WO2017012253A1 - 微镜阵列和应用其的背光模组及显示装置 - Google Patents
微镜阵列和应用其的背光模组及显示装置 Download PDFInfo
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- WO2017012253A1 WO2017012253A1 PCT/CN2015/097108 CN2015097108W WO2017012253A1 WO 2017012253 A1 WO2017012253 A1 WO 2017012253A1 CN 2015097108 W CN2015097108 W CN 2015097108W WO 2017012253 A1 WO2017012253 A1 WO 2017012253A1
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- driving
- driving voltage
- micromirror
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3102—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
- H04N9/312—Driving therefor
- H04N9/3126—Driving therefor for spatial light modulators in series
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0361—Tips, pillars
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/04—Electrodes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/09—Packages
- B81B2207/091—Arrangements for connecting external electrical signals to mechanical structures inside the package
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/28—Reflectors in projection beam
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
- H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
- H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
Definitions
- the present invention relates to the field of display technologies, and in particular, to a micro mirror array and a backlight module and a display device using the same.
- a micromirror array is a MEMS (Micro Electro Mechanical Systems) device whose basic principle is to change the direction or phase of the input light by rotating or translating the movable micromirror surface by a driving force (for example, electrostatic force or magnetic force).
- MEMS Micro Electro Mechanical Systems
- Micromirror arrays have been widely used in various fields such as optical switching, spectral analysis instruments, and projection imaging in optical communication.
- the application of the micromirror array in the projector is based on a front projection arrangement, which is a different application from the rear projection field of large screen and flat panel display.
- an electrostatically driven deflecting micromirror array comprising: a substrate; and a plurality of micromirror units formed on the substrate, each of the plurality of micromirror units comprising a mirror that is deflectable about a first yaw axis and a second yaw axis that is perpendicular to the first yaw axis, respectively; a frame that supports the mirror by means of a first hinge and a second hinge, the first a hinge and the second hinge define the first yaw axis; a first struts and a second struts that support the frame by a third hinge and a fourth hinge, respectively, the third hinge and the fourth hinge Defining the second yaw axis; a first electrode pair including a first drive electrode and a second drive electrode, the first drive electrode and the second drive electrode being on the substrate with respect to the first yaw axis Projection symmetry; a first electrode pair including a first drive electrode and a second
- the micromirror array may further include an insulating layer formed on the substrate and providing insulation between the mirror electrode and the first electrode pair and the second electrode pair.
- the insulating layer can reduce the interference between the electrodes.
- each of the plurality of micromirror units may further include a guard electrode disposed around the first electrode pair and the second electrode pair, the guard electrode being applied with the mirror The same drive voltage of the electrodes.
- the mirror, the first, second, third, fourth hinges and the frame may be integrally formed from aluminum.
- the mirrors can be square. Such a mirror can achieve efficient use of the gap between the micromirror units and thus increase its reflection area.
- a backlight module of a display panel includes: a light source; a micromirror array including a plurality of micromirror units, each of the plurality of micromirror units having a separately rotatable a first deflection axis and a mirror deflected perpendicular to the second deflection axis of the first deflection axis, the deflection angle of each of the mirrors is continuously and continuously controllable; and a control unit for responding Adjusting a deflection angle of each of the mirrors in the micromirror array such that the micromirror array uniformly reflects light emitted by the light source to the entire surface of the display screen depending on the backlight control signal Or converge on one or more areas of the display screen.
- the background module can control the distribution of backlight energy (intensity) to provide a backlight output having ultra-high brightness in one or more local regions.
- the micromirror array can be an electrostatically driven deflecting micromirror array as described in the first aspect of the invention.
- control unit may include: a deflection angle determining unit that is a target area to be illuminated on the display screen according to the backlight control signal, and is each mirror in the micro mirror array Determining a respective deflection angle, the deflection angle comprising a first deflection component corresponding to the first deflection axis and corresponding to the second bias a second deflection component of the rotation axis; an angle-drive voltage conversion unit that converts a respective first deflection component and a second deflection component for each mirror into a first electrode pair for driving the mirror and a driving voltage value of the second electrode pair; and a micro mirror array driver that drives the first electrode pair and the second electrode pair corresponding to each of the mirrors according to the driving voltage value converted by the angle-driving voltage converting unit The respective drive voltages are applied separately.
- the mirror in the micromirror array is mechanically deflected compared to the scheme of electrically adjusting the light intensity of the light source of the backlight module, and thus has no effect on the lifetime of the light source, resulting in the life of the backlight module Longer.
- all of the mirror electrodes in the array of micromirrors can be applied with the same reference voltage.
- the first driving electrode is applied with a first driving voltage
- the second driving electrode is applied with a driving voltage that is opposite to the first driving voltage
- the first driving voltage is proportional to the reference voltage as a function of the first deflection component
- the third driving electrode is applied with a second driving voltage
- the fourth driving electrode is applied with the first A driving voltage in which the driving voltage is inverted, the second driving voltage being proportional to the reference voltage as a function of the second deflection component.
- each of the micromirror units may have a corresponding two digital to analog converters and two corresponding voltage inverters, one of the two digital to analog converters being a first driving electrode provides the first driving voltage, another provides the second driving voltage for the third driving electrode, and one of the two voltage inverters provides a second driving electrode The driving voltage of the first driving voltage is inverted, and the other is a driving voltage for the fourth driving electrode to be inverted from the second driving voltage.
- the light source can be a parallel light source.
- parallel light sources the optical efficiency of the backlight module can be improved.
- the backlight module may further include a projection lens disposed on the reflected light path of the micro mirror array for diverging the reflected light from the micro mirror array to match the size of the display screen. Due to the divergence of light by the projection lens, the reflected light path can be shortened, resulting in a reduction in the size of the backlight module.
- the backlight module may further include a diffusing plate disposed on a back side of the display screen.
- the diffuser can improve the properties of the light that ultimately illuminates the display screen, such as providing uniform brightness.
- a display device comprising the present invention The backlight module described in the second aspect.
- FIG. 1 schematically illustrates a backlight module in accordance with an embodiment of the present invention
- FIG. 2 schematically illustrates an operational state in which a non-uniform backlight is provided using the backlight module illustrated in FIG. 1;
- FIG. 3(a) and 3(b) respectively schematically show a cross-sectional view and a top view of one micromirror unit in an electrostatically driven deflecting micromirror array according to an embodiment of the present invention
- FIG. 3(c) is schematically illustrated Illustratively showing a top view of the structure of the first electrode pair and the second electrode pair of the micromirror unit;
- FIG. 4 schematically illustrates a backlight direction adjustment principle for a backlight module according to an embodiment of the present invention
- FIG. 5 schematically illustrates a backlight module in accordance with another embodiment of the present invention.
- FIG. 1 schematically illustrates a backlight module 100 in accordance with an embodiment of the present invention.
- the backlight module 100 includes a light source 110, a micro mirror array 120, and a control unit (not shown). Light emitted from the light source 110 is reflected by a plurality of micromirrors in the micromirror array 120 to the rear of the display screen 130 to provide backlighting for, for example, a liquid crystal display.
- a point source such as a UHP lamp or a metal halide lamp can be employed as the light source 110.
- a suitable optical path design after the divergent beam emitted from the point source is reflected by the mirror, a larger area, such as the entire display screen 130, can be covered.
- Micromirror array 120 includes a plurality of micromirror units (represented by a plurality of grids on micromirror array 120 in FIG. 1). In the default state, the individual micromirrors are not deflected and thus form a planar mirror as a whole. In this case, the light reflected by the micromirror array 120 can be evenly distributed on the display screen 130 to provide a uniform backlight (as shown in FIG. 1). However, each of the micromirrors is deflectable about a first yaw axis and a second yaw axis that is perpendicular to the first yaw axis, respectively.
- each of the plurality of micromirrors to the rear of display screen 130 is adjustable in both the lateral position and the longitudinal position. That is, you can change The intensity of light reflected by the micromirror array 20 is distributed over the display screen 130, resulting in a non-uniform backlight.
- the deflection angle of the mirror of each of the plurality of micromirror units can be individually and continuously controllable, rather than being discretely controllable on a line-by-row or column-by-column basis. In other words, the deflection angle of each mirror can be finely adjusted, rather than being limited to a fixed value, such as ⁇ 10°.
- the backlight can be concentrated on a separate area (or multiple separate areas) on the display screen 30, where a backlight with ultra-high brightness (due to the superposition of the light intensity reflected by each micro-mirror) is provided.
- the backlight module 100 further includes a control unit (discussed later) for adjusting the deflection angle of the mirror of each of the plurality of micromirror units in response to a backlight control signal (eg, from a display panel).
- a control unit for adjusting the deflection angle of the mirror of each of the plurality of micromirror units in response to a backlight control signal (eg, from a display panel).
- FIG. 2 schematically illustrates an operational state in which a non-uniform backlight is provided using the backlight module 100 illustrated in FIG. 1.
- the micromirror array 120 can uniformly reflect the light emitted by the light source 110 to the entire surface of the display screen 130 or to one or more regions of the display screen 130 (in FIG. 2). It shows an area).
- the micromirror array used in the embodiment of the present invention will be described in detail below.
- the micromirror array may include a deformable type and a deflected type according to the working principle, and may be of a heat drive type, an electromagnetic drive type, and an electrostatic drive type in a driving manner.
- a deflecting micromirror array facilitates applications in which the direction of light is controlled, and electrostatic driving is one of the most common methods.
- 3(a) and 3(b) are schematic cross-sectional side and top views, respectively, of one of the micromirror units 200 in an electrostatically driven deflection micromirror array in accordance with one embodiment of the present invention; A top view of the structure of the first electrode pair and the second electrode pair of the micromirror unit 200 is schematically shown.
- the micromirror unit 200 is formed on the substrate 201 and includes a mirror 202, a frame 203, a first hinge 204 and a second hinge 205, first and second pillars 206 and 207, a third hinge 208, and a fourth hinge 209, A driving electrode 210 and a second driving electrode 211, a third driving electrode 212 and a fourth driving electrode 213, and a mirror electrode 214.
- the mirrors 202 are deflectable about a first yaw axis and a second yaw axis perpendicular to the first yaw axis, respectively, wherein the first yaw axis is defined by the first hinge 204 and the second hinge 205, and the second yaw axis is defined by The third hinge 208 and the fourth hinge 209 are defined.
- the frame 203 supports the mirror 202 by means of the first hinge 204 and the second hinge 205, and the first pillar 206
- the frame 203 is supported by the second strut 207 by means of a third hinge 208 and a fourth hinge 209, respectively.
- a first electrode pair composed of the first driving electrode 210 and the second driving electrode 211 may be formed on the substrate 201, wherein projection symmetry of the first driving electrode 210 and the second driving electrode 211 on the substrate 201 with respect to the first yaw axis .
- a second electrode pair composed of the third driving electrode 212 and the fourth driving electrode 213 may be formed on the substrate 201, wherein the projection of the third driving electrode 212 and the fourth driving electrode 213 on the substrate 201 with respect to the second yaw axis .
- the mirror electrode 214 is electrically coupled to the mirror 202 by a first leg 206 and a second leg 207. Further, as shown in FIG.
- the substrate 201 may be covered with an insulating layer 215 that provides insulation between the driving electrodes 210, 211, 212, 213 and the mirror electrode 214.
- the mirror electrode 214 may be formed on the insulating layer 215.
- the driving electrodes 210, 211, 212, 213 and the mirror electrode 214 may be formed in different electrode layers.
- an electrostatic field formed between the first electrode pair and the mirror 202 can generate a driving torque, which in turn can drive the mirror 202 around the first
- the yaw axis is deflected.
- a voltage Vr may be applied to the mirror electrode 214
- a voltage ⁇ Vr and a voltage ⁇ Vr may be applied to the first driving electrode 210 and the second driving electrode 211, respectively, where ⁇ is used to control the first yaw axis.
- the coefficient of the deflection angle is used to control the first yaw axis.
- the electrostatic field formed between the second electrode pair and the mirror 202 can generate a driving torque, which in turn can drive the mirror 202.
- the voltage ⁇ Vr and the voltage ⁇ Vr may be applied to the third driving electrode 212 and the fourth driving electrode 213, respectively, where ⁇ is a coefficient for controlling the deflection angle around the second yaw axis.
- the first electrode pair and the second electrode pair in the different micromirror units 200 may have respective electrode leads such that different driving voltages may be applied to the driving electrodes of the different micro mirror units 200.
- the deflection angle of each of the mirrors 202 in the array of micromirrors is individually and continuously controllable.
- an undesired abrupt change in the driving voltage may occur, resulting in an excessive deflection angle of the mirror 202 and thus causing damage thereto.
- the guard electrode may or may not be located in the same electrode layer as the drive electrodes 210, 211, 212, 213.
- a guard electrode is formed over the insulating layer 215.
- a plurality of micromirror units 200 are arranged on the substrate 201 to form a micromirror array.
- the mirror 202 may be square, compared to, for example, a circle. It is advantageous to make better use of the area between the micromirror units 200, thereby increasing the effective reflection area. Of course, other shapes are also possible.
- the substrate 201 is typically a semiconductor silicon material because of its good stability and ease of processing.
- the mirror 202 can be made of single crystal silicon, polycrystalline silicon or aluminum, with aluminum having the highest reflection coefficient, resulting in high optical efficiency.
- a fabrication process of a micromirror array according to an embodiment of the present invention will be described below with reference to an exemplary design as shown in FIG. 3(a).
- PECVD plasma enhanced chemical vapor deposition
- a predetermined number (e.g., 32 x 48) of micromirror units 200 in the form of an array can be fabricated on a silicon substrate, depending on the particular design requirements.
- the parameters of the micromirror unit 200 can be as follows:
- a square mirror 202 a side length l 1 of 60 ⁇ m, a thickness of 650 nm;
- outer side length l 2 is 88 ⁇ m
- inner side length l 2 ' is 72 ⁇ m
- thickness is 150 nm
- the first hinge 204 and the second hinge 205 have a length l 3 of 6 ⁇ m, a width w 3 of 4 ⁇ m, and a thickness of 150 nm;
- a third hinge 208, a fourth hinge 209 a length l 4 of 8 ⁇ m, a width w 4 of 6 ⁇ m, a thickness of 150 nm;
- the first pillar 206 and the second pillar 207 have a length l 5 of 16 ⁇ m, a width w 5 of 12 ⁇ m, and a height of 10 ⁇ m.
- the maximum deflection angle of such a mirror 202 is approximately ⁇ 18 degrees. It should be understood that it can be changed by changing the heights of the first pillar 206 and the second pillar 207, if necessary. The maximum allowable deflection angle of mirror 202.
- the backlight module further includes a control unit (not shown) including a deflection angle determining unit, an angle-driving voltage converting unit, and a micro mirror array. driver.
- FIG. 4 schematically illustrates a backlight direction adjustment principle for a backlight module in accordance with an embodiment of the present invention.
- the micromirror array uniformly reflects the light emitted from the light source to the display screen, each mirror having a corresponding area on the display screen.
- the deflection angle determining unit may reflect each of the positions according to a positional relationship between the currently illuminated area and the target illuminated area.
- the mirror determines a deflection angle. The determination is based on the principle of light reflection as shown in FIG.
- the deflection angle determined by the deflection angle determining unit may include a first deflection component corresponding to the first deflection axis and a second deflection component corresponding to the second deflection axis.
- the angle-drive voltage conversion unit converts the respective first and second deflection components for each of the mirrors into drive voltage values for driving the first pair of electrodes and the second pair of electrodes corresponding to the mirror, respectively.
- the micromirror array driver applies respective driving voltages to the first electrode pair and the second electrode pair corresponding to each of the mirrors according to the converted driving voltage value.
- all of the mirror electrodes in the micromirror array can be applied with the same reference voltage Vr.
- the first driving electrode is applied with a first driving voltage ( ⁇ Vr)
- the second driving electrode is applied with a driving voltage (- ⁇ Vr) that is inverted from the first driving voltage.
- the first drive voltage is proportional to the reference voltage Vr as a function of the first deflection component.
- the third driving electrode is applied with the second driving voltage ( ⁇ Vr)
- the fourth driving electrode is applied with the driving voltage (- ⁇ Vr) inverted from the second driving voltage.
- the second drive voltage is proportional to the reference voltage Vr as a function of the second deflection component.
- ⁇ and ⁇ are coefficients that control the deflection angles of the mirrors about the first yaw axis and the second yaw axis, respectively. In one example, ⁇ and ⁇ can be between 0.1 and 0.9.
- the micromirror array driver can include a plurality of digital to analog converters and a plurality of voltage inverters.
- the digital-to-analog converter outputs an analog voltage to be applied to the driving electrode according to the driving voltage value converted by the angle-driving voltage converting unit, and the voltage inverter is used to invert the analog voltage output from the digital-to-analog converter.
- Implementation of both digital-to-analog converter and voltage inverter The manners are all known in the art.
- Each of the micromirror units has a corresponding two digital to analog converters and corresponding two voltage inverters.
- One of the two digital-to-analog converters supplies the first driving voltage ( ⁇ Vr) to the first driving electrode, and the other provides the second driving voltage ( ⁇ Vr) to the third driving electrode.
- One of the two voltage inverters provides a driving voltage (- ⁇ Vr) that is opposite to the first driving voltage for the second driving electrode, and the other provides the fourth driving electrode with the driving voltage A driving voltage (- ⁇ Vr) in which the second driving voltage is inverted.
- light source 110 has been described as a point source.
- the direction of light emitted by the point source is disordered, which is not conducive to improving optical efficiency.
- the light source in the backlight module can be a parallel light source.
- parallel light sources can be provided by a combination of point sources (UHP, LEDs, etc.) and convex lenses (and possibly reflectors, concentrating posts, etc.).
- the backlight module may further include a projection lens.
- FIG. 5 schematically illustrates a backlight module 500 in accordance with another embodiment of the present invention.
- the backlight module 500 has a light source 510 as a parallel light source, and further includes a projection lens 540.
- the projection lens 540 is disposed on the reflected light path of the micromirror array 520 for diverging the reflected light from the micromirror array 520 to match the size of the display screen 530.
- the backlight module 100 may also include a projection lens. Due to the divergence of light by the projection lens, the reflected light path can be greatly shortened, resulting in a reduction in the size of the backlight module.
- the projection lens can also correct the distortion of the reflected light.
- the backlight module 100, 500 may further include a diffusing plate (not shown) that may be disposed on the back side of the display screens 130, 530 for improving the properties of the light that ultimately illuminates the display screen, such as providing Uniform brightness.
- a diffusing plate (not shown) that may be disposed on the back side of the display screens 130, 530 for improving the properties of the light that ultimately illuminates the display screen, such as providing Uniform brightness.
- the display device can be a liquid crystal display, a liquid crystal television, a digital photo frame, a cell phone, a tablet, or any other product or component having a liquid crystal display device.
- control unit described in connection with the embodiments disclosed herein can be implemented as electronic hardware or a combination of both electronic and computer software.
- Some of the embodiments and implementations have been described above in terms of functions and/or modules and various processing steps. However, it should be appreciated that such functionality or modules may be implemented by any number of hardware, software, and/or firmware components configured to perform the specified functions. Whether such functionality is implemented as hardware or software depends on the particular application and design constraints imposed on the overall system.
- the described functionality may be implemented by a skilled person in a variety of ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the invention.
- control unit may employ various integrated circuit components, such as memory elements, digital signal processing elements, logic elements, look-up tables, etc., which may be executed under the control of one or more microprocessors or other control devices A variety of features. Additionally, those skilled in the art will appreciate that the embodiments described herein are merely exemplary implementations.
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Abstract
Description
Claims (14)
- 一种静电驱动的偏转式微镜阵列,包括:基板;以及形成于所述基板上的多个微镜单元,所述多个微镜单元中的每一个包括:反射镜,其可分别绕第一偏转轴和垂直于所述第一偏转轴的第二偏转轴偏转;框架,其借助于第一铰链和第二铰链支撑所述反射镜,所述第一铰链和所述第二铰链限定所述第一偏转轴;第一支柱和第二支柱,其分别借助于第三铰链和第四铰链支撑所述框架,所述第三铰链和所述第四铰链限定所述第二偏转轴;第一电极对,其包括第一驱动电极和第二驱动电极,所述第一驱动电极和所述第二驱动电极关于所述第一偏转轴在所述基板上的投影对称;第二电极对,其包括第三驱动电极和第四驱动电极,所述第三驱动电极和所述第四驱动电极关于所述第二偏转轴在所述基板上的投影对称;以及反射镜电极,其通过所述第一支柱和所述第二支柱与所述反射镜电连接;其中,在所述第一电极对与所述反射镜之间形成静电场,使得所述反射镜可绕所述第一偏转轴偏转,并且,在所述第二电极对与所述反射镜之间形成静电场,使得所述反射镜可绕所述第二偏转轴偏转;其中,所述多个微镜单元中的每一个的反射镜的偏转角度单独连续可控。
- 根据权利要求1所述的微镜阵列,还包括形成于所述基板上并在所述反射镜电极与所述第一电极对和所述第二电极对之间提供绝缘的绝缘层。
- 根据权利要求2所述的微镜阵列,其中,所述多个微镜单元中的每一个还包括环绕所述第一电极对和所述第二电极对布置的保护电极,所述保护电极被施加与所述反射镜电极相同的驱动电压。
- 根据权利要求1所述的微镜阵列,其中,所述反射镜、所述第 一、第二、第三、第四铰链和所述框架由铝一体地制成。
- 根据权利要求1所述的微镜阵列,其中,所述反射镜为正方形。
- 一种显示面板的背光模组,包括:光源;微镜阵列,其包括多个微镜单元,所述多个微镜单元中的每一个具有可分别绕第一偏转轴和垂直于所述第一偏转轴的第二偏转轴偏转的反射镜,所述微镜阵列中的每一个反射镜的偏转角度单独连续可控;以及控制单元,其用于响应于背光控制信号来调节所述微镜阵列中的每一个反射镜的偏转角度,使得所述微镜阵列取决于所述背光控制信号将所述光源发射的光均匀地反射到显示屏幕的整个表面或者汇聚于显示屏幕的一个或多个区域。
- 根据权利要求6所述的背光模组,其中,所述微镜阵列为权利要求1-5中任一项所述的静电驱动的偏转式微镜阵列。
- 根据权利要求7所述的背光模组,其中,所述控制单元包括:偏转角度确定单元,其根据所述背光控制信号所指示的在显示屏幕上要照亮的目标区域为所述微镜阵列中的每一个反射镜确定一个相应的偏转角度,所述偏转角度包括对应于所述第一偏转轴的第一偏转分量和对应于所述第二偏转轴的第二偏转分量;角度-驱动电压转换单元,其将用于每一个反射镜的相应第一偏转分量和第二偏转分量分别转换为用于驱动对应于该反射镜的第一电极对和第二电极对的驱动电压值;以及微镜阵列驱动器,其根据所述角度-驱动电压转换单元所转换的驱动电压值向对应于每一个反射镜的所述第一电极对和第二电极对分别施加相应的驱动电压。
- 根据权利要求8所述的背光模组,其中,所述微镜阵列中的所有反射镜电极被施加一个相同的参考电压,并且其中,在所述微镜阵列的每一个微镜单元中,所述第一驱动电极被施加第一驱动电压,而所述第二驱动电极被施加与所述第一驱动电压反相的驱动电压,所述第一驱动电压作为所述第一偏转分量的函数而与所述参考电压成比例,并且所述第三驱动电极被施加第二驱动电压,而所述第四驱动电极被施加与所述第二驱动电压反相的驱动电压,所述第二驱动电压作 为所述第二偏转分量的函数而与所述参考电压成比例。
- 根据权利要求9所述的背光模组,其中,所述微镜单元中的每一个都具有相应的两个数模转换器和相应的两个电压反相器,并且其中,所述两个数模转换器中的一个为所述第一驱动电极提供所述第一驱动电压,另一个为所述第三驱动电极提供所述第二驱动电压,并且所述两个电压反相器中的一个为所述第二驱动电极提供与所述第一驱动电压反相的驱动电压,另一个为所述第四驱动电极提供与所述第二驱动电压反相的驱动电压。
- 根据权利要求6所述的背光模组,其中,所述光源为平行光源。
- 根据权利要求6或11所述的背光模组,还包括投影透镜,布置于所述微镜阵列的反射光路上,用于使来自所述微镜阵列的反射光发散以匹配显示屏幕的尺寸。
- 根据权利要求6所述的背光模组,还包括布置于显示屏幕的背侧的散光板。
- 一种显示装置,包括如权利要求6-13中任一项所述的背光模组。
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