WO2014174729A1 - 超音波発生装置 - Google Patents
超音波発生装置 Download PDFInfo
- Publication number
- WO2014174729A1 WO2014174729A1 PCT/JP2013/085194 JP2013085194W WO2014174729A1 WO 2014174729 A1 WO2014174729 A1 WO 2014174729A1 JP 2013085194 W JP2013085194 W JP 2013085194W WO 2014174729 A1 WO2014174729 A1 WO 2014174729A1
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- WIPO (PCT)
- Prior art keywords
- hole
- length direction
- vent hole
- ultrasonic
- ultrasonic generator
- Prior art date
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- 238000002604 ultrasonography Methods 0.000 title abstract 5
- 238000009423 ventilation Methods 0.000 claims description 8
- 230000005284 excitation Effects 0.000 description 15
- 239000010410 layer Substances 0.000 description 15
- 239000000758 substrate Substances 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 230000006378 damage Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
- G10K9/125—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means with a plurality of active elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0603—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/18—Details, e.g. bulbs, pumps, pistons, switches or casings
- G10K9/22—Mountings; Casings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
- B06B1/0618—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile of piezo- and non-piezoelectric elements, e.g. 'Tonpilz'
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
- G01S7/521—Constructional features
Definitions
- An object of the present invention is to provide an ultrasonic generator in which a ventilation hole that communicates the internal space of the ultrasonic generator and the outside is provided in the frame, and the durability is unlikely to deteriorate.
- the piezoelectric layer between the excitation electrode 11c and the internal electrode 11b and the piezoelectric layer between the internal electrode 11b and the excitation electrode 11d are polarized in the same direction in the thickness direction.
- the excitation electrodes 11c and 11d are made of a metal such as Ag or Pd or an alloy thereof.
- the piezoelectric layer of the second piezoelectric vibrator 11 is polarized in the direction opposite to the piezoelectric layer of the first piezoelectric vibrator 10 in the thickness direction. As a result, the second piezoelectric vibrator 11 is configured to vibrate in reverse phase with respect to the first piezoelectric vibrator 10.
- the resonance frequency in the vent hole 7d matches the resonance frequency with the sound wave emission holes 3a to 3d by the sound waves emitted by the vibrations of the first and second piezoelectric vibrators 10 and 11 being open ends. These resonances interfere with each other in the casing, and the sound pressure of the ultrasonic waves emitted from the ultrasonic generator is lowered. Therefore, the resonance frequency in the vent hole 7d is different from the resonance frequency in which the sound wave emission holes 3a to 3d are opened by the sound waves emitted by the vibrations of the first and second piezoelectric vibrators 10 and 11. Preferably it is. Thereby, the fall of the sound pressure of the ultrasonic wave emitted from an ultrasonic generator by the resonance in the air hole 7d can be reduced.
- the resonance frequency is the frequency of the sound pressure peak.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Transducers For Ultrasonic Waves (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Abstract
Description
従って、通気孔7dにおける側面7eに開口している部分が、下方に位置する接続部材5により支持されているため、通気孔7dを設けても耐久性が低下することを防ぐことができる。
2…ベース基板
2a…上面
3…キャップ部材
3a~3d…音波放出孔
4…電極ランド
5…接続部材
5a…外側端部
5b…内側端部
6…超音波発生素子
7…枠体
7a,7b…第1,第2の主面
7c…貫通孔
7d…通気孔
7d1…外側端部
7e…側面
7f…溝
7g…中空経路
7h…溝
7i…溝
8,9…接着剤層
10,11…第1,第2の圧電振動子
10a,11a…圧電板
10b,11b…内部電極
10c,10d,11c,11d…励振電極
12…導電性接着剤
Claims (5)
- 対向し合う第1及び第2の主面と複数の側面を有し、溝または貫通孔のうち一方が前記第1及び第2の主面に設けられている枠体と、前記枠体の第1の主面側の溝または前記貫通孔を閉成するように前記第1の主面に接合されている平板状の第1の振動子と、前記枠体の第2の主面側の溝または前記貫通孔を閉成するように前記第2の主面に接合されている平板状の第2の振動子とを備え、前記溝または前記貫通孔と前記第1及び第2の振動子により形成された内部空間を有する、超音波発生素子と、
前記第2の振動子における前記枠体の前記第2の主面に接合されている側の面と対向する面に接合されており、前記超音波発生素子を支持するとともに、前記第1及び第2の振動子の少なくとも一方に電気的に接続されている接続部材とを備え、
前記枠体には、前記複数の側面のうちの第1の側面に開口している部分を有し、前記内部空間と外部とを連通する通気孔が設けられており、
前記第1の側面における前記第1の主面または前記第2の主面に平行な方向を長さ方向としたとき、前記通気孔の前記第1の側面に開口している部分において、前記第1の側面における前記長さ方向の中心に対して、距離が最も遠い箇所を外側端部、前記第1の側面における前記長さ方向の中心に対して、距離が最も近い箇所を内側端部とすると、平面視して、前記通気孔の第1の側面に開口している部分の前記外側端部と、前記接続部材の前記内側端部とが重なり合わない位置となるように前記通気孔が設けられている、超音波発生装置。 - 前記第1の側面に開口している部分の前記外側端部が、平面視して、前記第1の側面における長さ方向の中心とは異なる位置であって、前記接続部材の前記内側端部と重なり合わない位置となるように、前記通気孔が設けられている、請求項1に記載の超音波発生装置。
- 前記第1の側面に開口している部分が、底面視して前記接続部材に覆われるように前記通気孔が設けられている、請求項1に記載の超音波発生装置。
- 前記超音波発生素子を収納し、音波放出孔を有する筐体をさらに備え、
前記通気孔内の共鳴の周波数が、前記第1及び第2の振動子の振動により放出された音波による前記音波放出孔を開放端とする共鳴の周波数と異なっている、請求項1~3のいずれか1項に記載の超音波発生装置。 - 前記超音波発生素子は、前記第1の振動子と第2の振動子とが逆位相で振動する、座屈音叉振動モードにより超音波を発生させる、請求項1~4のいずれか1項に記載の超音波発生装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201380075796.0A CN105144749A (zh) | 2013-04-24 | 2013-12-27 | 超声波产生装置 |
JP2015513490A JPWO2014174729A1 (ja) | 2013-04-24 | 2013-12-27 | 超音波発生装置 |
EP13883272.0A EP2991374A4 (en) | 2013-04-24 | 2013-12-27 | ULTRASOUND EMISSION DEVICE |
US14/873,076 US10074352B2 (en) | 2013-04-24 | 2015-10-01 | Ultrasonic wave generation apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013-091269 | 2013-04-24 | ||
JP2013091269 | 2013-04-24 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US14/873,076 Continuation US10074352B2 (en) | 2013-04-24 | 2015-10-01 | Ultrasonic wave generation apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014174729A1 true WO2014174729A1 (ja) | 2014-10-30 |
Family
ID=51791320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2013/085194 WO2014174729A1 (ja) | 2013-04-24 | 2013-12-27 | 超音波発生装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10074352B2 (ja) |
EP (1) | EP2991374A4 (ja) |
JP (1) | JPWO2014174729A1 (ja) |
CN (1) | CN105144749A (ja) |
WO (1) | WO2014174729A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016104414A1 (ja) * | 2014-12-26 | 2016-06-30 | 株式会社村田製作所 | 超音波発生素子およびこれを備える超音波発生装置 |
WO2017125202A1 (de) * | 2016-01-20 | 2017-07-27 | Robert Bosch Gmbh | Schallwandleranordnung |
CN111715501A (zh) * | 2019-03-20 | 2020-09-29 | 精工爱普生株式会社 | 微机电***器件及电子设备 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015216163A1 (de) * | 2015-08-25 | 2017-03-02 | Robert Bosch Gmbh | Akustischer Sensor zum Aussenden und/oder Empfangen akustischer Signale |
JP7351407B2 (ja) * | 2020-03-18 | 2023-09-27 | 株式会社村田製作所 | アクチュエータ、流体制御装置、および、アクチュエータの製造方法 |
US20230011826A1 (en) * | 2021-07-12 | 2023-01-12 | Robert Bosch Gmbh | Ultrasound transducer with distributed cantilevers |
US11899143B2 (en) | 2021-07-12 | 2024-02-13 | Robert Bosch Gmbh | Ultrasound sensor array for parking assist systems |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60134700A (ja) * | 1983-12-23 | 1985-07-17 | Nippon Denso Co Ltd | 発音装置 |
JP2011228966A (ja) | 2010-04-21 | 2011-11-10 | Nec Corp | 電気音響変換器及びそれを用いた電子機器 |
WO2012026319A1 (ja) | 2010-08-24 | 2012-03-01 | 株式会社村田製作所 | 超音波発生装置 |
WO2013051400A1 (ja) * | 2011-10-03 | 2013-04-11 | 株式会社村田製作所 | 超音波発生装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0446798U (ja) * | 1990-08-28 | 1992-04-21 | ||
JP2894276B2 (ja) * | 1996-05-02 | 1999-05-24 | 日本電気株式会社 | 圧電音響変換器 |
DE60332817D1 (de) * | 2002-03-15 | 2010-07-15 | Panasonic Corp | Reformiervorrichtung und betriebsverfahren dafür |
JP4513596B2 (ja) * | 2004-08-25 | 2010-07-28 | 株式会社デンソー | 超音波センサ |
JP5088526B2 (ja) * | 2005-04-18 | 2012-12-05 | ソニー株式会社 | 噴流発生装置及び電子機器 |
-
2013
- 2013-12-27 CN CN201380075796.0A patent/CN105144749A/zh active Pending
- 2013-12-27 EP EP13883272.0A patent/EP2991374A4/en not_active Withdrawn
- 2013-12-27 WO PCT/JP2013/085194 patent/WO2014174729A1/ja active Application Filing
- 2013-12-27 JP JP2015513490A patent/JPWO2014174729A1/ja active Pending
-
2015
- 2015-10-01 US US14/873,076 patent/US10074352B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60134700A (ja) * | 1983-12-23 | 1985-07-17 | Nippon Denso Co Ltd | 発音装置 |
JP2011228966A (ja) | 2010-04-21 | 2011-11-10 | Nec Corp | 電気音響変換器及びそれを用いた電子機器 |
WO2012026319A1 (ja) | 2010-08-24 | 2012-03-01 | 株式会社村田製作所 | 超音波発生装置 |
WO2013051400A1 (ja) * | 2011-10-03 | 2013-04-11 | 株式会社村田製作所 | 超音波発生装置 |
Non-Patent Citations (1)
Title |
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See also references of EP2991374A4 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016104414A1 (ja) * | 2014-12-26 | 2016-06-30 | 株式会社村田製作所 | 超音波発生素子およびこれを備える超音波発生装置 |
WO2017125202A1 (de) * | 2016-01-20 | 2017-07-27 | Robert Bosch Gmbh | Schallwandleranordnung |
CN111715501A (zh) * | 2019-03-20 | 2020-09-29 | 精工爱普生株式会社 | 微机电***器件及电子设备 |
US11594670B2 (en) | 2019-03-20 | 2023-02-28 | Seiko Epson Corporation | MEMs device and electronic device |
Also Published As
Publication number | Publication date |
---|---|
CN105144749A (zh) | 2015-12-09 |
US20160027424A1 (en) | 2016-01-28 |
US10074352B2 (en) | 2018-09-11 |
EP2991374A4 (en) | 2016-08-24 |
JPWO2014174729A1 (ja) | 2017-02-23 |
EP2991374A1 (en) | 2016-03-02 |
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