WO2014166015A1 - 温稳小型光谱仪 - Google Patents

温稳小型光谱仪 Download PDF

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Publication number
WO2014166015A1
WO2014166015A1 PCT/CN2013/000483 CN2013000483W WO2014166015A1 WO 2014166015 A1 WO2014166015 A1 WO 2014166015A1 CN 2013000483 W CN2013000483 W CN 2013000483W WO 2014166015 A1 WO2014166015 A1 WO 2014166015A1
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Prior art keywords
base
bottom plate
temperature
thermal expansion
gap
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PCT/CN2013/000483
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English (en)
French (fr)
Inventor
相连钦
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宁波源禄光电有限公司
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Publication of WO2014166015A1 publication Critical patent/WO2014166015A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating

Definitions

  • the present invention relates to a spectrometer, and more particularly to a compact spectrometer that is stable over a wide temperature range. Background technique
  • the technical problem to be solved by the present invention is to provide a small spectrometer with high temperature stability, low spectral drift and stable spectral resolution over a large temperature range.
  • a temperature-stable small spectrometer comprising a base and an optical element, the optical element being fixed on a bottom plate having a thermal expansion coefficient lower than a thermal expansion coefficient of the base, and The coefficients of thermal expansion differ by an order of magnitude or more, and a portion of the bottom plate is rigidly attached to the base while the remainder of the bottom plate has a gap with the base.
  • the partial area is preferably as small as possible, as long as the bottom plate can be stably supported on the base.
  • the partial position is not limited to the middle of the bottom plate, but may be at other positions, but preferably located in the middle portion of the bottom plate, as long as the stable rigidity of the bottom plate is supported on the base, and the local portion is located in the non-intermediate region.
  • the thermal expansion coefficient of the base material is generally on the order of 10 ⁇ 5 / ⁇ , and the thermal expansion coefficient of the base material is generally on the order of i (r 6 rc.
  • the optical elements are fixed on a bottom plate with a low coefficient of thermal expansion, their distance and angle with each other The amount of temperature change will be reduced by more than 10 times than they are fixed on a base with a high coefficient of thermal expansion.
  • the bottom plate has only a small area of local rigidity fixed to the base, the shape and size of the base will not change with temperature.
  • the optical element is also made of a material having a low expansion coefficient to reduce its optical performance due to temperature.
  • the rigid connection is specifically: the middle of the base has a protrusion toward the bottom plate, and the protrusion is rigidly fixed to the bottom plate or fixed by a fastener to form the rigid connection.
  • This implementation is simple and robust.
  • a through hole is formed in a middle portion of the bottom plate, and the base has a protruding portion extending into the through hole, and a fastener passes through the through hole and It is fixed to the projection to rigidly connect the bottom plate and the base there.
  • the bottom plate and the base are softly connected by the adhesive at the gap to achieve better anti-shock and anti-shock effects.
  • the periphery of the bottom plate is softly connected to the base by the adhesive, and the remaining portion retains the gap.
  • the bottom plate only selects a plurality of points around it to be softly connected to the base through the adhesive, and the remaining portion retains the gap, that is, the bottom plate and the base are only around the bottom plate.
  • the gap is softly connected by a discontinuous adhesive.
  • the invention has the advantages that: the temperature stable small spectrometer, since the optical component is mounted on the bottom plate of the low expansion coefficient material, and the bottom plate is only partially rigidly connected with the base, thereby greatly reducing the optical components.
  • the relative position varies with temperature; in addition, if the optical element also uses a low expansion coefficient material, it will further greatly reduce its optical properties as a function of temperature.
  • the spectral shift of the small spectrometer due to the change in temperature and the instability of the optical characteristics are greatly improved, so that the compact spectrometer has a large temperature use range.
  • the bottom plate and the base are connected by a combination of a rigid connection and a soft connection, so that the change in shape and size of the base with temperature can not be transmitted to the bottom plate on which the relevant optical component is mounted, and can also The effect of buffering external vibrations makes the small spectrometer have stable performance over a wide temperature range.
  • Figure 1 is a schematic diagram of the principle of the small spectrometer of the present invention.
  • FIG. 2 is a schematic diagram of the principle of another small spectrometer according to the present invention.
  • Figure 3 is a first embodiment of the connection of the bottom plate to the base of the present invention.
  • Figure 4 is a second embodiment of the connection of the bottom plate to the base of the present invention.
  • Figure 5 is a third embodiment of the connection of the bottom plate to the base of the present invention.
  • Figure 6 is a fourth embodiment of the connection of the bottom plate to the base of the present invention.
  • Figure 7 is a fifth embodiment of the connection of the bottom plate to the base of the present invention. detailed description
  • the compact spectrometer of the present invention may employ a planar reflection grating, a planar transmission grating, a concave reflection grating or other dispersive elements.
  • the compact spectrometer adopts a Czemry-Tumer system of a planar reflection grating, including an incident slit 10, and a reflective collimating mirror 20 disposed on the optical path in the incident slit 10, and a planar reflective grating.
  • Reflective convergence mirror 40 and detector 50 The incident slit 10 and the detector 50 are fixed to the bottom plate 1 through the base, and other optical components are directly fixed to the bottom plate 1.
  • Fig. 2 is a spectrometer system utilizing a flat field concave grating, including an entrance slit 10', a flat field concave grating 30', and a detector 50'.
  • the incident slit 10', the flat field concave grating 30', and the detector 50' are both fixed to the base plate 1 by respective bases.
  • the bottom plate 1 is made of a material having a low expansion coefficient, and at least a material having an expansion coefficient lower than that of the base is used, and all the optical components are fixed to the bottom plate 1 and then the bottom plate 1 is It is attached to the base 2 made of metal or plastic.
  • the bottom plate 1 may be made of glass ceramic (Zerodur), or Corning's ULE ultra-low thermal expansion coefficient glass material, or borosilicate glass (pyrex), fused silica, carbon fiber reinforced composite material (Carbon Fiber Reinforced Polymer/Plastic, CFRP). , or some metal, such as Invar.
  • the base can be made of materials with a thermal expansion coefficient of the order of 10' 5 /°C.
  • FIG. 3-7 the connection between the bottom plate 1 and the base 2 made of the low expansion coefficient material is shown.
  • a portion 11 of the base plate 1 is rigidly coupled to the base 2, the portion 11 being located in the intermediate portion of the bottom plate.
  • the other portions of the bottom plate 1 have a gap 23 with the base 2 without being in contact with each other.
  • the middle portion of the base 2 has a protrusion 21 rigidly fixed to the bottom plate 1, and a gap 23 is maintained between the other portion of the bottom plate 1 and the base 2 or is softly connected by injecting the adhesive 3 into the gap 23. .
  • the middle portion of the base 2 has a protrusion 21 and a bottom plate 1 which are rigidly connected to each other by fasteners 22 such as screws and washers, and a gap 23 is maintained between the other portion of the bottom plate 1 and the base 2. Or by injecting a glue 3 into the gap 23 for a soft connection.
  • a middle portion of the bottom plate 1 is provided with a through hole 12 having a protrusion 24 extending into the through hole 12, and a fastener 22 such as a screw and a washer passing through the through hole 12 And being fixed to the protruding portion 24, the bottom plate 1 and the base 2 are rigidly connected thereto, and a gap 23 is maintained between the other portion of the bottom plate 1 and the base 2 or is softly connected by injecting the adhesive 3 into the gap 23.
  • the projection 21 may be provided on the bottom plate 1 and extend from the bottom plate 1 toward the base 2. And those skilled in the art can also understand that other fastening methods can be used as long as one (small area) rigid connection between the bottom plate 1 and the base 2 is maintained, and the other parts of the bottom plate 1 and the base 2 are maintained.
  • the gap 23 may be softly connected by injecting the adhesive 3 into the gap 23.
  • the adhesive 3 can be filled in the gap 23, but it is preferable to partially inject the adhesive 3.
  • the adhesive 3 is only softly connected at the gap around the bottom plate.
  • the flexible adhesive 3 is only softly connected at the gap around the bottom plate.
  • This temperature-stable small spectrometer can be used not only in the above two spectral systems, but also in other types of small spectrometer systems.
  • the temperature-stable small spectrometer because the optical component is mounted on the bottom plate of the low expansion coefficient material, greatly reduces the amount of change of the relative position between the optical components with temperature; in addition, the optical component also uses a material with a low expansion coefficient. In this case, it will greatly reduce its optical performance as a function of temperature.
  • the small spectrometer is not easy to cause spectral line drift and spectral analyzer resolution due to temperature changes, so that the small spectrometer has a large temperature range and high stability.
  • the bottom plate and the base are connected by a combination of a rigid connection and a soft connection, so that the change of the shape and the size of the base with temperature can not be transmitted to the bottom plate with the relevant optical component, and can also buffer the outside world.
  • the effect of the vibration makes the compact spectrometer have stable performance over a wide temperature range.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

一种温稳小型光谱仪，包括底座（2）以及光学元件，光学元件固定于一个热膨胀系数低于底座的热膨胀系数的底板（1）上，且二者的热膨胀系数相差一个数量级或一个数量级以上。底板（1）的一个局部（11）刚性连接在底座（2）上，而底板（1）的其余部分与底座（2）之间具有一间隙。这种小型光谱仪不易因为温度的变化而产生谱线的漂移、光谱仪分辨力的下降，进而这种小型光谱仪具有较大的温度使用范围和较高的稳定性能。

Description

N2013/000483
温稳小型光谱仪
技术领域
本发明涉及一种光谱仪， 特别是涉及一种在较大温度范围内性能稳定的小型光谱 仪。 背景技术
现有的小型光谱仪， 无论其设计原理是基于平面反射光栅、平面透射光栅、 凹面反 射光栅还是其他的色散元件， 光谱仪中的光学***中的各个光学元件， 都是直接安装于 金属或者塑料的底座上。 由于金属或者塑料材料都具有较高的热膨胀系数 (Coefficient of thermal expansion, CTE), 因此随着温度的变化， 金属或者塑料的底座的形状和尺寸会 有较大的改变， 这个改变影响了安装于底座上的光学元件相互之间的距离以及角度等， 使得光谱仪最后的光谱像平面发生漂移， 即测量到的谱线在探测器色散方向上的位置发 生变化， 并使光谱像离开探测器感应面而使光谱分辨率下降。 因此， 使得小型光谱仪的 温度稳定性不高， 只能在不大的温度范围内， 光谱仪的谱线才有重复性和保持光谱分辨 率。 发明内容
本发明所要解决的技术问题是提供一种在较大的温度范围内，温度稳定性较高、谱 线不易发生漂移和光谱分辨率稳定的小型光谱仪。
本发明为解决上述技术问题所采用的技术方案为：一种温稳小型光谱仪，包括底座 以及光学元件，所述光学元件固定于一个热膨胀系数低于所述底座的热膨胀系数的底板 上， 且二者的热膨胀系数相差一个数量级或一个数量级以上， 所述底板的一个局部刚性 连接在所述底座上， 而底板的其余部分则与底座之间具有一间隙。
所述局部的面积最好是尽可能小， 只要能保证底板能稳固的刚性支撑在底座上即 可。 所述局部的位置不局限于底板的中间， 也可以在其他位置， 但优选为位于底板的中 间区域， 只要能保证底板稳固的刚性支撑在底座上即可， 并且在该局部位于非中间区域 情形下， 还可以通过在其他部分增加与下述软性连接类似的方式来平衡受力。 底座材料 的热膨胀系数一般在 10·5/Ό数量级， 底板材料的热膨胀系数一般在 i(r6rc数量级。 由于 光学元件固定在一个低热膨胀系数的底板上， 它们相互之间的距离以及角度随温度变化 的量会比它们固定在一个高热膨胀系数的底座上减少 10倍以上。 同时， 由于所述底板 只有一个小面积的局部刚性固定在底座上，底座形状和尺寸随温度的变化不会传到装有
确认本 相关光学元件的底板上。另外，为获得更优的效果，光学元件也用低膨胀系数材料制作， 以减少其光学性能因温度而变化。
优选地， 所述刚性连接方式具体是： 所述底座的中间具有一向着底板的突起， 所述 突起与底板刚性粘结固定或者通过紧固件固定从而形成所述的刚性连接。该实现方式简 单且稳固。 当然， 也可在底板上设置向下的突起。 本领域技术人员应当理解， 这种等同 的方案也属于本申请的保护范围。
另一种优选的底板与底座的连接方式是：所述底板的中部设有一通孔，所述底座上 具有一可伸入该通孔内的凸出部， 一紧固件穿过通孔并固定在凸出部上， 从而将所述底 板与底座在该处刚性连接。
优选地，所述底板与所述底座之间在所述间隙处通过黏胶软性连接， 以达到较好的 抗震防冲击效果。 为实现更优的抗震防冲击效果， 所述底板的四周通过黏胶和底座软性 连接， 其余部分则保留所述的间隙。 更进一步的是， 所述底板仅在其四周选择数点通过 黏胶和所述底座软性连接， 其余部分则保留所述的间隙， 也即所述底板与所述底座之间 仅在底板四周间隙处通过不连续黏胶软性连接。
与现有技术相比， 本发明的优点在于： 该温稳小型光谱仪， 由于光学元件安装在低 膨胀系数材料的底板上， 且底板仅局部与底座刚性连接， 从而极大地减少了光学元件之 间相对位置随温度的变化而变化的量； 此外， 如果光学元件也采用低膨胀系数材料， 将 进一步极大地减少其光学性能随温度的变化而变化。
这样，该小型光谱仪由于温度的变化引起的谱线的漂移和光学特性的不稳定将得到 极大地改善， 使该小型光谱仪具有较大的温度使用范围。 特别是， 底板与底座之间采用 刚性连接和软性连接相结合的方式连接， 既可使底座形状和尺寸的随温度的变化不会传 到装有相关光学元件的底板上， 也能够起到缓冲外界震动的效果， 使该小型光谱仪的在 较大温度范围内具有稳定性能。 附图说明
图 1为本发明小型光谱仪的原理示意图。
图 2为本发明另一种小型光谱仪的原理示意图。
图 3为本发明中底板与底座连接的第一实施例。
图 4为本发明中底板与底座连接的第二实施例。
图 5为本发明中底板与底座连接的第三实施例。
图 6为本发明中底板与底座连接的第四实施例。
图 7为本发明中底板与底座连接的第五实施例。 具体实施方式
以下结合附图实施例对本发明作进一歩详细描述。
本发明的小型光谱仪， 其可以采用平面反射光栅、平面透射光栅、凹面反射光栅或 者其他的色散元件。如图 1所示，该小型光谱仪采用的是平面反射光栅的 Czemry-Tumer ***，包括一入射狭缝 10，以及光路上位于入射狭缝 10后依次设置的反射式准直镜 20， 平面反射光栅 30, 反射式会聚镜 40以及探测器 50。 其中入射狭缝 10和探测器 50通过 基座固定于底板 1上， 其他的光学元件都直接固定于底板 1上。
图 2中的是利用平场凹面光栅的光谱仪***，包括入射狭缝 10'、平场凹面光栅 30' 以及探测器 50'。 该入射狭缝 10'、 平场凹面光栅 30'以及探测器 50'都通过各自的基座 固定于底板 1上。
图 1或 2中的光谱仪***中，底板 1都采用低膨胀系数的材料，至少要采用膨胀系 数低于底座 2—个数量级的材料，将所有的光学元件都固定于底板 1上再将底板 1连接 于金属或者塑料制成的底座 2上。
该底板 1可采用微晶玻璃 (Zerodur), 或者美国康宁公司的 ULE超低热膨胀系数玻 璃材料， 或者硼硅玻璃 (pyrex), 熔融石英，碳纤维增强复合材料 (Carbon Fiber Reinforced Polymer/Plastic, CFRP) , 或者一些金属， 如殷钢等。 热膨胀系数越小越好， 至少低于 3.5χ 10·6/Γ。 底座则可采用热膨胀系数的数量级为 10'5/°C的材料制作。
如图 3-7所示， 为该低膨胀系数材料制成的底板 1与底座 2之间的连接方式。该底 板 1的一个局部 11与底座 2之间刚性连接， 该局部 11位于底板的中间区域。 底板 1的 其他部分与底座 2具有间隙 23而不相互接触。 如图 3所示， 底座 2的中间部分具有一 突起 21与底板 1刚性粘结固定，底板 1的其他部位与底座 2之间保持有间隙 23或通过 在间隙 23内注入黏胶 3软性连接。
或者如图 4所示， 底座 2的中间部分具有一突起 21与底板 1之间通过紧固件 22， 如螺钉和垫圈等相互刚性连接， 底板 1的其他部位与底座 2之间保持有间隙 23或通过 在间隙 23内注入黏胶 3软性连接。
或者如图 5所示， 底板 1的中部设有一通孔 12， 底座上具有一可伸入该通孔 12内 的凸出部 24， 一紧固件 22如螺钉和垫圈等穿过通孔 12并固定在凸出部 24上， 从而将 底板 1与底座 2在该处刚性连接， 底板 1的其他部位与底座 2之间保持有间隙 23或通 过在间隙 23内注入黏胶 3软性连接。
上述实施例中该突起 21也可以设于底板 1上， 从底板 1向着底座 2延伸。 并且本 领域技术人员也可以了解到， 可采用其他的紧固方式， 只要保持该底板 1与底座 2之间 其中一处 (小面积)刚性连接，底板 1的其他部位与底座 2之间保持有间隙 23或通过在间 隙 23内注入黏胶 3软性连接即可。
间隙 23内即可注满黏胶 3，但优选是局部注入黏胶 3。比如采用图 6或图 7所示的 2013/000483 局部注胶方式。 如图 6所示， 为实现更优的抗震防冲击效果， 仅在底板四周间隙处通过 黏胶 3软性连接。 也可如图 7所示， 为实现更优的抗震防冲击效果， 仅在底板四周间隙 处通过不连续的黏胶 3软性连接。
该温稳小型光谱仪，不但可以应用于上述的两种光谱***中，也可以用于其它各种 类型的小型光谱仪***中。 该温稳小型光谱仪， 由于光学元件安装在低膨胀系数材料的 底板上， 极大地减少了光学元件之间相对位置随温度的变化而变化的量； 另外， 在光学 元件也采用低膨胀系数材料的情况下， 更将极大地减少其光学性能随温度的变化而变 化。使该小型光谱仪不易因为温度的变化而产生谱线的漂移、光谱仪分辨力的下降， 进 而使该小型光谱仪具有一较大的温度使用范围， 具有较高的稳定性能。而且底板与底座 之间采用刚性连接和软性连接相结合的方式连接， 既可使底座形状和尺寸的随温度的变 化不会传到装有相关光学元件的底板上， 也能够起到缓冲外界震动的效果， 使该小型光 谱仪的在较大温度范围内具有稳定性能。

Claims

权 利 要 求
1、 一种温稳小型光谱仪， 包括底座 (2)以及光学元件， 其特征在于： 所述光学元件 固定于一个热膨胀系数低于所述底座 (2)的热膨胀系数的底板 (1)上， 且二者的热膨胀系 数相差一个数量级或一个数量级以上， 所述底板 (1)的一个局部 (11)刚性连接在所述底座 (2)上， 而底板 (1)的其余部分则与底座 (2)之间具有一间隙 (23)。
2、 如权利要求 1 所述的温稳小型光谱仪， 其特征在于： 所述的局部 (11)位于所述 底板 (1)的中间区域。
3、 如权利要求 2所述的温稳小型光谱仪， 其特征在于： 所述底板 (1)与所述底座 (2) 之间在所述间隙 (23)处通过黏胶 (3)软性连接。
4、 如权利要求 3所述的温稳小型光谱仪， 其特征在于： 所述底板 (1)的四周通过黏 胶 (3)和底座 (2)软性连接， 其余部分则保留所述的间隙 (23)。
5、 如权利要求 3所述的温稳小型光谱仪， 其特征在于： 所述底板 (1)仅在其四周选 择数点通过黏胶 (3)和所述底座 (2)软性连接， 其余部分则保留所述的间隙 (23)。
6、 如权利要求 1至 5中任一权利要求所述的温稳小型光谱仪， 其特征在于： 所述 底座 (2)的中间具有一向着底板 (1)的突起 (21)， 所述突起 (21)与底板 (1)粘结固定或者通过 紧固件 (22)固定从而形成所述的刚性连接。
7、 如权利要求 1至 5中任一权利要求所述的温稳小型光谱仪， 其特征在于： 所述 底板 (1)的中部设有一通孔 (12)，所述底座上具有一可伸入该通孔 (12)内的凸出部 (24),— 紧固件 (22)穿过通孔 (12)并固定在凸出部 (24)上， 从而将所述底板 (1)与底座 (2)在该处刚 性连接。
8、 如权利要求 1至 5中任一权利要求所述的温稳小型光谱仪， 其特征在于： 所述 底座 (2)的热膨胀系数为 1(T5/°C数量级， 而所述底板 (1)的热膨胀系数为 10—6/°C数量级。
9、 如权利要求 1至 5中任一权利要求所述的温稳小型光谱仪， 其特征在于： 所述 光学元件的热膨胀系数的数量级与所述底板的热膨胀系数的数量级相同或更低。
PCT/CN2013/000483 2013-04-08 2013-04-27 温稳小型光谱仪 WO2014166015A1 (zh)

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Citations (4)

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Publication number Priority date Publication date Assignee Title
CN1762162A (zh) * 2003-04-03 2006-04-19 汤姆森许可公司 用于使光学器件与热膨胀隔离的设备和方法
CN1940609A (zh) * 2005-09-30 2007-04-04 优迪那半导体有限公司 光学模块
JP2010256670A (ja) * 2009-04-27 2010-11-11 Konica Minolta Sensing Inc 回折格子およびそれを用いる分光ユニット、分光計ならびに回折格子の作成方法
CN202305014U (zh) * 2011-07-21 2012-07-04 中国科学院上海技术物理研究所 低温红外干涉仪

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1762162A (zh) * 2003-04-03 2006-04-19 汤姆森许可公司 用于使光学器件与热膨胀隔离的设备和方法
CN1940609A (zh) * 2005-09-30 2007-04-04 优迪那半导体有限公司 光学模块
JP2010256670A (ja) * 2009-04-27 2010-11-11 Konica Minolta Sensing Inc 回折格子およびそれを用いる分光ユニット、分光計ならびに回折格子の作成方法
CN202305014U (zh) * 2011-07-21 2012-07-04 中国科学院上海技术物理研究所 低温红外干涉仪

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