WO2016068171A1 - Film rempli d'une charge ainsi que procédé de fabrication de celui-ci, film en feuille, film stratifié, et corps collé - Google Patents

Film rempli d'une charge ainsi que procédé de fabrication de celui-ci, film en feuille, film stratifié, et corps collé Download PDF

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Publication number
WO2016068171A1
WO2016068171A1 PCT/JP2015/080344 JP2015080344W WO2016068171A1 WO 2016068171 A1 WO2016068171 A1 WO 2016068171A1 JP 2015080344 W JP2015080344 W JP 2015080344W WO 2016068171 A1 WO2016068171 A1 WO 2016068171A1
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WIPO (PCT)
Prior art keywords
film
filler
filled
film body
recesses
Prior art date
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PCT/JP2015/080344
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English (en)
Japanese (ja)
Inventor
穣 村本
正尚 菊池
Original Assignee
デクセリアルズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2015209377A external-priority patent/JP6756098B2/ja
Application filed by デクセリアルズ株式会社 filed Critical デクセリアルズ株式会社
Priority to US15/523,212 priority Critical patent/US10065380B2/en
Priority to CN202010025666.8A priority patent/CN111168984B/zh
Priority to KR1020177004495A priority patent/KR101929692B1/ko
Priority to CN201580055666.XA priority patent/CN106794622B/zh
Publication of WO2016068171A1 publication Critical patent/WO2016068171A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D7/00—Producing flat articles, e.g. films or sheets
    • B29D7/01—Films or sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
    • B29C59/046—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts for layered or coated substantially flat surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00596—Mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/00788—Producing optical films
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/18—Layered products comprising a layer of synthetic resin characterised by the use of special additives
    • B32B27/20—Layered products comprising a layer of synthetic resin characterised by the use of special additives using fillers, pigments, thixotroping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/02—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions
    • B32B3/08—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions characterised by added members at particular parts
    • B32B3/085—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by features of form at particular places, e.g. in edge regions characterised by added members at particular parts spaced apart pieces on the surface of a layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B32B3/28—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer comprising a deformed thin sheet, i.e. the layer having its entire thickness deformed out of the plane, e.g. corrugated, crumpled
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B32B3/30—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by a layer formed with recesses or projections, e.g. hollows, grooves, protuberances, ribs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/50—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images the image being built up from image elements distributed over a 3D volume, e.g. voxels
    • G02B30/56—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images the image being built up from image elements distributed over a 3D volume, e.g. voxels by projecting aerial or floating images
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Microembossing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/10—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation for articles of indefinite length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/06—Condition, form or state of moulded material or of the material to be shaped containing reinforcements, fillers or inserts
    • B29K2105/16—Fillers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00—Coating on the layer surface
    • B32B2255/10—Coating on the layer surface on synthetic resin layer or on natural or synthetic rubber layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2255/00—Coating on the layer surface
    • B32B2255/20—Inorganic coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2264/00—Composition or properties of particles which form a particulate layer or are present as additives
    • B32B2264/10—Inorganic particles

Definitions

  • the present invention relates to a filler-filled film, a sheet-fed film, a laminated film, a bonded body, and a method for producing a filler-filled film.
  • embossed films have been developed and used.
  • a film having a recess having a diameter of 1 ⁇ m or more and having an array pattern of the recess having a periodicity along the length direction of the embossed film is known. That is, in such an embossed film, the same arrangement pattern is repeatedly formed in the length direction of the embossed film.
  • Such an embossed film is used as a filler-filled film, for example.
  • the filler-filled film is obtained by filling a concave portion of an embossed film with a filler.
  • stamper master is obtained by forming a reverse shape (that is, a plurality of convex portions) of the arrangement pattern on the surface (transfer surface) of a flat substrate. Then, the embossed film is produced by sequentially transferring the transfer surface shape of the stamper master to the film to be transferred.
  • the method of producing an embossed film using a stamper master has a problem that it is very difficult to accurately position the stamper master with respect to the transfer film. For this reason, in the embossed film produced by this method, there was a problem that a defect of a concave portion (position shift, deficiency, distortion, etc.) was likely to occur. There may be a case where the defective concave portion is not filled with the filler. Moreover, the defect of a recessed part tends to become large, so that a filler filling film becomes long. For this reason, the problem that the filling rate of a filler varies in the length direction of a filler filling film may arise.
  • Patent Document 1 discloses a method for producing a moth-eye film by roll-to-roll.
  • a cylindrical master having a reversal shape of a moth-eye film formed on the peripheral surface is prepared.
  • the moth-eye film is produced by transferring the peripheral surface shape of the master to the film.
  • the uneven diameter is very small (less than 1 ⁇ m)
  • the above problem cannot be solved at all.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a novel and improved filler-filled film, single-wafer film, and laminated film in which the filler filling rate is more stable. It is providing the manufacturing method of a bonding body and a filler filling film.
  • a film body a plurality of recesses formed on the surface of the film body, and a filler filled in each of the recesses, the opening of the recesses is provided.
  • the diameter of the surface is at least larger than the visible light wavelength
  • the arrangement pattern of the recesses has a periodicity along the length direction of the film body
  • the filling rate of the filler at one end of the film body and the other of the film body
  • a filler-filled film is provided in which the difference from the filler filling rate in this portion is less than 0.5%.
  • the film body may be a long film.
  • the filling rate of the filler may have periodicity along the length direction of the film body.
  • all the recesses may have substantially the same shape.
  • the number of fillers filled per unit area of the film body may be 50,000,000 pieces / cm 2 or less.
  • the filler may be integrated with the film body in the recess.
  • a coating layer formed on at least a part of the surface of the film body may be provided.
  • the coating layer may be formed on at least a part of the surface of the concave portion, the surface of the convex portion between the concave portions, and the exposed surface of the filler.
  • the coating layer may contain an inorganic material.
  • the film body may be formed of a curable resin or a plastic resin.
  • a single wafer film produced by cutting the filler-filled film into a plurality of sheets.
  • an adhesive layer formed on the back surface of the film body may be provided.
  • a bonded body comprising the above film and a substrate on which the above film is bonded.
  • a step of preparing a cylindrical or columnar master having a plurality of convex portions formed on the peripheral surface, and a long master film while being conveyed by roll-to-roll The step of producing a film body by transferring the peripheral surface shape of the film to a film to be transferred, and the step of filling a plurality of recesses formed on the surface of the film body with a filler, the diameter of the opening surface of the recesses Of the filler-filled film, wherein the difference between the filler filling rate at one end of the film body and the filler filling rate at the other part of the film body is less than 0.5%.
  • a manufacturing method is provided.
  • the difference between the filler filling rate at one end of the film body and the filler filling rate at the other part of the film body is less than 0.5%. Therefore, the filling rate of the filler becomes more stable.
  • the filling rate of the filler is more stable.
  • the filler-filled film 1 includes a film body 2, a plurality of recesses 3 formed on the surface of the film body 2, and a filler 4 filled in each of the recesses 3.
  • the film body 2 is a film in which a plurality of recesses 3 are formed.
  • the material constituting the film body 2 is not particularly limited.
  • the film body 2 may be formed of any curable resin or plastic resin.
  • the curable resin include a photocurable resin and a thermosetting resin.
  • the plastic resin include thermoplastic resins (more specifically, crystalline resins that melt by heat). Therefore, the film body 2 may be formed of at least one or more of a photocurable resin, a thermosetting resin, and a thermoplastic resin, for example.
  • the film body 2 includes a sheet-like transferred substrate film 161 and a cured resin layer 162a formed on the transferred substrate film 161.
  • the cured resin layer 162a is a layer obtained by curing a photocurable resin or a thermosetting resin.
  • the concave portion 3 is formed on the surface of the cured resin layer 162a.
  • the film body 2 may be formed in a state where the curable resin and the resin constituting the transfer base film are mixed.
  • the thickness of the film body 2 is not particularly limited. The thickness of the film body 2 may be adjusted depending on the presence / absence of the above-described transfer target substrate film 161. For example, the thickness of the film body 2 may be 10 to 300 ⁇ m when the film body 2 has the transferred substrate film 161. In this case, the thickness of the cured resin layer 162a may be 1 to 50 ⁇ m, and the thickness of the transferred substrate film 161 may be 9 to 250 ⁇ m. On the other hand, when the film body 2 does not have the transfer base film 161, the thickness of the film body 2 may be 8 to 200 ⁇ m.
  • the width of the film body 2 is not particularly limited.
  • the width of the film body 2 may be 0.05 to 300 cm.
  • the length of the film body 2 is not particularly limited.
  • the lower limit of the length of the film body 2 may be any of 5 m, 10 m, 30 m, 50 m, 100 m, 200 m, 300 m, and 500 m.
  • a plurality of recesses 3 are formed on the surface of the film body 2.
  • the diameter of the opening surface of the recess 3 is at least larger than the visible light wavelength.
  • the diameter of the opening surface of the recess 3 is, for example, the diameter of the smallest circle that includes the opening surface of the recess 3 (for example, the circumscribed circle of the opening surface of the recess 3).
  • the diameter of the opening surface of the recess 3 is preferably 0.8 to 500 ⁇ m, more preferably 1.0 to 300 ⁇ m, and even more preferably larger than 1.6 ⁇ m and smaller than 300 ⁇ m. preferable.
  • the lower limit is preferably 0.8 ⁇ m or more, more preferably 1.0 ⁇ m or more, and even more preferably larger than 1.6 ⁇ m.
  • the upper limit is preferably 500 ⁇ m or less, more preferably 300 ⁇ m or less, and even more preferably less than 300 ⁇ m.
  • the shape of the opening surface of the recess 3 is not particularly limited and may be any shape.
  • the shape of the opening surface of the recess 3 may be a circle, an ellipse, a polygon, or the like.
  • the diameter of the opening surface may be the longest one of the lengths of one side constituting the polygon.
  • the opening surface of the recess 3 may have a shape having a curve in part. Further, the area of the opening surface does not have to be constant as long as the above-described conditions of the opening surface are satisfied.
  • the opening surface having the smallest area may be regarded as a point, and the opening surface having an area larger than that may be classified as a line or a surface depending on the shape.
  • the linear opening surface is formed by connecting the recesses 3 having the opening surface with the minimum area in a linear manner (that is, in a one-dimensional direction).
  • the planar opening surface is formed by connecting concave portions 3 having an opening surface with a minimum area in a planar shape (that is, in a two-dimensional direction). Therefore, the linear and planar recesses 3 can be regarded as an aggregate of the recesses 3 having an opening surface with a minimum area.
  • the shape of the line or surface is not particularly limited.
  • the aggregate of the recesses 3 may be a combination of a surface and a line.
  • the aggregate of the recesses 3 is measured as one recess 3.
  • corrugated shape shown in FIG. 1 may be reversed. That is, the concave portion 3 may be a convex portion, and the convex portion 3b (see FIG. 2) between the concave portions 3 may be a concave portion.
  • the depth d of the recess 3 is not particularly limited.
  • the depth d may be 0.08 to 30 ⁇ m.
  • the depth d is preferably 0.08 to 15 ⁇ m.
  • the aspect ratio of the recess 3 is about 0.1 to 10. Also good.
  • the aspect ratio is a value obtained by dividing the diameter of the opening surface by the depth d.
  • the depth of the recess 3 exceeds 30 ⁇ m or the aspect ratio of the recess 3 exceeds 10, it is not preferable because the formation of the recess 3 becomes difficult. Moreover, when the depth of the recessed part 3 is less than 0.08 ⁇ m, or the aspect ratio of the recessed part 3 is less than 0.1, filling of the filler 4 may be difficult.
  • the recess 3 may penetrate the cured resin layer 162a. However, it is preferable that the recess 3 does not penetrate the film body 2 regardless of whether or not the film body 2 has the substrate film 161 to be transferred.
  • each recess 3 is substantially the same throughout the film body 2.
  • the cross-sectional shape of the recessed part 3 or the shape of an opening surface is substantially the same, since the grasping state of the recessed part 3 in the filler filling film 1 becomes easier, it is preferable.
  • the arrangement pattern of the recesses 3 has a periodicity along the length direction P of the film body 2.
  • the arrangement pattern of the recesses 3 is an arrangement pattern in which the unit arrangement pattern M is repeated in the length direction of the film body 2.
  • the unit array pattern M is composed of two rows of recesses 3 arranged in a direction perpendicular to the length direction P.
  • the recesses 3 in each row are arranged at equal intervals.
  • column is arrange
  • the hexagonal lattice arrangement pattern is an example of a pattern in which the concave portions 3 are arranged in a close-packed manner.
  • the arrangement pattern is not limited to this example.
  • the array pattern may be a square lattice array pattern.
  • the unit array pattern is composed of a single row of recesses 3 arranged in a direction perpendicular to the length direction P.
  • the recesses 3 in the row are arranged at equal intervals.
  • Other arrangement patterns include lattice shapes such as an orthorhombic lattice and a parallel lattice. Further, it may be arbitrarily drawn (stipulated).
  • the width MW of the unit arrangement pattern M matches the width of the film body 2.
  • the length ML of the unit array pattern M is not particularly limited.
  • the length ML matches the circumference of the master 110.
  • the arrangement pattern of the convex portions 113 has periodicity along the circumferential direction of the master 110, that is, when the unit arrangement pattern of the convex portions 113 is repeated in the circumferential direction of the master 110, the length ML is set to the convex 113. To the length of the unit array pattern (the length in the circumferential direction of the master 110).
  • the length ML of the unit array pattern M is the minimum when the unit array pattern M is composed of one row of the recesses 3. That is, in this case, the length ML is about the diameter of the recess 3. On the other hand, the maximum is obtained when the arrangement pattern of the protrusions 113 has no periodicity. In this case, the length ML matches the circumferential length of the master 110. Therefore, the range of the length ML of the unit array pattern M is very wide.
  • the diameter of the master 110 is not particularly limited, but is, for example, 50 to 300 mm.
  • the arrangement pattern of the recesses 3 may have periodicity with respect to a direction perpendicular to the length direction of the film body 2 (width direction of the film body 2). That is, the same arrangement pattern may be repeated along the width direction of the film body 2.
  • the periodicity along the length direction P of the film body 2 and the periodicity in the direction orthogonal thereto may be the same or different. This is because when the filler-filled film 1 is made into a single sheet, substantially the same single-sheet film can be obtained.
  • the surface density of the recesses 3, that is, the number of the recesses 3 formed per unit area of the film body 2 is not particularly limited.
  • the number may be 50,000,000 pieces / cm 2 or less.
  • the contact area between the master 110 and the film body 2 increases when the recesses 3 are formed, and the master 110 and the film body 2 are separated from each other. This is not preferable because the moldability is lowered and the concave portion 3 is hardly formed.
  • the lower limit value of the surface density of the recesses 3 is not particularly limited, but may be, for example, 100 pieces / cm 2 or more.
  • the surface density of the recess 3 matches the surface density of the filler 4, that is, the number of fillers 4 filled per unit area of the film body 2.
  • the distance between the recesses 3 is not particularly limited.
  • the lower limit value of the distance between the recesses 3 may be 0.5 ⁇ m. More specifically, the lower limit value of the distance between the recesses 3 is preferably 5/8 or more, more preferably 1/2 or more, of the minimum diameter of the filler 4.
  • the upper limit of the distance between the recesses 3 is not particularly limited, but may be about 1000 ⁇ m.
  • the distance between the recesses 3 may be the distance between the center points of the opening surfaces.
  • deletion of the recessed part 3 may arise continuously in the length direction P, even in such a case, there are very few continuous defect
  • the defect of the concave portion 3 means that the concave portion 3 was not formed (in other words, the shape of the convex portion 113 (see FIG. 10) was not transferred to the film body 2).
  • deletion continuous in the length direction P means the defect
  • the number of defects continuous in the length direction P is 10 or less, preferably 5 or less.
  • FIGS. 13 and 14 are SEM photographs of the film body 2.
  • 13A and 14A are SEM images obtained by observing the surface of the film body 2
  • FIGS. 13B and 14B are SEMs obtained by observing a cross section obtained by cutting the transcript shown in FIGS. 13A and 14A along the line XX. It is an image.
  • 13A and 14A is the length direction P in FIG. 1, and the left-right direction is the width direction of the film body 2.
  • the shape of the opening surface is circular, and the arrangement pattern of the recesses 3 is a hexagonal lattice arrangement pattern.
  • the shape of the opening surface is a square, and the arrangement pattern of the recesses 3 is a square lattice arrangement pattern.
  • the filler 4 is filled in the recess 3. Filling refers to a state in which a majority of the filler is embedded in the recess 3. Note that one recess 4 is preferably filled with one filler 4. However, the aggregate of the recesses 3 may be filled with a plurality of fillers 4.
  • the material (composition) constituting the filler 4 is not particularly limited and may be appropriately selected depending on the use of the filler-filled film 1.
  • the filler 4 is an inorganic material, an organic material, an inorganic material having a multilayer structure, or a mixture of an inorganic material (inorganic material) and an organic material (organic material) (for example, a fine solid material made of an organic material coated with an inorganic material). Etc. can be used.
  • the filler 4 may be a pigment, a dye, a crystalline inorganic substance, or the like.
  • the filler 4 may be a material obtained by crushing a crystalline organic material or an inorganic material.
  • the same filler 4 may be filled in all the recessed parts 3, and a different kind of filler 4 may be filled.
  • the shape of the filler 4 is not particularly limited.
  • the filler 4 may have an isotropic shape, for example, a spherical shape.
  • the specific gravity of the filler is not particularly limited, but may be 0.8 to 23, for example.
  • the maximum length of the filler is not more than the minimum length of the opening surface of the recess 3.
  • the filler may be provided with various physical properties and functionality.
  • the filler 4 may be integrated with the film body 2 in the recess 3.
  • the integration with the film body 2 may be performed by, for example, filling the recess 3 with the filler 4 in a state where only a part of the recess 3 is cured, and then completely curing the recess 3.
  • an uncured curable resin may be applied or dispersed on the surface of the filler-filled film 1 to cure the curable resin.
  • the filling rate of the filler 4 (hereinafter also referred to as “filler filling rate”) is very stable. That is, the difference between the filler filling rate at one end F of the film body 2 and the filler filling rate at the other part of the film body 2 is less than 0.5%, preferably 0.3% or less, more preferably 0. .1% or less.
  • one end F is an end on the side where the concave portion 3 is first formed by the master 110 described later, that is, a transfer start point.
  • the other end R is an end on the side where the concave portion 3 is finally formed by the master 110, that is, an end point of transfer.
  • the direction from one end F toward the other end F is defined as the positive direction of the length direction P.
  • the filler filling rate in each part (point) of the film main body 2 is calculated as follows, for example.
  • a unit array pattern M including a focused portion is extracted, and a predetermined number m (m is an arbitrary integer greater than or equal to 0) units arranged on the positive side of the length direction P with respect to the unit array pattern M.
  • An arrangement pattern M is extracted.
  • the extracted unit array pattern M is set as a measurement target region.
  • the filler filling rate is measured by dividing the sum of the measured values of each representative region by the sum of the ideal number of fillers 4 present in each representative region.
  • the ideal number of fillers 4 present in the representative region is the number of fillers 4 that should be present in the representative region. That is, this is the number of fillers 4 measured when it is assumed that there are no defects in the recesses 3 in the representative region and that all the recesses 3 in the representative region are filled with the filler 4 without excess or deficiency.
  • the filler filling rate may be less than 100 (%) for some reason. Causes of this include misalignment of the concave portion 3 (the concave portion 3 is formed at a position different from the position where it should originally be formed), defects and distortion of the concave portion 3 (being a shape different from the original shape), etc. Is mentioned.
  • the filler 4 may not be filled in the recess 3.
  • the defect of the recess 3 occurs, there is no recess 3 to be filled with the filler 4. Accordingly, in any case, the filler filling rate decreases.
  • two recesses 3 a are missing in the unit array pattern M at the point X. Further, one recess 3a is missing in the unit array pattern M at the other end R.
  • the distribution of filler filling rate can have various modes.
  • the filler filling rate may have periodicity along the length direction P.
  • the filler filling rate in each portion may have a distribution that undulates along the length direction P.
  • the horizontal axis of FIG. 3 indicates the distance from the starting point of the film body 2 to each part on the film body 2 (that is, the distance in the length direction), and the vertical axis indicates the filler filling rate.
  • the graph L1 shows the correspondence between the distance in the length direction of the filler-filled film 1 according to this embodiment and the filler filling rate.
  • the graph L2 shows the correspondence between the distance in the length direction of the conventional filler-filled film (that is, produced using the stamper master) and the filler filling rate.
  • the filler filling rate has a distribution that undulates along the length direction.
  • the filler-filled film 1 according to this embodiment has a small variation in the filler filling rate
  • the conventional filler-filled film has a very large variation in the filler filling rate.
  • the variation of the filler filling rate increases as the film body becomes longer.
  • variation in a filler filling rate can be suppressed. That is, in this embodiment, the difference between the filler filling rate at each portion and the filler filling rate at one end F is suppressed to less than 0.5%.
  • a filler-filled film 1a shown in FIG. 4 is obtained by adding a coating layer 5 to the filler-filled film 1 described above.
  • the covering layer 5 covers the surface of the film body 2, that is, the surface (wall surface and bottom surface) of the recess 3 and the surface (tip surface) of the protrusion 3 b between the recesses 3.
  • the covering layer 5 may cover only one of the surface of the concave portion 3 and the surface of the convex portion 3b.
  • the filler 4 is filled in the concave portion 3 covered with the coating layer 5.
  • the material (composition) constituting the coating layer 5 is not particularly limited, and may be an organic material or an inorganic material.
  • the material which comprises the coating layer 5 should just be selected suitably according to the use of the filler filling film 1a, it is preferable to comprise with the material different from the film main body 2.
  • the coating layer 5 may be an inorganic layer.
  • the coating layer 5 is formed, for example, by vapor-depositing the material constituting the coating layer 5 on the film body 2.
  • the layer thickness of the covering layer 5 is not particularly limited, but is preferably substantially uniform on the surface of the film body 2 regardless of the shape of the recess 3.
  • the part formed in the surface of the recessed part 3 is formed in the surface of the recessed part 3 in the ratio of 30 volume% or less of the hollow part of the recessed part 3.
  • the vapor deposition method is not particularly limited.
  • the coating layer 5 may be formed only on a part of the recess 3 (that is, inclined) by performing oblique deposition. In this case, since the wall surface of the recessed part 3 can be inclined, it becomes easy to fill the recessed part 3 with the filler 4.
  • the coating layer 5 may be formed by applying or spraying an organic material. Also at this time, the opening surface and the spraying direction may be inclined.
  • a filler-filled film 1b shown in FIG. 5 is obtained by further forming a coating layer 6 on the surface of the filler-filled film 1a shown in FIG.
  • the coating layer 6 covers a portion of the coating layer 5 that covers the convex portion 3 b and an exposed surface of the filler 4.
  • the exposed surface of the filler 4 means a surface exposed to the outside through the opening surface of the recess 3.
  • the material constituting the coating layer 6 is not particularly limited, and may be an organic material or an inorganic material.
  • the material which comprises the coating layer 6 should just be suitably selected according to the use of the filler filling film 1b.
  • the covering layer 6 may be made of the same inorganic material as the covering layer 5 or may be made of a different inorganic material.
  • the covering layer 6 is formed by the same method as the covering layer 5.
  • a filler-filled film 1c shown in FIG. 6 is obtained by forming a coating layer 7 on the surface of the filler-filled film 1.
  • the covering layer 7 covers the surface of the convex portion 3 b and the exposed surface of the filler 4.
  • the material (composition) constituting the coating layer 7 is not particularly limited, and may be an organic material or an inorganic material.
  • the material which comprises the coating layer 7 should just be suitably selected according to the use of the filler filling film 1c.
  • the coating layer 7 may be an inorganic layer.
  • the covering layer 7 is formed by the same method as the covering layer 5.
  • a filler-filled film 1d shown in FIG. 7 is obtained by forming an adhesive layer 8 on the back surface of the film body 2 (the surface opposite to the surface on which the recesses 3 are formed).
  • the filler-filled film 1d may be bonded to another object (for example, another filler-filled film according to the present embodiment, an arbitrary base material, or the like) via the adhesive layer 8.
  • the adhesive layer 8 may be formed on the filler-filled films 1a to 1c shown in FIGS.
  • each filler-filled film 1 is a laminate film 20 in which two filler-filled films 1 are bonded together with an adhesive layer 8 interposed therebetween.
  • the number of laminated layers is two, but the number of laminated layers is not limited to this.
  • the arrangement pattern of the recessed part 3 of each filler filling film 1 may be the same, or may differ.
  • the arrangement pattern of the recesses 3 of each filler-filled film 1 may be similar to each other.
  • Each filler-filled film 1 may be filled with the same filler 4, or a different filler 4 may be filled for each filler-filled film 1.
  • the laminated film 20 may be produced by laminating the filler-filled film 1d shown in FIG.
  • the laminated film 20 may be produced by repeating the process of applying the adhesive layer 8 on the surface of the filler-filled film 1 and attaching another filler-filled film 1 thereon.
  • the filler-filled films 1a to 1c shown in FIGS. 4 to 6 may be laminated.
  • the type of the base material 31 is not particularly limited.
  • the base material 31 may be a planar member (for example, a film or a plate), or may be a three-dimensional member (for example, various housings). Further, the filler-filled films 1a to 1d, the laminated film 20, and a sheet film described later may be bonded to the base material 31.
  • the filler-filled film 1 described above may be a single wafer film by being cut into a plurality of sheets.
  • the filler filling rate can be stabilized over the entire region, so that a plurality of homogeneous sheet films can be produced.
  • the film which concerns on each modification mentioned above may also be made into a single wafer film.
  • each film is not particularly limited, but may be used in, for example, printed electronics and its application fields (related fields). Moreover, you may use not only the above-mentioned field
  • the film body 2 can be manufactured by a roll-to-roll type transfer device.
  • the structure of the transfer apparatus 100 which is an example of a transfer apparatus is demonstrated.
  • the film main body 2 is produced using a photocurable resin.
  • the transfer device 100 includes a master 110, a base material supply roll 151, a winding roll 152, guide rolls 153 and 154, a nip roll 155, a peeling roll 156, a coating device 157, and a light source 158.
  • the master 110 is a cylindrical or columnar member, and a plurality of convex portions 113 are formed on the peripheral surface of the master 110. These convex portions 113 have the inverted shape of the concave portion 3 described above. That is, in the transfer apparatus 100, the film main body 2 is produced by transferring the arrangement pattern of the convex portions 113 formed on the peripheral surface of the master 110 to the transferred film 2a.
  • the material constituting the master 110 and the size (diameter, etc.) of the master 110 are not particularly limited.
  • the master 110 may be made of quartz glass (SiO 2 ) such as fused silica glass or synthetic quartz glass, stainless steel, or the like.
  • the diameter (outer diameter) of the master 110 may be 50 to 300 mm.
  • the thickness may be 2 to 50 mm.
  • the method of forming the convex 113 on the peripheral surface of the master 110 is not particularly limited.
  • the convex part 113 may be produced by mechanically cutting the peripheral surface of the master 110 or may be produced by etching.
  • the outline of the process for producing the master 110 by etching is as follows. That is, the peripheral surface of a cylindrical or columnar substrate is covered with a resist layer. Next, a portion of the resist layer where the convex portion 113 is not formed (a portion that becomes a concave portion) is irradiated with laser light to form a latent image on the resist layer. A configuration example of an exposure apparatus that irradiates the substrate with laser light will be described later. Next, the latent image portion is removed by developing the resist layer.
  • the substrate is etched using the resist layer as a mask.
  • the convex part 113 is formed.
  • a marking indicating a position on the peripheral surface of the master 110 may be provided on the peripheral surface of the master 110.
  • the transfer progress can be confirmed by transferring such a marking to the transfer film 2a.
  • a part of the protrusion 113 formed on the master 110 may be intentionally shifted.
  • the concave portion 3 serves as a marking.
  • the positional deviation of the convex part 113 is set within a range that does not affect the quality of the film body 2.
  • FIG. 12 shows an example of the master 110.
  • a plurality of convex portions 113 are formed on the peripheral surface of the master 110.
  • the arrangement pattern of the convex portions 113 is an inverted shape of the arrangement pattern of the concave portions 3 shown in FIG. That is, the arrangement pattern of the convex portions 113 is a hexagonal lattice arrangement pattern, and has periodicity in both the axial direction A and the circumferential direction B of the master 110.
  • the base material supply roll 151 is a roll in which a long substrate film 161 to be transferred is wound in a roll shape
  • the winding roll 152 is a roll that winds up the film body 2.
  • the guide rolls 153 and 154 are rolls that transport the transfer base film 161.
  • the nip roll 155 is a roll for bringing the transfer substrate film 161 on which the uncured resin layer 162 is laminated, that is, the transfer film 2 a into close contact with the master 110.
  • the peeling roll 156 is a roll for peeling the transfer base film 161 on which the cured resin layer 162 a is laminated, that is, the film body 2 from the master 110.
  • the coating device 157 includes coating means such as a coater, and applies an uncured photocurable resin composition to the transfer base film 161 to form an uncured resin layer 162.
  • the coating device 157 may be, for example, a gravure coater, a wire bar coater, or a die coater.
  • the light source 158 is a light source that emits light having a wavelength capable of curing the photocurable resin composition, and may be, for example, an ultraviolet lamp.
  • the photo-curable resin composition is a resin that is hardened due to a decrease in fluidity when irradiated with light having a predetermined wavelength.
  • the photocurable resin composition may be an ultraviolet curable resin such as an acrylic resin.
  • the photocurable resin composition may contain an initiator, a filler, a functional additive, a solvent, an inorganic material, a pigment, an antistatic agent, a sensitizing dye, or the like, if necessary.
  • the transferred substrate film 161 is continuously sent from the substrate supply roll 151 through the guide roll 153.
  • An uncured photocurable resin composition is applied to the transferred substrate film 161 by the coating device 157, and the uncured resin layer 162 is laminated on the substrate film 161 to be transferred. Thereby, the to-be-transferred film 2a is produced.
  • the transferred film 2 a is brought into close contact with the master 110 by the nip roll 155.
  • the light source 158 cures the uncured resin layer 162 by irradiating light to the uncured resin layer 162 that is in close contact with the master 110.
  • the arrangement pattern of the convex portions 113 formed on the outer peripheral surface of the master 110 is transferred to the uncured resin layer 162. That is, the cured resin layer 162a in which the recess 3 is formed is formed.
  • the light source 158 may irradiate the recess 3 with light obliquely. In this case, only a part of the recess 3 is cured.
  • the transfer base film 161 on which the cured resin layer 162 a is laminated, that is, the film body 2 is peeled from the master 110 by the peeling roll 156.
  • the film body 2 is wound up by the winding roll 152 through the guide roll 154.
  • the transfer film 2a is conveyed by roll-to-roll, while the peripheral surface shape of the master 110 is transferred to the transfer film 2a. Thereby, the film main body 2 is produced.
  • the coating device 157 and the light source 158 are unnecessary.
  • the substrate film 161 to be transferred is a thermoplastic resin film, and a heating device is disposed upstream of the master 110. The transferred substrate film 161 is heated and softened by this heating device, and then the transferred substrate film 161 is pressed against the master 110. As a result, the arrangement pattern of the convex portions 113 formed on the peripheral surface of the master 110 is transferred to the substrate film 161 to be transferred.
  • the transferred substrate film 161 may be a film made of a resin other than a thermoplastic resin, and the transferred substrate film 161 and the thermoplastic resin film may be laminated. In this case, the laminated film is pressed by the master 110 after being heated by the heating device.
  • the transfer device 100 can continuously manufacture the transfer product, that is, the film body 2 to which the arrangement pattern of the convex portions 113 formed on the master 110 is transferred. Moreover, the film main body 2 produced using the transfer device 100 can suppress the occurrence of defects in the recesses 3 and, in turn, can suppress variations in the filler filling rate.
  • the exposure apparatus 200 is an apparatus that forms the master 110.
  • the exposure apparatus 200 includes a laser light source 221, a first mirror 223, a photodiode (Photodiode: PD) 224, a deflection optical system 225, a control mechanism 237, a second mirror 231, a moving optical table 232, and a spindle.
  • a motor 235 and a turntable 236 are provided.
  • the substrate 110a is placed on the turntable 236 and can rotate.
  • the laser light source 221 is a light source that emits laser light 220, and is, for example, a solid-state laser or a semiconductor laser.
  • the wavelength of the laser light 220 emitted from the laser light source 221 is not particularly limited, but may be, for example, a wavelength in a blue light band of 400 nm to 500 nm.
  • the spot diameter of the laser beam 220 (the diameter of the spot irradiated on the resist layer) may be smaller than the diameter of the opening surface of the recess 3, and may be about 200 nm, for example.
  • the laser light 220 emitted from the laser light source 221 is controlled by the control mechanism 237.
  • the laser light 220 emitted from the laser light source 221 travels straight as a parallel beam, is reflected by the first mirror 223, and is guided to the deflection optical system 225.
  • the first mirror 223 is composed of a polarization beam splitter, and has a function of reflecting one of the polarization components and transmitting the other of the polarization components.
  • the polarization component transmitted through the first mirror 223 is received by the photodiode 224 and subjected to photoelectric conversion. Further, the light reception signal photoelectrically converted by the photodiode 224 is input to the laser light source 221, and the laser light source 221 performs phase modulation of the laser light 220 based on the input light reception signal.
  • the deflection optical system 225 includes a condenser lens 226, an electro-optic deflector (EOD) 227, and a collimator lens 228.
  • EOD electro-optic deflector
  • the laser light 220 is condensed on the electro-optic deflection element 227 by the condenser lens 226.
  • the electro-optic deflection element 227 is an element that can control the irradiation position of the laser light 220.
  • the exposure apparatus 200 can also change the irradiation position of the laser beam 220 guided onto the moving optical table 232 by the electro-optic deflection element 227.
  • the laser beam 220 is converted into a parallel beam again by the collimator lens 228.
  • the laser light 220 emitted from the deflection optical system 225 is reflected by the second mirror 231 and guided horizontally and parallel onto the moving optical table 232.
  • the moving optical table 232 includes a beam expander (BEX) 233 and an objective lens 234.
  • the laser light 220 guided to the moving optical table 232 is shaped into a desired beam shape by the beam expander 233 and then irradiated to the resist layer of the substrate 110 a through the objective lens 234. Further, the moving optical table 232 moves by one feed pitch in the arrow R direction (feed pitch direction) every time the substrate 110a rotates once.
  • a base material 110 a is installed on the turntable 236.
  • the spindle motor 235 rotates the base 110a by rotating the turntable 236.
  • the control mechanism 237 includes a formatter 240 and a driver 230, and controls the irradiation of the laser light 220.
  • the formatter 240 generates a modulation signal that controls the irradiation of the laser light 220, and the driver 230 controls the laser light source 221 based on the modulation signal generated by the formatter 240. Thereby, irradiation of the laser beam 220 to the base material 110a is controlled.
  • the formatter 240 generates a control signal for irradiating the master 110 with the laser light 220 based on an input image on which an arbitrary pattern to be drawn on the master 110 is drawn. Specifically, first, the formatter 240 acquires an input image on which an arbitrary pattern to be drawn on the master 110 is drawn. The input image is an image corresponding to a developed view of the outer peripheral surface of the master disk 110 that is cut out in the axial direction and extended to one plane. Next, the formatter 240 divides the input image into small areas of a predetermined size (for example, in a grid pattern), and determines whether or not a drawing pattern is included in each of the small areas.
  • a predetermined size for example, in a grid pattern
  • the formatter 240 generates a control signal for controlling to irradiate the laser light 220 to each small area determined to include a drawing pattern. Further, the driver 230 controls the output of the laser light source 221 based on the control signal generated by the formatter 240. Thereby, irradiation of the laser beam 220 onto the master 110 is controlled.
  • the manufacturing method of the filler filling film 1 is demonstrated.
  • the master 110 described above is prepared.
  • the shape of the peripheral surface of the master 110 is transferred to the film 2a to be transferred.
  • the film main body 2 is produced.
  • the filler 4 is filled into the plurality of recesses 3 formed on the surface of the film body 2.
  • the method of filling the recess 3 with the filler 4 is not particularly limited.
  • the filler 4 is dispersed on the surface of the film body 2.
  • the surface of the film body 2 is wiped with a cloth or the like. Thereby, the filler 4 can be filled into the recess 3 formed on the surface of the film body 2.
  • the recess 3 may be completely cured after the filler 4 is filled in the recess 3.
  • the filler 4 is integrated with the film body 2 in the recess 3.
  • the filler 4 filled in the filler-filled film 1 may be transferred to another film or the like. Further, such transfer films may be sequentially laminated. Moreover, you may laminate
  • the film body 2 was produced using the transfer device 100.
  • the master 110 was produced by the following process. Specifically, a DLC (Diamond Like Carbon) film having a thickness of 800 nm is formed on the outer peripheral surface of the base 110a made of cylindrical quartz glass having a thickness of 4.5 mm by CVD (Chemical Vapor Deposition) using a hydrocarbon-based gas. A film was formed as an intermediate layer. Next, a tungsten oxide film was formed on the intermediate layer with a film thickness of 55 nm by a sputtering method to form a resist layer.
  • a DLC Diamond Like Carbon
  • CVD Chemical Vapor Deposition
  • thermal lithography using laser light was performed by the exposure apparatus 100 to form a latent image on the resist layer.
  • a blue semiconductor laser that emits laser light having a wavelength of 405 nm was used as the laser light source of the exposure apparatus 100.
  • the exposure pattern an array pattern in which circles having a diameter of 7 ⁇ m were arranged in a hexagonal lattice at a pitch of 10 ⁇ m (distance between the centers of the circles) was used.
  • the exposure apparatus 100 is configured to apply a portion other than the circle having the diameter of 7 ⁇ m so that the circle having the diameter of 7 ⁇ m becomes a convex portion on the master (that is, the circle having the diameter of 7 ⁇ m becomes the concave portion 3 in the transferred film body 2). And exposed.
  • the base material 110a on which the resist layer was exposed was developed using a 2.38 mass% aqueous solution of TMAH (tetramethylammonium hydroxide) to dissolve the exposed portion of the resist.
  • TMAH tetramethylammonium hydroxide
  • the intermediate layer was etched by reactive ion etching with O 2 gas using the developed resist layer as a mask.
  • the substrate 110a was etched by reactive ion etching with a CF-based gas using the resist layer and the intermediate layer as a mask. Etching of the base material 110a was performed until the height of the convex portion 113 became 7 ⁇ m so that the aspect ratio of the concave portion 3 in the film body 2 was 1.
  • a photocurable resin composition containing 100 parts by mass of an acrylate resin (M208, Toagosei) and 2 parts by mass of a photopolymerization initiator (IRGCUR184, BASF) in a base film (thickness 50 ⁇ m) made of 50 cm wide PET.
  • the product was applied at a film thickness of 30 ⁇ m.
  • the transfer device 100 the master was pressed against the base film, and the concavo-convex structure was transferred to the base film having a strength of 1000 m. Light irradiation was performed at 1000 mJ with a high-pressure mercury lamp.
  • a film body 2 was produced in which circular recesses having a diameter of 7 ⁇ m and a depth of 7 ⁇ m (aspect ratio 1) were arranged in a hexagonal lattice pattern with a distance between the centers of the recesses of 10 ⁇ m.
  • the concave portions 3 to be counted are the concave portions 3 that are not connected to each other (the convex portions 3b exist between the concave portions 3). That is, in this embodiment, the recessed portions 3 connected to each other are determined to be defective. Such a defect may be caused by a displacement of the recess 3 or the like.
  • Eposta MA1006 manufactured by Nippon Shokubai Co., Ltd. was prepared, and this resin filler was classified so as to have an average diameter of 5 ⁇ m.
  • the diameter of the resin filler is a diameter when each particle of the resin filler is regarded as a sphere, that is, a sphere equivalent diameter.
  • the average diameter is an arithmetic average value of the diameters of the resin fillers.
  • Classification was performed using an image type particle size distribution analyzer FPIA3000 (manufactured by Sysmex Corporation, Malvern).
  • the resin filler after classification was used as the filler 4.
  • Filling the filler 4 was performed by the method described above. That is, the filler 4 was dispersed on the surface of the film body 2. Subsequently, the filler 4 was filled in the concave portion 3 by wiping the filler 4 with a cloth. Thereby, the filler filling film 1 was produced.
  • the filler 4 to be counted was a filler 4 that is completely filled in the recess 3. Even when the recesses 3 are connected to each other, when the filler 4 is completely filled in the recesses 3, the filler 4 is also counted.
  • the counting target was the same in the measurement of the filler filling rate described later. When two recesses 3 are connected, the recess 3 can be filled with a maximum of two fillers 4.
  • a point 1 m from the leading edge (the edge that is first introduced into the master 110) in the length direction P of the filler-filled film 1 is one end F (starting point), and a point 1000 m from the leading edge is the other end.
  • the filler filling rate at each point of 1 m, 250 m, 500 m, 750 m, and 1000 m from the tip edge was calculated as part R (end point).
  • a unit array pattern M including each point is extracted, and a unit array existing within a range of 10 cm (20% of the film width) on the positive side in the length direction P with respect to the unit array pattern M. Pattern M was extracted. These unit array patterns M were used as measurement target areas.
  • a representative region of 200 ⁇ m * 200 ⁇ m was set for about 25 cm 2 in the measurement target region, and the number of fillers 4 in each representative region was measured by optical microscope observation. And the filler filling rate was measured by dividing the sum total of the measured value of each representative area
  • the filler filling rate at each point is shown in Table 1 below. As shown in Table 1, when the length of the filler-filled film 1 is 1000 m, the filler filling rate of 1 m from the leading edge is almost the same as the filler filling rate at each point of 250 m, 500 m, 750 m, and 1000 m. It was. Therefore, a stable (ie, highly reproducible) filler filling rate was obtained at points of 0.1%, 25%, 50%, 75%, and 100% with respect to the entire length of the filler-filled film 1. Become.
  • the filler filling rate was measured in the same manner at a point about 100 m from the tip edge, a value almost the same as Table 1 was obtained.
  • the difference between the filler filling rate at one end F of the film body 2 and the filler filling rate at the other part of the film body 2 is 0.1% or less.
  • the filler-filled film 1 has the recesses 3 arranged in a hexagonal lattice pattern, that is, in the most dense arrangement pattern. That is, the filler-filled film 1 is filled with the fillers 4 in the densest arrangement pattern.
  • the filler filling rate very stable (namely, very reproducible) in the length direction of the filler filling film 1 is obtained. Accordingly, the filler 4 can be expected to have the same effect as long as it is in a range in which the recesses 3 can be provided, regardless of the arrangement pattern.
  • a SUS plate having a size of 10 cm * 10 cm was mechanically cut to obtain a stamper master on which convex portions having the same arrangement pattern as in the example were formed. Further, a fluorine-based mold release agent (Die Free GA70500 manufactured by Daikin Industries, Ltd.) was sprayed on the surface (uneven surface) on which the convex portions of the stamper master were formed. Then, a film body was manufactured by performing the same process except that the master 110 of the transfer device 100 was replaced with a stamper master.
  • a fluorine-based mold release agent Die Free GA70500 manufactured by Daikin Industries, Ltd.
  • the filler filling rate is more stable.
  • the film body 2 may be a long film.
  • the filler filling rate becomes less stable as the film body 2 becomes longer, so that the effect of the present embodiment is more likely to appear.
  • the filler filling rate may have periodicity along the length direction of the film body 2. Even in this case, the filler filling rate is stable.
  • all the recesses 3 may have substantially the same shape. In this case, the filler filling rate can be further stabilized.
  • the number of fillers filled per unit area of the film body 2 may be 50,000,000 pieces / cm 2 or less. Even in this case, the filler filling rate is stable.
  • the filler 4 may be integrated with the film body 2 in the recess 3. In this case, wasteful removal of the filler 4 is suppressed, so that the filler filling rate is more stable.
  • the coating layers 5, 6, and 7 formed in at least one part among the surfaces of the film main body 2.
  • the use of the filler-filled film 1 is expanded by forming the coating layers 5, 6, and 7 according to the use of the filler-filled film 1.
  • the coating layer may be formed on at least a part of the surface of the concave portion, the surface of the convex portion between the concave portions, and the exposed surface of the filler. Even in this case, the filler filling rate is stable.
  • the coating layer may contain an inorganic material. Even in this case, the filler filling rate is stable.
  • the film body may be formed of a curable resin or a plastic resin. Even in this case, the filler filling rate is stable.
  • the filler-filled film 1 may be a single wafer film. In this case, the quality of the sheet film is stabilized.
  • a laminated film in which a plurality of films are laminated may be formed. In this case, the quality of the laminated film is stabilized.
  • an adhesive layer formed on the back surface of the film body may be provided. Thereby, the filler filling film 1 can be easily bonded to the other base material 31 or the like.
  • FIG. the function of the bonded body 30 can be stabilized. This is because the filler filling rate of the filler-filled film 1 or the like is stable.

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Abstract

L'invention fournit un film rempli d'une charge ainsi que son procédé de fabrication, un film en feuille, un film stratifié et un corps collé. Selon un mode de réalisation, l'invention fournit un film rempli d'une charge qui est équipé d'un corps principal de film, d'une pluralité de parties en creux formée à la surface de ce corps principal de film, et d'une charge remplissant chaque partie en creux. Le diamètre d'un plan d'ouverture desdites parties en creux, est au moins supérieur à la longueur d'onde de lumière visible. Le motif d'alignement desdites parties en creux présente une périodicité dans la direction de la longueur dudit corps principal de film. La différence entre un rapport de remplissage de la charge au niveau d'une des parties extrémité du corps principal de film, et un rapport de remplissage de la charge au niveau de l'autre partie extrémité du corps principal de film, est inférieure à 0,5%.
PCT/JP2015/080344 2014-10-28 2015-10-28 Film rempli d'une charge ainsi que procédé de fabrication de celui-ci, film en feuille, film stratifié, et corps collé WO2016068171A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US15/523,212 US10065380B2 (en) 2014-10-28 2015-10-28 Filler-filled film, sheet film, stacked film, bonded body, and method for producing filler-filled film
CN202010025666.8A CN111168984B (zh) 2014-10-28 2015-10-28 填料填充膜、片状膜、层叠膜、贴合体和填料填充膜的制造方法
KR1020177004495A KR101929692B1 (ko) 2014-10-28 2015-10-28 필러 충전 필름, 매엽 필름, 적층 필름, 첩합체, 및 필러 충전 필름의 제조 방법
CN201580055666.XA CN106794622B (zh) 2014-10-28 2015-10-28 填料填充膜、片状膜、层叠膜、贴合体和填料填充膜的制造方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2014-219784 2014-10-28
JP2014219784 2014-10-28
JP2015209377A JP6756098B2 (ja) 2014-10-28 2015-10-23 フィラー充填フィルム、枚葉フィルム、積層フィルム、貼合体、及びフィラー充填フィルムの製造方法
JP2015-209377 2015-10-23

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WO2016068171A1 true WO2016068171A1 (fr) 2016-05-06

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PCT/JP2015/080344 WO2016068171A1 (fr) 2014-10-28 2015-10-28 Film rempli d'une charge ainsi que procédé de fabrication de celui-ci, film en feuille, film stratifié, et corps collé

Country Status (2)

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WO (1) WO2016068171A1 (fr)

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JP2001239627A (ja) * 2000-02-29 2001-09-04 Dainippon Printing Co Ltd エンボス化粧シート
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US20030155656A1 (en) * 2002-01-18 2003-08-21 Chiu Cindy Chia-Wen Anisotropically conductive film
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JP2010033793A (ja) * 2008-07-28 2010-02-12 Tokai Rubber Ind Ltd 粒子転写膜の製造方法
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JPS5040671A (fr) * 1973-08-17 1975-04-14
JPH05329437A (ja) * 1992-05-27 1993-12-14 Dainippon Printing Co Ltd 化粧シートの製造方法
JP2000355048A (ja) * 1999-06-16 2000-12-26 Dainippon Printing Co Ltd ポリオレフィン化粧材の製造方法
JP2001239627A (ja) * 2000-02-29 2001-09-04 Dainippon Printing Co Ltd エンボス化粧シート
JP2011107405A (ja) * 2009-11-17 2011-06-02 Sekisui Chem Co Ltd 視野角制御シート及びその製造方法

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CN114083860A (zh) 2022-02-25
CN111168984B (zh) 2023-01-17
CN111168984A (zh) 2020-05-19

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