WO2018101802A3 - 가열 어셈블리 - Google Patents

가열 어셈블리 Download PDF

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Publication number
WO2018101802A3
WO2018101802A3 PCT/KR2017/014042 KR2017014042W WO2018101802A3 WO 2018101802 A3 WO2018101802 A3 WO 2018101802A3 KR 2017014042 W KR2017014042 W KR 2017014042W WO 2018101802 A3 WO2018101802 A3 WO 2018101802A3
Authority
WO
WIPO (PCT)
Prior art keywords
crucible
magnetic field
coil
heating assembly
periphery
Prior art date
Application number
PCT/KR2017/014042
Other languages
English (en)
French (fr)
Other versions
WO2018101802A2 (ko
Inventor
김정형
Original Assignee
주식회사 파인에바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020160163082A external-priority patent/KR101888268B1/ko
Priority claimed from KR1020160163083A external-priority patent/KR101888269B1/ko
Priority claimed from KR1020160163084A external-priority patent/KR101888270B1/ko
Priority claimed from KR1020170037876A external-priority patent/KR101973255B1/ko
Application filed by 주식회사 파인에바 filed Critical 주식회사 파인에바
Priority to CN201780085257.3A priority Critical patent/CN110536975A/zh
Priority to US16/466,240 priority patent/US20200063254A1/en
Publication of WO2018101802A2 publication Critical patent/WO2018101802A2/ko
Publication of WO2018101802A3 publication Critical patent/WO2018101802A3/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • General Induction Heating (AREA)

Abstract

본 발명은 가열 어셈블리에 관한 것으로, 본 발명의 일 양상에 따른 증착 물질을 수용하기 위한 공간이 내부에 형성되고, 상기 증착 물질을 외부로 가이드하기 위한 적어도 하나 이상의 노즐이 구현되는 크루시블; 상기 크루시블의 외측에 배치되며, 고주파수 전력이 인가되어 상기 고주파수 전력에 대응하는 코일 전류가 흐름에 따라 주변에 다이나믹한 자기장이 형성되는 코일; 및 상기 코일의 주변에 배치되는 자기장 집속 구조물;을 포함하되 상기 크루시블은 상기 다이나믹한 자기장에 의하여 외벽에 유도 전류가 형성되고, 상기 유도 전류와 상기 크루시블의 전기적 저항 요소에 기초하여 발생되는 열에 의해 가열되며, 상기 자기장 집속 구조물에 의해 상기 코일 주변에 형성되는 상기 다이나믹한 자기장이 집속됨으로써, 상기 크루시블에 발생되는 상기 열이 상승하는 것을 특징으로 하는 증착 장비용 가열 어셈블리가 제공된다.
PCT/KR2017/014042 2016-12-01 2017-12-01 가열 어셈블리 WO2018101802A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201780085257.3A CN110536975A (zh) 2016-12-01 2017-12-01 加热组件
US16/466,240 US20200063254A1 (en) 2016-12-01 2017-12-01 Heating assembly

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
KR1020160163082A KR101888268B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR1020160163083A KR101888269B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR10-2016-0163081 2016-12-01
KR10-2016-0163084 2016-12-01
KR1020160163084A KR101888270B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR1020160163081 2016-12-01
KR10-2016-0163082 2016-12-01
KR10-2016-0163083 2016-12-01
KR10-2017-0037876 2017-03-24
KR1020170037876A KR101973255B1 (ko) 2016-12-01 2017-03-24 가열 어셈블리

Publications (2)

Publication Number Publication Date
WO2018101802A2 WO2018101802A2 (ko) 2018-06-07
WO2018101802A3 true WO2018101802A3 (ko) 2018-07-26

Family

ID=62242180

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2017/014042 WO2018101802A2 (ko) 2016-12-01 2017-12-01 가열 어셈블리

Country Status (1)

Country Link
WO (1) WO2018101802A2 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108770173B (zh) * 2018-07-27 2020-11-20 上海工程技术大学 一种等离子体射流产生装置
KR102265055B1 (ko) * 2019-06-05 2021-06-15 엘지전자 주식회사 증착 장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012002446A (ja) * 2010-06-18 2012-01-05 Nisshin Giken Kk 誘導炉
KR101213434B1 (ko) * 2012-05-22 2012-12-18 문병태 웨이퍼코팅용 가열장치
JP2013023727A (ja) * 2011-07-20 2013-02-04 Toyota Motor Corp 高周波熱処理装置及び高周波熱処理方法
KR101642452B1 (ko) * 2015-01-23 2016-07-25 주식회사 파인에바 선형 증발 증착 장치
KR20160129204A (ko) * 2015-04-29 2016-11-09 주식회사 파인에바 선형 증발 증착 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012002446A (ja) * 2010-06-18 2012-01-05 Nisshin Giken Kk 誘導炉
JP2013023727A (ja) * 2011-07-20 2013-02-04 Toyota Motor Corp 高周波熱処理装置及び高周波熱処理方法
KR101213434B1 (ko) * 2012-05-22 2012-12-18 문병태 웨이퍼코팅용 가열장치
KR101642452B1 (ko) * 2015-01-23 2016-07-25 주식회사 파인에바 선형 증발 증착 장치
KR20160129204A (ko) * 2015-04-29 2016-11-09 주식회사 파인에바 선형 증발 증착 장치

Also Published As

Publication number Publication date
WO2018101802A2 (ko) 2018-06-07

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