WO2018101802A3 - 가열 어셈블리 - Google Patents
가열 어셈블리 Download PDFInfo
- Publication number
- WO2018101802A3 WO2018101802A3 PCT/KR2017/014042 KR2017014042W WO2018101802A3 WO 2018101802 A3 WO2018101802 A3 WO 2018101802A3 KR 2017014042 W KR2017014042 W KR 2017014042W WO 2018101802 A3 WO2018101802 A3 WO 2018101802A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- crucible
- magnetic field
- coil
- heating assembly
- periphery
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- General Induction Heating (AREA)
Abstract
본 발명은 가열 어셈블리에 관한 것으로, 본 발명의 일 양상에 따른 증착 물질을 수용하기 위한 공간이 내부에 형성되고, 상기 증착 물질을 외부로 가이드하기 위한 적어도 하나 이상의 노즐이 구현되는 크루시블; 상기 크루시블의 외측에 배치되며, 고주파수 전력이 인가되어 상기 고주파수 전력에 대응하는 코일 전류가 흐름에 따라 주변에 다이나믹한 자기장이 형성되는 코일; 및 상기 코일의 주변에 배치되는 자기장 집속 구조물;을 포함하되 상기 크루시블은 상기 다이나믹한 자기장에 의하여 외벽에 유도 전류가 형성되고, 상기 유도 전류와 상기 크루시블의 전기적 저항 요소에 기초하여 발생되는 열에 의해 가열되며, 상기 자기장 집속 구조물에 의해 상기 코일 주변에 형성되는 상기 다이나믹한 자기장이 집속됨으로써, 상기 크루시블에 발생되는 상기 열이 상승하는 것을 특징으로 하는 증착 장비용 가열 어셈블리가 제공된다.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201780085257.3A CN110536975A (zh) | 2016-12-01 | 2017-12-01 | 加热组件 |
US16/466,240 US20200063254A1 (en) | 2016-12-01 | 2017-12-01 | Heating assembly |
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020160163082A KR101888268B1 (ko) | 2016-12-01 | 2016-12-01 | 가열 어셈블리 |
KR1020160163083A KR101888269B1 (ko) | 2016-12-01 | 2016-12-01 | 가열 어셈블리 |
KR10-2016-0163081 | 2016-12-01 | ||
KR10-2016-0163084 | 2016-12-01 | ||
KR1020160163084A KR101888270B1 (ko) | 2016-12-01 | 2016-12-01 | 가열 어셈블리 |
KR1020160163081 | 2016-12-01 | ||
KR10-2016-0163082 | 2016-12-01 | ||
KR10-2016-0163083 | 2016-12-01 | ||
KR10-2017-0037876 | 2017-03-24 | ||
KR1020170037876A KR101973255B1 (ko) | 2016-12-01 | 2017-03-24 | 가열 어셈블리 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2018101802A2 WO2018101802A2 (ko) | 2018-06-07 |
WO2018101802A3 true WO2018101802A3 (ko) | 2018-07-26 |
Family
ID=62242180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2017/014042 WO2018101802A2 (ko) | 2016-12-01 | 2017-12-01 | 가열 어셈블리 |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2018101802A2 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108770173B (zh) * | 2018-07-27 | 2020-11-20 | 上海工程技术大学 | 一种等离子体射流产生装置 |
KR102265055B1 (ko) * | 2019-06-05 | 2021-06-15 | 엘지전자 주식회사 | 증착 장치 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012002446A (ja) * | 2010-06-18 | 2012-01-05 | Nisshin Giken Kk | 誘導炉 |
KR101213434B1 (ko) * | 2012-05-22 | 2012-12-18 | 문병태 | 웨이퍼코팅용 가열장치 |
JP2013023727A (ja) * | 2011-07-20 | 2013-02-04 | Toyota Motor Corp | 高周波熱処理装置及び高周波熱処理方法 |
KR101642452B1 (ko) * | 2015-01-23 | 2016-07-25 | 주식회사 파인에바 | 선형 증발 증착 장치 |
KR20160129204A (ko) * | 2015-04-29 | 2016-11-09 | 주식회사 파인에바 | 선형 증발 증착 장치 |
-
2017
- 2017-12-01 WO PCT/KR2017/014042 patent/WO2018101802A2/ko active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012002446A (ja) * | 2010-06-18 | 2012-01-05 | Nisshin Giken Kk | 誘導炉 |
JP2013023727A (ja) * | 2011-07-20 | 2013-02-04 | Toyota Motor Corp | 高周波熱処理装置及び高周波熱処理方法 |
KR101213434B1 (ko) * | 2012-05-22 | 2012-12-18 | 문병태 | 웨이퍼코팅용 가열장치 |
KR101642452B1 (ko) * | 2015-01-23 | 2016-07-25 | 주식회사 파인에바 | 선형 증발 증착 장치 |
KR20160129204A (ko) * | 2015-04-29 | 2016-11-09 | 주식회사 파인에바 | 선형 증발 증착 장치 |
Also Published As
Publication number | Publication date |
---|---|
WO2018101802A2 (ko) | 2018-06-07 |
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