WO2014201706A1 - Automation device for picking and placing liquid crystal substrate of large size - Google Patents

Automation device for picking and placing liquid crystal substrate of large size Download PDF

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Publication number
WO2014201706A1
WO2014201706A1 PCT/CN2013/077808 CN2013077808W WO2014201706A1 WO 2014201706 A1 WO2014201706 A1 WO 2014201706A1 CN 2013077808 W CN2013077808 W CN 2013077808W WO 2014201706 A1 WO2014201706 A1 WO 2014201706A1
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WO
WIPO (PCT)
Prior art keywords
liquid crystal
tray
lifting
cassette
module
Prior art date
Application number
PCT/CN2013/077808
Other languages
French (fr)
Chinese (zh)
Inventor
汪永强
吴俊豪
林昆贤
齐明虎
杨卫兵
陈增宏
蒋运芍
舒志优
杨国坤
李晨阳子
Original Assignee
深圳市华星光电技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Publication of WO2014201706A1 publication Critical patent/WO2014201706A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Definitions

  • the present invention relates to a Thin Film Transistor (TFT) technology, and more particularly to an automated device for taking an enlarged size liquid crystal substrate.
  • TFT Thin Film Transistor
  • a large-sized liquid crystal substrate is generally placed on a production line using a jig (such as a tray).
  • a jig such as a tray
  • the operation process is very difficult, and it takes a lot of time. With a lot of manpower, and a little careless, it will damage the liquid crystal substrate, so how to achieve safe take-up of the size of the liquid crystal substrate has become an urgent technical problem to be solved.
  • the technical problem to be solved by the present invention is to provide an automatic device for taking an enlarged size liquid crystal substrate, which can safely and automatically pick up or transport a large-sized liquid crystal substrate.
  • an aspect of an embodiment of the present invention provides an automated device for taking a liquid crystal substrate of an enlarged size, comprising:
  • a cassette lifting module which is internally provided with a cassette for stacking a plurality of trays, the tray being horizontally slidable or sliding into the cassette;
  • the cassette push-pull module is located in an operation of the tray sliding direction of the cassette lifting module a table for absorbing one of the cassettes and driving the tray to slide in or out to move the tray between the console and the cassette;
  • the second buffer pad on the upper tray is overlaid on the liquid crystal substrate, or the second buffer pad is placed on the liquid crystal substrate in the tray;
  • a substrate lifting mechanism located under the operating table, comprising at least a plurality of jacking needles movable in an up and down direction, the jacking needles penetrating the trays on the operating table and held in the trays
  • the bottom of the liquid crystal substrate separates the liquid crystal substrate from the tray.
  • the card lifting module specifically includes:
  • a lifting module rack having an opening at least on one side thereof;
  • a cassette disposed on the inside of the lifting module frame, wherein the opposite side walls are provided with a support member with a first roller, and the tray on which the liquid crystal substrate is placed can be placed on the support member, the tray Sliding in or out of the cassette relative to the support member;
  • a lifting and lowering mechanism is fixed to the bottom of the lifting module frame for supporting the cassette and driving the cassette to move up and down to adjust the position of the cassette.
  • the lifting and lowering mechanism comprises a lifting platform, and at each of the four ends of the lifting platform, a clamping level correction cylinder for adjusting the horizontal position of the cassette is arranged, and where the lifting platform is in contact with the cassette, Each of the hooks is provided with a plurality of floating support devices for adjusting the vertical position of the cassette.
  • the tray is an upper open box body, and a plurality of jacking needle passage holes are arranged at a bottom thereof for passing through a jacking needle of the substrate jacking mechanism; at least one magnetic attraction device is disposed on one side of the tray; Said card ⁇ push-pull module adsorption;
  • a liquid crystal substrate is disposed on the tray, a first cushion is disposed between the liquid crystal substrate and the tray, and a plurality of jacking holes are disposed at corresponding positions on the bottom of the first cushion; The upper portion of the liquid crystal substrate is covered with the second cushion.
  • the card push-pull module includes:
  • a sliding table disposed on two sides of the top of the rack of the console, wherein a second roller is disposed thereon, and the tray is slid thereon;
  • An electromagnetic chuck for absorbing the magnetic device on the side wall of the tray when energized;
  • An electromagnetic chuck telescopic cylinder for driving the electromagnetic chuck to move so that the sucked tray slides on the slide table.
  • the substrate lifting mechanism comprises:
  • a jacking pin mounting plate on which a plurality of jacking pins are mounted
  • a jacking cylinder disposed on a lower side of the jacking pin mounting plate, and fixed to the console frame for driving the jacking plate mounting plate to lift;
  • a plurality of jacking guide posts disposed on a lower side of the jacking pin mounting plate, cooperate with a guide sleeve disposed on the console frame, and the jacking pin mounting plate and the operating table machine Active connection between shelves.
  • the buffer pick-and-place module includes:
  • a cushion pick-and-place mechanism is disposed at the top of the pick-and-place module rack, and the cushion pick-and-place mechanism can be translated to the upper side of the console for placing the upper portion of the liquid crystal substrate in the tray on the console
  • the second cushion is taken out and placed in the pick-and-place module rack, or the second cushion in the pick-and-place module rack is taken out and placed on the liquid crystal substrate in the tray;
  • a pick-and-place module lifting mechanism fixedly disposed at a lower portion of the pick-and-place module rack for supporting a second cushion stored in the pick-and-place module rack and capable of driving the second cushion Lifting to adjust the position of the second cushion.
  • the cushion pick-and-place mechanism further includes:
  • a sliding bracket that cooperates with a linear slide rail on a mounting bracket to move between the pick-and-place module rack and the upper portion of the console, wherein the mounting bracket is disposed on the cushion Laying the two sides of the top of the module and extending above the console, and providing a linear slide on each mounting bracket;
  • a linear motor for driving the sliding bracket to move on the linear slide
  • a pressing plate movably connected to the sliding bracket and disposed under the sliding bracket for positioning and pressing a tray located on the operating table;
  • a suction plate movably connected to the pressure plate, located below the pressure plate, for adsorbing a second cushion in the tray or a second cushion in the adsorption pick-and-place module rack.
  • the pressure plate is formed with a positioning plate on four sides for positioning and pressing the tray, A platen cylinder is fixed in a middle portion of the pressure plate for driving the pressure plate to move up and down.
  • the suction plate includes a plurality of platen grooves, and the plate groove is a downwardly open groove structure, and the platen groove is A plurality of suction cups for adsorbing the second cushion are disposed at intervals, and at least one suction plate cylinder is further disposed on the suction plate for driving the lifting and lowering of the suction plate and controlling opening and closing of the suction cup.
  • a substrate pick-and-place mechanism comprising a cross bar and a plurality of parallel support pieces disposed on the cross bar, wherein the plurality of support pieces are substantially in the same plane, and the side of each support piece contacting the liquid crystal substrate There are multiple buffer loops on it.
  • an automated apparatus for taking an enlarged size liquid crystal substrate including:
  • a cassette lifting module which is internally provided with a cassette for stacking a plurality of trays, the tray being horizontally slidable or sliding into the cassette;
  • a cassette push-pull module located on an operation table facing the tray sliding direction of the cassette lifting module, for adsorbing one of the cassettes, and driving the tray to slide in or out Moving the tray between the console and the cassette;
  • the second buffer pad on the upper tray is overlaid on the liquid crystal substrate, or the second buffer pad is placed on the liquid crystal substrate in the tray;
  • a substrate lifting mechanism located under the operating table, comprising at least a plurality of jacking needles movable in an up and down direction, the jacking needles penetrating the trays on the operating table and held in the trays a bottom of the liquid crystal substrate, separating the liquid crystal substrate from the tray;
  • the card lifting module specifically includes:
  • a lifting module rack having an opening at least on one side thereof;
  • a cassette disposed on the inside of the lifting module frame, wherein the opposite side walls are provided with a support member with a first roller, and the tray on which the liquid crystal substrate is placed can be placed on the support member, the tray Sliding in or out of the cassette relative to the support member;
  • a lifting and lowering mechanism fixed to the bottom of the lifting module frame for supporting the cassette, and The cassette is driven to move up and down to adjust the position of the cassette.
  • the lifting and lowering mechanism comprises a lifting platform, and at each of the four ends of the lifting platform, a clamping level correction cylinder for adjusting the horizontal position of the cassette is arranged, and where the lifting platform is in contact with the cassette, Each of the hooks is provided with a plurality of floating support devices for adjusting the vertical position of the cassette.
  • the tray is an upper open box body, and a plurality of jacking needle passage holes are arranged at a bottom thereof for passing through a jacking needle of the substrate jacking mechanism; at least one magnetic attraction device is disposed on one side of the tray; Said card ⁇ push-pull module adsorption;
  • a liquid crystal substrate is disposed on the tray, a first cushion is disposed between the liquid crystal substrate and the tray, and a plurality of jacking holes are disposed at corresponding positions on the bottom of the first cushion; The upper portion of the liquid crystal substrate is covered with the second cushion.
  • the card push-pull module includes:
  • a sliding table disposed on two sides of the top of the rack of the console, wherein a second roller is disposed thereon, and the tray is slid thereon;
  • An electromagnetic chuck for absorbing the magnetic device on the side wall of the tray when energized
  • An electromagnetic chuck telescopic cylinder for driving the electromagnetic chuck to move so that the sucked tray slides on the slide table.
  • the substrate lifting mechanism comprises:
  • a jacking pin mounting plate on which a plurality of jacking pins are mounted
  • a jacking cylinder disposed on a lower side of the jacking pin mounting plate, and fixed to the console frame for driving the jacking plate mounting plate to lift;
  • a plurality of jacking guide posts disposed on a lower side of the jacking pin mounting plate, cooperate with a guide sleeve disposed on the console frame, and the jacking pin mounting plate and the operating table machine Active connection between shelves.
  • the buffer pick-and-place module includes:
  • a cushion pick-and-place mechanism is disposed at the top of the pick-and-place module rack, and the cushion pick-and-place mechanism can be translated to the upper side of the console for placing the upper portion of the liquid crystal substrate in the tray on the console
  • the second cushion is taken out and placed in the pick-and-place module rack, or the second cushion in the pick-and-place module rack is taken. Placed on a liquid crystal substrate placed in the tray;
  • a pick-and-place module lifting mechanism fixedly disposed at a lower portion of the pick-and-place module rack for supporting a second cushion stored in the pick-and-place module rack and capable of driving the second cushion Lifting to adjust the position of the second cushion.
  • the cushion pick-and-place mechanism further includes:
  • a sliding bracket that cooperates with a linear slide rail on a mounting bracket to move between the pick-and-place module rack and the upper portion of the console, wherein the mounting bracket is disposed on the cushion Laying the two sides of the top of the module and extending above the console, and providing a linear slide on each mounting bracket;
  • a linear motor for driving the sliding bracket to move on the linear slide
  • a pressing plate movably connected to the sliding bracket and disposed under the sliding bracket for positioning and pressing a tray located on the operating table;
  • a suction plate movably connected to the pressure plate, located below the pressure plate, for adsorbing a second cushion in the tray or a second cushion in the adsorption pick-and-place module rack.
  • the pressure plate is formed with a positioning plate on four sides for positioning and pressing the tray, and a pressure plate cylinder is fixed in a middle portion of the pressure plate for driving the pressure plate to move up and down.
  • a platen groove is a downwardly open groove structure, a plurality of suction cups for adsorbing the second cushion are disposed on the platen groove, and at least one suction is further disposed on the suction plate a plate cylinder for driving the lifting and lowering of the suction plate and controlling opening and closing of the suction cup.
  • the substrate pick-and-place mechanism includes a cross bar and a plurality of parallel support pieces disposed on the cross bar, wherein the plurality of support pieces are substantially in the same plane, and each support piece is in contact with the liquid crystal substrate There are multiple buffer rings on one side.
  • the liquid crystal panel can be automatically moved between the cassette and the processing machine, and the safety is good
  • the utility model can ensure the safety of the liquid crystal panel during transportation by placing the liquid crystal substrate in the tray and fixing it with the first cushion pad and the second cushion pad;
  • the liquid crystal substrate When the liquid crystal substrate is taken out from the tray, the liquid crystal substrate is lifted by the lifting pin on the jacking mechanism, so that the liquid crystal substrate can be smoothly picked up, and the substrate pick-and-place mechanism adopts the bottom grabbing method, further Ground can reduce damage to the liquid crystal substrate;
  • the invention can save manpower, improve the level of automation (stable quality improvement), increase production capacity, and reduce fragmentation.
  • DRAWINGS
  • FIG. 1 is a schematic view showing the operation of an automatic apparatus for taking an enlarged size liquid crystal surface substrate according to the present invention
  • FIG. 2 is a schematic view showing an assembly structure in an embodiment of an automated apparatus for taking an enlarged size liquid crystal surface substrate according to the present invention
  • FIG. 3 is a schematic view showing the overall structure of the cassette lifting module of Figure 2;
  • Figure 4 is a schematic exploded view of the structure of the cassette lifting module of Figure 3;
  • Figure 5 is a partial view showing the effect of the cassette placed on the lifting and lowering mechanism
  • Figure 6 is a schematic exploded view of the structure of the cassette of Figure 4.
  • Figure 7 is an enlarged view of a portion A in Figure 6;
  • Figure 8 is a schematic exploded view of the tray of Figure 6;
  • FIG. 9 is a schematic structural view of a cassette push-pull module and a substrate jacking mechanism on a console according to an embodiment of the present invention.
  • Figure 10 is a side elevational view of the console in one embodiment of the present invention.
  • FIG. 11 is a schematic view showing a state in which a cushion pick-and-place module grabs a cushion from a console according to an embodiment of the present invention
  • Figure 12 is a schematic view showing the overall structure of the cushioning mechanism of the cushion in one embodiment of the present invention
  • Figure 13 is a schematic structural view of the sliding bracket of Figure 12;
  • Figure 14 is a schematic structural view of the pressure plate of Figure 12;
  • Figure 15 is a schematic structural view of the suction plate of Figure 12;
  • Figure 16 is a cross-sectional view taken along line AA of Figure 11;
  • Figure 17 is an enlarged view of a portion B in Figure 16;
  • Figure 18 is a schematic view showing the structure of the lifting mechanism of the cushion pick-and-place module in an embodiment of the present invention
  • Figure 19 is a schematic view showing the effect of placing the lifting mechanism in the rack in one embodiment of the present invention
  • the automation device includes:
  • a cassette lifting module 1 which is internally provided with a cassette for stacking a plurality of trays, the tray can be horizontally slid or slideed into the cassette;
  • the operation table 2 is opposite to the tray sliding direction of the cassette lifting module 1.
  • the operation table is provided with a cassette pushing and pulling module 3 for sucking one of the cassettes and driving the tray to slide. In or out, moving the tray between the console and the cassette; in addition, a bottom lifting mechanism 4 is disposed under the console, and the substrate lifting mechanism 4 is used to be placed in the tray on the console 2 The liquid crystal substrate rises smoothly and will be separated from the tray;
  • the cushion pick-and-place module 5 is located on the side of the console 2, and is provided with a cushion pick-and-place mechanism 6 which can be translated to the top of the console 2 for being placed at the console 2, the tray covered in the tray on the liquid crystal substrate is taken out, or the cushion is placed on the liquid crystal substrate; in addition, a substrate pick-and-place mechanism 7 is further included, and the substrate pick-and-place mechanism 7 is on the substrate After lifting the liquid crystal substrate, the jacking mechanism 4 can be moved into the tray on the operation table, and the liquid crystal substrate in the tray is chucked and removed into the processing machine 8, or the processing machine 8 is processed. The liquid crystal substrate is placed back into the tray on the console 2.
  • FIG. 2 it is a schematic view of an assembly structure in an embodiment of an automation apparatus for taking an enlarged size liquid crystal surface substrate according to the present invention. It can be seen that the cassette lifting module 1 is facing the console 2, and the cushion pick-and-place module 5 is located on one side of the console 2. The cassette can be transferred between the cassette lifting module 1 and the console 2, and the cushion can be transferred between the console 2 and the cushion pick-and-place module 5.
  • FIG. 3 it is an overall structural diagram of the cassette lifting module 1 in FIG. It can be seen that the card lifting module 1 specifically includes:
  • the lifting module frame 10 is a frame structure, and at least one side is provided with an opening; the cassette 12 is disposed inside the lifting module frame 10, and a plurality of trays 121 are placed inside thereof; the lifting and lowering mechanism 14 is fixed At the bottom of the lifting module frame 10, it is used to support the cassette 12, and can drive the cassette 12 to move up and down to adjust the position of the cassette 12.
  • the cassette 12 is a similar drawer structure, which includes a cassette frame 120 and is placed therein. At least one tray 121 for placing a liquid crystal substrate, wherein the tray 121 can be slid into or out of the cassette frame 120, and at least one magnetic device 1217 is disposed on the outward side of each tray 121.
  • the lifting mechanism 14 includes a lifting platform 144 for supporting the cassette 12, and the lifting platform 144 is connected with a screw nut 149 on both sides thereof.
  • the first motor 142 disposed at the bottom passes through the driving connection shaft 142 and passes through the steering 145.
  • the action causes the screw 147 to rotate, thereby causing the up and down movement of the screw nut 149 to move the lifting platform 144 up and down along a slide rail (not shown) in the rail support 150, such as in one embodiment, the first motor
  • the lifting platform 144 is raised, and when the first motor 142 is reversed, the lifting platform 144 is lowered.
  • FIG. 5 it is a partial effect diagram of the cassette 12 placed on the lifting and lowering mechanism 14.
  • means for adjusting the horizontal position and the vertical position of the cassette 12 are also provided on the elevating transmission mechanism 14.
  • a card level correction cylinder 148 is provided for holding the four bottom corners of the cassette 12, and the action of the cylinder is used to adjust the position of the cassette 12 Horizontal position;
  • a plurality of floating supporting devices 146 are provided, and the vertical position of the cassette 12 can be adjusted by the floating supporting device 146.
  • FIG. 6 it is a structural exploded view of the cassette 12 of the present invention.
  • the cassette frame 120 in the figure has the top cover removed, and only one is shown.
  • the tray 121 when it can be understood that, in an actual application, the cassette frame 120 may be provided with a top cover, and a plurality of trays 121 may be placed in the cassette frame 120. Together with the partial enlarged view in FIG.
  • at least one set of support members 1204 is disposed on opposite side walls of the cassette frame 120, and the tray 121 is placed on the support member 1204.
  • the tray 121 can slide on the support member 1204. For example, the cassette frame 120 is slid into or out of the support member 1204.
  • the tray 121 is made of a rigid hard material, provides a flat support surface for the liquid crystal substrate disposed therein, and increases the support point for the liquid crystal substrate panel, and can reduce the vibration amplitude during the moving process, thereby effectively preventing the liquid crystal substrate from being deformed or fragmented.
  • the relative sliding between the tray 121 and the support member 1204 adopts the drawing principle of the drawer.
  • the tray 121 is placed on the support member 1204, and the tray 121 is first pulled to slide the tray 121 out of the cassette frame 120, and the liquid crystal substrate is After being placed in the tray 121, the tray 121 is pushed to slide the tray 121 into the cassette frame 120, so that when the liquid crystal substrate is placed in the tray 121 or taken out from the tray 121, only the tray 121 needs to be pushed and pulled. Applying a force on the tray 121, the tray 121 drives the liquid crystal substrate to slide in or out of the cassette frame 120. This operation does not cause an external force on the liquid crystal substrate, and the force is prevented from being applied when the liquid crystal substrate is placed or removed. Improperly causing the liquid crystal substrate to break.
  • the tray 121 can be pushed and pulled by adsorbing and applying the magnetic device 1217 provided on the side wall of each tray 121.
  • the support member 1204 of the present invention is provided with a plurality of first rollers 1202. And a finite strip 1206 is provided on the rear side of the cassette frame 120 (the other side opposite to the side of the opening).
  • the tray 121 is an upper open box, and the bottom of the tray 121 is provided with a first cushion 1214, and the liquid crystal substrate 1212 is placed on the first cushion 1214 at the bottom of the tray 121.
  • the first cushion 1214 may be made of a material such as a lint-free foam that provides cushioning to the bottom/side of the liquid crystal substrate 1212 to protect the liquid crystal substrate 1212 during handling. It will be appreciated that in one embodiment, the first cushion 1214 may specifically include a bottom cushion and a side cushion.
  • the tray 121 may further include a second cushion 1210 at the top, and the second cushion 1210 also adopts a dust-free foam.
  • the second cushion 1210 When the liquid crystal substrate 1212 is placed on the first cushion 1214 at the bottom of the tray 121, The second cushion 1210 is placed above the liquid crystal substrate 1212, and clamps the liquid crystal substrate 1212 together with the first cushion 1214 at the bottom to provide full protection to the liquid crystal substrate 1212.
  • a plurality of corresponding jacking holes 1218 are provided at corresponding positions on the tray 121 and the first cushion 1214.
  • the cassette push-pull module 3 includes: a slide table 30 disposed on two sides of the top of the console frame 20, and the slide table 30 is provided with a plurality of second rollers 32 for the tray 121 to slide thereon ;
  • the electromagnetic chuck 34 is configured to adsorb the magnetic device 1217 on the side wall of the tray 121 after being energized; and the electromagnetic chuck telescopic cylinder 36 is configured to drive the electromagnetic chuck 34 to move so that the sucked tray 121 slides on the slide table 30.
  • the tray 121 can be sucked and pulled out of the cassette 12 and slid on the slide table 3, so that the tray 121 can be placed above the console frame 20. Conversely, the tray 121 can also be pushed into the cassette 12 from above the console frame 20.
  • a substrate jacking mechanism 4 is further disposed below the cassette push-pull module 3, and the board jacking mechanism 4 includes:
  • the jacking cylinder 44 is disposed on the lower side of the jack up mounting plate 40 and is fixed to the console frame 20 for driving the jack up mounting plate 40 to lift, specifically, pushing the jacking through a cylinder conducting post 46.
  • the needle mounting plate 40 is raised or lowered;
  • a plurality of jacking guides 48 are further disposed on the lower side of the jack up mounting plate 40 to cooperate with the guide sleeves disposed on the console frame 20 to enable the jackup mounting plate 40 and the console
  • the frames 20 are movably coupled to limit the lifting pin mounting plate 40 from moving only in the up and down direction and not in the horizontal direction.
  • the jacking pin mounting plate 40 when the jacking pin mounting plate 40 is driven to rise, the jacking pin 34 mounted thereon passes through the jack 121 and the jacking pin through hole 1218 of the first cushion pad 1214 to abut against the liquid crystal substrate 1214. The bottom of the liquid crystal substrate 1214 is smoothly lifted to disengage the liquid crystal substrate 1214 from the tray 121.
  • the cushion pick-and-place module 5 includes: a pick-and-place module rack 50, wherein a plurality of second cushions 1210 can be stored;
  • a cushion pick-and-place mechanism 6 is disposed at the top of the pick-and-place module rack 50.
  • the cushion pick-and-place mechanism 6 can be translated to the upper side of the console 2 for being placed in the tray 121 on the console 2
  • the second buffer pad 1210 on the upper portion of the liquid crystal substrate is taken out and placed in the pick-and-place module frame 50, or the second buffer pad 1210 in the pick-and-place module frame 50 is taken out and placed on the liquid crystal substrate in the tray 121.
  • the pick-and-place module lifting mechanism 52 is fixedly disposed at a lower portion of the pick-and-place module frame 50 for supporting
  • the second cushion stored in the module frame 50 is taken in and taken, and the lifting and lowering of the second cushions can be driven to adjust the positions of the second cushions.
  • Fig. 12 is a schematic view showing the overall structure of the cushion pick-and-place mechanism 6 in the embodiment of the present invention.
  • the cushion pick-and-place mechanism 6 includes:
  • the sliding bracket 61 is matched with the linear sliding rail 53 on the mounting bracket 51 through a connecting plate 54.
  • the sliding frame 61 can be moved between the pick-and-place module frame 50 and the upper portion of the operating table 2, wherein
  • the mounting brackets 51 are disposed on both sides of the top of the cushion pick-and-place module 5 and extend above the console 2, and a linear slide rail 53 is disposed on each mounting bracket 51; wherein the sliding bracket 61 is driven by a linear motor (not shown) to move on the linear slide 53;
  • a pressing plate 62 movably connected to the sliding bracket 61 and disposed under the sliding bracket 61 for positioning and pressing the tray 121 on the operating table 2;
  • a suction plate 64 which is movably connected to the pressure plate 62, is located below the pressure plate 62 for adsorbing the second cushion 1210 in the tray 121 or the second cushion in the pick-and-place module frame 50.
  • the sliding bracket 61 is a square frame structure composed of a plurality of cross bars (plates) 611 and a vertical rod 610.
  • a connecting plate 54 is disposed on the cross bar 611 at both ends, and the connecting plate 54 is configured to cooperate with the linear sliding rail 53 on the mounting support 51;
  • a cylinder through hole 613 is disposed in a middle portion of the sliding bracket 61. It is also provided with a plurality of first guide post holes 612.
  • the pressing plate 62 is a frame structure having a positioning plate 621 formed on four sides for positioning and pressing the tray 121.
  • a platen cylinder 624 is fixed in the middle of the platen for driving the platen 62 for the ascending and descending movement.
  • the platen lifting cylinder 624 is disposed in the cylinder through hole 613 in the middle of the sliding bracket 61.
  • a plurality of first guiding villages 622 are disposed on the pressing plate 62, and the corresponding first guiding portion on the sliding bracket 61 can be penetrated.
  • the post hole 612 is fixed at the upper end by a guide sleeve, so that the pressure plate 62 is movably coupled to the slide bracket 61.
  • a plurality of second pillar holes 623 are further provided on the platen 62.
  • the suction plate 63 is a frame structure, and includes a plurality of platen grooves 630, wherein the platen groove 630 is a downwardly open groove structure, and a plurality of suction cups 633 are spaced apart from the platen groove 630, wherein These suction cups 633
  • the adsorption buffer pad is further disposed on the platen groove 630, and the second guide post 631 cooperates with the second guide post hole 623 on the pressing plate 62 to make the suction plate 63 and the pressing plate 62.
  • at least one suction plate cylinder 632 is provided on the suction plate 63 for driving the lifting and lowering of the suction plate 63 and controlling the opening and closing of the suction cup 633.
  • FIG. 16 which is a cross-sectional view taken along line A-A of FIG. 11, together with a partial enlarged view of FIG. 17, the working principle of the cushion pick-and-place mechanism will be described.
  • the description will be made by taking a cushion from the tray 121 of the console 2 as an example;
  • the linear motor drives the slide bracket 61 to reach a work station (e.g., above the console);
  • the platen lifting cylinder 624 drives the pressing plate 62 and the suction plate 63 to descend together, and the positioning plate 621 of the pressing plate 62 presses the edge limit of the tray 121, as shown in FIG. 17, wherein the positioning plate 621 is pressed at the same time.
  • the suction plate cylinder 632 drives the suction plate 63 to lower, and the suction cup 633 is vacuum-activated, so that the suction cup of the suction plate 63 sucks the second cushion 1210;
  • the platen lifting cylinder 624 is retracted, and the driving platen 62 and the suction plate 63 are raised to the highest position together; the linear motor drives the sliding bracket 61 to reach the cushioning station of the cushioning pick-and-place module (ie, the pick-and-place module frame 50) Above)
  • FIG. 18 it is a schematic structural view of the pick-and-place module lifting mechanism 52 in the cushion pick-and-place module in one embodiment of the present invention. It is shown together with the effect diagram in FIG.
  • the pick and place module lifting mechanism 52 includes a cushion placement platform 520 for placing a cushion.
  • a second motor (not shown) is disposed under the cushioning art placement platform 520, which drives the connecting shaft 521 and passes through the cross The action of the 522 is to rotate the connecting shaft 523.
  • the vortex rod 526 at the four corners of the bottom of the cushion placing platform 520 is rotated by the action of the coupling 524 and the turbine box 526.
  • the cushion placement platform 520 is raised or lowered. For example, in one embodiment, the second motor is rotated forward, the cushion placement platform 520 is raised, and the second motor is reversed, and the cushioning placement platform 520 is lowered.
  • FIG. 20 it is a schematic structural view of a substrate pick-and-place mechanism 7 in an embodiment of the present invention.
  • the substrate pick-and-place mechanism 7 is adapted to extend into the lower portion of the liquid crystal substrate 1212 and to take the liquid crystal substrate 1212.
  • the utility model comprises a cross bar 70 and a plurality of parallel supporting pieces 72 disposed on the cross bar 70.
  • the plurality of supporting pieces 72 are substantially on the same plane, and the side of each supporting piece 72 contacting the liquid crystal substrate 1212 is provided on the side.
  • a plurality of buffer rings 72 are substantially on the same plane, and the side of each supporting piece 72 contacting the liquid crystal substrate 1212 is provided on the side.
  • the large-size liquid crystal panel can be conveniently and safely moved between the cassette and the processing machine by the automation device of the enlarged size liquid crystal panel of the present invention. turn.
  • the liquid crystal substrate is taken out from the cassette and transferred to the processing machine for processing.
  • the approximate workflow is as follows:
  • the cassette 12 is placed on the lifting module frame 10, and is horizontally positioned by the cassette 12 horizontal correction cylinder 148 in the lifting and lowering mechanism 14 and vertically positioned in conjunction with the floating supporting device 146 to make the cassette 12 a tray 121 is in a suitable position;
  • the electromagnetic chuck 34 of the cassette push-pull module 3 adsorbs the magnetic device 1217 on the side wall of the tray 121 after being energized, and pulls the tray 121 out of the cassette 12 to slide it out to the top of the console 2;
  • the cushion pick-and-place mechanism 6 of the pad pick-and-place module 5 is moved above the table 2, and the second cushion 1210 on the tray 2 is taken out and placed in the rack of the pick-and-place module 5.
  • the substrate lifting mechanism 4 lifts the liquid crystal substrate 1212 located in the tray 12 of the console 2 to be separated from the tray 121;
  • the substrate pick-and-place mechanism 7 is inserted into the gap between the liquid crystal substrate 1212 and the tray 121, and the liquid crystal substrate 1212 is taken out and sent to the processing machine table 8.
  • the processed liquid crystal substrate will be processed in the processing machine and moved back to the cassette.
  • the approximate workflow is as follows: The substrate pick-and-place mechanism 7 takes out the processed liquid crystal substrate from the processing machine 8 and places it on the jacking pin 42 that has been lifted by the jacking mechanism 4;
  • the jacking mechanism 4 is lowered, and the liquid crystal substrate is placed on the first cushion 1214 of the lower layer in the tray 121;
  • the cushion pick-and-place mechanism 6 of the cushion pick-and-place module 5 takes out the cushion from the pick-and-place module frame 50, and translates it to the top of the console 2 and is placed above the liquid crystal substrate 1212 in the tray 121;
  • the cassette push-pull module 3 pushes the tray 121 on which the liquid crystal substrate 1212 and the first cushion 1214 are placed back into the cassette 12.
  • the automatic device for taking an enlarged size liquid crystal panel provided by the embodiment of the present invention can automatically move the liquid crystal panel between the cassette and the processing machine, and has good safety;
  • the substrate is rotated and placed in the tray, and is clamped by the first cushion pad and the second cushion pad to ensure the safety of the liquid crystal panel during transportation;
  • the liquid crystal substrate When the liquid crystal substrate is taken out from the tray, the liquid crystal substrate is lifted by the lifting pin on the jacking mechanism, so that the liquid crystal substrate can be smoothly picked up, and the substrate pick-and-place mechanism adopts the bottom grabbing method, thereby further reducing the liquid crystal. Damage to the substrate;
  • the invention can save manpower, improve the level of automation (stable quality improvement), increase production capacity, and reduce fragmentation.

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Abstract

An automation device for picking and placing a liquid crystal substrate of large size, comprising: a cassette lifting module (1), a cassette pushing and pulling module (3), a cushion picking and placing module (5) and a substrate jacking mechanism (4). The automation device can automatically pick and place a liquid crystal substrate of large size, thereby saving human resources, promoting productivity, and reducing the occurrence of liquid crystal substrate cracking.

Description

一种取放大尺寸液晶基板的自动化设备 本申请要求于 2013 年 6 月 18 日提交中国专利局、 申请号为 201310241086.2、 发明名称为 "一种取放大尺寸液晶基板的自动化设备" 的 中国专利申请的优先权, 上述专利的全部内容通过引用结合在本申请中。 技术领域  The present invention claims the Chinese patent application filed on June 18, 2013 by the Chinese Patent Office, the application number is 201310241086.2, and the invention is entitled "an automated device for taking a liquid crystal substrate of an enlarged size". Priority, the entire contents of the above-identified patents are incorporated herein by reference. Technical field
本发明涉及薄膜晶体管(Thin Film Transistor, TFT )技术, 特别涉及一 种取放大尺寸液晶基板的自动化设备。  The present invention relates to a Thin Film Transistor (TFT) technology, and more particularly to an automated device for taking an enlarged size liquid crystal substrate.
背景技术 Background technique
近年来, 市场对 55寸以上大尺寸液晶基板的需求越来越大。 但是, 由于 大尺寸面板尺寸大, 厚度薄, 当需要远距离搬送大尺寸面板时, 例如实验需 求或前后制程设备相距甚远的情况, 需要跨区域、跨楼层、跨栋、跨厂搬送, 搬送工具在运动时平稳度较差或地面的平整度较差而造成颠簸震动,如果保 护不好, 极易造成面板破裂。  In recent years, there is an increasing demand for large-size liquid crystal substrates of 55 inches or more. However, due to the large size and thin thickness of large-sized panels, when large-sized panels need to be transported over long distances, such as experimental requirements or long distances between process equipment, cross-regional, cross-floor, cross-building, cross-plant transportation, and transportation are required. The tool is less stable during exercise or the flatness of the ground is poor, causing bumps and vibrations. If the protection is not good, the panel may be easily broken.
目前生产线上一般采用治具(如托盘)放置大尺寸液晶基板, 但是, 如 果通过人工将液晶基板放入至托盘中, 或者从托盘中取出, 操作过程非常困 难, 不但需要耗费 ^艮多的时间与 ^艮多的人力, 而在稍有不慎, 就会损坏液晶 基板, 故如何实现安全取放大尺寸液晶基板成为了一个急待解决的技术问 题。 发明内容  At present, a large-sized liquid crystal substrate is generally placed on a production line using a jig (such as a tray). However, if the liquid crystal substrate is manually placed in a tray or taken out from the tray, the operation process is very difficult, and it takes a lot of time. With a lot of manpower, and a little careless, it will damage the liquid crystal substrate, so how to achieve safe take-up of the size of the liquid crystal substrate has become an urgent technical problem to be solved. Summary of the invention
本发明所要解决的技术问题在于,提供一种取放大尺寸液晶基板的自动 化设备, 可以安全自动地取放或搬运大尺寸液晶基板。  The technical problem to be solved by the present invention is to provide an automatic device for taking an enlarged size liquid crystal substrate, which can safely and automatically pick up or transport a large-sized liquid crystal substrate.
为了解决上述技术问题,本发明的实施例的一方面提供了一种取放大尺 寸液晶基板的自动化设备, 包括:  In order to solve the above technical problem, an aspect of an embodiment of the present invention provides an automated device for taking a liquid crystal substrate of an enlarged size, comprising:
卡匣升降模组, 其内部设置有用于层叠放置多个托盘的卡匣, 所述托盘 可水平滑出或滑入所述卡匣;  a cassette lifting module, which is internally provided with a cassette for stacking a plurality of trays, the tray being horizontally slidable or sliding into the cassette;
卡匣推拉模组,位于正对所述卡匣升降模组的托盘滑出方向的一个操作 台上, 其用于吸附所述卡匣中的一个托盘, 并驱动所述托盘滑入或滑出, 使 所述托盘在所述操作台与所述卡匣之间移动; The cassette push-pull module is located in an operation of the tray sliding direction of the cassette lifting module a table for absorbing one of the cassettes and driving the tray to slide in or out to move the tray between the console and the cassette;
緩冲垫取放模组, 位于所述操作台一侧, 其上设置有緩冲垫取放机构, 所述緩冲垫取放机构可平移至所述操作台上方, 用于将位于操作台上的托盘 中覆盖于液晶基板之上的第二緩冲垫取出 , 或者将第二緩冲垫放置于所述托 盘中液晶基板之上;  a cushion pick-and-place module on a side of the console, on which a cushion pick-and-place mechanism is disposed, the cushion pick-and-place mechanism can be translated to the top of the console for being located at the console The second buffer pad on the upper tray is overlaid on the liquid crystal substrate, or the second buffer pad is placed on the liquid crystal substrate in the tray;
基板顶升机构, 位于所述操作台下方, 至少包括多个可以上下方向移动 的顶升针, 所述顶升针可穿透所述位于操作台上的托盘, 并顶持于所述托盘 中的液晶基板的底部, 使所述液晶基板与所述托盘分离。  a substrate lifting mechanism, located under the operating table, comprising at least a plurality of jacking needles movable in an up and down direction, the jacking needles penetrating the trays on the operating table and held in the trays The bottom of the liquid crystal substrate separates the liquid crystal substrate from the tray.
其中, 所述卡匣升降模组具体包括:  The card lifting module specifically includes:
升降模组机架, 其至少在一侧设置有开口;  a lifting module rack having an opening at least on one side thereof;
卡匣, 设置于所述升降模组机架内部, 其相对两侧壁上设置有带第一滚 轮的支撑件, 所述放置有液晶基板的托盘可放置于所述支撑件上, 所述托盘 可相对于所述支撑件滑入或滑出所述卡匣;  a cassette disposed on the inside of the lifting module frame, wherein the opposite side walls are provided with a support member with a first roller, and the tray on which the liquid crystal substrate is placed can be placed on the support member, the tray Sliding in or out of the cassette relative to the support member;
升降传动机构, 固定于所述升降模组机架底部, 用于支撑所述卡匣, 并 驱动所述卡匣上下运动以调整所述卡匣的位置。  A lifting and lowering mechanism is fixed to the bottom of the lifting module frame for supporting the cassette and driving the cassette to move up and down to adjust the position of the cassette.
其中, 所述升降传动机构包括有一升降平台, 在所述升降平台的四个端 部设置有用于调整所述卡匣水平位置的卡匣水平校正气缸 , 以及在升降平台 与卡匣接触的地方, 均勾设置有多个用于调整所述卡匣垂直位置的浮动支撑 装置。  Wherein, the lifting and lowering mechanism comprises a lifting platform, and at each of the four ends of the lifting platform, a clamping level correction cylinder for adjusting the horizontal position of the cassette is arranged, and where the lifting platform is in contact with the cassette, Each of the hooks is provided with a plurality of floating support devices for adjusting the vertical position of the cassette.
其中, 所述托盘为上方开口的盒体, 其底部设置有多个顶升针过孔, 供 基板顶升机构的顶升针穿过; 其一侧面上设置有至少一个磁吸装置, 供所述 卡匣推拉模组吸附;  Wherein, the tray is an upper open box body, and a plurality of jacking needle passage holes are arranged at a bottom thereof for passing through a jacking needle of the substrate jacking mechanism; at least one magnetic attraction device is disposed on one side of the tray; Said card 匣 push-pull module adsorption;
所述托盘上放置有液晶基板,在所述液晶基板与所述托盘之间设置有第 一緩冲垫, 所述第一緩冲垫底部相应位置也设置有多个顶升针过孔; 所述液 晶基板的上部覆盖有所述第二緩冲垫。  a liquid crystal substrate is disposed on the tray, a first cushion is disposed between the liquid crystal substrate and the tray, and a plurality of jacking holes are disposed at corresponding positions on the bottom of the first cushion; The upper portion of the liquid crystal substrate is covered with the second cushion.
其中, 所述卡匣推拉模组包括:  The card push-pull module includes:
设置于所述操作台的机架顶部两侧的滑台, 其上设置有第二滚轮, 供托 盘于其上滑动;  a sliding table disposed on two sides of the top of the rack of the console, wherein a second roller is disposed thereon, and the tray is slid thereon;
电磁吸盘, 用于在通电时吸附所述托盘侧壁上的磁吸装置; 电磁吸盘伸缩气缸, 用于驱动所述电磁吸盘移动, 以使其所吸附的托盘 在所述滑台上滑动。 An electromagnetic chuck for absorbing the magnetic device on the side wall of the tray when energized; An electromagnetic chuck telescopic cylinder for driving the electromagnetic chuck to move so that the sucked tray slides on the slide table.
其中, 所述基板顶升机构包括:  Wherein, the substrate lifting mechanism comprises:
顶升针安装板, 其上安装有多个顶升针;  a jacking pin mounting plate on which a plurality of jacking pins are mounted;
顶升气缸, 设置于所述顶升针安装板的下侧, 其与所述操作台机架相固 定, 用于驱动所述顶升针安装板升降;  a jacking cylinder disposed on a lower side of the jacking pin mounting plate, and fixed to the console frame for driving the jacking plate mounting plate to lift;
多个顶升导柱, 设置于所述顶升针安装板的下侧, 与设置于所述操作台 机架上的导套相配合, 使所述顶升针安装板与所述操作台机架之间活动连 接。  a plurality of jacking guide posts disposed on a lower side of the jacking pin mounting plate, cooperate with a guide sleeve disposed on the console frame, and the jacking pin mounting plate and the operating table machine Active connection between shelves.
其中, 所述緩冲垫取放模组包括:  The buffer pick-and-place module includes:
取放模组机架, 其中可存放多个第二緩冲垫;  Picking up and placing a module rack, wherein a plurality of second cushions can be stored;
緩冲垫取放机构, 设置于所述取放模组机架的顶部, 该緩冲垫取放机构 可以平移至操作台的上方, 用于将位于操作台上的托盘中液晶基板上部的第 二緩冲垫取出放于取放模组机架中,或者将取放模组机架中的第二緩冲垫取 出放置于所述托盘中的液晶基板之上;  a cushion pick-and-place mechanism is disposed at the top of the pick-and-place module rack, and the cushion pick-and-place mechanism can be translated to the upper side of the console for placing the upper portion of the liquid crystal substrate in the tray on the console The second cushion is taken out and placed in the pick-and-place module rack, or the second cushion in the pick-and-place module rack is taken out and placed on the liquid crystal substrate in the tray;
取放模组升降机构, 固定设置于所述取放模组机架的下部, 用于支撑取 放模组机架中存放的第二緩冲垫, 并可以驱动所述第二緩冲垫的升降, 以调 整所述第二緩冲垫的位置。  a pick-and-place module lifting mechanism fixedly disposed at a lower portion of the pick-and-place module rack for supporting a second cushion stored in the pick-and-place module rack and capable of driving the second cushion Lifting to adjust the position of the second cushion.
其中, 所述緩冲垫取放机构进一步包括:  The cushion pick-and-place mechanism further includes:
滑动支架, 其与一安装支座上的线性滑轨相配合, 以在所述取放模组机 架与所述操作台上方之间移动, 其中, 所述安装支座设置于緩冲垫取放模组 顶部的两侧, 并延伸至所述操作台的上方, 且在每一安装支座上设置有一线 性滑轨;  a sliding bracket that cooperates with a linear slide rail on a mounting bracket to move between the pick-and-place module rack and the upper portion of the console, wherein the mounting bracket is disposed on the cushion Laying the two sides of the top of the module and extending above the console, and providing a linear slide on each mounting bracket;
线性马达, 用于驱动所述滑动支架在所述线性滑轨上移动;  a linear motor for driving the sliding bracket to move on the linear slide;
压板, 其与所述滑动支架活动连接, 并设置于所述滑动支架之下, 其用 于定位及抵压位于所述操作台上的托盘;  a pressing plate movably connected to the sliding bracket and disposed under the sliding bracket for positioning and pressing a tray located on the operating table;
吸板, 其与所述压板活动连接, 位于所述压板下方, 用于吸附托盘中的 第二緩冲垫或吸附取放模组机架中的第二緩冲垫。  a suction plate movably connected to the pressure plate, located below the pressure plate, for adsorbing a second cushion in the tray or a second cushion in the adsorption pick-and-place module rack.
其中, 所述压板在四侧形成有定位板, 用于对托盘进行定位以及抵压, 在所述压板的中部固定有一个压板气缸, 用于驱动所述压板进行升降运动 所述吸板包括多条压板槽, 所述压板槽为向下开口的槽体结构, 在所述 压板槽上间隔设置多个用于吸附第二緩冲垫的吸盘,在所述吸板上还设置有 至少一个吸板气缸, 用于驱动所述吸板的升降以及控制所述吸盘的开闭。 Wherein, the pressure plate is formed with a positioning plate on four sides for positioning and pressing the tray, A platen cylinder is fixed in a middle portion of the pressure plate for driving the pressure plate to move up and down. The suction plate includes a plurality of platen grooves, and the plate groove is a downwardly open groove structure, and the platen groove is A plurality of suction cups for adsorbing the second cushion are disposed at intervals, and at least one suction plate cylinder is further disposed on the suction plate for driving the lifting and lowering of the suction plate and controlling opening and closing of the suction cup.
其中, 进一步包括:  Among them, further includes:
基板取放机构, 其包括一个横杆以及设置于所述横杆上的多个平行的支 撑片, 其中, 所述多个支撑片大致处于同一平面上, 每一支撑片与液晶基板 接触的一面上设置有多个緩冲圈。  a substrate pick-and-place mechanism comprising a cross bar and a plurality of parallel support pieces disposed on the cross bar, wherein the plurality of support pieces are substantially in the same plane, and the side of each support piece contacting the liquid crystal substrate There are multiple buffer loops on it.
相应地, 本发明的另一方面, 提供一种取放大尺寸液晶基板的自动化设 备, 包括:  Accordingly, in another aspect of the present invention, an automated apparatus for taking an enlarged size liquid crystal substrate is provided, including:
卡匣升降模组, 其内部设置有用于层叠放置多个托盘的卡匣, 所述托盘 可水平滑出或滑入所述卡匣;  a cassette lifting module, which is internally provided with a cassette for stacking a plurality of trays, the tray being horizontally slidable or sliding into the cassette;
卡匣推拉模组,位于正对所述卡匣升降模组的托盘滑出方向的一个操作 台上, 其用于吸附所述卡匣中的一个托盘, 并驱动所述托盘滑入或滑出, 使 所述托盘在所述操作台与所述卡匣之间移动;  a cassette push-pull module, located on an operation table facing the tray sliding direction of the cassette lifting module, for adsorbing one of the cassettes, and driving the tray to slide in or out Moving the tray between the console and the cassette;
緩冲垫取放模组, 位于所述操作台一侧, 其上设置有緩冲垫取放机构, 所述緩冲垫取放机构可平移至所述操作台上方, 用于将位于操作台上的托盘 中覆盖于液晶基板之上的第二緩冲垫取出 , 或者将第二緩冲垫放置于所述托 盘中液晶基板之上;  a cushion pick-and-place module on a side of the console, on which a cushion pick-and-place mechanism is disposed, the cushion pick-and-place mechanism can be translated to the top of the console for being located at the console The second buffer pad on the upper tray is overlaid on the liquid crystal substrate, or the second buffer pad is placed on the liquid crystal substrate in the tray;
基板顶升机构, 位于所述操作台下方, 至少包括多个可以上下方向移动 的顶升针, 所述顶升针可穿透所述位于操作台上的托盘, 并顶持于所述托盘 中的液晶基板的底部, 使所述液晶基板与所述托盘分离;  a substrate lifting mechanism, located under the operating table, comprising at least a plurality of jacking needles movable in an up and down direction, the jacking needles penetrating the trays on the operating table and held in the trays a bottom of the liquid crystal substrate, separating the liquid crystal substrate from the tray;
基板取放机构, 用于伸入所述液晶基板下部, 并取放所述液晶基板。 其中, 所述卡匣升降模组具体包括:  a substrate pick-and-place mechanism for extending into a lower portion of the liquid crystal substrate and accommodating the liquid crystal substrate. The card lifting module specifically includes:
升降模组机架, 其至少在一侧设置有开口;  a lifting module rack having an opening at least on one side thereof;
卡匣, 设置于所述升降模组机架内部, 其相对两侧壁上设置有带第一滚 轮的支撑件, 所述放置有液晶基板的托盘可放置于所述支撑件上, 所述托盘 可相对于所述支撑件滑入或滑出所述卡匣;  a cassette disposed on the inside of the lifting module frame, wherein the opposite side walls are provided with a support member with a first roller, and the tray on which the liquid crystal substrate is placed can be placed on the support member, the tray Sliding in or out of the cassette relative to the support member;
升降传动机构, 固定于所述升降模组机架底部, 用于支撑所述卡匣, 并 驱动所述卡匣上下运动以调整所述卡匣的位置。 a lifting and lowering mechanism fixed to the bottom of the lifting module frame for supporting the cassette, and The cassette is driven to move up and down to adjust the position of the cassette.
其中, 所述升降传动机构包括有一升降平台, 在所述升降平台的四个端 部设置有用于调整所述卡匣水平位置的卡匣水平校正气缸 , 以及在升降平台 与卡匣接触的地方, 均勾设置有多个用于调整所述卡匣垂直位置的浮动支撑 装置。  Wherein, the lifting and lowering mechanism comprises a lifting platform, and at each of the four ends of the lifting platform, a clamping level correction cylinder for adjusting the horizontal position of the cassette is arranged, and where the lifting platform is in contact with the cassette, Each of the hooks is provided with a plurality of floating support devices for adjusting the vertical position of the cassette.
其中, 所述托盘为上方开口的盒体, 其底部设置有多个顶升针过孔, 供 基板顶升机构的顶升针穿过; 其一侧面上设置有至少一个磁吸装置, 供所述 卡匣推拉模组吸附;  Wherein, the tray is an upper open box body, and a plurality of jacking needle passage holes are arranged at a bottom thereof for passing through a jacking needle of the substrate jacking mechanism; at least one magnetic attraction device is disposed on one side of the tray; Said card 匣 push-pull module adsorption;
所述托盘上放置有液晶基板,在所述液晶基板与所述托盘之间设置有第 一緩冲垫, 所述第一緩冲垫底部相应位置也设置有多个顶升针过孔; 所述液 晶基板的上部覆盖有所述第二緩冲垫。  a liquid crystal substrate is disposed on the tray, a first cushion is disposed between the liquid crystal substrate and the tray, and a plurality of jacking holes are disposed at corresponding positions on the bottom of the first cushion; The upper portion of the liquid crystal substrate is covered with the second cushion.
其中, 所述卡匣推拉模组包括:  The card push-pull module includes:
设置于所述操作台的机架顶部两侧的滑台, 其上设置有第二滚轮, 供托 盘于其上滑动;  a sliding table disposed on two sides of the top of the rack of the console, wherein a second roller is disposed thereon, and the tray is slid thereon;
电磁吸盘, 用于在通电时吸附所述托盘侧壁上的磁吸装置;  An electromagnetic chuck for absorbing the magnetic device on the side wall of the tray when energized;
电磁吸盘伸缩气缸, 用于驱动所述电磁吸盘移动, 以使其所吸附的托盘 在所述滑台上滑动。  An electromagnetic chuck telescopic cylinder for driving the electromagnetic chuck to move so that the sucked tray slides on the slide table.
其中, 所述基板顶升机构包括:  Wherein, the substrate lifting mechanism comprises:
顶升针安装板, 其上安装有多个顶升针;  a jacking pin mounting plate on which a plurality of jacking pins are mounted;
顶升气缸, 设置于所述顶升针安装板的下侧, 其与所述操作台机架相固 定, 用于驱动所述顶升针安装板升降;  a jacking cylinder disposed on a lower side of the jacking pin mounting plate, and fixed to the console frame for driving the jacking plate mounting plate to lift;
多个顶升导柱, 设置于所述顶升针安装板的下侧, 与设置于所述操作台 机架上的导套相配合, 使所述顶升针安装板与所述操作台机架之间活动连 接。  a plurality of jacking guide posts disposed on a lower side of the jacking pin mounting plate, cooperate with a guide sleeve disposed on the console frame, and the jacking pin mounting plate and the operating table machine Active connection between shelves.
其中, 所述緩冲垫取放模组包括:  The buffer pick-and-place module includes:
取放模组机架, 其中可存放多个第二緩冲垫;  Picking up and placing a module rack, wherein a plurality of second cushions can be stored;
緩冲垫取放机构, 设置于所述取放模组机架的顶部, 该緩冲垫取放机构 可以平移至操作台的上方, 用于将位于操作台上的托盘中液晶基板上部的第 二緩冲垫取出放于取放模组机架中,或者将取放模组机架中的第二緩冲垫取 出放置于所述托盘中的液晶基板之上; a cushion pick-and-place mechanism is disposed at the top of the pick-and-place module rack, and the cushion pick-and-place mechanism can be translated to the upper side of the console for placing the upper portion of the liquid crystal substrate in the tray on the console The second cushion is taken out and placed in the pick-and-place module rack, or the second cushion in the pick-and-place module rack is taken. Placed on a liquid crystal substrate placed in the tray;
取放模组升降机构, 固定设置于所述取放模组机架的下部, 用于支撑取 放模组机架中存放的第二緩冲垫, 并可以驱动所述第二緩冲垫的升降, 以调 整所述第二緩冲垫的位置。  a pick-and-place module lifting mechanism fixedly disposed at a lower portion of the pick-and-place module rack for supporting a second cushion stored in the pick-and-place module rack and capable of driving the second cushion Lifting to adjust the position of the second cushion.
其中, 所述緩冲垫取放机构进一步包括:  The cushion pick-and-place mechanism further includes:
滑动支架, 其与一安装支座上的线性滑轨相配合, 以在所述取放模组机 架与所述操作台上方之间移动, 其中, 所述安装支座设置于緩冲垫取放模组 顶部的两侧, 并延伸至所述操作台的上方, 且在每一安装支座上设置有一线 性滑轨;  a sliding bracket that cooperates with a linear slide rail on a mounting bracket to move between the pick-and-place module rack and the upper portion of the console, wherein the mounting bracket is disposed on the cushion Laying the two sides of the top of the module and extending above the console, and providing a linear slide on each mounting bracket;
线性马达, 用于驱动所述滑动支架在所述线性滑轨上移动;  a linear motor for driving the sliding bracket to move on the linear slide;
压板, 其与所述滑动支架活动连接, 并设置于所述滑动支架之下, 其用 于定位及抵压位于所述操作台上的托盘;  a pressing plate movably connected to the sliding bracket and disposed under the sliding bracket for positioning and pressing a tray located on the operating table;
吸板, 其与所述压板活动连接, 位于所述压板下方, 用于吸附托盘中的 第二緩冲垫或吸附取放模组机架中的第二緩冲垫。  a suction plate movably connected to the pressure plate, located below the pressure plate, for adsorbing a second cushion in the tray or a second cushion in the adsorption pick-and-place module rack.
其中, 所述压板在四侧形成有定位板, 用于对托盘进行定位以及抵压, 在所述压板的中部固定有一个压板气缸, 用于驱动所述压板进行升降运动 所述吸板包括多条压板槽, 所述压板槽为向下开口的槽体结构, 在所述 压板槽上间隔设置多个用于吸附第二緩冲垫的吸盘,在所述吸板上还设置有 至少一个吸板气缸, 用于驱动所述吸板的升降以及控制所述吸盘的开闭。  Wherein, the pressure plate is formed with a positioning plate on four sides for positioning and pressing the tray, and a pressure plate cylinder is fixed in a middle portion of the pressure plate for driving the pressure plate to move up and down. a platen groove, the platen groove is a downwardly open groove structure, a plurality of suction cups for adsorbing the second cushion are disposed on the platen groove, and at least one suction is further disposed on the suction plate a plate cylinder for driving the lifting and lowering of the suction plate and controlling opening and closing of the suction cup.
其中, 所述基板取放机构包括一个横杆以及设置于所述横杆上的多个平 行的支撑片, 其中, 所述多个支撑片大致处于同一平面上, 每一支撑片与液 晶基板接触的一面上设置有多个緩冲圈。  The substrate pick-and-place mechanism includes a cross bar and a plurality of parallel support pieces disposed on the cross bar, wherein the plurality of support pieces are substantially in the same plane, and each support piece is in contact with the liquid crystal substrate There are multiple buffer rings on one side.
实施本发明实施例, 具有如下有益效果:  Embodiments of the present invention have the following beneficial effects:
根据本发明的实施例, 可以将液晶面板在卡匣及制程机台之间自动地搬 动, 且安全性好;  According to the embodiment of the present invention, the liquid crystal panel can be automatically moved between the cassette and the processing machine, and the safety is good;
其通过将液晶基板旋转置于托盘中,且采用第一緩冲垫和第二緩冲垫进 行卡固, 在运输过程中能保证液晶面板的安全性;  The utility model can ensure the safety of the liquid crystal panel during transportation by placing the liquid crystal substrate in the tray and fixing it with the first cushion pad and the second cushion pad;
从托盘中取出液晶基板时, 通过顶升机构上的顶升针托起液晶基板, 可 以艮平稳地托取液晶基板, 且基板取放机构采用底部抓取的方式, 更进一步 地能减少对液晶基板的损坏; When the liquid crystal substrate is taken out from the tray, the liquid crystal substrate is lifted by the lifting pin on the jacking mechanism, so that the liquid crystal substrate can be smoothly picked up, and the substrate pick-and-place mechanism adopts the bottom grabbing method, further Ground can reduce damage to the liquid crystal substrate;
本发明可以节约人力, 提升自动化水平(品质稳定型提升), 提升产能, 减少破片。 附图说明  The invention can save manpower, improve the level of automation (stable quality improvement), increase production capacity, and reduce fragmentation. DRAWINGS
为了更清楚地说明本发明实施例或现有技术中的技术方案, 下面将对实 施例或现有技术描述中所需要使用的附图作简单地介绍, 显而易见地, 下面 描述中的附图仅仅是本发明的一些实施例, 对于本领域普通技术人员来讲, 在不付出创造性劳动的前提下, 还可以根据这些附图获得其它的附图。  In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the description of the prior art will be briefly described below. Obviously, the drawings in the following description are only It is a certain embodiment of the present invention, and those skilled in the art can obtain other drawings according to these drawings without any creative work.
图 1是根据本发明的一种取放大尺寸液晶面基板的自动化设备的工作原 理示意图;  1 is a schematic view showing the operation of an automatic apparatus for taking an enlarged size liquid crystal surface substrate according to the present invention;
图 2是根据本发明一种取放大尺寸液晶面基板的自动化设备一个实施例 中的组装结构示意图;  2 is a schematic view showing an assembly structure in an embodiment of an automated apparatus for taking an enlarged size liquid crystal surface substrate according to the present invention;
图 3是图 2中卡匣升降模组的整体结构示意图;  Figure 3 is a schematic view showing the overall structure of the cassette lifting module of Figure 2;
图 4是图 3中卡匣升降模组的结构分解示意图;  Figure 4 is a schematic exploded view of the structure of the cassette lifting module of Figure 3;
图 5是卡匣放置于升降传动机构上的局部效果示意图;  Figure 5 is a partial view showing the effect of the cassette placed on the lifting and lowering mechanism;
图 6是图 4中卡匣的结构分解示意图;  Figure 6 is a schematic exploded view of the structure of the cassette of Figure 4;
图 7是图 6中的局部 A的放大图;  Figure 7 is an enlarged view of a portion A in Figure 6;
图 8是图 6中托盘的结构分解示意图;  Figure 8 is a schematic exploded view of the tray of Figure 6;
图 9是本发明一个实施例中位于操作台上的卡匣推拉模组及基板顶升机 构的结构示意图;  9 is a schematic structural view of a cassette push-pull module and a substrate jacking mechanism on a console according to an embodiment of the present invention;
图 10是本发明一个实施例中操作台的侧视图;  Figure 10 is a side elevational view of the console in one embodiment of the present invention;
图 11是本发明一个实施例中緩冲垫取放模组从操作台抓取緩冲垫的状 态示意图;  11 is a schematic view showing a state in which a cushion pick-and-place module grabs a cushion from a console according to an embodiment of the present invention;
图 12是本发明一个实施例中的緩冲垫取放机构整体结构示意图; 图 13是图 12中滑动支架的结构示意图;  Figure 12 is a schematic view showing the overall structure of the cushioning mechanism of the cushion in one embodiment of the present invention; Figure 13 is a schematic structural view of the sliding bracket of Figure 12;
图 14是图 12中压板的结构示意图;  Figure 14 is a schematic structural view of the pressure plate of Figure 12;
图 15是图 12中吸板的结构示意图;  Figure 15 is a schematic structural view of the suction plate of Figure 12;
图 16是图 11的 A-A向的剖视示意图; 图 17是图 16中的局部 B的放大图; Figure 16 is a cross-sectional view taken along line AA of Figure 11; Figure 17 is an enlarged view of a portion B in Figure 16;
图 18是本发明一个实施例中緩冲垫取放模组的升降机构的结构示意图; 图 19是本发明一个实施例中在机架中放置升降机构后的效果示意图; 图 20是本发明一个实施例中的基板取放机构的结构示意图。  Figure 18 is a schematic view showing the structure of the lifting mechanism of the cushion pick-and-place module in an embodiment of the present invention; Figure 19 is a schematic view showing the effect of placing the lifting mechanism in the rack in one embodiment of the present invention; A schematic structural view of a substrate pick-and-place mechanism in the embodiment.
具体实施方式 detailed description
下面参考附图对本发明的优选实施例进行描述。  DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
如图 1所示, 示出了本发明的一种取放大尺寸液晶面基板的自动化设备 的工作原理示意图, 从中可以看出, 该自动化设备包括:  As shown in FIG. 1, a schematic diagram of the working principle of an automatic device for taking an enlarged size liquid crystal surface substrate of the present invention is shown. As can be seen, the automation device includes:
卡匣升降模组 1 , 其内部设置有用于层叠放置多个托盘的卡匣, 该托盘 可水平滑出或滑入卡匣;  a cassette lifting module 1 , which is internally provided with a cassette for stacking a plurality of trays, the tray can be horizontally slid or slideed into the cassette;
操作台 2, 其正对所述卡匣升降模组 1的托盘滑出方向, 该操作台上设 置有卡匣推拉模组 3 , 其用于吸附卡匣中的一个托盘, 并驱动该托盘滑入或 滑出, 使该托盘在操作台与卡匣之间移动; 另外, 该操作台下方还设置有基 板顶升机构 4, 该基板顶升机构 4用于将位于操作台 2上的托盘中的液晶基 板平稳顶升起来, 将脱离该托盘;  The operation table 2 is opposite to the tray sliding direction of the cassette lifting module 1. The operation table is provided with a cassette pushing and pulling module 3 for sucking one of the cassettes and driving the tray to slide. In or out, moving the tray between the console and the cassette; in addition, a bottom lifting mechanism 4 is disposed under the console, and the substrate lifting mechanism 4 is used to be placed in the tray on the console 2 The liquid crystal substrate rises smoothly and will be separated from the tray;
緩冲垫取放模组 5 , 位于操作台 2—侧, 其上设置有緩冲垫取放机构 6, 该緩冲垫取放机构 6可平移至操作台 2上方, 用于将位于操作台 2上的托盘 中覆盖于液晶基板上的緩冲垫取出, 或者将緩冲垫放置于该液晶基板之上; 另夕卜, 还包括一基板取放机构 7, 该基板取放机构 7在基板顶升机构 4 将液晶基板顶升之后, 可移入位于操作台上的托盘中, 并卡持该托盘中的液 晶基板并移出至制程机台 8中,或将制程机台 8处已处理好的液晶基板放回 至位于操作台 2上的托盘中。  The cushion pick-and-place module 5 is located on the side of the console 2, and is provided with a cushion pick-and-place mechanism 6 which can be translated to the top of the console 2 for being placed at the console 2, the tray covered in the tray on the liquid crystal substrate is taken out, or the cushion is placed on the liquid crystal substrate; in addition, a substrate pick-and-place mechanism 7 is further included, and the substrate pick-and-place mechanism 7 is on the substrate After lifting the liquid crystal substrate, the jacking mechanism 4 can be moved into the tray on the operation table, and the liquid crystal substrate in the tray is chucked and removed into the processing machine 8, or the processing machine 8 is processed. The liquid crystal substrate is placed back into the tray on the console 2.
如图 2所示,是根据本发明一种取放大尺寸液晶面基板的自动化设备一 个实施例中的组装结构示意图。 从中可以看出, 卡匣升降模组 1与操作台 2 正对, 而緩冲垫取放模组 5位于操作台 2的一侧。 卡匣可以在卡匣升降模组 1与操作台 2之间转移, 而緩冲垫可以在操作台 2与緩冲垫取放模组 5之间 转移。  As shown in Fig. 2, it is a schematic view of an assembly structure in an embodiment of an automation apparatus for taking an enlarged size liquid crystal surface substrate according to the present invention. It can be seen that the cassette lifting module 1 is facing the console 2, and the cushion pick-and-place module 5 is located on one side of the console 2. The cassette can be transferred between the cassette lifting module 1 and the console 2, and the cushion can be transferred between the console 2 and the cushion pick-and-place module 5.
下述将结合附图 3至附图 20,对本发明取放大尺寸液晶面基板的自动化 设备一个实施例中的各个部件进行详细说明。 如图 3所示, 是图 2中卡匣升降模组 1的整体结构示意图。 从中可以看 出, 该卡匣升降模组 1具体包括: The respective components in an embodiment of the automation apparatus for taking an enlarged size liquid crystal panel of the present invention will be described in detail below with reference to FIGS. 3 to 20. As shown in FIG. 3, it is an overall structural diagram of the cassette lifting module 1 in FIG. It can be seen that the card lifting module 1 specifically includes:
升降模组机架 10, 其为框架结构, 且至少在一侧设置有开口; 卡匣 12, 设置于升降模组机架 10内部, 其内部放置有多个托盘 121 ; 升降传动机构 14, 固定于升降模组机架 10的底部, 用于支撑卡匣 12, 并能驱动卡匣 12上下运动以调整该卡匣 12的位置。  The lifting module frame 10 is a frame structure, and at least one side is provided with an opening; the cassette 12 is disposed inside the lifting module frame 10, and a plurality of trays 121 are placed inside thereof; the lifting and lowering mechanism 14 is fixed At the bottom of the lifting module frame 10, it is used to support the cassette 12, and can drive the cassette 12 to move up and down to adjust the position of the cassette 12.
再请结合图 4所示, 其为图 3中卡匣升降模组 1的结构分解图, 从中可 以看出, 卡匣 12为类似屉笼结构, 其包括卡匣框体 120以及放置于其中的 至少一个托盘 121 , 托盘 121用于放置液晶基板, 其中, 托盘 121可以滑入 或滑出卡匣框体 120, 在每个托盘 121朝外的一侧上设置有至少一个磁吸装 置 1217。  Referring to FIG. 4 again, it is an exploded view of the structure of the cassette lifting module 1 of FIG. 3. As can be seen, the cassette 12 is a similar drawer structure, which includes a cassette frame 120 and is placed therein. At least one tray 121 for placing a liquid crystal substrate, wherein the tray 121 can be slid into or out of the cassette frame 120, and at least one magnetic device 1217 is disposed on the outward side of each tray 121.
而升降传动机构 14包括有一升降平台 144, 其用于支撑卡匣 12, 该升 降平台 144两侧连接有丝杆螺母 149, 设置于底部的第一马达 142通过驱动 连接轴 142,通过转向器 145的作用使丝杆 147转动,从而带动丝杆螺母 149 的上下移动,使升降平台 144沿滑轨支座 150中的滑轨(未示出)上下移动, 例如在一个实施例中, 第一马达 142正转, 则升降平台 144上升, 而第一马 达 142反转, 则升降平台 144下降。  The lifting mechanism 14 includes a lifting platform 144 for supporting the cassette 12, and the lifting platform 144 is connected with a screw nut 149 on both sides thereof. The first motor 142 disposed at the bottom passes through the driving connection shaft 142 and passes through the steering 145. The action causes the screw 147 to rotate, thereby causing the up and down movement of the screw nut 149 to move the lifting platform 144 up and down along a slide rail (not shown) in the rail support 150, such as in one embodiment, the first motor When the 142 is rotated forward, the lifting platform 144 is raised, and when the first motor 142 is reversed, the lifting platform 144 is lowered.
再请结合附图 5所示, 其为卡匣 12放置于升降传动机构 14上的局部效 果示意图。 为了使卡匣 12在水平或垂直方向位置准确, 在升降传动机构 14 上还设置有可对卡匣 12水平位置和垂直位置进行 调的装置。 具体地, 在 升降平台 144的四个端部设置有卡匣水平校正气缸 148, 其用于卡持住卡匣 12的四个底角, 并可通过气缸的作用来调整卡匣 12所处的水平位置; 另夕卜, 在升降平台 144与卡匣框体 120接触的地方, 均勾设置有多个浮动支撑装置 146, 通过该浮动支撑装置 146, 可以对卡匣 12的垂直位置进行 调。  Referring to FIG. 5 again, it is a partial effect diagram of the cassette 12 placed on the lifting and lowering mechanism 14. In order to make the cassette 12 positionally accurate in the horizontal or vertical direction, means for adjusting the horizontal position and the vertical position of the cassette 12 are also provided on the elevating transmission mechanism 14. Specifically, at the four ends of the lifting platform 144, a card level correction cylinder 148 is provided for holding the four bottom corners of the cassette 12, and the action of the cylinder is used to adjust the position of the cassette 12 Horizontal position; In addition, where the lifting platform 144 is in contact with the cassette frame 120, a plurality of floating supporting devices 146 are provided, and the vertical position of the cassette 12 can be adjusted by the floating supporting device 146.
如图 6所示, 是本发明中卡匣 12的结构分解示意图, 为了便于看清卡 匣 12内部的结构, 在该图中的卡匣框体 120去掉了顶盖, 且仅示出了一个 托盘 121 , 当可以理解的是, 在实际的应用中, 该卡匣框体 120可以设置有 顶盖, 且卡匣框体 120中可放置多个托盘 121。 一并结合图 7中的局部放大 图。 在本实施例中, 卡匣框体 120 的相对两侧壁上设置有至少一组支撑件 1204,托盘 121放置于支撑件 1204上。托盘 121可以在支撑件 1204上滑动, 例如,相对于该支撑件 1204滑入或滑出卡匣框体 120。托盘 121采用刚性硬 质材料, 为设置于其中的液晶基板提供平整支撑面, 并增加对液晶基板面板 的支撑点, 在搬动过程中可减小振动幅度, 有效防止液晶基板变形或破片。 同时, 托盘 121与支撑件 1204之间的相对滑动采用了抽屉的抽拉原理, 将 托盘 121放置于支撑件 1204上,首先拉动托盘 121 ,使托盘 121滑出卡匣框 体 120, 将液晶基板放置在托盘 121中后, 推动托盘 121 , 使托盘 121滑入 卡匣框体 120,这样一来,在将液晶基板放置于托盘 121中或将其从托盘 121 中取出时, 只需要推拉托盘 121 , 在托盘 121上施力, 由托盘 121带动液晶 基板滑入或滑出卡匣框体 120, 这样的操作不会对液晶基板造成外力, 可有 效避免在放置或取出液晶基板时, 因施力不当造成液晶基板破片的情形出 现。 其中, 通过对设置于每个托盘 121侧壁上的磁吸装置 1217进行吸附并 施加驱动, 即可以推拉该托盘 121。 为了使托盘 121平稳进出卡匣框体 120, 本发明的支撑件 1204上设置有多个第一滚轮 1202。 且在卡匣框体 120的后 侧 (与开口的一侧相对的另一侧)设置有限位条 1206。 As shown in FIG. 6, it is a structural exploded view of the cassette 12 of the present invention. In order to facilitate the structure of the inside of the cassette 12, the cassette frame 120 in the figure has the top cover removed, and only one is shown. The tray 121, when it can be understood that, in an actual application, the cassette frame 120 may be provided with a top cover, and a plurality of trays 121 may be placed in the cassette frame 120. Together with the partial enlarged view in FIG. In this embodiment, at least one set of support members 1204 is disposed on opposite side walls of the cassette frame 120, and the tray 121 is placed on the support member 1204. The tray 121 can slide on the support member 1204. For example, the cassette frame 120 is slid into or out of the support member 1204. The tray 121 is made of a rigid hard material, provides a flat support surface for the liquid crystal substrate disposed therein, and increases the support point for the liquid crystal substrate panel, and can reduce the vibration amplitude during the moving process, thereby effectively preventing the liquid crystal substrate from being deformed or fragmented. At the same time, the relative sliding between the tray 121 and the support member 1204 adopts the drawing principle of the drawer. The tray 121 is placed on the support member 1204, and the tray 121 is first pulled to slide the tray 121 out of the cassette frame 120, and the liquid crystal substrate is After being placed in the tray 121, the tray 121 is pushed to slide the tray 121 into the cassette frame 120, so that when the liquid crystal substrate is placed in the tray 121 or taken out from the tray 121, only the tray 121 needs to be pushed and pulled. Applying a force on the tray 121, the tray 121 drives the liquid crystal substrate to slide in or out of the cassette frame 120. This operation does not cause an external force on the liquid crystal substrate, and the force is prevented from being applied when the liquid crystal substrate is placed or removed. Improperly causing the liquid crystal substrate to break. Here, the tray 121 can be pushed and pulled by adsorbing and applying the magnetic device 1217 provided on the side wall of each tray 121. In order to allow the tray 121 to smoothly enter and exit the cassette frame 120, the support member 1204 of the present invention is provided with a plurality of first rollers 1202. And a finite strip 1206 is provided on the rear side of the cassette frame 120 (the other side opposite to the side of the opening).
如图 8所示,是本图 6中的托盘 121的结构分解示意图。在本实施例中, 托盘 121为上方开口的盒体,托盘 121的底部设置有第一緩冲垫 1214,液晶 基板 1212放置于托盘 121底部的第一緩冲垫 1214上。 第一緩冲垫 1214可 采用诸如无尘泡棉的材料, 其可对液晶基板 1212的底部 /及侧部提供緩冲, 以在搬动过程中保护液晶基板 1212。 可以理解的是, 在一个实施例中, 该第 一緩冲垫 1214具体地可包括底部緩冲垫及侧壁緩冲垫。  As shown in Fig. 8, it is a structural exploded view of the tray 121 in Fig. 6. In the embodiment, the tray 121 is an upper open box, and the bottom of the tray 121 is provided with a first cushion 1214, and the liquid crystal substrate 1212 is placed on the first cushion 1214 at the bottom of the tray 121. The first cushion 1214 may be made of a material such as a lint-free foam that provides cushioning to the bottom/side of the liquid crystal substrate 1212 to protect the liquid crystal substrate 1212 during handling. It will be appreciated that in one embodiment, the first cushion 1214 may specifically include a bottom cushion and a side cushion.
此外,托盘 121还可包括位于顶部的第二緩冲垫 1210,第二緩冲垫 1210 也采用无尘泡棉,当液晶基板 1212放置于托盘 121的底部的第一緩冲垫 1214 上时,第二緩冲垫 1210放置于液晶基板 1212上方,与底部的第一緩冲垫 1214 一起夹持液晶基板 1212, 以对液晶基板 1212提供全方位的保护。  In addition, the tray 121 may further include a second cushion 1210 at the top, and the second cushion 1210 also adopts a dust-free foam. When the liquid crystal substrate 1212 is placed on the first cushion 1214 at the bottom of the tray 121, The second cushion 1210 is placed above the liquid crystal substrate 1212, and clamps the liquid crystal substrate 1212 together with the first cushion 1214 at the bottom to provide full protection to the liquid crystal substrate 1212.
其中, 在托盘 121以及第一緩冲垫 1214上的对应位置上设置有多个相 应顶升针过孔 1218。  A plurality of corresponding jacking holes 1218 are provided at corresponding positions on the tray 121 and the first cushion 1214.
如图 9所示, 示出了本发明一个实施例中位于操作台上的卡匣推拉模组 3及基板顶升机构 4的结构示意图。从中可以看出,该卡匣推拉模组 3包括: 设置于操作台机架 20顶部两侧的滑台 30,上述滑台 30上设置有多个第 二滚轮 32, 供托盘 121于其上滑动; 电磁吸盘 34, 用于在通电后吸附托盘 121侧壁上的磁吸装置 1217; 电磁吸盘伸缩气缸 36, 用于驱动电磁吸盘 34移动, 以使其所吸附的托 盘 121在滑台 30上滑动。 As shown in FIG. 9, a schematic structural view of a cassette push-pull module 3 and a substrate jacking mechanism 4 on a console in one embodiment of the present invention is shown. As can be seen, the cassette push-pull module 3 includes: a slide table 30 disposed on two sides of the top of the console frame 20, and the slide table 30 is provided with a plurality of second rollers 32 for the tray 121 to slide thereon ; The electromagnetic chuck 34 is configured to adsorb the magnetic device 1217 on the side wall of the tray 121 after being energized; and the electromagnetic chuck telescopic cylinder 36 is configured to drive the electromagnetic chuck 34 to move so that the sucked tray 121 slides on the slide table 30.
通过该卡匣推拉模组 3 , 可以吸附托盘 121 , 并牵引其从卡匣 12中滑出 并在滑台 3上滑动, 从而可以将托盘 121放置于操作台机架 20的上方。 反 之, 也可以将托盘 121从操作台机架 20上方推入至卡匣 12中。  Through the cassette push-pull module 3, the tray 121 can be sucked and pulled out of the cassette 12 and slid on the slide table 3, so that the tray 121 can be placed above the console frame 20. Conversely, the tray 121 can also be pushed into the cassette 12 from above the console frame 20.
一并结合图 10所示, 在图 10中示出了操作台 2的侧视图。 在卡匣推拉 模组 3下方还设置有基板顶升机构 4, 该其板顶升机构 4包括:  As shown in Fig. 10 together, a side view of the console 2 is shown in Fig. 10. A substrate jacking mechanism 4 is further disposed below the cassette push-pull module 3, and the board jacking mechanism 4 includes:
顶升针安装板 40, 其上安装有多个顶升针 42;  a jacking pin mounting plate 40 having a plurality of jacking pins 42 mounted thereon;
顶升气缸 44,设置于顶升针安装板 40的下侧,其与操作台机架 20相固 定, 用于驱动顶升针安装板 40升降, 具体地, 通过一气缸传导柱 46推动顶 升针安装板 40上升或下降;  The jacking cylinder 44 is disposed on the lower side of the jack up mounting plate 40 and is fixed to the console frame 20 for driving the jack up mounting plate 40 to lift, specifically, pushing the jacking through a cylinder conducting post 46. The needle mounting plate 40 is raised or lowered;
另外, 还包括多个顶升导柱 48, 设置于顶升针安装板 40的下侧, 与设 置于操作台机架 20上的导套相配合, 使顶升针安装板 40与操作台机架 20 之间活动连接, 以限制顶升针安装板 40仅在上下方向移动, 而不会在水平 方向移动。  In addition, a plurality of jacking guides 48 are further disposed on the lower side of the jack up mounting plate 40 to cooperate with the guide sleeves disposed on the console frame 20 to enable the jackup mounting plate 40 and the console The frames 20 are movably coupled to limit the lifting pin mounting plate 40 from moving only in the up and down direction and not in the horizontal direction.
其中, 当顶升针安装板 40被驱动上升时, 安装其上的顶升针 34, 会穿 过托盘 121及第一緩冲垫 1214中的顶升针过孔 1218,抵靠在液晶基板 1214 的底部,并将该液晶基板 1214平稳的托起,使液晶基板 1214脱离该托盘 121。  Wherein, when the jacking pin mounting plate 40 is driven to rise, the jacking pin 34 mounted thereon passes through the jack 121 and the jacking pin through hole 1218 of the first cushion pad 1214 to abut against the liquid crystal substrate 1214. The bottom of the liquid crystal substrate 1214 is smoothly lifted to disengage the liquid crystal substrate 1214 from the tray 121.
下述将结合附图 11至图 20, 来说明本发明实施例中的緩冲垫取放模组 5的伴细结构。  The accompanying fine structure of the cushion pick-and-place module 5 in the embodiment of the present invention will be described below with reference to Figs. 11 to 20 .
如图 11所示, 其示出了本发明一个实施例中緩冲藝取放模组 5从操作 台抓取緩冲垫的状态示意图。 在本实施例中, 该緩冲垫取放模组 5包括: 取放模组机架 50, 其中可以存放多个第二緩冲垫 1210;  As shown in Fig. 11, there is shown a schematic view of a state in which the cushioning art pick-and-place module 5 grasps the cushion from the console in one embodiment of the present invention. In this embodiment, the cushion pick-and-place module 5 includes: a pick-and-place module rack 50, wherein a plurality of second cushions 1210 can be stored;
緩冲垫取放机构 6,设置于该取放模组机架 50的顶部,该緩冲垫取放机 构 6可以平移至操作台 2的上方, 用于将位于操作台 2上的托盘 121中液晶 基板上部的第二緩冲垫 1210取出放于取放模组机架 50中,或者将取放模组 机架 50中的第二緩冲垫 1210取出放置于该托盘 121中的液晶基板之上; 取放模组升降机构 52, 固定设置于取放模组机架 50的下部, 用于支撑 取放模组机架 50中存放的第二緩冲垫, 并可以驱动这些第二緩冲垫的升降, 以调整这些第二緩冲垫的位置。 A cushion pick-and-place mechanism 6 is disposed at the top of the pick-and-place module rack 50. The cushion pick-and-place mechanism 6 can be translated to the upper side of the console 2 for being placed in the tray 121 on the console 2 The second buffer pad 1210 on the upper portion of the liquid crystal substrate is taken out and placed in the pick-and-place module frame 50, or the second buffer pad 1210 in the pick-and-place module frame 50 is taken out and placed on the liquid crystal substrate in the tray 121. The pick-and-place module lifting mechanism 52 is fixedly disposed at a lower portion of the pick-and-place module frame 50 for supporting The second cushion stored in the module frame 50 is taken in and taken, and the lifting and lowering of the second cushions can be driven to adjust the positions of the second cushions.
一并结合图 12所示, 图 12是本发明实施例中的緩冲垫取放机构 6的整 体结构示意图。 从中可以看出, 该緩冲垫取放机构 6包括:  As shown in Fig. 12, Fig. 12 is a schematic view showing the overall structure of the cushion pick-and-place mechanism 6 in the embodiment of the present invention. As can be seen, the cushion pick-and-place mechanism 6 includes:
滑动支架 61 , 其通过一连接板 54与一安装支座 51上的线性滑轨 53相 配合, 该滑动机架 61可以在取放模组机架 50与操作台 2上方之间移动, 其 中,该安装支座 51设置于緩冲垫取放模组 5顶部的两侧, 并延伸至操作台 2 的上方, 且在每一安装支座 51上设置有线性滑轨 53; 其中, 该滑动支架 61 受一线性马达(未示出)驱动, 以在线性滑轨 53上移动;  The sliding bracket 61 is matched with the linear sliding rail 53 on the mounting bracket 51 through a connecting plate 54. The sliding frame 61 can be moved between the pick-and-place module frame 50 and the upper portion of the operating table 2, wherein The mounting brackets 51 are disposed on both sides of the top of the cushion pick-and-place module 5 and extend above the console 2, and a linear slide rail 53 is disposed on each mounting bracket 51; wherein the sliding bracket 61 is driven by a linear motor (not shown) to move on the linear slide 53;
压板 62, 其与该滑动支架 61活动连接, 并设置于该滑动支架 61之下, 其用于定位及抵压位于操作台 2上的托盘 121 ;  a pressing plate 62 movably connected to the sliding bracket 61 and disposed under the sliding bracket 61 for positioning and pressing the tray 121 on the operating table 2;
吸板 64, 其与该压板 62活动连接, 位于该压板 62下方, 用于吸附托盘 121中的第二緩冲垫 1210或吸附取放模组机架 50中的第二緩冲垫。  A suction plate 64, which is movably connected to the pressure plate 62, is located below the pressure plate 62 for adsorbing the second cushion 1210 in the tray 121 or the second cushion in the pick-and-place module frame 50.
下述结合图 13至图 16,对该緩冲垫取放机构 6的结构进行详细的描述。 如图 13所示, 为图 12滑动支架 61的结构示意图。 在本实施例中, 该 滑动支架 61 为一个方型的框架结构, 其由若干横杆(板) 611 与竖杆 610 组成。 其在两端部的横杆 611上设置有连接板 54, 该连接板 54用于与安装 支座 51上的线性滑轨 53相配合; 在该滑动支架 61的中部设置有气缸过孔 613 , 其还设置有多个第一导柱孔 612。  The structure of the cushion pick-and-place mechanism 6 will be described in detail below with reference to Figs. 13 to 16. As shown in Fig. 13, it is a schematic structural view of the sliding bracket 61 of Fig. 12. In the present embodiment, the sliding bracket 61 is a square frame structure composed of a plurality of cross bars (plates) 611 and a vertical rod 610. A connecting plate 54 is disposed on the cross bar 611 at both ends, and the connecting plate 54 is configured to cooperate with the linear sliding rail 53 on the mounting support 51; a cylinder through hole 613 is disposed in a middle portion of the sliding bracket 61. It is also provided with a plurality of first guide post holes 612.
如图 14所示, 为图 12中压板 62的结构示意图。 在本实施例中, 该压 板 62为框架结构,其在四侧形成有定位板 621 ,用于对托盘 121进行定位以 及抵压。在该压板的中部固定有一个压板气缸 624,用于驱动压板 62进行升 降运动。 该压板升降气缸 624穿设于滑动支架 61中部的气缸过孔 613中, 另外, 在该压板 62上还设置有多个第一导村 622, 其可穿设滑动支架 61上 对应的第一导柱孔 612,并在上端用导套固定,从而使该压板 62与滑动支架 61活动连接。 另外, 在该压板 62上还设置有多个第二导柱孔 623。  As shown in Fig. 14, it is a schematic structural view of the pressure plate 62 in Fig. 12. In the present embodiment, the pressing plate 62 is a frame structure having a positioning plate 621 formed on four sides for positioning and pressing the tray 121. A platen cylinder 624 is fixed in the middle of the platen for driving the platen 62 for the ascending and descending movement. The platen lifting cylinder 624 is disposed in the cylinder through hole 613 in the middle of the sliding bracket 61. In addition, a plurality of first guiding villages 622 are disposed on the pressing plate 62, and the corresponding first guiding portion on the sliding bracket 61 can be penetrated. The post hole 612 is fixed at the upper end by a guide sleeve, so that the pressure plate 62 is movably coupled to the slide bracket 61. Further, a plurality of second pillar holes 623 are further provided on the platen 62.
如图 15所示, 为本实施例中吸板 63的结构示意图。 在本实施例中, 该 吸板 63为框架结构,其包括多条压板槽 630,该压板槽 630为向下开口的槽 体结构, 在该压板槽 630上间隔设置多个吸盘 633 , 其中, 这些吸盘 633用 于吸附緩冲垫;在该压板槽 630上还设置多个第二导柱 631 ,该第二导柱 631 与压板 62上的第二导柱孔 623相配合, 以使吸板 63与压板 62活动连接; 另外, 在该吸板 63上还设置有至少一个吸板气缸 632, 用于驱动吸板 63的 升降以及控制吸盘 633的开闭。 As shown in FIG. 15, it is a schematic structural view of the suction plate 63 in this embodiment. In this embodiment, the suction plate 63 is a frame structure, and includes a plurality of platen grooves 630, wherein the platen groove 630 is a downwardly open groove structure, and a plurality of suction cups 633 are spaced apart from the platen groove 630, wherein These suction cups 633 The adsorption buffer pad is further disposed on the platen groove 630, and the second guide post 631 cooperates with the second guide post hole 623 on the pressing plate 62 to make the suction plate 63 and the pressing plate 62. In addition, at least one suction plate cylinder 632 is provided on the suction plate 63 for driving the lifting and lowering of the suction plate 63 and controlling the opening and closing of the suction cup 633.
再请结合图 16所示, 其为图 11 的 A-A向的剖视示意图, 一并结合图 17中的局部放大图一起来说明緩冲垫取放机构的工作原理。下面, 以从操作 台 2的托盘 121取緩冲垫为例进行说明;  Referring to FIG. 16, which is a cross-sectional view taken along line A-A of FIG. 11, together with a partial enlarged view of FIG. 17, the working principle of the cushion pick-and-place mechanism will be described. Hereinafter, the description will be made by taking a cushion from the tray 121 of the console 2 as an example;
当緩冲垫取放机构 6工作时, 首先, 线性马达驱动滑动支架 61到达工 作工位(例如操作台的上方);  When the cushion pick-and-place mechanism 6 is in operation, first, the linear motor drives the slide bracket 61 to reach a work station (e.g., above the console);
此时, 压板升降气缸 624驱动压板 62和吸板 63一起下降, 压板 62的 定位板 621压住托盘 121的边缘限位, 可参见图 17所示, 其中示出了定位 板 621 同时压位了托盘 121及第一緩冲垫 1214的端部, 以定位及抵压住该 托盘 121 ;  At this time, the platen lifting cylinder 624 drives the pressing plate 62 and the suction plate 63 to descend together, and the positioning plate 621 of the pressing plate 62 presses the edge limit of the tray 121, as shown in FIG. 17, wherein the positioning plate 621 is pressed at the same time. The end of the tray 121 and the first cushion 1214 to position and press the tray 121;
然后吸板气缸 632驱动吸板 63下降, 并使吸盘 633真空启动, 使吸板 63的吸盘将第二緩冲垫 1210吸附住;  Then the suction plate cylinder 632 drives the suction plate 63 to lower, and the suction cup 633 is vacuum-activated, so that the suction cup of the suction plate 63 sucks the second cushion 1210;
压板升降气缸 624缩回, 驱动压板 62和吸板 63一起上升到最高位; 线性马达驱动滑动支架 61 到达緩冲垫取放模组的放緩冲垫工位(即取 放模组机架 50的上方);  The platen lifting cylinder 624 is retracted, and the driving platen 62 and the suction plate 63 are raised to the highest position together; the linear motor drives the sliding bracket 61 to reach the cushioning station of the cushioning pick-and-place module (ie, the pick-and-place module frame 50) Above)
压板升降气缸 624伸出 , 驱动压板 62和吸板 63一起下降, 并通过吸板 气缸 632解除吸盘 623的真空,让第二緩冲垫 1210放入取放模组机架 50中; 此时需要控制緩冲垫的整体下降 (下降高度=緩冲垫厚度), 以使緩冲垫 取放位置始终处于同一高度; 同时, 压板升降气缸 624和吸板气缸 2缩回, 并复位至初态, 等待下一动作循环。  The platen lifting cylinder 624 is extended, the driving platen 62 and the suction plate 63 are lowered together, and the vacuum of the suction cup 623 is released by the suction plate cylinder 632, so that the second cushion 1210 is placed in the pick-and-place module frame 50; Controlling the overall drop of the cushion (falling height = cushion thickness) so that the cushioning position is always at the same height; at the same time, the pressure plate lifting cylinder 624 and the suction cup cylinder 2 are retracted and reset to the initial state, Wait for the next action cycle.
而将緩冲垫从取放模组机架 50中取出并放置于操作台 2的托盘中的过 程以上述步骤相反, 在此不进行详述。  The process of taking the cushion out of the pick-and-place module frame 50 and placing it in the tray of the console 2 is reversed as described above and will not be described in detail herein.
如图 18所示, 是本发明一个实施例中緩冲垫取放模组中的取放模组升 降机构 52的结构示意图。 一并结合图 19中的效果示意图所示。 该取放模组 升降机构 52包括一緩冲垫放置平台 520,用于放置緩冲垫。该緩冲藝放置平 台 520下面设置有第二马达(未示出), 其通过驱动连接轴 521 , 通过十字转 向器 522的作用使连接轴 523转动, 通过联轴器 524及涡轮箱 526的作用, 使位于緩冲垫放置平台 520底部四角的涡杆 526转动,在多个涡杆 526的作 用下, 可以使緩冲垫放置平台 520上升或下降, 例如在一个实施例中, 第二 马达正转, 则緩冲垫放置平台 520上升, 而第二马达反转, 则緩冲藝放置平 台 520下降。 As shown in FIG. 18, it is a schematic structural view of the pick-and-place module lifting mechanism 52 in the cushion pick-and-place module in one embodiment of the present invention. It is shown together with the effect diagram in FIG. The pick and place module lifting mechanism 52 includes a cushion placement platform 520 for placing a cushion. A second motor (not shown) is disposed under the cushioning art placement platform 520, which drives the connecting shaft 521 and passes through the cross The action of the 522 is to rotate the connecting shaft 523. The vortex rod 526 at the four corners of the bottom of the cushion placing platform 520 is rotated by the action of the coupling 524 and the turbine box 526. Under the action of the plurality of scrolls 526, The cushion placement platform 520 is raised or lowered. For example, in one embodiment, the second motor is rotated forward, the cushion placement platform 520 is raised, and the second motor is reversed, and the cushioning placement platform 520 is lowered.
如图 20所示,是本发明一个实施例中的基板取放机构 7的结构示意图。 在该实施例中, 该基板取放机构 7用于伸入液晶基板 1212下部, 并取放液 晶基板 1212。其包括一个横杆 70以及设置于横杆 70上的多个平行的支撑片 72, 其中, 多个支撑片 72大致处于同一平面上, 每一支撑片 72与液晶基板 1212接触的一面上设置有多个緩冲圈 72。  As shown in Fig. 20, it is a schematic structural view of a substrate pick-and-place mechanism 7 in an embodiment of the present invention. In this embodiment, the substrate pick-and-place mechanism 7 is adapted to extend into the lower portion of the liquid crystal substrate 1212 and to take the liquid crystal substrate 1212. The utility model comprises a cross bar 70 and a plurality of parallel supporting pieces 72 disposed on the cross bar 70. The plurality of supporting pieces 72 are substantially on the same plane, and the side of each supporting piece 72 contacting the liquid crystal substrate 1212 is provided on the side. A plurality of buffer rings 72.
根据上述对本发明的取放大尺寸液晶面板的自动化设备的结构介绍,通 过本发明的取放大尺寸液晶面板的自动化设备可以将大尺寸液晶面板在卡 匣和制程机台之间很方便及安全地移转。  According to the above description of the structure of the automation device for taking the enlarged size liquid crystal panel of the present invention, the large-size liquid crystal panel can be conveniently and safely moved between the cassette and the processing machine by the automation device of the enlarged size liquid crystal panel of the present invention. turn.
在一种应用场景中, 从卡匣中取出液晶基板, 并移转至制程机台进行加 工, 其大致工作流程如下:  In an application scenario, the liquid crystal substrate is taken out from the cassette and transferred to the processing machine for processing. The approximate workflow is as follows:
将卡匣 12放置于升降模组机架 10上, 通过升降传动机构 14中的卡匣 12水平校正气缸 148进行水平方向定位,并结合浮动支撑装置 146进行垂直 方向定位, 使卡匣 12中的某个托盘 121处于合适的位置;  The cassette 12 is placed on the lifting module frame 10, and is horizontally positioned by the cassette 12 horizontal correction cylinder 148 in the lifting and lowering mechanism 14 and vertically positioned in conjunction with the floating supporting device 146 to make the cassette 12 a tray 121 is in a suitable position;
卡匣推拉模组 3的电磁吸盘 34在通电后吸附托盘 121侧壁上的磁吸装 置 1217, 并将该托盘 121从卡匣 12中拉出, 使其滑出至操作台 2的上方; 緩冲垫取放模组 5的緩冲垫取放机构 6平移动操作台 2上方, 将托盘 2 上的第二緩冲垫 1210取出并放于取放模组 5机架中, 具体过程详见前文的 描述;  The electromagnetic chuck 34 of the cassette push-pull module 3 adsorbs the magnetic device 1217 on the side wall of the tray 121 after being energized, and pulls the tray 121 out of the cassette 12 to slide it out to the top of the console 2; The cushion pick-and-place mechanism 6 of the pad pick-and-place module 5 is moved above the table 2, and the second cushion 1210 on the tray 2 is taken out and placed in the rack of the pick-and-place module 5. The foregoing description;
基板顶升机构 4将位于操作台 2的托盘 12中的液晶基板 1212顶升,脱 离托盘 121 ;  The substrate lifting mechanism 4 lifts the liquid crystal substrate 1212 located in the tray 12 of the console 2 to be separated from the tray 121;
基板取放机构 7伸入液晶基板 1212与托盘 121之间的空隙中, 将液晶 基板 1212取出送至制程机台 8。  The substrate pick-and-place mechanism 7 is inserted into the gap between the liquid crystal substrate 1212 and the tray 121, and the liquid crystal substrate 1212 is taken out and sent to the processing machine table 8.
在另一个应用场景中, 将在制程机台处理已经加工好的液晶基板, 移回 至卡匣中, 其大致工作流程如下: 基板取放机构 7将已加工好的液晶基板从制程机台 8中取出,放于顶升 机构 4已经顶升的顶升针 42上; In another application scenario, the processed liquid crystal substrate will be processed in the processing machine and moved back to the cassette. The approximate workflow is as follows: The substrate pick-and-place mechanism 7 takes out the processed liquid crystal substrate from the processing machine 8 and places it on the jacking pin 42 that has been lifted by the jacking mechanism 4;
顶升机构 4下降,将液晶基板放置于托盘 121内下层的第一緩冲垫 1214 上;  The jacking mechanism 4 is lowered, and the liquid crystal substrate is placed on the first cushion 1214 of the lower layer in the tray 121;
緩冲垫取放模组 5的緩冲垫取放机构 6将緩冲垫从取放模组机架 50中 取出, 并平移至操作台 2上方, 并放于托盘 121内液晶基板 1212上方; 卡匣推拉模组 3将放置了液晶基板 1212及第一緩冲垫 1214的托盘 121 推回至卡匣 12内。  The cushion pick-and-place mechanism 6 of the cushion pick-and-place module 5 takes out the cushion from the pick-and-place module frame 50, and translates it to the top of the console 2 and is placed above the liquid crystal substrate 1212 in the tray 121; The cassette push-pull module 3 pushes the tray 121 on which the liquid crystal substrate 1212 and the first cushion 1214 are placed back into the cassette 12.
实施本发明实施例, 具有如下有益效果:  Embodiments of the present invention have the following beneficial effects:
综上可以看出, 本发明实施例提供的一种取放大尺寸液晶面板的自动化 设备, 可以将液晶面板在卡匣及制程机台之间自动地搬动, 且安全性好; 其通过将液晶基板旋转置于托盘中,且采用第一緩冲垫和第二緩冲垫进 行卡固, 在运输过程中能保证液晶面板的安全性;  As can be seen, the automatic device for taking an enlarged size liquid crystal panel provided by the embodiment of the present invention can automatically move the liquid crystal panel between the cassette and the processing machine, and has good safety; The substrate is rotated and placed in the tray, and is clamped by the first cushion pad and the second cushion pad to ensure the safety of the liquid crystal panel during transportation;
从托盘中取出液晶基板时, 通过顶升机构上的顶升针托起液晶基板, 可 以艮平稳地托取液晶基板, 且基板取放机构采用底部抓取的方式, 更进一步 地能减少对液晶基板的损坏;  When the liquid crystal substrate is taken out from the tray, the liquid crystal substrate is lifted by the lifting pin on the jacking mechanism, so that the liquid crystal substrate can be smoothly picked up, and the substrate pick-and-place mechanism adopts the bottom grabbing method, thereby further reducing the liquid crystal. Damage to the substrate;
本发明可以节约人力, 提升自动化水平(品质稳定型提升), 提升产能, 减少破片。  The invention can save manpower, improve the level of automation (stable quality improvement), increase production capacity, and reduce fragmentation.
以上所揭露的仅为本发明较佳实施例而已, 当然不能以此来限定本发明 之权利范围, 因此等同变化, 仍属本发明所涵盖的范围。  The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, and thus equivalent variations are still within the scope of the present invention.

Claims

权 利 要 求 Rights request
1、 一种取放大尺寸液晶基板的自动化设备, 其中, 包括: 1. An automated equipment for taking enlarged size liquid crystal substrates, including:
卡匣升降模组, 其内部设置有用于层叠放置多个托盘的卡匣, 所述托盘 可水平滑出或滑入所述卡匣; The cassette lifting module is equipped with a cassette for stacking multiple trays inside, and the trays can slide out or slide into the cassette horizontally;
卡匣推拉模组,位于正对所述卡匣升降模组的托盘滑出方向的一个操作 台上, 其用于吸附所述卡匣中的一个托盘, 并驱动所述托盘滑入或滑出, 使 所述托盘在所述操作台与所述卡匣之间移动; The cassette push-pull module is located on an operation platform facing the direction of the tray sliding out of the cassette lifting module. It is used to absorb a tray in the cassette and drive the tray to slide in or out. , moving the tray between the operating table and the cassette;
緩冲垫取放模组, 位于所述操作台一侧, 其上设置有緩冲垫取放机构, 所述緩冲垫取放机构可平移至所述操作台上方, 用于将位于操作台上的托盘 中覆盖于液晶基板之上的第二緩冲垫取出 , 或者将第二緩冲垫放置于所述托 盘中液晶基板之上; The cushion pad picking and placing module is located on one side of the operating console, and is provided with a cushion pad picking and placing mechanism. The cushion pad picking and placing mechanism can be translated to the top of the operating console and is used to move the cushion pad located on the operating console. Take out the second buffer pad covering the liquid crystal substrate in the tray, or place the second buffer pad on the liquid crystal substrate in the tray;
基板顶升机构, 位于所述操作台下方, 至少包括多个可以上下方向移动 的顶升针, 所述顶升针可穿透所述位于操作台上的托盘, 并顶持于所述托盘 中的液晶基板的底部, 使所述液晶基板与所述托盘分离。 The substrate lifting mechanism is located under the operating table and includes at least a plurality of lifting pins that can move in the up and down direction. The lifting pins can penetrate the tray on the operating table and be held in the tray. The bottom of the liquid crystal substrate separates the liquid crystal substrate from the tray.
2、 如权利要求 1 所述的取放大尺寸液晶基板的自动化设备, 其中, 所 述卡匣升降模组具体包括: 2. The automated equipment for taking out enlarged-size liquid crystal substrates as claimed in claim 1, wherein the cassette lifting module specifically includes:
升降模组机架, 其至少在一侧设置有开口; The lifting module frame is provided with an opening on at least one side;
卡匣, 设置于所述升降模组机架内部, 其相对两侧壁上设置有带第一滚 轮的支撑件, 所述放置有液晶基板的托盘可放置于所述支撑件上, 所述托盘 可相对于所述支撑件滑入或滑出所述卡匣; The cassette is arranged inside the lifting module frame, and supports with first rollers are provided on the opposite side walls of the cassette. The tray on which the liquid crystal substrate is placed can be placed on the support, and the tray The cassette is slidable in and out relative to the support;
升降传动机构, 固定于所述升降模组机架底部, 用于支撑所述卡匣, 并 驱动所述卡匣上下运动以调整所述卡匣的位置。 The lifting transmission mechanism is fixed at the bottom of the lifting module frame and is used to support the cassette and drive the cassette to move up and down to adjust the position of the cassette.
3、 如权利要求 2所述的取放大尺寸液晶基板的自动化设备, 其中, 所 述升降传动机构包括有一升降平台,在所述升降平台的四个端部设置有用于 调整所述卡匣水平位置的卡匣水平校正气缸 , 以及在升降平台与卡匣接触的 地方, 均勾设置有多个用于调整所述卡匣垂直位置的浮动支撑装置。 3. The automated equipment for picking up enlarged size liquid crystal substrates as claimed in claim 2, wherein the lifting transmission mechanism includes a lifting platform, and four ends of the lifting platform are provided with means for adjusting the horizontal position of the cassette. The cassette level correction cylinder and the place where the lifting platform contacts the cassette are equipped with a plurality of floating support devices for adjusting the vertical position of the cassette.
4、 如权利要求 3所述的取放大尺寸液晶基板的自动化设备, 其中, 所 述托盘为上方开口的盒体, 其底部设置有多个顶升针过孔, 供基板顶升机构 的顶升针穿过; 其一侧面上设置有至少一个磁吸装置, 供所述卡匣推拉模组 吸附; 4. The automated equipment for picking up enlarged-size liquid crystal substrates as claimed in claim 3, wherein the tray is a box with an upper opening, and a plurality of lifting pin through holes are provided at the bottom for the lifting mechanism of the substrate to lift. The needle passes through; at least one magnetic device is provided on one side thereof for the cassette push-pull module to absorb;
所述托盘上放置有液晶基板,在所述液晶基板与所述托盘之间设置有第 一緩冲垫, 所述第一緩冲垫底部相应位置也设置有多个顶升针过孔; 所述液 晶基板的上部覆盖有所述第二緩冲垫。 A liquid crystal substrate is placed on the tray, a first buffer pad is provided between the liquid crystal substrate and the tray, and a plurality of jacking pin through holes are also provided at corresponding positions at the bottom of the first buffer pad; so The upper part of the liquid crystal substrate is covered with the second buffer pad.
5、 如权利要求 4所述的取放大尺寸液晶基板的自动化设备, 其中, 所 述卡匣推拉模组包括: 5. The automated equipment for picking up enlarged-size liquid crystal substrates as claimed in claim 4, wherein the cassette push-pull module includes:
设置于所述操作台的机架顶部两侧的滑台, 其上设置有第二滚轮, 供托 盘于其上滑动; The sliding tables provided on both sides of the top of the frame of the operating console are provided with second rollers for the pallets to slide on them;
电磁吸盘, 用于在通电时吸附所述托盘侧壁上的磁吸装置; Electromagnetic chuck, used to adsorb the magnetic suction device on the side wall of the tray when power is on;
电磁吸盘伸缩气缸, 用于驱动所述电磁吸盘移动, 以使其所吸附的托盘 在所述滑台上滑动。 The electromagnetic chuck telescopic cylinder is used to drive the electromagnetic chuck to move so that the tray it adsorbs slides on the slide table.
6、 如权利要求 1 所述的取放大尺寸液晶基板的自动化设备, 其中, 所 述基板顶升机构包括: 6. The automated equipment for taking out enlarged-size liquid crystal substrates as claimed in claim 1, wherein the substrate lifting mechanism includes:
顶升针安装板, 其上安装有多个顶升针; Lifting pin mounting plate, on which multiple lifting pins are installed;
顶升气缸, 设置于所述顶升针安装板的下侧, 其与所述操作台机架相固 定, 用于驱动所述顶升针安装板升降; A lifting cylinder is provided on the lower side of the lifting needle mounting plate, which is fixed to the operating console frame, and is used to drive the lifting needle mounting plate to rise and fall;
多个顶升导柱, 设置于所述顶升针安装板的下侧, 与设置于所述操作台 机架上的导套相配合, 使所述顶升针安装板与所述操作台机架之间活动连 接。 A plurality of lifting guide posts are provided on the lower side of the lifting pin mounting plate and cooperate with guide bushes provided on the operating console frame so that the lifting pin mounting plate is in contact with the operating console machine. movable connections between racks.
7、 如权利要求 1 所述的取放大尺寸液晶基板的自动化设备, 其中, 所 述緩冲垫取放模组包括: 7. The automated equipment for picking up enlarged size liquid crystal substrates as claimed in claim 1, wherein the buffer pad picking and placing module includes:
取放模组机架, 其中可存放多个第二緩冲垫; Access the module rack, which can store multiple second buffer pads;
緩冲垫取放机构, 设置于所述取放模组机架的顶部, 该緩冲垫取放机构 可以平移至操作台的上方, 用于将位于操作台上的托盘中液晶基板上部的第 二緩冲垫取出放于取放模组机架中,或者将取放模组机架中的第二緩冲垫取 出放置于所述托盘中的液晶基板之上; A buffer pad picking and placing mechanism is provided on the top of the picking and placing module frame. The buffer pad picking and placing mechanism It can be moved to the top of the operating table to take out the second buffer pad located on the upper part of the liquid crystal substrate in the tray on the operating table and place it in the pick-and-place module rack, or to place the second buffer pad in the pick-and-place module rack. The buffer pad is taken out and placed on the liquid crystal substrate in the tray;
取放模组升降机构, 固定设置于所述取放模组机架的下部, 用于支撑取 放模组机架中存放的第二緩冲垫, 并可以驱动所述第二緩冲垫的升降, 以调 整所述第二緩冲垫的位置。 The pick-and-place module lifting mechanism is fixedly provided at the lower part of the pick-and-place module rack, and is used to support the second buffer pad stored in the pick-and-place module rack, and can drive the second buffer pad. Lift and lower to adjust the position of the second cushion pad.
8、 如权利要求 7所述的取放大尺寸液晶基板的自动化设备, 其中, 所 述緩冲垫取放机构进一步包括: 8. The automated equipment for picking up enlarged size liquid crystal substrates as claimed in claim 7, wherein the buffer pad picking and placing mechanism further includes:
滑动支架, 其与一安装支座上的线性滑轨相配合, 以在所述取放模组机 架与所述操作台上方之间移动, 其中, 所述安装支座设置于緩冲垫取放模组 顶部的两侧, 并延伸至所述操作台的上方, 且在每一安装支座上设置有一线 性滑轨; A sliding bracket that cooperates with a linear slide rail on a mounting support to move between the pick-and-place module frame and the top of the operating table, where the mounting support is provided on the buffer pad. Place on both sides of the top of the module and extend to the top of the operating table, and a linear slide rail is provided on each installation support;
线性马达, 用于驱动所述滑动支架在所述线性滑轨上移动; A linear motor used to drive the sliding bracket to move on the linear slide rail;
压板, 其与所述滑动支架活动连接, 并设置于所述滑动支架之下, 其用 于定位及抵压位于所述操作台上的托盘; A pressure plate, which is movably connected to the sliding bracket and arranged under the sliding bracket, is used to position and press the tray located on the operating table;
吸板, 其与所述压板活动连接, 位于所述压板下方, 用于吸附托盘中的 第二緩冲垫或吸附取放模组机架中的第二緩冲垫。 A suction plate, which is movably connected to the pressure plate, is located below the pressure plate, and is used to absorb the second buffer pad in the tray or the second buffer pad in the pick-and-place module rack.
9、 如权利要求 8所述的取放大尺寸液晶基板的自动化设备, 其中, 所述压板在四侧形成有定位板, 用于对托盘进行定位以及抵压, 在所述 压板的中部固定有一个压板气缸, 用于驱动所述压板进行升降运动 9. The automated equipment for picking up enlarged-size liquid crystal substrates as claimed in claim 8, wherein the pressure plate is formed with positioning plates on four sides for positioning and pressing the tray, and there is a fixed in the middle of the pressure plate. Pressure plate cylinder, used to drive the pressure plate to perform lifting movement
所述吸板包括多条压板槽, 所述压板槽为向下开口的槽体结构, 在所述 压板槽上间隔设置多个用于吸附第二緩冲垫的吸盘,在所述吸板上还设置有 至少一个吸板气缸, 用于驱动所述吸板的升降以及控制所述吸盘的开闭。 The suction plate includes a plurality of pressure plate grooves. The pressure plate groove is a groove structure that opens downward. A plurality of suction cups for adsorbing the second cushion pad are arranged at intervals on the pressure plate groove. On the suction plate, At least one suction plate cylinder is also provided for driving the lifting and lowering of the suction plate and controlling the opening and closing of the suction cup.
10、 如权利要求 9所述的取放大尺寸液晶基板的自动化设备, 其中, 进 一步包括: 10. The automated equipment for taking out enlarged-size liquid crystal substrates as claimed in claim 9, further comprising:
基板取放机构, 其包括一个横杆以及设置于所述横杆上的多个平行的支 撑片, 其中, 所述多个支撑片大致处于同一平面上, 每一支撑片与液晶基板 接触的一面上设置有多个緩冲圈。 A substrate pick-and-place mechanism includes a crossbar and a plurality of parallel supports arranged on the crossbar. Support piece, wherein the plurality of support pieces are substantially on the same plane, and a plurality of buffer rings are provided on the side of each support piece that contacts the liquid crystal substrate.
11、 一种取放大尺寸液晶基板的自动化设备, 其中, 包括: 11. An automated equipment for taking out enlarged size liquid crystal substrates, including:
卡匣升降模组, 其内部设置有用于层叠放置多个托盘的卡匣, 所述托盘 可水平滑出或滑入所述卡匣; The cassette lifting module is equipped with a cassette for stacking multiple trays inside, and the trays can slide out or slide into the cassette horizontally;
卡匣推拉模组,位于正对所述卡匣升降模组的托盘滑出方向的一个操作 台上, 其用于吸附所述卡匣中的一个托盘, 并驱动所述托盘滑入或滑出, 使 所述托盘在所述操作台与所述卡匣之间移动; The cassette push-pull module is located on an operation platform facing the direction of the tray sliding out of the cassette lifting module. It is used to absorb a tray in the cassette and drive the tray to slide in or out. , moving the tray between the operating table and the cassette;
緩冲垫取放模组, 位于所述操作台一侧, 其上设置有緩冲垫取放机构, 所述緩冲垫取放机构可平移至所述操作台上方, 用于将位于操作台上的托盘 中覆盖于液晶基板之上的第二緩冲垫取出 , 或者将第二緩冲垫放置于所述托 盘中液晶基板之上; The cushion pad picking and placing module is located on one side of the operating console, and is provided with a cushion pad picking and placing mechanism. The cushion pad picking and placing mechanism can be translated to the top of the operating console and is used to move the cushion pad located on the operating console. Take out the second buffer pad covering the liquid crystal substrate in the tray, or place the second buffer pad on the liquid crystal substrate in the tray;
基板顶升机构, 位于所述操作台下方, 至少包括多个可以上下方向移动 的顶升针, 所述顶升针可穿透所述位于操作台上的托盘, 并顶持于所述托盘 中的液晶基板的底部, 使所述液晶基板与所述托盘分离; The substrate lifting mechanism is located under the operating table and includes at least a plurality of lifting pins that can move in the up and down direction. The lifting pins can penetrate the tray on the operating table and be held in the tray. the bottom of the liquid crystal substrate to separate the liquid crystal substrate from the tray;
基板取放机构, 用于伸入所述液晶基板下部, 并取放所述液晶基板。 A substrate picking and placing mechanism is used to extend into the lower part of the liquid crystal substrate and pick and place the liquid crystal substrate.
12、 如权利要求 11 所述的取放大尺寸液晶基板的自动化设备, 其中, 所述卡匣升降模组具体包括: 12. The automated equipment for taking out enlarged-size liquid crystal substrates as claimed in claim 11, wherein the cassette lifting module specifically includes:
升降模组机架, 其至少在一侧设置有开口; The lifting module frame is provided with an opening on at least one side;
卡匣, 设置于所述升降模组机架内部, 其相对两侧壁上设置有带第一滚 轮的支撑件, 所述放置有液晶基板的托盘可放置于所述支撑件上, 所述托盘 可相对于所述支撑件滑入或滑出所述卡匣; The cassette is arranged inside the lifting module frame, and supports with first rollers are provided on the opposite side walls of the cassette. The tray on which the liquid crystal substrate is placed can be placed on the support, and the tray The cassette is slidable in and out relative to the support;
升降传动机构, 固定于所述升降模组机架底部, 用于支撑所述卡匣, 并 驱动所述卡匣上下运动以调整所述卡匣的位置。 The lifting transmission mechanism is fixed at the bottom of the lifting module frame and is used to support the cassette and drive the cassette to move up and down to adjust the position of the cassette.
13、 如权利要求 12所述的取放大尺寸液晶基板的自动化设备, 其中, 所述升降传动机构包括有一升降平台,在所述升降平台的四个端部设置有用 于调整所述卡匣水平位置的卡匣水平校正气缸, 以及在升降平台与卡匣接触 的地方, 均勾设置有多个用于调整所述卡匣垂直位置的浮动支撑装置。 13. The automated equipment for picking up enlarged-size liquid crystal substrates as claimed in claim 12, wherein the lifting transmission mechanism includes a lifting platform, and useful lifts are provided at four ends of the lifting platform. A plurality of floating support devices for adjusting the vertical position of the cassette are hooked up to the cassette level correction cylinder for adjusting the horizontal position of the cassette, and where the lifting platform contacts the cassette.
14、 如权利要求 13所述的取放大尺寸液晶基板的自动化设备, 其中, 所述托盘为上方开口的盒体, 其底部设置有多个顶升针过孔, 供基板顶升机 构的顶升针穿过; 其一侧面上设置有至少一个磁吸装置, 供所述卡匣推拉模 组吸附; 14. The automated equipment for picking up enlarged-size liquid crystal substrates as claimed in claim 13, wherein the tray is a box with an upper opening, and a plurality of lifting pin through holes are provided at the bottom for the lifting mechanism of the substrate. The needle passes through; at least one magnetic suction device is provided on one side thereof for the cassette push-pull module to absorb;
所述托盘上放置有液晶基板,在所述液晶基板与所述托盘之间设置有第 一緩冲垫, 所述第一緩冲垫底部相应位置也设置有多个顶升针过孔; 所述液 晶基板的上部覆盖有所述第二緩冲垫。 A liquid crystal substrate is placed on the tray, a first buffer pad is provided between the liquid crystal substrate and the tray, and a plurality of jacking pin through holes are also provided at corresponding positions at the bottom of the first buffer pad; so The upper part of the liquid crystal substrate is covered with the second buffer pad.
15、 如权利要求 14所述的取放大尺寸液晶基板的自动化设备, 其中, 所述卡匣推拉模组包括: 15. The automated equipment for taking out enlarged-size liquid crystal substrates as claimed in claim 14, wherein the cassette push-pull module includes:
设置于所述操作台的机架顶部两侧的滑台, 其上设置有第二滚轮, 供托 盘于其上滑动; The sliding tables provided on both sides of the top of the frame of the operating console are provided with second rollers for the pallets to slide on them;
电磁吸盘, 用于在通电时吸附所述托盘侧壁上的磁吸装置; Electromagnetic chuck, used to adsorb the magnetic suction device on the side wall of the tray when power is on;
电磁吸盘伸缩气缸, 用于驱动所述电磁吸盘移动, 以使其所吸附的托盘 在所述滑台上滑动。 The electromagnetic chuck telescopic cylinder is used to drive the electromagnetic chuck to move so that the tray it adsorbs slides on the slide table.
16、 如权利要求 15所述的取放大尺寸液晶基板的自动化设备, 其中, 所述基板顶升机构包括: 16. The automated equipment for taking out enlarged-size liquid crystal substrates as claimed in claim 15, wherein the substrate lifting mechanism includes:
顶升针安装板, 其上安装有多个顶升针; Lifting pin mounting plate, on which multiple lifting pins are installed;
顶升气缸, 设置于所述顶升针安装板的下侧, 其与所述操作台机架相固 定, 用于驱动所述顶升针安装板升降; A lifting cylinder is provided on the lower side of the lifting needle mounting plate, which is fixed to the operating console frame, and is used to drive the lifting needle mounting plate to rise and fall;
多个顶升导柱, 设置于所述顶升针安装板的下侧, 与设置于所述操作台 机架上的导套相配合, 使所述顶升针安装板与所述操作台机架之间活动连 接。 A plurality of lifting guide posts are provided on the lower side of the lifting pin mounting plate and cooperate with guide bushes provided on the operating console frame so that the lifting pin mounting plate is in contact with the operating console machine. movable connections between racks.
17、 如权利要求 16所述的取放大尺寸液晶基板的自动化设备, 其中, 所述緩冲垫取放模组包括: 17. The automated equipment for taking out enlarged size liquid crystal substrates as claimed in claim 16, wherein, The cushion pad pick-and-place module includes:
取放模组机架, 其中可存放多个第二緩冲垫; Access the module rack, which can store multiple second buffer pads;
緩冲垫取放机构, 设置于所述取放模组机架的顶部, 该緩冲垫取放机构 可以平移至操作台的上方, 用于将位于操作台上的托盘中液晶基板上部的第 二緩冲垫取出放于取放模组机架中,或者将取放模组机架中的第二緩冲垫取 出放置于所述托盘中的液晶基板之上; The buffer pad picking and placing mechanism is arranged on the top of the picking and placing module frame. The buffer pad picking and placing mechanism can be moved to the top of the operating table and is used to move the upper part of the liquid crystal substrate in the tray on the operating table. Take out the two buffer pads and place them in the pick-and-place module rack, or take out the second buffer pad in the pick-and-place module rack and place them on the liquid crystal substrate in the tray;
取放模组升降机构, 固定设置于所述取放模组机架的下部, 用于支撑取 放模组机架中存放的第二緩冲垫, 并可以驱动所述第二緩冲垫的升降, 以调 整所述第二緩冲垫的位置。 The pick-and-place module lifting mechanism is fixedly provided at the lower part of the pick-and-place module rack, and is used to support the second buffer pad stored in the pick-and-place module rack, and can drive the second buffer pad. Lift and lower to adjust the position of the second cushion pad.
18、 如权利要求 17所述的取放大尺寸液晶基板的自动化设备, 其中, 所述緩冲垫取放机构进一步包括: 18. The automated equipment for picking up enlarged size liquid crystal substrates as claimed in claim 17, wherein the buffer pad picking and placing mechanism further includes:
滑动支架, 其与一安装支座上的线性滑轨相配合, 以在所述取放模组机 架与所述操作台上方之间移动, 其中, 所述安装支座设置于緩冲垫取放模组 顶部的两侧, 并延伸至所述操作台的上方, 且在每一安装支座上设置有一线 性滑轨; A sliding bracket that cooperates with a linear slide rail on a mounting support to move between the pick-and-place module frame and the top of the operating table, where the mounting support is provided on the buffer pad. Place on both sides of the top of the module and extend to the top of the operating table, and a linear slide rail is provided on each installation support;
线性马达, 用于驱动所述滑动支架在所述线性滑轨上移动; A linear motor used to drive the sliding bracket to move on the linear slide rail;
压板, 其与所述滑动支架活动连接, 并设置于所述滑动支架之下, 其用 于定位及抵压位于所述操作台上的托盘; A pressure plate, which is movably connected to the sliding bracket and arranged under the sliding bracket, is used to position and press the tray located on the operating table;
吸板, 其与所述压板活动连接, 位于所述压板下方, 用于吸附托盘中的 第二緩冲垫或吸附取放模组机架中的第二緩冲垫。 A suction plate, which is movably connected to the pressure plate, is located below the pressure plate, and is used to absorb the second buffer pad in the tray or the second buffer pad in the pick-and-place module rack.
19、 如权利要求 18所述的取放大尺寸液晶基板的自动化设备, 其中, 所述压板在四侧形成有定位板, 用于对托盘进行定位以及抵压, 在所述 压板的中部固定有一个压板气缸, 用于驱动所述压板进行升降运动 19. The automated equipment for picking up enlarged-size liquid crystal substrates as claimed in claim 18, wherein the pressure plate is formed with positioning plates on four sides for positioning and pressing the tray, and there is a fixed in the middle of the pressure plate. Pressure plate cylinder, used to drive the pressure plate to perform lifting movement
所述吸板包括多条压板槽, 所述压板槽为向下开口的槽体结构, 在所述 压板槽上间隔设置多个用于吸附第二緩冲垫的吸盘,在所述吸板上还设置有 至少一个吸板气缸, 用于驱动所述吸板的升降以及控制所述吸盘的开闭。 The suction plate includes a plurality of pressure plate grooves. The pressure plate groove is a groove structure that opens downward. A plurality of suction cups for adsorbing the second cushion pad are arranged at intervals on the pressure plate groove. On the suction plate, At least one suction plate cylinder is also provided for driving the lifting and lowering of the suction plate and controlling the opening and closing of the suction cup.
20、 如权利要求 19所述的取放大尺寸液晶基板的自动化设备, 其中, 所述基板取放机构包括一个横杆以及设置于所述横杆上的多个平行的支撑 片, 其中, 所述多个支撑片大致处于同一平面上, 每一支撑片与液晶基板接 触的一面上设置有多个緩冲圈。 20. The automated equipment for picking up enlarged-size liquid crystal substrates as claimed in claim 19, wherein the substrate pick-and-place mechanism includes a crossbar and a plurality of parallel support pieces arranged on the crossbar, wherein, the The plurality of support pieces are substantially on the same plane, and a plurality of buffer rings are provided on the side of each support piece that contacts the liquid crystal substrate.
PCT/CN2013/077808 2013-06-18 2013-06-24 Automation device for picking and placing liquid crystal substrate of large size WO2014201706A1 (en)

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