WO2017213146A1 - Foreign matter inspecting device - Google Patents

Foreign matter inspecting device Download PDF

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Publication number
WO2017213146A1
WO2017213146A1 PCT/JP2017/021004 JP2017021004W WO2017213146A1 WO 2017213146 A1 WO2017213146 A1 WO 2017213146A1 JP 2017021004 W JP2017021004 W JP 2017021004W WO 2017213146 A1 WO2017213146 A1 WO 2017213146A1
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WO
WIPO (PCT)
Prior art keywords
unit
support
ray
inspection
foreign matter
Prior art date
Application number
PCT/JP2017/021004
Other languages
French (fr)
Japanese (ja)
Inventor
眞悟 野口
祐二 川口
Original Assignee
株式会社イシダ
日新電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社イシダ, 日新電子工業株式会社 filed Critical 株式会社イシダ
Priority to JP2018521737A priority Critical patent/JP7011261B2/en
Priority to CN201780034732.4A priority patent/CN109313280A/en
Publication of WO2017213146A1 publication Critical patent/WO2017213146A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/16—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the material being a moving sheet or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables

Definitions

  • This disclosure relates to a foreign matter inspection apparatus.
  • Patent Document 1 discloses a metal detection unit that detects, as a foreign object, a metal contained in an object to be inspected that is being transported by the transport unit using a transport unit that transports the object to be inspected and an interaction between a magnetic field and metal.
  • a foreign matter inspection apparatus comprising:
  • the transport unit passes through the case containing the search coil in the metal detection unit, the transport is performed when carrying out maintenance of the transport unit (for example, cleaning of the transport unit). It is necessary to pull out the transport unit integrally from the case of the metal detection unit along the transport direction of the object to be transported by the unit.
  • maintenance of the transport unit for example, cleaning of the transport unit.
  • an object of the present disclosure is to provide a foreign matter inspection apparatus capable of easily carrying out maintenance of the transport unit.
  • a foreign matter inspection apparatus uses a transport unit that transports an object to be inspected, and an interaction between a magnetic field and metal to remove metal contained in the test object that is being transported by the transport unit.
  • a metal detection unit that detects the first feed roller disposed at the upstream end of the transport region of the object to be inspected by the transport unit, and the second feed roller disposed at the downstream end of the transport region.
  • an endless belt spanned between the first feed roller and the second feed roller, and a support plate that supports the endless belt in the transport region, the support plate being along the transport direction of the inspection object by the transport unit
  • a plurality of support portions arranged side by side and separated from each other.
  • the support plate that supports the endless belt is separated into a plurality of support portions that are arranged in parallel along the transport direction. Therefore, when carrying out maintenance of the transport unit, it is not necessary to pull out the transport unit as a unit from the case of the metal detection unit along the transport direction. Therefore, according to the foreign substance inspection device according to an embodiment of the present disclosure, it is possible to easily perform the maintenance of the conveyance unit even when the space on both sides of the foreign substance inspection device in the conveyance direction is limited.
  • a foreign matter inspection apparatus uses at least one of an X-ray inspection unit that detects foreign matter contained in an object to be inspected being transported by a transport unit using X-ray transparency, and a transport unit. And a housing that houses the X-ray inspection unit and the metal detection unit, and has an inspection object carry-in port by the transfer unit and an inspection object transfer port by the transfer unit.
  • an X-ray inspection unit is provided in the foreign substance inspection device, dirt attached to the surface of the endless belt tends to reduce the accuracy of the X-ray inspection. The frequency of performing is likely to increase.
  • the foreign substance inspection apparatus when the foreign substance inspection apparatus is provided with an X-ray inspection unit, a housing is required to suppress external leakage of X-rays, so that it is difficult to easily carry out maintenance of the transport unit. Easy to be.
  • the configuration according to an embodiment of the present disclosure is particularly effective when the foreign substance inspection apparatus is provided with an X-ray inspection unit and a housing.
  • an opening through which the X-ray of the X-ray inspection unit passes may be formed in any one of the plurality of support portions.
  • a gap through which X-rays of the X-ray inspection unit pass may be formed between the support portions adjacent to each other.
  • the metal detection unit includes a case in which the search coil is disposed inside and the transport unit passes through the inside, and the plurality of support portions are mutually outside on the case. It may be separated. Thereby, compared with the case where several support parts are mutually isolate
  • the transport unit includes a first feed roller, and a first support frame to which a support portion arranged on the most upstream side of the transport region among the plurality of support portions is attached; You may further have a 2nd feed roller and the 2nd support frame to which the support part arrange
  • the first feed roller, the most upstream support portion and the first support frame set, and the second feed roller, the most downstream support portion and the second support frame set can be handled as a unit. As a result, maintenance of the transport unit can be performed more easily.
  • the support plate may include two or three support portions that are arranged in parallel along the transport direction and separated from each other. Thereby, it is possible to achieve both suppression of complication of the apparatus configuration and easy maintenance of the transport unit.
  • At least one first engagement projecting toward the other support portion of the support portions adjacent to each other is provided on one support portion of the support portions adjacent to each other.
  • a plurality of second engaging portions projecting toward one support portion are provided on the other support portion, and one support portion and the other support portion include at least one first support portion.
  • the one engaging portion may be engaged with each other in a state of being positioned between the second engaging portions adjacent to each other. Thereby, an endless belt can be supported stably.
  • an X-ray inspection unit is provided, leakage of X-rays can be reliably prevented.
  • one support part and the other support part can be easily separated.
  • FIG. 1 is a front view of a foreign matter inspection apparatus according to an embodiment.
  • FIG. 2 is a conceptual diagram showing an internal configuration and a control system of the foreign matter inspection apparatus of FIG.
  • FIG. 3 is a front view of the main components of the X-ray inspection unit and the metal detection unit of FIG.
  • FIG. 4 is a perspective view of main components of the X-ray inspection unit and the metal detection unit of FIG.
  • FIG. 5 is a front view of the main components of the X-ray inspection unit, the metal detection unit, and the conveyance unit of FIG.
  • FIG. 6 is a front view of the main components of the X-ray inspection unit, the metal detection unit, and the transport unit of FIG.
  • FIG. 7 is a side view of a modified support plate.
  • FIG. 1 is a front view of a foreign matter inspection apparatus according to an embodiment.
  • FIG. 2 is a conceptual diagram showing an internal configuration and a control system of the foreign matter inspection apparatus of FIG.
  • FIG. 3 is a front
  • FIG. 8 is a plan view of the support plate of FIG.
  • FIG. 9 is a side view of the support plate of FIG. 7 with the first support portion and the second support portion separated from each other.
  • FIG. 10 is a plan view of the support plate of FIG. 7 with the first support portion and the second support portion separated from each other.
  • the foreign object inspection apparatus 1 is a device that detects foreign matter contained in an object to be inspected.
  • the inspected object is, for example, food.
  • the foreign object inspection apparatus 1 performs X-ray inspection and metal detection while conveying the inspection object in the interior thereof, and inspects whether or not the inspection object contains foreign objects.
  • X-ray inspection is a technique for detecting foreign matter contained in an object to be inspected using X-ray transparency, and is realized by the X-ray inspection unit 2 (see FIG. 2). In the X-ray inspection, it is possible to detect a foreign substance having X-ray permeability different from that of the inspection object.
  • Metal detection is a technique for detecting a metal contained in an inspection object as a foreign object using the interaction between a magnetic field and metal, and is realized by the metal detection unit 3 (see FIG. 2). In metal detection, metal can be detected as a foreign substance.
  • the foreign matter inspection apparatus 1 has a housing 4 in which a space is formed.
  • the housing 4 accommodates the X-ray inspection unit 2 and the metal detection unit 3 (see FIG. 2) inside.
  • the housing 4 shields X-rays generated by the X-ray inspection unit 2 and suppresses external leakage of X-rays.
  • the housing 4 is made of, for example, stainless steel.
  • the housing 4 has, for example, a rectangular parallelepiped box shape.
  • An opening 4 a that communicates with the inside of the housing 4 is formed on one side surface of the housing 4.
  • An opening 4 b that communicates with the inside of the housing 4 is formed on the other side surface of the housing 4.
  • the opening 4a is an inspection object carry-in port
  • the opening 4b is an inspection object carry-out port.
  • an upper door 40 and a lower door 41 that open and close the housing 4 are provided on the front surface of the housing 4.
  • the upper door 40 and the lower door 41 have a hinged door structure, for example. By opening the upper door 40 or the lower door 41, at least a part of an X-ray inspection unit 2 and a metal detection unit 3 described later are exposed to the outside.
  • the upper door 40 and the lower door 41 are made of, for example, stainless steel.
  • a display 5 and an operation switch 6 are provided on the front surface of the upper door 40.
  • the display 5 is a display device having both a display function and an input function, for example, a touch panel.
  • the display 5 displays results of X-ray inspection and metal detection, and also displays an operation screen for setting various parameters related to metal detection and X-ray inspection.
  • the operation switch 6 is a power switch for the X-ray inspection unit 2 and the metal detection unit 3.
  • the housing 4 is supported by support legs 7.
  • a notification unit 8 and a cooler 9 are provided on the upper surface of the housing 4.
  • the notification unit 8 notifies the contamination of foreign matters and the operating state of the device.
  • the notification unit 8 includes a first notification unit 81 corresponding to the X-ray inspection unit 2 and a second notification unit 82 corresponding to the metal detection unit 3.
  • the cooler 9 sends cool air to the inside of the housing 4 and adjusts the temperature of the devices arranged inside the housing 4.
  • the inside of the housing 4 is inspected by carrying a part of an X-ray generator 21 to be described later, a substrate chamber T1 in which various control boards and the like are placed, and an object S to be inspected. Is divided into an examination room T2 in which is performed.
  • the substrate chamber T1 is located on the upper side of the inspection chamber T, and the temperature is adjusted by the cooler 9.
  • a transport unit 10 for transporting the inspection object S is arranged.
  • the transport unit 10 is a roller-type belt conveyor, and extends in the horizontal direction inside the housing 4 with one end located in the opening 4a and the other end located in the opening 4b. . That is, the housing 4 accommodates a portion of the transport unit 10 excluding one end and the other end.
  • the transport unit 10 carries the inspection object S into the housing 4 through the opening 4a and carries the inspection object S out of the housing 4 through the opening 4b.
  • a carry-in conveyor 101 is arranged on one side of the carrying unit 10 and a carry-out conveyor 102 is arranged on the other side of the carrying unit 10. ing.
  • the carry-out conveyor 102 may be provided with a distribution mechanism for the inspection object S.
  • An X-ray shielding curtain 42 is disposed in the opening 4a.
  • An X-ray shielding curtain 43 is disposed in the opening 4b.
  • the upper end of each X-ray shielding curtain 42, 43 is a fixed end with respect to the housing 4, and the lower end of each X-ray shielding curtain 42, 43 is a free end.
  • the X-ray shielding curtains 42 and 43 shield X-rays generated by the X-ray inspection unit 2 and suppress external leakage of X-rays.
  • Each X-ray shielding curtain 42, 43 is formed of a flexible material containing a metal material (tungsten or the like), for example.
  • a cylindrical case 31 having a through hole 31a for allowing the inspection object S to pass therethrough is disposed in the inspection room T2.
  • the conveyance part 10 has penetrated the case 31 through the through-hole 31a.
  • the inspection object S passes through the through hole 31 a of the case 31 by the transport unit 10, and X-ray inspection and metal detection are sequentially performed in the case 31.
  • the case 31 is made of, for example, stainless steel.
  • the X-ray inspection unit 2 includes an X-ray inspection control unit 20, an X-ray generator 21, and an X-ray detector 22.
  • the X-ray generator 21 is disposed above the transport unit 10 and the case 31.
  • the X-ray generator 21 irradiates the inspection object S transported by the transport unit 10 with X-rays.
  • an X-ray source for generating X-rays is disposed in the substrate chamber T1.
  • the mechanism for irradiating X-rays in the X-ray generator 21 is arranged in the examination room T2.
  • the X-ray detector 22 is disposed below the transport unit 10 and the case 31 and faces the X-ray generator 21.
  • the X-ray detector 22 detects X-rays generated by the X-ray generator 21 and transmitted through the inspection object S.
  • the X-ray detector 22 for example, a line sensor configured by arranging a plurality of X-ray detection sensors in parallel in the front-rear direction (horizontal direction orthogonal to the transport direction of the inspection object S by the transport unit 10). Is used.
  • the X-ray detector 22 is accommodated in the substrate case 23 in order to reduce X-ray leakage.
  • the substrate case 23 is formed with a slit 23a (see FIG. 4) through which X-rays incident on the X-ray detector 22 pass.
  • the X-ray inspection control unit 20 temporarily stores an input / output interface I / O for inputting / outputting signals to / from the outside, a ROM (Read Only Memory) in which a program and information for performing processing are stored, and data. It has storage media such as RAM (Random Access Memory) and HDD (Hard Disk Drive), CPU (Central Processing Unit), and communication circuits.
  • the X-ray inspection control unit 20 stores input data in the RAM based on a signal output from the CPU, loads a program stored in the ROM into the RAM, and executes the program loaded in the RAM. The functions described later are realized.
  • the X-ray inspection control unit 20 is disposed in the substrate chamber T1 and is electrically connected to the X-ray generator 21 and the X-ray detector 22.
  • the X-ray inspection control unit 20 is electrically connected to the display 5 and receives operation information from the operator via the operation screen of the display 5.
  • the X-ray inspection control unit 20 sets the operation profiles of the X-ray generator 21 and the X-ray detector 22 based on the operation information, and controls the operations of the X-ray generator 21 and the X-ray detector 22.
  • the X-ray inspection control unit 20 detects the inspection object S using the laser sensor 24 disposed upstream of the X-ray generator 21 and the X-ray detector 22, the X-ray inspection control unit 20 inspects the inspection object S. Start.
  • the X-ray inspection control unit 20 controls the X-ray generator 21 to irradiate the inspection object S transported by the transport unit 10 with X-rays.
  • the X-ray detector 22 measures the X-ray transmission amount of X-rays that have passed through the inspection object S, and outputs the measured X-ray transmission amount to the X-ray inspection control unit 20.
  • the X-ray inspection control unit 20 generates an X-ray transmission image in which the X-ray transmission amount acquired in time series is reflected in the pixel value. Then, the X-ray inspection control unit 20 detects the foreign matter by analyzing the X-ray transmission image using an image processing technique. For example, the X-ray inspection control unit 20 determines whether there is an image region in which the difference from the reference transmittance of the inspection object S is a predetermined value or more based on the pixel value of the X-ray transmission image. The X-ray inspection control unit 20 determines that a foreign object has been detected when there is an image region in which the difference from the reference transmittance of the inspection object S is a predetermined value or more.
  • the X-ray inspection control unit 20 displays the result data of the X-ray inspection on the display 5 or stores the result data of the X-ray inspection in the storage unit according to a request from the worker. Further, the X-ray inspection control unit 20 indicates that when the X-ray generator 21 and the X-ray detector 22 are operating normally, the device relating to the X-ray inspection is operating using the first alarm 81. To the workers. Further, when it is determined that a foreign object has been detected, the X-ray inspection control unit 20 notifies the worker that the foreign object has been detected using the first notification device 81.
  • the case 31 includes a main body portion 32, a first hood portion 33, and a second hood portion 34.
  • the first hood portion 33 is provided on the opening 4 a side (loading side) with respect to the main body portion 32.
  • the second hood part 34 is provided on the opening part 4 b side (the outlet side) with respect to the main body part 32.
  • the through hole 31 a of the case 31 is defined by the inner walls of the main body portion 32, the first hood portion 33, and the second hood portion 34.
  • the case 31 is supported by a vibration isolation table 39 (anti-vibration tables 39a and 39b) in order to improve the vibration resistance.
  • an X-ray passage slit 33a that allows X-rays to pass is formed below the X-ray generator 21.
  • An X-ray passage slit 33b that allows X-rays to pass through is formed on the lower surface of the first hood portion 33 so as to face the X-ray passage slit 33a.
  • the X-ray detector 22 is disposed below the X-ray passage slit 33b.
  • a slit 33c is formed on the downstream side (main body portion 32 side) of the X-ray passage slits 33a and 33b.
  • a laser sensor 38 is disposed in the slit 33c. The laser sensor 38 irradiates the inspection object S on the transport unit 10 with a laser through the slit 33c.
  • the metal detection unit 3 includes a metal detection control unit 30, a transmission coil 35, and reception coils 36 and 37.
  • the transmission coil 35 and the reception coils 36 and 37 are search coils formed of a conductive material such as metal.
  • the transmission coil 35 and the reception coils 36 and 37 are arranged inside the case 31 (more specifically, as shown in FIGS. 3 and 4 so as to surround a portion of the transport unit 10 passing through the through hole 31a.
  • the metal detection unit 3 includes a case 31 in which the transmission coil 35 and the reception coils 36 and 37 are disposed inside and the transport unit 10 passes through the inside. Thereby, the inspection object S is allowed to pass through the inside of the transmission coil 35 and the reception coils 36 and 37 by the transport unit 10.
  • the transmission coil 35 is disposed between the reception coils 36 and 37.
  • the reception coils 36 and 37 are differentially connected to each other and are disposed symmetrically with respect to the transmission coil 35.
  • the two receiving coils 36 and 37 have the same flux linkage.
  • the transmission coil 35 is configured to be energized and generates magnetic flux.
  • a voltage is excited by electromagnetic induction of a magnetic field generated by the transmitting coil 35.
  • the first hood part 33 and the second hood part 34 suppress external leakage of the magnetic field generated by the transmission coil 35 and entry of an external magnetic field.
  • the metal detection control unit 30 temporarily stores an input / output interface I / O for inputting / outputting signals from / to the outside, a ROM storing programs and information for performing processing, and data temporarily.
  • a storage medium such as a RAM and an HDD, a CPU, a communication circuit, and the like.
  • the metal detection control unit 30 stores input data in the RAM based on a signal output from the CPU, loads a program stored in the ROM into the RAM, and executes the program loaded into the RAM, which will be described later. Realize the function to do.
  • the metal detection control unit 30 is disposed in the substrate chamber T1 and is electrically connected to the X-ray inspection control unit 20.
  • the metal detection control unit 30 receives operation information from an operator via an operation screen of the display 5 electrically connected via the X-ray inspection control unit 20.
  • the metal detection control unit 30 sets operation profiles of the transmission coil 35 and the reception coils 36 and 37 based on the operation information.
  • the metal detection control unit 30 detects the inspection object S using the laser sensor 38 disposed on the upstream side of the transmission coil 35 and the reception coils 36 and 37, the metal detection control unit 30 starts metal detection of the inspection object S. .
  • the metal detection control unit 30 supplies an alternating excitation current to the transmission coil 35 to generate a magnetic flux.
  • the magnetic flux generated by the transmission coil 35 passes through the two reception coils 36 and 37, and a voltage is excited in each reception coil 36 and 37 by electromagnetic induction.
  • the metal detection control unit 30 acquires the output voltage of the differential connection of the receiving coils 36 and 37 and determines metal detection. For example, the metal detection control unit 30 determines that a metal foreign object is not detected when the differential connection output voltage is 0, and detects that a metal foreign object is detected when the differential connection output voltage is not 0. judge.
  • the metal detection control unit 30 displays the metal detection result data on the display 5 or stores the metal detection result data in the storage unit in response to a request from the worker. In addition, when the transmission coil 35 and the reception coils 36 and 37 are operating normally, the metal detection control unit 30 informs the worker that the metal detection device is operating using the second alarm 82. Inform. Furthermore, when the metal detection control unit 30 determines that a foreign object has been detected, the metal detection control unit 30 notifies the worker that the foreign object has been detected using the second notification device 82.
  • the X-ray inspection unit 2 and the metal detection unit 3 described above are configured to be independently operable. That is, the foreign substance inspection apparatus 1 can perform not only both X-ray inspection and metal detection, but also can execute either X-ray inspection or metal detection.
  • the X-ray inspection unit 2 since the X-ray inspection unit 2 performs display control of the display 5, the operation screen of the metal detection unit 3 is displayed on the display 5 when the X-ray inspection unit 2 is stopped. Not. For this reason, a sub-display (not shown) connected to the metal detection unit 3 is disposed inside the housing 4.
  • the metal detection unit 3 receives operation information from an operator via the sub display and displays result data or the like on the sub display.
  • the transport unit 10 includes a first support frame 11, a second support frame 12, a first feed roller 13, a second feed roller 14, an endless belt 15, and a support plate 16.
  • the support plate 16 includes a first support portion (support portion) 16a and a second support portion (support portion) 16b.
  • the first support portion 16a and the second support portion 16b are arranged in parallel along the transport direction D of the inspection object S by the transport unit 10 and are separated from each other.
  • the first support frame 11 is provided with a first feed roller 13 and a first support portion 16a. More specifically, the first feed roller 13 is rotatably supported by the first support frame 11.
  • the first support portion 16a is fixed to the first support frame 11 by screws or the like.
  • the first support frame 11 is attached to a support body 45 provided in the housing 4 in a state where the first feed roller 13 and the first support portion 16a are attached. More specifically, the first support frame 11 is fixed by a fastener 45 b provided on the support body 45 while being placed on an insulating member 45 a provided on the support body 45.
  • the fastener 45b is a so-called “patch latch”, and is engaged with a claw portion 17a provided in the first support portion 16a. Note that the set of the fastener 45b and the claw portion 17a is provided on both sides of the first support portion 16a in the front-rear direction (horizontal direction orthogonal to the conveyance direction of the inspection object S by the conveyance unit 10).
  • a second feed roller 14 and a second support portion 16b are attached to the second support frame 12. More specifically, the second feed roller 14 is rotatably supported by the second support frame 12.
  • the second support portion 16b is fixed to the second support frame 12 by screws or the like.
  • the second support frame 12 is attached to a support body 46 provided in the housing 4 in a state where the second feed roller 14 and the second support portion 16b are attached. More specifically, the second support frame 12 is fixed by a fastener 46 b provided on the support 46 while being placed on an insulating member 46 a provided on the support 46.
  • the fastener 46b is a so-called patchon lock, and is engaged with a claw portion 17b provided in the second support portion 16b.
  • the set of the fastener 46b and the claw portion 17b is provided on both sides of the second support portion 16b in the front-rear direction.
  • the endless belt 15 is hung on the first feed roller 13 and the second feed roller 14.
  • the upper surface of the upper portion 15 a of the endless belt 15 from the first feed roller 13 to the second feed roller 14 is a transport region R of the inspection object S by the transport unit 10. That is, the first feed roller 13 is disposed at the upstream end of the transport region R, and the second feed roller 14 is disposed at the downstream end of the transport region R.
  • the support body 45 is provided with a pressing roller 45 c that presses a lower portion 15 b of the endless belt 15 from the second feeding roller 14 to the first feeding roller 13.
  • the support 46 is provided with a pressing roller 46 c that presses the lower portion 15 b of the endless belt 15 from the second feeding roller 14 to the first feeding roller 13.
  • the first support frame 11 is provided with a tension adjustment bolt mechanism 18 for finely adjusting the tension of the endless belt 15 by pressing both ends of the rotation shaft of the first feed roller 13 outward.
  • the support body 46 is provided with a timing pulley 47 connected to a drive motor (not shown).
  • the timing pulley 47 is connected to a timing pulley 19 provided on the second feed roller 14 via a timing belt 48. Thereby, the transport unit 10 is driven.
  • the timing pulleys 19 and 47 and the timing belt 48 are arranged on the lower door 41 side. Thereby, the timing pulleys 19 and 47 and the timing belt 48 are exposed to the outside by opening the lower door 41.
  • the support plate 16 supports the endless belt 15 in the transport region R. More specifically, the support plate 16 supports the upper portion 15a of the endless belt 15 from the first feed roller 13 to the second feed roller 14 from below.
  • the first support portion 16 a and the second support portion 16 b are separated from each other outside the case 31 included in the metal detection unit 3. In the present embodiment, the first support portion 16 a and the second support portion 16 b are separated from each other at a position upstream of the case 31 in the transport direction D.
  • the second support portion 16 b passes through the through hole 31 a of the case 31.
  • a slit (opening) 16c through which the X-ray of the X-ray inspection unit 2 passes is formed in a portion of the second support portion 16b passing through the through hole 31a.
  • the slit 16 c is located between the X-ray passage slits 33 a and 33 b formed in the first hood portion 33 of the case 31.
  • the transport unit 10 configured as described above is removed from the foreign matter inspection apparatus 1 according to the following procedure in order to perform maintenance.
  • the lower door 41 of the housing 4 is opened, and the engagement of the fastener 45b with the claw portion 17a is released.
  • the 1st support frame 11 with which the 1st feed roller 13 and the 1st support part 16a were attached is moved to the upper side and inner side (case 31 side). Thereby, since the endless belt 15 is loosened, the first support frame 11 to which the first feed roller 13 and the first support portion 16a are attached can be pulled out to the front.
  • the fastener 46b is disengaged from the claw portion 17b.
  • the 2nd support frame 12 to which the 2nd feed roller 14 and the 2nd support part 16b were attached is moved inside (case 31 side).
  • the timing belt 48 is loosened, the timing belt 48 can be detached from the timing pulleys 19 and 47.
  • the timing pulleys 19 and 47 and the timing belt 48 are disposed on the lower door 41 side, the timing belt 48 can be easily removed.
  • the second support frame 12 to which the second feed roller 14 and the second support portion 16b are attached is moved upward and outward (opposite the case 31), and the second support portion 16b is pulled out from the case 31. .
  • the 2nd support frame 12 to which the 2nd feed roller 14 and the 2nd support part 16b were attached can be pulled out to this side.
  • the transport unit 10 can be removed from the foreign matter inspection apparatus 1 by the above procedure.
  • the transport unit 10 can be attached to the foreign matter inspection apparatus 1 by a procedure reverse to the above procedure.
  • the support plate 16 that supports the endless belt 15 is separated into the first support portion 16a and the second support portion 16b that are arranged in parallel along the transport direction D. Therefore, when carrying out maintenance of the transport unit 10, it is not necessary to pull out the transport unit 10 integrally from the case 31 of the metal detection unit 3 along the transport direction D. Therefore, according to the foreign substance inspection apparatus 1, even if the space on both sides of the foreign substance inspection apparatus 1 in the conveyance direction D is limited, the maintenance of the conveyance unit 10 can be easily performed.
  • the carry-in conveyor 101 and the carry-out conveyor 102 are often arranged on both sides of the transport unit 10. Generally, the space on both sides of the foreign matter inspection apparatus 1 in the transport direction D is as follows. Often limited. Therefore, the configuration of the transport unit 10 of the foreign matter inspection apparatus 1 is extremely effective.
  • the foreign object inspection apparatus 1 is provided with an X-ray inspection unit 2 and a housing 4 in addition to the transport unit 10 and the metal detection unit 3.
  • the X-ray inspection unit 2 is provided in the foreign matter inspection apparatus 1
  • dirt or the like attached to the surface of the endless belt 15 tends to reduce the accuracy of the X-ray inspection.
  • the frequency of performing maintenance of the transport unit 10 is likely to increase.
  • the housing 4 is required to suppress external leakage of X-rays, so that the maintenance of the transport unit 10 is easily performed. It tends to be difficult.
  • the configuration of the transport unit 10 of the foreign object inspection apparatus 1 is particularly effective in the foreign object inspection apparatus 1 in which the X-ray inspection unit 2 and the housing 4 are provided in addition to the transport unit 10 and the metal detection unit 3.
  • a slit 16c through which the X-ray of the X-ray inspection unit 2 passes is formed in the second support portion 16b.
  • the first support portion 16a and the second support portion 16b are separated from each other outside the case 31 included in the metal detection unit 3. Thereby, compared with the case where the 1st support part 16a and the 2nd support part 16b are mutually isolate
  • a first feed roller 13 and a first support portion (a support portion disposed on the most upstream side of the transport region among a plurality of support portions) 16 a are attached to the first support frame 11.
  • the second support roller 12 and a second feed roller 14 and a second support portion (a support portion disposed on the most downstream side of the transport region among the plurality of support portions) 16b are attached.
  • the first support portion 16a and the second support portion 16b may be separated from each other inside the case 31 included in the metal detection unit 3. Even in this case, since it is not necessary to pull out the transport unit 10 as an integral part from the case 31 along the transport direction D, the maintenance of the transport unit 10 can be easily performed as compared to the case where the support plate 16 is not separated. Can do.
  • the opening such as the slit 16c through which the X-ray of the X-ray inspection unit 2 passes depends on the arrangement position of the X-ray inspection unit 2, the separation position of the first support part 16a and the second support part 16b, etc. It may be formed on either the first support portion 16a or the second support portion 16b. Further, according to the arrangement position of the X-ray inspection unit 2, the separation position of the first support part 16a and the second support part 16b, etc., the X-ray inspection is performed between the first support part 16a and the second support part 16b. A gap through which the X-rays of the portion pass may be formed. In that case, the strength of each of the first support portion 16a and the second support portion 16b can be maintained, and X-ray attenuation by the support plate 16 can be suppressed to perform the X-ray inspection with high accuracy.
  • the support plate 16 may include three or more support portions arranged in parallel along the transport direction D and separated from each other. Even when the support plate 16 is separated into two or three support parts arranged in parallel along the transport direction D, the opening such as the slit 16c through which the X-ray of the X-ray inspection unit 2 passes is as follows. It is formed on any one of the plurality of support portions according to the arrangement position of the X-ray inspection unit 2, the separation positions of the plurality of support portions, and the like. Alternatively, a gap through which the X-rays of the X-ray inspection unit pass is formed between the support portions adjacent to each other according to the arrangement position of the X-ray inspection unit 2, the separation positions of the plurality of support portions, and the like. In addition, when the support plate 16 is separated into two or three support portions arranged in parallel along the transport direction D, it is possible to reduce the complexity of the apparatus configuration and facilitate the maintenance of the transport unit. Can be achieved.
  • the foreign substance inspection apparatus 1 may include the transport unit 10 and the metal detection unit 3 without including the X-ray inspection unit 2 and the housing 4.
  • the support plate 16 may be configured.
  • the first support portion 16a has a first body plate 161 and a plurality of first engaging portions 162
  • the second support portion 16b is a second body plate. 163 and a plurality of second engaging portions 164.
  • the upper surface 161a of the first main body plate 161 and the upper surface 163a of the second main body plate 163 are located on the same plane, and constitute a support surface of the endless belt 15.
  • the end surface 161b of the first body plate 161 and the end surface 163b of the second body plate 163 are in contact with each other.
  • the plurality of first engaging portions 162 are attached to the lower side of the first main body plate 161 and protrude to the second support portion 16b side.
  • Each of the first engaging portions 162 is formed in a rectangular plate shape, and is separated from each other in the front-rear direction (a horizontal direction orthogonal to the transport direction of the inspection object S by the transport unit 10).
  • the plurality of second engaging portions 164 are attached to the lower side of the second main body plate 163 and protrude to the first support portion 16a side.
  • Each second engaging portion 164 is formed in a rectangular plate shape and is separated from each other in the front-rear direction.
  • each first engagement portion 162 that protrudes toward the second support portion 16 b is located below the second main body plate 163.
  • a portion of each second engagement portion 164 that protrudes toward the first support portion 16 a is located below the first main body plate 161.
  • the plurality of first engaging portions 162 and the plurality of second engaging portions 164 are arranged such that the end surface 161b of the first main body plate 161 and the end surface 163b of the second main body plate 163 are in contact with each other.
  • the two engaging portions 164 are arranged alternately.
  • first engaging portion 162 is located between the second engaging portions 164 adjacent to each other, and at least one second engaging portion 162 is provided.
  • the engaging portions 164 are engaged with each other with the engaging portions 164 positioned between the first engaging portions 162 adjacent to each other.
  • first engagement portion 162 may be provided, and the one first engagement portion 162 may be positioned between the second engagement portions 164 adjacent to each other.
  • second engaging portion 164 may be provided, and the one second engaging portion 164 may be located between the first engaging portions 162 adjacent to each other.
  • the endless belt 15 can be stably supported. Further, X-ray leakage can be reliably prevented. Further, at the time of maintenance, as shown in FIGS. 9 and 10, the first support portion 16a and the second support portion 16b can be easily separated by moving the first support portion 16a so as to be bent upward. Can do.

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Abstract

This foreign matter inspecting device is provided with: a conveying unit which conveys an object to be inspected; and a metal detecting unit which employs an interaction between a magnetic field and metal to detect, as foreign matter, any metal contained in the object to be inspected that is being conveyed by the conveying unit. The conveying unit includes: a first feed roller disposed at the upstream end of a conveying region through which the object to be inspected is conveyed by the conveying unit; a second feed roller disposed at the downstream end of the conveying region; an endless belt suspended between the first feed roller and the second feed roller; and a supporting plate which supports the endless belt in the conveying region. The supporting plate includes a plurality of supporting parts which are arranged side by side in the direction in which the object to be inspected is conveyed by the conveying unit, and which are separated from one another.

Description

異物検査装置Foreign matter inspection device
　本開示は、異物検査装置に関する。 This disclosure relates to a foreign matter inspection apparatus.
　特許文献１には、被検査物を搬送する搬送部と、磁界と金属との相互作用を利用して、搬送部で搬送されている被検査物に含まれる金属を異物として検出する金属検出部と、を備える異物検査装置が記載されている。 Patent Document 1 discloses a metal detection unit that detects, as a foreign object, a metal contained in an object to be inspected that is being transported by the transport unit using a transport unit that transports the object to be inspected and an interaction between a magnetic field and metal. A foreign matter inspection apparatus comprising:
特開２０１５－２８４６５号公報Japanese Patent Laid-Open No. 2015-28465
　上述したような異物検査装置では、金属検出部においてサーチコイルを収容しているケースを搬送部が通過しているため、搬送部のメンテナンス（例えば、搬送部の清掃）を実施する際に、搬送部による被搬送物の搬送方向に沿って金属検出部のケースから搬送部を一体として引き出す必要がある。しかし、搬送方向における異物検査装置の両側のスペースは限られている場合が多いため、搬送部のメンテナンスを容易に実施することは困難である。 In the foreign matter inspection apparatus as described above, since the transport unit passes through the case containing the search coil in the metal detection unit, the transport is performed when carrying out maintenance of the transport unit (for example, cleaning of the transport unit). It is necessary to pull out the transport unit integrally from the case of the metal detection unit along the transport direction of the object to be transported by the unit. However, since the space on both sides of the foreign substance inspection apparatus in the transport direction is often limited, it is difficult to easily carry out maintenance of the transport unit.
　そこで、本開示は、搬送部のメンテナンスを容易に実施することができる異物検査装置を提供することを目的とする。 Therefore, an object of the present disclosure is to provide a foreign matter inspection apparatus capable of easily carrying out maintenance of the transport unit.
　本開示の一形態に係る異物検査装置は、被検査物を搬送する搬送部と、磁界と金属との相互作用を利用して、搬送部で搬送されている被検査物に含まれる金属を異物として検出する金属検出部と、を備え、搬送部は、搬送部による被検査物の搬送領域の上流端に配置された第１送りローラと、搬送領域の下流端に配置された第２送りローラと、第１送りローラ及び第２送りローラに架けられた無端ベルトと、搬送領域において無端ベルトを支持する支持プレートと、を有し、支持プレートは、搬送部による被検査物の搬送方向に沿って並設され且つ互いに分離された複数の支持部分を含む。 A foreign matter inspection apparatus according to an embodiment of the present disclosure uses a transport unit that transports an object to be inspected, and an interaction between a magnetic field and metal to remove metal contained in the test object that is being transported by the transport unit. A metal detection unit that detects the first feed roller disposed at the upstream end of the transport region of the object to be inspected by the transport unit, and the second feed roller disposed at the downstream end of the transport region. And an endless belt spanned between the first feed roller and the second feed roller, and a support plate that supports the endless belt in the transport region, the support plate being along the transport direction of the inspection object by the transport unit A plurality of support portions arranged side by side and separated from each other.
　本開示の一形態に係る異物検査装置では、無端ベルトを支持する支持プレートが、搬送方向に沿って並設された複数の支持部分に分離されている。そのため、搬送部のメンテナンスを実施する際に、搬送方向に沿って金属検出部のケースから搬送部を一体として引き出す必要がない。よって、本開示の一形態に係る異物検査装置によれば、搬送方向における異物検査装置の両側のスペースが限られている場合であっても、搬送部のメンテナンスを容易に実施することができる。 In the foreign matter inspection apparatus according to an aspect of the present disclosure, the support plate that supports the endless belt is separated into a plurality of support portions that are arranged in parallel along the transport direction. Therefore, when carrying out maintenance of the transport unit, it is not necessary to pull out the transport unit as a unit from the case of the metal detection unit along the transport direction. Therefore, according to the foreign substance inspection device according to an embodiment of the present disclosure, it is possible to easily perform the maintenance of the conveyance unit even when the space on both sides of the foreign substance inspection device in the conveyance direction is limited.
　本開示の一形態に係る異物検査装置は、Ｘ線の透過性を利用して、搬送部で搬送されている被検査物に含まれる異物を検出するＸ線検査部と、搬送部の少なくとも一部、Ｘ線検査部、及び金属検出部を内部に収容し、搬送部による被検査物の搬入口、及び搬送部による被検査物の搬出口を有する筐体と、を更に備えてもよい。異物検査装置にＸ線検査部が設けられている場合、無端ベルトの表面に付着した汚れ等がＸ線検査の精度を低下させる傾向があるため、無端ベルトの表面の清掃等、搬送部のメンテナンスを実施する頻度が高くなり易い。その一方で、異物検査装置にＸ線検査部が設けられている場合、Ｘ線の外部漏洩を抑制するために筐体が必要になるので、搬送部のメンテナンスを容易に実施することが困難になり易い。しかし、本開示の一形態に係る異物検査装置では、搬送部のメンテナンスを実施する際に、搬送方向に沿って筐体の搬入口又は搬出口から搬送部を一体として引き出す必要がない。したがって、本開示の一形態に係る構成は、異物検査装置にＸ線検査部及び筐体が設けられている場合に特に有効である。 A foreign matter inspection apparatus according to an aspect of the present disclosure uses at least one of an X-ray inspection unit that detects foreign matter contained in an object to be inspected being transported by a transport unit using X-ray transparency, and a transport unit. And a housing that houses the X-ray inspection unit and the metal detection unit, and has an inspection object carry-in port by the transfer unit and an inspection object transfer port by the transfer unit. When an X-ray inspection unit is provided in the foreign substance inspection device, dirt attached to the surface of the endless belt tends to reduce the accuracy of the X-ray inspection. The frequency of performing is likely to increase. On the other hand, when the foreign substance inspection apparatus is provided with an X-ray inspection unit, a housing is required to suppress external leakage of X-rays, so that it is difficult to easily carry out maintenance of the transport unit. Easy to be. However, in the foreign matter inspection apparatus according to an aspect of the present disclosure, when carrying out maintenance of the conveyance unit, it is not necessary to pull out the conveyance unit as a unit from the carry-in port or the carry-out port of the housing along the conveyance direction. Therefore, the configuration according to an embodiment of the present disclosure is particularly effective when the foreign substance inspection apparatus is provided with an X-ray inspection unit and a housing.
　本開示の一形態に係る異物検査装置では、複数の支持部分のいずれか１つには、Ｘ線検査部のＸ線が通過する開口が形成されていてもよい。これにより、支持プレートによるＸ線の減衰を抑制してＸ線検査を精度良く実施することができる。 In the foreign substance inspection apparatus according to an aspect of the present disclosure, an opening through which the X-ray of the X-ray inspection unit passes may be formed in any one of the plurality of support portions. As a result, X-ray attenuation by the support plate can be suppressed and X-ray inspection can be performed with high accuracy.
　本開示の一形態に係る異物検査装置では、互いに隣り合う支持部分の間には、Ｘ線検査部のＸ線が通過する隙間が形成されていてもよい。これにより、各支持部分の強度を維持することができると共に、支持プレートによるＸ線の減衰を抑制してＸ線検査を精度良く実施することができる。 In the foreign substance inspection apparatus according to an embodiment of the present disclosure, a gap through which X-rays of the X-ray inspection unit pass may be formed between the support portions adjacent to each other. Thereby, while being able to maintain the intensity | strength of each support part, attenuation | damping of the X-ray by a support plate can be suppressed and an X-ray test | inspection can be implemented accurately.
　本開示の一形態に係る異物検査装置では、金属検出部は、サーチコイルが内部に配置され且つ搬送部が内部を通過しているケースを有し、複数の支持部分は、ケースの外側で互いに分離されていてもよい。これにより、複数の支持部分が当該ケースの内側で互いに分離されている場合に比べ、搬送部のメンテナンスをより容易に実施することができる。 In the foreign matter inspection apparatus according to an aspect of the present disclosure, the metal detection unit includes a case in which the search coil is disposed inside and the transport unit passes through the inside, and the plurality of support portions are mutually outside on the case. It may be separated. Thereby, compared with the case where several support parts are mutually isolate | separated inside the said case, the maintenance of a conveyance part can be implemented more easily.
　本開示の一形態に係る異物検査装置では、搬送部は、第１送りローラ、及び複数の支持部分のうち搬送領域の最も上流側に配置された支持部分が取り付けられた第１支持フレームと、第２送りローラ、及び複数の支持部分のうち搬送領域の最も下流側に配置された支持部分が取り付けられた第２支持フレームと、を更に有してもよい。これにより、第１送りローラ、最も上流側の支持部分及び第１支持フレームの組と、第２送りローラ、最も下流側の支持部分及び第２支持フレームの組と、をそれぞれユニットとして取り扱うことができるので、搬送部のメンテナンスをより容易に実施することができる。 In the foreign matter inspection apparatus according to an aspect of the present disclosure, the transport unit includes a first feed roller, and a first support frame to which a support portion arranged on the most upstream side of the transport region among the plurality of support portions is attached; You may further have a 2nd feed roller and the 2nd support frame to which the support part arrange | positioned most downstream of the conveyance area | region among the some support parts was attached. Thus, the first feed roller, the most upstream support portion and the first support frame set, and the second feed roller, the most downstream support portion and the second support frame set can be handled as a unit. As a result, maintenance of the transport unit can be performed more easily.
　本開示の一形態に係る異物検査装置では、支持プレートは、搬送方向に沿って並設され且つ互いに分離された２つ又は３つの支持部分を含んでもよい。これにより、装置構成の複雑化の抑制及び搬送部のメンテナンスの容易化の両立を図ることができる。 In the foreign substance inspection apparatus according to an embodiment of the present disclosure, the support plate may include two or three support portions that are arranged in parallel along the transport direction and separated from each other. Thereby, it is possible to achieve both suppression of complication of the apparatus configuration and easy maintenance of the transport unit.
　本開示の一形態に係る異物検査装置では、互いに隣り合う支持部分のうちの一方の支持部分には、互いに隣り合う支持部分のうちの他方の支持部分側に突出する少なくとも１つの第１係合部が設けられており、他方の支持部分には、一方の支持部分側に突出する複数の第２係合部が設けられており、一方の支持部分及び他方の支持部分は、少なくとも１つの第１係合部が、互いに隣り合う第２係合部の間に位置した状態で、互いに係合していてもよい。これにより、無端ベルトを安定して支持することができる。また、Ｘ線検査部が設けられている場合には、Ｘ線の漏洩も確実に防止することができる。更に、メンテナンス時には、一方の支持部分と他方の支持部分とを容易に分離することができる。 In the foreign matter inspection apparatus according to an aspect of the present disclosure, at least one first engagement projecting toward the other support portion of the support portions adjacent to each other is provided on one support portion of the support portions adjacent to each other. A plurality of second engaging portions projecting toward one support portion are provided on the other support portion, and one support portion and the other support portion include at least one first support portion. The one engaging portion may be engaged with each other in a state of being positioned between the second engaging portions adjacent to each other. Thereby, an endless belt can be supported stably. In addition, when an X-ray inspection unit is provided, leakage of X-rays can be reliably prevented. Furthermore, at the time of maintenance, one support part and the other support part can be easily separated.
　本開示によれば、搬送部のメンテナンスを容易に実施することができる異物検査装置を提供することが可能になる。 According to the present disclosure, it is possible to provide a foreign object inspection apparatus that can easily carry out maintenance of the transport unit.
図１は、実施形態に係る異物検査装置の正面図である。FIG. 1 is a front view of a foreign matter inspection apparatus according to an embodiment. 図２は、図１の異物検査装置の内部構成及び制御系を示す概念図である。FIG. 2 is a conceptual diagram showing an internal configuration and a control system of the foreign matter inspection apparatus of FIG. 図３は、図２のＸ線検査部及び金属検出部の主要構成の正面図である。FIG. 3 is a front view of the main components of the X-ray inspection unit and the metal detection unit of FIG. 図４は、図２のＸ線検査部及び金属検出部の主要構成の斜視図である。FIG. 4 is a perspective view of main components of the X-ray inspection unit and the metal detection unit of FIG. 図５は、図２のＸ線検査部、金属検出部及び搬送部の主要構成の正面図である。FIG. 5 is a front view of the main components of the X-ray inspection unit, the metal detection unit, and the conveyance unit of FIG. 図６は、図２のＸ線検査部、金属検出部及び搬送部の主要構成の正面図である。FIG. 6 is a front view of the main components of the X-ray inspection unit, the metal detection unit, and the transport unit of FIG. 図７は、変形例の支持プレートの側面図である。FIG. 7 is a side view of a modified support plate. 図８は、図７の支持プレートの平面図である。FIG. 8 is a plan view of the support plate of FIG. 図９は、第１支持部分及び第２支持部分が互いに分離された状態での図７の支持プレートの側面図である。FIG. 9 is a side view of the support plate of FIG. 7 with the first support portion and the second support portion separated from each other. 図１０は、第１支持部分及び第２支持部分が互いに分離された状態での図７の支持プレートの平面図である。FIG. 10 is a plan view of the support plate of FIG. 7 with the first support portion and the second support portion separated from each other.
　以下、図面を参照して、本開示の実施形態について説明する。なお、以下の説明において、同一又は相当要素には同一符号を付し、重複する説明を省略する。 Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the following description, the same or equivalent elements will be denoted by the same reference numerals, and redundant description will be omitted.
　図１に示される異物検査装置１は、被検査物に含まれる異物を検出する装置である。被検査物は例えば食品である。異物検査装置１は、その内部において被検査物を搬送しつつＸ線検査及び金属検出を行い、被検査物に異物が含まれるか否かを検査する。Ｘ線検査は、Ｘ線の透過性を利用して被検査物に含まれる異物を検出する手法であり、Ｘ線検査部２（図２参照）によって実現される。Ｘ線検査では、被検査物とは異なるＸ線透過性を有する異物を検出することができる。金属検出は、磁界と金属との相互作用を利用して被検査物に含まれる金属を異物として検出する手法であり、金属検出部３（図２参照）によって実現される。金属検出では金属を異物として検出することができる。 1 is a device that detects foreign matter contained in an object to be inspected. The inspected object is, for example, food. The foreign object inspection apparatus 1 performs X-ray inspection and metal detection while conveying the inspection object in the interior thereof, and inspects whether or not the inspection object contains foreign objects. X-ray inspection is a technique for detecting foreign matter contained in an object to be inspected using X-ray transparency, and is realized by the X-ray inspection unit 2 (see FIG. 2). In the X-ray inspection, it is possible to detect a foreign substance having X-ray permeability different from that of the inspection object. Metal detection is a technique for detecting a metal contained in an inspection object as a foreign object using the interaction between a magnetic field and metal, and is realized by the metal detection unit 3 (see FIG. 2). In metal detection, metal can be detected as a foreign substance.
　異物検査装置１は、その内部に空間が形成された筐体４を有している。筐体４は、Ｘ線検査部２及び金属検出部３（図２参照）を内部に収容している。筐体４は、Ｘ線検査部２により発生されるＸ線を遮蔽し、Ｘ線の外部漏洩を抑制する。筐体４は、例えばステンレス等で形成されている。 The foreign matter inspection apparatus 1 has a housing 4 in which a space is formed. The housing 4 accommodates the X-ray inspection unit 2 and the metal detection unit 3 (see FIG. 2) inside. The housing 4 shields X-rays generated by the X-ray inspection unit 2 and suppresses external leakage of X-rays. The housing 4 is made of, for example, stainless steel.
　筐体４は、例えば直方体箱状を呈している。筐体４の一方の側面には、筐体４の内部に連通する開口部４ａが形成されている。筐体４の他方の側面には、筐体４の内部に連通する開口部４ｂが形成されている。異物検査装置１では、被検査物は、開口部４ａから筐体４の内部に搬入され、筐体４の内部において検査が行われ、開口部４ｂから筐体４の外部に搬出される。つまり、開口部４ａが被検査物の搬入口であり、開口部４ｂが被検査物の搬出口である。 The housing 4 has, for example, a rectangular parallelepiped box shape. An opening 4 a that communicates with the inside of the housing 4 is formed on one side surface of the housing 4. An opening 4 b that communicates with the inside of the housing 4 is formed on the other side surface of the housing 4. In the foreign matter inspection apparatus 1, an object to be inspected is carried into the housing 4 from the opening 4 a, inspected inside the housing 4, and unloaded from the opening 4 b to the outside of the housing 4. That is, the opening 4a is an inspection object carry-in port, and the opening 4b is an inspection object carry-out port.
　筐体４の前面には、筐体４を開閉する上部扉４０及び下部扉４１が設けられている。上部扉４０及び下部扉４１は、例えば開き戸構造である。上部扉４０又は下部扉４１が開放されることで、後述するＸ線検査部２及び金属検出部３の少なくとも一部が外部に露出される。上部扉４０及び下部扉４１は、例えばステンレス等で形成されている。 On the front surface of the housing 4, an upper door 40 and a lower door 41 that open and close the housing 4 are provided. The upper door 40 and the lower door 41 have a hinged door structure, for example. By opening the upper door 40 or the lower door 41, at least a part of an X-ray inspection unit 2 and a metal detection unit 3 described later are exposed to the outside. The upper door 40 and the lower door 41 are made of, for example, stainless steel.
　上部扉４０の前面には、ディスプレイ５及び操作スイッチ６が設けられている。ディスプレイ５は、表示機能と入力機能とを兼ね備えた表示装置であり、例えばタッチパネルである。ディスプレイ５は、Ｘ線検査及び金属検出の結果等を表示すると共に、金属検出及びＸ線検査に関する各種パラメータを設定するための操作画面を表示する。操作スイッチ６は、Ｘ線検査部２及び金属検出部３の電源スイッチ等である。 A display 5 and an operation switch 6 are provided on the front surface of the upper door 40. The display 5 is a display device having both a display function and an input function, for example, a touch panel. The display 5 displays results of X-ray inspection and metal detection, and also displays an operation screen for setting various parameters related to metal detection and X-ray inspection. The operation switch 6 is a power switch for the X-ray inspection unit 2 and the metal detection unit 3.
　筐体４は、支持脚７によって支持されている。筐体４の上面には、報知部８及びクーラー９が設けられている。報知部８は、異物の混入及び機器の作動状態を報知する。報知部８は、Ｘ線検査部２に対応する第１報知器８１、及び金属検出部３に対応する第２報知器８２を有している。クーラー９は、筐体４の内部に冷気を送り、筐体４の内部に配置された機器の温度を調整する。 The housing 4 is supported by support legs 7. A notification unit 8 and a cooler 9 are provided on the upper surface of the housing 4. The notification unit 8 notifies the contamination of foreign matters and the operating state of the device. The notification unit 8 includes a first notification unit 81 corresponding to the X-ray inspection unit 2 and a second notification unit 82 corresponding to the metal detection unit 3. The cooler 9 sends cool air to the inside of the housing 4 and adjusts the temperature of the devices arranged inside the housing 4.
　図２に示されるように、筐体４の内部は、後述するＸ線発生器２１の一部、及び各種の制御基板等が配置される基板室Ｔ１と、被検査物Ｓが搬入されて検査が行われる検査室Ｔ２とに区画されている。基板室Ｔ１は、検査室Ｔの上側に位置しており、クーラー９によって温度調整されている。 As shown in FIG. 2, the inside of the housing 4 is inspected by carrying a part of an X-ray generator 21 to be described later, a substrate chamber T1 in which various control boards and the like are placed, and an object S to be inspected. Is divided into an examination room T2 in which is performed. The substrate chamber T1 is located on the upper side of the inspection chamber T, and the temperature is adjusted by the cooler 9.
　検査室Ｔ２には、被検査物Ｓを搬送する搬送部１０が配置されている。搬送部１０は、ローラ式のベルトコンベヤであり、一端部が開口部４ａに位置し且つ他端部が開口部４ｂに位置した状態で、筐体４の内部を水平方向に延在している。つまり、筐体４は、搬送部１０のうち一端部及び他端部を除く部分を内部に収容している。搬送部１０は、開口部４ａを介して被検査物Ｓを筐体４の内部に搬入し、開口部４ｂを介して被検査物Ｓを筐体４の外部に搬出する。 In the inspection room T2, a transport unit 10 for transporting the inspection object S is arranged. The transport unit 10 is a roller-type belt conveyor, and extends in the horizontal direction inside the housing 4 with one end located in the opening 4a and the other end located in the opening 4b. . That is, the housing 4 accommodates a portion of the transport unit 10 excluding one end and the other end. The transport unit 10 carries the inspection object S into the housing 4 through the opening 4a and carries the inspection object S out of the housing 4 through the opening 4b.
　なお、被検査物Ｓの搬入及び搬出を自動化すべく、搬送部１０の一方の側には搬入用コンベヤ１０１が配置されており、搬送部１０の他方の側には搬出用コンベヤ１０２が配置されている。搬出用コンベヤ１０２には、被検査物Ｓの振分機構が設けられる場合がある。 In order to automate the loading and unloading of the inspection object S, a carry-in conveyor 101 is arranged on one side of the carrying unit 10 and a carry-out conveyor 102 is arranged on the other side of the carrying unit 10. ing. The carry-out conveyor 102 may be provided with a distribution mechanism for the inspection object S.
　開口部４ａには、Ｘ線遮蔽カーテン４２が配置されている。開口部４ｂには、Ｘ線遮蔽カーテン４３が配置されている。各Ｘ線遮蔽カーテン４２，４３の上端は筐体４に対する固定端であり、各Ｘ線遮蔽カーテン４２，４３の下端は自由端である。各Ｘ線遮蔽カーテン４２，４３は、Ｘ線検査部２が発生したＸ線を遮蔽し、Ｘ線の外部漏洩を抑制する。各Ｘ線遮蔽カーテン４２，４３は、例えば金属材料（タングステン等）を含有する可撓性材料等で形成されている。 An X-ray shielding curtain 42 is disposed in the opening 4a. An X-ray shielding curtain 43 is disposed in the opening 4b. The upper end of each X-ray shielding curtain 42, 43 is a fixed end with respect to the housing 4, and the lower end of each X-ray shielding curtain 42, 43 is a free end. The X-ray shielding curtains 42 and 43 shield X-rays generated by the X-ray inspection unit 2 and suppress external leakage of X-rays. Each X-ray shielding curtain 42, 43 is formed of a flexible material containing a metal material (tungsten or the like), for example.
　検査室Ｔ２には、被検査物Ｓを通過させるための貫通穴３１ａが形成された筒状のケース３１が配置されている。搬送部１０は、貫通穴３１ａを介してケース３１を貫通している。被検査物Ｓは、搬送部１０によってケース３１の貫通穴３１ａを通過し、ケース３１においてＸ線検査及び金属検出が順次実行される。ケース３１は、例えばステンレス等で形成されている。 In the inspection room T2, a cylindrical case 31 having a through hole 31a for allowing the inspection object S to pass therethrough is disposed. The conveyance part 10 has penetrated the case 31 through the through-hole 31a. The inspection object S passes through the through hole 31 a of the case 31 by the transport unit 10, and X-ray inspection and metal detection are sequentially performed in the case 31. The case 31 is made of, for example, stainless steel.
　Ｘ線検査部２は、Ｘ線検査制御部２０、Ｘ線発生器２１及びＸ線検出器２２を有している。Ｘ線発生器２１は、搬送部１０及びケース３１の上側に配置されている。Ｘ線発生器２１は、搬送部１０で搬送されている被検査物ＳにＸ線を照射する。Ｘ線発生器２１のうちＸ線を発生するＸ線源等は、基板室Ｔ１に配置されている。Ｘ線発生器２１のうちＸ線を照射する機構は、検査室Ｔ２に配置されている。 The X-ray inspection unit 2 includes an X-ray inspection control unit 20, an X-ray generator 21, and an X-ray detector 22. The X-ray generator 21 is disposed above the transport unit 10 and the case 31. The X-ray generator 21 irradiates the inspection object S transported by the transport unit 10 with X-rays. Of the X-ray generator 21, an X-ray source for generating X-rays is disposed in the substrate chamber T1. The mechanism for irradiating X-rays in the X-ray generator 21 is arranged in the examination room T2.
　Ｘ線検出器２２は、搬送部１０及びケース３１の下側に配置されており、Ｘ線発生器２１と対向している。Ｘ線検出器２２は、Ｘ線発生器２１で発生されて被検査物Ｓを透過したＸ線を検出する。Ｘ線検出器２２としては、例えば複数のＸ線検出センサが前後方向（搬送部１０による被検査物Ｓの搬送方向と直交する水平方向）に沿って並設されることで構成されたラインセンサが用いられる。Ｘ線検出器２２は、Ｘ線漏洩を低減させるために、基板ケース２３に収容されている。基板ケース２３には、Ｘ線検出器２２に入射するＸ線を通過させるスリット２３ａ（図４参照）が形成されている。 The X-ray detector 22 is disposed below the transport unit 10 and the case 31 and faces the X-ray generator 21. The X-ray detector 22 detects X-rays generated by the X-ray generator 21 and transmitted through the inspection object S. As the X-ray detector 22, for example, a line sensor configured by arranging a plurality of X-ray detection sensors in parallel in the front-rear direction (horizontal direction orthogonal to the transport direction of the inspection object S by the transport unit 10). Is used. The X-ray detector 22 is accommodated in the substrate case 23 in order to reduce X-ray leakage. The substrate case 23 is formed with a slit 23a (see FIG. 4) through which X-rays incident on the X-ray detector 22 pass.
　Ｘ線検査制御部２０は、外部との信号の入出力等を行う入出力インターフェースＩ／Ｏ、処理を行うためのプログラム及び情報等が記憶されたＲＯＭ（Read　Only　Memory）、データを一時的に記憶するＲＡＭ（Random　Access　Memory）、ＨＤＤ（Hard　Disk　Drive）等の記憶媒体、ＣＰＵ（Central　Processing　Unit）、並びに通信回路等を有している。Ｘ線検査制御部２０は、ＣＰＵが出力する信号に基づいて、入力データをＲＡＭに記憶し、ＲＯＭに記憶されているプログラムをＲＡＭにロードし、ＲＡＭにロードされたプログラムを実行することで、後述する機能を実現する。 The X-ray inspection control unit 20 temporarily stores an input / output interface I / O for inputting / outputting signals to / from the outside, a ROM (Read Only Memory) in which a program and information for performing processing are stored, and data. It has storage media such as RAM (Random Access Memory) and HDD (Hard Disk Drive), CPU (Central Processing Unit), and communication circuits. The X-ray inspection control unit 20 stores input data in the RAM based on a signal output from the CPU, loads a program stored in the ROM into the RAM, and executes the program loaded in the RAM. The functions described later are realized.
　Ｘ線検査制御部２０は、基板室Ｔ１に配置されており、Ｘ線発生器２１及びＸ線検出器２２と電気的に接続されている。Ｘ線検査制御部２０は、ディスプレイ５と電気的に接続されており、ディスプレイ５の操作画面を介して、作業員から操作情報を受け付ける。Ｘ線検査制御部２０は、当該操作情報に基づいてＸ線発生器２１及びＸ線検出器２２の動作プロファイルを設定すると共に、Ｘ線発生器２１及びＸ線検出器２２の動作を制御する。Ｘ線検査制御部２０は、Ｘ線発生器２１及びＸ線検出器２２よりも上流側に配置されたレーザセンサ２４を用いて被検査物Ｓを検出した場合、当該被検査物Ｓの検査を開始する。Ｘ線検査制御部２０は、Ｘ線発生器２１を制御して、搬送部１０で搬送されている被検査物ＳにＸ線を照射させる。Ｘ線検出器２２は、被検査物Ｓを透過したＸ線のＸ線透過量を計測し、計測したＸ線透過量をＸ線検査制御部２０に出力する。 The X-ray inspection control unit 20 is disposed in the substrate chamber T1 and is electrically connected to the X-ray generator 21 and the X-ray detector 22. The X-ray inspection control unit 20 is electrically connected to the display 5 and receives operation information from the operator via the operation screen of the display 5. The X-ray inspection control unit 20 sets the operation profiles of the X-ray generator 21 and the X-ray detector 22 based on the operation information, and controls the operations of the X-ray generator 21 and the X-ray detector 22. When the X-ray inspection control unit 20 detects the inspection object S using the laser sensor 24 disposed upstream of the X-ray generator 21 and the X-ray detector 22, the X-ray inspection control unit 20 inspects the inspection object S. Start. The X-ray inspection control unit 20 controls the X-ray generator 21 to irradiate the inspection object S transported by the transport unit 10 with X-rays. The X-ray detector 22 measures the X-ray transmission amount of X-rays that have passed through the inspection object S, and outputs the measured X-ray transmission amount to the X-ray inspection control unit 20.
　Ｘ線検査制御部２０は、時系列で取得したＸ線透過量を画素値に反映させたＸ線透過画像を生成する。そして、Ｘ線検査制御部２０は、画像処理技術によりＸ線透過画像を解析して、異物を検出する。例えば、Ｘ線検査制御部２０は、Ｘ線透過画像の画素値に基づいて、被検査物Ｓの基準透過率との差が所定値以上となる画像領域が存在するか否かを判定する。そして、Ｘ線検査制御部２０は、被検査物Ｓの基準透過率との差が所定値以上となる画像領域が存在する場合には、異物を検出したと判定する。 The X-ray inspection control unit 20 generates an X-ray transmission image in which the X-ray transmission amount acquired in time series is reflected in the pixel value. Then, the X-ray inspection control unit 20 detects the foreign matter by analyzing the X-ray transmission image using an image processing technique. For example, the X-ray inspection control unit 20 determines whether there is an image region in which the difference from the reference transmittance of the inspection object S is a predetermined value or more based on the pixel value of the X-ray transmission image. The X-ray inspection control unit 20 determines that a foreign object has been detected when there is an image region in which the difference from the reference transmittance of the inspection object S is a predetermined value or more.
　Ｘ線検査制御部２０は、作業員からの要求に応じて、Ｘ線検査の結果データをディスプレイ５に表示させたり、Ｘ線検査の結果データを記憶部に記憶させたりする。また、Ｘ線検査制御部２０は、Ｘ線発生器２１及びＸ線検出器２２が正常に作動している場合、第１報知器８１を用いてＸ線検査に係る機器が作動中である旨を作業員に報知する。更に、Ｘ線検査制御部２０は、異物を検出したと判定した場合、第１報知器８１を用いて異物を検知した旨を作業員に報知する。 The X-ray inspection control unit 20 displays the result data of the X-ray inspection on the display 5 or stores the result data of the X-ray inspection in the storage unit according to a request from the worker. Further, the X-ray inspection control unit 20 indicates that when the X-ray generator 21 and the X-ray detector 22 are operating normally, the device relating to the X-ray inspection is operating using the first alarm 81. To the workers. Further, when it is determined that a foreign object has been detected, the X-ray inspection control unit 20 notifies the worker that the foreign object has been detected using the first notification device 81.
　図３及び図４に示されるように、ケース３１は、本体部３２、第１フード部３３及び第２フード部３４を有している。第１フード部３３は、本体部３２に対して開口部４ａ側（搬入口側）に設けられている。第２フード部３４は、本体部３２に対して開口部４ｂ側（搬出口側）に設けられている。ケース３１の貫通穴３１ａは、本体部３２、第１フード部３３及び第２フード部３４のそれぞれの内壁によって画定されている。なお、ケース３１は、耐振特性を向上させるために、防振台３９（防振台３９ａ，３９ｂ）によって支持されている。 As shown in FIGS. 3 and 4, the case 31 includes a main body portion 32, a first hood portion 33, and a second hood portion 34. The first hood portion 33 is provided on the opening 4 a side (loading side) with respect to the main body portion 32. The second hood part 34 is provided on the opening part 4 b side (the outlet side) with respect to the main body part 32. The through hole 31 a of the case 31 is defined by the inner walls of the main body portion 32, the first hood portion 33, and the second hood portion 34. The case 31 is supported by a vibration isolation table 39 (anti-vibration tables 39a and 39b) in order to improve the vibration resistance.
　第１フード部３３の上面には、Ｘ線を通過させるＸ線通過スリット３３ａがＸ線発生器２１の下側に位置するように形成されている。第１フード部３３の下面には、Ｘ線を通過させるＸ線通過スリット３３ｂがＸ線通過スリット３３ａと対向するように形成されている。Ｘ線通過スリット３３ｂの下側には、Ｘ線検出器２２が配置されている。このように構成することで、Ｘ線発生器２１が発生したＸ線は、各Ｘ線通過スリット３３ａ，３３ｂを通過し、ケース３１の内部を搬送されている被検査物Ｓに照射される。 On the upper surface of the first hood portion 33, an X-ray passage slit 33a that allows X-rays to pass is formed below the X-ray generator 21. An X-ray passage slit 33b that allows X-rays to pass through is formed on the lower surface of the first hood portion 33 so as to face the X-ray passage slit 33a. The X-ray detector 22 is disposed below the X-ray passage slit 33b. With this configuration, the X-rays generated by the X-ray generator 21 pass through the X-ray passage slits 33a and 33b, and are irradiated to the inspection object S being transported inside the case 31.
　なお、第１フード部３３の側面において、各Ｘ線通過スリット３３ａ，３３ｂよりも下流側（本体部３２側）にはスリット３３ｃが形成されている。スリット３３ｃには、レーザセンサ３８が配置されている。レーザセンサ３８は、スリット３３ｃを介して搬送部１０上の被検査物Ｓにレーザを照射する。 In addition, on the side surface of the first hood portion 33, a slit 33c is formed on the downstream side (main body portion 32 side) of the X-ray passage slits 33a and 33b. A laser sensor 38 is disposed in the slit 33c. The laser sensor 38 irradiates the inspection object S on the transport unit 10 with a laser through the slit 33c.
　図２に示されるように、金属検出部３は、金属検出制御部３０、送信コイル３５及び受信コイル３６，３７を有している。送信コイル３５及び受信コイル３６，３７は、金属等の導電性材料で形成されたサーチコイルである。送信コイル３５及び受信コイル３６，３７は、搬送部１０のうち貫通穴３１ａを通過している部分を囲むように、ケース３１の内部（より具体的には、図３及び図４に示されるように、ケース３１の本体部３２の内部）に配置されている。つまり、金属検出部３は、送信コイル３５及び受信コイル３６，３７が内部に配置され且つ搬送部１０が内部を通過しているケース３１を有している。これにより、被検査物Ｓは、搬送部１０によって送信コイル３５及び受信コイル３６，３７の内側を通過させられる。 2, the metal detection unit 3 includes a metal detection control unit 30, a transmission coil 35, and reception coils 36 and 37. The transmission coil 35 and the reception coils 36 and 37 are search coils formed of a conductive material such as metal. The transmission coil 35 and the reception coils 36 and 37 are arranged inside the case 31 (more specifically, as shown in FIGS. 3 and 4 so as to surround a portion of the transport unit 10 passing through the through hole 31a. In the main body 32 of the case 31. That is, the metal detection unit 3 includes a case 31 in which the transmission coil 35 and the reception coils 36 and 37 are disposed inside and the transport unit 10 passes through the inside. Thereby, the inspection object S is allowed to pass through the inside of the transmission coil 35 and the reception coils 36 and 37 by the transport unit 10.
　図３及び図４に示されるように、送信コイル３５は、受信コイル３６，３７間に配置されている。受信コイル３６，３７は、互いに差動接続されると共に、送信コイル３５に対して対称に配置されている。２つの受信コイル３６，３７は、同一の鎖交磁束を有している。送信コイル３５は、通電可能に構成されており、磁束を発生する。各受信コイル３６，３７では、送信コイル３５が発生した磁界の電磁誘導によって電圧が励起する。なお、第１フード部３３及び第２フード部３４は、送信コイル３５が発生した磁界の外部漏洩、及び外来磁界の進入を抑制する。 3 and 4, the transmission coil 35 is disposed between the reception coils 36 and 37. The reception coils 36 and 37 are differentially connected to each other and are disposed symmetrically with respect to the transmission coil 35. The two receiving coils 36 and 37 have the same flux linkage. The transmission coil 35 is configured to be energized and generates magnetic flux. In each of the receiving coils 36 and 37, a voltage is excited by electromagnetic induction of a magnetic field generated by the transmitting coil 35. The first hood part 33 and the second hood part 34 suppress external leakage of the magnetic field generated by the transmission coil 35 and entry of an external magnetic field.
　図２に示されるように、金属検出制御部３０は、外部との信号の入出力等を行う入出力インターフェースＩ／Ｏ、処理を行うためのプログラム及び情報等が記憶されたＲＯＭ、データを一時的に記憶するＲＡＭ、ＨＤＤ等の記憶媒体、ＣＰＵ、並びに通信回路等を有している。金属検出制御部３０は、ＣＰＵが出力する信号に基づいて、入力データをＲＡＭに記憶し、ＲＯＭに記憶されているプログラムをＲＡＭにロードし、ＲＡＭにロードされたプログラムを実行することで、後述する機能を実現する。 As shown in FIG. 2, the metal detection control unit 30 temporarily stores an input / output interface I / O for inputting / outputting signals from / to the outside, a ROM storing programs and information for performing processing, and data temporarily. A storage medium such as a RAM and an HDD, a CPU, a communication circuit, and the like. The metal detection control unit 30 stores input data in the RAM based on a signal output from the CPU, loads a program stored in the ROM into the RAM, and executes the program loaded into the RAM, which will be described later. Realize the function to do.
　金属検出制御部３０は、基板室Ｔ１に配置されており、Ｘ線検査制御部２０と電気的に接続されている。金属検出制御部３０は、Ｘ線検査制御部２０を介して電気的に接続されたディスプレイ５の操作画面を介して、作業員から操作情報を受け付ける。金属検出制御部３０は、当該操作情報に基づいて送信コイル３５及び受信コイル３６，３７の動作プロファイルを設定する。金属検出制御部３０は、送信コイル３５及び受信コイル３６，３７よりも上流側に配置されたレーザセンサ３８を用いて被検査物Ｓを検出した場合、当該被検査物Ｓの金属検出を開始する。 The metal detection control unit 30 is disposed in the substrate chamber T1 and is electrically connected to the X-ray inspection control unit 20. The metal detection control unit 30 receives operation information from an operator via an operation screen of the display 5 electrically connected via the X-ray inspection control unit 20. The metal detection control unit 30 sets operation profiles of the transmission coil 35 and the reception coils 36 and 37 based on the operation information. When the metal detection control unit 30 detects the inspection object S using the laser sensor 38 disposed on the upstream side of the transmission coil 35 and the reception coils 36 and 37, the metal detection control unit 30 starts metal detection of the inspection object S. .
　金属検出制御部３０は、送信コイル３５に交番励磁電流を供給し、磁束を発生させる。送信コイル３５によって発生された磁束は、２つの受信コイル３６，３７を貫通し、電磁誘導によって各受信コイル３６，３７にて電圧が励起される。金属検出制御部３０は、受信コイル３６，３７の差動接続の出力電圧を取得して、金属検出の判定を行う。例えば、金属検出制御部３０は、差動接続の出力電圧が０のときは、金属異物を検出していないと判定し、差動接続の出力電圧が０でないときは、金属異物を検出したと判定する。 The metal detection control unit 30 supplies an alternating excitation current to the transmission coil 35 to generate a magnetic flux. The magnetic flux generated by the transmission coil 35 passes through the two reception coils 36 and 37, and a voltage is excited in each reception coil 36 and 37 by electromagnetic induction. The metal detection control unit 30 acquires the output voltage of the differential connection of the receiving coils 36 and 37 and determines metal detection. For example, the metal detection control unit 30 determines that a metal foreign object is not detected when the differential connection output voltage is 0, and detects that a metal foreign object is detected when the differential connection output voltage is not 0. judge.
　金属検出制御部３０は、作業員からの要求に応じて、金属検出の結果データをディスプレイ５に表示させたり、金属検出の結果データを記憶部に記憶させたりする。また、金属検出制御部３０は、送信コイル３５及び受信コイル３６，３７が正常に作動している場合、第２報知器８２を用いて金属検出に係る機器が作動中である旨を作業員に報知する。更に、金属検出制御部３０は、異物を検出したと判定した場合、第２報知器８２を用いて異物を検知した旨を作業員に報知する。 The metal detection control unit 30 displays the metal detection result data on the display 5 or stores the metal detection result data in the storage unit in response to a request from the worker. In addition, when the transmission coil 35 and the reception coils 36 and 37 are operating normally, the metal detection control unit 30 informs the worker that the metal detection device is operating using the second alarm 82. Inform. Furthermore, when the metal detection control unit 30 determines that a foreign object has been detected, the metal detection control unit 30 notifies the worker that the foreign object has been detected using the second notification device 82.
　上述したＸ線検査部２及び金属検出部３は、それぞれ独立に作動可能に構成されている。つまり、異物検査装置１は、Ｘ線検査及び金属検出の両方を行うだけでなく、Ｘ線検査及び金属検出のいずれか一方を実行することもできる。上述のとおり、本実施形態では、Ｘ線検査部２がディスプレイ５の表示制御を行うため、Ｘ線検査部２が停止している場合には、ディスプレイ５に金属検出部３の操作画面が表示されない。このため、筐体４の内部には、金属検出部３に接続されたサブディスプレイ（不図示）が配置されている。金属検出部３は、Ｘ線検査部２が停止している場合には、サブディスプレイを介して、作業員から操作情報を受け付け、サブディスプレイに結果データ等を表示する。 The X-ray inspection unit 2 and the metal detection unit 3 described above are configured to be independently operable. That is, the foreign substance inspection apparatus 1 can perform not only both X-ray inspection and metal detection, but also can execute either X-ray inspection or metal detection. As described above, in the present embodiment, since the X-ray inspection unit 2 performs display control of the display 5, the operation screen of the metal detection unit 3 is displayed on the display 5 when the X-ray inspection unit 2 is stopped. Not. For this reason, a sub-display (not shown) connected to the metal detection unit 3 is disposed inside the housing 4. When the X-ray inspection unit 2 is stopped, the metal detection unit 3 receives operation information from an operator via the sub display and displays result data or the like on the sub display.
　搬送部１０の構成について、より詳細に説明する。図５に示されるように、搬送部１０は、第１支持フレーム１１、第２支持フレーム１２、第１送りローラ１３、第２送りローラ１４、無端ベルト１５、支持プレート１６を有している。支持プレート１６は、第１支持部分（支持部分）１６ａ及び第２支持部分（支持部分）１６ｂを含んでいる。第１支持部分１６ａ及び第２支持部分１６ｂは、搬送部１０による被検査物Ｓの搬送方向Ｄに沿って並設され且つ互いに分離されている。 The configuration of the transport unit 10 will be described in more detail. As shown in FIG. 5, the transport unit 10 includes a first support frame 11, a second support frame 12, a first feed roller 13, a second feed roller 14, an endless belt 15, and a support plate 16. The support plate 16 includes a first support portion (support portion) 16a and a second support portion (support portion) 16b. The first support portion 16a and the second support portion 16b are arranged in parallel along the transport direction D of the inspection object S by the transport unit 10 and are separated from each other.
　第１支持フレーム１１には、第１送りローラ１３及び第１支持部分１６ａが取り付けられている。より具体的には、第１送りローラ１３は、第１支持フレーム１１に回転可能に支持されている。第１支持部分１６ａは、第１支持フレーム１１にネジ止め等によって固定されている。第１支持フレーム１１は、第１送りローラ１３及び第１支持部分１６ａが取り付けられた状態で、筐体４に設けられた支持体４５に取り付けられている。より具体的には、第１支持フレーム１１は、支持体４５に設けられた絶縁部材４５ａ上に載置された状態で、支持体４５に設けられた留め具４５ｂによって固定されている。留め具４５ｂは、いわゆるパッチン錠（draw　latch）と称されるものであり、第１支持部分１６ａに設けられた爪部１７ａに係合している。なお、留め具４５ｂ及び爪部１７ａの組は、前後方向（搬送部１０による被検査物Ｓの搬送方向と直交する水平方向）における第１支持部分１６ａの両側に設けられている。 The first support frame 11 is provided with a first feed roller 13 and a first support portion 16a. More specifically, the first feed roller 13 is rotatably supported by the first support frame 11. The first support portion 16a is fixed to the first support frame 11 by screws or the like. The first support frame 11 is attached to a support body 45 provided in the housing 4 in a state where the first feed roller 13 and the first support portion 16a are attached. More specifically, the first support frame 11 is fixed by a fastener 45 b provided on the support body 45 while being placed on an insulating member 45 a provided on the support body 45. The fastener 45b is a so-called “patch latch”, and is engaged with a claw portion 17a provided in the first support portion 16a. Note that the set of the fastener 45b and the claw portion 17a is provided on both sides of the first support portion 16a in the front-rear direction (horizontal direction orthogonal to the conveyance direction of the inspection object S by the conveyance unit 10).
　第２支持フレーム１２には、第２送りローラ１４及び第２支持部分１６ｂが取り付けられている。より具体的には、第２送りローラ１４は、第２支持フレーム１２に回転可能に支持されている。第２支持部分１６ｂは、第２支持フレーム１２にネジ止め等によって固定されている。第２支持フレーム１２は、第２送りローラ１４及び第２支持部分１６ｂが取り付けられた状態で、筐体４に設けられた支持体４６に取り付けられている。より具体的には、第２支持フレーム１２は、支持体４６に設けられた絶縁部材４６ａ上に載置された状態で、支持体４６に設けられた留め具４６ｂによって固定されている。留め具４６ｂは、いわゆるパッチン錠と称されるものであり、第２支持部分１６ｂに設けられた爪部１７ｂに係合している。なお、留め具４６ｂ及び爪部１７ｂの組は、前後方向における第２支持部分１６ｂの両側に設けられている。 A second feed roller 14 and a second support portion 16b are attached to the second support frame 12. More specifically, the second feed roller 14 is rotatably supported by the second support frame 12. The second support portion 16b is fixed to the second support frame 12 by screws or the like. The second support frame 12 is attached to a support body 46 provided in the housing 4 in a state where the second feed roller 14 and the second support portion 16b are attached. More specifically, the second support frame 12 is fixed by a fastener 46 b provided on the support 46 while being placed on an insulating member 46 a provided on the support 46. The fastener 46b is a so-called patchon lock, and is engaged with a claw portion 17b provided in the second support portion 16b. The set of the fastener 46b and the claw portion 17b is provided on both sides of the second support portion 16b in the front-rear direction.
　無端ベルト１５は、第１送りローラ１３及び第２送りローラ１４に架けられている。搬送部１０では、無端ベルト１５のうち第１送りローラ１３から第２送りローラ１４に至る上側の部分１５ａの上面が、搬送部１０による被検査物Ｓの搬送領域Ｒである。つまり、第１送りローラ１３は、搬送領域Ｒの上流端に配置されており、第２送りローラ１４は、搬送領域Ｒの下流端に配置されている。 The endless belt 15 is hung on the first feed roller 13 and the second feed roller 14. In the transport unit 10, the upper surface of the upper portion 15 a of the endless belt 15 from the first feed roller 13 to the second feed roller 14 is a transport region R of the inspection object S by the transport unit 10. That is, the first feed roller 13 is disposed at the upstream end of the transport region R, and the second feed roller 14 is disposed at the downstream end of the transport region R.
　支持体４５には、無端ベルト１５のうち第２送りローラ１４から第１送りローラ１３に至る下側の部分１５ｂを押圧する押圧ローラ４５ｃが設けられている。同様に、支持体４６には、無端ベルト１５のうち第２送りローラ１４から第１送りローラ１３に至る下側の部分１５ｂを押圧する押圧ローラ４６ｃが設けられている。これらの押圧ローラ４５ｃ，４６ｃによって、無端ベルト１５のテンションが適切に調整される。なお、第１支持フレーム１１には、第１送りローラ１３の回転軸の両端部を外側に押圧することで無端ベルト１５のテンションを微調整するためのテンション調整ボルト機構１８が設けられている。 The support body 45 is provided with a pressing roller 45 c that presses a lower portion 15 b of the endless belt 15 from the second feeding roller 14 to the first feeding roller 13. Similarly, the support 46 is provided with a pressing roller 46 c that presses the lower portion 15 b of the endless belt 15 from the second feeding roller 14 to the first feeding roller 13. By these pressing rollers 45c and 46c, the tension of the endless belt 15 is appropriately adjusted. The first support frame 11 is provided with a tension adjustment bolt mechanism 18 for finely adjusting the tension of the endless belt 15 by pressing both ends of the rotation shaft of the first feed roller 13 outward.
　支持体４６には、駆動モータ（不図示）に接続されたタイミングプーリ４７が設けられている。タイミングプーリ４７は、タイミングベルト４８を介して、第２送りローラ１４に設けられたタイミングプーリ１９に接続されている。これにより、搬送部１０は、駆動される。なお、タイミングプーリ１９，４７及びタイミングベルト４８は、下部扉４１側に配置されている。これにより、下部扉４１が開放されることで、タイミングプーリ１９，４７及びタイミングベルト４８が外部に露出される。 The support body 46 is provided with a timing pulley 47 connected to a drive motor (not shown). The timing pulley 47 is connected to a timing pulley 19 provided on the second feed roller 14 via a timing belt 48. Thereby, the transport unit 10 is driven. The timing pulleys 19 and 47 and the timing belt 48 are arranged on the lower door 41 side. Thereby, the timing pulleys 19 and 47 and the timing belt 48 are exposed to the outside by opening the lower door 41.
　支持プレート１６は、搬送領域Ｒにおいて無端ベルト１５を支持している。より具体的には、支持プレート１６は、無端ベルト１５のうち第１送りローラ１３から第２送りローラ１４に至る上側の部分１５ａを下側から支持している。支持プレート１６では、第１支持部分１６ａ及び第２支持部分１６ｂは、金属検出部３が有するケース３１の外側で互いに分離されている。本実施形態では、第１支持部分１６ａ及び第２支持部分１６ｂは、搬送方向Ｄにおけるケース３１の上流側の位置で互いに分離されている。 The support plate 16 supports the endless belt 15 in the transport region R. More specifically, the support plate 16 supports the upper portion 15a of the endless belt 15 from the first feed roller 13 to the second feed roller 14 from below. In the support plate 16, the first support portion 16 a and the second support portion 16 b are separated from each other outside the case 31 included in the metal detection unit 3. In the present embodiment, the first support portion 16 a and the second support portion 16 b are separated from each other at a position upstream of the case 31 in the transport direction D.
　第２支持部分１６ｂは、ケース３１の貫通穴３１ａを通過している。第２支持部分１６ｂのうち貫通穴３１ａを通過している部分には、Ｘ線検査部２のＸ線が通過するスリット（開口）１６ｃが形成されている。スリット１６ｃは、ケース３１の第１フード部３３に形成されたＸ線通過スリット３３ａ，３３ｂ間に位置している。 The second support portion 16 b passes through the through hole 31 a of the case 31. A slit (opening) 16c through which the X-ray of the X-ray inspection unit 2 passes is formed in a portion of the second support portion 16b passing through the through hole 31a. The slit 16 c is located between the X-ray passage slits 33 a and 33 b formed in the first hood portion 33 of the case 31.
　以上のように構成された搬送部１０は、そのメンテナンスを実施するために、以下の手順で異物検査装置１から取り外される。 The transport unit 10 configured as described above is removed from the foreign matter inspection apparatus 1 according to the following procedure in order to perform maintenance.
　まず、筐体４の下部扉４１を開放し、爪部１７ａに対する留め具４５ｂの係合を解除する。そして、図６に示されるように、第１送りローラ１３及び第１支持部分１６ａが取り付けられた第１支持フレーム１１を、上側且つ内側（ケース３１側）に移動させる。これにより、無端ベルト１５が緩むので、第１送りローラ１３及び第１支持部分１６ａが取り付けられた第１支持フレーム１１を、手前に引き出すことができる。 First, the lower door 41 of the housing 4 is opened, and the engagement of the fastener 45b with the claw portion 17a is released. And as FIG. 6 shows, the 1st support frame 11 with which the 1st feed roller 13 and the 1st support part 16a were attached is moved to the upper side and inner side (case 31 side). Thereby, since the endless belt 15 is loosened, the first support frame 11 to which the first feed roller 13 and the first support portion 16a are attached can be pulled out to the front.
　続いて、爪部１７ｂに対する留め具４６ｂの係合を解除する。そして、第２送りローラ１４及び第２支持部分１６ｂが取り付けられた第２支持フレーム１２を、内側（ケース３１側）に移動させる。これにより、タイミングベルト４８が緩むので、タイミングプーリ１９，４７からタイミングベルト４８を取り外すことができる。このとき、タイミングプーリ１９，４７及びタイミングベルト４８が下部扉４１側に配置されているため、タイミングベルト４８を容易に取り外すことができる。 Subsequently, the fastener 46b is disengaged from the claw portion 17b. And the 2nd support frame 12 to which the 2nd feed roller 14 and the 2nd support part 16b were attached is moved inside (case 31 side). Thereby, since the timing belt 48 is loosened, the timing belt 48 can be detached from the timing pulleys 19 and 47. At this time, since the timing pulleys 19 and 47 and the timing belt 48 are disposed on the lower door 41 side, the timing belt 48 can be easily removed.
　続いて、第２送りローラ１４及び第２支持部分１６ｂが取り付けられた第２支持フレーム１２を、上側且つ外側（ケース３１とは反対側）に移動させ、ケース３１から第２支持部分１６ｂを引き出す。これにより、第２送りローラ１４及び第２支持部分１６ｂが取り付けられた第２支持フレーム１２を、手前に引き出すことができる。 Subsequently, the second support frame 12 to which the second feed roller 14 and the second support portion 16b are attached is moved upward and outward (opposite the case 31), and the second support portion 16b is pulled out from the case 31. . Thereby, the 2nd support frame 12 to which the 2nd feed roller 14 and the 2nd support part 16b were attached can be pulled out to this side.
　以上の手順で搬送部１０を異物検査装置１から取り外すことができる。なお、搬送部１０のメンテナンスを実施した後には、以上の手順とは逆の手順で搬送部１０を異物検査装置１に取り付けることができる。 The transport unit 10 can be removed from the foreign matter inspection apparatus 1 by the above procedure. In addition, after carrying out the maintenance of the transport unit 10, the transport unit 10 can be attached to the foreign matter inspection apparatus 1 by a procedure reverse to the above procedure.
　以上説明したように、異物検査装置１では、無端ベルト１５を支持する支持プレート１６が、搬送方向Ｄに沿って並設された第１支持部分１６ａ及び第２支持部分１６ｂに分離されている。そのため、搬送部１０のメンテナンスを実施する際に、搬送方向Ｄに沿って金属検出部３のケース３１から搬送部１０を一体として引き出す必要がない。よって、異物検査装置１によれば、搬送方向Ｄにおける異物検査装置１の両側のスペースが限られている場合であっても、搬送部１０のメンテナンスを容易に実施することができる。なお、上述したように、搬送部１０の両側には、搬入用コンベヤ１０１及び搬出用コンベヤ１０２が配置される場合が多く、一般的には、搬送方向Ｄにおける異物検査装置１の両側のスペースは限られる場合が多い。したがって、異物検査装置１の搬送部１０の構成は、極めて有効である。 As described above, in the foreign matter inspection apparatus 1, the support plate 16 that supports the endless belt 15 is separated into the first support portion 16a and the second support portion 16b that are arranged in parallel along the transport direction D. Therefore, when carrying out maintenance of the transport unit 10, it is not necessary to pull out the transport unit 10 integrally from the case 31 of the metal detection unit 3 along the transport direction D. Therefore, according to the foreign substance inspection apparatus 1, even if the space on both sides of the foreign substance inspection apparatus 1 in the conveyance direction D is limited, the maintenance of the conveyance unit 10 can be easily performed. As described above, the carry-in conveyor 101 and the carry-out conveyor 102 are often arranged on both sides of the transport unit 10. Generally, the space on both sides of the foreign matter inspection apparatus 1 in the transport direction D is as follows. Often limited. Therefore, the configuration of the transport unit 10 of the foreign matter inspection apparatus 1 is extremely effective.
　また、異物検査装置１には、搬送部１０及び金属検出部３に加え、Ｘ線検査部２及び筐体４が設けられている。異物検査装置１にＸ線検査部２が設けられている場合、無端ベルト１５の表面に付着した汚れ等がＸ線検査の精度を低下させる傾向があるため、無端ベルト１５の表面の清掃等、搬送部１０のメンテナンスを実施する頻度が高くなり易い。その一方で、異物検査装置１にＸ線検査部２が設けられている場合、Ｘ線の外部漏洩を抑制するために筐体４が必要になるので、搬送部１０のメンテナンスを容易に実施することが困難になり易い。しかし、異物検査装置１では、搬送部１０のメンテナンスを実施する際に、搬送方向Ｄに沿って筐体４の開口部４ａ又は開口部４ｂから搬送部１０を一体として引き出す必要がない。したがって、異物検査装置１の搬送部１０の構成は、搬送部１０及び金属検出部３に加え、Ｘ線検査部２及び筐体４が設けられている異物検査装置１において、特に有効である。 Further, the foreign object inspection apparatus 1 is provided with an X-ray inspection unit 2 and a housing 4 in addition to the transport unit 10 and the metal detection unit 3. When the X-ray inspection unit 2 is provided in the foreign matter inspection apparatus 1, dirt or the like attached to the surface of the endless belt 15 tends to reduce the accuracy of the X-ray inspection. The frequency of performing maintenance of the transport unit 10 is likely to increase. On the other hand, when the X-ray inspection unit 2 is provided in the foreign matter inspection apparatus 1, the housing 4 is required to suppress external leakage of X-rays, so that the maintenance of the transport unit 10 is easily performed. It tends to be difficult. However, in the foreign matter inspection apparatus 1, when carrying out the maintenance of the transport unit 10, it is not necessary to pull out the transport unit 10 integrally from the opening 4 a or the opening 4 b of the housing 4 along the transport direction D. Therefore, the configuration of the transport unit 10 of the foreign object inspection apparatus 1 is particularly effective in the foreign object inspection apparatus 1 in which the X-ray inspection unit 2 and the housing 4 are provided in addition to the transport unit 10 and the metal detection unit 3.
　また、異物検査装置１では、第２支持部分１６ｂに、Ｘ線検査部２のＸ線が通過するスリット１６ｃが形成されている。これにより、支持プレート１６によるＸ線の減衰を抑制してＸ線検査を精度良く実施することができる。 Further, in the foreign substance inspection apparatus 1, a slit 16c through which the X-ray of the X-ray inspection unit 2 passes is formed in the second support portion 16b. Thereby, X-ray attenuation by the support plate 16 can be suppressed and the X-ray inspection can be performed with high accuracy.
　また、異物検査装置１では、第１支持部分１６ａ及び第２支持部分１６ｂが、金属検出部３が有するケース３１の外側で互いに分離されている。これにより、第１支持部分１６ａ及び第２支持部分１６ｂがケース３１の内側で互いに分離されている場合に比べ、搬送部１０のメンテナンスをより容易に実施することができる。 Further, in the foreign matter inspection apparatus 1, the first support portion 16a and the second support portion 16b are separated from each other outside the case 31 included in the metal detection unit 3. Thereby, compared with the case where the 1st support part 16a and the 2nd support part 16b are mutually isolate | separated inside the case 31, the maintenance of the conveyance part 10 can be implemented more easily.
　また、異物検査装置１では、第１支持フレーム１１に第１送りローラ１３及び第１支持部分（複数の支持部分のうち搬送領域の最も上流側に配置された支持部分）１６ａが取り付けられており、第２支持フレーム１２に第２送りローラ１４及び第２支持部分（複数の支持部分のうち搬送領域の最も下流側に配置された支持部分）１６ｂが取り付けられている。これにより、第１送りローラ１３、第１支持部分１６ａ及び第１支持フレーム１１の組と、第２送りローラ１４、第２支持部分１６ｂ及び第２支持フレーム１２の組と、をそれぞれユニットとして取り扱うことができるので、搬送部１０のメンテナンスをより容易に実施することができる。 In the foreign matter inspection apparatus 1, a first feed roller 13 and a first support portion (a support portion disposed on the most upstream side of the transport region among a plurality of support portions) 16 a are attached to the first support frame 11. The second support roller 12 and a second feed roller 14 and a second support portion (a support portion disposed on the most downstream side of the transport region among the plurality of support portions) 16b are attached. Thereby, the set of the 1st feed roller 13, the 1st support part 16a, and the 1st support frame 11, and the set of the 2nd feed roller 14, the 2nd support part 16b, and the 2nd support frame 12 are handled as a unit, respectively. Therefore, the maintenance of the transport unit 10 can be performed more easily.
　以上、本開示の一実施形態について説明したが、本開示の一形態に係る異物検査装置は、上述した実施形態に限定されるものではない。 As mentioned above, although one embodiment of this indication was explained, a foreign substance inspection device concerning one form of this indication is not limited to an embodiment mentioned above.
　例えば、第１支持部分１６ａ及び第２支持部分１６ｂは、金属検出部３が有するケース３１の内側で互いに分離されていてもよい。その場合にも、搬送方向Ｄに沿ってケース３１から搬送部１０を一体として引き出す必要がないため、支持プレート１６が分離されていない場合に比べれば、搬送部１０のメンテナンスを容易に実施することができる。 For example, the first support portion 16a and the second support portion 16b may be separated from each other inside the case 31 included in the metal detection unit 3. Even in this case, since it is not necessary to pull out the transport unit 10 as an integral part from the case 31 along the transport direction D, the maintenance of the transport unit 10 can be easily performed as compared to the case where the support plate 16 is not separated. Can do.
　また、Ｘ線検査部２のＸ線が通過するスリット１６ｃのような開口は、Ｘ線検査部２の配置位置、第１支持部分１６ａと第２支持部分１６ｂとの分離位置等に応じて、第１支持部分１６ａ又は第２支持部分１６ｂのいずれに形成されていてもよい。また、Ｘ線検査部２の配置位置、第１支持部分１６ａと第２支持部分１６ｂとの分離位置等に応じて、第１支持部分１６ａと第２支持部分１６ｂとの間に、Ｘ線検査部のＸ線が通過する隙間が形成されていてもよい。その場合、第１支持部分１６ａ及び第２支持部分１６ｂのそれぞれの強度を維持することができると共に、支持プレート１６によるＸ線の減衰を抑制してＸ線検査を精度良く実施することができる。 Further, the opening such as the slit 16c through which the X-ray of the X-ray inspection unit 2 passes depends on the arrangement position of the X-ray inspection unit 2, the separation position of the first support part 16a and the second support part 16b, etc. It may be formed on either the first support portion 16a or the second support portion 16b. Further, according to the arrangement position of the X-ray inspection unit 2, the separation position of the first support part 16a and the second support part 16b, etc., the X-ray inspection is performed between the first support part 16a and the second support part 16b. A gap through which the X-rays of the portion pass may be formed. In that case, the strength of each of the first support portion 16a and the second support portion 16b can be maintained, and X-ray attenuation by the support plate 16 can be suppressed to perform the X-ray inspection with high accuracy.
　また、支持プレート１６は、搬送方向Ｄに沿って並設され且つ互いに分離された３つ以上の支持部分を含んでいてもよい。支持プレート１６が、搬送方向Ｄに沿って並設された２つ又は３つの支持部分に分離されている場合にも、Ｘ線検査部２のＸ線が通過するスリット１６ｃのような開口は、Ｘ線検査部２の配置位置、複数の支持部分の分離位置等に応じて、複数の支持部分のいずれか１つに形成される。或いは、Ｘ線検査部２の配置位置、複数の支持部分の分離位置等に応じて、互いに隣り合う支持部分の間に、Ｘ線検査部のＸ線が通過する隙間が形成される。なお、支持プレート１６が、搬送方向Ｄに沿って並設された２つ又は３つの支持部分に分離されている場合には、装置構成の複雑化の抑制及び搬送部のメンテナンスの容易化の両立を図ることができる。 Further, the support plate 16 may include three or more support portions arranged in parallel along the transport direction D and separated from each other. Even when the support plate 16 is separated into two or three support parts arranged in parallel along the transport direction D, the opening such as the slit 16c through which the X-ray of the X-ray inspection unit 2 passes is as follows. It is formed on any one of the plurality of support portions according to the arrangement position of the X-ray inspection unit 2, the separation positions of the plurality of support portions, and the like. Alternatively, a gap through which the X-rays of the X-ray inspection unit pass is formed between the support portions adjacent to each other according to the arrangement position of the X-ray inspection unit 2, the separation positions of the plurality of support portions, and the like. In addition, when the support plate 16 is separated into two or three support portions arranged in parallel along the transport direction D, it is possible to reduce the complexity of the apparatus configuration and facilitate the maintenance of the transport unit. Can be achieved.
　また、搬送部１０は、その全てが筐体４の内部に収容されていてもよい。また、異物検査装置１は、Ｘ線検査部２及び筐体４を備えず、搬送部１０及び金属検出部３を備えていてもよい。 Further, all of the transport unit 10 may be accommodated in the housing 4. Further, the foreign substance inspection apparatus 1 may include the transport unit 10 and the metal detection unit 3 without including the X-ray inspection unit 2 and the housing 4.
　また、図７及び図８に示されるように、支持プレート１６が構成されていてもよい。図７及び図８に示される支持プレート１６においては、第１支持部分１６ａが第１本体プレート１６１及び複数の第１係合部１６２を有しており、第２支持部分１６ｂが第２本体プレート１６３及び複数の第２係合部１６４を有している。 Further, as shown in FIGS. 7 and 8, the support plate 16 may be configured. In the support plate 16 shown in FIGS. 7 and 8, the first support portion 16a has a first body plate 161 and a plurality of first engaging portions 162, and the second support portion 16b is a second body plate. 163 and a plurality of second engaging portions 164.
　第１本体プレート１６１の上面１６１ａ及び第２本体プレート１６３の上面１６３ａは、同一の平面上に位置しており、無端ベルト１５の支持面を構成している。第１本体プレート１６１の端面１６１ｂ及び第２本体プレート１６３の端面１６３ｂは、互いに接触している。 The upper surface 161a of the first main body plate 161 and the upper surface 163a of the second main body plate 163 are located on the same plane, and constitute a support surface of the endless belt 15. The end surface 161b of the first body plate 161 and the end surface 163b of the second body plate 163 are in contact with each other.
　複数の第１係合部１６２は、第１本体プレート１６１の下側に取り付けられており、第２支持部分１６ｂ側に突出している。各第１係合部１６２は、矩形板状に形成されており、前後方向（搬送部１０による被検査物Ｓの搬送方向と直交する水平方向）において互いに離間している。 The plurality of first engaging portions 162 are attached to the lower side of the first main body plate 161 and protrude to the second support portion 16b side. Each of the first engaging portions 162 is formed in a rectangular plate shape, and is separated from each other in the front-rear direction (a horizontal direction orthogonal to the transport direction of the inspection object S by the transport unit 10).
　複数の第２係合部１６４は、第２本体プレート１６３の下側に取り付けられており、第１支持部分１６ａ側に突出している。各第２係合部１６４は、矩形板状に形成されており、前後方向において互いに離間している。 The plurality of second engaging portions 164 are attached to the lower side of the second main body plate 163 and protrude to the first support portion 16a side. Each second engaging portion 164 is formed in a rectangular plate shape and is separated from each other in the front-rear direction.
　各第１係合部１６２のうち第２支持部分１６ｂ側に突出した部分は、第２本体プレート１６３の下側に位置している。各第２係合部１６４のうち第１支持部分１６ａ側に突出した部分は、第１本体プレート１６１の下側に位置している。複数の第１係合部１６２及び複数の第２係合部１６４は、第１本体プレート１６１の端面１６１ｂ及び第２本体プレート１６３の端面１６３ｂが互いに接触した状態で第１係合部１６２と第２係合部１６４とが交互に並ぶように、配置されている。 The portion of each first engagement portion 162 that protrudes toward the second support portion 16 b is located below the second main body plate 163. A portion of each second engagement portion 164 that protrudes toward the first support portion 16 a is located below the first main body plate 161. The plurality of first engaging portions 162 and the plurality of second engaging portions 164 are arranged such that the end surface 161b of the first main body plate 161 and the end surface 163b of the second main body plate 163 are in contact with each other. The two engaging portions 164 are arranged alternately.
　このように、第１支持部分１６ａ及び第２支持部分１６ｂは、少なくとも１つの第１係合部１６２が、互いに隣り合う第２係合部１６４の間に位置し、且つ、少なくとも１つの第２係合部１６４が、互いに隣り合う第１係合部１６２の間に位置した状態で、互いに係合している。なお、第１係合部１６２が１つだけ設けられ、当該１つの第１係合部１６２が互いに隣り合う第２係合部１６４の間に位置してもよい。或いは、第２係合部１６４が１つだけ設けられ、当該１つの第２係合部１６４が互いに隣り合う第１係合部１６２の間に位置してもよい。 As described above, in the first support portion 16a and the second support portion 16b, at least one first engaging portion 162 is located between the second engaging portions 164 adjacent to each other, and at least one second engaging portion 162 is provided. The engaging portions 164 are engaged with each other with the engaging portions 164 positioned between the first engaging portions 162 adjacent to each other. Note that only one first engagement portion 162 may be provided, and the one first engagement portion 162 may be positioned between the second engagement portions 164 adjacent to each other. Alternatively, only one second engaging portion 164 may be provided, and the one second engaging portion 164 may be located between the first engaging portions 162 adjacent to each other.
　以上のように構成された支持プレート１６によれば、無端ベルト１５を安定して支持することができる。また、Ｘ線の漏洩も確実に防止することができる。更に、メンテナンス時には、図９及び図１０に示されるように、第１支持部分１６ａを上側に折り曲げるように移動させることで、第１支持部分１６ａと第２支持部分１６ｂとを容易に分離することができる。 According to the support plate 16 configured as described above, the endless belt 15 can be stably supported. Further, X-ray leakage can be reliably prevented. Further, at the time of maintenance, as shown in FIGS. 9 and 10, the first support portion 16a and the second support portion 16b can be easily separated by moving the first support portion 16a so as to be bent upward. Can do.
　１…異物検査装置、２…Ｘ線検査部、３…金属検出部、４…筐体、４ａ…開口部（搬入口）、４ｂ…開口部（搬出口）、１０…搬送部、１１…第１支持フレーム、１２…第２支持フレーム、１３…第１送りローラ、１４…第２送りローラ、１５…無端ベルト、１６…支持プレート、１６ａ…第１支持部分（支持部分）、１６ｂ…第２支持部分（支持部分）、１６ｃ…スリット（開口）、３１…ケース、３５…送信コイル（サーチコイル）、３６，３７…受信コイル（サーチコイル）、１６２…第１係合部、１６４…第２係合部、Ｄ…搬送方向、Ｒ…搬送領域、Ｓ…被検査物。 DESCRIPTION OF SYMBOLS 1 ... Foreign substance inspection apparatus, 2 ... X-ray inspection part, 3 ... Metal detection part, 4 ... Housing | casing, 4a ... Opening part (carrying in port), 4b ... Opening part (carrying out port), 10 ... Conveying part, 11th DESCRIPTION OF SYMBOLS 1 Support frame, 12 ... 2nd support frame, 13 ... 1st feed roller, 14 ... 2nd feed roller, 15 ... Endless belt, 16 ... Support plate, 16a ... 1st support part (support part), 16b ... 2nd Support portion (support portion), 16c ... slit (opening), 31 ... case, 35 ... transmission coil (search coil), 36, 37 ... reception coil (search coil), 162 ... first engaging portion, 164 ... second Engagement part, D ... conveying direction, R ... conveying region, S ... inspection object.

Claims (8)

  1. 　被検査物を搬送する搬送部と、
    　磁界と金属との相互作用を利用して、前記搬送部で搬送されている前記被検査物に含まれる金属を異物として検出する金属検出部と、を備え、
    　前記搬送部は、
    　前記搬送部による前記被検査物の搬送領域の上流端に配置された第１送りローラと、
    　前記搬送領域の下流端に配置された第２送りローラと、
    　前記第１送りローラ及び前記第２送りローラに架けられた無端ベルトと、
    　前記搬送領域において前記無端ベルトを支持する支持プレートと、を有し、
    　前記支持プレートは、前記搬送部による前記被検査物の搬送方向に沿って並設され且つ互いに分離された複数の支持部分を含む、異物検査装置。     A transport unit for transporting an object to be inspected;
    A metal detection unit that detects the metal contained in the object to be inspected being transported by the transport unit as a foreign object by utilizing the interaction between the magnetic field and the metal;
    The transport unit is
    A first feed roller disposed at an upstream end of a conveyance region of the inspection object by the conveyance unit;
    A second feed roller disposed at the downstream end of the transport region;
    An endless belt hung on the first feed roller and the second feed roller;
    A support plate for supporting the endless belt in the transport region,
    The foreign matter inspection apparatus, wherein the support plate includes a plurality of support portions that are arranged in parallel along the transport direction of the inspection object by the transport unit and separated from each other.
  2. 　Ｘ線の透過性を利用して、前記搬送部で搬送されている前記被検査物に含まれる異物を検出するＸ線検査部と、
    　前記搬送部の少なくとも一部、前記Ｘ線検査部、及び前記金属検出部を内部に収容し、前記搬送部による前記被検査物の搬入口、及び前記搬送部による前記被検査物の搬出口を有する筐体と、を更に備える、請求項１に記載の異物検査装置。     An X-ray inspection unit that detects foreign matter contained in the inspection object being transported by the transport unit, utilizing X-ray transparency;
    At least a part of the transfer unit, the X-ray inspection unit, and the metal detection unit are accommodated therein, and an entrance of the inspection object by the transfer unit and an exit port of the inspection object by the transfer unit are provided. The foreign matter inspection device according to claim 1, further comprising: a housing having the same.
  3. 　複数の前記支持部分のいずれか１つには、前記Ｘ線検査部のＸ線が通過する開口が形成されている、請求項２に記載の異物検査装置。 The foreign matter inspection apparatus according to claim 2, wherein an opening through which X-rays of the X-ray inspection unit pass is formed in any one of the plurality of support portions.
  4. 　互いに隣り合う前記支持部分の間には、前記Ｘ線検査部のＸ線が通過する隙間が形成されている、請求項２に記載の異物検査装置。 The foreign matter inspection apparatus according to claim 2, wherein a gap through which X-rays of the X-ray inspection unit pass is formed between the support portions adjacent to each other.
  5. 　前記金属検出部は、サーチコイルが内部に配置され且つ前記搬送部が内部を通過しているケースを有し、
    　複数の前記支持部分は、前記ケースの外側で互いに分離されている、請求項１～４のいずれか一項に記載の異物検査装置。     The metal detection unit has a case in which a search coil is disposed inside and the transport unit passes through the inside.
    The foreign matter inspection apparatus according to any one of claims 1 to 4, wherein the plurality of support portions are separated from each other outside the case.
  6. 　前記搬送部は、
    　前記第１送りローラ、及び複数の前記支持部分のうち前記搬送領域の最も上流側に配置された前記支持部分が取り付けられた第１支持フレームと、
    　前記第２送りローラ、及び複数の前記支持部分のうち前記搬送領域の最も下流側に配置された前記支持部分が取り付けられた第２支持フレームと、を更に有する、請求項１～５のいずれか一項に記載の異物検査装置。     The transport unit is
    A first support frame to which the first feed roller and the support portion arranged on the most upstream side of the transport region among the plurality of support portions are attached;
    The first feed roller, and a second support frame to which the support portion arranged on the most downstream side of the transport region among the plurality of support portions is further attached. The foreign matter inspection apparatus according to one item.
  7. 　前記支持プレートは、前記搬送方向に沿って並設され且つ互いに分離された２つ又は３つの前記支持部分を含む、請求項１～６のいずれか一項に記載の異物検査装置。 The foreign matter inspection apparatus according to any one of claims 1 to 6, wherein the support plate includes two or three of the support portions arranged in parallel along the transport direction and separated from each other.
  8. 　互いに隣り合う前記支持部分のうちの一方の支持部分には、互いに隣り合う前記支持部分のうちの他方の支持部分側に突出する少なくとも１つの第１係合部が設けられており、
    　前記他方の支持部分には、前記一方の支持部分側に突出する複数の第２係合部が設けられており、
    　前記一方の支持部分及び前記他方の支持部分は、少なくとも１つの前記第１係合部が、互いに隣り合う前記第２係合部の間に位置した状態で、互いに係合している、請求項１～７のいずれか一項に記載の異物検査装置。     One support portion of the support portions adjacent to each other is provided with at least one first engagement portion projecting to the other support portion side of the support portions adjacent to each other,
    The other support portion is provided with a plurality of second engaging portions projecting toward the one support portion,
    The one support portion and the other support portion are engaged with each other with at least one of the first engagement portions positioned between the second engagement portions adjacent to each other. The foreign matter inspection apparatus according to any one of 1 to 7.
PCT/JP2017/021004 2016-06-06 2017-06-06 Foreign matter inspecting device WO2017213146A1 (en)

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