WO2015020209A1 - High-pressure automatic diaphragm valve - Google Patents

High-pressure automatic diaphragm valve Download PDF

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Publication number
WO2015020209A1
WO2015020209A1 PCT/JP2014/071079 JP2014071079W WO2015020209A1 WO 2015020209 A1 WO2015020209 A1 WO 2015020209A1 JP 2014071079 W JP2014071079 W JP 2014071079W WO 2015020209 A1 WO2015020209 A1 WO 2015020209A1
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WO
WIPO (PCT)
Prior art keywords
valve
piston
diaphragm
locking
casing
Prior art date
Application number
PCT/JP2014/071079
Other languages
French (fr)
Japanese (ja)
Inventor
久修 飯塚
朝克図 高
Original Assignee
株式会社キッツエスシーティー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社キッツエスシーティー filed Critical 株式会社キッツエスシーティー
Priority to KR1020157028293A priority Critical patent/KR102198044B1/en
Priority to JP2015530986A priority patent/JP6261593B2/en
Publication of WO2015020209A1 publication Critical patent/WO2015020209A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
    • F16K31/163—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K35/00—Means to prevent accidental or unauthorised actuation
    • F16K35/06—Means to prevent accidental or unauthorised actuation using a removable actuating or locking member, e.g. a key

Definitions

  • the present invention relates to a high-pressure automatic NC (normally closed) diaphragm valve that can be stored while maintaining the valve performance without damaging the valve performance at all until use or replacement.
  • NC normally closed
  • various special gases such as flammable explosive, decomposition explosive, corrosive, and toxic, such as phosphine, arsine, and silane are used.
  • such special material gas is filled in a gas cylinder at a high pressure of several tens of atmospheres to 100 atmospheres or more, and the gas cylinder is installed in a sealed clean room, and a semiconductor is provided through a valve disposed in the middle of the piping. It is supplied to the manufacturing apparatus or exhausted from the apparatus.
  • the silicon wafer used as a base is also required to have high purity and high quality.
  • the flow control accuracy of various special gas fluids as described above is required to be extremely high.
  • the valve body of the valve as a fluid control device provided in the semiconductor manufacturing process requires high displacement accuracy
  • the valve is a member that is physically directly related to the distance control. It is necessary to maintain a high quality seat.
  • the valve is likely to deteriorate due to the influence of a corrosive fluid or the like, and the life is likely to be shortened.
  • high-pressure, high-concentration, for example, fluorine gas is introduced into the valve chamber, the temperature in the valve chamber is likely to rise due to adiabatic compression.
  • surface corrosion in the valve chamber and deterioration of the resin material tend to occur.
  • highly corrosive gas containing halogen such as fluorine gas is likely to cause surface corrosion inside the valve valve chamber, so that the generated corrosives adhere to the valve seat surface and deteriorate the valve seat. Is the main cause of damage.
  • the valve used in the semiconductor manufacturing process has a short life, and in order to maintain the high-precision flow control capability as described above, the valve must be frequently replaced with a new valve.
  • NC normally closed type diaphragm valves
  • an external force such as a spring is further applied to the normally closed valves.
  • a pressing load applied to the valve seat by the valve body may be constantly applied to increase the pressing force for urging the valve body.
  • each spring unit is constituted by a plurality of springs, and the springs adjacent to each other are provided in opposite directions.
  • an NC type diaphragm valve provided with a spring which is provided with means for keeping the valve opening constant.
  • the valve of Patent Document 2 discloses a manual operation device that can manually release the flow path of the pneumatically operated controller for the purpose of use and can maintain the degree of opening for a long time.
  • Patent Document 3 discloses a forced valve opening device that uses a normally closed valve for forced opening.
  • valve body pressing force of the piston against the valve seat is weakened according to the increased valve stroke. If the piston pressing force is weakened, the pressing force to maintain the airtightness will be reduced, and the valve flow control will realize high-precision flow control by controlling the displacement of the valve body against the high pressure fluid. The ability cannot be fully demonstrated. As a result, the automatic NC diaphragm valve for high-pressure fluid stored for a long time has a problem that it cannot exhibit the required flow rate control capability from the start of use as a new product, and the usable period is shortened.
  • the springs adjacent to each other in the spring unit are provided in opposite directions, but the reason for this is not disclosed or suggested, and a strong attachment to the diaphragm and valve seat is achieved by using such a spring mounting structure. It is not possible to avoid the pressing force.
  • Patent Document 2 there is a need for a mechanism including a fixed part having a specific structure provided at the upper end of the shaft and an operation part having a specific structure provided with a notch that can be inserted into an extending rod of the fixed part. In addition, it is used in a state where the flow path is forcibly released. Therefore, it is not only applicable to a high-pressure valve, but is a device that opens for the purpose of use, and there is no idea or suggestion to maintain performance until use.
  • Patent Document 3 a mechanism for opening the valve requires a mechanism consisting of a manual valve opening jig having a specific structure and a normally closed valve having a specific structure corresponding thereto, and, similarly to Patent Document 2, It is used in a state where the flow path is forcibly released. Therefore, it cannot be applied to a high-pressure valve, and there is no idea or suggestion to maintain performance until use.
  • the present invention has been made to solve the above-described problems, and the object of the present invention is to provide a high-pressure automatic NC diaphragm in which a large load is always applied to the valve seat due to a high pressing force for urging the valve body.
  • An object of the present invention is to provide a high-pressure automatic NC diaphragm valve that can be stored while maintaining the performance of the valve until it is used, and can be stored for a long time.
  • the invention according to claim 1 is a diaphragm valve that presses a diaphragm against a valve seat provided in the body and closes the diaphragm, and the diaphragm is moved by a piston mechanism in an actuator provided in the body. While pressing or releasing the pressure, a fixed side locking portion is provided in the casing of the actuator, and a movable side locking portion is provided at an appropriate position of the piston mechanism, and the piston mechanism is moved to the upward release side.
  • the fixed-side locking portion and the movable-side locking portion are engaged with each other by a holding member inserted from the outside of the casing so that the locking positions of the fixed-side locking portion and the movable-side locking portion coincide with each other. It can be stored for a long time without applying a load to the valve seat, and the valve can be used by removing the holding member from the outside of the casing when using the valve.
  • a high-pressure automatic diaphragm valve characterized in that the.
  • the piston mechanism supplies air and moves the piston upward to deform and move the diaphragm upward by itself, and when fully closed, the piston mechanism springs through the booster mechanism.
  • the holding mechanism prevents the piston mechanism from being lowered by the holding member when the piston is moved upward.
  • the air is supplied to the piston mechanism, the piston is moved to the top dead center, and the locking groove which is the movable side locking portion is inserted into the locking hole which is the fixed side locking portion.
  • the high pressure according to claim 1 or 2 wherein the positions of the two are matched, a holding pin that is a holding member is inserted into both of the matched holes from the outside, and the valve can be used by extracting the holding pin from the outside during use. It is an automatic diaphragm valve.
  • the positions of the semicircular locking grooves or the locking holes as the movable side locking portions are made to coincide with the two locking holes as the fixed side locking portions, and the locking holes are aligned.
  • the high-pressure automatic diaphragm valve according to claim 1 or 2 wherein a holding pin which is a holding member is inserted into the blind hole portion from outside and the valve can be used by using the holding pin extracted from the outside during use.
  • the invention according to claim 5 is a diaphragm valve that presses the diaphragm against a valve seat seat provided in the body and closes the valve, and presses or releases the diaphragm by a piston mechanism in an actuator provided in the body,
  • the piston mechanism is provided with a lifting body that moves up and down in conjunction with the reciprocation of the piston in the vertical direction, and the bottom side of this lifting body when the lifting body is moved upward from the outside of the actuator casing.
  • the holding member can be inserted into the gap generated in the valve, and the holding member is locked to the bottom surface of the lifting body when the lifting body is moved to the release side, enabling long-term storage without applying a load to the valve seat.
  • This is a high-pressure automatic diaphragm valve that can be used by extracting the holding member from the outside of the casing.
  • air is supplied to the piston mechanism to move the piston downward, the diaphragm is deformed upward by itself, and the piston is lifted by the elastic force of the spring when fully closed.
  • the lifting mechanism of the piston mechanism is lowered by the holding member when the piston is moved downward. It is an automatic diaphragm valve for high pressure that is prevented.
  • the invention according to claim 7 is a fixed-side contact in which the bottom surface of the lifting body and the bottom surface come into contact with each other through the booster mechanism when air is supplied to the piston mechanism and the piston is moved to the bottom dead center.
  • a gap is provided between the holding pin and a holding pin, which is a holding member, from an insertion hole formed in the casing, and the bent portion formed at the outer end of the holding pin is picked from the outside of the casing when used. It is an automatic diaphragm valve for high pressure that can be extracted and used.
  • the invention according to claim 8 is a high-pressure automatic diaphragm valve in which two springs are provided in the piston so that the piston can be repelled upward, and the winding directions of the springs are opposite to each other.
  • the high pressure NC valve is stored for a long period of time, it is possible to easily prevent the pressure applied to the valve seat by the piston with a high biasing force and to provide a structure that can be easily released.
  • the high-pressure NC valve can be stored for a long time while maintaining its performance until it is used, and the user can manage the inventory of stored parts without worrying about performance deterioration due to storage, so it is easy to use Since the prevention structure can be released, in the unlikely event that the valve breaks down, the user can immediately replace the stored valve so that it can be used.
  • FIG. 10 is a plan view of FIG. 9. It is sectional drawing which showed 6th Embodiment of the automatic diaphragm valve for high pressures of this invention. It is sectional drawing which showed the valve closed state of the diaphragm valve of FIG.
  • FIG. 12 is a cross-sectional view taken along the line AA in FIG. It is the schematic plan view which showed the mounting state of the holding member.
  • FIG. 1 and FIG. 2 show the first embodiment
  • FIG. 3 and FIG. 4 show the second embodiment
  • FIG. 5 and FIG. 6 show the third embodiment of the high-pressure automatic diaphragm valve of the present invention in this embodiment. Show.
  • a valve actuator (hereinafter referred to as an actuator) 1a includes a body 4 having a casing 2a and a base body 3 for covering the casing 2a.
  • a booster mechanism having a tapered surface portion 6 formed with a tapered surface portion 5, a fixed disk surface 8 formed of a tapered surface formed on the fixed disk 7, and a ball 9 as a moving member. 10 is provided.
  • the actuator 1a is provided with a valve drive output shaft portion 11 and a disc 12, and the diaphragm 13 can be pressed by the actuator 1a.
  • the actuator 1 a has a structure in which the thrust member 16 closes the diaphragm 13 by the elastic force of the spring 15 attached to the back surface of the piston 14, and the thrust of the spring 15 is expanded to the output shaft portion 11 by the booster mechanism 10. It is configured as a normally closed type pneumatic actuator with a structure that outputs in the same manner.
  • the booster mechanism 10 is a mechanism for expanding the force with which the spring 15 presses the diaphragm 13 via the thrust member 16.
  • a plurality of balls 9 are disposed on a ball mounting portion 17 on the surface of the disk 12 provided on the inside of the tapered surface portion surface 6 and provided on the upper portion of the output shaft portion 11.
  • the ball 9 is sandwiched between the fixed disk surface 8 and the tapered surface portion 6.
  • the casing 2a and the base body 3 are screwed in a sealed state and integrated as an actuator 1a.
  • the balls 9 are made of, for example, steel balls, and a plurality of balls 9 are arranged inside the booster mechanism 10.
  • the number of balls 9 may be an appropriate number, but it is preferable to provide at least 3 balls, for example, about 8 to 12 balls. In this case, the output shaft portion 11 and the fixed disk 7 are in a stable state.
  • the fixed disk 7 is fixed to the upper part of the actuator 1 a through the shaft 19. At that time, the fixed disk 7 is disposed so as to face the output shaft portion 11 by screwing the male screw portion 20 formed on the shaft 19 and the female screw portion 21 formed on the cover 22. With this screwing structure, the shaft 19 can be moved up and down to adjust its position, and the position of the fixed disk 7 can be adjusted.
  • an intake / exhaust port 23 that communicates between the outside of the actuator 1 a and the thrust member 16 and the base body 3 is formed. Compressed air can be supplied into the air operation chamber 25 between the piston 14 and the cylinder 24 from the outside of the actuator 1 a via the intake / exhaust port 23. Further, the air in the air operation chamber is also exhausted from the intake / exhaust port 23.
  • the thrust member 16 is formed in a substantially cylindrical shape, and this one thrust member 16 is accommodated in the casing 2a so as to be reciprocally movable, and an O-ring 27 is mounted on the inner and outer peripheral sides.
  • the thrust member 16 has one stage in this example, but may have a plurality of stages.
  • the output shaft portion 11 is disposed on the upper portion of the diaphragm piece 29, and the diaphragm piece 29 is provided to directly contact and drive the diaphragm 13 of the valve 30 attached to the actuator 1a.
  • a disk 12 is provided on the opposite side of the output shaft portion 11 to the fixed disk 7, and a ball mounting portion 17 is formed on the surface of the disk 12.
  • a shaft portion 31 is formed in the lower portion of the output shaft portion 11, and this shaft portion 31 is inserted into a mounting hole 32 formed in the base body 3, whereby the output shaft portion 11 as a whole is connected to the base body 3. And can be driven freely.
  • a coil spring 33 is mounted between the output shaft portion 11 and the base body 3.
  • the output shaft portion 11 is elastically biased upward by a coil spring 33 in FIG.
  • An O-ring 34 is attached to the outer periphery of the shaft portion 31, and the space between the shaft portion 31 and the base body 3 is sealed by the O-ring 34.
  • the base body 3 has the mounting hole 32 into which the shaft portion 31 of the output shaft portion 11 can be inserted, and the output shaft portion 11 is guided in the vertical direction by the mounting hole 32.
  • a male screw part 35 is formed on the casing side outer periphery of the base body 3, and this male screw part 35 is screwed and joined via a female screw part 36 formed in the casing 2 a and a seal member 37 so as to be hermetically sealed.
  • a male screw 38 is formed on the valve mounting side of the base body 3, and the actuator 1 a is attached to and detached from the valve 30 through the male screw 38.
  • the valve 30 is a diaphragm valve, and the structures shown in FIGS. 1, 2, 3, and 5 are examples.
  • the valve 30 includes a valve box 41 having a primary flow path 39 and a secondary flow path 40, a diaphragm 13, a valve seat 42, a diaphragm piece 29, and a bonnet 43.
  • the diaphragm 13 is disposed at a predetermined position of the valve box 41, and a diaphragm piece 29 as a pressing member for pressing is attached to the upper portion of the diaphragm 13 by a bonnet 43 so as to be driven.
  • a female screw 44 that can be screwed with the male screw 38 is formed on the connection side of the valve 30 with the actuator 1a, and the female screw 44 and the male screw 38 are screwed together so that the booster mechanism 10 is provided inside.
  • the incorporated actuator 1a and the valve 30 can be attached and detached.
  • the diaphragm piece 29 is driven by the output in the axial direction of the output shaft portion 11 of the actuator 1a. By driving the diaphragm piece 29, the diaphragm 13 comes into contact with and separates from the valve seat 42, and the primary flow path 39 and the secondary flow path 40 can be opened and closed.
  • the force with which the diaphragm piece 29 presses the valve seat 42 ranges from about 2000N to about 10,000N depending on the size of the valve.
  • a locking groove 45a having a semicircular cross section is provided as a movable side locking portion 45 at an appropriate position on the outer peripheral side surface of the thrust member 16, and a fixed side locking is provided in the casing 2a of the actuator 1a.
  • a locking hole 46a is provided as the portion 46 so that the positions of the locking groove 45a and the locking hole 46a coincide when the thrust member 16 is in the locking position.
  • FIG. 1 shows a state in which two fixed-side locking portions 46 are provided and one holding pin 47a is inserted into any one of them, two are provided on both sides for more stability. It can also be inserted. Further, the thrust member 16 may be held by inserting a plurality of holding pins 47a after providing the locking hole portions 46a at a plurality of locations in the casing 2a.
  • the movable side locking portion 45 can be a locking hole 45a (not shown).
  • the locking hole 45a is a hole formed in the outer circumferential side surface of the thrust member 16 in the centripetal direction of the cylindrical actuator 1a.
  • the casing 2a of the actuator 1a has a locking hole 46a as a fixed-side locking portion 46.
  • the thrust member 16 is appropriately applied to prevent the positions of the locking hole portion 46a and the locking hole 45a from being shifted in the circumferential direction due to the rotation in the rotational direction. It is desirable to provide an anti-rotation means.
  • the locking groove 45a is formed as a groove cut out around the outer peripheral side surface of the thrust member 16, and the tip 56 of the holding pin 47a as the holding member 47 penetrates the locking hole 46a.
  • the engaging groove 45a can be detachably engaged.
  • the locking hole 45a is formed in the outer peripheral side surface of the thrust member 16 as a hole cut in the centripetal direction of the cylindrical actuator 1a, and the distal end portion 56 of the holding pin 47a as the holding member 47 is formed in the locking hole.
  • the portion 46a can be detachably fitted into the locking hole 45a.
  • the position of the locking groove 45a or the locking hole 45a provided in the thrust member 16 may be a position that does not hinder the driving of the thrust member 16 or the function of the valve. It can be taken at any position depending on the situation.
  • the locking position of the thrust member 16 can be at any position other than the position where the thrust member 16 presses the valve seat 42 via the diaphragm 13.
  • the locking position is preferably the top dead center which is the maximum displacement position of the piston.
  • the position of the locking hole 46a as the fixed-side locking portion 46 is provided on the outer peripheral side surface of the casing 2a with respect to a position that coincides with the position of the locking groove 45a in the locking position of the thrust member 16 described above.
  • the holding pin 47a includes a handle portion 55 that is gripped by an operator and a tip portion 56 that is inserted into the locking hole portion 46a of the casing 2a that is the fixed side locking portion 46.
  • an air drive source including an air operation chamber 25 and an intake / exhaust port 23 is provided.
  • the intake / exhaust port 23 formed in the shaft 19 When compressed air is supplied from the intake / exhaust port 23 formed in the shaft 19, the supplied compressed air flows into the air operation chamber 25 through the branch port 48, thereby increasing the air pressure inside the air operation chamber 25. Then, the urging force of the spring 15 is overcome and the piston 14 is pushed upward to release the pressing of the diaphragm 13.
  • the thrust member 16 Since the thrust member 16 is structured to be driven in conjunction with the piston 14, the thrust member 16 also moves upward in conjunction with the upward movement on the release side of the piston 14, and is movable side locked.
  • the locking groove 45a which is the portion 45 and the locking hole portion 46a which is the fixed side locking portion 46 are stopped at the locking position where they coincide. As described above, this locking position is the position of the top dead center of the thrust member 16, and is preferably this position.
  • the diaphragm piece 29 When the diaphragm piece 29 is separated from the diaphragm 13, the diaphragm 13 is deformed and moved upward by its own reaction force, and becomes an old shape separated from the valve seat 42.
  • This shape is a shape when the diaphragm 13 is attached to the inside of the valve chamber and no external force is applied.
  • the separation distance between the diaphragm 13 and the valve seat 42 is about 0.3 mm to 0.4 mm in this example.
  • FIG. 1 shows a state in which the holding pin 47a is inserted in this manner and the thrust member 16 is locked at the locking position.
  • the air supplied to the air operation chamber 25 is exhausted. Contrary to the case of the air supply described above, air is exhausted from the intake / exhaust port 23 through the branch port 48 formed in the shaft 19 through the inside of the shaft 19. When the air is exhausted, the air pressure inside the air operation chamber 25 disappears, and the urging force in the direction of pressing the diaphragm 13 by the spring 15 acts on the thrust member 16, but the thrust member 16 is inserted by the holding pin 47a described above. Is locked to the casing 2 a, so that the diaphragm 13 is prevented from pressing the valve seat 42.
  • the holding pin 47a may be removed from the outside in order to unlock the thrust member 16.
  • the handle 55 of the holding pin 47a is grasped by hand and pulled out from the casing 2a, the thrust member 16 is unlocked from the casing 2a.
  • the piston 14 When the locking is released, the piston 14 is urged and driven in the direction of pressing the diaphragm 13 by the urging force of the spring 15, and the thrust member 16 is also driven in conjunction with the urged force.
  • the output shaft portion 11 is also driven, and the diaphragm piece 29 presses the diaphragm 13 and is pressure-bonded to the valve seat 42, so that the valve is closed as shown in FIG. In this way, the use of the valve 30 is started.
  • FIG. 3 shows a second embodiment of the present invention.
  • the same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted in the following embodiments.
  • a locking groove 45a having a semicircular cross section is provided as a movable side locking portion 45 at an appropriate position on the outer peripheral side surface of the thrust member 16, and a fixed side locking is provided in the casing 2a of the actuator 1a.
  • the portion 46 two locking hole portions 46b are provided at a pair of mutually opposing positions, and two sets of the pair are provided.
  • the fixed side locking portion 46 has two sets of locking hole portions 46b, and one holding pin 47b is inserted into any one set, and the other locking hole portion.
  • the locking groove 45a is formed as a groove cut around the outer peripheral side surface of the thrust member 16, and the distal end portion 56 of the holding pin 47b as the holding member 47 has a pair of locking holes 46b. One of these is penetrated, it approachs along the latching groove 45a, engaging with the thrust member 16, and it penetrates and protrudes from the other latching hole part 46b.
  • the contact area between the holding pin 47b and the thrust member 16 is larger than the contact area in the first embodiment, as shown in FIG. Further, since the holding pin 47b is held in a state of penetrating through the casing 2 and the two locking holes 46b, the thrust pin 16 of the thrust member 16 is compared with the locking of the thrust member 16 in the first embodiment.
  • the holding can be made more stable and strong.
  • the locking groove 45a is formed as a groove cut out around the outer peripheral side surface of the thrust member 16, and the distal end portion 56 of the holding pin 47b as the holding member 47 is a set of locking hole portions. 46b can be detachably engaged with the locking groove 45a.
  • the position of the locking groove 45a provided in the thrust member 16 may be a position that does not hinder the driving of the thrust member 16 and the function of the valve, and any position other than the thrust member 16 may be used depending on the implementation. Can be taken in position.
  • the locking position of the thrust member 16 can be at any position other than the position where the thrust member 16 presses the valve seat 42 via the diaphragm 13.
  • the locking position is preferably the top dead center which is the maximum displacement position of the piston.
  • the position of the locking hole 46b as the fixed-side locking portion 46 is provided on the outer peripheral side surface of the casing 2a with respect to a position that coincides with the position of the locking groove 45a in the locking position of the thrust member 16 described above.
  • FIG. 5 shows a third embodiment of the present invention. Also in this example, the same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted in the following embodiments.
  • the thrust member 16 there is a hole that is linearly opened or penetrated in a direction other than the centripetal direction of the cylindrical actuator 1a as the movable side locking portion 45.
  • a locking hole 45c is provided, and the casing 2a of the actuator 1a has a locking hole portion 46c as the fixed-side locking portion 46.
  • the locking hole 45c is provided at one location.
  • two holes are provided at a pair of opposing positions.
  • the tip 56 of the holding pin 47c can be detachably fitted to the holding pin 47c through the locking hole 46c.
  • the stop hole 45c is a through-hole
  • the distal end portion 56 of the holding pin 47c can be detachably fitted to the holding pin 47c through one of the set of locking hole portions 46c.
  • the tip 56 may be further penetrated from the other of the locking holes 46c and protrude outward, or the new holding pin tip 56 may be inserted through the other of the locking holes 46c without penetrating.
  • the holding pin 47c may be detachably fitted to the locking hole 45c.
  • two or more locking holes 45c may be provided, and a plurality of the locking hole portions 46c and a plurality of holding pins 47c may be used correspondingly.
  • the thrust member 16 is prevented from being displaced in the circumferential direction by rotating in the rotational direction by applying a force in the rotational direction. It is desirable to provide suitable anti-rotation means for this purpose.
  • the contact area between the holding pin 47c and the thrust member 16 is larger than the contact area in the second embodiment. Since it is large, the thrust member 16 can be held more stably and firmly as compared with the locking of the thrust member 16 in the second embodiment. In particular, when the tip of the holding pin 47c passes through the thrust member 16, the effect is great.
  • the position of the locking hole 45c provided in the thrust member 16 may be a position that does not hinder the drive of the thrust member 16 and the function of the valve, and any position other than the thrust member 16 may be used depending on the implementation. Can be taken in position.
  • the locking position of the thrust member 16 can be at any position other than the position where the thrust member 16 presses the valve seat 42 via the diaphragm 13.
  • the locking position is preferably the top dead center which is the maximum displacement position of the piston.
  • the position of the locking hole portion 46c as the fixed-side locking portion 46 is the outer peripheral side surface of the casing 2a with respect to the position that coincides with the position of the opening portion 50 of the locking hole 45c at the locking position of the thrust member 16 described above. Is provided.
  • FIGS. 9 and 10 show the fifth embodiment.
  • These embodiments are high-pressure automatic diaphragm valves in which the present invention is applied to an actuator 1b having a structure different from that of the above-described embodiment.
  • FIG. 7 shows a fourth embodiment of the present invention.
  • the left side of the central vertical line in FIG. 7 shows a state where the holding pin is inserted and the piston is locked, and the right side of the central vertical line shows a state where the holding pin is pulled out and the locking of the piston is released.
  • the actuator 1b has a spring 15 that energizes a piston 14 that is provided in the casing 2b and that drives the actuator 1b, and energizes the piston 14 in a downward direction that presses a diaphragm that is a valve body, as in the above embodiment. Yes.
  • two engagement holes 45d are provided at appropriate positions of the piston 14 as a movable-side engagement portion 45 at a pair of opposing positions, and the casing 2b of the actuator 1b has a fixed-side engagement.
  • the locking holes 46d are provided at two positions opposite to each other as the portions 46, and the thrust member 16 is in the locking position, the positions of the locking holes 45d and the locking holes 46d coincide.
  • FIG. 7 there are two fixed side locking portions 46 in this example, and one holding pin 47d, which is a holding member 47, is inserted into one of them, but the locking of the piston 14 is more stable. For this reason, two holding pins 47d may be inserted into both fixed-side locking portions 46.
  • FIG. 8 shows a state in which two holding pins 47d are thus inserted and the piston 14 is locked at the locking position. Further, in order to unlock the piston 14, the holding pin 47d may be removed from the outside. When the handle 55 of the holding pin 47d is grasped by hand and pulled out from the casing 2b, the locking of the piston 14 to the casing 2b is released.
  • the position of the locking hole 45d provided in the piston 14 may be any position that does not hinder the driving of the piston 14 and the function of the valve. be able to.
  • the engagement position of the piston 14 can be set at any position other than the position where the piston 14 presses the valve seat through the diaphragm.
  • the locking position is preferably the top dead center which is the maximum displacement position of the piston.
  • the position of the locking hole 46d as the fixed-side locking portion 46 is on the outer peripheral side surface of the casing 2b with respect to the position that coincides with the position of the opening 50 of the locking hole 45d at the locking position of the piston 14 described above. Provided.
  • the piston 14 is locked by the two holding pins, so that the thrust member 16 is held by the one holding pin 47a as compared with the first embodiment.
  • maintenance pin is disperse
  • the two holding pins 47d are provided, even if one of the holding pins 47 is unexpectedly removed, the other one holding pin can keep the piston 14 locked.
  • FIG. 9 shows a fifth embodiment.
  • the left side from the central vertical line shows a state where the holding pin 54 is inserted and the piston 52 is locked, and the right side from the central vertical line shows a state where the holding pin 54 is pulled out and the locking of the piston 52 is released.
  • the same parts as those in the fourth embodiment are denoted by the same reference numerals, and description thereof is omitted.
  • a locking groove 45e in which the outer peripheral side surface of the piston 14 is cut out in a semicircular shape as a movable side locking portion 45 is provided at an appropriate position of the piston 14, and is fixed to the casing 2b of the actuator 1b.
  • the side locking portion 46 two locking holes 46e are provided at a pair of opposing positions, and two pairs of the locking holes 46e are provided.
  • the locking groove 45e is provided so that the positions of the locking holes 46e coincide.
  • two sets of fixed side locking portions 46 are provided in this example, and one holding pin 47e, which is a holding member 47, is inserted into one of them, but the locking of the piston 14 is further stabilized. For this reason, two holding pins 47e may be inserted into both fixed-side locking portions 46.
  • FIG. 10 shows a state in which two holding pins 47e are thus inserted and the piston 14 is locked at the locking position. Further, in order to unlock the piston 14, the holding pin 47e may be removed from the outside. When the handle 55 of the holding pin 47e is grasped by hand and pulled out from the casing 2b, the locking of the piston 14 to the casing 2b is released.
  • the position of the locking hole 45e provided in the piston 14 may be a position that does not hinder the driving of the piston 14 or the function of the valve. be able to.
  • the engagement position of the piston 14 can be set at any position other than the position where the piston 14 presses the valve seat through the diaphragm.
  • the locking position is preferably the top dead center which is the maximum displacement position of the piston.
  • the position of the locking hole 46e as the fixed-side locking portion 46 is provided on the outer peripheral side surface of the casing 2b with respect to a position that coincides with the position of the locking groove 45e in the locking position of the piston 14 described above.
  • the piston 14 is locked by the two holding pins, so the second and third holding the thrust member 16 by the one holding pins 47 b and 47 c.
  • the piston 14 and the casing 2b can be locked for a longer period without damaging the shape.
  • the two holding pins 47e are provided, even if one of the holding pins 47e is unexpectedly removed, the other one holding pin can keep the piston 14 locked.
  • FIGS. 11 (a) and 12 (a) are longitudinal sectional views and diagrams of the diaphragm valve in this embodiment.
  • 11 (b) and FIG. 12 (b) are partially omitted vertical central sectional views of the actuator in FIGS. 11 (a) and 12 (a).
  • the valve actuator 60 in this embodiment has a piston mechanism 61 and a booster mechanism 62 inside.
  • the piston mechanism 61 includes a casing 70 formed in a substantially cylindrical shape and a substantially cylindrical piston 71 that can be inserted into the casing 70.
  • the piston 71 is inserted into the casing 70 via an O-ring 72.
  • the piston 71 is provided so as to be able to reciprocate while sliding in the casing 70 by intake / exhaust from the intake / exhaust port 23 provided in the upper portion of the casing 70.
  • An opening 73 is provided in the lower portion of the casing 70, and a female screw 74 and an annular locking step 75 are formed in the opening 73.
  • the casing 70 is provided with a case 76 and a base 77 through the opening 73 so as to be mountable. Further, a cap 78 is attached to the base 77, and a valve body 79 is attached through the cap 78.
  • the booster mechanism 62 has a piston 71, a lifting body 80, a cam 81, a spring 82, a roller 83, and an output shaft portion 84, and an upper portion of the lifting body 80, the cam 81, the spring 82, and the output shaft portion 84 is for mounting.
  • an elevating body 80 is provided so as to be movable up and down in the case 76.
  • the roller 83 is attached to the piston 71 and, as will be described later, is provided so as to operate the cam 81 in conjunction with the reciprocating motion of the piston 71 using the so-called lever principle.
  • the diaphragm valve has a structure in which the diaphragm 13 is pressed against the valve seat 42 by the diaphragm piece 29 in accordance with the operation of the piston mechanism 61.
  • the case 76 is formed in a substantially disk shape, and is locked to the locking step 75 while being placed on the upper surface of the base 77 from the opening 73 of the casing 70. In such a state, it can be attached to the casing 70.
  • a linear groove 90 for mounting the elevating body 80 and the cam 81 is formed, and communication holes 91 are formed at the bottoms on both ends in the length direction of the groove 90. It is provided through the outer peripheral surface.
  • the communication hole 91 is provided with a holding member 93 made of a holding pin through the insertion hole 92 formed through the casing 70 so that the holding member 93 can be inserted.
  • the holding pin 93 is provided in such a length that the bottom surface 80a of the elevating body 80 can contact when inserted into the insertion hole 92, and as shown in FIG. A bent portion 94 that can be picked is formed.
  • a through hole 95 into which the upper end portion of the output shaft portion 84 can be inserted is formed at the center of the groove portion 90 of the case 76, and two communication holes 96 are formed in the vicinity of both sides of the groove portion 90 in a direction orthogonal to the groove portion 90. It is formed in communication with the outer peripheral surface.
  • a pin member 97 is inserted into each communication hole 96, and both ends of the pin member 97 are positioned by stop pins 98 fitted in a direction intersecting with each communication hole 96 from the upper surface side of the case 76. Inserted in a retaining state.
  • a bottomed hole 99 into which the spring 82 can be inserted is formed at two positions opposite to the groove portion 90 in the diameter direction of the case 76, and one side portion of the spring 82 is inserted into these free hole 99.
  • the elevating body 80 is provided in a substantially rectangular shape by a metal such as alloy tool steel, for example, and is inserted at the center position of the groove 90.
  • the bottom surface side of the lifting / lowering body 80 is formed in a mountain shape with the center being the top portion 80 b, and the tip of the output shaft portion 84 inserted through the through hole 95 is in contact with the top portion 80 b.
  • the elevating body 80 is attached so as to move up and down in conjunction with the reciprocation of the piston mechanism 61 in the vertical direction, and is provided so as to move the output shaft portion 84 up and down by this up and down movement.
  • the cam 81 is formed in an approximately L shape, and the mounting hole 100 is attached to the case 76 and the roller 83 is locked to the other end of the mounting hole 100. Possible locking pieces 101 are provided.
  • the two cams 81, 81 are attached to the center of the case 76 so as to be inserted into the groove portion 90 from above the elevating body 80, and the pin member 97 is inserted into the attachment hole 100 so as to come out into the groove portion 90.
  • the pin member 97 is provided so as to be rotatable with respect to the case 76.
  • On the lift body 80 side of the cam 81 there is provided a locking recess 102 that locks the corner portions at both upper ends of the lifting body 80. By locking the locking recess 102 and the lifting body 80, The elevating body 80 moves up and down while its range is regulated according to the rotation.
  • the spring 82 has one side inserted into the free hole 99 of the case 76 as described above, while the other end of the spring 82 is shown in FIGS. 11 (b) and 12 (b). Thus, it abuts on the bottom surface side of the piston 71 formed in a substantially cylindrical shape.
  • the springs 82 are arranged at two locations in the piston 71 and are provided so as to repel the piston 71 upward in the drawing when compressed air is exhausted from the piston mechanism 61.
  • Each of the springs 82 and 82 is provided in a right-handed or left-handed manner, and thus the winding directions of the springs 82 and 82 are opposite to each other.
  • the rollers 83 shown in FIG. 14 are provided at two positions in the horizontal direction at the locking positions with the cams 81 in the piston 71 of FIG. 11 so as to move up and down integrally with the piston 71 as the piston 71 reciprocates. It has become.
  • the roller 83 is engaged with the locking piece 101 of the cam 81 while being rotatably attached to the piston 71, and when the roller 83 moves, the frictional resistance with the cam 81 when the piston 71 reciprocates is reduced. Less.
  • the output shaft portion 84 is provided between the elevating body 80 and the diaphragm piece 29 and is elastically biased upward in FIG. 11 by the coil spring 33.
  • the output shaft portion 84 is also integrated with the elevating movement. It can be moved up and down.
  • the diaphragm piece 29 is also moved upward and the diaphragm 13 is opened, while the lifting body 80 is lowered.
  • the coil spring 33 is elastically moved along the outer peripheral surface of the roller 83 by the downward movement of the roller 83.
  • the two cams 81, 81 thus rotated are rotated in the outward direction, that is, in a direction to ease the pressing of the lifting body 80, and the lifting body 80 moves upward.
  • the output shaft portion 84 and the diaphragm piece 29 move upward, and the diaphragm 13 is deformed and moved upward by itself.
  • the elevating body 80 when the elevating body 80 is moved upward via the booster mechanism 62 by the downward movement of the piston, the elevating body bottom surface 80a side and the case 76 where the bottom surface 80a abuts when fully closed.
  • a gap G is formed between the fixed contact surface 105 and the fixed contact surface 105.
  • the gap G becomes maximum when the piston 71 is moved to the bottom dead center, and in this state, the holding pin 93 can be inserted from the insertion hole 92 from the outside of the casing 70.
  • the holding pin 93 By inserting the holding pin 93 from the insertion hole 92 in this state, the holding pin 93 can be locked to the lift body bottom surface 80a when the lift body 80 moves to the release side.
  • the elevating body bottom surface 80a is inclined toward the center, the holding pin 93 is guided by this inclination and can be easily inserted.
  • the bent portion 94 at the outer end of the holding pin 93 may be grasped and extracted from the outside of the casing 70. As shown in FIG.
  • the valve 80 is closed, the elevating body 80 moves downward.
  • the diaphragm 13 is operated via the booster mechanism 62. Even when fine flow control is performed, a predetermined flow path can be secured.
  • the actuator of this embodiment causes the lifting body 80 to move up when air is supplied and the piston 71 is moved downward.
  • the valve is opened, and on the other hand, when the air is exhausted and the piston 71 is moved upward, the elevating body 80 is pressed downward by the spring force of the spring 82 so that the valve is closed. Yes.
  • the base 77 is formed in a substantially disk shape having the same diameter as that of the case 76, a male screw 106 that is screwed to the female screw 74 is formed on the upper outer peripheral side, and a cap 78 is mounted on the upper inner peripheral side.
  • An internal recess 107 is formed on the lower side following the internal thread 107 and the internal thread 107.
  • the base 77 is screwed to the female screw 74 through the screw 106 from the opening 73 side of the casing 70 in which the case 76 is fitted.
  • the base 77 is positioned and fixed by the locking step 75 in the casing 70 by the base 77. Is done.
  • the male screw 106 formed on the outermost periphery of the base 77 and the female screw 74 having an enlarged diameter formed in the casing opening 73 are screwed together to increase the tightening force.
  • the occurrence of rattling is prevented, the case 76 does not move when the actuator is operated, and no vibration or noise is generated, and the piston 71 slides smoothly.
  • Female screw portions 110 are formed evenly at 120 ° intervals at three locations on the outer periphery of the lower portion of the base 77, and set screws 111 are screwed onto the female screw portions 110.
  • the cap 78 is formed in a substantially cylindrical shape, and a male screw 112 that can be screwed to the female screw 107 of the base and an annular convex portion 113 that can be fitted into the annular concave portion 108 are formed on the cap 78.
  • a male screw portion 115 that is screwed into a female screw portion 114 formed in the valve body 79 is formed in the lower portion.
  • An insertion hole portion 116 for inserting the output shaft portion 84 is provided in the center of the cap 78.
  • the male screw 112 of the cap 78 and the female screw 107 of the base 77 are formed to have a large diameter.
  • sufficient strength can be ensured even when the thrust during actuator operation is applied to the male screw 112 and the female screw 107, and stable operation is possible.
  • the cap 78 is fixed from the outer peripheral side of the base 77 by three set screws 111, and can be easily fixed to the base 77 by these set screws 111, and is attached while firmly centering at three locations.
  • the cap 78 is not glazed against the base 77 after tightening. Further, since the set screw 111 is tightened from the side surface of the base 77, even when the diaphragm valve is attached to the pipe or the like, the pipe and the valve body 79 and the like are not obstructed. After adjusting the screwed state of the cap 78 and adjusting the stroke, these can be easily fixed by the set screw 111.
  • the booster mechanism 62 in the diaphragm valve of this embodiment has a structure that operates by locking the elevating body 80 and the cam 81, and the elevating body 80 does not move up and down with sliding, but at the sliding portion. Since the holding pin 93 is not locked to a certain piston 71, a load is not applied to the piston 71, and there is no possibility that scratches or burrs are generated on the outer surface of the piston 71 or the inner surface of the casing 70. Therefore, when the piston 71 slides, the O-ring 72 is not damaged or malfunctions due to scratches or burrs caused by the holding pins 93. As a result, the casing 70 can be formed of a soft material such as aluminum to reduce the overall weight. In this case as well, the holding pins 93 do not cause scratches or burrs.
  • the booster mechanism 62 is a mechanism that strongly presses the elevating body 80 using the lever principle using a cam, the diaphragm 13 is strongly pressed against the valve seat 42 and also in the case of high-pressure fluid. Make sure to prevent leakage.
  • the piston 71 is provided with two springs 82 that spring upward, and the winding directions of the springs 82 are opposite to each other.
  • the rotation of the piston 71 is prevented. Therefore, mutual interference due to rubbing between the cam 81 and the groove portion 90 is suppressed, and even when the stroke of the piston 71 is large, the rotation of the piston 71 due to kinking when the spring 82 is compressed is prevented. The risk of malfunctions and reduced life due to rubbing is also avoided. Furthermore, since the piston 71 operation is accurate, the diaphragm valve can be controlled to be opened with high accuracy.
  • the lifting body 80 may be anything that can open and close the valve without sliding inside as the piston 71 moves up and down by air supply, and the diaphragm valve has a holding pin 93 on the bottom face 80a of the lifting body. Any one can be used as long as it can be stopped from the outside and the downward movement of the diaphragm piece 29 can be restricted to prevent the diaphragm 13 from being worn or deteriorated. Therefore, the elevating body 80 does not necessarily need to be separate from the output shaft portion 84 and the diaphragm piece 29, and these may be provided integrally.
  • the holding pin 93 is inserted through the insertion hole 92 formed in the casing 70.
  • the holding pin 93 can be inserted into the gap G generated on the bottom surface 80a of the lifting body to hold the lifting body 80 in the valve open state.
  • the insertion portion may be provided in a groove shape or the like, while the holding member may be provided in a plate shape or other shapes.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
  • Preventing Unauthorised Actuation Of Valves (AREA)

Abstract

　Provided is a high-pressure automatic NC diaphragm valve in which a valve seat is constantly under a large load because of a high-pressure force biasing a valve body, wherein the valve can be stored while the performance of the valve is maintained until the valve is used, and the valve can be stored for a long period of time. A diaphragm valve, in which a diaphragm is pushed open and closed by a piston mechanism inside an actuator provided in a body, is configured such that a stationary-side locking part is provided to a casing of the actuator, a movable-side locking part is provided in an appropriate position on the piston mechanism, and when the piston mechanism is moved to an upper releasing side, the locked positions of the stationary-side locking part and the movable-side locking part coincide, and the stationary-side locking part and the movable-side locking part are locked by a holding member inserted from the outside of the casing.

Description

高圧用自動ダイヤフラムバルブAutomatic diaphragm valve for high pressure
　本発明は、使用時又は交換時まで、バルブの性能を全く損なうことなく、バルブ性能を維持したままの状態で保管を可能とした高圧用自動ＮＣ（ノーマルクローズ）ダイヤフラムバルブに関する。 The present invention relates to a high-pressure automatic NC (normally closed) diaphragm valve that can be stored while maintaining the valve performance without damaging the valve performance at all until use or replacement.
　半導体製造工程においては、引火爆発性、分解爆発性、腐食性、毒性などの各種の特殊ガス、例えばフォスフィンやアルシン、シラン等を使用する。一般にこのような特殊材料ガスは、数１０気圧から１００気圧以上の高圧力でガスボンベに充填しておき、密閉されたクリーンルーム内にそのガスボンベを設置し、配管途中に配置されたバルブを介して半導体製造装置に供給され、又は当該装置より排気される。 In the semiconductor manufacturing process, various special gases such as flammable explosive, decomposition explosive, corrosive, and toxic, such as phosphine, arsine, and silane are used. In general, such special material gas is filled in a gas cylinder at a high pressure of several tens of atmospheres to 100 atmospheres or more, and the gas cylinder is installed in a sealed clean room, and a semiconductor is provided through a valve disposed in the middle of the piping. It is supplied to the manufacturing apparatus or exhausted from the apparatus.
　近年、半導体基板の高集積化に伴い、半導体素子の高速化および小型化が著しく進んでおり、それに伴い、ベースとなるシリコンウェハも高純度、高品質であることが求められるため、その製造工程において用いられる上記のような各種の特殊なガス流体の流量制御精度にも、著しく高い精度が求められるようになってきている。 In recent years, with the high integration of semiconductor substrates, the speed and miniaturization of semiconductor elements have been remarkably advanced, and accordingly, the silicon wafer used as a base is also required to have high purity and high quality. In addition, the flow control accuracy of various special gas fluids as described above is required to be extremely high.
　このようにして半導体製造工程に設けられる流体制御装置としてのバルブの弁体移動の精度には、高い変位精度が要求されるため、とりわけ、その距離制御と物理的に直接関連する部材である弁座の状態を高品質に維持する必要がある。 In this way, since the displacement accuracy of the valve body of the valve as a fluid control device provided in the semiconductor manufacturing process requires high displacement accuracy, the valve is a member that is physically directly related to the distance control. It is necessary to maintain a high quality seat.
　一方で、半導体製造工程においては、腐食性流体等の影響でバルブが劣化しやすく、寿命が短くなりやすい。バルブボディ内部の弁室内のガスが滞留しやすいデッドスペースが大きくなる場合、高圧、高濃度の、例えば、フッ素ガスを弁室内に導入すると、断熱圧縮により弁室内の温度が上昇しやすい。弁室内の温度が上昇すると、弁室内の表面腐食や樹脂材質の劣化が生じやすくなる。その結果、表面腐食による生成物が弁室内（特に弁座部）に付着し、腐食による生成物が原因で、気密状態が不良になり、リークしやすくなることで、バルブの品質が劣化してしまう。また、フッ素ガスなどのハロゲンを含む腐食性の高いガスは、バルブ弁室内部の表面腐食を引き起こしやすいため、生成した腐食物が弁座表面部に付着し、弁座を劣化させ、流量制御機能を損なう主な原因となる。 On the other hand, in the semiconductor manufacturing process, the valve is likely to deteriorate due to the influence of a corrosive fluid or the like, and the life is likely to be shortened. When the dead space in which the gas in the valve body tends to stay is increased, if high-pressure, high-concentration, for example, fluorine gas is introduced into the valve chamber, the temperature in the valve chamber is likely to rise due to adiabatic compression. When the temperature in the valve chamber rises, surface corrosion in the valve chamber and deterioration of the resin material tend to occur. As a result, products due to surface corrosion adhere to the valve chamber (especially the valve seat), and due to the products due to corrosion, the airtight state becomes poor and leaks easily, resulting in deterioration of valve quality. End up. In addition, highly corrosive gas containing halogen such as fluorine gas is likely to cause surface corrosion inside the valve valve chamber, so that the generated corrosives adhere to the valve seat surface and deteriorate the valve seat. Is the main cause of damage.
　このようにして半導体製造工程に使用されるバルブは寿命が短くなり、上記のような高精度の流量制御能力を維持させるためには、頻繁にバルブを新品のバルブへ交換しなければならない。 ¡In this way, the valve used in the semiconductor manufacturing process has a short life, and in order to maintain the high-precision flow control capability as described above, the valve must be frequently replaced with a new valve.
　従って、製造管理者又は使用者は、新品のバルブを交換用として長期間に渡って在庫し保管しておく必要がある。 Therefore, it is necessary for the production manager or user to stock and store a new valve for replacement for a long period of time.
　ここで、ＮＣ（ノーマルクローズタイプ）ダイヤフラムバルブを高圧流体用として用いる場合、腐食性流体等の高圧流体に対する高シール性を確保するために、常時閉状態の弁に対してさらにばね等の外力により弁体による弁座への押圧負荷を常時加えるようにして、弁体を付勢する押圧力を高くすることがある。 Here, when using NC (normally closed type) diaphragm valves for high-pressure fluids, in order to ensure high sealing performance against high-pressure fluids such as corrosive fluids, an external force such as a spring is further applied to the normally closed valves. A pressing load applied to the valve seat by the valve body may be constantly applied to increase the pressing force for urging the valve body.
　例えば、特許文献１の遮断弁では、ハウジング内にばねユニットを設け、このばねユニットのばね力によって通常時にはダイヤフラムを弁座に押圧して流体を遮断し、一方、圧力室に圧力空気を導入したときに、遮断ダイヤフラムをばねユニットのばね力に抗して弁座から離間させて弁座を開放するようになっている。この遮断弁では、各ばねユニットを複数のばねにより構成し、このばねユニットの互いに隣接するばねを逆向きに設けている。 For example, in the shut-off valve of Patent Document 1, a spring unit is provided in the housing, and the diaphragm is pressed against the valve seat at normal times by the spring force of the spring unit to shut off the fluid, while pressure air is introduced into the pressure chamber. Sometimes, the blocking diaphragm is separated from the valve seat against the spring force of the spring unit to open the valve seat. In this shut-off valve, each spring unit is constituted by a plurality of springs, and the springs adjacent to each other are provided in opposite directions.
　また、ばねを設けたＮＣタイプのダイヤフラムバルブについて、弁開度を一定に保持する手段が設けられたものが知られている。例えば、特許文献２のバルブでは、使用の目的で空圧作動式制御器の流路を手動で解放でき、開放の度合いを長時間にわたって維持することができる手動作動装置等が開示されている。特許文献３では、常閉弁を強制開弁して使用に供する強制開弁装置等が開示されている。 Also, an NC type diaphragm valve provided with a spring is known which is provided with means for keeping the valve opening constant. For example, the valve of Patent Document 2 discloses a manual operation device that can manually release the flow path of the pneumatically operated controller for the purpose of use and can maintain the degree of opening for a long time. Patent Document 3 discloses a forced valve opening device that uses a normally closed valve for forced opening.
特許第２７４９５２７号公報Japanese Patent No. 2749527 特開平１１－３１１３６５号公報Japanese Patent Application Laid-Open No. 11-311365 特開２００２－１９５４４８号公報JP 2002-195448 A
　ＮＣタイプのダイヤフラムにおいて、特許文献１のようにばね等の外力を付加してダイヤフラムを着座させる方向に押圧した場合には、長期間在庫や保管している間、ピストンによってダイヤフラムを介して押圧される弁座には常に大きな負荷が継続して加わる状態となり、弁座がその負荷によって潰されるという現象が生じる。とりわけ倍力機構を備えて弁体駆動させるバルブでは、駆動源の押圧力が何倍にも倍増されているため、そのような現象が顕著に生じる。 In the NC type diaphragm, when an external force such as a spring is applied and pressed in the direction in which the diaphragm is seated as in Patent Document 1, it is pressed by the piston through the diaphragm during long-term inventory or storage. A large load is constantly applied to the valve seat, and the valve seat is crushed by the load. In particular, in a valve that is provided with a booster mechanism and is driven by a valve body, such a phenomenon occurs remarkably because the pressing force of the driving source is doubled.
　このようにして生じる弁座の潰れは、直接的にバルブストロークを増大させる結果を生じる。このため、増大したバルブストローク分に応じて、弁座に対するピストンの弁体押圧力が弱められる。ピストンの押圧力が弱められれば、気密を保持するための押し力が低減し、高い圧力の流体に拮抗して弁体の変位を制御することで高精度な流量制御を実現するバルブの流量制御能力を十分に発揮できなくなる。結果として、長期間保管された高圧流体用自動ＮＣダイヤフラムバルブは、新品としての使用開始時から必要な流量制御能力を発揮できなかったり、使用可能期間が短くなるという問題点がある。 The collapse of the valve seat that occurs in this way results directly in increasing the valve stroke. For this reason, the valve body pressing force of the piston against the valve seat is weakened according to the increased valve stroke. If the piston pressing force is weakened, the pressing force to maintain the airtightness will be reduced, and the valve flow control will realize high-precision flow control by controlling the displacement of the valve body against the high pressure fluid. The ability cannot be fully demonstrated. As a result, the automatic NC diaphragm valve for high-pressure fluid stored for a long time has a problem that it cannot exhibit the required flow rate control capability from the start of use as a new product, and the usable period is shortened.
　このような高度な流量制御能力の劣化したバルブを使用すれば、高精度な品質を要求される半導体製品の品質を維持できなくなり、歩留まりを減少させ生産効率を悪化させるため、この問題点の解決は喫緊の課題である。 If such a valve with a high flow rate control capability is used, the quality of semiconductor products that require high-precision quality cannot be maintained, and the yield is reduced and production efficiency is deteriorated. Is an urgent issue.
　このバルブでは、ばねユニットの互いに隣接するばねを逆向きに設けているが、その理由が開示ないし示唆されておらず、このようなばねの装着構造とすることでダイヤフラムと弁座とに加わる強い押圧力を回避できるものでもない。 In this valve, the springs adjacent to each other in the spring unit are provided in opposite directions, but the reason for this is not disclosed or suggested, and a strong attachment to the diaphragm and valve seat is achieved by using such a spring mounting structure. It is not possible to avoid the pressing force.
　一方、特許文献２においては、シャフトの上端部に設けられる特定構造の固定部及び該固定部の延出棒に嵌入可能な切欠部を備えた特定構造の操作部からなる機構が必要とされており、しかも、流路を強制的に解放させた状態で使用に供するものである。したがって、高圧用バルブに適用することができないばかりか、使用を目的に開弁する装置であって、使用時まで性能を維持する着想や示唆は存在しない。 On the other hand, in Patent Document 2, there is a need for a mechanism including a fixed part having a specific structure provided at the upper end of the shaft and an operation part having a specific structure provided with a notch that can be inserted into an extending rod of the fixed part. In addition, it is used in a state where the flow path is forcibly released. Therefore, it is not only applicable to a high-pressure valve, but is a device that opens for the purpose of use, and there is no idea or suggestion to maintain performance until use.
　特許文献３においては、弁開させるための機構は、特定構造のマニュアル開弁治具及びそれに対応した特定構造を備えた常閉弁からなる機構を必要とし、しかも、特許文献２と同様に、流路を強制的に解放させた状態で使用に供するものである。したがって、高圧用バルブに適用することができないばかりか、使用時まで性能を維持する着想や示唆は全く存在しない。 In Patent Document 3, a mechanism for opening the valve requires a mechanism consisting of a manual valve opening jig having a specific structure and a normally closed valve having a specific structure corresponding thereto, and, similarly to Patent Document 2, It is used in a state where the flow path is forcibly released. Therefore, it cannot be applied to a high-pressure valve, and there is no idea or suggestion to maintain performance until use.
　本発明は上記問題点を解決するためになされたものであり、その目的とするところは、弁体を付勢する押圧力が高いため弁座に常に大きい負荷がかかっている高圧用自動ＮＣダイヤフラムバルブにおいて、使用時までバルブの性能を維持したまま保管を可能とし、長期間の保管をすることができる高圧用自動ＮＣダイヤフラムバルブを提供することである。 SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and the object of the present invention is to provide a high-pressure automatic NC diaphragm in which a large load is always applied to the valve seat due to a high pressing force for urging the valve body. An object of the present invention is to provide a high-pressure automatic NC diaphragm valve that can be stored while maintaining the performance of the valve until it is used, and can be stored for a long time.
　上記目的を達成するため、請求項１に係る発明は、ボデー内に設けた弁座シートにダイヤフラムを押圧して弁閉するダイヤフラムバルブにおいて、前記ボデーに設けたアクチュエータ内のピストン機構で前記ダイヤフラムを押圧し又は押圧を解除すると共に、前記アクチュエータのケーシングに固定側係止部を設け、かつ前記ピストン機構の適宜位置に可動側係止部を設け、前記ピストン機構を上方向の解除側に動かしたときに、前記固定側係止部と前記可動側係止部の係止位置を一致させ、かつ前記ケーシングの外方より挿通した保持部材で前記固定側係止部と可動側係止部を係止させて前記弁座シートに負荷を掛けずに長期保存を可能とし、バルブ使用時には、前記保持部材を前記ケーシングの外方より取り外してバルブを使用可能としたことを特徴とする高圧用自動ダイヤフラムバルブである。 In order to achieve the above-mentioned object, the invention according to claim 1 is a diaphragm valve that presses a diaphragm against a valve seat provided in the body and closes the diaphragm, and the diaphragm is moved by a piston mechanism in an actuator provided in the body. While pressing or releasing the pressure, a fixed side locking portion is provided in the casing of the actuator, and a movable side locking portion is provided at an appropriate position of the piston mechanism, and the piston mechanism is moved to the upward release side. Sometimes, the fixed-side locking portion and the movable-side locking portion are engaged with each other by a holding member inserted from the outside of the casing so that the locking positions of the fixed-side locking portion and the movable-side locking portion coincide with each other. It can be stored for a long time without applying a load to the valve seat, and the valve can be used by removing the holding member from the outside of the casing when using the valve. A high-pressure automatic diaphragm valve, characterized in that the.
　請求項２に係る発明は、前記ピストン機構は、エアーを供給してピストンを上方向に動かして前記ダイヤフラムを自力にて上方向に変形移動すると共に、全閉時に、倍力機構を介してスプリングの弾発力で下方に負荷を与える構造を有し、ピストンを上方に動かしたときに、前記保持部材でピストン機構が下がるのを防止した請求項１に記載の高圧用自動ダイヤフラムバルブである。 According to a second aspect of the present invention, the piston mechanism supplies air and moves the piston upward to deform and move the diaphragm upward by itself, and when fully closed, the piston mechanism springs through the booster mechanism. 2. The high-pressure automatic diaphragm valve according to claim 1, wherein the holding mechanism prevents the piston mechanism from being lowered by the holding member when the piston is moved upward.
　請求項３に係る発明は、前記ピストン機構にエアーを供給し、ピストンを上死点へ移動させて前記固定側係止部である係止穴部に前記可動側係止部である係止溝の位置を一致させ、一致した双方の穴に外方より保持部材である保持ピンを差し込み、使用時には当該保持ピンを外方より抜き出してバルブを使用可能とした請求項１又は２に記載の高圧用自動ダイヤフラムバルブである。 According to a third aspect of the present invention, the air is supplied to the piston mechanism, the piston is moved to the top dead center, and the locking groove which is the movable side locking portion is inserted into the locking hole which is the fixed side locking portion. 3. The high pressure according to claim 1 or 2, wherein the positions of the two are matched, a holding pin that is a holding member is inserted into both of the matched holes from the outside, and the valve can be used by extracting the holding pin from the outside during use. It is an automatic diaphragm valve.
　請求項４に係る発明は、前記固定側係止部である２つの係止穴部に前記可動側係止部である半円形係止溝又は係止孔の位置を一致させ、一致させた係止穴部に外方より保持部材である保持ピンを差し込み、使用時には当該保持ピンを外方より抜き出してバルブを使用可能とした請求項１又は２に記載の高圧用自動ダイヤフラムバルブである。 According to a fourth aspect of the present invention, the positions of the semicircular locking grooves or the locking holes as the movable side locking portions are made to coincide with the two locking holes as the fixed side locking portions, and the locking holes are aligned. The high-pressure automatic diaphragm valve according to claim 1 or 2, wherein a holding pin which is a holding member is inserted into the blind hole portion from outside and the valve can be used by using the holding pin extracted from the outside during use.
　請求項５に係る発明は、ボデー内に設けた弁座シートにダイヤフラムを押圧して弁閉するダイヤフラムバルブにおいて、ボデーに設けたアクチュエータ内のピストン機構でダイヤフラムを押圧し又は押圧を解除すると共に、ピストン機構にピストンの上下方向の往復動に連動して上下移動する昇降体を設け、かつアクチュエータのケーシングの外方より、昇降体を上方向の解除側に動かしたときにこの昇降体の底面側に生じる隙間に保持部材を挿入可能に設け、昇降体の解除側への移動時に昇降体底面に保持部材を係止させ、弁座シートに負荷を掛けずに長期保存を可能とし、バルブ使用時には、保持部材をケーシングの外方から抜き出してバルブを使用可能とした高圧用自動ダイヤフラムバルブである。 The invention according to claim 5 is a diaphragm valve that presses the diaphragm against a valve seat seat provided in the body and closes the valve, and presses or releases the diaphragm by a piston mechanism in an actuator provided in the body, The piston mechanism is provided with a lifting body that moves up and down in conjunction with the reciprocation of the piston in the vertical direction, and the bottom side of this lifting body when the lifting body is moved upward from the outside of the actuator casing. The holding member can be inserted into the gap generated in the valve, and the holding member is locked to the bottom surface of the lifting body when the lifting body is moved to the release side, enabling long-term storage without applying a load to the valve seat. This is a high-pressure automatic diaphragm valve that can be used by extracting the holding member from the outside of the casing.
　請求項６に係る発明は、ピストン機構にエアーを供給してピストンを下方向に動かし、かつダイヤフラムを自力にて上方向に変形移動すると共に、全閉時に、スプリングの弾発力によりピストンを上方向に動かしたときに倍力機構を介して昇降体を下方向に移動させて負荷を与える構造を有し、ピストンを下方に動かしたときに、保持部材でピストン機構の昇降体が下がるのを防止した高圧用自動ダイヤフラムバルブである。 According to the sixth aspect of the present invention, air is supplied to the piston mechanism to move the piston downward, the diaphragm is deformed upward by itself, and the piston is lifted by the elastic force of the spring when fully closed. When the piston is moved downward, the lifting mechanism of the piston mechanism is lowered by the holding member when the piston is moved downward. It is an automatic diaphragm valve for high pressure that is prevented.
　請求項７に係る発明は、ピストン機構にエアーを供給し、ピストンを下死点へ移動させたときに倍力機構を介して昇降体の底面とこの底面が全閉時に当接する固定側当接面との間に隙間を設け、この隙間にケーシングに形成した挿入孔から保持部材である保持ピンを差し込み、使用時には当該保持ピンの外端に形成した折曲部を摘んでケーシングの外方より抜き出してバルブを使用可能とした高圧用自動ダイヤフラムバルブである。 The invention according to claim 7 is a fixed-side contact in which the bottom surface of the lifting body and the bottom surface come into contact with each other through the booster mechanism when air is supplied to the piston mechanism and the piston is moved to the bottom dead center. A gap is provided between the holding pin and a holding pin, which is a holding member, from an insertion hole formed in the casing, and the bent portion formed at the outer end of the holding pin is picked from the outside of the casing when used. It is an automatic diaphragm valve for high pressure that can be extracted and used.
　請求項８に係る発明は、スプリングは、ピストン内に２ヶ所設けて当該ピストンを上方向に弾発可能に設け、これらスプリングの相互の巻方向を逆向きとした高圧用自動ダイヤフラムバルブである。 The invention according to claim 8 is a high-pressure automatic diaphragm valve in which two springs are provided in the piston so that the piston can be repelled upward, and the winding directions of the springs are opposite to each other.
　従って本発明によると、高圧用ＮＣバルブが長期間保管されている間、高い付勢力のピストンによる弁座シートへの押圧が加わることを簡単に防止し、かつ、簡単に解除できる構造を備えたため、高圧用ＮＣバルブを使用時までその性能を維持したままの長期保管できると共に、使用者が保管による性能劣化を気にせず保管部品を在庫管理することができるため、使用の際には簡単にその防止構造を解除できるため、万が一バルブが故障した場合は、使用者は、保管していたバルブを即座に交換して使用できる状態とすることができる等の効果を有する。 Therefore, according to the present invention, since the high pressure NC valve is stored for a long period of time, it is possible to easily prevent the pressure applied to the valve seat by the piston with a high biasing force and to provide a structure that can be easily released. The high-pressure NC valve can be stored for a long time while maintaining its performance until it is used, and the user can manage the inventory of stored parts without worrying about performance deterioration due to storage, so it is easy to use Since the prevention structure can be released, in the unlikely event that the valve breaks down, the user can immediately replace the stored valve so that it can be used.
本発明の高圧用自動ダイヤフラムバルブの第１実施形態を示した断面図である。It is sectional drawing which showed 1st Embodiment of the automatic diaphragm valve for high pressures of this invention. 図１における、弁閉状態を示した断面図である。It is sectional drawing which showed the valve closed state in FIG. 本発明の高圧用自動ダイヤフラムバルブの第２実施形態を示した断面図である。It is sectional drawing which showed 2nd Embodiment of the automatic diaphragm valve for high pressures of this invention. 図３における、平面図である。It is a top view in FIG. 本発明の高圧用自動ダイヤフラムバルブの第３実施形態を示した断面図である。It is sectional drawing which showed 3rd Embodiment of the automatic diaphragm valve for high pressures of this invention. 図５における、平面図である。It is a top view in FIG. 本発明の高圧用自動ダイヤフラムバルブの第４実施形態の要部を示した一部切欠き断面図である。It is a partially cutaway sectional view showing an important part of a fourth embodiment of the high-pressure automatic diaphragm valve of the present invention. 図７における、平面図である。It is a top view in FIG. 本発明の高圧用自動ダイヤフラムバルブの第５実施形態の要部を示した一部切欠き断面図である。It is a partially cutaway sectional view showing an important part of a fifth embodiment of the high-pressure automatic diaphragm valve of the present invention. 図９における、平面図である。FIG. 10 is a plan view of FIG. 9. 本発明の高圧用自動ダイヤフラムバルブの第６実施形態を示した断面図である。It is sectional drawing which showed 6th Embodiment of the automatic diaphragm valve for high pressures of this invention. 図１１のダイヤフラムバルブの弁閉状態を示した断面図である。It is sectional drawing which showed the valve closed state of the diaphragm valve of FIG. 図１１のＡ－Ａ断面図である。FIG. 12 is a cross-sectional view taken along the line AA in FIG. 保持部材の装着状態を示した概略平面図である。It is the schematic plan view which showed the mounting state of the holding member.
　以下に、本発明における高圧用自動ダイヤフラムバルブの実施形態を図面に基づいて詳細に説明する。この実施形態における本発明の高圧用自動ダイヤフラムバルブとして、図１、図２は第１実施形態を、図３、図４は第２実施形態を、図５、図６は第３実施形態をそれぞれ示している。 Hereinafter, an embodiment of an automatic diaphragm valve for high pressure in the present invention will be described in detail based on the drawings. FIG. 1 and FIG. 2 show the first embodiment, FIG. 3 and FIG. 4 show the second embodiment, and FIG. 5 and FIG. 6 show the third embodiment of the high-pressure automatic diaphragm valve of the present invention in this embodiment. Show.
　図１、図２に示す本発明の第１実施形態では、バルブ用アクチュエータ（以下、アクチュエータという。）１ａは、ケーシング２ａとこのケーシング２ａを被蓋するためのベース体３とを有するボデー４を備え、このボデー４内に、テーパ面状部５を形成したテーパ面状部面６、固定ディスク７に形成されたテーパ面からなる固定ディスク面８、移動部材であるボール９を有する倍力機構１０を備えている。さらに、アクチュエータ１ａには、弁駆動用出力軸部１１、ディスク１２が設けられ、このアクチュエータ１ａにより、ダイヤフラム１３を押圧可能になっている。 In the first embodiment of the present invention shown in FIGS. 1 and 2, a valve actuator (hereinafter referred to as an actuator) 1a includes a body 4 having a casing 2a and a base body 3 for covering the casing 2a. A booster mechanism having a tapered surface portion 6 formed with a tapered surface portion 5, a fixed disk surface 8 formed of a tapered surface formed on the fixed disk 7, and a ball 9 as a moving member. 10 is provided. Further, the actuator 1a is provided with a valve drive output shaft portion 11 and a disc 12, and the diaphragm 13 can be pressed by the actuator 1a.
　アクチュエータ１ａは、ピストン１４の背面に取付けたスプリング１５の弾発力により、推力部材１６がダイヤフラム１３を閉止する構造であって、スプリング１５の推力を倍力機構１０により出力軸部１１に拡大して出力する構造のノーマリークローズタイプの空気圧作動アクチュエータとして構成されている。 The actuator 1 a has a structure in which the thrust member 16 closes the diaphragm 13 by the elastic force of the spring 15 attached to the back surface of the piston 14, and the thrust of the spring 15 is expanded to the output shaft portion 11 by the booster mechanism 10. It is configured as a normally closed type pneumatic actuator with a structure that outputs in the same manner.
　倍力機構１０は、スプリング１５が推力部材１６を介してダイヤフラム１３を押圧する力を拡大するための機構である。この倍力機構１０には、テーパ面状部面６の内側に設けられ、出力軸部１１の上部に設けたディスク１２面上のボール載置部１７に複数個のボール９が配置され、これらのボール９が固定ディスク面８とテーパ面状部面６との間に挟持されることで構成されている。ケーシング２ａとベース体３とは、密封状態で螺着されてアクチュエータ１ａとして一体化される。ボール９は、例えば、鋼球よりなり、倍力機構１０の内部に複数個配置される。ボール９は適宜数であればよいが、少なくとも３個以上設けることが好ましく、例えば、８～１２個程度とするとよい。この場合、出力軸部１１と固定ディスク７とが安定した状態になる。 The booster mechanism 10 is a mechanism for expanding the force with which the spring 15 presses the diaphragm 13 via the thrust member 16. In this booster mechanism 10, a plurality of balls 9 are disposed on a ball mounting portion 17 on the surface of the disk 12 provided on the inside of the tapered surface portion surface 6 and provided on the upper portion of the output shaft portion 11. The ball 9 is sandwiched between the fixed disk surface 8 and the tapered surface portion 6. The casing 2a and the base body 3 are screwed in a sealed state and integrated as an actuator 1a. The balls 9 are made of, for example, steel balls, and a plurality of balls 9 are arranged inside the booster mechanism 10. The number of balls 9 may be an appropriate number, but it is preferable to provide at least 3 balls, for example, about 8 to 12 balls. In this case, the output shaft portion 11 and the fixed disk 7 are in a stable state.
　固定ディスク７は、シャフト１９を介してアクチュエータ１ａの上部に固定される。その際、固定ディスク７は、シャフト１９に形成された雄ねじ部２０とカバー２２に形成された雌ねじ部２１との螺着により出力軸部１１と対向するように配置される。この螺着構造によりシャフト１９を上下に移動してその位置を調整でき、固定ディスク７の位置を調整可能になっている。 The fixed disk 7 is fixed to the upper part of the actuator 1 a through the shaft 19. At that time, the fixed disk 7 is disposed so as to face the output shaft portion 11 by screwing the male screw portion 20 formed on the shaft 19 and the female screw portion 21 formed on the cover 22. With this screwing structure, the shaft 19 can be moved up and down to adjust its position, and the position of the fixed disk 7 can be adjusted.
　シャフト１９の内部には、アクチュエータ１ａの外部と、推力部材１６とベース体３との間を連通する吸排気口２３が形成されている。この吸排気口２３を介してアクチュエータ１ａの外部よりピストン１４とシリンダ２４との間のエアー操作室２５内に圧縮エアーが供給可能になっている。また、エアー操作室内のエアーの排気も、この吸排気口２３からなされる。 Inside the shaft 19, an intake / exhaust port 23 that communicates between the outside of the actuator 1 a and the thrust member 16 and the base body 3 is formed. Compressed air can be supplied into the air operation chamber 25 between the piston 14 and the cylinder 24 from the outside of the actuator 1 a via the intake / exhaust port 23. Further, the air in the air operation chamber is also exhausted from the intake / exhaust port 23.
　推力部材１６は略円筒状に形成され、この１個の推力部材１６がケーシング２ａ内に往復移動可能に収納されており、内外周側には、Ｏリング２７が装着されている。推力部材１６は、本例では１段であるが、複数段でもよい。 The thrust member 16 is formed in a substantially cylindrical shape, and this one thrust member 16 is accommodated in the casing 2a so as to be reciprocally movable, and an O-ring 27 is mounted on the inner and outer peripheral sides. The thrust member 16 has one stage in this example, but may have a plurality of stages.
　出力軸部１１は、ダイヤフラムピース２９の上部に配設され、このダイヤフラムピース２９はアクチュエータ１ａに取付けたバルブ３０のダイヤフラム１３に直接接触して駆動させるために設けられている。出力軸部１１の固定ディスク７との対向側にはディスク１２が設けられ、このディスク１２面上にはボール載置部１７が形成されている。出力軸部１１の下部には軸部３１が形成され、この軸部３１は、ベース体３に形成された取付穴３２に挿入されており、これにより出力軸部１１全体がベース体３に対して駆動自在になっている。出力軸部１１とベース体３との間にはコイルスプリング３３が装着されている。出力軸部１１は、コイルスプリング３３により、図１において上方向に弾発付勢されている。軸部３１の外周にはＯリング３４が装着され、このＯリング３４により軸部３１とベース体３との間がシールされる。 The output shaft portion 11 is disposed on the upper portion of the diaphragm piece 29, and the diaphragm piece 29 is provided to directly contact and drive the diaphragm 13 of the valve 30 attached to the actuator 1a. A disk 12 is provided on the opposite side of the output shaft portion 11 to the fixed disk 7, and a ball mounting portion 17 is formed on the surface of the disk 12. A shaft portion 31 is formed in the lower portion of the output shaft portion 11, and this shaft portion 31 is inserted into a mounting hole 32 formed in the base body 3, whereby the output shaft portion 11 as a whole is connected to the base body 3. And can be driven freely. A coil spring 33 is mounted between the output shaft portion 11 and the base body 3. The output shaft portion 11 is elastically biased upward by a coil spring 33 in FIG. An O-ring 34 is attached to the outer periphery of the shaft portion 31, and the space between the shaft portion 31 and the base body 3 is sealed by the O-ring 34.
　ベース体３には、前述したように出力軸部１１の軸部３１が挿入可能な取付穴３２が形成され、この取付穴３２により、出力軸部１１が上下方向に案内される。ベース体３のケーシング側外周にはオネジ部３５が形成され、このオネジ部３５は、ケーシング２ａに形成されたメネジ部３６とシール部材３７を介して密封シール可能に螺着接合されている。ベース体３のバルブ装着側には雄螺子３８が形成され、この雄螺子３８を介してアクチュエータ１ａがバルブ３０に着脱される。 As described above, the base body 3 has the mounting hole 32 into which the shaft portion 31 of the output shaft portion 11 can be inserted, and the output shaft portion 11 is guided in the vertical direction by the mounting hole 32. A male screw part 35 is formed on the casing side outer periphery of the base body 3, and this male screw part 35 is screwed and joined via a female screw part 36 formed in the casing 2 a and a seal member 37 so as to be hermetically sealed. A male screw 38 is formed on the valve mounting side of the base body 3, and the actuator 1 a is attached to and detached from the valve 30 through the male screw 38.
　バルブ３０はダイヤフラム弁であり、図１、図２、図３、図５に示した構造は、その一例である。このバルブ３０は、一次側流路３９、二次側流路４０を有する弁箱４１、ダイヤフラム１３、弁座シート４２、ダイヤフラムピース２９、ボンネット４３を有している。ダイヤフラム１３は、弁箱４１の所定位置に配設され、その上部に押圧用の押え部材としてのダイヤフラムピース２９が駆動自在にボンネット４３により取り付けられている。バルブ３０のアクチュエータ１ａとの接続側には、雄螺子３８と螺合可能な雌螺子４４が形成され、この雌螺子４４と雄螺子３８とを螺合させることにより、内部に倍力機構１０を組み込んだアクチュエータ１ａとバルブ３０とを着脱できる。 The valve 30 is a diaphragm valve, and the structures shown in FIGS. 1, 2, 3, and 5 are examples. The valve 30 includes a valve box 41 having a primary flow path 39 and a secondary flow path 40, a diaphragm 13, a valve seat 42, a diaphragm piece 29, and a bonnet 43. The diaphragm 13 is disposed at a predetermined position of the valve box 41, and a diaphragm piece 29 as a pressing member for pressing is attached to the upper portion of the diaphragm 13 by a bonnet 43 so as to be driven. A female screw 44 that can be screwed with the male screw 38 is formed on the connection side of the valve 30 with the actuator 1a, and the female screw 44 and the male screw 38 are screwed together so that the booster mechanism 10 is provided inside. The incorporated actuator 1a and the valve 30 can be attached and detached.
　ダイヤフラムピース２９は、アクチュエータ１ａの出力軸部１１の軸方向への出力により駆動する。このダイヤフラムピース２９の駆動によってダイヤフラム１３が弁座シート４２に接離し、一次側流路３９と二次側流路４０とが開閉可能になる。高圧用バルブでは、ダイヤフラムピース２９が弁座シート４２を押圧する力は、バルブのサイズによって２０００Ｎ程度から１００００Ｎ程度に及ぶ。 The diaphragm piece 29 is driven by the output in the axial direction of the output shaft portion 11 of the actuator 1a. By driving the diaphragm piece 29, the diaphragm 13 comes into contact with and separates from the valve seat 42, and the primary flow path 39 and the secondary flow path 40 can be opened and closed. In the high-pressure valve, the force with which the diaphragm piece 29 presses the valve seat 42 ranges from about 2000N to about 10,000N depending on the size of the valve.
　本例においては、推力部材１６の外周側面の適宜位置には、可動側係止部４５として断面が半円形状の係止溝４５ａが設けられ、アクチュエータ１ａのケーシング２ａには、固定側係止部４６として係止穴部４６ａが、推力部材１６が係止位置となったとき前記係止溝４５ａと前記係止穴部４６ａの位置が一致するように設けられる。図１においては、固定側係止部４６が２か所設けられて何れか１か所に保持ピン４７ａ一本を挿入している状態を示しているが、より安定化のため双方に２本挿入することもできる。また、前記係止穴部４６ａをケーシング２ａに複数箇所設けた上で、複数本の保持ピン４７ａを挿入して推力部材１６の保持をしてもよい。 In this example, a locking groove 45a having a semicircular cross section is provided as a movable side locking portion 45 at an appropriate position on the outer peripheral side surface of the thrust member 16, and a fixed side locking is provided in the casing 2a of the actuator 1a. A locking hole 46a is provided as the portion 46 so that the positions of the locking groove 45a and the locking hole 46a coincide when the thrust member 16 is in the locking position. Although FIG. 1 shows a state in which two fixed-side locking portions 46 are provided and one holding pin 47a is inserted into any one of them, two are provided on both sides for more stability. It can also be inserted. Further, the thrust member 16 may be held by inserting a plurality of holding pins 47a after providing the locking hole portions 46a at a plurality of locations in the casing 2a.
　さらに、可動側係止部４５を、図示しない係止孔４５ａとすることもできる。係止孔４５ａは、推力部材１６の外周側面に円筒形アクチュエータ１ａの求心方向へあけられた孔であり、アクチュエータ１ａのケーシング２ａには、固定側係止部４６として係止穴部４６ａが、推力部材１６が係止位置となったとき前記係止孔４５ａと前記係止穴部４６ａの位置が一致するように設けられる。この場合、推力部材１６には、図示しないが、回転方向の力が作用して回転することで係止穴部４６ａと係止孔４５ａの位置が円周方向にずれることを防止するための適当な回転防止手段を設けることが望ましい。 Furthermore, the movable side locking portion 45 can be a locking hole 45a (not shown). The locking hole 45a is a hole formed in the outer circumferential side surface of the thrust member 16 in the centripetal direction of the cylindrical actuator 1a. The casing 2a of the actuator 1a has a locking hole 46a as a fixed-side locking portion 46. When the thrust member 16 is in the locking position, the locking hole 45a and the locking hole 46a are provided so that the positions thereof coincide with each other. In this case, although not shown in the drawing, the thrust member 16 is appropriately applied to prevent the positions of the locking hole portion 46a and the locking hole 45a from being shifted in the circumferential direction due to the rotation in the rotational direction. It is desirable to provide an anti-rotation means.
　本例では、係止溝４５ａは推力部材１６の外周側面を一周して切り欠いた溝として形成されており、保持部材４７としての保持ピン４７ａの先端部５６が、係止穴部４６ａを貫通して係止溝４５ａに着脱可能に係合できる。また、係止孔４５ａは推力部材１６の外周側面に、円筒形アクチュエータ１ａの求心方向へ削られた孔として形成されており、保持部材４７としての保持ピン４７ａの先端部５６が、係止穴部４６ａを貫通して係止孔４５ａに着脱可能に嵌合できる。 In this example, the locking groove 45a is formed as a groove cut out around the outer peripheral side surface of the thrust member 16, and the tip 56 of the holding pin 47a as the holding member 47 penetrates the locking hole 46a. Thus, the engaging groove 45a can be detachably engaged. The locking hole 45a is formed in the outer peripheral side surface of the thrust member 16 as a hole cut in the centripetal direction of the cylindrical actuator 1a, and the distal end portion 56 of the holding pin 47a as the holding member 47 is formed in the locking hole. The portion 46a can be detachably fitted into the locking hole 45a.
　推力部材１６に設けられる係止溝４５ａ又は係止孔４５ａの位置は、推力部材１６の駆動やバルブの機能に支障のない位置であればよく、推力部材１６以外の位置であっても、実施に応じて任意の位置にとることができる。 The position of the locking groove 45a or the locking hole 45a provided in the thrust member 16 may be a position that does not hinder the driving of the thrust member 16 or the function of the valve. It can be taken at any position depending on the situation.
　推力部材１６の係止位置は、推力部材１６がダイヤフラム１３を介して弁座シート４２を押圧する位置以外であれば、任意の位置にとることができる。ただし、係止位置は、ピストンの最大変位位置である上死点であることが望ましい。 The locking position of the thrust member 16 can be at any position other than the position where the thrust member 16 presses the valve seat 42 via the diaphragm 13. However, the locking position is preferably the top dead center which is the maximum displacement position of the piston.
　固定側係止部４６としての係止穴部４６ａの位置は、上述した推力部材１６の係止位置における係止溝４５ａの位置と一致する位置に対して、ケーシング２ａの外周側面に設けられる。 The position of the locking hole 46a as the fixed-side locking portion 46 is provided on the outer peripheral side surface of the casing 2a with respect to a position that coincides with the position of the locking groove 45a in the locking position of the thrust member 16 described above.
　保持ピン４７ａは、オペレータが手でつかむ取手部５５と、固定側係止部４６であるケーシング２ａの係止穴部４６ａへ挿入される先端部５６からなる。 The holding pin 47a includes a handle portion 55 that is gripped by an operator and a tip portion 56 that is inserted into the locking hole portion 46a of the casing 2a that is the fixed side locking portion 46.
　次に、図１、図２に基づき、第１実施形態において、保持ピン４７ａを挿通させてピストン１４の可動側係止部４５をケーシング２ａの固定側係止部４６に係止する動作及びその係止を解除する動作を説明する。 Next, based on FIG. 1 and FIG. 2, in the first embodiment, an operation of inserting the holding pin 47a and locking the movable side locking portion 45 of the piston 14 to the fixed side locking portion 46 of the casing 2a and its operation The operation for releasing the lock will be described.
　本例では、推力部材１６の駆動源の一例として、エアー操作室２５と吸排気口２３からなるエアー駆動源を有している。シャフト１９に形成された吸排気口２３より圧縮エアーが供給されると、供給された圧縮エアーは分岐口４８を介してエアー操作室２５へ流入し、これによりエアー操作室２５内部の空気圧が上昇し、スプリング１５による付勢力に打ち勝ってピストン１４を、ダイヤフラム１３の押圧を解除する上方向へ押し上げる。 In this example, as an example of a drive source of the thrust member 16, an air drive source including an air operation chamber 25 and an intake / exhaust port 23 is provided. When compressed air is supplied from the intake / exhaust port 23 formed in the shaft 19, the supplied compressed air flows into the air operation chamber 25 through the branch port 48, thereby increasing the air pressure inside the air operation chamber 25. Then, the urging force of the spring 15 is overcome and the piston 14 is pushed upward to release the pressing of the diaphragm 13.
　推力部材１６は、ピストン１４と連動して駆動する構造となっているため、前記ピストン１４の解除側である上方向移動に連動して、推力部材１６も上方向へ移動し、可動側係止部４５である係止溝４５ａと固定側係止部４６である係止穴部４６ａの位置が一致する係止位置で停止させる。この係止位置は、上述したように、推力部材１６の上死点の位置であり、この位置であることが望ましい。 Since the thrust member 16 is structured to be driven in conjunction with the piston 14, the thrust member 16 also moves upward in conjunction with the upward movement on the release side of the piston 14, and is movable side locked. The locking groove 45a which is the portion 45 and the locking hole portion 46a which is the fixed side locking portion 46 are stopped at the locking position where they coincide. As described above, this locking position is the position of the top dead center of the thrust member 16, and is preferably this position.
　推力部材１６が上方向移動すると、推力部材１６のボール９を介したディスク１２に対するダイヤフラム１３を押圧する下方向への押圧力がなくなり、コイルスプリング３３による上方向への付勢力によってディスク１２は上方向へ付勢される。このため、推力部材１６の上方向移動と連動して、ディスク１２と一体の出力軸部１１も上方向移動して、ダイヤフラムピース２９によるダイヤフラム１３への押圧力がなくなる。 When the thrust member 16 moves upward, there is no downward pressing force of the thrust member 16 pressing the diaphragm 13 against the disk 12 via the ball 9, and the disk 12 is moved upward by the upward biasing force of the coil spring 33. Biased in the direction. For this reason, in conjunction with the upward movement of the thrust member 16, the output shaft portion 11 integrated with the disk 12 also moves upward, and the pressing force to the diaphragm 13 by the diaphragm piece 29 is eliminated.
　ダイヤフラムピース２９がダイヤフラム１３から離間すると、ダイヤフラム１３は、自らの反力により上方向へ変形移動し、弁座シート４２から離間した旧位の形状となる。この形状は、ダイヤフラム１３が弁室内部に取り付けられ外力が作用していないときの形状である。ダイヤフラム１３がこの形状となっているとき、ダイヤフラム１３と弁座シート４２の間の離間距離は、本例においては、０．３ｍｍから０．４ｍｍ程度である。 When the diaphragm piece 29 is separated from the diaphragm 13, the diaphragm 13 is deformed and moved upward by its own reaction force, and becomes an old shape separated from the valve seat 42. This shape is a shape when the diaphragm 13 is attached to the inside of the valve chamber and no external force is applied. When the diaphragm 13 has this shape, the separation distance between the diaphragm 13 and the valve seat 42 is about 0.3 mm to 0.4 mm in this example.
　このようにして推力部材１６が係止位置に停止し弁開となったとき、可動側係止部４５として推力部材１６に設けられた係止溝４５ａと、固定側係止部４６としてケーシング２ａに設けられた係止穴部４６ａの位置が、互いに一致する位置となる。この状態で、保持部材である保持ピン４７ａの先端部５６をケーシング２ａの外方より円筒形アクチュエータ１ａの求心方向へ挿入して、係止穴部４６ａを貫通させて係止溝４５ａへ係合させることで、可動部材である推力部材１６と固定部材であるケーシング２ａを互いに係止させることができるようになる。図１は、このように保持ピン４７ａを挿入して、推力部材１６を係止位置に係止させた状態を示す。 Thus, when the thrust member 16 stops at the locking position and the valve is opened, the locking groove 45a provided in the thrust member 16 as the movable side locking portion 45 and the casing 2a as the fixed side locking portion 46. The positions of the locking hole portions 46a provided in are aligned with each other. In this state, the tip 56 of the holding pin 47a, which is a holding member, is inserted from the outside of the casing 2a in the centripetal direction of the cylindrical actuator 1a, and is engaged with the locking groove 45a through the locking hole 46a. By doing so, the thrust member 16 which is a movable member and the casing 2a which is a fixed member can be locked to each other. FIG. 1 shows a state in which the holding pin 47a is inserted in this manner and the thrust member 16 is locked at the locking position.
　推力部材１６の係止がされた後、エアー操作室２５に供給されているエアーを排気する。操作エアー室２５のエアー排気は、上述したエアー供給の場合と逆に、シャフト１９に形成された分岐口４８からシャフト１９内部を介して吸排気口２３から排気される。エアーが排気されれば、エアー操作室２５内部の気圧がなくなり、スプリング１５によるダイヤフラム１３を押圧する方向への付勢力が推力部材１６に作用するが、上述した保持ピン４７ａの挿入により推力部材１６がケーシング２ａに係止されているため、ダイヤフラム１３が弁座シート４２を押圧することが防止される。 After the thrust member 16 is locked, the air supplied to the air operation chamber 25 is exhausted. Contrary to the case of the air supply described above, air is exhausted from the intake / exhaust port 23 through the branch port 48 formed in the shaft 19 through the inside of the shaft 19. When the air is exhausted, the air pressure inside the air operation chamber 25 disappears, and the urging force in the direction of pressing the diaphragm 13 by the spring 15 acts on the thrust member 16, but the thrust member 16 is inserted by the holding pin 47a described above. Is locked to the casing 2 a, so that the diaphragm 13 is prevented from pressing the valve seat 42.
　次いで、上述のように保持ピン４７ａが挿入されて推力部材１６が係止されている本例において、推力部材１６の係止を解除するためには、保持ピン４７ａを外方より取り外せばよい。保持ピン４７ａの取手部５５を手でつかんでケーシング２ａから引き抜くと、推力部材１６のケーシング２ａへの係止が解除される。 Next, in this example in which the holding pin 47a is inserted and the thrust member 16 is locked as described above, the holding pin 47a may be removed from the outside in order to unlock the thrust member 16. When the handle 55 of the holding pin 47a is grasped by hand and pulled out from the casing 2a, the thrust member 16 is unlocked from the casing 2a.
　この場合、上記のように保持ピン４７ａを引き抜いて推力部材の係止を解除する前に、予め操作エアー室２５に所定量のエアーを供給して空気圧を与えスプリング１５による付勢力を弱めることで、保持ピン４７ａを外方より確実に引き抜くことができるようにすることもできる。 In this case, before pulling out the holding pin 47a and releasing the locking of the thrust member as described above, a predetermined amount of air is supplied to the operating air chamber 25 in advance to give air pressure to weaken the urging force by the spring 15. The holding pin 47a can be reliably pulled out from the outside.
　係止が解除されれば、スプリング１５の付勢力によって、ピストン１４がダイヤフラム１３を押圧する方向へ付勢されて駆動し、それに連動して推力部材１６も駆動し、ボール９を介して弁駆動用出力軸部１１も駆動し、ダイヤフラムピース２９がダイヤフラム１３を押圧して弁座シート４２に圧着され、図２に示す弁閉状態となる。このようにして、バルブ３０の使用が開始される。 When the locking is released, the piston 14 is urged and driven in the direction of pressing the diaphragm 13 by the urging force of the spring 15, and the thrust member 16 is also driven in conjunction with the urged force. The output shaft portion 11 is also driven, and the diaphragm piece 29 presses the diaphragm 13 and is pressure-bonded to the valve seat 42, so that the valve is closed as shown in FIG. In this way, the use of the valve 30 is started.
　なお本例の場合、保持ピン４７ａの取手部５５が、ケーシング２ａ表面に対して垂直方向に突出しているので、オペレータの手による引き抜き又は挿入操作が行い易い。 In the case of this example, since the handle portion 55 of the holding pin 47a protrudes in the vertical direction with respect to the surface of the casing 2a, it can be easily pulled out or inserted by the operator.
　図３は、本発明の第２実施形態を示す。第２実施形態においては、第１実施形態と同一部分は同一符号を示し、以降の実施形態においては説明を省略する。 FIG. 3 shows a second embodiment of the present invention. In the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted in the following embodiments.
　本例においては、推力部材１６の外周側面の適宜位置には、可動側係止部４５として断面が半円形状の係止溝４５ａが設けられ、アクチュエータ１ａのケーシング２ａには、固定側係止部４６として係止穴部４６ｂが、一対の互いに対抗する位置に２か所設けられ、その一対が２組設けられている。推力部材１６が係止位置となったとき、前記係止溝４５ａと前記２組の係止穴部４６ｂの位置が一致する。図３、図４においては、固定側係止部４６は、２組の係止穴部４６ｂが４か所設けられ、何れか１組に保持ピン４７ｂ一本を挿入し他方の係止穴部４６ｂから貫通させている状態を示しているが、より安定化のために双方の組に２本挿入して貫通させることもできる。 In this example, a locking groove 45a having a semicircular cross section is provided as a movable side locking portion 45 at an appropriate position on the outer peripheral side surface of the thrust member 16, and a fixed side locking is provided in the casing 2a of the actuator 1a. As the portion 46, two locking hole portions 46b are provided at a pair of mutually opposing positions, and two sets of the pair are provided. When the thrust member 16 is in the locking position, the positions of the locking groove 45a and the two sets of locking holes 46b coincide. 3 and 4, the fixed side locking portion 46 has two sets of locking hole portions 46b, and one holding pin 47b is inserted into any one set, and the other locking hole portion. Although the state which has penetrated from 46b is shown, it can also be penetrated by inserting two in both sets for further stabilization.
　本例では、係止溝４５ａは推力部材１６の外周側面を一周して切り欠いた溝として形成されており、保持部材４７としての保持ピン４７ｂの先端部５６が、一対の係止穴部４６ｂの一方を貫通し、係止溝４５ａに沿って推力部材１６と係合しつつ進入し、他方の係止穴部４６ｂから貫通して突出している。本例によれば、保持ピン４７ｂと推力部材１６との接触面積は、図４に示されるように、第１実施形態における接触面積よりも大きい。また、保持ピン４７ｂは、ケーシング２と２か所の係止穴部４６ｂで貫通した状態で保持されているので、第１実施形態における推力部材１６の係止と比較して、推力部材１６の保持を、より安定強固のものとすることができる。 In this example, the locking groove 45a is formed as a groove cut around the outer peripheral side surface of the thrust member 16, and the distal end portion 56 of the holding pin 47b as the holding member 47 has a pair of locking holes 46b. One of these is penetrated, it approachs along the latching groove 45a, engaging with the thrust member 16, and it penetrates and protrudes from the other latching hole part 46b. According to this example, the contact area between the holding pin 47b and the thrust member 16 is larger than the contact area in the first embodiment, as shown in FIG. Further, since the holding pin 47b is held in a state of penetrating through the casing 2 and the two locking holes 46b, the thrust pin 16 of the thrust member 16 is compared with the locking of the thrust member 16 in the first embodiment. The holding can be made more stable and strong.
　本例では、係止溝４５ａは推力部材１６の外周側面を一周して切り欠いた溝として形成されており、保持部材４７としての保持ピン４７ｂの先端部５６が、１組の係止穴部４６ｂの双方を貫通して係止溝４５ａに着脱可能に係合できる。 In this example, the locking groove 45a is formed as a groove cut out around the outer peripheral side surface of the thrust member 16, and the distal end portion 56 of the holding pin 47b as the holding member 47 is a set of locking hole portions. 46b can be detachably engaged with the locking groove 45a.
　推力部材１６に設けられる係止溝４５ａの位置は、推力部材１６の駆動やバルブの機能に支障のない位置であればよく、推力部材１６以外の位置であっても、実施に応じて任意の位置にとることができる。 The position of the locking groove 45a provided in the thrust member 16 may be a position that does not hinder the driving of the thrust member 16 and the function of the valve, and any position other than the thrust member 16 may be used depending on the implementation. Can be taken in position.
　推力部材１６の係止位置は、推力部材１６がダイヤフラム１３を介して弁座シート４２を押圧する位置以外であれば、任意の位置にとることができる。ただし、係止位置は、ピストンの最大変位位置である上死点であることが望ましい。 The locking position of the thrust member 16 can be at any position other than the position where the thrust member 16 presses the valve seat 42 via the diaphragm 13. However, the locking position is preferably the top dead center which is the maximum displacement position of the piston.
　固定側係止部４６としての係止穴部４６ｂの位置は、上述した推力部材１６の係止位置における係止溝４５ａの位置と一致する位置に対して、ケーシング２ａの外周側面に設けられる。 The position of the locking hole 46b as the fixed-side locking portion 46 is provided on the outer peripheral side surface of the casing 2a with respect to a position that coincides with the position of the locking groove 45a in the locking position of the thrust member 16 described above.
　本例における保持ピン４７ｂを挿通させて推力部材１６の可動側係止部４５をケーシング２ａの固定側係止部４６に係止する動作及びその係止を解除する動作は、上述した第１実施形態と同様である。 The operation of inserting the holding pin 47b in this example and locking the movable side locking portion 45 of the thrust member 16 to the fixed side locking portion 46 of the casing 2a and the operation of releasing the locking are the first embodiment described above. It is the same as the form.
　図５は、本発明の第３実施形態を示す。本例においても、第１実施形態と同一部分は同一符号を示し、以降の実施形態においては説明を省略する。 FIG. 5 shows a third embodiment of the present invention. Also in this example, the same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted in the following embodiments.
　本例においては、推力部材１６の外周側面の適宜位置には、可動側係止部４５として円筒形アクチュエータ１ａの求心方向以外の方向へ直線状にあけられた孔又は貫通させられた孔である係止孔４５ｃが設けられ、アクチュエータ１ａのケーシング２ａには、固定側係止部４６として係止穴部４６ｃが、前記係止孔４５ｃがあけられた孔の場合は１か所、前記係止孔４５ｃが貫通させられた孔の場合は一対の互いに対抗する位置に２か所設けられている。推力部材１６が係止位置となったとき、前記係止孔４５ｃの開口部５０と前記１か所又は１組の係止穴部４６ｃの位置が一致する。図５、図６においては、貫通させられた孔である係止孔４５ｃが１か所設けられ係止穴部４６ｃが１組設けられて保持ピン４７ｃ一本を挿入して推力部材１６及びケーシング２ａを貫通している状態を示している。 In the present example, at the appropriate position on the outer peripheral side surface of the thrust member 16, there is a hole that is linearly opened or penetrated in a direction other than the centripetal direction of the cylindrical actuator 1a as the movable side locking portion 45. A locking hole 45c is provided, and the casing 2a of the actuator 1a has a locking hole portion 46c as the fixed-side locking portion 46. In the case where the locking hole 45c is a hole, the locking hole 45c is provided at one location. In the case of a hole through which the hole 45c is penetrated, two holes are provided at a pair of opposing positions. When the thrust member 16 is in the locking position, the opening 50 of the locking hole 45c and the position of the one or one set of locking holes 46c coincide. 5 and 6, one locking hole 45c, which is a through-hole, is provided and one set of locking hole 46c is provided, and one holding pin 47c is inserted to insert the thrust member 16 and the casing. The state which has penetrated 2a is shown.
　前記係止孔４５ｃがあけられた孔である場合は、保持ピン４７ｃの先端部５６が、前記係止穴部４６ｃを貫通して保持ピン４７ｃと着脱自在に嵌合することができ、前記係止孔４５ｃが貫通させられた孔である場合は、保持ピン４７ｃの先端部５６が、１組の係止穴部４６ｃの一方を貫通して保持ピン４７ｃと着脱自在に嵌合することができる。この場合は先端部５６を係止穴部４６ｃの他方からさらに貫通させて外方に突出させてもよいし、貫通させずに新たな保持ピンの先端部５６を前記係止穴部４６ｃの他方に貫通させて、保持ピン４７ｃを前記係止孔４５ｃと着脱自在に嵌合させてもよい。 When the locking hole 45c is a hole, the tip 56 of the holding pin 47c can be detachably fitted to the holding pin 47c through the locking hole 46c. When the stop hole 45c is a through-hole, the distal end portion 56 of the holding pin 47c can be detachably fitted to the holding pin 47c through one of the set of locking hole portions 46c. . In this case, the tip 56 may be further penetrated from the other of the locking holes 46c and protrude outward, or the new holding pin tip 56 may be inserted through the other of the locking holes 46c without penetrating. The holding pin 47c may be detachably fitted to the locking hole 45c.
　さらに、前記係止孔４５ｃは２か所以上設けてもよく、それに対応して前記係止穴部４６ｃも複数箇所設け保持ピン４７ｃも複数本用いてもよい。 Further, two or more locking holes 45c may be provided, and a plurality of the locking hole portions 46c and a plurality of holding pins 47c may be used correspondingly.
　また本例においては、推力部材１６には、図示しないが、回転方向の力が作用して回転することで係止穴部４６ｃと係止孔４５ｃの位置が円周方向にずれることを防止するための適当な回転防止手段を設けることが望ましい。 Further, in this example, although not shown in the figure, the thrust member 16 is prevented from being displaced in the circumferential direction by rotating in the rotational direction by applying a force in the rotational direction. It is desirable to provide suitable anti-rotation means for this purpose.
　本例では、推力部材１６の係止孔４５ｃに保持ピン４７ｃの先端部５６が挿入又は貫通されているので、保持ピン４７ｃと推力部材１６との接触面積は第２実施形態における接触面積よりも大きいため、第２実施形態における推力部材１６の係止と比較して、推力部材１６の保持を、より安定強固のものとすることができる。特に保持ピン４７ｃの先端部が推力部材１６を貫通している場合は、その効果が大きい。 In this example, since the tip 56 of the holding pin 47c is inserted or penetrated into the locking hole 45c of the thrust member 16, the contact area between the holding pin 47c and the thrust member 16 is larger than the contact area in the second embodiment. Since it is large, the thrust member 16 can be held more stably and firmly as compared with the locking of the thrust member 16 in the second embodiment. In particular, when the tip of the holding pin 47c passes through the thrust member 16, the effect is great.
　推力部材１６に設けられる係止孔４５ｃの位置は、推力部材１６の駆動やバルブの機能に支障のない位置であればよく、推力部材１６以外の位置であっても、実施に応じて任意の位置にとることができる。 The position of the locking hole 45c provided in the thrust member 16 may be a position that does not hinder the drive of the thrust member 16 and the function of the valve, and any position other than the thrust member 16 may be used depending on the implementation. Can be taken in position.
　推力部材１６の係止位置は、推力部材１６がダイヤフラム１３を介して弁座シート４２を押圧する位置以外であれば、任意の位置にとることができる。ただし、係止位置は、ピストンの最大変位位置である上死点であることが望ましい。 The locking position of the thrust member 16 can be at any position other than the position where the thrust member 16 presses the valve seat 42 via the diaphragm 13. However, the locking position is preferably the top dead center which is the maximum displacement position of the piston.
　固定側係止部４６としての係止穴部４６ｃの位置は、上述した推力部材１６の係止位置における係止孔４５ｃの開口部５０の位置と一致する位置に対して、ケーシング２ａの外周側面に設けられる。 The position of the locking hole portion 46c as the fixed-side locking portion 46 is the outer peripheral side surface of the casing 2a with respect to the position that coincides with the position of the opening portion 50 of the locking hole 45c at the locking position of the thrust member 16 described above. Is provided.
　本例における保持ピン４７ｃを挿通させて推力部材１６の可動側係止部４５をケーシング２ａの固定側係止部４６に係止する動作及びその係止を解除する動作は、上述した第１実施形態と同様である。 The operation of inserting the holding pin 47c in this example and locking the movable side locking portion 45 of the thrust member 16 to the fixed side locking portion 46 of the casing 2a and the operation of releasing the locking are the first embodiment described above. It is the same as the form.
　図７、図８は第４実施形態を、図９、１０は第５実施形態を示している。これらの実施形態は、上記実施形態とは別の構造のアクチュエータ１ｂへ本発明を適用した高圧用自動ダイヤフラムバルブの実施形態である。 7 and 8 show the fourth embodiment, and FIGS. 9 and 10 show the fifth embodiment. These embodiments are high-pressure automatic diaphragm valves in which the present invention is applied to an actuator 1b having a structure different from that of the above-described embodiment.
　図７は、本発明の第４実施形態を示す。図７の中央縦線より左側は、保持ピンが挿入されピストンが係止された状態を、中央縦線より右側は、保持ピンが引き抜かれてピストンの係止が解除された状態を示す。 FIG. 7 shows a fourth embodiment of the present invention. The left side of the central vertical line in FIG. 7 shows a state where the holding pin is inserted and the piston is locked, and the right side of the central vertical line shows a state where the holding pin is pulled out and the locking of the piston is released.
　アクチュエータ１ｂは、ケーシング２ｂ内に設けられて駆動するピストン１４を付勢するスプリング１５を有し、上記実施形態と同様に、弁体であるダイヤフラムを押圧する下方向へピストン１４を付勢している。 The actuator 1b has a spring 15 that energizes a piston 14 that is provided in the casing 2b and that drives the actuator 1b, and energizes the piston 14 in a downward direction that presses a diaphragm that is a valve body, as in the above embodiment. Yes.
　本例においては、ピストン１４の適宜位置には、可動側係止部４５として係止孔４５ｄが一対の互いに対抗する位置に２か所設けられ、アクチュエータ１ｂのケーシング２ｂには、固定側係止部４６として係止穴部４６ｄが一対の互いに対抗する位置に２か所設けられ、推力部材１６が係止位置となったとき、前記係止孔４５ｄと前記係止穴部４６ｄの位置が一致するように設ける。図７においては、固定側係止部４６は、本例では２か所設けて、その一方に保持部材４７である保持ピン４７ｄを１本挿入しているが、ピストン１４の係止をより安定させるため双方の固定側係止部４６に保持ピン４７ｄを２本挿入してもよい。 In this example, two engagement holes 45d are provided at appropriate positions of the piston 14 as a movable-side engagement portion 45 at a pair of opposing positions, and the casing 2b of the actuator 1b has a fixed-side engagement. When the locking holes 46d are provided at two positions opposite to each other as the portions 46, and the thrust member 16 is in the locking position, the positions of the locking holes 45d and the locking holes 46d coincide. Provide to do. In FIG. 7, there are two fixed side locking portions 46 in this example, and one holding pin 47d, which is a holding member 47, is inserted into one of them, but the locking of the piston 14 is more stable. For this reason, two holding pins 47d may be inserted into both fixed-side locking portions 46.
　本例においても、上述した第１実施形態と同様に、ピストン１４の位置が係止位置となっているときに、保持部材である保持ピン４７ｄの先端部５６をケーシング２ｂの外方より円筒形アクチュエータ１ｂの求心方向へ挿入して、係止穴部４６ｄを貫通させて係止孔４５ｄへ嵌合させることで、可動部材であるピストン１４と固定部材であるケーシング２ｂを互いに係止させることができるようになる。図８は、このように保持ピン４７ｄを２本挿入して、ピストン１４を係止位置に係止させた状態を示す。また、ピストン１４の係止を解除するためには、保持ピン４７ｄを外方より取り外せばよい。保持ピン４７ｄの取手部５５を手でつかんでケーシング２ｂから引き抜くと、ピストン１４のケーシング２ｂへの係止が解除される。 Also in this example, as in the first embodiment described above, when the position of the piston 14 is the locking position, the tip 56 of the holding pin 47d, which is a holding member, is cylindrical from the outside of the casing 2b. By inserting the actuator 1b in the centripetal direction, passing through the locking hole 46d and fitting it into the locking hole 45d, the movable piston 14 and the casing 2b can be locked together. become able to. FIG. 8 shows a state in which two holding pins 47d are thus inserted and the piston 14 is locked at the locking position. Further, in order to unlock the piston 14, the holding pin 47d may be removed from the outside. When the handle 55 of the holding pin 47d is grasped by hand and pulled out from the casing 2b, the locking of the piston 14 to the casing 2b is released.
　ピストン１４に設けられる係止孔４５ｄの位置は、ピストン１４の駆動やバルブの機能に支障のない位置であればよく、ピストン１４以外の位置であっても、実施に応じて任意の位置にとることができる。 The position of the locking hole 45d provided in the piston 14 may be any position that does not hinder the driving of the piston 14 and the function of the valve. be able to.
　ピストン１４の係止位置は、ピストン１４がダイヤフラムを介して弁座シートを押圧する位置以外であれば、任意の位置にとることができる。ただし、係止位置は、ピストンの最大変位位置である上死点であることが望ましい。 The engagement position of the piston 14 can be set at any position other than the position where the piston 14 presses the valve seat through the diaphragm. However, the locking position is preferably the top dead center which is the maximum displacement position of the piston.
　固定側係止部４６としての係止穴部４６ｄの位置は、上述したピストン１４の係止位置における係止孔４５ｄの開口部５０の位置と一致する位置に対して、ケーシング２ｂの外周側面に設けられる。 The position of the locking hole 46d as the fixed-side locking portion 46 is on the outer peripheral side surface of the casing 2b with respect to the position that coincides with the position of the opening 50 of the locking hole 45d at the locking position of the piston 14 described above. Provided.
　本例によれば、図８に示されるように２本の保持ピンでピストン１４を係止しているので、１本の保持ピン４７ａで推力部材１６を保持する第１実施形態における場合と比較して、保持ピンに加わるピストンの付勢力が分散されバランスよく保持できることから、ピストン１４やケーシング２ｂの形状等を傷めずより安定長期の係止ができる。また、保持ピン４７ｄを２本有するので不意に一方の１本が外れても、他方の１本の保持ピンでピストン１４の係止が持続できる。 According to this example, as shown in FIG. 8, the piston 14 is locked by the two holding pins, so that the thrust member 16 is held by the one holding pin 47a as compared with the first embodiment. And since the urging | biasing force of the piston added to a holding | maintenance pin is disperse | distributed and it can hold | maintain with sufficient balance, more stable long-term latching can be performed, without damaging the shape of the piston 14 or the casing 2b. Further, since the two holding pins 47d are provided, even if one of the holding pins 47 is unexpectedly removed, the other one holding pin can keep the piston 14 locked.
　図９は、第５実施形態を示す。中央縦線より左側は、保持ピン５４が挿入されピストン５２が係止された状態を、中央縦線より右側は、保持ピン５４が引き抜かれてピストン５２の係止が解除された状態を示す。本例においては、第４実施形態と同一部分は同一符号を示し、説明を省略する。 FIG. 9 shows a fifth embodiment. The left side from the central vertical line shows a state where the holding pin 54 is inserted and the piston 52 is locked, and the right side from the central vertical line shows a state where the holding pin 54 is pulled out and the locking of the piston 52 is released. In this example, the same parts as those in the fourth embodiment are denoted by the same reference numerals, and description thereof is omitted.
　本例においては、ピストン１４の適宜位置には、可動側係止部４５として半円形状にピストン１４の外周側面を切り欠いた係止溝４５ｅが設けられ、アクチュエータ１ｂのケーシング２ｂには、固定側係止部４６として係止穴部４６ｅが一対の互いに対抗する位置に２か所設けられ、その一対が２組設けられており、ピストン１４が係止位置となったとき、前記係止溝４５ｅと前記係止穴部４６ｅの位置が一致するように設ける。図９においては、固定側係止部４６は、本例では２組設けて、その一方に保持部材４７である保持ピン４７ｅを１本挿入しているが、ピストン１４の係止をより安定させるため双方の固定側係止部４６に保持ピン４７ｅを２本挿入してもよい。 In this example, a locking groove 45e in which the outer peripheral side surface of the piston 14 is cut out in a semicircular shape as a movable side locking portion 45 is provided at an appropriate position of the piston 14, and is fixed to the casing 2b of the actuator 1b. As the side locking portion 46, two locking holes 46e are provided at a pair of opposing positions, and two pairs of the locking holes 46e are provided. When the piston 14 is in the locking position, the locking groove 45e is provided so that the positions of the locking holes 46e coincide. In FIG. 9, two sets of fixed side locking portions 46 are provided in this example, and one holding pin 47e, which is a holding member 47, is inserted into one of them, but the locking of the piston 14 is further stabilized. For this reason, two holding pins 47e may be inserted into both fixed-side locking portions 46.
　本例においても、上述した第２実施形態と同様に、ピストン１４の位置が係止位置となっているときに、保持部材である保持ピン４７ｅの先端部５６をケーシング２ｂへ挿入して、係止穴部４６ｅを貫通させて係止溝４５ｅへ係合させることで、可動部材であるピストン１４と固定部材であるケーシング２ｂを互いに係止させることができるようになる。図１０は、このように保持ピン４７ｅを２本挿入して、ピストン１４を係止位置に係止させた状態を示す。また、ピストン１４の係止を解除するためには、保持ピン４７ｅを外方より取り外せばよい。保持ピン４７ｅの取手部５５を手でつかんでケーシング２ｂから引き抜くと、ピストン１４のケーシング２ｂへの係止が解除される。 Also in this example, as in the second embodiment described above, when the position of the piston 14 is the locking position, the distal end portion 56 of the holding pin 47e that is a holding member is inserted into the casing 2b, and The piston 14 that is a movable member and the casing 2b that is a fixed member can be locked with each other by penetrating the stop hole portion 46e and engaging with the locking groove 45e. FIG. 10 shows a state in which two holding pins 47e are thus inserted and the piston 14 is locked at the locking position. Further, in order to unlock the piston 14, the holding pin 47e may be removed from the outside. When the handle 55 of the holding pin 47e is grasped by hand and pulled out from the casing 2b, the locking of the piston 14 to the casing 2b is released.
　ピストン１４に設けられる係止孔４５ｅの位置は、ピストン１４の駆動やバルブの機能に支障のない位置であればよく、ピストン１４以外の位置であっても、実施に応じて任意の位置にとることができる。 The position of the locking hole 45e provided in the piston 14 may be a position that does not hinder the driving of the piston 14 or the function of the valve. be able to.
　ピストン１４の係止位置は、ピストン１４がダイヤフラムを介して弁座シートを押圧する位置以外であれば、任意の位置にとることができる。ただし、係止位置は、ピストンの最大変位位置である上死点であることが望ましい。 The engagement position of the piston 14 can be set at any position other than the position where the piston 14 presses the valve seat through the diaphragm. However, the locking position is preferably the top dead center which is the maximum displacement position of the piston.
　固定側係止部４６としての係止穴部４６ｅの位置は、上述したピストン１４の係止位置における係止溝４５ｅの位置と一致する位置に対して、ケーシング２ｂの外周側面に設けられる。 The position of the locking hole 46e as the fixed-side locking portion 46 is provided on the outer peripheral side surface of the casing 2b with respect to a position that coincides with the position of the locking groove 45e in the locking position of the piston 14 described above.
　本実施形態によれば、図１０に示されるように２本の保持ピンでピストン１４を係止しているので、１本の保持ピン４７ｂ，４７ｃで推力部材１６を保持する第２、第３実施形態における場合と比較して、保持ピンに加わるピストンの付勢力が分散されバランスよく保持できることから、ピストン１４やケーシング２ｂの形状等を傷めずより安定長期の係止ができる。また、保持ピン４７ｅを２本有するので不意に一方の１本が外れても、他方の１本の保持ピンでピストン１４の係止が持続できる。 According to the present embodiment, as shown in FIG. 10, the piston 14 is locked by the two holding pins, so the second and third holding the thrust member 16 by the one holding pins 47 b and 47 c. Compared with the case in the embodiment, since the urging force of the piston applied to the holding pin is dispersed and can be held in a well-balanced state, the piston 14 and the casing 2b can be locked for a longer period without damaging the shape. Further, since the two holding pins 47e are provided, even if one of the holding pins 47e is unexpectedly removed, the other one holding pin can keep the piston 14 locked.
　図１１、図１２においては本発明の高圧用自動ダイヤフラムバルブの第６実施形態を示しており、図１１（ａ）、図１２（ａ）は、この実施形態におけるダイヤフラムバルブの縦断面図、図１１（ｂ）、図１２（ｂ）は、図１１（ａ）、図１２（ａ）におけるアクチュエータの一部省略縦中央断面図を示している。 11 and 12 show a sixth embodiment of the high-pressure automatic diaphragm valve of the present invention. FIGS. 11 (a) and 12 (a) are longitudinal sectional views and diagrams of the diaphragm valve in this embodiment. 11 (b) and FIG. 12 (b) are partially omitted vertical central sectional views of the actuator in FIGS. 11 (a) and 12 (a).
　本実施形態におけるバルブ用アクチュエータ６０は、内部にピストン機構６１と、倍力機構６２とを有している。
　ピストン機構６１は、略円筒状に形成されたケーシング７０と、このケーシング７０に挿着可能な略円筒状のピストン７１とを有し、ケーシング７０内にＯリング７２を介してピストン７１が挿着され、ケーシング７０上部に設けられた吸排気口２３からの吸排気によってピストン７１がケーシング７０内を摺動しながら往復動自在に設けられる。ケーシング７０の下部には開口部７３が設けられ、この開口部７３にはめねじ７４、環状の係止段部７５が形成される。ケーシング７０には、開口部７３よりケース７６、ベース７７が装着可能に設けられる。さらに、ベース７７にはキャップ７８が取付けられ、このキャップ７８を介してバルブボデー７９が装着される。 The valve actuator 60 in this embodiment has a piston mechanism 61 and a booster mechanism 62 inside.
The piston mechanism 61 includes a casing 70 formed in a substantially cylindrical shape and a substantially cylindrical piston 71 that can be inserted into the casing 70. The piston 71 is inserted into the casing 70 via an O-ring 72. The piston 71 is provided so as to be able to reciprocate while sliding in the casing 70 by intake / exhaust from the intake / exhaust port 23 provided in the upper portion of the casing 70. An opening 73 is provided in the lower portion of the casing 70, and a female screw 74 and an annular locking step 75 are formed in the opening 73. The casing 70 is provided with a case 76 and a base 77 through the opening 73 so as to be mountable. Further, a cap 78 is attached to the base 77, and a valve body 79 is attached through the cap 78.
　倍力機構６２は、ピストン７１、昇降体８０、カム８１、スプリング８２、ローラー８３、出力軸部８４を有し、昇降体８０、カム８１、スプリング８２、出力軸部８４の上部が装着用のケース７６に装着され、昇降体８０がケース７６内を上下移動可能に設けられている。ローラー８３はピストン７１に取付けられ、後述するように、いわゆる、てこの原理を利用しながらピストン７１の往復動に連動してカム８１を動作するように設けられる。このような倍力機構８０を介して、ダイヤフラムバルブは、ピストン機構６１の動作に応じてダイヤフラムピース２９で、ダイヤフラム１３を弁座シート４２に押圧して弁閉される構造になっている。 The booster mechanism 62 has a piston 71, a lifting body 80, a cam 81, a spring 82, a roller 83, and an output shaft portion 84, and an upper portion of the lifting body 80, the cam 81, the spring 82, and the output shaft portion 84 is for mounting. Mounted on the case 76, an elevating body 80 is provided so as to be movable up and down in the case 76. The roller 83 is attached to the piston 71 and, as will be described later, is provided so as to operate the cam 81 in conjunction with the reciprocating motion of the piston 71 using the so-called lever principle. Through such a booster mechanism 80, the diaphragm valve has a structure in which the diaphragm 13 is pressed against the valve seat 42 by the diaphragm piece 29 in accordance with the operation of the piston mechanism 61.
　倍力機構６２において、図１３に示すように、ケース７６は略円板状に形成され、ケーシング７０の開口部７３よりベース７７の上面に載置された状態で係止段部７５に係止した状態でケーシング７０に取付け可能に設けられる。円板状ケース７６の直径方向には、昇降体８０及びカム８１を装着するための直線状の溝部９０が形成され、この溝部９０の長さ方向の両端側の底部には、連通孔９１が外周面に貫通して設けられる。 In the booster mechanism 62, as shown in FIG. 13, the case 76 is formed in a substantially disk shape, and is locked to the locking step 75 while being placed on the upper surface of the base 77 from the opening 73 of the casing 70. In such a state, it can be attached to the casing 70. In the diameter direction of the disk-shaped case 76, a linear groove 90 for mounting the elevating body 80 and the cam 81 is formed, and communication holes 91 are formed at the bottoms on both ends in the length direction of the groove 90. It is provided through the outer peripheral surface.
　図１４に示すように、連通孔９１には、ケーシング７０に貫通形成された挿入孔９２を介して保持ピンからなる保持部材９３が挿入可能に設けられる。保持ピン９３は、挿入孔９２への挿入時に昇降体８０の底面８０ａが当接可能な長さに設けられ、図１１（ａ）に示すように、保持ピン９３の外端側には手指で摘むことが可能な折曲部９４が形成されている。 As shown in FIG. 14, the communication hole 91 is provided with a holding member 93 made of a holding pin through the insertion hole 92 formed through the casing 70 so that the holding member 93 can be inserted. The holding pin 93 is provided in such a length that the bottom surface 80a of the elevating body 80 can contact when inserted into the insertion hole 92, and as shown in FIG. A bent portion 94 that can be picked is formed.
　ケース７６の溝部９０の中央には、出力軸部８４の上端部を挿通可能な貫通穴９５が形成され、溝部９０の両側付近には、この溝部９０との直交方向に２つの連通穴９６が外周面に連通して形成されている。各連通穴９６にはピン部材９７が挿入され、このピン部材９７は、ケース７６の上面側から各連通穴９６と交差する方向に嵌入される止めピン９８で両端が位置決めされ、連通穴９６に抜け止め状態で挿着される。
　ケース７６の直径方向における溝部９０との直交位置には、スプリング８２を挿入可能な有底穴９９が対向して２ヶ所に形成され、これらの遊底穴９９にスプリング８２の一側部が挿入される。 A through hole 95 into which the upper end portion of the output shaft portion 84 can be inserted is formed at the center of the groove portion 90 of the case 76, and two communication holes 96 are formed in the vicinity of both sides of the groove portion 90 in a direction orthogonal to the groove portion 90. It is formed in communication with the outer peripheral surface. A pin member 97 is inserted into each communication hole 96, and both ends of the pin member 97 are positioned by stop pins 98 fitted in a direction intersecting with each communication hole 96 from the upper surface side of the case 76. Inserted in a retaining state.
A bottomed hole 99 into which the spring 82 can be inserted is formed at two positions opposite to the groove portion 90 in the diameter direction of the case 76, and one side portion of the spring 82 is inserted into these free hole 99. The
　昇降体８０は、例えば、合金工具鋼などの金属により略長方体形状に設けられ、溝部９０の中央位置に装入される。図１１において、昇降体８０の底面側は中央を頂部８０ｂとした山形状に形成され、この頂部８０ｂに貫通穴９５から挿通した出力軸部８４の先端が当接される。昇降体８０は、後述するように、ピストン機構６１の上下方向の往復動に連動して上下移動するように取付けられ、この上下移動により出力軸部８４を上下動させるように設けられる。 The elevating body 80 is provided in a substantially rectangular shape by a metal such as alloy tool steel, for example, and is inserted at the center position of the groove 90. In FIG. 11, the bottom surface side of the lifting / lowering body 80 is formed in a mountain shape with the center being the top portion 80 b, and the tip of the output shaft portion 84 inserted through the through hole 95 is in contact with the top portion 80 b. As will be described later, the elevating body 80 is attached so as to move up and down in conjunction with the reciprocation of the piston mechanism 61 in the vertical direction, and is provided so as to move the output shaft portion 84 up and down by this up and down movement.
　図１１（ａ）、図１２（ａ）において、カム８１は略Ｌ字形状に形成され、ケース７６への装着側に取付穴１００、この取付穴１００の他端部側にローラー８３を係止可能な係止片１０１が設けられる。２つのカム８１、８１は、ケース７６の中心に対称に昇降体８０の上から溝部９０に装入されるように取付けられ、取付穴１００に前記のピン部材９７が挿入されて溝部９０に抜け止め状態となり、ピン部材９７によりケース７６に対して回動可能に設けられる。カム８１の昇降体８０側には、この昇降体８０の両端上部の角部位が係止する係止凹部１０２が設けられ、この係止凹部１０２と昇降体８０との係止により、カム８１の回動に応じてその範囲が規制されながら昇降体８０が昇降動作するようになっている。 11 (a) and 12 (a), the cam 81 is formed in an approximately L shape, and the mounting hole 100 is attached to the case 76 and the roller 83 is locked to the other end of the mounting hole 100. Possible locking pieces 101 are provided. The two cams 81, 81 are attached to the center of the case 76 so as to be inserted into the groove portion 90 from above the elevating body 80, and the pin member 97 is inserted into the attachment hole 100 so as to come out into the groove portion 90. The pin member 97 is provided so as to be rotatable with respect to the case 76. On the lift body 80 side of the cam 81, there is provided a locking recess 102 that locks the corner portions at both upper ends of the lifting body 80. By locking the locking recess 102 and the lifting body 80, The elevating body 80 moves up and down while its range is regulated according to the rotation.
　図１４において、スプリング８２は、上記したようにケース７６の遊底穴９９に一側部が挿入され、一方、このスプリング８２の他端部は、図１１（ｂ）、図１２（ｂ）に示すように略円筒状に形成されたピストン７１の底面側に当接される。これにより、スプリング８２は、ピストン７１内の２ヶ所に配置され、ピストン機構６１からの圧縮エアー排気時に、ピストン７１を同図において上方向に弾発するように設けられている。
　各スプリング８２、８２は、右巻き、左巻きに設けられ、このように相互の巻方向が逆向きに形成されている。 In FIG. 14, the spring 82 has one side inserted into the free hole 99 of the case 76 as described above, while the other end of the spring 82 is shown in FIGS. 11 (b) and 12 (b). Thus, it abuts on the bottom surface side of the piston 71 formed in a substantially cylindrical shape. Thus, the springs 82 are arranged at two locations in the piston 71 and are provided so as to repel the piston 71 upward in the drawing when compressed air is exhausted from the piston mechanism 61.
Each of the springs 82 and 82 is provided in a right-handed or left-handed manner, and thus the winding directions of the springs 82 and 82 are opposite to each other.
　図１４に示すローラー８３は、図１１のピストン７１内のカム８１との係止位置に水平方向に２ヶ所設けられ、ピストン７１の往復動に伴ってこのピストン７１と一体に上下移動するようになっている。ローラー８３は、ピストン７１に対して回転可能に取付けられた状態でカム８１の係止片１０１が係止され、このローラー８３の移動時には、ピストン７１の往復動時のカム８１との摩擦抵抗が少なくなる。 The rollers 83 shown in FIG. 14 are provided at two positions in the horizontal direction at the locking positions with the cams 81 in the piston 71 of FIG. 11 so as to move up and down integrally with the piston 71 as the piston 71 reciprocates. It has become. The roller 83 is engaged with the locking piece 101 of the cam 81 while being rotatably attached to the piston 71, and when the roller 83 moves, the frictional resistance with the cam 81 when the piston 71 reciprocates is reduced. Less.
　出力軸部８４は、昇降体８０とダイヤフラムピース２９との間に設けられ、コイルスプリング３３により、図１１において上方向に弾発付勢されている。これにより、前述の昇降体８０が下方向からカム８１側に押圧され、このカム８１の回転動作により昇降体８０が昇降動されるときには、この昇降動に伴って出力軸部８４も一体的に上下移動可能に設けられる。このとき、昇降体８０の昇動作によって出力軸部８４が上方向に移動したときには、ダイヤフラムピース２９も上方向に移動してダイヤフラム１３が弁開状態となり、一方、昇降体８０が降動作して出力軸部８４が下方向に移動したときには、ダイヤフラムピース２９の下方向への移動によりダイヤフラム１３が弁開状態に変形される。このとき、前記の昇降体８０の底面８０ａ側が山形状に形成されていることで、出力軸部８４がこの底面８０ａ側によって調心されながら上下動され、ダイヤフラム１３が均等に押圧されることで弁座シート４２に均一にシールされる。これによって弁閉時のシール性が向上する。 The output shaft portion 84 is provided between the elevating body 80 and the diaphragm piece 29 and is elastically biased upward in FIG. 11 by the coil spring 33. As a result, when the elevating body 80 is pressed from the lower side toward the cam 81 and the elevating body 80 is moved up and down by the rotating operation of the cam 81, the output shaft portion 84 is also integrated with the elevating movement. It can be moved up and down. At this time, when the output shaft portion 84 is moved upward by the lifting operation of the lifting body 80, the diaphragm piece 29 is also moved upward and the diaphragm 13 is opened, while the lifting body 80 is lowered. When the output shaft portion 84 moves downward, the diaphragm 13 is deformed into the valve open state by the downward movement of the diaphragm piece 29. At this time, since the bottom surface 80a side of the lifting body 80 is formed in a mountain shape, the output shaft portion 84 is moved up and down while being aligned by the bottom surface 80a side, and the diaphragm 13 is pressed evenly. The valve seat 42 is uniformly sealed. This improves the sealing performance when the valve is closed.
　図１１の倍力機構６２において、ピストン機構６１に圧縮エアーを供給してピストン７１を下方向に動かしたときには、ローラー８３の下方移動によってこのローラー８３の外周面に沿ってコイルスプリング３３で弾発された２つのカム８１、８１が、外方向への回転、すなわち昇降体８０の押圧を緩和する方向に回転し、この昇降体８０が上昇移動する。これによって、出力軸部８４、ダイヤフラムピース２９が上方向に移動して、ダイヤフラム１３が自力にて上方向に変形移動する。 In the booster mechanism 62 of FIG. 11, when compressed air is supplied to the piston mechanism 61 and the piston 71 is moved downward, the coil spring 33 is elastically moved along the outer peripheral surface of the roller 83 by the downward movement of the roller 83. The two cams 81, 81 thus rotated are rotated in the outward direction, that is, in a direction to ease the pressing of the lifting body 80, and the lifting body 80 moves upward. As a result, the output shaft portion 84 and the diaphragm piece 29 move upward, and the diaphragm 13 is deformed and moved upward by itself.
　図１１に示すように、ピストンの下方向移動により倍力機構６２を介して昇降体８０を上方向に動かしたときには、この昇降体底面８０ａ側と、この底面８０ａが全閉時に当接するケース７６の固定側当接面１０５との間には隙間Ｇが生じる。この隙間Ｇは、ピストン７１を下死点に移動させたときに最大となり、この状態においてケーシング７０の外方より挿入孔９２から保持ピン９３を挿入可能となる。この状態で挿入孔９２から保持ピン９３を差し込むことで、昇降体８０の解除側への移動時において昇降体底面８０ａに保持ピン９３を係止することが可能になる。その際、昇降体底面８０ａが中央に向けて傾斜していることで、この傾斜によって保持ピン９３が案内されて容易に挿入可能となる。 As shown in FIG. 11, when the elevating body 80 is moved upward via the booster mechanism 62 by the downward movement of the piston, the elevating body bottom surface 80a side and the case 76 where the bottom surface 80a abuts when fully closed. A gap G is formed between the fixed contact surface 105 and the fixed contact surface 105. The gap G becomes maximum when the piston 71 is moved to the bottom dead center, and in this state, the holding pin 93 can be inserted from the insertion hole 92 from the outside of the casing 70. By inserting the holding pin 93 from the insertion hole 92 in this state, the holding pin 93 can be locked to the lift body bottom surface 80a when the lift body 80 moves to the release side. At that time, since the elevating body bottom surface 80a is inclined toward the center, the holding pin 93 is guided by this inclination and can be easily inserted.
　このように、ダイヤフラムバルブの閉状態において、昇降体８０の解除側への移動時に保持ピン９３により昇降体８０を係止することで、出力軸部８４、ダイヤフラムピース２９を上方に移動させてダイヤフラム１３を自力で上方向に変形させた状態において、このダイヤフラム１３と弁座シート４２との非接触状態を保持できる。そのため、保持ピン９３の差し込み後にエアーの供給を停止した場合にも隙間Ｇが確保され、これによってダイヤフラム１３が弁座シート４２に接触することが防止される。そのため、ダイヤフラム１３の摩耗や劣化が防がれ、弁座シート４２にも負荷を掛けずに長期保存することが可能になる。 Thus, in the closed state of the diaphragm valve, when the lifting body 80 is moved to the release side, the lifting body 80 is locked by the holding pin 93, thereby moving the output shaft portion 84 and the diaphragm piece 29 upward. In a state where 13 is deformed upward by itself, the non-contact state between the diaphragm 13 and the valve seat 42 can be maintained. Therefore, even when the supply of air is stopped after the holding pin 93 is inserted, the gap G is secured, thereby preventing the diaphragm 13 from contacting the valve seat 42. Therefore, the wear and deterioration of the diaphragm 13 are prevented, and the valve seat 42 can be stored for a long time without applying a load.
　一方、ダイヤフラムバルブの使用時においては、保持ピン９３外端の折曲部９４を摘んでケーシング７０の外方より抜き出すようにすればよく、図１２に示すように、保持ピン９３による係止が外れることで昇降体８０が下降移動し、通常の弁閉時には高圧用自動ＮＣタイプのダイヤフラムバルブとして腐食性流体等の漏れを防ぎ、弁開時には倍力機構６２を介してダイヤフラム１３が動作させて細かい流量制御を行った場合にも、所定の流路を確保できる。 On the other hand, when the diaphragm valve is used, the bent portion 94 at the outer end of the holding pin 93 may be grasped and extracted from the outside of the casing 70. As shown in FIG. When the valve 80 is closed, the elevating body 80 moves downward. As a high-pressure automatic NC type diaphragm valve, the corrosive fluid is prevented from leaking. When the valve is opened, the diaphragm 13 is operated via the booster mechanism 62. Even when fine flow control is performed, a predetermined flow path can be secured.
　このように昇降体８０を用いた倍力機構６２を設けていることで、この実施形態のアクチュエータでは、エアーを供給してピストン７１を下方向に移動させたときに昇降体８０を昇動作させて弁開状態にし、一方、エアーを排気してピストン７１を上方向に移動させたときにスプリング８２の弾発力で昇降体８０を下方向に押圧して弁閉状態に構造に設けられている。 By providing the booster mechanism 62 using the lifting body 80 in this way, the actuator of this embodiment causes the lifting body 80 to move up when air is supplied and the piston 71 is moved downward. The valve is opened, and on the other hand, when the air is exhausted and the piston 71 is moved upward, the elevating body 80 is pressed downward by the spring force of the spring 82 so that the valve is closed. Yes.
　また、ベース７７は、ケース７６と略同径の略円板状に形成され、上部外周側にはめねじ７４と螺着するおねじ１０６が形成され、上部内周側にはキャップ７８取付け用の雌ねじ１０７と、この雌ねじ１０７に続けて下方側に環状凹部１０８が形成されている。ベース７７は、ケース７６が嵌入されたケーシング７０の開口部７３側からめねじ７４におねじ１０６を介して螺着され、このベース７７によってケース７６がケーシング７０内の係止段部７５により位置決め固定される。このとき、ベース７７の最外周に形成されたおねじ１０６、ケーシング開口部７３に形成された拡径状のめねじ７４とが螺合して一体化されることで締付け力が強くなり、これによってガタつきの発生が防がれてアクチュエータの作動時にケース７６が動いて振動や異音を発生させることがなく、ピストン７１の摺動もスムーズになる。
　ベース７７の下部外周の３ヶ所には、雌螺子部１１０が１２０°間隔で均等に形成され、この雌螺子部１１０に止めネジ１１１が螺着される。 The base 77 is formed in a substantially disk shape having the same diameter as that of the case 76, a male screw 106 that is screwed to the female screw 74 is formed on the upper outer peripheral side, and a cap 78 is mounted on the upper inner peripheral side. An internal recess 107 is formed on the lower side following the internal thread 107 and the internal thread 107. The base 77 is screwed to the female screw 74 through the screw 106 from the opening 73 side of the casing 70 in which the case 76 is fitted. The base 77 is positioned and fixed by the locking step 75 in the casing 70 by the base 77. Is done. At this time, the male screw 106 formed on the outermost periphery of the base 77 and the female screw 74 having an enlarged diameter formed in the casing opening 73 are screwed together to increase the tightening force. As a result, the occurrence of rattling is prevented, the case 76 does not move when the actuator is operated, and no vibration or noise is generated, and the piston 71 slides smoothly.
Female screw portions 110 are formed evenly at 120 ° intervals at three locations on the outer periphery of the lower portion of the base 77, and set screws 111 are screwed onto the female screw portions 110.
　キャップ７８は略円筒状に形成され、上部にはベースの雌ねじ１０７に螺着可能な雄ねじ１１２と、この雄ねじ１１２に続けて環状凹部１０８に嵌合可能な環状凸部１１３が形成され、キャップ７８下部にはバルブボデー７９に形成された雌ねじ部１１４に螺着する雄ねじ部１１５が形成される。キャップ７８中央には、出力軸部８４挿入用の挿入穴部１１６が設けられている。 The cap 78 is formed in a substantially cylindrical shape, and a male screw 112 that can be screwed to the female screw 107 of the base and an annular convex portion 113 that can be fitted into the annular concave portion 108 are formed on the cap 78. A male screw portion 115 that is screwed into a female screw portion 114 formed in the valve body 79 is formed in the lower portion. An insertion hole portion 116 for inserting the output shaft portion 84 is provided in the center of the cap 78.
　この場合、キャップ７８の雄ねじ１１２と前記ベース７７の雌ねじ１０７とが、大径に形成されていることが望ましい。このように設けられている場合、アクチュエータ動作時の推力がこれら雄ねじ１１２と雌ねじ１０７とに加わったときにも十分な強度を確保することができ、安定した動作が可能となる。 In this case, it is desirable that the male screw 112 of the cap 78 and the female screw 107 of the base 77 are formed to have a large diameter. When provided in this way, sufficient strength can be ensured even when the thrust during actuator operation is applied to the male screw 112 and the female screw 107, and stable operation is possible.
　キャップ７８は、３個の止めネジ１１１でベース７７の外周側から固定されており、これら止めネジ１１１によりベース７７に容易に固定可能となり、３ヶ所で強固に芯出ししながら取付けられることで、締付け後にベース７７に対してキャップ７８がグラつくこともない。さらに、ベース７７の側面方向から止めネジ１１１を締付ける構造であるため、ダイヤフラムバルブが配管等に取付けられている場合にもこの配管やバルブボデー７９等が邪魔になることがなく、ベース７７へのキャップ７８の螺入状態を調節してストローク調整を行った上で、止めネジ１１１により簡単にこれらを固定できる。 The cap 78 is fixed from the outer peripheral side of the base 77 by three set screws 111, and can be easily fixed to the base 77 by these set screws 111, and is attached while firmly centering at three locations. The cap 78 is not glazed against the base 77 after tightening. Further, since the set screw 111 is tightened from the side surface of the base 77, even when the diaphragm valve is attached to the pipe or the like, the pipe and the valve body 79 and the like are not obstructed. After adjusting the screwed state of the cap 78 and adjusting the stroke, these can be easily fixed by the set screw 111.
　この実施形態のダイヤフラムバルブにおける倍力機構６２は、昇降体８０とカム８１との係止により動作する構造であって、昇降体８０が摺動を伴って昇降することがなく、摺動部であるピストン７１に保持ピン９３を係止することがないため、ピストン７１に負荷が掛かることがなく、ピストン７１外面やケーシング７０内面に傷やバリが発生するおそれがない。そのためにピストン７１の摺動時に保持ピン９３による傷やバリ等でＯリング７２が損傷したり作動不良を生じることがない。これによって、延いてはケーシング７０をアルミ等の軟質材料で形成して全体の軽量化を図ることも可能になり、この場合にも保持ピン９３によって傷やバリ等が発生することがない。 The booster mechanism 62 in the diaphragm valve of this embodiment has a structure that operates by locking the elevating body 80 and the cam 81, and the elevating body 80 does not move up and down with sliding, but at the sliding portion. Since the holding pin 93 is not locked to a certain piston 71, a load is not applied to the piston 71, and there is no possibility that scratches or burrs are generated on the outer surface of the piston 71 or the inner surface of the casing 70. Therefore, when the piston 71 slides, the O-ring 72 is not damaged or malfunctions due to scratches or burrs caused by the holding pins 93. As a result, the casing 70 can be formed of a soft material such as aluminum to reduce the overall weight. In this case as well, the holding pins 93 do not cause scratches or burrs.
　図１２の倍力機構６２において、ピストン機構６１の圧縮エアーを排気したときには、スプリング８２の弾発力によりピストン７１が上方向に動き、ローラー８３が上方移動することで、２つのカム８１、８１が内方向への回転、すなわち昇降体８０を下降移動させて負荷を与える方向に回転する。昇降体８０の移動により、出力軸部８４、ダイヤフラムピース２９が下方向に移動し、ダイヤフラムピース２９によりダイヤフラム１３が弁座シート４２に着座して弁閉状態となる。このとき、倍力機構６２がカムを用いた、てこの原理を使用して昇降体８０を強く押圧する機構であることから、ダイヤフラム１３を弁座シート４２に強く押し付けて高圧流体の場合にも確実に漏れを防止する。 In the booster mechanism 62 of FIG. 12, when the compressed air of the piston mechanism 61 is exhausted, the piston 71 moves upward by the spring force of the spring 82, and the roller 83 moves upward, so that the two cams 81, 81 Rotates inward, that is, in a direction in which the elevating body 80 is moved downward to give a load. By the movement of the elevating body 80, the output shaft portion 84 and the diaphragm piece 29 are moved downward, and the diaphragm 13 is seated on the valve seat 42 by the diaphragm piece 29 and the valve is closed. At this time, since the booster mechanism 62 is a mechanism that strongly presses the elevating body 80 using the lever principle using a cam, the diaphragm 13 is strongly pressed against the valve seat 42 and also in the case of high-pressure fluid. Make sure to prevent leakage.
　ピストン７１には上方向に弾発するスプリング８２が２ヶ所に設けられ、これらスプリング８２の相互の巻方向が逆向きに設けられていることにより、スプリング８２の圧縮時に右巻きと左向きと相合抵抗によってピストン７１の回転が防がれる。このため、カム８１と溝部９０との擦れによる互いの干渉が抑制され、ピストン７１のストロークが大きい場合にもスプリング８２圧縮時のよじれによるピストン７１の回転が防がれ、カム８１と溝部９０との擦れによる作動不良や寿命低下の危険性も回避される。さらに、ピストン７１動作が正確になることで、ダイヤフラムバルブを高精度に開制御可能になる。 The piston 71 is provided with two springs 82 that spring upward, and the winding directions of the springs 82 are opposite to each other. The rotation of the piston 71 is prevented. Therefore, mutual interference due to rubbing between the cam 81 and the groove portion 90 is suppressed, and even when the stroke of the piston 71 is large, the rotation of the piston 71 due to kinking when the spring 82 is compressed is prevented. The risk of malfunctions and reduced life due to rubbing is also avoided. Furthermore, since the piston 71 operation is accurate, the diaphragm valve can be controlled to be opened with high accuracy.
　なお、昇降体８０は、エアーの供給で動作するピストン７１の上下動に伴って内部で摺動することなくバルブ開閉できるものであればよく、ダイヤフラムバルブが、昇降体底面８０ａに保持ピン９３を外部から係止させ、ダイヤフラムピース２９の下方向の移動を規制してダイヤフラム１３の摩耗や劣化を防止できるものであればよい。そのため、昇降体８０は必ずしも出力軸部８４やダイヤフラムピース２９と別体である必要はなく、これらが一体に設けられていてもよい。 The lifting body 80 may be anything that can open and close the valve without sliding inside as the piston 71 moves up and down by air supply, and the diaphragm valve has a holding pin 93 on the bottom face 80a of the lifting body. Any one can be used as long as it can be stopped from the outside and the downward movement of the diaphragm piece 29 can be restricted to prevent the diaphragm 13 from being worn or deteriorated. Therefore, the elevating body 80 does not necessarily need to be separate from the output shaft portion 84 and the diaphragm piece 29, and these may be provided integrally.
　また、この実施形態では、ケーシング７０に形成した挿入孔９２から保持ピン９３を挿入しているが、昇降体底面８０ａに生じる隙間Ｇに挿入して昇降体８０を弁開状態に保持できるものであれば、挿入部分を溝状等に設けるようにしてもよく、一方、保持部材をプレート状やその他の形状に設けてもよい。 In this embodiment, the holding pin 93 is inserted through the insertion hole 92 formed in the casing 70. However, the holding pin 93 can be inserted into the gap G generated on the bottom surface 80a of the lifting body to hold the lifting body 80 in the valve open state. If so, the insertion portion may be provided in a groove shape or the like, while the holding member may be provided in a plate shape or other shapes.
１ａ，１ｂ　アクチュエータ
２ａ，２ｂ　ケーシング
４　ボデー
１０　倍力機構
１３　ダイヤフラム
１４　ピストン
１５、８２　スプリング
１６　推力部材
４２　弁座シート
４５　可動側係止部
４５ａ，４５ｂ，４５ｅ　係止溝
４５ｃ，４５ｄ　係止孔
４６　固定側係止部
４６ａ，４６ｂ，４６ｃ，４６ｄ，４６ｅ　係止穴部
４７　保持部材
４７ａ，４７ｂ，４７ｃ，４７ｄ，４７ｅ　保持ピン
　８０　昇降体
　８０ａ　昇降体底面
　９３　保持ピン（保持部材）
　９４　折曲部
　Ｇ　隙間 DESCRIPTION OF SYMBOLS 1a, 1b Actuator 2a, 2b Casing 4 Body 10 Boosting mechanism 13 Diaphragm 14 Piston 15, 82 Spring 16 Thrust member 42 Valve seat 45 Moving side locking part 45a, 45b, 45e Locking groove 45c, 45d Locking hole 46 Fixed side locking portions 46a, 46b, 46c, 46d, 46e Locking hole portion 47 Holding member 47a, 47b, 47c, 47d, 47e Holding pin 80 Lifting body 80a Lifting body bottom surface 93 Holding pin (holding member)
94 Bent part G Gap

Claims (8)

  1. 　ボデー内に設けた弁座シートにダイヤフラムを押圧して弁閉するダイヤフラムバルブにおいて、前記ボデーに設けたアクチュエータ内のピストン機構で前記ダイヤフラムを押圧し又は押圧を解除すると共に、前記アクチュエータのケーシングに固定側係止部を設け、かつ前記ピストン機構の適宜位置に可動側係止部を設け、前記ピストン機構を上方向の解除側に動かしたときに、前記固定側係止部と前記可動側係止部の係止位置を一致させ、かつ前記ケーシングの外方より挿通した保持部材で前記固定側係止部と前記可動側係止部を係止させて前記弁座シートに負荷を掛けずに長期保存を可能とし、バルブ使用時には、前記保持部材を前記ケーシングの外方より取り外してバルブを使用可能としたことを特徴とする高圧用自動ダイヤフラムバルブ。 In a diaphragm valve that presses the diaphragm against a valve seat seat provided in the body and closes the valve, the piston mechanism in the actuator provided in the body presses the diaphragm or releases the pressure, and is fixed to the actuator casing. A side locking portion is provided, and a movable side locking portion is provided at an appropriate position of the piston mechanism. When the piston mechanism is moved to the upward release side, the fixed side locking portion and the movable side locking portion are The locking position of the part is matched, and the fixed side locking part and the movable side locking part are locked by a holding member inserted from the outside of the casing, so that the valve seat seat is not loaded for a long time. A high-pressure automatic diaphragm characterized in that it can be stored and the valve can be used by removing the holding member from the outside of the casing when the valve is used. Lube.
  2. 　前記ピストン機構は、エアーを供給してピストンを上方向に動かして前記ダイヤフラムを自力にて上方向に変形移動すると共に、全閉時に、倍力機構を介してスプリングの弾発力で下方に負荷を与える構造を有し、ピストンを上方に動かしたときに、前記保持部材でピストン機構が下がるのを防止した請求項１に記載の高圧用自動ダイヤフラムバルブ。 The piston mechanism supplies air and moves the piston upward to deform and move the diaphragm upward by itself. When fully closed, the piston mechanism is loaded downward by the spring force of the spring. 2. The high-pressure automatic diaphragm valve according to claim 1, wherein the holding mechanism prevents the piston mechanism from lowering when the piston is moved upward.
  3. 　前記ピストン機構にエアーを供給し、ピストンを上死点へ移動させて前記固定側係止部である係止穴部に前記可動側係止部である係止溝の位置を一致させ、一致した双方の穴に外方より保持部材である保持ピンを差し込み、使用時には当該保持ピンを外方より抜き出してバルブを使用可能とした請求項１又は２に記載の高圧用自動ダイヤフラムバルブ。 Air is supplied to the piston mechanism, the piston is moved to the top dead center, and the position of the locking groove which is the movable side locking portion is matched with the locking hole which is the fixed side locking portion. The high-pressure automatic diaphragm valve according to claim 1 or 2, wherein a holding pin which is a holding member is inserted into both holes from the outside, and the valve can be used by extracting the holding pin from the outside during use.
  4. 　前記固定側係止部である２つの係止穴部に前記可動側係止部である半円形係止溝又は係止孔の位置を一致させ、一致させた係止穴部に外方より保持部材である保持ピンを差し込み、使用時には当該保持ピンを外方より抜き出してバルブを使用可能とした請求項１又は２に記載の高圧用自動ダイヤフラムバルブ。 The position of the semicircular locking groove or the locking hole as the movable side locking portion is matched with the two locking holes as the fixed side locking portion, and the matching locking hole is held from the outside. The automatic diaphragm valve for high pressure according to claim 1 or 2, wherein a holding pin which is a member is inserted, and the holding pin is pulled out from the outside at the time of use so that the valve can be used.
  5. 　ボデー内に設けた弁座シートにダイヤフラムを押圧して弁閉するダイヤフラムバルブにおいて、前記ボデーに設けたアクチュエータ内のピストン機構で前記ダイヤフラムを押圧し又は押圧を解除すると共に、前記ピストン機構にピストンの上下方向の往復動に連動して上下移動する昇降体を設け、かつ前記アクチュエータのケーシングの外方より、前記昇降体を上方向の解除側に動かしたときにこの昇降体の底面側に生じる隙間に保持部材を挿入可能に設け、前記昇降体の解除側への移動時に前記昇降体底面に前記保持部材を係止させ、前記弁座シートに負荷を掛けずに長期保存を可能とし、バルブ使用時には、前記保持部材を前記ケーシングの外方より取り外してバルブを使用可能としたことを特徴とする高圧用自動ダイヤフラムバルブ。 In the diaphragm valve that presses the diaphragm against the valve seat provided in the body and closes the valve, the piston mechanism in the actuator provided in the body presses or releases the diaphragm, and the piston mechanism A lifting body that moves up and down in conjunction with reciprocation in the vertical direction, and a gap generated on the bottom surface side of the lifting body when the lifting body is moved upward from the outside of the casing of the actuator. The holding member can be inserted into the lifting member, the holding member is locked to the bottom surface of the lifting body when the lifting body is moved to the release side, and the valve seat can be stored for a long time without applying a load. Sometimes, the holding member is removed from the outside of the casing so that the valve can be used. High-pressure automatic diaphragm valve
  6. 　前記ピストン機構にエアーを供給して前記ピストンを下方向に動かし、かつ前記ダイヤフラムを自力にて上方向に変形移動すると共に、全閉時に、スプリングの弾発力により前記ピストンを上方向に動かしたときに倍力機構を介して前記昇降体を下方向に移動させて負荷を与える構造を有し、ピストンを下方に動かしたときに、前記保持部材でピストン機構の昇降体が下がるのを防止した請求項５に記載の高圧用自動ダイヤフラムバルブ。 Air is supplied to the piston mechanism to move the piston downward, and the diaphragm is deformed upward by its own force, and when fully closed, the piston is moved upward by the spring force of the spring. Sometimes it has a structure that applies a load by moving the lifting body downward via a booster mechanism, and when the piston is moved downward, the holding member prevents the lifting body of the piston mechanism from being lowered The high-pressure automatic diaphragm valve according to claim 5.
  7. 　前記ピストン機構にエアーを供給し、ピストンを下死点へ移動させたときに前記倍力機構を介して前記昇降体の底面とこの底面が全閉時に当接する固定側当接面との間に隙間を設け、この隙間に前記ケーシングに形成した挿入孔から保持部材である保持ピンを差し込み、使用時には当該保持ピンの外端に形成した折曲部を摘んで前記ケーシングの外方より抜き出してバルブを使用可能とした請求項５又は６に記載の高圧用自動ダイヤフラムバルブ。 When air is supplied to the piston mechanism and the piston is moved to the bottom dead center, the bottom surface of the lifting body and the fixed-side contact surface with which the bottom surface abuts when fully closed via the booster mechanism. A gap is provided, and a holding pin, which is a holding member, is inserted into the gap from an insertion hole formed in the casing, and in use, a bent portion formed on the outer end of the holding pin is picked and extracted from the outside of the casing. The automatic diaphragm valve for high pressure according to claim 5 or 6, wherein said can be used.
  8. 　前記スプリングは、前記ピストン内に２ヶ所設けて当該ピストンを上方向に弾発可能に設け、これらスプリングの相互の巻方向を逆向きとした請求項６又は７に記載の高圧用自動ダイヤフラムバルブ。 8. The high-pressure automatic diaphragm valve according to claim 6 or 7, wherein the spring is provided in two locations in the piston so that the piston can be repelled upward, and the winding directions of the springs are opposite to each other.
PCT/JP2014/071079 2013-08-08 2014-08-08 High-pressure automatic diaphragm valve WO2015020209A1 (en)

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CN109555874A (en) * 2017-09-26 2019-04-02 株式会社开滋Sct The assemble method and its assembled configuration and diaphragm valve of diaphragm valve
JP2019521300A (en) * 2016-07-12 2019-07-25 パーカー・ハニフィン・コーポレーション Lockout tagout device and valve

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JPWO2015020209A1 (en) 2017-03-02
KR20150018361A (en) 2015-02-23

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