WO2015122060A1 - Surface shape measurement device, machine tool provided with same, and surface shape measurement method - Google Patents

Surface shape measurement device, machine tool provided with same, and surface shape measurement method Download PDF

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Publication number
WO2015122060A1
WO2015122060A1 PCT/JP2014/079052 JP2014079052W WO2015122060A1 WO 2015122060 A1 WO2015122060 A1 WO 2015122060A1 JP 2014079052 W JP2014079052 W JP 2014079052W WO 2015122060 A1 WO2015122060 A1 WO 2015122060A1
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WO
WIPO (PCT)
Prior art keywords
measurement
surface shape
light beam
light
receiving unit
Prior art date
Application number
PCT/JP2014/079052
Other languages
French (fr)
Japanese (ja)
Inventor
勝彦 大野
静雄 西川
Original Assignee
Dmg森精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Dmg森精機株式会社 filed Critical Dmg森精機株式会社
Priority to GB1612558.5A priority Critical patent/GB2544134A/en
Priority to DE112014006370.3T priority patent/DE112014006370T5/en
Publication of WO2015122060A1 publication Critical patent/WO2015122060A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B23Q17/2233—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work for adjusting the tool relative to the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2428—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring existing positions of tools or workpieces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Definitions

  • the present invention relates to a surface shape measuring device that measures a surface shape by a noncontact displacement sensor using a light beam, a machine tool equipped with the surface shape measuring device, and a surface shape measuring method.
  • the surface level difference (also referred to as “edge”) of the object to be processed is an important part in setting the processing start point. The reason is that how to accurately and quickly detect the edge affects processing accuracy and processing time.
  • Patent Document 1 a laser beam from a semiconductor laser is focused and irradiated onto a surface to be measured, and its reflected light is focused on a multiple division photodetector.
  • the distance between the laser light and the measurement surface is adjusted such that the plurality of output signals from the light detectors have maximum amplitude.
  • the edge of the measurement surface is detected from the output intensity difference of each detection unit constituting the multi-split photodetector.
  • the present invention has been made in consideration of the above problems, and its object is to provide a surface shape measuring device capable of detecting the position of the surface step of the object to be measured in a simpler and shorter time than in the prior art. It is to provide.
  • the present invention in one aspect, is a surface shape measuring device that measures the surface shape of a measurement object including a step, and includes a displacement gauge, a moving mechanism, a measurement control unit, and a step specifying unit.
  • the displacement meter includes a light emitting unit that emits a light beam toward a measurement target, an optical system that collects scattered light of the light beam from the measurement target, and a light receiving unit that detects a collection position by the optical system.
  • the displacement gauge measures the displacement of the surface of the measurement object based on the light collecting position at the light receiving unit.
  • the moving mechanism scans the light beam by relatively moving the displacement meter and the measurement object.
  • the measurement control unit is configured to perform the first measurement and the second measurement.
  • the measurement control unit continuously measures the displacement of the surface of the measurement object by the displacement gauge while scanning the light beam by the moving mechanism in the direction crossing the step.
  • the measurement control unit is the same as the first measurement in a state where the arrangement of the optical system and the light receiving unit is rotated 180 degrees with respect to the case of the first measurement with the light beam as the rotational symmetry axis. Measure the location continuously with a displacement gauge.
  • step difference identification part pinpoints the position of a level
  • the position of the step can be specified based on the position of the measurement point (separation start point) at which the difference in the measurement value starts to occur.
  • the step identifying unit is a point separated by 1/2 of the spot size of the light beam from the separation start point. As the position of the step.
  • the surface shape measuring apparatus further comprises a data correction unit.
  • the data correction unit sets the value of the surface displacement at each measurement point from the separation start point to the position of the above specified step to the average value of the measurement value by the first measurement and the measurement value by the second measurement.
  • the scanning direction of the light beam is not perpendicular to the light path including the light beam and the condensing position of the light receiving unit.
  • the light receiving portion is disposed at one of the front and the back of the scanning direction of the light beam with respect to the light beam.
  • the light receiving unit is disposed at the other of the front and rear in the scanning direction with respect to the light beam.
  • the displacement meter includes, as an optical system, a first optical system, and a second optical system disposed at a position where the first optical system is rotated 180 degrees with the light beam as a rotational symmetry axis.
  • the displacement gauge includes, as a light receiving unit, a first light receiving unit, and a second light receiving unit disposed at a position obtained by rotating the first light receiving unit by 180 degrees with the light beam as a rotational symmetry axis.
  • the first optical system and the first light receiving unit are used for the first measurement
  • the second optical system and the second light receiving unit are used for the second measurement.
  • the first light receiving unit is disposed either forward or backward of the light beam in the scanning direction of the light beam.
  • the second light receiving unit is disposed at the other of the front and the back in the scanning direction with respect to the light beam.
  • the position of the step can be specified based on the position of the measurement point (separation start point) at which the difference in the measurement value starts to occur.
  • the present invention is a surface shape measuring method of measuring the surface shape of a measurement object including a step using a noncontact displacement meter.
  • the above-described displacement meter includes a light emitting unit that emits a light beam toward an object to be measured, an optical system that condenses scattered light of the light beam from the object to be measured, and a light receiving unit that detects a condensing position by the optical system.
  • the surface shape measuring method continuously measures the displacement of the surface of the measurement object by the displacement meter while scanning the light beam in the direction crossing the step by relatively moving the displacement meter and the measurement object.
  • the same position as the first measurement step A step of determining the position of the step based on a second measurement step continuously measured by the displacement gauge, and a separation start point at which the measurement value in the first measurement step and the measurement value in the second measurement step begin to separate
  • FIG. 1 is a block diagram schematically showing a configuration example of a surface shape measuring apparatus according to a first embodiment. It is a figure for demonstrating the difference
  • FIG. 8 is a view schematically showing a configuration of a laser displacement gauge used in the surface shape measuring apparatus according to Embodiment 2. It is a flowchart which shows the measurement procedure of surface shape in the apparatus of Embodiment 2, and the processing procedure of the measured data.
  • FIG. 16 is a perspective view schematically showing a configuration of a machine tool according to a third embodiment. It is a block diagram which shows the functional structure of the part regarding surface shape measuring apparatus among the machine tools of FIG.
  • FIG. 1 is a view schematically showing the configuration of a laser displacement meter.
  • a laser displacement meter 100 includes a light emitting unit 110, a condensing lens 118 as an optical system, and a linear image sensor 120 as a light receiving unit.
  • the light emitting unit 110 includes a laser diode 112 and a lens 114.
  • the laser beam 116 emitted from the laser diode 112 is shaped into substantially parallel light by the lens 114 and irradiated to the measurement object 130.
  • the spot size w (also referred to as spot diameter) of the laser beam 116 on the measurement object is, for example, 50 ⁇ m in diameter.
  • the light diffusely reflected on the measurement object 130 is condensed by the condenser lens 118 on the linear image sensor 120 disposed in the angular direction of the laser beam 116 and ⁇ .
  • the focal length of the condenser lens 118 is f 0, and the distance from the irradiation position of the laser beam 116 (laser spot 132) on the surface of the measurement object 130 to the condenser lens 118 is l.
  • the linear image sensor 120 is disposed at an angle based on the Scheimpflug Condition. That is, the detection surface of the linear image sensor 120 and the main surface of the condenser lens 118 intersect in one straight line, and the angle between these surfaces is ⁇ .
  • the plane including the laser beam 116 is the object plane.
  • the direction of the laser beam 116 is taken as the Z-axis direction.
  • a surface including the central axis of the laser beam 116 and the optical axis of the condenser lens 118 is referred to as an optical path.
  • a direction parallel to the light road surface and perpendicular to the Z-axis direction is taken as an X-axis direction.
  • the direction perpendicular to both the X-axis direction and the Z-axis direction is taken as the Y-axis direction.
  • the Y-axis direction is a direction perpendicular to the paper surface
  • the XZ plane is parallel to the paper surface (optical road surface).
  • the beam size of the laser beam (spot size on the measurement object)
  • spot size on the measurement object There are various definitions of the beam size of laser light.
  • a laser beam having a symmetrical beam profile such as the TEM00 mode
  • one square of e to the peak value (where e is the base of the natural logarithm)
  • the beam size is defined by the width of the intensity distribution (13.5%).
  • the beam profile is broken, for example, a circle containing 86.5% of the total power of the beam with respect to the peak power is calculated, and the diameter of the circle is defined as the beam size.
  • the beam size (the object size to be measured) is substantially in the range not less than the diameter of the circle containing 50% of the total power and not more than the diameter of the circle containing 95% of the total power. It is assumed that it is equal to the spot size above).
  • FIG. 2 is a perspective view schematically showing the configuration of the linear image sensor of FIG.
  • linear image sensor 120 includes 1024 pixels (pixels) 122 linearly arranged. Each pixel 122 outputs a signal of a luminance level from 0 to a maximum of 255 according to the light reception amount.
  • FIG. 3 is a diagram showing an example of data detected by the linear image sensor of FIG.
  • the horizontal axis in FIG. 3 indicates the pixel position, and the vertical axis indicates the brightness level.
  • the light diffusely reflected on the measurement object 130 is condensed by the condensing lens 118 to a spot 124 on the linear image sensor 120, thereby generating a Gaussian as shown in FIG. 3.
  • Distribution data are obtained.
  • the distance to the object is calculated by triangulation from the barycentric position of the data in FIG. In the case of FIG. 3, the center line 180 of the luminance distribution coincides with the center of gravity.
  • FIG. 4 is a block diagram schematically showing a configuration example of the surface shape measuring apparatus according to the first embodiment.
  • the surface shape measuring apparatus 140 includes a table 144 on which the measurement object 130 is placed, a saddle 142, a laser displacement meter 100, an X-axis drive mechanism 146X, and a Y-axis drive mechanism 146Y. , Z-axis drive mechanism 146Z, C-axis drive mechanism 146C, and computer 150.
  • the table 144 is disposed on the saddle 142 and is movable in the X-axis direction.
  • the saddle 142 is movable in the Y-axis direction.
  • the X-axis drive mechanism 146X moves the table 144 in the X-axis direction.
  • the Y-axis drive mechanism 146Y moves the saddle 142 in the Y-axis direction.
  • the Z-axis drive mechanism 146Z moves the laser displacement meter 100 in the Z-axis direction.
  • the C-axis drive mechanism 146C rotates the laser displacement meter 100 about a rotation axis (C-axis rotation center) parallel to the Z-axis.
  • the C-axis drive mechanism 146C can be set to any rotation angle with respect to the reference position.
  • the X-axis drive mechanism 146X, the Y-axis drive mechanism 146Y, the Z-axis drive mechanism 146Z, and the C-axis drive mechanism 146C function as a moving mechanism 146 for relatively moving the laser displacement meter 100 and the measurement object 130. .
  • the moving mechanism 146 causes the laser beam 116 to scan over the surface of the measurement object 130.
  • the configuration of the moving mechanism 146 is not limited to the example shown in FIG.
  • the measurement object 130 may be fixed, and the laser displacement meter 100 may be movable in three directions of X, Y, and Z.
  • the laser displacement meter 100 may be fixed, and the table 144 supporting the measurement object 130 may be configured to be rotatable about the C-axis rotation center.
  • the computer 150 includes a processor 152, a memory 154, and display devices and input / output devices (not shown).
  • the processor 152 functions as a measurement control unit 156 and a data processing unit 158 by executing a program stored in the memory 154.
  • the measurement control unit 156 scans the laser beam 116 by controlling the laser displacement meter 100 and the moving mechanism 146. During the scanning of the laser beam 116, the measurement control unit 156 continuously measures the surface shape data 166 of the measurement object 130 using the laser displacement meter 100. The measured surface shape data 166 is stored in the memory 154. The surface shape data 166 is a data series in which the scanning position (the position where the laser beam is irradiated) on the measurement object 130 and the displacement of the surface of the measurement object 130 at the scanning position in the Z-axis direction are associated. is there.
  • the measurement control unit 156 further controls the C-axis drive mechanism 146C to rotate the laser displacement meter 100 180 degrees around a rotation axis (C-axis rotation center) parallel to the Z-axis direction.
  • C-axis rotation center coincides with the central axis of the laser beam 116
  • the laser displacement meter 100 rotates 180 degrees around the central axis of the laser beam 116. That is, the condenser lens 118 (optical system) and the linear image sensor 120 (light receiving unit) in FIG. 1 move to positions in line symmetry with respect to the central axis of the laser beam 116.
  • the laser beam is moved by moving the laser displacement meter 100 in the X-axis direction and the Y-axis direction along with the rotation around the C-axis rotation center.
  • the laser displacement meter 100 can be rotated 180 degrees around the central axis of the laser beam 116 while maintaining the position 116.
  • the measurement control unit 156 measures the same position as before the rotation by the laser displacement meter 100. By comparing the surface shape data of the same portion measured before and after rotation, the edge position of the step portion of the measurement object 130 can be detected easily, accurately and in a short time.
  • the data processing unit 158 performs data processing on data (surface shape data 166) measured by the laser displacement meter 100 in order to specify the step position. The contents of the data processing will be described later with reference to FIG.
  • the position of the level difference is detected by using an error generated when measuring the level difference portion with the triangulation type laser displacement meter.
  • an error generated when measuring the stepped portion will be described, and next, a data processing procedure for detecting the position of the stepped portion will be described.
  • FIG. 5 is a diagram for explaining an error that occurs when measuring the stepped portion.
  • the scanning direction of the laser beam is the + X direction.
  • the laser beam is irradiated along a straight line 136 on the surface of the measurement object 130.
  • the direction of the straight line 136 (the scanning direction of the laser beam) intersects (does not have to be orthogonal to) the edge 134 of the step.
  • the size of the laser spot 132 is shown enlarged to facilitate the illustration.
  • the condensing lens (optical system) 118 and the linear image sensor (light receiving unit) 120 that constitute the laser displacement meter are positioned in front of the laser beam in the scanning direction.
  • the direction is decided.
  • the laser spot 132 reaches the edge portion, a part of the laser spot 132 on the side close to the linear image sensor 120 is missing.
  • the position of the center of gravity of the focused spot 124 of the linear image sensor 120 moves, so that the surface flat portion 138 of the measurement object 130 is positioned above (closer to the light emitting unit 110) by ⁇ + than in reality. Observed.
  • FIG. 6 is a diagram for explaining an error that occurs when measuring the stepped portion when the arrangement of the laser displacement gauge shown in FIG. 5 is rotated by 180 degrees.
  • the laser beam is irradiated along a straight line 136 which is the same location on the surface of the measurement object 130, with the scanning direction of the laser beam as the + X direction.
  • the size of the laser spot 132 is shown enlarged for ease of illustration.
  • the arrangement of the condenser lens 118 and the linear image sensor 120 in the case of FIG. 6 is obtained by rotating the arrangement of FIG. 5 by 180 degrees around the central axis 116C of the laser beam. That is, the direction of the laser displacement meter is determined such that the condenser lens 118 and the linear image sensor 120 are located behind the laser beam in the scanning direction.
  • the center of gravity of the focused spot 124 of the linear image sensor 120 moves.
  • the moving direction of the position of the center of gravity of the focused spot 124 is opposite to that in the case of FIG. Therefore, the surface of the measurement object 130 is observed to be located by ⁇ (actually far from the light emitting unit 110) below the actual value.
  • FIG. 7 is a view schematically showing an example of the luminance distribution of the focused spot on the linear image sensor in the cases of FIG. 5 and FIG.
  • FIG. 7 (A) shows the luminance distribution in the case corresponding to FIG. 5
  • FIG. 7 (B) shows the luminance distribution in the case corresponding to FIG.
  • the luminance distribution has a shape close to a Gaussian distribution, and the center line 180 of the luminance distribution in this case is indicated by a dashed dotted line.
  • the lines 180 are offset in opposite directions.
  • the measurement values of the laser displacement gauge have errors in the directions opposite to each other between the case of FIG. 5 and the case of FIG.
  • FIG. 8 is a view showing an example of measurement data of surface shape in the cases of FIG. 5 and FIG.
  • measurement data 186 in the case of FIG. 5 is shown by a solid line
  • measurement data 188 in the case of FIG. 6 is shown by a broken line.
  • FIG. 8B an average value 190 of the measurement data 186 in the case of FIG. 5 and the measurement data 188 in the case of FIG. 6 is shown.
  • measurement data 186 in the case of FIG. 5 matches measurement data 188 in the case of FIG.
  • the measurement data 186 in the case of FIG. 5 and the measurement data 188 in the case of FIG. 6 are different.
  • the measurement point P0 at which the measured value in the case of FIG. 5 and the measured value in the case of FIG. 6 begin to separate is also referred to as a separation start point.
  • the left end of the laser spot 132 coincides with the edge 134 (immediately when the laser spot 132 deviates from the upper flat surface 138), it corresponds to the point P3 moved by the spot size (w) from the point P0 in FIG. .
  • the light reception amount of the linear image sensor 120 reaches the detection limit at the point P2 before the scanning position reaches the point P3, measurement can not be performed by the laser displacement meter.
  • FIG. 9 is a flowchart showing the procedure of measuring the surface shape and the procedure of processing the measured data.
  • measurement control unit 156 performs measurement while scanning laser beam 116 with respect to a measurement range including a step by driving movement mechanism 146.
  • the surface shape of the object is continuously measured using the laser displacement meter 100 (step S100).
  • interval by a laser displacement meter since the error in the edge part mentioned above appears in the range smaller than laser spot size, it is necessary to make the sampling space
  • the measurement control unit 156 rotates the laser displacement meter 100 by 180 degrees around the central axis of the laser beam 116 by driving the C-axis drive mechanism 146C (step S105).
  • the C-axis rotation center of the C-axis drive mechanism 146C and the central axis of the laser beam 116 do not coincide with each other, the X-axis drive mechanism 146X and the X-axis drive mechanism 146X and the 180-degree rotational drive using the C-axis drive mechanism 146C.
  • the laser displacement meter 100 is moved to maintain the position of the central axis of the laser beam 116 by at least one of the Y-axis drive mechanisms 146Y.
  • the measurement control unit 156 continuously measures the same place as in the case of the first measurement step using the laser displacement meter 100 (step S110).
  • the data (surface shape data 166) measured by the first and second measurement steps are stored in the memory 154.
  • Data processing unit 158 includes a level difference identification unit 160 and a data correction unit 162.
  • the step specifying unit 160 separates the measured value (referred to as M1) in the first measurement step and the measured value (referred to as M2) in the second measurement step.
  • the separation start point (point P0 in FIG. 8A) to be started is specified (step S115).
  • various methods can be considered as a method of specifying the separation start point of the measurement value M1 and the measurement value M2 specifically. For example, a point at which the difference between the measurement values M1 and M2 exceeds a predetermined threshold may be set as the separation start point. Alternatively, an approximate curve representing the relationship between the measurement value difference M1-M2 and the scanning position may be determined, and a point at which the value of the approximate curve exceeds a predetermined threshold may be set as the separation start point.
  • step difference identification part 160 pinpoints a level
  • the data correction unit 162 corrects the measured value from the separation start point P0 to the step position P1 (step S125). Specifically, the data correction unit 162 sets the average value (190 in FIG. 8B) of the measurement value M1 in the first measurement step and the measurement value M2 in the second measurement step in the height direction in the section Displacement of the Thereafter, the surface shape data may be further corrected by performing filtering processing such as moving average, for example.
  • the scanning direction of the laser beam is, as shown in FIGS. 5 and 6, an optical road surface (XZ plane) including the central axis 116C of the laser beam and the focused spot 124 of the linear image sensor (light receiving unit) 120. It is desirable that the directions are parallel.
  • the scanning direction is parallel to the light road surface, the difference between the measurement value M1 of the edge portion in the first measurement step and the measurement value M2 of the edge portion in the second measurement step is largest.
  • Z-axis direction what angle is the scanning direction of the laser beam if it is not perpendicular to the light path (if it is not parallel to the YZ plane) (However, the step portion needs to intersect the scanning direction).
  • the laser displacement meter 100 is used as the central axis of the laser beam 116.
  • the laser displacement meter 100 measures the same position as before rotation. Then, the surface shape data of the same place measured before and after rotation are compared, and the position of the edge is specified based on the position of the measurement point (separation start point) at which the difference between both data starts to occur.
  • the position of the step (edge) of the measurement object 130 can be detected easily, accurately and in a short time.
  • FIG. 10 is a view schematically showing a configuration of a laser displacement gauge used in the surface shape measuring apparatus according to the second embodiment.
  • a laser displacement meter 100A includes a light emitting unit 110, condensing lenses 118A and 118B as first and second optical systems, and a linear image sensor 120A as first and second light receiving units. , 120B.
  • the condenser lens 118 B and the linear image sensor 120 B are disposed at positions where the condenser lens 118 A and the linear image sensor 120 A are respectively rotated 180 degrees around the central axis of the laser beam 116.
  • the light emitting unit 110 includes a laser diode 112 and a lens 114.
  • the laser beam 116 emitted from the laser diode 112 is shaped into substantially parallel light by the lens 114 and irradiated to the measurement object 130.
  • the light diffusely reflected on the measurement object 130 is condensed by the condenser lens 118A on the linear image sensor 120A disposed at an angular direction of + ⁇ with respect to the laser beam 116, and
  • the light is condensed by the condensing lens 118B on the linear image sensor 120B disposed in the angular direction (opposite to + ⁇ ) of ⁇ .
  • the laser displacement meter 100A of FIG. 10 is attached to the surface shape measuring apparatus 140 shown in FIG. 4 instead of the laser displacement meter 100 of FIG.
  • the displacement of the surface of the measurement object 130 is determined based on the position of the focused spot 124A on the linear image sensor 120A and the position of the focused spot 124B on the linear image sensor 120B.
  • the other points in FIG. 10 are the same as in FIG. 1, and therefore, the same or corresponding portions are denoted by the same reference characters and description thereof will not be repeated.
  • FIG. 11 is a flowchart showing the procedure of measuring the surface shape and the procedure of processing the measured data in the apparatus of the second embodiment.
  • measurement control unit 156 drives movement mechanism 146 to scan measurement object 130 while scanning laser beam 116 with respect to the measurement range including the step.
  • the surface shape of is continuously measured using the laser displacement meter 100 (step S200).
  • the condenser lenses 118A and 118B are provided in advance and linear image sensors 120A and 120B are provided in advance at positions symmetrical to each other with respect to the central axis of the laser beam 116. Therefore, it is not necessary to measure the same place twice as in the first embodiment.
  • the scanning direction of the laser beam is not perpendicular to the light path surface (XZ plane) when viewed in plan from the direction of the laser beam 116 (Z-axis direction) ( Not parallel to the YZ plane). Desirably, the scanning direction of the laser beam is parallel to the light path (XZ plane).
  • the step identification unit 160 of the data processing unit 158 measures the measurement value (referred to as M1) by the first linear image sensor 120A and the measurement by the second linear image sensor 120B within the measurement range of the surface shape data 166.
  • a separation start point at which the value (referred to as M2) starts to separate is specified (step S205).
  • the level difference identification unit 160 identifies the position of the level difference based on the identified separation start point (step S210). Specifically, in the separation section in which the measurement value M1 measured by the first linear image sensor 120A and the measurement value M2 measured by the second linear image sensor 120B are separated, the step specifying unit 160 detects the laser beam from the separation start point A point separated by a half of the spot size w of is identified as the step position (step S210).
  • the data correction unit 162 corrects the measured value from the separation start point to the step position (step S215). Specifically, the data correction unit 162 sets an average value of the measurement value M1 by the first linear image sensor 120A and the measurement value M2 by the second linear image sensor 120B as the displacement in the height direction in the section.
  • the surface shape of the measurement object including the step portion is measured by using a laser displacement meter including the two linear image sensors (light receiving units).
  • the position of the edge is specified based on the position of the measurement point (separation start point) at which the difference between the measurement values of the first and second linear image sensors starts to occur.
  • the position of the step (edge) of the object to be measured can be detected easily, accurately and in a short time.
  • Embodiment 3 discloses a machine tool provided with the surface shape measuring apparatus of Embodiment 1 or 2. Although the case where the machine tool is a vertical machining center is described below, the machine tool may be another type such as a horizontal machining center or a lathe.
  • FIG. 12 is a perspective view schematically showing the configuration of the machine tool according to the third embodiment.
  • the machine tool 200 includes a processing device 10, an NC (Numeric Control) device 24, an ATC (Automatic Tool Changer) 28, and a computer 150.
  • NC Numeric Control
  • ATC Automatic Tool Changer
  • the processing apparatus 10 comprises a bed 12, a column 14 mounted on the bed 12, a spindle head 20 with a spindle 22 and a saddle 16 with a table 18.
  • the spindle head 20 is supported on the front surface of the column 14 and is movable in the vertical direction (Z-axis direction).
  • a tool (not shown) or a measuring head 42 is removably attached to the tip of the spindle 22.
  • the main spindle 22 is supported by the main spindle head 20 so as to be rotatable about a C-axis rotation center whose central axis (CL in FIG. 2) is parallel to the Z-axis.
  • the spindle head 20 incorporates a rotary drive unit 36 for rotating the spindle 22 at a high speed for processing the workpiece 2 and a rotary drive unit 38 capable of low-speed feed control of the rotation of the spindle 22.
  • the latter rotational drive unit 38 corresponds to the C-axis drive mechanism 146C of FIG.
  • the measurement head 42 incorporates the laser displacement meter 100 or 100A shown in FIG. 1 or 10, a control circuit and a drive battery of the laser displacement meter, and a communication device for performing wireless communication.
  • the orientation of the measurement head 42 i.e., the laser displacement gauges 100 and 100A is controlled by the low speed feed controllable rotary drive 38.
  • the saddle 16 is disposed on the bed 12 and is movable in the back and forth horizontal direction (Y-axis direction).
  • a table 18 is disposed on the saddle 16.
  • the table 18 is movable in the left and right horizontal directions (X-axis direction).
  • the workpiece 2 is placed on the table 18.
  • the saddle 16 corresponds to the saddle 142 of FIG. 4 and the table 18 corresponds to the table 144 of FIG.
  • the workpiece 2 corresponds to the measurement object 130 of FIG.
  • the processing apparatus 10 linearly moves the measuring head 42 and the workpiece 2 in the directions of three axes orthogonal to the X, Y, and Z axes, and measures at least around the center of rotation of the C axis parallel to the Z axis. It is a machining center capable of rotationally driving the head 42. Unlike the configuration of FIG. 1, the processing apparatus 10 may be configured to move the spindle head 20 supporting the measurement head 42 in the X-axis and Y-axis directions with respect to the workpiece 2, or The table 18 supporting the object 2 may be rotatable around the C-axis rotation center.
  • the NC device 24 controls the overall operation of the processing device 10 including the above-described orthogonal three-axis and C-axis control.
  • ATC (Automatic Tool Changer) 28 automatically exchanges the tool and the measuring head 42 with respect to the spindle 22 respectively.
  • the ATC 28 is controlled by an NC unit 24.
  • FIG. 13 is a block diagram showing a functional configuration of a portion related to the surface shape measuring device in the machine tool of FIG.
  • the Z-axis feed mechanism 34, the Y-axis feed mechanism 32, and the X-axis feed mechanism 30 provided in the processing apparatus 10 are shown in FIG.
  • Z-axis feed mechanism 34 drives spindle head 20 supported by column 14 to move in the Z-axis direction.
  • the Y-axis feed mechanism 32 drives the saddle 16 disposed on the bed 12 to move it in the Y-axis direction.
  • the X-axis feed mechanism 30 drives the table 18 mounted on the saddle 16 and supporting the workpiece 2 to move it in the X-axis direction.
  • the NC device 24 controls the Z-axis feed mechanism 34, the Y-axis feed mechanism 32 and the X-axis feed mechanism 30, respectively.
  • the X-axis feed mechanism 30, the Y-axis feed mechanism 32, and the Z-axis feed mechanism 34 correspond to the X-axis drive mechanism 146X, the Y-axis drive mechanism 146Y, and the Z-axis drive mechanism 146Z in FIG.
  • the computer 150 includes a processor 152, a memory 154, and a communication device 168 for wireless communication with the measurement head 42.
  • the processor 152 functions as the measurement control unit 156 and the data processing unit 158 described in FIG. 4 by executing the program stored in the memory 154.
  • the measurement control unit 156 cooperates with the NC device 24 to continuously change the relative positional relationship between the measurement head 42 and the workpiece 2, whereby the laser beam 116 scans along the surface of the workpiece 2. Do.
  • the measurement control unit 156 detects displacement data in the height direction (Z-axis direction) at a plurality of measurement points in the scanning direction of the laser beam 116 from the measuring head 42 as surface shape data of the workpiece 2 during scanning of the laser beam 116. get.
  • the specific procedure is as follows.
  • the NC device 24 is either one of the X-axis feed mechanism 30 and the Y-axis feed mechanism 32, or the X-axis feed mechanism 30, the Y-axis feed mechanism 32, and the Z axis.
  • the NC device 24 By driving at least two axes of the feed mechanism 34, the relative positional relationship between the measuring head 42 and the workpiece 2 is continuously changed.
  • a PLC (Programmable Logic Controller) 26 incorporated in the NC device 24 outputs a trigger signal to the communication device 168 at a predetermined cycle in synchronization with the driving of the above-mentioned feed mechanism.
  • the communication device 168 receives the trigger signal, it sends a measurement command f to the measurement head 42, and the measurement head 42 follows the measurement command f to determine the distance D from the measurement head 42 to the workpiece 2 (that is, the displacement of the surface of the workpiece 2) Measure Data F of the measured distance D is transmitted from the measurement head 42 to the measurement control unit 156 via the communication device 168.
  • the PLC 26 further obtains positional information of the X-axis feed mechanism 30, the Y-axis feed mechanism 32, and the Z-axis feed mechanism 34 in synchronization with the timing of distance measurement by the measurement head 42 described above. Detect location data.
  • the PLC 26 transmits data of the detected position of the measurement head 42 to the measurement control unit 156.
  • the measurement control unit 156 Based on the position data of the measurement head 42 acquired from the PLC 26 and the data F of the distance D acquired from the measurement head 42, the measurement control unit 156 measures the height direction at each measurement point along the scanning direction of the laser beam 116.
  • the displacement data (in the Z-axis direction) is stored in the memory 154 as surface shape data 166.
  • the measurement control unit 156 measures the height direction at each measurement point along the scanning direction of the laser beam 116.
  • the displacement data (in the Z-axis direction) is stored in the memory 154 as surface shape data 166.
  • step difference of the workpiece 2 using the laser displacement meter 100 of the structure shown in FIG. 1 before and after rotating 180 degrees of directions of the laser displacement meter 100 about the same location of the workpiece 2 A total of two measurements are taken.
  • the processor 152 further functions as a data processing unit 158 for performing data processing of the surface shape data 166 described above.
  • the operation of the data processing unit 158 is as described in the first and second embodiments. As a result of data processing by the data processing unit 158, the position of the step (edge) of the workpiece 2 can be detected easily and in a short time.

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Abstract

In this surface shape measurement device, through triangulation using a light beam (116), a displacement gauge (100) measures the displacement of the surface of an object being measured (130). In a first measurement, while consecutively measuring the object being measured (130) using the displacement gauge (100), a measurement control unit (156) scans the light beam (116) in a direction intersecting with an edge of the object being measured (130) by moving the displacement gauge (100) and object being measured (130) in relation to each other. In a second measurement, in a state in which the orientation of the displacement gauge (100) has been rotated 180 degrees from the orientation of the first measurement with the light beam (116) as the axis of rotational symmetry, the measurement control unit (156) consecutively measures the same positions as in the first measurement using the displacement gauge (100). An edge specification unit (160) specifies the edge position on the basis of the divergence start point at which the measurement values of the first measurement and second measurement start to diverge.

Description

表面形状測定装置およびそれを備えた工作機械ならびに表面形状測定方法Surface shape measuring device, machine tool provided with the same, and surface shape measuring method
　この発明は、光ビームを用いた非接触方式の変位センサによって表面形状を測定する表面形状測定装置、および表面形状測定装置を備えた工作機械、ならびに表面形状測定方法に関する。 The present invention relates to a surface shape measuring device that measures a surface shape by a noncontact displacement sensor using a light beam, a machine tool equipped with the surface shape measuring device, and a surface shape measuring method.
　従来から、工作機械で加工を行う際、加工対象物の形状を非接触式センサによって測定することが一般的となっている。この場合、工作機械の加工プログラムは、測定した形状に基づいて、対話システムまたは外部コンピュータ等を用いて作成される。 2. Description of the Related Art Conventionally, when machining with a machine tool, it has been common to measure the shape of a workpiece with a non-contact sensor. In this case, the machining program of the machine tool is created using an interactive system or an external computer based on the measured shape.
　加工対象物の形状を非接触式センサによって測定する際、加工対象物の表面段差（「エッジ」とも称する）は、加工開始点を設定する上で重要な部位である。なぜなら、当該エッジをいかに正確にかつ素早く検出するかが、加工精度、加工時間に影響を及ぼすからである。 When measuring the shape of the object to be processed by a non-contact sensor, the surface level difference (also referred to as “edge”) of the object to be processed is an important part in setting the processing start point. The reason is that how to accurately and quickly detect the edge affects processing accuracy and processing time.
　非接触式センサを用いてエッジを正確に検出する方法は、従来いくつか提案されている。たとえば、特開２０１２－１９４０８５号公報（特許文献１）に記載の技術では、半導体レーザからのレーザビームが被測定面に集光照射され、その反射光が複数分割光検出器に集光される。測定面上でレーザ光を合焦させるために、光検出器からの複数の出力信号が最大振幅を有するよう、レーザ光と測定面との距離が調整される。測定面のエッジは、複数分割光検出器を構成する各検出部の出力強度差から検出される。 Several methods for accurately detecting an edge using a noncontact sensor have been proposed. For example, in the technique described in Japanese Patent Application Laid-Open No. 2012-194085 (Patent Document 1), a laser beam from a semiconductor laser is focused and irradiated onto a surface to be measured, and its reflected light is focused on a multiple division photodetector. . In order to focus the laser light on the measurement surface, the distance between the laser light and the measurement surface is adjusted such that the plurality of output signals from the light detectors have maximum amplitude. The edge of the measurement surface is detected from the output intensity difference of each detection unit constituting the multi-split photodetector.
特開２０１２－１９４０８５号公報JP, 2012-194085, A
　上記の従来技術では、レーザビームの反射光を複数分割光検出器に集光させる必要があるので装置構成が複雑になる。さらに、エッジの位置を検出するために、レーザビームが測定面上でフォーカスするようにレーザ光源および光学系の調整を行う必要があるので、測定に時間がかかる。 In the above-mentioned prior art, since it is necessary to condense the reflected light of a laser beam on a plurality of split photodetectors, the apparatus configuration becomes complicated. Furthermore, in order to detect the position of the edge, it is necessary to adjust the laser light source and the optical system so that the laser beam is focused on the measurement surface, which takes time for measurement.
　この発明は、上記の問題点を考慮してなされたものであり、その目的は、従来よりも簡単かつ短時間に測定対象物の表面段差の位置を検出することが可能な表面形状測定装置を提供することである。 The present invention has been made in consideration of the above problems, and its object is to provide a surface shape measuring device capable of detecting the position of the surface step of the object to be measured in a simpler and shorter time than in the prior art. It is to provide.
　この発明は一局面において、段差を含む測定対象物の表面形状を測定する表面形状測定装置であって、変位計と、移動機構と、測定制御部と、段差特定部とを備える。変位計は、測定対象物に向けて光ビームを出射する発光部、測定対象物からの光ビームの散乱光を集光する光学系、および光学系による集光位置を検出する受光部を含む。変位計は、受光部での集光位置に基づいて測定対象物の表面の変位を測定する。移動機構は、変位計と測定対象物とを相対的に移動させることによって、光ビームを走査する。測定制御部は、第１の測定と、第２の測定とを実行するように構成される。第１の測定において、測定制御部は、段差と交差する方向に移動機構によって光ビームを走査しながら、測定対象物の表面の変位を変位計によって連続的に測定する。第２の測定において、測定制御部は、光ビームを回転対称軸にして光学系および受光部の配置を第１の測定の場合に対して１８０度回転させた状態で、第１の測定と同一箇所を変位計によって連続的に測定する。段差特定部は、第１の測定による測定値と第２の測定による測定値とが分離し始める分離開始点に基づいて段差の位置を特定する。 The present invention, in one aspect, is a surface shape measuring device that measures the surface shape of a measurement object including a step, and includes a displacement gauge, a moving mechanism, a measurement control unit, and a step specifying unit. The displacement meter includes a light emitting unit that emits a light beam toward a measurement target, an optical system that collects scattered light of the light beam from the measurement target, and a light receiving unit that detects a collection position by the optical system. The displacement gauge measures the displacement of the surface of the measurement object based on the light collecting position at the light receiving unit. The moving mechanism scans the light beam by relatively moving the displacement meter and the measurement object. The measurement control unit is configured to perform the first measurement and the second measurement. In the first measurement, the measurement control unit continuously measures the displacement of the surface of the measurement object by the displacement gauge while scanning the light beam by the moving mechanism in the direction crossing the step. In the second measurement, the measurement control unit is the same as the first measurement in a state where the arrangement of the optical system and the light receiving unit is rotated 180 degrees with respect to the case of the first measurement with the light beam as the rotational symmetry axis. Measure the location continuously with a displacement gauge. The level | step difference identification part pinpoints the position of a level | step difference based on the isolation | separation start point from which the measured value by 1st measurement and the measured value by 2nd measurement start to separate.
　上記の構成によれば、第１の測定での段差部の測定値と第２の測定での段差部の測定値とに差が生じる。したがって、測定値に差が生じ始めた測定点（分離開始点）の位置に基づいて段差の位置を特定することができる。 According to the above configuration, a difference occurs between the measured value of the stepped portion in the first measurement and the measured value of the stepped portion in the second measurement. Therefore, the position of the step can be specified based on the position of the measurement point (separation start point) at which the difference in the measurement value starts to occur.
　好ましくは、段差特定部は、第１の測定による測定値と第２の測定による測定値とが分離している区間内で、分離開始点から光ビームのスポットサイズの１／２だけ離れた点を段差の位置として特定する。 Preferably, in the section in which the measurement value obtained by the first measurement and the measurement value obtained by the second measurement are separated, the step identifying unit is a point separated by 1/2 of the spot size of the light beam from the separation start point. As the position of the step.
　好ましくは、表面形状測定装置はデータ補正部をさらに備える。データ補正部は、分離開始点から上記の特定された段差の位置までの各測定点における表面の変位の値を、第１の測定による測定値と第２の測定による測定値との平均値に設定する。 Preferably, the surface shape measuring apparatus further comprises a data correction unit. The data correction unit sets the value of the surface displacement at each measurement point from the separation start point to the position of the above specified step to the average value of the measurement value by the first measurement and the measurement value by the second measurement. Set
　好ましくは、光ビームに沿った方向から平面視したとき、光ビームの走査方向は、光ビームと受光部の集光位置とを含む光路面に対して垂直方向でない。 Preferably, when viewed in plan from the direction along the light beam, the scanning direction of the light beam is not perpendicular to the light path including the light beam and the condensing position of the light receiving unit.
　好ましくは、第１の測定では、光ビームに対して受光部は光ビームの走査方向の前方および後方のうちのいずれか一方に配置される。第２の測定では、光ビームに対して受光部は走査方向の前方および後方のうちの他方に配置される。 Preferably, in the first measurement, the light receiving portion is disposed at one of the front and the back of the scanning direction of the light beam with respect to the light beam. In the second measurement, the light receiving unit is disposed at the other of the front and rear in the scanning direction with respect to the light beam.
　好ましくは、変位計は、光学系として、第１の光学系と、光ビームを回転対称軸にして第１の光学系を１８０度回転させた位置に配置された第２の光学系とを含む。さらに、変位計は、受光部として、第１の受光部と、光ビームを回転対称軸にして第１の受光部を１８０度回転させた位置に配置された第２の受光部とを含む。この場合、第１の光学系および第１の受光部は、第１の測定のために用いられ、第２の光学系および第２の受光部は、第２の測定のために用いられる。 Preferably, the displacement meter includes, as an optical system, a first optical system, and a second optical system disposed at a position where the first optical system is rotated 180 degrees with the light beam as a rotational symmetry axis. . Furthermore, the displacement gauge includes, as a light receiving unit, a first light receiving unit, and a second light receiving unit disposed at a position obtained by rotating the first light receiving unit by 180 degrees with the light beam as a rotational symmetry axis. In this case, the first optical system and the first light receiving unit are used for the first measurement, and the second optical system and the second light receiving unit are used for the second measurement.
　好ましくは、第１の受光部は、光ビームに対して光ビームの走査方向の前方および後方のうちのいずれか一方に配置される。第２の受光部は、光ビームに対して走査方向の前方および後方のうちの他方に配置される。 Preferably, the first light receiving unit is disposed either forward or backward of the light beam in the scanning direction of the light beam. The second light receiving unit is disposed at the other of the front and the back in the scanning direction with respect to the light beam.
　上記の構成によれば、第１の受光部による段差部の測定値と第２の受光部による段差部の測定値とに差が生じる。したがって、測定値に差が生じ始めた測定点（分離開始点）の位置に基づいて段差の位置を特定することができる。 According to the above configuration, a difference occurs between the measured value of the stepped portion by the first light receiving unit and the measured value of the stepped portion by the second light receiving unit. Therefore, the position of the step can be specified based on the position of the measurement point (separation start point) at which the difference in the measurement value starts to occur.
　この発明はさらに他の局面において、上記の表面形状測定装置を備えた工作機械である。 According to still another aspect of the present invention, there is provided a machine tool provided with the surface shape measuring apparatus described above.
　この発明はさらに他の局面において、非接触型の変位計を用いて段差を含む測定対象物の表面形状を測定する表面形状測定方法である。上記の変位計は、測定対象物に向けて光ビームを出射する発光部、測定対象物からの光ビームの散乱光を集光する光学系、および光学系による集光位置を検出する受光部を含む。表面形状測定方法は、変位計と測定対象物とを相対的に移動させることによって段差と交差する方向に光ビームを走査しながら、測定対象物の表面の変位を変位計によって連続的に測定する第１の測定ステップと、光ビームを回転対称軸にして光学系および受光部の配置を第１の測定ステップの場合に対して１８０度回転させた状態で、第１の測定ステップと同一箇所を変位計によって連続的に測定する第２の測定ステップと、第１の測定ステップによる測定値と第２の測定ステップによる測定値とが分離し始める分離開始点に基づいて段差の位置を特定するステップとを備える。 In still another aspect, the present invention is a surface shape measuring method of measuring the surface shape of a measurement object including a step using a noncontact displacement meter. The above-described displacement meter includes a light emitting unit that emits a light beam toward an object to be measured, an optical system that condenses scattered light of the light beam from the object to be measured, and a light receiving unit that detects a condensing position by the optical system. Including. The surface shape measuring method continuously measures the displacement of the surface of the measurement object by the displacement meter while scanning the light beam in the direction crossing the step by relatively moving the displacement meter and the measurement object. In the state where the arrangement of the optical system and the light receiving unit is rotated 180 degrees with respect to the case of the first measurement step with the first measurement step and the light beam as the rotational symmetry axis, the same position as the first measurement step A step of determining the position of the step based on a second measurement step continuously measured by the displacement gauge, and a separation start point at which the measurement value in the first measurement step and the measurement value in the second measurement step begin to separate And
　したがって、この発明によれば、従来よりも簡単かつ短時間で測定対象物の表面段差の位置を検出することができる。 Therefore, according to the present invention, it is possible to detect the position of the surface step of the measurement object in a simpler and shorter time than in the prior art.
レーザ変位計の構成を模式的に示す図である。It is a figure which shows the structure of a laser displacement meter typically. 図１のリニアイメージセンサの構成を模式的に示す斜視図である。It is a perspective view which shows typically the structure of the linear image sensor of FIG. 図１のリニアイメージセンサによって検出されるデータの一例を示す図である。It is a figure which shows an example of the data detected by the linear image sensor of FIG. 実施の形態１による表面形状測定装置の構成例を概略的に示すブロック図である。FIG. 1 is a block diagram schematically showing a configuration example of a surface shape measuring apparatus according to a first embodiment. 段差部の測定時に生じる誤差について説明するための図である。It is a figure for demonstrating the difference | error produced at the time of the measurement of a level | step-difference part. 図５に示すレーザ変位計の配置を１８０度回転させた場合において、段差部の測定時に生じる誤差について説明するための図である。It is a figure for demonstrating the difference | error produced at the time of measurement of a level | step-difference part, when rotating 180 degree | times of arrangement | positioning of the laser displacement meter shown in FIG. 図５および図６の場合においてリニアイメージセンサ上の集光スポットの輝度分布の一例を模式的に示す図である。It is a figure which shows typically an example of the luminance distribution of the condensing spot on a linear image sensor in the case of FIG. 5 and FIG. 図５および図６の場合において、表面形状の測定データの一例を示す図である。In the case of FIG. 5 and FIG. 6, it is a figure which shows an example of the measurement data of surface shape. 表面形状の測定手順および測定したデータの処理手順を示すフローチャートである。It is a flowchart which shows the measurement procedure of surface shape, and the processing procedure of the measured data. 実施の形態２による表面形状測定装置で用いられるレーザ変位計の構成を模式的に示す図である。FIG. 8 is a view schematically showing a configuration of a laser displacement gauge used in the surface shape measuring apparatus according to Embodiment 2. 実施の形態２の装置において表面形状の測定手順および測定したデータの処理手順を示すフローチャートである。It is a flowchart which shows the measurement procedure of surface shape in the apparatus of Embodiment 2, and the processing procedure of the measured data. 実施の形態３による工作機械の構成を模式的に示す斜視図である。FIG. 16 is a perspective view schematically showing a configuration of a machine tool according to a third embodiment. 図１２の工作機械のうち表面形状測定装置に関する部分の機能的構成を示すブロック図である。It is a block diagram which shows the functional structure of the part regarding surface shape measuring apparatus among the machine tools of FIG.
　以下、各実施の形態について図面を参照して詳しく説明する。以下の各実施の形態では、レーザ変位計を用いた表面形状測定装置を例に挙げて説明するが、レーザ光に代えて非コヒーレントな光ビームを用いた非接触式の変位計の場合にもこの発明を適用することができる。なお、以下の説明において、同一または相当する部分には同一の参照符号を付して、その説明を繰り返さない場合がある。 Hereinafter, each embodiment will be described in detail with reference to the drawings. In each of the following embodiments, a surface shape measurement apparatus using a laser displacement meter will be described as an example, but a noncontact displacement meter using a noncoherent light beam instead of a laser beam is also described. The present invention can be applied. In the following description, the same or corresponding parts may be denoted by the same reference numerals, and the description thereof may not be repeated.
　＜実施の形態１＞
　［レーザ変位計の概要］
　図１は、レーザ変位計の構成を模式的に示す図である。図１を参照して、レーザ変位計１００は、発光部１１０と、光学系としての集光レンズ１１８と、受光部としてのリニアイメージセンサ（Linear　Image　Sensor）１２０とを含む。発光部１１０は、レーザダイオード１１２と、レンズ１１４とを含む。 Embodiment 1
[Overview of Laser Displacement Gauge]
FIG. 1 is a view schematically showing the configuration of a laser displacement meter. Referring to FIG. 1, a laser displacement meter 100 includes a light emitting unit 110, a condensing lens 118 as an optical system, and a linear image sensor 120 as a light receiving unit. The light emitting unit 110 includes a laser diode 112 and a lens 114.
　レーザダイオード１１２から発せられたレーザビーム１１６はレンズ１１４によって略平行光に整形され、測定対象物１３０へ照射される。測定対象物上でのレーザビーム１１６のスポットサイズｗ（スポット径とも称する）は、たとえば、直径５０μｍである。 The laser beam 116 emitted from the laser diode 112 is shaped into substantially parallel light by the lens 114 and irradiated to the measurement object 130. The spot size w (also referred to as spot diameter) of the laser beam 116 on the measurement object is, for example, 50 μm in diameter.
　測定対象物１３０上で拡散反射された光は、レーザビーム１１６とγの角度方向に配置されたリニアイメージセンサ１２０上に、集光レンズ１１８によって集光される。図１では、集光レンズ１１８の焦点距離をｆ0とし、測定対象物１３０の表面上におけるレーザビーム１１６の照射位置（レーザスポット１３２）から集光レンズ１１８までの距離をｌとしている。 The light diffusely reflected on the measurement object 130 is condensed by the condenser lens 118 on the linear image sensor 120 disposed in the angular direction of the laser beam 116 and γ. In FIG. 1, the focal length of the condenser lens 118 is f 0, and the distance from the irradiation position of the laser beam 116 (laser spot 132) on the surface of the measurement object 130 to the condenser lens 118 is l.
　リニアイメージセンサ１２０はシャインプルーフ条件（Scheimpflug　Condition）に基付いた角度で配置される。すなわち、リニアイメージセンサ１２０の検出面と集光レンズ１１８の主面とは１直線で交わり、これらの面のなす角度をβとする。レーザビーム１１６を含む面が被写体面となる。この配置により、測定対象物１３０とレーザ変位計１００の距離が変化しても、レーザスポット１３２はリニアイメージセンサ１２０上にボケることなく結像される。 The linear image sensor 120 is disposed at an angle based on the Scheimpflug Condition. That is, the detection surface of the linear image sensor 120 and the main surface of the condenser lens 118 intersect in one straight line, and the angle between these surfaces is β. The plane including the laser beam 116 is the object plane. By this arrangement, even if the distance between the measurement object 130 and the laser displacement meter 100 changes, the laser spot 132 is imaged without blurring on the linear image sensor 120.
　図１において、レーザビーム１１６の方向をＺ軸方向とする。レーザビーム１１６の中心軸と集光レンズ１１８の光軸とを含む面を光路面と称する。この光路面に平行でありかつＺ軸方向に垂直な方向をＸ軸方向とする。Ｘ軸方向およびＺ軸方向の両方に垂直な方向をＹ軸方向とする。図１の場合、Ｙ軸方向は紙面に垂直な方向であり、ＸＺ平面は紙面（光路面）と平行である。 In FIG. 1, the direction of the laser beam 116 is taken as the Z-axis direction. A surface including the central axis of the laser beam 116 and the optical axis of the condenser lens 118 is referred to as an optical path. A direction parallel to the light road surface and perpendicular to the Z-axis direction is taken as an X-axis direction. The direction perpendicular to both the X-axis direction and the Z-axis direction is taken as the Y-axis direction. In the case of FIG. 1, the Y-axis direction is a direction perpendicular to the paper surface, and the XZ plane is parallel to the paper surface (optical road surface).
　ここで、レーザ光のビームサイズ（測定対象物上でのスポットサイズ）について説明する。レーザ光のビームサイズには種々の定義がある。たとえば、ＴＥＭ００モードのように対称なビームプロファイルのレーザ光の場合には、光軸に直交する面において、ピーク値に対してｅの２乗分の１（ただし、ｅは自然対数の底）（１３．５％）の強度分布の幅でビームサイズが定義される。ビームプロファイルが崩れている場合には、たとえば、ビームの全パワーのうち、ピークパワーを基準として８６．５％が含まれる円を算出し、この円の直径がビームサイズとして定義される。この明細書では、種々の定義を含めるために、全パワーの５０％が含まれる円の直径以上、全パワーの９５％が含まれる円の直径以下の範囲を実質的にビームサイズ（測定対象物上でのスポットサイズ）に等しいとする。 Here, the beam size of the laser beam (spot size on the measurement object) will be described. There are various definitions of the beam size of laser light. For example, in the case of a laser beam having a symmetrical beam profile such as the TEM00 mode, in a plane orthogonal to the optical axis, one square of e to the peak value (where e is the base of the natural logarithm) ( The beam size is defined by the width of the intensity distribution (13.5%). When the beam profile is broken, for example, a circle containing 86.5% of the total power of the beam with respect to the peak power is calculated, and the diameter of the circle is defined as the beam size. In this specification, in order to include various definitions, the beam size (the object size to be measured) is substantially in the range not less than the diameter of the circle containing 50% of the total power and not more than the diameter of the circle containing 95% of the total power. It is assumed that it is equal to the spot size above).
　図２は、図１のリニアイメージセンサの構成を模式的に示す斜視図である。図２を参照して、リニアイメージセンサ１２０は、直線状に配列された１０２４個の画素（ピクセル）１２２を含む。各画素１２２は、受光量に応じて０から最大２５５までの輝度レベルの信号を出力する。 FIG. 2 is a perspective view schematically showing the configuration of the linear image sensor of FIG. Referring to FIG. 2, linear image sensor 120 includes 1024 pixels (pixels) 122 linearly arranged. Each pixel 122 outputs a signal of a luminance level from 0 to a maximum of 255 according to the light reception amount.
　図３は、図１のリニアイメージセンサによって検出されるデータの一例を示す図である。図３の横軸がピクセル位置を示し、縦軸が輝度レベルを示す。図２および図３を参照して、測定対象物１３０上で拡散反射された光が集光レンズ１１８によってリニアイメージセンサ１２０上のスポット１２４に集光されることによって、図３に示すようなガウス分布状のデータが得られる。図３のデータの重心位置から三角測量により対象物までの距離が計算される。図３の場合には、輝度分布の中心線１８０と重心とが一致している。 FIG. 3 is a diagram showing an example of data detected by the linear image sensor of FIG. The horizontal axis in FIG. 3 indicates the pixel position, and the vertical axis indicates the brightness level. Referring to FIGS. 2 and 3, the light diffusely reflected on the measurement object 130 is condensed by the condensing lens 118 to a spot 124 on the linear image sensor 120, thereby generating a Gaussian as shown in FIG. 3. Distribution data are obtained. The distance to the object is calculated by triangulation from the barycentric position of the data in FIG. In the case of FIG. 3, the center line 180 of the luminance distribution coincides with the center of gravity.
　［表面形状測定装置の構成］
　図４は、実施の形態１による表面形状測定装置の構成例を概略的に示すブロック図である。図４を参照して、表面形状測定装置１４０は、測定対象物１３０が載置されるテーブル１４４と、サドル１４２と、レーザ変位計１００と、Ｘ軸駆動機構１４６Ｘと、Ｙ軸駆動機構１４６Ｙと、Ｚ軸駆動機構１４６Ｚと、Ｃ軸駆動機構１４６Ｃと、コンピュータ１５０とを含む。 [Configuration of surface shape measuring apparatus]
FIG. 4 is a block diagram schematically showing a configuration example of the surface shape measuring apparatus according to the first embodiment. Referring to FIG. 4, the surface shape measuring apparatus 140 includes a table 144 on which the measurement object 130 is placed, a saddle 142, a laser displacement meter 100, an X-axis drive mechanism 146X, and a Y-axis drive mechanism 146Y. , Z-axis drive mechanism 146Z, C-axis drive mechanism 146C, and computer 150.
　テーブル１４４はサドル１４２上に配置され、Ｘ軸方向に移動可能である。サドル１４２はＹ軸方向に移動可能である。Ｘ軸駆動機構１４６Ｘは、テーブル１４４をＸ軸方向に移動させる。Ｙ軸駆動機構１４６Ｙは、サドル１４２をＹ軸方向に移動させる。Ｚ軸駆動機構１４６Ｚは、レーザ変位計１００をＺ軸方向に移動させる。Ｃ軸駆動機構１４６Ｃは、レーザ変位計１００をＺ軸と平行な回転軸（Ｃ軸回転中心）の回りに回転させる。Ｃ軸駆動機構１４６Ｃは、基準位置に対して任意の回転角度に設定可能である。 The table 144 is disposed on the saddle 142 and is movable in the X-axis direction. The saddle 142 is movable in the Y-axis direction. The X-axis drive mechanism 146X moves the table 144 in the X-axis direction. The Y-axis drive mechanism 146Y moves the saddle 142 in the Y-axis direction. The Z-axis drive mechanism 146Z moves the laser displacement meter 100 in the Z-axis direction. The C-axis drive mechanism 146C rotates the laser displacement meter 100 about a rotation axis (C-axis rotation center) parallel to the Z-axis. The C-axis drive mechanism 146C can be set to any rotation angle with respect to the reference position.
　Ｘ軸駆動機構１４６Ｘ、Ｙ軸駆動機構１４６Ｙ、Ｚ軸駆動機構１４６Ｚ、およびＣ軸駆動機構１４６Ｃは、レーザ変位計１００と測定対象物１３０とを相対的に移動させるための移動機構１４６として機能する。したがって、移動機構１４６によってレーザビーム１１６は、測定対象物１３０の表面上を走査する。 The X-axis drive mechanism 146X, the Y-axis drive mechanism 146Y, the Z-axis drive mechanism 146Z, and the C-axis drive mechanism 146C function as a moving mechanism 146 for relatively moving the laser displacement meter 100 and the measurement object 130. . Thus, the moving mechanism 146 causes the laser beam 116 to scan over the surface of the measurement object 130.
　なお、移動機構１４６の構成は図４の例には限られない。たとえば、測定対象物１３０が固定され、レーザ変位計１００がＸ、Ｙ、Ｚの３方向に移動可能な構成であってもよい。レーザ変位計１００が固定され、測定対象物１３０を支持するテーブル１４４がＣ軸回転中心の回りに回転可能なように構成されていてもよい。 The configuration of the moving mechanism 146 is not limited to the example shown in FIG. For example, the measurement object 130 may be fixed, and the laser displacement meter 100 may be movable in three directions of X, Y, and Z. The laser displacement meter 100 may be fixed, and the table 144 supporting the measurement object 130 may be configured to be rotatable about the C-axis rotation center.
　コンピュータ１５０は、プロセッサ１５２、メモリ１５４、ならびに図示しない表示装置および入出力装置等を含む。プロセッサ１５２は、メモリ１５４に格納されたプログラムを実行することによって、測定制御部１５６およびデータ処理部１５８として機能する。 The computer 150 includes a processor 152, a memory 154, and display devices and input / output devices (not shown). The processor 152 functions as a measurement control unit 156 and a data processing unit 158 by executing a program stored in the memory 154.
　測定制御部１５６は、レーザ変位計１００および移動機構１４６を制御することによって、レーザビーム１１６を走査させる。このレーザビーム１１６の走査中に、測定制御部１５６は、レーザ変位計１００を用いて測定対象物１３０の表面形状データ１６６を連続的に測定する。測定された表面形状データ１６６はメモリ１５４に格納される。表面形状データ１６６は、測定対象物１３０上の走査位置（レーザビームが照射される位置）と、当該走査位置における測定対象物１３０の表面のＺ軸方向の変位とが対応付けられたデータ系列である。 The measurement control unit 156 scans the laser beam 116 by controlling the laser displacement meter 100 and the moving mechanism 146. During the scanning of the laser beam 116, the measurement control unit 156 continuously measures the surface shape data 166 of the measurement object 130 using the laser displacement meter 100. The measured surface shape data 166 is stored in the memory 154. The surface shape data 166 is a data series in which the scanning position (the position where the laser beam is irradiated) on the measurement object 130 and the displacement of the surface of the measurement object 130 at the scanning position in the Z-axis direction are associated. is there.
　測定制御部１５６は、さらに、Ｃ軸駆動機構１４６Ｃを制御することによって、レーザ変位計１００をＺ軸方向と平行な回転軸（Ｃ軸回転中心）の回りに１８０度回転させる。これにより、Ｃ軸回転中心とレーザビーム１１６の中心軸とが一致している場合には、レーザ変位計１００はレーザビーム１１６の中心軸の回りに１８０度回転する。すなわち、図１の集光レンズ１１８（光学系）およびリニアイメージセンサ１２０（受光部）は、レーザビーム１１６の中心軸について線対称な位置に移動する。レーザビーム１１６の中心軸とＣ軸回転中心とが一致していない場合には、Ｃ軸回転中心の回りの回転とともにＸ軸方向およびＹ軸方向にレーザ変位計１００を移動させることによって、レーザビーム１１６の位置を保ったままレーザ変位計１００をレーザビーム１１６の中心軸の回りに１８０度回転させることができる。 The measurement control unit 156 further controls the C-axis drive mechanism 146C to rotate the laser displacement meter 100 180 degrees around a rotation axis (C-axis rotation center) parallel to the Z-axis direction. Thus, when the C-axis rotation center coincides with the central axis of the laser beam 116, the laser displacement meter 100 rotates 180 degrees around the central axis of the laser beam 116. That is, the condenser lens 118 (optical system) and the linear image sensor 120 (light receiving unit) in FIG. 1 move to positions in line symmetry with respect to the central axis of the laser beam 116. When the central axis of the laser beam 116 and the C-axis rotation center do not match, the laser beam is moved by moving the laser displacement meter 100 in the X-axis direction and the Y-axis direction along with the rotation around the C-axis rotation center. The laser displacement meter 100 can be rotated 180 degrees around the central axis of the laser beam 116 while maintaining the position 116.
　後述するように、測定制御部１５６は、レーザ変位計１００をレーザビーム１１６の中心軸の回りに１８０度回転させた後に、回転させる前と同一箇所をレーザ変位計１００によって測定する。回転の前後で測定した同一箇所の表面形状データを比較することによって、測定対象物１３０の段差部のエッジ位置を簡単かつ正確かつ短時間に検出することができる。 As described later, after the laser displacement meter 100 is rotated 180 degrees around the central axis of the laser beam 116, the measurement control unit 156 measures the same position as before the rotation by the laser displacement meter 100. By comparing the surface shape data of the same portion measured before and after rotation, the edge position of the step portion of the measurement object 130 can be detected easily, accurately and in a short time.
　データ処理部１５８は、段差位置を特定するために、レーザ変位計１００によって測定されたデータ（表面形状データ１６６）に対してデータ処理を行う。データ処理の内容については図９を参照して後述する。 The data processing unit 158 performs data processing on data (surface shape data 166) measured by the laser displacement meter 100 in order to specify the step position. The contents of the data processing will be described later with reference to FIG.
　次に、具体的な段差位置の検出方法について説明する。本実施の形態の装置では、三角測量方式のレーザ変位計で段差部を測定する際に生じる誤差を利用することによって、段差位置を検出する。以下では、まず、段差部の測定時に生じる誤差について説明し、次に、段差位置を検出するためのデータ処理手順について説明する。 Next, a specific method of detecting the level difference position will be described. In the apparatus of the present embodiment, the position of the level difference is detected by using an error generated when measuring the level difference portion with the triangulation type laser displacement meter. In the following, first, an error generated when measuring the stepped portion will be described, and next, a data processing procedure for detecting the position of the stepped portion will be described.
　［段差部の測定時に生じる誤差について］
　図５は、段差部の測定時に生じる誤差について説明するための図である。図５では、レーザビームの走査方向を＋Ｘ方向とする。測定対象物１３０の表面上の直線１３６に沿ってレーザビームが照射される。直線１３６の方向（レーザビームの走査方向）は、段差部のエッジ１３４と交差している（直交している必要はない）。なお、図５では図解を容易にするために、レーザスポット１３２のサイズを拡大して示している。 [About the error that occurs when measuring the level difference part]
FIG. 5 is a diagram for explaining an error that occurs when measuring the stepped portion. In FIG. 5, the scanning direction of the laser beam is the + X direction. The laser beam is irradiated along a straight line 136 on the surface of the measurement object 130. The direction of the straight line 136 (the scanning direction of the laser beam) intersects (does not have to be orthogonal to) the edge 134 of the step. In FIG. 5, the size of the laser spot 132 is shown enlarged to facilitate the illustration.
　図５に示す例では、レーザ変位計を構成する集光レンズ（光学系）１１８およびリニアイメージセンサ（受光部）１２０は、レーザビームに対して走査方向前方に位置するように、レーザ変位計の向きが決められている。この場合、レーザスポット１３２がエッジ部に差し掛かると、レーザスポット１３２のうちリニアイメージセンサ１２０に近接する側の一部が欠けるようになる。この結果、リニアイメージセンサ１２０の集光スポット１２４の重心位置が移動するため、測定対象物１３０の表面平坦部１３８は、実際よりもε＋だけ上方に（発光部１１０のより近くに）位置するように観測される。 In the example shown in FIG. 5, the condensing lens (optical system) 118 and the linear image sensor (light receiving unit) 120 that constitute the laser displacement meter are positioned in front of the laser beam in the scanning direction. The direction is decided. In this case, when the laser spot 132 reaches the edge portion, a part of the laser spot 132 on the side close to the linear image sensor 120 is missing. As a result, the position of the center of gravity of the focused spot 124 of the linear image sensor 120 moves, so that the surface flat portion 138 of the measurement object 130 is positioned above (closer to the light emitting unit 110) by ε + than in reality. Observed.
　図６は、図５に示すレーザ変位計の配置を１８０度回転させた場合において、段差部の測定時に生じる誤差について説明するための図である。図５の場合と同様に、レーザビームの走査方向を＋Ｘ方向とし、測定対象物１３０の表面の同一箇所である直線１３６に沿ってレーザビームが照射される。図解を容易にするために、レーザスポット１３２のサイズを拡大して示している。 FIG. 6 is a diagram for explaining an error that occurs when measuring the stepped portion when the arrangement of the laser displacement gauge shown in FIG. 5 is rotated by 180 degrees. As in the case of FIG. 5, the laser beam is irradiated along a straight line 136 which is the same location on the surface of the measurement object 130, with the scanning direction of the laser beam as the + X direction. The size of the laser spot 132 is shown enlarged for ease of illustration.
　図６の場合における集光レンズ１１８およびリニアイメージセンサ１２０の配置は、図５の場合の配置をレーザビームの中心軸１１６Ｃの回りに１８０度回転させたものである。すなわち、集光レンズ１１８およびリニアイメージセンサ１２０は、レーザビームに対して走査方向後方に位置するように、レーザ変位計の向きが定められている。この場合、レーザスポット１３２がエッジ部に差し掛かると、レーザスポット１３２のうちリニアイメージセンサ１２０から遠い側の一部が欠けるようになる。この結果、リニアイメージセンサ１２０の集光スポット１２４の重心位置が移動する。ただし、集光スポット１２４の重心位置の移動方向は図５の場合とは反対方向である。したがって、測定対象物１３０の表面は、実際よりもε－だけ下方に（発光部１１０から遠方に）位置するように観測される。 The arrangement of the condenser lens 118 and the linear image sensor 120 in the case of FIG. 6 is obtained by rotating the arrangement of FIG. 5 by 180 degrees around the central axis 116C of the laser beam. That is, the direction of the laser displacement meter is determined such that the condenser lens 118 and the linear image sensor 120 are located behind the laser beam in the scanning direction. In this case, when the laser spot 132 reaches the edge portion, a part of the laser spot 132 on the side far from the linear image sensor 120 is missing. As a result, the center of gravity of the focused spot 124 of the linear image sensor 120 moves. However, the moving direction of the position of the center of gravity of the focused spot 124 is opposite to that in the case of FIG. Therefore, the surface of the measurement object 130 is observed to be located by ε− (actually far from the light emitting unit 110) below the actual value.
　図７は、図５および図６の場合においてリニアイメージセンサ上の集光スポットの輝度分布の一例を模式的に示す図である。図７（Ａ）が図５に対応する場合の輝度分布を表し、図７（Ｂ）が図６に対応する場合の輝度分布を表す。レーザビームが平坦な表面上に照射されている場合には輝度分布はガウス分布に近い形状を示し、この場合の輝度分布の中心線１８０を一点鎖線で示している。図示されるように、図５に対応する図７（Ａ）の場合の輝度分布の重心位置１８２と、図６に対応する図７（Ｂ）の場合の輝度分布の重心位置１８４とは、中心線１８０に対して互いに反対方向にずれる。この結果、レーザ変位計の測定値は、図５の場合と図６の場合とで互いに反対方向の誤差を有するようになる。 FIG. 7 is a view schematically showing an example of the luminance distribution of the focused spot on the linear image sensor in the cases of FIG. 5 and FIG. FIG. 7 (A) shows the luminance distribution in the case corresponding to FIG. 5, and FIG. 7 (B) shows the luminance distribution in the case corresponding to FIG. When the laser beam is irradiated on a flat surface, the luminance distribution has a shape close to a Gaussian distribution, and the center line 180 of the luminance distribution in this case is indicated by a dashed dotted line. As shown, the barycentric position 182 of the brightness distribution in the case of FIG. 7A corresponding to FIG. 5 and the barycentric position 184 of the brightness distribution in the case of FIG. 7B corresponding to FIG. The lines 180 are offset in opposite directions. As a result, the measurement values of the laser displacement gauge have errors in the directions opposite to each other between the case of FIG. 5 and the case of FIG.
　図８は、図５および図６の場合において、表面形状の測定データの一例を示す図である。図８（Ａ）において、図５の場合の測定データ１８６は実線で示され、図６の場合の測定データ１８８は破線で示される。図８（Ｂ）において、図５の場合の測定データ１８６と図６の場合の測定データ１８８との平均値１９０が示されている。 FIG. 8 is a view showing an example of measurement data of surface shape in the cases of FIG. 5 and FIG. In FIG. 8A, measurement data 186 in the case of FIG. 5 is shown by a solid line, and measurement data 188 in the case of FIG. 6 is shown by a broken line. In FIG. 8B, an average value 190 of the measurement data 186 in the case of FIG. 5 and the measurement data 188 in the case of FIG. 6 is shown.
　図８（Ａ）を参照して、点Ｐ０より左側の領域では、図５の場合の測定データ１８６と図６の場合の測定データ１８８とは一致している。点Ｐ０より右側の領域では、図５の場合の測定データ１８６と図６の場合の測定データ１８８とは異なっている。しかも、レーザビームの走査位置が点Ｐ０から離れるにつれて両測定値の隔たりが大きくなる。この明細書では、図５の場合の測定値と図６の場合の測定値とが分離し始める測定点Ｐ０を分離開始点とも称する。 Referring to FIG. 8A, in the region on the left side of point P0, measurement data 186 in the case of FIG. 5 matches measurement data 188 in the case of FIG. In the region to the right of the point P0, the measurement data 186 in the case of FIG. 5 and the measurement data 188 in the case of FIG. 6 are different. Moreover, as the scanning position of the laser beam moves away from the point P0, the distance between the two measured values increases. In this specification, the measurement point P0 at which the measured value in the case of FIG. 5 and the measured value in the case of FIG. 6 begin to separate is also referred to as a separation start point.
　上記の測定結果は、測定対象物上のレーザスポットの位置と段差部のエッジの位置との相対関係によって説明することができる。具体的に、図５および図６においてレーザスポット１３２が測定対象物１３０の上部平坦面１３８の上にありエッジ１３４に掛かっていない場合は、図８（Ａ）において走査位置が点Ｐ０よりも左側の場合に相当する。レーザスポット１３２の右端がエッジ１３４に一致する場合（レーザスポット１３２がエッジ１３４に掛かり始めたとき）は、図８（Ａ）の点Ｐ０に相当する。レーザスポット１３２の中央点がエッジ１３４に一致する場合は、図８（Ａ）の点Ｐ０からスポットサイズの半分（ｗ／２）だけ移動した点Ｐ１に相当する。レーザスポット１３２の左端がエッジ１３４に一致する場合（レーザスポット１３２が上部平坦面１３８から外れた瞬間）は、図８（Ａ）の点Ｐ０からスポットサイズ（ｗ）だけ移動した点Ｐ３に相当する。ただし、走査位置が点Ｐ３に達する前の点Ｐ２においてリニアイメージセンサ１２０の受光量が検出限界に達するためにレーザ変位計によって測定ができなくなる。 The above measurement results can be explained by the relative relationship between the position of the laser spot on the measurement object and the position of the edge of the stepped portion. Specifically, in FIG. 5 and FIG. 6, when the laser spot 132 is on the upper flat surface 138 of the measurement object 130 and does not hang on the edge 134, the scanning position is to the left of the point P0 in FIG. Corresponds to the case of When the right end of the laser spot 132 coincides with the edge 134 (when the laser spot 132 starts to be engaged with the edge 134), it corresponds to the point P0 in FIG. When the center point of the laser spot 132 coincides with the edge 134, it corresponds to a point P1 moved by half the spot size (w / 2) from the point P0 in FIG. 8A. When the left end of the laser spot 132 coincides with the edge 134 (immediately when the laser spot 132 deviates from the upper flat surface 138), it corresponds to the point P3 moved by the spot size (w) from the point P0 in FIG. . However, since the light reception amount of the linear image sensor 120 reaches the detection limit at the point P2 before the scanning position reaches the point P3, measurement can not be performed by the laser displacement meter.
　［データ処理手順］
　以上に説明したように、三角測量方式のレーザ変位計を用いて段差部を測定する際には測定誤差が生じる。この測定誤差を利用すれば、段差部のエッジの位置を簡単かつ正確に検出することができる。具体的手順を図９に示す。 [Data processing procedure]
As described above, measurement errors occur when measuring the stepped portion using a triangulation-type laser displacement meter. By using this measurement error, the position of the edge of the stepped portion can be detected easily and accurately. The specific procedure is shown in FIG.
　図９は、表面形状の測定手順および測定したデータの処理手順を示すフローチャートである。図４および図９を参照して、まず第１の測定ステップにおいて、測定制御部１５６は、移動機構１４６を駆動することによって、段差を含む測定範囲に対してレーザビーム１１６を走査させながら、測定対象物の表面形状を、レーザ変位計１００を用いて連続的に測定する（ステップＳ１００）。 FIG. 9 is a flowchart showing the procedure of measuring the surface shape and the procedure of processing the measured data. Referring to FIGS. 4 and 9, in the first measurement step, measurement control unit 156 performs measurement while scanning laser beam 116 with respect to a measurement range including a step by driving movement mechanism 146. The surface shape of the object is continuously measured using the laser displacement meter 100 (step S100).
　なお、前述したエッジ部分での誤差はレーザスポットサイズよりも小さい範囲で現れるので、レーザ変位計によるサンプリング間隔は、レーザスポットサイズの１／２以下にする必要がある。この場合、測定値の上下の変化を正確に捉えるためには、レーザ変位計のサンプリング間隔はスポットサイズの１／１０以下が望ましい。さらに望ましくは、レーザ変位計のサンプリング間隔をスポットサイズの１／２０以下とする。 In addition, since the error in the edge part mentioned above appears in the range smaller than laser spot size, it is necessary to make the sampling space | interval by a laser displacement meter into 1/2 or less of laser spot size. In this case, it is desirable that the sampling interval of the laser displacement gauge be 1/10 or less of the spot size in order to accurately capture changes in the upper and lower sides of the measured value. More preferably, the sampling interval of the laser displacement meter is set to 1/20 or less of the spot size.
　次に、測定制御部１５６は、Ｃ軸駆動機構１４６Ｃを駆動することによって、レーザビーム１１６の中心軸の回りにレーザ変位計１００を１８０度回転させる（ステップＳ１０５）。なお、Ｃ軸駆動機構１４６ＣのＣ軸回転中心とレーザビーム１１６の中心軸とが一致していない場合には、Ｃ軸駆動機構１４６Ｃを用いた１８０度の回転駆動とともに、Ｘ軸駆動機構１４６ＸおよびＹ軸駆動機構１４６Ｙの少なくとも一方によって、レーザビーム１１６の中心軸の位置を保つようにレーザ変位計１００を移動させる。 Next, the measurement control unit 156 rotates the laser displacement meter 100 by 180 degrees around the central axis of the laser beam 116 by driving the C-axis drive mechanism 146C (step S105). When the C-axis rotation center of the C-axis drive mechanism 146C and the central axis of the laser beam 116 do not coincide with each other, the X-axis drive mechanism 146X and the X-axis drive mechanism 146X and the 180-degree rotational drive using the C-axis drive mechanism 146C. The laser displacement meter 100 is moved to maintain the position of the central axis of the laser beam 116 by at least one of the Y-axis drive mechanisms 146Y.
　次に、測定制御部１５６は、第２の測定ステップにおいて、第１の測定ステップの場合と同一箇所をレーザ変位計１００によって連続的に測定する（ステップＳ１１０）。第１および第２の測定ステップによって測定されたデータ（表面形状データ１６６）は、メモリ１５４に格納される。 Next, in the second measurement step, the measurement control unit 156 continuously measures the same place as in the case of the first measurement step using the laser displacement meter 100 (step S110). The data (surface shape data 166) measured by the first and second measurement steps are stored in the memory 154.
　次に、データ処理部１５８によって表面形状データ１６６のデータ処理を行う。データ処理部１５８は、段差特定部１６０とデータ補正部１６２とを含む。まず、段差特定部１６０は、表面形状データ１６６の測定範囲のうちで、第１の測定ステップの測定値（Ｍ１と称する）と第２の測定ステップの測定値（Ｍ２と称する）とが分離し始める分離開始点（図８（Ａ）の点Ｐ０）を特定する（ステップＳ１１５）。 Next, data processing of the surface shape data 166 is performed by the data processing unit 158. Data processing unit 158 includes a level difference identification unit 160 and a data correction unit 162. First, in the measurement range of the surface shape data 166, the step specifying unit 160 separates the measured value (referred to as M1) in the first measurement step and the measured value (referred to as M2) in the second measurement step. The separation start point (point P0 in FIG. 8A) to be started is specified (step S115).
　なお、具体的に測定値Ｍ１と測定値Ｍ２との分離開始点を特定する方法として種々の方法が考えられる。たとえば、測定値の差Ｍ１－Ｍ２が予め定める閾値を超えた点を分離開始点としてもよい。あるいは、測定値の差Ｍ１－Ｍ２と走査位置との関係を表す近似曲線を求め、当該近似曲線の値が予め定める閾値を超えた点を分離開始点としてもよい。 In addition, various methods can be considered as a method of specifying the separation start point of the measurement value M1 and the measurement value M2 specifically. For example, a point at which the difference between the measurement values M1 and M2 exceeds a predetermined threshold may be set as the separation start point. Alternatively, an approximate curve representing the relationship between the measurement value difference M1-M2 and the scanning position may be determined, and a point at which the value of the approximate curve exceeds a predetermined threshold may be set as the separation start point.
　次に、段差特定部１６０は、特定した分離開始点Ｐ０に基づいて段差位置を特定する（ステップＳ１２０）。具体的に、段差特定部１６０は、第１の測定ステップによる測定値Ｍ１と第２の測定ステップによる測定値Ｍ２とが分離している分離区間内（図８（Ａ）の点Ｐ０よりも右側）で、分離開始点Ｐ０からレーザビームのスポットサイズｗの１／２だけ離れた点Ｐ１を段差位置として特定する。 Next, the level | step difference identification part 160 pinpoints a level | step difference position based on the identified isolation | separation start point P0 (step S120). Specifically, the step identification unit 160 determines that the measurement value M1 in the first measurement step and the measurement value M2 in the second measurement step are separated from each other in the separation section (right of the point P0 in FIG. 8A). The point P1 separated from the separation start point P0 by 1/2 of the spot size w of the laser beam is specified as the step position.
　次に、データ補正部１６２は、分離開始点Ｐ０から段差位置Ｐ１までの測定値を補正する（ステップＳ１２５）。具体的に、データ補正部１６２は、第１の測定ステップによる測定値Ｍ１と第２の測定ステップによる測定値Ｍ２との平均値（図８（Ｂ）の１９０）を、当該区間における高さ方向の変位とする。その後、例えば、移動平均などのフィルタリング処理を行うことによって、さらに表面形状データを補正してもよい。 Next, the data correction unit 162 corrects the measured value from the separation start point P0 to the step position P1 (step S125). Specifically, the data correction unit 162 sets the average value (190 in FIG. 8B) of the measurement value M1 in the first measurement step and the measurement value M2 in the second measurement step in the height direction in the section Displacement of the Thereafter, the surface shape data may be further corrected by performing filtering processing such as moving average, for example.
　上記において、レーザビームの走査方向は、図５および図６に示すように、レーザビームの中心軸１１６Ｃとリニアイメージセンサ（受光部）１２０の集光スポット１２４とを含む光路面（ＸＺ平面）と平行な方向であることが望ましい。走査方向と光路面とが平行のとき、第１の測定ステップによるエッジ部の測定値Ｍ１と第２の測定ステップによるエッジ部の測定値Ｍ２との差が最も大きくなるからである。一般的には、レーザビームに沿った方向（Ｚ軸方向）から平面視したとき、レーザビームの走査方向が光路面と垂直でなければ（ＹＺ平面と平行でなければ）どのような角度であっても構わない（ただし、段差部は走査方向と交差している必要がある）。図５および図６においてレーザビームの走査方向がＹＺ平面と平行でなければ、第１の測定ステップによる段差部の測定値Ｍ１と第２の測定ステップによる段差部の測定値Ｍ２とに差が生じるので、段差位置を特定することができる。 In the above, the scanning direction of the laser beam is, as shown in FIGS. 5 and 6, an optical road surface (XZ plane) including the central axis 116C of the laser beam and the focused spot 124 of the linear image sensor (light receiving unit) 120. It is desirable that the directions are parallel. When the scanning direction is parallel to the light road surface, the difference between the measurement value M1 of the edge portion in the first measurement step and the measurement value M2 of the edge portion in the second measurement step is largest. Generally, when viewed in plan from the direction along the laser beam (Z-axis direction), what angle is the scanning direction of the laser beam if it is not perpendicular to the light path (if it is not parallel to the YZ plane) (However, the step portion needs to intersect the scanning direction). In FIGS. 5 and 6, if the scanning direction of the laser beam is not parallel to the YZ plane, a difference occurs between the measured value M1 of the stepped portion in the first measurement step and the measured value M2 of the stepped portion in the second measurement step. Therefore, the step position can be identified.
　［実施の形態１の効果］
　以上のとおり、実施の形態１による表面形状測定装置１４０によれば、段差部を含む測定対象物１３０の表面形状をレーザ変位計１００によって測定した後、レーザ変位計１００をレーザビーム１１６の中心軸の回りに１８０度回転させてから、回転させる前と同一箇所を再度レーザ変位計１００によって測定する。そして、回転の前後で測定した同一箇所の表面形状データを比較し、両データに違いが生じ始める測定点の位置（分離開始点）に基づいてエッジの位置を特定する。これによって、測定対象物１３０の段差（エッジ）の位置を簡単かつ正確かつ短時間に検出することができる。 [Effect of Embodiment 1]
As described above, according to the surface shape measuring apparatus 140 according to the first embodiment, after the surface shape of the measurement object 130 including the step portion is measured by the laser displacement meter 100, the laser displacement meter 100 is used as the central axis of the laser beam 116. The laser displacement meter 100 measures the same position as before rotation. Then, the surface shape data of the same place measured before and after rotation are compared, and the position of the edge is specified based on the position of the measurement point (separation start point) at which the difference between both data starts to occur. Thus, the position of the step (edge) of the measurement object 130 can be detected easily, accurately and in a short time.
　＜実施の形態２＞
　実施の形態２による表面形状測定装置では、レーザ変位計の構成が実施の形態１の場合と異なる。図１０は、実施の形態２による表面形状測定装置で用いられるレーザ変位計の構成を模式的に示す図である。 Second Embodiment
The surface profile measurement apparatus according to the second embodiment differs from that of the first embodiment in the configuration of the laser displacement meter. FIG. 10 is a view schematically showing a configuration of a laser displacement gauge used in the surface shape measuring apparatus according to the second embodiment.
　図１０を参照して、レーザ変位計１００Ａは、発光部１１０と、第１および第２の光学系としての集光レンズ１１８Ａ，１１８Ｂと、第１および第２の受光部としてのリニアイメージセンサ１２０Ａ，１２０Ｂとを含む。集光レンズ１１８Ｂおよびリニアイメージセンサ１２０Ｂは、レーザビーム１１６の中心軸の回りに集光レンズ１１８Ａおよびリニアイメージセンサ１２０Ａをそれぞれ１８０度回転させた位置に配置される。発光部１１０は、レーザダイオード１１２と、レンズ１１４とを含む。 Referring to FIG. 10, a laser displacement meter 100A includes a light emitting unit 110, condensing lenses 118A and 118B as first and second optical systems, and a linear image sensor 120A as first and second light receiving units. , 120B. The condenser lens 118 B and the linear image sensor 120 B are disposed at positions where the condenser lens 118 A and the linear image sensor 120 A are respectively rotated 180 degrees around the central axis of the laser beam 116. The light emitting unit 110 includes a laser diode 112 and a lens 114.
　レーザダイオード１１２から発せられたレーザビーム１１６はレンズ１１４によって略平行光に整形され、測定対象物１３０へ照射される。測定対象物１３０上で拡散反射された光は、レーザビーム１１６に対して＋γの角度方向に配置されたリニアイメージセンサ１２０Ａ上に集光レンズ１１８Ａによって集光されるとともに、レーザビーム１１６に対して－γの角度方向（＋γと反対方向）に配置されたリニアイメージセンサ１２０Ｂ上に集光レンズ１１８Ｂによって集光される。 The laser beam 116 emitted from the laser diode 112 is shaped into substantially parallel light by the lens 114 and irradiated to the measurement object 130. The light diffusely reflected on the measurement object 130 is condensed by the condenser lens 118A on the linear image sensor 120A disposed at an angular direction of + γ with respect to the laser beam 116, and The light is condensed by the condensing lens 118B on the linear image sensor 120B disposed in the angular direction (opposite to + γ) of −γ.
　図１０のレーザ変位計１００Ａは、図４に示す表面形状測定装置１４０に図１のレーザ変位計１００に代えて取付けられる。測定対象物１３０の表面の変位は、リニアイメージセンサ１２０Ａ上の集光スポット１２４Ａの位置およびリニアイメージセンサ１２０Ｂ上の集光スポット１２４Ｂの位置に基づいて決定される。図１０のその他の点は、図１の場合と同じであるので同一または相当する部分には同一の参照符号を付して説明を繰り返さない。 The laser displacement meter 100A of FIG. 10 is attached to the surface shape measuring apparatus 140 shown in FIG. 4 instead of the laser displacement meter 100 of FIG. The displacement of the surface of the measurement object 130 is determined based on the position of the focused spot 124A on the linear image sensor 120A and the position of the focused spot 124B on the linear image sensor 120B. The other points in FIG. 10 are the same as in FIG. 1, and therefore, the same or corresponding portions are denoted by the same reference characters and description thereof will not be repeated.
　図１１は、実施の形態２の装置において表面形状の測定手順および測定したデータの処理手順を示すフローチャートである。図４、図１０および図１１を参照して、まず、測定制御部１５６は、移動機構１４６を駆動することによって、段差を含む測定範囲に対してレーザビーム１１６を走査させながら、測定対象物１３０の表面形状を、レーザ変位計１００を用いて連続的に測定する（ステップＳ２００）。 FIG. 11 is a flowchart showing the procedure of measuring the surface shape and the procedure of processing the measured data in the apparatus of the second embodiment. Referring to FIGS. 4, 10 and 11, first, measurement control unit 156 drives movement mechanism 146 to scan measurement object 130 while scanning laser beam 116 with respect to the measurement range including the step. The surface shape of is continuously measured using the laser displacement meter 100 (step S200).
　実施の形態２の場合、レーザビーム１１６の中心軸に関して互いに線対称な位置に、集光レンズ１１８Ａ，１１８Ｂが予め設けられ、リニアイメージセンサ１２０Ａ，１２０Ｂが予め設けられている。したがって、実施の形態１のように同一箇所を２回測定する必要はない。なお、実施の形態１の場合と同様に、レーザビーム１１６の方向（Ｚ軸方向）から平面視したとき、レーザビームの走査方向は光路面（ＸＺ平面）に対して垂直にならないようにする（ＹＺ平面と平行にならないようにする）。望ましくは、レーザビームの走査方向は光路面（ＸＺ平面）と平行にする。 In the case of the second embodiment, the condenser lenses 118A and 118B are provided in advance and linear image sensors 120A and 120B are provided in advance at positions symmetrical to each other with respect to the central axis of the laser beam 116. Therefore, it is not necessary to measure the same place twice as in the first embodiment. As in the case of the first embodiment, the scanning direction of the laser beam is not perpendicular to the light path surface (XZ plane) when viewed in plan from the direction of the laser beam 116 (Z-axis direction) ( Not parallel to the YZ plane). Desirably, the scanning direction of the laser beam is parallel to the light path (XZ plane).
　次に、データ処理部１５８の段差特定部１６０は、表面形状データ１６６の測定範囲のうちで、第１のリニアイメージセンサ１２０Ａによる測定値（Ｍ１と称する）と第２のリニアイメージセンサ１２０Ｂによる測定値（Ｍ２と称する）とが分離し始める分離開始点を特定する（ステップＳ２０５）。 Next, the step identification unit 160 of the data processing unit 158 measures the measurement value (referred to as M1) by the first linear image sensor 120A and the measurement by the second linear image sensor 120B within the measurement range of the surface shape data 166. A separation start point at which the value (referred to as M2) starts to separate is specified (step S205).
　次に、段差特定部１６０は、特定した分離開始点に基づいて段差位置を特定する（ステップＳ２１０）。具体的に、段差特定部１６０は、第１のリニアイメージセンサ１２０Ａによる測定値Ｍ１と第２のリニアイメージセンサ１２０Ｂによる測定値Ｍ２とが分離している分離区間内で、分離開始点からレーザビームのスポットサイズｗの１／２だけ離れた点を段差位置として特定する（ステップＳ２１０）。 Next, the level difference identification unit 160 identifies the position of the level difference based on the identified separation start point (step S210). Specifically, in the separation section in which the measurement value M1 measured by the first linear image sensor 120A and the measurement value M2 measured by the second linear image sensor 120B are separated, the step specifying unit 160 detects the laser beam from the separation start point A point separated by a half of the spot size w of is identified as the step position (step S210).
　次に、データ補正部１６２は、分離開始点から段差位置までの測定値を補正する（ステップＳ２１５）。具体的に、データ補正部１６２は、第１のリニアイメージセンサ１２０Ａによる測定値Ｍ１と第２のリニアイメージセンサ１２０Ｂによる測定値Ｍ２との平均値を、当該区間における高さ方向の変位とする。 Next, the data correction unit 162 corrects the measured value from the separation start point to the step position (step S215). Specifically, the data correction unit 162 sets an average value of the measurement value M1 by the first linear image sensor 120A and the measurement value M2 by the second linear image sensor 120B as the displacement in the height direction in the section.
　以上のとおり、実施の形態２による表面形状測定装置によれば、レーザビームの中心軸に関して互いに線対称の位置に配置された第１および第２の集光レンズ（光学系）ならびに第１および第２のリニアイメージセンサ（受光部）を含むレーザ変位計を用いて、段差部を含む測定対象物の表面形状が測定される。そして、第１および第２のリニアイメージセンサによる測定値に違いが生じ始める測定点（分離開始点）の位置に基づいてエッジの位置が特定される。この結果測定対象物の段差（エッジ）の位置を簡単かつ正確かつ短時間に検出することができる。 As described above, according to the surface shape measurement apparatus of the second embodiment, the first and second condenser lenses (optical systems) and the first and second condenser lenses (optical systems) arranged at positions symmetrical to each other with respect to the central axis of the laser beam. The surface shape of the measurement object including the step portion is measured by using a laser displacement meter including the two linear image sensors (light receiving units). Then, the position of the edge is specified based on the position of the measurement point (separation start point) at which the difference between the measurement values of the first and second linear image sensors starts to occur. As a result, the position of the step (edge) of the object to be measured can be detected easily, accurately and in a short time.
　＜実施の形態３＞
　実施の形態３は、実施の形態１または２の表面形状測定装置を備えた工作機械を開示する。以下では、工作機械が立形マシンニングセンタである場合について説明しているが、工作機械は、横形マシニングセンタまたは旋盤など、他の種類のものであっても構わない。 Embodiment 3
Embodiment 3 discloses a machine tool provided with the surface shape measuring apparatus of Embodiment 1 or 2. Although the case where the machine tool is a vertical machining center is described below, the machine tool may be another type such as a horizontal machining center or a lathe.
　図１２は、実施の形態３による工作機械の構成を模式的に示す斜視図である。図１２を参照して、工作機械２００は、加工装置１０と、ＮＣ（Numerical　Control）装置２４と、ＡＴＣ（自動工具交換装置：Automatic　Tool　Changer）２８と、コンピュータ１５０とを含む。 FIG. 12 is a perspective view schematically showing the configuration of the machine tool according to the third embodiment. Referring to FIG. 12, the machine tool 200 includes a processing device 10, an NC (Numeric Control) device 24, an ATC (Automatic Tool Changer) 28, and a computer 150.
　加工装置１０は、ベッド１２と、ベッド１２上に設置されたコラム１４と、主軸２２を有する主軸頭２０と、テーブル１８を有するサドル１６とを含む。 The processing apparatus 10 comprises a bed 12, a column 14 mounted on the bed 12, a spindle head 20 with a spindle 22 and a saddle 16 with a table 18.
　主軸頭２０は、コラム１４の前面に支持されて、上下方向（Ｚ軸方向）に移動可能である。主軸２２の先端には、工具（図示せず）または測定ヘッド４２が着脱可能に装着される。主軸２２は、その中心軸線（図２のＣＬ）がＺ軸と平行なＣ軸回転中心のまわりに回転可能に、主軸頭２０に支持されている。主軸頭２０は、工作物２の加工のために主軸２２を高速回転させる回転駆動部３６と、主軸２２の回転を低速送り制御可能な回転駆動部３８とを内蔵する。後者の回転駆動部３８は、図４のＣ軸駆動機構１４６Ｃに対応する。 The spindle head 20 is supported on the front surface of the column 14 and is movable in the vertical direction (Z-axis direction). A tool (not shown) or a measuring head 42 is removably attached to the tip of the spindle 22. The main spindle 22 is supported by the main spindle head 20 so as to be rotatable about a C-axis rotation center whose central axis (CL in FIG. 2) is parallel to the Z-axis. The spindle head 20 incorporates a rotary drive unit 36 for rotating the spindle 22 at a high speed for processing the workpiece 2 and a rotary drive unit 38 capable of low-speed feed control of the rotation of the spindle 22. The latter rotational drive unit 38 corresponds to the C-axis drive mechanism 146C of FIG.
　測定ヘッド４２は、図１または図１０に示すレーザ変位計１００，１００Ａと、このレーザ変位計の制御回路および駆動用バッテリと、無線通信を行うための通信装置とを内蔵する。低速送り制御可能な回転駆動部３８によって、測定ヘッド４２（すなわち、レーザ変位計１００，１００Ａ）の向きが制御される。 The measurement head 42 incorporates the laser displacement meter 100 or 100A shown in FIG. 1 or 10, a control circuit and a drive battery of the laser displacement meter, and a communication device for performing wireless communication. The orientation of the measurement head 42 (i.e., the laser displacement gauges 100 and 100A) is controlled by the low speed feed controllable rotary drive 38.
　サドル１６は、ベッド１２上に配置されて前後の水平方向（Ｙ軸方向）に移動可能である。サドル１６上にはテーブル１８が配置されている。テーブル１８は、左右の水平方向（Ｘ軸方向）に移動可能である。テーブル１８上には工作物２が載置されている。サドル１６は図４のサドル１４２に対応し、テーブル１８は図４のテーブル１４４に対応する。工作物２は図４の測定対象物１３０に対応する。 The saddle 16 is disposed on the bed 12 and is movable in the back and forth horizontal direction (Y-axis direction). A table 18 is disposed on the saddle 16. The table 18 is movable in the left and right horizontal directions (X-axis direction). The workpiece 2 is placed on the table 18. The saddle 16 corresponds to the saddle 142 of FIG. 4 and the table 18 corresponds to the table 144 of FIG. The workpiece 2 corresponds to the measurement object 130 of FIG.
　加工装置１０は、測定ヘッド４２と工作物２とを相対的にＸ軸、Ｙ軸、Ｚ軸の直交３軸方向に直線移動させるともに、少なくともＺ軸と平行なＣ軸回転中心の回りに測定ヘッド４２を回転駆動可能なマシニングセンタである。なお、図１の構成と異なり、加工装置１０は、測定ヘッド４２を支持する主軸頭２０を、工作物２に対してＸ軸、Ｙ軸方向にそれぞれ移動させる構成であってもよいし、工作物２を支持するテーブル１８をＣ軸回転中心の回りに回転可能な構成であってもよい。 The processing apparatus 10 linearly moves the measuring head 42 and the workpiece 2 in the directions of three axes orthogonal to the X, Y, and Z axes, and measures at least around the center of rotation of the C axis parallel to the Z axis. It is a machining center capable of rotationally driving the head 42. Unlike the configuration of FIG. 1, the processing apparatus 10 may be configured to move the spindle head 20 supporting the measurement head 42 in the X-axis and Y-axis directions with respect to the workpiece 2, or The table 18 supporting the object 2 may be rotatable around the C-axis rotation center.
　ＮＣ装置２４は、上記の直交３軸およびＣ軸制御を含めて加工装置１０全体の動作を制御する。ＡＴＣ（自動工具交換装置）２８は、主軸２２に対して工具と測定ヘッド４２をそれぞれ自動的に交換する。ＡＴＣ２８は、ＮＣ装置２４によって制御される。 The NC device 24 controls the overall operation of the processing device 10 including the above-described orthogonal three-axis and C-axis control. ATC (Automatic Tool Changer) 28 automatically exchanges the tool and the measuring head 42 with respect to the spindle 22 respectively. The ATC 28 is controlled by an NC unit 24.
　図１３は、図１２の工作機械のうち表面形状測定装置に関する部分の機能的構成を示すブロック図である。図１３には、加工装置１０に備えられているＺ軸送り機構３４、Ｙ軸送り機構３２およびＸ軸送り機構３０が示されている。 FIG. 13 is a block diagram showing a functional configuration of a portion related to the surface shape measuring device in the machine tool of FIG. The Z-axis feed mechanism 34, the Y-axis feed mechanism 32, and the X-axis feed mechanism 30 provided in the processing apparatus 10 are shown in FIG.
　図１２、図１３を参照して、Ｚ軸送り機構３４は、コラム１４に支持されている主軸頭２０を駆動してＺ軸方向に移動させる。Ｙ軸送り機構３２は、ベッド１２上に配置されているサドル１６を駆動してＹ軸方向に移動させる。Ｘ軸送り機構３０は、サドル１６上に載置されて工作物２を支持するテーブル１８を駆動してＸ軸方向に移動させる。ＮＣ装置２４は、Ｚ軸送り機構３４、Ｙ軸送り機構３２およびＸ軸送り機構３０をそれぞれ制御する。Ｘ軸送り機構３０、Ｙ軸送り機構３２、および、Ｚ軸送り機構３４は、図４のＸ軸駆動機構１４６Ｘ、Ｙ軸駆動機構１４６Ｙ、およびＺ軸駆動機構１４６Ｚにそれぞれ対応する。 Referring to FIGS. 12 and 13, Z-axis feed mechanism 34 drives spindle head 20 supported by column 14 to move in the Z-axis direction. The Y-axis feed mechanism 32 drives the saddle 16 disposed on the bed 12 to move it in the Y-axis direction. The X-axis feed mechanism 30 drives the table 18 mounted on the saddle 16 and supporting the workpiece 2 to move it in the X-axis direction. The NC device 24 controls the Z-axis feed mechanism 34, the Y-axis feed mechanism 32 and the X-axis feed mechanism 30, respectively. The X-axis feed mechanism 30, the Y-axis feed mechanism 32, and the Z-axis feed mechanism 34 correspond to the X-axis drive mechanism 146X, the Y-axis drive mechanism 146Y, and the Z-axis drive mechanism 146Z in FIG.
　コンピュータ１５０は、プロセッサ１５２、メモリ１５４、および測定ヘッド４２との間で無線通信を行うための通信装置１６８等を含む。プロセッサ１５２は、メモリ１５４に格納されたプログラムを実行することによって、図４で説明した測定制御部１５６およびデータ処理部１５８として機能する。 The computer 150 includes a processor 152, a memory 154, and a communication device 168 for wireless communication with the measurement head 42. The processor 152 functions as the measurement control unit 156 and the data processing unit 158 described in FIG. 4 by executing the program stored in the memory 154.
　測定制御部１５６は、ＮＣ装置２４と連携することによって、測定ヘッド４２と工作物２との相対的位置関係を連続的に変化させ、これによってレーザビーム１１６が工作物２の表面に沿って走査する。測定制御部１５６は、レーザビーム１１６の走査中に、レーザビーム１１６の走査方向の複数の測定点における高さ方向（Ｚ軸方向）の変位データを工作物２の表面形状データとして測定ヘッド４２から取得する。具体的な手順は以下のとおりである。 The measurement control unit 156 cooperates with the NC device 24 to continuously change the relative positional relationship between the measurement head 42 and the workpiece 2, whereby the laser beam 116 scans along the surface of the workpiece 2. Do. The measurement control unit 156 detects displacement data in the height direction (Z-axis direction) at a plurality of measurement points in the scanning direction of the laser beam 116 from the measuring head 42 as surface shape data of the workpiece 2 during scanning of the laser beam 116. get. The specific procedure is as follows.
　まず、測定制御部１５６からの制御に基づいて、ＮＣ装置２４は、Ｘ軸送り機構３０およびＹ軸送り機構３２のいずれか一方、もしくはＸ軸送り機構３０、Ｙ軸送り機構３２、およびＺ軸送り機構３４のうちの少なくとも２軸を駆動することによって、測定ヘッド４２と工作物２との相対的位置関係を連続的に変化させる。 First, based on the control from the measurement control unit 156, the NC device 24 is either one of the X-axis feed mechanism 30 and the Y-axis feed mechanism 32, or the X-axis feed mechanism 30, the Y-axis feed mechanism 32, and the Z axis. By driving at least two axes of the feed mechanism 34, the relative positional relationship between the measuring head 42 and the workpiece 2 is continuously changed.
　ＮＣ装置２４に内蔵されたＰＬＣ（プログラマブル・ロジック・コントローラ：Programmable　Logic　Controller）２６は、上記の送り機構の駆動に同期して、所定周期でトリガ信号を通信装置１６８に出力する。通信装置１６８はトリガ信号を受信すると測定指令ｆを測定ヘッド４２に送信し、測定ヘッド４２は測定指令ｆに従って測定ヘッド４２から工作物２までの距離Ｄ（すなわち、工作物２の表面の変位）を測定する。測定された距離ＤのデータＦは、測定ヘッド４２から通信装置１６８を介して測定制御部１５６に送信される。 A PLC (Programmable Logic Controller) 26 incorporated in the NC device 24 outputs a trigger signal to the communication device 168 at a predetermined cycle in synchronization with the driving of the above-mentioned feed mechanism. When the communication device 168 receives the trigger signal, it sends a measurement command f to the measurement head 42, and the measurement head 42 follows the measurement command f to determine the distance D from the measurement head 42 to the workpiece 2 (that is, the displacement of the surface of the workpiece 2) Measure Data F of the measured distance D is transmitted from the measurement head 42 to the measurement control unit 156 via the communication device 168.
　ＰＬＣ２６は、さらに、上記の測定ヘッド４２による距離測定のタイミングに合わせて、Ｘ軸送り機構３０、Ｙ軸送り機構３２、およびＺ軸送り機構３４の位置情報を取得することによって、測定ヘッド４２の位置のデータを検出する。ＰＬＣ２６は、検出した測定ヘッド４２の位置のデータを測定制御部１５６に送信する。 The PLC 26 further obtains positional information of the X-axis feed mechanism 30, the Y-axis feed mechanism 32, and the Z-axis feed mechanism 34 in synchronization with the timing of distance measurement by the measurement head 42 described above. Detect location data. The PLC 26 transmits data of the detected position of the measurement head 42 to the measurement control unit 156.
　測定制御部１５６は、ＰＬＣ２６から取得した測定ヘッド４２の位置データと、測定ヘッド４２から取得した距離ＤのデータＦとに基づいて、レーザビーム１１６の走査方向に沿った各測定点における高さ方向（Ｚ軸方向）の変位データを表面形状データ１６６として、メモリ１５４に格納する。なお、図１に示す構成のレーザ変位計１００を用いて工作物２の段差の位置を検出する場合には、工作物２の同一箇所についてレーザ変位計１００の向きを１８０度回転させる前と後の合計２回の測定が行われる。 Based on the position data of the measurement head 42 acquired from the PLC 26 and the data F of the distance D acquired from the measurement head 42, the measurement control unit 156 measures the height direction at each measurement point along the scanning direction of the laser beam 116. The displacement data (in the Z-axis direction) is stored in the memory 154 as surface shape data 166. In addition, when detecting the position of the level | step difference of the workpiece 2 using the laser displacement meter 100 of the structure shown in FIG. 1, before and after rotating 180 degrees of directions of the laser displacement meter 100 about the same location of the workpiece 2 A total of two measurements are taken.
　プロセッサ１５２は、さらに、上記の表面形状データ１６６のデータ処理を行うためのデータ処理部１５８として機能する。データ処理部１５８の動作は、実施の形態１および２で説明したとおりである。データ処理部１５８によるデータ処理の結果、工作物２の段差（エッジ）の位置を簡単かつ短時間で検出することができる。 The processor 152 further functions as a data processing unit 158 for performing data processing of the surface shape data 166 described above. The operation of the data processing unit 158 is as described in the first and second embodiments. As a result of data processing by the data processing unit 158, the position of the step (edge) of the workpiece 2 can be detected easily and in a short time.
　今回開示された実施の形態はすべての点で例示であって制限的なものでないと考えられるべきである。この発明の範囲は上記した説明ではなくて請求の範囲によって示され、請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。 It should be understood that the embodiment disclosed herein is illustrative and non-restrictive in every respect. The scope of the present invention is shown not by the above description but by the scope of claims, and is intended to include all modifications within the scope and meaning equivalent to the scope of claims.
　２　工作物、１０　加工装置、１６，１４２　サドル、１８，１４４　テーブル、２０　主軸頭、２２　主軸、２４　ＮＣ装置、３０　Ｘ軸送り機構、３２　Ｙ軸送り機構、３４　Ｚ軸送り機構、３６，３８　回転駆動部、４２　測定ヘッド、１００，１００Ａ　レーザ変位計、１１０　発光部、１１２　レーザダイオード、１１４　レンズ、１１６　レーザビーム、１１８，１１８Ａ，１１８Ｂ　集光レンズ（光学系）、１２０，１２０Ａ，１２０Ｂ　リニアイメージセンサ（受光部）、１３０　測定対象物、１３２　レーザスポット、１３４　エッジ、１４０　表面形状測定装置、１４６　移動機構、１４６Ｘ　Ｘ軸駆動機構、１４６Ｙ　Ｙ軸駆動機構、１４６Ｚ　Ｚ軸駆動機構、１４６Ｃ　Ｃ軸駆動機構、１５０　コンピュータ、１５２　プロセッサ、１５４　メモリ、１５６　測定制御部、１５８　データ処理部、１６０　段差特定部、１６２　データ補正部、１６６　表面形状データ、２００　工作機械、Ｐ０　分離開始点、Ｐ１　段差位置。 2 Workpiece, 10 Machining device, 16, 142 Saddle, 18, 144 Table, 20 Spindle head, 22 Spindle, 24 NC device, 30 X axis feed mechanism, 32 Y axis feed mechanism, 34 Z axis feed mechanism, 36, 38 Rotational drive unit, 42 measuring head, 100, 100A laser displacement meter, 110 light emitting unit, 112 laser diode, 114 lens, 116 laser beam, 118, 118A, 118B focusing lens (optical system), 120, 120A, 120B linear image Sensor (light receiving unit), 130 measurement object, 132 laser spot, 134 edge, 140 surface shape measuring device, 146 moving mechanism, 146 X X axis drive mechanism, 146 Y Y axis drive mechanism, 146 Z Z axis drive mechanism, 146 C C axis drive Mechanism, 150 computers, 1 2 processor, 154 a memory, 156 measurement control portion, 158 data processing unit, 160 stepped particular unit, 162 data correction unit, 166 surface shape data, 200 a machine tool, P0 separation start point, P1 step position.

Claims (9)

  1. 　段差を含む測定対象物の表面形状を測定する表面形状測定装置であって、
    　前記測定対象物に向けて光ビームを出射する発光部、前記測定対象物からの前記光ビームの散乱光を集光する光学系、および前記光学系による集光位置を検出する受光部を含み、前記受光部での集光位置に基づいて前記測定対象物の表面の変位を測定する変位計と、
    　前記変位計と前記測定対象物とを相対的に移動させることによって、前記光ビームを走査する移動機構と、
    　前記段差と交差する方向に前記移動機構によって前記光ビームを走査しながら、前記測定対象物の表面の変位を前記変位計によって連続的に測定する第１の測定と、前記光ビームを回転対称軸にして前記光学系および前記受光部の配置を前記第１の測定の場合に対して１８０度回転させた状態で、前記第１の測定と同一箇所を前記変位計によって連続的に測定する第２の測定とを実行するように構成された測定制御部と、
    　前記第１の測定による測定値と前記第２の測定による測定値とが分離し始める分離開始点に基づいて前記段差の位置を特定する段差特定部とを備える、表面形状測定装置。     A surface shape measuring device for measuring the surface shape of a measurement object including a step,
    A light emitting unit for emitting a light beam toward the measurement object, an optical system for collecting scattered light of the light beam from the measurement object, and a light receiving unit for detecting a light collecting position by the optical system; A displacement gauge that measures the displacement of the surface of the measurement object based on the light collecting position at the light receiving unit;
    A moving mechanism for scanning the light beam by relatively moving the displacement meter and the measurement object;
    A first measurement of continuously measuring the displacement of the surface of the measurement object by the displacement gauge while scanning the light beam by the moving mechanism in a direction intersecting the step, and a rotational symmetry axis of the light beam A second measurement in which the same position as the first measurement is continuously measured by the displacement meter while the arrangement of the optical system and the light receiving unit is rotated 180 degrees with respect to the first measurement. A measurement control unit configured to perform the measurement of
    A surface shape measuring apparatus, comprising: a step identification unit that identifies the position of the step based on a separation start point at which the measurement value by the first measurement and the measurement value by the second measurement start to separate.
  2. 　前記段差特定部は、前記第１の測定による測定値と前記第２の測定による測定値とが分離している区間内で、前記分離開始点から前記光ビームのスポットサイズの１／２だけ離れた点を段差の位置として特定する、請求項１に記載の表面形状測定装置。 The step identifying unit is separated from the separation start point by a half of the spot size of the light beam within a section where the measurement value by the first measurement and the measurement value by the second measurement are separated. The surface shape measuring apparatus according to claim 1, wherein the curved point is specified as the position of the step.
  3. 　前記分離開始点から前記特定された段差の位置までの各測定点における表面の変位の値を、前記第１の測定による測定値と前記第２の測定による測定値との平均値に設定するデータ補正部をさらに備える、請求項２に記載の表面形状測定装置。 Data in which the value of displacement of the surface at each measurement point from the separation start point to the position of the specified level difference is set as the average value of the measurement value by the first measurement and the measurement value by the second measurement The surface shape measuring device according to claim 2, further comprising a correction unit.
  4. 　前記光ビームに沿った方向から平面視したとき、前記光ビームの走査方向は、前記光ビームと前記受光部の集光位置とを含む光路面に対して垂直方向でない、請求項１～３のいずれか１項に記載の表面形状測定装置。 The scanning direction of the light beam is not perpendicular to the light road surface including the light beam and the condensing position of the light receiving unit when viewed in plan from the direction along the light beam. The surface shape measuring device according to any one of the items.
  5. 　前記第１の測定では、前記光ビームに対して前記受光部は前記光ビームの走査方向の前方および後方のうちのいずれか一方に配置され、
    　前記第２の測定では、前記光ビームに対して前記受光部は前記走査方向の前方および後方のうちの他方に配置される、請求項１～４のいずれか１項に記載の表面形状測定装置。     In the first measurement, the light receiving unit is disposed at one of a front side and a rear side in a scanning direction of the light beam with respect to the light beam,
    The surface shape measuring apparatus according to any one of claims 1 to 4, wherein in the second measurement, the light receiving unit is disposed on the other of the front and the rear in the scanning direction with respect to the light beam. .
  6. 　前記変位計は、前記光学系として、第１の光学系と、前記前記光ビームを回転対称軸にして前記第１の光学系を１８０度回転させた位置に配置された第２の光学系とを含み、
    　前記変位計は、前記受光部として、第１の受光部と、前記前記光ビームを回転対称軸にして前記第１の受光部を１８０度回転させた位置に配置された第２の受光部とを含み、
    　前記第１の光学系および前記第１の受光部は、前記第１の測定のために用いられ、
    　前記第２の光学系および前記第２の受光部は、前記第２の測定のために用いられる、請求項１～４のいずれか１項に記載の表面形状測定装置。     The displacement gauge includes, as the optical system, a first optical system, and a second optical system disposed at a position where the first optical system is rotated 180 degrees about the light beam as a rotational symmetry axis. Including
    The displacement gauge includes, as the light receiving unit, a first light receiving unit, and a second light receiving unit disposed at a position where the first light receiving unit is rotated 180 degrees about the light beam as a rotational symmetry axis. Including
    The first optical system and the first light receiving unit are used for the first measurement,
    The surface shape measuring apparatus according to any one of claims 1 to 4, wherein the second optical system and the second light receiving unit are used for the second measurement.
  7. 　前記第１の受光部は、前記光ビームに対して前記光ビームの走査方向の前方および後方のうちのいずれか一方に配置され、
    　前記第２の受光部は、前記光ビームに対して前記走査方向の前方および後方のうちの他方に配置される、請求項６に記載の表面形状測定装置。     The first light receiving unit is disposed at one of a front side and a rear side with respect to the light beam in a scanning direction of the light beam,
    The surface shape measuring apparatus according to claim 6, wherein the second light receiving unit is disposed at the other of the front and the rear in the scanning direction with respect to the light beam.
  8. 　請求項１～７のいずれか１項に記載の表面形状測定装置を備える、工作機械。 A machine tool comprising the surface shape measuring device according to any one of claims 1 to 7.
  9. 　非接触型の変位計を用いて段差を含む測定対象物の表面形状を測定する表面形状測定方法であって、
    　前記変位計は、前記測定対象物に向けて光ビームを出射する発光部、前記測定対象物からの前記光ビームの散乱光を集光する光学系、および前記光学系による集光位置を検出する受光部を含み、
    　前記表面形状測定方法は、
    　前記変位計と前記測定対象物とを相対的に移動させることによって前記段差と交差する方向に前記光ビームを走査しながら、前記測定対象物の表面の変位を前記変位計によって連続的に測定する第１の測定ステップと、
    　前記光ビームを回転対称軸にして前記光学系および前記受光部の配置を前記第１の測定ステップの場合に対して１８０度回転させた状態で、前記第１の測定ステップと同一箇所を前記変位計によって連続的に測定する第２の測定ステップと、
    　前記第１の測定ステップによる測定値と前記第２の測定ステップによる測定値とが分離し始める分離開始点に基づいて前記段差の位置を特定するステップとを備える、表面形状測定方法。     A surface shape measuring method for measuring the surface shape of an object to be measured including a step using a noncontact displacement meter,
    The displacement gage detects a light emitting unit that emits a light beam toward the measurement object, an optical system that collects scattered light of the light beam from the measurement object, and a light collection position by the optical system Including a light receiver,
    The surface shape measuring method is
    The displacement of the surface of the measurement object is continuously measured by the displacement meter while the light beam is scanned in the direction intersecting the step by relatively moving the displacement meter and the measurement object. A first measuring step,
    In the state where the arrangement of the optical system and the light receiving unit is rotated 180 degrees with respect to the case of the first measurement step with the light beam as the rotational symmetry axis, the displacement of the same portion as the first measurement step is A second measuring step, measuring continuously by means of a meter;
    Determining the position of the step on the basis of a separation start point at which the measurement value in the first measurement step and the measurement value in the second measurement step begin to separate.
PCT/JP2014/079052 2014-02-13 2014-10-31 Surface shape measurement device, machine tool provided with same, and surface shape measurement method WO2015122060A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0222504A (en) * 1988-07-11 1990-01-25 Juki Corp Measuring method for outward shape size of substrate by position detecting element
JPH10103915A (en) * 1996-09-26 1998-04-24 Nikon Corp Apparatus for detecting position of face
JP2011099729A (en) * 2009-11-05 2011-05-19 Jfe Steel Corp Surface shape measuring device and method
US20110290989A1 (en) * 2010-05-31 2011-12-01 Sick Ag Optoelectronic sensor for detecting object edges
JP2012194085A (en) * 2011-03-17 2012-10-11 Mitsubishi Electric Corp Edge detection apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0222504A (en) * 1988-07-11 1990-01-25 Juki Corp Measuring method for outward shape size of substrate by position detecting element
JPH10103915A (en) * 1996-09-26 1998-04-24 Nikon Corp Apparatus for detecting position of face
JP2011099729A (en) * 2009-11-05 2011-05-19 Jfe Steel Corp Surface shape measuring device and method
US20110290989A1 (en) * 2010-05-31 2011-12-01 Sick Ag Optoelectronic sensor for detecting object edges
JP2012194085A (en) * 2011-03-17 2012-10-11 Mitsubishi Electric Corp Edge detection apparatus

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