WO2015079514A1 - Edge position detection sensor - Google Patents

Edge position detection sensor Download PDF

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Publication number
WO2015079514A1
WO2015079514A1 PCT/JP2013/081914 JP2013081914W WO2015079514A1 WO 2015079514 A1 WO2015079514 A1 WO 2015079514A1 JP 2013081914 W JP2013081914 W JP 2013081914W WO 2015079514 A1 WO2015079514 A1 WO 2015079514A1
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WO
WIPO (PCT)
Prior art keywords
light
edge position
position detection
detection sensor
projection
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PCT/JP2013/081914
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French (fr)
Japanese (ja)
Inventor
俊 青木
Original Assignee
株式会社ニレコ
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Application filed by 株式会社ニレコ filed Critical 株式会社ニレコ
Priority to PCT/JP2013/081914 priority Critical patent/WO2015079514A1/en
Priority to JP2014512202A priority patent/JPWO2015079514A1/en
Publication of WO2015079514A1 publication Critical patent/WO2015079514A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B65H23/02—Registering, tensioning, smoothing or guiding webs transversely
    • B65H23/0204—Sensing transverse register of web
    • B65H23/0216—Sensing transverse register of web with an element utilising photoelectric effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/40—Sensing or detecting means using optical, e.g. photographic, elements
    • B65H2553/41—Photoelectric detectors
    • B65H2553/412—Photoelectric detectors in barrier arrangements, i.e. emitter facing a receptor element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/61—Display device manufacture, e.g. liquid crystal displays

Definitions

  • the present invention relates to an edge position detection sensor for detecting the edge position of a web for regulation control of meandering of the traveling web.
  • the edge position of the web is detected by an edge position detection sensor, the amount of deviation between the obtained edge position and the normal position is obtained, and the reel on the rewind side or the take-up side is obtained according to the obtained amount of deviation.
  • the edge position control system is used to control the side reel or the intermediate guide roll between the rewind reel and the take-up reel by an actuator in a direction perpendicular to the web running direction and a direction in which the amount of deviation decreases. ing.
  • FIG. 5 shows an outline of a conventional edge position detection sensor 400 (for example, Non-Patent Document 1).
  • the edge position detection sensor 400 detects the position of the edge 301 of the web 300 by projecting measurement light (white light) generated inside from the projection / light receiving unit 411 and receiving and processing the reflected light.
  • a light reflecting portion 420 provided with a light reflecting plate 421 for reflecting measurement light projected from the projection / light receiving portion 411, a bracket 430 for attaching the light reflecting portion 420 to the sensor main body 410, and a sensor main body And a cable 440 connected to an internal circuit 410.
  • the edge position detection sensor 400 reflects the reflected light reflected by the region of the edge 301 of the traveling web 300 and the reflected light reflected by the light reflecting plate 421 when measuring light is projected from the projection / light receiving unit 411. , And the position of the edge 301 is detected from the total light quantity of both reflected lights. That is, the edge position detection sensor 400 generates a signal having a positive or negative polarity indicating a difference from the normal position of the edge 301 of the web 300 based on the total light amount and the threshold value, and outputs the signal. Output as an edge position detection signal.
  • the production may be performed in a vacuum atmosphere, and when performing regulation control of web meandering in such a vacuum atmosphere, the vacuum atmosphere
  • the adhesive inside the sensor body 410 of the edge position detection sensor 400 installed therein, the organic material coming out of the printed circuit board, etc. may be drawn out into the vacuum atmosphere as outgas, which may adversely affect the production line. Further, the life of the edge position detection sensor 400 itself may be shortened by the extraction of the outgas.
  • the edge position detection sensor 400 is deteriorated or contaminated by the corrosive gas, and in the worst case, damage is caused.
  • the regulation control of the meandering of the web may malfunction, and a defective product may appear in the manufactured functional thin film.
  • the light reflecting plate 421 also peels off in a vacuum atmosphere when a thin film formed by metal deposition or the like is used as the mirror surface of the light reflecting plate 421. Or the film changes in a corrosive atmosphere.
  • the present invention has been made in view of the above points, and its purpose is that outgassing does not become a problem even in a vacuum atmosphere, and corrosion is a problem even in a corrosive gas atmosphere. It is an object of the present invention to provide an edge position detection sensor in which measures are taken so as not to occur.
  • an edge position detection sensor is a light / optical device that generates measurement light, receives reflected light based on the measurement light, and calculates an edge position based on the reflected light.
  • a sensor main body having an electric signal processing unit, and a projection / light receiving unit including an optical system for projecting the measurement light to the outside and capturing the reflected light incident from the outside into the optical / electrical signal processing unit;
  • the projection / light-receiving unit is arranged so as to face the projection / light-receiving unit of the sensor main body with a measurement space interposed therebetween, and a cable lead-out unit that pulls out a cable having a tip connected to the optical / electrical signal processing unit.
  • an edge position detection sensor comprising: a light reflecting plate that reflects measurement light projected from the projection / excluding the casing of the sensor body, the cable lead-out portion, and the optical system.
  • the optical part is formed of a corrosion-resistant and rigid material, and the cable lead-out part and the projection / light-receiving part are coupled to the sensor main body and the projection / light-receiving part itself is configured in a sealed structure.
  • the interior of the electrical processing unit and the projection / light receiving unit is spatially shielded from the outside.
  • a light reflecting portion is formed in a sealed structure that allows the light reflecting plate to transmit light with a material having corrosion resistance.
  • the reflector is spatially shielded from the outside.
  • the housing of the sensor main body includes a base plate on which the optical / electrical signal processing unit is mounted, and the optical / electrical signal processing unit. And a case coupled to the base plate in a sealed structure so as to cover all of the first plate, and forming a first opening in the base plate and a second opening in the case,
  • the projection / light receiving unit is coupled to the opening with a sealed structure
  • the cable lead-out unit is coupled to the second opening with a sealed structure.
  • the projection / light receiving unit condenses the measurement light projected from the light / the signal processing unit and collects the reflected light.
  • a lens that shines a lens holder that holds the lens and is coupled to the first opening in a sealed structure, a first cover glass disposed outside the lens, and the first cover glass.
  • a first cover glass holder that holds the cover glass so as to be coupled to the lens holder in a sealed structure.
  • the light reflecting portion holds the light reflecting plate and is attached to the sensor body by a bracket, and the light reflecting portion.
  • the invention according to claim 6 is the edge position detection sensor according to claim 3, wherein the cable lead-out portion includes a flanged bellows for guiding the cable, a center ring with an outer, and a flange portion of the flanged bellows. And a bulkhead clamp that presses around the second opening of the case via the outer center ring, and the flange portion of the flanged bellows is interposed between the outer center ring and the case. The second opening is coupled to the second opening in a sealed structure.
  • the second opening is formed at two or more different locations of the case, and the cable lead-out portion is included in one of them. It is characterized in that it is joined in a sealed structure and the remainder is closed in a sealed structure by a blind plate.
  • the sealing structure is formed using an O-ring.
  • the projection / light-receiving portion excluding the housing of the sensor body, the cable lead-out portion, and the optical system is formed of a corrosion-resistant and rigid material, and the cable lead-out portion and the projection / light-receiving portion are
  • the coupling part to the sensor body and the projection / light receiving part itself are configured in a sealed structure so that the inside of the light / electric processing part and the projection / light receiving part is spatially shielded from the outside. Even when it is disposed in the position, it is possible to prevent the outgas from being generated from the adhesive in the sensor body, the printed circuit board or the like and adversely affecting the production line by the roll-to-roll system. Further, there is no risk of corrosion even when placed in an atmosphere of corrosive gas.
  • a light reflecting portion is formed in a sealed structure that allows the light reflecting plate to transmit light with a material having corrosion resistance, and the light reflecting plate is externally provided. Therefore, it is possible to prevent the scattering of the thin film from adversely affecting the production line and corroding the light reflecting plate.
  • the edge position detection sensor of the present invention is suitable for the regulation control of the web meandering of the production line by the roll-to-roll method.
  • FIG. 1 is a top view of the edge position detection sensor of a present Example, (b) is a left view, (c) is a bottom view. (A) is a front view of the edge position detection sensor of a present Example, (b) is a rear view. It is sectional drawing of the edge position detection sensor of a present Example. It is usage explanatory drawing of the conventional edge position detection sensor.
  • the edge position detection sensor 100 of the present embodiment projects the measurement light toward the edge 301 of the web 300 and receives the reflected light to detect the shift amount of the edge position, and reflects the measurement light.
  • reference numeral 150 denotes a rectangular base plate, a threaded hole 151 is formed as a first opening, and a bracket 130 is attached to the lower surface by a hexagon socket bolt 25.
  • Reference numeral 160 denotes a case, in which through openings 161 and 162 for attaching the cable lead-out portion 140 are formed as second openings, and are formed in a size and shape that closes the upper surface of the base plate 150.
  • the base plate 150 and the case 160 constitute a housing of the sensor main body 110.
  • Reference numeral 170 denotes a blind plate 170 that closes the opening 162 of the case 160.
  • An optical / electrical signal processing unit 180 is mounted inside the base plate 150 and the case 160.
  • a projection / light receiving unit 190 includes an optical system that projects measurement light and receives reflected light, and is attached to a screw hole 151 of the base plate 150.
  • the 9 hexagon socket head cap bolts 21 are fastened to the case 160 from the side of the base plate 150, so that the O-ring 11 interposed between the base plate 150 and the base plate 150 has a sealed structure. It has become.
  • blind plate 170 is also joined to the case 160 by the O-ring 12 interposed between the case 160 by tightening the six hexagon socket head cap screws 22 from the blind plate 17 side to the case 160.
  • 191 is a lens holder screwed into the screw hole 151 of the base plate 150
  • 192 is a condensing lens loaded in the cavity 191 a of the lens holder 191
  • 193 is outside the lens 192
  • a transparent cover glass 194 located on the lower side is a cover glass holder that is screwed onto the outside of the lens holder 191 in order to attach the cover glass 193.
  • An opening 194 a for transmitting light is formed in the center portion of the cover glass holder 194.
  • a space between the screw hole 151 of the base plate 150 and the lens holder 191 is sealed by an O-ring 13 fitted in a step formed at the lower part of the screw hole 151.
  • the cover glass 193 and the lens holder 191 are hermetically sealed by the O-ring 14.
  • the optical / electrical signal processing unit 180 mounted inside the case 160 reflects the measurement light generated by the light emitting unit 181 using the white LED as a light source and the light emitting unit 181 in the direction of the lens 192 and the lens 192.
  • a light receiving unit 182 including a half mirror that guides reflected light incident from the direction to an SPD (silicon photodiode) as a light receiving element, and a printed board 183 are provided.
  • the printed circuit board 183 is equipped with a control circuit for controlling the light emitting unit 181 and an arithmetic circuit for converting the optical signal received by the light receiving unit 182 into an electric signal to calculate a deviation from the normal position of the web edge. Has been.
  • 121 is a light reflecting plate holder attached to the bracket 130 with four hexagon socket bolts 23
  • 122 is a specular light reflecting plate loaded in the light reflecting plate holder 121, 123.
  • 124 is a cover glass holder that presses the cover glass 123 against the light reflection plate 122 by screwing it to the outside of the light reflection plate holder 121.
  • the cover glass holder 124 is formed with an opening 124a for transmitting light.
  • a space between the light reflection plate 122 and the cover glass 123 is sealed by an O-ring 15.
  • an O-ring 16 is also interposed between the light reflecting plate holder 121 and the light reflecting plate 122, thereby preventing the light reflecting plate 122 from rattling and preventing the angle of the light reflecting plate 122 with respect to the lens 192 from fluctuating. It has become.
  • 141 is a four-core shielded cable connected to the printed circuit board 183 of the optical / electrical signal processing unit 180 for power supply and signal extraction
  • 142 is a bellows with a flange that flexibly covers the cable 141.
  • 143 is a center ring with an outer in which an O-ring is incorporated, and is interposed between the large flange portion 142b on the front end side of the flange portion 142a of the bellows 142 with flange and the periphery of the opening 161 of the case 160.
  • the 144 is a bulkhead clamp which is divided into two parts, and a total of six bulkhead clamps 142b so that the flange 142b of the flanged bellows 142 is pressed in the direction around the opening 161 of the case 160 through the center ring 143 with the outer.
  • the hexagon socket head cap screw 24 is tightened to the case 160.
  • the center ring 143 with the outer portion forms a sealed structure between the opening 161 of the case 160 and the flange portion 142a of the bellows 142 with the flange. If the other end of the flanged bellows 142 communicates with the atmosphere, the optical / electrical signal processing unit 180 also becomes atmospheric pressure through the opening 161, the outer center ring 144, and the flanged bellows 142.
  • constituent members other than the optical / electrical signal processing unit 180, the lens 192, the cover glass 193, 123, the light reflector 122, the cable 141, etc. are formed of a material having corrosion resistance rigidity, such as an aluminum alloy or stainless steel. Has been.
  • the edge position detection sensor 100 configured as described above is attached to an edge position control system (not shown) by an arm 200 attached to the left side of the case 160 with four hexagon socket head bolts 26. . Then, when measuring light is generated by the white LED of the light emitting unit 181, the measuring light is changed in a downward direction by 90 degrees by the half mirror of the light receiving unit 182, and then converted into a light beam having a predetermined cross-sectional area by the lens 192. The light is condensed, passes through the cover glass 193, and is projected onto the measurement space A.
  • the light passes through the cover glass 123 of the light reflecting portion 120 and is reflected by the light reflecting plate 122, and again passes through the half mirror of the light receiving portion 182 via the measurement space A and the projection / light receiving portion 190, and then passes through the inside of the light receiving portion 182. Incident on the SPD.
  • the arithmetic circuit on the printed circuit board 183 compares the electrical signal with a threshold value when the edge 301 of the web 300 is in the normal position, thereby obtaining the current edge 301.
  • a detection signal indicating the amount of deviation from the normal position can be obtained. Since this is not directly related to the present invention, further detailed explanation is omitted.
  • the web 300 may meander in directions B1 and B2 perpendicular to the travel direction B.
  • the position of the edge 301 of the web 300 enters the inner side of the normal position in the measurement space A of the edge position detection device 100, it is a case where the position is shifted in the B1 direction. Detected. Further, when it is away from the normal position, it is a case where it is shifted in the B2 direction, and the amount of deviation is detected as a negative value, for example. Then, the meandering restriction control is performed by the edge position control system in accordance with the detection signal indicating the deviation amount.
  • the joint between the base plate 150 and the case 160 is the O-ring 11.
  • the joint between the case 160 and the blind plate 170 is the O-ring 12
  • the joint between the lens holder 192 and the base plate 150 is the O-ring 13
  • the flange 143 are sealed by the outer center ring 143, so that the internal optical / electrical signal processor 180 and the lens 192 are completely shielded from the outside.
  • the light reflecting plate 122 is sealed by the light reflecting plate holder 121 and the cover lens 123, and is completely shielded from the outside in space.
  • edge position detection sensor 100 and the light reflection plate 122 are completely shielded from the external atmosphere, even if the edge position detection sensor 100 is arranged in a vacuum atmosphere, the edge is detected. It is possible to prevent an outgas from being generated from the adhesive or printed circuit board of the optical / electrical signal processing unit 180 mounted on the position detection sensor 100 and adversely affecting the production line using the roll-to-roll method. Further, even when the edge position detection sensor 100 is disposed in an atmosphere of corrosive gas, there is no possibility that the edge position detection sensor 100 is corroded. Therefore, it is possible to realize an edge position detection sensor suitable for the regulation control of the web meandering of the production line by the roll-to-roll method.
  • the light reflecting plate 122 is covered with the cover glass 123 and the light reflecting plate 122 is made of a sealed structure made of a corrosion-resistant and rigid material, metal deposition is used as a mirror surface of the light reflecting plate 122.
  • the thin film formed by the above method it is possible to prevent the thin film from being peeled off in a vacuum atmosphere and scattered, or to be changed in a corrosive atmosphere.
  • the mirror surface of the light reflecting plate 122 is a solid mirror surface such as metal surface polishing, it is not necessary to take measures such as covering with a cover glass 123 or a sealing structure.
  • the cable lead-out portion 140 is attached to the opening 161 on the back surface of the case 160, but it can be attached to the opening 162 portion on the top surface with a sealed structure by the same method.
  • the opening 161 needs to be closed in a sealed state by the blind plate 170, the O-ring 12, and the hexagon socket bolt 22.
  • the number of places where the cable lead-out portion 140 can be attached to the edge position detection sensor 100 increases, and the edge position detection sensor 100 must be arranged in a narrow space.
  • all openings to which the cable lead-out portion 140 is not attached need to be sealed with a blind plate.
  • O-ring 21 to 26 Hexagon socket head cap bolt 110: Sensor body 120: Light reflecting portion, 121: Light reflecting plate holder, 122: Light reflecting plate, 123: Cover glass, 124: Cover glass holder, 142a: Opening 130: Bracket, 131: Opening 140: Cable lead-out part, 141: 4-core shielded cable, 142: Bellows with flange, 143: Center ring with outer ring, 144: Bulkhead clamp 150: Base plate, 151: Screw hole 160: Case 161, 162: Opening 170: Blind plate 180: Optical / electrical signal processing unit, 181: Light emitting unit, 182: Light receiving unit, 183: Printed circuit board 190: Projection / light receiving unit, 191: Lens holder, 192: Lens, 193 : Cover glass, 194: Cover glass holder, 1 94a: Opening 200: Arm 300: Web, 301: Edge

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

[Problem] To eliminate out gas troubles even in a vacuum atmosphere, and to eliminate corrosion troubles even in a corrosive gas atmosphere. [Solution] A housing of a sensor main body (110), a cable lead out section (140), and a projection/light reception section (190) excluding an optical system are formed of materials having corrosion resistance and rigidity, connecting sections of the cable lead out section (140) and the projection/light reception section (190) to the sensor main body (110), and the projection/light reception section (190) itself are configured to have airtight structures, and inside of an optical/electric processing section (180) and that of the projection/light reception section (190) are spatially blocked from outside. Furthermore, a light reflecting section (120) is formed, said light reflecting section making a light reflecting plate (122) have an airtight structure capable of transmitting light, and the light reflecting plate (122) is spatially blocked from the outside.

Description

エッジ位置検出センサEdge position detection sensor
　本発明は、走行するウェブの蛇行の規制制御のためにそのウェブのエッジ位置を検出するエッジ位置検出センサに関する。 The present invention relates to an edge position detection sensor for detecting the edge position of a web for regulation control of meandering of the traveling web.
　紙、フィルム、セロファン、織物、箔、ゴム、銅等のウェブ（可撓性をもつ透明又は不透明の長尺物）の巻き取りや巻き戻しを行う場合、そのウェブが走行途中で蛇行すると、巻き取りを正常に行うことができなくなり、また走行の途中において例えば印刷を行う場合は、印刷ズレを引き起こす。 When winding or rewinding a web (paper, film, cellophane, woven fabric, foil, rubber, copper, etc.), when winding or rewinding the web, If the printing cannot be performed normally and printing is performed during traveling, for example, printing misalignment is caused.
　そこで従来では、ウェブのエッジ位置をエッジ位置検出センサによって検出し、得られたエッジ位置と正規位置とのズレ量を求め、得られたズレ量に応じて、巻き戻し側のリール、あるいは巻き取り側のリール、あるいは巻き戻しリールと巻き取りリールの間の中間ガイドロールを、ウェブ走行方向と直交する方向で且つ前記ズレ量が減少する方向にアクチュエータによって動かす制御を行うエッジ位置制御システムが採用されている。 Therefore, conventionally, the edge position of the web is detected by an edge position detection sensor, the amount of deviation between the obtained edge position and the normal position is obtained, and the reel on the rewind side or the take-up side is obtained according to the obtained amount of deviation. The edge position control system is used to control the side reel or the intermediate guide roll between the rewind reel and the take-up reel by an actuator in a direction perpendicular to the web running direction and a direction in which the amount of deviation decreases. ing.
　図５に従来のエッジ位置検出センサ４００の概略を示した（例えば、非特許文献１）。このエッジ位置検出センサ４００は、内部で発生させた測定光（白色光）を投射／受光部４１１から投射し反射光を受光して処理することでウェブ３００のエッジ３０１の位置を検出するセンサ本体４１０と、投射／受光部４１１から投射された測定光を反射させる光反射板４２１が設けられた光反射部４２０と、その光反射部４２０をセンサ本体４１０に対して取り付けるブラケット４３０と、センサ本体４１０の内部回路に接続されるケーブル４４０とを備える。 FIG. 5 shows an outline of a conventional edge position detection sensor 400 (for example, Non-Patent Document 1). The edge position detection sensor 400 detects the position of the edge 301 of the web 300 by projecting measurement light (white light) generated inside from the projection / light receiving unit 411 and receiving and processing the reflected light. 410, a light reflecting portion 420 provided with a light reflecting plate 421 for reflecting measurement light projected from the projection / light receiving portion 411, a bracket 430 for attaching the light reflecting portion 420 to the sensor main body 410, and a sensor main body And a cable 440 connected to an internal circuit 410.
　このエッジ位置検出センサ４００は、投射／受光部４１１から測定光を投射させたとき、走行しているウェブ３００のエッジ３０１の領域で反射された反射光と光反射板４２１で反射された反射光とを受光して、両反射光の合計光量から、そのエッジ３０１の位置を検出するものある。すなわち、エッジ位置検出センサ４００は、その合計光量と閾値に基づいて、ウェブ３００のエッジ３０１の正規位置からの差分を示す正又は負の極性をもつ信号を演算処理によって生成して、その信号をエッジ位置検出信号として出力する。 The edge position detection sensor 400 reflects the reflected light reflected by the region of the edge 301 of the traveling web 300 and the reflected light reflected by the light reflecting plate 421 when measuring light is projected from the projection / light receiving unit 411. , And the position of the edge 301 is detected from the total light quantity of both reflected lights. That is, the edge position detection sensor 400 generates a signal having a positive or negative polarity indicating a difference from the normal position of the edge 301 of the web 300 based on the total light amount and the threshold value, and outputs the signal. Output as an edge position detection signal.
　ところで、現在では、ロール状に巻かれた長さ数百ｍ～数ｋｍのフィルム基板を巻き戻す過程において、蒸着、スパッタリング、コーティング等の処理を行って、そのフィルム基板上に連続的に成膜することで機能性薄膜を製造するロール to ロール方式の生産技術が採用されている。この方式を利用して、スマートフォンやタブレットのプラスチック基板、有機ＥＬやタッチパネルディスプレイ、半導体装置、太陽光パネル等の製造が行われている。このようなロール to ロールによる生産技術においても、ウェブであるフィルム基板の走行時の蛇行の規制制御が必要不可欠となってきている。 By the way, at present, in the process of unwinding a film substrate having a length of several hundreds to several kilometers wound in a roll shape, processes such as vapor deposition, sputtering, coating, etc. are carried out to continuously form a film on the film substrate. Thus, roll-to-roll production technology is used to produce functional thin films. Using this method, manufacturing of plastic substrates for smartphones and tablets, organic EL, touch panel displays, semiconductor devices, solar panels, and the like is performed. Even in the production technology using such a roll-to-roll, the regulation control of meandering when the film substrate which is a web runs is indispensable.
　上記したロール to ロール方式によって機能性薄膜を製造する際は、その製造が真空雰囲気中で行われる場合があり、このような真空雰囲気中でウェブの蛇行の規制制御を行うときは、その真空雰囲気中に設置したエッジ位置検出センサ４００のセンサ本体４１０の内部の接着剤やプリント基板等から出る有機材料がアウトガスとして真空雰囲気中に引き出されて、製造ラインに悪影響を与えるおそれがある。また、このアウトガスが引き出されることによってエッジ位置検出センサ４００自体の寿命が短くなる恐れもある。 When producing a functional thin film by the roll-to-roll method described above, the production may be performed in a vacuum atmosphere, and when performing regulation control of web meandering in such a vacuum atmosphere, the vacuum atmosphere The adhesive inside the sensor body 410 of the edge position detection sensor 400 installed therein, the organic material coming out of the printed circuit board, etc. may be drawn out into the vacuum atmosphere as outgas, which may adversely affect the production line. Further, the life of the edge position detection sensor 400 itself may be shortened by the extraction of the outgas.
　また、前記ロール to ロール方式による成膜が特殊な腐食性ガス雰囲気中で行われる場合は、その腐食性ガスによってエッジ位置検出センサ４００が劣化し、あるいは汚染されて、最悪の場合は破損を招き、ウェブの蛇行の規制制御が機能不全に陥って、製造された機能性薄膜に不良品が出るおそれがある。 In addition, when film formation by the roll-to-roll method is performed in a special corrosive gas atmosphere, the edge position detection sensor 400 is deteriorated or contaminated by the corrosive gas, and in the worst case, damage is caused. The regulation control of the meandering of the web may malfunction, and a defective product may appear in the manufactured functional thin film.
　以上はセンサ本体４１０についての問題点であるが、光反射板４２１についても、その光反射板４２１の鏡面として金属蒸着等で形成した薄膜を使用する場合には、真空雰囲気中でその薄膜が剥がれて飛散したりあるいは腐食性雰囲気でその薄膜が変化する問題がある。 The above is a problem with the sensor body 410, but the light reflecting plate 421 also peels off in a vacuum atmosphere when a thin film formed by metal deposition or the like is used as the mirror surface of the light reflecting plate 421. Or the film changes in a corrosive atmosphere.
　本発明は以上のような点に鑑みてなされたものであり、その目的は、真空雰囲気中であってもアウトガスが問題となることはなく、また腐食ガス雰囲気中であっても腐食が問題となることのないよう対策を施したエッジ位置検出センサを提供することである。 The present invention has been made in view of the above points, and its purpose is that outgassing does not become a problem even in a vacuum atmosphere, and corrosion is a problem even in a corrosive gas atmosphere. It is an object of the present invention to provide an edge position detection sensor in which measures are taken so as not to occur.
　上記目的を達成するために、請求項１にかかる発明のエッジ位置検出センサは、測定光を発生すると共に該測定光に基づく反射光を受光し該反射光に基づいてエッジ位置を算出する光／電気信号処理部、および前記測定光を外部に投射させると共に外部から入射する前記反射光を前記光／電気信号処理部に取り込む光学系を含む投射／受光部を有するセンサ本体と、該センサ本体の前記光／電気信号処理部に先端部分が接続されるケーブルを引き出すケーブル引出部と、前記センサ本体の前記投射／受光部対して測定空間を介在して対向するよう配置され、前記投射／受光部から投射された測定光を反射する光反射板と、を備えたエッジ位置検出センサにおいて、前記センサ本体の筐体と前記ケーブル引出部と前記光学系を除く前記投射／受光部を耐腐食性で剛性をもつ材質で形成すると共に、前記ケーブル引出部と前記投射／受光部の前記センサ本体に対する結合部および前記投射／受光部自体を密閉構造に構成して、前記光／電気処理部および前記投射／受光部の内部を外部に対して空間的に遮蔽したことを特徴とする。 In order to achieve the above object, an edge position detection sensor according to a first aspect of the present invention is a light / optical device that generates measurement light, receives reflected light based on the measurement light, and calculates an edge position based on the reflected light. A sensor main body having an electric signal processing unit, and a projection / light receiving unit including an optical system for projecting the measurement light to the outside and capturing the reflected light incident from the outside into the optical / electrical signal processing unit; The projection / light-receiving unit is arranged so as to face the projection / light-receiving unit of the sensor main body with a measurement space interposed therebetween, and a cable lead-out unit that pulls out a cable having a tip connected to the optical / electrical signal processing unit. In an edge position detection sensor comprising: a light reflecting plate that reflects measurement light projected from the projection / excluding the casing of the sensor body, the cable lead-out portion, and the optical system. The optical part is formed of a corrosion-resistant and rigid material, and the cable lead-out part and the projection / light-receiving part are coupled to the sensor main body and the projection / light-receiving part itself is configured in a sealed structure. The interior of the electrical processing unit and the projection / light receiving unit is spatially shielded from the outside.
　請求項２にかかる発明は、請求項１に記載のエッジ位置検出センサにおいて、耐腐食性を持つ材質により前記光反射板を光透過可能な密閉構造にする光反射部を形成して、前記光反射板を外部に対して空間的に遮蔽したことを特徴とする。 According to a second aspect of the present invention, in the edge position detection sensor according to the first aspect of the present invention, a light reflecting portion is formed in a sealed structure that allows the light reflecting plate to transmit light with a material having corrosion resistance. The reflector is spatially shielded from the outside.
　請求項３にかかる発明は、請求項１に記載のエッジ位置検出センサにおいて、前記センサ本体の前記筐体を、前記光／電気信号処理部が搭載されたベースプレートと、前記光／電気信号処理部の全てを覆うように前記ベースプレートに対して密閉構造で結合されたケースとで構成し、前記ベースプレートに第１の開口を形成すると共に前記ケースに第２の開口を形成して、前記第１の開口に対して前記投射／受光部を密閉構造で結合し、前記第２の開口に対して前記ケーブル引出部を密閉構造で結合したことを特徴とする。 According to a third aspect of the present invention, in the edge position detection sensor according to the first aspect, the housing of the sensor main body includes a base plate on which the optical / electrical signal processing unit is mounted, and the optical / electrical signal processing unit. And a case coupled to the base plate in a sealed structure so as to cover all of the first plate, and forming a first opening in the base plate and a second opening in the case, The projection / light receiving unit is coupled to the opening with a sealed structure, and the cable lead-out unit is coupled to the second opening with a sealed structure.
　請求項４にかかる発明は、請求項３に記載のエッジ位置検出センサにおいて、前記投射／受光部は、前記光／前記信号処理部から投射される測定光を集光すると共に前記反射光を集光するレンズと、該レンズを保持し前記第１の開口に対して密閉構造で結合されるレンズホルダと、前記レンズの外側に配置された第１のカバーガラスと、該第１のカバーガラスが前記レンズホルダに密閉構造で結合するように前記カバーガラスを保持する第１のカバーガラスホルダと、を備えることを特徴とする。 According to a fourth aspect of the present invention, in the edge position detection sensor according to the third aspect, the projection / light receiving unit condenses the measurement light projected from the light / the signal processing unit and collects the reflected light. A lens that shines, a lens holder that holds the lens and is coupled to the first opening in a sealed structure, a first cover glass disposed outside the lens, and the first cover glass. And a first cover glass holder that holds the cover glass so as to be coupled to the lens holder in a sealed structure.
　請求項５にかかる発明は、請求項２に記載のエッジ位置検出センサにおいて、前記光反射部は、前記光反射板を保持しブラケットによって前記センサ本体に取り付けられる光反射板ホルダと、該光反射板ホルダで保持された前記光反射板の光入射側に配置された第２のカバーガラスと、該第２のカバーガラスを前記光反射板に対して押し付ける第２のカバーガラスホルダとを備え、前記第２のカバーガラスは前記光反射板ホルダに対して密閉構造で結合されていることを特徴とする。 According to a fifth aspect of the present invention, in the edge position detection sensor according to the second aspect, the light reflecting portion holds the light reflecting plate and is attached to the sensor body by a bracket, and the light reflecting portion. A second cover glass disposed on the light incident side of the light reflecting plate held by the plate holder, and a second cover glass holder that presses the second cover glass against the light reflecting plate, The second cover glass is bonded to the light reflector holder in a sealed structure.
　請求項６にかかる発明は、請求項３に記載のエッジ位置検出センサにおいて、前記ケーブル引出部は、前記ケーブルをガイドするフランジ付きベローズと、アウター付きセンターリングと、前記フランジ付きベローズのフランジ部分を前記アウター付きセンターリングを介在して前記ケースの前記第２の開口の周囲に押し付けるバルクヘッドクランプとで構成され、前記フランジ付きベローズの前記フランジ部分が前記アウター付きセンターリングを介在して前記ケースの前記第２の開口に密閉構造で結合されていることを特徴とする。 The invention according to claim 6 is the edge position detection sensor according to claim 3, wherein the cable lead-out portion includes a flanged bellows for guiding the cable, a center ring with an outer, and a flange portion of the flanged bellows. And a bulkhead clamp that presses around the second opening of the case via the outer center ring, and the flange portion of the flanged bellows is interposed between the outer center ring and the case. The second opening is coupled to the second opening in a sealed structure.
　請求項７にかかる発明は、請求項６に記載のエッジ位置検出センサにおいて、前記第２に開口は、前記ケースの異なった２以上の箇所に形成され、そのうちの１つに前記ケーブル引出部が密閉構造で結合され、残余はブラインドプレートによって密閉構造で閉じられていることを特徴とする。 According to a seventh aspect of the present invention, in the edge position detection sensor according to the sixth aspect, the second opening is formed at two or more different locations of the case, and the cable lead-out portion is included in one of them. It is characterized in that it is joined in a sealed structure and the remainder is closed in a sealed structure by a blind plate.
　請求項８にかかる発明は、請求項１ないし７のいずれか１つに記載のエッジ位置検出センサにおいて、前記密閉構造の形成はＯリングを利用して実現されていることを特徴とする。 According to an eighth aspect of the present invention, in the edge position detection sensor according to any one of the first to seventh aspects, the sealing structure is formed using an O-ring.
　本発明のエッジ位置検出センサは、センサ本体の筐体とケーブル引出部と光学系を除く投射／受光部を耐腐食性で剛性をもつ材質で形成すると共に、ケーブル引出部と投射／受光部のセンサ本体に対する結合部および投射／受光部自体を密閉構造に構成して、光／電気処理部および投射／受光部の内部を外部に対して空間的に遮蔽したので、そのセンサ本体を真空雰囲気中に配置したときでも、センサ本体内の接着剤やプリント基板等からアウトガスが発生してロール to ロール方式による製造ラインに悪影響を与えることを防止できる。また、腐食性ガスの雰囲気中に配置したときでも腐食が生じる恐れはなくなる。 In the edge position detection sensor of the present invention, the projection / light-receiving portion excluding the housing of the sensor body, the cable lead-out portion, and the optical system is formed of a corrosion-resistant and rigid material, and the cable lead-out portion and the projection / light-receiving portion are The coupling part to the sensor body and the projection / light receiving part itself are configured in a sealed structure so that the inside of the light / electric processing part and the projection / light receiving part is spatially shielded from the outside. Even when it is disposed in the position, it is possible to prevent the outgas from being generated from the adhesive in the sensor body, the printed circuit board or the like and adversely affecting the production line by the roll-to-roll system. Further, there is no risk of corrosion even when placed in an atmosphere of corrosive gas.
　また、光反射板の鏡面に薄膜を使用する場合には、耐腐食性を持つ材質により前記光反射板を光透過可能な密閉構造にする光反射部を形成して、前記光反射板を外部に対して空間的に遮蔽することにより、その薄膜の飛散物が製造ラインに対する悪影響を与えたり光反射板が腐食されることを防止できる。 Further, when a thin film is used for the mirror surface of the light reflecting plate, a light reflecting portion is formed in a sealed structure that allows the light reflecting plate to transmit light with a material having corrosion resistance, and the light reflecting plate is externally provided. Therefore, it is possible to prevent the scattering of the thin film from adversely affecting the production line and corroding the light reflecting plate.
　よって、本発明のエッジ位置検出センサは、ロール to ロール方式による製造ラインのウェブの蛇行の規制制御に好適となる。 Therefore, the edge position detection sensor of the present invention is suitable for the regulation control of the web meandering of the production line by the roll-to-roll method.
本発明の１つの実施例のエッジ位置検出センサの使用説明図である。It is use explanatory drawing of the edge position detection sensor of one Example of this invention. （ａ）は本実施例のエッジ位置検出センサの平面図、（ｂ）は左側面図、（ｃ）は底面図である。(A) is a top view of the edge position detection sensor of a present Example, (b) is a left view, (c) is a bottom view. （ａ）は本実施例のエッジ位置検出センサの正面図、（ｂ）は背面図である。(A) is a front view of the edge position detection sensor of a present Example, (b) is a rear view. 本実施例のエッジ位置検出センサの断面図である。It is sectional drawing of the edge position detection sensor of a present Example. 従来のエッジ位置検出センサの使用説明図である。It is usage explanatory drawing of the conventional edge position detection sensor.
　以下、図１～図４を使用して本発明の１つの実施例のエッジ位置検出センサについて詳しく説明する。本実施例のエッジ位置検出センサ１００は、測定光をウェブ３００のエッジ３０１に向けて投射してその反射光を受信することでエッジ位置のズレ量を検出するセンサ本体１１０と、測定光を反射する光反射部１２０と、光反射部１２０をセンサ本体１１０に対して取り付けるブラケット１３０と、センサ本体１１０の内部回路に接続されるケーブルを引き出すケーブル引出部１４０とを備える。 Hereinafter, an edge position detection sensor according to one embodiment of the present invention will be described in detail with reference to FIGS. The edge position detection sensor 100 of the present embodiment projects the measurement light toward the edge 301 of the web 300 and receives the reflected light to detect the shift amount of the edge position, and reflects the measurement light. A light reflecting portion 120, a bracket 130 for attaching the light reflecting portion 120 to the sensor main body 110, and a cable lead-out portion 140 for pulling out a cable connected to an internal circuit of the sensor main body 110.
　センサ本体１１０において、１５０は四角形状のベースプレートであり、第１の開口としての貫通したねじ穴１５１が形成され、下面には六角穴付きボルト２５によってブラケット１３０が取り付けられている。１６０はケースであり、第２の開口としてケーブル引出部１４０の取り付け用の貫通した開口１６１，１６２が形成され、ベースプレート１５０の上面を閉じる大きさと形状に形成されている。これらベースプレート１５０とケース１６０は、センサ本体１１０の筐体を構成する。１７０はケース１６０の開口１６２を閉じるブラインドプレート１７０である。１８０は光／電気信号処理部であり、ベースプレート１５０とケース１６０とで閉じられる内部に搭載されている。１９０は測定光を投射し反射光を受光する光学系を含む投射／受光部であり、ベースプレート１５０のねじ穴１５１に取り付けられている。 In the sensor main body 110, reference numeral 150 denotes a rectangular base plate, a threaded hole 151 is formed as a first opening, and a bracket 130 is attached to the lower surface by a hexagon socket bolt 25. Reference numeral 160 denotes a case, in which through openings 161 and 162 for attaching the cable lead-out portion 140 are formed as second openings, and are formed in a size and shape that closes the upper surface of the base plate 150. The base plate 150 and the case 160 constitute a housing of the sensor main body 110. Reference numeral 170 denotes a blind plate 170 that closes the opening 162 of the case 160. An optical / electrical signal processing unit 180 is mounted inside the base plate 150 and the case 160. A projection / light receiving unit 190 includes an optical system that projects measurement light and receives reflected light, and is attached to a screw hole 151 of the base plate 150.
　ケース１６０は、９個の六角穴付きボルト２１をベースプレート１５０の側からケース１６０に対して締め付けることで、ベースプレート１５０との間に介在させたＯリング１１によって、ベースプレート１５０に対する接合部が密閉構造となっている。 In the case 160, the 9 hexagon socket head cap bolts 21 are fastened to the case 160 from the side of the base plate 150, so that the O-ring 11 interposed between the base plate 150 and the base plate 150 has a sealed structure. It has become.
　また、ブラインドプレート１７０も、６個の六角穴付きボルト２２をブラインドプレート１７の側からケース１６０に対して締め付けることで、ケース１６０との間に介在させたＯリング１２によって、ケース１６０に対する接合部が密閉構造となり、ケース１６０の開口１６２が外部に対して密閉されている。 Further, the blind plate 170 is also joined to the case 160 by the O-ring 12 interposed between the case 160 by tightening the six hexagon socket head cap screws 22 from the blind plate 17 side to the case 160. Has a sealed structure, and the opening 162 of the case 160 is sealed from the outside.
　投射／受光部１９０において、１９１はベースプレート１５０のねじ穴１５１に螺合されるレンズホルダ、１９２はそのレンズホルダ１９１の空洞１９１ａに装填された集光用のレンズ、１９３はそのレンズ１９２の外側（下側）に位置する透明のカバーガラス、１９４はそのカバーガラス１９３を取り付けるためにレンズホルダ１９１の外側に螺合されるカバーガラスホルダである。カバーガラスホルダ１９４の中央部分には光透過用の開口１９４ａが形成されている。そして、ベースプレート１５０のねじ穴１５１とレンズホルダ１９１の間は、ねじ穴１５１の下部に形成された段差部に嵌め込まれたＯリング１３によって密閉構造となっている。また、カバーガラス１９３とレンズホルダ１９１の間は、Ｏリング１４によって密閉構造となっている。 In the projection / light receiving unit 190, 191 is a lens holder screwed into the screw hole 151 of the base plate 150, 192 is a condensing lens loaded in the cavity 191 a of the lens holder 191, and 193 is outside the lens 192 ( A transparent cover glass 194 located on the lower side is a cover glass holder that is screwed onto the outside of the lens holder 191 in order to attach the cover glass 193. An opening 194 a for transmitting light is formed in the center portion of the cover glass holder 194. A space between the screw hole 151 of the base plate 150 and the lens holder 191 is sealed by an O-ring 13 fitted in a step formed at the lower part of the screw hole 151. The cover glass 193 and the lens holder 191 are hermetically sealed by the O-ring 14.
　ケース１６０の内部に搭載される光／電気信号処理部１８０は、白色ＬＥＤを光源とする発光部１８１と、その発光部１８１で発生した測定光をレンズ１９２の方向に反射すると共に、レンズ１９２の方向から入射してきた反射光を受光素子としてのＳＰＤ（シリコンフォトダイオード）に導くハーフミラーを備えた受光部１８２と、プリント基板１８３を備える。プリント基板１８３には、発光部１８１を制御するための制御回路や受光部１８２で受光された光信号を電気信号に変換してウェブのエッジの正規位置からのズレを算出する演算回路等が搭載されている。 The optical / electrical signal processing unit 180 mounted inside the case 160 reflects the measurement light generated by the light emitting unit 181 using the white LED as a light source and the light emitting unit 181 in the direction of the lens 192 and the lens 192. A light receiving unit 182 including a half mirror that guides reflected light incident from the direction to an SPD (silicon photodiode) as a light receiving element, and a printed board 183 are provided. The printed circuit board 183 is equipped with a control circuit for controlling the light emitting unit 181 and an arithmetic circuit for converting the optical signal received by the light receiving unit 182 into an electric signal to calculate a deviation from the normal position of the web edge. Has been.
　光反射部１２０において、１２１はブラケット１３０に対して４個の六角穴付きボルト２３によって取り付けられた光反射板ホルダ、１２２はその光反射板ホルダ１２１内に装填された鏡面の光反射板、１２３はその光反射板１２２の上面を覆う透明のカバーガラス、１２４は光反射板ホルダ１２１の外側にねじ込むことによりカバーガラス１２３を光反射板１２２に対して押し付けるカバーガラスホルダである。カバーガラスホルダ１２４には、光透過用の開口１２４ａが形成されている。光反射板１２２とカバーガラス１２３との間は、Ｏリング１５によって密閉構造となっている。また、光反射板ホルダ１２１と光反射板１２２との間にもＯリング１６が介在され、これによって光反射板１２２のガタツキが防止され、レンズ１９２に対する光反射板１２２の角度が変動しないようになっている。 In the light reflecting portion 120, 121 is a light reflecting plate holder attached to the bracket 130 with four hexagon socket bolts 23, 122 is a specular light reflecting plate loaded in the light reflecting plate holder 121, 123. Is a transparent cover glass that covers the upper surface of the light reflection plate 122, and 124 is a cover glass holder that presses the cover glass 123 against the light reflection plate 122 by screwing it to the outside of the light reflection plate holder 121. The cover glass holder 124 is formed with an opening 124a for transmitting light. A space between the light reflection plate 122 and the cover glass 123 is sealed by an O-ring 15. Further, an O-ring 16 is also interposed between the light reflecting plate holder 121 and the light reflecting plate 122, thereby preventing the light reflecting plate 122 from rattling and preventing the angle of the light reflecting plate 122 with respect to the lens 192 from fluctuating. It has become.
　ケーブル引出部１４０において、１４１は電源供給および信号取出し用のために光／電気信号処理部１８０のプリント基板１８３に接続される４芯シールドケーブル、１４２はそのケーブル１４１をフレキシブルに覆うフランジ付きベローズである。１４３はＯリングが組み込まれたアウター付きセンターリングであり、フランジ付きベローズ１４２のフランジ分１４２ａの先端側の径大の鍔部分１４２ｂとケース１６０の開口１６１の周囲との間に介在する。１４４は２分割されたバルクヘッドクランプであり、フランジ付きベローズ１４２の鍔部分１４２ｂがアウター付きセンターリング１４３を介在してケース１６０の開口１６１の周囲の方向に押し付けられるように、合計で６個の六角穴付きボルト２４によって、ケース１６０に締め付けられている。このアウター付きセンターリング１４３によって、ケース１６０の開口１６１とフランジ付きベローズ１４２のフランジ部１４２ａとの間が密閉構造となっている。そして、フランジ付きベローズ１４２の他端が大気に通じていれば、光／電気信号処理部１８０の部分も、開口１６１、アウター付きセンターリング１４４、フランジ付きベローズ１４２を通じて大気圧となる。 In the cable lead-out unit 140, 141 is a four-core shielded cable connected to the printed circuit board 183 of the optical / electrical signal processing unit 180 for power supply and signal extraction, and 142 is a bellows with a flange that flexibly covers the cable 141. is there. 143 is a center ring with an outer in which an O-ring is incorporated, and is interposed between the large flange portion 142b on the front end side of the flange portion 142a of the bellows 142 with flange and the periphery of the opening 161 of the case 160. 144 is a bulkhead clamp which is divided into two parts, and a total of six bulkhead clamps 142b so that the flange 142b of the flanged bellows 142 is pressed in the direction around the opening 161 of the case 160 through the center ring 143 with the outer. The hexagon socket head cap screw 24 is tightened to the case 160. The center ring 143 with the outer portion forms a sealed structure between the opening 161 of the case 160 and the flange portion 142a of the bellows 142 with the flange. If the other end of the flanged bellows 142 communicates with the atmosphere, the optical / electrical signal processing unit 180 also becomes atmospheric pressure through the opening 161, the outer center ring 144, and the flanged bellows 142.
　以上において、光／電気信号処理部１８０、レンズ１９２、カバーガラス１９３，１２３、光反射板１２２、ケーブル１４１等以外の構成部材は、耐腐食性剛性をもつ材質、たとえばアルミニウム合金やステンレス等で形成されている。 In the above, constituent members other than the optical / electrical signal processing unit 180, the lens 192, the cover glass 193, 123, the light reflector 122, the cable 141, etc. are formed of a material having corrosion resistance rigidity, such as an aluminum alloy or stainless steel. Has been.
　以上のように構成されたエッジ位置検出センサ１００は、図１に示すように、ケース１６０の左側に４個の六角穴付きボルト２６で取り付けたアーム２００によって、図示しないエッジ位置制御システムに取り付けられる。そして、発光部１８１の白色ＬＥＤで測定光を発生させると、その測定光は受光部１８２のハーフミラーによって９０度だけ下方向に進路を変更されてから、レンズ１９２で所定の断面積の光束に集光され、カバーガラス１９３を通過して測定空間Ａに投射される。さらに光反射部１２０のカバーガラス１２３を通過して光反射板１２２で反射され、再度、測定空間Ａと投射／受光部１９０を経由して受光部１８２のハーフミラーを通過し受光部１８２内のＳＰＤに入射する。 As shown in FIG. 1, the edge position detection sensor 100 configured as described above is attached to an edge position control system (not shown) by an arm 200 attached to the left side of the case 160 with four hexagon socket head bolts 26. . Then, when measuring light is generated by the white LED of the light emitting unit 181, the measuring light is changed in a downward direction by 90 degrees by the half mirror of the light receiving unit 182, and then converted into a light beam having a predetermined cross-sectional area by the lens 192. The light is condensed, passes through the cover glass 193, and is projected onto the measurement space A. Further, the light passes through the cover glass 123 of the light reflecting portion 120 and is reflected by the light reflecting plate 122, and again passes through the half mirror of the light receiving portion 182 via the measurement space A and the projection / light receiving portion 190, and then passes through the inside of the light receiving portion 182. Incident on the SPD.
　このとき、測定空間Ａにウェブ３００のエッジ３０１が存在している場合は、その測定空間Ａに存在するエッジ３０１の面積に応じて、受光部１８２のＳＰＤに入射する光量が減少する。よって、その受光した光量を電気信号に変換してから、プリント基板１８３上の演算回路によってその電気信号をウェブ３００のエッジ３０１が正規位置にあるときの閾値と比較することにより、現在のエッジ３０１の正規位置からのズレ量を示す検出信号を得ることができる。これについては本発明には直接関係がないのでこれ以上詳しい説明は省略する。 At this time, when the edge 301 of the web 300 exists in the measurement space A, the amount of light incident on the SPD of the light receiving unit 182 decreases according to the area of the edge 301 existing in the measurement space A. Therefore, after converting the received light quantity into an electrical signal, the arithmetic circuit on the printed circuit board 183 compares the electrical signal with a threshold value when the edge 301 of the web 300 is in the normal position, thereby obtaining the current edge 301. A detection signal indicating the amount of deviation from the normal position can be obtained. Since this is not directly related to the present invention, further detailed explanation is omitted.
　図１に示すように、ウェブ３００は例えば矢印Ｂ方向に走行するとき、その走行方向Ｂに直交する方向Ｂ１，Ｂ２に蛇行することがある。ウェブ３００のエッジ３０１の位置が、エッジ位置検出装置１００の測定空間Ａにおいて、正規位置よりも内側に入り込んでいるときはＢ１方向にずれている場合であり、そのズレ量が例えば正の値として検出される。また、正規位置よりも外側に離れているときはＢ２方向にずれている場合であり、そのズレ量が例えば負の値として検出される。そして、そのズレ量を示す検出信号に応じて、エッジ位置制御システムにより蛇行の規制制御が行われる。 As shown in FIG. 1, when the web 300 travels in the direction of arrow B, for example, the web 300 may meander in directions B1 and B2 perpendicular to the travel direction B. When the position of the edge 301 of the web 300 enters the inner side of the normal position in the measurement space A of the edge position detection device 100, it is a case where the position is shifted in the B1 direction. Detected. Further, when it is away from the normal position, it is a case where it is shifted in the B2 direction, and the amount of deviation is detected as a negative value, for example. Then, the meandering restriction control is performed by the edge position control system in accordance with the detection signal indicating the deviation amount.
　以上のように、本実施例のエッジ位置検出センサ１００は、少なくとも外部に露出する構成部分が耐腐食性で剛性をもつ材質で構成され、さらに、ベースプレート１５０とケース１６０の接合部がＯリング１１で、ケース１６０とブラインドプレート１７０の接合部がＯリング１２で、レンズホルダ１９２とベースプレート１５０の接合部がＯリング１３で、レンズホルダ１９２とカバーガラス１９３と接合部がＯリング１４で、ケース１６０とフランジ１４３の接合部がアウター付きセンターリング１４３で、それぞれ密閉されるので、内部の光／電気信号処理部１８０やレンズ１９２の部分は、空間的に外界から完全に遮断されることになる。また、光反射部１２０においても、光反射板１２２が光反射板ホルダ１２１とカバーレンズ１２３によって密閉され、空間的に外界から完全に遮断されることになる。 As described above, in the edge position detection sensor 100 of this embodiment, at least the components exposed to the outside are formed of a material having corrosion resistance and rigidity, and the joint between the base plate 150 and the case 160 is the O-ring 11. The joint between the case 160 and the blind plate 170 is the O-ring 12, the joint between the lens holder 192 and the base plate 150 is the O-ring 13, the joint between the lens holder 192, the cover glass 193, and the O-ring 14, and the case 160. And the flange 143 are sealed by the outer center ring 143, so that the internal optical / electrical signal processor 180 and the lens 192 are completely shielded from the outside. Also in the light reflecting portion 120, the light reflecting plate 122 is sealed by the light reflecting plate holder 121 and the cover lens 123, and is completely shielded from the outside in space.
　このように、そのエッジ位置検出センサ１００の内部や光反射板１２２が外部雰囲気に対して完全に遮蔽されることになるので、このエッジ位置検出センサ１００を真空雰囲気中に配置しても、エッジ位置検出センサ１００に搭載された光／電気信号処理部１８０の接着剤やプリント基板等からアウトガスが発生してロール to ロール方式による製造ラインに悪影響を与えることを防止できる。また、エッジ位置検出センサ１００を腐食性ガスの雰囲気中に配置したときでも、そのエッジ位置検出センサ１００に腐食が生じる恐れはなくなる。よって、ロール to ロール方式による製造ラインのウェブの蛇行の規制制御に好適なエッジ位置検出センサを実現することができる。 As described above, since the inside of the edge position detection sensor 100 and the light reflection plate 122 are completely shielded from the external atmosphere, even if the edge position detection sensor 100 is arranged in a vacuum atmosphere, the edge is detected. It is possible to prevent an outgas from being generated from the adhesive or printed circuit board of the optical / electrical signal processing unit 180 mounted on the position detection sensor 100 and adversely affecting the production line using the roll-to-roll method. Further, even when the edge position detection sensor 100 is disposed in an atmosphere of corrosive gas, there is no possibility that the edge position detection sensor 100 is corroded. Therefore, it is possible to realize an edge position detection sensor suitable for the regulation control of the web meandering of the production line by the roll-to-roll method.
　なお、上記した例では、その光反射板１２２をカバーガラス１２３で覆うと共に、その光反射板１２２を耐腐食性で剛性を持つ材質で密閉構造としたので、光反射板１２２の鏡面として金属蒸着等で形成した薄膜を使用する場合には、真空雰囲気中でその薄膜が剥がれて飛散したりあるいは腐食性雰囲気でその薄膜が変化することを防止することができる。しかし、光反射板１２２の鏡面を金属面研磨等の堅牢な鏡面とした場合には、カバーガラス１２３による被覆や密閉構造等の対策をとらなくてもよい。 In the above example, since the light reflecting plate 122 is covered with the cover glass 123 and the light reflecting plate 122 is made of a sealed structure made of a corrosion-resistant and rigid material, metal deposition is used as a mirror surface of the light reflecting plate 122. When the thin film formed by the above method is used, it is possible to prevent the thin film from being peeled off in a vacuum atmosphere and scattered, or to be changed in a corrosive atmosphere. However, when the mirror surface of the light reflecting plate 122 is a solid mirror surface such as metal surface polishing, it is not necessary to take measures such as covering with a cover glass 123 or a sealing structure.
　また、上記した例ではケーブル引出部１４０をケース１６０の背面の開口１６１に取り付けているが、上面の開口１６２の部分に同様の手法によって密閉構造で取り付けることもできる。この場合は、開口１６１をブラインドプレート１７０とＯリング１２と六角穴付きボルト２２によって密閉状態に閉じる必要がある。また、開口１６１，１６２以外にも別の開口を設けておけば、エッジ位置検出センサ１００に対するケーブル引出部１４０の取り付け可能箇所がより多くなり、エッジ位置検出センサ１００を狭い空間に配置しなければならないとき、その取り付け箇所の選択肢が多くなる。ただし、ケーブル引出部１４０を取り付けない開口はすべてブラインドプレートによって密閉する必要がある。 In the above example, the cable lead-out portion 140 is attached to the opening 161 on the back surface of the case 160, but it can be attached to the opening 162 portion on the top surface with a sealed structure by the same method. In this case, the opening 161 needs to be closed in a sealed state by the blind plate 170, the O-ring 12, and the hexagon socket bolt 22. Further, if another opening is provided in addition to the openings 161 and 162, the number of places where the cable lead-out portion 140 can be attached to the edge position detection sensor 100 increases, and the edge position detection sensor 100 must be arranged in a narrow space. When it is not possible, there are many options for the attachment location. However, all openings to which the cable lead-out portion 140 is not attached need to be sealed with a blind plate.
　１１～１６：Ｏリング
　２１～２６：六角穴付きボルト
　１１０：センサ本体
　１２０：光反射部、１２１：光射板ホルダ、１２２：光反射板、１２３：カバーガラス、１２４：カバーガラスホルダ、１４２ａ：開口
　１３０：ブラケット、１３１：開口
　１４０：ケーブル引出部、１４１：４芯シールドケーブル、１４２：フランジ付きベローズ、１４３：アウター付きセンターリング、１４４：バルクヘッドクランプ
　１５０：ベースプレート、１５１：ねじ穴
　１６０：ケース、１６１，１６２：開口
　１７０：ブラインドプレート
　１８０：光／電気信号処理部、１８１：発光部、１８２：受光部、１８３：プリント基板
　１９０：投射／受光部、１９１：レンズホルダ、１９２：レンズ、１９３：カバーガラス、１９４：カバーガラスホルダ、１９４ａ：開口
　２００：アーム
　３００：ウェブ、３０１：エッジ 11 to 16: O-ring 21 to 26: Hexagon socket head cap bolt 110: Sensor body 120: Light reflecting portion, 121: Light reflecting plate holder, 122: Light reflecting plate, 123: Cover glass, 124: Cover glass holder, 142a: Opening 130: Bracket, 131: Opening 140: Cable lead-out part, 141: 4-core shielded cable, 142: Bellows with flange, 143: Center ring with outer ring, 144: Bulkhead clamp 150: Base plate, 151: Screw hole 160: Case 161, 162: Opening 170: Blind plate 180: Optical / electrical signal processing unit, 181: Light emitting unit, 182: Light receiving unit, 183: Printed circuit board 190: Projection / light receiving unit, 191: Lens holder, 192: Lens, 193 : Cover glass, 194: Cover glass holder, 1 94a: Opening 200: Arm 300: Web, 301: Edge

Claims (8)

  1. 　測定光を発生すると共に該測定光に基づく反射光を受光し該反射光に基づいてエッジ位置を算出する光／電気信号処理部、および前記測定光を外部に投射させると共に外部から入射する前記反射光を前記光／電気信号処理部に取り込む光学系を含む投射／受光部を有するセンサ本体と、
    　該センサ本体の前記光／電気信号処理部に先端部分が接続されるケーブルを引き出すケーブル引出部と、
    　前記センサ本体の前記投射／受光部対して測定空間を介在して対向するよう配置され、前記投射／受光部から投射された測定光を反射する光反射板と、
    　を備えたエッジ位置検出センサにおいて、
    　前記センサ本体の筐体と前記ケーブル引出部と前記光学系を除く前記投射／受光部を耐腐食性で剛性をもつ材質で形成すると共に、前記ケーブル引出部と前記投射／受光部の前記センサ本体に対する結合部および前記投射／受光部自体を密閉構造に構成して、前記光／電気処理部および前記投射／受光部の内部を外部に対して空間的に遮蔽したことを特徴とするエッジ位置検出センサ。     An optical / electrical signal processing unit that generates measurement light and receives reflected light based on the measurement light and calculates an edge position based on the reflected light, and the reflection that projects the measurement light to the outside and is incident from the outside A sensor body having a projection / light receiving unit including an optical system for taking light into the optical / electrical signal processing unit;
    A cable lead-out portion for pulling out a cable whose tip is connected to the optical / electrical signal processing portion of the sensor body;
    A light reflecting plate that is arranged to face the projection / light receiving unit of the sensor body with a measurement space interposed therebetween, and that reflects the measurement light projected from the projection / light receiving unit;
    In the edge position detection sensor provided with
    The projection / light receiving unit excluding the casing of the sensor main body, the cable lead-out portion, and the optical system is formed of a corrosion-resistant and rigid material, and the sensor main body of the cable lead-out portion and the projection / light-receiving portion. Edge position detection characterized in that the coupling part to the projector and the projection / light receiving part itself are configured in a sealed structure so that the inside of the light / electric processing part and the projection / light receiving part is spatially shielded from the outside. Sensor.
  2. 　請求項１に記載のエッジ位置検出センサにおいて、
    　耐腐食性を持つ材質により前記光反射板を光透過可能な密閉構造にする光反射部を形成して、前記光反射板を外部に対して空間的に遮蔽したことを特徴とするエッジ位置検出センサ。     The edge position detection sensor according to claim 1,
    Edge position detection characterized in that a light reflecting portion is formed in a hermetically sealed structure capable of transmitting light through a material having corrosion resistance, and the light reflecting plate is spatially shielded from the outside. Sensor.
  3. 　請求項１に記載のエッジ位置検出センサにおいて、
    　前記センサ本体の前記筐体を、前記光／電気信号処理部が搭載されたベースプレートと、前記光／電気信号処理部の全てを覆うように前記ベースプレートに対して密閉構造で結合されたケースとで構成し、前記ベースプレートに第１の開口を形成すると共に前記ケースに第２の開口を形成して、前記第１の開口に対して前記投射／受光部を密閉構造で結合し、前記第２の開口に対して前記ケーブル引出部を密閉構造で結合したことを特徴とするエッジ位置検出センサ。     The edge position detection sensor according to claim 1,
    The housing of the sensor main body includes a base plate on which the optical / electrical signal processing unit is mounted, and a case coupled to the base plate in a sealed structure so as to cover all of the optical / electrical signal processing unit. And forming a first opening in the base plate and a second opening in the case, and coupling the projection / light receiving unit to the first opening with a hermetically sealed structure. An edge position detection sensor, wherein the cable lead-out portion is coupled with an opening in a sealed structure.
  4. 　請求項３に記載のエッジ位置検出センサにおいて、
    　前記投射／受光部は、前記光／前記信号処理部から投射される測定光を集光すると共に前記反射光を集光するレンズと、該レンズを保持し前記第１の開口に対して密閉構造で結合されるレンズホルダと、前記レンズの外側に配置された第１のカバーガラスと、該第１のカバーガラスが前記レンズホルダに密閉構造で結合するように前記カバーガラスを保持する第１のカバーガラスホルダと、を備えることを特徴とするエッジ位置検出センサ。     The edge position detection sensor according to claim 3,
    The projection / light receiving unit condenses the measurement light projected from the light / signal processing unit and collects the reflected light, and holds the lens and has a sealed structure with respect to the first opening. And a first cover glass that is disposed outside the lens, and a first cover glass that holds the cover glass so that the first cover glass is coupled to the lens holder in a sealed structure. An edge position detection sensor comprising: a cover glass holder.
  5. 　請求項２に記載のエッジ位置検出センサにおいて、
    　前記光反射部は、前記光反射板を保持しブラケットによって前記センサ本体に取り付けられる光反射板ホルダと、該光反射板ホルダで保持された前記光反射板の光入射側に配置された第２のカバーガラスと、該第２のカバーガラスを前記光反射板に対して押し付ける第２のカバーガラスホルダとを備え、前記第２のカバーガラスは前記光反射板ホルダに対して密閉構造で結合されていることを特徴とするエッジ位置検出センサ。     The edge position detection sensor according to claim 2,
    The light reflecting portion includes a light reflecting plate holder that holds the light reflecting plate and is attached to the sensor body by a bracket, and a second light beam disposed on the light incident side of the light reflecting plate held by the light reflecting plate holder. And a second cover glass holder that presses the second cover glass against the light reflecting plate, and the second cover glass is bonded to the light reflecting plate holder in a sealed structure. An edge position detection sensor characterized by comprising:
  6. 　請求項３に記載のエッジ位置検出センサにおいて、
    　前記ケーブル引出部は、前記ケーブルをガイドするフランジ付きベローズと、アウター付きセンターリングと、前記フランジ付きベローズのフランジ部分を前記アウター付きセンターリングを介在して前記ケースの前記第２の開口の周囲に押し付けるバルクヘッドクランプとで構成され、前記フランジ付きベローズの前記フランジ部分が前記アウター付きセンターリングを介在して前記ケースの前記第２の開口に密閉構造で結合されていることを特徴とするエッジ位置検出センサ。     The edge position detection sensor according to claim 3,
    The cable lead-out part includes a flanged bellows for guiding the cable, an outer centering ring, and a flange portion of the flanged bellows around the second opening of the case via the outer centering ring. An edge position, wherein the flange portion of the bellows with flange is coupled to the second opening of the case with a sealing structure via the center ring with outer Detection sensor.
  7. 　請求項６に記載のエッジ位置検出センサにおいて、
    　前記第２に開口は、前記ケースの異なった２以上の箇所に形成され、そのうちの１つに前記ケーブル引出部が密閉構造で結合され、残余はブラインドプレートによって密閉構造で閉じられていることを特徴とするエッジ位置検出センサ。     The edge position detection sensor according to claim 6,
    The second opening is formed at two or more different locations of the case, and the cable lead-out portion is connected to one of them in a sealed structure, and the rest is closed in a sealed structure by a blind plate. A feature edge position detection sensor.
  8. 　請求項１ないし７のいずれか１つに記載のエッジ位置検出センサにおいて、
    　前記密閉構造の形成はＯリングを利用して実現されていることを特徴とするエッジ位置検出センサ。     In the edge position detection sensor according to any one of claims 1 to 7,
    The edge position detection sensor is characterized in that the sealing structure is formed using an O-ring.
PCT/JP2013/081914 2013-11-27 2013-11-27 Edge position detection sensor WO2015079514A1 (en)

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