WO2017047362A1 - Probe pin and inspection tool using same - Google Patents

Probe pin and inspection tool using same Download PDF

Info

Publication number
WO2017047362A1
WO2017047362A1 PCT/JP2016/075113 JP2016075113W WO2017047362A1 WO 2017047362 A1 WO2017047362 A1 WO 2017047362A1 JP 2016075113 W JP2016075113 W JP 2016075113W WO 2017047362 A1 WO2017047362 A1 WO 2017047362A1
Authority
WO
WIPO (PCT)
Prior art keywords
plunger
probe pin
coil spring
contact
extending
Prior art date
Application number
PCT/JP2016/075113
Other languages
French (fr)
Japanese (ja)
Inventor
宏真 寺西
貴浩 酒井
近藤　誠
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Publication of WO2017047362A1 publication Critical patent/WO2017047362A1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R33/00—Coupling devices specially adapted for supporting apparatus and having one part acting as a holder providing support and electrical connection via a counterpart which is structurally associated with the apparatus, e.g. lamp holders; Separate parts thereof
    • H01R33/74—Devices having four or more poles, e.g. holders for compact fluorescent lamps
    • H01R33/76—Holders with sockets, clips, or analogous contacts adapted for axially-sliding engagement with parallely-arranged pins, blades, or analogous contacts on counterpart, e.g. electronic tube socket

Definitions

  • the present invention relates to a probe pin and an inspection jig using the probe pin.
  • the probe pin 100 includes two contact pins 130 having the same shape each provided with a contact portion 130a at one end, and a coil spring 190.
  • the two contact pins 130 are respectively inserted from both ends of the coil spring 190 so that the contact portion 130a is exposed, and are coupled to each other so as to be slidable and orthogonal to each other inside the coil spring 190. .
  • the probe pin 100 has a problem in that the contact portions 130a at both ends cannot simultaneously contact the terminal of the object to be inspected and the terminal of the inspection device, and the continuity inspection cannot be performed.
  • the present invention provides a probe pin capable of inspecting an object to be inspected even if there is not enough space above the object to be inspected, and an inspection jig using the same. This is the issue.
  • a probe pin having conductivity;
  • a coil spring arranged so as to be wound around the plunger part, The plunger part is An insertion portion inserted into the coil spring;
  • a hook-shaped plunger body that is provided with a first contact at the tip and is connected to one end of the insertion portion and protrudes from one end of the coil spring;
  • the first contact and the second contact are directed in the same direction.
  • the first and second contacts of the probe pin are oriented in the same direction. For this reason, for example, even if there is not enough space for placing an inspection jig above the object to be inspected, the probe pin can be contacted so that the first contact and the second contact can face downward in the longitudinal direction of the probe pin. If this is arranged, a probe pin that can simultaneously contact the terminal of the object to be inspected and the terminal of the inspection apparatus can be obtained.
  • FIG. 1 is an overall perspective view of an inspection jig incorporating a probe pin showing a first embodiment according to the present invention
  • FIG. 2 is a cross-sectional perspective view showing a cross section of the inspection jig shown in FIG. 1 cut along the line II-II.
  • FIG. 2 is an exploded perspective view of the inspection jig shown in FIG. 1 is an overall perspective view showing a first embodiment of a probe pin according to the present invention
  • 4B is an exploded perspective view of the probe pin shown in FIG.
  • FIG. 4A is a partially enlarged perspective view showing a pair of elastic arms extending downward from the lower end of the first plunger in FIG. 4B;
  • FIG. 4B is a partially enlarged perspective view showing an engagement state between a pair of elastic arm portions of the first plunger in FIG. 4B and an engagement hole provided in an upper portion of the second plunger;
  • 4B is a partially enlarged perspective view of the upper end of the second plunger in FIG. 4B;
  • FIG. 2 is a cross-sectional perspective view showing a state before use of the probe pin incorporated in the inspection jig shown in FIG. 1 and showing a cross section of the inspection jig shown in FIG. 1 cut along the line II-II;
  • FIG. 2 is a cross-sectional perspective view showing a state before use of the probe pin incorporated in the inspection jig shown in FIG. 1 and showing a cross section of the inspection jig shown in FIG. 1 cut along the line II-II;
  • FIG. 9 is a front sectional view showing a section cut along a stepped IX-IX line in FIG. 8;
  • FIG. 2 is a cross-sectional perspective view showing a state in use of the probe pin incorporated in the inspection jig shown in FIG. 1 and showing a cross section of the inspection jig shown in FIG. 1 cut along the line II-II;
  • FIG. 11 is a front sectional view showing a section cut along a step-like line XI-XI in FIG. 10;
  • FIG. 2 is a cross-sectional perspective view showing a state in use of the probe pin incorporated in the inspection jig shown in FIG. 1 and showing a cross section of the inspection jig shown in FIG. 1 cut along the line II-II;
  • FIG. 13 is a front sectional view showing a section cut along a stepped XIII-XIII line in FIG. 12
  • FIG. 2 is a cross-sectional perspective view showing a state after use of the probe pin incorporated in the inspection jig shown in FIG. 1 and showing a cross section taken along the line II-II of the inspection jig shown in FIG.
  • FIG. 15 is a front sectional view showing a section cut along a stepped XV-XV line in FIG.
  • the inspection jig 10 includes an insulating housing 20 and conductive probe pins 15 as shown in FIG.
  • the housing 20 includes an insulating rectangular plate-shaped base 21 and an insulating rectangular plate-shaped cover 25, and the probe pins 15 are held by these.
  • the base 21 is provided with two through holes 22 as shown in FIG.
  • the two through holes 22 penetrate perpendicularly and parallel to the upper and lower surfaces of the base 21.
  • the base 21 is, for example, a plate-like insulating resin molded product having heat resistance.
  • the cover 25 is a plate-like insulating resin molded product having a planar shape corresponding to the base 21 as shown in FIG. As shown in FIG. 2, the cover 25 is provided with two slots 26 and 26 at predetermined positions. Each slot 26 penetrates perpendicularly and parallel to the upper and lower surfaces of the cover 25. Each slot 26 has a rectangular cross section. The slot 26 and the through hole 22 communicate with each other when the base 21 and the cover 25 are overlapped.
  • the probe pin 15 includes a plunger unit (unit) 16 including a first plunger 30 and a second plunger 40, and a coil spring 50. .
  • the first plunger 30 includes a first insertion portion 35 and a plunger body 31 having a substantially U shape (substantially square bracket “]” shape).
  • the plunger main body 31 extends vertically in the vertical direction (in other words, arranged along the axis P of the coil spring 50), and the horizontal direction (in other words, the axis of the coil spring 50) from both ends of the basic portion 39.
  • the first extending portion 32 and the second extending portion 33 extend in parallel with each other in the direction orthogonal to the center P direction.
  • the first extending portion 32 is provided with a first contact 34 having a rectangular cross section with its left end extending downward.
  • the second extending portion 33 is formed with a first insertion portion 35 extending downward from a substantially central portion.
  • a pair of first elastic arm portions 36 a and second elastic arm portions 36 b extend downward and parallel to the lower end portion of the first insertion portion 35.
  • the first elastic arm portion 36a and the second elastic arm portion 36b are formed with different lengths (FIG. 5).
  • a pressing protrusion 37 and an engaging protrusion 38 that protrude in opposite directions are formed at the lower ends of the first and second elastic arm portions 36a and 36b, respectively.
  • each part of the 1st plunger 30 is integrally molded.
  • the second plunger 40 has a second terminal 41 and a second insertion portion 42 extending upward (in the longitudinal direction of the probe pin 15) from the upper end of the terminal 41.
  • the lower end portion of the terminal 41 functions as the second contact 46.
  • the second insertion part 42 has an engagement hole 43 in the upper part and a flat part 44 in the lower part of the engagement hole 43.
  • the size, shape, and position of the engagement hole 43 are designed such that the engagement protrusion 38 of the first plunger 30 is engaged.
  • the plate thickness of the flat portion 44 is designed so that the pressing protrusion 37 of the first plunger 30 is in pressure contact.
  • a pair of spring holding portions 45 protrude from both side end surfaces located at the boundary between the terminal 41 and the second insertion portion 42, that is, from both sides in the width direction to the outside.
  • each part of the 2nd plunger 40 is integrally molded.
  • the coil spring 50 is formed by spirally winding a metal wire having elasticity, as shown in FIG. 4B.
  • each of the first and second plungers 30 and 40 has conductivity.
  • each of the first and second plungers 30 and 40 may be formed by punching from one plate material, or may be formed by electroforming a conductive metal plate. Also good. Further, the first and second plungers 30 and 40 may be formed by performing a surface treatment such as plating or coating of a metal on the surface of the non-conductive material, if necessary.
  • the first insertion portion 35 of the first plunger 30 is assembled along the axial center P of the coil spring 50 (longitudinal direction of the probe pin 15). Then, the first insertion portion 35 is inserted into the coil spring 50 until the second extending portion 33 contacts one end of the coil spring 50.
  • the second insertion portion 42 of the second plunger 40 is inserted along the axis P from the other end of the coil spring 50.
  • the orientation is adjusted so that the main surfaces of the first and second plungers 40 are orthogonal to each other. Accordingly, as shown in FIG. 6, the second insertion portion 42 of the second plunger 40 is disposed between the first elastic arm portion 36 a and the second elastic arm portion 36 b of the first plunger 30 inside the coil spring 50. Press fit.
  • the coil spring 50 is held between the second extending portion 33 and the spring holding portion 45 in a compressed state. Furthermore, the first contact 34 of the first plunger 30 and the second contact 46 of the second plunger 40 face the same direction (for example, downward in the longitudinal direction of the probe pin 15 in FIG. 4A).
  • the probe pin 15 assembled as described above is assembled into the housing 20.
  • the second contact 46 of the second plunger 40 is inserted into the through hole 22 of the base 21. And it inserts until the 2nd extension part 33 contact
  • the coil spring 50 is also housed in the through hole 22 together.
  • the thickness of the base 21 is designed so that the terminal 41 of the second plunger 40 protrudes from the lower surface of the base 21.
  • the cover 25 is overlaid on the base 21, and the plunger body 31 of the first plunger 30 is inserted into the slot 26 to support the two probe pins 15 so as to be movable up and down.
  • a coil spring 50 is fitted in the through hole 22 of the base 21.
  • the diameter of the coil spring 50 is larger than the length D1 of the slot 26 of the cover 25. For this reason, the coil spring 50 can come into contact with the lower surface 25a of the cover 25 as an example of a retaining protrusion, and the coil spring 50 can be prevented from coming off.
  • the coil spring 50 is elastically deformed by the spring holding portion 45 of the second plunger 40.
  • the length of the second extending portion 33 of the first plunger 30 is larger than the diameter of the through hole 22 of the base 21. For this reason, the 2nd extension part 33 contact
  • the inspection jig 10 is exposed on the surface of the power supply substrate 60 as an example of the inspection apparatus and directly above the inspection second terminal 61 connected to the external circuit.
  • the second contact 46 of the assembled second plunger 40 is positioned.
  • the inspection jig 10 is lowered and the second contact 46 is brought into contact with the second terminal 61 for inspection.
  • the coil spring 50 is elastically compressed and the probe pin 15 is pushed upward.
  • the second extending portion 33 is pushed up to just before the upper surface of the cover 25 and stops.
  • the second contact 46 of the second plunger 40 and the inspection second terminal 61 are in pressure contact, and the probe pin 15 and the power supply substrate 60 are electrically connected.
  • the coil spring 50 is elastically compressed, a downward biasing force is applied to the second plunger 40.
  • the contact pressure between the second contact 46 of the second plunger 40 and the second terminal 61 for inspection can be secured.
  • a space can be secured between the first contact 34 of the first plunger 30 and the upper surface of the cover 25 for installing an IC chip 70 described later as an example of an inspection object. .
  • the IC chip 70 vacuum-adsorbed to the tip of an arm of a transfer machine (not shown) is transferred to the inspection jig 10. Then, the IC chip 70 is pressed against the plunger main body 31 of the first plunger 30 for positioning. At this time, the inspection first terminal 71 as an example of the part to be inspected of the IC chip 70 is positioned immediately below the first contact 34 of the first plunger 30.
  • the IC chip 70 has an internal circuit (not shown), and first inspection terminals 71 are connected to both ends of the internal circuit.
  • the inspection first terminal 71 is exposed from the upper surface of the IC chip 70 so as to be electrically connected to another conductive member.
  • the inspection jig 10 is raised.
  • the probe pin 15 is urged downward by the restoring force of the coil spring 50.
  • the 1st contact 34 of the 1st plunger 30 and the 1st terminal 71 for inspection of IC chip 70 press-contact, and inspection jig 10 stops.
  • the inspection second terminal 61 of the power supply substrate 60 and the second contact 46 of the second plunger 40 ensure a predetermined contact pressure. Therefore, the inspection second terminal 61 of the power supply substrate 60 and the inspection first terminal 71 of the IC chip 70 are electrically connected, and a current flows through the IC chip 70. As a result, whether or not the internal circuit of the IC chip 70 is normally conducted can be inspected, and it can be determined whether or not the IC chip 70 is defective. Therefore, according to the first embodiment of the present invention, the first and second contacts 34 and 46 of the probe pin 15 are oriented in the same direction.
  • the first contact 34 and the second contact 46 are directed downward in the longitudinal direction of the probe pin 15 even if there is not enough space to install the inspection jig above the IC chip 70 as an example of the inspection object.
  • the probe pins 15 are arranged so as to be able to contact each other, the first terminal 71 for inspection of the IC chip 70 and the second terminal 61 for inspection of the power supply substrate 60 which is an example of the inspection device can be contacted simultaneously. The probe pin 15 is obtained.
  • FIG. 16 shows a probe pin 15 according to the second embodiment of the present invention.
  • the difference from the first embodiment is that a substantially V-shaped notch 34a is provided on the contact surface of the first contact 34, and two contact protrusions 34g and 34g are formed with the notch 34a interposed therebetween. It is a point.
  • the notch 34 a is formed with a substantially V-shaped notch so as to be recessed upward with respect to the longitudinal direction of the probe pin 15.
  • the same parts as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
  • the two contact protrusions 34g, 34g of the first contact 34 can be brought into contact with one inspection first terminal 71 of the object to be inspected at a plurality of locations, and the contact reliability is improved.
  • FIG. 17 shows a probe pin 15 according to a third embodiment of the present invention.
  • the first contact 34 is provided with a pair of elastic claws 34b, 34b extending along the substantially longitudinal direction of the probe pin 15.
  • the elastic claw 34b has a shape whose tip is curved inward.
  • FIG. 18 shows a probe pin 15 according to the fourth embodiment of the present invention.
  • the first contact 34 has an arc-shaped elastic piece 34 c that protrudes downward in the longitudinal direction of the probe pin 15.
  • FIG. 19 shows a probe pin 15 according to a fifth embodiment of the present invention.
  • the plunger body 31 of the first plunger 30 is substantially U-shaped. That is, the trunk portion 39 ⁇ / b> B that connects the first extension portion 32 and the second extension portion 33 at both ends is curved so as to protrude in a direction perpendicular to the longitudinal direction of the probe pin 15.
  • the plunger body 31 is easily elastically deformed, and the object to be inspected is hardly damaged.
  • stress concentration is unlikely to occur in the plunger main body 31, fatigue failure is unlikely to occur, and the probe pin 15 having a long life can be obtained.
  • FIG. 20 shows a probe pin 15 according to a sixth embodiment of the present invention.
  • the plunger main body 31 of the first plunger 30 has a bellows-shaped basic portion 39A.
  • the distance between the fulcrums of the first plunger 30 is long, it is easily elastically deformed and hardly injures the object to be inspected. Further, since stress concentration is less likely to occur, fatigue failure is less likely to occur, and the probe pin 15 having a long life can be obtained.
  • FIG. 21 shows a probe pin 15 according to a seventh embodiment of the present invention.
  • the plunger portion 16 has a substantially L shape.
  • the first plunger 30 includes a plunger main body 31 including a first extending portion 32 and a backbone portion 39, and a first insertion portion 35 that extends on the same straight line as the backbone portion 39.
  • a pair of spring holding portions 31a and 31a project outward from both side end surfaces located at the boundary between the plunger main body 31 and the first insertion portion 35, respectively.
  • the pair of spring holding portions 31 a and 31 a has a width dimension at both ends smaller than the diameter of the through hole 22 provided in the base 21.
  • the spring holding portion 31 a can be inserted into the through hole 22.
  • the first extending portion 32 can be stored in the slot 26.
  • FIG. 22 shows a probe pin 15 according to the eighth embodiment of the present invention.
  • the entire plunger portion 16 is integrally formed from a single material. It consists of a single part.
  • the separate plunger portion 16 may be assembled to the coil spring 50 and then connected and integrated by soldering or the like to form a single component.
  • the probe pin 15 can be produced simply by press-fitting the coil spring 50 into one component. For this reason, the number of assembling steps is reduced, and the probe pin 15 with high dimensional accuracy is obtained. Furthermore, since the plunger portion 16 can be produced by a single press operation or electroforming operation, the productivity is high.
  • the probe pins 15 according to various embodiments of the present invention have been specifically described.
  • the present invention is not limited to the above-described various embodiments, and various modifications can be made without departing from the spirit of the present invention. It is possible to implement.
  • the present invention can be modified as follows, and these embodiments also belong to the technical scope of the present invention.
  • the plunger portion 16 As the plunger portion 16 having the hook-shaped plunger body, the plunger portion 16 has an L shape, and the first extending portion 32 extends from the trunk portion 39 in a direction perpendicular to the axis P of the coil spring 50. It may be a thing.
  • the plunger portion 16 may have a J shape, and the first extending portion 32 may have a shape curved from the trunk portion 39 toward the first contact 34.
  • the first contact 34 may be semicircular. Thereby, contact
  • the shape and size of the pressing protrusion 37 and the engaging protrusion 38 of the elastic arm portion 36 of the first plunger 30 can be selected as appropriate.
  • the first extending portion 32 of the first plunger 30 may be changed to various lengths according to the position of the first terminal 71 for inspection of the inspection object.
  • the shape of the second contact 46 of the second plunger 40 can be variously modified in accordance with the shape of the second terminal 61 for inspection.
  • the second contact 46 may be sharp.
  • the engagement hole 43 of the second plunger 40 may slide when engaged with the elastic arm portion 36 of the first plunger 30, or may not penetrate.
  • a large number of holes may be provided in the housing 20 of the inspection jig 10 so that a large number of probe pins 15 can be incorporated.
  • the base 21 and the cover 25 may have a detachable structure. Thereby, when only one probe pin is broken, the cover 25 can be removed from the base 21 and the damaged probe pin can be replaced.
  • the inspection jig 10 may be fixed so that the power supply substrate 60 can freely move up, down, left, and right for inspection.
  • the inspection object may be an electronic component other than the IC chip 70, for example, a CPU chip.
  • the probe pin according to the first aspect of the present invention is to solve the above problem, A plunger portion having conductivity; A coil spring arranged so as to be wound around the plunger part, The plunger part is An insertion portion inserted into the coil spring; A hook-shaped plunger body that is provided with a first contact at the tip and is connected to one end of the insertion portion and protrudes from one end of the coil spring; A second contact at the tip, and a terminal connected to the other end of the insertion portion and protruding from the other end of the coil spring; The first contact and the second contact are directed in the same direction.
  • the first and second contacts of the probe pin are oriented in the same direction. For this reason, for example, even if there is not enough space for placing an inspection jig above the object to be inspected, the probe pin can be contacted so that the first contact and the second contact can face downward in the longitudinal direction of the probe pin. If this is arranged, a probe pin that can simultaneously contact the terminal of the object to be inspected and the terminal of the inspection apparatus can be obtained.
  • the plunger main body extends in a direction orthogonal to the axis of the coil spring, and the first extending portion including the first contact is provided. You may have.
  • the inspection object is not inspected with a height higher than the first extending portion, so that a large installation space is not required above the inspection object.
  • the plunger main body may have a second extension portion extending in parallel with the first extension portion.
  • the second extending portion functions as a stopper, and the coil spring cannot move above the second extending portion, so that handling in the assembly process is easy.
  • the plunger body includes the first extension part, the second extension part, the first extension part, and the second extension part extending in parallel with each other.
  • You may have a U-shape which has a trunk part which connects an extension part and extends along the axis of the coil spring.
  • the inspection object can be positioned by pressing the inspection object against the U-shaped plunger body, and the inspection accuracy is high.
  • the plunger body includes the first extension part, the second extension part, the first extension part, and the second extension part extending in parallel with each other. You may have a U shape which has an accordion-like trunk part which connects an extension part and is arranged along the axis of the coil spring. Further, as a sixth aspect of the present invention, in the third aspect, the plunger body includes the first extension part, the second extension part, the first extension part, and the It may have a U-shape by connecting the second extending portion and having a trunk portion curved in an arc shape.
  • the distance between the fulcrums of the plunger main body is long and is easily elastically deformed, the object to be inspected is hardly damaged. Further, according to the fifth and sixth aspects, stress concentration is less likely to occur and fatigue failure is less likely to occur, so that the probe pin has a long life.
  • the insertion portion is disposed at the other end of the insertion portion and protrudes laterally from both end surfaces of the insertion portion.
  • a holding portion may be provided, and the coil spring may be held between the spring holding portion and the second extending portion. According to the seventh aspect, the coil spring does not fall off from the probe pin, and handling in the assembly process is easy.
  • the plunger portion is A first plunger having a first insertion portion inserted into a portion on one end side of the coil spring, and the plunger body; A second plunger having a second insertion portion inserted into the other end portion of the coil spring and engageable with the first insertion portion, and the terminal;
  • the first insertion portion and the second insertion portion may constitute the insertion portion, and the first insertion portion and the second insertion portion may be engaged and integrated within the coil spring.
  • the plunger portion may be formed as a single part by integrally molding the plunger body and the terminal. According to the ninth aspect, the number of parts is reduced, and the management of the parts is facilitated. In addition, since the probe pin can be produced simply by press-fitting a coil spring into one component, the number of assembly steps can be reduced.
  • the first contact may have a V-shaped notch. According to the 10th aspect, since the 1st contact contacts the inspection part of a to-be-inspected object in multiple places, contact reliability increases.
  • the first contact may be formed by a pair of curved elastic claws.
  • the tip of the elastic claw portion bends and performs a wiping action. For this reason, the stain
  • the first contact may be formed of an elastic piece curved in an arc shape.
  • the elastic piece curved so as to protrude in an arc shape is elastically deformed, an excessive contact pressure is applied to the inspected portion of the inspected object. It is difficult to damage the object to be inspected. Further, since the free end portion of the elastic piece is short-circuited with the first extending portion of the plunger body, a probe pin with a small contact resistance can be obtained.
  • An inspection jig includes a base having a through-hole through which the coil spring can be inserted, a cover having a slot through which the plunger portion can be inserted, and the cover overlaid on the base.
  • the probe pin according to any one of the first to twelfth aspects housed in the communicating through hole and the slot.
  • the first and second contacts of the probe pin are oriented in the same direction. For this reason, even if there is not enough space for installing the inspection jig above the object to be inspected, the inspection jig that allows the first contact and the second contact to simultaneously contact the terminal of the object to be inspected and the terminal of the inspection apparatus respectively. Is obtained.
  • the slot may have a retaining protrusion for retaining the coil spring.
  • the coil spring is elastically compressed when the probe pin moves upward, and the contact pressure of the first and second contacts is increased.
  • it can be made to show the effect which each has by combining arbitrary embodiment or modification of the said various embodiment or modification suitably.
  • combinations of the embodiments, combinations of the examples, or combinations of the embodiments and examples are possible, and combinations of features in different embodiments or examples are also possible.
  • the probe pin according to the present invention is not limited to the inspection jig according to the above embodiment, and may be applied to other electronic devices as long as it has the probe pin according to the present invention.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Connecting Device With Holders (AREA)

Abstract

Disclosed is a probe pin (15) comprising an electroconductive plunger part (16), and a coil spring (50) arranged so as to be wound around the plunger part (16). In particular, the plunger part (16) includes: a hook-shaped plunger body (31) protruding from one end of the coil spring (50); and a terminal (41) protruding from the other end of the coil spring (50). A first contact point (34) provided at a tip end part of the plunger body (31) and a second contact point (46) provided at a tip end part of the terminal (41) face the same direction.

Description

プローブピンおよびこれを用いた検査治具Probe pin and inspection jig using the same
　本発明は、プローブピン、および、そのプローブピンを用いた検査治具に関する。 The present invention relates to a probe pin and an inspection jig using the probe pin.
　従来、プローブピンとしては、図２３に示すように、特許文献１に記載されたものがある。このプローブピン１００は、一端にコンタクト部１３０ａがそれぞれ設けられた同一形状の２つのコンタクトピン１３０と、コイルばね１９０とを備えている。そして、２つのコンタクトピン１３０は、コンタクト部１３０ａが露出するようにコイルばね１９０の両端からそれぞれ挿入されており、コイルばね１９０の内部で、互いに直交し、かつ、スライド移動可能に結合されている。 Conventionally, as a probe pin, there is one described in Patent Document 1 as shown in FIG. The probe pin 100 includes two contact pins 130 having the same shape each provided with a contact portion 130a at one end, and a coil spring 190. The two contact pins 130 are respectively inserted from both ends of the coil spring 190 so that the contact portion 130a is exposed, and are coupled to each other so as to be slidable and orthogonal to each other inside the coil spring 190. .
特表２００８－５１６３９８号公報Special table 2008-516398 gazette
　しかしながら、近年、被検査物の複雑化および多様化に伴い、プローブピンが組み込まれた検査治具の配置に制限が課せられる場合が増えている。例えば、被検査物の上方に検査治具を設置するスペースを十分に確保できない場合がある。このような場合には、前記プローブピン１００では、両端のコンタクト部１３０ａが被検査物の端子と検査装置の端子とに同時に接触できず、導通検査を行えないという問題がある。 However, in recent years, with the complexity and diversification of inspection objects, there are increasing cases where restrictions are placed on the arrangement of inspection jigs incorporating probe pins. For example, there may be a case where a sufficient space for installing the inspection jig cannot be secured above the inspection object. In such a case, the probe pin 100 has a problem in that the contact portions 130a at both ends cannot simultaneously contact the terminal of the object to be inspected and the terminal of the inspection device, and the continuity inspection cannot be performed.
　本発明は、前記問題点に鑑み、被検査物の上方に検査治具を設置できるスペースが十分に無くとも、被検査物を検査できるプローブピン、および、これを用いた検査治具を提供することを課題とする。 In view of the above problems, the present invention provides a probe pin capable of inspecting an object to be inspected even if there is not enough space above the object to be inspected, and an inspection jig using the same. This is the issue.
　本発明の１つの態様に係るプローブピンは、前記課題を解決すべく、
　導電性を有するプランジャ部と、
　前記プランジャ部の周囲に巻回するように配置されたコイルばねと、を有するプローブピンであって、
　前記プランジャ部は、
　　前記コイルばねに挿入された挿入部と、
　　先端部に第１接点を設け、かつ、前記挿入部の一端に連結されて前記コイルばねの一端から突出する鉤型形状のプランジャ本体と、
　　先端部に第２接点を設け、かつ、前記挿入部の他端に連結されて前記コイルばねの他端から突出する端子と、を有し、
　前記第１接点と前記第２接点とが同一方向に向けられている構成としてある。 In order to solve the above problem, a probe pin according to one aspect of the present invention is provided.
A plunger portion having conductivity;
A coil spring arranged so as to be wound around the plunger part,
The plunger part is
An insertion portion inserted into the coil spring;
A hook-shaped plunger body that is provided with a first contact at the tip and is connected to one end of the insertion portion and protrudes from one end of the coil spring;
A second contact at the tip, and a terminal connected to the other end of the insertion portion and protruding from the other end of the coil spring;
The first contact and the second contact are directed in the same direction.
　本発明の前記態様によれば、プローブピンの第１，第２接点が、同一方向に向いている。このため、例えば、被検査物の上方に検査治具を設置できるスペースが十分に無くとも、第１接点および第２接点が、プローブピンの長手方向の下向きに向いて接触可能なようにプローブピンを配置すれば、被検査物の端子と検査装置の端子とにそれぞれ同時に接触できるプローブピンが得られる。 According to the above aspect of the present invention, the first and second contacts of the probe pin are oriented in the same direction. For this reason, for example, even if there is not enough space for placing an inspection jig above the object to be inspected, the probe pin can be contacted so that the first contact and the second contact can face downward in the longitudinal direction of the probe pin. If this is arranged, a probe pin that can simultaneously contact the terminal of the object to be inspected and the terminal of the inspection apparatus can be obtained.
　本発明のこれらと他の目的と特徴は、添付された図面についての実施形態に関連した次の記述から明らかになる。この図面においては、
本発明に係る第１実施形態を示すプローブピンを組み込んだ検査治具の全体斜視図であり、 図１に示す検査治具をＩＩ－ＩＩ線に沿って切断した断面を示す断面斜視図であり、 図１に示す検査治具の分解斜視図であり、 本発明に係るプローブピンの第１実施形態を示す全体斜視図であり、 図４Ａに示すプローブピンの分解斜視図であり、 図４Ｂにおける第１プランジャの下端から下方に延びる一対の弾性腕部を示す部分拡大斜視図であり、 図４Ｂにおける第１プランジャの一対の弾性腕部と第２プランジャの上部に設けられる係合孔との係合状態を表す部分拡大斜視図であり、 図４Ｂにおける第２プランジャの上端の部分拡大斜視図であり、 図１に示す検査治具に組み込んだプローブピンの使用前の状態を示し、かつ、図１に示す検査治具をＩＩ－ＩＩ線に沿って切断した断面を表す断面斜視図であり、 図８における階段状のＩＸ－ＩＸ線に沿って切断した断面を表す正面断面図であり、 図１に示す検査治具に組み込んだプローブピンの使用途中の状態を示し、かつ、図１に示す検査治具をＩＩ－ＩＩ線に沿って切断した断面を表す断面斜視図であり、 図１０における階段状のＸＩ－ＸＩ線に沿って切断した断面を表す正面断面図であり、 図１に示す検査治具に組み込んだプローブピンの使用途中の状態を示し、かつ、図１に示す検査治具をＩＩ－ＩＩ線に沿って切断した断面を表す断面斜視図であり、 図１２における階段状のＸＩＩＩ－ＸＩＩＩ線に沿って切断した断面を表す正面断面図であり、 図１に示す検査治具に組み込んだプローブピンの使用後の状態を示し、かつ、図１に示す検査治具をＩＩ－ＩＩ線に沿って切断した断面を表す断面斜視図であり、 図１４における階段状のＸＶ－ＸＶ線に沿って切断した断面を表す正面断面図であり、 本発明に係る第２実施形態を示すプローブピンの部分拡大斜視図であり、 本発明に係る第３実施形態を示すプローブピンの部分拡大斜視図であり、 本発明に係る第４実施形態を示すプローブピンの部分拡大斜視図であり、 本発明に係る第５実施形態を示すプローブピンの部分拡大斜視図であり、 本発明に係る第６実施形態を示すプローブピンの部分拡大斜視図であり、 本発明に係る第７実施形態を示すプローブピンの全体斜視図であり、 本発明に係る第８実施形態を示すプローブピンのプランジャ部の全体斜視図であり、 特許文献１のプローブピンの斜視図である。 These and other objects and features of the invention will become apparent from the following description taken in conjunction with the embodiments with reference to the accompanying drawings. In this drawing,
1 is an overall perspective view of an inspection jig incorporating a probe pin showing a first embodiment according to the present invention, FIG. 2 is a cross-sectional perspective view showing a cross section of the inspection jig shown in FIG. 1 cut along the line II-II. FIG. 2 is an exploded perspective view of the inspection jig shown in FIG. 1 is an overall perspective view showing a first embodiment of a probe pin according to the present invention, 4B is an exploded perspective view of the probe pin shown in FIG. 4A; 4B is a partially enlarged perspective view showing a pair of elastic arms extending downward from the lower end of the first plunger in FIG. 4B; FIG. 4B is a partially enlarged perspective view showing an engagement state between a pair of elastic arm portions of the first plunger in FIG. 4B and an engagement hole provided in an upper portion of the second plunger; 4B is a partially enlarged perspective view of the upper end of the second plunger in FIG. 4B; FIG. 2 is a cross-sectional perspective view showing a state before use of the probe pin incorporated in the inspection jig shown in FIG. 1 and showing a cross section of the inspection jig shown in FIG. 1 cut along the line II-II; FIG. 9 is a front sectional view showing a section cut along a stepped IX-IX line in FIG. 8; FIG. 2 is a cross-sectional perspective view showing a state in use of the probe pin incorporated in the inspection jig shown in FIG. 1 and showing a cross section of the inspection jig shown in FIG. 1 cut along the line II-II; FIG. 11 is a front sectional view showing a section cut along a step-like line XI-XI in FIG. 10; FIG. 2 is a cross-sectional perspective view showing a state in use of the probe pin incorporated in the inspection jig shown in FIG. 1 and showing a cross section of the inspection jig shown in FIG. 1 cut along the line II-II; FIG. 13 is a front sectional view showing a section cut along a stepped XIII-XIII line in FIG. 12, FIG. 2 is a cross-sectional perspective view showing a state after use of the probe pin incorporated in the inspection jig shown in FIG. 1 and showing a cross section taken along the line II-II of the inspection jig shown in FIG. FIG. 15 is a front sectional view showing a section cut along a stepped XV-XV line in FIG. 14; It is a partial enlarged perspective view of a probe pin showing a second embodiment according to the present invention, It is the elements on larger scale of the probe pin which shows a 3rd embodiment concerning the present invention, It is a partial enlarged perspective view of a probe pin showing a fourth embodiment according to the present invention, It is a partial enlarged perspective view of a probe pin showing a fifth embodiment according to the present invention, It is a partial enlarged perspective view of a probe pin showing a sixth embodiment according to the present invention, It is the whole probe pin perspective view showing a 7th embodiment concerning the present invention, It is a whole perspective view of the plunger part of the probe pin which shows 8th Embodiment concerning this invention, It is a perspective view of the probe pin of patent documents 1.
　本発明の記述を続ける前に、添付図面において同じ部品については同じ参照符号を付している。
　以下、図面を参照して本発明における第１実施形態を詳細に説明する。 Before continuing the description of the present invention, the same parts are denoted by the same reference numerals in the accompanying drawings.
Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings.
　本発明の実施形態を説明するにあたり、図面に表された構成を説明するうえで、「上」、「下」、「左」、「右」等の方向を表す用語、および、それらを含む別の用語を使用するが、それらの用語を使用する目的は図面を通じて実施形態の理解を容易にするためである。
　したがって、それらの用語は、本発明の実施形態が実際に使用されるときの方向を示すものとは限らないし、それらの用語によって特許請求の範囲に記載された技術的範囲が限定的に解釈されるべきではない。 In describing the embodiment of the present invention, in describing the configuration shown in the drawings, terms representing directions such as “up”, “down”, “left”, “right”, and other terms including them. The purpose of using these terms is to facilitate understanding of the embodiment through the drawings.
Therefore, these terms do not necessarily indicate the direction in which the embodiments of the present invention are actually used, and the technical scope described in the claims is limitedly interpreted by these terms. Should not.
［第１実施形態］
　図１ないし図１５に示すように、本発明に係る第１実施形態のプローブピンを組み込んだ検査治具について説明する。 [First Embodiment]
As shown in FIGS. 1 to 15, an inspection jig incorporating the probe pin according to the first embodiment of the present invention will be described.
　本第１実施形態に係る検査治具１０は、図２に示すように、絶縁性のハウジング２０と導電性のプローブピン１５とを有する。ハウジング２０は、絶縁性の矩形板形状のベース２１と絶縁性の矩形板形状のカバー２５とを有し、これらによってプローブピン１５が保持されている。 The inspection jig 10 according to the first embodiment includes an insulating housing 20 and conductive probe pins 15 as shown in FIG. The housing 20 includes an insulating rectangular plate-shaped base 21 and an insulating rectangular plate-shaped cover 25, and the probe pins 15 are held by these.
　ベース２１は、図３に示すように、２つの貫通孔２２が設けられている。２つの貫通孔２２は、ベース２１の上下面に対して垂直に、かつ、平行に貫通している。なお、ベース２１は、例えば、耐熱性を備えた板状の絶縁性の樹脂成形品である。 The base 21 is provided with two through holes 22 as shown in FIG. The two through holes 22 penetrate perpendicularly and parallel to the upper and lower surfaces of the base 21. The base 21 is, for example, a plate-like insulating resin molded product having heat resistance.
　カバー２５は、図１に示すように、ベース２１に対応した平面形状を有する板状の絶縁性の樹脂成形品である。そして、カバー２５は、図２に示すように、所定の位置に２つのスロット２６，２６が設けられている。各スロット２６は、カバー２５の上下面に対して垂直に、かつ、平行に貫通している。また、各スロット２６は、横断面矩形状を有している。そして、スロット２６と貫通孔２２とは、ベース２１とカバー２５とを重ね合わせたときに連通する。 The cover 25 is a plate-like insulating resin molded product having a planar shape corresponding to the base 21 as shown in FIG. As shown in FIG. 2, the cover 25 is provided with two slots 26 and 26 at predetermined positions. Each slot 26 penetrates perpendicularly and parallel to the upper and lower surfaces of the cover 25. Each slot 26 has a rectangular cross section. The slot 26 and the through hole 22 communicate with each other when the base 21 and the cover 25 are overlapped.
　本第１実施形態に係るプローブピン１５は、図４Ａおよび図４Ｂに示すように、第１プランジャ３０および第２プランジャ４０を備えるプランジャ部（ユニット）１６と、コイルばね５０とで構成されている。 As shown in FIGS. 4A and 4B, the probe pin 15 according to the first embodiment includes a plunger unit (unit) 16 including a first plunger 30 and a second plunger 40, and a coil spring 50. .
　第１プランジャ３０は、図４Ｂに示すように、第１挿入部３５と、略コ字形（略角括弧”］”形状）のプランジャ本体３１とを有する。
　プランジャ本体３１は、上下方向に垂直に延びる（言い換えれば、コイルばね５０の軸心Ｐ沿いに配置された）基幹部３９と、基幹部３９の両端から水平方向（言い換えれば、コイルばね５０の軸心Ｐ方向と直交する方向）に互いに平行に延びる第１延在部３２と第２延在部３３とを有する。第１延在部３２には、その左端部を下方に延ばして横断面矩形の第１接点３４が設けられている。第２延在部３３は、略中央部から下方に延びる第１挿入部３５が形成されている。第１挿入部３５の下端部には、一対の第１弾性腕部３６ａと第２弾性腕部３６ｂとが、下方に平行に延びている。また、第１弾性腕部３６ａと第２弾性腕部３６ｂは、異なる長さで形成されている（図５）。そして、第１、第２弾性腕部３６ａ，３６ｂの下端部には、互いに対向する方向に突出する圧接用突起３７，係合用突起３８がそれぞれ形成されている。なお、第１プランジャ３０の各部分は、一体成形されている。 As shown in FIG. 4B, the first plunger 30 includes a first insertion portion 35 and a plunger body 31 having a substantially U shape (substantially square bracket “]” shape).
The plunger main body 31 extends vertically in the vertical direction (in other words, arranged along the axis P of the coil spring 50), and the horizontal direction (in other words, the axis of the coil spring 50) from both ends of the basic portion 39. The first extending portion 32 and the second extending portion 33 extend in parallel with each other in the direction orthogonal to the center P direction. The first extending portion 32 is provided with a first contact 34 having a rectangular cross section with its left end extending downward. The second extending portion 33 is formed with a first insertion portion 35 extending downward from a substantially central portion. A pair of first elastic arm portions 36 a and second elastic arm portions 36 b extend downward and parallel to the lower end portion of the first insertion portion 35. The first elastic arm portion 36a and the second elastic arm portion 36b are formed with different lengths (FIG. 5). Then, a pressing protrusion 37 and an engaging protrusion 38 that protrude in opposite directions are formed at the lower ends of the first and second elastic arm portions 36a and 36b, respectively. In addition, each part of the 1st plunger 30 is integrally molded.
　第２プランジャ４０は、図４Ｂに示すように、第２端子４１と、端子４１の上端から上方に（プローブピン１５の長手方向に）延びる第２挿入部４２とを有する。端子４１の下端部は、第２接点４６として機能する。第２挿入部４２は、その上部に係合孔４３と、前記係合孔４３の下部に平面部４４とを有する。係合孔４３の大きさ、形状、位置は、第１プランジャ３０の係合用突起３８が係合するように設計されている。また、平面部４４の板厚は、第１プランジャ３０の圧接用突起３７が圧接するように設計されている。そして、端子４１と第２挿入部４２との境界に位置する両側端面から、すなわち、その巾方向の両側から外側に向けて一対のばね保持部４５がそれぞれ突出している。なお、第２プランジャ４０の各部分は一体成形されている。 As shown in FIG. 4B, the second plunger 40 has a second terminal 41 and a second insertion portion 42 extending upward (in the longitudinal direction of the probe pin 15) from the upper end of the terminal 41. The lower end portion of the terminal 41 functions as the second contact 46. The second insertion part 42 has an engagement hole 43 in the upper part and a flat part 44 in the lower part of the engagement hole 43. The size, shape, and position of the engagement hole 43 are designed such that the engagement protrusion 38 of the first plunger 30 is engaged. The plate thickness of the flat portion 44 is designed so that the pressing protrusion 37 of the first plunger 30 is in pressure contact. A pair of spring holding portions 45 protrude from both side end surfaces located at the boundary between the terminal 41 and the second insertion portion 42, that is, from both sides in the width direction to the outside. In addition, each part of the 2nd plunger 40 is integrally molded.
　コイルばね５０は、図４Ｂに示すように、弾性を有する金属線材を螺旋状に巻いて形成されている。 The coil spring 50 is formed by spirally winding a metal wire having elasticity, as shown in FIG. 4B.
　第１，第２プランジャ３０，４０は、各々導電性を有しており、例えば、それぞれ一枚の板材から打ち抜いて形成してもよく、あるいは、導電性の金属板を電気鋳造で形成してもよい。また、第１，第２プランジャ３０，４０は、必要に応じ、非導電性材料の表面に金属をめっき、あるいは、コーティング等の表面処理を行い、形成してもよい。 Each of the first and second plungers 30 and 40 has conductivity. For example, each of the first and second plungers 30 and 40 may be formed by punching from one plate material, or may be formed by electroforming a conductive metal plate. Also good. Further, the first and second plungers 30 and 40 may be formed by performing a surface treatment such as plating or coating of a metal on the surface of the non-conductive material, if necessary.
　次にプローブピン１５の組み立て方法を、図４Ａないし図７を用いて説明する。 Next, a method for assembling the probe pin 15 will be described with reference to FIGS. 4A to 7.
　まず、図４Ｂに示すように、第１プランジャ３０の第１挿入部３５をコイルばね５０の軸心Ｐ(プローブピン１５の長手方向)に沿って組み込む。そして、第２延在部３３がコイルばね５０の一端に当接するまでコイルばね５０の内部に第１挿入部３５を挿入する。 First, as shown in FIG. 4B, the first insertion portion 35 of the first plunger 30 is assembled along the axial center P of the coil spring 50 (longitudinal direction of the probe pin 15). Then, the first insertion portion 35 is inserted into the coil spring 50 until the second extending portion 33 contacts one end of the coil spring 50.
　そして、コイルばね５０の他端から軸心Ｐに沿って第２プランジャ４０の第２挿入部４２を挿入する。この際、上方から見て、第１，第２プランジャ４０の主面が直交するように向きを調整して挿入する。これにより、図６に示すように、コイルばね５０の内部で第１プランジャ３０の第１弾性腕部３６ａと第２弾性腕部３６ｂとの間に、第２プランジャ４０の第２挿入部４２が圧入される。 Then, the second insertion portion 42 of the second plunger 40 is inserted along the axis P from the other end of the coil spring 50. At this time, when viewed from above, the orientation is adjusted so that the main surfaces of the first and second plungers 40 are orthogonal to each other. Accordingly, as shown in FIG. 6, the second insertion portion 42 of the second plunger 40 is disposed between the first elastic arm portion 36 a and the second elastic arm portion 36 b of the first plunger 30 inside the coil spring 50. Press fit.
　この状態で、第２弾性腕部３６ｂの係合用突起３８が第２プランジャ４０の係合孔４３に係合する。そして、第１弾性腕部３６ａの圧接用突起３７が第２プランジャ４０の平面部４４に圧接して、係合状態を維持する。これにより、第１，第２プランジャ３０，４０は一体となって軸心Ｐに沿って移動できる。また、第１弾性腕部３６ａの圧接用突起３７の接触状態が維持され、第１，第２プランジャ３０，４０間に安定した電気的接続状態を維持できる。 In this state, the engagement protrusion 38 of the second elastic arm portion 36b engages with the engagement hole 43 of the second plunger 40. Then, the pressing protrusion 37 of the first elastic arm portion 36a is pressed against the flat portion 44 of the second plunger 40 to maintain the engaged state. Thereby, the 1st, 2nd plungers 30 and 40 can move along the axial center P integrally. Moreover, the contact state of the pressure contact projection 37 of the first elastic arm portion 36a is maintained, and a stable electrical connection state can be maintained between the first and second plungers 30 and 40.
　また、図４Ａに示すように、コイルばね５０は、圧縮された状態で第２延在部３３とばね保持部４５との間で保持される。さらに、第１プランジャ３０の第１接点３４と、第２プランジャ４０の第２接点４６とが同一方向（例えば、図４Ａでは、プローブピン１５の長手方向の下向き）に面している。 4A, the coil spring 50 is held between the second extending portion 33 and the spring holding portion 45 in a compressed state. Furthermore, the first contact 34 of the first plunger 30 and the second contact 46 of the second plunger 40 face the same direction (for example, downward in the longitudinal direction of the probe pin 15 in FIG. 4A).
　次に、検査治具１０の製造方法について図１ないし３および図１１を用いて説明する。 Next, a method for manufacturing the inspection jig 10 will be described with reference to FIGS. 1 to 3 and FIG.
　まず、図２に示すように、上述のように組み付け作られたプローブピン１５をハウジング２０に組み込む。例えば、図３に示すように、ベース２１の貫通孔２２に第２プランジャ４０の第２接点４６を挿入する。そして、ベース２１の上面に第２延在部３３が当接するまで挿入する。このとき、コイルばね５０も一緒に貫通孔２２内部に収納される。なお、図２に示すように、ベース２１の厚みは、第２プランジャ４０の端子４１がベース２１の下面から突出するように設計されている。 First, as shown in FIG. 2, the probe pin 15 assembled as described above is assembled into the housing 20. For example, as shown in FIG. 3, the second contact 46 of the second plunger 40 is inserted into the through hole 22 of the base 21. And it inserts until the 2nd extension part 33 contact | abuts on the upper surface of the base 21. FIG. At this time, the coil spring 50 is also housed in the through hole 22 together. As shown in FIG. 2, the thickness of the base 21 is designed so that the terminal 41 of the second plunger 40 protrudes from the lower surface of the base 21.
　次に、前記ベース２１にカバー２５を重ね合わせ、スロット２６に第１プランジャ３０のプランジャ本体３１を挿入し、２本のプローブピン１５を上下動可能に支持する。 Next, the cover 25 is overlaid on the base 21, and the plunger body 31 of the first plunger 30 is inserted into the slot 26 to support the two probe pins 15 so as to be movable up and down.
　ベース２１の貫通孔２２の内部には、コイルばね５０が嵌め込まれている。そして、コイルばね５０の直径は、カバー２５のスロット２６の巾寸法Ｄ１の長さより大きい。このため、コイルばね５０は、抜け止め突起の一例としてカバー２５の下面２５ａに接触し、コイルばね５０を抜け止めできる。この結果、図１１に示すように、第２プランジャ４０が上下に移動すると、第２プランジャ４０のばね保持部４５によってコイルばね５０は弾性変形する。 A coil spring 50 is fitted in the through hole 22 of the base 21. The diameter of the coil spring 50 is larger than the length D1 of the slot 26 of the cover 25. For this reason, the coil spring 50 can come into contact with the lower surface 25a of the cover 25 as an example of a retaining protrusion, and the coil spring 50 can be prevented from coming off. As a result, as shown in FIG. 11, when the second plunger 40 moves up and down, the coil spring 50 is elastically deformed by the spring holding portion 45 of the second plunger 40.
　さらに、図２に示すように、第１プランジャ３０の第２延在部３３の長さは、ベース２１の貫通孔２２の直径より大きい。このため、第２延在部３３はベース２１の上面に当接し、ストッパとして機能し、貫通孔２２から抜け落ちることはない。 Furthermore, as shown in FIG. 2, the length of the second extending portion 33 of the first plunger 30 is larger than the diameter of the through hole 22 of the base 21. For this reason, the 2nd extension part 33 contact | abuts on the upper surface of the base 21, functions as a stopper, and does not fall out from the through-hole 22.
　次に、検査治具１０の使用方法について、図８ないし図１５を用いて説明する。 Next, a method for using the inspection jig 10 will be described with reference to FIGS.
　まず、図８および図９に示すように、検査装置の一例としての電源用基板６０の表面から露出し、かつ、外部回路に接続した検査用第２端子６１の直上に、検査治具１０に組み付けた第２プランジャ４０の第２接点４６を位置決めする。 First, as shown in FIGS. 8 and 9, the inspection jig 10 is exposed on the surface of the power supply substrate 60 as an example of the inspection apparatus and directly above the inspection second terminal 61 connected to the external circuit. The second contact 46 of the assembled second plunger 40 is positioned.
　次に、図１０および図１１に示すように、検査治具１０を下降し、第２接点４６を検査用第２端子６１に接触させる。さらに、検査治具１０を下降させると、コイルばね５０が弾性圧縮され、プローブピン１５が上方に押し上げられる。そして、第２延在部３３がカバー２５の上面直前まで押し上げられ、停止する。 Next, as shown in FIGS. 10 and 11, the inspection jig 10 is lowered and the second contact 46 is brought into contact with the second terminal 61 for inspection. When the inspection jig 10 is further lowered, the coil spring 50 is elastically compressed and the probe pin 15 is pushed upward. Then, the second extending portion 33 is pushed up to just before the upper surface of the cover 25 and stops.
　このように、第２プランジャ４０の第２接点４６と、検査用第２端子６１とが圧接し、プローブピン１５と電源用基板６０とが電気的に接続する。特に、コイルばね５０が弾性圧縮されるので、第２プランジャ４０に下方への付勢力が働いている。このため、第２プランジャ４０の第２接点４６と検査用第２端子６１との接触圧を確保できる。また、プローブピン１５が押し上げられることにより、第１プランジャ３０の第１接点３４とカバー２５の上面との間に、後述するＩＣチップ７０を被検査物の一例として設置するためのスペースを確保できる。 Thus, the second contact 46 of the second plunger 40 and the inspection second terminal 61 are in pressure contact, and the probe pin 15 and the power supply substrate 60 are electrically connected. In particular, since the coil spring 50 is elastically compressed, a downward biasing force is applied to the second plunger 40. For this reason, the contact pressure between the second contact 46 of the second plunger 40 and the second terminal 61 for inspection can be secured. Further, by pushing up the probe pin 15, a space can be secured between the first contact 34 of the first plunger 30 and the upper surface of the cover 25 for installing an IC chip 70 described later as an example of an inspection object. .
　次に、図１２および図１３に示すように、検査治具１０に、例えば、図示しない搬送機のアーム尖端に真空吸着したＩＣチップ７０を搬送する。そして、第１プランジャ３０のプランジャ本体３１にＩＣチップ７０を押し当て、位置決めする。このとき、第１プランジャ３０の第１接点３４の直下にＩＣチップ７０の被検査部の一例としての検査用第１端子７１が位置決めされる。 Next, as shown in FIGS. 12 and 13, for example, the IC chip 70 vacuum-adsorbed to the tip of an arm of a transfer machine (not shown) is transferred to the inspection jig 10. Then, the IC chip 70 is pressed against the plunger main body 31 of the first plunger 30 for positioning. At this time, the inspection first terminal 71 as an example of the part to be inspected of the IC chip 70 is positioned immediately below the first contact 34 of the first plunger 30.
　なお、ＩＣチップ７０は、図示しない内部回路を有し、この内部回路の両端に検査用第１端子７１が接続されている。そして、検査用第１端子７１は、ＩＣチップ７０の上面から他の導電部材に電気接続できるように露出している。 The IC chip 70 has an internal circuit (not shown), and first inspection terminals 71 are connected to both ends of the internal circuit. The inspection first terminal 71 is exposed from the upper surface of the IC chip 70 so as to be electrically connected to another conductive member.
　次に、図１４および図１５に示すように、検査治具１０を、上昇させる。このとき、図１５に示すように、コイルばね５０の復帰力によってプローブピン１５が下方に付勢されている。そして、第１プランジャ３０の第１接点３４とＩＣチップ７０の検査用第１端子７１とが圧接し、検査治具１０が停止する。 Next, as shown in FIGS. 14 and 15, the inspection jig 10 is raised. At this time, as shown in FIG. 15, the probe pin 15 is urged downward by the restoring force of the coil spring 50. And the 1st contact 34 of the 1st plunger 30 and the 1st terminal 71 for inspection of IC chip 70 press-contact, and inspection jig 10 stops.
　このとき、電源用基板６０の検査用第２端子６１と第２プランジャ４０の第２接点４６とが所定の接触圧を確保している。このため、電源用基板６０の検査用第２端子６１とＩＣチップ７０の検査用第１端子７１とが電気的に接続され、ＩＣチップ７０に電流が流れる。その結果、ＩＣチップ７０の内部回路が正常に導通するか否かを検査でき、ＩＣチップ７０が不良品か否かを判別できる。
　よって、本発明の第１実施形態によれば、プローブピン１５の第１，第２接点３４，４６が、同一方向に向いている。このため、例えば、被検査物の一例としてのＩＣチップ７０の上方に検査治具を設置できるスペースが十分に無くとも、第１接点３４および第２接点４６が、プローブピン１５の長手方向の下向きに向いて接触可能なようにプローブピン１５を配置すれば、ＩＣチップ７０の検査用第１端子７１と検査装置の一例である電源用基板６０の検査用第２端子６１とにそれぞれ同時に接触できるプローブピン１５が得られる。 At this time, the inspection second terminal 61 of the power supply substrate 60 and the second contact 46 of the second plunger 40 ensure a predetermined contact pressure. Therefore, the inspection second terminal 61 of the power supply substrate 60 and the inspection first terminal 71 of the IC chip 70 are electrically connected, and a current flows through the IC chip 70. As a result, whether or not the internal circuit of the IC chip 70 is normally conducted can be inspected, and it can be determined whether or not the IC chip 70 is defective.
Therefore, according to the first embodiment of the present invention, the first and second contacts 34 and 46 of the probe pin 15 are oriented in the same direction. For this reason, for example, the first contact 34 and the second contact 46 are directed downward in the longitudinal direction of the probe pin 15 even if there is not enough space to install the inspection jig above the IC chip 70 as an example of the inspection object. If the probe pins 15 are arranged so as to be able to contact each other, the first terminal 71 for inspection of the IC chip 70 and the second terminal 61 for inspection of the power supply substrate 60 which is an example of the inspection device can be contacted simultaneously. The probe pin 15 is obtained.
［第２実施形態］
　図１６は、本発明の第２実施形態に係るプローブピン１５を示している。前記第１実施形態と相違する点は、第１接点３４の接点面に略Ｖ字状の切り欠き部３４ａを設けて、切り欠き部３４ａを挟んで２本の接点突起３４ｇ，３４ｇを形成している点である。切り欠き部３４ａは、プローブピン１５の長手方向に対して上向きにへこむように略Ｖ字状の切り欠きが形成されている。なお、以下の実施形態において、前記第１実施形態と同一の部分には、同一の参照符号を付して、詳細な説明を省略する。 [Second Embodiment]
FIG. 16 shows a probe pin 15 according to the second embodiment of the present invention. The difference from the first embodiment is that a substantially V-shaped notch 34a is provided on the contact surface of the first contact 34, and two contact protrusions 34g and 34g are formed with the notch 34a interposed therebetween. It is a point. The notch 34 a is formed with a substantially V-shaped notch so as to be recessed upward with respect to the longitudinal direction of the probe pin 15. In the following embodiments, the same parts as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
　これにより、第１接点３４の２本の接点突起３４ｇ，３４ｇが、被検査物の１つの検査用第１端子７１に複数個所で接触可能となり、接触信頼性が向上する。 Thereby, the two contact protrusions 34g, 34g of the first contact 34 can be brought into contact with one inspection first terminal 71 of the object to be inspected at a plurality of locations, and the contact reliability is improved.
［第３実施形態］
　図１７は、本発明の第３実施形態に係るプローブピン１５を示している。第３実施形態では、第１接点３４に、プローブピン１５の略長手方向沿いに延びた一対の弾性爪部３４ｂ、３４ｂを設けてある。弾性爪部３４ｂは、その先端が内側に湾曲した形状をしている。 [Third Embodiment]
FIG. 17 shows a probe pin 15 according to a third embodiment of the present invention. In the third embodiment, the first contact 34 is provided with a pair of elastic claws 34b, 34b extending along the substantially longitudinal direction of the probe pin 15. The elastic claw 34b has a shape whose tip is curved inward.
　これにより、一対の弾性爪部３４ｂが被検査物の検査用第１端子７１に圧接する際に、弾性爪部３４ｂの先端が歪んでワイピング作用を行う。このため、検査用第１端子７１の汚れ等を原因とする接触不良を防止できる。 Thus, when the pair of elastic claws 34b are in pressure contact with the inspection first terminals 71 of the object to be inspected, the tips of the elastic claws 34b are distorted to perform a wiping action. For this reason, it is possible to prevent contact failure caused by contamination of the first terminal 71 for inspection.
［第４実施形態］
　図１８は、本発明の第４実施形態に係るプローブピン１５を示している。第４実施形態では、第１接点３４が、プローブピン１５の長手方向の下向きに突出している円弧状の弾性片３４ｃを有している。 [Fourth Embodiment]
FIG. 18 shows a probe pin 15 according to the fourth embodiment of the present invention. In the fourth embodiment, the first contact 34 has an arc-shaped elastic piece 34 c that protrudes downward in the longitudinal direction of the probe pin 15.
　円弧状の弾性片３４ｃが弾性変形することにより、被検査物の検査用第１端子７１に過大な接触圧が加わらず、被検査物を傷つけにくい。また、弾性片３４ｃの自由端部がプランジャ本体３１の第１延在部３２に短絡するので、接触抵抗の小さいプローブピン１５が得られる。 When the arc-shaped elastic piece 34c is elastically deformed, an excessive contact pressure is not applied to the inspection first terminal 71 of the inspection object, and the inspection object is hardly damaged. Further, since the free end portion of the elastic piece 34c is short-circuited to the first extending portion 32 of the plunger main body 31, the probe pin 15 having a small contact resistance is obtained.
［第５実施形態］
　図１９は、本発明の第５実施形態に係るプローブピン１５を示している。第５実施形態では、第１プランジャ３０のプランジャ本体３１が略Ｕ字形である。すなわち、第１延在部３２と第２延在部３３とを両端で連結する基幹部３９Ｂが、プローブピン１５の長手方向と直交する方向に向けて突き出るように湾曲している。 [Fifth Embodiment]
FIG. 19 shows a probe pin 15 according to a fifth embodiment of the present invention. In the fifth embodiment, the plunger body 31 of the first plunger 30 is substantially U-shaped. That is, the trunk portion 39 </ b> B that connects the first extension portion 32 and the second extension portion 33 at both ends is curved so as to protrude in a direction perpendicular to the longitudinal direction of the probe pin 15.
　これにより、プランジャ本体３１が弾性変形しやすく、被検査物を傷つけにくい。また、プランジャ本体３１に応力集中が生じにくいので、疲労破壊が生じにくく、寿命の長いプローブピン１５が得られる。 Thereby, the plunger body 31 is easily elastically deformed, and the object to be inspected is hardly damaged. In addition, since stress concentration is unlikely to occur in the plunger main body 31, fatigue failure is unlikely to occur, and the probe pin 15 having a long life can be obtained.
［第６実施形態］
　図２０は、本発明の第６実施形態に係るプローブピン１５を示している。第６実施形態では、第１プランジャ３０のプランジャ本体３１が蛇腹状の基幹部３９Ａを有している。 [Sixth Embodiment]
FIG. 20 shows a probe pin 15 according to a sixth embodiment of the present invention. In the sixth embodiment, the plunger main body 31 of the first plunger 30 has a bellows-shaped basic portion 39A.
　これにより、第１プランジャ３０の支点間距離が長いので、弾性変形しやすく、被検査物を傷つけにくい。また、応力集中が生じにくいので、疲労破壊が生じにくく、寿命の長いプローブピン１５が得られる。 Thereby, since the distance between the fulcrums of the first plunger 30 is long, it is easily elastically deformed and hardly injures the object to be inspected. Further, since stress concentration is less likely to occur, fatigue failure is less likely to occur, and the probe pin 15 having a long life can be obtained.
［第７実施形態］
　図２１は、本発明の第７実施形態に係るプローブピン１５を示している。第７実施形態では、プランジャ部１６が略Ｌ字形を有する。そして、第１プランジャ３０は、第１延在部３２と基幹部３９とを備えたプランジャ本体３１と、基幹部３９と同一直線上に延びる第１挿入部３５と、を有する。また、プランジャ本体３１と第１挿入部３５との境界に位置する両側端面から、一対のばね保持部３１ａ，３１ａが外側に向けてそれぞれ突出している。一対のばね保持部３１ａ，３１ａは、その両端の巾寸法が、ベース２１に設けた貫通孔２２の直径より小さい。 [Seventh Embodiment]
FIG. 21 shows a probe pin 15 according to a seventh embodiment of the present invention. In the seventh embodiment, the plunger portion 16 has a substantially L shape. The first plunger 30 includes a plunger main body 31 including a first extending portion 32 and a backbone portion 39, and a first insertion portion 35 that extends on the same straight line as the backbone portion 39. In addition, a pair of spring holding portions 31a and 31a project outward from both side end surfaces located at the boundary between the plunger main body 31 and the first insertion portion 35, respectively. The pair of spring holding portions 31 a and 31 a has a width dimension at both ends smaller than the diameter of the through hole 22 provided in the base 21.
　これにより、ばね保持部３１ａは貫通孔２２内に挿通できる。そして、第１延在部３２はスロット２６内に収納できる。 Thereby, the spring holding portion 31 a can be inserted into the through hole 22. The first extending portion 32 can be stored in the slot 26.
［第８実施形態］
　図２２は、本発明の第８実施形態に係るプローブピン１５を示している。第８実施形態は、前述の実施形態のように別体の第１、第２プランジャ３０，４０を互いに係合して一体化するものではなく、プランジャ部１６全体を単一素材から一体成形して単一部品で構成されている。なお、別体のプランジャ部１６をコイルばね５０に組み付けた後に半田付け等で接続して一体化して単一部品として構成するようにしてもよい。 [Eighth Embodiment]
FIG. 22 shows a probe pin 15 according to the eighth embodiment of the present invention. In the eighth embodiment, separate first and second plungers 30 and 40 are not engaged and integrated as in the above-described embodiment, but the entire plunger portion 16 is integrally formed from a single material. It consists of a single part. The separate plunger portion 16 may be assembled to the coil spring 50 and then connected and integrated by soldering or the like to form a single component.
　これにより、部品点数が少なくなり、部品の管理が容易になる。また、１つの構成物品にコイルばね５０を圧入するだけでプローブピン１５を生産できる。このため、組立工数が少なくなるとともに、寸法精度の高いプローブピン１５が得られる。さらに、プランジャ部１６を一回のプレス作業あるいは電気鋳造作業で生産できるので、生産性が高い。 This reduces the number of parts and facilitates management of parts. Further, the probe pin 15 can be produced simply by press-fitting the coil spring 50 into one component. For this reason, the number of assembling steps is reduced, and the probe pin 15 with high dimensional accuracy is obtained. Furthermore, since the plunger portion 16 can be produced by a single press operation or electroforming operation, the productivity is high.
　以上のように本発明の種々の実施形態に係るプローブピン１５を具体的に説明したが、本発明は上記種々の実施形態に限定されるものではなく、要旨を逸脱しない範囲で種々変更して実施することが可能である。例えば、次のように変形して実施することができ、これらの実施形態も本発明の技術的範囲に属する。 As described above, the probe pins 15 according to various embodiments of the present invention have been specifically described. However, the present invention is not limited to the above-described various embodiments, and various modifications can be made without departing from the spirit of the present invention. It is possible to implement. For example, the present invention can be modified as follows, and these embodiments also belong to the technical scope of the present invention.
　鉤型形状のプランジャ本体を有するプランジャ部１６としては、プランジャ部１６がＬ字形状を有し、第１延在部３２が基幹部３９から前記コイルばね５０の軸心Ｐに直交する方向に延びるものであってもよい。
　また、プランジャ部１６はＪ字形状を有し、第１延在部３２が、基幹部３９から第１接点３４に向かって湾曲した形状を有していてもよい。 As the plunger portion 16 having the hook-shaped plunger body, the plunger portion 16 has an L shape, and the first extending portion 32 extends from the trunk portion 39 in a direction perpendicular to the axis P of the coil spring 50. It may be a thing.
The plunger portion 16 may have a J shape, and the first extending portion 32 may have a shape curved from the trunk portion 39 toward the first contact 34.
　第１接点３４は半円形であってもよい。これにより、片当たりを防止でき、接触信頼性が高まる。 The first contact 34 may be semicircular. Thereby, contact | abutting can be prevented and contact reliability increases.
　また、第１プランジャ３０の弾性腕部３６の圧接用突起３７，係合用突起３８の形状、大きさは適宜選択できる。 Further, the shape and size of the pressing protrusion 37 and the engaging protrusion 38 of the elastic arm portion 36 of the first plunger 30 can be selected as appropriate.
　第１プランジャ３０の第１延在部３２は、被検査物の検査用第１端子７１の位置に応じて種々の長さに変更してもよい。 The first extending portion 32 of the first plunger 30 may be changed to various lengths according to the position of the first terminal 71 for inspection of the inspection object.
　そして、第２プランジャ４０の第２接点４６の形状は、検査用第２端子６１の形状に合わせて種々変形できる。例えば、第２接点４６は尖っていてもよい。 The shape of the second contact 46 of the second plunger 40 can be variously modified in accordance with the shape of the second terminal 61 for inspection. For example, the second contact 46 may be sharp.
　さらに、第２プランジャ４０の係合孔４３は、第１プランジャ３０の弾性腕部３６と係合したときにスライド移動してもよく、貫通していなくてもよい。 Furthermore, the engagement hole 43 of the second plunger 40 may slide when engaged with the elastic arm portion 36 of the first plunger 30, or may not penetrate.
　また、検査治具１０のハウジング２０に多数の孔を設けておき、多数本のプローブピン１５を組み込めるようにしてもよい。 Alternatively, a large number of holes may be provided in the housing 20 of the inspection jig 10 so that a large number of probe pins 15 can be incorporated.
　そして、ベース２１とカバー２５とは、着脱可能な構造を有していてもよい。これにより、プローブピンが１本だけ壊れた場合にベース２１からカバー２５を取り外し、破損したプローブピンを交換できる。 The base 21 and the cover 25 may have a detachable structure. Thereby, when only one probe pin is broken, the cover 25 can be removed from the base 21 and the damaged probe pin can be replaced.
　さらに、検査治具１０が固定されており、電源用基板６０が上下左右自由に移動して、検査できるようにしてもよい。 Furthermore, the inspection jig 10 may be fixed so that the power supply substrate 60 can freely move up, down, left, and right for inspection.
　また、被検査物は、ＩＣチップ７０以外、例えば、ＣＰＵチップ等の電子部品であってもよい。 Further, the inspection object may be an electronic component other than the IC chip 70, for example, a CPU chip.
　以上、図面を参照して本発明における種々の実施形態を詳細に説明したが、最後に、本発明の種々の態様について説明する。
　本発明の第１態様に係るプローブピンは、前記課題を解決すべく、
　導電性を有するプランジャ部と、
　前記プランジャ部の周囲に巻回するように配置されたコイルばねと、を有するプローブピンであって、
　前記プランジャ部は、
　　前記コイルばねに挿入された挿入部と、
　　先端部に第１接点を設け、かつ、前記挿入部の一端に連結されて前記コイルばねの一端から突出する鉤型形状のプランジャ本体と、
　　先端部に第２接点を設け、かつ、前記挿入部の他端に連結されて前記コイルばねの他端から突出する端子と、を有し、
　前記第１接点と前記第２接点とが同一方向に向けられている構成としてある。 As mentioned above, although various embodiment in this invention was described in detail with reference to drawings, finally the various aspect of this invention is demonstrated.
The probe pin according to the first aspect of the present invention is to solve the above problem,
A plunger portion having conductivity;
A coil spring arranged so as to be wound around the plunger part,
The plunger part is
An insertion portion inserted into the coil spring;
A hook-shaped plunger body that is provided with a first contact at the tip and is connected to one end of the insertion portion and protrudes from one end of the coil spring;
A second contact at the tip, and a terminal connected to the other end of the insertion portion and protruding from the other end of the coil spring;
The first contact and the second contact are directed in the same direction.
　本発明の前記態様によれば、プローブピンの第１，第２接点が、同一方向に向いている。このため、例えば、被検査物の上方に検査治具を設置できるスペースが十分に無くとも、第１接点および第２接点が、プローブピンの長手方向の下向きに向いて接触可能なようにプローブピンを配置すれば、被検査物の端子と検査装置の端子とにそれぞれ同時に接触できるプローブピンが得られる。 According to the above aspect of the present invention, the first and second contacts of the probe pin are oriented in the same direction. For this reason, for example, even if there is not enough space for placing an inspection jig above the object to be inspected, the probe pin can be contacted so that the first contact and the second contact can face downward in the longitudinal direction of the probe pin. If this is arranged, a probe pin that can simultaneously contact the terminal of the object to be inspected and the terminal of the inspection apparatus can be obtained.
　本発明の第２態様としては、第１態様において、前記プランジャ本体は、前記コイルばねの軸心に直交する方向に延在し、かつ、前記第１接点を備えた第１延在部を、有していてもよい。
　第２態様によれば、被検査物の検査に、第１延在部以上の高さを必要としないので、被検査物の上方に大きな設置スペースを必要としない。 As a second aspect of the present invention, in the first aspect, the plunger main body extends in a direction orthogonal to the axis of the coil spring, and the first extending portion including the first contact is provided. You may have.
According to the second aspect, the inspection object is not inspected with a height higher than the first extending portion, so that a large installation space is not required above the inspection object.
　本発明の第３態様としては、第２態様において、前記プランジャ本体が、前記第１延在部と平行に延在する第２延在部を、有していてもよい。
　第３態様によれば、第２延在部はストッパとして機能し、第２延在部よりも上方にコイルばねが移動できないので、組立工程における取り扱いが容易である。 As a third aspect of the present invention, in the second aspect, the plunger main body may have a second extension portion extending in parallel with the first extension portion.
According to the third aspect, the second extending portion functions as a stopper, and the coil spring cannot move above the second extending portion, so that handling in the assembly process is easy.
　本発明の第４態様としては、第３態様において、前記プランジャ本体が、互いに平行に延在した前記第１延在部と前記第２延在部と、前記第１延在部と前記第２延在部とを連結しかつ前記コイルばねの前記軸心沿いに延びた基幹部とを有するコ字形状を有していてもよい。
　第４態様によれば、被検査物をコ字形状のプランジャ本体に押し当てることにより、被検査物を位置決めでき、検査精度が高い。 As a fourth aspect of the present invention, in the third aspect, the plunger body includes the first extension part, the second extension part, the first extension part, and the second extension part extending in parallel with each other. You may have a U-shape which has a trunk part which connects an extension part and extends along the axis of the coil spring.
According to the fourth aspect, the inspection object can be positioned by pressing the inspection object against the U-shaped plunger body, and the inspection accuracy is high.
　本発明の第５態様としては、第３態様において、前記プランジャ本体が、互いに平行に延在した前記第１延在部と前記第２延在部と、前記第１延在部と前記第２延在部とを連結しかつ前記コイルばねの前記軸心沿いに配置された蛇腹状の基幹部とを有するコ字形状を有していてもよい。また、本発明の第６態様としては、第３態様において、前記プランジャ本体が、互いに平行に延在した前記第１延在部と前記第２延在部と、前記第１延在部と前記第２延在部とを連結し円弧状に湾曲した基幹部とを有することにより、Ｕ字形状を有していてもよい。
　第５及び第６態様によれば、プランジャ本体の支点間距離が長く、弾性変形しやすので、被検査物を傷つけにくい。また、第５及び第６態様によれば、応力集中が生じにくく、疲労破壊が生じにくいので、プローブピンの寿命が長い。 As a fifth aspect of the present invention, in the third aspect, the plunger body includes the first extension part, the second extension part, the first extension part, and the second extension part extending in parallel with each other. You may have a U shape which has an accordion-like trunk part which connects an extension part and is arranged along the axis of the coil spring. Further, as a sixth aspect of the present invention, in the third aspect, the plunger body includes the first extension part, the second extension part, the first extension part, and the It may have a U-shape by connecting the second extending portion and having a trunk portion curved in an arc shape.
According to the fifth and sixth aspects, since the distance between the fulcrums of the plunger main body is long and is easily elastically deformed, the object to be inspected is hardly damaged. Further, according to the fifth and sixth aspects, stress concentration is less likely to occur and fatigue failure is less likely to occur, so that the probe pin has a long life.
　本発明の第７態様としては、第３ないし６のいずれか１つの態様において、前記挿入部は、前記挿入部の前記他端に配置されかつ前記挿入部の両側端面から側方に突出するばね保持部を有し、前記ばね保持部と前記第２延在部との間に、前記コイルばねを保持してもよい。
　第７態様によれば、コイルばねがプローブピンから脱落することがなく、組立工程における取り扱いが容易である。 As a seventh aspect of the present invention, in any one of the third to sixth aspects, the insertion portion is disposed at the other end of the insertion portion and protrudes laterally from both end surfaces of the insertion portion. A holding portion may be provided, and the coil spring may be held between the spring holding portion and the second extending portion.
According to the seventh aspect, the coil spring does not fall off from the probe pin, and handling in the assembly process is easy.
　本発明の第８態様としては、第１ないし７のいずれか１つの態様において、前記プランジャ部が、
　　前記コイルばねの一端側の部分に挿入される第１挿入部と、前記プランジャ本体とを有する第１プランジャと、
　　前記コイルばねの他端側の部分に挿入されかつ前記第１挿入部と係合可能な第２挿入部と、前記端子とを有する第２プランジャとで構成され、
　前記第１挿入部と前記第２挿入部とで前記挿入部を構成し、前記コイルばねの内部で前記第１挿入部と前記第２挿入部とが係合して一体化してもよい。
　第８態様によれば、コイルばねの両端から、プランジャ本体と端子とをそれぞれ組み付けることができるので、プローブピンの組立性が向上する。 As an eighth aspect of the present invention, in any one of the first to seventh aspects, the plunger portion is
A first plunger having a first insertion portion inserted into a portion on one end side of the coil spring, and the plunger body;
A second plunger having a second insertion portion inserted into the other end portion of the coil spring and engageable with the first insertion portion, and the terminal;
The first insertion portion and the second insertion portion may constitute the insertion portion, and the first insertion portion and the second insertion portion may be engaged and integrated within the coil spring.
According to the 8th aspect, since a plunger main body and a terminal can each be assembled | attached from the both ends of a coil spring, the assembly property of a probe pin improves.
　本発明の第９態様としては、第１ないし７のいずれか１つの態様において、前記プランジャ部が、前記プランジャ本体と前記端子とを一体成形して単一部品で構成されてもよい。
　第９態様によれば、部品点数が少なくなり、部品の管理が容易になる。また、１つの構成物品にコイルばねを圧入するだけでプローブピンを生産できるので、組立工数を低減できる。 As a ninth aspect of the present invention, in any one of the first to seventh aspects, the plunger portion may be formed as a single part by integrally molding the plunger body and the terminal.
According to the ninth aspect, the number of parts is reduced, and the management of the parts is facilitated. In addition, since the probe pin can be produced simply by press-fitting a coil spring into one component, the number of assembly steps can be reduced.
　本発明の第１０態様としては、第１ないし９のいずれか１つの態様において、前記第１接点が、Ｖ字形状の切り欠き部を有していてもよい。
　第１０態様によれば、被検査物の被検査部に第１接点が複数個所で接触するので、接触信頼性が高まる。 As a tenth aspect of the present invention, in any one of the first to ninth aspects, the first contact may have a V-shaped notch.
According to the 10th aspect, since the 1st contact contacts the inspection part of a to-be-inspected object in multiple places, contact reliability increases.
　本発明の第１１態様としては、第１ないし９のいずれか１つの態様において、前記第１接点を、一対の湾曲する弾性爪部で形成してもよい。
　第１１態様によれば、弾性爪部を被検査物の被検査部に圧接して検査する際に、弾性爪部の先端がたわみ、ワイピング作用を行う。このため、被検査物の被検査部の汚れを除去でき、接触信頼性が高い。 As an eleventh aspect of the present invention, in any one of the first to ninth aspects, the first contact may be formed by a pair of curved elastic claws.
According to the eleventh aspect, when the elastic claw portion is in contact with the inspection portion of the object to be inspected, the tip of the elastic claw portion bends and performs a wiping action. For this reason, the stain | pollution | contamination of the to-be-inspected part of a to-be-inspected object can be removed, and contact reliability is high.
　本発明の第１２態様としては、前記第１接点を、円弧状に湾曲した弾性片で形成してもよい。
　第１２態様によれば、第１ないし９のいずれか１つの態様において、円弧状に突出するように湾曲した弾性片が弾性変形するので、被検査物の被検査部に過度な接触圧が加わらず、被検査物を傷つけにくい。また、弾性片の自由端部がプランジャ本体の第１延在部と短絡するので、接触抵抗の小さいプローブピンが得られる。 As a twelfth aspect of the present invention, the first contact may be formed of an elastic piece curved in an arc shape.
According to the twelfth aspect, in any one of the first to ninth aspects, since the elastic piece curved so as to protrude in an arc shape is elastically deformed, an excessive contact pressure is applied to the inspected portion of the inspected object. It is difficult to damage the object to be inspected. Further, since the free end portion of the elastic piece is short-circuited with the first extending portion of the plunger body, a probe pin with a small contact resistance can be obtained.
　本発明に係る第１３態様にかかる検査治具は、前記コイルばねを挿通できる貫通孔を有するベースと、前記プランジャ部を挿通できるスロットを有するカバーと、前記ベースに前記カバーを重ねあわせたときに連通する前記貫通孔及び前記スロットに収納された第１ないし１２のいずれか１つの態様に記載の前記プローブピンと、を有している。
　本発明の第１３態様によれば、プローブピンの第１，第２接点が、同一方向に向いている。このため、被検査物の上方に検査治具を設置できるスペースが十分に無くとも、第１接点および第２接点が、被検査物の端子と検査装置の端子とにそれぞれ同時に接触できる検査治具が得られる。 An inspection jig according to a thirteenth aspect of the present invention includes a base having a through-hole through which the coil spring can be inserted, a cover having a slot through which the plunger portion can be inserted, and the cover overlaid on the base. The probe pin according to any one of the first to twelfth aspects housed in the communicating through hole and the slot.
According to the thirteenth aspect of the present invention, the first and second contacts of the probe pin are oriented in the same direction. For this reason, even if there is not enough space for installing the inspection jig above the object to be inspected, the inspection jig that allows the first contact and the second contact to simultaneously contact the terminal of the object to be inspected and the terminal of the inspection apparatus respectively. Is obtained.
　本発明の第１４態様としては、第１３態様において、前記スロットが、前記コイルばねを抜け止めする抜け止め突起を有していてもよい。
　第１４態様によれば、プローブピンが上方へ移動する際にコイルばねが弾性圧縮され、第１，第２接点の接触圧を高めるという効果がある。
　なお、前記様々な実施形態又は変形例のうちの任意の実施形態又は変形例を適宜組み合わせることにより、それぞれの有する効果を奏するようにすることができる。また、実施形態同士の組み合わせ又は実施例同士の組み合わせ又は実施形態と実施例との組み合わせが可能であると共に、異なる実施形態又は実施例の中の特徴同士の組み合わせも可能である。 As a fourteenth aspect of the present invention, in the thirteenth aspect, the slot may have a retaining protrusion for retaining the coil spring.
According to the fourteenth aspect, the coil spring is elastically compressed when the probe pin moves upward, and the contact pressure of the first and second contacts is increased.
In addition, it can be made to show the effect which each has by combining arbitrary embodiment or modification of the said various embodiment or modification suitably. In addition, combinations of the embodiments, combinations of the examples, or combinations of the embodiments and examples are possible, and combinations of features in different embodiments or examples are also possible.
　本発明にかるプローブピンは、前記実施形態に係る検査治具に限らず、本発明に係るプローブピンを有するものであれば、他の電子機器に適用してもよい。 The probe pin according to the present invention is not limited to the inspection jig according to the above embodiment, and may be applied to other electronic devices as long as it has the probe pin according to the present invention.
　　１０　検査治具
　　１５　プローブピン
　　１６　プランジャ部
　　２０　ハウジング
　　２１　ベース
　　２２　貫通孔
　　２５　カバー
　　２６　スロット
　　３０　第１プランジャ
　　３１　プランジャ本体
　　３２　第１延在部
　　３３　第２延在部
　　３４　第１接点
　　３４ａ　切り欠き部
　　３４ｂ　弾性爪部
　　３４ｃ　弾性片
　　３４ｇ　接点突起
　　３５　第１挿入部
　　３６　弾性腕部
　　３６ａ　第１弾性腕部
　　３６ｂ　第２弾性腕部
　　３７　圧接用突起
　　３８　係合用突起
　　３９，３９Ａ，３９Ｂ　基幹部
　　４０　第２プランジャ
　　４１　端子
　　４２　第２挿入部
　　４３　係合孔
　　４４　平面部
　　４５　ばね保持部
　　４６　第２接点
　　５０　コイルばね
　　６０　電源用基板
　　６１　検査用第２端子
　　７０　ＩＣチップ
　　７１　検査用第１端子
　　１００　プローブピン
　　１３０　コンタクトピン
　　１３０ａ　コンタクト部
　　１９０コイルばね
　　Ｐ　軸心
　本発明は、添付図面を参照しながら実施形態に関連して充分に記載されているが、この技術の熟練した人々にとっては種々の変形又は修正は明白である。そのような変形又は修正は、添付した請求の範囲による本発明の範囲から外れない限りにおいて、その中に含まれると理解されるべきである。 DESCRIPTION OF SYMBOLS 10 Inspection jig 15 Probe pin 16 Plunger part 20 Housing 21 Base 22 Through-hole 25 Cover 26 Slot 30 1st plunger 31 Plunger main body 32 1st extension part 33 2nd extension part 34 1st contact 34a Notch part 34b Elasticity Claw part 34c Elastic piece 34g Contact protrusion 35 First insertion part 36 Elastic arm part 36a First elastic arm part 36b Second elastic arm part 37 Pressing protrusion 38 Engaging protrusion 39, 39A, 39B Base part 40 Second plunger 41 Terminal 42 Second Insertion Part 43 Engagement Hole 44 Plane Part 45 Spring Holding Part 46 Second Contact 50 Coil Spring 60 Power Supply Board 61 Second Terminal for Inspection 70 IC Chip 71 First Terminal for Inspection 100 Probe Pin 130 Contact Pin 130a Contact Part 190 coil spring Axis present invention has been fully described in connection with the embodiments thereof with reference to the accompanying drawings, various changes and modifications are to those skilled in the art is evident. Such changes and modifications are to be understood as being included therein unless they depart from the scope of the invention as defined by the appended claims.

Claims (14)

  1. 　導電性を有するプランジャ部と、
    　前記プランジャ部の周囲に巻回するように配置されたコイルばねと、を有するプローブピンであって、
    　前記プランジャ部は、
    　　前記コイルばねに挿入された挿入部と、
    　　先端部に第１接点を設け、かつ、前記挿入部の一端に連結されて前記コイルばねの一端から突出する鉤型形状のプランジャ本体と、
    　　先端部に第２接点を設け、かつ、前記挿入部の他端に連結されて前記コイルばねの他端から突出する端子と、を有し、
    　前記第１接点と前記第２接点とが同一方向に向けられているプローブピン。     A plunger portion having conductivity;
    A coil spring arranged so as to be wound around the plunger part,
    The plunger part is
    An insertion portion inserted into the coil spring;
    A hook-shaped plunger body that is provided with a first contact at the tip and is connected to one end of the insertion portion and protrudes from one end of the coil spring;
    A second contact at the tip, and a terminal connected to the other end of the insertion portion and protruding from the other end of the coil spring;
    A probe pin in which the first contact and the second contact are oriented in the same direction.
  2. 　前記プランジャ本体が、前記コイルばねの軸心に直交する方向に延在し、かつ、前記第１接点を備えた第１延在部を、有する請求項１に記載のプローブピン。 2. The probe pin according to claim 1, wherein the plunger main body has a first extending portion that extends in a direction orthogonal to the axis of the coil spring and includes the first contact.
  3. 　前記プランジャ本体が、前記第１延在部と平行に延在する第２延在部を、有する請求項２に記載のプローブピン。 The probe pin according to claim 2, wherein the plunger main body has a second extending portion extending in parallel with the first extending portion.
  4. 　前記プランジャ本体が、互いに平行に延在した前記第１延在部と前記第２延在部と、前記第１延在部と前記第２延在部とを連結しかつ前記コイルばねの前記軸心沿いに延びた基幹部とを有するコ字形状である請求項３に記載のプローブピン。 The plunger main body connects the first extension part and the second extension part extending in parallel to each other, the first extension part and the second extension part, and the shaft of the coil spring. The probe pin according to claim 3, wherein the probe pin has a U-shape having a trunk portion extending along the center.
  5. 　前記プランジャ本体が、互いに平行に延在した前記第１延在部と前記第２延在部と、前記第１延在部と前記第２延在部とを連結しかつ前記コイルばねの前記軸心沿いに配置された蛇腹状の基幹部とを有するコ字形状である請求項３に記載のプローブピン。 The plunger main body connects the first extension part and the second extension part extending in parallel to each other, the first extension part and the second extension part, and the shaft of the coil spring. The probe pin according to claim 3, wherein the probe pin has a U-shape having a bellows-like trunk portion arranged along the center.
  6. 　前記プランジャ本体が、互いに平行に延在した前記第１延在部と前記第２延在部と、前記第１延在部と前記第２延在部とを連結し円弧状に湾曲した基幹部とを有するＵ字形状である請求項３に記載のプローブピン。 The plunger main body is connected to the first extending portion and the second extending portion, and the first extending portion and the second extending portion that extend in parallel with each other, and a basic portion that is curved in an arc shape. The probe pin according to claim 3, wherein the probe pin has a U shape.
  7. 　前記挿入部は、前記挿入部の前記他端に配置されかつ前記挿入部の両側端面から側方に突出するばね保持部を有し、前記ばね保持部と前記第２延在部との間に、前記コイルばねを保持する請求項３ないし６のいずれか１項に記載のプローブピン。 The insertion portion has a spring holding portion that is disposed at the other end of the insertion portion and protrudes laterally from both end surfaces of the insertion portion, and is interposed between the spring holding portion and the second extension portion. The probe pin according to any one of claims 3 to 6, wherein the coil spring is held.
  8. 　前記プランジャ部が、
    　　前記コイルばねの一端側の部分に挿入される第１挿入部と、前記プランジャ本体とを有する第１プランジャと、
    　　前記コイルばねの他端側の部分に挿入されかつ前記第１挿入部と係合可能な第２挿入部と、前記端子とを有する第２プランジャとで構成され、
    　前記第１挿入部と前記第２挿入部とで前記挿入部を構成し、前記コイルばねの内部で前記第１挿入部と前記第２挿入部とが係合して一体化している請求項１ないし７のいずれか１項に記載のプローブピン。     The plunger portion is
    A first plunger having a first insertion portion inserted into a portion on one end side of the coil spring, and the plunger body;
    A second plunger having a second insertion portion inserted into the other end portion of the coil spring and engageable with the first insertion portion, and the terminal;
    The said 1st insertion part and the said 2nd insertion part comprise the said insertion part, and the said 1st insertion part and the said 2nd insertion part are engaged and integrated in the inside of the said coil spring. The probe pin of any one of thru | or 7.
  9. 　前記プランジャ部が、前記プランジャ本体と前記端子とを一体成形して単一部品で構成されている請求項１ないし７のいずれか１項に記載のプローブピン。 The probe pin according to any one of claims 1 to 7, wherein the plunger portion is formed as a single part by integrally molding the plunger main body and the terminal.
  10. 　前記第１接点が、Ｖ字形状の切り欠き部を有する請求項１ないし９のいずれか１項に記載のプローブピン。 The probe pin according to any one of claims 1 to 9, wherein the first contact has a V-shaped notch.
  11. 　前記第１接点が、一対の湾曲する弾性爪部で形成されている請求項１ないし９のいずれか１項に記載のプローブピン。 The probe pin according to any one of claims 1 to 9, wherein the first contact point is formed of a pair of curved elastic claws.
  12. 　前記第１接点が、円弧状に突出するように湾曲した弾性片で形成されている請求項１ないし９のいずれか１項に記載のプローブピン。 The probe pin according to any one of claims 1 to 9, wherein the first contact point is formed of an elastic piece curved so as to protrude in an arc shape.
  13. 　前記コイルばねを挿通できる貫通孔を有するベースと、
    　前記プランジャ部を挿通できるスロットを有するカバーと、
    　前記ベースに前記カバーを重ねあわせたときに連通する前記貫通孔及び前記スロットに、収納された請求項１ないし１２のいずれか１項に記載の前記プローブピンと、を有する検査治具。     A base having a through hole through which the coil spring can be inserted;
    A cover having a slot through which the plunger portion can be inserted;
    The inspection jig having the probe pin according to any one of claims 1 to 12, which is housed in the through hole and the slot that communicate with each other when the cover is overlapped on the base.
  14. 　前記スロットが、前記コイルばねを抜け止めする抜け止め突起を有する請求項１３に記載の検査治具。 14. The inspection jig according to claim 13, wherein the slot has a retaining protrusion for retaining the coil spring.
PCT/JP2016/075113 2015-09-15 2016-08-29 Probe pin and inspection tool using same WO2017047362A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-182128 2015-09-15
JP2015182128A JP6582780B2 (en) 2015-09-15 2015-09-15 Probe pin and inspection jig using the same

Publications (1)

Publication Number Publication Date
WO2017047362A1 true WO2017047362A1 (en) 2017-03-23

Family

ID=58288974

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/075113 WO2017047362A1 (en) 2015-09-15 2016-08-29 Probe pin and inspection tool using same

Country Status (2)

Country Link
JP (1) JP6582780B2 (en)
WO (1) WO2017047362A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11387587B1 (en) 2021-03-13 2022-07-12 Plastronics Socket Partners, Ltd. Self-retained slider contact pin

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110461782A (en) 2017-03-23 2019-11-15 Ａｇｃ株式会社 Moving body glass plate and display device
KR102013175B1 (en) * 2019-06-13 2019-08-22 주식회사 제네드 Replaceable double type probe pin

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60111284U (en) * 1983-12-29 1985-07-27 三洋電機株式会社 Printed circuit board measuring device
JP2007163463A (en) * 2005-11-16 2007-06-28 Matsushita Electric Ind Co Ltd Inspection apparatus and method
JP2008047352A (en) * 2006-08-11 2008-02-28 Yamaha Corp Ic socket
US20110014823A1 (en) * 2009-07-14 2011-01-20 Hon Hai Precision Industry Co., Ltd. Electrical contact having upper contact with thickened base portion
JP2013511039A (en) * 2009-11-11 2013-03-28 ハイコン カンパニー リミテッド Spring contact and socket with built-in spring contact

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100584225B1 (en) * 2004-10-06 2006-05-29 황동원 Contact for electronic device
JP4941853B2 (en) * 2010-06-23 2012-05-30 山一電機株式会社 Contact head, probe pin provided with the same, and electrical connection device using the probe pin
WO2014167693A1 (en) * 2013-04-11 2014-10-16 ルネサスエレクトロニクス株式会社 Production method for semiconductor device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60111284U (en) * 1983-12-29 1985-07-27 三洋電機株式会社 Printed circuit board measuring device
JP2007163463A (en) * 2005-11-16 2007-06-28 Matsushita Electric Ind Co Ltd Inspection apparatus and method
JP2008047352A (en) * 2006-08-11 2008-02-28 Yamaha Corp Ic socket
US20110014823A1 (en) * 2009-07-14 2011-01-20 Hon Hai Precision Industry Co., Ltd. Electrical contact having upper contact with thickened base portion
JP2013511039A (en) * 2009-11-11 2013-03-28 ハイコン カンパニー リミテッド Spring contact and socket with built-in spring contact

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11387587B1 (en) 2021-03-13 2022-07-12 Plastronics Socket Partners, Ltd. Self-retained slider contact pin

Also Published As

Publication number Publication date
JP2017058205A (en) 2017-03-23
JP6582780B2 (en) 2019-10-02

Similar Documents

Publication Publication Date Title
CN108027391B (en) Probe pin and inspection device using the same
US10398051B2 (en) Socket having a terminal unit assembly accommodated within a recess of a frame member
US11187722B2 (en) Probe pin and electronic device using the same
JP2013529362A (en) Contact spring for plug connector socket
WO2017047362A1 (en) Probe pin and inspection tool using same
CN113892036A (en) Probe, inspection tool, and inspection unit
CN113924499A (en) Probe, inspection tool, and inspection unit
WO2017047495A1 (en) Probe pin and inspection tool including same
TW201517425A (en) Contact pin and socket for electrical part
US11280808B2 (en) IC socket
JP2017037021A (en) Inspection contact terminal and electric connection device including the same
US10622744B2 (en) Multipole connector
US11162979B2 (en) Plate spring-type connecting pin
KR102600799B1 (en) Probe pins and inspection jigs
JP2016164491A (en) Semiconductor device inspection tool
JP6567954B2 (en) Socket for electrical parts
JP2004327103A (en) Socket for electric component
JP2010192247A (en) Electric connector
JP5763447B2 (en) connector
US8449306B2 (en) Contact terminal unit and socket connector incorporated with the same
CN112421249B (en) Electric connector, power supply seat and electronic equipment
JP5911305B2 (en) Connector device
JP6987006B2 (en) Connector terminal shape of electronic control device
JP3062558U (en) Chip test connector
KR101237819B1 (en) Manufacturing method for bottom plunger of probe pin

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16846233

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16846233

Country of ref document: EP

Kind code of ref document: A1