WO2018003429A1 - Blade dressing mechanism, cutting device comprising same mechanism, and blade dressing method using same mechanism - Google Patents

Blade dressing mechanism, cutting device comprising same mechanism, and blade dressing method using same mechanism Download PDF

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Publication number
WO2018003429A1
WO2018003429A1 PCT/JP2017/020987 JP2017020987W WO2018003429A1 WO 2018003429 A1 WO2018003429 A1 WO 2018003429A1 JP 2017020987 W JP2017020987 W JP 2017020987W WO 2018003429 A1 WO2018003429 A1 WO 2018003429A1
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WO
WIPO (PCT)
Prior art keywords
blade
dresser
dressing
axis
outer peripheral
Prior art date
Application number
PCT/JP2017/020987
Other languages
French (fr)
Japanese (ja)
Inventor
大槻俊紀
渡辺勝行
片岡光宗
Original Assignee
株式会社リード
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社リード filed Critical 株式会社リード
Priority to KR1020187037983A priority Critical patent/KR102047717B1/en
Priority to CN201780038399.4A priority patent/CN109414800B/en
Publication of WO2018003429A1 publication Critical patent/WO2018003429A1/en
Priority to PH12018502694A priority patent/PH12018502694A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0683—Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B24B53/14—Dressing tools equipped with rotary rollers or cutters; Holders therefor

Definitions

  • the present invention relates to a dressing mechanism for dressing a blade for cutting a work, a cutting device provided with such a dressing mechanism, and a dressing method of a blade using the dressing mechanism.
  • a cutting device provided with a blade for workpiece cutting has been used.
  • the blade has a blade portion formed by adhering abrasive grains to the outer peripheral edge including the outer peripheral surface of the base material, and the blade is placed on the work transfer table.
  • Abrasive grains exposed from the surface of the blade portion of the blade, that is, the surface of the abrasive particle layer become cutting edges by contacting the placed workpiece while rotating it at high speed around its rotation axis, and predetermined cutting is performed on the workpiece It is known that processing is applied.
  • the dress table since the dresser is mounted on the dress table, the dress table includes a dress position where the blade is dressed by the dresser, and a retracted position where the dresser is separated from the blade. There is a need to displace between Therefore, it is necessary to secure such a space for moving the dress table in the cutting device, resulting in an increase in the size of the device.
  • the technical problem of the present invention is to provide a dressing mechanism capable of realizing dressing of a blade for cutting work with space-saving, a cutting device provided with such a dressing mechanism, and a blade using the dressing mechanism. It is in providing a dressing method.
  • a dressing mechanism in a cutting device is a dressing mechanism for dressing a blade portion formed on an outer peripheral edge including an outer peripheral surface around an axis in a disk-like blade of a grinding device
  • the dressing mechanism includes a dresser for dressing the blade by bringing the blade into sliding contact with the blade, a dresser drive for driving the dresser, and a support frame on which the dresser and the dresser drive are mounted.
  • the dresser has an outer peripheral surface around its axis and is rotatably supported by the support frame about the axis, and the outer peripheral surface of the dresser is an outer peripheral surface of the blade.
  • a dressing area for sliding contact with the blade, and a non-contact state through an air gap with the outer peripheral surface of the blade is provided.
  • a concave relief area is provided along the circumferential direction, and the dressing state by the dressing area and the non-dressing state by the relief area are provided by rotating the dresser around the axis by the dresser drive unit. And can be selectively switched.
  • one circumference of the outer circumferential surface of the dresser is constituted by one dress area comprising an arc surface and one relief area, and the relief section is in the axial direction of the dresser. It is formed in the shape of a groove extending over the entire length, and the angular range of the dressing area around the axis of the dresser is larger than the angular range of the relief area.
  • the dresser drive unit includes a rotary drive unit that rotates the dresser about its axis, and a linear drive unit that displaces the dresser in the horizontal direction in a direction perpendicular to and parallel to the axis. It is configured.
  • a blade is formed on the outer peripheral edge including the outer peripheral surface around the axis, and the disk-like blade rotationally driven around the axis and relative to the axis of the blade And a table which is fed in a direction perpendicular to the table, and configured to cut the work of the table by the blade portion of the rotating blade, and the axis of the dresser and the axis of the blade are the dresser dress
  • the blade portion is disposed in parallel with each other while maintaining a predetermined distance in sliding contact with the dressing area, and the dresser drive portion rotates the dresser.
  • the dressing area and the relief area of the dresser can be selectively made to face the outer peripheral surface of the blade, and the dressing area of the dresser is Run the dressing of the blade portion when made to face the blade outer circumferential surface of, characterized by stopping the dressing of the blade section when the relief area of the dresser are opposed to the outer peripheral surface of the blade.
  • the dressing area of the dresser is made to face the outer peripheral surface of the blade to make the dresser
  • the blade portion of the blade is dressing by sequentially sliding the blade portion of the blade in the circumferential direction with respect to the dressing region while rotating the shaft around the axis, and the blade is not processed with the workpiece separated from the workpiece
  • the relief region of the dresser is made to face the outer peripheral surface of the blade in a non-contact manner, and the rotation of the dresser is stopped.
  • the dresser when the outer peripheral surface of the dresser is made to face the outer peripheral surface of the blade, the dress area for sliding contact with the blade of the blade, the outer peripheral surface of the blade and the air gap A concave relief area for bringing into non-contact state is provided along the circumferential direction, and the dressing state by the dress area is realized by rotating the dresser around the axis by the dresser drive unit. It is comprised so that it can switch selectively with the non-dressing state by a relief area
  • FIG. 1 is an enlarged side view schematically showing a state before cutting a work, showing an embodiment of a cutting device provided with a dressing mechanism according to the present invention. It is an enlarged side view which shows typically the state immediately after work cutting start in the above-mentioned cutting device. It is an enlarged side view which shows typically the state in the middle of work cutting in the above-mentioned cutting device. It is an enlarged side view which shows typically the state at the time of completion
  • the cutting apparatus 1 of the present embodiment includes a work transfer table 2 for mounting a work W such as a semiconductor wafer, and a disk-like blade 3 having a blade portion 3a as an outer peripheral blade around a first axis L1. ing. Then, by rotating the blade 3 around its axis L1, the work W on the table 2 can be cut by the blade portion 3a.
  • the cutting device 1 further includes a dressing mechanism 20 provided with a dresser 10 for dressing the blade portion 3 a of the blade 3. Then, by bringing the dresser 10 of the dressing mechanism 20 into sliding contact with the blade portion 3a of the blade 3, clogging of the blade portion 3a is eliminated, or the damaged blade portion 3a is spontaneously created. It can be done.
  • the dicing apparatus etc. which cut workpiece
  • the work transfer table 2 forms a plate-like body that can be linearly reciprocated by a drive unit (not shown) in the X-axis direction (horizontal direction in the drawing) in the horizontal direction.
  • a drive unit not shown
  • the work W is placed on the work mounting surface 2 a provided on the upper surface of the table 2 and fixed by an appropriate method.
  • the method of fixing the work W to the work mounting surface 2a may be, for example, vacuum suction, or may be fixed using a fixing jig, or may be fixed by bonding using an adhesive or the like. It is also good.
  • the blade 3 has the blade portion 3a formed on the outer peripheral edge including the outer peripheral surface of a thin disk-like substrate 3b made of metal such as stainless steel or aluminum. More specifically, the blade portion 3a is, for example, a diamond on the outer periphery of the substrate 3b, which comprises the outer peripheral surface around the axis L1 and the outer peripheral portions of both side surfaces orthogonal to the axis L1 across the outer peripheral surface. It is formed by fixing abrasive grains (preferably, fine superabrasive grains) made of cBN (cubic boron nitride) or the like with a suitable bonding material such as resin bond or metal bond such as plated metal.
  • abrasive grains preferably, fine superabrasive grains
  • cBN cubic boron nitride
  • an attachment hole 3c penetrating in the thickness direction of the substrate is provided at the central portion of the substrate 3b, and a tip of a spindle (not shown) is detachably attached to the attachment hole 3c. It is attached.
  • the blade 3 is configured to rotate at a predetermined rotation speed in a predetermined rotation direction around the axis L1 (around the spindle axis) by rotating the spindle by a drive unit such as a motor (not shown). There is.
  • the dressing mechanism 20 in the present embodiment will be specifically described.
  • the dressing mechanism 20 has the dresser 10 for dressing the blade portion by sliding contact with the blade portion 3 a of the blade 3 and a dresser drive portion for driving the dresser 10. 30, 40, 50, and support frames 21, 22, 23, 24 on which the dresser 10 and the dresser driving unit 30, 40, 50 are mounted.
  • the dresser drive unit rotates the dresser 10 about a second axis L2 parallel to the first axis L1 of the blade 2, and the dresser 10 in the X direction (axis L2 in the horizontal direction).
  • the first linear driving unit 30 and the second linear driving unit 40 are reciprocally displaced in the Y-axis direction (parallel to the axis L2) which forms the right angle and the right angle).
  • the support frame includes a first frame 21 on which the first linear drive unit 30 is mounted and which is disposed above the work transfer table 2 and extends in the horizontal direction, and the second linear drive unit 40
  • An X-axis slide table 22 which is mounted and is connected to the first linear drive unit 30 and displaced in the X-axis direction with respect to the first frame 21 and is connected to the second linear drive unit 40 and is X-axis
  • a Y-axis slide table 23 which is displaced in the Y-axis direction with respect to the slide table 22, and a pair of second ends of which the base end (upper end) is fixed to the Y-axis slide table 23 and which extends downward along the Z axis And frames 24 and 24.
  • both ends in the direction of the axis L 2 of the dresser 10 are rotatably and detachably supported.
  • the rotation drive unit 50 for rotating the dresser 10 is provided across the Y-axis slide table 23 and the second frame 24 as described later.
  • the first frame 21 is integrally formed from a pair of opposing plates 21a and 21a extending in the X-axis direction and parallel to each other, and a connecting plate 21b extending in the Y-axis direction and connecting the opposing plates 21a and 21a. Is formed.
  • the first linear drive unit 30 is mounted on one of the opposing plates 21a and 21a.
  • the first linear drive unit 30 includes an X-axis guide base 31 extended in the X-axis direction on one opposing plate 21 a of the first frame 21, and the X-axis guide base 31. And a motor 32 for X-axis feeding disposed at one end in the longitudinal direction. Then, one end side of the X-axis slide table 22 in the longitudinal direction (Y-axis direction) is supported on the X-axis guide base 31 so as to be capable of reciprocating in the X-axis direction.
  • the first linear drive unit 30 can be configured, for example, by a ball screw mechanism or the like by the motor 32 and a ball screw (not shown) provided inside the X-axis guide base 31.
  • the mover (not shown) connected to the X-axis slide table 22 is screwed to the internal ball screw through the long groove 31 a opened on the X-axis guide base 31 to rotate the motor 32.
  • the X-axis slide table 22 can be reciprocated in the X-axis direction and displaced by a driving force.
  • a guide rail 33 extends in the X-axis direction on the other frame 21a of the pair of opposing plates 21a, 21a, and the other end of the X-axis slide table 22 in the longitudinal direction is the guide It is slidably guided by the rails 22.
  • the second linear driving unit 40 has a Y-axis guide base 41 extended in the Y-axis direction on the X-axis slide table 22 and a Y arranged at one end of the Y-axis guide base 41 in the longitudinal direction. And a motor 42 for axis feeding.
  • the Y-axis slide table 23 is supported on the Y-axis guide base 41 so as to be capable of reciprocating in the Y-axis direction.
  • the second linear drive unit 40 can also be configured by a ball screw mechanism.
  • the mover (not shown) connected to the Y-axis slide table 23 is screwed into the internal ball screw through the long groove 41a opened on the Y-axis guide base 41.
  • the Y-axis slide table 23 can be reciprocated and displaced in the Y-axis direction by the rotational drive force of the motor 42.
  • the rotational drive unit 50 includes a motor 51 disposed on the Y-axis slide table 23 and the second frames 24 and 24 for hanging the rotational drive force of the motor 51 from the Y-axis slide table 23. It has a power transmission mechanism for transmitting to the dresser 10 rotatably supported.
  • the power transmission mechanism includes an upper pulley 52 attached to the motor shaft of the motor 51, a lower pulley 53 attached to the support shaft of the dresser 10, and an annular ring wound around the pair of pulleys. It is composed of a belt 54.
  • the rotational driving force is transmitted from the upper pulley 52 to the lower pulley 53 through the belt 54 by controlling the rotation of the motor 51, and the dresser 10 is rotated about its axis L2 at an arbitrary speed in an arbitrary rotation direction. It can be turned or stopped at any angular position.
  • the dresser 10 is moved in the X-axis direction (direction perpendicular to the axis L2) and the Y-axis direction in the horizontal direction by the first linear drive unit 30 and the second linear drive unit 40. It is linearly moved in two axial directions (parallel to the axis L2) to be displaced to an arbitrary position, and can be controlled to rotate around the axis L2 by the rotational drive unit 50 at that position. .
  • the dresser 10 is a rotary dresser having an outer peripheral surface 11 around an axis L2, and the axis L2 extending in the Y axis direction of the dresser 10 and the axis L1 of the blade 3 are The plurality of dressers 10 and the blades 3 are arranged side by side in the X-axis direction.
  • the dresser 10 is integrally formed of a dressing material formed by bonding a large number of abrasive grains with a bonding material, and the outer peripheral surface of the blade 3 is opposed to the outer peripheral surface 11 to slide the blade portion 3a.
  • the blade portion 3a can be dressed by contacting the blade portion 3a.
  • the abrasive grains for example, white alundum, green carborundum and the like can be used, and as the bonding material, for example, an appropriate bonding material such as resin bond, vitrified bond, metal bond and the like can be used.
  • the dresser 10 does not necessarily have to be integrally formed of a dress material as in the present embodiment, and even if a dress material layer of a certain depth is formed in a dress area 12 described later. Good.
  • the outer peripheral surface 11 of the dresser 10 has a dressing area 12 for dressing the blade portion 3 a by bringing it into sliding contact with the blade portion 3 a of the blade 3 when facing the outer peripheral surface of the blade 3.
  • a concave relief area 13 for bringing the outer peripheral surface of the blade 3 into a non-contact state via an air gap is formed along the circumferential direction.
  • the dress area 12 and the relief area 13 are continuous in the circumferential direction of the outer peripheral surface 11, and one circumference around the axis L2 of the outer peripheral surface is one dress area 12 made of a circular arc surface and the direction of the axis L2. It consists of one relief area consisting of a groove extending over the entire length.
  • the angular range of the dress area 12 around the axis L 2 is formed larger than the angular range of the relief area 13. That is, the angular range of the dressing area 12 is obtuse, and the angular range of the relief area 13 is acute.
  • the groove bottom 13 a is formed in an arc surface concentric with the arc surface of the dress portion 12 around the rotation axis L 2, and the pair of side walls 13 b are along the radial direction of the dresser 10. It is radially formed.
  • the blade 3a When the dressing area 12 of the dresser 10 is opposed to the outer peripheral surface of the blade 3, the blade 3a is in sliding contact with the dressing area 12 and the axis L2 of the dresser 10 and the axis L1 of the blade 3 When the region 13 is also made to face in the same manner, the blade portions 3a are arranged in parallel with each other with a predetermined distance such that the blade portions 3a are not in contact with the outer peripheral surface of the blade 3 via an air gap. Furthermore, the rotational speed of the dresser 10 at the time of dressing is determined so that the blade portion 3a of the blade 3 is always in sliding contact with the dressing area during cutting in consideration of the feed speed of the table 2 and the like. It is set sufficiently smaller than the rotational speed.
  • the blade portion 3a of the blade 3 is cut into the dressing material of the dressing region 12 and dressing of the blade portion 3a is performed. ( Figures 2 and 3).
  • the blade portion 3a of the blade is the outer peripheral surface of the dresser 10 in the relief area 13 (that is, the groove bottom 13a and the pair of side walls 13b).
  • Non-contact state is established via the gap, and dressing of the blade 3a is stopped (avoided) (FIGS. 1 and 4).
  • the angular range of the relief area 13 in the dresser 10 ie, the circumferential length of the groove bottom 13a and the groove depth, ie, the radial length of the side wall 13b, are the distance between the dresser 10 and the blade 3 between the axes L1 and L2, Alternatively, it may be appropriately set according to the diameter of the dresser 10 and the blade 3 or the like. Further, in the present embodiment, since the diameter of the dressing area 12 in the dresser 10 is smaller than the diameter of the blade 3, the axis L2 of the dresser 10 is arranged parallel to the axis L1 of the blade 3 in the horizontal direction. Even when the work W is cut, the blade 3 does not contact the work W with the work W passing the dresser 10 immediately below.
  • the dressing state of the blade 3 by the dressing area 12 and the non-rolling of the blade 3 by the relief area 13 It is possible to selectively switch between the dressing state. Therefore, dressing of the blade 3 can be realized in a space-saving manner, and an increase in size of the cutting device 1 can be suppressed.
  • a plate-like workpiece W is mounted on the workpiece mounting surface 2a of the workpiece conveyance table 2, and the number of rotations of the blade 3 and its rotational direction, the feed speed and feed amount of the workpiece conveyance table 2 in the X axis direction Set
  • the first and second linear drive units 30 and 40 adjust the amount of cutting of the blade 3 with respect to the dresser 10, the cutting position of the dresser 10 in the rotational axis L2 direction, and the like.
  • Position adjustment in the X-axis and Y-axis directions is performed.
  • the blade 3 mounted at the tip of the spindle is rotated at high speed around its axis L1.
  • the work transfer table 2 is moved toward the blade 3 along the X-axis direction at a predetermined feed rate.
  • the work transfer table 2 is further fed, and as shown in FIG. 2, when the cutting process of the work W by the blade portion 3a is started, the motor 51 of the rotational drive unit 50 is driven correspondingly. Ru.
  • the dresser 10 is rotated in the direction opposite to that of the blade 3 so that the dressing area 12 is directed horizontally to face the outer peripheral surface of the blade.
  • the rotational speed of the dresser 10 is determined such that the blade portion 3a is always in sliding contact with the dress area 12 during dressing of the workpiece W, and dressing is performed, and the necessary slide contact of the blade part 3a to the dress area 12 is performed. It is set in consideration of various parameters such as the rotational speed of the blade 3, the material of the work W, the circumferential length of the dress area 12, the cutting time, etc., so that the dressing can be performed reliably by securing the speed. .
  • the dress region 12 is sequentially brought into sliding contact with the blade portion 3a of the rotating blade 3 in the circumferential direction, as a result, The blade portion 3a is dressed while cutting the work W.
  • a cut groove having a predetermined depth is formed along the circumferential direction, whereby the entire blade portion 3a formed on the outer peripheral edge of the blade 3 is dressed.
  • the work transfer table 2 further moves in the table feed direction, and as shown in FIG. 4, when the blade portion 3a of the blade 3 is separated from the rear end (right end in the figure) of the work W in the table feed direction
  • the processing of one cutting line for W is completed.
  • the dresser 10 again turns the relief area 13 toward the blade 3 side in the horizontal direction by rotation, and stops the rotation in a state where the relief area 13 faces the outer peripheral surface of the blade 3. Stop dressing too.
  • dressing of the blade portion 3 a is performed while cutting the work W by the blade portion 3 a of the dresser 3, so that more efficient cutting can be performed. It becomes.
  • the dressing area 12 of the dresser 10 is formed on the outer peripheral surface 11 formed of a circular arc surface, and the dresser 10 is simply rotated about the axis L2 so that Since the dressing state in which the area 12 is opposed and the non-dressing state in which the relief area 13 is opposed can be selectively switched, the dressing mechanism can be miniaturized, and the dressing of the blade 3 can be space-saving. As a result, it is possible to suppress an increase in size of the cutting device 1.
  • dressing of the blade 3 using the dresser 10 is not limited during cutting of the work W, but when dressing is necessary prior to cutting such as when the blade 3 is replaced with a new one, You may carry out at the timing of FIG.
  • the dressing of the blade 3a of the blade 3 is mainly performed by the dresser 10.
  • the dresser 10 is provided with a truing property such that the outer shape of the blade 3a of the blade 3 is corrected. It can also be done.
  • the axis L2 of the dresser 10 and the axis L1 of the blade 3 are arranged substantially horizontally, but the present invention is not limited to this.
  • the axes L1 and L2 may be arranged vertically in the vertical direction (Z-axis direction).
  • the dresser 10 is disposed rearward of the blade 3 in the table feed direction, but may be disposed forward of the blade 3.
  • dressing of the blade portion 3 a of the blade 3 is performed while rotating the dresser 10 in the direction opposite to the rotation direction of the blade 3.
  • the dressing may be performed by rotating the blade 3 in the same direction as the rotation direction of the blade 3.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Dicing (AREA)

Abstract

[Problem] To provide a dressing mechanism that can achieve dressing of a workpiece cutting blade while saving space, a cutting device comprising such a dressing mechanism, and a blade dressing method using the dressing mechanism. [Solution] A dresser 10 to perform dressing of a blade 3 for workpiece cutting is provided to be able to rotate about a second axis L2 that is parallel to a first axis L1 of the blade 3. In addition, the outer circumferential face 11 of the dresser is provided with, in the circumferential direction, a dress area 12 that is in sliding contact with a cutting portion 3a of the blade and a relief area 13 that is not in contact with the cutting portion when same are facing the outer circumferential surface of the blade. Selectively switching between a dressing state by way of the dress area and a non-dressing state by way of the relief area is possible by rotating the dresser about the axis L2.

Description

ブレードのドレッシング機構及び該機構を備えた切削装置及び該機構を用いたブレードのドレッシング方法Dressing mechanism of blade, cutting device provided with the mechanism, and dressing method of blade using the mechanism
　本発明は、ワーク切削用のブレードをドレッシングするためのドレッシング機構、そのようなドレッシング機構を備えた切削装置、及び該ドレッシング機構を用いたブレードのドレッシング方法に関するものである。 The present invention relates to a dressing mechanism for dressing a blade for cutting a work, a cutting device provided with such a dressing mechanism, and a dressing method of a blade using the dressing mechanism.
　従来から、半導体ウエハや電子部品材料等のワークに対してダイシングや溝入れ等の切削加工を施すために、ワーク切削用のブレードを備えた切削装置が用いられている。そして、このような切削装置としては、前記ブレードが、基材の外周面を含む外周縁に砥粒を固着することにより形成された刃部を有していて、該ブレードを、ワーク搬送テーブルに載置されたワークに対し、その回転軸周りに高速に回転させながら接触させることで、該ブレードの刃部即ち砥粒層の表面から露出する砥粒が切刃となり、該ワークに所定の切削加工が施されるものが知られている。 2. Description of the Related Art Conventionally, in order to perform cutting such as dicing or grooving on a workpiece such as a semiconductor wafer or electronic component material, a cutting device provided with a blade for workpiece cutting has been used. And, as such a cutting device, the blade has a blade portion formed by adhering abrasive grains to the outer peripheral edge including the outer peripheral surface of the base material, and the blade is placed on the work transfer table. Abrasive grains exposed from the surface of the blade portion of the blade, that is, the surface of the abrasive particle layer become cutting edges by contacting the placed workpiece while rotating it at high speed around its rotation axis, and predetermined cutting is performed on the workpiece It is known that processing is applied.
　ところで、前記切削装置においては、ワークの切削加工を繰り返し行うと、ワークから生ずる切削屑がブレードの砥粒層表面の砥粒間に堆積して目詰まりを起したり、また切刃となる砥粒自体も摩耗してその先端が丸められたりするため、ブレードの切れ味が次第に鈍くなって切削性能が低下してしまう。そこで、例えば、特許文献１に記載の切削装置においては、ドレステーブル上にボード形状のドレッサが設けられていて、このドレッサをブレードの刃部で切り込んで該刃部のドレッシング（目立て）を行うことにより、砥粒層表面の砥粒間の目詰まりを解消したり、或いは、先端が摩耗した砥粒を脱粒させて新たな砥粒を創出させたりするようになっている。 By the way, in the above-mentioned cutting device, when cutting work of the work is repeated, cutting chips generated from the work are deposited between the abrasive grains on the surface of the abrasive grain layer of the blade to cause clogging, and also abrasives which become cutting edges. Since the grain itself is also worn and its tip is rounded, the sharpness of the blade gradually becomes dull and the cutting performance is lowered. Therefore, for example, in the cutting device described in Patent Document 1, a dresser having a board shape is provided on a dress table, and this dresser is cut by a blade of a blade to perform dressing (dressing) of the blade. As a result, clogging between the abrasive grains on the surface of the abrasive grain layer is eliminated, or abrasive grains with worn tips are disintegrated to create new abrasive grains.
　しかしながら、この特許文献１に記載のものでは、前記ドレッサがドレステーブル上に搭載されていることから、該ドレステーブルを、ドレッサでブレードをドレッシングするドレス位置と、ドレッサをブレードから離間させる退避位置との間で変位させる必要性がある。そのため、このようなドレステーブルの移動用スペースを切削装置に確保しおかなければならず、該装置の大型化を招いてしまう。 However, in the device described in Patent Document 1, since the dresser is mounted on the dress table, the dress table includes a dress position where the blade is dressed by the dresser, and a retracted position where the dresser is separated from the blade. There is a need to displace between Therefore, it is necessary to secure such a space for moving the dress table in the cutting device, resulting in an increase in the size of the device.
特開２００６－１５９３３４号公報Unexamined-Japanese-Patent No. 2006-159334
　そこで、本発明の技術的課題は、ワーク切削用ブレードのドレッシングを省スペースにて実現することが可能なドレッシング機構、そのようなドレッシング機構を備えた切削装置、及び該ドレッシング機構を用いたブレードのドレッシング方法を提供することにある。 Therefore, the technical problem of the present invention is to provide a dressing mechanism capable of realizing dressing of a blade for cutting work with space-saving, a cutting device provided with such a dressing mechanism, and a blade using the dressing mechanism. It is in providing a dressing method.
　上記課題を解決するため、本発明に係る切削装置におけるドレッシング機構は、研削装置の円盤状ブレードにおける軸周りの外周面を含む外周縁に形成された刃部をドレッシングするためのドレッシング機構であって、該ドレッシング機構は、前記ブレードの刃部に摺接させることにより、該刃部をドレッシングするためのドレッサと、該ドレッサを駆動するドレッサ駆動部と、これらドレッサ及びドレッサ駆動部を装着した支持フレームとを有し、前記ドレッサは、その軸周りに外周面を有していて、前記支持フレームにより該軸周りに回転自在に支持されており、前記ドレッサの外周面には、前記ブレードの外周面と対向させたときに、前記刃部に摺接させるためのドレス領域と、該ブレードの外周面と空隙を介して非接触状態にするための凹状の逃げ領域とが、その周方向に沿って設けられており、前記ドレッサ駆動部で前記ドレッサを軸周りに回動させることにより、上記ドレス領域によるドレッシング状態と逃げ領域による非ドレッシング状態とを選択的に切り換えることができるように構成されていることを特徴とする。 In order to solve the above problems, a dressing mechanism in a cutting device according to the present invention is a dressing mechanism for dressing a blade portion formed on an outer peripheral edge including an outer peripheral surface around an axis in a disk-like blade of a grinding device The dressing mechanism includes a dresser for dressing the blade by bringing the blade into sliding contact with the blade, a dresser drive for driving the dresser, and a support frame on which the dresser and the dresser drive are mounted. And the dresser has an outer peripheral surface around its axis and is rotatably supported by the support frame about the axis, and the outer peripheral surface of the dresser is an outer peripheral surface of the blade. And a dressing area for sliding contact with the blade, and a non-contact state through an air gap with the outer peripheral surface of the blade. A concave relief area is provided along the circumferential direction, and the dressing state by the dressing area and the non-dressing state by the relief area are provided by rotating the dresser around the axis by the dresser drive unit. And can be selectively switched.
　このとき、好ましくは、前記ドレッサの外周面の１周が、円弧面から成る１つの前記ドレス領域と、１つの前記逃げ領域とから構成されていて、前記逃げ部が、前記ドレッサの軸方向の全長に亘って延びる溝状に形成されており、前記ドレッサの軸を中心とするドレス領域の角度範囲が逃げ領域の角度範囲よりも大きく形成されている。
　また、好ましくは、前記ドレッサ駆動部は、前記ドレッサをその軸周りに回動させる回転駆動部と、該ドレッサを水平方向において、その軸と直角方向及び平行方向にそれぞれ変位させる直線駆動部とから構成されている。 At this time, preferably, one circumference of the outer circumferential surface of the dresser is constituted by one dress area comprising an arc surface and one relief area, and the relief section is in the axial direction of the dresser. It is formed in the shape of a groove extending over the entire length, and the angular range of the dressing area around the axis of the dresser is larger than the angular range of the relief area.
In addition, preferably, the dresser drive unit includes a rotary drive unit that rotates the dresser about its axis, and a linear drive unit that displaces the dresser in the horizontal direction in a direction perpendicular to and parallel to the axis. It is configured.
　そして、上記ドレッシング機構を備えた切削装置は、軸周りの外周面を含む外周縁に刃部が形成されて該軸周りに回転駆動される円盤状ブレードと、前記ブレードの軸に対して相対的に直角方向に送られるテーブルとを備えていて、回転する前記ブレードの刃部で該テーブルのワークを切削するように構成されており、前記ドレッサの軸とブレードの軸とは、前記ドレッサのドレス領域をブレードの外周面と対向させたときに前記刃部が該ドレス領域に摺接される所定の距離を保持して、互いに平行に配置されており、前記ドレッサ駆動部でドレッサを回動させることにより、前記ブレードの外周面に対して前記ドレッサのドレス領域及び逃げ領域を選択的に対向させることができるように構成されていて、前記ドレッサのドレス領域を前記ブレードの外周面に対向させたときに前記刃部のドレッシングを実行し、前記ドレッサの逃げ領域を前記ブレードの外周面に対向させたときに前記刃部のドレッシングを停止することを特徴とする。 In the cutting device provided with the dressing mechanism, a blade is formed on the outer peripheral edge including the outer peripheral surface around the axis, and the disk-like blade rotationally driven around the axis and relative to the axis of the blade And a table which is fed in a direction perpendicular to the table, and configured to cut the work of the table by the blade portion of the rotating blade, and the axis of the dresser and the axis of the blade are the dresser dress When the area is made to face the outer peripheral surface of the blade, the blade portion is disposed in parallel with each other while maintaining a predetermined distance in sliding contact with the dressing area, and the dresser drive portion rotates the dresser. Thus, the dressing area and the relief area of the dresser can be selectively made to face the outer peripheral surface of the blade, and the dressing area of the dresser is Run the dressing of the blade portion when made to face the blade outer circumferential surface of, characterized by stopping the dressing of the blade section when the relief area of the dresser are opposed to the outer peripheral surface of the blade.
　一方、上記ドレッシング機構を用いたブレードのドレッシング方法は、ブレードをその軸回りに回転させてワークを切削加工しているときには、前記ドレッサのドレス領域を該ブレードの外周面に対向させて、該ドレッサを軸周りに回動させながら該ブレードの刃部を該ドレス領域に対して周方向に順次摺接させることにより、該ブレードの刃部をドレッシングし、ブレードがワークから離間した該ワークの非加工時には、前記ドレッサの逃げ領域を該ブレードの外周面に非接触状態で対向させ、該ドレッサの回動を停止させることを特徴とする。 On the other hand, according to the dressing method of the blade using the dressing mechanism, when cutting the work by rotating the blade about its axis, the dressing area of the dresser is made to face the outer peripheral surface of the blade to make the dresser The blade portion of the blade is dressing by sequentially sliding the blade portion of the blade in the circumferential direction with respect to the dressing region while rotating the shaft around the axis, and the blade is not processed with the workpiece separated from the workpiece Sometimes, the relief region of the dresser is made to face the outer peripheral surface of the blade in a non-contact manner, and the rotation of the dresser is stopped.
　以上のように、本発明においては、ドレッサの外周面に、ブレードの外周面と対向させたときに、該ブレードの刃部に摺接させるためのドレス領域と、該ブレードの外周面と空隙を介して非接触状態にするための凹状の逃げ領域とが、その周方向に沿って設けられており、ドレッサ駆動部で前記ドレッサを軸周りに回動させることにより、上記ドレス領域によるドレッシング状態と逃げ領域による非ドレッシング状態とを選択的に切り換えることができるように構成されている。そのため、本発明によれば、ワーク切削用ブレードのドレッシングを省スペースにて実現することが可能となり、切削装置の大型化を抑制することが可能となる。 As described above, in the present invention, when the outer peripheral surface of the dresser is made to face the outer peripheral surface of the blade, the dress area for sliding contact with the blade of the blade, the outer peripheral surface of the blade and the air gap A concave relief area for bringing into non-contact state is provided along the circumferential direction, and the dressing state by the dress area is realized by rotating the dresser around the axis by the dresser drive unit. It is comprised so that it can switch selectively with the non-dressing state by a relief area | region. Therefore, according to the present invention, dressing of the work cutting blade can be realized in a space-saving manner, and enlargement of the cutting device can be suppressed.
本発明に係るドレッシング機構を備えた切削装置の一実施形態を示すものであって、ワーク切削前の状態を模式的に示す拡大側面図である。1 is an enlarged side view schematically showing a state before cutting a work, showing an embodiment of a cutting device provided with a dressing mechanism according to the present invention. 前記切削装置においてワーク切削開始直後の状態を模式的に示す拡大側面図である。It is an enlarged side view which shows typically the state immediately after work cutting start in the above-mentioned cutting device. 前記切削装置においてワーク切削途中の状態を模式的に示す拡大側面図である。It is an enlarged side view which shows typically the state in the middle of work cutting in the above-mentioned cutting device. 前記切削装置においてワーク切削終了時の状態を模式的に示す拡大側面図である。It is an enlarged side view which shows typically the state at the time of completion | finish of workpiece cutting in the said cutting device. 前記切削装置におけるドレッシング機構を模式的に示す斜視図である。It is a perspective view which shows the dressing mechanism in the said cutting device typically.
　以下に、図１－図５を用いて、本発明に係るドレッシング機構を備えた切削装置１の一実施形態について詳細に説明する。本実施形態の切削装置１は、半導体ウエハ等のワークＷを搭載するためのワーク搬送テーブル２と、第１軸Ｌ１周りに外周刃としての刃部３ａを有する円盤状のブレード３とから構成されている。そして、該ブレード３をその軸Ｌ１周りに回転させることにより、その刃部３ａで前記テーブル２上のワークＷを切削することができるようになっている。 Hereinafter, one embodiment of a cutting device 1 provided with a dressing mechanism according to the present invention will be described in detail with reference to FIGS. The cutting apparatus 1 of the present embodiment includes a work transfer table 2 for mounting a work W such as a semiconductor wafer, and a disk-like blade 3 having a blade portion 3a as an outer peripheral blade around a first axis L1. ing. Then, by rotating the blade 3 around its axis L1, the work W on the table 2 can be cut by the blade portion 3a.
　また、前記切削装置１は、前記ブレード３の刃部３ａをドレッシング（目立て）するためのドレッサ１０を備えたドレッシング機構２０を更に有している。そして、該ドレッシング機構２０のドレッサ１０を前記ブレード３の刃部３ａに摺接させることにより、該刃部３ａの目詰まりを解消したり、傷んだ該刃部３ａを自発的に創生したりすることができるようになっている。なお、この切削装置１としては、例えば、半導体ウエハ等のワークＷを切削して個々のペレットに分割するダイシング装置等が挙げられる。 The cutting device 1 further includes a dressing mechanism 20 provided with a dresser 10 for dressing the blade portion 3 a of the blade 3. Then, by bringing the dresser 10 of the dressing mechanism 20 into sliding contact with the blade portion 3a of the blade 3, clogging of the blade portion 3a is eliminated, or the damaged blade portion 3a is spontaneously created. It can be done. In addition, as this cutting device 1, the dicing apparatus etc. which cut workpiece | work W, such as a semiconductor wafer, for example, and it divides | segments into each pellet are mentioned, for example.
　前記ワーク搬送テーブル２は、図１－図４に示すように、水平方向におけるＸ軸方向（図において左右方向）に、図示しない駆動部により直線的に往復移動可能な板状体を成している。このテーブル２にワークＷを搭載する際には、該テーブル２の上面に設けられたワーク搭載面２ａに前記ワークＷを載せて、適宜の方法で固定する。このワーク搭載面２ａへのワークＷの固定方法については、例えば、真空吸着によるものでもよいし、或いは、固定用の冶具を用いて固定してもよく、接着剤等で接着して固定してもよい。 As shown in FIGS. 1 to 4, the work transfer table 2 forms a plate-like body that can be linearly reciprocated by a drive unit (not shown) in the X-axis direction (horizontal direction in the drawing) in the horizontal direction. There is. When mounting the work W on the table 2, the work W is placed on the work mounting surface 2 a provided on the upper surface of the table 2 and fixed by an appropriate method. The method of fixing the work W to the work mounting surface 2a may be, for example, vacuum suction, or may be fixed using a fixing jig, or may be fixed by bonding using an adhesive or the like. It is also good.
　前記ブレード３は、例えば、ステンレス鋼やアルミニウム等の金属から成る薄い円盤状の基板３ｂにおける外周面を含む外周縁に、前記刃部３ａを形成したものである。より具体的には、該刃部３ａは、前記基板３ｂにおける、軸Ｌ１周りの外周面と該外周面を挟んで軸Ｌ１に直交する両側面の外周部とから成る外周縁に、例えば、ダイヤモンドやｃＢＮ（立方晶窒化ホウ素）等から成る砥粒（好ましくは、微細な超砥粒）を、レジンボンドやメッキ金属などのメタルボンド等の適宜のボンド材で固着することにより形成されている。 The blade 3 has the blade portion 3a formed on the outer peripheral edge including the outer peripheral surface of a thin disk-like substrate 3b made of metal such as stainless steel or aluminum. More specifically, the blade portion 3a is, for example, a diamond on the outer periphery of the substrate 3b, which comprises the outer peripheral surface around the axis L1 and the outer peripheral portions of both side surfaces orthogonal to the axis L1 across the outer peripheral surface. It is formed by fixing abrasive grains (preferably, fine superabrasive grains) made of cBN (cubic boron nitride) or the like with a suitable bonding material such as resin bond or metal bond such as plated metal.
　なお、図５に示すように、前記基板３ｂの中央部には、該基板の板厚方向に貫通する取付孔３ｃが設けられており、この取付孔３ｃに図示しないスピンドルの先端が着脱自在に取り付けられる。そして、図示しないモーター等の駆動部により前記スピンドルを回転させることで、前記ブレード３が、その軸Ｌ１周り（スピンドル軸周り）の所定の回転方向に所定の回転速度で回転するように構成されている。 As shown in FIG. 5, an attachment hole 3c penetrating in the thickness direction of the substrate is provided at the central portion of the substrate 3b, and a tip of a spindle (not shown) is detachably attached to the attachment hole 3c. It is attached. The blade 3 is configured to rotate at a predetermined rotation speed in a predetermined rotation direction around the axis L1 (around the spindle axis) by rotating the spindle by a drive unit such as a motor (not shown). There is.
　次いで、本実施形態における前記ドレッシング機構２０について具体的に説明する。図５に示すように、このドレッシング機構２０は、前記ブレード３の刃部３ａに摺接させることにより該刃部をドレッシングするための前記ドレッサ１０と、該ドレッサ１０を駆動するためのドレッサ駆動部３０，４０，５０と、これらドレッサ１０及びドレッサ駆動部３０，４０，５０を装着した支持フレーム２１，２２，２３，２４とを有している。 Next, the dressing mechanism 20 in the present embodiment will be specifically described. As shown in FIG. 5, the dressing mechanism 20 has the dresser 10 for dressing the blade portion by sliding contact with the blade portion 3 a of the blade 3 and a dresser drive portion for driving the dresser 10. 30, 40, 50, and support frames 21, 22, 23, 24 on which the dresser 10 and the dresser driving unit 30, 40, 50 are mounted.
　前記ドレッサ駆動部は、ドレッサ１０を、ブレード２の前記第１軸Ｌ１と平行を成す第２軸Ｌ２周りに回動させる回転駆動部５０と、ドレッサ１０を水平方向においてＸ軸方向（軸Ｌ２と直角方向）及びそれと直角を成すＹ軸方向（軸Ｌ２と平行方向）にそれぞれ往復変位させる第１直線駆動部３０及び第２直線駆動部４０とから構成されている。 The dresser drive unit rotates the dresser 10 about a second axis L2 parallel to the first axis L1 of the blade 2, and the dresser 10 in the X direction (axis L2 in the horizontal direction). The first linear driving unit 30 and the second linear driving unit 40 are reciprocally displaced in the Y-axis direction (parallel to the axis L2) which forms the right angle and the right angle).
　また、上記支持フレームは、前記第１直線駆動部３０が搭載されていると共に、前記ワーク搬送テーブル２の上方に配置されて水平方向に延びる第１フレーム２１と、前記第２直線駆動部４０が搭載されていると共に、前記第１直線駆動部３０に連結されて第１フレーム２１に対してＸ軸方向に変位するＸ軸スライドテーブル２２と、前記第２直線駆動部４０に連結されてＸ軸スライドテーブル２２に対してＹ軸方向に変位するＹ軸スライドテーブル２３と、該Ｙ軸スライドテーブル２３に基端部（上端部）が固定されてＺ軸に沿って下方に延びた一対の第２フレーム２４，２４とを有している。 Further, the support frame includes a first frame 21 on which the first linear drive unit 30 is mounted and which is disposed above the work transfer table 2 and extends in the horizontal direction, and the second linear drive unit 40 An X-axis slide table 22 which is mounted and is connected to the first linear drive unit 30 and displaced in the X-axis direction with respect to the first frame 21 and is connected to the second linear drive unit 40 and is X-axis A Y-axis slide table 23 which is displaced in the Y-axis direction with respect to the slide table 22, and a pair of second ends of which the base end (upper end) is fixed to the Y-axis slide table 23 and which extends downward along the Z axis And frames 24 and 24.
　そして、該一対の第２フレーム２４，２４の先端部（下端部）において、前記ドレッサ１０の軸Ｌ２方向の両側端が回転自在かつ着脱可能に支持されている。なお、該ドレッサ１０を回動させる前記回転駆動部５０は、後述するように、前記Ｙ軸スライドテーブル２３と第２フレーム２４とに跨って設けられている。さらに、前記第１フレーム２１は、Ｘ軸方向に延びて互いに平行を成す一対の対向プレート２１ａ，２１ａと、Ｙ軸方向に延びてこれら対向プレート２１ａ，２１ａ間を連結する連結プレート２１ｂとから一体に形成されている。そして、これら対向プレート２１ａ，２１ａのうちの一方に、前記第１直線駆動部３０が搭載されている。 Then, at the front end (lower end) of the pair of second frames 24, both ends in the direction of the axis L 2 of the dresser 10 are rotatably and detachably supported. The rotation drive unit 50 for rotating the dresser 10 is provided across the Y-axis slide table 23 and the second frame 24 as described later. Further, the first frame 21 is integrally formed from a pair of opposing plates 21a and 21a extending in the X-axis direction and parallel to each other, and a connecting plate 21b extending in the Y-axis direction and connecting the opposing plates 21a and 21a. Is formed. The first linear drive unit 30 is mounted on one of the opposing plates 21a and 21a.
　図５に示すように、前記第１直線駆動部３０は、前記第１フレーム２１の一方の対向プレート２１ａ上においてＸ軸方向に延設されたＸ軸ガイドベース３１と、該Ｘ軸ガイドベース３１の長手方向の一端に配されたＸ軸送り用のモーター３２とを有している。そして、該Ｘ軸ガイドベース３１上に、前記Ｘ軸スライドテーブル２２の長手方向（Ｙ軸方向）の一端側がＸ軸方向に往復動可能に支持されている。 As shown in FIG. 5, the first linear drive unit 30 includes an X-axis guide base 31 extended in the X-axis direction on one opposing plate 21 a of the first frame 21, and the X-axis guide base 31. And a motor 32 for X-axis feeding disposed at one end in the longitudinal direction. Then, one end side of the X-axis slide table 22 in the longitudinal direction (Y-axis direction) is supported on the X-axis guide base 31 so as to be capable of reciprocating in the X-axis direction.
　本実施形態において、この第１直線駆動部３０は、例えば、該モーター３２とＸ軸ガイドベース３１内部に設けられたボールスクリュー（図示略）とによるボールねじ機構等によって構成することができる。その場合、前記Ｘ軸スライドテーブル２２に連結された移動子（図示略）を、Ｘ軸ガイドベース３１上に開設された長溝３１ａを通じて内部のボールスクリューに螺合させることにより、前記モーター３２の回転駆動力で前記Ｘ軸スライドテーブル２２をＸ軸方向に往復動させて変位させることができる。なお、前記一対の対向プレート２１ａ，２１ａのうち他方のフレーム２１ａ上には、ガイドレール３３がＸ軸方向に延設されており、前記Ｘ軸スライドテーブル２２の長手方向の他端側が、該ガイドレール２２によって摺動自在にガイドされている。 In the present embodiment, the first linear drive unit 30 can be configured, for example, by a ball screw mechanism or the like by the motor 32 and a ball screw (not shown) provided inside the X-axis guide base 31. In that case, the mover (not shown) connected to the X-axis slide table 22 is screwed to the internal ball screw through the long groove 31 a opened on the X-axis guide base 31 to rotate the motor 32. The X-axis slide table 22 can be reciprocated in the X-axis direction and displaced by a driving force. A guide rail 33 extends in the X-axis direction on the other frame 21a of the pair of opposing plates 21a, 21a, and the other end of the X-axis slide table 22 in the longitudinal direction is the guide It is slidably guided by the rails 22.
　また、前記第２直線駆動部４０は、前記Ｘ軸スライドテーブル２２上においてＹ軸方向に延設されたＹ軸ガイドベース４１と、該Ｙ軸ガイドベース４１の長手方向の一端に配されたＹ軸送り用のモーター４２とを有している。そして、該Ｙ軸ガイドベース４１上に、前記Ｙ軸スライドテーブル２３がＹ軸方向に往復動可能に支持されている。 The second linear driving unit 40 has a Y-axis guide base 41 extended in the Y-axis direction on the X-axis slide table 22 and a Y arranged at one end of the Y-axis guide base 41 in the longitudinal direction. And a motor 42 for axis feeding. The Y-axis slide table 23 is supported on the Y-axis guide base 41 so as to be capable of reciprocating in the Y-axis direction.
　この第２直線駆動部４０も、前記第１直線駆動部３０と同様に、ボールねじ機構によって構成することができる。その場合、前記Ｘ軸ガイドベース３１と同様に、前記Ｙ軸スライドテーブル２３に連結された移動子（図示略）を、Ｙ軸ガイドベース４１上に開設された長溝４１ａを通じて内部のボールスクリューに螺合させることにより、前記モーター４２の回転駆動力で前記Ｙ軸スライドテーブル２３をＹ軸方向に往復動させて変位させることができる。 Like the first linear drive unit 30, the second linear drive unit 40 can also be configured by a ball screw mechanism. In that case, similarly to the X-axis guide base 31, the mover (not shown) connected to the Y-axis slide table 23 is screwed into the internal ball screw through the long groove 41a opened on the Y-axis guide base 41. By combining them, the Y-axis slide table 23 can be reciprocated and displaced in the Y-axis direction by the rotational drive force of the motor 42.
　一方、前記回転駆動部５０は、前記Ｙ軸スライドテーブル２３上に配置されたモーター５１と、該モーター５１の回転駆動力を、該Ｙ軸スライドテーブル２３から垂下する前記第２フレーム２４，２４によって回動自在に支持されたドレッサ１０に伝達するための動力伝達機構とを有している。本実施形態において、該動力伝達機構は、モーター５１のモーター軸に取り付けられた上方プーリ５２と、前記ドレッサ１０の支軸に取り付けられた下方プーリ５３と、これら一対のプーリに掛け渡された環状ベルト５４とから構成されている。そして、前記モーター５１を回転制御することにより、その回転駆動力が上方プーリ５２からベルト５４を通じて下方プーリ５３に伝達され、前記ドレッサ１０をその軸Ｌ２周りに、任意の回転方向に任意の速度で回動させたり、任意の角度位置で停止させたりすることができるようになっている。 On the other hand, the rotational drive unit 50 includes a motor 51 disposed on the Y-axis slide table 23 and the second frames 24 and 24 for hanging the rotational drive force of the motor 51 from the Y-axis slide table 23. It has a power transmission mechanism for transmitting to the dresser 10 rotatably supported. In the present embodiment, the power transmission mechanism includes an upper pulley 52 attached to the motor shaft of the motor 51, a lower pulley 53 attached to the support shaft of the dresser 10, and an annular ring wound around the pair of pulleys. It is composed of a belt 54. The rotational driving force is transmitted from the upper pulley 52 to the lower pulley 53 through the belt 54 by controlling the rotation of the motor 51, and the dresser 10 is rotated about its axis L2 at an arbitrary speed in an arbitrary rotation direction. It can be turned or stopped at any angular position.
　このように、前記ドレッサ駆動部によれば、前記ドレッサ１０を、第１直線駆動部３０及び第２直線駆動部４０により、水平方向において、Ｘ軸方向（軸Ｌ２と直角方向）及びＹ軸方向（軸Ｌ２と平行方向）の２軸方向に直線的に移動させて任意の位置に変位させ、その位置で、回転駆動部５０により軸Ｌ２周りに回動制御することができるようになっている。 As described above, according to the dresser drive unit, the dresser 10 is moved in the X-axis direction (direction perpendicular to the axis L2) and the Y-axis direction in the horizontal direction by the first linear drive unit 30 and the second linear drive unit 40. It is linearly moved in two axial directions (parallel to the axis L2) to be displaced to an arbitrary position, and can be controlled to rotate around the axis L2 by the rotational drive unit 50 at that position. .
　図１－図５に示すように、前記ドレッサ１０は、軸Ｌ２周りに外周面１１を有するロータリードレッサであって、このドレッサ１０のＹ軸方向に延びる軸Ｌ２と前記ブレード３の軸Ｌ１とは、互いに平行を成して略水平方向に並んでおり、そのため、これらドレッサ１０とブレード３とはＸ軸方向に横並びに配置されている。前記ドレッサ１０は、多数の砥粒をボンド材で結合して成るドレス材で一体に形成されたもので、その外周面１１に、前記ブレード３の外周面を対向させてその刃部３ａを摺接させることにより、該刃部３ａをドレッシングすることができるようになっている。 As shown in FIG. 1 to FIG. 5, the dresser 10 is a rotary dresser having an outer peripheral surface 11 around an axis L2, and the axis L2 extending in the Y axis direction of the dresser 10 and the axis L1 of the blade 3 are The plurality of dressers 10 and the blades 3 are arranged side by side in the X-axis direction. The dresser 10 is integrally formed of a dressing material formed by bonding a large number of abrasive grains with a bonding material, and the outer peripheral surface of the blade 3 is opposed to the outer peripheral surface 11 to slide the blade portion 3a. The blade portion 3a can be dressed by contacting the blade portion 3a.
　前記砥粒としては、例えばホワイトアランダムやグリーンカーボランダム等を用いることができ、前記ボンド材としては、例えばレジンボンド、ビトリファイドボンド、メタルボンド等の適宜のボンド材を用いることができる。なお、このドレッサ１０は、必ずしも本実施形態のようにドレス材で一体成形したものである必要性はなく、後述するドレス領域１２に一定の深さのドレス材層を形成したものであってもよい。 As the abrasive grains, for example, white alundum, green carborundum and the like can be used, and as the bonding material, for example, an appropriate bonding material such as resin bond, vitrified bond, metal bond and the like can be used. The dresser 10 does not necessarily have to be integrally formed of a dress material as in the present embodiment, and even if a dress material layer of a certain depth is formed in a dress area 12 described later. Good.
　また、前記ドレッサ１０の外周面１１には、前記ブレード３の外周面と対向させたときに、該ブレード３の刃部３ａに摺接させて該刃部３ａをドレッシングするためのドレス領域１２と、該ブレード３の外周面と空隙を介して非接触状態とするための凹状の逃げ領域１３とが、その周方向に沿って形成されている。これらドレス領域１２と逃げ領域１３とは前記外周面１１の周方向において連なっており、該外周面の軸Ｌ２周りの１周は、円弧面から成る１つのドレス領域１２と、該軸Ｌ２方向の全長に亘って延びた溝から成る１つの逃げ領域とから構成されている。 Further, the outer peripheral surface 11 of the dresser 10 has a dressing area 12 for dressing the blade portion 3 a by bringing it into sliding contact with the blade portion 3 a of the blade 3 when facing the outer peripheral surface of the blade 3. A concave relief area 13 for bringing the outer peripheral surface of the blade 3 into a non-contact state via an air gap is formed along the circumferential direction. The dress area 12 and the relief area 13 are continuous in the circumferential direction of the outer peripheral surface 11, and one circumference around the axis L2 of the outer peripheral surface is one dress area 12 made of a circular arc surface and the direction of the axis L2. It consists of one relief area consisting of a groove extending over the entire length.
　このとき、軸Ｌ２を中心とする前記ドレス領域１２の角度範囲は、前記逃げ領域１３の角度範囲よりも大きく形成されている。すなわち、前記ドレス領域１２の角度範囲は鈍角となっており、前記逃げ領域１３の角度範囲は鋭角となっている。なお、この逃げ領域１３において、溝底１３ａは回転軸Ｌ２を中心としてドレス部１２の円弧面と同心円状の円弧面に形成されており、また、一対の側壁１３ｂはドレッサ１０の半径方向に沿って放射状に形成されている。 At this time, the angular range of the dress area 12 around the axis L 2 is formed larger than the angular range of the relief area 13. That is, the angular range of the dressing area 12 is obtuse, and the angular range of the relief area 13 is acute. In the relief area 13, the groove bottom 13 a is formed in an arc surface concentric with the arc surface of the dress portion 12 around the rotation axis L 2, and the pair of side walls 13 b are along the radial direction of the dresser 10. It is radially formed.
　そして、前記ドレッサ１０の軸Ｌ２とブレード３の軸Ｌ１とは、該ドレッサ１０のドレス領域１２をブレード３の外周面と対向させたときには前記刃部３ａが該ドレス領域１２に摺接され、逃げ領域１３を同じく対向させたときには前記刃部３ａがブレード３の外周面と空隙を介して非接触状態となるような所定の距離を保持して、互いに平行に配置されている。さらに、ドレッシング時における該ドレッサ１０の回動速度は、テーブル２の送り速度等を考慮して、切削加工中に常にドレス領域にブレード３の刃部３ａが摺接されるように、ブレード３の回転速度よりも十分に小さく設定される。 When the dressing area 12 of the dresser 10 is opposed to the outer peripheral surface of the blade 3, the blade 3a is in sliding contact with the dressing area 12 and the axis L2 of the dresser 10 and the axis L1 of the blade 3 When the region 13 is also made to face in the same manner, the blade portions 3a are arranged in parallel with each other with a predetermined distance such that the blade portions 3a are not in contact with the outer peripheral surface of the blade 3 via an air gap. Furthermore, the rotational speed of the dresser 10 at the time of dressing is determined so that the blade portion 3a of the blade 3 is always in sliding contact with the dressing area during cutting in consideration of the feed speed of the table 2 and the like. It is set sufficiently smaller than the rotational speed.
　そのため、ドレッサ１０のドレス領域１２がブレード３の外周面に対向しているときには、該ブレード３の刃部３ａが、該ドレス領域１２のドレス材に切り込んで、該刃部３ａのドレッシングが実行される（図２及び図３）。その一方で、逃げ領域１３がブレードの外周面に対向しているときには、該ブレードの刃部３ａが、該逃げ領域１３におけるドレッサ１０の外周面（すなわち、溝底１３ａ及び一対の側壁１３ｂ）と空隙を介して非接触状態となり、該刃部３ａのドレッシングが停止（回避）される（図１及び図４）。 Therefore, when the dressing area 12 of the dresser 10 faces the outer peripheral surface of the blade 3, the blade portion 3a of the blade 3 is cut into the dressing material of the dressing region 12 and dressing of the blade portion 3a is performed. (Figures 2 and 3). On the other hand, when the relief area 13 is opposed to the outer peripheral surface of the blade, the blade portion 3a of the blade is the outer peripheral surface of the dresser 10 in the relief area 13 (that is, the groove bottom 13a and the pair of side walls 13b). Non-contact state is established via the gap, and dressing of the blade 3a is stopped (avoided) (FIGS. 1 and 4).
　ここで、前記ドレッサ１０における逃げ領域１３の角度範囲すなわち溝底１３ａの周方向長さや、溝深さすなわち側壁１３ｂの径方向長さは、ドレッサ１０とブレード３との軸Ｌ１，Ｌ２間距離、或いは、該ドレッサ１０及びブレード３の直径等に応じて適宜設定される。また、本実施形態においては、ドレッサ１０におけるドレス領域１２の径がブレード３の径よりも小径に形成されているため、ドレッサ１０の軸Ｌ２がブレード３の軸Ｌ１と水平方向に並設されていても、ワークＷの切削加工時に、ブレード３がワークＷに該ドレッサ１０がその真下を通過するワークＷと接触することがない。 Here, the angular range of the relief area 13 in the dresser 10, ie, the circumferential length of the groove bottom 13a and the groove depth, ie, the radial length of the side wall 13b, are the distance between the dresser 10 and the blade 3 between the axes L1 and L2, Alternatively, it may be appropriately set according to the diameter of the dresser 10 and the blade 3 or the like. Further, in the present embodiment, since the diameter of the dressing area 12 in the dresser 10 is smaller than the diameter of the blade 3, the axis L2 of the dresser 10 is arranged parallel to the axis L1 of the blade 3 in the horizontal direction. Even when the work W is cut, the blade 3 does not contact the work W with the work W passing the dresser 10 immediately below.
　このように、本実施形態においては、前記回転駆動部５０で前記ドレッサ１０を軸Ｌ２周りに回動させることにより、上記ドレス領域１２によるブレード３のドレッシング状態と、逃げ領域１３によるブレード３の非ドレッシング状態とを選択的に切り換えることができるようになっている。そのため、ブレード３のドレッシングを省スペースにて実現することが可能となり、切削装置１の大型化を抑制することが可能となる。 As described above, in the present embodiment, by rotating the dresser 10 around the axis L2 by the rotation drive unit 50, the dressing state of the blade 3 by the dressing area 12 and the non-rolling of the blade 3 by the relief area 13 It is possible to selectively switch between the dressing state. Therefore, dressing of the blade 3 can be realized in a space-saving manner, and an increase in size of the cutting device 1 can be suppressed.
　次に、図１－図４に基づいて、切削装置１における前記ブレード３によるワークＷの切削動作、及び前記ドレッサ１０による該ブレード３のドレッシング動作について具体的に説明する。
　先ず、板状のワークＷをワーク搬送テーブル２のワーク搭載面２ａ上に搭載し、ブレード３の回転数とその回転方向、ワーク搬送テーブル２のＸ軸方向への送り速度や送り量等を適宜設定する。また、このとき、ドレッサ１０に対するブレード３の切り込み量や、ドレッサ１０の回転軸Ｌ２方向における切り込み位置等を調整する為に、前記第１及び第２直線駆動部３０，４０により、該ドレッサ１０のＸ軸及びＹ軸方向における位置調整が行われる。 Next, based on FIGS. 1 to 4, the cutting operation of the work W by the blade 3 in the cutting apparatus 1 and the dressing operation of the blade 3 by the dresser 10 will be specifically described.
First, a plate-like workpiece W is mounted on the workpiece mounting surface 2a of the workpiece conveyance table 2, and the number of rotations of the blade 3 and its rotational direction, the feed speed and feed amount of the workpiece conveyance table 2 in the X axis direction Set At this time, the first and second linear drive units 30 and 40 adjust the amount of cutting of the blade 3 with respect to the dresser 10, the cutting position of the dresser 10 in the rotational axis L2 direction, and the like. Position adjustment in the X-axis and Y-axis directions is performed.
　このような各種切削条件を設定したのち、図示しないブレード回転用のモーターを駆動して前記スピンドルを回転させることにより、該スピンドル先端に装着された前記ブレード３をその軸Ｌ１周りに高速回転させると共に、ワーク搬送テーブル２をブレード３に向けて所定の送り速度でＸ軸方向に沿って移動させていく。まず、図１に示すように、ワーク搬送テーブル２が、ブレード３よりもテーブル送り方向において未だ手前側に位置し、該ブレード３の刃部３ａがワークＷから離間した非加工状態にあるときには、ドレッサの逃げ領域１３を水平方向におけるブレード３側に向けた状態で、該ドレッサ１０は回動を停止している。このとき、該逃げ領域１３におけるドレッサ１０の外周面１１（溝底１３ａ及び一対の側壁１３ｂ）とブレードの外周面とは、空隙を介して非接触状態となっているため、ワークＷの切削加工前においては、原則として、該ドレッサ１０による刃部３ａのドレッシングが行われないようになっている。 After setting such various cutting conditions, by driving a motor for rotating a blade (not shown) to rotate the spindle, the blade 3 mounted at the tip of the spindle is rotated at high speed around its axis L1. The work transfer table 2 is moved toward the blade 3 along the X-axis direction at a predetermined feed rate. First, as shown in FIG. 1, when the work transfer table 2 is still positioned on the near side in the table feed direction with respect to the blade 3 and the blade portion 3a of the blade 3 is separated from the work W, With the relief area 13 of the dresser directed to the side of the blade 3 in the horizontal direction, the dresser 10 stops rotating. At this time, since the outer peripheral surface 11 (the groove bottom 13a and the pair of side walls 13b) of the dresser 10 and the outer peripheral surface of the blade in the relief region 13 are not in contact with each other via a gap, cutting of the work W In principle, dressing of the blade portion 3a by the dresser 10 is not performed in principle.
　そして、ワーク搬送テーブル２にさらに送りが与えられ、図２のように、刃部３ａによるワークＷの切削加工が開始されると、それに対応して、前記回転駆動部５０のモーター５１が駆動される。そのとき、ドレッサ１０はブレード３とは逆向きに回動し、前記ドレス領域１２を水平方向に向けてブレードの外周面に対向させる。なお、ドレッサ１０の回動速度は、ワークＷの切削加工中に、常に刃部３ａがドレス領域１２に摺接してドレッシングが実行され、かつ、該ドレス領域１２に対する刃部３ａの必要な摺接速度を確保してドレッシングが確実に実行されるように、ブレード３の回転速度、ワークＷの材質、ドレス領域１２の周方向長さ、切削加工時間等、様々なパラメータを考慮して設定される。 Then, the work transfer table 2 is further fed, and as shown in FIG. 2, when the cutting process of the work W by the blade portion 3a is started, the motor 51 of the rotational drive unit 50 is driven correspondingly. Ru. At that time, the dresser 10 is rotated in the direction opposite to that of the blade 3 so that the dressing area 12 is directed horizontally to face the outer peripheral surface of the blade. The rotational speed of the dresser 10 is determined such that the blade portion 3a is always in sliding contact with the dress area 12 during dressing of the workpiece W, and dressing is performed, and the necessary slide contact of the blade part 3a to the dress area 12 is performed. It is set in consideration of various parameters such as the rotational speed of the blade 3, the material of the work W, the circumferential length of the dress area 12, the cutting time, etc., so that the dressing can be performed reliably by securing the speed. .
　そうすると、図３のように、ドレッサ１０は軸Ｌ２回りに回動しながら、回転するブレード３の刃部３ａに対して、そのドレス領域１２を周方向に順次摺接させていき、その結果、該刃部３ａはワークＷを切削加工しながらドレッシングされる。その際、ドレッサ１０のドレス領域１２には、その周方向に沿って所定の深さの切り込み溝が形成され、それにより、ブレード３の外周縁に形成された刃部３ａ全体がドレッシングされる。 Then, as shown in FIG. 3, while rotating the dresser 10 about the axis L2, the dress region 12 is sequentially brought into sliding contact with the blade portion 3a of the rotating blade 3 in the circumferential direction, as a result, The blade portion 3a is dressed while cutting the work W. At that time, in the dressing area 12 of the dresser 10, a cut groove having a predetermined depth is formed along the circumferential direction, whereby the entire blade portion 3a formed on the outer peripheral edge of the blade 3 is dressed.
　それから、さらにワーク搬送テーブル２がテーブル送り方向に移動し、図４に示すように、テーブル送り方向におけるワークＷの後端（図では右端）から前記ブレード３の刃部３ａが離間すると、前記ワークＷに対する１列の切削ラインの加工が終了する。そうすると、前記ドレッサ１０は、回動により再び逃げ領域１３を水平方向におけるブレード３側に向け、該逃げ領域１３をブレード３の外周面に対向させた状態で回動を停止し、該ブレード３のドレッシングも停止する。 Then, the work transfer table 2 further moves in the table feed direction, and as shown in FIG. 4, when the blade portion 3a of the blade 3 is separated from the rear end (right end in the figure) of the work W in the table feed direction The processing of one cutting line for W is completed. Then, the dresser 10 again turns the relief area 13 toward the blade 3 side in the horizontal direction by rotation, and stops the rotation in a state where the relief area 13 faces the outer peripheral surface of the blade 3. Stop dressing too.
　このように、上記切削装置１においては、前記ドレッサ３の刃部３ａによりワークＷを切削しながら該刃部３ａのドレッシングが行われるようになっているため、より効率に優れた切削加工が可能となる。また、ドレッサ１０のドレス領域１２が円弧面から成る外周面１１に形成されており、しかも、ドレッサ１０を単に軸Ｌ２周りに回動させることによって、ブレード３の刃部３ａに対して、該ドレス領域１２を対向させたドレッシング状態と、前記逃げ領域１３を対向させた非ドレッシング状態とを選択的に切換えることができるため、ドレッシング機構を小型化することができると共に、ブレード３のドレッシングを省スペースにて実現することが可能となり、その結果、切削装置１の大型化を抑制することが可能となる。 As described above, in the cutting device 1, dressing of the blade portion 3 a is performed while cutting the work W by the blade portion 3 a of the dresser 3, so that more efficient cutting can be performed. It becomes. In addition, the dressing area 12 of the dresser 10 is formed on the outer peripheral surface 11 formed of a circular arc surface, and the dresser 10 is simply rotated about the axis L2 so that Since the dressing state in which the area 12 is opposed and the non-dressing state in which the relief area 13 is opposed can be selectively switched, the dressing mechanism can be miniaturized, and the dressing of the blade 3 can be space-saving. As a result, it is possible to suppress an increase in size of the cutting device 1.
　以上、本発明に係るドレッシング機構及び切削装置について説明してきたが、本発明は前記実施形態に限定されることなく、特許請求の範囲の趣旨を逸脱しない範囲で様々な設計変更が可能である。
　例えば、前記ドレッサ１０を用いたブレード３のドレッシングは、ワークＷの切削加工中に限らず、ブレード３を新品に交換した場合など切削加工に先立ってドレッシングが必要な場合には、切削加工前の図１のタイミングで行ってもよい。また、本実施形態においては、前記ドレッサ１０により主としてブレード３の刃部３ａの目立てを行っているが、例えば、ブレード３の刃部３ａの外形を修正するようなツルーイング性をドレッサ１０に持たせることもできる。
　また、前記ドレッサ１０の配置位置に関し、本実施形態においては、該ドレッサ１０の軸Ｌ２とブレード３の軸Ｌ１とが略水平方向に並ぶようにして配されているが、これに限らず、例えばこれらの軸Ｌ１，Ｌ２が垂直方向（Ｚ軸方向）で上下に並ぶようにして配置してもよい。また、前記ドレッサ１０は、テーブル送り方向において前記ブレード３よりも後方に配されているが、該ブレード３よりも前方に配置することもできる。
　また、ワークＷの切削加工時において、本実施形態では、前記ドレッサ１０を該ブレード３の回転方向と逆向きに回転させながら該ブレード３の刃部３ａのドレッシングを行うようにしているが、これに限らず、ブレード３の回転方向と同方向に回転させることでドレッシングを行うことも可能である。 Although the dressing mechanism and the cutting device according to the present invention have been described above, the present invention is not limited to the embodiment, and various design changes can be made without departing from the scope of the claims.
For example, dressing of the blade 3 using the dresser 10 is not limited during cutting of the work W, but when dressing is necessary prior to cutting such as when the blade 3 is replaced with a new one, You may carry out at the timing of FIG. Further, in the present embodiment, the dressing of the blade 3a of the blade 3 is mainly performed by the dresser 10. However, for example, the dresser 10 is provided with a truing property such that the outer shape of the blade 3a of the blade 3 is corrected. It can also be done.
Further, regarding the arrangement position of the dresser 10, in the present embodiment, the axis L2 of the dresser 10 and the axis L1 of the blade 3 are arranged substantially horizontally, but the present invention is not limited to this. The axes L1 and L2 may be arranged vertically in the vertical direction (Z-axis direction). The dresser 10 is disposed rearward of the blade 3 in the table feed direction, but may be disposed forward of the blade 3.
Further, at the time of cutting of the work W, in the present embodiment, dressing of the blade portion 3 a of the blade 3 is performed while rotating the dresser 10 in the direction opposite to the rotation direction of the blade 3. The dressing may be performed by rotating the blade 3 in the same direction as the rotation direction of the blade 3.
　　　１　　　切削装置
　　　２　　　ワーク搬送テーブル
　　　３　　　ブレード
　　　３ａ　　ブレードの刃部
　　　１０　　ドレッサ
　　　１１　　ドレッサの外周面
　　　１２　　ドレス領域
　　　１３　　逃げ領域
　　　２０　　ドレッシング機構
　　　Ｌ１　　ブレードの回転軸（第１軸）
　　　Ｌ２　　ドレッサの回転軸（第２軸）
　　　Ｗ　　　ワーク
  DESCRIPTION OF SYMBOLS 1 cutting device 2 work conveyance table 3 blade 3a blade blade portion 10 dresser 11 outer peripheral surface of dresser 12 dress region 13 relief region 20 dressing mechanism L1 blade rotation shaft (first shaft)
Axis of rotation of L2 dresser (second axis)
W work

Claims (6)

  1. 　研削装置の円盤状ブレードにおける軸周りの外周面を含む外周縁に形成された刃部をドレッシングするためのドレッシング機構であって、
    　該ドレッシング機構は、前記ブレードの刃部に摺接させることにより、該刃部をドレッシングするためのドレッサと、該ドレッサを駆動するドレッサ駆動部と、これらドレッサ及びドレッサ駆動部を装着した支持フレームとを有し、
    　前記ドレッサは、その軸周りに外周面を有していて、前記支持フレームにより該軸周りに回転自在に支持されており、
    　前記ドレッサの外周面には、前記ブレードの外周面と対向させたときに、前記刃部に摺接させるためのドレス領域と、該ブレードの外周面と空隙を介して非接触状態にするための凹状の逃げ領域とが、その周方向に沿って設けられており、
    　前記ドレッサ駆動部で前記ドレッサを軸周りに回動させることにより、上記ドレス領域によるドレッシング状態と逃げ領域による非ドレッシング状態とを選択的に切り換えることができるように構成されている、
    ことを特徴とするドレッシング機構。     A dressing mechanism for dressing a blade portion formed on an outer peripheral edge including an outer peripheral surface around an axis in a disk-like blade of a grinding apparatus, comprising:
    The dressing mechanism includes a dresser for dressing the blade by sliding contact with the blade of the blade, a dresser drive for driving the dresser, and a support frame on which the dresser and the dresser drive are mounted. Have
    The dresser has an outer peripheral surface around its axis, and is rotatably supported around the axis by the support frame,
    A dressing area for bringing the blade into sliding contact with the outer peripheral surface of the dresser when facing the outer peripheral surface of the blade, and a non-contact state between the outer peripheral surface of the blade and the gap. A concave relief area is provided along the circumferential direction,
    The dressing state by the dressing area and the non-dressing state by the relief area can be selectively switched by rotating the dresser around the axis by the dresser driving unit.
    A dressing mechanism characterized by
  2. 　請求項１に記載のドレッシング機構において、
    　前記ドレッサの外周面の１周が、円弧面から成る１つの前記ドレス領域と、１つの前記逃げ領域とから構成されていて、
    　前記逃げ部が、前記ドレッサの軸方向の全長に亘って延びる溝状に形成されており、
    　前記ドレッサの軸を中心とするドレス領域の角度範囲が逃げ領域の角度範囲よりも大きく形成されている、
    ことを特徴とするもの。     In the dressing mechanism according to claim 1,
    One round of the outer peripheral surface of the dresser is composed of one of the dress area consisting of a circular arc surface and one of the relief area,
    The relief portion is formed in a groove shape extending along the entire axial length of the dresser,
    The angular range of the dressing area around the axis of the dresser is formed larger than the angular range of the relief area,
    What is characterized by.
  3. 　請求項１に記載のドレッシング機構において、
    　前記ドレッサ駆動部は、前記ドレッサをその軸周りに回動させる回転駆動部と、該ドレッサを水平方向において、その軸と直角方向及び平行方向にそれぞれ変位させる直線駆動部とから構成されている、
    ことを特徴とするもの。     In the dressing mechanism according to claim 1,
    The dresser drive unit includes a rotary drive unit for rotating the dresser about its axis, and a linear drive unit for displacing the dresser in the horizontal direction in a direction perpendicular to and parallel to the axis.
    What is characterized by.
  4. 　請求項２に記載のドレッシング機構において、
    　前記ドレッサ駆動部は、前記ドレッサをその軸周りに回動させる回転駆動部と、該ドレッサを水平方向において、その軸と直角方向及び平行方向にそれぞれ変位させる直線駆動部とから構成されている、
    ことを特徴とするもの。     In the dressing mechanism according to claim 2,
    The dresser drive unit includes a rotary drive unit for rotating the dresser about its axis, and a linear drive unit for displacing the dresser in the horizontal direction in a direction perpendicular to and parallel to the axis.
    What is characterized by.
  5. 　請求項１－４の何れかに記載のドレッシング機構を備えた研削装置であって、
    　該研削装置は、軸周りの外周面を含む外周縁に刃部が形成されて該軸周りに回転駆動される円盤状ブレードと、前記ブレードの軸に対して相対的に直角方向に送られるテーブルとを備えていて、回転する前記ブレードの刃部で該テーブルのワークを切削するように構成されており、
    　前記ドレッサの軸とブレードの軸とは、前記ドレッサのドレス領域をブレードの外周面と対向させたときに前記刃部が該ドレス領域に摺接される所定の距離を保持して、互いに平行に配置されるようになっており、
    　前記ドレッサ駆動部でドレッサを回動させることにより、前記ブレードの外周面に対して前記ドレッサのドレス領域及び逃げ領域を選択的に対向させることができるように構成されていて、
    　前記ドレッサのドレス領域を前記ブレードの外周面に対向させたときに前記刃部のドレッシングを実行し、前記ドレッサの逃げ領域を前記ブレードの外周面に対向させたときに前記刃部のドレッシングを停止する、
    ことを特徴とするもの。     It is a grinding apparatus provided with the dressing mechanism in any one of Claims 1-4, Comprising:
    The grinding apparatus includes a disk-like blade having a blade formed on an outer peripheral edge including an outer peripheral surface around an axis and rotationally driven about the axis, and a table fed in a direction perpendicular to the axis of the blade. And is configured to cut the work of the table with the blade portion of the rotating blade,
    The axis of the dresser and the axis of the blade are parallel to each other, maintaining a predetermined distance in which the blade portion is in sliding contact with the dress area when the dress area of the dresser is opposed to the outer peripheral surface of the blade. Is to be placed,
    By rotating the dresser by the dresser drive unit, the dress area and the relief area of the dresser can be selectively made to face the outer peripheral surface of the blade.
    Dressing of the blade is performed when the dressing area of the dresser is made to face the outer peripheral surface of the blade, and dressing of the blade is stopped when the relief area of the dresser is made facing the outer peripheral surface of the blade Do,
    What is characterized by.
  6. 　請求項１－４の何れかに記載のドレッシング機構を用いたブレードのドレッシング方法であって、
    　ブレードをその軸回りに回転させてワークを切削加工しているときには、前記ドレッサのドレス領域を該ブレードの外周面に対向させて、該ドレッサを軸周りに回動させながら該ブレードの刃部を該ドレス領域に対して周方向に順次摺接させることにより、該ブレードの刃部をドレッシングし、
    　ブレードがワークから離間した該ワークの非加工時には、前記ドレッサの逃げ領域を該ブレードの外周面に非接触状態で対向させ、該ドレッサの回動を停止させる、
    ことを特徴とするもの。
          A method of dressing a blade using the dressing mechanism according to any one of claims 1-4,
    When cutting the work by rotating the blade about its axis, the dressing area of the dresser is made to face the outer peripheral surface of the blade, and the blade portion of the blade is rotated while rotating the dresser about the axis. The blade portion of the blade is dressed by sequentially sliding in the circumferential direction with respect to the dressing area,
    At the time of non-processing of the work whose blade is separated from the work, the relief area of the dresser is made to face the outer peripheral surface of the blade in a non-contact state, and the rotation of the dresser is stopped.
    What is characterized by.
PCT/JP2017/020987 2016-06-28 2017-06-06 Blade dressing mechanism, cutting device comprising same mechanism, and blade dressing method using same mechanism WO2018003429A1 (en)

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