WO2018045980A1 - 可变形柔性纳米发电机、其制备方法、传感器及机器人 - Google Patents
可变形柔性纳米发电机、其制备方法、传感器及机器人 Download PDFInfo
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- WO2018045980A1 WO2018045980A1 PCT/CN2017/100882 CN2017100882W WO2018045980A1 WO 2018045980 A1 WO2018045980 A1 WO 2018045980A1 CN 2017100882 W CN2017100882 W CN 2017100882W WO 2018045980 A1 WO2018045980 A1 WO 2018045980A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/04—Friction generators
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/06—Influence generators
- H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines
Definitions
- the invention relates to the field of generators, in particular to a deformable flexible nanogenerator, a preparation method thereof, a sensor and a robot.
- This deformable electronic device has a large degree of freedom in application, and thus can be used in a wider range of applications in the field of smart devices and sensors.
- the electronic devices can be evenly covered on irregular, soft, unfixed objects and even organs, and are widely used in the fields of wearable electronics, bio-portable systems, personal safety, robotic man-machine docking, and electronic skin. The future of the application.
- many deformable electronic devices have been widely prepared and studied before, reliable output power is still one of the most critical and important issues at present.
- TENG friction nanogenerators
- TENG friction nanogenerators
- TENG which can be bent and pulled to a certain extent by using a tantalum electrode array and a wavy polyimide film has been reported.
- the TENG is made of a rigid material, which limits its pulling characteristics and cannot be folded or complicatedly deformed multiple times, which will seriously affect the development and research of energy materials in the new wearable field.
- the nano-generator is connected to the flexible deformable device. Due to the mismatch of Young's modulus, there is a problem of unstable adhesion at the joint of the rigid material and the flexible material.
- the present invention provides a deformable flexible nanogenerator, which is prepared
- the method, sensor and robot make the flexible nano-generator can realize complex deformation such as pulling, bending and torsion, and can withstand great mechanical deformation and damage, attach it to regular or irregular objects, and other objects.
- the energy generated by contact friction and induction is converted into electrical energy output.
- a deformable flexible nanogenerator includes a flexible package structure and an electrode embedded in the flexible package structure, wherein the electrode is a pattern electrode formed by aggregation of nano conductive materials;
- the structure is prepared using a stretchable elastomeric encapsulating material.
- the electrode is connected to a ground, an equipotential or an external electrical conductor, and during the contact separation of the object from the flexible package structure, a charge flows between the electrode and the ground or an equipotential.
- the external electrical conductor is a human body or a copper electrode.
- the deformable flexible nanogenerator comprises a plurality of said electrodes.
- a plurality of said electrodes are respectively connected to ground, equipotential or external electrical conductors.
- the plurality of electrodes are arranged in an array.
- the nano-conductive material comprises carbon nanotubes, carbon residue, metal nanowires or metal particles or metal fragments.
- the nano-conductive material is a silver nanowire having a diameter of 100 nm to 10 ⁇ m and a length of 20-50 ⁇ m.
- the material of the flexible packaging structure comprises silicone rubber, silica gel, rubber, polydimethylsiloxane, epoxy resin or Eco-flex.
- the flexible nanogenerator has a thickness of 500 nm to 1 cm.
- the electrode is embedded in the package structure by pouring an elastic encapsulation material on the pattern electrode.
- a flexible sensor comprising the nanogenerator of any of the above is provided.
- the deformable flexible nanogenerator is attached to a regular or irregular surface of the object to work.
- a method for preparing a deformable flexible nanogenerator including the steps of:
- A1 a gel formulated from a material of a flexible package structure is cast and encapsulated on the pattern electrode of the nano-conductive material, and cured.
- the step A1 includes:
- the nano-conductive material is One end of the electrode is connected to the ground, an equipotential or an external conductor by a wire;
- the gel of the flexible encapsulating material comprises: mixing the two solutions of Eco-flex A and B in a volume ratio of 1:1 to obtain a gel of a flexible encapsulating structural material.
- the nano-conductive material comprises carbon carbon nanotubes, carbon residue, metal nanowires, metal particles or metal fragments.
- the flexible encapsulating material comprises silicone rubber, silica gel, rubber, polydimethylsiloxane, epoxy resin or Eco-flex.
- the thickness of the flexible encapsulating material on one side is 400 nm to 2 mm; and the thickness of the flexible nanogenerator obtained after curing is 500 nm to 1 cm.
- the present invention also provides an autonomously aware flexible robot comprising: a robot component; a flexible sensor attached to the robot component; wherein the flexible sensor comprises a flexible package structure and embedded in the flexible An electrode in a package structure, wherein the electrode is connected to a ground, an equipotential or an external electrical conductor.
- a flexible microstructure modifying layer having a pattern is further disposed on the surface of the flexible package structure.
- the surface of the flexible microstructure modifying layer is an array formed by pyramid-shaped microstructure units, or an array formed by microstructure units composed of nanowire clusters, or an array formed by trapezoidal shaped micro-structure units.
- the size of the microstructure unit in the array ranges from micrometer to millimeter; and/or the height of the microstructure unit in the direction of the surface of the vertical microstructure modification layer in the array is micro Meter to millimeter.
- the autonomously aware flexible robot further comprises a signal generating component, wherein the signal generating component is coupled to the flexible sensor to convert the electrical signal of the flexible sensor into other signals; preferably, the signal generating component is an LED light.
- the robot component is a crawler robot component comprising a plurality of pneumatic chambers.
- the flexible sensor is disposed on the abdomen or back of the crawling robot component.
- one of the flexible sensors is disposed on the abdomen at a corresponding position of the first stage of the crawler robot component.
- the robot component is a robotic gripper
- the flexible sensor is disposed on two fingers of the robotic gripper.
- the robot component is a machine finger and the flexible sensor is disposed on a machine finger.
- the deformable flexible nano-generator itself has full flexibility and pullability, and can be stretched in a biaxial direction and adapted to various shapes of objects. It can realize complex deformation such as pulling, bending, twisting, folding, etc., and can be attached to regular or irregular objects, and can even withstand great mechanical deformation and damage, and has stable performance and durability; especially in the wearable field. It can be attached to the surface of any shape object, and it can be induced, contacted and rubbed with other objects to generate electric energy. It can be used in a wide range of applications.
- the flexible robot can sense its own motion, working state, environment and external by the electrical signal generated by the flexible sensor itself. Stimulate and achieve self-awareness.
- FIG. 1 is a schematic structural view of a deformable flexible nano-generator provided by the present invention.
- FIG. 2 is a schematic structural view of a deformable flexible nanogenerator according to the present invention including a plurality of electrodes.
- FIG. 3 is a schematic flow chart of preparing a deformable flexible nanogenerator provided by the present invention.
- 4A is a schematic diagram of current output of a deformable flexible nanogenerator when deformed in the long axis direction.
- 4B is a schematic diagram of current output of a deformable flexible nanogenerator when deformed in the short axis direction.
- Figure 5 is a schematic diagram of current output of a deformable flexible nanogenerator in the event of torsional deformation.
- Figure 6 is a schematic diagram of current output of a deformable flexible nanogenerator in the event of folding deformation.
- FIG. 7 is a schematic diagram of current output of a deformable flexible nanogenerator in the event of shear damage or simultaneous shear damage and tensile strain.
- FIG. 8 is a schematic structural view of a first embodiment of a self-aware flexible robot according to the present invention.
- FIG. 9 is a schematic structural view of a second embodiment of a self-aware flexible robot according to the present invention.
- FIG. 10 and FIG. 16 are schematic structural views of a third embodiment of a self-aware flexible robot according to the present invention.
- FIG. 14 is a schematic structural view of a fourth embodiment of a self-aware flexible robot according to the present invention.
- Figure 15 is a test result of the flexible sensor of the fourth embodiment.
- FIG. 17 is a schematic structural view of a fifth embodiment of a self-aware flexible robot according to the present invention.
- Figure 18 is a test result of the flexible sensor of the fifth embodiment.
- the invention provides a deformable flexible nano-generator, a preparation method thereof and a sensor, which are formed by using a nano-conductive material to form an electrode and a stretchable elastic material to form a flexible package.
- the structure makes the deformable flexible nano-generator itself fully flexible and stretchable, can be stretched in the biaxial direction and adapt to various shapes of objects, and can realize complex deformation such as pulling, bending, twisting, etc., and can be attached to the rule. Or on irregular objects, even with extreme mechanical deformation and damage, stable performance and durability.
- the invention has invented a deformable flexible nanogenerator, a preparation method thereof and a fabricated sensor through a plurality of research experiments.
- a typical structure of a deformable flexible nanogenerator is shown in FIG. 1 , including a flexible package structure 1 and an electrode 2 embedded in the flexible package structure 1 , wherein the electrode 2 is a pattern electrode formed by aggregation of nano conductive materials; Preparation of a stretchable elastomeric encapsulating material.
- the deformable flexible nano-generator itself has full flexibility and pullability, and can be stretched in a biaxial direction and adapted to various shapes and objects. Especially in the wearable field, it can be attached to the surface of any shape object, and it can induce, contact and rub against other objects to generate electric energy.
- the electrode 2 can be connected to the ground, equipotential or external conductor 3, and during the contact separation of the other object from the flexible package structure 1, there is a charge flow between the electrode and the ground or the equipotential.
- the generator principle of the deformable flexible nanogenerator is a single-electrode mode, that is, the friction between the other objects outside the nano-generator and the material surface of the package structure 1 generates a charge on the surface of the package structure 1, so that the internal electrode 2 induces the opposite
- the electric charge can be directionally moved between the electrode 2 and the ground 3 through the rectifying member to form a current output to realize power generation.
- the external electrical conductor can be a human body or a copper electrode, and the flexible nano-generator of the present invention can be attached to a movable part such as a human joint, and the energy for collecting the human body motion is converted into electric energy.
- the nano conductive material of the electrode of the flexible nanogenerator of the present invention may be silver nanowire, carbon nano Rice tubes, carbon residue, metal nanowires, metal particles or metal fragments;
- the material of the flexible packaging structure may be silicone rubber, silica gel, rubber, polydimethylsiloxane, epoxy resin or Eco-flex.
- the electrode 2 is embedded in the package structure 1 by pouring an elastic encapsulating material on the pattern electrode to ensure better bonding between the two, and problems such as falling off of the electrode do not occur.
- the deformable flexible nanogenerator of the present invention can be used as a flexible sensor that is attached to a regular or irregular surface of the object for sensing whether the object is contacted or the like.
- the method for preparing a deformable flexible nano-generator comprises the steps of: A0, pouring a solution prepared from a nano-conductive material into a drawn electrode pattern mold, and drying to obtain a nano-conductive material pattern electrode; A1.
- a gel cast from a flexible encapsulating material is encapsulated on the nano-conductive material pattern electrode and cured.
- the gel of the flexible encapsulating material comprises: mixing the two solutions of Eco-flex A and B in a volume ratio of 1:1 to obtain a gel of a flexible encapsulating material.
- Eco-flex is a series of products of SMOOTH ON Company of the United States.
- the two solutions A and B are AB mixed materials of ECO FLEX products, which can form silicone rubber after mixing.
- the nano conductive material may be silver nanowires, carbon nanotubes, carbon residue or metal nanowires, metal particles or metal fragments, and the like.
- the flexible encapsulating material may be a flexible stretchable material such as silicone rubber, silica gel, rubber, polydimethylsiloxane, epoxy resin or Eco-flex.
- the A1 specifically includes: casting a gel formulated from a flexible packaging structural material onto one side of the nano conductive material to form a patterned electrode, such that a pattern electrode of the nano conductive material is embedded in the flexible package In the structural material; the flexible packaging material has a thickness of 400 nm to 2 mm after curing; one end of the patterned electrode of the nano conductive material is connected to the copper electrode with silver glue; and the gel prepared from the flexible packaging material is poured on the gel The other side of the pattern electrode of the nano-conductive material is such that the pattern electrode of the nano-conductive material is encapsulated in the flexible packaging material; the flexible nano-generator obtained after curing has a thickness of 500 nm to 1 cm.
- the most prominent advantage of the deformable flexible nanogenerator provided by the present invention is that the power generating device is fully flexible and all parts of the generator can be deformed or stretched.
- Nano-conductive materials such as silver nanowires have high conductivity, pullability, low power consumption and easy
- materials such as silver nanowires as the conductive medium.
- Nano-conducting materials such as silver nanowires are stacked together and intertwined to form a conductive network.
- One-dimensional materials such as silver nanowires are cross-linked by one-way materials mainly by means of permeation networks. This method can prevent conductive Sexual conditions quickly adapt to various stresses and deformations.
- a flexible encapsulating material such as a soft and tough silicone rubber material as a dielectric material and used to seal the nano-conductive material.
- Silicone rubber and other materials have strong pullability and fracture resistance, so that a one-dimensional material of nano-conductive material is encapsulated in the material of the flexible package structure to prepare a stretchable flexible nano-generator device, which can be attached with different
- the shape of the object is changed or pulled, and it can work normally in the case of simultaneous deformation in both directions.
- the highest shape variable can reach 300%.
- the limit of its breaking is greatly improved.
- the most commonly used flexible materials for nano-generators have poor tensile properties and low strength, and are easily broken after being stressed.
- the second advantage of the deformable flexible nanogenerator provided by the present invention is that the device has damage tolerance. Unlike other rigid nano power generation devices, when the nano-generator is subjected to external stress, part or even most of the device itself is damaged. As long as the electrode has a small number of connections, the device can still work normally and continue to provide energy for other devices, which greatly enhances its application value and potential.
- the flexible encapsulating material such as silicone rubber used in the invention has low cost and simple production process, and only needs to be prepared by a dissolution method at room temperature, the operation is simple, the production environment is low, and the production cost is greatly reduced. Suitable for mass production.
- the deformable flexible nanogenerator of the present invention is characterized by both mechanical durability and elasticity, with ultra-high biaxial pull characteristics and the ability to generate energy under different extreme deformation conditions.
- This new type of nanogenerator can be applied and adapted to a variety of irregular objects such as human skin, spheres, tubes and irregular shapes, etc., and is also used as an energy source to power other electronic devices.
- the flexible nanogenerator itself has the pullability and durability, it can generate electricity by tapping and contact under different deformation conditions. At the same time, its biaxial stretching can exceed 300%, and even in the extreme case of damage, the device can still work normally to provide energy for the load.
- the deformable flexible nanogenerator includes only one electrode, and is implemented in other implementations.
- the deformable flexible nano-generator may also comprise a plurality of electrodes. Referring to FIG. 2, the plurality of electrodes may be respectively connected to the ground, the equipotential or the external conductor, or each electrode may be connected to the same one through the rectifying device. Ground potential.
- the plurality of electrodes 201, 202, ... 209, etc. are respectively connected to ground, equipotential or external conductors, and the plurality of electrodes 201, 202, ... 209, etc. may be arrayed. Way distribution.
- a current recording or sensing device 4 can be connected between the electrode 201 and the ground potential 3. When the position of the electrode 201 is touched or tapped, an electrical signal is output, and the current recording or sensing device 4 can be used for recording or recording of the sensor member. Current between 201 and ground potential 3.
- the different electrode positions are touched or tapped, and the touched position can be known according to the current recording or the operation of the sensor device 4 as a sensor to sense
- the touch situation of different positions realizes multi-zone sensing, and in the future practical application, it can be made into the skin of the robot to sense the external force.
- the nano conductive material of the electrode of the flexible nanogenerator of the present invention may be silver nanowire, carbon nanotube, carbon residue, metal nanowire, metal particle or metal fragment, etc.; the material of the flexible packaging structure may be silicone rubber, silica gel, rubber , polydimethylsiloxane, epoxy resin or Eco-flex. Since the performance of each type is relatively similar, the present embodiment only uses one material for explanation, and does not enumerate one by one.
- FIG. 1 A schematic diagram of the preparation process is shown in FIG. 1
- the silver nanowires were from Sigma-Aldrich, having a diameter of about 115 nm (optional range 100 nm to 10 ⁇ m), a length of 20-50 ⁇ m, and a formulation concentration of 0.05% by weight.
- the surface was first cleaned and the desired electrode pattern was drawn, and then the drawn electrode pattern was processed with a polyimide tape to obtain an electrode template.
- the prepared silver nanowire solution was dropped into the template, and after it was completely dried at room temperature, the polyimide tape was removed to obtain a silver nanowire pattern electrode.
- the concentration of the silver nanowire solution is not particularly limited.
- the concentration given in the examples is only for the nanowires to not aggregate, but the concentration is low or high, which only affects the production time. Between, the concentration is high, the production is fast; if the concentration is low, the production is slow. The concentration is lower, the material is more economical, and it will be more uniform.
- a silicone rubber gel was then prepared.
- the silicone rubber was from Smooth-On, model Eco-flex00-10.
- the two solutions A and B were thoroughly mixed in a volume ratio of 1:1, and then the mixed gel was cast on an acrylic plate with a silver nanowire electrode pattern to a thickness of about 2 mm (optional range 400 nm to 2 mm).
- the silicone rubber gel is completely cured after 4 hours at room temperature, and then the silicone rubber is peeled off from the acrylic plate, and the silver nanowire electrode pattern has been embedded in the silicone rubber. It is then connected to the ground electrode by a copper wire at the end of the silver nanowire pattern, and the two are connected by silver glue.
- the silver nanowire electrode is again encapsulated with a silicone rubber gel, and the thickness after packaging is about 4 mm (optional range: 500 nm to 1 cm) to form a sandwich structure in which the silver nanowire pattern electrode is embedded in the silicone rubber. After curing again for 4 hours at room temperature, the desired deformable flexible nanogenerator was obtained.
- the working mechanism is mainly based on electrostatic induction and triboelectric charging.
- electrostatic induction When the skin is in contact with silicone rubber, the electrons will flow from the skin to the silicone rubber when the two are in contact, when the two are in contact.
- the negative charge on the surface of the silicone rubber will induce a positive charge on the intermediate silver nanowire pattern electrode interlayer, causing electrons to flow from the silver nanowire electrode interlayer to the ground direction.
- This electrostatic induction process can provide a voltage/current signal to the external load. Output.
- the distance between the skin and the silicone rubber is increased, the negative triboelectric charge on the surface of the silicone rubber is completely shielded by the positive charge of the silver nanowire electrode, and there is no signal output at this time.
- the distance between the skin and the silicone rubber is reduced to the full contact process, the induced positive charge in the silver nanowire electrode will decrease, and the electron flow direction is from the ground to the silver nanowire electrode, again forming a reverse voltage. / Current signal output.
- the formed nano-generator device has good tensile properties and can work normally under extreme mechanical deformation, such as stretching and folding, and can still work normally even in the case of large-area damage of the device, the input will not There is a significant change, even when the device is pulled, the device output will become larger.
- the maximum tensile strain of the device in the biaxial direction can reach 300%, or as shown in Figure 5. Torsing at different angles, or as shown in Figure 6, can be folded multiple times, or as shown in Figure 7, shear damage or shear damage and tensile strain can still output a strong electrical signal, current density up to mA Every cubic meter.
- the invention also proposes to use the above deformable flexible nano-generator as a flexible sensor, placed in a component of the flexible robot, and realize the autonomous perception of the flexible robot.
- Embodiment 1 is a diagrammatic representation of Embodiment 1:
- FIG. 8 is a schematic diagram showing a typical structure of an autonomously-aware flexible robot according to the present embodiment.
- the autonomously-aware flexible robot includes a robot component 10 and a flexible sensor attached to the robot component 10, wherein the robot component 10 can be Various actions are performed under the driving of the driving device, such as moving, gripping objects, crawling, etc.;
- the flexible sensor comprises a flexible package structure 20 and an electrode 30 embedded in the flexible package structure 20, wherein the electrode 30 can be connected to the ground, equipotential Or the external electrical conductor 50, under the action of the action of the robot component 10, when the flexible packaging structure 20 is in contact with or separated from other objects, due to frictional electrification and electrostatic induction, there is a relationship between the electrode 30 and the ground or the equipotential.
- the charge flows, and different actions can produce different electrical signals. Therefore, the generated electrical signal can be used as a signal that the flexible robot autonomously perceives, and does not need to supply power to the sensor, and is an autonomously aware flexible robot.
- the electrode 30 can be connected to an electrical conductor disposed on the robot component 10.
- the electrode 30 can be any conductive material.
- the electrode 30 can be an electrode formed by aggregating the nano conductive material, and the shape and size of the electrode can be designed according to the required pattern. Make special restrictions.
- the flexible package structure 20 adopts a stretchable elastic packaging material, so that the flexible frictional electric sensor itself has full flexibility and pullability, can be stretched in the biaxial direction, and can adapt to the conductive action of various robot components and closely fits the robot component. On any surface of the shape, it induces, contacts and rubs against other objects to generate an electrical signal that is fed back to the control system of the robot component.
- the nano conductive material of the electrode 30 may be silver nanowires, carbon nanotubes, carbon residue, metal nanowires, metal particles or metal fragments, etc.; the material of the flexible package structure 10 may be silicone rubber, silica gel, rubber, polydimethylsiloxane. Organic insulating materials such as oxane, epoxy resin or Eco-flex.
- the electrode 30 is made of a nano-conductive material, it can be connected to the ground 50 by a metal conductor 40 that protrudes from the flexible package structure 10.
- the flexible sensor is prepared by pouring a solution prepared from a nano conductive material into a drawn electrode pattern mold, and drying to obtain a nano conductive material pattern electrode; and molding a gel prepared from a flexible packaging material into the nanometer.
- the conductive material is patterned on the electrode and cured.
- Embodiment 2 is a diagrammatic representation of Embodiment 1:
- FIG. 9 a typical structural diagram of an autonomously-aware flexible robot is shown in FIG. 9, which is different from the autonomously-aware flexible robot in the first embodiment: a flexible triboelectric sensor
- a flexible microstructure modification layer 60 having a pattern is disposed on the surface of the flexible package structure 20.
- the microstructured layer 60 can be deformed when the flexible triboelectric sensor is stressed or touched, and the charge induced on the electrode 30 can change due to frictional electrification and electrostatic induction, and the pressure or touch can be sensed.
- the material of the microstructure modifying layer 60 is made of a flexible deformable insulating material, preferably an organic insulating material, and may be an organic insulating material such as silicone rubber, silica gel, rubber, polydimethylsiloxane, epoxy resin or Eco-flex.
- the material of the microstructure modifying layer 60 may be the same as or different from the material of the flexible package structure 20, and may be integrally formed with the flexible package structure 20, or the microstructure modifying layer 60 may be attached to the surface of the flexible package structure 20.
- the surface of the microstructure-modifying layer 60 may be an array formed of pyramid-shaped microstructure units, or an array formed of microstructure units composed of nanowire clusters, or an array formed of trapezoidal-frame shape microstructure units.
- the size of the microstructure units in the array ranges from micrometers to millimeters, for example from 50 micrometers to 500 micrometers; the height of the microstructure units in the array in the direction of the surface of the vertical microstructure modification layer 50 ranges from micrometers to millimeters, for example 50 Micron to 500 microns.
- a flexible device having a pyramidal triangular microprism surface has excellent pressure sensitivity of low pressure ( ⁇ 5 kPa) even when stretched to 100% strain.
- the preparation process of the flexible sensor is described by a specific example.
- a pyramid-shaped array of dies was fabricated on an acrylic plate using a laser cutter.
- a silicone rubber solution of Eco-flex 00-30 (from Smooth-On Co., model Ecoflex 00-30) was mixed at a weight ratio of 1:1 Part A and Part B solution, and the mixed solution was poured into the above mold. After 4 hours, the silicone rubber film of the top layer having the array of triangular prism elements was cured and peeled off to obtain a microstructure-modifying layer 60.
- the mixed silicone rubber solution was poured onto an acrylic plate which was pre-drop coated with silver chips (size about 10 ⁇ m, purity ⁇ 99.9%) and had a boundary.
- the film was peeled off to obtain a strip-like sheet in which silver chips were embedded in the silicone rubber, and then the conductive copper tape was joined and embedded in the substrate of the strip-like sheet, and joined to the silver chips.
- the two sheets of the silicone rubber film obtained above were pasted with a silicone rubber solution to form a flexible sensor of the structure shown in FIG.
- Embodiment 3 is a diagrammatic representation of Embodiment 3
- an autonomously aware flexible robot wherein the robot component is a three-stage crawling robot component 11 including three pneumatic chambers as shown in FIG.
- the robotic component is preferably a flexible structure that can be crawled on any surface, and the crawling robot can be controlled to move, particularly to a dangerous place, such as a pneumatic robot that can crawl on the surface of the object 70.
- the flexible robot may include one or more flexible sensors 21 provided on the abdomen (the side on which the surface of the object 7 crawls) or the back of the crawling robot part 11.
- the crawling robot component 11 is a three-stage structure of three pneumatic chambers, and specifically includes several pneumatic chambers, which should not limit the protection range of the present invention, and may be more segments in other embodiments.
- the process of manufacturing a crawler robot component can be referred to (Elastomeric Origami: Programmable Paper-Elastomer Composites as Pneumatic Actuators, Adv. Funct. Mater. 2012, 22, 1376-1384).
- the mold comprises three parts: 1. The bottom layer; 2. The pneumatic chamber ; 3, integrated mold.
- For the bottom layer a piece of paper was embedded in the formed 1/16 inch thick Eco-flex 00-30 silicone rubber film.
- the pneumatic chamber was obtained by Eco-flex 00-30 which was solidified in the relevant mold.
- the Eco-flex pneumatic chamber is adhered to the bottom layer for assembly. After that, the pneumatic chamber is inverted in a larger integrated mold.
- the mixed Eco-flex 00-30 was poured into an integrated mold and assembled with the prefabricated deformable flexible sensor of Example 2. After four hours, the silicone rubber is solidified, and a flexible robot with crawling ability is integrally formed.
- FIG. 10 shows the flexible robot of FIG. 10, only one flexible sensor is disposed on the abdomen of the corresponding position of the first-stage pneumatic chamber of the leftmost end of the crawling robot component 11, and the crawling robot crawls back and forth from the left side to the right side of the crawling robot, at the electrode and The output electrical signal between the grounds
- Figure 11 shows the gait electrical signal (Normalized V) output produced by the crawler robot component 11 moving a distance of about 15 cm, showing several cycles of the generated potential wave. Each period of the electrical signal curve corresponds to a volt gait.
- Figure 12 shows a detailed electrical signal (Normalized V) output for a wave of gait.
- the output changes as the pneumatic actuator of each pneumatic robot component moves.
- the leftmost first segment initiates an expansion bend
- the potential is at its lowest state. This result is due to the first segment bending resulting in separation between the flexible sensor and the surface of the object 70.
- the generated voltage rises.
- the output reaches a high voltage state.
- the third segment expands, the potential reaches its maximum value. This result is due to the application of more force on the flexible sensor on the first segment during the third segment of inflation.
- Potential, deflated the third segment, and the second segment expanded the potential slightly decreased.
- the potential generated rises again.
- the first segment is re-inflated When the potential drops again to the lowest value.
- the soft body of the crawlable pneumatic robotic component enables it to adaptively connect itself to a regular or irregular surface of the object for sensing and providing a safer way of use.
- a crawlable pneumatic robotic component is controlled to crawl an irregular surface and crawl to the human wrist, touching the human wrist and sensing the pulse to actively sense a slight human physiological signal.
- Figure 13 shows the pulse signal of the human wrist detected by the flexible sensor, illustrating the potential of the self-consciously aware flexible robot in in situ medical palpation and other medical applications.
- the working mechanism of the flexible sensor is mainly based on the contact frictional electrification and electrostatic induction when it is in contact with other materials. Since the electron affinity of the skin and the silicone rubber are different, the electrons will flow from the skin to the silicone rubber when the two are in contact. The negative charge on the surface of the silicone rubber will induce a positive charge on the intermediate silver nanowire electrode interlayer, causing electrons to flow from the silver nanowire electrode interlayer to the ground direction.
- the electrostatic induction process provides an output of the voltage/current signal to an external load.
- the distance between the skin and the silicone rubber is increased, the negative triboelectric charge on the surface of the silicone rubber is completely shielded by the positive charge of the silver nanowire network, and there is no signal output at this time.
- the distance between the skin and the silicone rubber is reduced again to the complete release process, the induced positive charge in the silver nanowire network will decrease, and the electron flow direction will be from the ground to the silver nanowire, again forming a reverse voltage / Current signal output.
- the flexible robot may further include a signal generating component, and the signal generating component may be connected to the flexible sensor.
- the signal generating component may be a device such as an LED or the like, and may convert the electrical signal of the flexible sensor into other signals such as light, sound, and the like.
- People or machines interact. As shown in FIG. 16, by integrating the flexible sensor in a plurality of areas, the robot component 12 actively performs multiple sensing when it moves, such as crawling, and can also interact with a person, and can be used as an integrated robot crawler.
- the robotic component 12 is constructed from three pneumatic chamber sections, and each pneumatic chamber back is integrated with a flexible sensor.
- the three flexible sensors 22 can not only sense the movement of the attached robot components (similar to muscle movement), but also serve as an autonomous human-computer interaction interface.
- a finger touches the deformed flexible triboelectric robot it can generate electric energy.
- the power of the electrical energy can illuminate the LED and provide a human-visible response to interact with the outside world.
- Figure 11 shows an electrically driven LED produced by robot motion. The above results show that the flexible triboelectric sensor using self-generating enables the flexible robot to instantaneously communicate with people through optical signals without the need for an external power source.
- Embodiment 4 is a diagrammatic representation of Embodiment 4:
- an autonomously aware flexible robot wherein the robotic component 13 is a conscious robotic gripper and the flexible sensor 23 is integrally integrated with the two fingers of the robotic gripper.
- Figure 15 shows the use of a clamp with a flexible active sensor for holding and shaking the baby doll's hand and testing its output, initially, the left and right sensors ( Both the Left sensor and the Right sensor are in a low voltage state (initial). As the robot approaches the approach, the voltage generated by the two sensors begins to rise. These two potentials reach a maximum until they contact and compress the object. When the robot gripper grips the arm up and down, the two outputs drop slightly and remain at a lower voltage.
- a slight drop in output can be attributed to the contribution of a portion of the potential from the electrostatic field to the desktop.
- the response is further reduced.
- the outputs of the two sensors drop dramatically to a minimum in an instant.
- the results in the figure show that when the robot gripper grips the hand, the resulting voltage is slightly reduced.
- the generated potential responds to the action accordingly. After the robot gripper releases the hand, the output returns to the baseline value.
- the results show that different potentials allow conscious robotic grippers to feel the different movements of the object and to be aware of the fall off accident.
- Embodiment 5 is a diagrammatic representation of Embodiment 5:
- the embodiment provides a flexible robot that can be applied to temperature or humidity sensing, and can be applied to the nursing robot. In other fields, it is possible to consciously detect whether the baby's trousers are wet.
- FIG. 17 is a self-aware flexible robot of the embodiment, wherein the robot component is a machine finger 14 and the flexible sensor 24 is disposed on the machine finger 14.
- the robot finger 14 can be moved by the robot to perform a touch or flip motion when flexible.
- the robot touches the baby pants 80 and tests the pants under both wet and dry conditions.
- Figure 18 shows the generated potentials for the two states. The higher and lower potentials represent the dry (Dry) and wet (Wet) pants, respectively.
- the reduced potential is attributed to the water molecules on the wet pants reducing the flexibility in the soft robot. Frictional charge of a triboelectric sensor.
- the present invention provides a deformable flexible nanogenerator comprising a flexible package structure and an electrode embedded in the flexible package structure, wherein the electrodes are assembled by a nano-conductive material The patterned electrode is formed; the flexible package structure is prepared using a stretchable elastic packaging material.
- the invention also provides a preparation method of the deformable flexible nano-generator and a sensor comprising the same; and the above-mentioned deformable flexible nano-generator is used as a flexible sensor and is placed in a component of the flexible robot to realize Autonomous perception of flexible robots.
- the deformable flexible nano-generator itself has full flexibility and pullability, and can be stretched in a biaxial direction and adapted to various shapes of objects. It can realize complex deformation such as pulling, bending, twisting, folding, etc., and can be attached to regular or irregular objects, and can even withstand great mechanical deformation and damage, and has stable performance and durability; especially in the wearable field. It can be attached to the surface of any shape object, and can generate electric energy by sensing, contacting and rubbing with other objects. It can be used in a wide range of applications. For example, a flexible robot can sense its own motion, working condition and environment through electrical signals generated from the flexible sensor itself. And external stimuli to achieve autonomous perception.
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Abstract
一种可变形柔性纳米发电机、制备方法、传感器及机器人。提供的可变形柔性纳米发电机,包括柔性封装结构(1)和嵌入在柔性封装结构中的电极(2),其中,电极(2)为由纳米导电材料聚集形成的图案电极;柔性封装结构(1)采用可拉伸的弹性封装材料。该可变形柔性纳米发电机可以在双轴方向拉伸变形,可以附着于规则或不规则的物体表面工作,该柔性纳米发电机可以实现拉伸、弯折、扭转等复杂形变,并可承受极大机械形变和损坏,将其附着在规则或不规则的物体上,与其他物体接触摩擦和感应所产生的能量转换为电能输出,包含其的柔性传感器应用于可穿戴领域,柔性机器人可以通过从柔性传感器产生的电信号来感测自身的运动、工作状态、环境和外部刺激。
Description
本发明涉及发电机领域,尤其涉及一种可变形柔性纳米发电机、其制备方法、传感器及机器人。
自2012年至今,基于静电感应摩擦效应的纳米发电机***被广泛地研究和发展,已逐步发展出了一些高效稳定成熟的器件和技术,为新型能量来源提供了一种新的思维和导向。但是由于该种发电机需要与其他材料接触或摩擦来工作,而目前摩擦纳米发电机的器件主要为刚性结构,不可随意弯曲、拉伸或变形。这一特点不可避免地对纳米发电机的应用造成了较大的局限,使其无法广泛实施于不规则的物体之上或可穿戴领域等。
具有特殊变形能力,如有弹性、易折叠、可拉抻的电子元器件一直以来都受到学术界和工业界研究人员的极大关注,并被认为是未来的下一代电子器件。这种可变形的电子器件在应用的时候有很大的自由度,因此可以在智能设备和传感器领域具有更广泛的应用。如可拉抻电子器件可以比较均匀地覆盖在不规则的、软的、不固定物体甚至器官上,在可穿戴电子、生物可移植***、个人安全、机器人人机对接和电子皮肤等领域有着广泛的应用前途。虽然之前有很多有变形能力的电子器件被广泛地制备和研究,但可靠的输出电源依然是目前最关键和重要的问题之一。
最近摩擦纳米发电机(TENG)已经成功展示了可以将无处不在的机械能转化成电能的功效。曾经报道过用蜿蜒电极阵列和波浪结构聚酰亚胺薄膜制作的可作一定程度弯曲及拉抻的TENG。然而该种TENG由刚性材料制备而成,限制了其拉抻特性,并且不能多次折叠或进行复杂的形变,这将严重影响新型可穿戴领域能源材料的发展和研究。除此之外,在实际应用中,该种纳米发电机与柔性可变形器件连接在一块,由于杨氏模量不匹配,刚性材料和柔性材料的连接处存在着粘合不稳定的问题。
发明内容
(一)要解决的技术问题
针对上述问题,本发明提供了一种可变形柔性纳米发电机、其制备方
法、传感器及机器人,使得该柔性纳米发电机可以实现拉抻、弯折、扭转等复杂形变,并可承受极大机械形变和损坏,将其附着在规则或不规则的物体上,与其他物体接触摩擦和感应所产生的能量转换为电能输出。
(二)技术方案
根据本发明的一个方面,本发明公开了一种可变形柔性纳米发电机,包括柔性封装结构和嵌入在柔性封装结构中的电极,其中,电极为由纳米导电材料聚集形成的图案电极;柔性封装结构采用可拉伸的弹性封装材料制备。
优选的,电极连接至地、等电位或外部的导电体,物体与该柔性封装结构接触分离过程中,在该电极与地或等电位之间有电荷流动。
优选的,所述外部的导电体为人体或者铜电极。
优选的,可变形柔性纳米发电机包括多个所述电极。
优选的,多个所述电极分别连接至地、等电位或外部的导电体。
优选的,所述多个电极阵列式分布。
优选的,所述纳米导电材料包括纳米碳管、碳渣、金属纳米线或金属颗粒或金属碎片。
优选的,所述纳米导电材料为银纳米线,所述银纳米线的直径为100nm-10μm,长度为20-50μm。
优选的,所述柔性封装结构的材料包括硅橡胶、硅胶、橡胶、聚二甲基硅氧烷、环氧树酯或Eco-flex。
优选的,所述柔性纳米发电机的厚度为500nm-1cm。
优选的,通过在所述图案电极上浇筑弹性封装材料的方式将所述电极嵌入所述封装结构。
根据本发明的另一个方面,提供了一种柔性传感器,包括上述任一项所述的纳米发电机。
优选的,所述可变形柔性纳米发电机附着于规则或不规则的物体表面工作。
根据本发明的又一个方面,还提供了一种可变形柔性纳米发电机的制备方法,包括步骤:
A0,将由纳米导电材料配成的溶液浇注入绘制好的电极图案模具中,
干燥后得到纳米导电材料的图案电极;
A1,将由柔性封装结构的材料配制成的凝胶浇注封装于所述纳米导电材料的图案电极上,并固化。
优选的,所述步骤A1包括:
将所述由柔性封装材料配制成的凝胶浇注于所述纳米导电材料的图案电极的一面,使得所述纳米导电材料的图案电极嵌入所述柔性封装材料中,固化;将所述纳米导电材料电极的一端用导线连接至地、等电位或外部的导电体;以及
将所述由柔性封装材料配制成的凝胶浇注于所述纳米导电材料的图案电极的另一面,使得所述纳米导电材料的图案电极被封装于所述柔性封装材料中,固化后得到所述可变形柔性纳米发电机。
优选的,所述柔性封装材料配制成的凝胶包括:将Eco-flex的A、B两种溶液以1∶1的体积比混合均匀得到柔性封装结构材料凝胶。
优选的,所述纳米导电材料包括碳纳米碳管、碳渣、金属纳米线、金属颗粒或金属碎片。
优选的,所述柔性封装材料包括硅橡胶、硅胶、橡胶、聚二甲基硅氧烷、环氧树酯或Eco-flex。
优选的,一面的柔性封装材料的厚度为400nm-2mm;固化后得到所述柔性纳米发电机的厚度为500nm-1cm。
根据本发明的再一个方面,本发明还提供了一种自主感知的柔性机器人,包括:机器人部件;柔性传感器,附着在所述机器人部件上;其中所述柔性传感器包括柔性封装结构和嵌入在柔性封装结构中的电极,其中,所述电极连接至地、等电位或外部的导电体。
优选的,在所述柔性封装结构的表面上还设置有具有图案的柔性微结构修饰层。
优选的,所述柔性微结构修饰层的表面为:金字塔形状微结构单元形成的阵列,或者纳米线团簇组成的微结构单元形成的阵列,或者梯形台形状微结构单元形成的阵列。
优选的,所述阵列中微结构单元的尺寸范围在微米级至毫米级;和/或阵列中微结构单元在垂直微结构修饰层表面的方向上的高度范围在微
米级至毫米级。
优选的,该自主感知的柔性机器人还包括信号发生部件,所述信号发生部件与柔性传感器连接,将所述柔性传感器的电信号转变为其他信号;优选的,所述信号发生部件为LED灯。
优选的,所述机器人部件为包括多个气动室的爬行机器人部件。
优选的,所述柔性传感器设置在爬行机器人部件的腹部或背部。
优选的,一个所述柔性传感器设置在爬行机器人部件第一段气动室对应位置的腹部。
该自主感知的柔性机器人在脉搏感测中的应用。
该自主感知的柔性机器人在触摸传感中的应用,其中,所述柔性传感器设置在爬行机器人部件的背部。
优选的,所述机器人部件为机器人抓爪,所述柔性的传感器设置在机器人抓爪的两个指状物上。
优选的,所述机器人部件为机器手指,柔性传感器设置在机器手指上。
该自主感知的柔性机器人在湿度或温度传感中的应用。
(三)有益效果
从以上技术方案可以看出,本发明提供的可变形柔性纳米发电机、其制备方法、传感器及机器人,具有下列有益效果:
通过采用纳米导电材料聚集形成电极、采用可拉伸的弹性材料制作柔性封装结构,使得可变形柔性纳米发电机本身具有全柔性和可拉抻性,可以在双轴方向伸缩并适应各种形状物体,能够实现拉抻、弯折、扭转、折叠等复杂形变,并可附着在规则或不规则的物体上,甚至可承受极大机械形变和损坏,性能稳定、持久耐用;尤其在可穿戴领域,可以附着在任何形状物体的表面,与其他物体感应,接触和摩擦而产生电能,应用范围广;柔性机器人能够通过从柔性传感器自身产生的电信号来感测自身的运动、工作状态、环境和外部刺激,实现自主感知。
图1为本发明提供的可变形柔性纳米发电机的结构示意图。
图2为本发明提供的可变形柔性纳米发电机中包括多个电极的结构示意图。
图3为制备本发明提供的可变形柔性纳米发电机的流程示意图。
图4A为可变形柔性纳米发电机在长轴方向发生变形时的电流输出示意图。
图4B为可变形柔性纳米发电机在短轴方向发生变形时的电流输出示意图。
图5为可变形柔性纳米发电机在发生扭转变形时的电流输出示意图。
图6为可变形柔性纳米发电机在发生折叠变形时的电流输出示意图。
图7为可变形柔性纳米发电机在发生剪切损坏时或同时进行剪切损坏与拉伸应变时的电流输出示意图。
图8为本发明自主感知的柔性机器人第一实施例的结构示意图。
图9为本发明自主感知的柔性机器人第二实施例的结构示意图。
图10和图16为本发明自主感知的柔性机器人第三实施例的结构示意图。
图11-图13为第三实施例的柔性传感器测试结果。
图14为本发明自主感知的柔性机器人第四实施例的结构示意图。
图15为第四实施例的柔性传感器测试结果。
图17为本发明自主感知的柔性机器人第五实施例的结构示意图。
图18为第五实施例的柔性传感器测试结果。
【符号说明】
1-封装结构; 2,201,202,……,209-电极;
3-地/等电位/外部的导电体; 4-电流记录或传感器件;
10-机器人部件; 20-柔性封装结构;
30-电极; 40-金属导体;
50-地、等电位或外部的导电体; 60-微结构修饰层;
70-物体; 80-婴儿裤子;
11-爬行机器人部件; 21,22,23,24-柔性传感器;
12,13-机器人部件; 14-机器手指。
本发明提供了一种可变形柔性纳米发电机、其制备方法及传感器,通过采用纳米导电材料聚集形成电极、采用可拉伸的弹性材料制作柔性封装
结构,使得可变形柔性纳米发电机本身具有全柔性和可拉抻性,可以在双轴方向伸缩并适应各种形状物体,能够实现拉抻、弯折、扭转等复杂形变,并可附着在规则或不规则的物体上,甚至可承受极大机械形变和损坏,性能稳定、持久耐用。
为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明进一步详细说明。
需要说明的是,在附图或说明书描述中,相似或相同的部分都使用相同的图号。且在附图中,实施例的形状或是厚度可扩大,并以简化或是方便标示。再者,附图中未绘示或描述的元件或实现方式,为所属技术领域中普通技术人员所知的形式。另外,虽然本文可提供包含特定值的参数的示范,但应了解,参数无需确切等于相应的值,而是可在可接受的误差容限或设计约束内近似于相应的值。
本发明通过多次研究试验,发明了一种可变形柔性纳米发电机、其制备方法及制成的传感器。可变形柔性纳米发电机的典型结构参见图1,包括柔性封装结构1和嵌入在柔性封装结构1中的电极2,其中,电极2为由纳米导电材料聚集形成的图案电极;柔性封装结构1采用可拉伸的弹性封装材料制备。
由于电极采用纳米导电材料聚集形成、柔性封装结构采用可拉伸的弹性材料,使得可变形柔性纳米发电机本身具有全柔性和可拉抻性,可以在双轴方向伸缩并适应各种形状物体,尤其在可穿戴领域,可以附着于任何形状物体的表面,与其他物体感应,接触和摩擦而产生电能。
可以将电极2连接至地、等电位或外部的导电体3,其他物体与柔性封装结构1接触分离过程中,在所述电极与地或等电位之间有电荷流动。可变形柔性纳米发电机的发电机原理为单电极模式,即纳米发电机外部的其他物体与封装结构1的材料表面摩擦感应,在封装结构1表面产生电荷,使得内部的电极2感应产生相反的电荷,在电极2与地3之间可以通过整流部件进行定向移动,形成电流输出,实现发电。
外部的导电体可以为人体或者铜电极,可以将本发明的柔性纳米发电机贴附在人体关节等可运动部位,收集人体运动的能量转变为电能。
本发明中柔性纳米发电机的电极的纳米导电材料可为银纳米线、碳纳
米管、碳渣、金属纳米线、金属颗粒或金属碎片等;柔性封装结构的材料可以是硅橡胶、硅胶、橡胶、聚二甲基硅氧烷、环氧树酯或Eco-flex。
通过在所述图案电极上浇筑弹性封装材料的方式将电极2嵌入封装结构1,以保证二者的结合性比较好,不会发生电极的脱落等问题。
本发明的可变形柔性纳米发电机可以作为柔性传感器,其附着于规则或不规则的物体表面工作,用于传感物体是否被接触等情况。
具体地,本发明提供的可变形柔性纳米发电机的制备方法,包括了步骤:A0、将由纳米导电材料配成的溶液浇注入绘制好的电极图案模具中,干燥后得到纳米导电材料图案电极;A1、将由柔性封装材料配制成的凝胶浇注封装于所述纳米导电材料图案电极上,并固化。
上述方法中,所述柔性封装材料配制成的凝胶包括:将Eco-flex的A、B两种溶液以1∶1的体积比混合均匀得到柔性封装材料凝胶。
需要说明的是,Eco-flex是美国SMOOTH ON公司的一个产品的系列。A、B两种溶液是ECO FLEX产品的AB混合材料,混合后可以形成硅橡胶。
上述方法中,所述纳米导电材料可以是银纳米线、碳纳米管、碳渣或金属纳米线、金属颗粒或金属碎片等。所述柔性封装材料可以是柔性可拉伸的材料,例如硅橡胶、硅胶、橡胶、聚二甲基硅氧烷、环氧树酯或Eco-flex等。
进一步地,所述A1具体包括:将所述由柔性封装结构材料配制成的凝胶浇注于所述纳米导电材料聚集形成图案电极的一面,使得所述纳米导电材料的图案电极嵌入所述柔性封装结构材料中;固化后所述柔性封装材料的厚度为400nm-2mm;将所述纳米导电材料的图案电极的一端用银胶连接铜电极;将所述由柔性封装材料配制成的凝胶浇注于所述纳米导电材料的图案电极的另一面,使得所述纳米导电材料的图案电极被封装于所述柔性封装材料中;固化后得到的所述柔性纳米发电机的厚度为500nm-1cm。
本发明所提供的可变形柔性纳米发电机最突出的优点是发电器件具有全柔性,发电机的所有部分均可进行变形或拉伸。
因为银纳米线等纳米导电材料具有高电导率、可拉抻性、低功耗和易
制备等优点,我们选用银纳米线等材料作为导电媒介。银纳米线等纳米导电材料层叠在一起,交错相连在一起形成导电网络,银纳米线等纳米导电材料一维材料互相交联主要靠渗透网络的方式来实现,这种方法可以使在不影响导电性的情况下很快适应各种应力和形变。
本发明中的另外一种关键材料是选用柔软且坚韧的硅橡胶材料等柔性封装结构的材料,其作为电介质材料并且用来密封纳米导电材料。硅橡胶等材料具有强大的可拉抻性和抗断裂能力,这样在柔性封装结构的材料中封装纳米导电材料一维材料就制备出了可拉伸的柔性纳米发电机器件,其可以随不同附着物体的形状而进行变化或拉抻,并可在两个方向上同时受力形变的情况下正常工作,最高形变量可达300%。而且其拉断限度也大大提高。而目前纳米发电机最常见使用的柔性材料拉伸特性较差并且强度不高,受到应力后容易断裂。
本发明所提供的可变形柔性纳米发电机的第二个优势是器件具有损坏容忍性,与其他刚性纳米发电器件不同,当本纳米发电机因受外界应力而使器件本身部分甚至大部分受到损坏时,只要电极有少部分的连接,器件依然可以正常工作,继续为其他设备提供能源,这大大提高了其应用价值和潜力。
在原材料和制备流程方面,本发明采用的硅橡胶等柔性封装材料成本低廉,制作流程简单,只需要在室温下通过溶解方法制备,操作简单,对制作环境要求较低,使生产成本大降低,在适于批量生产。
总之,本发明的可变形柔性纳米发电机同时具有机械耐用和弹性的特征,其具有超高的双轴拉抻特性和在不同极端形变的条件下产生能源的能力。这种新型的纳米发电机可以被应用和适应于各种不规则的物体上,如人类皮肤,球形,管形和不规则形状等等,并且同时被用做能量源为其他电子器件供能。由于柔性纳米发电机自身具有可拉抻性和耐用性,使其可以在不同形变条件下通过拍打和接触发电。同时其双轴可拉伸超过300%,甚至在遭受损坏的极端情况下,器件依然可以正常工作,为负载提供能量。
此外,目前的原型器件已经被展示出可以驱动一个商用的智能手表,同时在不需要外界能源支持下实现了自供电电子皮肤阵列探测功能。
上述实施例中,可变形柔性纳米发电机只包括一个电极,在其他实施
例中该可变形柔性纳米发电机也可以包括多个电极,参见图2,多个电极可以分别连接至地、等电位或外部的导电体,也可以每个电极通过整流器件后连接至同一个地电位。
在用作传感器时,多个电极201、202......209等分别连接至地、等电位或外部的导电体,多个电极201、202......209等可以按照阵列方式分布。可以在电极201与地电位3之间连接一个电流记录或传感器件4,当电极201位置被触摸或者敲击时会输出一个电信号,电流记录或传感器件4可以用于记录或传感器件记录电极201与地电位3之间的电流。如果在每个电极与地电位3之间均连接电流记录或传感器件4,不同电极位置被触摸或者敲击,可以根据电流记录或传感器件4的工作情况知道被触摸的位置,作为传感器以感知不同位置的触控情况,实现多区域的传感,在未来的实际应用中将可以制作成为机器人的皮肤来感知外界的力。
下面以一个具体实施例来说明本发明的技术方案。
需要说明的,该实施例仅用于理解本发明,并不用于限制本发明的保护范围。并且,实施例中的特征,在无特别注明的情况下,均同时适用于方法实施例和装置实施例,在相同或不同实施例中出现的技术特征在不相互冲突的情况下可以组合使用。
本发明中柔性纳米发电机的电极的纳米导电材料可为银纳米线、碳纳米管、碳渣、金属纳米线、金属颗粒或金属碎片等;柔性封装结构的材料可以是硅橡胶、硅胶、橡胶、聚二甲基硅氧烷、环氧树酯或Eco-flex。因每类的性能较相近,因而本实施例仅各自取一种材料加以说明,不进行一一列举。
制备的流程示意图如图3所示。
银纳米线来自Sigma-Aldrich公司,直径约115nm(可选范围100nm-10μm),长度20-50μm,配制浓度为0.05wt%。以丙烯酸板为衬底,首先清洁其表面并绘制所需电极图案,然后用聚酰亚胺胶带将所绘制的电极图案进行处理得到电极模板。接下来,将配制好的银纳米线溶液滴入模板中,当其在室温完全干燥后,移除聚酰亚胺胶带,得到银纳米线图案电极。
需要说明的是,配置银纳米线溶液浓度没有特别的限定,在实施例给出的浓度只是为了让纳米线不会聚集,但浓度低或高,只会影响制作的时
间,浓度高,制作快;浓度低,则制作慢。浓度低一点,比较节约材料,也会比较均匀而已。
随后配制硅橡胶凝胶,硅橡胶来自Smooth-On公司,型号Eco-flex00-10。将A、B两种溶液以1∶1的体积比充分混合,然后将混合凝胶浇注在带有银纳米线电极图案的丙烯酸板上,厚度约为2mm(可选范围400nm-2mm)。室温下硅橡胶凝胶会在4小时后完全固化,然后将硅橡胶从丙烯酸板上剥离,银纳米线电极图案已经嵌入到硅橡胶中。然后在银纳米线图案末端通过铜导线连接至地电极,用银胶将两者相连。待测试联通后,再次用硅橡胶凝胶将银纳米线电极封装,封装后厚度大约4mm左右(可选范围500nm-1cm),形成在硅橡胶中嵌入银纳米线图案电极的三明治结构。在室温下再次固化4小时后,得到所需的可变形柔性纳米发电机。
工作机理主要基于静电感应和摩擦起电,当皮肤与硅橡胶接触时,由于皮肤和硅橡胶的电子亲和能不同,当二者相接触时电子将会从皮肤流向硅橡胶,当二者分离时在硅橡胶表面的负电荷将会在中间的银纳米线图案电极夹层上感应出正电荷,使电子从银纳米线电极夹层向接地方向流动,该静电感应过程可以给外部负载提供电压/电流信号的输出。当增加皮肤与硅橡胶之间的距离时,硅橡胶表面的负摩擦电荷全部被银纳米线电极的正电荷所屏蔽,这时没有任何信号输出。当皮肤与硅橡胶的距离重新减少到完全接触的过程,银纳米线电极中的感应正电荷将会减少,这时电子的流动方向是从地到银纳米线电极,再次形成一个反向的电压/电流信号输出。
形成的纳米发电机器件具有良好的拉伸特性,可以在极端机械变形的情况下正常工作,如拉伸、折叠,同时即使在器件发生大面积损坏的情况下其依然可以正常工作,输入不会有明显的变化,甚至在拉抻的时候器件输出还会变大,如图4A、4B所示,器件在双轴方向最大的拉伸应变均可以达300%,或者如图5所示可进行不同角度的扭转,或如图6所示可进行多次折叠,再或如图7进行剪切损坏或剪切损坏并拉伸应变后仍能输出较强的电信号,电流密度可达毫安每立方米。
本发明还提出了一种将上述可变形柔性纳米发电机用作柔性传感器,置于柔性机器人的部件中,实现柔性机器人的自主感知。
下面结合具体实施例介绍自主感知的柔性机器人。
实施例一:
图8为本实施例自主感知的柔性机器人的典型结构示意图,如图8所示,自主感知的柔性机器人包括机器人部件10,以及附着在机器人部件10上的柔性传感器,其中,机器人部件10可以在驱动装置的驱动下进行各种动作,如移动、夹取物体、爬行等;柔性传感器包括柔性封装结构20和嵌入在柔性封装结构20中的电极30,其中,电极30可以连接至地、等电位或外部的导电体50,在机器人部件10动作的带动下当柔性封装结构20与其他物体接触分离或者挤压过程中,由于摩擦起电和静电感应作用,在电极30与地或等电位之间有电荷流动,不同的动作能够产生不同的电信号。因此,产生的电信号可以作为柔性机器人自主感知的信号,不需要为传感器提供电源,是一种自主感知的柔性机器人。
优选的,电极30可以连接至设置在机器人部件10上的导电体上。
电极30可以为任意导电材料,为了使柔性摩擦电传感器具有更好的柔性和可靠性,电极30可以为由纳米导电材料聚集形成的电极,电极的形状和尺寸可以根据需要的图形设计,这里不做特别的限定。
柔性封装结构20采用可拉伸的弹性封装材料,使得柔性摩擦电传感器本身具有全柔性和可拉抻性,可以在双轴方向伸缩,能够适应各种机器人部件导电动作紧密贴合在机器人部件的任何形状的表面上,与其他物体感应、接触和摩擦而产生电信号,反馈给机器人部件的控制***。
电极30的纳米导电材料可为银纳米线、碳纳米管、碳渣、金属纳米线、金属颗粒或金属碎片等;柔性封装结构10的材料可以是硅橡胶、硅胶、橡胶、聚二甲基硅氧烷、环氧树酯或Eco-flex等有机物绝缘材料。
对于电极30采用纳米导电材料的情况,可以通过伸出柔性封装结构10的金属导体40连接至地50。
该柔性传感器的制备方法为:将由纳米导电材料配成的溶液浇注入绘制好的电极图案模具中,干燥后得到纳米导电材料图案电极;将由柔性封装材料配制成的凝胶浇注封装于所述纳米导电材料图案电极上,并固化。
实施例二:
本实施例中,自主感知的柔性机器人的典型结构示意图见图9所示,与实施例一中的自主感知的柔性机器人的区别在于:柔性摩擦电传感器的
结构除了包括柔性封装结构20和嵌入在柔性封装结构20中的电极30之外,在柔性封装结构20的表面上还设置有具有图案的柔性微结构修饰层60。该微结构修饰层60可以在柔性摩擦电传感器受到压力或者被触摸时可以变形,由于摩擦起电和静电感应作用,在电极30上感应的电荷会变化,可以对压力或者触摸进行传感。
微结构修饰层60的材料采用柔性可变形的绝缘材料,优选有机物绝缘体材料,可以是硅橡胶、硅胶、橡胶、聚二甲基硅氧烷、环氧树酯或Eco-flex等有机物绝缘材料。微结构修饰层60的材料可以与柔性封装结构20的材料相同也可以不同,可以与柔性封装结构20为一体成型形成的结构,也可以为在柔性封装结构20表面贴附微结构修饰层60。如图9所示,微结构修饰层60的表面可以为金字塔形状微结构单元形成的阵列,或者纳米线团簇组成的微结构单元形成的阵列,或者梯形台形状微结构单元形成的阵列。阵列中微结构单元的尺寸范围在微米级至毫米级,例如50微米至500微米;阵列中微结构单元在垂直微结构修饰层50表面的方向上的高度范围在微米级至毫米级,例如50微米至500微米。
具有金字塔状三角微棱镜表面的柔性器件即使在拉伸至100%应变时也具有优异的低压力(<5kPa)的压力灵敏度。
以一个具体例子介绍柔性传感器的制备过程。使用激光切割机在丙烯酸板上制造金字塔形状阵列的模具。将Eco-flex 00-30(来自Smooth-On公司,型号Ecoflex 00-30)硅橡胶溶液以重量比为1∶1的A部分和B部分溶液混合,将混合溶液倒入上述模具中。4小时后,顶层具有三棱状金字塔单元结构的阵列的硅橡胶膜被固化并剥离,获得微结构修饰层60。将混合的硅橡胶溶液倒在丙烯酸板上,该丙烯酸板用银碎片(尺寸约10μm,純度≥99.9%)预滴涂并具有边界。固化后,将膜剥离,获得将银碎片嵌入硅橡胶中的条状薄片,然后将导电铜带连接并嵌入条状薄片的基质上,与银碎片连接。将上面获得的两片硅橡胶薄膜用硅橡胶溶液粘贴,形成图9所示结构的柔性传感器。
实施例三:
本实施例中,提供一种自主感知的柔性机器人,其中,机器人部件如图10所示,为一个包括3个气动室的3段式爬行机器人部件11,该爬行
机器人部件优选为柔性结构,可以在任意表面爬行,爬行机器人可以可控移动,特别是可以移动到危险的地方,例如气动机器人可以在物体70表面爬行。柔性机器人可以包括1个或者多个柔性传感器21,柔性传感器设置在爬行机器人部件11的腹部(在物体7表面上爬行的一侧)或者背部。
本实施例中爬行机器人部件11为3个气动室的三段式结构,具体包括几个气动室不应限制本发明的保护范围,在其他实施例中也可以为更多段的结构。
制造爬行机器人部件的过程可以参考(Elastomeric Origami:Programmable Paper-Elastomer Composites as Pneumatic Actuators,Adv.Funct.Mater.2012,22,1376-1384),模具包括三个部分:1、底层;2、气动室;3、整合模具。对于底层,在形成的1/16英寸厚的Eco-flex 00-30硅橡胶膜中嵌入一张纸。气动室通过在相关模具中固化的Eco-flex 00-30获得。将Eco-flex气动室粘附到底层组装。之后,将气动室倒置在较大的一体化模具中。将混合的Eco-flex 00-30倒入一体化模具中,并与实施例二中预制的可变形柔性传感器组装。四小时后硅橡胶固化,具有爬行能力的柔性机器人整体形成。
图10中柔性机器人仅在爬行机器人部件11的最左端第一段气动室对应位置的腹部设置1个柔性传感器,随着爬行机器人从左侧至右侧逐端拱起回落地爬行,在电极和地之间的输出电信号,图11显示爬行机器人部件11移动约15厘米的距离后产生的步态电信号(Normalized V)输出,显示产生的电势波的几个周期。电信号曲线的每个时期都相应于一起伏的步态。图12示出了一段波动步态的详细电信号(Normalized V)输出。
从图11和图12可以看出,输出随着每个气动机器人部件的气动执行机构的动作而改变。当最左侧的第一段启动膨胀弯曲时,电位处于最低状态。这个结果归因于第一段弯曲导致柔性传感器和物体70表面之间的分离。当第一段被放气并靠近物体70时,产生的电压升高。当第一段接触物体70时,输出达到高电压状态。当第三段膨胀时,电势达到最高值。这个结果归因于在第三段充气膨胀期间在第一段上的柔性传感器上施加更多的力。潜力,放气第三段,并使第二段膨胀,电势略有下降。第三段完全放空、第二端膨胀时,产生的电势再次微升。当第一段重新充气膨胀
时,电位再次下降到最低值。这些结果表明,有意识的气动机器人部件可以主动地感知它的爬行状态。
可以爬行的气动机器人部件的柔软的身体使其能够自适应地将自身与规则或不规则的物体表面相连,用于感测,提供更安全的使用方式。为了证明这种能力,能够爬行的气动机器人部件被控制为爬行不规则的表面,并并爬行至人的手腕,触摸人的手腕并感知脉搏,以主动感测轻微的人类生理信号。图13为柔性传感器检测到的人类手腕的脉搏信号,说明了自主感知意识的柔性机器人在原位医疗触诊和其他医疗用途中的应用潜力。
柔性传感器的工作机理主要基于与其他材料接触时,接触摩擦带电和静电感应的作用,由于皮肤和硅橡胶的电子亲和能不同,当二者相接触时电子将会从皮肤流向硅橡胶。在硅橡胶表面的负电荷将会在中间的银纳米线电极夹层上感应出正电荷,使电子从银纳米线电极夹层向接地方向流动。静电感应过程可以给外部负载提供电压/电流信号的输出。当增加皮肤与硅橡胶之间的距离的时候,硅橡胶表面的负摩擦电荷全部被银纳米线网络的正电荷所屏蔽,这时没有任何信号输出。当皮肤与硅橡胶的距离重新减少到完全解除的过程,银纳米线网络中的感应正电荷将会减少,这时电子的流动方向是从地到银纳米线,再次形成一个反向的电压/电流信号输出。
柔性机器人还可以包括信号发生部件,该信号发生部件可以与柔性传感器连接,例如信号发生部件可以为LED等发光或者发声等器件,可以将柔性传感器的电信号转变为光、声等其他信号,与人或者机器进行交互。如图16中所示,通过在多个区域集成柔性传感器,在机器人部件12动作如爬行时主动进行多重感测,还可以与人交互,可以作为一种综合机器人爬行器。机器人部件12由三个气动室部分构成,并且每个气动室背部与柔性传感器集成。三个柔性传感器22作为活动皮肤,不仅可以感知所帖附机器人部件的运动(类似肌肉运动),而且还可以作为自主人机交互界面,当一个手指触及变形的柔性摩擦电机器人时,可以产生电能,该电能的电力可以点亮LED并提供人类可见的响应,实现与外界的交互。图11显示由机器人运动产生的电力驱动的LED。以上结果表明,使用自发电的柔性摩擦电传感器能使柔性机器人能够通过光信号瞬时与人通信,而无需外部电源。
实施例四:
参见图14,自主感知的柔性机器人,其中,机器人部件13为一个有意识的机器人抓爪,柔性传感器23被整体地集成在机器人抓爪的两个指状物上。以柔性机器人抓住并抬高一个婴儿玩偶的手为例,图15示出了使用带有柔性有源传感器的夹具用于握住并摇动婴儿玩偶的手并测试其输出,最初,左右传感器(Left sensor和Right sensor)都处于低电压状态(initial)。随着机器人接近物体(approach),两个传感器产生的电压开始上升。直到接触并压缩了物体,这两个电位达到最大值。当机器人抓爪上下方向抓住手臂时,两个输出略微下降并保持在较低的电压。输出略有下降可归因于部分电位从静电场到桌面的贡献。当手臂从机器人抓爪中突然掉落时(release and leave),响应进一步降低。当发生这种情况时,两个传感器的输出在一瞬间大幅下降到最低水平。图中结果表明,当机器人抓爪抓住手时,产生的电压稍微降低。机器人抓爪握手时,产生的电势相应地反应了动作。机器人抓爪松开手后,输出恢复到基线值。结果表明,不同的电势使有意识的机器人抓爪能够感受抓住物体的不同动作,并意识到脱落事故。
实施例五:
柔性摩擦电传感器在被触摸或者挤压时,环境温度、湿度等对其输出信号有影响,因此,本实施例提供一种可以应用在温度或者湿度传感中的柔性机器人,可以应用在护理机器人等领域,能够有意识的检测婴儿裤子是否湿了。
图17为本实施例自主感知的柔性机器人,其中,机器人部件为机器手指14,柔性传感器24设置在机器手指14上,机器人手指14可以在机器人的驱动下移动进行触摸或者翻动的动作,当柔性机器人触摸婴儿裤子80,在干湿两个条件下进行了测试裤子的情况。图18显示了两种状态的生成电势,较高和较低的电势分别表示干燥(Dry)和潮湿(Wet)的裤子,降低的电势归因于湿裤子上的水分子降低了软机器人中柔性摩擦电传感器的摩擦电荷。
综上所述,本发明提供了一种可变形柔性纳米发电机,包括柔性封装结构和嵌入在柔性封装结构中的电极,其中,电极为由纳米导电材料聚集
形成的图案电极;柔性封装结构采用可拉伸的弹性封装材料制备。本发明还提供了该可变形柔性纳米发电机的制备方法以及含有该可变形柔性纳米发电机的传感器;另外将上述可变形柔性纳米发电机用作柔性传感器,置于柔性机器人的部件中,实现柔性机器人的自主感知。通过采用纳米导电材料聚集形成电极、采用可拉伸的弹性材料制作柔性封装结构,使得可变形柔性纳米发电机本身具有全柔性和可拉抻性,可以在双轴方向伸缩并适应各种形状物体,能够实现拉抻、弯折、扭转、折叠等复杂形变,并可附着在规则或不规则的物体上,甚至可承受极大机械形变和损坏,性能稳定、持久耐用;尤其在可穿戴领域,可以附着在任何形状物体的表面,与其他物体感应,接触和摩擦而产生电能,应用范围广,比如,柔性机器人能够通过从柔性传感器自身产生的电信号来感测自身的运动、工作状态、环境和外部刺激,实现自主感知。
以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。
Claims (32)
- 一种可变形柔性纳米发电机,其特征在于,包括柔性封装结构和嵌入在柔性封装结构中的电极,其中,所述电极为由纳米导电材料聚集形成的图案电极;所述柔性封装结构采用可拉伸的弹性封装材料。
- 根据权利要求1所述的可变形柔性纳米发电机,其特征在于,该可变形柔性纳米发电机包括多个所述电极。
- 根据权利要求1或2所述的可变形柔性纳米发电机,其特征在于,所述电极连接至地、等电位或外部的导电体,物体与所述柔性封装结构接触分离过程中,在所述电极与地或等电位之间有电荷流动。
- 根据权利要求3所述的可变形柔性纳米发电机,其特征在于,所述外部的导电体为人体或者铜电极。
- 根据权利要求2至4任一项所述的可变形柔性纳米发电机,其特征在于,所述多个电极阵列式分布。
- 根据权利要求1至5任一项所述的可变形柔性纳米发电机,其特征在于,所述纳米导电材料包括:纳米碳管、碳渣、金属纳米线、金属颗粒或金属碎片。
- 根据权利要求1至6任一项所述的可变形柔性纳米发电机,其特征在于,所述纳米导电材料为银纳米线,所述银纳米线的直径为100nm-10μm,长度为20-50μm。
- 根据权利要求1至7任一项所述的可变形柔性纳米发电机,其特征在于,所述柔性封装结构的材料包括:硅橡胶、硅胶、橡胶、聚二甲基硅氧烷、环氧树酯或Eco-flex。
- 根据权利要求1至8任一项所述的可变形柔性纳米发电机,其特征在于,所述可变形柔性纳米发电机的厚度为500nm-1cm。
- 根据权利要求1至9任一项所述的可变形柔性纳米发电机,其特征在于,通过在所述图案电极上浇筑弹性封装材料的方式将所述电极嵌入所述封装结构。
- 一种柔性传感器,其特征在于,包括权利要求1至10任一项所 述的可变形柔性纳米发电机。
- 根据权利要求11所述的柔性传感器,其特征在于,所述可变形柔性纳米发电机附着于规则或不规则的物体表面工作。
- 一种可变形柔性纳米发电机的制备方法,包括步骤:A0,将由纳米导电材料配成的溶液浇注入绘制好的电极图案模具中,干燥后得到纳米导电材料的图案电极;以及A1,将由柔性封装结构的材料配制成的凝胶浇注封装于所述纳米导电材料的图案电极上,并固化。
- 根据权利要求13所述的制备方法,其特征在于,所述步骤A1包括:将所述由柔性封装材料配制成的凝胶浇注于所述纳米导电材料的图案电极的一面,使得所述纳米导电材料的图案电极嵌入所述柔性封装材料中,固化;将所述纳米导电材料电极的一端用导线连接至地、等电位或外部的导电体;以及将所述由柔性封装材料配制成的凝胶浇注于所述纳米导电材料的图案电极的另一面,使得所述纳米导电材料的图案电极被封装于所述柔性封装材料中,固化后得到所述可变形柔性纳米发电机。
- 根据权利要求14所述的制备方法,其特征在于,所述由柔性封装材料配制成凝胶包括:将Eco-flex的A、B两种溶液以1∶1的体积比混合均匀得到柔性封装结构材料凝胶。
- 根据权利要求14所述的制备方法,其特征在于,所述纳米导电材料包括:碳纳米碳管、碳渣、金属纳米线、金属颗粒或金属碎片。
- 根据权利要求14所述的制备方法,其特征在于,所述柔性封装材料包括:硅橡胶、硅胶、橡胶、聚二甲基硅氧烷、环氧树酯或Eco-flex。
- 根据权利要求14或15所述的方法,其特征在于,一面的柔性封装材料的厚度为400nm-2mm;固化后得到所述可变形柔性纳米发电机的厚度为500nm-1cm。
- 一种自主感知的柔性机器人,包括:机器人部件;以及权利要求11或12任一项所述的柔性传感器,附着在所述机器人部件 上;其中,所述电极连接至地、等电位或外部的导电体。
- 根据权利要求19所述的柔性机器人,其特征在于,在所述柔性封装结构的表面上还设置有具有图案的柔性微结构修饰层。
- 根据权利要求20所述的柔性机器人,其特征在于,所述柔性微结构修饰层的表面为:金字塔形状微结构单元形成的阵列,或者纳米线团簇组成的微结构单元形成的阵列,或者梯形台形状微结构单元形成的阵列。
- 根据权利要求21所述的柔性机器人,其特征在于,所述阵列中微结构单元的尺寸范围在微米级至毫米级;和/或阵列中微结构单元在垂直微结构修饰层表面的方向上的高度范围在微米级至毫米级。
- 根据权利要求19至22任一项所述的柔性机器人,其特征在于,该自主感知的柔性机器人还包括信号发生部件,所述信号发生部件与柔性传感器连接,将所述柔性传感器的电信号转变为其他信号。
- 根据权利要求23所述的柔性机器人,其特征在于,所述信号发生部件为LED灯。
- 根据权利要求19至24任一项所述的柔性机器人,其特征在于,所述机器人部件为包括多个气动室的爬行机器人部件。
- 根据权利要求25所述的柔性机器人,其特征在于,所述柔性传感器设置在爬行机器人部件的腹部或背部。
- 根据权利要求25所述的柔性机器人,其特征在于,一个所述柔性传感器设置在爬行机器人部件第一段气动室对应位置的腹部。
- 根据权利要求27所述的柔性机器人在脉搏感测中的应用。
- 根据权利要求26所述柔性机器人在触摸传感中的应用,其特征在于,所述柔性传感器设置在爬行机器人部件的背部。
- 根据权利要求19至24任一项所述的柔性机器人,其特征在于,所述机器人部件为机器人抓爪,所述柔性的传感器设置在机器人抓爪的两个指状物上。
- 根据权利要求19至24任一项所述的柔性机器人,其特征在于,所述机器人部件为机器手指,柔性传感器设置在机器手指上。
- 根据权利要求31所述的柔性机器人在湿度或温度传感中的应用。
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