WO2015016243A1 - Composition colorante, film durci, filtre coloré, procédé pour la fabrication de filtre coloré, dispositif de capture d'image à état solide et dispositif d'affichage d'image - Google Patents
Composition colorante, film durci, filtre coloré, procédé pour la fabrication de filtre coloré, dispositif de capture d'image à état solide et dispositif d'affichage d'image Download PDFInfo
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- WO2015016243A1 WO2015016243A1 PCT/JP2014/070012 JP2014070012W WO2015016243A1 WO 2015016243 A1 WO2015016243 A1 WO 2015016243A1 JP 2014070012 W JP2014070012 W JP 2014070012W WO 2015016243 A1 WO2015016243 A1 WO 2015016243A1
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- group
- colored
- color filter
- acid
- pigment
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- 0 CC1CC(C(*)C*)C(CN=CC)C(*)C1 Chemical compound CC1CC(C(*)C*)C(CN=CC)C(*)C1 0.000 description 2
Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B69/00—Dyes not provided for by a single group of this subclass
- C09B69/10—Polymeric dyes; Reaction products of dyes with monomers or with macromolecular compounds
- C09B69/103—Polymeric dyes; Reaction products of dyes with monomers or with macromolecular compounds containing a diaryl- or triarylmethane dye
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B11/00—Diaryl- or thriarylmethane dyes
- C09B11/04—Diaryl- or thriarylmethane dyes derived from triarylmethanes, i.e. central C-atom is substituted by amino, cyano, alkyl
- C09B11/10—Amino derivatives of triarylmethanes
- C09B11/24—Phthaleins containing amino groups ; Phthalanes; Fluoranes; Phthalides; Rhodamine dyes; Phthaleins having heterocyclic aryl rings; Lactone or lactame forms of triarylmethane dyes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B69/00—Dyes not provided for by a single group of this subclass
- C09B69/02—Dyestuff salts, e.g. salts of acid dyes with basic dyes
- C09B69/06—Dyestuff salts, e.g. salts of acid dyes with basic dyes of cationic dyes with organic acids or with inorganic complex acids
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/205—Neutral density filters
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
Definitions
- the present invention relates to a colored composition and a cured film using the same.
- the present invention also relates to a color filter having a cured film, a method for manufacturing the color filter, a solid-state imaging device having the color filter, and an image display device.
- One of the methods for producing color filters used in liquid crystal display devices, solid-state imaging devices, etc. is a pigment dispersion method.
- this pigment dispersion method colored photosensitive materials obtained by dispersing pigments in various photosensitive compositions are used.
- This is a method for producing a color filter by a photolithography method using a composition. That is, a colored composition is applied on a substrate using a spin coater, a roll coater or the like, dried to form a coating film, and the coating film is subjected to pattern exposure and development to obtain a colored pixel. By repeating this operation for a desired hue, a color filter is produced.
- the method described above is stable against light and heat because it uses a pigment, and the positional accuracy is sufficiently secured because patterning is performed by a photolithographic method, and it is suitable as a method for manufacturing a color filter for a color display. It has been widely used.
- Patent Document 1 discloses that a colored photosensitive composition containing a dye or a pigment is used for producing a color filter.
- Patent Document 2 discloses that developability is improved by using a dye multimer containing a xanthene skeleton as a partial structure of a dye part.
- Patent Document 2 also discloses a combination of a cation moiety and an anion moiety in a dye multimer.
- an object of the present invention is to provide a colored composition that hardly generates foreign matter when placed in a low temperature environment for a long period of time.
- the present inventor adjusts at least one of the sodium ion concentration and the potassium ion concentration to a specific range, It has been found that the above problems can be solved. Specifically, the above problem has been solved by the following means ⁇ 1>, preferably ⁇ 2> to ⁇ 14>.
- a coloring composition containing (A) a dye multimer and (B) a solvent, (A) The dye multimer has a partial structure derived from a xanthene dye having a cation moiety and an anion moiety, A coloring composition, wherein at least one of a sodium ion concentration and a potassium ion concentration in the coloring composition is 0.1 to 10 ppm.
- a coloring composition wherein at least one of a sodium ion concentration and a potassium ion concentration in the coloring composition is 0.1 to 10 ppm.
- ⁇ 3> The colored composition according to ⁇ 1> or ⁇ 2>, wherein the water content in the colored composition is 0.1 to 5% by mass.
- ⁇ 4> The colored composition according to any one of ⁇ 1> to ⁇ 3>, wherein the anion moiety is a low nucleophilic anion moiety.
- ⁇ 5> The colored composition according to any one of ⁇ 1> to ⁇ 4>, further comprising a phthalocyanine pigment.
- ⁇ 6> The colored composition according to any one of ⁇ 1> to ⁇ 5>, further comprising a photopolymerization initiator.
- ⁇ 7> The colored composition according to any one of ⁇ 1> to ⁇ 6>, further comprising a curable compound.
- ⁇ 8> The colored composition according to any one of ⁇ 1> to ⁇ 7>, wherein at least one of a sodium ion concentration and a potassium ion concentration in the colored composition is 3 to 7 ppm.
- ⁇ 9> The colored composition according to any one of ⁇ 1> to ⁇ 8>, which is used for forming a colored layer of a color filter.
- ⁇ 11> A step of applying the colored composition according to any one of ⁇ 1> to ⁇ 9> on a support to form a colored composition layer, a step of exposing the colored composition layer in a pattern, And a step of developing and removing an unexposed portion to form a colored pattern.
- ⁇ 12> a step of applying the colored composition according to any one of ⁇ 1> to ⁇ 9> on a support to form a colored composition layer and curing to form a colored layer; Forming a photoresist layer on the colored layer;
- a method for producing a color filter comprising: a step of patterning a photoresist layer by exposure and development to obtain a resist pattern; and a step of dry etching a colored layer using the resist pattern as an etching mask.
- ⁇ 13> A color filter having the cured film according to ⁇ 10>, or a color filter manufactured by the method for manufacturing a color filter according to ⁇ 11> or ⁇ 12>.
- ⁇ 14> A solid-state imaging device or an image display device having the color filter according to ⁇ 13>.
- the description which does not describe substitution and unsubstituted includes the thing which has a substituent with the thing which does not have a substituent.
- the “alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
- “radiation” in the present specification means, for example, an emission line spectrum of a mercury lamp, far ultraviolet rays represented by excimer laser, extreme ultraviolet rays (EUV light), X-rays, electron beams, and the like. In the present invention, light means actinic rays or radiation.
- exposure in this specification is not only exposure with far-ultraviolet rays such as mercury lamps and excimer lasers, X-rays, EUV light, but also drawing with particle beams such as electron beams and ion beams. Are also included in the exposure.
- a numerical range expressed using “to” means a range including numerical values described before and after “to” as a lower limit value and an upper limit value.
- the total solid content refers to the total mass of the components excluding the solvent from the total composition of the composition.
- (meth) acrylate represents both and / or acrylate and methacrylate
- (meth) acryl represents both and / or acryl and “(meth) acrylic”
- "Acryloyl” represents both and / or acryloyl and methacryloyl.
- “monomer” and “monomer” are synonymous.
- the monomer in this specification is distinguished from an oligomer and a polymer, and refers to a compound having a weight average molecular weight of 2,000 or less.
- the polymerizable compound means a compound having a polymerizable functional group, and may be a monomer or a polymer.
- the polymerizable functional group refers to a group that participates in a polymerization reaction.
- Me in the chemical formula represents a methyl group
- Et represents an ethyl group
- Pr represents a propyl group
- Bu represents a butyl group
- Ph represents a phenyl group.
- the term “process” is not limited to an independent process, and is included in the term if the intended action of the process is achieved even when it cannot be clearly distinguished from other processes. .
- the colored composition of the present invention (hereinafter also referred to as the composition of the present invention) is a colored composition containing (A) a dye multimer and (B) a solvent, wherein (A) the dye multimer is a cation.
- a partial structure derived from a xanthene dye having a moiety hereinafter sometimes referred to as “dye structure”
- an anion moiety at least one of a sodium ion concentration and a potassium ion concentration in the composition of the present invention is 0.1 It is characterized by being ⁇ 10 ppm.
- a coloring composition that hardly generates foreign matter when placed in a low temperature environment (for example, ⁇ 30 to 0 ° C.) for a long period (for example, one month or more).
- a low temperature environment for example, ⁇ 30 to 0 ° C.
- a long period for example, one month or more.
- the generation of foreign matters can be more effectively suppressed.
- the sodium ion concentration and the potassium ion concentration are each preferably 1 to 10 ppm, more preferably 3 to 7 ppm. By adjusting to such a range, the effect of the present invention can be achieved more effectively.
- the toluene concentration in the composition is preferably 1 to 13 ppm, more preferably 2 to 10 ppm, and even more preferably 3 to 7 ppm.
- the line width of the pattern can be made more effective and uniform.
- the long-time leaving means that the film is left for a long time after the film is formed using the composition and before i-line exposure when forming the colored pattern.
- the line width of the pattern can be maintained more uniformly.
- the compatibility between the cationic site in the dye structure and the hydrophobic component in the composition can be improved, and even if left for a long time, The line width of the pattern can be maintained more uniformly without causing phase separation.
- the pattern size is 1.0 ⁇ m, and 1.0 mass% tetramethylammonium hydroxide is used as the developer after exposure, the pattern line width is made more uniform. Can be maintained.
- the water content in the composition is preferably 0.1 to 5% by mass, more preferably 0.1 to 1% by mass, and still more preferably 0.2 to 0.5% by mass. .
- the water content 3% by mass or less it is possible to more effectively suppress separation of the cation moiety and the anion moiety in the dye multimer.
- the photoexcited dye radical is less likely to be trapped by oxygen under a low oxygen concentration, and the dye is more difficult to be decomposed.
- the distance between the cation portion and the anion portion is not too close, so that energy transfer or electron transfer during photoexcitation is less likely to occur, and the dye is further decomposed. It becomes difficult.
- good light resistance can be maintained even when placed under a low oxygen concentration for a long period of time.
- good light resistance can be maintained even when irradiation is performed for two months or more at an illuminance of 500 lux under a low oxygen concentration.
- the solid content voltage holding ratio is preferably 10 to 80%, more preferably 60 to 99%, and more preferably 80 to 99%. preferable.
- a colored composition having a small viscosity change rate after a long period of time can be obtained by adopting the above-described configuration.
- the viscosity change rate can be reduced even after 3 months or more at room temperature (23 ° C.).
- a coloring composition having a low incidence of foreign matter when placed in various temperatures (for example, ⁇ 30 to 150 ° C.) and / or high humidity (for example, relative humidity of 80% or more) for a long time. can be obtained.
- the occurrence rate of foreign matters can be reduced when placed in a frozen (-15 ° C. or lower) environment for one month or longer, or when placed in a 110 ° C. 85% RH environment for two weeks or longer.
- the composition of the present invention is preferably used for forming a colored layer of a color filter.
- the coloring composition of the present invention preferably contains a curable compound and a pigment.
- the curable compound include a polymerizable compound and an alkali-soluble resin (including an alkali-soluble resin containing a polymerizable group), and are appropriately selected depending on the application and production method.
- the coloring composition of the present invention preferably contains a photopolymerization initiator.
- the colored composition of the present invention preferably contains a dye multimer, a solvent, an alkali-soluble resin as a curable compound, a pigment, and a photopolymerization initiator.
- components such as a surfactant may be included.
- hardenable compound, a pigment, and a photoinitiator are included.
- components such as a surfactant may be included.
- Dye multimers include structures such as dimers, trimers and polymers.
- the dye multimer functions as, for example, a colorant in the coloring composition of the present invention.
- the dye multimer preferably has a maximum absorption wavelength of 420 to 700 nm, and more preferably 450 to 650 nm.
- the acid value of the dye multimer is preferably 5 to 100 mgKOH / g, and more preferably 15 to 60 mgKOH / g.
- the repeating unit containing a structure derived from a dye is preferably 10 to 100 mol%, more preferably 50 to 100 mol% in the dye multimer when the total repeating unit is 100 mol%. More preferred is 60 to 100 mol%.
- the dye multimer has a partial structure derived from a xanthene dye having a cation moiety and an anion moiety.
- Preferred forms of the dye multimer include the following.
- a dye multimer comprising a monomer having a partial structure derived from a xanthene dye having a cation moiety and a repeating unit having a counter anion moiety.
- a dye multimer having another cation and anion moiety in the above will be described in detail.
- the counter anion moiety of the dye multimer (A) is preferably non-nucleophilic.
- Non-nucleophilic means the property of not causing nucleophilic attack on the dye by heating.
- the counter anion may be an organic anion or an inorganic anion, and an organic anion is preferred. Examples of the anion include those described in paragraph No. 0075 of JP2007-310315A, the contents of which are incorporated herein.
- a counter anion By using such a counter anion, the effect of the present invention tends to be exhibited more effectively.
- AN-1 As the bis (sulfonyl) imide anion, a structure represented by the following general formula (AN-1) is preferable.
- X 1 and X 2 each independently represents a fluorine atom or an alkyl group having 1 to 10 carbon atoms having a fluorine atom.
- X 1 and X 2 are bonded to each other to form a ring.
- X 1 and X 2 each independently represent a fluorine atom or an alkyl group having 1 to 10 carbon atoms having a fluorine atom, preferably a fluorine atom or an alkyl group having 1 to 10 carbon atoms having a fluorine atom, More preferred is a perfluoroalkyl group of ⁇ 10, more preferred is a perfluoroalkyl group having 1 to 4 carbon atoms, and a trifluoromethyl group is particularly preferred.
- a structure represented by the following general formula (AN-2) is preferable.
- X 3 , X 4 and X 5 each independently represents a fluorine atom or an alkyl group having 1 to 10 carbon atoms.
- X 3 , X 4 and X 5 are each independently the same as X 1 and X 2 , and the preferred range is also the same.
- the tetraarylborate anion is preferably a compound represented by the following general formula ((AN-5)).
- (AN-5), Ar 1 , Ar 2 , Ar 3 and Ar 4 each independently represents an aryl group.)
- Ar 1 , Ar 2 , Ar 3 and Ar 4 are each independently preferably an aryl group having 6 to 20 carbon atoms, more preferably an aryl group having 6 to 14 carbon atoms, and further an aryl group having 6 to 10 carbon atoms preferable.
- the aryl group represented by Ar 1 , Ar 2 , Ar 3 and Ar 4 may have a substituent.
- a halogen atom, an alkyl group, an aryl group, an alkoxy group, a carbonyl group, a carbonyloxy group, a carbamoyl group, a sulfo group, a sulfonamide group, a nitro group and the like can be mentioned, and a halogen atom and an alkyl group are preferable, A fluorine atom and an alkyl group are more preferred, and a fluorine atom and a C 1-4 perfluoroalkyl group are more preferred.
- Ar 1 , Ar 2 , Ar 3 and Ar 4 are each independently more preferably a phenyl group having a halogen atom and / or an alkyl group having a halogen atom, and a phenyl group having a fluorine atom and / or an alkyl group having fluorine. Is more preferable.
- the counter anion moiety is also —B (CN) n1 (OR a ) 4-n1 (R a represents an alkyl group having 1 to 10 carbon atoms or an aryl group having 6 to 10 carbon atoms, and n1 represents 1 to 4 carbon atoms. Preferably represents an integer).
- Ra as the alkyl group having 1 to 10 carbon atoms is preferably an alkyl group having 1 to 6 carbon atoms, and more preferably an alkyl group having 1 to 4 carbon atoms.
- R a as the aryl group having 6 to 10 carbon atoms is preferably a phenyl group or a naphthyl group.
- n1 is preferably 1 to 3, and more preferably 1 to 2.
- the counter anion moiety may further be —PF 6 R P (6-n2) ⁇ (R P represents a fluorinated alkyl group having 1 to 10 carbon atoms, and n2 represents an integer of 1 to 6).
- R P is preferably an alkyl group having 1 to 6 carbon atoms, more preferably an alkyl group having 1 to 4 carbon atoms, and further preferably a perfluoroalkyl group having 1 to 3 carbon atoms.
- n2 is preferably an integer of 1 to 4, and more preferably 1 or 2.
- the mass per molecule of the counter anion site is preferably 100 to 1,000, and more preferably 200 to 500.
- the dye multimer may contain only one type of counter anion site, or may contain two or more types.
- the dye structure in the present invention is a partial structure derived from a xanthene dye having a cation moiety, and a large amount of dye obtained by removing a hydrogen atom from a specific dye that can form a dye structure (hereinafter also referred to as a dye compound).
- a structure that can be connected to a body connecting part polymer chain, dendrimer core, etc.). Details of these will be described below.
- the dye structure is not particularly limited as long as it is a structure derived from a xanthene dye having a cation moiety, and various structures including known ones can be applied.
- Examples of the dye multimer (A) include those having a partial structure derived from a xanthene compound represented by the following general formula (J) as a partial structure of the dye part.
- R 81 , R 82 , R 83 and R 84 each independently represents a hydrogen atom or a monovalent substituent, and R 85 each independently represents a monovalent substituent.
- M represents an integer of 0 to 5.
- X ⁇ represents a counter anion moiety.
- R 81 to R 84 and R 85 in formula (J) are the same as the substituents mentioned in the section of substituent group A described later.
- R 81 and R 82 , R 83 and R 84 , and R 85 in the case where m is 2 or more are each independently bonded to each other to form a 5-, 6-, or 7-membered saturation.
- a ring or a 5-membered, 6-membered or 7-membered unsaturated ring may be formed.
- the 5-membered, 6-membered or 7-membered ring formed is a further substitutable group, it may be substituted with the substituents described for R 81 to R 85 above, and two or more substituents may be substituted. When substituted with a group, the substituents may be the same or different.
- R 81 and R 82 in general formula (J), R 83 and R 84 , and R 85 in the case where m is 2 or more are each independently bonded to each other, and have no substituents.
- 5-membered and 7-membered saturated ring or 5-membered, 6-membered and 7-membered unsaturated ring when forming 5-membered, 7-membered saturated ring or 5-membered, 6-membered and 7-membered
- the unsaturated ring include pyrrole ring, furan ring, thiophene ring, pyrazole ring, imidazole ring, triazole ring, oxazole ring, thiazole ring, pyrrolidine ring, piperidine ring, cyclopentene ring, cyclohexene ring, benzene ring and pyridine ring.
- a pyrazine ring and a pyridazine ring preferably a
- R 82 and R 83 are preferably a hydrogen atom or a substituted or unsubstituted alkyl group, and R 81 and R 84 are preferably a substituted or unsubstituted alkyl group or a phenyl group.
- R 85 is preferably a halogen atom, a linear or branched alkyl group having 1 to 5 carbon atoms, a sulfo group, a sulfonamide group, a carboxyl group, or an amide group. The sulfo group, the sulfonamide group, the carboxyl group, More preferred is an amide group.
- R 85 is preferably bonded to the adjacent part of carbon linked to the xanthene ring.
- the substituent that the phenyl group of R 81 and R 84 has is particularly preferably a hydrogen atom, a halogen atom, a linear or branched alkyl group having 1 to 5 carbon atoms, a sulfo group, a sulfonamide group, or a carboxyl group.
- the compound having a xanthene skeleton represented by the general formula (J) can be synthesized by a method described in the literature. Specifically, the methods described in Tetrahedron Letters, 2003, vol. 44, No. 23, pages 4355-4360, Tetrahedron, 2005, vol. 61, No. 12, pages 3097-3106, etc. Can be applied.
- xanthene compounds are shown below, but the present invention is not limited thereto.
- a hydrogen atom in the dye structure may be substituted with a substituent selected from the following substituent group A unless departing from the spirit of the present invention.
- Substituent group A examples of the substituent that the dye multimer may have include a halogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, an alkynyl group, an aryl group, a heterocyclic group, a cyano group, a hydroxyl group, a nitro group, Carboxyl group, alkoxy group, aryloxy group, silyloxy group, heterocyclic oxy group, acyloxy group, carbamoyloxy group, amino group (including alkylamino group and anilino group), acylamino group, aminocarbonylamino group, alkoxycarbonylamino group , Aryloxycarbonylamino group, sulfamoylamino group, alkyl or arylsulfonylamino group, mercapto group, alkylthio group, arylthio group, heterocyclic thi
- a halogen atom for example, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom
- a linear or branched alkyl group a linear or branched substituted or unsubstituted alkyl group, preferably an alkyl group having 1 to 30 carbon atoms
- a cycloalkyl group preferably substituted with 3 to 30 carbon atoms or Examples thereof include unsubstituted cycloalkyl groups such as cyclohexyl and cyclopentyl, and polycycloalkyl groups such as bicycloalkyl groups (preferably substituted or unsubstituted bicycloalkyl groups having 5 to 30 carbon atoms
- Linear or branched alkenyl group (straight or branched substituted or unsubstituted alkenyl group, preferably an alkenyl group having 2 to 30 carbon atoms, such as vinyl, allyl, prenyl, geranyl, oleyl), cycloalkenyl A group (preferably a substituted or unsubstituted cycloalkenyl group having 3 to 30 carbon atoms such as 2-cyclopenten-1-yl and 2-cyclohexen-1-yl, and a polycycloalkenyl group such as bicyclo An alkenyl group (preferably a substituted or unsubstituted bicycloalkenyl group having 5 to 30 carbon atoms such as bicyclo [2,2,1] hept-2-en-1-yl, bicyclo [2,2,2] Octo-2-en-4-yl) and tricycloalkenyl groups, with monocyclic cycloalkenyl groups being particularly preferred.
- Cycloalkenyl group (preferably a substituted or unsubstituted alkynyl group having 2 to 30 carbon atoms, e.g., ethynyl, propargyl, trimethylsilylethynyl group),
- An aryl group preferably a substituted or unsubstituted aryl group having 6 to 30 carbon atoms, such as phenyl, p-tolyl, naphthyl, m-chlorophenyl, o-hexadecanoylaminophenyl
- a heterocyclic group preferably 5 to 7-membered substituted or unsubstituted, saturated or unsaturated, aromatic or non-aromatic, monocyclic or condensed heterocyclic group, more preferably the ring-constituting atom is selected from carbon atom, nitrogen atom and sulfur atom
- a heterocyclic group having at least one hetero atom of any one of a nitrogen atom, an oxygen atom and a sulfur atom more preferably a 5- or 6-membered aromatic heterocyclic group having 3 to 30 carbon atoms
- alkoxy group preferably a substituted or unsubstituted alkoxy group having 1 to 30 carbon atoms such as methoxy, ethoxy, isopropoxy, tert-butoxy, n-octyloxy, 2-methoxyethoxy
- aryloxy group preferably Is a substituted or unsubstituted aryloxy group having 6 to 30 carbon atoms, such as phenoxy, 2-methylphenoxy, 2,4-di-tert-amylphenoxy, 4-tert-butylphenoxy, 3-nitrophenoxy, 2-tetradecanoylaminophenoxy
- silyloxy group preferably a silyloxy group having 3 to 20 carbon atoms, such as trimethylsilyloxy, tert-butyldimethylsilyloxy
- a heterocyclic oxy group preferably having a carbon number of 2 to 30 substituted or unsubstituted heterocyclic oxy groups , Heterocyclic portion is preferably described
- An acyloxy group (preferably a formyloxy group, a substituted or unsubstituted alkylcarbonyloxy group having 2 to 30 carbon atoms, a substituted or unsubstituted arylcarbonyloxy group having 6 to 30 carbon atoms, such as formyloxy, acetyloxy , Pivaloyloxy, stearoyloxy, benzoyloxy, p-methoxyphenylcarbonyloxy), a carbamoyloxy group (preferably a substituted or unsubstituted carbamoyloxy group having 1 to 30 carbon atoms such as N, N-dimethylcarbamoyloxy, N, N-diethylcarbamoyloxy, morpholinocarbonyloxy, N, N-di-n-octylaminocarbonyloxy, Nn-octylcarbamoyloxy), an alkoxycarbonyloxy group (preferably a substituent having 2
- amino group preferably an amino group, a substituted or unsubstituted alkylamino group having 1 to 30 carbon atoms, a substituted or unsubstituted arylamino group having 6 to 30 carbon atoms, or a heterocyclic amino group having 0 to 30 carbon atoms
- amino, methylamino, dimethylamino, anilino, N-methyl-anilino, diphenylamino, N-1,3,5-triazin-2-ylamino acylamino group (preferably formylamino group, carbon number A substituted or unsubstituted alkylcarbonylamino group having 1 to 30 carbon atoms, a substituted or unsubstituted arylcarbonylamino group having 6 to 30 carbon atoms, such as formylamino, acetylamino, pivaloylamino, lauroylamino, benzoylamino, 3, 4,5-tri-n-oc
- Aryloxycarbonylamino group (preferably a substituted or unsubstituted aryloxycarbonylamino group having 7 to 30 carbon atoms, such as phenoxycarbonylamino, p-chlorophenoxycarbonylamino, mn-octyloxyphenoxycarbonylamino)
- Sulfamoylamino group (preferably a substituted or unsubstituted sulfamoylamino group having 0 to 30 carbon atoms such as sulfamoylamino, N, N-dimethylaminosulfonylamino, Nn-octylamino Sulfonylamino), alkyl or arylsulfonylamino group (preferably substituted or unsubstituted alkylsulfonylamino group having 1 to 30 carbon atoms, substituted or unsubstituted arylsulfonylamino group having 6 to 30 carbon atom
- alkylthio group preferably a substituted or unsubstituted alkylthio group having 1 to 30 carbon atoms such as methylthio, ethylthio, n-hexadecylthio
- arylthio group preferably a substituted or unsubstituted arylthio group having 6 to 30 carbon atoms
- the heterocyclic portion described in the above is preferably, for example, 2-benzothiazolylthio, 1-phenyltetrazol-5-ylthio), a sulfamoyl group (preferably a substituted or unsubstituted sulfamoyl group having 0 to 30 carbon atoms, N-ethylsulfamoyl, N- (3-dodecyloxypropyl) sulfur Moil, N, N- dimethylsulfamoyl, N- acetyl sulfamoyl, N- benzoylsulfamoyl, N- (
- alkyl or arylsulfinyl group preferably a substituted or unsubstituted alkylsulfinyl group having 1 to 30 carbon atoms, a substituted or unsubstituted arylsulfinyl group having 6 to 30 carbon atoms, such as methylsulfinyl, ethylsulfinyl, phenylsulfinyl, p-methylphenylsulfinyl
- an alkyl or arylsulfonyl group preferably a substituted or unsubstituted alkylsulfonyl group having 1 to 30 carbon atoms, a substituted or unsubstituted arylsulfonyl group having 6 to 30 carbon atoms, such as methylsulfonyl , Ethylsulfonyl, phenylsulfonyl, p-methylphenylsulfonyl
- alkoxycarbonyl group preferably a substituted or unsubstituted alkoxycarbonyl group having 2 to 30 carbon atoms such as methoxycarbonyl, ethoxycarbonyl, tert-butoxycarbonyl, n-octadecyloxycarbonyl
- a carbamoyl group preferably having a carbon number 1-30 substituted or unsubstituted carbamoyl such as carbamoyl, N-methylcarbamoyl, N, N-dimethylcarbamoyl, N, N-di-n-octylcarbamoyl, N- (methylsulfonyl) carbamoyl), aryl or hetero
- a ring azo group preferably a substituted or unsubstituted arylazo group having 6 to 30 carbon atoms, a substituted or unsubstituted heterocyclic azo group having 3 to 30 carbon atoms (the heterocycle portion is the heterocycle
- a phosphinyloxy group (preferably a substituted or unsubstituted phosphinyloxy group having 2 to 30 carbon atoms, such as diphenoxyphosphinyloxy, dioctyloxyphosphinyloxy), a phosphinylamino group ( Preferably, it is a substituted or unsubstituted phosphinylamino group having 2 to 30 carbon atoms, for example, dimethoxyphosphinylamino, dimethylaminophosphinylamino), a silyl group (preferably a substitution having 3 to 30 carbon atoms) Or, an unsubstituted silyl group, for example, trimethylsilyl, tert-butyldimethylsilyl, phenyldimethylsilyl).
- those having a hydrogen atom may have a hydrogen atom portion in the functional group substituted with any of the above groups.
- functional groups that can be introduced as a substituent include an alkylcarbonylaminosulfonyl group, an arylcarbonylaminosulfonyl group, an alkylsulfonylaminocarbonyl group, and an arylsulfonylaminocarbonyl group.
- methylsulfonylaminocarbonyl examples thereof include p-methylphenylsulfonylaminocarbonyl, acetylaminosulfonyl and benzoylaminosulfonyl groups.
- the dye multimer (A) used in the coloring composition of the present invention is not particularly defined, but is at least one of repeating units represented by the following general formula (a1-1) and general formula (a1-2). It is preferable that the dye multimer contains one or a dye multimer represented by the general formula (a1-3).
- One type of repeating unit represented by formula (a1-1) may be contained in one type of dye multimer, or may be contained in two or more types. Furthermore, as will be described later, other repeating units may be included.
- X 1 represents a group forming a main chain. That is, it refers to a portion that forms a repeating unit corresponding to the main chain formed by the polymerization reaction.
- X 1 is not particularly limited as long as it is a linking group formed from a known polymerizable monomer, but is particularly preferably a linking group represented by the following (XX-1) to (X-24): 1) and a (meth) acrylic linking chain represented by (XX-2), a styrenic linking chain represented by (XX-10) to (XX-17), and (XX-24) More preferably selected from vinyl-based linking chains, (meth) acrylic linking chains represented by (XX-1) and (XX-2) and styrene-based linking chains represented by (XX-11) More preferred.
- L 1 represents a single bond or a divalent linking group.
- the divalent linking group includes a substituted or unsubstituted alkylene group having 1 to 30 carbon atoms (eg, methylene group, ethylene group, trimethylene group, propylene group, butylene).
- L 1 is more preferably a single bond or an alkylene group, and more preferably a single bond or — (CH 2 ) n— (n is an integer of 1 to 5).
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently.
- the divalent linking group represented by L 1 may be a group capable of ionic bonding or coordination bonding with DyeI.
- an anionic group or a cationic group may be used.
- the anionic group include —COO ⁇ , —PO 3 H ⁇ , —SO 3 ⁇ , —SO 3 NH ⁇ , —SO 3 N — CO—, and the like.
- —COO ⁇ , —PO 3 H ⁇ , — SO 3 - is preferred.
- Examples of the cationic group include substituted or unsubstituted onium cations (for example, ammonium, pyridinium, imidazolium, phosphonium and the like), and ammonium cations are particularly preferable.
- L 1 has a group capable of ionic bonding or coordination bonding with DyeI
- L 1 is an anion moiety (—COO ⁇ , —SO 3 ⁇ , —O 2 ⁇ , etc.) or a cation moiety (such as the above) that DyeI has.
- DyeI represents a dye structure derived from the dye compound described above.
- the dye multimer having the repeating unit represented by the general formula (a1-1) includes (1) a method of synthesizing a monomer having a dye residue by addition polymerization, (2) an isocyanate group, an acid anhydride group or an epoxy group. It can be synthesized by a method of reacting a polymer having a highly reactive functional group such as a dye with a functional group capable of reacting with the highly reactive group (hydroxyl group, primary or secondary amino group, carboxyl group, etc.).
- the addition polymerization can be applied to the addition polymerization, but among these, synthesis by radical polymerization is particularly preferable because the reaction conditions can be moderated and the dye structure is not decomposed.
- Known reaction conditions can be applied to the radical polymerization.
- the dye multimer having the repeating unit represented by the general formula (a1-1) is a radical obtained by radical polymerization using a dye monomer having an ethylenically unsaturated bond from the viewpoint of heat resistance. A polymer is preferred.
- repeating unit represented by formula (a1-1) Specific examples of the repeating unit represented by formula (a1-1) are shown below, but the present invention is not limited thereto.
- L 3 represents a single bond or a divalent linking group.
- the divalent linking group represented by L 3 include a substituted or unsubstituted linear, branched or cyclic alkylene group having 1 to 30 carbon atoms (eg, methylene group, ethylene group, trimethylene group, propylene group, butylene group).
- arylene groups having 6 to 30 carbon atoms eg, phenylene group, naphthalene group, etc.
- substituted or unsubstituted heterocyclic linking groups —CH ⁇ CH—, —O—, —S— , —NR— (R each independently represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group), —C ( ⁇ O) —, —SO—, —SO 2 —
- R each independently represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group
- —C ( ⁇ O) — —SO—, —SO 2 —
- these Preferable examples include a linking group formed by linking two or more.
- m represents 0 or 1, but is preferably 1.
- a dye multimer having a repeating unit represented by the general formula (a1-2) is synthesized by sequential polymerization.
- Sequential polymerization means polyaddition (for example, reaction of diisocyanate compound and diol, reaction of diepoxy compound and dicarboxylic acid, reaction of tetracarboxylic dianhydride and diol, etc.) and polycondensation (for example, dicarboxylic acid).
- a diol, a reaction of a dicarboxylic acid and a diamine, and the like are particularly preferable because the reaction conditions can be moderated and the dye structure is not decomposed. Known reaction conditions can be applied to the sequential polymerization.
- repeating unit represented by the general formula (a1-2) are shown below, but the present invention is not limited thereto.
- Formula (a1-3) (In general formula (a1-3), L 4 represents an n-valent linking group. N represents an integer of 2 to 20. DyeIV represents a dye structure having a cation moiety.)
- n is preferably 3 to 15, particularly preferably 3 to 6.
- the divalent linking group represented by L 4 is a substituted or unsubstituted alkylene group having 1 to 30 carbon atoms (eg, methylene group, ethylene group) , Trimethylene group, propylene group, butylene group, etc.), substituted or unsubstituted arylene group having 6 to 30 carbon atoms (eg, phenylene group, naphthalene group, etc.), substituted or unsubstituted heterocyclic linking group, —CH ⁇ CH —, —O—, —S—, —NR— (R each independently represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group), —C ( ⁇ O) —, —SO—. , —SO 2 —, and a linking group formed by linking two or more of these are preferable.
- n-valent linking group where n is 3 or more is a substituted or unsubstituted arylene group (1,3,5-phenylene group, 1,2,4-phenylene group, 1,4,5,8-naphthalene group, etc.) And a linking group formed by substituting the divalent linking group with a heterocyclic linking group (for example, 1,3,5-triazine group, etc.), an alkylene linking group or the like as a central mother nucleus.
- a heterocyclic linking group for example, 1,3,5-triazine group, etc.
- L 4 in the general formula (a1-3) are shown below, but the present invention is not limited thereto.
- part shown by * represents the connection site
- a dye multimer having at least one repeating unit represented by general formula (a1-1) and general formula (a1-2), and a dye multimer represented by general formula (a1-3) A dye multimer having a repeating unit represented by the general formula (a1-1), a dye multimer having a repeating unit represented by the general formula (a1-2), and a general formula (a1-3)
- the coloring composition containing the dye multimer is excellent in heat resistance. For this reason, when a coloring composition is applied to pattern formation which has a high temperature process, since it is effective in the color transfer suppression to other adjacent coloring patterns, it is preferable.
- the compound represented by formula (a1-1) is preferable because the molecular weight of the dye multimer can be easily controlled.
- the dye multimer may have another functional group in the dye structure portion of the dye multimer described above. Examples of other functional groups include polymerizable groups, acid groups, and alkali-soluble groups.
- the dye multimer may contain other repeating units in addition to the repeating unit containing the dye structure described above. Other repeating units may have a functional group.
- the repeating unit containing at least 1 sort (s) of a polymeric group, an acid group, and an alkali-soluble group is illustrated. That is, the dye multimer may have other repeating units in addition to the repeating units represented by the general formulas (a1-1) to (a1-3). One type of other repeating unit may be included in one dye multimer, or two or more types may be included.
- the dye multimer may have another functional group in the dye multimer represented by the general formulas (a1-1) to (a1-3). Details of these will be described below.
- the dye multimer preferably contains a polymerizable group.
- One type of polymerizable group may be included, or two or more types may be included.
- the dye structure may contain a polymerizable group, or may contain other parts.
- the dye structure preferably includes a polymerizable group. By adopting such a configuration, the heat resistance tends to be improved.
- dye structure contain a polymeric group is also preferable.
- the polymerizable group a known polymerizable group that can be crosslinked by a radical, acid, or heat can be used.
- a group containing an ethylenically unsaturated bond a cyclic ether group (epoxy group, oxetane group), a methylol group
- a group containing an ethylenically unsaturated bond is preferable, a (meth) acryloyl group is more preferable, glycidyl (meth) acrylate and (meth) derived from 3,4-epoxycyclohexylmethyl (meth) acrylate More preferred is an acryloyl group.
- the polymerizable group is preferably contained as a repeating unit having a polymerizable group in the dye multimer, and more preferably as a repeating unit having an ethylenically unsaturated bond. That is, an example of a preferred embodiment of the dye multimer is an embodiment in which the dye multimer contains a repeating unit containing a dye monomer and a repeating unit having a polymerizable group.
- the repeating unit containing a dye monomer and ethylene It is more preferable to contain a repeating unit having a polymerizable unsaturated bond.
- a method for introducing a polymerizable group (1) a method in which a dye multimer is modified and introduced with a polymerizable group-containing compound, and (2) a method in which a dye monomer and a polymerizable group-containing compound are copolymerized and introduced. Etc. Details will be described below.
- a method of introducing a dye multimer after modifying it with a polymerizable group-containing compound As a method for introducing the dye multimer by modifying with a polymerizable group-containing compound, a known method can be used without any particular limitation. For example, (a) a method of reacting a carboxylic acid contained in a dye multimer with an unsaturated bond-containing epoxy compound, and (b) a method of reacting a hydroxyl group or amino group of the dye multimer with an unsaturated bond-containing isocyanate compound. (C) A method of reacting an epoxy compound contained in the dye multimer with an unsaturated bond-containing carboxylic acid compound is preferable from the viewpoint of production.
- the unsaturated bond-containing epoxy compound in the method of reacting the carboxylic acid contained in the dye multimer with the unsaturated bond-containing epoxy compound includes glycidyl methacrylate, glycidyl acrylate, allyl glycidyl ether, and 3,4-epoxycyclohexyl. Examples thereof include methyl acrylate, 3,4-epoxy-cyclohexylmethyl methacrylate, and glycidyl methacrylate and 3,4-epoxy-cyclohexylmethyl methacrylate are particularly preferable because of excellent crosslinkability and storage stability.
- Known conditions can be used as the reaction conditions.
- Known conditions can be used as the reaction conditions.
- the unsaturated bond-containing carboxylic acid compound in the method of reacting the epoxy compound of the dye multimer with the unsaturated bond-containing carboxylic acid compound is particularly a carboxylic acid compound having a known (meth) acryloyloxy group
- methacrylic acid and acrylic acid are preferable, and methacrylic acid is particularly preferable because of excellent crosslinkability and storage stability.
- Known conditions can be used as the reaction conditions.
- a method in which a dye monomer and a polymerizable group-containing compound are copolymerized and introduced (2) As a method for copolymerizing and introducing a dye monomer and a polymerizable group-containing compound, known methods can be used without any particular limitation.
- D A radically polymerizable dye monomer and a radical can be used.
- a method of copolymerizing a polymerizable group-containing compound that can be polymerized, and a method (e) a method of copolymerizing a dye monomer capable of polyaddition and a polymerizable group-containing compound capable of polyaddition are preferred.
- a radically polymerizable polymerizable group-containing compound in a method of copolymerizing a radically polymerizable dye monomer and a radically polymerizable polymerizable group-containing compound an allyl group-containing compound (for example, (meth)) Allyl acrylate), epoxy group-containing compounds (for example, glycidyl (meth) acrylate, 3,4-epoxy-cyclohexylmethyl (meth) acrylate, etc.), oxetane group-containing compounds (for example, 3-methyl-3-oxetanylmethyl (meth) ) Acrylate, etc.) and methylol group-containing compounds (for example, N- (hydroxymethyl) acrylamide etc.), and epoxy compounds and oxetane compounds are particularly preferred.
- Known conditions can be used as the reaction conditions.
- a method for introducing a polymerizable group a method in which a carboxylic acid contained in a dye multimer is reacted with an unsaturated bond-containing epoxy compound is particularly preferable.
- the polymerizable group amount of the dye multimer is preferably 0.1 to 2.0 mmol, more preferably 0.2 to 1.5 mmol, and more preferably 0.3 to 1 g of the dye multimer (A). Particularly preferred is ⁇ 1.0 mmol.
- the ratio of the repeating unit in which the dye multimer contains a polymerizable group is, for example, preferably 5 to 50 mol, and more preferably 10 to 20 mol with respect to 100 mol of all repeating units.
- a method for introducing a polymerizable group a method in which a carboxylic acid contained in a dye multimer is reacted with an unsaturated bond-containing epoxy compound is particularly preferable.
- repeating unit having a polymerizable group examples include the following. However, the present invention is not limited to these.
- a dye monomer having an ethylenically unsaturated bond is preferable, among which a methacryloyl group, an acryloyl group, a styryl group, or a vinyloxy group is preferable, and a methacryloyl group.
- An acryloyl group is more preferable, and a methacryloyl group is more preferable.
- Acid group and alkali-soluble group of dye multimer (A) >>>
- the acid group that the dye multimer may have include a carboxylic acid group, a sulfonic acid group, and a phosphoric acid group.
- the alkali-soluble group include a phenolic hydroxyl group and a carboxylic acid group.
- the acid value of the repeating unit having an acid group is preferably 15 mgKOH / g to 110 mgKOH / g, more preferably 20 mgKOH / g to 90 mgKOH / g, and preferably 30 mgKOH / g to 60 mgKOH / g. Further preferred.
- the acid value of the dye multimer can be calculated from, for example, the average content of acid groups in the dye multimer.
- the resin which has a desired acid value can be obtained by changing content of the monomer unit containing the acid group which comprises a pigment
- a method for introducing an alkali-soluble group into a dye multimer a method in which an alkali-soluble group is introduced into a dye monomer in advance, and a monomer other than a dye monomer having an alkali-soluble group ((meth) acrylic acid, acrylic Modified product of caprolactone of acid, modified product of succinic anhydride of 2-hydroxyethyl (meth) acrylate, modified product of phthalic anhydride of 2-hydroxyethyl (meth) acrylate, 1,2-hydroxyethyl (meth) acrylate 2-cyclohexanedicarboxylic acid anhydride modified product, carboxylic acid-containing monomer such as styrene carboxylic acid, itaconic acid, maleic acid, norbornene carboxylic acid, phosphoric acid-containing monomer such as acid phosphooxyethyl methacrylate, vinyl phosphonic acid, vinyl sulfonic acid, Such as 2-acrylamido-2-methylsulf
- the amount of the alkali-soluble group contained in the dye multimer is preferably from 0.3 mmol to 2.0 mmol, more preferably from 0.4 mmol to 1.5 mmol, more preferably from 0.5 mmol to 1. Particularly preferred is 0 mmol.
- the dye multimer contains a repeating unit containing a dye monomer and a repeating unit having an acid group
- the ratio of the repeating unit containing a repeating unit having an acid group is 100 repeating units containing a dye monomer. For example, 5-70 mol is preferable with respect to mol, and 10-50 mol is more preferable.
- Other functional groups possessed by the dye multimer include development accelerators such as lactones, acid anhydrides, amides, —COCH 2 CO—, cyano groups, long chain and cyclic alkyl groups, aralkyl groups, aryl groups, polyalkylene oxide groups And an affinity adjusting group such as a hydroxyl group, a maleimide group, and an amino group, and the like, which can be appropriately introduced.
- the introduction method include a method of introducing the dye monomer in advance and a method of copolymerizing the monomer having the functional group.
- repeating unit having another functional group that the dye multimer has are shown below, but the present invention is not limited thereto.
- the form (A2) of the dye multimer is a dye multimer having a repeating unit having a dye structure and having an anion moiety in the dye structure.
- the dye multimer preferably includes a repeating unit represented by the general formula (a2).
- Formula (a2) (In the general formula (a2), X 1 represents a group forming a main chain, L 1 represents a single bond or a divalent linking group.
- DyeIA represents a dye structure having a cation moiety and an anion moiety.)
- X 1 and L 1 have the same meaning as in general formula (a1-1) described above, and the preferred ranges are also the same.
- DyeIA is one in which DyeI in general formula (a1-1) described above further has an anion moiety. Examples of the anion moiety include —SO 3 ⁇ , —CO 2 2 ⁇ and the like.
- the form (A3) of the dye multimer is a dye multimer comprising a monomer having a dye structure and a repeating unit having a counter anion site.
- the monomer which has a pigment structure is synonymous with the monomer containing the partial structure derived from the xanthene compound represented by the general formula (J) mentioned above.
- the repeating unit having a counter anion moiety preferably includes a repeating unit represented by the following general formula (a3).
- General formula (a3) In general formula (a3), X 1 represents a group forming a main chain, L 2 represents a single bond or a divalent linking group, and Z represents a structure having a counter anion site.)
- X 1 has the same meaning as in general formula (a1-1) described above, and the preferred range is also the same.
- L 2 represents a divalent linking group, an alkylene group having 1 to 20 carbon atoms (preferably 1 to 10), an arylene group having 6 to 20 carbon atoms (preferably 6 to 10) A heterocyclic group having 4 to 20 carbon atoms (preferably 5 to 10), an alkylsulfonyl group having 1 to 20 carbon atoms (preferably 1 to 10), and an arylsulfonyl group having 6 to 20 carbon atoms, preferably 6 to 10 carbon atoms.
- alkylcarbonyl group having 1 to 20 carbon atoms preferably 1 to 10
- an arylcarbonyl group having 6 to 20 carbon atoms preferably 6 to 11
- an alkyl having 1 to 20 carbon atoms preferably 1 to 10 carbon atoms
- the aryl Such as Ruboniruokishi group, and the like.
- These divalent linking groups are preferably substituted with an electron-withdrawing group.
- Examples of the electron-withdrawing group include a halogen atom (fluorine atom, chlorine atom, bromine atom, iodine atom), nitro group, cyano group, Examples thereof include a halogenated alkyl group (for example, a trifluoromethyl group) and a halogenated aryl group.
- L 2 is substituted with a fluorine atom having 1 to 10 carbon atoms when Z in the general formula (1), which will be described later, has a low nucleophilic anion structure represented by the general formula (2-1).
- An alkylene group fluorinated alkylene group is preferred.
- Z represents a group represented by the general formula (2-1), a fluorinated alkylsulfonimide group or a fluorinated alkylsulfonemethide group, or a group represented by the general formula (2-3). Is preferably represented.
- the form (A4) of the dye multimer is a dye multimer having other cation and anion sites.
- a monomer having a dye structure and a repeating unit having a cation moiety and the monomer having a dye structure is a dye multimer containing a corresponding anion moiety.
- the repeating unit having a cation moiety the description in paragraphs 0018 to 0061 of JP2011-242752A can be referred to, and the contents thereof are incorporated in the present specification.
- Examples of the monomer having a dye structure containing a corresponding anion moiety include C.I. I. Acid Red 289 is exemplified.
- the description in paragraph 0165 of JP2011-242752A can be referred to, and the contents thereof are incorporated in the present specification.
- the dye multimer preferably has a maximum absorption wavelength of 420 to 700 nm, and more preferably 450 to 650 nm.
- the acid value of the dye multimer is preferably 5 to 100 mgKOH / g, and more preferably 15 to 60 mgKOH / g.
- the repeating unit containing a structure derived from a dye is preferably 10 to 100 mol%, more preferably 50 to 100 mol% in the dye multimer when the total repeating unit is 100 mol%. More preferred is 60 to 100 mol%.
- the weight average molecular weight of the dye multimer is preferably from 2,000 to 20,000, more preferably from 3,000 to 15,000, and particularly preferably from 4,000 to 10,000.
- the weight average molecular weight and the number average molecular weight can be determined by gel permeation chromatography (GPC). Further, the ratio [(Mw) / (Mn)] of the weight average molecular weight (Mw) and the number average molecular weight (Mn) of the dye multimer is preferably 1.0 to 3.0, preferably 1.6 to It is more preferably 2.5, and particularly preferably 1.6 to 2.0.
- the glass transition temperature (Tg) of the dye multimer is preferably 50 ° C. or higher, and more preferably 100 ° C. or higher. Further, the 5% weight loss temperature by thermogravimetric analysis (TGA measurement) is preferably 120 ° C. or higher, more preferably 150 ° C. or higher, and further preferably 200 ° C. or higher.
- the molar extinction coefficient of the dye multimer is preferably as high as possible from the viewpoint of coloring power.
- the reduced viscosity of the dye multimer is preferably from 4.0 to 10.0, more preferably from 5.0 to 9.0, and from 6.0 to 7.0 from the viewpoint of color transfer. More preferably.
- the reduced viscosity can be measured using, for example, an Ubbelohde viscometer.
- the dye multimer is preferably a compound that dissolves in the following solvent.
- the solvent include esters (for example, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl lactate, butyl acetate, methyl 3-methoxypropionate), ethers (for example, methyl cellosolve acetate, ethyl cellosolve acetate, Propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, etc.), ketones (methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone, etc.), and aromatic hydrocarbons (eg, toluene, xylene, etc.).
- esters for example, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl lactate, butyl acetate, methyl 3-methoxypropionate
- ethers for example,
- the dye multimer may be used alone or in combination of two or more. When using 2 or more types, it is preferable that the total amount corresponds to content mentioned later.
- the content of the dye multimer (A) in the colored composition of the present invention is preferably set in consideration of the content ratio with the pigment described later.
- the mass ratio of the dye multimer to the pigment (dye multimer (A) / pigment) is preferably from 0.1 to 5, more preferably from 0.2 to 2, and further preferably from 0.3 to 1.
- the coloring composition of this invention may contain well-known dyes other than the pigment
- dyes for example, JP-A-64-90403, JP-A-64-91102, JP-A-1-94301, JP-A-6-11614, Tokuho 2592207, U.S. Pat. No. 4,808,501, U.S. Pat. No., US Pat. No. 505950, US Pat. No.
- the chemical structure includes pyrazole azo, pyromethene, anilinoazo, triphenylmethane, anthraquinone, benzylidene, oxonol, pyrazolotriazole azo, pyridone azo, cyanine, phenothiazine, pyrrolopyrazole azomethine, etc. Dyes can be used.
- the coloring composition of the present invention contains a solvent.
- the solvent is basically not particularly limited as long as the solubility of each component and the coating property of the coloring composition are satisfied, but the solubility, coating property, and safety of UV absorbers, alkali-soluble resins and dispersants, etc. Is preferably selected in consideration of
- esters such as ethyl acetate, n-butyl acetate, isobutyl acetate, amyl formate, isoamyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl lactate, ethyl lactate, Alkyl oxyacetates (eg, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate (eg, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate)), 3-oxypropionic acid alkyl esters (Eg, methyl 3-oxypropionate, ethyl 3-oxypropionate, etc.
- esters such as ethyl acetate, n-butyl acetate, iso
- ethers For example, diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve acetate, ethyl cellosolve acetate, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, Examples of propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, etc., and ketones such as methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone, cyclopentanone, and aromatic hydrocarbons For example, toluene, xylene and the like are preferable.
- a solvent having a molecular weight in the range of 90 to 135 or a boiling point in the range of 120 to 160 ° C. is preferable from the viewpoint of drying after coating.
- Applicable to these are n-butyl acetate, propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, cyclohexanone, and cyclopentanone.
- organic solvents are preferably mixed in two or more types from the viewpoints of solubility of the alkali-soluble resin and improvement of the coated surface.
- these organic solvents contain 10% or more of a solvent excellent in solubility of xanthene dyes, such as cyclohexanone, cyclopentanone, and propylene glycol monomethyl ether, to improve the holding stability. It can be improved further.
- a solvent excellent in solubility of xanthene dyes such as cyclohexanone, cyclopentanone, and propylene glycol monomethyl ether
- the content of the solvent in the colored composition is preferably such that the total solid content of the composition is 5 to 90% by mass, more preferably 5 to 60% by mass, from the viewpoint of applicability. 50% by mass is particularly preferred.
- the composition of the present invention may contain only one type of solvent or two or more types of solvents. When two or more types are included, the total amount is preferably within the above range.
- the colored composition of the present invention preferably contains a curable compound.
- a curable compound a known polymerizable compound that can be cross-linked by a radical, acid, or heat can be used.
- a polymerizable compound containing an ethylenically unsaturated bond, a cyclic ether (epoxy, oxetane), methylol, or the like can be used.
- the polymerizable compound is suitably selected from compounds having at least one terminal ethylenically unsaturated bond, preferably two or more, from the viewpoint of sensitivity.
- a polyfunctional polymerizable compound is preferable, a polyfunctional polymerizable compound having 4 or more functions is more preferable, 5 functions or more is more preferable, and 6 functions or more is particularly preferable.
- it is a polyfunctional monomer (preferably tetrafunctional or higher, more preferably hexafunctional or higher), and an alkylene oxide-modified one is preferable.
- Such a group of compounds is widely known in the industrial field of the present invention, and these can be used without particular limitation in the present invention. These may be in any chemical form such as, for example, monomers, prepolymers, ie dimers, trimers and oligomers or mixtures thereof and multimers thereof.
- the polymeric compound in this invention may be used individually by 1 type, and may use 2 or more types together.
- examples of monomers and prepolymers thereof include unsaturated carboxylic acids (for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.), esters thereof, amides, And multimers thereof, preferably esters of unsaturated carboxylic acids and aliphatic polyhydric alcohol compounds, amides of unsaturated carboxylic acids and aliphatic polyhydric amine compounds, and multimers thereof. is there.
- unsaturated carboxylic acids for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
- esters thereof for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
- esters thereof for example, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
- a dehydration condensation reaction product with a functional carboxylic acid is also preferably used.
- an addition reaction product of an unsaturated carboxylic acid ester or amide having an electrophilic substituent such as an isocyanate group or an epoxy group with a monofunctional or polyfunctional alcohol, amine, or thiol, and a halogen group A substitution reaction product of an unsaturated carboxylic acid ester or amide having a detachable substituent such as a tosyloxy group and a monofunctional or polyfunctional alcohol, amine or thiol is also suitable.
- the compounds described in paragraphs 0095 to 0108 of JP-A-2009-288705 can also be suitably used in the present invention.
- a compound having at least one addition-polymerizable ethylene group and having an ethylenically unsaturated group having a boiling point of 100 ° C. or higher under normal pressure is also preferable.
- examples include monofunctional acrylates and methacrylates such as polyethylene glycol mono (meth) acrylate, polypropylene glycol mono (meth) acrylate, and phenoxyethyl (meth) acrylate; polyethylene glycol di (meth) acrylate, trimethylolethanetri ( (Meth) acrylate, neopentyl glycol di (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, hexanediol (
- polyfunctional acrylates and methacrylates such as epoxy acrylates which are reaction products of epoxy resin and (meth) acrylic acid, and mixtures thereof.
- a polyfunctional (meth) acrylate obtained by reacting a polyfunctional carboxylic acid with a compound having a cyclic ether group such as glycidyl (meth) acrylate and an ethylenically unsaturated group can also be used.
- fluorene rings described in JP 2010-160418 A, JP 2010-129825 A, JP 4364216 A, etc., and ethylenically unsaturated groups.
- a compound having two or more functions, a cardo resin can also be used.
- radically polymerizable monomers represented by the following general formulas (MO-1) to (MO-5) can also be suitably used.
- T is an oxyalkylene group
- the terminal on the carbon atom side is bonded to R.
- n is 0 to 14, and m is 1 to 8.
- a plurality of R and T present in one molecule may be the same or different.
- at least one of a plurality of R is —OC ( ⁇ O) CH ⁇ CH 2 or —OC A group represented by ( ⁇ O) C (CH 3 ) ⁇ CH 2 is represented.
- Specific examples of the polymerizable compounds represented by the above general formulas (MO-1) to (MO-5) include the compounds described in paragraph numbers 0248 to 0251 of JP-A-2007-2699779. It can be suitably used in the invention.
- dipentaerythritol triacrylate (KAYARAD D-330; manufactured by Nippon Kayaku Co., Ltd.) and dipentaerythritol tetraacrylate (KAYARAD D-320 as commercially available products) are available as polymerizable compounds.
- dipentaerythritol penta (meth) acrylate commercially available KAYARAD D-310; manufactured by Nippon Kayaku Co., Ltd.
- dipentaerythritol hexa (meth) acrylate commercially available product KAYARAD DPHA; Nippon Kayaku Co., Ltd.
- KAYARAD DPHA commercially available product KAYARAD DPHA; Nippon Kayaku Co., Ltd.
- the polymerizable compound is a polyfunctional monomer and may have an acid group such as a carboxyl group, a sulfonic acid group, or a phosphoric acid group. If the ethylenic compound has an unreacted carboxyl group as in the case of a mixture as described above, this can be used as it is. Non-aromatic carboxylic acid anhydrides may be reacted to introduce acid groups.
- non-aromatic carboxylic acid anhydride examples include tetrahydrophthalic anhydride, alkylated tetrahydrophthalic anhydride, hexahydrophthalic anhydride, alkylated hexahydrophthalic anhydride, succinic anhydride, anhydrous Maleic acid is mentioned.
- the monomer having an acid group is an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid, and a non-aromatic carboxylic acid anhydride is reacted with an unreacted hydroxyl group of the aliphatic polyhydroxy compound.
- a polyfunctional monomer having an acid group is preferable, and in this ester, the aliphatic polyhydroxy compound is pentaerythritol and / or dipentaerythritol.
- Examples of commercially available products include M-510 and M-520 as polybasic acid-modified acrylic oligomers manufactured by Toagosei Co., Ltd.
- a preferable acid value of the polyfunctional monomer having an acid group is 0.1 mgKOH / g to 40 mgKOH / g, and particularly preferably 5 mgKOH / g to 30 mgKOH / g.
- the acid value of the polyfunctional monomer is too low, the developing dissolution properties are lowered, and if it is too high, the production and handling are difficult, the photopolymerization performance is lowered, and the curability such as the surface smoothness of the pixel is deteriorated. Accordingly, when two or more polyfunctional monomers having different acid groups are used in combination, or when a polyfunctional monomer having no acid group is used in combination, the acid groups as the entire polyfunctional monomer should be adjusted so as to fall within the above range. Is preferred.
- polyfunctional monomer which has a caprolactone structure is not particularly limited as long as it has a caprolactone structure in the molecule.
- R 1 represents a hydrogen atom or a methyl group
- m represents a number of 1 or 2
- “*” represents a bond
- R 1 represents a hydrogen atom or a methyl group, and “*” represents a bond.
- the polyfunctional monomer which has a caprolactone structure can be used individually or in mixture of 2 or more types.
- the specific monomer in the present invention is preferably at least one selected from the group of compounds represented by the following general formula (Z-4) or (Z-5).
- each E is independently — ((CH 2 ) yCH 2 O) — or — ((CH 2 ) yCH (CH 3 ) O) —.
- Each represents independently an integer of 0 to 10
- each X independently represents an acryloyl group, a methacryloyl group, a hydrogen atom, or a carboxyl group.
- the total number of acryloyl groups and methacryloyl groups is 3 or 4
- each m independently represents an integer of 0 to 10
- the total of each m is an integer of 0 to 40. is there. However, when the total of each m is 0, any one of X is a carboxyl group.
- the total number of acryloyl groups and methacryloyl groups is 5 or 6, each n independently represents an integer of 0 to 10, and the total of each n is an integer of 0 to 60. However, when the total of each n is 0, any one of X is a carboxyl group.
- m is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
- the total of each m is preferably an integer of 2 to 40, more preferably an integer of 2 to 16, and particularly preferably an integer of 4 to 8.
- n is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
- the total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and particularly preferably an integer of 6 to 12.
- — ((CH 2 ) yCH 2 O) — or — ((CH 2 ) yCH (CH 3 ) O) — represents an oxygen atom side.
- a form in which the terminal of X is bonded to X is preferred.
- the compounds represented by the general formula (Z-4) or the general formula (Z-5) may be used alone or in combination of two or more.
- a form in which all six Xs are acryloyl groups is preferable.
- the total content of the compound represented by the general formula (Z-4) or the general formula (Z-5) in the polymerizable compound is preferably 20% by mass or more, and more preferably 50% by mass or more.
- the compound represented by the general formula (Z-4) or the general formula (Z-5) is a conventionally known process, in which ethylene oxide or propylene oxide is ring-opened to pentaerythritol or dipentaerythritol. It can be synthesized from a step of bonding a ring-opening skeleton by an addition reaction and a step of introducing a (meth) acryloyl group by reacting, for example, (meth) acryloyl chloride with a terminal hydroxyl group of the ring-opening skeleton. Each step is a well-known step, and a person skilled in the art can easily synthesize a compound represented by the general formula (i) or (ii).
- pentaerythritol derivatives and / or dipentaerythritol derivatives are more preferable.
- Specific examples include compounds represented by the following formulas (a) to (f) (hereinafter also referred to as “exemplary compounds (a) to (f)”).
- exemplary compounds (a), (f) b), (e) and (f) are preferred.
- Examples of commercially available polymerizable compounds represented by the general formulas (Z-4) and (Z-5) include SR-494, a tetrafunctional acrylate having four ethyleneoxy chains manufactured by Sartomer, Nippon Kayaku Examples thereof include DPCA-60, which is a hexafunctional acrylate having six pentyleneoxy chains, and TPA-330, which is a trifunctional acrylate having three isobutyleneoxy chains.
- polymerizable compound examples include urethane acrylates as described in JP-B-48-41708, JP-A-51-37193, JP-B-2-32293, and JP-B-2-16765. Also suitable are urethane compounds having an ethylene oxide skeleton as described in JP-B-58-49860, JP-B-56-17654, JP-B-62-39417, and JP-B-62-39418. Furthermore, addition polymerizable compounds having an amino structure or a sulfide structure in the molecule described in JP-A-63-277653, JP-A-63-260909, and JP-A-1-105238 are described as polymerizable compounds.
- polymerizable compounds include urethane oligomers UAS-10, UAB-140 (Sanyo Kokusaku Pulp Co., Ltd.), UA-7200 (Shin Nakamura Chemical Co., Ltd., DPHA-40H (Nippon Kayaku Co., Ltd.), UA- 306H, UA-306T, UA-306I, AH-600, T-600, AI-600 (manufactured by Kyoeisha) and the like.
- cyclic ether examples include those having an epoxy group such as bisphenol A type epoxy resin, JER-827, JER-828, JER-834, JER-1001, JER-1002, JER-1003.
- JER-1055, JER-1007, JER-1009, JER-1010 manufactured by Japan Epoxy Resin Co., Ltd.
- EPICLON 860, EPICLON 1050, EPICLON 1051, EPICLON 1055 manufactured by DIC Corporation
- bisphenol F As type epoxy resins, JER-806, JER-807, JER-4004, JER-4005, JER-4007, JER-4010 (above, manufactured by Japan Epoxy Resins Co., Ltd.), EPICLON83 EPICLON 835 (above, manufactured by DIC Corporation), LCE-21, RE-602S (above, manufactured by Nippon Kayaku Co., Ltd.), etc., and phenol novolac type epoxy resins such as JER-152, JER-154, JER -157S70, JER-157S65 (above, manufactured by Japan Epoxy Resin Co., Ltd.), EPICLON® N-740, EPICLON® N-
- EPICLON N-660, EPICLON N-665, EPICLON N-670, EPICLON ⁇ N-673, EPICLON N-680, EPICLON N-690 (above, manufactured by DIC Corporation), EOCN-1020 (Below (Manufactured by Nippon Kayaku Co., Ltd.), as aliphatic epoxy resins, ADEKA RESIN EP-4080S, EP-4085S, EP-4088S (above, manufactured by ADEKA) Celoxide 2021P, Celoxide 2081, Celoxide 2083, Celoxide 2085, EHPE-3150 (1,2-epoxy-4- (2-oxiranyl) cyclohexane adduct of 2,2-bis (hydroxymethyl) -1-butanol), EPOLEEAD PB 3600, PB 4700 (above, Daicel) Chemical Industry Co., Ltd.), Denacol® EX-211L, EX-212L, EX-214L, EX-216
- the details of usage methods can be arbitrarily set according to the final performance design of a coloring composition.
- a structure having a high unsaturated group content per molecule is preferable, and in many cases, a bifunctional or higher functionality is preferable.
- those having three or more functional groups are preferable, and further, different numbers of functional groups / different polymerizable groups (for example, acrylic acid ester, methacrylic acid ester, styrenic compound, A method of adjusting both sensitivity and strength by using a combination of vinyl ether compounds) is also effective.
- a tri- or higher functional polymerizable compound having a different ethylene oxide chain length in that the developability of the colored composition can be adjusted and an excellent pattern forming ability can be obtained.
- the compatibility and dispersibility with other components (for example, photopolymerization initiators, dispersions, alkali-soluble resins, etc.) contained in the colored composition are also selected and used as a polymerizable compound. This is an important factor. For example, compatibility may be improved by using a low-purity compound or using two or more kinds in combination.
- a specific structure may be selected from the viewpoint of improving adhesion to a hard surface such as a support.
- the content of the curable compound in the composition of the present invention is preferably 0.1 to 90% by mass, more preferably 1.0 to 60% by mass, and more preferably 2.0 to 40% by mass is particularly preferred.
- the composition of the present invention may contain only one type of curable compound, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- the colored composition of the present invention preferably further contains (C) a pigment.
- a pigment As the pigment used in the present invention, various conventionally known inorganic pigments or organic pigments can be used, and organic pigments are preferably used.
- the pigment preferably has a high transmittance.
- inorganic pigments include metal compounds represented by metal oxides, metal complex salts, and the like. Specifically, iron, cobalt, aluminum, cadmium, lead, copper, titanium, magnesium, chromium, zinc, antimony, etc. And black pigments such as composite oxides of the above metals, carbon black and titanium black.
- organic pigment for example, C. I. Pigment yellow 11,24,31,53,83,93,99,108,109,110,138,139,147,150,151,154,155,167,180,185,199; C. I. Pigment orange 36, 38, 43, 71; C. I. Pigment red 81,105,122,149,150,155,171,175,176,177,209,220,224,242,254,255,264,270; C. I. Pigment violet 19, 23, 32, 39; C. I. Pigment Blue 1, 2, 15, 15: 1, 15: 3, 15: 6, 16, 22, 60, 66; C. I. Pigment green 7, 36, 37, 58; C. I. Pigment brown 25, 28; C. I. Pigment black 1; Etc.
- organic pigments can be used alone or in various combinations in order to adjust the spectrum and increase the color purity. Specific examples of the above combinations are shown below.
- a red pigment an anthraquinone pigment, a perylene pigment, a diketopyrrolopyrrole pigment alone or at least one of them, a disazo yellow pigment, an isoindoline yellow pigment, a quinophthalone yellow pigment or a perylene red pigment , Etc.
- an anthraquinone pigment C.I. I. Pigment red 177
- perylene pigments include C.I. I. Pigment red 155, C.I. I.
- Pigment Red 224, and diketopyrrolopyrrole pigments include C.I. I. Pigment Red 254, and C.I. I. Mixing with Pigment Yellow 139 is preferred.
- the mass ratio of the red pigment to the yellow pigment is preferably 100: 5 to 100: 50. When the ratio is 100: 4 or less, it is difficult to suppress the light transmittance from 400 nm to 500 nm. When the ratio is 100: 51 or more, the main wavelength tends to be closer to the short wavelength, and the color resolution may not be improved. In particular, the mass ratio is optimally in the range of 100: 10 to 100: 30. In the case of a combination of red pigments, it can be adjusted in accordance with the required spectrum.
- a halogenated phthalocyanine pigment can be used alone, or a mixture thereof with a disazo yellow pigment, a quinophthalone yellow pigment, an azomethine yellow pigment, or an isoindoline yellow pigment can be used.
- a disazo yellow pigment e.g., a quinophthalone yellow pigment, an azomethine yellow pigment, or an isoindoline yellow pigment
- C.I. I. Pigment Green 7, 36, 37 and C.I. I. Pigment yellow 83 e. I. Pigment yellow 138, C.I. I. Pigment yellow 139, C.I. I. Pigment yellow 150, C.I. I. Pigment yellow 180 or C.I. I. Mixing with Pigment Yellow 185 is preferred.
- the mass ratio of green pigment to yellow pigment is preferably 100: 5 to 100: 150.
- the mass ratio is particularly preferably in the range of 100: 30 to 100: 120.
- a phthalocyanine pigment can be used alone, or a mixture of this with a dioxazine purple pigment can be used.
- C.I. I. Pigment blue 15: 6 and C.I. I. Mixing with pigment violet 23 is preferred.
- the mass ratio of the blue pigment to the violet pigment is preferably 100: 0 to 100: 100, more preferably 100: 10 or less.
- the pigment for the black matrix carbon, titanium black, iron oxide, titanium oxide alone or a mixture thereof is used, and a combination of carbon and titanium black is preferable.
- the mass ratio of carbon to titanium black is preferably in the range of 100: 0 to 100: 60.
- the coloring composition of the present invention preferably contains a pigment other than black, and is suitable for a blue pigment.
- the primary particle size of the pigment is preferably 100 nm or less from the viewpoint of color unevenness and contrast, and is preferably 5 nm or more from the viewpoint of dispersion stability.
- the primary particle size of the pigment is more preferably 5 to 75 nm, further preferably 5 to 55 nm, and particularly preferably 5 to 35 nm.
- the primary particle size of the pigment can be measured by a known method such as an electron microscope.
- the pigment is preferably a pigment selected from anthraquinone pigments, diketopyrrolopyrrole pigments, phthalocyanine pigments, quinophthalone pigments, isoindoline pigments, azomethine pigments, and dioxazine pigments.
- C.I. I. Pigment red 177 anthraquinone pigment
- C.I. I. Pigment red 254 diketopyrrolopyrrole pigment
- C.I. I. Pigment green 7, 36, 58 C.I. I. Pigment Blue 15: 6 (phthalocyanine pigment), C.I. I. Pigment yellow 138 (quinophthalone pigment), C.I. I.
- Pigment yellow 139,185 isoindoline pigment
- C.I. I. Pigment yellow 150 azomethine pigment
- C.I. I. Pigment violet 23 dioxazine pigment
- a phthalocyanine pigment is preferable as the pigment.
- the mass ratio of the phthalocyanine pigment to the above-mentioned dye multimer is preferably 90:10 to 30:70, and more preferably 65:35 to 55:45.
- the content of the pigment is preferably 10 to 70% by mass, more preferably 20 to 60% by mass, and further preferably 25 to 50% by mass with respect to all components excluding the solvent contained in the coloring composition. It is.
- the content is preferably 25 to 60% by mass, more preferably 30 to 50% by mass, and still more preferably based on all components excluding the solvent contained in the coloring composition. Is 35 to 45% by mass.
- the composition of the present invention may contain only one type of pigment or two or more types of pigment. When two or more types are included, the total amount is preferably within the above range.
- the colored composition of the present invention preferably contains a photopolymerization initiator from the viewpoint of further improving sensitivity.
- the photopolymerization initiator is not particularly limited as long as it has the ability to initiate polymerization of the polymerizable compound, and can be appropriately selected from known photopolymerization initiators. For example, those having photosensitivity to visible light from the ultraviolet region are preferable. Further, it may be an activator that generates some action with a photoexcited sensitizer and generates an active radical, or may be an initiator that initiates cationic polymerization according to the type of monomer.
- the photopolymerization initiator preferably contains at least one compound having a molecular extinction coefficient of at least about 50 within a range of about 300 nm to 800 nm (more preferably 330 nm to 500 nm).
- the photopolymerization initiator examples include halogenated hydrocarbon derivatives (for example, those having a triazine skeleton, those having an oxadiazole skeleton, etc.), acylphosphine compounds such as acylphosphine oxide, hexaarylbiimidazole, and oxime derivatives. Oxime compounds, organic peroxides, thio compounds, ketone compounds, aromatic onium salts, ketoxime ethers, aminoacetophenone compounds, hydroxyacetophenone, and the like, and oxime compounds are preferred.
- halogenated hydrocarbon derivatives for example, those having a triazine skeleton, those having an oxadiazole skeleton, etc.
- acylphosphine compounds such as acylphosphine oxide, hexaarylbiimidazole, and oxime derivatives.
- trihalomethyltriazine compounds trihalomethyltriazine compounds, benzyldimethylketal compounds, ⁇ -hydroxyketone compounds, ⁇ -aminoketone compounds, acylphosphine compounds, phosphine oxide compounds, metallocene compounds, oxime compounds, triallylimidazole dimers, oniums
- compounds selected from the group consisting of compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds and derivatives thereof, cyclopentadiene-benzene-iron complexes and salts thereof, halomethyloxadiazole compounds, and 3-aryl substituted coumarin compounds are preferred.
- trihalomethyltriazine compounds More preferred are trihalomethyltriazine compounds, ⁇ -aminoketone compounds, acylphosphine compounds, phosphine oxide compounds, oxime compounds, triallylimidazole dimers, triarylimidazole compounds, benzimidazole compounds, onium compounds, benzophenone compounds, and acetophenone compounds.
- At least one compound selected from the group consisting of a trihalomethyltriazine compound, an ⁇ -aminoketone compound, an oxime compound, a triallylimidazole compound, a benzophenone compound, a triarylimidazole compound, and a benzimidazole compound is particularly preferable.
- the triarylimidazole compound may be a mixture with benzimidazole.
- examples of the trihalomethyltriazine compound include the following compounds. Note that Ph is a phenyl group.
- Examples of the triarylimidazole compound and the benzimidazole compound include the following compounds.
- a commercially available product can be used as the trihalomethyltriazine compound, for example, TAZ-107 (manufactured by Midori Chemical Co., Ltd.) can also be used.
- TAZ-107 manufactured by Midori Chemical Co., Ltd.
- stepper exposure is used for curing exposure, but this exposure machine may be damaged by halogen, and it is necessary to keep the addition amount of a polymerization initiator low.
- an oxime compound as the photopolymerization initiator (D) in order to form a fine pattern such as a solid-state imaging device.
- halogenated hydrocarbon compound having a triazine skeleton examples include those described in Wakabayashi et al., Bull. Chem. Soc. Japan, 42, 2924 (1969), a compound described in British Patent No. 1388492, a compound described in JP-A-53-133428, a compound described in German Patent No. 3333724, F.I. C. J. Schaefer et al. Org. Chem. 29, 1527 (1964), compound described in JP-A-62-258241, compound described in JP-A-5-281728, compound described in JP-A-5-34920, US Pat. No. 4,221,976 And the compounds described in paragraph No. 0075 of JP2013-077009A, and the like.
- acridine derivatives are exemplified as photopolymerization initiators other than those described above.
- Specific examples include the compounds described in paragraph No. 0076 of JP2013-077009A, and the contents thereof are incorporated in the present specification.
- Examples of the ketone compounds include compounds described in paragraph No. 0077 of JP2013-077009A, and the contents thereof are incorporated in the present specification.
- hydroxyacetophenone compounds As the photopolymerization initiator, hydroxyacetophenone compounds, aminoacetophenone compounds, and acylphosphine compounds can also be suitably used. More specifically, for example, aminoacetophenone initiators described in JP-A-10-291969 and acylphosphine oxide initiators described in Japanese Patent No. 4225898 can also be used.
- hydroxyacetophenone-based initiator IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, IRGACURE-127 (trade names: all manufactured by BASF) can be used.
- aminoacetophenone-based initiator commercially available products IRGACURE-907, IRGACURE-369, and IRGACURE-379 (trade names: all manufactured by BASF) can be used.
- aminoacetophenone-based initiator compounds described in JP-A-2009-191179 whose absorption wavelength is matched with a long wave light source of 365 nm or 405 nm can also be used.
- acylphosphine initiator commercially available products such as IRGACURE-819 and DAROCUR-TPO (trade names: both manufactured by BASF) can be used.
- More preferable examples of the photopolymerization initiator include oxime compounds.
- Specific examples of the oxime compound include compounds described in JP-A No. 2001-233842, compounds described in JP-A No. 2000-80068, and compounds described in JP-A No. 2006-342166.
- oxime compounds examples include J.M. C. S. Perkin II (1979) pp. 1653-1660), J.M. C. S. Perkin II (1979) pp. 156-162, Journal of Photopolymer Science and Technology (1995) pp. 202-232, compounds described in JP-A No. 2000-66385, compounds described in JP-A Nos. 2000-80068, JP-T 2004-534797, JP-A No. 2006-342166, and the like.
- IRGACURE-OXE01 manufactured by BASF
- IRGACURE-OXE02 manufactured by BASF
- oxime compounds other than those described above compounds described in JP-A-2009-519904 in which an oxime is linked to the carbazole N-position, compounds described in US Pat. No. 7,626,957 in which a hetero substituent is introduced into the benzophenone moiety, Compounds described in Japanese Patent Application Laid-Open No. 2010-15025 and US Patent Publication No. 2009-292039, in which a nitro group is introduced into the dye moiety, a ketoxime compound described in International Patent Publication No. 2009-131189, a triazine skeleton and an oxime skeleton in the same molecule
- a compound described in US Pat. No. 7,556,910 contained therein a compound described in JP-A-2009-221114 having an absorption maximum at 405 nm and good sensitivity to a g-line light source, and the like may be used.
- cyclic oxime compounds described in JP-A-2007-231000 and JP-A-2007-322744 can also be suitably used for the cyclic oxime compounds described in JP-A-2007-231000 and JP-A-2007-322744.
- cyclic oxime compounds in particular, cyclic oxime compounds fused to carbazole dyes described in JP2010-32985A and JP2010-185072A have high light absorptivity and high sensitivity. preferable.
- the compounds described in JP-A-2009-242469 having an unsaturated bond at a specific site of the oxime compound can be preferably used because high sensitivity can be achieved by regenerating the active radical from the polymerization inert radical. it can.
- oxime compounds having a specific substituent as disclosed in JP 2007-26997A and oxime compounds having a thioaryl group as disclosed in JP 2009-191061 A are particularly preferred.
- the oxime compound that is a photopolymerization initiator is preferably a compound represented by the following general formula (OX-1).
- the oxime N—O bond may be an (E) oxime compound, a (Z) oxime compound, or a mixture of (E) and (Z) isomers. .
- R and B each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group.
- the monovalent substituent represented by R is preferably a monovalent nonmetallic atomic group.
- the monovalent nonmetallic atomic group include an alkyl group, an aryl group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heterocyclic group, an alkylthiocarbonyl group, and an arylthiocarbonyl group.
- these groups may have one or more substituents.
- the substituent mentioned above may be further substituted by another substituent.
- substituents examples include a halogen atom, an aryloxy group, an alkoxycarbonyl group or an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, and an aryl group.
- alkyl group an alkyl group having 1 to 30 carbon atoms is preferable.
- paragraph 0025 of JP-A-2009-191061 can be referred to, and the contents thereof are incorporated herein.
- aryl group an aryl group having 6 to 30 carbon atoms is preferable, and specifically, paragraph 0026 of JP-A-2009-191061 can be referred to, the contents of which are incorporated herein.
- acyl group an acyl group having 2 to 20 carbon atoms is preferable, and specifically, paragraph 0033 of JP-A-2009-191061 can be referred to, and the contents thereof are incorporated herein.
- alkoxycarbonyl group an alkoxycarbonyl group having 2 to 20 carbon atoms is preferable.
- paragraph 0034 of JP-A-2009-191061 can be referred to, the contents of which are incorporated herein.
- an aryloxycarbonyl group having 6 to 30 carbon atoms is preferable as the aryloxycarbonyl group, and paragraph 0035 of JP-A-2009-191061 can be referred to, the contents of which are incorporated herein.
- heterocyclic group an aromatic or aliphatic heterocyclic group containing a nitrogen atom, an oxygen atom, a sulfur atom or a phosphorus atom is preferable.
- paragraph 0037 of Japanese Patent Application Laid-Open No. 2009-191061 can be referred to, the contents of which are incorporated herein.
- the alkylthiocarbonyl group is preferably an alkylthiocarbonyl group having 1 to 20 carbon atoms, and can be referred to paragraph 0038 of JP-A No. 2009-191061, the contents of which are incorporated herein.
- an arylthiocarbonyl group having 6 to 30 carbon atoms is preferable as the arylthiocarbonyl group, and paragraph 0039 of JP-A-2009-191061 can be referred to, the contents of which are incorporated herein.
- the monovalent substituent represented by B represents an aryl group, a heterocyclic group, an arylcarbonyl group, or a heterocyclic carbonyl group. These groups may have one or more substituents. Examples of the substituent include the above-described substituents. Moreover, the substituent mentioned above may be further substituted by another substituent.
- paragraph 0044 of JP-A-2009-191061 can be referred to, and the contents thereof are incorporated in the present specification.
- examples of the divalent organic group represented by A include an alkylene group having 1 to 12 carbon atoms, a cycloalkylene group, and an alkynylene group. These groups may have one or more substituents. Examples of the substituent include the above-described substituents. Moreover, the substituent mentioned above may be further substituted by another substituent. Among them, A in the formula (OX-1) is an unsubstituted alkylene group, an alkyl group (for example, a methyl group, an ethyl group, a tert-butyl group, dodecyl) from the viewpoint of increasing sensitivity and suppressing coloring due to heating.
- an alkyl group for example, a methyl group, an ethyl group, a tert-butyl group, dodecyl
- alkylene group alkenyl group (eg vinyl group, allyl group) alkylene group, aryl group (eg phenyl group, p-tolyl group, xylyl group, cumenyl group, naphthyl group, anthryl) Group, a phenanthryl group, and a styryl group) are preferable.
- alkenyl group eg vinyl group, allyl group
- aryl group eg phenyl group, p-tolyl group, xylyl group, cumenyl group, naphthyl group, anthryl
- a phenanthryl group e.g., phenanthryl group
- styryl group alkylene group substituted alkylene group
- alkenyl group eg vinyl group, allyl group
- aryl group eg phenyl group, p-tolyl group, xylyl group, cumenyl group, naphth
- the aryl group represented by Ar is preferably an aryl group having 6 to 30 carbon atoms, and may have a substituent.
- substituents include the same substituents as those introduced into the substituted aryl group mentioned above as specific examples of the aryl group which may have a substituent.
- a substituted or unsubstituted phenyl group is preferable from the viewpoint of increasing sensitivity and suppressing coloring due to heating.
- the oxime compound has a maximum absorption wavelength in a wavelength region of 350 nm to 500 nm, preferably has an absorption wavelength in a wavelength region of 360 nm to 480 nm, and particularly preferably has a high absorbance at 365 nm and 455 nm.
- the molar extinction coefficient at 365 nm or 405 nm of the oxime compound is preferably 1,000 to 300,000, more preferably 2,000 to 300,000, more preferably 5,000 to 200, from the viewpoint of sensitivity. Is particularly preferred.
- a known method can be used for the molar extinction coefficient of the compound. Specifically, for example, 0.01 g of an ultraviolet-visible spectrophotometer (Vary Inc., Carry-5 spectrophotometer) is used with an ethyl acetate solvent. It is preferable to measure at a concentration of / L.
- the content of the photopolymerization initiator is preferably 0.1 to 50% by mass, more preferably the total solid content of the colored composition. It is 0.5 to 30% by mass, more preferably 1 to 20% by mass. Within this range, better sensitivity and pattern formability can be obtained.
- the composition of the present invention may contain only one type of photopolymerization initiator, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- a pigment dispersant can be used in combination as desired.
- pigment dispersants include polymer dispersants [for example, polyamidoamines and salts thereof, polycarboxylic acids and salts thereof, high molecular weight unsaturated acid esters, modified polyurethanes, modified polyesters, and modified poly (meth) acrylates. , (Meth) acrylic copolymers, naphthalenesulfonic acid formalin condensates], and surfactants such as polyoxyethylene alkyl phosphate esters, polyoxyethylene alkyl amines, alkanol amines, and pigment derivatives, etc. Can do.
- the polymer dispersant can be further classified into a linear polymer, a terminal-modified polymer, a graft polymer, and a block polymer according to the structure.
- Examples of the terminal-modified polymer having an anchor site to the pigment surface include a polymer having a phosphate group at the terminal described in JP-A-3-112992, JP-A-2003-533455, and the like. Examples thereof include polymers having a sulfonic acid group at the terminal end described in JP-A-273191 and the like, and polymers having a partial skeleton of an organic dye and a heterocyclic ring described in JP-A-9-77994. In addition, polymers having two or more pigment surface anchor sites (acid groups, basic groups, organic dye partial skeletons, heterocycles, etc.) introduced at the polymer ends described in JP-A-2007-277514 are also available. It is preferable because of excellent dispersion stability.
- Examples of the graft polymer having an anchor site to the pigment surface include a polyester-based dispersant, and specific examples thereof include JP-A-54-37082, JP-A-8-507960, Reaction products of poly (lower alkyleneimine) and polyester described in JP-A-2009-258668, etc., reaction products of polyallylamine and polyester described in JP-A-9-169821, etc., JP-A-10-339949 A copolymer of a macromonomer and a nitrogen atom monomer described in JP-A-2004-37986, International Publication Pamphlet WO 2010/110491, JP-A-2003-238837, JP-A-2008-9426, JP-A Graphs having partial skeletons and heterocyclic rings of organic dyes described in JP-A-2008-81732 Type polymer, and a copolymer of a macromonomer and acid group-containing monomers described in JP 2010-106268 Publication.
- amphoteric dispersion resin having a basic group and an acidic group described in JP-A-2009-203462 has the dispersibility and dispersion stability of the pigment dispersion and the developability exhibited by the color composition using the pigment dispersion. From the viewpoint of
- Macromonomer AA-6 (terminal) manufactured by Toa Gosei Co., Ltd. Polymethyl methacrylate having a methacryloyl group), AS-6 (polystyrene having a methacryloyl group at the end group), AN-6S (a copolymer of styrene and acrylonitrile having a methacryloyl group at the end group), AB-6 ( Polybutyl acrylate whose end group is a methacryloyl group), Plaxel FM5 manufactured by Daicel Chemical Industries, Ltd.
- JP-A-2-27 examples thereof include a polyester-based macromonomer described in the 2009 publication.
- a polyester-based macromonomer that is particularly excellent in flexibility and solvophilicity is particularly preferable from the viewpoint of dispersibility of the pigment dispersion, dispersion stability, and developability exhibited by the coloring composition using the pigment dispersion
- a polyester macromonomer represented by a polyester macromonomer described in JP-A-2-272009 is particularly preferable.
- block polymers having an anchor site to the pigment surface block polymers described in JP-A Nos. 2003-49110 and 2009-52010 are preferable.
- the pigment dispersant that can be used in the present invention is also available as a commercial product. Specific examples thereof include “DA-7301” manufactured by Kashiwagi Kasei Co., Ltd., “Disperbyk-101 (polyamidoamine phosphate) manufactured by BYK Chemie.
- Oligomer “Polyflow No. 50E, No. 300 (acrylic copolymer) ”,“ Disparon KS-860, 873SN, 874, # 2150 (aliphatic polycarboxylic acid), # 7004 (manufactured by Enomoto Kasei Co., Ltd.) Polyether ester), DA-703-50, DA-705, DA-725 "," Demol RN, N (Naphthalenesulfonic acid formalin polycondensate), MS, C, SN-B (aromatic sulfonic acid) "manufactured by Kao Corporation Formalin polycondensate) ”,“ Homogenol L-18 (Polymer Polycarbonate) "Boric acid” "," Emulgen 920, 930, 935, 985 (polyoxyethylene nonyl phenyl ether) "," Acetamine 86 (stearylamine acetate) ",” Solsperse 5000 (phthalocyanine derivative) "manufacture
- Disperse aid 6 Disperseue "manufactured by San Nopco Polymer dispersants such as “8”, “Disperse Aid 15”, “Disperse Aid 9100”, “ADEKA Pluronic L31, F38, L42, L44, L61, L64, F68, L72, P95, F77, P84, manufactured by ADEKA Corporation F87, P94, L101, P103, F108, L121, P-123 ”,“ Ionet (trade name) S-20 ”manufactured by Sanyo Kasei Co., Ltd., and the like.
- pigment dispersants may be used alone or in combination of two or more. In the present invention, it is particularly preferable to use a combination of a pigment derivative and a polymer dispersant.
- the pigment dispersant may be used in combination with an alkali-soluble resin together with the terminal-modified polymer, graft polymer, or block polymer having an anchor site to the pigment surface.
- Alkali-soluble resins include (meth) acrylic acid copolymer, itaconic acid copolymer, crotonic acid copolymer, maleic acid copolymer, partially esterified maleic acid copolymer, etc., and carboxylic acid in the side chain. Examples thereof include acidic cellulose derivatives, and (meth) acrylic acid copolymers are particularly preferable.
- An alkali-soluble resin containing is also preferred. Specifically, an alkali-soluble resin: benzyl methacrylate / methacrylic acid / methacrylic acid-2-hydroxyethyl copolymer is exemplified.
- the total content of the pigment dispersant is preferably 1 part by weight to 80 parts by weight with respect to 100 parts by weight of the pigment, and 5 parts by weight to 70 parts by weight. Part is more preferable, and 20 parts by weight to 40 parts by weight is even more preferable.
- the composition of the present invention may contain only one type of pigment dispersant, or two or more types of pigment dispersants. When two or more types are included, the total amount is preferably within the above range.
- the amount used is preferably in the range of 5 to 100 parts by mass with respect to 100 parts by mass of the pigment, and 10 to 80 parts by mass. More preferably, it is in the range of parts by mass.
- the amount of the pigment derivative used is preferably in the range of 1 to 30 parts by mass in terms of mass with respect to 100 parts by mass of the pigment. The range is more preferable, and the range of 5 to 15 parts by mass is particularly preferable.
- the total content of the coloring agent and the dispersing agent component is 50% by mass or more and 90% by mass or less with respect to the total solid content constituting the coloring composition. Is more preferable, 55 mass% or more and 85 mass% or less is more preferable, and 60 mass% or more and 80 mass% or less is further more preferable.
- the coloring composition of the present invention preferably further contains an alkali-soluble resin.
- the molecular weight of the alkali-soluble resin is not particularly defined, but it is preferable that Mw is 5000 to 100,000. Further, Mn is preferably 1000 to 20,000.
- the weight average molecular weight of the compound used in the present invention is defined as a polystyrene converted value by GPC measurement.
- the weight average molecular weight and number average molecular weight are, for example, HLC-8220 (manufactured by Tosoh Corporation), TSKgel Super AWM-H (manufactured by Tosoh Corporation, 6.0 mm ID ⁇ 15.0 cm) as a column, and eluent. It can be determined by using a 10 mmol / L lithium bromide NMP (N-methylpyrrolidinone) solution.
- the alkali-soluble resin is a linear organic polymer, and promotes at least one alkali-solubility in a molecule (preferably a molecule having an acrylic copolymer or a styrene copolymer as a main chain). It can be suitably selected from alkali-soluble resins having a group. From the viewpoint of heat resistance, polyhydroxystyrene resins, polysiloxane resins, acrylic resins, acrylamide resins, and acryl / acrylamide copolymer resins are preferable. From the viewpoint of development control, acrylic resins and acrylamide resins are preferable. Resins and acrylic / acrylamide copolymer resins are preferred.
- Examples of the group that promotes alkali solubility include a carboxyl group, a phosphoric acid group, a sulfonic acid group, and a phenolic hydroxyl group.
- the group is soluble in an organic solvent and developed with a weak alkaline aqueous solution. Possible are preferable, and (meth) acrylic acid is particularly preferable.
- These acid groups may be used alone or in combination of two or more.
- Examples of the monomer capable of imparting an acid group after the polymerization include, for example, a monomer having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate, a monomer having an epoxy group such as glycidyl (meth) acrylate, and 2-isocyanatoethyl (methacrylate). ) Monomers having an isocyanate group such as acrylate. These monomers for introducing an acid group may be only one type or two or more types.
- a monomer having an acid group and / or a monomer capable of imparting an acid group after polymerization (hereinafter sometimes referred to as “monomer for introducing an acid group”) .) May be polymerized as a monomer component.
- a treatment for imparting an acid group as described later is required after the polymerization.
- a known radical polymerization method can be applied.
- Polymerization conditions such as temperature, pressure, type and amount of radical initiator, type of solvent, etc. when producing an alkali-soluble resin by radical polymerization can be easily set by those skilled in the art, and the conditions are determined experimentally. It can also be done.
- a polymer having a carboxylic acid in the side chain is preferable, such as a methacrylic acid copolymer, an acrylic acid copolymer, an itaconic acid copolymer, and a crotonic acid copolymer.
- a copolymer of (meth) acrylic acid and another monomer copolymerizable therewith is suitable as the alkali-soluble resin.
- examples of other monomers copolymerizable with (meth) acrylic acid include alkyl (meth) acrylates, aryl (meth) acrylates, and vinyl compounds.
- alkyl (meth) acrylate and aryl (meth) acrylate methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, pentyl (meth) acrylate,
- vinyl compounds such as hexyl (meth) acrylate, octyl (meth) acrylate, phenyl (meth) acrylate, benzyl (meth) acrylate, tolyl (meth) acrylate, naphthyl (meth) acrylate, cyclohexyl (meth) acrylate, styrene, ⁇ -methylstyrene, vinyltoluene, glycidyl methacrylate, acrylonitrile, vinyl acetate, N-vinylpyrrolidone, tetrahydrofurfury
- the alkali-soluble resin may include a polymer (a) obtained by polymerizing a monomer component which essentially includes a compound represented by the following general formula (ED) (hereinafter sometimes referred to as “ether dimer”). preferable.
- ED general formula
- R 1 and R 2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 25 carbon atoms which may have a substituent.
- the coloring composition of this invention can form the cured coating film which was very excellent also in transparency with heat resistance.
- the hydrocarbon group having 1 to 25 carbon atoms which may have a substituent represented by R 1 and R 2 is not particularly limited.
- Linear or branched alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, tert-amyl, stearyl, lauryl, 2-ethylhexyl; aryl groups such as phenyl; Alicyclic groups such as cyclohexyl, tert-butylcyclohexyl, dicyclopentadienyl, tricyclodecanyl, isobornyl, adamantyl, 2-methyl-2-adamantyl; substituted with alkoxy such as 1-methoxyethyl, 1-ethoxyethyl An alkyl group substituted with an aryl group such as benzyl; and the like.
- an acid such as methyl, ethyl, cyclohexyl, benzyl or the like, or a primary or secondary carbon substituent which is
- ether dimer examples include dimethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, (N-propyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (isopropyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (n-butyl) ) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (isobutyl) -2,2 ′-[oxybis (methylene)] bis-2-propenoate, di (tert-butyl) -2, 2 ′-[oxybis (methylene)] bis-2-propenoate, di (tert-butyl) -2, 2 ′-[oxybis (methylene)] bis-2-propenoate, di (tert-butyl)
- dimethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate, dicyclohexyl-2,2′- [Oxybis (methylene)] bis-2-propenoate and dibenzyl-2,2 ′-[oxybis (methylene)] bis-2-propenoate are preferred.
- These ether dimers may be only one kind or two or more kinds.
- the structure derived from the compound represented by the general formula (ED) may be copolymerized with other monomers.
- the alkali-soluble resin which has a polymeric group is preferable to use.
- the alkali-soluble resin having a polymerizable group an alkali-soluble resin containing an allyl group, a (meth) acryl group, an allyloxyalkyl group or the like in the side chain is useful.
- the polymer containing a polymerizable group include: Dial NR series (manufactured by Mitsubishi Rayon Co., Ltd.), Photomer 6173 (COOH-containing polyurethane acrylic oligomer. Diamond Shamrock Co.
- an alkali-soluble resin containing these polymerizable groups an isocyanate group and an OH group are reacted in advance to leave one unreacted isocyanate group and a compound containing a (meth) acryloyl group and an acrylic resin containing a carboxyl group; Urethane-modified polymerizable double bond-containing acrylic resin obtained by the above reaction, unsaturated group-containing acrylic obtained by reaction of an acrylic resin containing a carboxyl group and a compound having both an epoxy group and a polymerizable double bond in the molecule Resin, acid pendant type epoxy acrylate resin, OH group-containing acrylic resin and polymerizable double bond-containing acrylic resin obtained by reacting a polymerizable double bond, OH group-containing acrylic resin and isocyanate Resin obtained by reacting compound having polymerizable group, JP 2002-229207 A Resin obtained by basic treatment of a resin having an ester group having a leaving group such as a halogen atom or a sulf
- alkali-soluble resin in particular, a benzyl (meth) acrylate / (meth) acrylic acid copolymer or a multi-component copolymer composed of benzyl (meth) acrylate / (meth) acrylic acid / other monomers is suitable. .
- benzyl (meth) acrylate / (meth) acrylic acid / (meth) acrylic acid-2-hydroxyethyl copolymer copolymerized with 2-hydroxyethyl methacrylate 2 described in JP-A-7-140654 -Hydroxypropyl (meth) acrylate / polystyrene macromonomer / benzyl methacrylate / methacrylic acid copolymer, 2-hydroxy-3-phenoxypropyl acrylate / polymethyl methacrylate macromonomer / benzyl methacrylate / methacrylic acid copolymer, 2-hydroxyethyl Methacrylate / polystyrene macromonomer / methyl methacrylate / methacrylic acid copolymer, 2-hydroxyethyl methacrylate / polystyrene macromonomer / benzyl methacrylate / methacrylic acid copolymer, etc.
- the acid value of the alkali-soluble resin is preferably 30 mgKOH / g to 200 mgKOH / g, more preferably 50 mgKOH / g to 150 mgKOH / g, and particularly preferably 70 mgKOH / g to 120 mgKOH / g.
- the weight average molecular weight (Mw) of the alkali-soluble resin is preferably 2,000 to 50,000, more preferably 5,000 to 30,000, and particularly preferably 7,000 to 20,000.
- the content of the alkali-soluble resin is preferably 1% by mass to 15% by mass, more preferably 2% by mass with respect to the total solid content of the coloring composition. It is ⁇ 12% by mass, and particularly preferably 3% by mass to 10% by mass.
- the composition of the present invention may contain only one type of alkali-soluble resin, or may contain two or more types, but preferably contains two or more types, and at least one type has a polymerizable group. It is more preferable. When two or more types are included, the total amount is preferably within the above range.
- the colored composition of the present invention is a range that does not impair the effects of the present invention, and further includes a surfactant, a crosslinking agent, a polymerization inhibitor, an organic carboxylic acid, an organic carboxylic acid anhydride, and the like. Other components may be included.
- surfactant Various surfactants may be added to the colored composition of the present invention from the viewpoint of further improving coatability.
- various surfactants such as a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicone-based surfactant can be used.
- the coloring composition of the present invention contains a fluorosurfactant, so that liquid properties (particularly fluidity) when prepared as a coating solution are further improved.
- Liquidity can be further improved. That is, in the case of forming a film using a coating liquid to which a coloring composition containing a fluorosurfactant is applied, wetting the coated surface by reducing the interfacial tension between the coated surface and the coating liquid. The coating property is improved and the coating property to the coated surface is improved. For this reason, even when a thin film of about several ⁇ m is formed with a small amount of liquid, it is effective in that it is possible to more suitably form a film having a uniform thickness with small thickness unevenness.
- the fluorine content in the fluorosurfactant is preferably 3% by mass to 40% by mass, more preferably 5% by mass to 30% by mass, and particularly preferably 7% by mass to 25% by mass.
- a fluorine-based surfactant having a fluorine content within this range is effective in terms of uniformity of coating film thickness and liquid-saving properties, and has good solubility in a colored composition.
- fluorosurfactant examples include Megafac F171, F172, F173, F176, F176, F177, F141, F142, F143, F144, R30, F437, F475, F479, F482, F554, F780, F780, F781 (above DIC Corporation), Florard FC430, FC431, FC171 (above, Sumitomo 3M Limited), Surflon S-382, SC-101, SC-103, SC-104, SC-105, SC1068, SC-381, SC-383, S393, KH-40 (above, manufactured by Asahi Glass Co., Ltd.) and the like.
- nonionic surfactant examples include glycerol, trimethylolpropane, trimethylolethane, and ethoxylates and propoxylates thereof (for example, glycerol propoxylate, glycerol ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene Stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester (Pluronic L10, L31, L61, L62 manufactured by BASF, 10R5, 17R2, 25R2, Tetronic 304, 701, 704, 901, 904, 150R1) Solsperse 20000 (Lubrizol Japan Co., Ltd.), and the like.
- cationic surfactant examples include phthalocyanine derivatives (trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.), organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), (meth) acrylic acid ( Co) polymer polyflow no. 75, no. 90, no. 95 (manufactured by Kyoeisha Chemical Co., Ltd.) and W001 (manufactured by Yusho Co., Ltd.).
- phthalocyanine derivatives trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.
- organosiloxane polymer KP341 manufactured by Shin-Etsu Chemical Co., Ltd.
- (meth) acrylic acid ( Co) polymer polyflow no. 75, no. 90, no. 95 manufactured by Kyoeisha Chemical Co., Ltd.
- W001 manufactured by Yusho Co., Ltd.
- anionic surfactants include W004, W005, W017 (manufactured by Yusho Co., Ltd.) and the like.
- silicone surfactant examples include “Toray Silicone DC3PA”, “Toray Silicone SH7PA”, “Toray Silicone DC11PA”, “Tore Silicone SH21PA”, “Tore Silicone SH28PA”, “Toray Silicone” manufactured by Toray Dow Corning Co., Ltd.
- the coloring composition of the present invention contains a surfactant
- the addition amount of the surfactant is preferably 0.001% by mass to 2.0% by mass with respect to the total mass of the coloring composition, more preferably 0.05 mass% to 1.0 mass%.
- the composition of the present invention may contain only one type of surfactant or two or more types of surfactant. When two or more types are included, the total amount is preferably within the above range.
- Crosslinking agent is not particularly limited as long as the film can be cured by a crosslinking reaction.
- the crosslinking agent is not particularly limited as long as the film can be cured by a crosslinking reaction.
- the blending amount of the crosslinking agent is not particularly defined, but is preferably 2 to 30% by mass, and preferably 3 to 20% by mass based on the total solid content of the composition. More preferred.
- the composition of the present invention may contain only one type of cross-linking agent, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- ⁇ Polymerization inhibitor In the colored composition of the present invention, it is desirable to add a small amount of a polymerization inhibitor in order to prevent unnecessary thermal polymerization of the polymerizable compound during the production or storage of the colored composition.
- the polymerization inhibitor that can be used in the present invention include hydroquinone, p-methoxyphenol, di-tert-butyl-p-cresol, pyrogallol, tert-butylcatechol, benzoquinone, 4,4′-thiobis (3-methyl-6- tert-butylphenol), 2,2′-methylenebis (4-methyl-6-tert-butylphenol), N-nitrosophenylhydroxyamine primary cerium salt and the like.
- the addition amount of the polymerization inhibitor is preferably 0.01 to 5% by mass with respect to the mass of the entire composition.
- the composition of the present invention may contain only one type of polymerization inhibitor, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- Organic carboxylic acid, organic carboxylic anhydride may contain an organic carboxylic acid having a molecular weight of 1000 or less and / or an organic carboxylic acid anhydride.
- organic carboxylic acid compound include aliphatic carboxylic acids and aromatic carboxylic acids.
- aliphatic carboxylic acids include monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, glycolic acid, acrylic acid, methacrylic acid, oxalic acid, malonic acid, succinic acid, Examples thereof include dicarboxylic acids such as glutaric acid, adipic acid, pimelic acid, cyclohexanedicarboxylic acid, cyclohexenedicarboxylic acid, itaconic acid, citraconic acid, maleic acid and fumaric acid, and tricarboxylic acids such as tricarbaryl acid and aconitic acid.
- monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, glycolic acid, acrylic acid, methacrylic acid, oxalic acid, malonic acid, succinic acid
- aromatic carboxylic acid examples include carboxylic acids in which a carboxyl group is directly bonded to a phenyl group such as benzoic acid and phthalic acid, and carboxylic acids in which a carboxyl group is bonded to the phenyl group through a carbon bond.
- carboxylic acids in which a carboxyl group is directly bonded to a phenyl group such as benzoic acid and phthalic acid
- carboxylic acids in which a carboxyl group is bonded to the phenyl group through a carbon bond examples of the aromatic carboxylic acid.
- those having a molecular weight of 600 or less, particularly those having a molecular weight of 50 to 500 specifically maleic acid, malonic acid, succinic acid, and itaconic acid are preferred.
- organic carboxylic acid anhydrides include aliphatic carboxylic acid anhydrides and aromatic carboxylic acid anhydrides. Specific examples include acetic anhydride, trichloroacetic anhydride, trifluoroacetic anhydride, and tetrahydrophthalic anhydride. Succinic anhydride, maleic anhydride, citraconic anhydride, itaconic anhydride, glutaric anhydride, 1,2-cyclohexene dicarboxylic anhydride, n-octadecyl succinic anhydride, 5-norbornene-2,3-dicarboxylic anhydride, etc. An aliphatic carboxylic acid anhydride is mentioned.
- aromatic carboxylic acid anhydride examples include phthalic anhydride, trimellitic anhydride, pyromellitic anhydride, and naphthalic anhydride. Of these, those having a molecular weight of 600 or less, particularly those having a molecular weight of 50 to 500, specifically maleic anhydride, succinic anhydride, citraconic anhydride, and itaconic anhydride are preferred.
- the amount of the organic carboxylic acid and / or organic carboxylic acid anhydride is usually 0.01 to 10% by weight based on the total solid content.
- the range is preferably 0.03 to 5% by weight, more preferably 0.05 to 3% by weight.
- the composition of the present invention may contain only one type of organic carboxylic acid and / or organic carboxylic acid anhydride, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- various additives such as fillers, adhesion promoters, antioxidants, ultraviolet absorbers, anti-aggregation agents and the like can be blended with the coloring composition as necessary.
- these additives include those described in JP-A No. 2004-295116, paragraphs 0155 to 0156, the contents of which are incorporated herein.
- the coloring composition of the present invention may contain a sensitizer and a light stabilizer described in paragraph 0078 of JP-A No. 2004-295116 and a thermal polymerization inhibitor described in paragraph 0081 of the same publication.
- the composition of the present invention may contain only one type of the above components, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- the coloring composition of the present invention is prepared by mixing the aforementioned components.
- the components constituting the colored composition may be mixed together, or may be sequentially added after each component is dissolved and dispersed in a solvent.
- the composition may be prepared by dissolving and dispersing all components in a solvent at the same time. If necessary, each component may be suitably used as two or more solutions / dispersions at the time of use (at the time of application). ) May be mixed to prepare a composition.
- the colored composition prepared as described above is preferably used after being filtered using a filter having a pore size of 0.01 ⁇ m to 3.0 ⁇ m, more preferably a pore size of about 0.05 ⁇ m to 0.5 ⁇ m. Can be provided.
- a pigment is blended in the composition of the present invention, it is preferable to use a washed pigment. By using the washed pigment, foreign matters in the composition can be further reduced.
- paragraphs 0011 to 0099 of JP 2010-83997 A can be referred to, and the contents thereof are incorporated herein.
- the colored composition of the present invention is preferably used for forming a colored layer of a color filter. More specifically, since the colored composition of the present invention can form a cured film having excellent heat resistance and color characteristics, it is suitably used for forming a colored pattern (colored layer) of a color filter. . Further, the colored composition of the present invention is suitably used for forming a colored pattern such as a color filter used in a solid-state imaging device (for example, CCD, CMOS, etc.) or an image display device such as a liquid crystal display device (LCD). Can do. Furthermore, it can be suitably used as a production application for printing ink, inkjet ink, paint, and the like. In particular, a color filter for a solid-state imaging device such as a CCD and a CMOS can be suitably used as a production application.
- a color filter for a solid-state imaging device such as a CCD and a CMOS can be suitably used as a production application.
- the cured film of the present invention is formed by curing the colored composition of the present invention.
- Such a cured film is preferably used for a color filter.
- the colored composition of the present invention is applied onto a support to form a colored composition layer, and unnecessary portions are removed to form a colored pattern.
- the pattern forming method of the present invention can be suitably applied to the formation of a colored pattern (pixel) included in a color filter.
- the composition of the present invention may produce a color filter by pattern formation by a so-called photolithography method, or may form a pattern by dry etching.
- a method for producing a color filter including a step of developing and removing an unexposed portion to form a colored pattern is exemplified.
- a step of applying a colored composition on a support to form a colored composition layer and curing to form a colored layer a photo on the colored layer
- Production of a color filter comprising a step of forming a resist layer, a step of patterning the photoresist layer by exposure and development to obtain a resist pattern, and a step of dry etching the colored layer using the resist pattern as an etching mask A method is illustrated.
- the colored composition layer is formed by applying the colored composition of the present invention on the support.
- a solid-state imaging in which an imaging element (light receiving element) such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal-Oxide Semiconductor) is provided on a substrate (for example, a silicon substrate).
- An element substrate can be used.
- the colored pattern in the present invention may be formed on the imaging element forming surface side (front surface) of the solid-state imaging element substrate, or may be formed on the imaging element non-forming surface side (back surface).
- a light shielding film may be provided between the colored patterns in the solid-state image sensor or on the back surface of the substrate for the solid-state image sensor.
- an undercoat layer may be provided on the support for improving adhesion with the upper layer, preventing diffusion of substances, or flattening the substrate surface.
- a solvent, an alkali-soluble resin, a polymerizable compound, a polymerization inhibitor, a surfactant, a photopolymerization initiator, and the like can be blended, and each of these components is derived from the components blended in the above-described composition of the present invention. It is preferable to select appropriately.
- various coating methods such as slit coating, ink jet method, spin coating, cast coating, roll coating, and screen printing can be applied.
- the drying (pre-baking) of the colored composition layer coated on the support can be performed at a temperature of 50 ° C. to 140 ° C. for 10 seconds to 300 seconds using a hot plate, oven or the like.
- Exposure Step the colored composition layer formed in the colored composition layer forming step is subjected to pattern exposure through a mask having a predetermined mask pattern, for example, using an exposure apparatus such as a stepper. Thereby, a cured film is obtained.
- radiation light
- ultraviolet rays such as g-line and i-line are particularly preferable (particularly preferably i-line).
- Irradiation dose is more preferably 30mJ / cm 2 ⁇ 1500mJ / cm 2 is preferably 50mJ / cm 2 ⁇ 1000mJ / cm 2, 80mJ / cm 2 ⁇ 500mJ / cm 2 is particularly preferred.
- the thickness of the cured film (colored film) is preferably 1.0 ⁇ m or less, more preferably 0.1 ⁇ m to 0.9 ⁇ m, and further preferably 0.2 ⁇ m to 0.8 ⁇ m. It is preferable to set the film thickness to 1.0 ⁇ m or less because high resolution and high adhesion can be obtained.
- a cured film having a thin film thickness of 0.7 ⁇ m or less can also be suitably formed, and the obtained cured film is developed in a pattern forming process described later, thereby forming a thin film.
- the coloring pattern excellent in developability, surface roughness suppression, and pattern shape can be obtained.
- the developer is preferably an organic alkali developer that does not cause damage to the underlying image sensor or circuit.
- the development temperature is usually 20 ° C. to 30 ° C., and the development time is conventionally 20 seconds to 90 seconds. In order to remove the residue more, in recent years, it may be carried out for 120 seconds to 180 seconds. Furthermore, in order to further improve residue removability, the process of shaking off the developer every 60 seconds and further supplying a new developer may be repeated several times.
- alkaline agent used in the developer examples include ammonia water, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, trimethylbenzylammonium hydroxide.
- Organic alkaline compounds such as choline, pyrrole, piperidine, 1,8-diazabicyclo- [5,4,0] -7-undecene, and the concentration of these alkaline agents is 0.001 to 10% by mass
- An alkaline aqueous solution diluted with pure water so as to be preferably 0.01% by mass to 1% by mass is preferably used as the developer.
- an inorganic alkali may be used for the developer, and as the inorganic alkali, for example, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium hydrogencarbonate, sodium oxalate, sodium metaoxalate and the like are preferable.
- a developer composed of such an alkaline aqueous solution it is generally washed (rinsed) with pure water after development.
- post-bake heat treatment after drying. If a multicolor coloring pattern is to be formed, a cured film can be produced by sequentially repeating the above steps for each color. Thereby, a color filter is obtained.
- the post-baking is a heat treatment after development for complete curing, and a heat curing treatment is usually performed at 100 ° C. to 240 ° C., preferably 200 ° C. to 240 ° C.
- This post-bake treatment is performed continuously or batchwise using a heating means such as a hot plate, a convection oven (hot air circulation dryer), a high-frequency heater, or the like so that the coating film after development is in the above-described condition. be able to.
- Dry etching can be performed by using an etching gas for the colored layer with the patterned photoresist layer as a mask. Specifically, a positive or negative radiation sensitive composition is applied onto the colored layer and dried to form a photoresist layer. In the formation of the photoresist layer, it is preferable to further perform a pre-bake treatment. In particular, as a process for forming a photoresist, a mode in which heat treatment after exposure (PEB) and heat treatment after development (post-bake treatment) are desirable.
- PEB heat treatment after exposure
- post-bake treatment post-bake treatment
- a positive type radiation sensitive composition As the photoresist, for example, a positive type radiation sensitive composition is used.
- This positive type radiation sensitive composition includes a positive type photosensitive material sensitive to radiation such as ultraviolet rays (g rays, h rays, i rays), deep ultraviolet rays including excimer lasers, electron beams, ion beams and X rays.
- a positive resist composition suitable for resist can be used.
- the radiation g-line, h-line and i-line are preferable, and i-line is particularly preferable.
- a composition containing a quinonediazide compound and an alkali-soluble resin is preferable.
- a positive radiation-sensitive composition containing a quinonediazide compound and an alkali-soluble resin indicates that a quinonediazide group is decomposed by irradiation with light having a wavelength of 500 nm or less to produce a carboxyl group, resulting in alkali-solubility from an alkali-insoluble state. It is what you use. Since this positive photoresist has remarkably excellent resolution, it is used for manufacturing integrated circuits such as ICs and LSIs.
- the quinonediazide compound include a naphthoquinonediazide compound.
- Examples of commercially available products include FHi622BC (manufactured by FUJIFILM Electronics Materials).
- the thickness of the photoresist layer is preferably from 0.1 to 3 ⁇ m, preferably from 0.2 to 2.5 ⁇ m, and more preferably from 0.3 to 2 ⁇ m.
- the application of the photoresist layer can be suitably performed using the above-described application method in the colored layer.
- a resist pattern (patterned photoresist layer) provided with a group of resist through holes is formed.
- the formation of the resist pattern is not particularly limited, and can be performed by appropriately optimizing a conventionally known photolithography technique.
- a resist through hole group in the photoresist layer By providing a resist through hole group in the photoresist layer by exposure and development, a resist pattern as an etching mask used in the next etching is provided on the colored layer.
- the exposure of the photoresist layer is performed by exposing the positive-type or negative-type radiation-sensitive composition with g-line, h-line, i-line, etc., preferably i-line, through a predetermined mask pattern. Can do. After the exposure, the photoresist is removed in accordance with a region where a colored pattern is to be formed by developing with a developer.
- any developer can be used as long as it dissolves the exposed portion of the positive resist and the uncured portion of the negative resist without affecting the colored layer containing the colorant.
- Combinations of solvents and alkaline aqueous solutions can be used.
- an alkaline aqueous solution prepared by dissolving an alkaline compound so as to have a concentration of 0.001 to 10% by mass, preferably 0.01 to 5% by mass is suitable.
- alkaline compounds include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium oxalate, sodium metasuccinate, aqueous ammonia, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, choline, Examples include pyrrole, piperidine, 1,8-diazabicyclo [5.4.0] -7-undecene.
- alkaline aqueous solution is used as a developing solution, generally a washing process is performed with water after development.
- the resist pattern as an etching mask, patterning is performed by dry etching so that a through hole group is formed in the colored layer. Thereby, a colored pattern is formed.
- the through hole group is provided in a checkered pattern in the colored layer. Therefore, the first colored pattern in which the through hole group is provided in the colored layer has a plurality of square-shaped first colored pixels in a checkered pattern.
- the colored layer is dry etched using the resist pattern as an etching mask.
- Representative examples of dry etching include JP-A-59-126506, JP-A-59-46628, JP-A-58-9108, JP-A-58-2809, JP-A-57-148706, JP-A-61-41102, and the like. There are methods described in the publications.
- Dry etching is preferably performed in the following manner from the viewpoint of forming a pattern cross section closer to a rectangle and reducing damage to the support.
- a mixed gas of fluorine-based gas and oxygen gas (O 2 ) the first stage etching is performed up to a region (depth) where the support is not exposed, and after this first stage etching, nitrogen gas ( N 2 ) and oxygen gas (O 2 ), and a second stage etching is preferably performed to the vicinity of the region (depth) where the support is exposed, and over-etching is performed after the support is exposed.
- N 2 nitrogen gas
- O 2 oxygen gas
- a second stage etching is preferably performed to the vicinity of the region (depth) where the support is exposed, and over-etching is performed after the support is exposed.
- the form containing these is preferable.
- a specific method of dry etching and the first stage etching, second stage etching, and over-etching will be described.
- Dry etching is performed by obtaining etching conditions in advance by the following method.
- (1) The etching rate (nm / min) in the first stage etching and the etching rate (nm / min) in the second stage etching are calculated respectively.
- (2) The time for etching the desired thickness in the first stage etching and the time for etching the desired thickness in the second stage etching are respectively calculated.
- (3) The first stage etching is performed according to the etching time calculated in (2) above.
- the second stage etching is performed according to the etching time calculated in (2) above. Alternatively, the etching time may be determined by endpoint detection, and the second stage etching may be performed according to the determined etching time.
- Overetching time is calculated with respect to the total time of (3) and (4) above, and overetching is performed.
- the mixed gas used in the first stage etching step preferably contains a fluorine-based gas and an oxygen gas (O 2 ) from the viewpoint of processing the organic material that is the film to be etched into a rectangular shape.
- the first stage etching process can avoid damage to the support body by etching to a region where the support body is not exposed.
- the second etching step and the over-etching step are performed in the first etching step after etching to a region where the support is not exposed by the mixed gas of fluorine-based gas and oxygen gas. From the viewpoint of avoidance, it is preferable to perform the etching process using a mixed gas of nitrogen gas and oxygen gas.
- the ratio between the etching amount in the first stage etching process and the etching amount in the second stage etching process is preferably in the range of more than 0% and not more than 50%. 10 to 20% is more preferable.
- the etching amount is an amount calculated from the difference between the remaining film thickness to be etched and the film thickness before etching.
- the etching preferably includes an over-etching process.
- the overetching process is preferably performed by setting an overetching ratio. Moreover, it is preferable to calculate the overetching ratio from the etching process time to be performed first.
- the over-etching ratio can be arbitrarily set, but it is preferably 30% or less of the etching processing time in the etching process, and preferably 5 to 25% from the viewpoint of etching resistance of the photoresist and maintaining the rectangularity of the pattern to be etched. Is more preferable, and 10 to 15% is particularly preferable.
- the resist pattern that is, etching mask
- the removal of the resist pattern preferably includes a step of applying a stripping solution or a solvent on the resist pattern so that the resist pattern can be removed, and a step of removing the resist pattern using cleaning water.
- Examples of the step of applying a stripping solution or solvent on the resist pattern so that the resist pattern can be removed include, for example, a step of applying a stripping solution or solvent on at least the resist pattern and stagnating for a predetermined time to perform paddle development Can be mentioned.
- time to make stripping solution or a solvent stagnant It is preferable that it is several dozen seconds to several minutes.
- examples of the step of removing the resist pattern using the cleaning water include a step of removing the resist pattern by spraying the cleaning water onto the resist pattern from a spray type or shower type spray nozzle.
- the washing water pure water can be preferably used.
- examples of the injection nozzle include an injection nozzle in which the entire support is included in the injection range, and an injection nozzle that is a movable injection nozzle and in which the movable range includes the entire support. When the spray nozzle is movable, the resist pattern is more effectively removed by moving the support pattern from the center of the support to the end of the support more than twice during the process of removing the resist pattern and spraying the cleaning water. be able to.
- the stripping solution generally contains an organic solvent, but may further contain an inorganic solvent.
- organic solvents include 1) hydrocarbon compounds, 2) halogenated hydrocarbon compounds, 3) alcohol compounds, 4) ether or acetal compounds, 5) ketones or aldehyde compounds, and 6) ester compounds.
- the stripping solution preferably contains a nitrogen-containing compound, and more preferably contains an acyclic nitrogen-containing compound and a cyclic nitrogen-containing compound.
- the acyclic nitrogen-containing compound is preferably an acyclic nitrogen-containing compound having a hydroxyl group.
- Specific examples include monoisopropanolamine, diisopropanolamine, triisopropanolamine, N-ethylethanolamine, N, N-dibutylethanolamine, N-butylethanolamine, monoethanolamine, diethanolamine, and triethanolamine.
- they are monoethanolamine, diethanolamine, and triethanolamine, and more preferably monoethanolamine (H 2 NCH 2 CH 2 OH).
- cyclic nitrogen-containing compounds include isoquinoline, imidazole, N-ethylmorpholine, ⁇ -caprolactam, quinoline, 1,3-dimethyl-2-imidazolidinone, ⁇ -picoline, ⁇ -picoline, ⁇ -picoline, 2- Preferred examples include pipecoline, 3-pipecoline, 4-pipecoline, piperazine, piperidine, pyrazine, pyridine, pyrrolidine, N-methyl-2-pyrrolidone, N-phenylmorpholine, 2,4-lutidine, and 2,6-lutidine.
- NMP N-methyl-2-pyrrolidone
- NMP N-methyl-2-pyrrolidone
- the stripping solution preferably contains an acyclic nitrogen-containing compound and a cyclic nitrogen-containing compound.
- acyclic nitrogen-containing compound at least one selected from monoethanolamine, diethanolamine, and triethanolamine, and cyclic
- the nitrogen-containing compound preferably includes at least one selected from N-methyl-2-pyrrolidone and N-ethylmorpholine, and more preferably includes monoethanolamine and N-methyl-2-pyrrolidone.
- a deposit means an etching product deposited and deposited on the side wall of a colored layer.
- the content of the non-cyclic nitrogen-containing compound is 9 parts by weight or more and 11 parts by weight or less with respect to 100 parts by weight of the stripping solution, and the content of the cyclic nitrogen-containing compound is 100 parts by weight of the stripping solution. On the other hand, what is 65 to 70 mass parts is desirable. Further, the stripping solution is preferably obtained by diluting a mixture of an acyclic nitrogen-containing compound and a cyclic nitrogen-containing compound with pure water.
- the manufacturing method of this invention may have a well-known process as a manufacturing method of the color filter for solid-state image sensors as a process other than the above as needed.
- a curing step of curing the formed colored pattern by heating and / or exposure may be included as necessary.
- the colored composition according to the present invention when used, for example, clogging of the nozzle of the coating device discharge section or the piping section, contamination due to adhesion, sedimentation, or drying of the colored composition or pigment in the coating machine may occur. is there. Therefore, in order to efficiently clean the contamination caused by the colored composition of the present invention, it is preferable to use the solvent relating to the present composition described above as a cleaning liquid.
- the cleaning liquids described in JP-A-2007-2101, JP-A-2007-2102, JP-A-2007-281523 and the like can also be suitably used for cleaning and removing the colored composition according to the present invention.
- alkylene glycol monoalkyl ether carboxylates and alkylene glycol monoalkyl ethers are preferred. These solvents may be used alone or in combination of two or more.
- the mass ratio of the solvent having a hydroxyl group and the solvent having no hydroxyl group is from 1/99 to 99/1, preferably from 10/90 to 90/10, more preferably from 20/80 to 80/20.
- a mixed solvent of propylene glycol monomethyl ether acetate (PGMEA) and propylene glycol monomethyl ether (PGME) the ratio is particularly preferably 60/40.
- a surfactant related to the present composition described above may be added to the cleaning liquid.
- the color filter of the present invention uses the colored composition of the present invention, the color filter of the present invention can be exposed with an excellent exposure margin, and the formed colored pattern (colored pixel) is excellent in pattern shape, and the surface of the pattern is not rough. Since the residue in the developing part is suppressed, the color characteristics are excellent.
- the color filter of the present invention can be suitably used for a solid-state imaging device such as a CCD or CMOS, and is particularly suitable for a CCD or CMOS having a high resolution exceeding 1 million pixels.
- the color filter for a solid-state imaging device of the present invention can be used as a color filter disposed between, for example, a light receiving portion of each pixel constituting a CCD or CMOS and a microlens for condensing light.
- the size (pattern width) of the colored pattern (colored pixel) is preferably 2.5 ⁇ m or less, more preferably 2.0 ⁇ m or less, and particularly preferably 1.7 ⁇ m or less.
- the solid-state imaging device of the present invention includes the above-described color filter of the present invention.
- the configuration of the solid-state imaging device of the present invention is a configuration provided with the color filter in the present invention, and is not particularly limited as long as it is a configuration that functions as a solid-state imaging device. .
- a transfer electrode made of a plurality of photodiodes and polysilicon constituting a light receiving area of a solid-state imaging device (CCD image sensor, CMOS image sensor, etc.) is provided on a support, and the photodiode and the transfer electrode are provided on the support.
- light collecting means for example, a microlens, etc., the same shall apply hereinafter
- the color filter of the present invention can be used not only for the solid-state imaging device but also for image display devices such as liquid crystal display devices and organic EL display devices, and is particularly suitable for use in liquid crystal display devices.
- the liquid crystal display device provided with the color filter of the present invention can display a high-quality image with a good display image color and excellent display characteristics.
- display devices For the definition of display devices and details of each display device, refer to, for example, “Electronic Display Device (Akio Sasaki, Kogyo Kenkyukai, 1990)”, “Display Device (Junsho Ibuki, Industrial Books Co., Ltd.) Issued in the first year).
- the liquid crystal display device is described, for example, in “Next-generation liquid crystal display technology (edited by Tatsuo Uchida, Industrial Research Co., Ltd., published in 1994)”.
- the liquid crystal display device to which the present invention can be applied is not particularly limited, and can be applied to, for example, various types of liquid crystal display devices described in the “next generation liquid crystal display technology”.
- the color filter of the present invention may be used in a color TFT liquid crystal display device.
- the color TFT liquid crystal display device is described in, for example, “Color TFT liquid crystal display (issued in 1996 by Kyoritsu Publishing Co., Ltd.)”.
- the present invention is applied to a liquid crystal display device with a wide viewing angle, such as a horizontal electric field driving method such as IPS and a pixel division method such as MVA, STN, TN, VA, OCS, FFS, and R-OCB. it can.
- the color filter in the present invention can be used for a bright and high-definition COA (Color-filter On Array) system.
- COA Color-filter On Array
- the required characteristics for the color filter layer require the required characteristics for the interlayer insulating film, that is, the low dielectric constant and the resistance to the stripping solution, in addition to the normal required characteristics as described above.
- the color filter of the present invention since a dye multimer excellent in hue is used, the color purity, light transmittance, etc. are good and the color pattern (pixel) is excellent in color, so the resolution is high and the long-term durability is excellent.
- a COA type liquid crystal display device can be provided.
- a resin film may be provided on the color filter layer.
- the liquid crystal display device provided with the color filter of the present invention includes various members such as an electrode substrate, a polarizing film, a retardation film, a backlight, a spacer, and a viewing angle guarantee film.
- the color filter of the present invention can be applied to a liquid crystal display device composed of these known members.
- these components for example, “'94 Liquid Crystal Display Peripheral Materials / Chemicals Market (Kentaro Shima CMC 1994)”, “2003 Liquid Crystal Related Markets Current Status and Future Prospects (Volume 2)” Fuji Chimera Research Institute, Ltd., published in 2003) ”.
- backlighting SID meeting Digest 1380 (2005) (A. Konno et.al), Monthly Display December 2005, pages 18-24 (Yasuhiro Shima), pages 25-30 (Takaaki Yagi), etc. Are listed.
- the color filter according to the present invention When the color filter according to the present invention is used in a liquid crystal display device, a high contrast can be realized when combined with a conventionally known three-wavelength tube of a cold cathode tube, and further, red, green and blue LED light sources (RGB-LED).
- RGB-LED red, green and blue LED light sources
- Example of Synthesis of Dye Multimer The following xanthenes 1 to 4 are included in the preferred form (A1) of the dye multimer described above.
- the following xanthene 5 is included in the preferred form (A2) of the dye multimer described above.
- the following xanthene 6 is contained in the preferable form (A3) of the dye multimer described above.
- the following xanthenes 7 and 8 are included in the preferred form (A4) of the dye multimer described above. ⁇ Synthesis of xanthene 1>
- the obtained concentrate was added to 100 mL of methanol, and 16.4 g (41.8 mmol) of trifluoromethylsulfonic acid tetrabutylammonium salt was added. Separation was performed with 200 mL of ethyl acetate and 100 mL of water, and the ethyl acetate layer was concentrated to obtain 18.0 g of monomer X.
- monomer X (8.2 g), methacrylic acid (0.46 g), dodecyl mercaptan (0.255 g), propylene glycol 1-monomethyl ether 2-acetate (hereinafter also referred to as “PGMEA”) (23. 3 g) was added and heated to 80 ° C. under a nitrogen atmosphere.
- PGMEA propylene glycol 1-monomethyl ether 2-acetate
- monomer X (8.2 g), methacrylic acid (1.075 g), dodecyl mercaptan (0.255 g), 2,2′-azobis (isobutyric acid) dimethyl) [trade name: V601, Wako Pure Chemical Industries, Ltd.
- the weight average molecular weight (Mw) of the dye multimer (xanthene 1) confirmed by GPC measurement was 7,700.
- the acid value was 37 mgKOH / g by titration using 0.1N sodium hydroxide aqueous solution.
- Monomer Z (8.2 g), methacrylic acid (0.46 g), dodecyl mercaptan (0.255 g), and PGMEA (23.3 g) were added to a three-necked flask and heated to 80 ° C. in a nitrogen atmosphere.
- monomer Z (8.2 g), methacrylic acid (1.075 g), dodecyl mercaptan (0.255 g), 2,2′-azobis (isobutyric acid) dimethyl) [trade name: V601, Wako Pure Chemical Industries, Ltd. Co., Ltd.] (0.58 g) and a mixed solution of PGMEA (23.3 g) were added dropwise over 4 hours.
- the weight average molecular weight (Mw) of the dye multimer (xanthene 5) confirmed by GPC measurement was 6,500.
- the acid value was 38 mgKOH / g by titration using 0.1N sodium hydroxide aqueous solution.
- Rhodamine B 20.0 g (41.8 mmol) and the following polymerizable anion potassium salt 24.3 g (41.8 mmol) were salt-exchanged in 200 ml of methanol, 1 L of water was added, and the mixture was extracted with 500 ml of chloroform and concentrated. 25 g of Y was obtained.
- Monomer Y (8.2 g), methacrylic acid (0.46 g), dodecyl mercaptan (0.255 g), and PGMEA (23.3 g) were added to a three-necked flask and heated to 80 ° C. in a nitrogen atmosphere.
- monomer Y (8.2 g), methacrylic acid (1.075 g), dodecyl mercaptan (0.255 g), 2,2′-azobis (isobutyric acid) dimethyl) [trade name: V601, Wako Pure Chemical Industries, Ltd. (Mixed)] (0.58 g) and a mixed solution of PGMEA (23.3 g) were added dropwise over 5 hours.
- the weight average molecular weight (Mw) of the dye multimer (xanthene 6) confirmed by GPC measurement was 6,900.
- monomer Z2 (8.2 g) obtained from the synthesis of xanthene 5, methacrylic acid (0.46 g), dodecyl mercaptan (0.255 g), propylene glycol 1-monomethyl ether 2-acetate (hereinafter “PGMEA”) (23.3 g) was added and heated to 80 ° C. under a nitrogen atmosphere.
- PGMEA propylene glycol 1-monomethyl ether 2-acetate
- the weight average molecular weight (Mw) of the dye multimer (xanthene 7) confirmed by GPC measurement was 8,200.
- the acid value was 38 mgKOH / g by titration using 0.1N sodium hydroxide aqueous solution.
- Blue pigment dispersion 1 was prepared as follows.
- C. I. Pigment Blue 15: 6 (10.0 parts (blue pigment, average particle size 55 nm)), Dispersbyk 111 as a pigment dispersant (3.0 parts), PGMEA (70.0 parts) and cyclohexanone (17.0 parts) were mixed in a bead mill (
- a pigment dispersion was prepared by mixing and dispersing with zirconia beads (0.3 mm diameter) for 3 hours.
- dispersion treatment was further performed at a flow rate of 500 g / min under a pressure of 2000 kg / cm 3 using a high-pressure disperser NANO-3000-10 (manufactured by Nippon BEE Co., Ltd.) with a decompression mechanism.
- This dispersion treatment was repeated 10 times to obtain a blue pigment dispersion 1 (CI Pigment Blue 15: 6 dispersion, pigment concentration 10% by mass) used in the coloring compositions of Examples and Comparative Examples.
- Example 0 The following components were mixed and dispersed and dissolved to obtain a colored composition of Example 0. Before preparing Example 0, the solvent used was distilled and a drying agent was used to remove toluene and moisture in the system, and the dyes and pigments were repeatedly washed with distilled water and dried to obtain Na, K ions were removed. Other materials such as monomers were purified before use to remove impurities (toluene, Na, K ions, etc.) and then prepared.
- the water content was measured according to a known method by the Karl Fischer method. Specifically, the moisture content of the measurement material was measured using a Karl Fischer moisture meter (KF-06, manufactured by Mitsubishi Chemical Holdings Corporation), and the moisture content was measured as moisture content / mass of measurement material ⁇ 100.
- the toluene concentration was determined by preparing a calibration curve by gas chromatography according to a known method. In this application, after vacuum-drying each raw material of a composition and confirming that toluene content is 0.005 ppm or less, the composition in which toluene concentration differs is produced by adding toluene separately at the time of preparation of a composition. did.
- Example 1 To the composition of Example 0, water, toluene, Na ion source (specifically prepared by preparing a methanol solution of sodium chloride and adding it), K ion source (specifically potassium bromide) A sample of Examples 1 to 6 was prepared by adding a methanol solution prepared by adding a methanol solution of
- compositions of Examples 7 to 77 and Comparative Examples 1 to 16 were the same as Example 0 except that the dye multimer, the curable compound (monomer), and the photopolymerization initiator were changed as shown in the following table. A product was made. Curable compound (monomer (m-2)) Curable compound (monomer (m-3)) Curable compound (monomer (m-4))
- Photopolymerization initiator (I-2, OXE-02 manufactured by BASF)
- Photopolymerization initiator (I-3, Irgacure 907 manufactured by BASF)
- Viscosity change rate is 0.5% or less (particularly good) 5: Viscosity change rate is higher than 0.5% and 3% or less (good) 4: Viscosity change rate is higher than 3% and not higher than 7% (slightly good) 3: Viscosity change rate is higher than 7% and 8% or less (within allowable range) 2: Viscosity change rate is higher than 8% and not higher than 12% (outside the allowable range) 1: Viscosity change rate is higher than 12% (outside the allowable range)
- the foreign matter increase rate was calculated by (number of foreign matters after one month of freezing / number of foreign matters immediately after preparation). A criterion of 3 or more is desirable in practice. The results are shown in the table. (Criteria) 6: Less than 1.1 5: 1.1 or more and less than 1.3 4: 1.3 or more and less than 1.5 3: 1.5 or more and less than 2.0 2: 2.0 or more and less than 3.0 1: 3. 0 or more
- Resist CT-4000L solution (manufactured by FUJIFILM Electronics Materials Co., Ltd .; base clearing agent) is applied onto a silicon wafer to a thickness of 0.1 ⁇ m using a spin coater and heated at 220 ° C. for 1 hour. An undercoat layer was formed by drying, and a silicon wafer with an undercoat layer was obtained.
- the coloring compositions of Examples and Comparative Examples were applied by spin coating on a silicon wafer with an undercoat layer so that the film thickness after application was 0.6 ⁇ m, and then on a hot plate at 90 ° C. for 2 minutes. A colored composition layer was obtained by heating.
- the obtained colored composition layer was exposed to an island pattern of 1.0 ⁇ m through a mask at 300 mj / cm 2 using an i-line stepper exposure apparatus FPA-3000i5 + (manufactured by Canon Inc.).
- paddle development was performed for 60 seconds at 23 ° C. using a 1.0% aqueous solution of tetramethylammonium hydroxide (TMAH) on the colored composition layer after exposure.
- TMAH tetramethylammonium hydroxide
- the line width of the obtained colored pattern was observed using a length measuring SEM (trade name: S-7800H, manufactured by Hitachi, Ltd.).
- the difference between the maximum value and the minimum value of the line width within one pixel when the holding time was 72 hours was measured at 10 arbitrary points in the wafer to obtain an average value.
- the average value was ⁇ 0.02 um in any of the examples and the comparative examples. A criterion of 3 or more is desirable in practice. The results are shown in the table.
- a foreign substance having a size of 1.0 ⁇ m or more was counted using a defect evaluation apparatus ComPLUS (manufactured by Applied Materials).
- the foreign matter increase rate was evaluated according to the following criteria.
- the foreign matter increase rate was calculated by (number of foreign matters in the sample after the moisture resistance test / number of foreign matters in the initial sample). A criterion of 3 or more is desirable in practice. The results are shown in the table. (Criteria) 6: Less than 1.1 5: 1.1 or more and less than 1.3 4: 1.3 or more and less than 1.5 3: 1.5 or more and less than 2.0 2: 2.0 or more and less than 3.0 1: 3. 0 or more
- a foreign substance having a size of 2.0 ⁇ m or more was counted on the substrate on which the colored composition layer was formed, using a defect evaluation apparatus ComPLUS (manufactured by Applied Materials).
- the foreign matter increase rate was calculated by (number of foreign matter after cycle thermo test / number of foreign matter immediately after preparation) and evaluated according to the following categories.
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Abstract
L'invention porte sur une composition colorante qui a peu de chances de produire de la matière étrangère lorsqu'elle est laissée dans un environnement à basse température pendant longtemps, sur un film durci, sur un filtre coloré, sur un procédé pour la fabrication d'un filtre coloré, sur un dispositif de capture d'image à état solide et sur un dispositif d'affichage d'image. La composition colorante selon l'invention contient (A) un multimère colorant et (B) un solvant, le multimère colorant (A) ayant un site anionique et une structure partielle issue d'un colorant xanthène ayant un site cationique et la concentration des ions sodium et/ou la concentration des ions potassium dans la composition colorante étant de 0,1 à 10 ppm.
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KR1020167002343A KR101876278B1 (ko) | 2013-08-01 | 2014-07-30 | 착색 조성물, 경화막, 컬러 필터, 컬러 필터의 제조 방법, 고체 촬상 소자 및 화상 표시 장치 |
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JP2013160687A JP6147134B2 (ja) | 2013-08-01 | 2013-08-01 | 着色組成物、硬化膜、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子および画像表示装置 |
JP2013-160687 | 2013-08-01 |
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WO2015016243A1 true WO2015016243A1 (fr) | 2015-02-05 |
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ID=52431773
Family Applications (1)
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PCT/JP2014/070012 WO2015016243A1 (fr) | 2013-08-01 | 2014-07-30 | Composition colorante, film durci, filtre coloré, procédé pour la fabrication de filtre coloré, dispositif de capture d'image à état solide et dispositif d'affichage d'image |
Country Status (4)
Country | Link |
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JP (1) | JP6147134B2 (fr) |
KR (1) | KR101876278B1 (fr) |
TW (1) | TWI632204B (fr) |
WO (1) | WO2015016243A1 (fr) |
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CN110109324A (zh) * | 2018-02-01 | 2019-08-09 | 东友精细化工有限公司 | 红色感光性树脂组合物、包含其的滤色器及图像显示装置 |
CN110133964A (zh) * | 2018-02-09 | 2019-08-16 | 东友精细化工有限公司 | 绿色感光性树脂组合物、彩色滤光片和图像显示装置 |
US10988619B2 (en) * | 2019-07-19 | 2021-04-27 | Tcl China Star Optoelectronics Technology Co., Ltd. | Manufacturing method of rhodamine dye oligomer, solid color material and liquid crystal display device |
WO2023205263A1 (fr) * | 2022-04-21 | 2023-10-26 | Vitro Flat Glass Llc | Dispositifs électrochromiques comprenant des polymères ayant des résidus de monomère ( (méth) acrylate-amine cation bis (sulfonyl substitué) imide)) monomère |
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WO2019077912A1 (fr) * | 2017-10-20 | 2019-04-25 | 富士フイルム株式会社 | Composition colorée, procédé de production pour film, procédé de production pour filtre coloré, procédé de production pour élément d'imagerie solide, et procédé de production pour dispositif d'affichage d'image |
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CN110018615A (zh) * | 2018-01-10 | 2019-07-16 | 东友精细化工有限公司 | 绿色感光性树脂组合物、彩色滤光片和图像显示装置 |
CN110109324A (zh) * | 2018-02-01 | 2019-08-09 | 东友精细化工有限公司 | 红色感光性树脂组合物、包含其的滤色器及图像显示装置 |
CN110133964A (zh) * | 2018-02-09 | 2019-08-16 | 东友精细化工有限公司 | 绿色感光性树脂组合物、彩色滤光片和图像显示装置 |
US10988619B2 (en) * | 2019-07-19 | 2021-04-27 | Tcl China Star Optoelectronics Technology Co., Ltd. | Manufacturing method of rhodamine dye oligomer, solid color material and liquid crystal display device |
WO2023205263A1 (fr) * | 2022-04-21 | 2023-10-26 | Vitro Flat Glass Llc | Dispositifs électrochromiques comprenant des polymères ayant des résidus de monomère ( (méth) acrylate-amine cation bis (sulfonyl substitué) imide)) monomère |
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JP2015030783A (ja) | 2015-02-16 |
KR20160027056A (ko) | 2016-03-09 |
TW201506093A (zh) | 2015-02-16 |
TWI632204B (zh) | 2018-08-11 |
JP6147134B2 (ja) | 2017-06-14 |
KR101876278B1 (ko) | 2018-07-09 |
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