WO2016084541A1 - Electronic component transporting device - Google Patents

Electronic component transporting device Download PDF

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Publication number
WO2016084541A1
WO2016084541A1 PCT/JP2015/080378 JP2015080378W WO2016084541A1 WO 2016084541 A1 WO2016084541 A1 WO 2016084541A1 JP 2015080378 W JP2015080378 W JP 2015080378W WO 2016084541 A1 WO2016084541 A1 WO 2016084541A1
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WO
WIPO (PCT)
Prior art keywords
electronic component
chuck
stage
unit
turret table
Prior art date
Application number
PCT/JP2015/080378
Other languages
French (fr)
Japanese (ja)
Inventor
隆行 的場
Original Assignee
上野精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上野精機株式会社 filed Critical 上野精機株式会社
Priority to CN201580002287.4A priority Critical patent/CN105874342B/en
Publication of WO2016084541A1 publication Critical patent/WO2016084541A1/en
Priority to HK16110353.2A priority patent/HK1222226A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Definitions

  • the present invention relates to an electronic component transport apparatus that transports electronic components.
  • ⁇ Electronic components undergo various inspection items during the manufacturing process, and non-defective products are screened and packed together for shipment.
  • the inspection item is typically measurement of electrical characteristics.
  • An electrical characteristic is a response to a voltage, current, resistance, frequency, or logic signal of an electronic component.
  • a current-carrying contact called a contact is applied to an electrode of an electronic component, and current injection, voltage application, or logic signal input is performed. Then, the output is analyzed to determine a non-defective product.
  • an insulated gate bipolar transistor or SiC bipolar transistor used as a power semiconductor element for switching high voltage or large current.
  • a stage-cum-lower contact and an upper contact are arranged opposite to each other at an interval so that the upper contact can be lowered.
  • the stage / lower contact places an electronic component and makes electrical contact with the lower electrode (see, for example, Patent Document 1).
  • a typical example of this transporting application is a rotating transport electronic component transporting device.
  • an electronic component conveying apparatus of a chuck outer periphery type rotational conveying system in which suction chucks and the like are arranged on the outer periphery of the turret table at equal circumferential positions and the electronic components are aligned and conveyed by intermittent rotation of the turret table (for example, , See Patent Document 2).
  • This chuck outer peripheral installation type rotary conveyance method has an advantage that electronic components can be received and discharged from the conveyance path by the chuck by itself while achieving high-speed conveyance by the rotation conveyance method.
  • This electronic component transport device arranges each inspection item unit along the transport path formed by the turret table, so that the electronic component transport device receives each inspection item while transporting the electronic component.
  • Each unit is arranged immediately below the chuck stop position due to intermittent rotation of the turret table, and the chuck places electronic components on each unit by lowering and causes the electronic components to receive inspection items. That is, an advancing / retreating drive unit that pushes down the chuck is fixedly installed immediately above each stop position, in other words, immediately above the stage of the unit.
  • the chuck outer peripheral type rotary conveyance type electronic component conveyance device has dramatically improved the production efficiency of electronic components by high-speed conveyance and self-supply and discharge to the conveyance path.
  • an electrical characteristic measuring unit for measuring electrical characteristics of the electronic components of the double-sided electrode cannot be incorporated in the transport path formed by the electronic component transport apparatus.
  • the turret table has a disk shape and has a chuck on the outer edge.
  • the stage of the electrical characteristic measurement unit is arranged immediately below the chuck stop position, the outer edge of the turret table always exists between the upper contact and the stage / lower contact. Therefore, the upper contact cannot be lowered toward the electronic component placed on the stage / lower contact.
  • the advancing / retreating drive unit is fixedly installed at the chuck stop position.
  • the height from the lower end of the chuck to the upper end of the advance / retreat driving unit exceeds the height of the space between the upper contact and the stage / lower contact. For this reason, it is physically impossible to dispose an electrical characteristic measurement unit in which the upper contact and the stage / lower contact are disposed opposite to each other in the transport path. Even if the space between the upper contact and the stage / lower contact is expanded, the upper contact cannot be lowered if the forward / backward drive unit and the turret table are always present.
  • An electronic component is temporarily unloaded from a conveyance path constituted by an electronic component conveyance apparatus of a chuck outer peripheral type rotary conveyance method, and the electronic component is reciprocated between the conveyance path and the electrical characteristic measurement unit by a shuttle or the like. Can be considered. However, it is difficult to match the shuttle's reciprocation with the high speed of the turret table. If this method is adopted, all the movements of the electronic component transport device are limited by the shuttle speed. In other words, the advantage of high-speed conveyance that the chuck outer peripheral type rotary conveyance type electronic component conveyance device has is lost.
  • the present invention has been proposed in order to solve the above-described problems.
  • the electric components of the double-sided electrode electronic component are not lost without losing the advantage of high-speed conveying.
  • the purpose is to make it possible to measure characteristics.
  • the present invention further provides an electronic component transfer that can arrange the stage and the structure opposite to each other across the transfer path without losing the advantages of high-speed transfer in an electronic component transfer apparatus of the chuck outer periphery type rotary transfer method.
  • An object is to provide an apparatus.
  • a first aspect of an electronic component conveying apparatus is an electronic component conveying apparatus that conveys an electronic component, has a circular shape having the same radius over the entire circumference, and has a predetermined rotation angle in the circumferential direction.
  • a turret table that rotates intermittently, a chuck that is provided at an outer edge of the turret table at a pitch that is twice the rotation angle, and that extends radially toward the outside of the table and holds electronic components; and the turret table are set at respective points divided by the rotation angle of the turret table on the same circumference and are arranged at at least one of the stop positions where the chuck stops and the stop positions of the chuck.
  • a stage on which an electronic component is placed by the chuck a structure that is disposed to face the space above the stage with a space for the chuck to enter;
  • a retreat position that is set next to the stage and the structure, and the chuck is retreated from the stage and the structure while an electronic component is processed on the stage, among the stop positions of the back; It is characterized by.
  • a second aspect of the electronic component transport apparatus is an electronic component transport apparatus for transporting an electronic component, the turret table rotating intermittently at a predetermined rotation angle in the circumferential direction, and the turret table.
  • the chuck On the outer edge of the turret, the chuck is provided at a pitch of twice the rotation angle, extends radially toward the outside of the table and holds an electronic component, and a circle having the same center as the turret table.
  • An advancing / retreating drive unit that is fixedly installed above a trajectory through which the outermost diameter portion of the turret table passes and lowers the chuck toward the stage
  • a structure that is disposed opposite to the chuck above the stage with a space for the chuck to enter, and a position where the chuck is stopped is set next to the stage and the structure, and an electronic component is processed on the stage.
  • the chuck includes a retreat position for retracting the stage from the stage and the structure.
  • a processing unit of processing different from the processing at the stage may be further provided at at least one place of the other stopping positions counted from the retracted position.
  • Each stop position is at least one other place counted from the installation position of the stage and the structure, and the chuck does not perform the different processing only for picking up or removing the electronic component.
  • the different processing is performed at least every other place counted from the stop position and the retreat position, and the time is longer than the time required for pickup or separation at the first type stop position and less than the processing time on the stage.
  • a second type of stop position is performed at least every other place counted from the stop position and the retreat position, and the time is longer than the time required for pickup or separation at the first type stop position and less than the processing time on the stage.
  • a plurality of sets of the stage and the structure are provided, and each set is installed at any one of the stop positions counted from one set, and the retreat position is provided next to each set. It may be.
  • An electrical property measuring unit for measuring electrical properties of an electronic component having double-sided electrodes, and the electrical property measuring unit has the current-carrying contactor on which the electronic component is placed and in contact with the lower surface electrode of the electronic component;
  • the structure may be a current-carrying contact that contacts an upper surface electrode of an electronic component placed on the stage.
  • the structure may be lowered toward the electronic components of the stage, and at a return position from the lowered position, the structure may be left still with room for the chuck to enter.
  • the processing unit of the different processing is an appearance inspection unit that inspects the appearance of the electronic component, an inspection support unit that corrects the attitude of the electronic component, or a storage unit that stores the electronic component and determines the appropriateness of the storage. Also good.
  • the chuck has an L shape that extends downward from the turret table and bends horizontally in the middle, and the bending position is provided at a height between the structure and the stage. Good.
  • the stage and the structure can be arranged to face each other across the transport path of the electronic component. Therefore, without losing the high-speed transportability of the electronic component, the stage and the structure can be attached to the electronic component. Processing is possible.
  • zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 2nd state, (b) is a time chart which shows the stop time of a 2nd state.
  • zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 3rd state, (b) is a time chart which shows the stop time of a 3rd state.
  • zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 4th state, (b) is a time chart which shows the stop time of a 4th state.
  • zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 5th state, (b) is a time chart which shows the stop time of a 5th state.
  • the electrical characteristic measurement unit 41 measures electrical characteristics of the electronic component W.
  • the electrical characteristic measurement unit 41 is in electrical contact with the electrodes of the electronic component W, applies voltage or current injection to the electronic component W, and inspects the electrical characteristics.
  • the electrical characteristics include the voltage, current, resistance, or frequency of the electronic component W with respect to current injection or voltage application to the electronic component W, an output signal with respect to a logic signal, and the like.
  • the electronic component W is a component used for an electric product, and a semiconductor element or the like is packaged.
  • the semiconductor element include discrete semiconductors such as transistors, diodes, capacitors, resistors, and integrated circuits.
  • This electronic component W has a double-sided electrode package provided with electrodes for external connection on both sides.
  • the electrical property measurement unit 41 for the electronic component W having double-sided electrodes includes a stage / lower contact 412 and an upper contact 411.
  • the stage / lower contact 412 has the electronic component W placed thereon, and electrically contacts the bottom electrode of the electronic component W as an energizing contact.
  • the stage / lower contact 412 has a stage on which the electronic component W is placed and a lower contact in contact with the lower surface electrode, and the lower contact may be inserted from the back of the stage.
  • the upper contact 411 is a current-carrying contact that contacts the upper surface electrode of the electronic component W.
  • the upper contact 411 is supported by an upper base 413 that is taller than the stage / lower contact 412.
  • the upper contact 411 protrudes from the upper base 413 toward the conveyance path 2 (see FIG. 2) side of the electronic component W, and extends to a position directly above the stage / lower contact 412.
  • the upper contact 411 can be moved up and down.
  • the upper contact 411 approaches and separates from the stage / lower contact 412 by moving up and down.
  • the electrical characteristic measurement unit 41 includes a lifting drive unit 414 that lifts and lowers the upper contact 411.
  • the elevating drive unit 414 is a drive source and transmission mechanism module that converts rotational motion into linear motion of the upper contact 411.
  • the elevating drive unit 414 includes a tension spring 415, a motor 416, a cam 417, and a cam follower 418.
  • the tension spring 415 biases the upper base 413 so that the upper contact 411 moves toward the stage / lower contact 412.
  • the motor 416 has a rotating shaft that extends horizontally. Horizontal is a direction orthogonal to the arrangement of the upper contact 411 and the stage / lower contact 412.
  • the cam 417 is supported by the rotating shaft of the motor 416, has a flat shape, and forms a cam surface on the peripheral surface.
  • the cam follower 418 is fixed to the bottom surface of the upper base 413, contacts the cam 417 from the upper side, and follows the cam surface.
  • the electrical property measuring unit 41 lowers the upper contact 411 when the electronic component W is placed on the stage / lower contact 412. Then, the stage / lower contact 412 is brought into contact with the lower electrode, the upper contact 411 is brought into contact with the upper electrode, current injection, voltage application, or input of a logic signal is performed, and the output signal is analyzed.
  • FIG. 2 is an overall configuration diagram of an electronic component transport apparatus including the electrical characteristic measurement unit.
  • FIG. 3 is a partially enlarged view of the electronic component transport device viewed from the side. 2 and 3 conveys an electronic component W for measurement of various inspection items including measurement of electrical characteristics.
  • the electronic component transport apparatus 1 constitutes a transport path 2 for electronic components W, and various units are arranged along the transport path 2.
  • the various units are a supply unit 3, various inspection units including an electrical characteristic measurement unit 41, an inspection support unit 5, a discharge container 6, and a storage unit 7.
  • an appearance inspection unit 42 is further provided as an inspection unit.
  • the conveyance path 2 includes a turret table 21 and a chuck 22.
  • the turret table 21 is a circular disk extending in the horizontal direction and having the same radius over the entire circumference.
  • the drive source of the turret table 21 is a direct drive motor 23.
  • the direct drive motor 23 is connected to the bottom surface of the turret table 21, supports the turret table 21, and intermittently rotates the turret table 21 by a predetermined angle in the circumferential direction.
  • the chuck 22 is attached to the outer edge of the turret table 21. Therefore, the chuck 22 sequentially stops at each stop position 24 by intermittent rotation of the turret table 21. In other words, the stop position 24 is provided at each point divided by the rotation angle of one pitch of the turret table 21 on the circumference having the same center as the turret table 21.
  • the chuck 22 extends horizontally from the outer edge of the turret table 21.
  • the chuck 22 holds the electronic component W at a tip away from the turret table 21. That is, the conveyance path 2 is a trajectory through which the tip of the chuck 22 passes, and is formed around the turret table 21.
  • the type of the chuck 22 is not particularly limited, but the chuck 22 is, for example, a suction chuck.
  • the chuck 22 which is an adsorption chuck has a hollow tube inside.
  • the tip of the chuck 22 has an opening 22a facing downward, and the opening 22a is connected to the hollow tube.
  • the hollow tube communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector on the side opposite to the opening 22a.
  • a negative pressure generator such as a vacuum pump or an ejector on the side opposite to the opening 22a.
  • the chuck 22 is attached to the outer edge of the turret table 21 via a bearing or a slider, and can move up and down.
  • the chuck 22 receives the electronic component W from the supply unit 3 by moving up and down, and exchanges the electronic component W with the inspection support unit 5, the electrical characteristic measurement unit 41, and the appearance inspection unit 42.
  • the chuck 22 places an electronic component W whose electrical characteristics have not been measured on the stage / lower contact 412 of the electrical characteristic measuring unit 41, and the electronic component whose electrical characteristics have been measured from the stage / lower contact 412 is finished. W is collected.
  • the chuck 22 is lowered by being pushed down by the advance / retreat drive unit 25.
  • the advance / retreat drive unit 25 is installed immediately above the outer edge of the turret table 21.
  • the base end of the chuck 22 exists on a vertical line extending from the advance / retreat drive unit 25.
  • the advance / retreat drive unit 25 and the turret table 21 have no fixed relationship, and the advance / retreat drive unit 25 does not move.
  • the advance / retreat drive unit 25 includes a motor, a cam mechanism, and a rod, and converts the rotational force of the motor into a linear motion by the cam mechanism and transmits the linear motion to the rod.
  • the rod extends toward the stop position 24 of the chuck 22, contacts the base end of the chuck 22 existing at the stop position 24 from above, and further pushes down the chuck 22 downward.
  • the chuck 22 extends while maintaining a height that enters between the upper contact 411 and the stage / lower contact 412 of the electrical characteristic measurement unit 41.
  • the upper contact 411 and the stage / lower contact 412 are installed on the outer edge of the turret table 21 and on the outer side in the table radial direction with respect to the advance / retreat driving unit 25, and between the upper contact 411 and the stage / lower contact 412.
  • the outer edge of the turret table 21 and the advance / retreat drive unit 25 are not provided.
  • the chuck 2 extends downward from the base end and bent outward in the middle. By adopting the shape, it can be extended to the height of the space.
  • the number of the stop positions 24 of the chuck 22 is twice the number of the chucks 22 arranged. That is, the chucks 22 are arranged at equal circumferential positions around the turret table 21, and when the arrangement interval is an angle 2a, the direct drive motor 23 rotates the turret table 21 by an angle a per pitch. For example, 32 stop positions 24 are set for 16 chucks 22.
  • Each unit 3, 41, 42, 5, 6, 7 is installed at one of the stop positions 24 of the chuck 22.
  • the electronic component transport apparatus 1 transports the electronic component W along the transport path 2, stops at least each of the units 3, 41, 42, 5, 6, and 7, and stops each unit 3, 41, 42, 5 , 6 and 7 cause the electronic component W to be processed.
  • Two electrical characteristic measurement units 41 are provided, and one stop position 24 is provided, and each is arranged at the stop position 24.
  • the stop position 24 adjacent to each of the two electrical property measurement units 41 is a retreat position 41a of the chuck 22 in the electrical property measurement time zone, and the unit is not disposed.
  • the retreat position 41 a is set on the downstream side in the transport direction of the electrical characteristic measurement unit 41.
  • the appearance inspection unit 42, the inspection support unit 5 and the storage unit 7 are arranged at any one of the stop positions 24 counted from the retreat position 41a.
  • the supply unit 3 and the discharge container 6 are arranged at any one stop position 24 counted from the arrangement position of the electrical characteristic measurement unit 41. That is, when the stop position 24 is provided at an even number, the appearance inspection unit 42, the inspection support unit 5, and the housing unit 7 are placed at the odd-numbered stop position 24 counted from the electrical characteristic measurement unit 41 at the supply unit 3 and the discharge container 6. Are arranged at even-numbered stop positions 24.
  • the supply unit 3 supplies the electronic component W to the transport path 2.
  • the supply unit 3 is a unit that does not perform processing on the electronic component W, such as a sliding movement device, a tray movement device, or a wafer holder device.
  • the sliding movement device aligns and conveys a large number of electronic components W accommodated in a mortar-like container and moves them to the entrance of the conveyance path 2.
  • the tray moving device moves the tray in two orthogonal axes.
  • the tray is partitioned in a lattice shape, and the electronic component W is accommodated in each lattice.
  • the electronic components W in each lattice are moved to the entrance of the transport path 2 by moving the tray in the two orthogonal axes along the spreading plane of the tray.
  • the wafer holder device moves the wafer ring in two orthogonal axes.
  • the wafer ring is formed by arranging electronic components W in an array.
  • Each electronic component W is moved to the entrance of the conveyance path 2 by moving the wafer ring in two orthogonal axes along the spreading plane of the wafer ring.
  • a rotary pickup that relays the electronic component W may be installed between the supply unit 3 and the transport path W.
  • the discharge container 6 is a unit that only receives the electronic component W whose test result is not good and does not process the electronic component W. Moreover, the accommodation unit 7 accommodates the electronic component W whose test result is good.
  • the accommodation unit 7 is, for example, a taping device, a tube device, a tray moving device, a wafer holder device, or the like, and is a unit that includes a determination process of whether accommodation is appropriate.
  • the taping device is a device for running a tape in which pockets are arranged along the longitudinal direction of the band, and moves each pocket to the exit of the conveyance path 2.
  • the tube device moves a tube that accommodates the electronic component W.
  • the inspection support unit 5 performs a process of correcting the posture of the electronic component W to be inspected in advance in order to improve inspection accuracy.
  • the inspection support unit 5 has an XY ⁇ stage on which the electronic component W is placed.
  • the XY ⁇ stage moves in two orthogonal axes along the stage plane, and rotates on an axis perpendicular to the stage plane.
  • the inspection support unit 5 corrects the orientation and position of the electronic component W by placing the electronic component W passed from the transport path 2 on the XY ⁇ stage and moving and rotating the XY ⁇ stage.
  • the inspection support unit 5 includes a camera that images the electronic component W, and analyzes the direction and position of the electronic component W in the image to control the movement amount and the rotation amount of the XY ⁇ stage.
  • the appearance inspection unit 42 photographs the electronic component W with a camera, analyzes the image of the electronic component W, and detects the presence or absence of scratches or dirt on the surface.
  • A is the measurement time by the electrical characteristic measurement unit 41
  • B is the longest processing time by the appearance inspection unit 42, the inspection support unit 5 and the storage unit 7.
  • a ⁇ B> C is, in general, the measurement time by the electrical characteristic measurement unit 41 is long.
  • Supply and discharge of the electronic component W to the transport path 2 are completed in a relatively short time.
  • the appearance inspection of the electronic component W, the posture correction of the electronic component W, and the accommodation of the electronic component W take longer than the supply and discharge to the transport path 2, but do not reach the measurement time by the electrical characteristic measurement unit 41.
  • the units 42, 5 and 7 that complete the processing in such a medium time B are arranged at every other stop position 24 counted from the retreat position 41a.
  • the units 3 and 6 that complete processing in a short time C are arranged at every other stop position 24 counting from the arrangement position of the electrical characteristic measurement unit 41.
  • the units that complete processing in the short time C may be arranged at every other stop position 24 counting from the retreat position 41a.
  • the electronic component transport apparatus 1 is configured such that the electronic components W whose electrical characteristics have not been measured are arranged in the two electrical characteristics measuring units 41 (in the drawings, from stage (a) to stage (d).
  • the electronic component W is placed on the stage / lower stage 412 (step (e) in the figure).
  • the chuck 22 is interposed between the upper contact 411 and the stage / lower contact 412 of each electrical characteristic measurement unit 41 (step (e) in the figure).
  • both chucks 22 on which the electronic component W is placed move one pitch and move to the retreat position 41a (step (f) in the figure).
  • the chuck 22 is separated from the space between the upper contact 411 and the stage / lower contact 412 of each electrical characteristic measurement unit 41, and the structure is not interposed except for the electronic component W (in the drawing).
  • the electrical characteristic measuring unit 41 starts measuring electrical characteristics when both chucks 22 have moved to the retracted position 41a (step (g) in the figure).
  • the electrical characteristic measuring unit 41 brings the upper contact 411 closer to the stage / lower contact 412, contacts the upper surface electrode with the upper contact 411, and contacts the lower electrode with the stage / lower contact 412, Voltage application is started and an output signal from the electronic component W is analyzed.
  • step (h ) When the measurement of the electrical characteristics is completed, the upper contacts 411 are raised, and both chucks 22 on which the electronic component W is placed move back by one pitch and move from the retracted position 41a to the electrical characteristics measurement unit 41 (step (h )), Receiving the electronic component W whose electrical characteristics have been measured (step (i) in the figure). Then, the chuck 22 holding the electronic component W for which the measurement of electrical characteristics has been completed moves away from the electrical characteristics measurement unit 41 (step (j) in the figure).
  • the electrical characteristics of the electronic component W are measured.
  • the turret table 21 repeats a rotation routine for moving the chuck 22 forward by 3 pitches and then retracting it by 1 pitch.
  • one rotation routine is composed of 2N + 1 forward movements and one backward movement.
  • each stop time included in this rotation routine is different.
  • the first type of stop time when the leading chuck 22A holding the electronic component W whose electrical characteristics have not been measured arrives at the first electrical property measuring unit 41 is as follows. This is the shortest time C that can be supplied to or discharged from the transport path 2.
  • the leading chuck 22A arrives at the first electrical characteristic measuring unit 41, the leading chuck 22A keeps holding the electronic component W while still.
  • the other chuck 22B arrives at the supply unit 3, and the other chucks 22F and 22G arrive at the discharge container 6, and pick up the electronic component W and discharge the electronic component W, respectively. That is, the shortest stop time is the later of the series of steps of lowering the chuck 22B, holding the electronic component, and raising the chuck 22B, or detaching the electronic component W by the chucks 22F and 22G. In general, the series of steps of the chuck 22B is slower.
  • the inspection support unit 5, the appearance inspection unit 42, and the accommodation unit 7 on the transport path 2 are installed at every other stop position 24 counting from the retreat position 41 a adjacent to the electrical characteristic measurement unit 41. Since these units 5, 42, 7 do not operate, the first type of stop time is not restricted by the processing time of these units 5, 42, 7.
  • the second type of stop time at this timing is the longest time of the inspection support unit 5, the appearance inspection unit 42, or the housing unit 7, and is a time B shorter than the measurement time of the electrical characteristics.
  • the other chucks 22B, 22G, and 22F arrive at the inspection support unit 5, the appearance inspection unit 52, and the housing unit 7 while holding the electronic component W.
  • the inspection support unit 5 the chuck 22B is lowered, the electronic component W is detached from the XY ⁇ stage, the chuck 22B is raised, the XY ⁇ stage is changed, the chuck 22B is lowered again, the electronic component W is picked up from the XY ⁇ stage, and A series of steps for re-raising the chuck 22B is performed.
  • the appearance inspection unit 42 the electronic component W is imaged.
  • a series of steps of lowering the chuck 22 ⁇ / b> F, detaching the electronic component W to the housing location, inspecting the success or failure of proper housing, and raising the chuck 22 ⁇ / b> F are performed.
  • Each of these series of processes takes longer than the shortest time C, and the stop time B is the longest time of each series of these processes.
  • the second type of stop time has elapsed, and the chuck 22 again moves one pitch as shown in FIG. Then, the pair of chucks 22 ⁇ / b> A and 22 ⁇ / b> B holding the electronic component W whose electrical characteristics are not measured arrives at each electrical characteristic measurement unit 41.
  • the stop time at this timing may be the same as the first type stop time.
  • the pair of chucks 22 ⁇ / b> A and 22 ⁇ / b> B only places the electronic component W on the electrical property measurement unit 41, and the process by the electrical property measurement unit 41 is not performed.
  • none of the chucks 22 has arrived at the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7.
  • the pickup of the electronic component W from the supply unit 3 need not be executed. This is because the same situation occurs at the second stop timing. Rather than picking up the electronic component W at this timing, picking up the electronic component W at the second stop timing reduces the number of intermittent movements of the electronic component W in the transport path 2, resulting in sudden stop and acceleration. Since the number of times of receiving the inertial force is reduced, the possibility that the electronic component W is displaced is reduced.
  • the third type of stop time is This is the longest time A in which electrical characteristics can be measured.
  • the chucks 22A and 22B on which the electronic component W is placed on the stage / lower contact 412 are present at the retracted position 41a, so that a structure is formed between the upper contact 411 and the stage / lower contact 412.
  • the body is absent, and the upper contact 411 is lowered to be able to contact the upper electrode.
  • the electrical characteristics are measured at this timing.
  • the chucks 22 ⁇ / b> C, 22 ⁇ / b> H, and 22 ⁇ / b> G arrive at the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7 while holding the electronic component W. Therefore, inspection support, appearance inspection, and accommodation are also performed at this timing.
  • these inspection support, appearance inspection, and accommodation are shorter than the measurement of electrical characteristics, the longest time A is stopped at this timing.
  • the third type of stop time accompanied by the measurement of the electrical characteristics has elapsed, and the chucks 22A and 22B are moved back to the electrical characteristics measurement unit 41 again as shown in FIG. Then, the chucks 22 ⁇ / b> A and 22 ⁇ / b> B hold the electronic component W whose electrical characteristics have been measured again.
  • the stop time at this timing may be the same as the first type stop time.
  • the pair of chucks only picks up the electronic component W from the electrical characteristic measurement unit 41. Further, only the electronic component W that has been subjected to the inspection support and the appearance inspection is returned to the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7.
  • the chuck 22C may be picked up at this timing.
  • the electronic component transport apparatus 1 may adopt a chuck outer periphery type rotary transport system in which the turret table 21 constituting the transport path 2 has the same radius over the entire circumference.
  • the chucks 22 that hold the electronic components W are extended horizontally in the radial direction toward the outside of the table.
  • the upper contact 411 is disposed above the stage / lower contact 412 on which the electronic component W is placed by the chuck 22, only the chuck 22 is interposed between the stage / lower contact 412 and the upper contact 411. Since the upper contact 411 and the turret table 21 do not come into contact with each other, the electronic component W can be placed on the stage / lower contact 412.
  • the chuck 22 is provided on the outer edge of the turret table 21 at a pitch twice the intermittent rotation angle of the turret table 21, and a retracting position 41 a for retracting the chuck 22 is set next to the stage / lower contact 412 and the upper contact 411. did.
  • the upper contact 411 can be lowered to contact the upper surface electrode of the electronic component W without being obstructed by the chuck 22.
  • the electrical characteristic measuring unit 41 is provided.
  • the turret table 21 can be installed in the transport path 2, and the electrical characteristics of the electronic component W having double-sided electrodes can be measured on the transport path 2. That is, it is possible to measure the electrical characteristics of the electronic component W having double-sided electrodes on the transport path 2 configured only by the chuck outer periphery type rotary transport format. Therefore, the electronic component W having double-sided electrodes can be processed by high-speed conveyance, which is an advantage of the rotary conveyance type, and production efficiency is improved.
  • the turret table 21 may be absent between the stage and the lower contact 412 and the upper contact 411 between the arms.
  • the electronic component conveying apparatus 1 includes an advance / retreat driving unit 25 that lowers the chuck 22 toward the stage / lower contact 412 in order to place the electronic component W on the stage / lower contact 412. May be fixedly installed above the trajectory through which the outermost diameter portion passes. Also in this case, by making the chuck 22 extend radially toward the outside of the table, the upper contact 411 and the advance / retreat drive unit 25 are not contacted, and the electronic component W is placed on the stage / lower contact 412. Can be placed.
  • the electronic component W having double-sided electrodes can be measured by the transport path 2 configured only by the rotational transport type. Therefore, the electronic component W having double-sided electrodes can be processed by high-speed conveyance, which is an advantage of the rotary conveyance type, and production efficiency is improved.
  • a stage is installed on the lower side and a structure is arranged facing the stage.
  • a structure is arranged facing the stage.
  • it is desired to take an image of an electronic component with a camera from directly above the stage that is, in addition to the upper contact 411, other structures such as a laser marking device and a camera may exist above the stage. Even when it is necessary to dispose such a structure other than the upper contact 411 above the stage, the electronic component transport apparatus 1 needs to be temporarily detached from the transport path 2 configured by the turret table 21.
  • the action of the structure can be imparted to the electronic component W on the conveyance path 2 constituted by the turret table 21, and the high-speed conveyance that is the advantage of the rotary conveyance type can be exhibited, and the production efficiency can be improved.
  • the retreat position 41a may be disposed next to the downstream side in the transport direction as viewed from the electrical characteristic measurement unit 41, or may be disposed next to the upstream side in the transport direction.
  • the chuck 22 may be an electrostatic chuck, a Bernoulli chuck, or a chuck that has a pinch and is mechanically pinched.
  • the groups of every other stop position 24 counted from the electrical characteristic measuring unit 41 and the retracted position 41a are counted. Every other stop position 24 group.
  • the processing units 5, 42, and 7 of processing different from the electrical characteristic measuring unit 41 are arranged at every other stop position 24 counted from the retreat position 41a.
  • the stop time when the chuck 22 with the electronic component W placed on the electrical property measurement unit 41 is present at the retracted position 41a is C due to the regulation of electrical property measurement.
  • the electronic component transport apparatus 1 when the C is stopped for a long time due to the measurement of the electrical characteristics, other processing can be performed by the processing units 5, 42, and 7 in which the other chucks 22 are stopped. In other words, at the timing when only the electronic component W is placed on the electrical characteristic measurement unit 41, other processing is not performed, and the stop time at this timing can be shortened. Even when the measurement of electrical characteristics is included in the inspection item, the transportation of the electronic component W by the electronic component transportation apparatus 1 can be further speeded up, and the production efficiency can be further improved.
  • an appearance inspection unit 42 that inspects the appearance of the electronic component W
  • an inspection support unit 5 that corrects the attitude of the electronic component W
  • a storage unit that stores the electronic component W and determines the appropriateness of the storage. 7 was mentioned.
  • a processing unit that performs processing that takes more time than picking up and discharging the electronic component W it may be placed at every other stop position 24 counting from the retreat position 41a.
  • each electrical property measuring unit 41 is installed at any one of the other stop positions 24 counted from one electrical property measuring unit 41, and the retracted position 41a. Is provided next to each electrical characteristic measuring unit 41. In this aspect, it is possible to measure the electrical characteristics at a time after the electronic components W are aligned in all the electrical characteristics measuring units 41.
  • the electrical property measuring unit 41 is not limited to two devices, and a plurality of devices can be installed, and the number of occurrences of electrical property measurement is reduced in inverse proportion to the number of installed devices, thereby improving the transport speed of the electronic component W. Can do. Further, even if the processing unit is other than the electrical characteristic measurement unit 41, a plurality of the same type may be installed, and the processing may be performed after the electronic components W are arranged in all the processing units.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

Provided is a rotary-transport-system electronic component transporting device of a type in which chucks are provided to the outer circumference, wherein a stage and a structure can be arranged in opposition to one another across a transporting path without losing the advantage of high-speed transportation. This electronic component transporting device comprises: a turret table 21 that has a circular shape having the same radius over the entire circumference; and an advancement/retraction drive unit 25 that is fixed and installed above a path over which the outermost radial part of the turret table 21 passes, and that lowers a chuck 22 toward a stage/lower-side contact 412. An upper-side contact 411 is provided above the stage/lower-side contact 412 so as to oppose the same while leaving room for the entry of the chuck 22. The chucks 22 are provided to the outer edge of the turret table 21 at a pitch that is twice the angle of rotation of a single pitch of the table, and are extended horizontally toward the outer side of the table. Among halt positions 24, a retraction position 41a for the chuck 22 is set adjacent to the stage/lower-side contact 412 and the upper-side contact 411.

Description

電子部品搬送装置Electronic component conveyor
　本発明は、電子部品を搬送する電子部品搬送装置に関する。 The present invention relates to an electronic component transport apparatus that transports electronic components.
　電子部品は、製造過程で各種検査項目を受検し、良品がスクリーニングされて出荷のために複数纏めて梱包される。検査項目は、代表的には電気特性の測定である。電気特性は、電子部品の電圧、電流、抵抗、周波数、又はロジック信号に対する応答である。電気特性の測定では、電子部品の電極にコンタクトと呼ばれる通電接触子を当て、電流注入、電圧印加、又はロジック信号の入力を行う。そして、出力を解析して良品判定する。 ¡Electronic components undergo various inspection items during the manufacturing process, and non-defective products are screened and packed together for shipment. The inspection item is typically measurement of electrical characteristics. An electrical characteristic is a response to a voltage, current, resistance, frequency, or logic signal of an electronic component. In the measurement of electrical characteristics, a current-carrying contact called a contact is applied to an electrode of an electronic component, and current injection, voltage application, or logic signal input is performed. Then, the output is analyzed to determine a non-defective product.
　表裏両面に外部接続用の電極を備えた電子部品がある。例えば、高電圧又は大電流をスイッチングするパワー半導体素子として用いられる絶縁ゲート型バイポーラトランジスタ、ＳｉＣバイポーラトランジスタ等である。両面電極を有する電子部品に対する電気特性測定ユニットは、間隔を隔ててステージ兼下側コンタクトと上側コンタクトを対向配置し、上側コンタクトを下降可能としている。ステージ兼下側コンタクトは、電子部品を載置し、また下面電極に電気的に接触する（例えば、特許文献１参照）。 There are electronic parts with electrodes for external connection on both sides. For example, an insulated gate bipolar transistor or SiC bipolar transistor used as a power semiconductor element for switching high voltage or large current. In an electrical characteristic measurement unit for an electronic component having a double-sided electrode, a stage-cum-lower contact and an upper contact are arranged opposite to each other at an interval so that the upper contact can be lowered. The stage / lower contact places an electronic component and makes electrical contact with the lower electrode (see, for example, Patent Document 1).
　また、電子部品は、各種検査項目を受検するために、トレイやウェハから取り出されて搬送されるが、この搬送の用途として代表的には回転搬送方式の電子部品搬送装置がある。中でも、ターレットテーブルの外周に吸着チャック等を円周等配位置で配置し、ターレットテーブルの間欠的な回転によって電子部品を整列搬送するチャック外周設置型回転搬送方式の電子部品搬送装置がある（例えば、特許文献２参照。）。このチャック外周設置型回転搬送方式は、回転搬送方式による高速搬送を達成しつつ、チャックによって自力で搬送経路への電子部品の受け入れ及び排出が可能となる利点がある。 In addition, electronic components are taken out from a tray or wafer and transported in order to receive various inspection items. A typical example of this transporting application is a rotating transport electronic component transporting device. Among them, there is an electronic component conveying apparatus of a chuck outer periphery type rotational conveying system in which suction chucks and the like are arranged on the outer periphery of the turret table at equal circumferential positions and the electronic components are aligned and conveyed by intermittent rotation of the turret table (for example, , See Patent Document 2). This chuck outer peripheral installation type rotary conveyance method has an advantage that electronic components can be received and discharged from the conveyance path by the chuck by itself while achieving high-speed conveyance by the rotation conveyance method.
　この電子部品搬送装置は、ターレットテーブルが構成する搬送経路に沿って各検査項目のユニットを配置することで、電子部品搬送装置は、電子部品を搬送しながら各検査項目を受検させる。各ユニットは、ターレットテーブルの間欠回転によるチャックの停止位置直下に配置され、チャックは、降下により各ユニットに電子部品を載置し、電子部品に検査項目を受検させる。すなわち、各停止位置の直上、換言するとユニットのステージ直上には、チャックを押し下げる進退駆動部が不動設置されている。 This electronic component transport device arranges each inspection item unit along the transport path formed by the turret table, so that the electronic component transport device receives each inspection item while transporting the electronic component. Each unit is arranged immediately below the chuck stop position due to intermittent rotation of the turret table, and the chuck places electronic components on each unit by lowering and causes the electronic components to receive inspection items. That is, an advancing / retreating drive unit that pushes down the chuck is fixedly installed immediately above each stop position, in other words, immediately above the stage of the unit.
特開２０１０－２７６６２１号公報JP 2010-276621 A 特開２０１０－１３５３９８号公報JP 2010-135398 A
　チャック外周設置型回転搬送方式の電子部品搬送装置は、高速搬送と搬送経路への自力供給及び排出により、電子部品の生産効率の飛躍的な向上をもたらした。しかし、従来、この電子部品搬送装置が形成する搬送経路には、両面電極の電子部品の電気特性を測定する電気特性測定ユニットを組み入れることはできなかった。 The chuck outer peripheral type rotary conveyance type electronic component conveyance device has dramatically improved the production efficiency of electronic components by high-speed conveyance and self-supply and discharge to the conveyance path. However, conventionally, an electrical characteristic measuring unit for measuring electrical characteristics of the electronic components of the double-sided electrode cannot be incorporated in the transport path formed by the electronic component transport apparatus.
　すなわち、ターレットテーブルは、円盤形状を有し、外縁にチャックを備える。チャックの停止位置の直下に電気特性測定ユニットのステージを配置しようとすると、上側コンタクトとステージ兼下側コンタクトの間にターレットテーブルの外縁が常在する。そのため、上側コンタクトはステージ兼下側コンタクトに載置された電子部品に向けて降下することができないからである。 That is, the turret table has a disk shape and has a chuck on the outer edge. When the stage of the electrical characteristic measurement unit is arranged immediately below the chuck stop position, the outer edge of the turret table always exists between the upper contact and the stage / lower contact. Therefore, the upper contact cannot be lowered toward the electronic component placed on the stage / lower contact.
　また、チャックの停止位置には、ターレットテーブルの外縁のほか、進退駆動部が不動に設置されている。チャック下端から進退駆動部の上端までの高さは、上側コンタクトとステージ兼下側コンタクトとの間の空間の高さを超える。そのため、上側コンタクトとステージ兼下側コンタクトを対向配置する電気特性測定ユニットを搬送経路に配置することが物理的に不可能である。たとえ上側コンタクトとステージ兼下側コンタクトとの間を拡げても、進退駆動部とターレットテーブルとが常在すれば、上側コンタクトを降下させることができない。 In addition, in addition to the outer edge of the turret table, the advancing / retreating drive unit is fixedly installed at the chuck stop position. The height from the lower end of the chuck to the upper end of the advance / retreat driving unit exceeds the height of the space between the upper contact and the stage / lower contact. For this reason, it is physically impossible to dispose an electrical characteristic measurement unit in which the upper contact and the stage / lower contact are disposed opposite to each other in the transport path. Even if the space between the upper contact and the stage / lower contact is expanded, the upper contact cannot be lowered if the forward / backward drive unit and the turret table are always present.
　チャック外周設置型回転搬送方式の電子部品搬送装置が構成する搬送経路から一時的に電子部品をアンロードして、当該搬送経路と電気特性測定ユニットとの間をシャトル等で電子部品を往復させることが考え得る。しかしながら、シャトルの往復をターレットテーブルの高速な搬送速度に合わせることは困難であり、この方式を採用すると、シャトルの搬送速度に電子部品搬送装置の動き全てが律速されてしまう。すなわち、チャック外周設置型回転搬送方式の電子部品搬送装置が持つ高速搬送という利点が失われてしまう。 An electronic component is temporarily unloaded from a conveyance path constituted by an electronic component conveyance apparatus of a chuck outer peripheral type rotary conveyance method, and the electronic component is reciprocated between the conveyance path and the electrical characteristic measurement unit by a shuttle or the like. Can be considered. However, it is difficult to match the shuttle's reciprocation with the high speed of the turret table. If this method is adopted, all the movements of the electronic component transport device are limited by the shuttle speed. In other words, the advantage of high-speed conveyance that the chuck outer peripheral type rotary conveyance type electronic component conveyance device has is lost.
　本発明は、上記のような問題点を解決するために提案されたもので、チャック外周設置型回転搬送方式の電子部品搬送装置において高速搬送の利点を失うことなく、両面電極の電子部品の電気特性を測定可能とすることを目的とする。 The present invention has been proposed in order to solve the above-described problems. In the electronic device conveying apparatus of the chuck outer periphery type rotary conveying method, the electric components of the double-sided electrode electronic component are not lost without losing the advantage of high-speed conveying. The purpose is to make it possible to measure characteristics.
　また、電気特性測定ユニットのほかにも、ステージと構造物とを搬送経路を挟んで対向配置させなくてはならない場合には、同様にチャック外周設置型回転搬送方式の電子部品搬送装置に組み入れることが困難であろう。そこで、本発明は、更に、チャック外周設置型回転搬送方式の電子部品搬送装置において高速搬送の利点を失うことなく、ステージと構造物とを搬送経路を挟んで対向配置させることのできる電子部品搬送装置を提供することを目的とする。 In addition to the electrical property measurement unit, if the stage and the structure must be placed facing each other across the transport path, it is also incorporated into a chuck outer peripheral type rotary transport system electronic component transport device. Will be difficult. Accordingly, the present invention further provides an electronic component transfer that can arrange the stage and the structure opposite to each other across the transfer path without losing the advantages of high-speed transfer in an electronic component transfer apparatus of the chuck outer periphery type rotary transfer method. An object is to provide an apparatus.
　本発明に係る電子部品搬送装置の第１の態様は、電子部品を搬送する電子部品搬送装置であって、全周に亘って同一半径を有する円形状を有し、円周方向に所定回転角ずつ間欠的に回転するターレットテーブルと、前記ターレットテーブルの外縁に前記回転角の２倍角のピッチで設けられ、放射状にテーブル外側に向かって水平に延び、電子部品を保持するチャックと、前記ターレットテーブルと中心を同一とする円周上に、前記ターレットテーブルの前記回転角で分割した各点に設定され、前記チャックが停止する各停止位置と、前記チャックの各停止位置の少なくとも一箇所に配置され、前記チャックにより電子部品が載置されるステージと、前記ステージの上方に前記チャックが入り込む余地を空けて対向配置される構造体と、前記チャックの停止位置のうち、前記ステージ及び前記構造体の隣に設定され、前記ステージで電子部品が処理される間、前記チャックが前記ステージと前記構造体から退避する退避位置と、を備えること、を特徴とする。 A first aspect of an electronic component conveying apparatus according to the present invention is an electronic component conveying apparatus that conveys an electronic component, has a circular shape having the same radius over the entire circumference, and has a predetermined rotation angle in the circumferential direction. A turret table that rotates intermittently, a chuck that is provided at an outer edge of the turret table at a pitch that is twice the rotation angle, and that extends radially toward the outside of the table and holds electronic components; and the turret table Are set at respective points divided by the rotation angle of the turret table on the same circumference and are arranged at at least one of the stop positions where the chuck stops and the stop positions of the chuck. A stage on which an electronic component is placed by the chuck; a structure that is disposed to face the space above the stage with a space for the chuck to enter; A retreat position that is set next to the stage and the structure, and the chuck is retreated from the stage and the structure while an electronic component is processed on the stage, among the stop positions of the back; It is characterized by.
　また、本発明に係る電子部品搬送装置の第２の態様は、電子部品を搬送する電子部品搬送装置であって、円周方向に所定回転角ずつ間欠的に回転するターレットテーブルと、前記ターレットテーブルの外縁に前記回転角の２倍角のピッチで設けられ、放射状にテーブル外側に向かって水平に延び、電子部品を保持するチャックと、前記ターレットテーブルと中心を同一とする円周上に、前記ターレットテーブルの前記回転角で分割した各点に設定され、前記チャックが停止する各停止位置と、前記チャックの各停止位置の少なくとも一箇所に配置され、前記チャックにより電子部品が載置されるステージと、前記ターレットテーブルの最外径部が通る軌跡の上方に固定設置され、前記チャックを前記ステージに向けて降下させる進退駆動部と、前記ステージの上方に前記チャックが入り込む余地を空けて対向配置される構造体と、前記チャックの停止位置のうち、前記ステージ及び前記構造体の隣に設定され、前記ステージで電子部品が処理される間、前記チャックが前記ステージと前記構造体から退避する退避位置と、を備えること、を特徴とする。 A second aspect of the electronic component transport apparatus according to the present invention is an electronic component transport apparatus for transporting an electronic component, the turret table rotating intermittently at a predetermined rotation angle in the circumferential direction, and the turret table. On the outer edge of the turret, the chuck is provided at a pitch of twice the rotation angle, extends radially toward the outside of the table and holds an electronic component, and a circle having the same center as the turret table. A stage set at each point divided by the rotation angle of the table and arranged at at least one of the stop positions where the chuck stops and each stop position of the chuck; An advancing / retreating drive unit that is fixedly installed above a trajectory through which the outermost diameter portion of the turret table passes and lowers the chuck toward the stage A structure that is disposed opposite to the chuck above the stage with a space for the chuck to enter, and a position where the chuck is stopped is set next to the stage and the structure, and an electronic component is processed on the stage. The chuck includes a retreat position for retracting the stage from the stage and the structure.
　前記退避位置から数えて一つ置きの前記停止位置の少なくとも一箇所に配置され、前記ステージでの処理とは異なる処理の処理ユニットを更に備えるようにしてもよい。 A processing unit of processing different from the processing at the stage may be further provided at at least one place of the other stopping positions counted from the retracted position.
　前記各停止位置は、前記ステージ及び前記構造体の設置位置から数えて一つ置きの少なくとも一箇所であり、前記チャックが電子部品をピックアップ又は離脱させるのみの前記異なる処理を行わない第１種の停止位置と、前記退避位置から数えて一つ置きの少なくとも一箇所であり、前記第１種の停止位置でのピックアップ又は離脱に要する時間以上、前記ステージでの処理時間未満の前記異なる処理が行われる第２種の停止位置と、を含むようにしてもよい。 Each stop position is at least one other place counted from the installation position of the stage and the structure, and the chuck does not perform the different processing only for picking up or removing the electronic component. The different processing is performed at least every other place counted from the stop position and the retreat position, and the time is longer than the time required for pickup or separation at the first type stop position and less than the processing time on the stage. And a second type of stop position.
　前記ステージと前記構造体の組を複数備え、各組は、一の組から数えて一つ置きの前記停止位置の何れかに設置され、前記退避位置は、前記各組の各隣に有するようにしてもよい。 A plurality of sets of the stage and the structure are provided, and each set is installed at any one of the stop positions counted from one set, and the retreat position is provided next to each set. It may be.
　両面電極を有する電子部品の電気特性を測定する電気特性測定ユニットを備え、前記電気特性測定ユニットは、電子部品が載置されるとともに電子部品の下面電極と接触する通電接触子を有する前記ステージと、前記ステージに載置される電子部品の上面電極と接触する通電接触子である前記構造体と、を備えるようにしてもよい。 An electrical property measuring unit for measuring electrical properties of an electronic component having double-sided electrodes, and the electrical property measuring unit has the current-carrying contactor on which the electronic component is placed and in contact with the lower surface electrode of the electronic component; The structure may be a current-carrying contact that contacts an upper surface electrode of an electronic component placed on the stage.
　前記構造体は、前記ステージの電子部品に向けて下降するとともに、下降からの復帰位置では、前記チャックが入り込む余地を空けて静止するようにしてもよい。 The structure may be lowered toward the electronic components of the stage, and at a return position from the lowered position, the structure may be left still with room for the chuck to enter.
　前記異なる処理の処理ユニットは、電子部品の外観を検査する外観検査ユニット、電子部品の姿勢を補正する検査支援ユニット、又は電子部品を収容するとともに収容の適正を判定する収容ユニットであるようにしてもよい。 The processing unit of the different processing is an appearance inspection unit that inspects the appearance of the electronic component, an inspection support unit that corrects the attitude of the electronic component, or a storage unit that stores the electronic component and determines the appropriateness of the storage. Also good.
　前記チャックは、前記ターレットテーブルから下方に延びて途中で水平方向に屈曲するＬ字形状を有し、前記屈曲位置は、前記構造体と前記ステージとの間の高さに設けられるようにしてもよい。 The chuck has an L shape that extends downward from the turret table and bends horizontally in the middle, and the bending position is provided at a height between the structure and the stage. Good.
　本発明によれば、ステージと構造物とを電子部品の搬送経路を挟んで対向配置することができるため、電子部品の高速搬送性を失うことなく、該ステージと構造物とによる電子部品への処理が可能となる。 According to the present invention, the stage and the structure can be arranged to face each other across the transport path of the electronic component. Therefore, without losing the high-speed transportability of the electronic component, the stage and the structure can be attached to the electronic component. Processing is possible.
本実施形態に係る電気特性測定ユニットの側面図である。It is a side view of the electrical property measurement unit concerning this embodiment. 本実施形態に係る電子部品搬送装置の全体構成を示す図である。It is a figure which shows the whole structure of the electronic component conveying apparatus which concerns on this embodiment. 本実施形態に係る電子部品搬送装置を側面から見た部分拡大図である。It is the elements on larger scale which looked at the electronic component conveying apparatus concerning this embodiment from the side. 本実施形態に係る電子部品の電気特性の測定のルーチン前半を示す遷移図である。It is a transition diagram which shows the routine first half of the measurement of the electrical property of the electronic component which concerns on this embodiment. 本実施形態に係る電子部品の電気特性の測定のルーチン後半を示す遷移図である。It is a transition diagram which shows the routine latter half of the measurement of the electrical property of the electronic component which concerns on this embodiment. 本実施形態に係る他のチャックの状態と各停止時間を示し、（ａ）は第１の状態を示す状態図であり、（ｂ）は第１の状態の停止時間を示すタイムチャートである。The state of each other chuck | zipper and each stop time which concern on this embodiment are shown, (a) is a state diagram which shows a 1st state, (b) is a time chart which shows the stop time of a 1st state. 本実施形態に係る他のチャックの状態と各停止時間を示し、（ａ）は第２の状態を示す状態図であり、（ｂ）は第２の状態の停止時間を示すタイムチャートである。The state of each other chuck | zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 2nd state, (b) is a time chart which shows the stop time of a 2nd state. 本実施形態に係る他のチャックの状態と各停止時間を示し、（ａ）は第３の状態を示す状態図であり、（ｂ）は第３の状態の停止時間を示すタイムチャートである。The state of each other chuck | zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 3rd state, (b) is a time chart which shows the stop time of a 3rd state. 本実施形態に係る他のチャックの状態と各停止時間を示し、（ａ）は第４の状態を示す状態図であり、（ｂ）は第４の状態の停止時間を示すタイムチャートである。The state of each other chuck | zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 4th state, (b) is a time chart which shows the stop time of a 4th state. 本実施形態に係る他のチャックの状態と各停止時間を示し、（ａ）は第５の状態を示す状態図であり、（ｂ）は第５の状態の停止時間を示すタイムチャートである。The state of each other chuck | zipper and each stop time which concern on this embodiment are shown, (a) is a state figure which shows a 5th state, (b) is a time chart which shows the stop time of a 5th state.
　(電気特性測定ユニット)
　はじめに、本実施形態に係る電子部品搬送装置が備える電気特性測定ユニットについて図１を参照しつつ詳細に説明する。図１に示すように、電気特性測定ユニット４１は、電子部品Ｗの電気特性を測定する。この電気特性測定ユニット４１は、電子部品Ｗの電極に電気的に接触し、電子部品Ｗに電圧印加又は電流注入を行い、電気特性を検査する。電気特性は、電子部品Ｗへの電流注入又は電圧印加に対する電子部品Ｗの電圧、電流、抵抗、又は周波数、ロジック信号に対する出力信号等である。 (Electrical characteristic measurement unit)
First, an electrical property measurement unit provided in the electronic component transport device according to the present embodiment will be described in detail with reference to FIG. As shown in FIG. 1, the electrical characteristic measurement unit 41 measures electrical characteristics of the electronic component W. The electrical characteristic measurement unit 41 is in electrical contact with the electrodes of the electronic component W, applies voltage or current injection to the electronic component W, and inspects the electrical characteristics. The electrical characteristics include the voltage, current, resistance, or frequency of the electronic component W with respect to current injection or voltage application to the electronic component W, an output signal with respect to a logic signal, and the like.
　電子部品Ｗは、電気製品に使用される部品であり、半導体素子等がパッケージングされてなる。半導体素子としては、トランジスタやダイオードやコンデンサや抵抗等のディスクリート半導体や集積回路等が挙げられる。この電子部品Ｗは、表裏両面に外部接続用の電極を備えた両面電極パッケージを有する。 The electronic component W is a component used for an electric product, and a semiconductor element or the like is packaged. Examples of the semiconductor element include discrete semiconductors such as transistors, diodes, capacitors, resistors, and integrated circuits. This electronic component W has a double-sided electrode package provided with electrodes for external connection on both sides.
　両面電極を有する電子部品Ｗに対する電気特性測定ユニット４１は、ステージ兼下側コンタクト４１２と上側コンタクト４１１を備えている。ステージ兼下側コンタクト４１２は、電子部品Ｗが載置され、また通電接触子として電子部品Ｗの底面電極に電気的に接触する。ステージ兼下側コンタクト４１２は、電子部品Ｗを載置するステージと下面電極に接触する下側コンタクトを分離して有し、ステージの裏から下側コンタクトが挿入される場合もある。 The electrical property measurement unit 41 for the electronic component W having double-sided electrodes includes a stage / lower contact 412 and an upper contact 411. The stage / lower contact 412 has the electronic component W placed thereon, and electrically contacts the bottom electrode of the electronic component W as an energizing contact. The stage / lower contact 412 has a stage on which the electronic component W is placed and a lower contact in contact with the lower surface electrode, and the lower contact may be inserted from the back of the stage.
　上側コンタクト４１１は、電子部品Ｗの上面電極に接触する通電接触子である。上側コンタクト４１１は、ステージ兼下側コンタクト４１２よりも背の高い上側ベース４１３に支持されている。上側コンタクト４１１は、上側ベース４１３から電子部品Ｗの搬送経路２（図２参照）側へ張り出して支持され、ステージ兼下側コンタクト４１２の直上まで延出する。 The upper contact 411 is a current-carrying contact that contacts the upper surface electrode of the electronic component W. The upper contact 411 is supported by an upper base 413 that is taller than the stage / lower contact 412. The upper contact 411 protrudes from the upper base 413 toward the conveyance path 2 (see FIG. 2) side of the electronic component W, and extends to a position directly above the stage / lower contact 412.
　この上側コンタクト４１１は、昇降可能となっている。上側コンタクト４１１は、昇降によりステージ兼下側コンタクト４１２に対して接近及び離反する。すなわち、電気特性測定ユニット４１は、上側コンタクト４１１を昇降させる昇降駆動部４１４を備える。昇降駆動部４１４は、回転運動を上側コンタクト４１１の直線運動に変換する駆動源及び伝動機構のモジュールである。 The upper contact 411 can be moved up and down. The upper contact 411 approaches and separates from the stage / lower contact 412 by moving up and down. In other words, the electrical characteristic measurement unit 41 includes a lifting drive unit 414 that lifts and lowers the upper contact 411. The elevating drive unit 414 is a drive source and transmission mechanism module that converts rotational motion into linear motion of the upper contact 411.
　この昇降駆動部４１４は、引っ張りバネ４１５、モータ４１６、及びカム４１７とカムフォロア４１８からなる。引っ張りバネ４１５は、上側コンタクト４１１がステージ兼下側コンタクト４１２へ向かうように、上側ベース４１３を付勢する。モータ４１６は水平に延びる回転軸を有する。水平は、上側コンタクト４１１とステージ兼下側コンタクト４１２の並びと直交する方向である。カム４１７は、モータ４１６の回転軸に軸支され、扁平形状を有し、周面にカム面を構成している。カムフォロア４１８は、上側ベース４１３の底面に固定され、上側からカム４１７に当接し、カム面を従動する。 The elevating drive unit 414 includes a tension spring 415, a motor 416, a cam 417, and a cam follower 418. The tension spring 415 biases the upper base 413 so that the upper contact 411 moves toward the stage / lower contact 412. The motor 416 has a rotating shaft that extends horizontally. Horizontal is a direction orthogonal to the arrangement of the upper contact 411 and the stage / lower contact 412. The cam 417 is supported by the rotating shaft of the motor 416, has a flat shape, and forms a cam surface on the peripheral surface. The cam follower 418 is fixed to the bottom surface of the upper base 413, contacts the cam 417 from the upper side, and follows the cam surface.
　カムフォロア４１８がカム４１７の短径箇所に向けて従動すると、引っ張りバネ４１５の下方への付勢力が効いて、上側コンタクト４１１はステージ兼下側コンタクト４１２へ向けて下降する。カムフォロア４１８がカム４１７の長径箇所に向けて従動すると、上側コンタクト４１１は、引っ張りバネ４１５に抗して上方に持ち上げられ、ステージ兼下側コンタクト４１２から一定距離を保つように離れる。 When the cam follower 418 is driven toward the short diameter portion of the cam 417, the downward biasing force of the tension spring 415 is effective, and the upper contact 411 is lowered toward the stage / lower contact 412. When the cam follower 418 is driven toward the long diameter portion of the cam 417, the upper contact 411 is lifted upward against the tension spring 415, and is separated from the stage / lower contact 412 so as to maintain a constant distance.
　この電気特性測定ユニット４１は、ステージ兼下側コンタクト４１２に電子部品Ｗが載置されると、上側コンタクト４１１を下降させる。そして、ステージ兼下側コンタクト４１２を下面電極に接触させ、上側コンタクト４１１を上面電極に接触させ、電流注入、電圧印加、又はロジック信号の入力を行い、出力信号を解析する。 The electrical property measuring unit 41 lowers the upper contact 411 when the electronic component W is placed on the stage / lower contact 412. Then, the stage / lower contact 412 is brought into contact with the lower electrode, the upper contact 411 is brought into contact with the upper electrode, current injection, voltage application, or input of a logic signal is performed, and the output signal is analyzed.
　（電子部品搬送装置の構成）
　図２は、この電気特性測定ユニットを備える電子部品搬送装置の全体構成図である。図３は、電子部品搬送装置を側面から見た部分拡大図である。図２及び３に示す電子部品搬送装置１は、電気特性の測定を含む各種検査項目の測定のために電子部品Ｗを搬送する。この電子部品搬送装置１は、電子部品Ｗの搬送経路２を構成し、搬送経路２に沿って、各種のユニットを配置している。各種のユニットは、供給ユニット３、電気特性測定ユニット４１を含む各種の検査ユニット、検査支援ユニット５、排出容器６及び収容ユニット７である。本実施形態では、検査ユニットとして、更に外観検査ユニット４２を備える。 (Configuration of electronic component transport device)
FIG. 2 is an overall configuration diagram of an electronic component transport apparatus including the electrical characteristic measurement unit. FIG. 3 is a partially enlarged view of the electronic component transport device viewed from the side. 2 and 3 conveys an electronic component W for measurement of various inspection items including measurement of electrical characteristics. The electronic component transport apparatus 1 constitutes a transport path 2 for electronic components W, and various units are arranged along the transport path 2. The various units are a supply unit 3, various inspection units including an electrical characteristic measurement unit 41, an inspection support unit 5, a discharge container 6, and a storage unit 7. In the present embodiment, an appearance inspection unit 42 is further provided as an inspection unit.
　搬送経路２は、ターレットテーブル２１とチャック２２で構成される。ターレットテーブル２１は、水平方向に拡がり、全周に亘って同一半径を有する円形状の円盤である。ターレットテーブル２１の駆動源は、ダイレクトドライブモータ２３である。ダイレクトドライブモータ２３は、ターレットテーブル２１の底面に接続され、ターレットテーブル２１を支持するとともに、ターレットテーブル２１を円周方向に所定角度ずつ間欠的に回転させる。 The conveyance path 2 includes a turret table 21 and a chuck 22. The turret table 21 is a circular disk extending in the horizontal direction and having the same radius over the entire circumference. The drive source of the turret table 21 is a direct drive motor 23. The direct drive motor 23 is connected to the bottom surface of the turret table 21, supports the turret table 21, and intermittently rotates the turret table 21 by a predetermined angle in the circumferential direction.
　チャック２２は、ターレットテーブル２１の外縁に取り付けられる。そのため、チャック２２は、ターレットテーブル２１の間欠回転によって各停止位置２４に順次停止する。換言すると、停止位置２４は、ターレットテーブル２１と中心を同一とする円周上に、ターレットテーブル２１の１ピッチの回転角で分割した各点に設けられる。このチャック２２は、ターレットテーブル２１の外縁から水平に延出する。このチャック２２は、ターレットテーブル２１から離れた先端で電子部品Ｗを保持する。すなわち、搬送経路２は、チャック２２の先端が通る軌跡であり、ターレットテーブル２１の一回り外側に形成される。チャック２２の種類は特に限定はないが、チャック２２は例えば吸着チャックである。 The chuck 22 is attached to the outer edge of the turret table 21. Therefore, the chuck 22 sequentially stops at each stop position 24 by intermittent rotation of the turret table 21. In other words, the stop position 24 is provided at each point divided by the rotation angle of one pitch of the turret table 21 on the circumference having the same center as the turret table 21. The chuck 22 extends horizontally from the outer edge of the turret table 21. The chuck 22 holds the electronic component W at a tip away from the turret table 21. That is, the conveyance path 2 is a trajectory through which the tip of the chuck 22 passes, and is formed around the turret table 21. The type of the chuck 22 is not particularly limited, but the chuck 22 is, for example, a suction chuck.
　吸着チャックであるチャック２２は内部に中空管を有する。チャック２２の先端には、下方に向く開口２２ａを有し、開口２２ａは中空管に繋がっている。中空管は、開口２２ａとは反対側で真空ポンプやエジェクタ等の負圧発生装置の空気圧回路と連通する。このチャック２２は、空気圧回路に負圧が発生することにより、電子部品Ｗを開口２２ａで吸着し、真空破壊や大気解放されると、吸引力を失って開口２２ａから電子部品を離脱させる。 The chuck 22 which is an adsorption chuck has a hollow tube inside. The tip of the chuck 22 has an opening 22a facing downward, and the opening 22a is connected to the hollow tube. The hollow tube communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector on the side opposite to the opening 22a. When the negative pressure is generated in the pneumatic circuit, the chuck 22 sucks the electronic component W through the opening 22a, and when the vacuum breaks or is released to the atmosphere, the chuck 22 loses the suction force and removes the electronic component from the opening 22a.
　チャック２２は、ターレットテーブル２１の外縁に軸受け又はスライダを介して取り付けられ、昇降可能となっている。チャック２２は、昇降により供給ユニット３から電子部品Ｗを受領し、検査支援ユニット５や電気特性測定ユニット４１や外観検査ユニット４２と電子部品Ｗを授受する。特に、チャック２２は、電気特性測定ユニット４１のステージ兼下側コンタクト４１２に電気特性が未測定の電子部品Ｗを載置し、またステージ兼下側コンタクト４１２から電気特性の測定が終了した電子部品Ｗを回収する。 The chuck 22 is attached to the outer edge of the turret table 21 via a bearing or a slider, and can move up and down. The chuck 22 receives the electronic component W from the supply unit 3 by moving up and down, and exchanges the electronic component W with the inspection support unit 5, the electrical characteristic measurement unit 41, and the appearance inspection unit 42. In particular, the chuck 22 places an electronic component W whose electrical characteristics have not been measured on the stage / lower contact 412 of the electrical characteristic measuring unit 41, and the electronic component whose electrical characteristics have been measured from the stage / lower contact 412 is finished. W is collected.
　チャック２２は、進退駆動部２５によって押し下げられることで下降する。進退駆動部２５は、ターレットテーブル２１の外縁直上に設置される。進退駆動部２５から延ばした鉛直線上にチャック２２の基端が存在する。進退駆動部２５とターレットテーブル２１に固定関係は無く、進退駆動部２５は位置不動である。この進退駆動部２５は、モータとカム機構とロッドを有し、モータの回転力をカム機構で直線運動に変換して、ロッドに伝達する。ロッドは、チャック２２の停止位置２４に向けて延び、停止位置２４に存在するチャック２２の基端に対して上方から当接し、更にチャック２２を下方に押し下げる。 The chuck 22 is lowered by being pushed down by the advance / retreat drive unit 25. The advance / retreat drive unit 25 is installed immediately above the outer edge of the turret table 21. The base end of the chuck 22 exists on a vertical line extending from the advance / retreat drive unit 25. The advance / retreat drive unit 25 and the turret table 21 have no fixed relationship, and the advance / retreat drive unit 25 does not move. The advance / retreat drive unit 25 includes a motor, a cam mechanism, and a rod, and converts the rotational force of the motor into a linear motion by the cam mechanism and transmits the linear motion to the rod. The rod extends toward the stop position 24 of the chuck 22, contacts the base end of the chuck 22 existing at the stop position 24 from above, and further pushes down the chuck 22 downward.
　各ユニット３、４１、４２、５、６、７、チャック２２、進退駆動部２５、及びターレットテーブル２１の配置関係について説明する。図３に示すように、チャック２２は、電気特性測定ユニット４１の上側コンタクト４１１とステージ兼下側コンタクト４１２との間に入り込む高さを維持して延びる。換言すると、上側コンタクト４１１とステージ兼下側コンタクト４１２は、ターレットテーブル２１の外縁及び進退駆動部２５よりもテーブル半径方向外方に設置され、上側コンタクト４１１とステージ兼下側コンタクト４１２との間に、ターレットテーブル２１の外縁と進退駆動部２５はない。 The arrangement relationship among the units 3, 41, 42, 5, 6, 7, the chuck 22, the advance / retreat drive unit 25, and the turret table 21 will be described. As shown in FIG. 3, the chuck 22 extends while maintaining a height that enters between the upper contact 411 and the stage / lower contact 412 of the electrical characteristic measurement unit 41. In other words, the upper contact 411 and the stage / lower contact 412 are installed on the outer edge of the turret table 21 and on the outer side in the table radial direction with respect to the advance / retreat driving unit 25, and between the upper contact 411 and the stage / lower contact 412. The outer edge of the turret table 21 and the advance / retreat drive unit 25 are not provided.
　尚、上側コンタクト４１１とステージ兼下側コンタクト４１２との間の空間がターレットテーブル２１の高さと合致していない場合、チャック２を、基端から下側に延びて途中で外側に屈曲したＬ字形状とすることにより、該空間の高さに延出させることができる。 If the space between the upper contact 411 and the stage / lower contact 412 does not match the height of the turret table 21, the chuck 2 extends downward from the base end and bent outward in the middle. By adopting the shape, it can be extended to the height of the space.
　また、図２に示すように、チャック２２の停止位置２４の数はチャック２２の配置数の２倍となっている。すなわち、チャック２２はターレットテーブル２１の周りに円周等配位置で配置され、その配置間隔を角度２ａとすると、ダイレクトドライブモータ２３は、ターレットテーブル２１を１ピッチにつき角度ａずつ回転させる。例えば、１６機のチャック２２に対して、３２箇所の停止位置２４が設定されている。 Further, as shown in FIG. 2, the number of the stop positions 24 of the chuck 22 is twice the number of the chucks 22 arranged. That is, the chucks 22 are arranged at equal circumferential positions around the turret table 21, and when the arrangement interval is an angle 2a, the direct drive motor 23 rotates the turret table 21 by an angle a per pitch. For example, 32 stop positions 24 are set for 16 chucks 22.
　各ユニット３、４１、４２、５、６、７は、チャック２２の停止位置２４の何れかに設置される。電子部品搬送装置１は、電子部品Ｗを搬送経路２に沿って搬送させ、少なくとも各ユニット３、４１、４２、５、６、７で停止させ、停止中に各ユニット３、４１、４２、５、６、７に電子部品Ｗを処理させる。 Each unit 3, 41, 42, 5, 6, 7 is installed at one of the stop positions 24 of the chuck 22. The electronic component transport apparatus 1 transports the electronic component W along the transport path 2, stops at least each of the units 3, 41, 42, 5, 6, and 7, and stops each unit 3, 41, 42, 5 , 6 and 7 cause the electronic component W to be processed.
　電気特性測定ユニット４１は、２機が設けられ、停止位置２４を一つ空けて、各々停止位置２４に配置されている。２機の電気特性測定ユニット４１の各隣の停止位置２４は、電気特性の測定時間帯におけるチャック２２の退避位置４１ａであり、ユニットが未配置の空きとなっている。例えば、退避位置４１ａは、電気特性測定ユニット４１の搬送方向下流側に設定される。 Two electrical characteristic measurement units 41 are provided, and one stop position 24 is provided, and each is arranged at the stop position 24. The stop position 24 adjacent to each of the two electrical property measurement units 41 is a retreat position 41a of the chuck 22 in the electrical property measurement time zone, and the unit is not disposed. For example, the retreat position 41 a is set on the downstream side in the transport direction of the electrical characteristic measurement unit 41.
　外観検査ユニット４２、検査支援ユニット５及び収容ユニット７は、退避位置４１ａから数えて一つ置きの停止位置２４の何れかに配置される。供給ユニット３及び排出容器６は、電気特性測定ユニット４１の配置位置から数えて一つ置きの停止位置２４の何れかに配置される。すなわち、停止位置２４を偶数箇所設けた場合、外観検査ユニット４２、検査支援ユニット５及び収容ユニット７は、電気特性測定ユニット４１から数えて奇数番目の停止位置２４に、供給ユニット３及び排出容器６は偶数番目の停止位置２４に配置される。 The appearance inspection unit 42, the inspection support unit 5 and the storage unit 7 are arranged at any one of the stop positions 24 counted from the retreat position 41a. The supply unit 3 and the discharge container 6 are arranged at any one stop position 24 counted from the arrangement position of the electrical characteristic measurement unit 41. That is, when the stop position 24 is provided at an even number, the appearance inspection unit 42, the inspection support unit 5, and the housing unit 7 are placed at the odd-numbered stop position 24 counted from the electrical characteristic measurement unit 41 at the supply unit 3 and the discharge container 6. Are arranged at even-numbered stop positions 24.
　ここで、供給ユニット３は、電子部品Ｗを搬送経路２に供給する。供給ユニット３は、例えば、滑り移動装置、トレイ移動装置、又はウェハホルダ装置等の電子部品Ｗに対する処理を行わないユニットである。滑り移動装置は、すり鉢状の容器に多数収容した電子部品Ｗを振動により整列搬送し、搬送経路２の入口に移動させる。トレイ移動装置は、トレイを直交２軸方向に移動させる。トレイは、格子状に仕切られ、各格子内に電子部品Ｗが収容される。トレイの拡がり平面に沿った直交２軸方向にトレイを移動させることで、各格子内の電子部品Ｗを搬送経路２の入口に移動させる。ウェハホルダ装置は、ウェハリングを直交２軸方向に移動させる。ウェハリングは、電子部品Ｗをアレイ状に並べてなる。ウェハリングの拡がり平面に沿った直交２軸方向にウェハリングを移動させることで、各電子部品Ｗを搬送経路２の入口に移動させる。供給ユニット３と搬送経路Ｗとの間には、電子部品Ｗを中継するロータリーピックアップが設置される場合もある。 Here, the supply unit 3 supplies the electronic component W to the transport path 2. The supply unit 3 is a unit that does not perform processing on the electronic component W, such as a sliding movement device, a tray movement device, or a wafer holder device. The sliding movement device aligns and conveys a large number of electronic components W accommodated in a mortar-like container and moves them to the entrance of the conveyance path 2. The tray moving device moves the tray in two orthogonal axes. The tray is partitioned in a lattice shape, and the electronic component W is accommodated in each lattice. The electronic components W in each lattice are moved to the entrance of the transport path 2 by moving the tray in the two orthogonal axes along the spreading plane of the tray. The wafer holder device moves the wafer ring in two orthogonal axes. The wafer ring is formed by arranging electronic components W in an array. Each electronic component W is moved to the entrance of the conveyance path 2 by moving the wafer ring in two orthogonal axes along the spreading plane of the wafer ring. A rotary pickup that relays the electronic component W may be installed between the supply unit 3 and the transport path W.
　排出容器６は、検査の結果が良好でなかった電子部品Ｗを受け取るのみで、電子部品Ｗに対する処理を行わないユニットである。また、収容ユニット７は、検査の結果が良好であった電子部品Ｗを収容する。この収容ユニット７は、例えば、テーピング装置、チューブ装置、トレイ移動装置、又はウェハホルダ装置等であり、収容が適正かの判定処理を含むユニットである。テーピング装置は、ポケットが帯長手方向に沿って並ぶテープを走行させる装置であり、各ポケットを搬送経路２の出口に移動させる。チューブ装置は、電子部品Ｗを収容するチューブを移動させる。 The discharge container 6 is a unit that only receives the electronic component W whose test result is not good and does not process the electronic component W. Moreover, the accommodation unit 7 accommodates the electronic component W whose test result is good. The accommodation unit 7 is, for example, a taping device, a tube device, a tray moving device, a wafer holder device, or the like, and is a unit that includes a determination process of whether accommodation is appropriate. The taping device is a device for running a tape in which pockets are arranged along the longitudinal direction of the band, and moves each pocket to the exit of the conveyance path 2. The tube device moves a tube that accommodates the electronic component W.
　検査支援ユニット５は、検査の精度向上のために、検査を受ける電子部品Ｗの姿勢を予め補正する処理を行う。検査支援ユニット５は、電子部品Ｗを載置するＸＹθステージを有する。ＸＹθステージは、ステージ平面に沿った直交２軸方向に移動し、またステージ平面と垂直な軸で回転する。検査支援ユニット５は、搬送経路２から渡された電子部品ＷをＸＹθステージに載置し、ＸＹθステージを移動及び回転させることで、電子部品Ｗの向き及び位置を補正する。この検査支援ユニット５は、電子部品Ｗを撮像するカメラを備えており、画像内の電子部品Ｗの向き及び位置を解析して、ＸＹθステージの移動量及び回転量を制御する。 The inspection support unit 5 performs a process of correcting the posture of the electronic component W to be inspected in advance in order to improve inspection accuracy. The inspection support unit 5 has an XYθ stage on which the electronic component W is placed. The XYθ stage moves in two orthogonal axes along the stage plane, and rotates on an axis perpendicular to the stage plane. The inspection support unit 5 corrects the orientation and position of the electronic component W by placing the electronic component W passed from the transport path 2 on the XYθ stage and moving and rotating the XYθ stage. The inspection support unit 5 includes a camera that images the electronic component W, and analyzes the direction and position of the electronic component W in the image to control the movement amount and the rotation amount of the XYθ stage.
　外観検査ユニット４２は、カメラで電子部品Ｗを撮影し、電子部品Ｗを画像解析して、表面の傷や汚れの有無を検出する。 The appearance inspection unit 42 photographs the electronic component W with a camera, analyzes the image of the electronic component W, and detects the presence or absence of scratches or dirt on the surface.
　これら各ユニット３、４１、４２、５、６、７のうち、電気特性測定ユニット４１による測定時間をＡ、外観検査ユニット４２、検査支援ユニット５及び収容ユニット７による処理の最長時間をＢ、供給ユニット３及び排出容器６による処理の最長時間をＣとすると、Ａ≧Ｂ＞Ｃである。つまり、一般に、電気特性測定ユニット４１による測定時間は長時間に及ぶ。電子部品Ｗの搬送経路２への供給及び排出は、相対的に短時間で完了する。電子部品Ｗの外観検査、電子部品Ｗの姿勢補正、及び電子部品Ｗの収容は、搬送経路２への供給及び排出よりは時間がかかるが、電気特性測定ユニット４１による測定時間には及ばない。 Among these units 3, 41, 42, 5, 6, 7, A is the measurement time by the electrical characteristic measurement unit 41, and B is the longest processing time by the appearance inspection unit 42, the inspection support unit 5 and the storage unit 7. Assuming that the longest processing time by the unit 3 and the discharge container 6 is C, A ≧ B> C. That is, in general, the measurement time by the electrical characteristic measurement unit 41 is long. Supply and discharge of the electronic component W to the transport path 2 are completed in a relatively short time. The appearance inspection of the electronic component W, the posture correction of the electronic component W, and the accommodation of the electronic component W take longer than the supply and discharge to the transport path 2, but do not reach the measurement time by the electrical characteristic measurement unit 41.
　すなわち、この電子部品搬送装置１では、このような中程度の時間Ｂで処理が完了するユニット４２、５、７は、退避位置４１ａから数えて一つ置きの停止位置２４に配置している。短時間Ｃで処理が完了するユニット３、６は、電気特性測定ユニット４１の配置位置から数えて一つ置きの停止位置２４に配置している。ただし、停止位置２４に余裕があるならば、短時間Ｃで処理が完了するユニットは、退避位置４１ａから数えて一つ置きの停止位置２４に配置してもよい。 That is, in the electronic component transport apparatus 1, the units 42, 5 and 7 that complete the processing in such a medium time B are arranged at every other stop position 24 counted from the retreat position 41a. The units 3 and 6 that complete processing in a short time C are arranged at every other stop position 24 counting from the arrangement position of the electrical characteristic measurement unit 41. However, if the stop position 24 has a margin, the units that complete processing in the short time C may be arranged at every other stop position 24 counting from the retreat position 41a.
　（電気特性測定制御）
　このような電子部品搬送装置１の制御態様について説明する。図４及び５に示すように、電子部品搬送装置１は、電気特性を未測定の電子部品Ｗが２機の電気特性測定ユニット４１に揃った段階（図中、段階(ａ)から段階（ｄ）へ順に遷移)で、電子部品Ｗをステージ兼下側ステージ４１２に載置する(図中、段階(ｅ))。このとき、各電気特性測定ユニット４１の上側コンタクト４１１とステージ兼下側コンタクト４１２との間には、チャック２２が介在している(図中、段階(ｅ))。 (Electrical characteristic measurement control)
The control aspect of such an electronic component conveying apparatus 1 will be described. As shown in FIGS. 4 and 5, the electronic component transport apparatus 1 is configured such that the electronic components W whose electrical characteristics have not been measured are arranged in the two electrical characteristics measuring units 41 (in the drawings, from stage (a) to stage (d The electronic component W is placed on the stage / lower stage 412 (step (e) in the figure). At this time, the chuck 22 is interposed between the upper contact 411 and the stage / lower contact 412 of each electrical characteristic measurement unit 41 (step (e) in the figure).
　次に、電子部品Ｗを載置した両チャック２２は、１ピッチ移動して退避位置４１ａに移動する(図中、段階(ｆ))。このとき、チャック２２は、各電気特性測定ユニット４１の上側コンタクト４１１とステージ兼下側コンタクト４１２との間から離れ、この間には構造物が電子部品Ｗを除き不介在となっている(図中、段階(ｆ))。従って、電気特性測定ユニット４１は、両チャック２２が退避位置４１ａに移動した段階で、電気特性の測定を開始する(図中、段階(ｇ))。すなわち、電気特性測定ユニット４１は、上側コンタクト４１１をステージ兼下側コンタクト４１２に接近させ、上側コンタクト４１１で上面電極に接触するとともに、ステージ兼下側コンタクト４１２で下面電極に接触し、電流注入又は電圧印加を開始し、電子部品Ｗからの出力信号を解析する。 Next, both chucks 22 on which the electronic component W is placed move one pitch and move to the retreat position 41a (step (f) in the figure). At this time, the chuck 22 is separated from the space between the upper contact 411 and the stage / lower contact 412 of each electrical characteristic measurement unit 41, and the structure is not interposed except for the electronic component W (in the drawing). Step (f)). Accordingly, the electrical characteristic measuring unit 41 starts measuring electrical characteristics when both chucks 22 have moved to the retracted position 41a (step (g) in the figure). That is, the electrical characteristic measuring unit 41 brings the upper contact 411 closer to the stage / lower contact 412, contacts the upper surface electrode with the upper contact 411, and contacts the lower electrode with the stage / lower contact 412, Voltage application is started and an output signal from the electronic component W is analyzed.
　電気特性の測定が終了すると、上側コンタクト４１１を上昇させ、電子部品Ｗを載置した両チャック２２は、１ピッチ戻って退避位置４１ａから電気特性測定ユニット４１に移動し(図中、段階(ｈ))、電気特性の測定が終了した電子部品Ｗを受け取る(図中、段階(ｉ))。そして、電気特性の測定が終了した電子部品Ｗを保持したチャック２２は、電気特性測定ユニット４１から離れる方向へ移動する（図中、段階（ｊ））。 When the measurement of the electrical characteristics is completed, the upper contacts 411 are raised, and both chucks 22 on which the electronic component W is placed move back by one pitch and move from the retracted position 41a to the electrical characteristics measurement unit 41 (step (h )), Receiving the electronic component W whose electrical characteristics have been measured (step (i) in the figure). Then, the chuck 22 holding the electronic component W for which the measurement of electrical characteristics has been completed moves away from the electrical characteristics measurement unit 41 (step (j) in the figure).
　電気特性が未測定の電子部品Ｗを保持したチャック２２の次のペアは、前のペアが段階（ｇ）を経た後、順番に当該段階(ａ)から段階(ｊ)を繰り返し、整列搬送する電子部品Ｗの電気特性を測定させていく。すなわち、ターレットテーブル２１は、チャック２２を３ピッチ前進させ、次いで１ピッチ後退させる回転ルーチンを繰り返す。尚、Ｎ機の電気特性ユニット４１を設置すると、１回の回転ルーチンは、２Ｎ＋１回の前進と１回の後退により構成される。 The next pair of the chucks 22 holding the electronic parts W whose electrical characteristics are not measured, after the previous pair has undergone the step (g), the steps (a) to (j) are repeated in order and conveyed. The electrical characteristics of the electronic component W are measured. In other words, the turret table 21 repeats a rotation routine for moving the chuck 22 forward by 3 pitches and then retracting it by 1 pitch. When the N electric characteristic unit 41 is installed, one rotation routine is composed of 2N + 1 forward movements and one backward movement.
　（全体制御）
　更に、この回転ルーチンに含まれる各停止時間が異なっている。まず、図６に示すように、電気特性が未測定の電子部品Ｗを保持した先頭のチャック２２Ａが最初の電気特性測定ユニット４１に到着した際の第１種の停止時間は、電子部品Ｗの搬送経路２への供給又は排出が可能な最短時間Ｃである。 (Overall control)
Furthermore, each stop time included in this rotation routine is different. First, as shown in FIG. 6, the first type of stop time when the leading chuck 22A holding the electronic component W whose electrical characteristics have not been measured arrives at the first electrical property measuring unit 41 is as follows. This is the shortest time C that can be supplied to or discharged from the transport path 2.
　先頭のチャック２２Ａが最初の電気特性測定ユニット４１に到着したとき、この先頭のチャック２２Ａは、電子部品Ｗを保持したまま静止し続ける。一方、他のチャック２２Ｂは、供給ユニット３に到着し、また他のチャック２２Ｆ、２２Ｇは排出容器６に到着し、それぞれ電子部品Ｗのピックアップと電子部品Ｗの排出を行う。すなわち、最短の停止時間は、チャック２２Ｂの降下、電子部品の保持、及びチャック２２Ｂの上昇の一連の工程、又は、チャック２２Ｆ、２２Ｇによる電子部品Ｗの離脱の何れか遅い方である。一般的には、チャック２２Ｂの一連の工程の方が遅い。 When the leading chuck 22A arrives at the first electrical characteristic measuring unit 41, the leading chuck 22A keeps holding the electronic component W while still. On the other hand, the other chuck 22B arrives at the supply unit 3, and the other chucks 22F and 22G arrive at the discharge container 6, and pick up the electronic component W and discharge the electronic component W, respectively. That is, the shortest stop time is the later of the series of steps of lowering the chuck 22B, holding the electronic component, and raising the chuck 22B, or detaching the electronic component W by the chucks 22F and 22G. In general, the series of steps of the chuck 22B is slower.
　搬送経路２上の検査支援ユニット５、外観検査ユニット４２、及び収容ユニット７は、電気特性測定ユニット４１の隣の退避位置４１ａから数えて一つ置きの停止位置２４に設置されており、チャック２２が到着していないので、これらユニット５、４２、７は稼動せず、この第１種の停止時間はこれらユニット５、４２、７の処理時間に規制されない。 The inspection support unit 5, the appearance inspection unit 42, and the accommodation unit 7 on the transport path 2 are installed at every other stop position 24 counting from the retreat position 41 a adjacent to the electrical characteristic measurement unit 41. Since these units 5, 42, 7 do not operate, the first type of stop time is not restricted by the processing time of these units 5, 42, 7.
　第１種の停止時間が経過すると、図７に示すように、全体のチャック２２が１ピッチ移動する。そして、電気特性が未測定の電子部品Ｗを保持した先頭のチャック２２Ａが最初の電気特性測定ユニット４１の隣にある退避位置４１ａに到着する。このタイミングでの第２種の停止時間は、検査支援ユニット５、外観検査ユニット４２、又は収容ユニット７のうちの最長時間であり、電気特性の測定時間よりも短い時間Ｂである。 When the first type of stop time has elapsed, the entire chuck 22 moves one pitch as shown in FIG. Then, the leading chuck 22A holding the electronic component W whose electrical characteristics have not been measured arrives at the retracted position 41a adjacent to the first electrical characteristics measuring unit 41. The second type of stop time at this timing is the longest time of the inspection support unit 5, the appearance inspection unit 42, or the housing unit 7, and is a time B shorter than the measurement time of the electrical characteristics.
　すなわち、このタイミングでは、他のチャック２２Ｂ、２２Ｇ、２２Ｆが電子部品Ｗを保持したまま、検査支援ユニット５、外観検査ユニット５２、及び収容ユニット７に到着する。そして、検査支援ユニット５では、チャック２２Ｂの降下、電子部品ＷのＸＹθステージへの離脱、チャック２２Ｂの上昇、ＸＹθステージの変化、チャック２２Ｂの再降下、電子部品ＷのＸＹθステージからのピックアップ、及びチャック２２Ｂの再上昇の一連の工程が実行される。外観検査ユニット４２では、電子部品Ｗの撮像が行われる。収容ユニット７では、チャック２２Ｆの降下、電子部品Ｗの収容箇所への離脱、適正な収容の成否の検査、チャック２２Ｆの上昇の一連の工程が実行される。これら各一連の処理は、最短時間Ｃよりも長時間を要し、停止時間Ｂは、これら各一連の処理の最長時間である。 That is, at this timing, the other chucks 22B, 22G, and 22F arrive at the inspection support unit 5, the appearance inspection unit 52, and the housing unit 7 while holding the electronic component W. In the inspection support unit 5, the chuck 22B is lowered, the electronic component W is detached from the XYθ stage, the chuck 22B is raised, the XYθ stage is changed, the chuck 22B is lowered again, the electronic component W is picked up from the XYθ stage, and A series of steps for re-raising the chuck 22B is performed. In the appearance inspection unit 42, the electronic component W is imaged. In the housing unit 7, a series of steps of lowering the chuck 22 </ b> F, detaching the electronic component W to the housing location, inspecting the success or failure of proper housing, and raising the chuck 22 </ b> F are performed. Each of these series of processes takes longer than the shortest time C, and the stop time B is the longest time of each series of these processes.
　第２種の停止時間が経過し、図８に示すように、再びチャック２２が１ピッチ移動する。そして、電気特性が未測定の電子部品Ｗを保持したチャック２２Ａ、２２Ｂのペアが各電気特性測定ユニット４１に到着する。このタイミングでの停止時間は、第１種の停止時間と同じでよい。このタイミングでは、このチャック２２Ａ、２２Ｂのペアは、電気特性測定ユニット４１に電子部品Ｗを載置するのみであり、電気特性測定ユニット４１による処理は行われない。また、検査支援ユニット５、外観検査ユニット４２、及び収容ユニット７には、何れのチャック２２も到着していない。供給ユニット３、排出容器６、及び電気特性測定ユニット４１にチャック２２Ａ、２２Ｂ、２２Ｃ、２２Ｇ、２２Ｈが存在するのみである。従って、電気特性搬送装置１では、電子部品Ｗのピックアップ、ステージ兼下側コンタクト４１２への載置、及び排出のみが行われる。 ¡The second type of stop time has elapsed, and the chuck 22 again moves one pitch as shown in FIG. Then, the pair of chucks 22 </ b> A and 22 </ b> B holding the electronic component W whose electrical characteristics are not measured arrives at each electrical characteristic measurement unit 41. The stop time at this timing may be the same as the first type stop time. At this timing, the pair of chucks 22 </ b> A and 22 </ b> B only places the electronic component W on the electrical property measurement unit 41, and the process by the electrical property measurement unit 41 is not performed. In addition, none of the chucks 22 has arrived at the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7. Only the chucks 22 </ b> A, 22 </ b> B, 22 </ b> C, 22 </ b> G, and 22 </ b> H exist in the supply unit 3, the discharge container 6, and the electrical characteristic measurement unit 41. Therefore, in the electrical property transport apparatus 1, only the electronic component W is picked up, placed on the stage / lower contact 412 and discharged.
　尚、このタイミングでは、電子部品Ｗの供給ユニット３からのピックアップは実行しなくともよい。２回先の停止タイミングで同じ状況が発生するためである。このタイミングで電子部品Ｗをピックアップするより、２回先の停止タイミングで電子部品Ｗをピックアップしたほうが、電子部品Ｗの搬送経路２中での間欠移動の回数が少なくなり、急停止及び急加速による慣性力を受ける回数が減るため、電子部品Ｗにズレが発生する可能性が低下する。 Note that at this timing, the pickup of the electronic component W from the supply unit 3 need not be executed. This is because the same situation occurs at the second stop timing. Rather than picking up the electronic component W at this timing, picking up the electronic component W at the second stop timing reduces the number of intermittent movements of the electronic component W in the transport path 2, resulting in sudden stop and acceleration. Since the number of times of receiving the inertial force is reduced, the possibility that the electronic component W is displaced is reduced.
　図９に示すように、更にチャック２２が１ピッチ移動し、電気特性測定ユニット４１に電子部品Ｗを載置したチャック２２Ａ、２２Ｂが退避位置４１ａに移動した際の第３種の停止時間は、電気特性の測定が可能な最長時間Ａである。このタイミングでは、電子部品Ｗをステージ兼下側コンタクト４１２に電子部品Ｗを載置したチャック２２Ａ、２２Ｂが退避位置４１ａに存在するため、上側コンタクト４１１とステージ兼下側コンタクト４１２との間に構造体は不存在であり、上側コンタクト４１１を下降させて上側電極と接触可能となっている。 As shown in FIG. 9, when the chuck 22 is further moved by 1 pitch, and the chucks 22A and 22B on which the electronic component W is placed on the electrical characteristic measurement unit 41 are moved to the retreat position 41a, the third type of stop time is This is the longest time A in which electrical characteristics can be measured. At this timing, the chucks 22A and 22B on which the electronic component W is placed on the stage / lower contact 412 are present at the retracted position 41a, so that a structure is formed between the upper contact 411 and the stage / lower contact 412. The body is absent, and the upper contact 411 is lowered to be able to contact the upper electrode.
　そこで、このタイミングで電気特性の測定が行われる。一方、このタイミングでは、チャック２２Ｃ、２２Ｈ、２２Ｇが電子部品Ｗを保持したまま、検査支援ユニット５、外観検査ユニット４２、及び収容ユニット７に到着する。そのため、このタイミングで、検査支援、外観検査、及び収容も行われる。但し、これら検査支援、外観検査、及び収容は、電気特性の測定よりも短時間であるため、このタイミングでは、最長時間Ａの停止時間となる。 Therefore, the electrical characteristics are measured at this timing. On the other hand, at this timing, the chucks 22 </ b> C, 22 </ b> H, and 22 </ b> G arrive at the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7 while holding the electronic component W. Therefore, inspection support, appearance inspection, and accommodation are also performed at this timing. However, since these inspection support, appearance inspection, and accommodation are shorter than the measurement of electrical characteristics, the longest time A is stopped at this timing.
　電気特性の測定を伴う第３種の停止時間が経過し、図１０に示すように、再びチャック２２Ａ、２２Ｂが電気特性測定ユニット４１へ後退する。そして、電気特性の測定が終了した電子部品Ｗをチャック２２Ａ、２２Ｂが再び保持する。このタイミングでの停止時間は、第１種の停止時間と同じでよい。このタイミングでは、このチャックのペアは、電気特性測定ユニット４１から電子部品Ｗをピックアップするのみである。また、検査支援ユニット５、外観検査ユニット４２、及び収容ユニット７には、検査支援及び外観検査が終了した電子部品Ｗが戻っただけである。 The third type of stop time accompanied by the measurement of the electrical characteristics has elapsed, and the chucks 22A and 22B are moved back to the electrical characteristics measurement unit 41 again as shown in FIG. Then, the chucks 22 </ b> A and 22 </ b> B hold the electronic component W whose electrical characteristics have been measured again. The stop time at this timing may be the same as the first type stop time. At this timing, the pair of chucks only picks up the electronic component W from the electrical characteristic measurement unit 41. Further, only the electronic component W that has been subjected to the inspection support and the appearance inspection is returned to the inspection support unit 5, the appearance inspection unit 42, and the housing unit 7.
　尚、電気特性測定ユニット４１に電子部品Ｗが揃ったタイミングで、チャック２２Ｃが供給ユニットから電子部品Ｗをピックアップしていなければ、このタイミングでピックアップするようにすればよい。 In addition, if the chuck 22C has not picked up the electronic component W from the supply unit at the timing when the electronic component W is aligned in the electrical characteristic measurement unit 41, it may be picked up at this timing.
　（作用効果）
　以上のように、電子部品搬送装置１には、搬送経路２を構成するターレットテーブル２１が全周に亘って同一半径を有するチャック外周設置型回転搬送形式が採用される場合がある。この電子部品搬送装置１においては、電子部品Ｗを保持するチャック２２を、放射状にテーブル外側に向かって水平に延びるようにした。これにより、チャック２２により電子部品Ｗが載置されるステージ兼下側コンタクト４１２の上方に上側コンタクト４１１を配置しても、チャック２２のみがステージ兼下側コンタクト４１２と上側コンタクト４１１との間に入り込み、上側コンタクト４１１とターレットテーブル２１とが接触することはないので、ステージ兼下側コンタクト４１２に電子部品Ｗを載置可能となる。 (Function and effect)
As described above, the electronic component transport apparatus 1 may adopt a chuck outer periphery type rotary transport system in which the turret table 21 constituting the transport path 2 has the same radius over the entire circumference. In the electronic component transport apparatus 1, the chucks 22 that hold the electronic components W are extended horizontally in the radial direction toward the outside of the table. Thus, even if the upper contact 411 is disposed above the stage / lower contact 412 on which the electronic component W is placed by the chuck 22, only the chuck 22 is interposed between the stage / lower contact 412 and the upper contact 411. Since the upper contact 411 and the turret table 21 do not come into contact with each other, the electronic component W can be placed on the stage / lower contact 412.
　また、チャック２２をターレットテーブル２１の間欠回転角の２倍角のピッチでターレットテーブル２１の外縁に設け、ステージ兼下側コンタクト４１２及び上側コンタクト４１１の隣に、チャック２２が退避する退避位置４１ａを設定した。これにより、ステージ兼下側コンタクト４１２と上側コンタクト４１１の電子部品Ｗに対する処理がチャック２２に妨害されることがない。特に、上側コンタクト４１１がチャック２２に妨害されることなく、電子部品Ｗの上面電極に接触するために下降できる。 Further, the chuck 22 is provided on the outer edge of the turret table 21 at a pitch twice the intermittent rotation angle of the turret table 21, and a retracting position 41 a for retracting the chuck 22 is set next to the stage / lower contact 412 and the upper contact 411. did. This prevents the chuck 22 from interfering with the processing of the stage / lower contact 412 and the upper contact 411 for the electronic component W. In particular, the upper contact 411 can be lowered to contact the upper surface electrode of the electronic component W without being obstructed by the chuck 22.
　従って、この電子部品搬送装置１によれば、搬送経路２を構成するターレットテーブル２１が全周に亘って同一半径を有するチャック外周設置型回転搬送形式が採用しても、電気特性測定ユニット４１をターレットテーブル２１が構成する搬送経路２に設置することができ、この搬送経路２上で両面電極を有する電子部品Ｗの電気特性を測定できる。すなわち、チャック外周設置型回転搬送形式のみで構成した搬送経路２で両面電極を有する電子部品Ｗの電気特性を測定することができる。従って、両面電極を有する電子部品Ｗを回転搬送形式の利点である高速搬送で処理することができ、生産効率が向上する。 Therefore, according to this electronic component transport apparatus 1, even if the turret table 21 constituting the transport path 2 adopts the chuck outer peripheral installation type rotary transport system having the same radius over the entire circumference, the electrical characteristic measuring unit 41 is provided. The turret table 21 can be installed in the transport path 2, and the electrical characteristics of the electronic component W having double-sided electrodes can be measured on the transport path 2. That is, it is possible to measure the electrical characteristics of the electronic component W having double-sided electrodes on the transport path 2 configured only by the chuck outer periphery type rotary transport format. Therefore, the electronic component W having double-sided electrodes can be processed by high-speed conveyance, which is an advantage of the rotary conveyance type, and production efficiency is improved.
　ターレットテーブル２１をアームが放射状に延びる星形とすると、アーム間ではステージ兼下側コンタクト４１２と上側コンタクト４１１との間にターレットテーブル２１が不存在と成し得る。しかし、電子部品搬送装置１には、ステージ兼下側コンタクト４１２に電子部品Ｗを載置するために、チャック２２をステージ兼下側コンタクト４１２に向けて降下させる進退駆動部２５を、ターレットテーブル２１の最外径部が通る軌跡の上方に固定設置する場合がある。このケースにおいても、チャック２２を放射状にテーブル外側に向かって水平に延びるようにすることで、上側コンタクト４１１と進退駆動部２５と接触することがなくなり、ステージ兼下側コンタクト４１２に電子部品Ｗを載置可能となる。 If the turret table 21 has a star shape with arms extending radially, the turret table 21 may be absent between the stage and the lower contact 412 and the upper contact 411 between the arms. However, the electronic component conveying apparatus 1 includes an advance / retreat driving unit 25 that lowers the chuck 22 toward the stage / lower contact 412 in order to place the electronic component W on the stage / lower contact 412. May be fixedly installed above the trajectory through which the outermost diameter portion passes. Also in this case, by making the chuck 22 extend radially toward the outside of the table, the upper contact 411 and the advance / retreat drive unit 25 are not contacted, and the electronic component W is placed on the stage / lower contact 412. Can be placed.
　従って、この進退駆動部２５を有する電子部品搬送装置１においても、回転搬送形式のみで構成した搬送経路２で両面電極を有する電子部品Ｗの電気特性を測定することができる。従って、両面電極を有する電子部品Ｗを回転搬送形式の利点である高速搬送で処理することができ、生産効率が向上する。 Therefore, even in the electronic component transport apparatus 1 having the advance / retreat drive unit 25, the electrical characteristics of the electronic component W having double-sided electrodes can be measured by the transport path 2 configured only by the rotational transport type. Therefore, the electronic component W having double-sided electrodes can be processed by high-speed conveyance, which is an advantage of the rotary conveyance type, and production efficiency is improved.
　尚、電気特性測定ユニット４１以外にも、下側にステージを設置し、そのステージに対向させて構造体を配置する例がある。例えば、ステージの直上からカメラで電子部品を撮像したい場合もある。すなわち、上側コンタクト４１１以外にもレーザーマーキング装置やカメラ等の他の構造体もステージの上方に存在させる場合もある。この電子部品搬送装置１は、このような上側コンタクト４１１以外の構造体をステージの上方に配置する必要がある場合であっても、ターレットテーブル２１で構成された搬送経路２から一旦離脱させる必要が無く、ターレットテーブル２１で構成された搬送経路２上で構造体による作用を電子部品Ｗに付与することができ、回転搬送形式の利点である高速搬送を発揮し、生産効率を向上させることができる。 In addition to the electrical characteristic measurement unit 41, there is an example in which a stage is installed on the lower side and a structure is arranged facing the stage. For example, there are cases where it is desired to take an image of an electronic component with a camera from directly above the stage. That is, in addition to the upper contact 411, other structures such as a laser marking device and a camera may exist above the stage. Even when it is necessary to dispose such a structure other than the upper contact 411 above the stage, the electronic component transport apparatus 1 needs to be temporarily detached from the transport path 2 configured by the turret table 21. In addition, the action of the structure can be imparted to the electronic component W on the conveyance path 2 constituted by the turret table 21, and the high-speed conveyance that is the advantage of the rotary conveyance type can be exhibited, and the production efficiency can be improved. .
　また、退避位置４１ａは、電気特性測定ユニット４１から見て搬送方向下流側の隣に配置しても、搬送方向上流側の隣に配置してもよい。チャック２２は、吸着チャック以外にも、静電チャック、ベルヌーイチャック、又は挟みを有して機械的に挟持するチャックを配してもよい。 Further, the retreat position 41a may be disposed next to the downstream side in the transport direction as viewed from the electrical characteristic measurement unit 41, or may be disposed next to the upstream side in the transport direction. In addition to the chuck, the chuck 22 may be an electrostatic chuck, a Bernoulli chuck, or a chuck that has a pinch and is mechanically pinched.
　更に、ターレットテーブル２１の間欠回転角のピッチに対してチャック２２の配置を２倍角のピッチとしたため、電気特性測定ユニット４１から数えて一つ置きの停止位置２４の群と、退避位置４１ａから数えて一つ置きの停止位置２４の群とが存在する。この電子部品搬送装置１では、このうち、退避位置４１ａから数えて一つ置きの停止位置２４に電気特性測定ユニット４１とは異なる処理の処理ユニット５、４２、７を配置するようにした。 Further, since the arrangement of the chucks 22 is doubled with respect to the pitch of the intermittent rotation angle of the turret table 21, the groups of every other stop position 24 counted from the electrical characteristic measuring unit 41 and the retracted position 41a are counted. Every other stop position 24 group. In the electronic component conveying apparatus 1, the processing units 5, 42, and 7 of processing different from the electrical characteristic measuring unit 41 are arranged at every other stop position 24 counted from the retreat position 41a.
　電気特性測定ユニット４１に電子部品Ｗを載置したチャック２２が退避位置４１ａに存在する際の停止時間は、電気特性の測定に規制されて長時間Ｃとなる。この電子部品搬送装置１によれば、この電気特性の測定に伴う長時間Ｃの停止の際に、他のチャック２２が停止した処理ユニット５、４２、７で他の処理を行うことができる。換言すると、電気特性測定ユニット４１に電子部品Ｗを載置するのみのタイミングでは、他の処理は行われず、このタイミングでの停止時間を短くすることができる。電気特性の測定が検査項目に含まれる場合であっても、電子部品搬送装置１による電子部品Ｗの搬送を更に高速化することができ、生産効率を更に向上できる。 The stop time when the chuck 22 with the electronic component W placed on the electrical property measurement unit 41 is present at the retracted position 41a is C due to the regulation of electrical property measurement. According to the electronic component transport apparatus 1, when the C is stopped for a long time due to the measurement of the electrical characteristics, other processing can be performed by the processing units 5, 42, and 7 in which the other chucks 22 are stopped. In other words, at the timing when only the electronic component W is placed on the electrical characteristic measurement unit 41, other processing is not performed, and the stop time at this timing can be shortened. Even when the measurement of electrical characteristics is included in the inspection item, the transportation of the electronic component W by the electronic component transportation apparatus 1 can be further speeded up, and the production efficiency can be further improved.
　異なる処理の処理ユニットとしては、電子部品Ｗの外観を検査する外観検査ユニット４２、電子部品Ｗの姿勢を補正する検査支援ユニット５、及び電子部品Ｗを収容するとともに収容の適正を判定する収容ユニット７を挙げた。この他にも、電子部品Ｗのピックアップ及び排出以上に時間のかかる処理を行う処理ユニットであれば、退避位置４１ａから数えて一つ置きの停止位置２４に置くようにすればよい。 As processing units for different processes, an appearance inspection unit 42 that inspects the appearance of the electronic component W, an inspection support unit 5 that corrects the attitude of the electronic component W, and a storage unit that stores the electronic component W and determines the appropriateness of the storage. 7 was mentioned. In addition to this, in the case of a processing unit that performs processing that takes more time than picking up and discharging the electronic component W, it may be placed at every other stop position 24 counting from the retreat position 41a.
　他方、電気特性測定ユニット４１の設置位置から数えて一つ置きの停止位置２４では、処理を行わず、供給ユニット３や排出容器６を設置し、チャック２２が電子部品Ｗをピックアップ又は離脱させるのみとしてもよい。電気特性測定ユニット４１で電子部品Ｗの載置を行うため、チャック２２による電子部品Ｗのピックアップ又は離脱が停止時間に影響を与えないためである。一方で、この停止位置を活用することでターレットテーブル２１の大型化を回避することもできる。 On the other hand, at every other stop position 24 counted from the installation position of the electrical characteristic measurement unit 41, no processing is performed, the supply unit 3 and the discharge container 6 are installed, and the chuck 22 only picks up or removes the electronic component W. It is good. This is because the electronic component W is placed by the electrical characteristic measurement unit 41, so that the pickup or removal of the electronic component W by the chuck 22 does not affect the stop time. On the other hand, the enlargement of the turret table 21 can be avoided by utilizing this stop position.
　更に、２機の電気特性測定ユニット４１を備え、各電気特性測定ユニット４１は、一の電気特性測定ユニット４１から数えて一つ置きの停止位置２４の何れかに設置するようにし、退避位置４１ａは、各電気特性測定ユニット４１の各隣に有するようにした。この態様では、全ての電気特性測定ユニット４１に電子部品Ｗが揃ってから１度に電気特性の測定が可能となる。 Further, two electrical property measuring units 41 are provided, and each electrical property measuring unit 41 is installed at any one of the other stop positions 24 counted from one electrical property measuring unit 41, and the retracted position 41a. Is provided next to each electrical characteristic measuring unit 41. In this aspect, it is possible to measure the electrical characteristics at a time after the electronic components W are aligned in all the electrical characteristics measuring units 41.
　これにより、１度の電気特性の測定で２個の電子部品Ｗが測定終了するため、電子部品Ｗが搬送経路２に供給されて排出されるまでの間に電気特性の測定が発生する回数が少なくなり、電子部品搬送装置１の搬送速度が向上する。 Thus, since the measurement of two electronic components W is completed in one measurement of electrical characteristics, the number of times that the measurement of electrical characteristics occurs before the electronic components W are supplied to the transport path 2 and discharged. As a result, the transport speed of the electronic component transport apparatus 1 is improved.
　尚、電気特性測定ユニット４１は、２機に限らず、複数機設置することができ、設置機数に反比例して電気特性の測定発生回数が少なくなり、電子部品Ｗの搬送速度を向上させることができる。また、電気特性測定ユニット４１以外の処理ユニットであっても同一種を複数機設置し、全ての処理ユニットに電子部品Ｗが揃ってから処理を行うようにしてもよい。 In addition, the electrical property measuring unit 41 is not limited to two devices, and a plurality of devices can be installed, and the number of occurrences of electrical property measurement is reduced in inverse proportion to the number of installed devices, thereby improving the transport speed of the electronic component W. Can do. Further, even if the processing unit is other than the electrical characteristic measurement unit 41, a plurality of the same type may be installed, and the processing may be performed after the electronic components W are arranged in all the processing units.
　（他の実施形態）
　以上のように本発明の各実施形態を説明したが、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。そして、これら実施形態やその変形は、発明の範囲や要旨に含まれるとともに、請求の範囲に記載された発明とその均等の範囲に含まれる。 (Other embodiments)
Each embodiment of the present invention has been described above, but various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.
１　電子部品搬送装置
２　搬送経路
２１　ターレットテーブル
２２　チャック
２２ａ　開口
２３　ダイレクトドライブモータ
２４　停止位置
２５　進退駆動部
３　供給ユニット
４１　電気特性測定ユニット
４１ａ　退避位置
４１１　上側コンタクト
４１２　ステージ兼下側コンタクト
４１３　上側ベース
４１４　昇降駆動部
４１５　引っ張りバネ
４１６　モータ
４１７　カム
４１８　カムフォロア
４２　外観検査ユニット
５　検査支援ユニット
６　排出容器
７　収容ユニット
Ｗ　電子部品

  1 Electronic Component Transfer Device 2 Transfer Path 21 Turret Table 22 Chuck 22a Opening 23 Direct Drive Motor 24 Stop Position 25 Advance / Retreat Drive Unit 3 Supply Unit 41 Electrical Characteristic Measurement Unit 41a Retraction Position 411 Upper Contact 412 Stage / Lower Contact 413 Upper Base 414 Lifting drive unit 415 Tension spring 416 Motor 417 Cam 418 Cam follower 42 Appearance inspection unit 5 Inspection support unit 6 Discharge container 7 Storage unit W Electronic component

Claims (9)

  1. 　電子部品を搬送する電子部品搬送装置であって、
    　全周に亘って同一半径を有する円形状を有し、円周方向に所定回転角ずつ間欠的に回転するターレットテーブルと、
    　前記ターレットテーブルの外縁に前記回転角の２倍角のピッチで設けられ、放射状にテーブル外側に向かって水平に延び、電子部品を保持するチャックと、
    　前記ターレットテーブルと中心を同一とする円周上に、前記ターレットテーブルの前記回転角で分割した各点に設定され、前記チャックが停止する各停止位置と、
    　前記チャックの各停止位置の少なくとも一箇所に配置され、前記チャックにより電子部品が載置されるステージと、
    　前記ステージの上方に前記チャックが入り込む余地を空けて対向配置される構造体と、
    　前記チャックの停止位置のうち、前記ステージ及び前記構造体の隣に設定され、前記ステージで電子部品が処理される間、前記チャックが前記ステージと前記構造体から退避する退避位置と、
    　を備えること、
    　を特徴とする電子部品搬送装置。     An electronic component transport device for transporting electronic components,
    A turret table having a circular shape having the same radius over the entire circumference, and intermittently rotating by a predetermined rotation angle in the circumferential direction;
    A chuck that is provided at an outer edge of the turret table at a pitch that is twice the rotation angle, extends radially toward the outside of the table, and holds electronic components;
    Each stop position that is set at each point divided by the rotation angle of the turret table on a circle having the same center as the turret table, and where the chuck stops,
    A stage disposed at at least one of the stop positions of the chuck, on which an electronic component is placed by the chuck;
    A structure that is disposed opposite to the room above the stage with a space for the chuck to enter;
    Of the stop positions of the chuck, set next to the stage and the structure, and while the electronic component is processed on the stage, the retreat position where the chuck retracts from the stage and the structure,
    Providing
    An electronic component conveying device characterized by the above.
  2. 　電子部品を搬送する電子部品搬送装置であって、
    　円周方向に所定回転角ずつ間欠的に回転するターレットテーブルと、
    　前記ターレットテーブルの外縁に前記回転角の２倍角のピッチで設けられ、放射状にテーブル外側に向かって水平に延び、電子部品を保持するチャックと、
    　前記ターレットテーブルと中心を同一とする円周上に、前記ターレットテーブルの前記回転角で分割した各点に設定され、前記チャックが停止する各停止位置と、
    　前記チャックの各停止位置の少なくとも一箇所に配置され、前記チャックにより電子部品が載置されるステージと、
    　前記ターレットテーブルの最外径部が通る軌跡の上方に固定設置され、前記チャックを前記ステージに向けて降下させる進退駆動部と、
    　前記ステージの上方に前記チャックが入り込む余地を空けて対向配置される構造体と、
    　前記チャックの停止位置のうち、前記ステージ及び前記構造体の隣に設定され、前記ステージで電子部品が処理される間、前記チャックが前記ステージと前記構造体から退避する退避位置と、
    　を備えること、
    　を特徴とする電子部品搬送装置。     An electronic component transport device for transporting electronic components,
    A turret table that rotates intermittently by a predetermined rotation angle in the circumferential direction;
    A chuck that is provided at an outer edge of the turret table at a pitch that is twice the rotation angle, extends radially toward the outside of the table, and holds electronic components;
    Each stop position that is set at each point divided by the rotation angle of the turret table on a circle having the same center as the turret table, and where the chuck stops,
    A stage disposed at at least one of the stop positions of the chuck, on which an electronic component is placed by the chuck;
    An advancing / retreating drive unit that is fixedly installed above a trajectory through which the outermost diameter portion of the turret table passes, and that lowers the chuck toward the stage;
    A structure that is disposed opposite to the room above the stage with a space for the chuck to enter;
    Of the stop positions of the chuck, set next to the stage and the structure, and while the electronic component is processed on the stage, the retreat position where the chuck retracts from the stage and the structure,
    Providing
    An electronic component conveying device characterized by the above.
  3. 　前記退避位置から数えて一つ置きの前記停止位置の少なくとも一箇所に配置され、前記ステージでの処理とは異なる処理の処理ユニットを更に備えること、
    　を特徴とする請求項１又は２記載の電子部品搬送装置。     Further provided with a processing unit of processing different from the processing at the stage, which is arranged at least at one of the stop positions every other position counted from the retracted position;
    The electronic component carrying device according to claim 1 or 2.
  4. 　前記各停止位置は、
    　前記ステージ及び前記構造体の設置位置から数えて一つ置きの少なくとも一箇所であり、前記チャックが電子部品をピックアップ又は離脱させるのみの前記異なる処理を行わない第１種の停止位置と、
    　前記退避位置から数えて一つ置きの少なくとも一箇所であり、前記第１種の停止位置でのピックアップ又は離脱に要する時間以上、前記ステージでの処理時間未満の前記異なる処理が行われる第２種の停止位置と、
    　を含むこと、
    　を特徴とする請求項３記載の電子部品搬送装置。     Each stop position is
    A first type of stop position that is at least one other place counted from the installation position of the stage and the structure, and that the chuck does not perform the different processing only to pick up or remove the electronic component;
    A second type in which the different processes are performed at least every other place counted from the retreat position, and the time required for the pickup or separation at the first type stop position is longer than the processing time on the stage. Stop position of
    Including,
    The electronic component conveying apparatus according to claim 3.
  5. 　前記ステージと前記構造体の組を複数備え、
    　各組は、一の組から数えて一つ置きの前記停止位置の何れかに設置され、
    　前記退避位置は、前記各組の各隣に有すること、
    　を特徴とする請求項１乃至４の何れかに記載の電子部品搬送装置。     A plurality of sets of the stage and the structure are provided,
    Each set is installed at any one of the other stop positions counted from one set,
    Having the retraction position next to each set;
    The electronic component conveying apparatus according to claim 1, wherein
  6. 　両面電極を有する電子部品の電気特性を測定する電気特性測定ユニットを備え、
    　前記電気特性測定ユニットは、
    　電子部品が載置されるとともに電子部品の下面電極と接触する通電接触子を有する前記ステージと、
    　前記ステージに載置される電子部品の上面電極と接触する通電接触子である前記構造体と、
    　を備えること、
    　を特徴とする請求項１乃至５の何れかに記載の電子部品搬送装置。     An electrical property measuring unit for measuring electrical properties of electronic components having double-sided electrodes is provided.
    The electrical property measuring unit is:
    The stage having a current-carrying contact for placing the electronic component and contacting the lower surface electrode of the electronic component;
    The structure that is an energizing contact that contacts an upper surface electrode of an electronic component placed on the stage;
    Providing
    The electronic component conveying apparatus according to claim 1, wherein
  7. 　前記構造体は、
    　前記ステージの電子部品に向けて下降するとともに、下降からの復帰位置では、前記チャックが入り込む余地を空けて静止すること、
    　を特徴とする請求項１乃至６の何れかに記載の電子部品搬送装置。     The structure is
    While descending toward the electronic component of the stage, at the return position from the descent, leaving a space for the chuck to enter,
    The electronic component conveying apparatus according to claim 1, wherein
  8. 　前記異なる処理の処理ユニットは、
    　電子部品の外観を検査する外観検査ユニット、電子部品の姿勢を補正する検査支援ユニット、又は電子部品を収容するとともに収容の適正を判定する収容ユニットであること、
    　を特徴とする請求項３又は４記載の電子部品搬送装置。     The processing unit of the different processing is
    It is an appearance inspection unit that inspects the appearance of an electronic component, an inspection support unit that corrects the attitude of the electronic component, or a storage unit that stores electronic components and determines the appropriateness of storage,
    The electronic component carrying apparatus according to claim 3 or 4.
  9. 　前記チャックは、前記ターレットテーブルから下方に延びて途中で水平方向に屈曲するＬ字形状を有し、
    　前記屈曲位置は、前記構造体と前記ステージとの間の高さに設けられること、
    　を特徴とする請求項１乃至８の何れかに記載の電子部品搬送装置。     The chuck has an L-shape that extends downward from the turret table and bends horizontally in the middle.
    The bending position is provided at a height between the structure and the stage;
    The electronic component conveying apparatus according to claim 1, wherein
PCT/JP2015/080378 2014-11-28 2015-10-28 Electronic component transporting device WO2016084541A1 (en)

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