WO2018059061A1

WO2018059061A1 - Micro-ring modulator, ultra-wideband modulator and modulation system

Info

Publication number: WO2018059061A1
Application number: PCT/CN2017/092287
Authority: WO
Inventors: 李明; 涂鑫; 贺继方
Original assignee: 华为技术有限公司
Priority date: 2016-09-28
Filing date: 2017-07-07
Publication date: 2018-04-05
Also published as: CN107870455A

Abstract

A micro-ring modulator, an ultra-wideband modulator and a modulation system, relating to the field of communications. The micro-ring modulator comprises: a substrate layer (201) and a waveguide layer (202) located above the substrate layer (201), the substrate layer (201) being used for supporting the waveguide layer (202); the waveguide layer (202) comprising micro-ring modulating array (2021) and a first waveguide (2022) and a second waveguide (2023) located on two sides of the micro-ring modulating array (2021), wherein the first waveguide (2022) and the second waveguide (2023) are arranged symmetrically; the micro-ring modulating array (2021) comprises at least two modulating units (20211) located in the same plane, each of the modulating units (20211) corresponds to one resonant wavelength, different modulating units (20211) correspond to different resonant wavelengths, the distance between any one modulating unit (20211) and the first waveguide (2022) is equal to the distance between the modulating unit (20211) and the second waveguide (2023), and any one modulating unit (20211) is used for modulating an optical signal of resonant wavelength resonance corresponding to the modulating unit (20211); and the first waveguide (2022) is used for inputting the optical signal, and the second waveguide (2023) is used for outputting the optical signal modulated by each of the modulating units (20211) and outputting unmodulated optical signals.

Description

一种微环调制器、超宽带调制器以及调制***Micro-ring modulator, ultra-wideband modulator and modulation system

本申请要求于2016年09月28日提交中国专利局、申请号为201610858457.5、发明名称为“一种微环调制器、超宽带调制器以及调制***”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。This application claims priority to Chinese Patent Application No. 201610858457.5, entitled "A Micro-Circuit Modulator, Ultra-Wideband Modulator, and Modulation System", filed on September 28, 2016, the entire contents of which is hereby incorporated by reference. This is incorporated herein by reference.

技术领域Technical field

本发明实施例涉及通信领域，尤其涉及一种微环调制器、超宽带调制器以及调制***。Embodiments of the present invention relate to the field of communications, and in particular, to a micro-ring modulator, an ultra-wideband modulator, and a modulation system.

背景技术Background technique

硅基光调制器是硅光技术应用的最优前景，硅基光调制器是利用材料折射率的变化，对传输光的相位和波长进行调制的光导波器件，由于硅基光调制器中采用硅材料，而硅材料中的物理效应包含载流子色散效应，载流子色散效应指的是载流子的注入或抽取导致的半导体中自由载流子浓度的变化引起折射率的变化，因此硅基光调制器可以利用载流子色散效应，调节复折射率(又称光纳，吸收性介质最主要的光学常数)的虚部和实部来达到将电信号加载到光信号上的目的。Silicon-based light modulators are the best prospects for silicon-based optical modulators, which are optical waveguide devices that modulate the phase and wavelength of transmitted light by utilizing changes in the refractive index of the material, as used in silicon-based light modulators. a silicon material, and the physical effect in the silicon material includes a carrier dispersion effect, and the carrier dispersion effect refers to a change in the concentration of the free carrier in the semiconductor caused by the injection or extraction of the carrier, thereby causing a change in the refractive index, The silicon-based light modulator can use the carrier dispersion effect to adjust the imaginary part and the real part of the complex refractive index (also known as gamma, the most important optical constant of the absorptive medium) to achieve the purpose of loading the electrical signal onto the optical signal. .

在波分***中，需要对不同波长的光信号加载每个波长的光信号对应的调制信号，这就需要多波长的调制器。虽然通常的调制器有一定的波长相关性，但是这样的波长相关性和波分***中所需要的100G，200G带宽间隔比是远远不够的，因此，当包含多个波长的光束进入调制器之前需要对光信号的波长进行区分。In a wavelength division system, it is necessary to load a modulated signal corresponding to an optical signal of each wavelength for an optical signal of a different wavelength, which requires a multi-wavelength modulator. Although the usual modulators have a certain wavelength dependence, such wavelength dependence and the 100G, 200G bandwidth spacing ratio required in the wavelength division system are not enough, so when a beam containing multiple wavelengths enters the modulator It is necessary to distinguish the wavelength of the optical signal before.

微环具有很好的波长选择性，因此可以在调制器中增加微环，这样使得基于微环的调制器同时具有选择波长和调制的功能。现有技术中，如图1a所示的微环调制器，包括波导以及微环调制阵列，微环调制阵列包括至少一个微环，微环调制器中的微环一方面可以充当调制元件，另一方面同时充当了色散元件的作用，每个微环对应一个谐振波长，通过控制微环中波导的折射率从而控制与这些波长谐振与否，便可以在宽谱的光源上加载所需的调制信号，在调制过程中，光信号传播至耦合波导，当光信号的波长和微环对应的谐振波长谐振，光信号进入微环，并被微环调制，调制后的光信号通过波导传播出去，当光信号的波长和微环不谐振时，光信号直接通过波导的传播出去，因此，只有和微环共振的波长才可以被调制，这样使得能够与微环谐振的波长被微环损耗掉，同时，可以通过改变加载在微环上的电压，使微环的谐振波长发生移动，从而进行调制，如图1b所示。Microrings have good wavelength selectivity, so microrings can be added to the modulator, which allows the microring-based modulator to have both wavelength selection and modulation. In the prior art, the micro-ring modulator shown in FIG. 1a includes a waveguide and a micro-ring modulation array, and the micro-ring modulation array includes at least one micro-ring, and the micro-ring in the micro-ring modulator can act as a modulation component on one hand, and On the one hand, it acts as a dispersive element at the same time. Each micro-ring corresponds to a resonant wavelength. By controlling the refractive index of the waveguide in the micro-ring to control the resonance with these wavelengths, the required modulation can be loaded on the broad-spectrum light source. Signal, in the modulation process, the optical signal propagates to the coupled waveguide. When the wavelength of the optical signal resonates with the resonant wavelength corresponding to the microring, the optical signal enters the microring and is modulated by the microring, and the modulated optical signal propagates through the waveguide. When the wavelength of the optical signal and the microring do not resonate, the optical signal propagates directly through the waveguide. Therefore, only the wavelength that resonates with the microring can be modulated, so that the wavelength that can resonate with the microring is lost by the microring. At the same time, the resonance wavelength of the microring can be shifted by changing the voltage applied to the microring, thereby performing modulation, as shown in Fig. 1b.

但是，微环的耦合深度和两个因素有关：1、波导和微环之间的耦合强度；2、微环自身的损耗，且只有当这两个量匹配的时候微环达到最深的耦合，因此调制器也能够达到最深的调制深度。微环对其自身的耦合间隙非常敏感，耦合间隙大的时候，微环和波导之间的耦合强度很弱，耦合间隙小的时候微环和波导之间的耦合强度很强，耦合间隙在变化时会导致微环自身的损耗和波导和微环之间的耦合强度不匹配，因此会影响微环的耦合深度，且在实际制作当中，由于工艺误差的存在使得微环的耦合间隙很难精确控制，目前工艺上通常采用193或248nm紫外光刻工艺，这样的微环耦合间隙已经逼近了加工的极限，导致在工艺上比较困难，从而影响了微环的调制深度，同时，在调制过程中，需要精确控制耦合波导和微环之间的间距，以调节耦合强度和微环损耗的关系。However, the coupling depth of the microring is related to two factors: 1. the coupling strength between the waveguide and the microring; 2. the loss of the microring itself, and the microring reaches the deepest coupling only when the two quantities match. Therefore the modulator can also reach the deepest modulation depth. The microring is very sensitive to its own coupling gap. When the coupling gap is large, the coupling strength between the microring and the waveguide is weak. When the coupling gap is small, the coupling between the microring and the waveguide is strong. The degree is very strong, and the coupling gap will cause the loss of the microring itself and the coupling strength between the waveguide and the microring to be mismatched, thus affecting the coupling depth of the microring, and in actual production, due to the existence of process error The coupling gap of the microring is difficult to control accurately. At present, the 193 or 248 nm UV lithography process is usually used in the process. Such a microring coupling gap has approached the processing limit, which makes the process difficult, which affects the modulation of the microring. Depth, at the same time, in the modulation process, it is necessary to precisely control the spacing between the coupled waveguide and the microring to adjust the relationship between the coupling strength and the microring loss.

发明内容Summary of the invention

本发明的实施例提供一种微环调制器、超宽带调制器以及调制***，用以提供一种能够满足所需要调制深度的调制器。Embodiments of the present invention provide a microring modulator, an ultra-wideband modulator, and a modulation system to provide a modulator capable of meeting a desired modulation depth.

为达到上述目的，本发明的实施例采用如下技术方案：In order to achieve the above object, embodiments of the present invention adopt the following technical solutions:

第一方面，本发明实施例提供一种微环调制器，包括：衬底层、位于衬底层上方的波导层；该衬底层，用于支撑波导层；该波导层包括微环调制阵列以及位于所述微环调制阵列两侧的第一波导和第二波导，其中，第一波导和所述第二波导对称设置；该微环调制阵列包括位于同一个平面的至少两个调制单元，每个调制单元对应一个谐振波长，不同的调制单元对应不同的谐振波长，每个调制单元与第一波导和第二波导之间均存在间距，同一个调制单元与第一波导之间的间距和该调制单元与第二波导之间的间距相等；任一所述调制单元，用于调制与该调制单元对应的波长谐振的光信号的强度；第一波导用于输入光信号，第二波导用于输出经过每个调制单元调制后的光信号。In a first aspect, an embodiment of the present invention provides a microring modulator, including: a substrate layer, a waveguide layer above the substrate layer; the substrate layer for supporting the waveguide layer; the waveguide layer includes a micro-ring modulation array and a location a first waveguide and a second waveguide on both sides of the micro-ring modulation array, wherein the first waveguide and the second waveguide are symmetrically disposed; the micro-ring modulation array includes at least two modulation units located in the same plane, each modulation The unit corresponds to a resonant wavelength, different modulation units correspond to different resonant wavelengths, and each modulation unit has a spacing between the first waveguide and the second waveguide, a spacing between the same modulation unit and the first waveguide, and the modulation unit Equal to the spacing between the second waveguides; any of the modulation units for modulating the intensity of the optical signal resonating with the wavelength corresponding to the modulation unit; the first waveguide for inputting the optical signal and the second waveguide for outputting the output The modulated optical signal of each modulation unit.

本发明实施例提供一种微环调制器，包括：衬底层、位于衬底层上方的波导层；该衬底层，用于支撑波导层；波导层包括微环调制阵列以及位于微环调制阵列两侧的第一波导和第二波导，其中，第一波导和第二波导对称设置，微环调制阵列包括位于同一个平面的至少两个调制单元，每个调制单元对应一个谐振波长，不同的调制单元对应不同的谐振波长，这样可以通过本发明实施例提供的微环调制器来调节多波长的光，由于第一波导和第二波导对称设置，且同一个调制单元与第一波导之间的间距和该调制单元与第二波导之间的间距相等，使得从第一波导耦合进入每个调制单元，调制单元为与其谐振波长一致的光加载调制信号，当光加载了调制信号之后，可以对称地从第二波导耦合出来，由于第一波导和第二波导对称设置，从每个调制单元出来出来多少已调制的光，该已调制的光便会通过第二波导耦合出来，使得耦合强度和损耗关系更容易匹配，同时也使得调制器中任意一个调制单元与第一波导的间距和第二波导之间的间距在制作工艺容忍度上得到改善，更容易获得好的调制深度，因此，本发明实施例提供的微环调制的耦合深度达到最深。Embodiments of the present invention provide a microring modulator including: a substrate layer, a waveguide layer above the substrate layer; the substrate layer for supporting the waveguide layer; the waveguide layer includes a microring modulation array and are located on both sides of the microring modulation array a first waveguide and a second waveguide, wherein the first waveguide and the second waveguide are symmetrically disposed, and the micro-ring modulation array comprises at least two modulation units located in the same plane, each modulation unit corresponding to one resonant wavelength, different modulation units Corresponding to different resonant wavelengths, the multi-wavelength light can be adjusted by the micro-ring modulator provided by the embodiment of the invention, because the first waveguide and the second waveguide are symmetrically arranged, and the spacing between the same modulation unit and the first waveguide And the spacing between the modulating unit and the second waveguide is equal such that the first waveguide is coupled into each modulating unit, and the modulating unit is a light-loaded modulating signal that is coincident with its resonant wavelength, and after the light is loaded with the modulating signal, it can be symmetrically Coupling from the second waveguide, since the first waveguide and the second waveguide are symmetrically arranged, more out of each modulation unit The modulated light, the modulated light is coupled through the second waveguide, making the coupling strength and loss relationship easier to match, and also making the spacing of any one of the modulators from the first waveguide and the second waveguide The spacing between the two is improved in the manufacturing process tolerance, and a good modulation depth is more easily obtained. Therefore, the coupling depth of the micro-ring modulation provided by the embodiment of the present invention reaches the deepest.

结合第一方面，在第一方面的第一种可能的实现方式中，第一波导和第二波导具有第一端口，该第一端口用于输入/输出光信号，该第一波导的第一端口和第二波导的第一端口相对设置；微环调制器还包括偏振分束单元，该偏振分束单元与第一波导和第二波导的第一端口相连，用于将传播至偏振分束单元的第一光束分解为具有第一偏振状态的光和具有第二偏振状态的光，以及将第一偏振状态的光从第一波导的第一端口输入至第一波导，将第二偏振状态的光从第二波导的第一端口输入至第二波导，其中，第一光束包括两个偏振状态的光分量。由于偏振分束单元可以将第一光束分解为两个偏振状态的光分量，因此当用本发明实施例提供的微环调制器时可以实现双偏振调制。In conjunction with the first aspect, in a first possible implementation of the first aspect, the first waveguide and the second waveguide have a first port for inputting/outputting an optical signal, the first of the first waveguide The port is opposite to the first port of the second waveguide; the microring modulator further includes a polarization splitting unit coupled to the first port of the first waveguide and the second waveguide for propagation to the polarization beam splitting The first beam of the unit is decomposed into light having a first polarization state and light having a second polarization state, and inputting light of the first polarization state from the first port of the first waveguide to the first waveguide, the second polarization state Light from the first port of the second waveguide To a second waveguide, wherein the first beam comprises light components of two polarization states. Since the polarization splitting unit can decompose the first beam into light components of two polarization states, dual polarization modulation can be achieved when using the microring modulator provided by the embodiment of the present invention.

结合第一方面的第一种可能的实现方式，在第一方面的第二种可能的实现方式中，该偏振分束单元还用于接收经第一波导的第一端口输出的已经调制的第二偏振状态的光；以及接收经所述第二波导的第一端口输出的；以及将所述已经调制的第二偏振状态的光和所述已经调制的第一偏振状态的光合成第一光束。In conjunction with the first possible implementation of the first aspect, in a second possible implementation of the first aspect, the polarization splitting unit is further configured to receive the modulated first output of the first port of the first waveguide Light of a second polarization state; and receiving light output through the first port of the second waveguide; and combining the light of the modulated second polarization state and the light of the modulated first polarization state into a first light beam.

结合第一方面或第一方面的第一种可能的实现方式，在第一方面的第三种可能的实现方式中，上述调制单元包括微环，该微环具有PIN调制结构，由于微环具有多波长选择性，当调制单元包括微环时可以使得微环调制器也具有波长选择性。In combination with the first aspect or the first possible implementation manner of the first aspect, in a third possible implementation manner of the first aspect, the modulating unit includes a micro ring, and the micro ring has a PIN modulation structure, and the micro ring has Multi-wavelength selectivity allows the microring modulator to also have wavelength selectivity when the modulation unit includes a microring.

结合第一方面的第三种可能的实现方式，在第一方面的第四种可能的实现方式中，每个微环由两个或两个以上的微环级联而成。In conjunction with the third possible implementation of the first aspect, in a fourth possible implementation of the first aspect, each microring is formed by cascading two or more microrings.

结合第一方面的第三种可能的实现方式或第一方面的第四种可能的实现方式，在第一方面的第五种可能的实现方式中，在每个微环上设置有稳频单元，用于调节每个微环对应的谐振波长。这样可以对可能存在的漂移的谐振波长进行稳频用于降低调制器对环境、制作工艺的敏感性。In conjunction with the third possible implementation of the first aspect or the fourth possible implementation of the first aspect, in a fifth possible implementation of the first aspect, a frequency stabilization unit is disposed on each microring Used to adjust the resonant wavelength corresponding to each microring. This stabilizes the resonant wavelength of the drift that may be present to reduce the sensitivity of the modulator to the environment and manufacturing process.

结合第一方面的第五种可能的实现方式，在第一方面的第六种可能的实现方式中，稳频单元包括导线和加热电阻丝；其中，该加热电阻丝位于稳频单元对应的微环的一侧，该导线与加热电阻丝电连接，该加热电阻丝，用于通过热传导方式控制微环温度，以调节微环的谐振波长。With reference to the fifth possible implementation manner of the first aspect, in a sixth possible implementation manner of the first aspect, the frequency stabilization unit includes a wire and a heating resistance wire; wherein the heating resistance wire is located in the micro frequency corresponding to the frequency stabilization unit On one side of the ring, the wire is electrically connected to a heating resistor wire for controlling the temperature of the microring by thermal conduction to adjust the resonant wavelength of the microring.

结合第一方面至第一方面的第六种可能的实现方式中任意一种可能的实现方式，在第一方面的第七种可能的实现方式中，上述微环调制阵列中的至少两个调制单元采用一字型排布方式。With reference to any one of the possible implementations of the first aspect to the sixth possible implementation of the first aspect, in a seventh possible implementation of the first aspect, the at least two modulations in the micro ring modulation array The unit is arranged in a single line.

结合第一方面至第一方面的第五种可能的实现方式中任意一种可能的实现方式，在第一方面的第八种可能的实现方式中，第一波导和第二波导均包括第一水平部，第二水平部以及垂直部；其中，第一水平部和第二水平部平行设置，垂直部与第一水平部和第二水平部的末端连接，且与第一水平部和第二水平部垂直；其中，第一波导的第一水平部和第二波导的第一水平部相对设置，第一波导的垂直部和第二波导的垂直部相对设置，第一波导的第二水平部和第二波导的第二水平部相对设置；第一波导的第一水平部和第二波导的第一水平部之间用于设置呈一字型排列的至少一个调制单元；第一波导的第二水平部和第二波导的第二水平部之间用于设置呈一字型排列的至少一个调制单元。With reference to the first aspect to any one of the possible implementations of the fifth possible implementation of the first aspect, in the eighth possible implementation of the first aspect, the first waveguide and the second waveguide each include the first a horizontal portion, a second horizontal portion, and a vertical portion; wherein the first horizontal portion and the second horizontal portion are disposed in parallel, the vertical portion is connected to the ends of the first horizontal portion and the second horizontal portion, and the first horizontal portion and the second portion The horizontal portion is vertical; wherein the first horizontal portion of the first waveguide and the first horizontal portion of the second waveguide are oppositely disposed, the vertical portion of the first waveguide and the vertical portion of the second waveguide are oppositely disposed, and the second horizontal portion of the first waveguide Arranging opposite to the second horizontal portion of the second waveguide; between the first horizontal portion of the first waveguide and the first horizontal portion of the second waveguide for arranging at least one modulation unit arranged in a line; the first waveguide Between the two horizontal portions and the second horizontal portion of the second waveguide, at least one modulation unit arranged in a line is arranged.

结合第一方面的第一种可能的实现方式至第一方面的第八种可能的实现方式中任意一种可能的实现方式，在第一方面的第九种可能的实现方式中，上述第一波导和所述第二波导还具有第二端口，该第一波导的第二端口和第二波导的第二端口相对设置；在第一波导和第二波导的第二端口处分别设置有吸收器，该吸收器用于吸收未被调制的光信号。With reference to the first possible implementation of the first aspect, to any one of the possible implementations of the eighth possible implementation of the first aspect, in the ninth possible implementation manner of the first aspect, The waveguide and the second waveguide further have a second port, the second port of the first waveguide and the second port of the second waveguide are oppositely disposed; and the absorber is respectively disposed at the second port of the first waveguide and the second waveguide The absorber is for absorbing unmodulated optical signals.

第二方面，本发明实施例提供一种超宽带调制器，包括光环形器、设置在光环形器后方的色散元件以及设置在该色散元件后方的调制器阵列；该调制器阵列包括至少两个并联的如第一方面的第一种可能的实现方式至第一方面的第九种可能的实现方式中任意一种可能的实现方式所描述的微环调制器；其中，光环形器，用于接收输入光，以及将输入光传播至色散元件；该色散元件，用于将输入光分为不同波长的光信号，以及将不同波长的光信号传播至调制器阵列；一个微环调制器，用于对输入该微环调制器中的光信号进行调制。In a second aspect, an embodiment of the present invention provides an ultra-wideband modulator including an optical circulator, a dispersive element disposed behind the optical circulator, and a modulator array disposed behind the dispersive element; the modulator array includes a micro-ring modulator as described in any one of the possible implementations of the ninth possible implementation of the first aspect, in which the optical circulator is For receiving input light and propagating input light to a dispersive element; the dispersive element for splitting the input light into optical signals of different wavelengths, and propagating optical signals of different wavelengths to the modulator array; one microring modulation And for modulating an optical signal input to the microring modulator.

第三方面，本发明实施例提供一种调制***，包括：服务器机架、第一方面至第一方面的第七种可能的实现方式中任意一项所描述的微环调制器以及光环形器；该服务器机架包括至少一个服务器，该光环形器，用于接收光信号以及将光信号传导至微环调制器；该微环调制器，与至少一个服务器中的每个所述服务器相连，用于接收每个服务器输出的调制信号；以及将每个服务器输出的调制信号加载在输入微环调制器的光信号上，获取加载后的光信号，以及将所述加载后的光信号通过所述光环形器传递至接收机。In a third aspect, an embodiment of the present invention provides a modulation system, including: a server chassis, the micro-ring modulator and the optical circulator described in any one of the first aspect to the seventh possible implementation manner of the first aspect The server rack includes at least one server for receiving an optical signal and conducting the optical signal to the microring modulator; the microring modulator being coupled to each of the at least one server a modulation signal for receiving each server output; and loading a modulation signal output by each server on the optical signal of the input microring modulator, acquiring the loaded optical signal, and passing the loaded optical signal The optical circulator is passed to the receiver.

附图说明DRAWINGS

为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below. Obviously, the drawings in the following description are only It is a certain embodiment of the present invention, and other drawings can be obtained from those skilled in the art without any creative work.

图1a为现有技术中提供的微环调制器的结构示意图；1a is a schematic structural diagram of a microring modulator provided in the prior art;

图1b为现有技术中提供的微环调制器的调制原理图；1b is a modulation schematic diagram of a microring modulator provided in the prior art;

图2为本发明实施例提供的微环调制器的结构示意图一；2 is a schematic structural diagram 1 of a microring modulator according to an embodiment of the present invention;

图3为本发明实施例提供的微环调制器的结构示意图二；3 is a schematic structural diagram 2 of a microring modulator according to an embodiment of the present invention;

图4为本发明实施例提供的微环调制器中微环的结构示意图；4 is a schematic structural diagram of a microring in a microring modulator according to an embodiment of the present invention;

图5为本发明实施例中微环调制器的调制原理图；FIG. 5 is a schematic diagram of modulation of a microring modulator according to an embodiment of the present invention; FIG.

图6为本发明实施例提供的微环调制器的结构示意图三；FIG. 6 is a schematic structural diagram 3 of a microring modulator according to an embodiment of the present disclosure;

图7为图6提供的微环调制器的调制原理图；Figure 7 is a modulation schematic diagram of the microring modulator provided in Figure 6;

图8为本发明实施例提供的微环调制器的结构示意图四；FIG. 8 is a schematic structural diagram 4 of a micro-ring modulator according to an embodiment of the present disclosure;

图9为本发明实施例提供的微环调制器的结构示意图五；FIG. 9 is a schematic structural diagram 5 of a micro-ring modulator according to an embodiment of the present disclosure;

图10为本发明实施例提供的微环调制器的结构示意图六；FIG. 10 is a schematic structural diagram 6 of a microring modulator according to an embodiment of the present disclosure;

图11为本发明实施例提供的微环调制器的结构示意图七；11 is a schematic structural diagram 7 of a microring modulator according to an embodiment of the present invention;

图12为本发明实施例提供的一种超宽带调制器的结构示意图；FIG. 12 is a schematic structural diagram of an ultra-wideband modulator according to an embodiment of the present invention;

图13为本发明实施例提供的一种调制***的结构示意图。FIG. 13 is a schematic structural diagram of a modulation system according to an embodiment of the present invention.

具体实施方式detailed description

下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, but not all embodiments.

如图2所示，本发明实施例提供一种微环调制器，包括：衬底层201、位于衬底层201上方的波导层202；衬底层201，用于支撑波导层202；波导层202包括微环调制阵列2021以及位于微环调制阵列2021两侧的第一波导2022和第二波导2023，其中，第一波导2022和第二波导2023对称设置；微环调制阵列2021包括位于同一个平面的至少两个调制单元20211，每个调制单元20211对应一个谐振波长，不同的调制单元20211对应不同的谐振波长，每个调制单元20211与第一波导2022和第二波导2023之间均存在间距，同一个调制单元与第一波导2022之间的间距和该调制单元与第二波导2023之间的间距相等；任意一个调制单元20211，用于调制与该调制单元20211对应的谐振波长谐振的光信号的强度；第一波导2022用于输入光信号，第二波导2023用于输出经过每个调制单元20211调制后的光信号。As shown in FIG. 2, an embodiment of the present invention provides a micro-ring modulator, including: a substrate layer 201, a waveguide layer 202 above the substrate layer 201; a substrate layer 201 for supporting the waveguide layer 202; and the waveguide layer 202 includes The micro-ring modulation array 2021 and the first waveguide 2022 and the second waveguide 2023 located on both sides of the micro-ring modulation array 2021, wherein the first waveguide 2022 and the second waveguide 2023 are symmetrically disposed; the micro-ring modulation array 2021 includes the same plane At least two modulation units 20211, each modulation unit 20211 corresponds to one resonance wavelength, different modulation units 20211 correspond to different resonance wavelengths, and each modulation unit 20211 has a spacing between the first waveguide 2022 and the second waveguide 2023. a spacing between a modulation unit and the first waveguide 2022 and a spacing between the modulation unit and the second waveguide 2023; any one of the modulation units 20211 for modulating the optical signal of the resonant wavelength resonance corresponding to the modulation unit 20211 The first waveguide 2022 is for inputting an optical signal, and the second waveguide 2023 is for outputting an optical signal modulated by each modulation unit 20211.

本发明实施例提供一种微环调制器，包括：衬底层、位于衬底层上方的波导层；该衬底层，用于支撑波导层；波导层包括微环调制阵列以及位于微环调制阵列两侧的第一波导和第二波导，其中，第一波导和第二波导对称设置，微环调制阵列包括位于同一个平面的至少两个调制单元，每个调制单元对应一个谐振波长，不同的调制单元对应不同的谐振波长，这样可以通过本发明实施例提供的微环调制器来调节多波长的光，由于第一波导和第二波导对称设置，且同一个调制单元与第一波导之间的间距和该调制单元与第二波导之间的间距相等，使得从第一波导耦合进入每个调制单元，调制单元为与其谐振波长一致的光加载调制信号，当光加载了调制信号之后，可以对称地从第二波导耦合出来，由于第一波导和第二波导对称设置，从每个调制单元出来多少已调制的光，该已调制的光便会通过第二波导耦合出来，使得耦合强度和损耗关系更容易匹配，同时也使得调制器中任意一个调制单元与第一波导的间距和第二波导之间的间距在制作工艺容忍度上得到改善，更容易获得好的调制深度，因此，本发明实施例提供的微环调制的耦合深度达到最深。其中，本发明实施例中的间距相等是指一个调制单元与第一波导之间的间距和该调制单元与第二波导之间的间距误差在-20％～和+20％之间，示例的，该间距相等可以指一个调制单元与第一波导之间的间距和该调制单元与第二波导之间的间距误差在-10％～和+10％之间.Embodiments of the present invention provide a microring modulator including: a substrate layer, a waveguide layer above the substrate layer; the substrate layer for supporting the waveguide layer; the waveguide layer includes a microring modulation array and are located on both sides of the microring modulation array a first waveguide and a second waveguide, wherein the first waveguide and the second waveguide are symmetrically disposed, and the micro-ring modulation array comprises at least two modulation units located in the same plane, each modulation unit corresponding to one resonant wavelength, different modulation units Corresponding to different resonant wavelengths, the multi-wavelength light can be adjusted by the micro-ring modulator provided by the embodiment of the invention, because the first waveguide and the second waveguide are symmetrically arranged, and the spacing between the same modulation unit and the first waveguide And the spacing between the modulating unit and the second waveguide is equal such that the first waveguide is coupled into each modulating unit, and the modulating unit is a light-loaded modulating signal that is coincident with its resonant wavelength, and after the light is loaded with the modulating signal, it can be symmetrically Coupling from the second waveguide, since the first waveguide and the second waveguide are symmetrically arranged, how many have elapsed from each modulation unit The modulated light, the modulated light is coupled through the second waveguide, making the coupling strength and loss relationship easier to match, while also causing the spacing between any one of the modulators and the first waveguide and the second waveguide The pitch of the manufacturing process is improved, and a good modulation depth is more easily obtained. Therefore, the coupling depth of the micro-ring modulation provided by the embodiment of the present invention reaches the deepest. The equal spacing in the embodiment of the present invention means that the spacing between a modulation unit and the first waveguide and the spacing error between the modulation unit and the second waveguide are between -20% and +20%, for example. The equal spacing may refer to a spacing between a modulation unit and the first waveguide and a spacing error between the modulation unit and the second waveguide between -10% and +10%.

其中，本发明实施例中第一波导2022和第二波导2023的宽度0.3-2微米(um)。The width of the first waveguide 2022 and the second waveguide 2023 in the embodiment of the present invention is 0.3-2 micrometers (um).

本发明实施例中的每个调制单元与第一波导之间的间距为10～500nm；每个调制单元与第二波导之间的间距为10～500nm，但是，同一个调制单元距离第一波导之间的间距和第二波导之间的间距相等，例如，第一调制单元距离第一波导的间距为150nm，那么该第一调制单元距离第二波导的间距为150nm。The spacing between each modulation unit and the first waveguide in the embodiment of the present invention is 10 to 500 nm; the spacing between each modulation unit and the second waveguide is 10 to 500 nm, but the same modulation unit is away from the first waveguide. The spacing between the spacing and the spacing between the second waveguides is equal. For example, the spacing of the first modulation unit from the first waveguide is 150 nm, then the spacing of the first modulation unit from the second waveguide is 150 nm.

本发明实施例中微环调制阵列中的不同调制单元距离第一波导和第二波导之间的间距可以相等，也可以不相等。可以理解的，本发明实施例中微环调制阵列中每个调制单元与第一波导之间的间距均相等；也可以是本发明实施例中微环调制阵列中每个调制单元与第一波导之间的间距均不相等；或者是，微环调制阵列中的一部分调制单元中的每个调制单元与第一波导之间的间距均相等，另一部分调制单元中的每个调制单元与第一波导之间的间距均相等。由于每个调制单元与第二波导之间的间距均相等，因此，也可以理解为：微环调制阵列中每个调制单元与第二波导之间的间距均相等；或者，也可以是本发明实施例中微环调制阵列中每个调制单元与第二波导之间的间距均不相等；或者是，微环调制阵列中的一部分调制单元中的每个调制单元与第二波导之间的间距均相等，另一部分调制单元中的每个调制单元与第二波导之间的间距均相等。In the embodiment of the present invention, different modulation units in the micro-ring modulation array may have equal or different distances from the first waveguide and the second waveguide. It can be understood that, in the embodiment of the present invention, the spacing between each modulation unit and the first waveguide in the micro-ring modulation array is equal; or each modulation unit and the first waveguide in the micro-ring modulation array in the embodiment of the present invention. The spacing between the two is not equal; or, the spacing between each of the modulation units in the micro-ring modulation array and the first waveguide is equal, and each of the other modulation units is first The spacing between the waveguides is equal. Since the spacing between each modulation unit and the second waveguide is equal, it can also be understood that the spacing between each modulation unit and the second waveguide in the micro-ring modulation array is equal; or, the invention can also be Embodiment of each modulation unit in a microring modulation array The spacing between the second waveguide and the second waveguide is equal; or the spacing between each of the modulation units and the second waveguide in the micro-ring modulation array is equal, and each modulation in the other portion of the modulation unit The spacing between the cell and the second waveguide is equal.

可以理解的是，本发明实施例中第一波导和第二波导包括多个波导段，一个调制单元分别于第一波导的一个波导段和第二波导的一个波导段对应，示例性的，如图3所示，第一波导2022包括第一波导段202201、第二波导段202202和第三波导段202203；第二波导包括第一波导段202301、第二波导段202302和第三波导段202303；其中，第一波导2022的第一波导段202201和第二波导2023的第一波导段202301关于其分别对应的第一调制单元20211a对称；第一波导2022的第二波导段202202和第二波导2023的第二波导段202302关于第二调制单元20211b对称；第一波导2022的第一波导段202201和第二波导2023的第一波导段202301关于第三调制单元20211c对称；第一调制单元20211a距离第一波导2022的第一波导段202201之间的间距为100nm；第二调制单元20211b距离第一波导2022的第一波导段202201之间的间距为150nm；第三调制单元20211c距离第一波导2022的第一波导段202201之间的间距为100nm。It can be understood that, in the embodiment of the present invention, the first waveguide and the second waveguide comprise a plurality of waveguide segments, and one modulation unit respectively corresponds to one waveguide segment of the first waveguide and one waveguide segment of the second waveguide, as exemplified by As shown in FIG. 3, the first waveguide 2022 includes a first waveguide segment 202201, a second waveguide segment 202202, and a third waveguide segment 202203; the second waveguide includes a first waveguide segment 202301, a second waveguide segment 202302, and a third waveguide segment 202303; The first waveguide segment 202201 of the first waveguide 2022 and the first waveguide segment 202301 of the second waveguide 2023 are symmetric about their respective first modulation units 20211a; the second waveguide segment 202202 and the second waveguide 2023 of the first waveguide 2022. The second waveguide segment 202302 is symmetric about the second modulation unit 20211b; the first waveguide segment 202201 of the first waveguide 2022 and the first waveguide segment 202301 of the second waveguide 2023 are symmetric about the third modulation unit 20211c; the first modulation unit 20211a is distanced The spacing between the first waveguide segments 202201 of a waveguide 2022 is 100 nm; the spacing between the second modulation unit 20211b and the first waveguide segment 202201 of the first waveguide 2022 is 150 nm; System unit 20211c distance interval between a first waveguide sections 202,201 of the first waveguide 2022 is 100nm.

需要说明的是，本发明实施例中从第一波导中进入调制单元的光能量与从第二波导中出来的光能量相等，示例性的，假设波长为λ₁的光与第一调制单元的谐振波长一致，该波长为λ₁的光的能量为γ；由于波长为λ₁的光进入第一波导之后并非所有的光会进入第一调制单元被调制，有一部分光将沿着第一波导传播出去，假设沿着第一波导传播出去的光的能量为γ₁；进入第一调制单元的光的能量为γ₂，其中，γ＝γ₁+γ₂，那么在进入第一调制单元的波长为λ₁的光被调制之后，会从第一调制单元中出来能量为γ₂的已调制的光，该能量为γ₂的已调制的光光则全部进入第二波导，并通过第二波导传播出去，因此，本发明实施例中通过第二波导传播出去的光均为已调制的光。这样可以提高微环调制器的耦合深度。It should be noted that, in the embodiment of the present invention, the light energy entering the modulation unit from the first waveguide is equal to the energy of the light coming out of the second waveguide. Illustratively, the light having the wavelength λ ₁ and the first modulation unit are exemplified. The resonant wavelength is uniform, and the energy of the light having the wavelength λ ₁ is γ; since the light having the wavelength λ ₁ enters the first waveguide, not all of the light enters the first modulation unit to be modulated, and a part of the light will follow the first waveguide. Propagating, assuming that the energy of the light propagating along the first waveguide is γ ₁ ; the energy of the light entering the first modulating unit is γ ₂ , where γ = γ ₁ + γ ₂ , then entering the first modulating unit after the modulated light is a wavelength λ _1, from the first modulation unit will be in the energy of the modulated light γ _2, γ is the energy of the modulated bare ₂ is all entered the second waveguide, and the second The waveguide propagates out, and therefore, the light propagating through the second waveguide in the embodiment of the present invention is modulated light. This can increase the coupling depth of the microring modulator.

可选的，本发明实施例中微环调制阵列中每相邻两个调制单元间隔设置，该间隔为大于1um。这样设置可以防止相邻两个调制单元之间的调制信号或者光信号串扰。该微环调制阵列中每两个相邻的调制单元之间的间隔可以相等也可以不相等。示例性的，如图3所示，第一调制单元20211a和第二调制单元20211b之间的间隔可以为2um，第二调制单元20211b和第三调制单元20211c之间的间隔可以为3um。Optionally, in the embodiment of the present invention, each adjacent two modulation units in the micro-ring modulation array are spaced apart, and the interval is greater than 1 um. This arrangement prevents crosstalk between modulated signals or optical signals between adjacent two modulation units. The spacing between every two adjacent modulation units in the micro-ring modulation array may or may not be equal. Exemplarily, as shown in FIG. 3, the interval between the first modulating unit 20211a and the second modulating unit 20211b may be 2 um, and the interval between the second modulating unit 20211b and the third modulating unit 20211c may be 3 um.

本发明实施例中的衬底层采用厚度为0.2-0.4um的SOI芯层，具体的，该SOI芯层包括芯层(Si，硅片))和位于芯层上方的覆层(SiO₂，二氧化硅层)，由于Si和SiO₂存在巨大的折射率差，因此采用SOI芯层作为衬底层可以降低基光学器件的损耗以及尺寸。当然该衬底层还可以采用其他材料，本发明实施例对此不进行限定，具体可以根据需要进行设置。具体的该衬底层一方面用于支撑波导层，另一方面，还可以用于对波导层中的调制单元以及第一波导和第二波导形成包覆，形成光学模式，同时与外部灰尘、湿气隔离。如图2所示，本发明实施例中的每个调制单元还包括与电源连接的电光调制部分20212，该电光调制部分20212的具体作用为：通过控制注入与每个电光调制部分20212对应的调制单元的电流的大小，调节微环中波导的有效折射率，从而改变微环的谐振波长，以为相应的调制单元提供谐振波长。The substrate layer in the embodiment of the present invention adopts a SOI core layer having a thickness of 0.2-0.4 um. Specifically, the SOI core layer includes a core layer (Si, silicon wafer) and a cladding layer (SiO ₂ , two above the core layer). Silicon oxide layer), since Si and SiO ₂ have a large refractive index difference, the use of the SOI core layer as the substrate layer can reduce the loss and size of the base optical device. Of course, the substrate layer can also be made of other materials, which is not limited in the embodiment of the present invention, and can be specifically set as needed. Specifically, the substrate layer is used to support the waveguide layer on the one hand, and can also be used to form a cladding unit in the waveguide layer and the first waveguide and the second waveguide to form an optical mode while being externally dusty and wet. Gas isolation. As shown in FIG. 2, each modulation unit in the embodiment of the present invention further includes an electro-optic modulation portion 20212 connected to a power source, and the specific function of the electro-optic modulation portion 20212 is to control the modulation corresponding to each electro-optic modulation portion 20212 by controlling injection. The magnitude of the current of the cell, which adjusts the effective refractive index of the waveguide in the microring, thereby changing the resonant wavelength of the microring to provide a resonant wavelength for the corresponding modulation unit.

示例性的，该电光调制部分20212包括与PIN节结构的P掺杂区域连接的第一导线，以及与PIN节结构的N掺杂区域连接的第二导线，其中，该第一导线和第二导线通过电源相连，具体的，可以通过调节注入PIN节结构的电流的大小以改变微环的谐振波长。Illustratively, the electro-optic modulation portion 20212 includes a first wire connected to the P-doped region of the PIN node structure, and a second wire connected to the N-doped region of the PIN node structure, wherein the first wire and the second wire The wires are connected by a power source. Specifically, the resonant wavelength of the microrings can be changed by adjusting the magnitude of the current injected into the PIN node structure.

可选的，如图4所示，本发明实施例中的任意一个调制单元的截面呈脊波导状，这样，其中，脊波导中平板部分的厚度为0.09-0.16微米。Optionally, as shown in FIG. 4, a section of any one of the modulation units in the embodiment of the present invention has a ridge waveguide shape, wherein the thickness of the flat portion in the ridge waveguide is 0.09-0.16 micrometers.

具体的，本发明实施例中的调制单元20211采用微环，这样由于微环具有很好的波长选择性，因此，可以增加本发明实施例提供的调制器的波长选择性。Specifically, the modulating unit 20211 in the embodiment of the present invention adopts a microring, so that the wavelength selectivity of the modulator provided by the embodiment of the present invention can be increased because the microring has good wavelength selectivity.

如图4所示，每个微环的两侧分别为P掺杂区域和N掺杂区域，其中P掺杂区域和N掺杂区域用于形成PIN节结构，在PIN节结构中注入电流后可以利用载流子效应对微环进行调制，当然，还可以改变加载在每个微环上的电压，以改变微环的谐振波长。As shown in FIG. 4, the two sides of each microring are respectively a P-doped region and an N-doped region, wherein the P-doped region and the N-doped region are used to form a PIN node structure, and a current is injected in the PIN node structure. The microrings can be modulated by the carrier effect. Of course, the voltage applied to each microring can also be changed to change the resonant wavelength of the microring.

可选的，本发明实施例中的任意一个微环可以采用一个微环形成满足所需要调制波长的微环，当然，任意一个微环也可以通过至少两个或两个以上的微环通过级联的方式形成满足所需要调制波长的微环，本发明实施例对此不进行限定。Optionally, any one of the micro-rings in the embodiment of the present invention may use a micro-ring to form a micro-ring that satisfies a required modulation wavelength. Of course, any one of the micro-rings may pass through at least two or more micro-rings. The method of forming a micro-ring that satisfies the required modulation wavelength is not limited in this embodiment of the present invention.

本发明实施例提供的微环调制阵列中，任意一个微环的宽度为0.3-2微米，且每个微环的半径大于3微米，每个微环对应一个谐振波长，不同的微环对应不同的谐振波长，这样就可以通过本发明实施例提供的调制器来实现对多波长的调制。In the micro-ring modulation array provided by the embodiment of the present invention, the width of any one of the micro-rings is 0.3-2 micrometers, and the radius of each micro-ring is greater than 3 micrometers, and each micro-ring corresponds to one resonant wavelength, and different micro-rings are different. The resonant wavelength is such that modulation of multiple wavelengths can be achieved by the modulator provided by embodiments of the present invention.

可选的，微环调制阵列包括至少两个微环，微环调制阵列中每相邻两个微环之间存在间隔，该间隔大于1um，这样做可以避免两个微环之间的信号串扰。Optionally, the micro-ring modulation array includes at least two micro-rings, and there is a gap between each adjacent two micro-rings in the micro-ring modulation array, and the interval is greater than 1 um, so as to avoid signal crosstalk between the two micro-rings. .

为了介绍如图2所示的微环调制器的工作原理，本发明实施例现以第一光源和第二光源为例进行说明，其中，第一光源和第二光源具有不同的波长，如图5所示，当第一光源B(图5中所示的空心箭头)和第二光源A(图5中所示的实心箭头)进入本发明实施例提供的微环调制器时，首先，第一光源B和第二光源A进入第一波导2022中，若第一光源B对应的波长与第一调制单元20211对应的谐振波长谐振，第二光源A对应的波长与第二调制单元20212谐振，则第一光源B传播至第一调制单元20211处时，第一光源B被耦合入第一调制单元20211中，同时第一调制单元20211对该第一光源B加载调制信号，例如，该调制信号为1101110，被加载了调制信号1101110的第一光源B从第二波导2023中被耦合出来(如图5中所示的虚线波浪线B’)，由于第二光源的波长与第一调制单元20211的谐振波长不一致，因此当第二光源通过第一波导2022经过第一调制单元20211时，第二光源A与第一调制单元20211不谐振，因此，第二光源A继续沿着第一波导2022传播，直至传播与第二光源A对应的波长谐振的第二调制单元20212处，由于第二光源A与第二调制单元20212的谐振波长谐振，因此，第二光源A被耦合至第二调制单元20212中，在第二调制单元20212中加载调制信号，例如，1101111，被加载了调制信号的第二光源A从第二波导中耦合出来，如图5中所示的实线波浪线A’。In order to introduce the working principle of the micro-ring modulator as shown in FIG. 2, the embodiment of the present invention is described by taking a first light source and a second light source as examples, wherein the first light source and the second light source have different wavelengths, as shown in the figure. As shown in FIG. 5, when the first light source B (the hollow arrow shown in FIG. 5) and the second light source A (the solid arrow shown in FIG. 5) enter the micro-ring modulator provided by the embodiment of the present invention, first, A light source B and a second light source A enter the first waveguide 2022. If the wavelength corresponding to the first light source B resonates with the resonant wavelength corresponding to the first modulating unit 20211, the wavelength corresponding to the second light source A resonates with the second modulating unit 20212. Then, when the first light source B propagates to the first modulation unit 20211, the first light source B is coupled into the first modulation unit 20211, while the first modulation unit 20211 loads the modulation signal to the first light source B, for example, the modulation signal. Is 1101110, the first light source B to which the modulation signal 1101110 is loaded is coupled out from the second waveguide 2023 (such as the dotted wavy line B' shown in FIG. 5), due to the wavelength of the second light source and the first modulation unit 20211 The resonance wavelength is inconsistent because When the second light source passes through the first modulation unit 20211 through the first waveguide 2022, the second light source A does not resonate with the first modulation unit 20211, and therefore, the second light source A continues to propagate along the first waveguide 2022 until propagation and second At the second modulation unit 2012 of the wavelength resonance corresponding to the light source A, since the second light source A and the resonance wavelength of the second modulation unit 20212 resonate, the second light source A is coupled into the second modulation unit 20212, in the second modulation A modulation signal is loaded in unit 20212, for example, 1101111, and a second source A loaded with the modulated signal is coupled out of the second waveguide, such as the solid wavy line A' shown in FIG.

另一方面，由于现有技术中，本发明实施例提供的微环调制器中第一波导2022 和第二波导2023分别具有第一端口，第一端口用于输入/输出光信号，第一波导2022的第一端口和第二波导2023的第一端口相对设置。On the other hand, the first waveguide 2022 in the micro-ring modulator provided by the embodiment of the present invention is available in the prior art. And the second waveguide 2023 respectively has a first port for inputting/outputting an optical signal, and the first port of the first waveguide 2022 and the first port of the second waveguide 2023 are oppositely disposed.

由于在实际使用过程中，耦合波导中有TE(Transverse electric，横电波)，TM(Transverse magnetic横磁波)两种模式，因此在微环中有不同的耦合强度和谐振波长，正是因为不同偏振在微环中的耦合强度和谐振波长都不一样，所以无法对两个偏振同时调制(一般调制波长带宽只有1nm附近，而不同偏振谐振波长差别能达到数个nm，所以原则上只能对一个偏振进行调制。因此为了对存在双偏振的光信号进行调制，如图6所示，本发明实施例提供的微环调制器还包括偏振分束单元2024，该偏振分束单元2024与第一波导2022和第二波导2023的第一端口相连，用于将传播至该偏振分束单元2024的第一光束分解为具有第一偏振状态的光和具有第二偏振状态的光，以及将该第一偏振状态的光从第一波导2022的第一端口输入至第一波导2022中，将第二偏振状态的光从第二波导2023的第一端口输入至第二波导2023，其中，第一光束包括两个偏振状态的光分量。具体的，如图6所示的调制器的结构可以称为双偏振调制器。Since in the actual use process, there are two modes of TE (Transverse Electric) and TM (Transverse Magnetic) in the coupled waveguide, so there are different coupling strengths and resonant wavelengths in the microring, precisely because of different polarizations. The coupling strength and the resonant wavelength in the microring are different, so it is impossible to simultaneously modulate the two polarizations (the general modulation wavelength bandwidth is only around 1 nm, and the difference between different polarization resonance wavelengths can reach several nm, so in principle only one Polarization is modulated. Therefore, in order to modulate the optical signal having dual polarization, as shown in FIG. 6, the microring modulator provided by the embodiment of the present invention further includes a polarization splitting unit 2024, the polarization splitting unit 2024 and the first waveguide. 2022 is coupled to the first port of the second waveguide 2023 for decomposing the first light beam propagating to the polarization splitting unit 2024 into light having a first polarization state and light having a second polarization state, and the first The light of the polarization state is input from the first port of the first waveguide 2022 into the first waveguide 2022, and the light of the second polarization state is transmitted from the first port of the second waveguide 2023. 2023 to the second waveguide, wherein the light beam comprises a first component of the two polarization states. Specifically, the structure shown in FIG. 6 modulators may be referred to as a dual polarization modulator.

本发明实施例中的偏振分束单元2024可以位于波导层202之内，也可以位于波导层202外。The polarization splitting unit 2024 in the embodiment of the present invention may be located inside the waveguide layer 202 or outside the waveguide layer 202.

可选的，本发明实施例提供的偏振分束单元2024还用于接收经所述第一波导2022的第一端口输出的已经调制的第二偏振状态的光；以及接收经第二波导2023的第一端口输出的已经调制的第一偏振状态的光；以及将已经调制的第二偏振状态的光和所述已经调制的第一偏振状态的光合成第一光束。Optionally, the polarization splitting unit 2024 provided by the embodiment of the present invention is further configured to receive the modulated second polarization state of the light outputted through the first port of the first waveguide 2022; and receive the second waveguide 2023. The first port outputs the modulated light of the first polarization state; and combines the light of the second polarization state that has been modulated with the light of the first polarization state that has been modulated into the first beam.

示例性的，本发明实施例中的偏振分束单元2024采用偏振分离光栅耦合器。本发明实施例对偏振分束单元2024的具体结构不进行限定，只要偏振分束单元能够将包括两个偏振状态的光分量的光束分解为具有第一偏振状态的光和具有第二偏振状态的光即可。Illustratively, the polarization splitting unit 2024 in the embodiment of the present invention employs a polarization separation grating coupler. The specific structure of the polarization splitting unit 2024 is not limited in the embodiment of the present invention, as long as the polarization splitting unit can decompose the light beam including the light components of the two polarization states into light having the first polarization state and having the second polarization state. Just light.

当然，结合图6，如图7所示，本发明实施例提供的微环调制器还可以在偏振分束单元2024之前设置光环形器203，在光环形器203之前设置有输入光纤204，其中，输入光纤204用于将第一光束传播至光环形器203，该光环形器203具有三个端口，分别为第一输入端口，第二输入端口以及第一输出端口，其中，第一输入端口用于接收输入光纤204传播的第一光束，第二输入端口用于将该第一光束传播至偏振分束单元2024，偏振分束单元2024用于将第一光束分解为具有第一偏振状态的光和具有第二偏振状态的光，即图7中所示的X偏振状态光分量和Y偏振状态光分量。Of course, in conjunction with FIG. 6, as shown in FIG. 7, the micro-ring modulator provided by the embodiment of the present invention may further be provided with an optical circulator 203 before the polarization splitting unit 2024, and an input optical fiber 204 is disposed before the optical circulator 203, wherein The input optical fiber 204 is configured to propagate the first light beam to the optical circulator 203, the optical circulator 203 has three ports, respectively a first input port, a second input port and a first output port, wherein the first input port a first beam for receiving the propagation of the input fiber 204, a second input port for propagating the first beam to the polarization splitting unit 2024, and a polarization splitting unit 2024 for decomposing the first beam into a first polarization state Light and light having a second polarization state, that is, an X-polarized state light component and a Y-polarized state light component shown in FIG.

具体的，如图7所示的微环调制器的调制原理为：示例性的，本发明实施例中的第一光束包括X偏振状态的光分量以及Y偏振状态的光分量，具体的，第一光束通过输入光纤204传播至光环形器203的第一输入端口，然后通过光环形器203的第二输入端口传播至偏振分束单元2024，偏振分束单元2024将第一光束分解为X偏振状态的光分量以及Y偏振状态的光分量，如图7所示，Y偏振状态的光分量向下传播至第二波导2023的第一端口，通过第二波导2023的第一端口在第二波导2023中传播(即图7中所示的位于第二波导下方且箭头向右的光信号)，直至传播至与该第一光束的波长谐振的第三微环20213处，被第三微环20213耦合，在第三微环20213中逆时针传播(即逆时针传播的为Y偏振状态的光分量)并加载调制信号，然后到从第一波导2022处被耦合出来(即图7中所示的位于第一波导上方且箭头向左的光信号)，同时，X偏振状态的光分量向上传播至第一波导2022的第一端口，通过第一波导2022的一端在第一波导2022中传播(即图7中所示的位于第一波导下方且箭头向右的光信号)，直至传播至与该第一光束的波长谐振的第三微环20213处，被第三微环20213耦合，在第三微环20213中顺时针传播并加载调制信号，然后到从第二波导2023处被耦合出来(即图7中所示的位于第二波导上方且箭头向左的光信号)，从第一波导2022耦合出的已加载调制信号的Y偏振状态的光分量和从第二波导2023耦合出的已加载调制信号的X偏振状态的光分量被传播至偏振分束单元2024中，由于光路可逆，已加载调制信号的X偏振状态的光分量和已加载调制信号的Y偏振状态的光分量在偏振分束单元2024中合为第一光束，并通过光环形器203的第一输出端口传播出去，由此，便可以通过本发明实施例提供的微环调制器实现与偏振无关的多波长调制。Specifically, the modulation principle of the micro-ring modulator shown in FIG. 7 is: exemplarily, the first light beam in the embodiment of the present invention includes a light component of an X-polarized state and a light component of a Y-polarized state, specifically, A beam of light propagates through the input fiber 204 to the first input port of the optical circulator 203, and then propagates through the second input port of the optical circulator 203 to the polarization splitting unit 2024, which splits the first beam into X-polarization. The light component of the state and the light component of the Y polarization state, as shown in FIG. 7, the light component of the Y polarization state propagates downward to the first port of the second waveguide 2023, and the first port of the second waveguide 2023 passes through the second waveguide Propagation in 2023 (ie, the light signal located below the second waveguide and pointing to the right as shown in Figure 7) until transmission The third microring 20213, which is broadcast to the wavelength of the first beam, is coupled by the third microring 20213 and propagates counterclockwise in the third microring 20213 (ie, the light component of the Y polarization state that propagates counterclockwise). And loading the modulated signal, and then being coupled out from the first waveguide 2022 (ie, the optical signal located above the first waveguide and pointing to the left as shown in FIG. 7), while the light component of the X-polarized state propagates upward to the A first port of a waveguide 2022 propagates through the first waveguide 2022 through one end of the first waveguide 2022 (ie, the optical signal located below the first waveguide and arrowed to the right as shown in FIG. 7) until it propagates to the first The third microring 20213 of the wavelength resonance of a beam is coupled by a third microring 20213, propagates clockwise in the third microring 20213 and loads the modulated signal, and then is coupled out from the second waveguide 2023 (ie, The light signal located above the second waveguide and arrowed to the left shown in 7), the light component of the Y-polarized state of the loaded modulated signal coupled from the first waveguide 2022, and the loaded modulation coupled from the second waveguide 2023 The light component of the X-polarized state of the signal is transmitted Broadcast to the polarization splitting unit 2024, since the optical path is reversible, the light component of the X-polarized state of the loaded modulated signal and the light component of the Y-polarized state of the loaded modulated signal are combined into a first beam in the polarization splitting unit 2024, and The first output port of the optical circulator 203 is propagated out, whereby the polarization-independent multi-wavelength modulation can be realized by the micro-ring modulator provided by the embodiment of the present invention.

可选的，本发明实施例的微环调制阵列中的第一波导2022和第二波导2023之间设置的微环调制阵列中的至少两个调制单元采用一字型排布方式，如图5、图6以及图7所示的结构，也即该微环调制阵列中的所有调制单元呈“一”字排列，每相邻两个调制单元之间存在间隔，且每个调制单元距离第一波导的间距和该调制单元距离第二波导的间距相等。Optionally, at least two modulation units in the micro-ring modulation array disposed between the first waveguide 2022 and the second waveguide 2023 in the micro-ring modulation array of the embodiment of the present invention adopt a one-word arrangement manner, as shown in FIG. 5 . The structure shown in FIG. 6 and FIG. 7 , that is, all the modulation units in the micro-ring modulation array are arranged in a “one” word, and there is a gap between each adjacent two modulation units, and each modulation unit is spaced apart from the first The pitch of the waveguide is equal to the pitch of the modulation unit from the second waveguide.

当然，为了减小微环调制器的体积，本发明实施例中的第一波导2022和第二波导2023均包括第一水平部，第二水平部以及垂直部；其中，第一水平部和第二水平部平行设置，垂直部与第一水平部和第二水平部的末端连接，且与第一水平部和所述第二水平部垂直；其中，第一波导的第一水平部和第二波导2023的第一水平部相对设置，第一波导2022的垂直部和第二波导2023的垂直部相对设置，第一波导2022的第二水平部和第二波导2023的第二水平部相对设置；第一波导的第一水平部和第二波导的第一水平部之间用于设置呈一字型排列的至少一个调制单元；第一波导的第二水平部和第二波导的第二水平部之间用于设置呈一字型排列的至少一个调制单元。Of course, in order to reduce the volume of the micro-ring modulator, the first waveguide 2022 and the second waveguide 2023 in the embodiment of the present invention each include a first horizontal portion, a second horizontal portion, and a vertical portion; wherein, the first horizontal portion and the first portion The two horizontal portions are disposed in parallel, the vertical portion is connected to the ends of the first horizontal portion and the second horizontal portion, and is perpendicular to the first horizontal portion and the second horizontal portion; wherein the first horizontal portion and the second portion of the first waveguide The first horizontal portion of the waveguide 2023 is oppositely disposed, the vertical portion of the first waveguide 2022 and the vertical portion of the second waveguide 2023 are oppositely disposed, and the second horizontal portion of the first waveguide 2022 and the second horizontal portion of the second waveguide 2023 are oppositely disposed; Between the first horizontal portion of the first waveguide and the first horizontal portion of the second waveguide for arranging at least one modulation unit arranged in a line; the second horizontal portion of the first waveguide and the second horizontal portion of the second waveguide Between the setting of at least one modulation unit arranged in a line.

示例性的，如图8所示，本发明实施例在第一波导的第一水平部和第二波导的第一水平部之间放置有三个间隔设置的微环，在第一波导的第二水平部和第二波导的第二水平部之间放置有三个间隔设置的微环。其中，任一一个调制单元距离第一波导第一水平部的距离和该调制单元距离第二波导第一水平部的距离相等，任一一个调制单元距离第一波导第二水平部的距离和该调制单元距离第二波导第二水平部的距离相等。Exemplarily, as shown in FIG. 8, the embodiment of the present invention places three spaced microrings between the first horizontal portion of the first waveguide and the first horizontal portion of the second waveguide, and the second in the first waveguide. Three spaced microrings are placed between the horizontal portion and the second horizontal portion of the second waveguide. Wherein the distance of any one of the modulation units from the first horizontal portion of the first waveguide and the distance from the modulation unit to the first horizontal portion of the second waveguide are equal to the distance of any one of the modulation units from the second horizontal portion of the first waveguide And the distance of the modulation unit from the second horizontal portion of the second waveguide is equal.

其中，本发明实施例中的第一波导2022、第二波导2023的第一水平部、第二水平部和垂直部均由一个波导弯折形成，也即将该第一波导和第二波导弯折，使的弯折后的第一波导2022和第二波2023导形成

形状，即包含第一水平部和第二水平部以及与第一水平部和第二水平部垂直的垂直部，或者，弯折后的第一波导和第二波导形成

形状，即包含第一垂直部和第二垂直部以及与所述第一垂直部和第二垂直部垂直的水平部。The first horizontal portion, the second horizontal portion, and the vertical portion of the first waveguide 2022 and the second waveguide 2023 in the embodiment of the present invention are each formed by bending a waveguide, that is, bending the first waveguide and the second waveguide. , the bent first waveguide 2022 and the second wave 2023 are formed

a shape including a first horizontal portion and a second horizontal portion and a vertical portion perpendicular to the first horizontal portion and the second horizontal portion, or the first waveguide and the second waveguide formed after the bending

The shape includes a first vertical portion and a second vertical portion and a horizontal portion perpendicular to the first vertical portion and the second vertical portion.

需要说明的是，本发明实施例中也可以在图8所示的结构中在第一波导和第二波导的垂直部设置至少一个间隔设置的调制单元，该任意一个调制单元距离第一波导垂直部之间的距离和该调制单元距离第二波导垂直部之间的距离相等。It should be noted that, in the embodiment of the present invention, at least one spaced modulation unit may be disposed in the vertical portion of the first waveguide and the second waveguide in the structure shown in FIG. 8, and the arbitrary one modulation unit is perpendicular to the first waveguide. The distance between the portions is equal to the distance between the modulation unit and the vertical portion of the second waveguide.

其中，当微环调制阵列中包括至少两个或两个以上的调制单元时，本发明实施例中以包括第一水平部、第二水平部以及与第一水平部和第二水平部垂直的垂直部为例的排列方式为例进行说明，其中一部分调制单元间隔分布于第一波导和第二波导的第一水平部之间，另一部分调制单元间隔分布于第一波导和第二波导的第二水平部，其中，第一水平部中第一波导与一个调制单元之间的间距和第二波导与该调制单元之间的间距相等，但是位于第一水平部中两个或两个以上的调制单元分别距离第一波导的间距可以相等也可以不相等。Wherein, when at least two or more modulation units are included in the micro-ring modulation array, the embodiment of the present invention includes a first horizontal portion, a second horizontal portion, and a vertical portion that is perpendicular to the first horizontal portion and the second horizontal portion. An example in which the vertical portion is exemplified is an example in which a part of the modulation units are spaced apart between the first horizontal portion of the first waveguide and the second waveguide, and another portion of the modulation unit is spaced apart from the first waveguide and the second waveguide. a second horizontal portion, wherein a spacing between the first waveguide and the one modulation unit in the first horizontal portion and a spacing between the second waveguide and the modulation unit are equal, but two or more of the first horizontal portions are located The spacing of the modulation units from the first waveguide may or may not be equal.

需要说明的是，位于第二水平部中的间隔设置有至少一个调制单元，且位于第二水平部中的每相邻两个调制单元之间的间隔与位于第一水平部中的每相邻两个调制单元之间的间隔可以相等也可以不相等，同时，第二水平部中第一波导和任意一个调制单元之间的间距与该调制单元与第二波导之间的间距相等。第一水平部中的任意一个调制单元与第一水平部的第一波导之间的间距和第二水平部中的任意一个调制单元与第二水平部的第一波导之间的间距可以相等，也可以不相等。It should be noted that the interval located in the second horizontal portion is provided with at least one modulation unit, and the interval between each adjacent two modulation units located in the second horizontal portion is adjacent to each of the first horizontal portions. The spacing between the two modulation units may or may not be equal, while the spacing between the first waveguide and any one of the modulation units in the second horizontal portion is equal to the spacing between the modulation unit and the second waveguide. The spacing between any one of the first horizontal portions and the first waveguide of the first horizontal portion and the spacing between any one of the second horizontal portions and the first waveguide of the second horizontal portion may be equal, It can also be unequal.

如图9所示，本发明实施例中的任意一个微环可以采用多个微环级联而成，如图9所示，在图9所示的结构中，任意一个微环为三个微环级联的形式，这样做可以一方面增加调制带宽，另一方面可以优化不同通道的串扰，增强多波长(偏振无关)调制器的性能。As shown in FIG. 9, any one of the micro-rings in the embodiment of the present invention may be formed by cascading a plurality of micro-rings. As shown in FIG. 9, in the structure shown in FIG. 9, any one of the micro-rings is three micro-rings. In the form of a ring cascade, this can increase the modulation bandwidth on the one hand and optimize the crosstalk of different channels on the other hand to enhance the performance of a multi-wavelength (polarization-independent) modulator.

在调制过程中，由于温度的影响可能存在某些微环的谐振波长存在漂移，因此，为了对可能存在漂移的谐振波长进行稳频，以降低调制器对环境、制作工艺的敏感性，如图10所示，本发明实施例中在每个微环上设置有热光稳频部分，该热光稳频部分一方面可以利用热光效应(是指材料折射率随温度变化的现象，与前面提到的载流子色散效应一致)来调节微环的谐振波长，另一方面，用于在对光信号调制前，用于将可能存在的漂移的谐振波长进行稳频用于降低调制器对环境、制作工艺的敏感性。During the modulation process, there may be drifts in the resonant wavelength of some microrings due to the influence of temperature. Therefore, in order to stabilize the resonant wavelength that may drift, the sensitivity of the modulator to the environment and the manufacturing process is reduced, as shown in FIG. As shown in the embodiment of the present invention, a thermo-optic frequency stabilizing portion is disposed on each microring, and the thermo-optic stabilizing portion can utilize a thermo-optic effect on the one hand (refers to a phenomenon that a refractive index of a material changes with temperature, and The carrier dispersion effect is consistent) to adjust the resonant wavelength of the microring, and on the other hand, to stabilize the resonant wavelength of the possible drift for reducing the modulator to the environment before modulating the optical signal , the sensitivity of the production process.

本发明实施例在每个微环上设置有稳频单元，用于调节每个微环对应的谐振波长。In the embodiment of the present invention, a frequency stabilization unit is disposed on each micro ring for adjusting a resonance wavelength corresponding to each micro ring.

示例性的，如图10所示，该稳频单元包括导线和加热电阻丝，其中，加热电阻丝位于稳频单元对应的微环的一侧，导线与加热电阻丝电连接，导线与电源连接，该导线用于通过导线加热电阻丝，该加热电阻丝，用于通过热传导方式控制微环温度，以调节微环的谐振波长。Exemplarily, as shown in FIG. 10, the frequency stabilization unit comprises a wire and a heating resistance wire, wherein the heating resistance wire is located on one side of the micro ring corresponding to the frequency stabilization unit, the wire is electrically connected to the heating resistance wire, and the wire is connected to the power source. The wire is used to heat the resistance wire through the wire, and the heating resistance wire is used to control the temperature of the micro ring by thermal conduction to adjust the resonance wavelength of the micro ring.

如图11所示，本发明实施例中的第一波导2022和第二波导2023还具有第二端口，其中，第一波导2022的第二端口为远离第一波导2022的第一端口的一端，第二波导2023的第二端口为远离第一波导2022的第一端口的一端，第一波导2022 的第二端口和第二波导2023的第二端口相对设置；在第一波导2022和第二波导2023的第二端口分别设置有吸收器205，吸收器205用于吸收未被调制的光信号。As shown in FIG. 11, the first waveguide 2022 and the second waveguide 2023 in the embodiment of the present invention further have a second port, wherein the second port of the first waveguide 2022 is one end away from the first port of the first waveguide 2022. The second port of the second waveguide 2023 is one end away from the first port of the first waveguide 2022, and the first waveguide 2022 The second port is opposite to the second port of the second waveguide 2023; the second port of the first waveguide 2022 and the second waveguide 2023 are respectively provided with an absorber 205 for absorbing unmodulated optical signals.

由于一束光信号中可能会存在多种波长的光分量，光分量的波长与调制器中微环的谐振波长一致的光分量将进入微环中，并被微环调制，而光分量的波长在调制器中没有找到相应的用于调制其的微环时，该光分量将沿着第一波导输出，因此在第一波导和第二波导的第二端口设置吸收器用于吸收未被调制的光能量。Since there may be multiple wavelengths of light components in a beam of light, the wavelength of the component of the light that coincides with the resonant wavelength of the microring in the modulator will enter the microring and be modulated by the microring, and the wavelength of the component. When no corresponding micro-ring for modulating it is found in the modulator, the light component will be output along the first waveguide, so that an absorber is provided at the second port of the first waveguide and the second waveguide for absorbing unmodulated Light energy.

由于在实际工作中，多波长微环调制器的工作波长范围很难做到覆盖几百纳米，例如从1300～1700波长，因此，可以采用如图12所示的超宽带调制器，该超宽带调制器包括光环形器901、设置在该光环形器901后方的色散元件902以及设置在色散元件902后方的调制器阵列903；Since in practice, the operating wavelength range of the multi-wavelength microring modulator is difficult to cover a few hundred nanometers, for example, from 1300 to 1700 wavelengths, an ultra-wideband modulator as shown in FIG. 12 can be used. The modulator includes a light circulator 901, a dispersing element 902 disposed behind the optical circulator 901, and a modulator array 903 disposed behind the dispersing element 902;

该调制器阵列包括至少两个并联的如上述所描述的微环调制器9031；The modulator array includes at least two parallel micro-ring modulators 9031 as described above;

其中，光环形器901，用于接收输入光，以及将输入光传播至色散元件902；Wherein, the optical circulator 901 is configured to receive input light and to propagate the input light to the dispersive element 902;

色散元件902，用于将输入光分为不同波长的光信号，以及将不同波长的光信号传播至调制器阵列903；a dispersive element 902, configured to split the input light into optical signals of different wavelengths, and to propagate optical signals of different wavelengths to the modulator array 903;

一个微环调制器，用于对输入该微环调制器中的光信号进行调制。A microring modulator for modulating an optical signal input to the microring modulator.

示例性的，色散元件902采用AWG(Arrayed Waveguide Grating，阵列波导光栅)。Exemplarily, the dispersive element 902 is an AWG (Arrayed Waveguide Grating).

如图13所示，本发明实施例提供一种调制***，包括：服务器机架1201、上述描述的微环调制器1202以及光环形器1203；服务器机架包括至少一个服务器，As shown in FIG. 13 , an embodiment of the present invention provides a modulation system, including: a server rack 1201, the micro-ring modulator 1202 described above, and an optical circulator 1203. The server rack includes at least one server.

光环形器1203，用于接收光信号以及将光信号传导至微环调制器1202；The optical circulator 1203 is configured to receive the optical signal and conduct the optical signal to the micro-ring modulator 1202;

其中，该光信号可以为梳状光源。Wherein, the light signal can be a comb light source.

微环调制器1202，与至少一个服务器中的每个服务器相连，用于接收每个服务器输出的调制信号；以及将每个服务器输出的调制信号加载在输入该微环调制器的光信号上，获取加载后的光信号，以及将所述加载后的光信号通过光环形器1203传递至接收机。a microring modulator 1202, connected to each of the at least one server, for receiving a modulated signal output by each server; and loading a modulated signal output by each server on the optical signal input to the microring modulator, The loaded optical signal is acquired, and the loaded optical signal is transmitted to the receiver through the optical circulator 1203.

具体的，微环调制器1202中一个微环与一个服务器电相连，该服务器通过高速电缆用于为与其连接的微环提供调制信号，当与微环谐振的光信号被耦合至微环中时，微环调制器将该调制信号加载到被耦合至该微环的光信号上。Specifically, a microring in the microring modulator 1202 is electrically coupled to a server for providing a modulated signal to the microring connected thereto through a high speed cable, when the optical signal resonating with the microring is coupled into the microring The microring modulator loads the modulated signal onto an optical signal coupled to the microring.

其中，机架上每台服务器和该微环调制器用高速电缆连接。Wherein, each server in the rack and the micro ring modulator are connected by a high speed cable.

所属领域的技术人员可以清楚地了解到，为描述的方便和简洁，仅以上述各功能模块的划分进行举例说明，实际应用中，可以根据需要而将上述功能分配由不同的功能模块完成，即将装置的内部结构划分成不同的功能模块，以完成以上描述的全部或者部分功能。上述描述的***，装置和单元的具体工作过程，可以参考前述方法实施例中的对应过程，在此不再赘述。It will be clearly understood by those skilled in the art that for the convenience and brevity of the description, only the division of each functional module described above is exemplified. In practical applications, the above function assignment can be completed by different functional modules as needed. The internal structure of the device is divided into different functional modules to perform all or part of the functions described above. For the specific working process of the system, the device and the unit described above, reference may be made to the corresponding process in the foregoing method embodiments, and details are not described herein again.

在本申请所提供的几个实施例中，应该理解到，所揭露的***，装置和方法，可以通过其它的方式实现。例如，以上所描述的装置实施例仅仅是示意性的，例如，所述模块或单元的划分，仅仅为一种逻辑功能划分，实际实现时可以有另外的划分方式，例如多个单元或组件可以结合或者可以集成到另一个***，或一些特征可以忽略，或不执行。另一点，所显示或讨论的相互之间的耦合或直接耦合或通信连接可以是通过一些接口，装置或单元的间接耦合或通信连接。In the several embodiments provided by the present application, it should be understood that the disclosed system, apparatus, and method may be implemented in other manners. For example, the device embodiments described above are merely illustrative. For example, the division of the modules or units is only a logical function division. In actual implementation, there may be another division manner, for example, multiple units or components may be used. Combinations can be integrated into another system, or some features can be ignored or not executed. Another point, the mutual coupling or direct coupling or communication connection shown or discussed It may be an indirect coupling or communication connection through some interface, device or unit.

所述作为分离部件说明的单元可以是或者也可以不是物理上分开的，作为单元显示的部件可以是或者也可以不是物理单元，即可以位于一个地方，或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部单元来实现本实施例方案的目的。The units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, may be located in one place, or may be distributed to multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of the embodiment.

另外，在本发明各个实施例中的各功能单元可以集成在一个处理单元中，也可以是各个单元单独物理存在，也可以两个或两个以上单元集成在一个单元中。上述集成的单元可以采用软件功能单元的形式实现。In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above integrated unit can be implemented in the form of a software functional unit.

所述集成的单元如果以软件功能单元的形式实现并作为独立的产品销售或使用时，可以存储在一个计算机可读取存储介质中。基于这样的理解，该技术方案的全部或部分可以以软件产品的形式体现出来，该计算机软件产品存储在一个存储介质中，包括若干指令用以使得一台计算机设备(可以是个人计算机，服务器，或者网络设备等)或处理器执行本发明各个实施例所述方法的全部或部分步骤。所述存储介质是非短暂性(英文：non-transitory)介质，包括：快闪存储器、移动硬盘、只读存储器、随机存取存储器、磁碟或者光盘等各种可以存储程序代码的介质。The integrated unit, if implemented in the form of a software functional unit and sold or used as a standalone product, may be stored in a computer readable storage medium. Based on such understanding, all or part of the technical solution may be embodied in the form of a software product stored in a storage medium, including a plurality of instructions for causing a computer device (which may be a personal computer, a server, Either a network device or the like) or a processor performs all or part of the steps of the method described in various embodiments of the invention. The storage medium is a non-transitory medium, including: a flash memory, a mobile hard disk, a read only memory, a random access memory, a magnetic disk, or an optical disk, and the like, which can store program code.

以上所述，仅为本发明的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本发明揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本发明的保护范围之内。因此，本发明的保护范围应所述以权利要求的保护范围为准。 The above is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope of the present invention. It should be covered by the scope of the present invention. Therefore, the scope of the invention should be determined by the scope of the claims.

Claims

一种微环调制器，其特征在于，包括：衬底层、位于所述衬底层上方的波导层；A microring modulator, comprising: a substrate layer, a waveguide layer above the substrate layer;

所述衬底层，用于支撑所述波导层；The substrate layer for supporting the waveguide layer;

所述波导层包括微环调制阵列以及位于所述微环调制阵列两侧的第一波导和第二波导，其中，所述第一波导和所述第二波导对称设置；The waveguide layer includes a micro-ring modulation array and first and second waveguides located on both sides of the micro-ring modulation array, wherein the first waveguide and the second waveguide are symmetrically disposed;

所述微环调制阵列包括位于同一个平面的至少两个调制单元，每个所述调制单元对应一个谐振波长，不同的调制单元对应不同的谐振波长，每个调制单元与第一波导和第二波导之间均存在间距，同一个调制单元与第一波导之间的间距和该调制单元与第二波导之间的间距相等；任一所述调制单元，用于调制与该调制单元对应的波长谐振的光信号的强度；The micro-ring modulation array includes at least two modulation units located in the same plane, each of the modulation units corresponding to one resonance wavelength, different modulation units corresponding to different resonance wavelengths, each modulation unit and the first waveguide and the second There is a spacing between the waveguides, a spacing between the same modulation unit and the first waveguide and a spacing between the modulation unit and the second waveguide; any of the modulation units for modulating a wavelength corresponding to the modulation unit The intensity of the resonant optical signal;

所述第一波导用于输入光信号，所述第二波导用于输出经过每个所述调制单元调制后的光信号。The first waveguide is for inputting an optical signal, and the second waveguide is for outputting an optical signal modulated by each of the modulation units.
根据权利要求1所述的微环调制器，其特征在于，所述第一波导和所述第二波导具有第一端口，所述第一端口用于输入/输出光信号，所述第一波导的第一端口和所述第二波导的第一端口相对设置；所述微环调制器还包括偏振分束单元，所述偏振分束单元与所述第一波导和所述第二波导的第一端口相连，用于将传播至所述偏振分束单元的第一光束分解为具有第一偏振状态的光和具有第二偏振状态的光，以及将所述第一偏振状态的光从第一波导的第一端口输入至所述第一波导，将所述第二偏振状态的光从第二波导的第一端口输入至所述第二波导，其中，所述第一光束包括两个偏振状态的光分量。The microring modulator according to claim 1, wherein said first waveguide and said second waveguide have a first port for inputting/outputting an optical signal, said first waveguide The first port is opposite to the first port of the second waveguide; the microring modulator further includes a polarization splitting unit, the polarization splitting unit and the first waveguide and the second waveguide a port connected to decompose the first light beam propagating to the polarization splitting unit into light having a first polarization state and light having a second polarization state, and light from the first polarization state from the first a first port of the waveguide is input to the first waveguide, and light of the second polarization state is input from a first port of the second waveguide to the second waveguide, wherein the first beam includes two polarization states Light component.
根据权利要求2所述的微环调制器，其特征在于，所述偏振分束单元还用于接收经所述第一波导的第一端口输出的已经调制的第二偏振状态的光；以及接收经所述第二波导的第一端口输出的已经调制的第一偏振状态的光；以及将所述已经调制的第二偏振状态的光和所述已经调制的第一偏振状态的光合成第一光束。The microring modulator according to claim 2, wherein said polarization splitting unit is further configured to receive the modulated second polarization state of light outputted through the first port of said first waveguide; and receive Light of the modulated first polarization state outputted through the first port of the second waveguide; and synthesizing the modulated light of the second polarization state and the light of the modulated first polarization state into the first beam .
根据权利要求1-3任意一项所述的微环调制器，其特征在于，所述调制单元包括微环，所述微环具有PIN调制结构。A microring modulator according to any one of claims 1 to 3, wherein the modulating unit comprises a microring having a PIN modulation structure.
根据权利要求4所述的微环调制器，其特征在于，在每个所述微环上设置有稳频单元，用于调节每个所述微环对应的谐振波长。The micro-ring modulator according to claim 4, wherein a frequency stabilization unit is disposed on each of the micro-rings for adjusting a resonance wavelength corresponding to each of the micro-rings.
根据权利要求5所述的微环调制器，其特征在于，所述稳频单元包括导线和加热电阻丝；The microring modulator according to claim 5, wherein the frequency stabilization unit comprises a wire and a heating resistor wire;

其中，所述加热电阻丝位于所述稳频单元对应的微环的一侧，所述导线与所述加热电阻丝电连接，所述加热电阻丝，用于通过热传导方式控制微环温度，以调节微环的谐振波长。Wherein, the heating resistance wire is located at one side of the micro ring corresponding to the frequency stabilization unit, the wire is electrically connected to the heating resistance wire, and the heating resistance wire is used for controlling the temperature of the micro ring by heat conduction, Adjust the resonant wavelength of the microring.
根据权利要求1-6任一项所述的微环调制器，其特征在于，所述第一波导和所述第二波导之间设置的微环调制阵列中的至少两个调制单元采用一字型排布方式。The microring modulator according to any one of claims 1 to 6, wherein at least two modulation units in the microring modulation array disposed between the first waveguide and the second waveguide adopt a word Type arrangement.
根据权利要求1-6任一项所述的微环调制器，其特征在于，所述第一波导和所述第二波导均包括第一水平部，第二水平部以及垂直部；其中，所述第一水平部和所述第二水平部平行设置，所述垂直部与所述第一水平部和所述第二水平部的末端连接，且与所述第一水平部和所述第二水平部垂直；The microring modulator according to any one of claims 1 to 6, wherein the first waveguide and the second waveguide each include a first horizontal portion, a second horizontal portion, and a vertical portion; First horizontal part And the second horizontal portion is disposed in parallel, the vertical portion is connected to the ends of the first horizontal portion and the second horizontal portion, and is perpendicular to the first horizontal portion and the second horizontal portion;

其中，所述第一波导的第一水平部和所述第二波导的第一水平部相对设置，所述第一波导的垂直部和所述第二波导的垂直部相对设置，所述第一波导的第二水平部和所述第二波导的第二水平部相对设置；Wherein the first horizontal portion of the first waveguide and the first horizontal portion of the second waveguide are oppositely disposed, and the vertical portion of the first waveguide and the vertical portion of the second waveguide are oppositely disposed, the first a second horizontal portion of the waveguide and a second horizontal portion of the second waveguide are disposed opposite each other;

所述第一波导的第一水平部和所述第二波导的第一水平部之间用于设置呈一字型排列的至少一个调制单元；所述第一波导的第二水平部和所述第二波导的第二水平部之间用于设置呈一字型排列的至少一个调制单元。Between the first horizontal portion of the first waveguide and the first horizontal portion of the second waveguide for arranging at least one modulation unit arranged in a line; a second horizontal portion of the first waveguide and the Between the second horizontal portions of the second waveguide is used to provide at least one modulation unit arranged in a line.
根据权利要求2-8任一项所述的微环调制器，其特征在于，所述第一波导和所述第二波导还具有第二端口，所述第一波导的第二端口和所述第二波导的第二端口相对设置；The microring modulator according to any one of claims 2-8, wherein the first waveguide and the second waveguide further have a second port, a second port of the first waveguide, and the The second port of the second waveguide is oppositely disposed;

在所述第一波导和所述第二波导的第二端口处分别设置有吸收器，所述吸收器用于吸收未被调制的光信号。An absorber is provided at the second port of the first waveguide and the second waveguide, respectively, for absorbing unmodulated optical signals.
一种超宽带调制器，其特征在于，包括光环形器、设置在所述光环形器后方的色散元件以及设置在所述色散元件后方的调制器阵列；An ultra-wideband modulator comprising an optical circulator, a dispersing element disposed behind the optical circulator, and a modulator array disposed behind the dispersing element;

所述调制器阵列包括至少两个并联的如权利要求2-9任一项所述的微环调制器；The modulator array includes at least two parallel micro-ring modulators according to any of claims 2-9;

所述光环形器，用于接收输入光，以及将所述输入光传播至所述色散元件；The optical circulator for receiving input light and propagating the input light to the dispersive element;

所述色散元件，用于将所述输入光分为不同波长的光信号，以及将所述不同波长的光信号传播至所述调制器阵列；The dispersive element is configured to split the input light into optical signals of different wavelengths, and propagate the optical signals of the different wavelengths to the modulator array;

一个所述微环调制器，用于对输入所述微环调制器中的光信号进行调制。A microring modulator for modulating an optical signal input to the microring modulator.
一种调制***，其特征在于，包括：服务器机架、权利要求1-9任意一项所述的微环调制器以及光环形器；所述服务器机架包括至少一个服务器，A modulation system, comprising: a server rack, the microring modulator according to any one of claims 1-9, and an optical circulator; the server rack includes at least one server,

所述光环形器，用于接收光信号以及将所述光信号传导至所述微环调制器；The optical circulator for receiving an optical signal and conducting the optical signal to the microring modulator;

所述微环调制器，与所述至少一个服务器中的每个所述服务器相连，用于接收每个所述服务器输出的调制信号；以及将每个所述服务器输出的调制信号加载在输入所述微环调制器的光信号上，获取加载后的光信号，以及将所述加载后的光信号通过所述光环形器传递至接收机。 The microring modulator is coupled to each of the at least one server for receiving a modulated signal output by each of the servers; and loading a modulation signal output by each of the servers at an input station On the optical signal of the micro-ring modulator, the loaded optical signal is acquired, and the loaded optical signal is transmitted to the receiver through the optical circulator.