WO2016141565A1 - Small height detection method and system - Google Patents
Small height detection method and system Download PDFInfo
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- WO2016141565A1 WO2016141565A1 PCT/CN2015/073994 CN2015073994W WO2016141565A1 WO 2016141565 A1 WO2016141565 A1 WO 2016141565A1 CN 2015073994 W CN2015073994 W CN 2015073994W WO 2016141565 A1 WO2016141565 A1 WO 2016141565A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
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- the invention belongs to the field of microelectronics, and in particular relates to a method and system for detecting a small height.
- the measurement of the small height is a common problem in the actual technology.
- the existing measurement method of the small height mainly adopts the linear angle light source measurement method, that is, the measurement of the triangular principle, and the principle thereof is as follows:
- the height of B as shown in Fig. 1 is to be measured, it cannot be measured by an ordinary caliper or the like; therefore, an angle light source is generally used, and the height is measured by a triangular principle; as shown in Fig. 1, a linear light source is used.
- An angle a illuminates the surface of the object to be measured. Projections are produced on both the object surface and the standard plane. Observing the projection from the camera above the object to be tested produces a linear line as shown in Figure 2 on the right; two lines between the projection of the surface of the object and the projection A of the standard plane; respectively, the line above the object being measured and the standard plane Lines.
- the measurement line In order to improve the measurement accuracy, the measurement line generally uses a single beam line laser, but in the case where a large measurement area is required, a plurality of laser beams or other types of stripe light are required. It is easy to calculate the pairing problem between multiple gratings. Therefore, before the test, the standard height gauge block is used to obtain the coordinate position relationship of the surface grating of the object at different heights.
- the stripe grating measurement method has the following disadvantages:
- the grating can only generate a single-width grating, which cannot be tested quickly;
- the embodiment of the present invention aims to provide a method for detecting a small height, which solves the problem that the prior art is high in cost and cannot be quickly detected.
- the embodiment of the present invention is implemented by the method for detecting a small height, and the method includes:
- a point array light source is used to project on a standard plane to obtain a standard coordinate position of each bright point; the point array light source is an array spot capable of forming dark lighting points to intersect each other;
- the calibrated standard height gauge block is placed in the lattice source to measure, and the projection deviation value of the lattice source at the height of the standard height gauge block is obtained;
- the object to be tested is placed in the lattice source for measurement, and the difference between the projection deviation of the object to be measured and the standard plane projection position is obtained;
- the method further includes:
- a detection system for a dedicated minute height implementing the above method, the system comprising: a digital camera and an array light source device;
- the array light source device comprises an oblique angle to the surface of the object to be detected; the array light source device comprises, in order from the inside to the outside, a high-intensity light source, a parallel light lens and a high-resolution liquid crystal screen; the array light source device further comprises: a liquid crystal film Drive circuit.
- the array light source device further includes: a parallel light lens group; the parallel light lens group is disposed outside the high resolution liquid crystal screen or between the high resolution liquid crystal screen and the parallel light lens.
- the high-resolution liquid crystal panel of the technical solution provided by the present invention can constitute almost any standard test geometry we want, including straight stripes, diagonal stripes, array spots, etc., and can be driven by liquid crystal. , to achieve movement without any mechanical drive, fast, high precision; All devices are standard devices, but the combined test results are much more improved and stable than traditional methods; When the driving grating is moved, only the driving light characteristic of the liquid crystal cell unit needs to be driven, and the grating position can be changed without mechanical loss, so that it has the advantages of low cost and rapid detection.
- FIG. 3 is a flow chart of a method for detecting a small height provided by the present invention.
- FIG. 4 is a schematic view of an array spot provided by the present invention.
- Figure 5 is a schematic structural view of an array device provided by the present invention.
- FIG. 6 is another schematic structural view of an array device provided by the present invention.
- Figure 7 is a schematic illustration of the deviation provided by the present invention.
- a specific embodiment of the present invention provides a method for detecting a small height.
- the method is as shown in FIG. 3, and includes:
- the array light source is an array spot capable of forming dark lighting points crossing each other (as shown in FIG. 4);
- the calibrated standard height gauge block is placed into the lattice source to measure, and the projection deviation value of the lattice source at the height of the standard height gauge block is obtained (as shown in FIG. 7 , wherein the lower square is a projection deviation image) ;
- the object to be measured is placed in the lattice source for measurement, obtaining the projection deviation of the object to be measured and the standard plane projection position difference A;
- the technical solution provided by the present invention replaces the ordinary stripe light deletion by the point array light source, so that the calculated height is very accurate, and the above-mentioned point array light source can detect a larger area, so that the detection efficiency is higher, and the high resolution is high.
- the liquid crystal film can constitute almost any standard test geometry we want, including straight stripes, diagonal stripes, array spots, etc., and can be moved by liquid crystal driving without any mechanical drive, fast speed and high precision; All devices are standard devices, but the combined test results are much more improved and stable than traditional methods; When the driving grating is moved, only the driving light characteristic of the liquid crystal cell unit needs to be driven, and the grating position can be changed without mechanical loss, so that it has the advantages of low cost and rapid detection.
- the foregoing method may further include:
- a specific embodiment of the present invention also provides a micro height detection system, the system comprising: a digital camera and an array light source device;
- the array light source device has an oblique angle with the surface of the object to be detected; the array light source device is as shown in FIG. 5, and the array light source device comprises, in order from the inside to the outside, a high-brightness light source 30, a parallel light lens 31 and a high resolution.
- the liquid crystal panel 32; the array light source device further includes: a liquid crystal panel driving circuit.
- the array light source device may further include: a parallel light lens group 33; the parallel light lens group is disposed outside the high resolution liquid crystal screen or between the high resolution liquid crystal screen and the parallel light lens.
- Dot matrix light source high brightness backlight, parallel light lens, high resolution liquid crystal film.
- Liquid crystal panel driving circuit High-resolution liquid crystal chips are very easy to obtain, and as the liquid crystal manufacturing process is improved, the resolution is also improved. There is no need to order high-resolution parts.
- Parallel optical lenses require the choice of a lens combination that is compatible with a high brightness backlight. The lens combination can generate parallel light between the liquid crystal film and the light source, or can be behind the liquid crystal screen, so that a finer dot matrix light source can be obtained by adjusting the magnification.
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Abstract
A small height detection method and system. The system comprises a digital camera and an array light source device. An inclined angle is formed between the array light source device and a surface of a to-be-detected object. The array light source device sequentially comprises a high-brightness light source (30), a parallel light lens (31), and a high-resolution liquid crystal screen (32) from interior to exterior. The array light source device also comprises a liquid crystal display driving circuit.
Description
本发明属于微电子领域，尤其涉及一种微小高度的检测方法及***。 The invention belongs to the field of microelectronics, and in particular relates to a method and system for detecting a small height.
对于微电子领域
，微小高度的测量属于实际技术中的常见问题，现有的微小高度的测量方法主要采用线性角度光源测量方法，即三角原理的测量，其原理具体如下：For the field of microelectronics
The measurement of the small height is a common problem in the actual technology. The existing measurement method of the small height mainly adopts the linear angle light source measurement method, that is, the measurement of the triangular principle, and the principle thereof is as follows:
如图1所示，如果要测量如图1所示的B的高度，无法用普通的卡尺等测量；故一般采用角度光源，用三角原理测量高度；如图1所示：一个线性光源，以一个角度a照射到被测物体表面。在物体表面和标准平面都产生投影。从待测物体上方相机观察投影，会产生如右图2所示的线性直线；在物体表面的投影与在标准平面的投影间隔A的两条直线；分别是被测物体上方的线条和标准平面的线条。根据三角函数关系，待测物体高度B=A*
tag(a); 该测量在微小物体高度测量上是标准计算方法。As shown in Fig. 1, if the height of B as shown in Fig. 1 is to be measured, it cannot be measured by an ordinary caliper or the like; therefore, an angle light source is generally used, and the height is measured by a triangular principle; as shown in Fig. 1, a linear light source is used. An angle a illuminates the surface of the object to be measured. Projections are produced on both the object surface and the standard plane. Observing the projection from the camera above the object to be tested produces a linear line as shown in Figure 2 on the right; two lines between the projection of the surface of the object and the projection A of the standard plane; respectively, the line above the object being measured and the standard plane Lines. According to the trigonometric function, the height of the object to be tested is B=A*
Tag(a); This measurement is a standard calculation method for measuring the height of tiny objects.
在实现现有技术的方案中，发现现有技术存在如下技术问题：In the solution of the prior art, the following technical problems are found in the prior art:
为了提高测量精度，测量的线一般采用单束线条激光，但是，对需要测量区域较大的情况下，则需要多束激光，或者其它方式的条纹光。多个光栅之间容易出现计算光栅的配对问题，所以，在测试前都采用测量标准高度量块，获得物体表面光栅在不同高度下坐标位置关系。In order to improve the measurement accuracy, the measurement line generally uses a single beam line laser, but in the case where a large measurement area is required, a plurality of laser beams or other types of stripe light are required. It is easy to calculate the pairing problem between multiple gratings. Therefore, before the test, the standard height gauge block is used to obtain the coordinate position relationship of the surface grating of the object at different heights.
但是，条纹光栅测量方法存在以下几个缺点：However, the stripe grating measurement method has the following disadvantages:
1 光栅发生器部件成本高；1 grating generator components are costly;
2 光栅只能生成单一宽度的光栅，无法做到快速测试；2 The grating can only generate a single-width grating, which cannot be tested quickly;
3
如果需要光栅移动，需要用精密微小驱动装置（如超声波马达），驱动光栅发生器作微小移动，该驱动装置成本高；3
If grating movement is required, it is necessary to use a micro-drive device (such as an ultrasonic motor) to drive the grating generator for small movement, which is costly;
4 在被测物体边缘部分，存在阴影效应。4 There is a shadow effect on the edge of the measured object.
本发明实施例目的在于提供一种微小高度的检测方法，解决现有技术成本高，无法快速检测的问题。The embodiment of the present invention aims to provide a method for detecting a small height, which solves the problem that the prior art is high in cost and cannot be quickly detected.
本发明实施例是这样实现的，一种微小高度的检测方法，所述方法包括：The embodiment of the present invention is implemented by the method for detecting a small height, and the method includes:
采用点阵列光源在标准平面上投影，获得每个亮点的标准坐标位置；该点阵列光源为能够形成暗点亮点相互交叉的阵列光斑；A point array light source is used to project on a standard plane to obtain a standard coordinate position of each bright point; the point array light source is an array spot capable of forming dark lighting points to intersect each other;
变换点阵列光源的亮点和暗点的位置，获得整个标准平面上的每个亮点的标准坐标位置；Converting the position of the bright point and the dark point of the point source light source to obtain the standard coordinate position of each bright point on the entire standard plane;
将经过标定的标准高度量块放入点阵光源进行测量，获得点阵光源在该标准高度量块高度下的投影偏差值；The calibrated standard height gauge block is placed in the lattice source to measure, and the projection deviation value of the lattice source at the height of the standard height gauge block is obtained;
依据偏差值与标准坐标位置利用三角函数原理计算出投影夹角a; Calculating the projection angle a according to the deviation value and the standard coordinate position using the trigonometric function principle;
将待测物体放入该点阵光源进行测量，获取待测物体的投影偏差与标准平面投影位置差值A；The object to be tested is placed in the lattice source for measurement, and the difference between the projection deviation of the object to be measured and the standard plane projection position is obtained;
待测物体的高度B= A* tag(a)。The height of the object to be tested B = A* tag(a).
可选的，所述方法在计算出待测物体的高度之后，还包括： Optionally, after calculating the height of the object to be tested, the method further includes:
计算每个光点与标准平面之间的高度位置，则可以计算出待测的每个点的相对高度关系；该高度关系即各个点高度位置的差值。Calculating the height position between each spot and the standard plane, you can calculate the relative height relationship of each point to be tested; this height relationship is the difference between the height positions of the points.
另一方面，提供一种实现上述方法的专用微小高度的检测***，所述***包括：数字相机和阵列光源装置；In another aspect, a detection system for a dedicated minute height implementing the above method is provided, the system comprising: a digital camera and an array light source device;
其中，该阵列光源装置与待检测物体表面呈一斜角；该阵列光源装置从内到外依次包括：高亮度光源、平行光透镜和高分辨率液晶屏；该阵列光源装置还包括：液晶片驱动电路。The array light source device comprises an oblique angle to the surface of the object to be detected; the array light source device comprises, in order from the inside to the outside, a high-intensity light source, a parallel light lens and a high-resolution liquid crystal screen; the array light source device further comprises: a liquid crystal film Drive circuit.
可选的，所述阵列光源装置还包括：平行光透镜组；该平行光透镜组设置在高分辨率液晶屏外或高分辨率液晶屏与平行光透镜之间。Optionally, the array light source device further includes: a parallel light lens group; the parallel light lens group is disposed outside the high resolution liquid crystal screen or between the high resolution liquid crystal screen and the parallel light lens.
在本发明实施例中，本发明提供的技术方案的高解析度的液晶片几乎可以构成我们希望的任何标准的测试几何形状，包括直条纹，斜条纹，阵列光点等，而且可以通过液晶驱动，实现移动，而不需要任何机械驱动，速度快，精度高；
所有的器件都是现有标准器件，但是组合后的测试效果比传统方法提高了很多，而且稳定；
在驱动光栅移动时，只需要驱动液晶片单元的通光特性，就可以改变光栅位置，没有机械损耗，所以其具有成本低、快速检测的优点。
In the embodiment of the present invention, the high-resolution liquid crystal panel of the technical solution provided by the present invention can constitute almost any standard test geometry we want, including straight stripes, diagonal stripes, array spots, etc., and can be driven by liquid crystal. , to achieve movement without any mechanical drive, fast, high precision;
All devices are standard devices, but the combined test results are much more improved and stable than traditional methods;
When the driving grating is moved, only the driving light characteristic of the liquid crystal cell unit needs to be driven, and the grating position can be changed without mechanical loss, so that it has the advantages of low cost and rapid detection.
图 1 是现有技术提供的测量高度示意图； 1 is a schematic diagram of measurement height provided by the prior art;
图 2 是现有技术提供的线性投影偏差示意图； 2 is a schematic diagram of linear projection deviation provided by the prior art;
图 3 是本发明 提供的 一 种 微小高度的检测方法 的流程 图 ； 3 is a flow chart of a method for detecting a small height provided by the present invention;
图 4 是本发明提供的 阵列光斑 的示意图； 4 is a schematic view of an array spot provided by the present invention;
图 5 是本发明提供的阵列装置结构示意图； Figure 5 is a schematic structural view of an array device provided by the present invention;
图 6 是本发明提供的阵列装置的另一结构示意图； 6 is another schematic structural view of an array device provided by the present invention;
图 7 是本发明提供的偏差示意图。 Figure 7 is a schematic illustration of the deviation provided by the present invention.
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
本发明具体实施方式提供一种微小高度的检测方法，该方法如图3所示，包括：A specific embodiment of the present invention provides a method for detecting a small height. The method is as shown in FIG. 3, and includes:
101、采用点阵列光源在标准平面上投影，获得每个亮点的标准坐标位置；该点阵列光源为能够形成暗点亮点相互交叉的阵列光斑（如图4所示）；101. Projecting on a standard plane by using a point array light source to obtain a standard coordinate position of each bright point; the array light source is an array spot capable of forming dark lighting points crossing each other (as shown in FIG. 4);
102、变换点阵列光源的亮点和暗点的位置，获得整个标准平面上的每个亮点的标准坐标位置；102. Converting the position of the bright point and the dark point of the point source light source to obtain a standard coordinate position of each bright point on the entire standard plane;
103、将经过标定的标准高度量块放入点阵光源进行测量，获得点阵光源在该标准高度量块高度下的投影偏差值（如图7所示，其中，下方正方形为投影偏差影像）；103. The calibrated standard height gauge block is placed into the lattice source to measure, and the projection deviation value of the lattice source at the height of the standard height gauge block is obtained (as shown in FIG. 7 , wherein the lower square is a projection deviation image) ;
104、依据偏差值与标准坐标位置利用三角函数原理计算出投影夹角a; 104. Calculate the projection angle a according to the deviation value and the standard coordinate position by using a trigonometric function principle;
105、将待测物体放入该点阵光源进行测量，获取待测物体的投影偏差与标准平面投影位置差值A；105, the object to be measured is placed in the lattice source for measurement, obtaining the projection deviation of the object to be measured and the standard plane projection position difference A;
106、待测物体的高度B= A* tag(a)。106. The height of the object to be tested B = A* tag(a).
本发明提供的技术方案通过点阵列光源替换普通的条纹光删，这样计算出的高度非常准确，并且上述点阵列光源能够检测的面积更大，这样检测的效率更高，另外，高解析度的液晶片几乎可以构成我们希望的任何标准的测试几何形状，包括直条纹，斜条纹，阵列光点等，而且可以通过液晶驱动，实现移动，而不需要任何机械驱动，速度快，精度高；
所有的器件都是现有标准器件，但是组合后的测试效果比传统方法提高了很多，而且稳定；
在驱动光栅移动时，只需要驱动液晶片单元的通光特性，就可以改变光栅位置，没有机械损耗，所以其具有成本低、快速检测的优点。The technical solution provided by the present invention replaces the ordinary stripe light deletion by the point array light source, so that the calculated height is very accurate, and the above-mentioned point array light source can detect a larger area, so that the detection efficiency is higher, and the high resolution is high. The liquid crystal film can constitute almost any standard test geometry we want, including straight stripes, diagonal stripes, array spots, etc., and can be moved by liquid crystal driving without any mechanical drive, fast speed and high precision;
All devices are standard devices, but the combined test results are much more improved and stable than traditional methods;
When the driving grating is moved, only the driving light characteristic of the liquid crystal cell unit needs to be driven, and the grating position can be changed without mechanical loss, so that it has the advantages of low cost and rapid detection.
可选的，上述方法还可以包括：Optionally, the foregoing method may further include:
计算每个光点与标准平面之间的高度位置，则可以计算出待测的每个点的相对高度关系；该高度关系即各个点高度位置的差值。Calculating the height position between each spot and the standard plane, you can calculate the relative height relationship of each point to be tested; this height relationship is the difference between the height positions of the points.
本发明具体实施方式还提供一种微小高度的检测***，该***包括：数字相机和阵列光源装置；A specific embodiment of the present invention also provides a micro height detection system, the system comprising: a digital camera and an array light source device;
其中，该阵列光源装置与待检测物体表面呈一斜角；该阵列光源装置如图5所示，该阵列光源装置从内到外依次包括：高亮度光源30、平行光透镜31和高分辨率液晶屏32；该阵列光源装置还包括：液晶片驱动电路。Wherein, the array light source device has an oblique angle with the surface of the object to be detected; the array light source device is as shown in FIG. 5, and the array light source device comprises, in order from the inside to the outside, a high-brightness light source 30, a parallel light lens 31 and a high resolution. The liquid crystal panel 32; the array light source device further includes: a liquid crystal panel driving circuit.
可选的，该阵列光源装置如图6所示，还可以包括：平行光透镜组33；该平行光透镜组设置在高分辨率液晶屏外或高分辨率液晶屏与平行光透镜之间。Optionally, the array light source device, as shown in FIG. 6, may further include: a parallel light lens group 33; the parallel light lens group is disposed outside the high resolution liquid crystal screen or between the high resolution liquid crystal screen and the parallel light lens.
点阵光源：高亮度背光源，平行光透镜，高解析度液晶片。液晶片驱动电路；
高解析度的液晶片非常容易获得，而且随着液晶制造工艺的提高，分辨率也会提高。不用专门订制高解析度的部件。平行光透镜需要选择与高亮度背光源配合的透镜组合。该透镜组合可以在液晶片与光源之间，产生平行光，也可以在液晶屏之后，这样可以通过调整放大倍率，得到更细小的点阵光源。Dot matrix light source: high brightness backlight, parallel light lens, high resolution liquid crystal film. Liquid crystal panel driving circuit;
High-resolution liquid crystal chips are very easy to obtain, and as the liquid crystal manufacturing process is improved, the resolution is also improved. There is no need to order high-resolution parts. Parallel optical lenses require the choice of a lens combination that is compatible with a high brightness backlight. The lens combination can generate parallel light between the liquid crystal film and the light source, or can be behind the liquid crystal screen, so that a finer dot matrix light source can be obtained by adjusting the magnification.
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。The above is only the preferred embodiment of the present invention, and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection of the present invention. Within the scope.
Claims (4)
- 一种微小高度的检测方法，其特征在于，所述方法包括： A method for detecting a small height, the method comprising:采用点阵列光源在标准平面上投影，获得每个亮点的标准坐标位置；该点阵列光源为能够形成暗点亮点相互交叉的阵列光斑；A point array light source is used to project on a standard plane to obtain a standard coordinate position of each bright point; the point array light source is an array spot capable of forming dark lighting points to intersect each other;变换点阵列光源的亮点和暗点的位置，获得整个标准平面上的每个亮点的标准坐标位置；Converting the position of the bright point and the dark point of the point source light source to obtain the standard coordinate position of each bright point on the entire standard plane;将经过标定的标准高度量块放入点阵光源进行测量，获得点阵光源在该标准高度量块高度下的投影偏差值；The calibrated standard height gauge block is placed in the lattice source to measure, and the projection deviation value of the lattice source at the height of the standard height gauge block is obtained;依据偏差值与标准坐标位置利用三角函数原理计算出投影夹角a; Calculating the projection angle a according to the deviation value and the standard coordinate position using the trigonometric function principle;将待测物体放入该点阵光源进行测量，获取待测物体的投影偏差与标准平面投影位置差值A；The object to be tested is placed in the lattice source for measurement, and the difference between the projection deviation of the object to be measured and the standard plane projection position is obtained;待测物体的高度B= A* tag(a)。The height of the object to be tested B = A* tag(a).
- 根据权利要求1所述的方法，其特征在于，所述方法在计算出待测物体的高度之后，还包括： The method according to claim 1, wherein after calculating the height of the object to be tested, the method further comprises:计算每个光点与标准平面之间的高度位置，则可以计算出待测的每个点的相对高度关系；该高度关系即各个点高度位置的差值。Calculating the height position between each spot and the standard plane, you can calculate the relative height relationship of each point to be tested; this height relationship is the difference between the height positions of the points.
- 一种实现如权利要求1或2所述的方法的专用微小高度的检测***，其特征在于，所述***包括：数字相机和阵列光源装置；A dedicated minute height detection system implementing the method of claim 1 or 2, wherein the system comprises: a digital camera and an array light source device;其中，该阵列光源装置与待检测物体表面呈一斜角；该阵列光源装置从内到外依次包括：高亮度光源、平行光透镜和高分辨率液晶屏；该阵列光源装置还包括：液晶片驱动电路。The array light source device comprises an oblique angle to the surface of the object to be detected; the array light source device comprises, in order from the inside to the outside, a high-intensity light source, a parallel light lens and a high-resolution liquid crystal screen; the array light source device further comprises: a liquid crystal film Drive circuit.
- 根据权利要求3所述的***，其特征在于，所述阵列光源装置还包括：平行光透镜组；该平行光透镜组设置在高分辨率液晶屏外或高分辨率液晶屏与平行光透镜之间。The system according to claim 3, wherein the array light source device further comprises: a parallel light lens group; the parallel light lens group is disposed outside the high resolution liquid crystal screen or the high resolution liquid crystal screen and the parallel light lens between.
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