搭載され、このヘッド支持部材２０６が移動操作手段により主走査方向に往復移動操作される過程で、ノズル１１ａから記録媒体Ｍに向けてインクを吐出し画像を記録する。 The ink jet recording apparatus 200 records an image by forming dots by ejecting ink from the ink jet head 100 on a recording medium M conveyed in a certain direction (sub-scanning direction) by a moving operation means (not shown). In a so-called one-pass ink jet recording apparatus, the ink jet head 100 is fixedly arranged, and in the process of transporting the recording medium M, ink is ejected from the nozzles 11 a toward the recording medium M to record an image. In the so-called scanning type ink jet recording apparatus, the ink jet head 1 is mounted on a head support member (carriage) 206, and the head support member 206 is reciprocated in the main scanning direction by a moving operation means. Ink is ejected from the nozzle 11a toward the recording medium M to record an image.
　本発明に係るインクジェット記録装置２００は、インクジェットヘッド１の撥インク性コーティング層６０を第１層６１及び第２層６２の界面においてＳｉ－Ｏ結合を有しないものとすれば、ノズル１１ａから吐出する液滴をアルカリ性インク滴とし、記録媒体Ｍとして布地を用いたときに、撥インク性コーティング層６０の効果が奏される。すなわち、布地への画像形成に好適なアルカリ性インク滴を用いるアルカリ性環境下では、シランカップリングにより密着性を確保している撥液層は、加水分解（〔Ｈ２Ｏ〕＋〔－Ｏ－Ｓｉ－Ｒ－Ｆ〕→〔-ＯＨ〕＋〔ＨＯ－Ｓｉ－Ｒ－Ｆ〕）が促進され、十分な信頼性、耐久性を維持できないのであるが、撥インク性コーティング層６０をＳｉ－Ｏ結合を有しないものとすれば、アルカリ性インク使用下においても撥インク性の劣化が見られず、耐久性が高いのである。 The ink jet recording apparatus 200 according to the present invention discharges from the nozzle 11a if the ink repellent coating layer 60 of the ink jet head 1 has no Si—O bond at the interface between the first layer 61 and the second layer 62. When the droplets are alkaline ink droplets and the fabric is used as the recording medium M, the effect of the ink repellent coating layer 60 is exhibited. That is, in an alkaline environment using alkaline ink droplets suitable for forming an image on a fabric, the liquid repellent layer whose adhesion is secured by silane coupling is hydrolyzed ([H 2 O] + [— O—Si -RF] → [-OH] + [HO-Si-RF]) is promoted, and sufficient reliability and durability cannot be maintained, but the ink repellent coating layer 60 is bonded to Si-O. If the ink does not have the ink, the ink repellency is not deteriorated even when the alkaline ink is used, and the durability is high.
　図８及び図９では、１つのインクジェットヘッド１のみを示しているが、一般にインクジェット記録装置２００には、例えばイエロー（Ｙ）、マゼンタ（Ｍ）、シアン（Ｃ）、ブラック（Ｋ）等の各色インク用の複数のインクジェットヘッド１が搭載される。本実施形態に示すインクジェット記録装置２００においては、インクを貯蔵するインクタンク２０１とインクジェットヘッド１００の共通インク室５１とが、インク移送管２０２及びインク返送管２０３によって連通されている。 8 and 9, only one inkjet head 1 is shown, but in general, the inkjet recording apparatus 200 has colors such as yellow (Y), magenta (M), cyan (C), and black (K). A plurality of ink jet heads 1 for ink are mounted. In the ink jet recording apparatus 200 shown in the present embodiment, an ink tank 201 that stores ink and a common ink chamber 51 of the ink jet head 100 are communicated with each other by an ink transfer pipe 202 and an ink return pipe 203.
　インク移送管２０２の途中には、インクジェット記録装置２００の制御部１０４によって駆動制御される流路圧力付与手段となる移送ポンプ２０５が設けられている。この移送ポンプ２０５が駆動することにより、インクタンク２０１内のインクが、インク移送管２０２を介してインクジェットヘッド１００に移送される。また、移送ポンプ２０５が駆動することにより、インクジェットヘッド１００内のインクが、インク返送管２０３を介してインクタンク２０１に戻される。このインクジェット記録装置２００において、移送ポンプ２０５は、インクタンク２０１内のインクのインクジェットヘッド１００への移送及び共通インク室５１に移送されたインクの回収を行っている。 In the middle of the ink transfer pipe 202, a transfer pump 205 serving as a flow path pressure applying means that is driven and controlled by the control unit 104 of the inkjet recording apparatus 200 is provided. When the transfer pump 205 is driven, the ink in the ink tank 201 is transferred to the inkjet head 100 via the ink transfer pipe 202. Further, when the transfer pump 205 is driven, the ink in the inkjet head 100 is returned to the ink tank 201 via the ink return pipe 203. In the inkjet recording apparatus 200, the transfer pump 205 performs transfer of the ink in the ink tank 201 to the inkjet head 100 and recovery of the ink transferred to the common ink chamber 51.
　インクタンク２０１は、格別限定されないが、タンクの底面に到達しない仕切り板２０１ａによって、インク移送室２０１ｂとインク返送室２０１ｃとに仕切ることが好ましい。この場合、インク移送室２０１ｂ内にインク移送管２０２の一端部を配置し、また、インク返送室２０１ｃ内にインク返送管２０３の一端部を配置する。仕切り板２０１ａは、インク返送室２０１ｃに返送されてきたインクに含まれる気泡が再度インク移送管２０２に流入しないように、インクを十分に脱気するために設けられる。気泡自体は浮力が高いので、気泡が仕切り板２０１ａの下側を通過してインク移送室２０１ｂに流入することが制限される。このような態様は、インクを循環使用する場合に好ましい態様である。 The ink tank 201 is not particularly limited, but is preferably partitioned into an ink transfer chamber 201b and an ink return chamber 201c by a partition plate 201a that does not reach the bottom surface of the tank. In this case, one end of the ink transfer tube 202 is disposed in the ink transfer chamber 201b, and one end of the ink return tube 203 is disposed in the ink return chamber 201c. The partition plate 201a is provided to sufficiently degas the ink so that bubbles contained in the ink returned to the ink return chamber 201c do not flow into the ink transfer pipe 202 again. Since the bubbles themselves have high buoyancy, the bubbles are restricted from passing under the partition plate 201a and flowing into the ink transfer chamber 201b. Such an embodiment is a preferred embodiment when the ink is circulated.
　このインクジェット記録装置２００においては、インクジェットヘッド１００の各チャネル１３内から共通インク排出路１６１を経てインク排出室５３に至る流路が形成されているので、これらの流路抵抗の総和を考慮して、この条件においてノズル１１ａからのメニスカスブレイクが生じないように、移送ポンプ２０５が与える圧力等の条件が決定される。また、各個別インク排出路１１ｂ、１１ｂの流路抵抗の合計は、ノズル１１ａからのメニスカスブレイクが生じないように、移送ポンプ２０５が与える圧力等の条件を勘案して規定される。各個別インク排出路１１ｂ、１１ｂは、その流路抵抗の合計が既定値から外れない限りにおいて、適宜に開口面積及び長さを設定することができる。 In the ink jet recording apparatus 200, since a flow path is formed from each channel 13 of the ink jet head 100 to the ink discharge chamber 53 through the common ink discharge path 161, the total of these flow path resistances is taken into consideration. Under these conditions, conditions such as pressure applied by the transfer pump 205 are determined so that meniscus breakage from the nozzle 11a does not occur. Further, the total of the flow resistances of the individual ink discharge paths 11b and 11b is defined in consideration of conditions such as pressure applied by the transfer pump 205 so as not to cause a meniscus break from the nozzle 11a. Each of the individual ink discharge paths 11b and 11b can have an opening area and a length appropriately set as long as the total of the flow resistance does not deviate from a predetermined value.
　なお、本発明は、前述した各実施形態に限定されることなく、本発明の趣旨を逸脱しない範囲において、種々の改良並びに設計の変更を行ってもよい。上記各実施形態においては、ヘッドチップ１として、圧電材料からなる隔壁部１２とチャネル１３とが交互に並設されており、隔壁部１２の駆動電極に電圧を印加することにより隔壁部１２をせん断変形させてチャネル１３内のインクをノズル１１ａから吐出させるものを例示したが、ヘッドチップ１の構成はこれに限られるものではない。 Note that the present invention is not limited to the above-described embodiments, and various improvements and design changes may be made without departing from the spirit of the present invention. In each of the embodiments described above, as the head chip 1, the partition walls 12 and the channels 13 made of a piezoelectric material are alternately arranged in parallel, and the partition wall 12 is sheared by applying a voltage to the drive electrode of the partition wall 12. Although the example in which the ink in the channel 13 is deformed and ejected from the nozzle 11a is illustrated, the configuration of the head chip 1 is not limited to this.
　すなわち、列状又は２次元状に並設され、かつ、並び方向に対する直交方向の上方及び下方に入口及び出口がそれぞれ設けられたチャネル１３を有し、チャネル１３に対して圧電素子の収縮により圧力を付与して、チャネル１３の出口に連通するノズル１１ａからインクを吐出させる構成のものであれば如何なるヘッドチップであってもよい。 That is, it has a channel 13 arranged side by side or two-dimensionally, and provided with an inlet and an outlet above and below in the direction perpendicular to the arrangement direction, and pressure is applied to the channel 13 by contraction of the piezoelectric element. And any head chip may be used as long as the ink is ejected from the nozzle 11 a communicating with the outlet of the channel 13.
　また、上記各実施形態にあっては、インク吐出方向が上下方向と略平行となるように構成されたインクジェットヘッド１００を示したが、インク吐出方向は如何なる方向であっても良く、例えば、傾斜方向や水平方向となるように構成してもよい。 Further, in each of the above embodiments, the inkjet head 100 configured such that the ink discharge direction is substantially parallel to the vertical direction is shown, but the ink discharge direction may be any direction, for example, an inclination You may comprise so that it may become a direction or a horizontal direction.
　さらに、その他、具体的な細部構造等についても適宜に変更可能であることは勿論である。加えて、今回開示された各実施形態は、全ての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した説明ではなくて特許請求の範囲によって示され、特許請求の範囲と均等の意味及び範囲内での全ての変更が含まれることが意図される。 Furthermore, it is needless to say that other specific detailed structures can be appropriately changed. In addition, each embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
　上述のように、本発明によれば、記録媒体に対向されるノズル面に十分な信頼性、耐久性を維持できる撥液層が形成され、ノズル面への液体の付着が防止され、良好な液滴の吐出を行うことができるインクジェットヘッド、インクジェットヘッドの製造方法及びインクジェット記録装置を提供することができる。 As described above, according to the present invention, a liquid repellent layer capable of maintaining sufficient reliability and durability is formed on the nozzle surface facing the recording medium, and liquid adhesion to the nozzle surface is prevented, which is favorable. An ink jet head capable of discharging droplets, an ink jet head manufacturing method, and an ink jet recording apparatus can be provided.
　１：ヘッドチップ
　１１：ノズルプレート
　１１ａ：ノズル
　１２：隔壁部
　１３：チャネル
　１４：ダミーチャネル
　１５：側壁部材
　２：配線基板
　２ａ：排出孔
　２２：開口部
　３：フレキシブル基板
　４：駆動回路基板
　５：マニホールド
　５ａ：インク供給管
　５ｂ：インク回収管
　５１：共通インク室
　５１ａ：開口部
　６０：撥インク性コーティング層
　６１：第１層
　６２：第２層
　１００：インクジェットヘッド
　２００：インクジェット記録装置
　２０１：インクタンク
　２０２：インク移送管
　２０３：インク返送管
　２０４：制御部
　２０５：移送ポンプ
　２０６：ヘッド支持部材
　Ｐ：ノズル面
　Ｍ：記録媒体 DESCRIPTION OF SYMBOLS 1: Head chip 11: Nozzle plate 11a: Nozzle 12: Partition part 13: Channel 14: Dummy channel 15: Side wall member 2: Wiring board 2a: Ejection hole 22: Opening part 3: Flexible board 4: Drive circuit board 5: Manifold 5a: ink supply pipe 5b: ink recovery pipe 51: common ink chamber 51a: opening 60: ink repellent coating layer 61: first layer 62: second layer 100: ink jet head 200: ink jet recording apparatus 201: ink tank 202 : Ink transfer pipe 203: Ink return pipe 204: Control unit 205: Transfer pump 206: Head support member P: Nozzle surface M: Recording medium

Claims (18)

  1. 　少なくとも１つのノズルが形成されたノズルプレートを有し、該ノズルから液滴を吐出して記録媒体上に画像形成を行うインクジェットヘッドであって、
    　前記ノズルの吐出側開口の周囲部には、非単結晶炭素膜からなる第１層と、フッ素含有非単結晶炭素膜からなる第２層とが積層された撥液層が形成されているインクジェットヘッド。     An inkjet head having a nozzle plate on which at least one nozzle is formed and ejecting droplets from the nozzle to form an image on a recording medium,
    An inkjet in which a liquid repellent layer in which a first layer made of a non-single-crystal carbon film and a second layer made of a fluorine-containing non-single-crystal carbon film are laminated is formed around the discharge side opening of the nozzle head.
  2. 　前記非単結晶炭素膜及び前記フッ素含有非単結晶炭素膜の少なくとも何れか一方は、ダイヤモンドライクカーボン膜である請求項１記載のインクジェットヘッド。 The inkjet head according to claim 1, wherein at least one of the non-single crystal carbon film and the fluorine-containing non-single crystal carbon film is a diamond-like carbon film.
  3. 　前記非単結晶炭素膜及び前記フッ素含有非単結晶炭素膜の界面において、Ｓｉ－Ｏ結合を有しない請求項１又は２記載のインクジェットヘッド。 3. The ink jet head according to claim 1, wherein an Si—O bond is not present at an interface between the non-single crystal carbon film and the fluorine-containing non-single crystal carbon film.
  4. 　前記ノズルから吐出する液滴は、アルカリ性インク滴である請求項３記載のインクジェットヘッド。 4. The ink jet head according to claim 3, wherein the liquid droplets ejected from the nozzle are alkaline ink droplets.
  5. 　前記ノズルプレートをなす材料は、ステンレスである請求項１～４の何れかに記載のインクジェットヘッド。 The ink jet head according to any one of claims 1 to 4, wherein the material forming the nozzle plate is stainless steel.
  6. 　前記ノズルプレートをなす材料は、ニッケルである請求項１～４の何れかに記載のインクジェットヘッド。 The ink jet head according to any one of claims 1 to 4, wherein a material forming the nozzle plate is nickel.
  7. 　前記ノズルプレートをなす材料は、ポリイミド樹脂である請求項１～４の何れかに記載のインクジェットヘッド。 The ink jet head according to any one of claims 1 to 4, wherein the material forming the nozzle plate is a polyimide resin.
  8. 　少なくとも１つのノズルが形成されたノズルプレートを有し、該ノズルから液滴を吐出して記録媒体上に画像形成を行うインクジェットヘッドを製造する方法であって、
    　前記ノズルを形成し、
    　前記ノズルの吐出側開口の周囲部に対し、非単結晶炭素膜からなる第１層を形成し、
    　前記第１層上にフッ素含有非単結晶炭素膜からなる第２層を積層させて形成して撥液層とし、
    　前記撥液層の表面をマスクして、前記ノズルの内壁面に対して撥液性を消失させる処理を行うインクジェットヘッドの製造方法。     A method of manufacturing an inkjet head having a nozzle plate on which at least one nozzle is formed, and ejecting droplets from the nozzle to form an image on a recording medium,
    Forming the nozzle,
    A first layer made of a non-single crystal carbon film is formed around the discharge side opening of the nozzle,
    A liquid repellent layer is formed by laminating a second layer made of a fluorine-containing non-single-crystal carbon film on the first layer,
    A method of manufacturing an ink jet head, wherein the surface of the liquid repellent layer is masked to perform a process of eliminating liquid repellency on the inner wall surface of the nozzle.
  9. 　前記ノズルの入口側開口の周囲部に対しても撥液性を消失させる処理を行う請求項８記載のインクジェットヘッドの製造方法。 The method for manufacturing an ink jet head according to claim 8, wherein a treatment for eliminating liquid repellency is performed also on a peripheral portion of the inlet side opening of the nozzle.
  10. 　前記撥液性を消失させる処理は、酸素を含有したプラズマ処理である請求項８又は９記載のインクジェットヘッドの製造方法。 10. The method of manufacturing an ink jet head according to claim 8, wherein the treatment for eliminating the liquid repellency is a plasma treatment containing oxygen.
  11. 　少なくとも１つのノズルが形成されたノズルプレートを有し、該ノズルから液滴を吐出して記録媒体上に画像形成を行うインクジェットヘッドを製造する方法であって、
    　前記ノズルの吐出側開口が形成される箇所の周囲部に対し、非単結晶炭素膜からなる第１層を形成し、
    　前記第１層上にフッ素含有非単結晶炭素膜からなる第２層を積層させて形成して撥液層とし、
    　前記ノズルを形成するインクジェットヘッドの製造方法。     A method of manufacturing an inkjet head having a nozzle plate on which at least one nozzle is formed, and ejecting droplets from the nozzle to form an image on a recording medium,
    Forming a first layer made of a non-single-crystal carbon film on the periphery of the portion where the discharge side opening of the nozzle is formed;
    A liquid repellent layer is formed by laminating a second layer made of a fluorine-containing non-single-crystal carbon film on the first layer,
    A method of manufacturing an inkjet head for forming the nozzle.
  12. 　前記ノズルは、平板状のノズルプレート素材に対するポンチ加工による穴開けの後に、穴周辺を研磨して形成する請求項８、９又は１０記載のインクジェットヘッドの製造方法。 11. The method of manufacturing an ink jet head according to claim 8, 9 or 10, wherein the nozzle is formed by polishing the periphery of a hole after punching a flat nozzle plate material by punching.
  13. 　前記ノズルプレートを電鋳加工により形成する請求項８、９又は１０記載のインクジェットヘッドの製造方法。 The method of manufacturing an ink jet head according to claim 8, 9 or 10, wherein the nozzle plate is formed by electroforming.
  14. 　前記ノズルは、平板状のノズルプレート素材に対するレーザ加工により形成する請求項８～１１の何れかに記載のインクジェットヘッドの製造方法。 12. The method of manufacturing an inkjet head according to claim 8, wherein the nozzle is formed by laser processing on a flat nozzle plate material.
  15. 　前記ノズルプレートを、ステンレスにより形成する請求項８～１２及び１４の何れかに記載のインクジェットヘッドの製造方法。 15. The method of manufacturing an ink jet head according to claim 8, wherein the nozzle plate is made of stainless steel.
  16. 　前記ノズルプレートを、ニッケルにより形成する請求項８～１４の何れかに記載のインクジェットヘッドの製造方法。 15. The method of manufacturing an ink jet head according to claim 8, wherein the nozzle plate is made of nickel.
  17. 　前記ノズルプレートを、ポリイミド樹脂により形成する請求項８～１１及び１４の何れかに記載のインクジェットヘッドの製造方法。 The method of manufacturing an ink jet head according to any one of claims 8 to 11 and 14, wherein the nozzle plate is formed of a polyimide resin.
  18. 　請求項３記載のインクジェットヘッドと、
    　前記インクジェットヘッドと前記記録媒体とを相対移動させる移動操作手段とを備え、
    　前記ノズルから吐出する液滴は、アルカリ性インク滴であり、
    　前記記録媒体として、布地を用い、
    　前記インクジェットヘッドと前記布地とを相対移動させて前記布地上に画像形成を行うインクジェット記録装置。     An inkjet head according to claim 3;
    Moving operation means for relatively moving the inkjet head and the recording medium,
    The droplets discharged from the nozzle are alkaline ink droplets,
    As the recording medium, fabric is used,
    An inkjet recording apparatus that forms an image on the fabric by relatively moving the inkjet head and the fabric.
PCT/JP2017/035732 2016-12-16 2017-09-29 Inkjet head, inkjet head manufacturing method and inkjet recording device WO2018110034A1 (en)

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2983679B2 (en) * 1990-04-30 1999-11-29 ゼロックス コーポレイション Coating method
US6315393B1 (en) * 1999-04-30 2001-11-13 Hewlett-Packard Company Ink-jet printhead
JP2003182072A (en) * 2001-12-17 2003-07-03 Matsushita Electric Ind Co Ltd Ink jet head and ink jet recorder
JP2004122384A (en) * 2002-09-30 2004-04-22 Sharp Corp Process for producing nozzle plate and ink jet head
JP2004276568A (en) * 2003-03-19 2004-10-07 Fuji Xerox Co Ltd Ink jet recording head
JP2006346965A (en) * 2005-06-15 2006-12-28 Seiko Epson Corp Liquid jet head
JP2007119657A (en) * 2005-10-31 2007-05-17 Seiko Epson Corp Ink composition for inkjet printing, printing method using the same and printed textile
JP2007261070A (en) * 2006-03-28 2007-10-11 Seiko Epson Corp Manufacturing method of nozzle forming substrate and nozzle forming substrate
JP2013099880A (en) * 2011-11-08 2013-05-23 Fujifilm Corp Method of manufacturing liquid droplet ejection head
JP2013233726A (en) * 2012-05-09 2013-11-21 Konica Minolta Inc Method for manufacturing inkjet recording head

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2983679B2 (en) * 1990-04-30 1999-11-29 ゼロックス コーポレイション Coating method
US6315393B1 (en) * 1999-04-30 2001-11-13 Hewlett-Packard Company Ink-jet printhead
JP2003182072A (en) * 2001-12-17 2003-07-03 Matsushita Electric Ind Co Ltd Ink jet head and ink jet recorder
JP2004122384A (en) * 2002-09-30 2004-04-22 Sharp Corp Process for producing nozzle plate and ink jet head
JP2004276568A (en) * 2003-03-19 2004-10-07 Fuji Xerox Co Ltd Ink jet recording head
JP2006346965A (en) * 2005-06-15 2006-12-28 Seiko Epson Corp Liquid jet head
JP2007119657A (en) * 2005-10-31 2007-05-17 Seiko Epson Corp Ink composition for inkjet printing, printing method using the same and printed textile
JP2007261070A (en) * 2006-03-28 2007-10-11 Seiko Epson Corp Manufacturing method of nozzle forming substrate and nozzle forming substrate
JP2013099880A (en) * 2011-11-08 2013-05-23 Fujifilm Corp Method of manufacturing liquid droplet ejection head
JP2013233726A (en) * 2012-05-09 2013-11-21 Konica Minolta Inc Method for manufacturing inkjet recording head

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