WO2018092191A1 - Substrate work device - Google Patents

Substrate work device Download PDF

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Publication number
WO2018092191A1
WO2018092191A1 PCT/JP2016/083823 JP2016083823W WO2018092191A1 WO 2018092191 A1 WO2018092191 A1 WO 2018092191A1 JP 2016083823 W JP2016083823 W JP 2016083823W WO 2018092191 A1 WO2018092191 A1 WO 2018092191A1
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WO
WIPO (PCT)
Prior art keywords
substrate
transport
unit
transport member
pressing
Prior art date
Application number
PCT/JP2016/083823
Other languages
French (fr)
Japanese (ja)
Inventor
裕英 寺田
Original Assignee
ヤマハ発動機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヤマハ発動機株式会社 filed Critical ヤマハ発動機株式会社
Priority to PCT/JP2016/083823 priority Critical patent/WO2018092191A1/en
Priority to JP2018550898A priority patent/JP6792631B2/en
Publication of WO2018092191A1 publication Critical patent/WO2018092191A1/en

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components

Definitions

  • the present invention relates to a substrate working apparatus, and more particularly to a substrate working apparatus provided with a substrate transport unit.
  • a substrate working apparatus including a substrate transport unit is known.
  • Such a substrate working apparatus is disclosed in Japanese Patent Application Laid-Open No. 2007-317911.
  • Japanese Patent Laid-Open No. 2007-317911 discloses a substrate transfer device (substrate transfer unit) that transfers a substrate on which electronic components are mounted, and a transfer that mounts the electronic components on a substrate that is transferred to a predetermined position by the substrate transfer device.
  • An electronic component mounting apparatus board working apparatus including a head is disclosed.
  • the substrate transport device has a pair of conveyor belts, and the substrate is disposed on the pair of conveyor belts in a state where both ends of the substrate in a direction perpendicular to the transport direction are arranged in a horizontal plane. It is comprised so that it may convey.
  • the present invention has been made to solve the above-described problems, and one object of the present invention is to provide a substrate working apparatus including a substrate transport unit that can shorten the time required for transporting a substrate. Is to provide.
  • a substrate working apparatus includes a substrate conveyance unit that conveys a substrate on which a component is mounted.
  • the substrate conveyance unit includes a lower conveyance member that conveys a substrate by frictional force, and a lower conveyance member And an upper transport member that transports the substrate by frictional force, and is disposed between the lower transport member and the upper transport member in a direction perpendicular to the transport direction in the horizontal plane.
  • the substrate is transported in a state where both ends of the substrate are sandwiched in the vertical direction.
  • the substrate transfer unit is sandwiched between the lower transfer member and the upper transfer member in the vertical direction at both ends of the substrate in the direction perpendicular to the transfer direction in the horizontal plane.
  • the substrate is transported in the state.
  • the substrate is transported in a state of being sandwiched between the lower transport member and the upper transport member, unlike the case where the substrate is transported while being simply placed on the lower transport member. It is possible to prevent the substrate from sliding on the lower transport member without following the movement of the lower transport member during acceleration / deceleration.
  • the substrate transport speed by the substrate transport unit can be increased, and accordingly, the time required for transporting the substrate can be shortened.
  • the substrate since the substrate is prevented from sliding on the lower conveyance member, the substrate can be accurately and quickly positioned at a predetermined substrate working position. As a result, the time required for the substrate positioning operation can be shortened. Further, since the substrate is sandwiched between the lower transport member and the upper transport member, the substrate can be transported in a state where the warp is corrected. As a result, it is possible to suppress the board from riding on the outside of the transport member (the lower transport member and the upper transport member) due to the warp of the substrate. This effect is particularly effective when a substrate having a relatively large warp such as a thin substrate or a large substrate is transported.
  • the substrate is transported while being sandwiched between the lower transport member and the upper transport member, it is possible to suppress the substrate from vibrating during transport. As a result, it is possible to suppress displacement of members such as solder and components arranged on the substrate due to the vibration of the substrate.
  • the substrate working apparatus preferably, at least one of the lower conveyance member and the upper conveyance member is carried by the substrate being carried between the lower conveyance member and the upper conveyance member.
  • the substrate transport unit is configured to move one of the lower transport member and the upper transport member as the movable transport member to the lower side. It further has a first pressing portion that presses in the vertical direction toward the other of the transport member and the upper transport member.
  • substrate can be pinched
  • one of the lower transport member and the upper transport member is configured as a movable transport member
  • one of the lower transport member and the upper transport member is It is configured as a fixed-side conveyance member that does not move in the vertical direction before and after the substrate is carried in
  • the first pressing unit is configured to press the movable-side conveyance member in the vertical direction toward the fixed-side conveyance member.
  • the movable-side conveyance member is a conveyor belt
  • the substrate conveyance unit is formed between the conveyor belt and the first pressing unit. It further includes a plate-shaped belt pressing member that is disposed between and extends along the direction in which the conveyor belt extends, and the first pressing portion has a conveyor belt as a movable-side conveying member via the belt pressing member. It is comprised so that it may press up and down toward a stationary-side conveyance member.
  • the conveyor belt as a movable side conveyance member can be uniformly pressed by the belt pressing member, Therefore The pressing force by a 1st pressing part is uniformly applied to the conveyor belt as a movable side conveyance member be able to.
  • the pressing force by the first pressing unit can be uniformly applied to the substrate sandwiched between the movable-side conveyance member and the fixed-side conveyance member, the substrate conveyance unit stably does not depend on the substrate conveyance position.
  • the substrate can be sandwiched.
  • the substrate transport unit further includes a first pressing unit
  • the substrate transport unit has a pressing force larger than that of the first pressing unit, and a lower transport member and an upper transport member as movable transport members. Is pressed in the vertical direction toward the other of the lower transport member and the upper transport member to further have a second pressing portion for fixing the substrate at the substrate working position.
  • the lower transport member and the upper transport member are preferably conveyor belts. If comprised in this way, the whole both ends of a board
  • the lower transport member is preferably a conveyor belt
  • the upper transport member is a conveyor roller. If comprised in this way, a board
  • the substrate transport unit includes a buffer transport unit for waiting the substrate and a substrate work transport unit in which the substrate work is performed, and the buffer transport unit;
  • Each of the substrate working transport units includes a lower transport member and an upper transport member, and each of the buffer transport unit and the substrate work transport unit is provided between the lower transport member and the upper transport member.
  • the substrate is transported in a state where both end portions of the substrate in a direction perpendicular to the transport direction in the horizontal plane are sandwiched in the vertical direction.
  • a substrate working apparatus including a substrate transport unit that can shorten the time required for transporting a substrate.
  • FIG. 8 is a schematic diagram showing a cross section taken along line 600-600 in FIG. 7.
  • the transport direction of the substrate P is the X direction
  • the direction orthogonal to the X direction in the horizontal plane is the Y direction
  • the vertical direction orthogonal to the horizontal plane is the Z direction.
  • the upstream side in the transport direction is the X2 direction side
  • the downstream side in the transport direction is the X1 direction side.
  • the board working apparatus 100 is a component mounting apparatus that performs board work for mounting a component E (electronic component) such as an IC, a transistor, a capacitor, and a resistor on a board P such as a printed board.
  • a component E electronic component
  • IC integrated circuit
  • transistor transistor
  • capacitor capacitor
  • resistor resistor
  • the substrate working apparatus 100 includes a base 1, a substrate transport unit 2, a substrate working unit 3, a support unit 4, a rail unit 5, a component imaging unit 6, a mark imaging unit 7, and a control unit 8. And.
  • the base 1 is a base that serves as a basis for arranging each component in the substrate working apparatus 100.
  • a substrate transport unit 2, a rail unit 5, and a component imaging unit 6 are provided on the base 1.
  • a control unit 8 is provided in the base 1.
  • the base 1 is provided with feeder arrangement portions 1a capable of arranging a plurality of tape feeders 10 on both sides (Y1 side and Y2 side) in the Y direction.
  • the tape feeder 10 is a device that supplies a component E mounted on the substrate P.
  • the tape feeder 10 holds a reel (not shown) around which a component supply tape holding a plurality of components E is wound. Further, the tape feeder 10 is configured to supply the component E by rotating the held reel and sending out the component supply tape in accordance with the suction operation for taking out the component E by the substrate working unit 3. Has been.
  • the substrate transport unit 2 carries the substrate P before mounting from the outside of the substrate working apparatus 100, transports the substrate P in the transport direction (X direction), and unloads the mounted substrate P to the outside of the substrate working apparatus 100. It is configured as follows. Further, the substrate transport unit 2 is configured to transport the loaded substrate P to the substrate work position A and to fix the substrate P at the substrate work position A. The detailed configuration of the substrate transport unit 2 will be described later.
  • the board working unit 3 is a component mounting head unit, and is configured to perform component mounting work as board work on the board P transported by the board transporting unit 2.
  • the substrate working unit 3 includes a plurality (five) of heads (mounting heads) 3a. Each of the plurality of heads 3a is connected to a vacuum generator (not shown), and the negative pressure supplied from the vacuum generator can attract the component E to a nozzle (not shown) attached to the tip. It is configured.
  • the support unit 4 is configured to support the substrate working unit 3 so as to be movable in the transport direction (X direction).
  • the support unit 4 includes a ball screw shaft 41 extending in the transport direction and an X-axis motor 42 that rotates the ball screw shaft 41.
  • the substrate working unit 3 is provided with a ball nut 3 b that engages with the ball screw shaft 41 of the support unit 4.
  • the substrate working unit 3 is configured to be movable along the support unit 4 in the conveying direction together with the ball nut 3b engaged with the ball screw shaft 41 when the ball screw shaft 41 is rotated by the X-axis motor 42. Yes.
  • the pair of rail portions 5 are configured to support the support portion 4 so as to be movable in the Y direction.
  • the rail portion 5 includes a pair of guide rails 51 that support both end portions in the X direction of the support portion 4 so as to be movable in the Y direction, a ball screw shaft 52 that extends in the Y direction, and a ball screw shaft 52. And a Y-axis motor 53 to be rotated.
  • the support portion 4 is provided with a ball nut 43 that engages with the ball screw shaft 52 of the rail portion 5.
  • the support portion 4 is configured to be movable in the Y direction along the pair of rail portions 5 together with the ball nut 43 engaged with the ball screw shaft 52 when the ball screw shaft 52 is rotated by the Y-axis motor 53. ing.
  • the substrate working unit 3 is configured to be movable in the horizontal direction (X direction and Y direction) on the base 1.
  • substrate working part 3 can move above the tape feeder 10, and can acquire (adsorb
  • the board working unit 3 can move above the board P fixed at the board working position A and mount the acquired (sucked) component E on the board P.
  • the component imaging unit 6 is a component recognition camera that images the component E sucked by the head 3a prior to the mounting operation of the component E on the substrate P.
  • the component imaging unit 6 is fixed on the upper surface of the base 1 and is configured to image the component E adsorbed by the head 3a from below the component E (Z2 direction).
  • the control unit 8 Based on the captured image of the component E by the component imaging unit 6, the control unit 8 is configured to acquire (recognize) the suction state (rotational posture and suction position with respect to the head 3a) of the component E.
  • the mark imaging unit 7 is a mark recognition camera that images a position recognition mark (fiducial mark) F attached to the upper surface of the substrate P prior to the mounting operation of the component E on the substrate P.
  • the position recognition mark F is a mark for recognizing the position of the substrate P.
  • the control unit 8 Based on the imaging result of the position recognition mark F by the position recognition mark F, the control unit 8 is configured to acquire (recognize) an accurate position and posture of the substrate P fixed at the substrate work position A.
  • the control unit 8 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like, and is a control circuit that controls the operation of the substrate working apparatus 100.
  • the control unit 8 is configured to cause the substrate working unit 3 to perform the substrate mounting operation by controlling the substrate transport unit 2, the tape feeder 10, the X-axis motor 42, the Y-axis motor 53, and the like according to the production program. .
  • substrate conveyance part 2 contains a pair of conveyor parts 20a and 20b, as shown in FIG.
  • the Y1 direction side conveyor section 20a has a function of holding the end portion Pa of the substrate P on the Y1 direction side and transporting the substrate P in the transport direction (X direction).
  • the Y2 direction side conveyor unit 20b has a function of holding the end portion Pb of the substrate P on the Y2 direction side and transporting the substrate P in the transport direction.
  • the substrate transport unit 2 transports the substrate P while holding both ends (Pa and Pb) of the substrate P in the Y direction orthogonal to the transport direction within the horizontal plane by the pair of conveyor units 20a and 20b. It is configured.
  • both end portions of the substrate P in the Y direction (Pa and Only Pb) is retained, and the portion between both ends (Pa and Pb) is not retained.
  • the conveyor units 20a and 20b have substantially the same configuration.
  • substrate conveyance part 2 is the lower side conveyance member 21 which conveys the board
  • the substrate transport unit 2 is configured such that both ends (Pa and Pb) of the substrate P in the Y direction are vertically sandwiched between the lower transport member 21 and the upper transport member 22 of the conveyor units 20a and 20b. It is comprised so that P may be conveyed.
  • both the lower conveyance member 21 and the upper conveyance member 22 are annular conveyor belts.
  • the lower conveying member 21 that is a ring-shaped conveyor belt is wound around a plurality (four) of pulleys 21a.
  • the upper conveying member 22 which is a ring-shaped conveyor belt is wound around a plurality (two) of pulleys 22a.
  • the lower conveyance member 21 that is a ring-shaped conveyor belt includes a contact portion 21b that contacts the substrate P and conveys the substrate P by frictional force, and a non-contact portion 21c that does not contact the substrate P and does not convey the substrate P. It is out.
  • the contact portion 21b is an upper portion of the ring-shaped conveyor belt, and is a carry-out side end from the carry-in side end (X2 direction side end) of the substrate P in the conveyer unit 20a (20b) of the board transfer unit 2. It extends along the transport direction to the portion (end on the X1 direction side).
  • the upper conveying member 22 that is a ring-shaped conveyor belt includes a contact portion 22b that contacts the substrate P and conveys the substrate P by frictional force, and a non-contact portion 22c that does not contact the substrate P and does not convey the substrate P. Contains.
  • the contact portion 22b is a lower portion of the ring-shaped conveyor belt, from the vicinity of the carry-in side end portion (end portion on the X2 direction side) of the substrate P in the conveyer portion 20a (20b) of the substrate transfer portion 2. It extends along the transport direction to the vicinity of the carry-out side end (end on the X1 direction side).
  • the lower conveyance member 21 and the upper conveyance member 22 have a vertical direction in which a contact surface with the substrate P in the contact portion 21b of the lower conveyance member 21 and a contact surface with the substrate P in the contact portion 22b of the upper conveyance member 22 Are arranged so as to face each other. That is, in the substrate transport unit 2, both end portions (Pa and Pb) of the substrate P in the Y direction are sandwiched in the vertical direction between the contact surface of the lower transport member 21 and the contact surface of the upper transport member 22. The substrate P is transported. Further, the lower transport member 21 and the upper transport member 22 have a gap S (see FIG. 4) between the contact surface of the lower transport member 21 and the contact surface of the upper transport member before the substrate P is carried in. As shown, they are spaced apart in the vertical direction. As a result, the substrate P can be easily carried between the lower transport member 21 and the upper transport member 22.
  • the lower transport member 21 is configured such that the contact portion 21b can be bent and deformed in the vertical direction (Z direction) by carrying in the substrate P.
  • the lower conveyance member 21 when the substrate P is loaded between the lower conveyance member 21 and the upper conveyance member 22, the lower conveyance member 21 has the contact portion 21 b in the downward direction from the state before the substrate P is loaded.
  • the movable side conveyance member 23 is configured to move in the (Z2 direction).
  • the upper conveying member 22 is configured such that the contact portion 22b is not bent and deformed in the vertical direction when the substrate P is loaded.
  • the upper transport member 22 is configured as a fixed transport member 24 that does not move in the vertical direction (Z direction) before and after the loading of the substrate P.
  • a plate-shaped regulating member that regulates the upward movement (Z1 direction) of the contact portion 22b of the upper transport member 22 between the contact portion 22b and the non-contact portion 22c of the upper transport member 22. 25 is provided.
  • the regulating member 25 extends along the contact portion 22b of the upper conveyance member 22 from the vicinity of the carry-in side end (X2 direction side end) of the contact portion 22b to the carry-out side end (X1 direction side end). And is arranged so as to be in contact with the back surface opposite to the contact surface of the contact portion 22b of the upper conveying member 22. Further, the regulating member 25 is fixed so that the position in the vertical direction does not move, and regulates the upward movement of the upper conveying member 22 by contacting the back surface of the contact portion 22b of the upper conveying member 22. It is configured as follows.
  • the substrate transport unit 2 converts the lower transport member 21 as the movable transport member 23 into the upper transport member 22 as the fixed transport member 24.
  • a plurality of (six) first pressing portions 26 are pressed upward (in the Z1 direction).
  • the plurality of first pressing portions 26 are arranged on the lower side as the movable transport member 23 with a pressing force capable of transporting the substrate P in a state where the substrate P is sandwiched between the lower transport member 21 and the upper transport member 22.
  • the conveyance member 21 is configured to be pressed against the upper conveyance member 22 as the fixed-side conveyance member 24. Further, the plurality of first pressing portions 26 have substantially the same configuration.
  • the first pressing portion 26 is disposed between the contact portion 21b and the non-contact portion 21c of the lower transport member 21 on the back surface side (Z2 direction side) of the contact portion 21b of the lower transport member 21. That is, the first pressing portion 26 is configured to apply a pressing force to the lower conveyance member 21 as the movable conveyance member 23 from the back surface side of the contact portion 21 b of the lower conveyance member 21. Further, the first pressing portion 26 includes a spring member, and is configured so that the spring member is compressed when the substrate P is carried between the lower transport member 21 and the upper transport member 22. As a result, when the substrate P is carried between the lower transport member 21 and the upper transport member 22, the first pressing unit 26 moves the movable transport member 23 to the fixed transport member 24 by the compressed spring member. It is comprised so that it may press toward.
  • the substrate transport unit 2 is disposed between the lower transport member 21 and the first pressing unit 26, and the lower transport member 21.
  • Plate-shaped belt pressing member 27 extending along the direction in which the contact portion 21b extends.
  • the belt pressing member 27 extends from the vicinity of the carry-in end (X2 direction end) of the contact portion 21b of the lower transport member 21 to the vicinity of the carry-out end (X1 direction end). It extends along the contact portion 21b of the transport member 21 and is disposed so as to contact the back surface opposite to the contact surface of the contact portion 21b of the lower transport member 21.
  • the belt pressing member 27 is attached to the vertically movable member 28 and is configured to be movable in the vertical direction.
  • the vertically movable member 28 is configured by a parallel link mechanism.
  • a vertically movable member other than a parallel link mechanism such as a linear guide mechanism may be used.
  • the first pressing portion 26 moves the lower conveying member 21 as the movable conveying member 23 toward the upper conveying member 22 as the fixed conveying member 24 via the belt pressing member 27. It is configured to press upward (Z1 direction).
  • the substrate transport unit 2 has a larger pressing force than the first pressing unit 26, and the lower transport member 21 as the movable transport member 23 is replaced with the upper transport member 24 as the fixed transport member 24.
  • a plurality of (two) second pressing portions 29 for fixing the substrate P at the substrate working position A by pressing upward (Z1 direction) toward the transport member 22 are provided.
  • the plurality of second pressing portions 29 are arranged at positions corresponding to the substrate working position A in the substrate transport portion 2.
  • the plurality of second pressing portions 29 have substantially the same configuration.
  • the second pressing portion 29 is disposed between the contact portion 21b and the non-contact portion 21c of the lower transport member 21 on the back surface side (Z2 direction side) of the contact portion 21b of the lower transport member 21. That is, the second pressing portion 29 is configured to apply a pressing force to the lower transport member 21 as the movable transport member 23 from the back surface side of the contact portion 21b of the lower transport member 21. Further, the second pressing portion 29 includes an air cylinder. During the transfer of the substrate P, the second pressing portion 29 pulls the piston rod of the air cylinder into the inside of the air cylinder main body, thereby pressing the lower transfer member 21 as the movable transfer member 23. It is configured not to add.
  • the second pressing portion 29 moves the piston rod of the air cylinder to the air when the substrate P is transported to the substrate work position A by the lower transport member 21 and the upper transport member 22 and stopped at the substrate work position A.
  • a pressing force is applied to the lower transport member 21 as the movable transport member 23.
  • the second pressing portion 29 is configured such that the lower conveying member 21 as the movable conveying member 23 is changed to the upper conveying member 22 as the fixed conveying member 24 via the belt pressing member 27. It is configured to press upward (Z1 direction).
  • the substrate transport unit 2 includes a drive motor 30 that drives the lower transport member 21 and the upper transport member 22.
  • the lower transport member 21 and the upper transport member 22 are driven by a single drive motor 30.
  • the substrate transport unit 2 includes a first power transmission unit 31 that transmits a driving force from the driving motor 30 to the lower transporting member 21, and a driving force from the driving motor 30. And a second power transmission unit 32 that transmits the power to the upper conveyance member 22.
  • the first power transmission unit 31 is connected to the drive motor 30 through a shaft portion 30a connected to the drive motor 30 among the plurality of pulleys 21a around which the lower conveyance member 21 that is a conveyor belt is wound. It has a pulley 21a.
  • the lower conveying member 21 is configured to be driven when the driving force of the driving motor 30 is transmitted through a pulley 21 a as the first power transmission unit 31.
  • the second power transmission unit 32 is connected to one of a plurality of pulleys 21a around which the lower conveyance member 21 that is a conveyor belt is wound, and is rotated by the rotation of the connected pulley 21a.
  • the gear 32a is engaged with the first gear 32a, and is connected to the second gear 32b that is rotated by the rotation of the engaged first gear 32a, and the second gear 32b, and is rotated by the rotation of the second gear 32b.
  • a pulley 22a that rotates.
  • the pulley 22a which comprises the 2nd power transmission part 32 is one of the some pulleys 22a by which the lower side conveyance member 21 which is a conveyor belt was wound around.
  • the upper conveying member 22 is configured to be driven by the driving force of the driving motor 30 being transmitted through the pulley 21a, the first gear 32a, the second gear 32b, and the pulley 22a. Yes.
  • the substrate transport unit 2 has a plurality (two) of position regulation pulleys 22d that regulate the height position in the vertical direction of the non-contact portion 22c that constitutes the upper side of the upper transport member 22 that is a ring-shaped conveyor belt. ing.
  • the plurality of position regulating pulleys 22d are configured to press the non-contact portion 22c downward (Z2 direction) so that the vertical position of the non-contact portion 22c constituting the upper side of the upper conveying member 22 is lowered. Has been. Thereby, it is possible to suppress the non-contact portion 22 c of the upper transport member 22 from hindering the movement of the movable unit (substrate working unit 3) that moves above the substrate transport unit 2.
  • the two position regulating pulleys 22d are respectively disposed in the vicinity of the carry-in side end (X2 direction side end) and the carry-out side end (X1 direction side end) of the upper conveyance member 22.
  • FIGS. 7 to 10 Next, a substrate transfer operation by the substrate working apparatus 100 according to the first embodiment will be described with reference to FIGS.
  • FIGS. 7 to 10 only the main part of the substrate transport unit 2 is schematically illustrated for easy understanding, and each component is illustrated in a slightly exaggerated manner.
  • the lower transport member 21 and the upper transport member 22 have a gap S (between the contact surface of the lower transport member 21 and the contact surface of the upper transport member 22. (See FIG. 4).
  • both ends (Pa and Pb) of the loaded substrate P in the Y direction are connected to the lower transport member 21. It is sandwiched between the upper conveying member 22. Since the upper conveyance member 22 as the fixed-side conveyance member 24 is restricted from moving upward by the restriction member 25, the contact portion 21 b of the lower conveyance member 21 as the movable-side conveyance member 23 is formed on the substrate P. By bending by the thickness, it is moved downward (Z2 direction). At this time, the belt pressing member 27 that contacts the contact portion 21b is also moved downward together with the contact portion 21b. As a result, the spring member of the first pressing portion 26 is compressed, and the lower conveying member 21 as the movable conveying member 23 is moved upward as the fixed conveying member 24 by the pressing force of the compressed spring member. It is pressed toward the member 22.
  • the substrate work position A Is stopped at.
  • the lower conveying member 21 as the movable conveying member 23 is pressed upward (Z1 direction) toward the upper conveying member 22 as the fixed conveying member 24 by the second pressing portion 29.
  • the substrate P stopped at the substrate working position A includes the upper transport member 22 and the regulating member 25 disposed above the substrate P, the lower transport member 21 disposed below the substrate P, and the belt pressing member. It is fixed by being sandwiched between the members 27.
  • the board work section 3 performs component mounting work.
  • the fixing of the substrate P by the second pressing unit 29 is released.
  • the substrate P is transported from the substrate working position A to the downstream side (X1 direction side). Then, the board P on which the component mounting work is completed is carried out from the downstream side. As described above, in the substrate transfer unit 2 of the substrate working apparatus 100, the both ends (Pa and Pb) of the substrate P are sandwiched between the lower transfer member 21 and the upper transfer member 22 from the transfer position. The substrate P is transported to the unloading position.
  • the substrate transport unit 2 is disposed between the lower transport member 21 and the upper transport member 22 at both ends (Pa and Pa) of the substrate P in the direction perpendicular to the transport direction in the horizontal plane.
  • the substrate P is transported in a state where the Pb) is sandwiched in the vertical direction.
  • the substrate P is sandwiched between the lower transport member 21 and the upper transport member 22. Therefore, it is possible to prevent the substrate P from sliding on the lower transport member 21 without following the movement of the lower transport member 21 during acceleration / deceleration.
  • the transport speed of the substrate P by the substrate transport unit 2 can be increased, so that the time required for transporting the substrate P can be shortened accordingly.
  • substrate P since it is suppressed that the board
  • substrate P is pinched
  • the lower transport member 21 is moved up and down from the state before the substrate is loaded by loading the substrate P between the lower transport member 21 and the upper transport member 22.
  • the movable side conveyance member 23 is configured to move in the direction.
  • the substrate transport unit 2 includes a first pressing unit 26 that presses the lower transport member 21 as the movable transport member 23 in the vertical direction toward the upper transport member 22.
  • the upper transport member 22 is configured as the fixed transport member 24 that does not move in the vertical direction before and after the loading of the substrate P.
  • the first pressing portion 26 is configured to press the lower conveyance member 21 as the movable conveyance member 23 in the vertical direction toward the upper conveyance member 22 as the fixed conveyance member 24.
  • the substrate P can be transported while being positioned in the up-down direction. The substrate P can be transported.
  • the lower transport member 21 as the movable transport member 23 is a conveyor belt.
  • substrate conveyance part 2 is arrange
  • a pressing member 27 is provided. Then, the first pressing portion 26 is pressed in the vertical direction toward the fixed-side conveyance member 24 by the conveyor belt (the lower-side conveyance member 21) as the movable-side conveyance member 23 via the belt pressing member 27.
  • the belt pressing member 27 can uniformly push the conveyor belt (the lower conveying member 21) as the movable conveying member 23, so that the conveyor belt (the lower conveying member 21) as the movable conveying member 23 can be pressed. ),
  • the pressing force by the first pressing portion 26 can be applied uniformly.
  • the pressing force by the first pressing unit 26 can be uniformly applied to the substrate P sandwiched between the movable-side transport member 23 and the fixed-side transport member 24, the transport position of the substrate P in the substrate transport unit 2 Regardless of this, the substrate P can be stably sandwiched.
  • the substrate transport unit 2 has a larger pressing force than the first pressing unit 26, and the lower transport member 21 as the movable transport member 23 is replaced with the upper transport member.
  • a second pressing portion 29 for fixing the substrate P at the substrate working position A by pressing in the vertical direction toward the substrate 22 is provided. Accordingly, even when the pressing force by the first pressing portion 26 is not so large as to fix the substrate P, the second pressing portion 29 having a pressing force larger than that of the first pressing portion 26 is used at the substrate working position A.
  • the substrate P can be securely fixed.
  • the pressing force by the second pressing portion 29 is applied to the substrate at the substrate work position A.
  • the substrate P can be prevented from vibrating. As a result, it is possible to suppress displacement of members such as solder and component E arranged on the substrate P due to the vibration of the substrate P when the pressing force is applied.
  • the lower conveyance member 21 and the upper conveyance member 22 are conveyor belts. Thereby, the whole of the both ends (Pa and Pb) of the substrate P can be sandwiched uniformly by the lower transport member 21 and the upper transport member 22 as conveyor belts extending along the transport direction.
  • the substrate working apparatus 200 according to the second embodiment of the present invention is different from the substrate working apparatus 100 according to the first embodiment in that a substrate carrying unit 102 is provided as shown in FIG.
  • the substrate transport unit 102 includes a first transport unit 202, a second transport unit 302, and a third transport unit 402, and a plurality (three). It is divided into a transport section.
  • the first transport unit 202, the second transport unit 302, and the third transport unit 402 are configured to be able to transport the substrate P independently of each other.
  • the first transport unit 202 and the third transport unit 402 are both examples of the “buffer transport unit” in the claims.
  • the second transport unit 302 is an example of the “substrate working transport unit” in the claims.
  • the first transport unit 202 is arranged on the upstream side (X2 direction side) in the substrate transport unit 102, and is configured to carry in the substrate P before mounting from the outside of the substrate working apparatus 200. Further, the first transport unit 202 has a function as a transport unit for a buffer for causing the substrate P before mounting to stand by inside the substrate working apparatus 200.
  • the second transport unit 302 is disposed between the first transport unit 202 and the third transport unit 402, receives the unmounted substrate P from the first transport unit 202, and receives the received unmounted substrate P. It is configured to transport to the substrate work position A.
  • the second transport unit 302 is configured to fix the substrate P before mounting at the substrate work position A.
  • a component mounting operation as a substrate operation is performed by the substrate operation unit 3 (see FIG. 1) while the substrate P is fixed at the substrate operation position A. That is, the 2nd conveyance part 302 has a function as a conveyance part for board
  • the third transport unit 402 is disposed on the downstream side (X1 direction side) of the substrate transport unit 102, receives the mounted substrate P from the second transport unit 302, and is mounted outside the substrate working apparatus 200. It is comprised so that P may be carried out. Further, the third transport unit 402 has a function as a transport unit for a buffer for making the mounted substrate P stand by in the substrate working apparatus 200.
  • the first transport unit 202, the second transport unit 302, and the third transport unit 402 are respectively a lower transport member 221 (321, 421) and an upper transport member 222 ( 322, 422).
  • the first transport unit 202, the second transport unit 302, and the third transport unit 402 are respectively arranged between the lower transport member 221 (321, 421) and the upper transport member 222 (322, 422).
  • the substrate P is transported in a state where both ends (Pa and Pb) of the substrate P in the direction are sandwiched in the vertical direction.
  • the first transport unit 202, the second transport unit 302, and the third transport unit 402 have substantially the same configuration.
  • the lower conveying member 221 which is a ring-shaped conveyor belt is wound around a plurality (four) of pulleys 221a (321a, 421a).
  • the upper conveying member 222 which is a ring-shaped conveyor belt, is wound around a plurality (two) of pulleys 222a (322a, 422a).
  • the lower conveyance member 221 (321, 421) which is a ring-shaped conveyor belt is in contact with the substrate P and contacts the substrate P by the frictional force and 221b (321b, 421b). And a non-contact portion 221c (321c, 421c) that does not convey the sheet.
  • the lower transport member 221 (321, 421) is configured as a movable transport member 223 (323, 324).
  • the lower conveyance member 221 (321, 421) as the movable conveyance member 223 (323, 423) corresponds to the lower conveyance member 21 as the movable conveyance member 23 of the first embodiment. It has the composition of. Therefore, detailed description is omitted. Also in the following, about the structure similar to 1st Embodiment, that is described and detailed description is abbreviate
  • the upper conveying member 222 which is a ring-shaped conveyor belt, contacts the substrate P and conveys the substrate P by frictional force.
  • the contact portion 222b (322b, 422b) conveys the substrate P without contacting the substrate P.
  • non-contact portions 222c (322c, 422c) that are not conveyed.
  • the upper transport member 222 (322, 422) is configured as a fixed transport member 224 (324, 424).
  • the upper conveyance member 222 (322, 422) as the fixed-side conveyance member 224 (324, 424) corresponds to the upper conveyance member 22 as the fixed-side conveyance member 24 of the first embodiment, and has the same configuration.
  • the first conveying unit 202 (second conveying unit 302, third conveying unit 402) includes a regulating member 225 (325, 425), a first pressing unit 226 (326, 426), and a belt pressing member 227. (327, 427) and vertically movable members 228 (328, 428) are provided.
  • the regulating member 225 (325, 425), the first pressing portion 226 (326, 426), the belt pressing member 227 (327, 427), and the vertically movable member 228 (328, 428) are respectively It corresponds to the regulating member 25, the first pressing portion 26, the belt pressing member 27, and the vertically movable member 28 of the first embodiment, and has the same configuration.
  • the second pressing unit 329 is provided only in the second transport unit 302.
  • the first transport unit 202 and the third transport unit 402 are not provided with the second pressing unit 329.
  • the second pressing portion 329 corresponds to the second pressing portion 29 of the first embodiment and has the same configuration.
  • the first transport unit 202, the second transport unit 302, and the third transport unit 402 have lower transport members 221 (321 and 421), respectively.
  • driving motors 230 (330, 430) for driving the upper conveying members 222 (322, 422) are provided.
  • the power transmission mechanism to the lower conveyance member 221 (321, 421) and the upper conveyance member 222 (322, 422) by the drive motor 230 (330, 430) is the same as in the first embodiment.
  • the first transport unit 202 (second transport unit 302, third transport unit 402) is provided with position regulating pulleys 222d (322d, 422d).
  • the position restriction pulley 222d (322d, 422d) corresponds to the position restriction pulley 22d of the first embodiment and has the same configuration.
  • the substrate transport unit 102 includes the first transport unit 202 and the third transport unit 402 for waiting the substrate P, the second transport unit 302 in which the substrate P work is performed, Is included.
  • the 1st conveyance part 202, the 3rd conveyance part 402, and the 2nd conveyance part 302 have the lower conveyance member 221 (321, 421) and the upper conveyance member 222 (322, 422), respectively.
  • the 1st conveyance part 202, the 3rd conveyance part 402, and the 2nd conveyance part 302 are made into a horizontal surface between the lower conveyance member 221 (321, 421) and the upper conveyance member 222 (322, 422), respectively.
  • the substrate P is transported in a state where both end portions (Pa and Pb) of the substrate P in the direction perpendicular to the transport direction are vertically sandwiched.
  • the substrate transport unit 102 is divided into a plurality of transport units (the first transport unit 202, the second transport unit 302, and the third transport unit 402), in each of the transport units, the lower transport member The substrate P can be transported while being sandwiched between 221 (321, 421) and the upper transport member 222 (322, 422).
  • the present invention is not limited to this.
  • the present invention may be applied to a substrate working apparatus as a bonding material printing apparatus that performs a printing operation for printing a bonding material such as solder on a substrate as the substrate work.
  • the present invention may be applied to an inspection apparatus that performs a substrate inspection operation as a substrate operation.
  • the substrate transfer apparatus has the first pressing portion.
  • the present invention is not limited to this. In the present invention, as long as the substrate can be sandwiched between the lower transport member and the upper transport member, the substrate transport device may not have the first pressing portion.
  • the lower conveying member is a movable conveying member and the upper conveying member is a fixed conveying member.
  • the present invention is not limited to this.
  • the upper transport member may be a movable transport member and the lower transport member may be a fixed transport member.
  • the substrate transport unit has the belt pressing member.
  • the present invention is not limited to this.
  • the substrate transport unit does not have to have the belt pressing member as long as the substrate can be stably sandwiched.
  • the substrate transport unit has the second pressing unit for fixing the substrate.
  • the present invention is not limited to this.
  • the substrate transport unit may have a substrate fixing mechanism other than the second pressing unit.
  • the lower conveyance member and the upper conveyance member are conveyor belts.
  • the present invention is not limited to this.
  • at least one of the lower transport member and the upper transport member may be a conveyor roller that transports the substrate by frictional force.
  • the upper transport member 522 is a conveyor roller that transports the substrate P by frictional force.
  • the upper conveyance member 522 that is a conveyor roller is configured as a fixed-side conveyance member 524. Thereby, the board
  • the present invention is not limited to this.
  • the substrate conveyance unit may not have the position regulating pulley.
  • the lower transport member and the upper transport member are driven by a single drive motor.
  • the present invention is not limited to this.
  • the lower conveyance member and the upper conveyance member may be driven by separate drive motors.
  • the substrate transfer unit is divided into three transfer units.
  • the present invention is not limited to this.
  • the substrate transfer unit may be divided into a plurality of transfer units other than three.
  • Second pressing portion 100, 200 Substrate working device 202 First conveying portion (buffer conveying portion) 302 2nd conveyance part (conveyance part for substrate work) 402 3rd transport section (buffer transport section) A Substrate work position E Component P Substrate

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  • Engineering & Computer Science (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

A substrate work device (100) is provided with a substrate transport unit (2) that transports a substrate (P) on which a component E is to be mounted. The substrate transport unit includes a lower transport member (21) and an upper transport member (22). The substrate transport unit is configured to transport the substrate in a state where both ends of the substrate in a direction orthogonal to the transport direction within a horizontal plane are sandwiched in the vertical direction, between the lower transport member and the upper transport member.

Description

基板作業装置Board work equipment
　この発明は、基板作業装置に関し、特に、基板搬送部を備える基板作業装置に関する。 The present invention relates to a substrate working apparatus, and more particularly to a substrate working apparatus provided with a substrate transport unit.
　従来、基板搬送部を備える基板作業装置が知られている。このような基板作業装置は、特開２００７－３１７９１１号公報に開示されている。 Conventionally, a substrate working apparatus including a substrate transport unit is known. Such a substrate working apparatus is disclosed in Japanese Patent Application Laid-Open No. 2007-317911.
　特開２００７－３１７９１１号公報には、電子部品が実装される基板を搬送する基板搬送装置（基板搬送部）と、基板搬送装置により所定の位置に搬送された基板に電子部品を実装する移載ヘッドとを備える電子部品実装装置（基板作業装置）が開示されている。この電子部品実装装置では、基板搬送装置は、一対のコンベアベルトを有し、一対のコンベアベルト上に、水平面内で搬送方向と直交する方向の基板の両端部のそれぞれを配置した状態で、基板を搬送するように構成されている。 Japanese Patent Laid-Open No. 2007-317911 discloses a substrate transfer device (substrate transfer unit) that transfers a substrate on which electronic components are mounted, and a transfer that mounts the electronic components on a substrate that is transferred to a predetermined position by the substrate transfer device. An electronic component mounting apparatus (board working apparatus) including a head is disclosed. In this electronic component mounting apparatus, the substrate transport device has a pair of conveyor belts, and the substrate is disposed on the pair of conveyor belts in a state where both ends of the substrate in a direction perpendicular to the transport direction are arranged in a horizontal plane. It is comprised so that it may convey.
特開２００７－３１７９１１号公報JP 2007-317911 A
　しかしながら、上記特開２００７－３１７９１１号公報に記載の電子部品実装装置では、基板が単にコンベアベルト上に配置されただけの状態で搬送されるので、加減速時に基板がコンベアベルトの動きに追従できずに、コンベアベルト上を滑る場合がある。このため、基板搬送部による基板の搬送速度を上げることができず、基板の搬送に要する時間を短縮することが困難であるという問題点がある。 However, in the electronic component mounting apparatus described in Japanese Patent Application Laid-Open No. 2007-317911, since the board is transported in a state where it is simply placed on the conveyor belt, the board can follow the movement of the conveyor belt during acceleration / deceleration. Without slipping on the conveyor belt. For this reason, there is a problem in that it is difficult to increase the substrate conveyance speed by the substrate conveyance unit, and it is difficult to shorten the time required for substrate conveyance.
　この発明は、上記のような課題を解決するためになされたものであり、この発明の１つの目的は、基板の搬送に要する時間を短縮することが可能な基板搬送部を備える基板作業装置を提供することである。 The present invention has been made to solve the above-described problems, and one object of the present invention is to provide a substrate working apparatus including a substrate transport unit that can shorten the time required for transporting a substrate. Is to provide.
　この発明の一の局面による基板作業装置は、部品が実装される基板を搬送する基板搬送部を備え、記基板搬送部は、摩擦力により基板を搬送する下側搬送部材と、下側搬送部材と上下方向に対向するように配置され、摩擦力により基板を搬送する上側搬送部材と、を有し、下側搬送部材と上側搬送部材との間に、水平面内で搬送方向と直交する方向の基板の両端部を上下方向に挟み込んだ状態で、基板を搬送するように構成されている。 A substrate working apparatus according to an aspect of the present invention includes a substrate conveyance unit that conveys a substrate on which a component is mounted. The substrate conveyance unit includes a lower conveyance member that conveys a substrate by frictional force, and a lower conveyance member And an upper transport member that transports the substrate by frictional force, and is disposed between the lower transport member and the upper transport member in a direction perpendicular to the transport direction in the horizontal plane. The substrate is transported in a state where both ends of the substrate are sandwiched in the vertical direction.
　この発明の一の局面による基板作業装置では、基板搬送部を、下側搬送部材と上側搬送部材との間に、水平面内で搬送方向と直交する方向の基板の両端部を上下方向に挟み込んだ状態で、基板を搬送するように構成する。これにより、基板が単に下側搬送部材上に載置されただけの状態で搬送される場合と異なり、基板が下側搬送部材と上側搬送部材との間に挟み込まれた状態で搬送されるので、加減速時に基板が下側搬送部材の動きに追従できずに、下側搬送部材上を滑ることを抑制することができる。その結果、基板搬送部による基板の搬送速度を上げることができるので、その分、基板の搬送に要する時間を短縮することができる。また、基板が下側搬送部材上を滑ることが抑制されるので、予め決められた基板作業位置に基板を正確かつ迅速に位置決めすることができる。その結果、基板の位置決め作業に要する時間を短縮することができる。また、基板が下側搬送部材と上側搬送部材との間に挟み込まれるので、反りを矯正した状態で基板を搬送することができる。その結果、基板の反りに起因して、搬送部材（下側搬送部材および上側搬送部材）の外側に基板が乗り上げてしまうことを抑制することができる。この効果は、薄型の基板や大型の基板などの比較的反りが大きい基板を搬送する場合に、特に有効である。また、基板が下側搬送部材と上側搬送部材との間に挟み込まれた状態で搬送されるので、搬送時に基板が振動することを抑制することができる。その結果、基板が振動することに起因して、基板上に配置されたはんだや部品などの部材が位置ずれすることを抑制することができる。 In the substrate working apparatus according to one aspect of the present invention, the substrate transfer unit is sandwiched between the lower transfer member and the upper transfer member in the vertical direction at both ends of the substrate in the direction perpendicular to the transfer direction in the horizontal plane. The substrate is transported in the state. As a result, the substrate is transported in a state of being sandwiched between the lower transport member and the upper transport member, unlike the case where the substrate is transported while being simply placed on the lower transport member. It is possible to prevent the substrate from sliding on the lower transport member without following the movement of the lower transport member during acceleration / deceleration. As a result, the substrate transport speed by the substrate transport unit can be increased, and accordingly, the time required for transporting the substrate can be shortened. In addition, since the substrate is prevented from sliding on the lower conveyance member, the substrate can be accurately and quickly positioned at a predetermined substrate working position. As a result, the time required for the substrate positioning operation can be shortened. Further, since the substrate is sandwiched between the lower transport member and the upper transport member, the substrate can be transported in a state where the warp is corrected. As a result, it is possible to suppress the board from riding on the outside of the transport member (the lower transport member and the upper transport member) due to the warp of the substrate. This effect is particularly effective when a substrate having a relatively large warp such as a thin substrate or a large substrate is transported. Further, since the substrate is transported while being sandwiched between the lower transport member and the upper transport member, it is possible to suppress the substrate from vibrating during transport. As a result, it is possible to suppress displacement of members such as solder and components arranged on the substrate due to the vibration of the substrate.
　上記一の局面による基板作業装置において、好ましくは、下側搬送部材と上側搬送部材とのうちの少なくともいずれか一方は、下側搬送部材と上側搬送部材との間に基板が搬入されることにより、基板搬入前の状態から上下方向に移動する可動側搬送部材として構成されており、基板搬送部は、可動側搬送部材としての下側搬送部材と上側搬送部材とのうちの一方を、下側搬送部材と上側搬送部材とのうちの他方に向かって上下方向に押し付ける第１押付け部をさらに有する。このように構成すれば、下側搬送部材と上側搬送部材との間において基板をより大きい力で挟み込むことができるので、基板が下側搬送部材上を滑ることをより抑制することができる。また、搬送時に基板が振動することをより抑制することができるとともに、反りをより矯正した状態で基板を搬送することができる。 In the substrate working apparatus according to the aforementioned aspect, preferably, at least one of the lower conveyance member and the upper conveyance member is carried by the substrate being carried between the lower conveyance member and the upper conveyance member. , And is configured as a movable transport member that moves in the up-down direction from the state before the substrate is carried in, and the substrate transport unit is configured to move one of the lower transport member and the upper transport member as the movable transport member to the lower side. It further has a first pressing portion that presses in the vertical direction toward the other of the transport member and the upper transport member. If comprised in this way, since a board | substrate can be pinched | interposed with a bigger force between a lower conveyance member and an upper conveyance member, it can suppress more that a board | substrate slides on a lower conveyance member. Further, it is possible to further suppress the vibration of the substrate during transportation, and it is possible to transport the substrate in a state in which the warp is further corrected.
　この場合、好ましくは、下側搬送部材と上側搬送部材とのうちのいずれか一方は、可動側搬送部材として構成されており、下側搬送部材と上側搬送部材とのうちのいずれか他方は、基板の搬入の前後で、上下方向に移動しない固定側搬送部材として構成されており、第１押付け部は、可動側搬送部材を、固定側搬送部材に向かって上下方向に押し付けるように構成されている。このように構成すれば、下側搬送部材および上側搬送部材の両方が可動側搬送部材として構成されている場合と異なり、上下方向に位置決めした状態で基板を搬送することができるので、安定して基板を搬送することができる。 In this case, preferably, one of the lower transport member and the upper transport member is configured as a movable transport member, and one of the lower transport member and the upper transport member is It is configured as a fixed-side conveyance member that does not move in the vertical direction before and after the substrate is carried in, and the first pressing unit is configured to press the movable-side conveyance member in the vertical direction toward the fixed-side conveyance member. Yes. If comprised in this way, unlike the case where both the lower side conveyance member and the upper side conveyance member are comprised as a movable side conveyance member, since a board | substrate can be conveyed in the state positioned in the up-down direction, it can be stabilized. The substrate can be transported.
　上記第１押付け部が可動側搬送部材を固定側搬送部材に向かって押し付ける構成において、好ましくは、可動側搬送部材は、コンベアベルトであり、基板搬送部は、コンベアベルトと第１押付け部との間に配置され、コンベアベルトが延びる方向に沿って延びる板状のベルト押付用部材をさらに有し、第１押付け部は、ベルト押付用部材を介して、可動側搬送部材としてのコンベアベルトを、固定側搬送部材に向かって上下方向に押し付けるように構成されている。このように構成すれば、ベルト押付用部材により可動側搬送部材としてのコンベアベルトを一様に押すことができるので、可動側搬送部材としてのコンベアベルトに第１押付け部による押し付け力を均一に加えることができる。その結果、可動側搬送部材と固定側搬送部材との間に挟まれる基板に第１押付け部による押し付け力を均一に加えることができるので、基板搬送部における基板の搬送位置によらず安定して基板を挟み込むことができる。 In the configuration in which the first pressing unit presses the movable-side conveyance member toward the fixed-side conveyance member, preferably, the movable-side conveyance member is a conveyor belt, and the substrate conveyance unit is formed between the conveyor belt and the first pressing unit. It further includes a plate-shaped belt pressing member that is disposed between and extends along the direction in which the conveyor belt extends, and the first pressing portion has a conveyor belt as a movable-side conveying member via the belt pressing member. It is comprised so that it may press up and down toward a stationary-side conveyance member. If comprised in this way, the conveyor belt as a movable side conveyance member can be uniformly pressed by the belt pressing member, Therefore The pressing force by a 1st pressing part is uniformly applied to the conveyor belt as a movable side conveyance member be able to. As a result, since the pressing force by the first pressing unit can be uniformly applied to the substrate sandwiched between the movable-side conveyance member and the fixed-side conveyance member, the substrate conveyance unit stably does not depend on the substrate conveyance position. The substrate can be sandwiched.
　上記基板搬送部が第１押付け部をさらに有する構成において、好ましくは、基板搬送部は、第１押付け部よりも大きい押し付け力を有し、可動側搬送部材としての下側搬送部材と上側搬送部材とのうちの一方を、下側搬送部材と上側搬送部材とのうちの他方に向かって上下方向に押し付けることにより、基板を基板作業位置で固定するための第２押付け部をさらに有する。このように構成すれば、第１押付け部による押し付け力が基板を固定する程には大きくない場合にも、基板作業位置では、第１押付け部よりも大きい押し付け力を有する第２押付け部により基板を確実に固定することができる。 In the configuration in which the substrate transport unit further includes a first pressing unit, preferably, the substrate transport unit has a pressing force larger than that of the first pressing unit, and a lower transport member and an upper transport member as movable transport members. Is pressed in the vertical direction toward the other of the lower transport member and the upper transport member to further have a second pressing portion for fixing the substrate at the substrate working position. According to this structure, even when the pressing force by the first pressing portion is not so large as to fix the substrate, the substrate is moved by the second pressing portion having a pressing force larger than that of the first pressing portion at the substrate working position. Can be securely fixed.
　上記一の局面による基板作業装置において、好ましくは、下側搬送部材および上側搬送部材は、コンベアベルトである。このように構成すれば、搬送方向に沿って延びるコンベアベルトとしての下側搬送部材と上側搬送部材とにより、基板の両端部の全体を一様に挟み込むことができる。 In the substrate working apparatus according to the above aspect, the lower transport member and the upper transport member are preferably conveyor belts. If comprised in this way, the whole both ends of a board | substrate can be pinched | interposed uniformly by the lower side conveyance member and upper side conveyance member as a conveyor belt extended along a conveyance direction.
　上記一の局面による基板作業装置において、好ましくは、下側搬送部材は、コンベアベルトであり、上側搬送部材は、コンベアローラである。このように構成すれば、コンベアベルトとしての下側搬送部材とコンベアローラとしての上側搬送部材とにより、基板を容易に挟み込むことができる。 In the substrate working apparatus according to the above aspect, the lower transport member is preferably a conveyor belt, and the upper transport member is a conveyor roller. If comprised in this way, a board | substrate can be easily pinched | interposed by the lower side conveyance member as a conveyor belt, and the upper side conveyance member as a conveyor roller.
　上記一の局面による基板作業装置において、好ましくは、基板搬送部は、基板を待機させるためのバッファ用搬送部と、基板作業が行われる基板作業用搬送部と、を含み、バッファ用搬送部と基板作業用搬送部とは、それぞれ、下側搬送部材と上側搬送部材とを有し、バッファ用搬送部と基板作業用搬送部とは、それぞれ、下側搬送部材と上側搬送部材との間に、水平面内で搬送方向と直交する方向の基板の両端部を上下方向に挟み込んだ状態で、基板を搬送するように構成されている。このように構成すれば、基板搬送部が複数の搬送部（バッファ用搬送部および基板作業用搬送部）に分割されている場合にも、搬送部の各々において、下側搬送部材と上側搬送部材との間に挟み込まれた状態で基板を搬送することができる。 In the substrate working apparatus according to the above aspect, preferably, the substrate transport unit includes a buffer transport unit for waiting the substrate and a substrate work transport unit in which the substrate work is performed, and the buffer transport unit; Each of the substrate working transport units includes a lower transport member and an upper transport member, and each of the buffer transport unit and the substrate work transport unit is provided between the lower transport member and the upper transport member. The substrate is transported in a state where both end portions of the substrate in a direction perpendicular to the transport direction in the horizontal plane are sandwiched in the vertical direction. If comprised in this way, even when the board | substrate conveyance part is divided | segmented into the some conveyance part (The conveyance part for a buffer, and the conveyance part for board | substrate work), in each of a conveyance part, a lower conveyance member and an upper conveyance member The substrate can be transported while being sandwiched between the two.
　本発明によれば、上記のように、基板の搬送に要する時間を短縮することが可能な基板搬送部を備える基板作業装置を提供することができる。 According to the present invention, as described above, it is possible to provide a substrate working apparatus including a substrate transport unit that can shorten the time required for transporting a substrate.
本発明の第１および第２実施形態による基板作業装置の全体構成を示す図である。It is a figure which shows the whole structure of the substrate working apparatus by 1st and 2nd embodiment of this invention. 第１実施形態の基板作業装置の基板搬送部を示す斜視図である。It is a perspective view which shows the board | substrate conveyance part of the board | substrate working apparatus of 1st Embodiment. 第１実施形態の基板作業装置の基板搬送部をＹ１方向から見た模式的な図である。It is the typical figure which looked at the substrate conveyance part of the substrate working apparatus of 1st Embodiment from the Y1 direction. 第１実施形態の基板作業装置の基板搬送部をＸ２方向から見た図である。It is the figure which looked at the board | substrate conveyance part of the substrate working apparatus of 1st Embodiment from X2 direction. 第１実施形態の基板作業装置の基板搬送部をＺ２方向から見た図である。It is the figure which looked at the substrate conveyance part of the substrate working apparatus of 1st Embodiment from the Z2 direction. 図７の６００－６００線に沿った断面を示す模式的な図である。FIG. 8 is a schematic diagram showing a cross section taken along line 600-600 in FIG. 7. 第１実施形態の基板作業装置において基板が搬入される前の状態を示す模式的な図である。It is a typical figure which shows the state before a board | substrate is carried in in the board | substrate working apparatus of 1st Embodiment. 第１実施形態の基板作業装置において基板が搬入された直後の状態を示す模式的な図である。It is a schematic diagram which shows the state immediately after the board | substrate was carried in in the board | substrate working apparatus of 1st Embodiment. 第１実施形態の基板作業装置において基板が固定された状態を示す模式的な図である。It is a typical figure showing the state where the substrate was fixed in the substrate working device of a 1st embodiment. 第１実施形態の基板作業装置において基板が搬出される直前の状態を示す模式的な図である。It is a schematic diagram which shows the state just before a board | substrate is carried out in the board | substrate working apparatus of 1st Embodiment. 第２実施形態の基板作業装置の基板搬送部を示す斜視図である。It is a perspective view which shows the board | substrate conveyance part of the board | substrate working apparatus of 2nd Embodiment. 第２実施形態の基板作業装置の基板搬送部をＹ１方向から見た模式的な図である。It is the typical figure which looked at the substrate conveyance part of the substrate working apparatus of 2nd Embodiment from the Y1 direction. 第１実施形態の変形例による基板作業装置の基板搬送部を示す模式的な図である。It is a typical figure showing a substrate conveyance part of a substrate working device by a modification of a 1st embodiment.
　以下、本発明を具体化した実施形態を図面に基づいて説明する。以下の説明では、基板Ｐの搬送方向をＸ方向とし、水平面内でＸ方向と直交する方向をＹ方向とし、水平面と直交する上下方向をＺ方向とする。また、搬送方向の上流側をＸ２方向側とし、搬送方向の下流側をＸ１方向側とする。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following description, the transport direction of the substrate P is the X direction, the direction orthogonal to the X direction in the horizontal plane is the Y direction, and the vertical direction orthogonal to the horizontal plane is the Z direction. The upstream side in the transport direction is the X2 direction side, and the downstream side in the transport direction is the X1 direction side.
［第１実施形態］
（基板作業装置の構成）
　まず、図１を参照して、本発明の第１実施形態による基板作業装置１００の構成について説明する。 [First Embodiment]
(Configuration of substrate working device)
First, the configuration of the substrate working apparatus 100 according to the first embodiment of the present invention will be described with reference to FIG.
　基板作業装置１００は、図１に示すように、ＩＣ、トランジスタ、コンデンサおよび抵抗などの部品Ｅ（電子部品）を、プリント基板などの基板Ｐに実装する基板作業を行う部品実装装置である。 As shown in FIG. 1, the board working apparatus 100 is a component mounting apparatus that performs board work for mounting a component E (electronic component) such as an IC, a transistor, a capacitor, and a resistor on a board P such as a printed board.
　また、基板作業装置１００は、基台１と、基板搬送部２と、基板作業部３と、支持部４と、レール部５と、部品撮像部６と、マーク撮像部７と、制御部８とを備えている。 The substrate working apparatus 100 includes a base 1, a substrate transport unit 2, a substrate working unit 3, a support unit 4, a rail unit 5, a component imaging unit 6, a mark imaging unit 7, and a control unit 8. And.
　基台１は、基板作業装置１００において各構成要素を配置する基礎となる台である。基台１上には、基板搬送部２、レール部５および部品撮像部６が設けられている。また、基台１内には、制御部８が設けられている。また、基台１には、Ｙ方向の両側（Ｙ１側およびＹ２側）に、複数のテープフィーダ１０を配置可能なフィーダ配置部１ａがそれぞれ設けられている。 The base 1 is a base that serves as a basis for arranging each component in the substrate working apparatus 100. On the base 1, a substrate transport unit 2, a rail unit 5, and a component imaging unit 6 are provided. A control unit 8 is provided in the base 1. In addition, the base 1 is provided with feeder arrangement portions 1a capable of arranging a plurality of tape feeders 10 on both sides (Y1 side and Y2 side) in the Y direction.
　テープフィーダ１０は、基板Ｐに実装される部品Ｅを供給する装置である。テープフィーダ１０は、複数の部品Ｅを保持した部品供給テープが巻き回されたリール（図示せず）を保持している。また、テープフィーダ１０は、基板作業部３による部品Ｅの取出しのための吸着動作に応じて、保持されたリールを回転させて部品供給テープを送出することにより、部品Ｅを供給するように構成されている。 The tape feeder 10 is a device that supplies a component E mounted on the substrate P. The tape feeder 10 holds a reel (not shown) around which a component supply tape holding a plurality of components E is wound. Further, the tape feeder 10 is configured to supply the component E by rotating the held reel and sending out the component supply tape in accordance with the suction operation for taking out the component E by the substrate working unit 3. Has been.
　基板搬送部２は、基板作業装置１００の外部から実装前の基板Ｐを搬入し、基板Ｐを搬送方向（Ｘ方向）に搬送し、基板作業装置１００の外部に実装後の基板Ｐを搬出するように構成されている。また、基板搬送部２は、搬入された基板Ｐを基板作業位置Ａまで搬送するとともに、基板作業位置Ａにおいて固定するように構成されている。なお、基板搬送部２の詳細な構成は、後述する。 The substrate transport unit 2 carries the substrate P before mounting from the outside of the substrate working apparatus 100, transports the substrate P in the transport direction (X direction), and unloads the mounted substrate P to the outside of the substrate working apparatus 100. It is configured as follows. Further, the substrate transport unit 2 is configured to transport the loaded substrate P to the substrate work position A and to fix the substrate P at the substrate work position A. The detailed configuration of the substrate transport unit 2 will be described later.
　基板作業部３は、部品実装用のヘッドユニットであり、基板搬送部２により搬送された基板Ｐに基板作業として部品実装作業を行うように構成されている。基板作業部３は、複数（５つ）のヘッド（実装ヘッド）３ａを含んでいる。複数のヘッド３ａの各々は、真空発生装置（図示せず）に接続されており、真空発生装置から供給される負圧によって、先端に装着されたノズル（図示せず）に部品Ｅを吸着可能に構成されている。 The board working unit 3 is a component mounting head unit, and is configured to perform component mounting work as board work on the board P transported by the board transporting unit 2. The substrate working unit 3 includes a plurality (five) of heads (mounting heads) 3a. Each of the plurality of heads 3a is connected to a vacuum generator (not shown), and the negative pressure supplied from the vacuum generator can attract the component E to a nozzle (not shown) attached to the tip. It is configured.
　支持部４は、基板作業部３を搬送方向（Ｘ方向）に移動可能に支持するように構成されている。具体的には、支持部４は、搬送方向に延びるボールねじ軸４１と、ボールねじ軸４１を回転させるＸ軸モータ４２とを含んでいる。基板作業部３には、支持部４のボールねじ軸４１と係合するボールナット３ｂが設けられている。基板作業部３は、Ｘ軸モータ４２によりボールねじ軸４１が回転されることにより、ボールねじ軸４１と係合するボールナット３ｂとともに、支持部４に沿って搬送方向に移動可能に構成されている。 The support unit 4 is configured to support the substrate working unit 3 so as to be movable in the transport direction (X direction). Specifically, the support unit 4 includes a ball screw shaft 41 extending in the transport direction and an X-axis motor 42 that rotates the ball screw shaft 41. The substrate working unit 3 is provided with a ball nut 3 b that engages with the ball screw shaft 41 of the support unit 4. The substrate working unit 3 is configured to be movable along the support unit 4 in the conveying direction together with the ball nut 3b engaged with the ball screw shaft 41 when the ball screw shaft 41 is rotated by the X-axis motor 42. Yes.
　一対のレール部５は、支持部４をＹ方向に移動可能に支持するように構成されている。具体的には、レール部５は、支持部４のＸ方向の両端部をＹ方向に移動可能に支持する一対のガイドレール５１と、Ｙ方向に延びるボールねじ軸５２と、ボールねじ軸５２を回転させるＹ軸モータ５３とを含んでいる。支持部４には、レール部５のボールねじ軸５２と係合するボールナット４３が設けられている。支持部４は、Ｙ軸モータ５３によりボールねじ軸５２が回転されることにより、ボールねじ軸５２と係合するボールナット４３とともに、一対のレール部５に沿ってＹ方向に移動可能に構成されている。 The pair of rail portions 5 are configured to support the support portion 4 so as to be movable in the Y direction. Specifically, the rail portion 5 includes a pair of guide rails 51 that support both end portions in the X direction of the support portion 4 so as to be movable in the Y direction, a ball screw shaft 52 that extends in the Y direction, and a ball screw shaft 52. And a Y-axis motor 53 to be rotated. The support portion 4 is provided with a ball nut 43 that engages with the ball screw shaft 52 of the rail portion 5. The support portion 4 is configured to be movable in the Y direction along the pair of rail portions 5 together with the ball nut 43 engaged with the ball screw shaft 52 when the ball screw shaft 52 is rotated by the Y-axis motor 53. ing.
　このような構成により、基板作業部３は、基台１上を水平方向（Ｘ方向およびＹ方向）に移動可能に構成されている。これにより、基板作業部３は、テープフィーダ１０の上方に移動して、テープフィーダ１０から供給される部品Ｅを取得（吸着）することが可能である。また、基板作業部３は、基板作業位置Ａにおいて固定された基板Ｐの上方に移動して、取得（吸着）された部品Ｅを基板Ｐに実装することが可能である。 With such a configuration, the substrate working unit 3 is configured to be movable in the horizontal direction (X direction and Y direction) on the base 1. Thereby, the board | substrate working part 3 can move above the tape feeder 10, and can acquire (adsorb | suck) the components E supplied from the tape feeder 10. FIG. The board working unit 3 can move above the board P fixed at the board working position A and mount the acquired (sucked) component E on the board P.
　部品撮像部６は、基板Ｐに対する部品Ｅの実装作業に先立ってヘッド３ａに吸着された部品Ｅを撮像する部品認識用のカメラである。部品撮像部６は、基台１の上面上に固定されており、部品Ｅの下方（Ｚ２方向）から、ヘッド３ａに吸着された部品Ｅを撮像するように構成されている。部品撮像部６による部品Ｅの撮像画像に基づいて、制御部８は、部品Ｅの吸着状態（回転姿勢およびヘッド３ａに対する吸着位置）を取得（認識）するように構成されている。 The component imaging unit 6 is a component recognition camera that images the component E sucked by the head 3a prior to the mounting operation of the component E on the substrate P. The component imaging unit 6 is fixed on the upper surface of the base 1 and is configured to image the component E adsorbed by the head 3a from below the component E (Z2 direction). Based on the captured image of the component E by the component imaging unit 6, the control unit 8 is configured to acquire (recognize) the suction state (rotational posture and suction position with respect to the head 3a) of the component E.
　マーク撮像部７は、基板Ｐに対する部品Ｅの実装作業に先立って基板Ｐの上面に付された位置認識マーク（フィデューシャルマーク）Ｆを撮像するマーク認識用のカメラである。位置認識マークＦは、基板Ｐの位置を認識するためのマークである。位置認識マークＦによる位置認識マークＦの撮像結果に基づいて、制御部８は、基板作業位置Ａにおいて固定された基板Ｐの正確な位置および姿勢を取得（認識）するように構成されている。 The mark imaging unit 7 is a mark recognition camera that images a position recognition mark (fiducial mark) F attached to the upper surface of the substrate P prior to the mounting operation of the component E on the substrate P. The position recognition mark F is a mark for recognizing the position of the substrate P. Based on the imaging result of the position recognition mark F by the position recognition mark F, the control unit 8 is configured to acquire (recognize) an accurate position and posture of the substrate P fixed at the substrate work position A.
　制御部８は、ＣＰＵ（Ｃｅｎｔｒａｌ　Ｐｒｏｃｅｓｓｉｎｇ　Ｕｎｉｔ）、ＲＯＭ（Ｒｅａｄ　Ｏｎｌｙ　Ｍｅｍｏｒｙ）、およびＲＡＭ（Ｒａｎｄｏｍ　Ａｃｃｅｓｓ　Ｍｅｍｏｒｙ）などを含み、基板作業装置１００の動作を制御する制御回路である。制御部８は、基板搬送部２、テープフィーダ１０、Ｘ軸モータ４２およびＹ軸モータ５３などを生産プログラムに従って制御することにより、基板作業部３により基板実装作業を行わせるように構成されている。 The control unit 8 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like, and is a control circuit that controls the operation of the substrate working apparatus 100. The control unit 8 is configured to cause the substrate working unit 3 to perform the substrate mounting operation by controlling the substrate transport unit 2, the tape feeder 10, the X-axis motor 42, the Y-axis motor 53, and the like according to the production program. .
（基板搬送部の構成）
　次に、図２～図６を参照して、第１実施形態による基板搬送部２の詳細な構成について説明する。 (Configuration of substrate transfer unit)
Next, a detailed configuration of the substrate transport unit 2 according to the first embodiment will be described with reference to FIGS.
　基板搬送部２は、図２に示すように、一対のコンベア部２０ａおよび２０ｂを含んでいる。Ｙ１方向側のコンベア部２０ａは、基板ＰのＹ１方向側の端部Ｐａを保持するとともに、基板Ｐを搬送方向（Ｘ方向）に搬送する機能を有している。また、Ｙ２方向側のコンベア部２０ｂは、基板ＰのＹ２方向側の端部Ｐｂを保持するとともに、基板Ｐを搬送方向に搬送する機能を有している。基板搬送部２は、一対のコンベア部２０ａおよび２０ｂにより、水平面内で搬送方向と直交するＹ方向の基板Ｐの両端部（ＰａおよびＰｂ）をそれぞれ保持した状態で、基板Ｐを搬送するように構成されている。基板搬送部２では、基板Ｐの実装面にはんだなどの接合材や既に実装済みの部品Ｅが配置されているため、接合材と干渉しないように、Ｙ方向の基板Ｐの両端部（ＰａおよびＰｂ）のみが保持され、両端部（ＰａおよびＰｂ）の間の部分は保持されない。なお、コンベア部２０ａおよび２０ｂは、実質的に同様の構成を有している。 The board | substrate conveyance part 2 contains a pair of conveyor parts 20a and 20b, as shown in FIG. The Y1 direction side conveyor section 20a has a function of holding the end portion Pa of the substrate P on the Y1 direction side and transporting the substrate P in the transport direction (X direction). In addition, the Y2 direction side conveyor unit 20b has a function of holding the end portion Pb of the substrate P on the Y2 direction side and transporting the substrate P in the transport direction. The substrate transport unit 2 transports the substrate P while holding both ends (Pa and Pb) of the substrate P in the Y direction orthogonal to the transport direction within the horizontal plane by the pair of conveyor units 20a and 20b. It is configured. In the board transport unit 2, since a bonding material such as solder or a component E that has already been mounted is arranged on the mounting surface of the board P, both end portions of the substrate P in the Y direction (Pa and Only Pb) is retained, and the portion between both ends (Pa and Pb) is not retained. The conveyor units 20a and 20b have substantially the same configuration.
　ここで、第１実施形態では、基板搬送部２のコンベア部２０ａ（２０ｂ）は、摩擦力により基板Ｐを搬送する下側搬送部材２１と、下側搬送部材２１と上下方向（Ｚ方向）に対向するように、下側搬送部材２１の上方に配置され、摩擦力により基板Ｐを搬送する上側搬送部材２２とを有している。基板搬送部２は、コンベア部２０ａおよび２０ｂの下側搬送部材２１と上側搬送部材２２との間に、Ｙ方向の基板Ｐの両端部（ＰａおよびＰｂ）を上下方向に挟み込んだ状態で、基板Ｐを搬送するように構成されている。 Here, in 1st Embodiment, the conveyor part 20a (20b) of the board | substrate conveyance part 2 is the lower side conveyance member 21 which conveys the board | substrate P with a frictional force, and the lower side conveyance member 21, and an up-down direction (Z direction). It has the upper conveyance member 22 which is arrange | positioned above the lower conveyance member 21 so that it may oppose, and conveys the board | substrate P with a frictional force. The substrate transport unit 2 is configured such that both ends (Pa and Pb) of the substrate P in the Y direction are vertically sandwiched between the lower transport member 21 and the upper transport member 22 of the conveyor units 20a and 20b. It is comprised so that P may be conveyed.
　図２～図６に示すように、下側搬送部材２１および上側搬送部材２２は、共に、輪状のコンベアベルトである。輪状のコンベアベルトである下側搬送部材２１は、複数（４つ）のプーリ２１ａに掛け回されている。また、輪状のコンベアベルトである上側搬送部材２２は、複数（２つ）のプーリ２２ａに掛け回されている。 As shown in FIGS. 2 to 6, both the lower conveyance member 21 and the upper conveyance member 22 are annular conveyor belts. The lower conveying member 21 that is a ring-shaped conveyor belt is wound around a plurality (four) of pulleys 21a. Further, the upper conveying member 22 which is a ring-shaped conveyor belt is wound around a plurality (two) of pulleys 22a.
　輪状のコンベアベルトである下側搬送部材２１は、基板Ｐと接触して摩擦力により基板Ｐを搬送する接触部分２１ｂと、基板Ｐと接触せず基板Ｐを搬送しない非接触部分２１ｃとを含んでいる。接触部分２１ｂは、輪状のコンベアベルトのうちの上側の部分であって、基板搬送部２のコンベア部２０ａ（２０ｂ）における基板Ｐの搬入側端部（Ｘ２方向側の端部）から搬出側端部（Ｘ１方向側の端部）まで、搬送方向に沿って延びている。 The lower conveyance member 21 that is a ring-shaped conveyor belt includes a contact portion 21b that contacts the substrate P and conveys the substrate P by frictional force, and a non-contact portion 21c that does not contact the substrate P and does not convey the substrate P. It is out. The contact portion 21b is an upper portion of the ring-shaped conveyor belt, and is a carry-out side end from the carry-in side end (X2 direction side end) of the substrate P in the conveyer unit 20a (20b) of the board transfer unit 2. It extends along the transport direction to the portion (end on the X1 direction side).
　また、輪状のコンベアベルトである上側搬送部材２２は、基板Ｐと接触して摩擦力により基板Ｐを搬送する接触部分２２ｂと、基板Ｐと接触せず基板Ｐを搬送しない非接触部分２２ｃとを含んでいる。接触部分２２ｂは、輪状のコンベアベルトのうちの下側の部分であって、基板搬送部２のコンベア部２０ａ（２０ｂ）における基板Ｐの搬入側端部（Ｘ２方向側の端部）の近傍から搬出側端部（Ｘ１方向側の端部）の近傍まで、搬送方向に沿って延びている。 The upper conveying member 22 that is a ring-shaped conveyor belt includes a contact portion 22b that contacts the substrate P and conveys the substrate P by frictional force, and a non-contact portion 22c that does not contact the substrate P and does not convey the substrate P. Contains. The contact portion 22b is a lower portion of the ring-shaped conveyor belt, from the vicinity of the carry-in side end portion (end portion on the X2 direction side) of the substrate P in the conveyer portion 20a (20b) of the substrate transfer portion 2. It extends along the transport direction to the vicinity of the carry-out side end (end on the X1 direction side).
　下側搬送部材２１および上側搬送部材２２は、下側搬送部材２１の接触部分２１ｂにおける基板Ｐとの接触面と、上側搬送部材２２の接触部分２２ｂにおける基板Ｐとの接触面とが、上下方向に互いに対向するように配置されている。つまり、基板搬送部２では、下側搬送部材２１の接触面と上側搬送部材２２の接触面との間に、Ｙ方向の基板Ｐの両端部（ＰａおよびＰｂ）を上下方向に挟み込んだ状態で、基板Ｐが搬送される。また、下側搬送部材２１および上側搬送部材２２は、基板Ｐの搬入前の状態で、下側搬送部材２１の接触面と上側搬送部材の接触面との間に隙間Ｓ（図４参照）を有するように上下方向に離間して配置されている。これにより、下側搬送部材２１と上側搬送部材２２との間に基板Ｐを容易に搬入することが可能である。 The lower conveyance member 21 and the upper conveyance member 22 have a vertical direction in which a contact surface with the substrate P in the contact portion 21b of the lower conveyance member 21 and a contact surface with the substrate P in the contact portion 22b of the upper conveyance member 22 Are arranged so as to face each other. That is, in the substrate transport unit 2, both end portions (Pa and Pb) of the substrate P in the Y direction are sandwiched in the vertical direction between the contact surface of the lower transport member 21 and the contact surface of the upper transport member 22. The substrate P is transported. Further, the lower transport member 21 and the upper transport member 22 have a gap S (see FIG. 4) between the contact surface of the lower transport member 21 and the contact surface of the upper transport member before the substrate P is carried in. As shown, they are spaced apart in the vertical direction. As a result, the substrate P can be easily carried between the lower transport member 21 and the upper transport member 22.
　下側搬送部材２１は、基板Ｐの搬入により、接触部分２１ｂが上下方向（Ｚ方向）に撓み変形可能に構成されている。第１実施形態では、下側搬送部材２１は、下側搬送部材２１と上側搬送部材２２との間に基板Ｐが搬入されることにより、基板Ｐの搬入前の状態から接触部分２１ｂが下方向（Ｚ２方向）に移動する可動側搬送部材２３として構成されている。 The lower transport member 21 is configured such that the contact portion 21b can be bent and deformed in the vertical direction (Z direction) by carrying in the substrate P. In the first embodiment, when the substrate P is loaded between the lower conveyance member 21 and the upper conveyance member 22, the lower conveyance member 21 has the contact portion 21 b in the downward direction from the state before the substrate P is loaded. The movable side conveyance member 23 is configured to move in the (Z2 direction).
　一方、上側搬送部材２２は、基板Ｐの搬入により、接触部分２２ｂが上下方向に撓み変形しないように構成されている。第１実施形態では、上側搬送部材２２は、基板Ｐの搬入の前後で、上下方向（Ｚ方向）に移動しない固定側搬送部材２４として構成されている。基板搬送部２では、上側搬送部材２２の接触部分２２ｂと非接触部分２２ｃとの間に、上側搬送部材２２の接触部分２２ｂの上方向（Ｚ１方向）への移動を規制する板状の規制部材２５が設けられている。規制部材２５は、接触部分２２ｂの搬入側端部（Ｘ２方向側の端部）の近傍から搬出側端部（Ｘ１方向側の端部）の近傍まで、上側搬送部材２２の接触部分２２ｂに沿って延びており、上側搬送部材２２の接触部分２２ｂの接触面とは反対側の裏面と接触するように配置されている。また、規制部材２５は、上下方向の位置が移動しないように固定されており、上側搬送部材２２の接触部分２２ｂの裏面と接触することによって、上側搬送部材２２の上方向への移動を規制するように構成されている。 On the other hand, the upper conveying member 22 is configured such that the contact portion 22b is not bent and deformed in the vertical direction when the substrate P is loaded. In the first embodiment, the upper transport member 22 is configured as a fixed transport member 24 that does not move in the vertical direction (Z direction) before and after the loading of the substrate P. In the substrate transport unit 2, a plate-shaped regulating member that regulates the upward movement (Z1 direction) of the contact portion 22b of the upper transport member 22 between the contact portion 22b and the non-contact portion 22c of the upper transport member 22. 25 is provided. The regulating member 25 extends along the contact portion 22b of the upper conveyance member 22 from the vicinity of the carry-in side end (X2 direction side end) of the contact portion 22b to the carry-out side end (X1 direction side end). And is arranged so as to be in contact with the back surface opposite to the contact surface of the contact portion 22b of the upper conveying member 22. Further, the regulating member 25 is fixed so that the position in the vertical direction does not move, and regulates the upward movement of the upper conveying member 22 by contacting the back surface of the contact portion 22b of the upper conveying member 22. It is configured as follows.
　また、第１実施形態では、図２および図３に示すように、基板搬送部２は、可動側搬送部材２３としての下側搬送部材２１を、固定側搬送部材２４としての上側搬送部材２２に向かって上方（Ｚ１方向）に押し付ける複数（６つ）の第１押付け部２６を有している。複数の第１押付け部２６は、下側搬送部材２１と上側搬送部材２２との間に基板Ｐを挟んだ状態で、基板Ｐを搬送可能な押し付け力で、可動側搬送部材２３としての下側搬送部材２１を、固定側搬送部材２４としての上側搬送部材２２に押し付けるように構成されている。また、複数の第１押付け部２６は、実質的に同様の構成を有している。 In the first embodiment, as shown in FIGS. 2 and 3, the substrate transport unit 2 converts the lower transport member 21 as the movable transport member 23 into the upper transport member 22 as the fixed transport member 24. A plurality of (six) first pressing portions 26 are pressed upward (in the Z1 direction). The plurality of first pressing portions 26 are arranged on the lower side as the movable transport member 23 with a pressing force capable of transporting the substrate P in a state where the substrate P is sandwiched between the lower transport member 21 and the upper transport member 22. The conveyance member 21 is configured to be pressed against the upper conveyance member 22 as the fixed-side conveyance member 24. Further, the plurality of first pressing portions 26 have substantially the same configuration.
　第１押付け部２６は、下側搬送部材２１の接触部分２１ｂの裏面側（Ｚ２方向側）において、下側搬送部材２１の接触部分２１ｂと非接触部分２１ｃとの間に配置されている。つまり、第１押付け部２６は、下側搬送部材２１の接触部分２１ｂの裏面側から、可動側搬送部材２３としての下側搬送部材２１に押し付け力を加えるように構成されている。また、第１押付け部２６は、バネ部材を含み、下側搬送部材２１と上側搬送部材２２との間に基板Ｐが搬入された場合に、バネ部材が圧縮されるように構成されている。これにより、第１押付け部２６は、下側搬送部材２１と上側搬送部材２２との間に基板Ｐが搬入された場合に、圧縮されたバネ部材により可動側搬送部材２３を固定側搬送部材２４に向かって押し付けるように構成されている。 The first pressing portion 26 is disposed between the contact portion 21b and the non-contact portion 21c of the lower transport member 21 on the back surface side (Z2 direction side) of the contact portion 21b of the lower transport member 21. That is, the first pressing portion 26 is configured to apply a pressing force to the lower conveyance member 21 as the movable conveyance member 23 from the back surface side of the contact portion 21 b of the lower conveyance member 21. Further, the first pressing portion 26 includes a spring member, and is configured so that the spring member is compressed when the substrate P is carried between the lower transport member 21 and the upper transport member 22. As a result, when the substrate P is carried between the lower transport member 21 and the upper transport member 22, the first pressing unit 26 moves the movable transport member 23 to the fixed transport member 24 by the compressed spring member. It is comprised so that it may press toward.
　また、第１実施形態では、図２、図３および図６に示すように、基板搬送部２は、下側搬送部材２１と第１押付け部２６との間に配置され、下側搬送部材２１の接触部分２１ｂが延びる方向に沿って延びる板状のベルト押付用部材２７を有している。ベルト押付用部材２７は、下側搬送部材２１の接触部分２１ｂの搬入側端部（Ｘ２方向側の端部）の近傍から搬出側端部（Ｘ１方向側の端部）の近傍まで、下側搬送部材２１の接触部分２１ｂに沿って延びており、下側搬送部材２１の接触部分２１ｂの接触面とは反対側の裏面と接触するように配置されている。また、ベルト押付用部材２７は、上下可動部材２８に取り付けられており、上下方向に移動可能に構成されている。これにより、ベルト押付用部材２７は、下側搬送部材２１と上側搬送部材２２との間に基板Ｐが搬入された場合に、下側搬送部材２１の接触部分２１ｂとともに、下方向（Ｚ２方向）に移動するように構成されている。上下可動部材２８は、平行リンク機構により構成されている。なお、上下可動部材２８には、リニアガイド機構などの平行リンク機構以外の上下可動部材が用いられてもよい。第１実施形態では、第１押付け部２６は、ベルト押付用部材２７を介して、可動側搬送部材２３としての下側搬送部材２１を、固定側搬送部材２４としての上側搬送部材２２に向かって上方（Ｚ１方向）に押し付けるように構成されている。 In the first embodiment, as shown in FIGS. 2, 3, and 6, the substrate transport unit 2 is disposed between the lower transport member 21 and the first pressing unit 26, and the lower transport member 21. Plate-shaped belt pressing member 27 extending along the direction in which the contact portion 21b extends. The belt pressing member 27 extends from the vicinity of the carry-in end (X2 direction end) of the contact portion 21b of the lower transport member 21 to the vicinity of the carry-out end (X1 direction end). It extends along the contact portion 21b of the transport member 21 and is disposed so as to contact the back surface opposite to the contact surface of the contact portion 21b of the lower transport member 21. The belt pressing member 27 is attached to the vertically movable member 28 and is configured to be movable in the vertical direction. Thereby, when the board | substrate P is carried in between the lower side conveyance member 21 and the upper side conveyance member 22, the belt pressing member 27 is a downward direction (Z2 direction) with the contact part 21b of the lower side conveyance member 21. FIG. Configured to move to. The vertically movable member 28 is configured by a parallel link mechanism. As the vertically movable member 28, a vertically movable member other than a parallel link mechanism such as a linear guide mechanism may be used. In the first embodiment, the first pressing portion 26 moves the lower conveying member 21 as the movable conveying member 23 toward the upper conveying member 22 as the fixed conveying member 24 via the belt pressing member 27. It is configured to press upward (Z1 direction).
　また、第１実施形態では、基板搬送部２は、第１押付け部２６よりも大きい押し付け力を有し、可動側搬送部材２３としての下側搬送部材２１を、固定側搬送部材２４としての上側搬送部材２２に向かって上方（Ｚ１方向）に押し付けることにより、基板Ｐを基板作業位置Ａにおいて固定するための複数（２つ）の第２押付け部２９を有している。複数の第２押付け部２９は、基板搬送部２において、基板作業位置Ａに対応する位置に配置されている。複数の第２押付け部２９は、実質的に同様の構成を有している。 In the first embodiment, the substrate transport unit 2 has a larger pressing force than the first pressing unit 26, and the lower transport member 21 as the movable transport member 23 is replaced with the upper transport member 24 as the fixed transport member 24. A plurality of (two) second pressing portions 29 for fixing the substrate P at the substrate working position A by pressing upward (Z1 direction) toward the transport member 22 are provided. The plurality of second pressing portions 29 are arranged at positions corresponding to the substrate working position A in the substrate transport portion 2. The plurality of second pressing portions 29 have substantially the same configuration.
　第２押付け部２９は、下側搬送部材２１の接触部分２１ｂの裏面側（Ｚ２方向側）において、下側搬送部材２１の接触部分２１ｂと非接触部分２１ｃとの間に配置されている。つまり、第２押付け部２９は、下側搬送部材２１の接触部分２１ｂの裏面側から、可動側搬送部材２３としての下側搬送部材２１に押し付け力を加えるように構成されている。また、第２押付け部２９は、エアシリンダを含んでいる。第２押付け部２９は、基板Ｐの搬送中には、エアシリンダのピストンロッドをエアシリンダ本体の内部に引き込んだ状態にすることにより、可動側搬送部材２３としての下側搬送部材２１に押し付け力を加えないように構成されている。また、第２押付け部２９は、下側搬送部材２１と上側搬送部材２２とにより基板Ｐが基板作業位置Ａまで搬送され、基板作業位置Ａにおいて停止された場合に、エアシリンダのピストンロッドをエアシリンダ本体の内部から突き出すことにより、可動側搬送部材２３としての下側搬送部材２１に押し付け力を加えるように構成されている。これにより、基板作業位置Ａにおいて基板Ｐを固定する場合にのみ、第２押付け部２９による押し付け力が、可動側搬送部材２３としての下側搬送部材２１に加えられる。また、第１実施形態では、第２押付け部２９は、ベルト押付用部材２７を介して、可動側搬送部材２３としての下側搬送部材２１を、固定側搬送部材２４としての上側搬送部材２２に向かって上方（Ｚ１方向）に押し付けるように構成されている。 The second pressing portion 29 is disposed between the contact portion 21b and the non-contact portion 21c of the lower transport member 21 on the back surface side (Z2 direction side) of the contact portion 21b of the lower transport member 21. That is, the second pressing portion 29 is configured to apply a pressing force to the lower transport member 21 as the movable transport member 23 from the back surface side of the contact portion 21b of the lower transport member 21. Further, the second pressing portion 29 includes an air cylinder. During the transfer of the substrate P, the second pressing portion 29 pulls the piston rod of the air cylinder into the inside of the air cylinder main body, thereby pressing the lower transfer member 21 as the movable transfer member 23. It is configured not to add. Further, the second pressing portion 29 moves the piston rod of the air cylinder to the air when the substrate P is transported to the substrate work position A by the lower transport member 21 and the upper transport member 22 and stopped at the substrate work position A. By projecting from the inside of the cylinder body, a pressing force is applied to the lower transport member 21 as the movable transport member 23. Thus, only when the substrate P is fixed at the substrate working position A, the pressing force by the second pressing portion 29 is applied to the lower transport member 21 as the movable transport member 23. Further, in the first embodiment, the second pressing portion 29 is configured such that the lower conveying member 21 as the movable conveying member 23 is changed to the upper conveying member 22 as the fixed conveying member 24 via the belt pressing member 27. It is configured to press upward (Z1 direction).
　また、図２、図４および図５に示すように、基板搬送部２は、下側搬送部材２１および上側搬送部材２２を駆動する駆動モータ３０を有している。基板搬送部２では、下側搬送部材２１および上側搬送部材２２は、単一の駆動モータ３０により駆動される。 2, 4, and 5, the substrate transport unit 2 includes a drive motor 30 that drives the lower transport member 21 and the upper transport member 22. In the substrate transport unit 2, the lower transport member 21 and the upper transport member 22 are driven by a single drive motor 30.
　具体的には、図２および図３に示すように、基板搬送部２は、駆動モータ３０による駆動力を下側搬送部材２１に伝達する第１動力伝達部３１と、駆動モータ３０による駆動力を上側搬送部材２２に伝達する第２動力伝達部３２とを有している。 Specifically, as illustrated in FIGS. 2 and 3, the substrate transport unit 2 includes a first power transmission unit 31 that transmits a driving force from the driving motor 30 to the lower transporting member 21, and a driving force from the driving motor 30. And a second power transmission unit 32 that transmits the power to the upper conveyance member 22.
　第１動力伝達部３１は、コンベアベルトである下側搬送部材２１が掛け回された複数のプーリ２１ａのうち、駆動モータ３０に接続された軸部３０ａを介して、駆動モータ３０に接続されたプーリ２１ａを有している。下側搬送部材２１は、第１動力伝達部３１としてのプーリ２１ａを介して駆動モータ３０の駆動力が伝達されることにより、駆動されるように構成されている。 The first power transmission unit 31 is connected to the drive motor 30 through a shaft portion 30a connected to the drive motor 30 among the plurality of pulleys 21a around which the lower conveyance member 21 that is a conveyor belt is wound. It has a pulley 21a. The lower conveying member 21 is configured to be driven when the driving force of the driving motor 30 is transmitted through a pulley 21 a as the first power transmission unit 31.
　また、第２動力伝達部３２は、コンベアベルトである下側搬送部材２１が掛け回された複数のプーリ２１ａのうちの１つと接続されるとともに、接続されたプーリ２１ａの回転により回転する第１ギヤ３２ａと、第１ギヤ３２ａと係合するとともに、係合された第１ギヤ３２ａの回転により回転する第２ギヤ３２ｂと、第２ギヤ３２ｂと接続されるとともに、第２ギヤ３２ｂの回転により回転するプーリ２２ａとを有している。第２動力伝達部３２を構成するプーリ２２ａは、コンベアベルトである下側搬送部材２１が掛け回された複数のプーリ２２ａのうちの１つである。上側搬送部材２２は、プーリ２１ａと、第１ギヤ３２ａと、第２ギヤ３２ｂと、プーリ２２ａとを介して、駆動モータ３０の駆動力が伝達されることにより、駆動されるように構成されている。 In addition, the second power transmission unit 32 is connected to one of a plurality of pulleys 21a around which the lower conveyance member 21 that is a conveyor belt is wound, and is rotated by the rotation of the connected pulley 21a. The gear 32a is engaged with the first gear 32a, and is connected to the second gear 32b that is rotated by the rotation of the engaged first gear 32a, and the second gear 32b, and is rotated by the rotation of the second gear 32b. And a pulley 22a that rotates. The pulley 22a which comprises the 2nd power transmission part 32 is one of the some pulleys 22a by which the lower side conveyance member 21 which is a conveyor belt was wound around. The upper conveying member 22 is configured to be driven by the driving force of the driving motor 30 being transmitted through the pulley 21a, the first gear 32a, the second gear 32b, and the pulley 22a. Yes.
　また、基板搬送部２は、輪状のコンベアベルトである上側搬送部材２２の上側を構成する非接触部分２２ｃの上下方向の高さ位置を規制する複数（２つ）の位置規制プーリ２２ｄを有している。複数の位置規制プーリ２２ｄは、上側搬送部材２２の上側を構成する非接触部分２２ｃの上下方向の高さ位置が低くなるように、非接触部分２２ｃを下方（Ｚ２方向）に押さえ付けるように構成されている。これにより、上側搬送部材２２の非接触部分２２ｃが、基板搬送部２の上方を移動する可動部（基板作業部３）の移動を妨げることを抑制することが可能である。２つの位置規制プーリ２２ｄは、それぞれ、上側搬送部材２２の搬入側端部（Ｘ２方向側の端部）の近傍および搬出側端部（Ｘ１方向側の端部）の近傍に配置されている。 The substrate transport unit 2 has a plurality (two) of position regulation pulleys 22d that regulate the height position in the vertical direction of the non-contact portion 22c that constitutes the upper side of the upper transport member 22 that is a ring-shaped conveyor belt. ing. The plurality of position regulating pulleys 22d are configured to press the non-contact portion 22c downward (Z2 direction) so that the vertical position of the non-contact portion 22c constituting the upper side of the upper conveying member 22 is lowered. Has been. Thereby, it is possible to suppress the non-contact portion 22 c of the upper transport member 22 from hindering the movement of the movable unit (substrate working unit 3) that moves above the substrate transport unit 2. The two position regulating pulleys 22d are respectively disposed in the vicinity of the carry-in side end (X2 direction side end) and the carry-out side end (X1 direction side end) of the upper conveyance member 22.
（基板搬送動作）
　次に、図７～図１０を参照して、第１実施形態の基板作業装置１００による基板搬送動作について説明する。なお、図７～図１０では、理解を容易にするために、基板搬送部２の要部のみを概略的に図示するとともに、各構成をやや誇張して図示している。 (Substrate transport operation)
Next, a substrate transfer operation by the substrate working apparatus 100 according to the first embodiment will be described with reference to FIGS. In FIGS. 7 to 10, only the main part of the substrate transport unit 2 is schematically illustrated for easy understanding, and each component is illustrated in a slightly exaggerated manner.
　図７に示すように、基板Ｐの搬入前には、下側搬送部材２１および上側搬送部材２２が、下側搬送部材２１の接触面と上側搬送部材２２の接触面との間に隙間Ｓ（図４参照）を有するように上下方向に離間して配置されている。 As shown in FIG. 7, before the substrate P is carried in, the lower transport member 21 and the upper transport member 22 have a gap S (between the contact surface of the lower transport member 21 and the contact surface of the upper transport member 22. (See FIG. 4).
　次に、図８に示すように、上流側（Ｘ２方向側）から基板Ｐが搬入されると、搬入された基板ＰのＹ方向の両端部（ＰａおよびＰｂ）が、下側搬送部材２１と上側搬送部材２２との間に挟み込まれる。固定側搬送部材２４としての上側搬送部材２２は、規制部材２５により上方向への移動を規制されているので、可動側搬送部材２３としての下側搬送部材２１の接触部分２１ｂは、基板Ｐの厚み分だけ撓むことにより、下方（Ｚ２方向）に移動される。この際、接触部分２１ｂとともに、接触部分２１ｂと接触するベルト押付用部材２７も下方に移動される。この結果、第１押付け部２６のバネ部材が圧縮されるとともに、圧縮されたバネ部材の押し付け力により、可動側搬送部材２３としての下側搬送部材２１が、固定側搬送部材２４としての上側搬送部材２２に向かって押し付けられる。 Next, as shown in FIG. 8, when the substrate P is loaded from the upstream side (X2 direction side), both ends (Pa and Pb) of the loaded substrate P in the Y direction are connected to the lower transport member 21. It is sandwiched between the upper conveying member 22. Since the upper conveyance member 22 as the fixed-side conveyance member 24 is restricted from moving upward by the restriction member 25, the contact portion 21 b of the lower conveyance member 21 as the movable-side conveyance member 23 is formed on the substrate P. By bending by the thickness, it is moved downward (Z2 direction). At this time, the belt pressing member 27 that contacts the contact portion 21b is also moved downward together with the contact portion 21b. As a result, the spring member of the first pressing portion 26 is compressed, and the lower conveying member 21 as the movable conveying member 23 is moved upward as the fixed conveying member 24 by the pressing force of the compressed spring member. It is pressed toward the member 22.
　次に、図９に示すように、搬入された基板Ｐが下側搬送部材２１と上側搬送部材２２との間に挟み込まれた状態で、基板作業位置Ａまで搬送されると、基板作業位置Ａにおいて停止される。そして、可動側搬送部材２３としての下側搬送部材２１が、第２押付け部２９により、固定側搬送部材２４としての上側搬送部材２２に向かって上方（Ｚ１方向）に押し付けられる。この結果、基板作業位置Ａにおいて停止された基板Ｐが、基板Ｐの上方に配置された上側搬送部材２２および規制部材２５と、基板Ｐの下方に配置された下側搬送部材２１およびベルト押付用部材２７とにより挟まれることにより、固定される。そして、基板作業位置Ａにおいて固定された状態で、基板作業部３により部品実装作業が行われる。基板作業部３による部品実装作業が完了すると、第２押付け部２９による基板Ｐの固定が解除される。 Next, as shown in FIG. 9, when the loaded substrate P is transported to the substrate work position A in a state where the substrate P is sandwiched between the lower transport member 21 and the upper transport member 22, the substrate work position A Is stopped at. Then, the lower conveying member 21 as the movable conveying member 23 is pressed upward (Z1 direction) toward the upper conveying member 22 as the fixed conveying member 24 by the second pressing portion 29. As a result, the substrate P stopped at the substrate working position A includes the upper transport member 22 and the regulating member 25 disposed above the substrate P, the lower transport member 21 disposed below the substrate P, and the belt pressing member. It is fixed by being sandwiched between the members 27. Then, in a state of being fixed at the board work position A, the board work section 3 performs component mounting work. When the component mounting operation by the substrate working unit 3 is completed, the fixing of the substrate P by the second pressing unit 29 is released.
　次に、図１０に示すように、第２押付け部２９による基板Ｐの固定が解除されると、基板作業位置Ａから下流側（Ｘ１方向側）に基板Ｐが搬送される。そして、部品実装作業が完了した基板Ｐが下流側から搬出される。以上のように、基板作業装置１００の基板搬送部２では、下側搬送部材２１と上側搬送部材２２との間に基板Ｐの両端部（ＰａおよびＰｂ）が挟み込まれた状態で、搬入位置から搬出位置まで基板Ｐが搬送される。 Next, as shown in FIG. 10, when the fixing of the substrate P by the second pressing portion 29 is released, the substrate P is transported from the substrate working position A to the downstream side (X1 direction side). Then, the board P on which the component mounting work is completed is carried out from the downstream side. As described above, in the substrate transfer unit 2 of the substrate working apparatus 100, the both ends (Pa and Pb) of the substrate P are sandwiched between the lower transfer member 21 and the upper transfer member 22 from the transfer position. The substrate P is transported to the unloading position.
（第１実施形態の効果）
　第１実施形態では、以下のような効果を得ることができる。 (Effect of 1st Embodiment)
In the first embodiment, the following effects can be obtained.
　第１実施形態では、上記のように、基板搬送部２を、下側搬送部材２１と上側搬送部材２２との間に、水平面内で搬送方向と直交する方向の基板Ｐの両端部（ＰａおよびＰｂ）を上下方向に挟み込んだ状態で、基板Ｐを搬送するように構成する。これにより、基板Ｐが単に下側搬送部材２１上に載置されただけの状態で搬送される場合と異なり、基板Ｐが下側搬送部材２１と上側搬送部材２２との間に挟み込まれた状態で搬送されるので、加減速時に基板Ｐが下側搬送部材２１の動きに追従できずに、下側搬送部材２１上を滑ることを抑制することができる。その結果、基板搬送部２による基板Ｐの搬送速度を上げることができるので、その分、基板Ｐの搬送に要する時間を短縮することができる。また、基板Ｐが下側搬送部材２１上を滑ることが抑制されるので、予め決められた基板作業位置Ａに基板Ｐを容易に位置決めすることができる。その結果、基板Ｐの位置決め作業に要する時間を短縮することができる。また、基板Ｐが下側搬送部材２１と上側搬送部材２２との間に挟み込まれるので、反りを矯正した状態で基板Ｐを搬送することができる。その結果、基板Ｐの反りに起因して、搬送部材（下側搬送部材２１および上側搬送部材２２）の外側に基板Ｐが乗り上げてしまうことを抑制することができる。この効果は、薄型の基板Ｐや大型の基板Ｐなどの比較的反りが大きい基板Ｐを搬送する場合に、特に有効である。また、基板Ｐが下側搬送部材２１と上側搬送部材２２との間に挟み込まれた状態で搬送されるので、搬送時に基板Ｐが振動することを抑制することができる。その結果、基板Ｐが振動することに起因して、基板Ｐ上に配置されたはんだや部品Ｅなどの部材が位置ずれすることを抑制することができる。 In the first embodiment, as described above, the substrate transport unit 2 is disposed between the lower transport member 21 and the upper transport member 22 at both ends (Pa and Pa) of the substrate P in the direction perpendicular to the transport direction in the horizontal plane. The substrate P is transported in a state where the Pb) is sandwiched in the vertical direction. Thus, unlike the case where the substrate P is simply transported while being placed on the lower transport member 21, the substrate P is sandwiched between the lower transport member 21 and the upper transport member 22. Therefore, it is possible to prevent the substrate P from sliding on the lower transport member 21 without following the movement of the lower transport member 21 during acceleration / deceleration. As a result, the transport speed of the substrate P by the substrate transport unit 2 can be increased, so that the time required for transporting the substrate P can be shortened accordingly. Moreover, since it is suppressed that the board | substrate P slides on the lower conveyance member 21, the board | substrate P can be easily positioned in the predetermined board | substrate operation position A. FIG. As a result, the time required for the positioning operation of the substrate P can be shortened. Moreover, since the board | substrate P is pinched | interposed between the lower side conveyance member 21 and the upper side conveyance member 22, the board | substrate P can be conveyed in the state which corrected the curvature. As a result, it is possible to prevent the substrate P from riding on the outside of the transport members (the lower transport member 21 and the upper transport member 22) due to the warp of the substrate P. This effect is particularly effective when a substrate P having a relatively large warp such as a thin substrate P or a large substrate P is transported. Further, since the substrate P is transported while being sandwiched between the lower transport member 21 and the upper transport member 22, it is possible to suppress the vibration of the substrate P during transport. As a result, it is possible to suppress the displacement of members such as solder and component E arranged on the substrate P due to the vibration of the substrate P.
　また、第１実施形態では、上記のように、下側搬送部材２１を、下側搬送部材２１と上側搬送部材２２との間に基板Ｐが搬入されることにより、基板搬入前の状態から上下方向に移動する可動側搬送部材２３として構成する。そして、基板搬送部２は、可動側搬送部材２３としての下側搬送部材２１を、上側搬送部材２２に向かって上下方向に押し付ける第１押付け部２６を有する。これにより、下側搬送部材２１と上側搬送部材２２との間において基板Ｐをより大きい力で挟み込むことができるので、基板Ｐが下側搬送部材２１上を滑ることをより抑制することができる。また、搬送時に基板Ｐが振動することをより抑制することができるとともに、反りをより矯正した状態で基板Ｐを搬送することができる。 In the first embodiment, as described above, the lower transport member 21 is moved up and down from the state before the substrate is loaded by loading the substrate P between the lower transport member 21 and the upper transport member 22. The movable side conveyance member 23 is configured to move in the direction. The substrate transport unit 2 includes a first pressing unit 26 that presses the lower transport member 21 as the movable transport member 23 in the vertical direction toward the upper transport member 22. Thereby, since the board | substrate P can be pinched | interposed with a bigger force between the lower side conveyance member 21 and the upper side conveyance member 22, it can suppress that the board | substrate P slips on the lower side conveyance member 21 more. Further, it is possible to further suppress the vibration of the substrate P during transportation, and it is possible to transport the substrate P in a state in which the warp is further corrected.
　また、第１実施形態では、上記のように、上側搬送部材２２を、基板Ｐの搬入の前後で、上下方向に移動しない固定側搬送部材２４として構成する。そして、第１押付け部２６を、可動側搬送部材２３としての下側搬送部材２１を、固定側搬送部材２４としての上側搬送部材２２に向かって上下方向に押し付けるように構成する。これにより、下側搬送部材２１および上側搬送部材２２の両方が可動側搬送部材２３として構成されている場合と異なり、上下方向に位置決めした状態で基板Ｐを搬送することができるので、安定して基板Ｐを搬送することができる。 In the first embodiment, as described above, the upper transport member 22 is configured as the fixed transport member 24 that does not move in the vertical direction before and after the loading of the substrate P. The first pressing portion 26 is configured to press the lower conveyance member 21 as the movable conveyance member 23 in the vertical direction toward the upper conveyance member 22 as the fixed conveyance member 24. Thus, unlike the case where both the lower transport member 21 and the upper transport member 22 are configured as the movable transport member 23, the substrate P can be transported while being positioned in the up-down direction. The substrate P can be transported.
　また、第１実施形態では、上記のように、可動側搬送部材２３としての下側搬送部材２１は、コンベアベルトである。そして、基板搬送部２は、コンベアベルトである下側搬送部材２１と第１押付け部２６との間に配置され、コンベアベルトである下側搬送部材２１が延びる方向に沿って延びる板状のベルト押付用部材２７を有する。そして、第１押付け部２６を、ベルト押付用部材２７を介して、可動側搬送部材２３としてのコンベアベルト（下側搬送部材２１）を、固定側搬送部材２４に向かって上下方向に押し付けるように構成する。これにより、ベルト押付用部材２７により可動側搬送部材２３としてのコンベアベルト（下側搬送部材２１）を一様に押すことができるので、可動側搬送部材２３としてのコンベアベルト（下側搬送部材２１）に第１押付け部２６による押し付け力を均一に加えることができる。その結果、可動側搬送部材２３と固定側搬送部材２４との間に挟まれる基板Ｐに第１押付け部２６による押し付け力を均一に加えることができるので、基板搬送部２における基板Ｐの搬送位置によらず安定して基板Ｐを挟み込むことができる。 In the first embodiment, as described above, the lower transport member 21 as the movable transport member 23 is a conveyor belt. And the board | substrate conveyance part 2 is arrange | positioned between the lower conveyance member 21 which is a conveyor belt, and the 1st pressing part 26, and is a plate-shaped belt extended along the direction where the lower conveyance member 21 which is a conveyor belt extends. A pressing member 27 is provided. Then, the first pressing portion 26 is pressed in the vertical direction toward the fixed-side conveyance member 24 by the conveyor belt (the lower-side conveyance member 21) as the movable-side conveyance member 23 via the belt pressing member 27. Constitute. As a result, the belt pressing member 27 can uniformly push the conveyor belt (the lower conveying member 21) as the movable conveying member 23, so that the conveyor belt (the lower conveying member 21) as the movable conveying member 23 can be pressed. ), The pressing force by the first pressing portion 26 can be applied uniformly. As a result, since the pressing force by the first pressing unit 26 can be uniformly applied to the substrate P sandwiched between the movable-side transport member 23 and the fixed-side transport member 24, the transport position of the substrate P in the substrate transport unit 2 Regardless of this, the substrate P can be stably sandwiched.
　また、第１実施形態では、上記のように、基板搬送部２は、第１押付け部２６よりも大きい押し付け力を有し、可動側搬送部材２３としての下側搬送部材２１を、上側搬送部材２２に向かって上下方向に押し付けることにより、基板Ｐを基板作業位置Ａで固定するための第２押付け部２９を有する。これにより、第１押付け部２６による押し付け力が基板Ｐを固定する程には大きくない場合にも、基板作業位置Ａでは、第１押付け部２６よりも大きい押し付け力を有する第２押付け部２９により基板Ｐを確実に固定することができる。また、第１実施形態では、基板Ｐが下側搬送部材２１と上側搬送部材２２との間に挟み込まれた状態で搬送されるので、基板作業位置Ａにおいて第２押付け部２９による押し付け力が基板Ｐに加えられた場合に、基板Ｐが振動することを抑制することができる。その結果、押し付け力を加えた際に基板Ｐが振動することに起因して、基板Ｐ上に配置されたはんだや部品Ｅなどの部材が位置ずれすることを抑制することができる。 In the first embodiment, as described above, the substrate transport unit 2 has a larger pressing force than the first pressing unit 26, and the lower transport member 21 as the movable transport member 23 is replaced with the upper transport member. A second pressing portion 29 for fixing the substrate P at the substrate working position A by pressing in the vertical direction toward the substrate 22 is provided. Accordingly, even when the pressing force by the first pressing portion 26 is not so large as to fix the substrate P, the second pressing portion 29 having a pressing force larger than that of the first pressing portion 26 is used at the substrate working position A. The substrate P can be securely fixed. In the first embodiment, since the substrate P is transported while being sandwiched between the lower transport member 21 and the upper transport member 22, the pressing force by the second pressing portion 29 is applied to the substrate at the substrate work position A. When added to P, the substrate P can be prevented from vibrating. As a result, it is possible to suppress displacement of members such as solder and component E arranged on the substrate P due to the vibration of the substrate P when the pressing force is applied.
　また、第１実施形態では、上記のように、下側搬送部材２１および上側搬送部材２２は、コンベアベルトである。これにより、搬送方向に沿って延びるコンベアベルトとしての下側搬送部材２１と上側搬送部材２２とにより、基板Ｐの両端部（ＰａおよびＰｂ）の全体を一様に挟み込むことができる。 In the first embodiment, as described above, the lower conveyance member 21 and the upper conveyance member 22 are conveyor belts. Thereby, the whole of the both ends (Pa and Pb) of the substrate P can be sandwiched uniformly by the lower transport member 21 and the upper transport member 22 as conveyor belts extending along the transport direction.
［第２実施形態］
　次に、図１、図１１および図１２を参照して、第２実施形態について説明する。この第２実施形態では、上記第１実施形態と異なり、基板搬送部が複数の搬送部に分割されている例について説明する。なお、上記第１実施形態と同一の構成については、図中において同じ符号を付して図示し、その説明を省略する。 [Second Embodiment]
Next, a second embodiment will be described with reference to FIG. 1, FIG. 11, and FIG. In the second embodiment, unlike the first embodiment, an example in which the substrate transfer unit is divided into a plurality of transfer units will be described. In addition, about the structure same as the said 1st Embodiment, the same code | symbol is attached | subjected and shown in the figure, and the description is abbreviate | omitted.
（基板作業装置の構成）
　本発明の第２実施形態による基板作業装置２００は、図１に示すように、基板搬送部１０２を備える点で、上記第１実施形態の基板作業装置１００と相違する。 (Configuration of substrate working device)
The substrate working apparatus 200 according to the second embodiment of the present invention is different from the substrate working apparatus 100 according to the first embodiment in that a substrate carrying unit 102 is provided as shown in FIG.
　第２実施形態では、図１１および図１２に示すように、基板搬送部１０２は、第１搬送部２０２と、第２搬送部３０２と、第３搬送部４０２とを含み、複数（３つ）の搬送部に分割されている。第１搬送部２０２と、第２搬送部３０２と、第３搬送部４０２とは、互いに独立して基板Ｐを搬送可能に構成されている。なお、第１搬送部２０２および第３搬送部４０２は、共に、特許請求の範囲の「バッファ用搬送部」の一例である。また、第２搬送部３０２は、特許請求の範囲の「基板作業用搬送部」の一例である。 In the second embodiment, as shown in FIGS. 11 and 12, the substrate transport unit 102 includes a first transport unit 202, a second transport unit 302, and a third transport unit 402, and a plurality (three). It is divided into a transport section. The first transport unit 202, the second transport unit 302, and the third transport unit 402 are configured to be able to transport the substrate P independently of each other. The first transport unit 202 and the third transport unit 402 are both examples of the “buffer transport unit” in the claims. The second transport unit 302 is an example of the “substrate working transport unit” in the claims.
　第１搬送部２０２は、基板搬送部１０２において上流側（Ｘ２方向側）に配置されており、基板作業装置２００の外部から実装前の基板Ｐを搬入するように構成されている。また、第１搬送部２０２は、実装前の基板Ｐを基板作業装置２００の内部において待機させるためのバッファ用搬送部としての機能を有している。 The first transport unit 202 is arranged on the upstream side (X2 direction side) in the substrate transport unit 102, and is configured to carry in the substrate P before mounting from the outside of the substrate working apparatus 200. Further, the first transport unit 202 has a function as a transport unit for a buffer for causing the substrate P before mounting to stand by inside the substrate working apparatus 200.
　第２搬送部３０２は、第１搬送部２０２と第３搬送部４０２との間に配置されており、第１搬送部２０２から実装前の基板Ｐを受け取るとともに、受け取った実装前の基板Ｐを基板作業位置Ａまで搬送するように構成されている。また、第２搬送部３０２は、基板作業位置Ａにおいて、実装前の基板Ｐを固定するように構成されている。第２搬送部３０２では、基板作業位置Ａにおいて基板Ｐが固定された状態で、基板作業部３（図１参照）による基板作業としての部品実装作業が行われる。つまり、第２搬送部３０２は、基板作業が行われる基板作業用搬送部としての機能を有している。 The second transport unit 302 is disposed between the first transport unit 202 and the third transport unit 402, receives the unmounted substrate P from the first transport unit 202, and receives the received unmounted substrate P. It is configured to transport to the substrate work position A. The second transport unit 302 is configured to fix the substrate P before mounting at the substrate work position A. In the second transport unit 302, a component mounting operation as a substrate operation is performed by the substrate operation unit 3 (see FIG. 1) while the substrate P is fixed at the substrate operation position A. That is, the 2nd conveyance part 302 has a function as a conveyance part for board | substrate work in which board | substrate work is performed.
　第３搬送部４０２は、基板搬送部１０２において下流側（Ｘ１方向側）に配置されており、第２搬送部３０２から実装後の基板Ｐを受け取り、基板作業装置２００の外部に実装後の基板Ｐを搬出するように構成されている。また、第３搬送部４０２は、実装後の基板Ｐを基板作業装置２００の内部において待機させるためのバッファ用搬送部としての機能を有している。 The third transport unit 402 is disposed on the downstream side (X1 direction side) of the substrate transport unit 102, receives the mounted substrate P from the second transport unit 302, and is mounted outside the substrate working apparatus 200. It is comprised so that P may be carried out. Further, the third transport unit 402 has a function as a transport unit for a buffer for making the mounted substrate P stand by in the substrate working apparatus 200.
　ここで、第２実施形態では、第１搬送部２０２と、第２搬送部３０２と、第３搬送部４０２とは、それぞれ、下側搬送部材２２１（３２１、４２１）と、上側搬送部材２２２（３２２、４２２）とを有している。第１搬送部２０２と、第２搬送部３０２と、第３搬送部４０２とは、それぞれ、下側搬送部材２２１（３２１、４２１）と上側搬送部材２２２（３２２、４２２）との間に、Ｙ方向の基板Ｐの両端部（ＰａおよびＰｂ）を上下方向に挟み込んだ状態で、基板Ｐを搬送するように構成されている。なお、第１搬送部２０２と、第２搬送部３０２と、第３搬送部４０２とは、実質的に同様の構成を有している。 Here, in the second embodiment, the first transport unit 202, the second transport unit 302, and the third transport unit 402 are respectively a lower transport member 221 (321, 421) and an upper transport member 222 ( 322, 422). The first transport unit 202, the second transport unit 302, and the third transport unit 402 are respectively arranged between the lower transport member 221 (321, 421) and the upper transport member 222 (322, 422). The substrate P is transported in a state where both ends (Pa and Pb) of the substrate P in the direction are sandwiched in the vertical direction. The first transport unit 202, the second transport unit 302, and the third transport unit 402 have substantially the same configuration.
　輪状のコンベアベルトである下側搬送部材２２１（３２１、４２１）は、複数（４つ）のプーリ２２１ａ（３２１ａ、４２１ａ）に掛け回されている。また、輪状のコンベアベルトである上側搬送部材２２２（３２２、４２２）は、複数（２つ）のプーリ２２２ａ（３２２ａ、４２２ａ）に掛け回されている。 The lower conveying member 221 (321, 421) which is a ring-shaped conveyor belt is wound around a plurality (four) of pulleys 221a (321a, 421a). The upper conveying member 222 (322, 422), which is a ring-shaped conveyor belt, is wound around a plurality (two) of pulleys 222a (322a, 422a).
　輪状のコンベアベルトである下側搬送部材２２１（３２１、４２１）は、基板Ｐと接触して摩擦力により基板Ｐを搬送する接触部分２２１ｂ（３２１ｂ、４２１ｂ）と、基板Ｐと接触せず基板Ｐを搬送しない非接触部分２２１ｃ（３２１ｃ、４２１ｃ）とを含んでいる。また、下側搬送部材２２１（３２１、４２１）は、可動側搬送部材２２３（３２３、３２４）として構成されている。なお、可動側搬送部材２２３（３２３、４２３）としての下側搬送部材２２１（３２１、４２１）は、第１実施形態の可動側搬送部材２３としての下側搬送部材２１と対応しており、同様の構成を有する。このため、詳細な説明を省略する。以下においても、第１実施形態と同様の構成については、その旨を記載し、詳細な説明を省略する。 The lower conveyance member 221 (321, 421) which is a ring-shaped conveyor belt is in contact with the substrate P and contacts the substrate P by the frictional force and 221b (321b, 421b). And a non-contact portion 221c (321c, 421c) that does not convey the sheet. Further, the lower transport member 221 (321, 421) is configured as a movable transport member 223 (323, 324). In addition, the lower conveyance member 221 (321, 421) as the movable conveyance member 223 (323, 423) corresponds to the lower conveyance member 21 as the movable conveyance member 23 of the first embodiment. It has the composition of. Therefore, detailed description is omitted. Also in the following, about the structure similar to 1st Embodiment, that is described and detailed description is abbreviate | omitted.
　輪状のコンベアベルトである上側搬送部材２２２（３２２、４２２）は、基板Ｐと接触して摩擦力により基板Ｐを搬送する接触部分２２２ｂ（３２２ｂ、４２２ｂ）と、基板Ｐと接触せず基板Ｐを搬送しない非接触部分２２２ｃ（３２２ｃ、４２２ｃ）とを含んでいる。また、上側搬送部材２２２（３２２、４２２）は、固定側搬送部材２２４（３２４、４２４）として構成されている。なお、固定側搬送部材２２４（３２４、４２４）としての上側搬送部材２２２（３２２、４２２）は、第１実施形態の固定側搬送部材２４としての上側搬送部材２２と対応しており、同様の構成を有する。 The upper conveying member 222 (322, 422), which is a ring-shaped conveyor belt, contacts the substrate P and conveys the substrate P by frictional force. The contact portion 222b (322b, 422b) conveys the substrate P without contacting the substrate P. And non-contact portions 222c (322c, 422c) that are not conveyed. Further, the upper transport member 222 (322, 422) is configured as a fixed transport member 224 (324, 424). The upper conveyance member 222 (322, 422) as the fixed-side conveyance member 224 (324, 424) corresponds to the upper conveyance member 22 as the fixed-side conveyance member 24 of the first embodiment, and has the same configuration. Have
　また、第１搬送部２０２（第２搬送部３０２、第３搬送部４０２）には、規制部材２２５（３２５、４２５）と、第１押付け部２２６（３２６、４２６）と、ベルト押付用部材２２７（３２７、４２７）と、上下可動部材２２８（３２８、４２８）とが設けられている。なお、規制部材２２５（３２５、４２５）と、第１押付け部２２６（３２６、４２６）と、ベルト押付用部材２２７（３２７、４２７）と、上下可動部材２２８（３２８、４２８）とは、それぞれ、第１実施形態の規制部材２５と、第１押付け部２６と、ベルト押付用部材２７と、上下可動部材２８とに対応しており、同様の構成を有する。 Further, the first conveying unit 202 (second conveying unit 302, third conveying unit 402) includes a regulating member 225 (325, 425), a first pressing unit 226 (326, 426), and a belt pressing member 227. (327, 427) and vertically movable members 228 (328, 428) are provided. The regulating member 225 (325, 425), the first pressing portion 226 (326, 426), the belt pressing member 227 (327, 427), and the vertically movable member 228 (328, 428) are respectively It corresponds to the regulating member 25, the first pressing portion 26, the belt pressing member 27, and the vertically movable member 28 of the first embodiment, and has the same configuration.
　また、第２実施形態では、第２搬送部３０２にのみ、第２押付け部３２９が設けられている。第２実施形態では、第１搬送部２０２と第３搬送部４０２とには、第２押付け部３２９が設けられていない。なお、第２押付け部３２９は、第１実施形態の第２押付け部２９に対応しており、同様の構成を有する。 In the second embodiment, the second pressing unit 329 is provided only in the second transport unit 302. In the second embodiment, the first transport unit 202 and the third transport unit 402 are not provided with the second pressing unit 329. The second pressing portion 329 corresponds to the second pressing portion 29 of the first embodiment and has the same configuration.
　また、第２実施形態では、図１１に示すように、第１搬送部２０２と、第２搬送部３０２と、第３搬送部４０２とには、それぞれ、下側搬送部材２２１（３２１、４２１）および上側搬送部材２２２（３２２、４２２）を駆動する駆動モータ２３０（３３０、４３０）が設けられている。駆動モータ２３０（３３０、４３０）による下側搬送部材２２１（３２１、４２１）および上側搬送部材２２２（３２２、４２２）への動力伝達機構は、第１実施形態と同様である。また、第１搬送部２０２（第２搬送部３０２、第３搬送部４０２）には、位置規制プーリ２２２ｄ（３２２ｄ、４２２ｄ）が設けられている。なお、位置規制プーリ２２２ｄ（３２２ｄ、４２２ｄ）は、第１実施形態の位置規制プーリ２２ｄと対応しており、同様の構成を有する。 In the second embodiment, as shown in FIG. 11, the first transport unit 202, the second transport unit 302, and the third transport unit 402 have lower transport members 221 (321 and 421), respectively. In addition, driving motors 230 (330, 430) for driving the upper conveying members 222 (322, 422) are provided. The power transmission mechanism to the lower conveyance member 221 (321, 421) and the upper conveyance member 222 (322, 422) by the drive motor 230 (330, 430) is the same as in the first embodiment. The first transport unit 202 (second transport unit 302, third transport unit 402) is provided with position regulating pulleys 222d (322d, 422d). The position restriction pulley 222d (322d, 422d) corresponds to the position restriction pulley 22d of the first embodiment and has the same configuration.
　なお、第２実施形態のその他の構成は、上記第１実施形態と同様である。 In addition, the other structure of 2nd Embodiment is the same as that of the said 1st Embodiment.
（第２実施形態の効果）
　第２実施形態では、以下のような効果を得ることができる。 (Effect of 2nd Embodiment)
In the second embodiment, the following effects can be obtained.
　第２実施形態では、上記のように、基板搬送部１０２は、基板Ｐを待機させるための第１搬送部２０２および第３搬送部４０２と、基板Ｐ作業が行われる第２搬送部３０２と、を含んでいる。そして、第１搬送部２０２および第３搬送部４０２と第２搬送部３０２とは、それぞれ、下側搬送部材２２１（３２１、４２１）と上側搬送部材２２２（３２２、４２２）とを有する。そして、第１搬送部２０２および第３搬送部４０２と第２搬送部３０２とを、それぞれ、下側搬送部材２２１（３２１、４２１）と上側搬送部材２２２（３２２、４２２）との間に、水平面内で搬送方向と直交する方向の基板Ｐの両端部（ＰａおよびＰｂ）を上下方向に挟み込んだ状態で、基板Ｐを搬送するように構成する。これにより、基板搬送部１０２が複数の搬送部（第１搬送部２０２、第２搬送部３０２および第３搬送部４０２）に分割されている場合にも、搬送部の各々において、下側搬送部材２２１（３２１、４２１）と上側搬送部材２２２（３２２、４２２）との間に挟み込まれた状態で基板Ｐを搬送することができる。 In the second embodiment, as described above, the substrate transport unit 102 includes the first transport unit 202 and the third transport unit 402 for waiting the substrate P, the second transport unit 302 in which the substrate P work is performed, Is included. And the 1st conveyance part 202, the 3rd conveyance part 402, and the 2nd conveyance part 302 have the lower conveyance member 221 (321, 421) and the upper conveyance member 222 (322, 422), respectively. And the 1st conveyance part 202, the 3rd conveyance part 402, and the 2nd conveyance part 302 are made into a horizontal surface between the lower conveyance member 221 (321, 421) and the upper conveyance member 222 (322, 422), respectively. The substrate P is transported in a state where both end portions (Pa and Pb) of the substrate P in the direction perpendicular to the transport direction are vertically sandwiched. Thus, even when the substrate transport unit 102 is divided into a plurality of transport units (the first transport unit 202, the second transport unit 302, and the third transport unit 402), in each of the transport units, the lower transport member The substrate P can be transported while being sandwiched between 221 (321, 421) and the upper transport member 222 (322, 422).
　なお、第２実施形態のその他の効果は、上記第１実施形態と同様である。 The remaining effects of the second embodiment are similar to those of the aforementioned first embodiment.
［変形例］
　なお、今回開示された実施形態は、全ての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は、上記した実施形態の説明ではなく請求の範囲によって示され、さらに請求の範囲と均等の意味および範囲内での全ての変更（変形例）が含まれる。 [Modification]
In addition, it should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is shown not by the above description of the embodiment but by the scope of claims, and further includes all modifications (modifications) within the meaning and scope equivalent to the scope of claims.
　たとえば、上記第１および第２実施形態では、基板作業として部品実装作業を行う部品実装装置としての基板作業装置に本発明が適用された例を示したが、本発明はこれに限られない。たとえば、本発明は、基板作業としてはんだなどの接合材を基板に印刷する印刷作業を行う接合材印刷装置としての基板作業装置に適用されてもよい。また、本発明は、基板作業として基板の検査作業を行う検査装置に適用されてもよい。 For example, in the first and second embodiments, the example in which the present invention is applied to a substrate working apparatus as a component mounting apparatus that performs a component mounting work as a substrate work is shown, but the present invention is not limited to this. For example, the present invention may be applied to a substrate working apparatus as a bonding material printing apparatus that performs a printing operation for printing a bonding material such as solder on a substrate as the substrate work. Further, the present invention may be applied to an inspection apparatus that performs a substrate inspection operation as a substrate operation.
　また、上記第１および第２実施形態では、基板搬送装置が第１押付け部を有する例を示したが、本発明はこれに限られない。本発明では、下側搬送部材と上側搬送部材との間に基板を挟み込むことができれば、基板搬送装置が第１押付け部を有さなくてもよい。 In the first and second embodiments, the substrate transfer apparatus has the first pressing portion. However, the present invention is not limited to this. In the present invention, as long as the substrate can be sandwiched between the lower transport member and the upper transport member, the substrate transport device may not have the first pressing portion.
　また、上記第１および第２実施形態では、下側搬送部材を可動側搬送部材とし、上側搬送部材を固定側搬送部材とする例を示したが、本発明はこれに限られない。たとえば、上側搬送部材を可動側搬送部材とし、下側搬送部材を固定側搬送部材としてもよい。また、上側搬送部材および下側搬送部材の両方を、基板の搬入により、上下方向に可動するように構成してもよい。 In the first and second embodiments, an example has been described in which the lower conveying member is a movable conveying member and the upper conveying member is a fixed conveying member. However, the present invention is not limited to this. For example, the upper transport member may be a movable transport member and the lower transport member may be a fixed transport member. Moreover, you may comprise so that both an upper side conveyance member and a lower side conveyance member may move to an up-down direction by carrying in a board | substrate.
　また、上記第１および第２実施形態では、基板搬送部が、ベルト押付用部材を有する例を示したが、本発明はこれに限られない。本発明では、安定して基板を挟み込むことができれば、基板搬送部が、ベルト押付用部材を有さなくてもよい。 In the first and second embodiments, the substrate transport unit has the belt pressing member. However, the present invention is not limited to this. In the present invention, the substrate transport unit does not have to have the belt pressing member as long as the substrate can be stably sandwiched.
　また、上記第１および第２実施形態では、基板搬送部が、基板を固定するための第２押付け部を有する例を示したが、本発明はこれに限られない。たとえば、基板搬送部が、第２押付け部以外の基板固定機構を有していてもよい。 In the first and second embodiments, the substrate transport unit has the second pressing unit for fixing the substrate. However, the present invention is not limited to this. For example, the substrate transport unit may have a substrate fixing mechanism other than the second pressing unit.
　また、上記第１および第２実施形態では、下側搬送部材および上側搬送部材が、コンベアベルトである例を示したが、本発明はこれに限られない。たとえば、下側搬送部材および上側搬送部材のうちの少なくともいずれか一方が、摩擦力により基板を搬送するコンベアローラであってもよい。変形例では、図１３に示すように、上側搬送部材５２２は、摩擦力により基板Ｐを搬送するコンベアローラである。変形例では、コンベアローラである上側搬送部材５２２は、固定側搬送部材５２４として構成されている。これにより、コンベアベルトとしての下側搬送部材２１とコンベアローラとしての上側搬送部材５２２とにより、基板Ｐを容易に挟み込むことができる。 In the first and second embodiments, the lower conveyance member and the upper conveyance member are conveyor belts. However, the present invention is not limited to this. For example, at least one of the lower transport member and the upper transport member may be a conveyor roller that transports the substrate by frictional force. In the modification, as shown in FIG. 13, the upper transport member 522 is a conveyor roller that transports the substrate P by frictional force. In the modification, the upper conveyance member 522 that is a conveyor roller is configured as a fixed-side conveyance member 524. Thereby, the board | substrate P can be easily pinched | interposed with the lower side conveyance member 21 as a conveyor belt, and the upper side conveyance member 522 as a conveyor roller.
　また、上記第１および第２実施形態では、基板搬送部が、位置規制プーリを有する例を示したが、本発明はこれに限られない。本発明では、上側搬送部材が基板搬送部の上方を移動する可動部（基板作業部など）の移動を妨げなければ、基板搬送部が、位置規制プーリを有さなくてもよい。 In the first and second embodiments, the example in which the substrate transport unit has the position regulation pulley is shown, but the present invention is not limited to this. In the present invention, as long as the upper conveyance member does not hinder the movement of a movable part (such as a substrate working unit) that moves above the substrate conveyance unit, the substrate conveyance unit may not have the position regulating pulley.
　また、上記第１および第２実施形態では、下側搬送部材と上側搬送部材とが単一の駆動モータにより駆動される例を示したが、本発明はこれに限られない。たとえば、下側搬送部材と上側搬送部材とが、別個の駆動モータにより駆動されてもよい。 In the first and second embodiments, the lower transport member and the upper transport member are driven by a single drive motor. However, the present invention is not limited to this. For example, the lower conveyance member and the upper conveyance member may be driven by separate drive motors.
　また、上記第２実施形態では、基板搬送部が、３つの搬送部に分割されている例を示したが、本発明はこれに限られない。本発明では、基板搬送部が、３つ以外の複数の搬送部に分割されてもよい。 In the second embodiment, the substrate transfer unit is divided into three transfer units. However, the present invention is not limited to this. In the present invention, the substrate transfer unit may be divided into a plurality of transfer units other than three.
　２、１０２　基板搬送部
　２１、２２１、３２１、４２１　下側搬送部材
　２２、２２２、３２１、４２２、５２２　上側搬送部材
　２３、２２３、３２３、４２３　可動側搬送部材
　２４、２２４、３２４、４２４、５２４　固定側搬送部材
　２６　第１押付け部
　２７　ベルト押付用部材
　２９　第２押付け部
　１００、２００　基板作業装置
　２０２　第１搬送部（バッファ用搬送部）
　３０２　第２搬送部（基板作業用搬送部）
　４０２　第３搬送部（バッファ用搬送部）
　Ａ　基板作業位置
　Ｅ　部品
　Ｐ　基板 2,102 Substrate transport unit 21,221,321,421 Lower transport member 22,222,321,422,522 Upper transport member 23,223,323, 423 Movable transport member 24,224,324,424,524 Fixed Side conveying member 26 First pressing portion 27 Belt pressing member 29 Second pressing portion 100, 200 Substrate working device 202 First conveying portion (buffer conveying portion)
302 2nd conveyance part (conveyance part for substrate work)
402 3rd transport section (buffer transport section)
A Substrate work position E Component P Substrate

Claims (8)

  1. 　部品（Ｅ）が実装される基板（Ｐ）を搬送する基板搬送部（２、１０２）を備え、
    　前記基板搬送部は、
    　　摩擦力により前記基板を搬送する下側搬送部材（２１、２２１、３２１、４２１）と、
    　　前記下側搬送部材と上下方向に対向するように配置され、摩擦力により前記基板を搬送する上側搬送部材（２２、２２２、３２１、４２２、５２２）と、を有し、
    　　前記下側搬送部材と前記上側搬送部材との間に、水平面内で搬送方向と直交する方向の前記基板の両端部を上下方向に挟み込んだ状態で、前記基板を搬送するように構成されている、基板作業装置。     A board transfer section (2, 102) for transferring a board (P) on which a component (E) is mounted;
    The substrate transport unit is
    A lower conveying member (21, 221 321 421) for conveying the substrate by frictional force;
    An upper transport member (22, 222, 321, 422, 522) that is disposed so as to face the lower transport member in the vertical direction and transports the substrate by frictional force;
    The substrate is transported between the lower transport member and the upper transport member in a state in which both end portions of the substrate in a direction perpendicular to the transport direction are sandwiched in a vertical direction in a horizontal plane. , Substrate working equipment.
  2. 　前記下側搬送部材と前記上側搬送部材とのうちの少なくともいずれか一方は、前記下側搬送部材と前記上側搬送部材との間に前記基板が搬入されることにより、基板搬入前の状態から上下方向に移動する可動側搬送部材（２３、２２３、３２３、４２３）として構成されており、
    　前記基板搬送部は、前記可動側搬送部材としての前記下側搬送部材と前記上側搬送部材とのうちの一方を、前記下側搬送部材と前記上側搬送部材とのうちの他方に向かって上下方向に押し付ける第１押付け部（２６）をさらに有する、請求項１に記載の基板作業装置。     At least one of the lower transport member and the upper transport member is moved up and down from the state before the substrate is loaded by loading the substrate between the lower transport member and the upper transport member. It is configured as a movable transport member (23, 223, 323, 423) that moves in the direction,
    The substrate transport unit is configured so that one of the lower transport member and the upper transport member serving as the movable transport member is vertically directed toward the other of the lower transport member and the upper transport member. The board | substrate working apparatus of Claim 1 which further has a 1st pressing part (26) pressed on to.
  3. 　前記下側搬送部材と前記上側搬送部材とのうちのいずれか一方は、前記可動側搬送部材として構成されており、
    　前記下側搬送部材と前記上側搬送部材とのうちのいずれか他方は、前記基板の搬入の前後で、上下方向に移動しない固定側搬送部材（２４、２２４、３２４、４２４、５２４）として構成されており、
    　前記第１押付け部は、前記可動側搬送部材を、前記固定側搬送部材に向かって上下方向に押し付けるように構成されている、請求項２に記載の基板作業装置。     Either one of the lower conveying member and the upper conveying member is configured as the movable conveying member,
    The other of the lower transport member and the upper transport member is configured as a fixed transport member (24, 224, 324, 424, 524) that does not move in the vertical direction before and after the loading of the substrate. And
    The substrate working apparatus according to claim 2, wherein the first pressing unit is configured to press the movable transport member in a vertical direction toward the fixed transport member.
  4. 　前記可動側搬送部材は、コンベアベルトであり、
    　前記基板搬送部は、前記コンベアベルトと前記第１押付け部との間に配置され、前記コンベアベルトが延びる方向に沿って延びる板状のベルト押付用部材（２７）をさらに有し、
    　前記第１押付け部は、前記ベルト押付用部材を介して、前記可動側搬送部材としての前記コンベアベルトを、前記固定側搬送部材に向かって上下方向に押し付けるように構成されている、請求項３に記載の基板作業装置。     The movable conveying member is a conveyor belt,
    The substrate transport unit further includes a plate-shaped belt pressing member (27) disposed between the conveyor belt and the first pressing unit and extending along a direction in which the conveyor belt extends,
    The first pressing portion is configured to press the conveyor belt as the movable conveying member in the vertical direction toward the fixed conveying member via the belt pressing member. The board | substrate working apparatus as described in.
  5. 　前記基板搬送部は、前記第１押付け部よりも大きい押し付け力を有し、前記可動側搬送部材としての前記下側搬送部材と前記上側搬送部材とのうちの一方を、前記下側搬送部材と前記上側搬送部材とのうちの他方に向かって上下方向に押し付けることにより、前記基板を基板作業位置（Ａ）で固定するための第２押付け部（２９）をさらに有する、請求項２に記載の基板作業装置。 The substrate transport unit has a larger pressing force than the first pressing unit, and one of the lower transport member and the upper transport member as the movable transport member is replaced with the lower transport member. The second pressing portion (29) according to claim 2, further comprising a second pressing portion (29) for fixing the substrate at the substrate working position (A) by pressing in the vertical direction toward the other of the upper transport members. Substrate working device.
  6. 　前記下側搬送部材および前記上側搬送部材は、コンベアベルトである、請求項１～５のいずれか１項に記載の基板作業装置。 6. The substrate working apparatus according to claim 1, wherein the lower transport member and the upper transport member are conveyor belts.
  7. 　前記下側搬送部材は、コンベアベルトであり、
    　前記上側搬送部材は、コンベアローラである、請求項１～５のいずれか１項に記載の基板作業装置。     The lower conveying member is a conveyor belt;
    6. The substrate working apparatus according to claim 1, wherein the upper conveying member is a conveyor roller.
  8. 　前記基板搬送部は、前記基板を待機させるためのバッファ用搬送部（２０２、４０２）と、基板作業が行われる基板作業用搬送部（３０２）と、を含み、
    　前記バッファ用搬送部と前記基板作業用搬送部とは、それぞれ、前記下側搬送部材と前記上側搬送部材とを有し、
    　前記バッファ用搬送部と前記基板作業用搬送部とは、それぞれ、前記下側搬送部材と前記上側搬送部材との間に、水平面内で前記搬送方向と直交する方向の前記基板の両端部を上下方向に挟み込んだ状態で、前記基板を搬送するように構成されている、請求項１～５のいずれか１項に記載の基板作業装置。     The substrate transport unit includes a buffer transport unit (202, 402) for making the substrate stand by, and a substrate work transport unit (302) in which substrate work is performed,
    The buffer transport section and the substrate working transport section have the lower transport member and the upper transport member, respectively.
    The buffer transfer unit and the substrate work transfer unit move the upper and lower ends of the substrate in a direction perpendicular to the transfer direction in a horizontal plane between the lower transfer member and the upper transfer member, respectively. 6. The substrate working apparatus according to claim 1, wherein the substrate working apparatus is configured to transport the substrate while being sandwiched in a direction.
PCT/JP2016/083823 2016-11-15 2016-11-15 Substrate work device WO2018092191A1 (en)

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