WO2018040531A1 - 一种激光干涉仪的角度测量校准装置及*** - Google Patents

一种激光干涉仪的角度测量校准装置及*** Download PDF

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WO2018040531A1
WO2018040531A1 PCT/CN2017/075819 CN2017075819W WO2018040531A1 WO 2018040531 A1 WO2018040531 A1 WO 2018040531A1 CN 2017075819 W CN2017075819 W CN 2017075819W WO 2018040531 A1 WO2018040531 A1 WO 2018040531A1
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angle
turntable
laser interferometer
mirror
laser
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PCT/CN2017/075819
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English (en)
French (fr)
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张和君
潘子祥
刘龙为
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深圳市中图仪器股份有限公司
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Publication of WO2018040531A1 publication Critical patent/WO2018040531A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

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  • the present invention relates to an angle calibration apparatus, and more particularly to an angle measurement calibration apparatus for a laser interferometer, and to an angle measurement calibration system including an angle measurement calibration apparatus of the laser interferometer.
  • ⁇ arcsin( ⁇ /A)
  • the conical tip of the two corner cubes is the optical centerline of the angle mirror 3. This is difficult to achieve in actual operation. As shown in Fig.
  • the angle mirror 3 due to the inaccurate installation of the instrument, the angle mirror 3 has a skew angle ⁇ 0 at the beginning of the measurement, and the skew angle ⁇ 0 is called the initial zero error, if the angle of the laser interferometer software system is at this time
  • the angle mirror 3 rotates by ⁇ angle (in the 0' coordinate system), and the calculated angle is ⁇ 0 in the 0 coordinate system, and obviously ⁇ - ⁇ 0 is the measurement error caused by the initial zero error ⁇ 0 , As shown in Figure 3.
  • the angle mirror 3 It is very difficult to eliminate the initial zero error of the angle mirror 3 at the production site, usually by adjusting the angle mirror 3 so that the surface reflected light coincides with the incident light.
  • the surface of the angle mirror 3 is generally coated with an anti-reflection film, the reflected light is extremely weak.
  • a plane mirror may be attached to the surface of the angle mirror 3 so that the reflection surface and the angle mirror 3 are The optical center lines are parallel, and the direction of the angle mirror 3 is adjusted with reference to this surface.
  • the optical center line of the angle mirror 3 is difficult to determine in practice. It is difficult to determine the zero error by this method, and ideally, it will cause measurement errors of at least several seconds.
  • the final result of the compensation factor of the mirror constant has some errors.
  • the prior art has the following disadvantages: first, the calibration process is complicated, the data processing is troublesome, and the calibration precision is limited; second, the calibration calculation formula has errors, and the data processing error is large; third, the calibration system is designed. Standard angle, the size is difficult to ensure accuracy, due to mechanical tolerances, the pin or V-groove has a certain tolerance to ensure that the fixture can be embedded, but the angular error caused by this tolerance can not be ignored in the accurate measurement. The reference angle must also be measured multiple times to determine the average, and the accuracy is poor.
  • the present invention provides an angle measuring and calibrating apparatus for a laser interferometer, comprising: a laser head, an angle interference mirror, an angle mirror, a turntable upper disc, a turntable lower disc, and a turntable base, wherein the angle interferometer is disposed at the Between the laser head and the angle mirror, the angle mirror is disposed on the turntable upper disc, and the turntable upper disc is set
  • the turret base is provided with a groove
  • the turret lower plate is disposed on the turret base through a groove.
  • the turret base is provided with a connecting member, and the turret base is fixed to the external turret to be tested by a connecting member.
  • a further improvement of the invention is that the connector comprises a bolt hole and/or a screw hole.
  • a further improvement of the present invention is to further include a rotating shaft and a driving member, the rotating shaft is fixedly disposed below the upper disc of the turntable, and the driving member is coupled to the rotating shaft.
  • a further improvement of the invention is that the drive member is a motor.
  • a further improvement of the present invention is that the drive member is fixedly disposed inside the lower tray of the turntable.
  • a further improvement of the present invention is that it further includes an angle grating disposed below the rotating shaft.
  • a further improvement of the invention resides in that a control system is also included, the control system being coupled to the angular grating and the drive member, respectively.
  • a further improvement of the present invention is to further include a wireless signal receiving device that is disposed inside the lower tray of the turntable.
  • the present invention also provides an angle measurement calibration system for a laser interferometer, comprising an angle measurement calibration device for a laser interferometer as described above, and including a data processing device, the data processing device being in communication with the laser head.
  • the invention has the advantages that the structure is precise, the standard angle error is small, and the initial zero angle can be calibrated by actively generating a certain declination, and the declination can be actively generated by the angle grating and the driving member.
  • the generated angle is more accurate; on this basis, the initial zero error and the constant of the angle mirror can be simultaneously calibrated during the calibration process, which simplifies the calibration procedure of the laser interferometer and improves the calibration efficiency.
  • FIG. 1 is a schematic diagram of an angle measuring optical path of a laser interferometer in the prior art
  • FIG. 2 is a schematic diagram of an angle measuring principle of a laser interferometer in the prior art
  • FIG. 3 is a schematic diagram showing the principle of the initial zero error of the laser interferometer in the prior art
  • FIG. 4 is a schematic structural diagram of a system according to an embodiment of the present invention.
  • Figure 5 is a cross-sectional structural view of a turntable according to an embodiment of the present invention.
  • FIG. 6 is a schematic diagram of an angle calibration principle of an angle mirror rotating counterclockwise in an embodiment of the present invention
  • FIG. 7 is a schematic diagram showing the principle of angle calibration of an angle mirror rotating clockwise in an embodiment of the present invention.
  • the example further includes a rotating shaft 9, a driving member 10, an angle grating 11 and a control system 12, the rotating shaft 9 is fixedly disposed below the upper tray 4 of the turntable, and the driving member 10 and the rotating shaft 9 is connected, the driving member 10 is preferably a motor, the driving member 10 is fixedly disposed inside the lower tray 5 of the turntable; the angle grating 11 is disposed below the rotating shaft 9; the control system 12 The angle grating 11 and the motor are respectively connected, and the control system 12 is a member for realizing power supply and transmission of control commands.
  • the laser head 1 emits a laser beam split into two beams through the angle interference mirror 2, and is directed to the angle mirror 3.
  • the angle mirror 3 reflects the laser light back to the angle interference mirror 2, and finally returns to the laser head 1;
  • 4 and the middle of the turntable lower plate 5 is provided with a rotating shaft 9, which is preferably a concentric rotating shaft, the turntable upper plate 4 is fixed on the rotating shaft 9 and rotates together with the rotating shaft 9, and the angle reflecting mirror 3 is fixed on the turntable upper plate.
  • the inside of the turntable lower plate 5 is fixed with two motors, and the control system 12 controls the motor to move the rotating shaft 9 to rotate. The angle of rotation is measured by the angle grating 11 and is controlled for the motor.
  • the initial position open the software corresponding to the laser angle interferometer in the computer or other data processing device 8, and clear the laser angle interferometer reading.
  • the laser angle interferometer reads '+'.
  • the angle is set to zero, the upper plate 4 of the turntable is first adjusted back to the initial position M 0 , and then an angle q 2 is input, and the upper plate 4 of the turntable is rotated clockwise by q 2 to the position M 2 . 4 Turn the angle to q 2 , record the reading of the laser angle interferometer R 2 at this time, take a positive value when calculating, reduce the optical path difference by ⁇ 2 ; the principle of angle calibration of clockwise rotation is shown in Figure 7.
  • the angle measuring and calibration device of the laser interferometer has a precise structure and a small standard angle error, and can calibrate the initial zero angle by actively generating a certain declination, and the declination can be actively generated by the angle grating 11 and the driving member 10.
  • the generated angle is more accurate; on this basis, the initial zero error and the constant of the angle mirror 3 can be simultaneously calibrated during the calibration process, which simplifies the calibration procedure of the laser interferometer and improves the calibration efficiency.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

一种激光干涉仪的角度测量校准装置及***，激光干涉仪的角度测量校准装置包括：激光头（1）、角度干涉镜（2）、角度反射镜（3）、转台上盘（4）、转台下盘（5）和转台底座（6）；角度干涉镜（2）设置于激光头（1）和角度反射镜（3）之间，角度反射镜（3）设置于转台上盘（4）上，转台上盘（4）设置于转台下盘（5）上；转台底座（6）设置有凹槽，转台下盘（5）通过凹槽设置于转台底座（6）上。该装置结构精密，标准角度误差小，能够通过主动生成一定偏角来校准初始零位角，偏角可以通过角度光栅（11）和驱动构件（10）来主动生成，该生成的角度较为精确；在此基础上，在校准的过程中还能够同时校准初始零位误差和角度反射镜（3）的常数，简化了激光干涉仪的校准步骤，提高了校准效率。

Description

一种激光干涉仪的角度测量校准装置及*** 技术领域
本发明涉及一种角度校准装置，尤其涉及一种激光干涉仪的角度测量校准装置，并涉及包括了该激光干涉仪的角度测量校准装置的角度测量校准***。
背景技术
激光干涉仪在测量角度时，测量光路和原理如图1和图2所示，激光头1发出的激光在角度干涉镜2中分为两路，分别指向角度反射镜3中的两个角锥棱镜；当角度反射镜3整体转动角度α时，由于角锥棱镜反射回的两束光的光程差发生变化δ，测量传递函数为：α＝arcsin(δ/A)。
在测量传递函数α＝arcsin(δ/A)中，α＝0、δ＝0为函数的原点0，这就意味着开始测量时必调整角度反射镜3，使入射激光垂直于角度反射镜3的两个角锥棱镜的锥尖连线，即角度反射镜3的光学中心线。这在实际操作时是难以实现的。如图3所示，由于仪器安装不准确,在测量开始时角度反射镜3存在偏斜角度α0，该偏斜角度α0称为起始零位误差，如果此时将激光干涉仪软件***中角度反射镜3的读数清零，则***运行在α＝α0，δ＝δ0(δ0＝arcsinα0)坐标系中(0′)。测量时角度反射镜3旋转β角(在0′坐标系内)，而计算得到的角度是在0坐标系的β0，显然β-β0为起始零位误差α0造成的测量误差，如图3所示。
在生产现场消除角度反射镜3的起始零位误差是非常困难的，通常靠调整角度反射镜3使其表面反射光与入射光重合。但是由于角度反射镜3的表面一般镀有增透膜，反射光极其微弱，为了增加反射光的强度，也可采用一片平面镜贴在角度反射镜3表面，使其反射面与角度反射镜3的光学中心线平行，并以此面为参考，调整角度反射镜3的方向。但是实际操作中角度反射镜3的光学中心线难以确定。采用这种方法难以确定零位误差，理想情况下会引起至少几秒的测量误差。
在测量传递函数中，测量角度与角度反射镜3的常数A密切相关。如果将测量传递函数式微分，得
Figure PCTCN2017075819-appb-000001
例如A的设计值取30mm，由计算在10°时，不同的dA引起的误差：dA＝0.18mm时，则da＝216″，误差为0.6％；dA＝0.06mm 时，则da＝72″，误差为0.2％；很显然角度反射镜3常数A的尺寸误差直接影响激光干涉仪角度测量的不确定度。
在实际测量中，经常利用自带刻度的转台对角度反射镜3的常数A进行校准，但是被测转台和自带刻度转台必须以相同的特定角度相向旋转，要么校准方法复杂，要么计算公式和数据处理方法还存在错误，会引起新的人为误差。如专利号为CN101236076A中对初始零位误差及角度反射镜3的常数A补偿因子计算就存在错误，反射镜从初始零位误差点顺时针转过θ，逆时针转到φ，其实际光程差计算存在错误导致整个计算错误，由其计算公式
Figure PCTCN2017075819-appb-000002
得到
Figure PCTCN2017075819-appb-000003
其光程差计算公式为A sinθ＝τA sinρ-τAsinα0和-A sinφ＝τA sinγ-τA sinα0，此两式的几何意义和实际光程变化的物理过程不符，实际顺时针旋转θ时光程变化应该为τA sin(α0+θ)-τA sinα0＝Asinρ，逆时针旋转φ角时光程变化量应该为τAsin(α0-φ)-τAsinα0＝Asinγ，所以其零位补偿角和反射镜常数的补偿因子最终结果均存在一定错误。
因此，现有技术中存在以下几个缺点：第一、校准过程复杂，数据处理麻烦，校准精度有限；第二、校准计算公式存在错误，数据处理误差较大；第三、校准***中设计的标准角度，大小难以保证准确，由于机械上制作的公差，插销或者V槽为了保证能够固定件嵌入，会有一定容差，但是这种容差带来的角度误差在精确测量中不可忽视，这个基准角度也必须多次测量取均值才能确定，准确度差。
发明内容
本发明所要解决的技术问题是需要提供一种结构简单，标准角度误差小，并且能够提高校准效率的激光干涉仪的角度测量校准装置，并提供包括了该激光干涉仪的角度测量校准装置的角度测量校准***。
对此，本发明提供一种激光干涉仪的角度测量校准装置，包括：激光头、角度干涉镜、角度反射镜、转台上盘、转台下盘和转台底座，所述角度干涉镜设置于所述激光头和角度反射镜之间，所述角度反射镜设置于所述转台上盘上，所述转台上盘设置 于所述转台下盘上；所述转台底座设置有凹槽，所述转台下盘通过凹槽设置于所述转台底座上。
本发明的进一步改进在于，所述转台底座设置有连接件，所述转台底座通过连接件固定至外部的被测转台上。
本发明的进一步改进在于，所述连接件包括螺栓孔和/或螺丝孔。
本发明的进一步改进在于，还包括转轴和驱动构件，所述转轴固定设置于所述转台上盘的下方，所述驱动构件与所述转轴相连接。
本发明的进一步改进在于，所述驱动构件为马达。
本发明的进一步改进在于，所述驱动构件固定设置于所述转台下盘的内部。
本发明的进一步改进在于，还包括角度光栅，所述角度光栅设置于所述转轴的下方。
本发明的进一步改进在于，还包括控制***，所述控制***分别与所述角度光栅和驱动构件相连接。
本发明的进一步改进在于，还包括无线信号接收装置，所述无线信号接收装置设置于所述转台下盘的内部。
本发明还提供一种激光干涉仪的角度测量校准***，包括了如上所述的激光干涉仪的角度测量校准装置，并包括数据处理装置，所述数据处理装置与所述激光头实现通讯。
与现有技术相比，本发明的有益效果在于：结构精密，标准角度误差小，能够通过主动生成一定偏角来校准初始零位角，所述偏角可以通过角度光栅和驱动构件来主动生成，该生成的角度较为精确；在此基础上，在校准的过程中还能够同时校准初始零位误差和角度反射镜的常数，简化了激光干涉仪的校准步骤，提高了其校准效率。
附图说明
图1是现有技术中激光干涉仪的角度测量光路原理图；
图2是现有技术中激光干涉仪的角度测量原理示意图；
图3是现有技术中激光干涉仪的起始零位误差原理示意图；
图4是本发明一种实施例的***结构示意图；
图5是本发明一种实施例的转台剖面结构示意图；
图6是本发明一种实施例中角度反射镜逆时针旋转的角度校准原理示意图；
图7是本发明一种实施例中角度反射镜顺时针旋转的角度校准原理示意图。
具体实施方式
下面结合附图，对本发明的较优的实施例作进一步的详细说明。
如图4和图5所示，本例提供一种激光干涉仪的角度测量校准装置，包括：激光头1、角度干涉镜2、角度反射镜3、转台上盘4、转台下盘5和转台底座6，所述角度干涉镜2设置于所述激光头1和角度反射镜3之间，所述角度反射镜3设置于所述转台上盘4上，所述转台上盘4设置于所述转台下盘5上；所述转台底座6设置有凹槽，所述转台下盘5通过凹槽设置于所述转台底座6上。
本例所述转台底座6设置有连接件7，所述转台底座6通过连接件7可以固定至外部的其他被测转台上，提高其使用的灵活性。所述连接件7优选包括螺栓孔和/或螺丝孔。
如图5所示，本例还包括转轴9、驱动构件10、角度光栅11和控制***12，所述转轴9固定设置于所述转台上盘4的下方，所述驱动构件10与所述转轴9相连接，所述驱动构件10优选为马达，所述驱动构件10固定设置于所述转台下盘5的内部；所述角度光栅11设置于所述转轴9的下方；所述控制***12分别与所述角度光栅11和马达相连接，所述控制***12为用于实现供能和发送控制指令的构件。
本例所述激光头1发射一束激光经角度干涉镜2分成两束，射向角度反射镜3，角度反射镜3将激光反射回角度干涉镜2，最后回到激光头1；转台上盘4和转台下盘5的中间设置有一个转轴9，所述转轴9优选为同心转轴，所述转台上盘4固定在转轴9上随转轴9一起转动，角度反射镜3固定在转台上盘4上，转台下盘5的内部固定有两个马达，控制***12控制马达拨动转轴9转动，转动的角度由角度光栅11测量进而针对控制，马达控制转轴9的转动角度精度可达1秒；优选的，所述转台下盘5内置无线信号接收装置，所述角度反射镜3、转台上盘4、转台下盘5、转台底座6、转轴9、驱动构件10、角度光栅11和控制***12所构成的转盘的驱动电路可以通过电池实现供电。
如图5所示，本例所述转台底座6的中心设置有凹槽，转台下盘5正好卡在该凹槽内，保持转台下盘5的固定，整个转台还可以通过螺栓孔等连接件7固定到其他被测转台上。转台固定好后，将角度反射镜3在转台上盘4上固定后，从控制***12中输入一个角度，使转台上盘4从初始位置逆时针转动该角度，如图6所示，激光干涉 仪测量并记录下转过角度读数；再将转台软件中角度先归零，转台上盘4回到初始零位位置，从控制***12中再输入另外一个角度，使转台上盘4从初始位置顺时针转动该角度，如图7所示，激光干涉仪测量并记录转过角度，即可完成校准。利用记录的数据，就可以计算出初始零位误差和角度反射镜3的常数。
如图4所示，本例还提供一种激光干涉仪的角度测量校准***，包括了如上所述的激光干涉仪的角度测量校准装置，并包括数据处理装置8，所述数据处理装置8与所述激光头1实现通讯。所述数据处理装置8优选为电脑等数据处理设备。
如图4所示，搭建好所述角度测量校准***，调整从激光头1射出的激光，垂直入射到角度反射镜3，令实际初始位置M0的零位角度为a0，光程差为d0，角度反射镜常数设计值为A，实际的角度反射镜常数B＝K·A，K为反射镜常数系数。在初始位置时，打开电脑或其他数据处理装置8内的激光角度干涉仪对应的软件，将激光角度干涉仪读数清零，设初始零位角沿逆时针方向旋转时，激光角度干涉仪读数为‘+’。再开启转台控制软件，先将角度置零，再输入一个激光角度干涉仪测量范围内的旋转角q1，将转台上盘逆时针旋转到位置M1，旋转角度为q1，记下此时激光角度干涉仪的角度读数R1，此时光程差增加Δδ1；逆时针旋转的角度校准原理示意如图6所示。
上述测量完毕后，将角度置零，将转台上盘4先调回到初始位置M0，再输入一个角度q2，将转台上盘4顺时针旋转q2角至位置M2，转台上盘4转过角度为q2，记下此时激光角度干涉仪的读数R2，计算时取正值，光程差减少Δδ2；顺时针旋转的角度校准原理示意如图7所示。
根据以上测量值，结合光程差测量传递函数，有
Figure PCTCN2017075819-appb-000004
可得
Figure PCTCN2017075819-appb-000005
其中，q1和q2均为正值，Dd1＝AsinR1，Dd2＝AsinR2，如此便计算出初始零位角α0和角度反射镜3的常数系数K。
特别的，当左右旋转的标准角度的绝对值相等，都为q时，有以下表达式：
Figure PCTCN2017075819-appb-000006
本例所述激光干涉仪的角度测量校准装置的结构精密，标准角度误差小，能够通过主动生成一定偏角来校准初始零位角，所述偏角可以通过角度光栅11和驱动构件10来主动生成，该生成的角度较为精确；在此基础上，在校准的过程中还能够同时校准初始零位误差和角度反射镜3的常数，简化了激光干涉仪的校准步骤，提高了其校准效率。
以上所述之具体实施方式为本发明的较佳实施方式，并非以此限定本发明的具体实施范围，本发明的范围包括并不限于本具体实施方式，凡依照本发明之形状、结构所作的等效变化均在本发明的保护范围内。

Claims (10)

  1. 一种激光干涉仪的角度测量校准装置，其特征在于，包括：激光头、角度干涉镜、角度反射镜、转台上盘、转台下盘和转台底座，所述角度干涉镜设置于所述激光头和角度反射镜之间，所述角度反射镜设置于所述转台上盘上，所述转台上盘设置于所述转台下盘上；所述转台底座设置有凹槽，所述转台下盘通过凹槽设置于所述转台底座上。
  2. 根据权利要求1所述的激光干涉仪的角度测量校准装置，其特征在于，所述转台底座设置有连接件，所述转台底座通过连接件固定至外部的被测转台上。
  3. 根据权利要求2所述的激光干涉仪的角度测量校准装置，其特征在于，所述连接件包括螺栓孔和/或螺丝孔。
  4. 根据权利要求1至3任意一项所述的激光干涉仪的角度测量校准装置，其特征在于，还包括转轴和驱动构件，所述转轴固定设置于所述转台上盘的下方，所述驱动构件与所述转轴相连接。
  5. 根据权利要求4所述的激光干涉仪的角度测量校准装置，其特征在于，所述驱动构件为马达。
  6. 根据权利要求4所述的激光干涉仪的角度测量校准装置，其特征在于，所述驱动构件固定设置于所述转台下盘的内部。
  7. 根据权利要求4所述的激光干涉仪的角度测量校准装置，其特征在于，还包括角度光栅，所述角度光栅设置于所述转轴的下方。
  8. 根据权利要求7所述的激光干涉仪的角度测量校准装置，其特征在于，还包括控制***，所述控制***分别与所述角度光栅和马达相连接。
  9. 根据权利要求1至3任意一项所述的激光干涉仪的角度测量校准装置，其特征在于，还包括无线信号接收装置，所述无线信号接收装置设置于所述转台下盘的内部。
  10. 一种激光干涉仪的角度测量校准***，其特征在于，包括了如权利1至9任意一项所述的激光干涉仪的角度测量校准装置，并包括数据处理装置，所述数据处理装置与所述激光头实现通讯。
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112504193A (zh) * 2020-12-11 2021-03-16 中国航空工业集团公司北京长城计量测试技术研究所 一种拉绳位移传感器变角度测量装置及方法
CN113513986A (zh) * 2021-07-05 2021-10-19 广东省计量科学研究院（华南国家计量测试中心） 几何公差测量设备及其测量方法
CN116300055A (zh) * 2023-05-17 2023-06-23 北京极光星通科技有限公司 一种限位***及其限位方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN205879111U (zh) * 2016-08-30 2017-01-11 深圳市中图仪器科技有限公司 一种激光干涉仪的角度测量校准装置及***
CN108693123A (zh) * 2018-04-22 2018-10-23 北京工业大学 激光干涉仪测量导轨直线运动精度的一种快速校准方法
CN110987013A (zh) * 2019-12-15 2020-04-10 贵州航天计量测试技术研究所 一种陀螺仪角运动测量***的校准方法及装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000111325A (ja) * 1998-10-01 2000-04-18 Tokyo Seimitsu Co Ltd レーザ干渉計を使用した回転角度測定における初期設定入射角測定方法
CN101236076A (zh) * 2008-02-29 2008-08-06 成都工具研究所 带有标准角度转台的激光角度干涉测量***及其测量方法
CN103499365A (zh) * 2013-10-10 2014-01-08 中国科学院上海技术物理研究所 一种旋转变压器静态和动态测角精度标定装置及方法
CN203572451U (zh) * 2013-10-14 2014-04-30 北京航天计量测试技术研究所 立轴式激光小角度测量装置
CN104634280A (zh) * 2015-02-03 2015-05-20 中国科学院上海光学精密机械研究所 通用水平转台绝对角度和旋转角度的测量方法
CN105241539A (zh) * 2015-07-25 2016-01-13 中国计量科学研究院 用于角振动测量的衍射光栅外差激光测振仪
CN205879111U (zh) * 2016-08-30 2017-01-11 深圳市中图仪器科技有限公司 一种激光干涉仪的角度测量校准装置及***

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000111325A (ja) * 1998-10-01 2000-04-18 Tokyo Seimitsu Co Ltd レーザ干渉計を使用した回転角度測定における初期設定入射角測定方法
CN101236076A (zh) * 2008-02-29 2008-08-06 成都工具研究所 带有标准角度转台的激光角度干涉测量***及其测量方法
CN103499365A (zh) * 2013-10-10 2014-01-08 中国科学院上海技术物理研究所 一种旋转变压器静态和动态测角精度标定装置及方法
CN203572451U (zh) * 2013-10-14 2014-04-30 北京航天计量测试技术研究所 立轴式激光小角度测量装置
CN104634280A (zh) * 2015-02-03 2015-05-20 中国科学院上海光学精密机械研究所 通用水平转台绝对角度和旋转角度的测量方法
CN105241539A (zh) * 2015-07-25 2016-01-13 中国计量科学研究院 用于角振动测量的衍射光栅外差激光测振仪
CN205879111U (zh) * 2016-08-30 2017-01-11 深圳市中图仪器科技有限公司 一种激光干涉仪的角度测量校准装置及***

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112504193A (zh) * 2020-12-11 2021-03-16 中国航空工业集团公司北京长城计量测试技术研究所 一种拉绳位移传感器变角度测量装置及方法
CN113513986A (zh) * 2021-07-05 2021-10-19 广东省计量科学研究院（华南国家计量测试中心） 几何公差测量设备及其测量方法
CN116300055A (zh) * 2023-05-17 2023-06-23 北京极光星通科技有限公司 一种限位***及其限位方法

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