WO2014156447A1 - 表面被覆窒化硼素焼結体工具 - Google Patents
表面被覆窒化硼素焼結体工具 Download PDFInfo
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- WO2014156447A1 WO2014156447A1 PCT/JP2014/054685 JP2014054685W WO2014156447A1 WO 2014156447 A1 WO2014156447 A1 WO 2014156447A1 JP 2014054685 W JP2014054685 W JP 2014054685W WO 2014156447 A1 WO2014156447 A1 WO 2014156447A1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2226/00—Materials of tools or workpieces not comprising a metal
- B23C2226/12—Boron nitride
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23C2228/10—Coating
Definitions
- the present invention relates to a surface-coated boron nitride sintered body tool in which at least a cutting edge portion includes a cubic boron nitride sintered body and a coating film formed on the surface of the cubic boron nitride sintered body.
- a tool in which the surface of a cubic boron nitride sintered body is coated with a coating film such as a ceramic is used as a cutting tool for cutting hardened steel in order to exert excellent wear resistance.
- a coating film such as a ceramic
- Patent Document 1 WO 2010/150335 (Patent Document 1) and WO 2012/005275 (Patent Document 2) have specified the surface of the cubic boron nitride sintered body.
- the wear resistance is improved by using a tool in which the surface of a substrate made of cemented carbide is coated with a multilayer of a ceramic composition as a cutting tool for steel processing.
- a tool in which the surface of a substrate made of cemented carbide is coated with a multilayer of a ceramic composition as a cutting tool for steel processing.
- the wear resistance is improved. It was not possible.
- the present invention has been made in view of such a situation, and the object of the present invention is to process hardened steel in an environment with low equipment rigidity or work rigidity especially in processing hardened steel etc.
- boundary wear at the front cutting edge of a tool at least the cutting edge portion of which includes a base material consisting of a cubic boron nitride sintered body is suppressed, and the surface roughness of the work material is surface-coated boron nitride
- the object of the present invention is to improve tool performance also in high precision machining which is a life judgment standard of a sintered body tool.
- this inventor examined in detail the situation of wear of a tool which occurs when processing hardened steel.
- boundary wear occurs at the boundary of the front cutting edge which is one end of the wear portion, and this boundary wear has the greatest effect on the tool life. It turned out that it is giving.
- the contact portion with the work material minutely vibrates, so that a micro crack is generated in the coating layer of the tool. It was found that boundary wear progresses with chipping at the boundary of the front cutting edge.
- the present inventors obtained further finding that it is most effective to laminate a layer of a specific composition in a specific lamination mode in order to suppress this boundary wear.
- the present invention has been completed by further studies based on this finding.
- the surface-coated boron nitride sintered body tool of the present invention includes at least a cutting edge portion of a cubic boron nitride sintered body and a covering layer formed on the surface of the cubic boron nitride sintered body.
- the cubic boron nitride sintered body contains 30% by volume or more and 80% by volume or less of cubic boron nitride, and nitrides, carbides, and nitrides of the group 4 element, the group 5 element and the group 6 element of the periodic table of elements.
- a bonding phase containing at least one compound selected from the group consisting of oxides, oxides and solid solutions thereof, an aluminum compound and an unavoidable impurity.
- the covering layer includes an A layer and a B layer.
- the A layer contains one or more elements of MLa za1 (where M represents a group 4 element, a group 5 element and a group 6 element of the periodic table of elements, Al and Si, and La represents one of B, C, N and O). (See above), and za1 is 0.85 or more and 1.0 or less.
- the B layer is formed by alternately laminating one or more two or more thin film layers having different compositions. The thickness of each of the thin film layers is greater than 30 nm and less than 200 nm.
- the B1 thin film layer which is one type of thin film layer, is formed by alternately laminating one or more two or more compound layers having different compositions.
- the thickness of each of the compound layers is 0.5 nm or more and less than 30 nm.
- the B1a compound layer which is one of the compound layers is ( Ti1-xb1-yb1Si xb1 M1 yb1 ) (C1 - zb1Nzb1 ) (M1 is a fourth element in the periodic table of elements excluding Ti, fifth Xb1 represents 0.01 or more and 0.25 or less, yb1 is 0 or more and 0.7 or less, and zb1 is 0.4 or more and 1 or less. It consists of.
- a B1b compound layer which is a kind of compound layer and is different from the B1a compound layer is (Al 1-xb 2 M 2 xb 2) (C 1-zb 2 N zb 2) (M 2 is an element of Group 4 of the periodic table of elements, 5 And xb2 is 0.2 or more and 0.77 or less, and zb2 is 0.4 or more and 1 or less.
- a B2 thin film layer which is a kind of thin film layer and is different from the B1 thin film layer is (Al 1 -xb 3 M 3 x b 3 ) (C 1 -z b 3 N zb 3 ) (M 3 is a 4th element of the periodic table of elements, 5th And xb3 is 0.2 or more and 0.77 or less, and zb3 is 0.4 or more and 1 or less.
- the thickness of the A layer is 0.2 ⁇ m or more and 10 ⁇ m or less.
- the thickness of the B layer is 0.06 ⁇ m or more and 5 ⁇ m or less.
- the total thickness of the coating layer is 0.26 ⁇ m or more and 15 ⁇ m or less.
- the tool performance can be improved also in high precision machining in which the surface roughness of the material is used as a criterion for determining the life of the surface-coated boron nitride sintered body tool.
- At least the cutting edge portion of the surface-coated boron nitride sintered body tool according to the present invention is a cubic boron nitride sintered body (hereinafter referred to as "cBN sintered body”.
- CBN cubic boron nitride sintered body
- “CBN” is an abbreviation of "cubic Boron Nitride”.
- the covering layer formed on the surface of the cBN sintered body is an abbreviation of "cubic Boron Nitride”.
- the surface-coated boron nitride sintered body tool having such a basic configuration can be used particularly effectively in machining (for example, cutting) of a sintered alloy or hard-to-cut cast iron or in processing hardened steel, and further, It can be used suitably also in various processings of general metals other than.
- the cBN sintered body constitutes the base material of the surface-coated boron nitride sintered body tool of the cutting edge portion of the surface-coated boron nitride sintered body tool, and 30% by volume or more and 80% by volume or less of cubic boron nitride (hereinafter referred to as “cBN Further includes the bonding phase.
- the binder phase is selected from the group consisting of nitrides, carbides, borides, oxides and solid solutions thereof of Group 4 element, Group 5 element and Group 6 element of the periodic table of elements.
- the cBN comprises at least one compound, an aluminum compound and an unavoidable impurity, and the cBNs are bonded to each other.
- the cBN sintered body contains 30% by volume or more of cBN, the decrease in the wear resistance of the base material of the surface-coated boron nitride sintered body tool can be prevented.
- the cBN sintered body contains 80% by volume or less of cBN, cBN can be dispersed in the cBN sintered body, so that the bonding strength between cBNs in the bonding phase can be secured.
- the cBN content volume ratio is determined according to the following method. The cBN sintered body is mirror-polished, and a backscattered electron image of the cBN sintered body structure in an arbitrary region is photographed at 2000 ⁇ with an electron microscope.
- cBN particles particles composed of cBN
- the binder phase is gray regions or white regions.
- the cBN sintered body region and the binder phase region are binarized by image processing to determine the occupied area of the cBN particles.
- the volume fraction of cBN can be determined.
- the cBN sintered body contains 50% by volume or more and 65% by volume or less of cBN. If the cBN sintered body contains 50% by volume or more of cBN, it is possible to provide a base material of a surface-coated boron nitride sintered body tool excellent in the balance between wear resistance and fracture resistance. In addition, when the cBN sintered body contains 65% by volume or less of cBN, the bonding strength between cBN in the binder phase can be enhanced.
- the cBN particles are projected to the coating layer side more than the binder phase.
- the adhesiveness of cBN sintered compact and a coating layer can be improved.
- the step between the cBN particles and the binder phase is 0.05 ⁇ m or more and 1.0 ⁇ m or less. If this level
- step difference is 0.1 micrometer or more, an anchor effect can be acquired effectively. Moreover, if this level
- the above-mentioned level difference is measured according to the same method as the measurement method such as the total thickness of the covering layer described later.
- the volume content of cBN in the cBN sintered body is such that it increases from the interface between the cBN sintered body and the coating layer toward the inside of the cBN sintered body.
- the volume content of the binder phase is higher than the volume content of cBN, so the adhesion between the cBN sintered body and the coating layer can be enhanced.
- the volume fraction of cBN is higher than the volume fraction of binder phase inside the cBN sintered body, the fracture resistance of the cBN sintered body can be improved.
- the volume content of cBN is 40% by volume on the interface side with the coating layer (area separated from 0 ⁇ m to 20 ⁇ m from the interface between the cBN sintered body and the coating layer toward the inside of the cBN sintered body) And 60% by volume in the vicinity of the center in the thickness direction of the cBN sintered body (a region separated from the interface between the cBN sintered body and the coating layer toward the interior of the cBN sintered body by more than 20 ⁇ m and not more than 100 ⁇ m).
- the particle diameter of the cBN particles contained in the cBN sintered body is such that the particle diameter increases from the interface between the cBN sintered body and the coating layer toward the inside of the cBN sintered body.
- the particle diameter of the cBN particles is small, so that the adhesion between the cBN sintered body and the coating layer can be enhanced.
- the particle size of the cBN particles is large inside the cBN sintered body, the toughness can be enhanced.
- the particle diameter of cBN particles is 0.1 ⁇ m or more and 1 ⁇ m or less in a region away from 0 ⁇ m to 20 ⁇ m from the interface between the cBN sintered body and the coating layer toward the inside of the cBN sintered body It is 2 micrometers or more and 10 micrometers or less in the area
- the particle size of cBN particles is determined according to the following method. The diameter of the circle circumscribed to the cBN particles is measured in the backscattered electron image of the cBN sintered body structure obtained when determining the cBN content volume ratio, and the measured diameter is taken as the particle diameter of the cBN particles.
- the cBN sintered body may be provided in the cutting edge portion of the surface-coated boron nitride sintered body tool. Therefore, the base of the surface-coated boron nitride sintered body tool includes the cutting edge portion made of the cBN sintered body and the base body made of a material different from the cBN sintered body (for example, cemented carbide). It is also good.
- the cutting edge portion made of the cBN sintered body is preferably adhered to the base body through the brazing material or the like, and the material of the brazing material may be selected in consideration of the bonding strength or the melting point. it can.
- the cBN sintered body may constitute the entire base material of the surface-coated boron nitride sintered body tool.
- the covering layer includes an A layer and a B layer.
- the covering layer of the present invention may contain other layers in addition to the layer A and the layer B as long as the layer A and the layer B are included. Examples of such other layers include, but are not limited to, for example, the C layer provided between the A layer and the B layer or the D layer which is the lowermost layer as described later. .
- the thickness of the covering layer is 0.26 ⁇ m or more and 15 ⁇ m or less. If the thickness of the coating layer is 0.26 ⁇ m or more, it is possible to prevent the decrease in the wear resistance of the surface-coated boron nitride sintered body tool due to the thin thickness of the coating layer. If the thickness of the coating layer is 15 ⁇ m or less, the chipping resistance of the coating layer at the initial stage of cutting can be enhanced. Preferably, the thickness of the coating layer is 1.0 ⁇ m or more and 4.0 ⁇ m or less.
- the total thickness of the coating layer and the thickness and number of layers of each layer described later both cut the surface-coated boron nitride sintered body tool, and the cross section thereof is taken by SEM (scanning electron microscope) or TEM It is obtained by observation using a (transmission electron microscope).
- the composition of each layer as described below constituting the coating layer is measured using an SEM or TEM attached EDX analyzer (energy dispersive X-ray analyzer).
- the coating layer may be provided only on the cutting edge portion of the surface-coated boron nitride sintered body tool, but the entire surface of the base of the surface-coated boron nitride sintered body tool may be coated or cut It may not be provided in a part of a portion different from the blade portion. In addition, in a portion different from the cutting edge portion, the laminated configuration of a part of the covering layer may be partially different.
- the A layer contains one or more elements of MLa za1 (where M represents a group 4 element, a group 5 element and a group 6 element of the periodic table of elements, Al and Si, and La represents one of B, C, N and O). (See above), and za1 is 0.85 or more and 1.0 or less. Thereby, the A layer wears smoothly. In other words, the layer A wears without peeling, cracking or chipping. Therefore, crater wear resistance, flank wear resistance, etc. of the surface-coated boron nitride sintered body tool can be enhanced.
- a layer (Ti 1-xa Ma xa ) (C 1-za2 N za2) (Ma fourth group elements of the periodic table of elements other than Ti, group 5 element and a group 6 element, Al And one or more kinds of Si, xa is 0 or more and 0.7 or less, and za2 is 0 or more and 1 or less).
- the A layer contains Ti, it is possible to further prevent peeling, cracking or chipping of the A layer at the time of wear. More preferably, the composition xa of Ma is 0 or more and 0.3 or less. Thereby, it is possible to further prevent peeling, cracking or chipping of the layer A at the time of wear.
- the layer A is composed of (Ti 1-xa (1) -xa (2) Ma (1) xa (1) Ma (2) xa (2 ) (C 1-za 2 N za 2) , xa It is preferable that the sum of (1) and xa (2) satisfy the above range. This is also true for the B, C and D layers shown below.
- the composition of N changes in a step-like or inclined manner from the cBN sintered body side toward the surface side of the A layer.
- the composition of N is large on the cBN sintered body side of the A layer, chipping resistance and peeling resistance can be enhanced.
- the composition of N is small on the surface side of the layer A, it is possible to further prevent the peeling, cracking, chipping and the like of the layer A at the time of wear.
- composition of N changes stepwise from the cBN sintered body side to the surface side of the A layer
- composition of N is discontinuous from the cBN sintered body side to the surface side of the A layer It means decreasing or increasing, for example, a configuration obtained by laminating two or more layers having different compositions of N from one another.
- composition of N changes in a sloping shape from the cBN sintered body side to the surface side of the A layer means that the composition of N continuously decreases from the cBN sintered body side to the surface side of the A layer or For example, it is a configuration obtained by continuously changing and forming the flow ratio of the N source gas and the C source gas.
- the A layer has a region having a higher composition of C than the cBN sintered body side on the surface side of the A layer. Also by this, chipping resistance and peeling resistance can be enhanced on the cBN sintered body side of layer A, and on the surface side of layer A, peeling, cracking, chipping, etc. of layer A at the time of wear can be further prevented. Can.
- the cBN sintered body side of the A layer is separated from the surface of the A layer located closest to the cBN sintered body toward the inside of the A layer by 0 ⁇ m or more and 1/2 times or less the thickness of the A layer It means the narrower one of the region and the region separated by 0 ⁇ m or more and 0.1 ⁇ m or less from the surface of the A layer closest to the cBN sintered body toward the inside of the A layer.
- the surface side of A layer means the opposite side to the cBN sintered body side of A layer, and means the part different from the cBN sintered body side of A layer.
- the thickness of the A layer is 0.2 ⁇ m or more and 10 ⁇ m or less. If the thickness of the A layer is 0.2 ⁇ m or more, it is possible to provide a surface-coated boron nitride sintered body tool excellent in crater wear resistance, flank wear resistance, and the like. On the other hand, if the thickness of the layer A exceeds 10 ⁇ m, it may be difficult to further improve the crater wear resistance or flank wear resistance of the surface-coated boron nitride sintered body tool.
- the A layer is provided on the surface side of the surface-coated boron nitride sintered body tool than the B layer. This makes it possible to wear layer A smoothly and prevent the occurrence of cracks. Moreover, even when a crack occurs, the B layer can prevent the propagation of the generated crack to the base material side.
- the B layer is formed by alternately laminating one or more two or more thin film layers having different compositions.
- the B layer of the present invention includes the B1 thin film layer and the B2 thin film layer. As long as it contains B1 thin film layer and B2 thin film layer, other layers may be included.
- the thickness of the B layer is 0.06 ⁇ m or more and 5 ⁇ m or less.
- the average value of the Si composition in the entire B layer is 0.003 or more and 0.1 or less.
- the average value of the Si composition in the entire B layer is more preferably 0.005 or more and 0.07 or less, and still more preferably 0.007 or more and 0.05 or less.
- the B1 thin film layer is formed by alternately laminating one or more two or more types of compound layers having different compositions.
- the B1 thin film layer of the present invention comprises the B1a compound layer and the B1b compound layer.
- other layers may be included as long as The thickness of the B1 thin film layer is more than 30 nm and less than 200 nm.
- B1a compound layer (Ti 1-xb1-yb1 Si xb1 M1 yb1) (C 1-zb1 N zb1) (M1 is a Group 4 element of the periodic table of elements other than Ti, group 5 element and a group 6 element And xb1 is 0.01 or more and 0.25 or less, yb1 is 0 or more and 0.7 or less, and zb1 is 0.4 or more and 1 or less).
- the thickness of the B1a compound layer is 0.5 nm or more and less than 30 nm.
- B1b compound layer one or more (Al 1-xb2 M2 xb2) (C 1-zb2 N zb2) (M2 is an element of Group 4 of the Periodic Table of the Elements, group 5 element and a group 6 element and Si Xb2 is 0.2 or more and 0.77 or less, and zb2 is 0.4 or more and 1 or less.
- M2 preferably represents at least one of Ti and Cr.
- the composition xb2 of M2 is preferably 0.25 or more and 0.5 or less, and more preferably 0.25 or more and 0.4 or less.
- the thickness of the B1b compound layer is 0.5 nm or more and less than 30 nm.
- B2 thin layer one or more (Al 1-xb3 M3 xb3) (C 1-zb3 N zb3) (M3 is a Group 4 element of the periodic table of elements, group 5 element and a group 6 element and Si And xb3 is 0.2 or more and 0.77 or less, and zb3 is 0.4 or more and 1 or less.
- M3 preferably represents at least one of Ti and Cr, and more preferably represents the same element as M2.
- the composition xb3 of M3 is preferably 0.25 or more and 0.5 or less, more preferably 0.25 or more and 0.4 or less, and still more preferably the same value as the composition xb2 of M2.
- the thickness of the B2 thin film layer is more than 30 nm and less than 200 nm.
- t2 / t1 which is the ratio of the average thickness t1 of the B1 thin film layer to the average thickness t2 of the B2 thin film layer, satisfies 0.5 ⁇ t2 / t1 ⁇ 10.0.
- the boundary wear resistance of the surface-coated boron nitride sintered body tool and the like for example, when the hardened steel is processed in an environment where the equipment rigidity or workpiece rigidity is low
- t2 / t1 satisfies 0.7 ⁇ t2 / t1 ⁇ 5.0.
- the boundary wear resistance of the surface-coated boron nitride sintered body tool and the like (for example, when the hardened steel is processed in an environment where the equipment rigidity or workpiece rigidity is low), the surface-coated boron nitride sintered body tool Boundary wear resistance, etc.) can be further improved. Accordingly, it is possible to provide a surface-coated boron nitride sintered body tool having excellent wear resistance against repeated impacts or vibrations. More preferably, t2 / t1 satisfies 1.1 ⁇ t2 / t1 ⁇ 4.5.
- the layer A when the layer A is provided on the surface side of the layer B, t2 / t1 satisfies 1.1 ⁇ t2 / t1 ⁇ 5.0 on the cBN sintered body side, and on the layer A side It becomes smaller as it goes to the side of layer A, and 0.7 ⁇ t2 / t1 ⁇ 2 is satisfied.
- the A layer side of the B layer means the B1 thin film layer and the B2 thin film layer located closest to the A layer.
- the cBN sintered body side of the B layer means the B1 thin film layer and the B2 thin film layer located closest to the cBN sintered body.
- the covering layer further includes a C layer provided between the A layer and the B layer, and the C layer is a McLc zc (Mc is a Group 4 element, a Group 5 element and the Periodic Table of the Elements)
- Lc represents one or more of a group 6 element, Al and Si
- Lc represents one or more of B, C, N and O
- zc is 0 or more and 0.85 or less.
- the thickness of the C layer is 0.005 ⁇ m or more and 0.5 ⁇ m or less.
- the thickness of the C layer is 0.005 ⁇ m or more, the effect obtained by providing the C layer can be sufficiently obtained. If the thickness of the C layer is 0.5 ⁇ m or less, the provision of the C layer can prevent the thickness of the covering layer from becoming too large. More preferably, the thickness of the C layer is 0.01 ⁇ m or more and 0.2 ⁇ m or less.
- the composition zc of Lc is greater than 0 and less than 0.7. If the composition zc of Lc is larger than 0, the heat resistance and the chemical abrasion resistance of the C layer can be enhanced, and thus the C layer effectively stops the propagation of the crack generated in the A layer to the substrate side. be able to. More preferably, the composition zc of Lc is 0.2 or more and 0.5 or less.
- the C layer contains at least one or more of the elements constituting the A layer and the B layer. If the C layer contains at least one or more of the elements constituting the A layer, the adhesion between the A layer and the C layer can be enhanced. If the C layer contains at least one or more of the elements constituting the B layer, the adhesion between the B layer and the C layer can be enhanced. More preferably, the C layer contains at least one or more of the elements constituting the portion located on the C layer side of each of the A layer and the B layer.
- the covering layer further includes a D layer provided between the substrate and the B layer, and the D layer is MdLd zd (where Md is a Group 4 element, a Group 5 element and the periodic table of the elements).
- Ld represents one or more of a group 6 element, Al and Si
- Ld represents one or more of B, C, N and O
- zd is 0.85 or more and 1.0 or less.
- Such a D layer is excellent in adhesion to the cBN sintered body. Therefore, if the covering layer further includes the D layer, the adhesion between the cBN sintered body and the covering layer can be enhanced. More preferably, Ld is N.
- D layer is (Al 1-xd Md2 xd) Ld zd
- Md2 is a Group 4 element of the Periodic Table of the Elements, represents one or more group 5 element and a group 6 element and Si, xd Is not less than 0.25 and not more than 0.45. If the D layer contains Al, the adhesion between the cBN sintered body and the coating layer can be further enhanced. More preferably, Md2 is at least one or more of Ti, Cr and V.
- the thickness of the D layer is 0.05 ⁇ m or more and 1 ⁇ m or less. If the thickness of the D layer is 0.05 ⁇ m or more, the effect obtained by providing the D layer can be sufficiently obtained. If the thickness of the D layer is 1 ⁇ m or less, the provision of the D layer can prevent the thickness of the covering layer from becoming too large. More preferably, the thickness of the D layer is 0.1 ⁇ m or more and 0.5 ⁇ m or less.
- ⁇ Method of manufacturing surface-coated boron nitride sintered body tool for example, a step of preparing a substrate having at least a cBN sintered body in a cutting edge portion, and a coating layer at least on the surface of the cBN sintered body And a forming step.
- the step of preparing the substrate preferably includes the step of forming the cBN sintered body, and the step of forming the cBN sintered body is sintering the mixture of the cBN particles and the raw material powder of the binder phase under high temperature and high pressure It is preferable to include the step of More preferably, the method of preparing the substrate further includes the step of bonding the cBN sintered body to a substrate body having a predetermined shape.
- the step of forming the covering layer preferably includes the step of forming the covering layer by an arc ion plating method (an ion plating method in which a solid material is evaporated using a vacuum arc discharge) or a sputtering method.
- the coating layer can be formed using a metal evaporation source containing a metal species that will constitute the coating layer and a reaction gas such as CH 4 , N 2 or O 2 .
- a reaction gas such as CH 4 , N 2 or O 2 .
- Known conditions can be adopted as the conditions for forming the covering layer.
- the coating layer is formed using a metal evaporation source containing a metal species that will constitute the coating layer, a reaction gas such as CH 4 , N 2 or O 2 , and a sputtering gas such as Ar, Kr or Xe. Can be formed.
- a metal evaporation source containing a metal species that will constitute the coating layer
- a reaction gas such as CH 4 , N 2 or O 2
- a sputtering gas such as Ar, Kr or Xe.
- Known conditions can be adopted as the conditions for forming the covering layer.
- FIG. 1 is a cross-sectional view showing an example of the configuration of a surface-coated boron nitride sintered body tool in the example.
- FIG. 2 is sectional drawing which shows an example of a structure of the principal part of the surface-coated boron nitride sintered compact tool in an Example.
- the resulting mixture was heat treated under vacuum at 1000 ° C. for 30 minutes.
- the compound obtained by the heat treatment was uniformly pulverized by ball milling using a cemented carbide ball medium having a diameter of 6 mm. Thereby, the raw material powder of the binding phase was obtained.
- a boron nitride ball media having a diameter of 3 mm is prepared by blending cBN particles having an average particle diameter of 1.5 ⁇ m and a raw material powder of a binder phase so that the cBN content in the cBN sintered body is 30% by volume.
- the mixture was uniformly mixed by a ball mill mixing method using The obtained mixed powder was laminated on a cemented carbide support plate and then filled in a capsule made of Mo. After that, it was sintered at a temperature of 1300 ° C. for 30 minutes at a pressure of 5.5 GPa using an ultrahigh pressure apparatus. Thus, a cBN sintered body A was obtained.
- a base body made of a cemented carbide material (equivalent to K10) which was CNGA 12048 in ISO standard and prepared was prepared.
- the cBN sintered body A shape: apex angle is 80 ° at the cutting edge (corner portion) of the prepared base body, and the thickness is 2 mm with an isosceles triangle having 2 mm on both sides sandwiching the apex angle. Of triangular prisms).
- a mouthpiece made of Ti-Zr-Cu was used for bonding.
- the outer peripheral surface, the upper surface, and the lower surface of the joined body were ground to form a negative land shape (negative land width is 150 ⁇ m, negative land angle is 25 °) on the cutting edge.
- the base material 3 in which the cutting edge portion is made of the cBN sintered body A was obtained.
- the obtained base material 3 was put into a film forming apparatus, vacuuming was performed, and after heating to 500 ° C., etching was performed using Ar ions. After that, Ar gas was exhausted from the inside of the film forming apparatus.
- the D layer 20 was formed on the substrate 3 in the film forming apparatus. Specifically, a D layer having a thickness of 0.2 ⁇ m was formed by vapor deposition under the conditions described below.
- Target 65 atomic percent of Al, 35 atomic percent of Cr Introduction gas: N 2 Deposition pressure: 4 Pa Arc discharge current: 120A
- Substrate bias voltage -50V Table rotation speed: 3 rpm.
- the B layer 30 was formed on the D layer 20 in the film forming apparatus. Specifically, first, the B1 thin film layer 31 having a total thickness of 50 nm was formed by vapor deposition under the conditions described below. At this time, the arc current of the targets B1a and B1b and the base material are set so that the thickness of the B1a compound layer 31A is 4 nm and the thickness of the B1b compound layer 31B is 6 nm. Adjusted with speed.
- Target B1a 90 atomic% of Ti, 3 atomic% of Si, 7 atomic% of Cr Target B1b: 65 atomic% of Al, introduced gas containing 35 atomic% of Cr: N 2 Deposition pressure: 3 Pa Substrate bias voltage: -50V.
- Target B2 introduced gas containing 65 atomic% of Al and 35 atomic% of Cr: N 2 Deposition pressure: 3 Pa Arc discharge current: 120A Substrate bias voltage: -75 V Table rotation speed: 3 rpm.
- the B1 thin film layers 31 and the B2 thin film layers 32 were alternately stacked, and six layers of each were formed.
- a B layer 30 having a total thickness of 1.02 ⁇ m was formed.
- the C layer 40 was formed on the B layer 30 in the film forming apparatus. Specifically, a C layer 40 having a thickness of 0.2 ⁇ m was formed by vapor deposition under the conditions shown below.
- Target Ti Introduction gas: Ar Deposition pressure: 2 Pa Arc discharge current: 150A Substrate bias voltage: -70 V Table rotation speed: 3 rpm.
- the A layer 50 was formed on the C layer 40 in the film forming apparatus. Specifically, an A layer having a thickness of 0.1 ⁇ m was formed by vapor deposition under the following conditions.
- Target containing 50 atomic% of Ti and 50 atomic% of Al.
- Introduction gas N 2 Deposition pressure: 4 Pa
- Arc discharge current 120A
- Substrate bias voltage -600V Table rotation speed: 3 rpm.
- the covering layer 10 in which the D layer 20, the B layer 30, the C layer 40, and the A layer 50 are sequentially laminated is formed on the base material 3, and thus, the sample 1 is manufactured. .
- Samples 2 to 7 were manufactured according to the method of manufacturing Sample 1 except that the thickness of the layer A was changed to values shown in Table 1.
- cBN sintering is performed according to the method for forming cBN sintered body A except that the cBN particles and the raw material powder of the binder phase are blended so that the cBN content in the cBN sintered body becomes the numerical value shown in Table 3. I got a body D.
- the obtained cBN sintered body D was used to form a base of sample 8 in accordance with the method of manufacturing a base of sample 1 above.
- D layer and B layer were formed in order.
- the A layer was formed without forming the C layer. Specifically, only N 2 was introduced between the start of the formation of the layer A and the thickness of the layer A to 1 ⁇ m, and the film formation pressure was 2 Pa. After that, N 2 was gradually decreased while CH 4 was gradually increased to form an A layer of 1 ⁇ m further. At this time, N 2 was gradually decreased while CH 4 was gradually increased until the composition became TiC 0.5 N 0.5 . After that, the A layer was formed to a further 0.5 ⁇ m without changing the supply amounts of CH 4 and N 2 respectively. Thus, sample 8 was manufactured.
- Samples 9 to 13 were manufactured according to the method of manufacturing sample 8 except that a C layer made of TiN 0.5 was formed.
- cBN sintering is performed according to the method for forming cBN sintered body A except that the cBN particles and the raw material powder of the binder phase are blended so that the cBN content in the cBN sintered body becomes the numerical value shown in Table 3. I got a body C.
- the substrates of Samples 14 to 19 were formed according to the method of manufacturing the substrate of Sample 1 above.
- the layer D and the layer B were sequentially formed according to the method of manufacturing the sample 1, and then the layer A was formed according to the method of manufacturing the sample 8 without forming the layer C.
- samples 14 to 19 were produced.
- cBN sintering is performed according to the method for forming cBN sintered body A except that the cBN particles and the raw material powder of the binder phase are blended so that the cBN content in the cBN sintered body becomes the numerical value shown in Table 3. I got a body B.
- the obtained cBN sintered body B was used to form a substrate of Samples 20 to 25 in accordance with the method for producing a substrate of Sample 1 above.
- cBN sintering is performed according to the method for forming cBN sintered body A except that the cBN particles and the raw material powder of the binder phase are blended so that the cBN content in the cBN sintered body becomes the numerical value shown in Table 3. I got a body E.
- the obtained cBN sintered body E was used to form a base of sample 26 in accordance with the method of manufacturing a base of sample 1 above.
- a cBN sintered body F was obtained according to the method for forming a cBN sintered body D except that cBN particles having an average particle diameter of 0.5 ⁇ m and a raw material powder of a binder phase were blended. Using the obtained cBN sintered body F, the substrates of Samples 31 to 35 were formed according to the method of manufacturing the substrate of Sample 1 above.
- a cBN sintered body G was obtained according to the method for forming a cBN sintered body D except that cBN particles having an average particle diameter of 3 ⁇ m and a raw material powder of a binder phase were blended. Using the obtained cBN sintered body G, the substrates of Samples 36 to 40 were formed according to the method for producing a substrate of Sample 1 above.
- the resulting mixture was heat treated under vacuum at 1000 ° C. for 30 minutes.
- the compound obtained by the heat treatment was uniformly pulverized by ball milling using a cemented carbide ball medium having a diameter of 6 mm. Thereby, the raw material powder of the binding phase was obtained.
- cBN sintered body H was obtained according to the method for forming cBN sintered body D described above.
- the substrates of Samples 41 to 45 were formed according to the method of manufacturing the substrate of Sample 1 above.
- the resulting mixture was heat treated under vacuum at 1000 ° C. for 30 minutes.
- the compound obtained by the heat treatment was uniformly pulverized by ball milling using a cemented carbide ball medium having a diameter of 6 mm. Thereby, the raw material powder of the binding phase was obtained.
- cBN sintered body I was obtained according to the method for forming cBN sintered body D described above.
- the obtained cBN sintered body I was used to form a base of sample 54 in accordance with the method of manufacturing a base of sample 1 above.
- the sample 55 was manufactured according to the manufacturing method of the said sample 1 except not having formed B layer, C layer, and D layer.
- sample 56 was manufactured according to the manufacturing method of the said sample 1 except not having formed A layer and C layer.
- the TiCN * 01 to TiCN * 05 in Table 1 are as shown in Table 4. Further, in Table 2, the number of layers * 21 is the sum of the number of layers of the B1a compound layer and the number of layers of the B1b compound layer, and the number of layers * 22 is the number of layers of the B1 thin film layer and the number of layers of the B2 thin film layer Is the sum of Further, in Table 2, the sintered body side * 31 means t2 / t1 on the cBN sintered body side of the B layer, the A layer side * 32 means t2 / t1 on the A layer side of the B layer, and the average * 33 Means t2 / t1 in the entire B layer. In the sample in which the sintered body side * 31 and the A layer side * 32 are blanks, t2 / t2 takes the same value (the value described in average * 33 ) on the cBN sintered body side and the A layer side.
- flank wear amount VB and surface roughness Rz Using the manufactured samples 1 to 56, cutting (cutting distance: 2 km) was performed according to the cutting conditions shown below. After that, the flank wear amount VB was measured using an optical microscope, and the surface roughness Rz of the surface of the workpiece was measured according to the JIS standard. The measurement results of the flank wear amount VB are shown in the "VB (mm)” column of Table 5, and the measurement results of the surface roughness Rz of the work material surface are shown in the "Rz ( ⁇ m)” column of Table 5. As the VB is smaller, the surface-coated boron nitride sintered body tool is excellent in flank wear resistance. The smaller the Rz, the better the tool performance in high precision machining using the surface roughness of the work material as the life judgment criterion of the surface-coated boron nitride sintered body tool.
- Samples 2 to 6, 8 to 13, 15 to 18, 21 to 24, 27 to 29, 32 to 34, 37 to 39, 42 to 44 and 46 to 54 have small VB and Rz of 1.1 ⁇ m or less. , The cutting distance was more than 8 km. Therefore, it was found that these samples are excellent in flank wear resistance, crater wear resistance and boundary wear resistance when hardened steel is machined or the like in an environment where the equipment rigidity or workpiece rigidity is low.
- sample 8 and sample 56 will be considered.
- the composition of the B layer, the thickness of the B layer, the composition of the D layer and the thickness of the D layer closely resemble each other in the sample 8 and the sample 56, the A layer is provided in the sample 8 On the other hand, the sample 56 is not provided.
- Rz was 1 ⁇ m or less and the cutting distance was 8.5 km or more
- VB was about twice as large as the sample 8 and Rz was twice or more than the sample 8 .
- sample 4 and sample 55 will be considered.
- the composition of the layer A and the thickness of the layer A closely resemble each other in the sample 4 and the sample 55, but the layer B is not provided in the sample 55 while it is provided in the sample 4.
- Rz is 0.8 ⁇ m or less and the cutting distance is 9 km or more, while in the sample 55, Rz is twice or more (3.0 ⁇ m) of the sample 4 and the cutting distance is 3 to 4 km It was a degree.
- the surface-coated boron nitride sintered body tool not provided with either A layer or B layer is used when processing hardened steel or the like in an environment where the equipment rigidity or work rigidity is low. It was found that the flank wear resistance, crater wear resistance and boundary wear resistance were not excellent. However, the surface-coated boron nitride sintered body tool having both the A layer and the B layer is surprisingly resistant to processing of hardened steel or the like in an environment where the equipment rigidity or work rigidity is low. The flank wear resistance, crater wear resistance and boundary wear resistance were all found to be excellent. This is the first finding by the present inventors.
- samples 1 to 7 the thicknesses of the A layers are different from each other.
- Rz was larger than 2.2 ⁇ m, and the cutting distance was about 4 km.
- Rz was 1 ⁇ m or less, and the cutting distance was 8 km or more.
- the thickness of the layer A is preferably 0.5 ⁇ m or more and 5 ⁇ m or less, and more preferably 1 ⁇ m or more and 5 ⁇ m or less.
- Samples 8 to 13 Although the thicknesses of the C layers were different from each other, Rz was 1 ⁇ m or less, and the cutting distance was 8.5 km or more. Further, in samples 9 to 11, Rz was 0.8 ⁇ m or less, and the cutting distance was about 9 km. From these things, the thickness of the C layer is preferably 0.005 ⁇ m or more and 0.5 ⁇ m or less, more preferably 0.005 ⁇ m or more and 0.2 ⁇ m or less, and 0.01 ⁇ m or more and 0.2 ⁇ m or less It turned out that it is even more preferable.
- samples 14 to 19 the compositions of the B1a compound layers are different from one another.
- Rz was larger than 2 ⁇ m, and the cutting distance was about 4 km.
- Rz was 1 ⁇ m or less, and the cutting distance was about 9 km. From these facts, if the Si composition of the B1a compound layer is 0.01 or more and 0.25 or less, surface coating nitriding can be performed when hardened steel is processed under an environment where the equipment rigidity or work rigidity is low. It was found that the flank wear resistance, crater wear resistance and boundary wear resistance of the boron sintered body tool were enhanced.
- the Ti composition of the B1a compound layer is preferably 0.7 or more and 0.9 or less, and more preferably 0.75 or more and 0.85 or less.
- the Si composition of the B1a compound layer is preferably 0.1 or more and 0.25 or less, and more preferably 0.15 or more and 0.25 or less.
- Samples 20 to 25 the thicknesses of the B1a compound layer and the B1b compound layer are different from each other.
- Rz was larger than 2.2 ⁇ m, and the cutting distance was about 3 to 4 km.
- Rz was 1.1 ⁇ m or less, and the cutting distance was 7 km or more. From these things, if each of the thickness of the B1a compound layer and the thickness of the B1b compound layer is 0.5 nm or more and less than 30 nm, processing of hardened steel or the like is performed in an environment with low equipment rigidity or work rigidity. In this case, it was found that the flank wear resistance, crater wear resistance and boundary wear resistance of the surface-coated boron nitride sintered body tool were enhanced.
- each of the thickness of the B1a compound layer and the thickness of the B1b compound layer is preferably 1 nm or more and 25 nm or less, more preferably 1 nm or more and 20 nm or less, and still more preferably 1 nm or more and 10 nm or less I also understood that.
- Samples 26 to 30 the compositions of the B1b compound layer and the B2 thin film layer are different from each other.
- Rz was 3 ⁇ m or more, and the cutting distance was about 3 km.
- Rz was 1.1 ⁇ m or less, and the cutting distance was 8 km or more.
- the Al composition of each of the B1b compound layer and the B2 thin film layer is preferably 0.5 or more and 0.75 or less, and more preferably 0.6 or more and 0.75 or less.
- Samples 31 to 35 In the samples 31 to 35, the thicknesses of the B1 thin film layers are different from each other. In Samples 31 and 35, Rz was greater than 2.2 ⁇ m, and the cutting distance was about 3 to 4 km. On the other hand, in the samples 32 to 34, Rz was 1.1 ⁇ m or less, and the cutting distance was 8 km or more. From these facts, if the thickness of the B1 thin film layer is more than 30 nm and less than 200 nm, the surface-coated boron nitride-fired sintered ceramic is processed in an environment where the equipment rigidity or work rigidity is low. It was found that the flank wear resistance, crater wear resistance and boundary wear resistance of the consolidated tool increased.
- the thickness of the B1 thin film layer is preferably 40 nm or more and 180 nm or less, and more preferably 40 nm or more and 150 nm or less.
- ⁇ Samples 36 to 40> In the samples 36 to 40, the thicknesses of the B2 thin film layers are different from each other. In the samples 36 and 40, Rz was larger than 2.2 ⁇ m, and the cutting distance was about 3 to 4 km. On the other hand, in Samples 37 to 39, Rz was 1 ⁇ m or less, and the cutting distance was 8 km or more. From these facts, if the thickness of the B2 thin film layer is greater than 30 nm and less than 200 nm, the surface-coated boron nitride-fired sintered ceramic is processed in an environment where the equipment rigidity or work rigidity is low. It was found that the flank wear resistance, crater wear resistance and boundary wear resistance of the consolidated tool increased.
- the thickness of the B2 thin film layer is preferably 40 nm or more and 180 nm or less, and more preferably 40 nm or more and 150 nm or less.
- the numbers of the B1 thin film layer and the B2 thin film layer are different from each other, so the thicknesses of the B layers are different from each other.
- Rz was 2.5 ⁇ m or more, and the cutting distance was about 3 km.
- Rz was about 1 ⁇ m, and the cutting distance was about 8 km. From these facts, if the thickness of the B layer is 0.06 ⁇ m or more and 5 ⁇ m or less, the surface-coated boron nitride sintered when the hardened steel is processed under the environment where the equipment rigidity or work rigidity is low. It has been found that the flank wear resistance, crater wear resistance and boundary wear resistance of the body tool are enhanced.
- the thickness of the B layer is preferably 0.1 ⁇ m or more and 5 ⁇ m or less, and more preferably 0.2 ⁇ m or more and 3 ⁇ m or less.
- Example 46 to 54 In the samples 46 to 54, although the compositions of the cBN sintered bodies were different from each other, Rz was 0.8 ⁇ m or less and the cutting distance was 8.5 km or more. From these facts, it was found that the volume content of cubic boron nitride in the cubic boron nitride sintered body is preferably 30% by volume or more and 85% by volume or less.
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Abstract
Description
本発明にかかる表面被覆窒化硼素焼結体工具の少なくとも切れ刃部分は、立方晶窒化硼素焼結体(以下では「cBN焼結体」と記す。「cBN」は「cubic Boron Nitride」の略語である。)と、cBN焼結体の表面上に形成された被覆層とを含む。このような基本的構成を有する表面被覆窒化硼素焼結体工具は、焼結合金や難削鋳鉄の機械加工(たとえば切削加工)または焼入鋼の加工において特に有効に用いることができる他、これら以外の一般的な金属の各種加工においても好適に用いることができる。
cBN焼結体は、表面被覆窒化硼素焼結体工具の切れ刃部分のうち当該工具の基材を構成するものであり、30体積%以上80体積%以下の立方晶窒化硼素(以下では「cBN」と記す)を含み、結合相をさらに含む。ここで、結合相は、元素の周期表の第4族元素、第5族元素および第6族元素の窒化物、炭化物、硼化物、酸化物ならびにこれらの固溶体からなる群の中から選択された少なくとも1種の化合物とアルミニウム化合物と不可避不純物とを含み、cBN同士を互いに結合する。cBN焼結体が30体積%以上のcBNを含んでいれば、表面被覆窒化硼素焼結体工具の基材の耐摩耗性の低下を防止できる。また、cBN焼結体が80体積%以下のcBNを含んでいれば、cBN焼結体においてcBNを分散させることができるので、結合相によるcBN同士の接合強度を確保することができる。本明細書では、cBNの含有体積率は次に示す方法にしたがって求められたものである。cBN焼結体を鏡面研磨し、任意の領域のcBN焼結体組織の反射電子像を電子顕微鏡にて2000倍で写真撮影する。このとき、cBNからなる粒子(以下では「cBN粒子」と記す。)は黒色領域となり、結合相は灰色領域または白色領域となる。撮影されたcBN焼結体組織の写真からcBN焼結体領域と結合相領域とを画像処理により2値化し、cBN粒子の占有面積を求める。求められたcBN粒子の占有面積を以下に示す式に代入すれば、cBNの含有体積率が求まる。
(cBNの含有体積率)=(cBN粒子の占有面積)÷(撮影されたcBN焼結体組織の面積)×100。
被覆層は、A層とB層とを含む。本発明の被覆層は、A層とB層とを含む限り、A層およびB層以外に他の層を含んでいても差し支えない。このような他の層としては、たとえば後述のようなA層とB層との間に設けられるC層または最下層であるD層などを挙げることができるが、これらのみに限られるものではない。
A層は、MLaza1(Mは元素の周期表の第4族元素、第5族元素および第6族元素、AlならびにSiの1種以上を表わし、LaはB、C、NおよびOの1種以上を表わし、za1は0.85以上1.0以下である)からなる。これにより、A層は、滑らかに摩耗する。別の言い方をすると、A層は、剥離、割れ、または、チッピングなどを伴うことなく摩耗する。よって、表面被覆窒化硼素焼結体工具の耐クレータ摩耗性または耐逃げ面摩耗性などを高めることができる。
B層は、組成の異なる2種以上の薄膜層が交互にそれぞれ1つ以上積層されてなる。以下では、B層として、B1薄膜層とB2薄膜層とが交互にそれぞれ1つ以上積層されて構成されたものを挙げるが、本発明のB層は、B1薄膜層とB2薄膜層とを含む限り、B1薄膜層およびB2薄膜層以外に他の層を含んでいても差し支えない。B層の厚さは、0.06μm以上5μm以下である。
(B層全体におけるSi組成の平均値)=[{(B層を構成する各層のSi組成)×(当該各層の厚さ)}の総和]÷(B層全体の厚さ)。
(B1薄膜層の平均厚さt1)=(B1薄膜層の厚さの合計)÷(B1薄膜層の層数)。
好ましくは、被覆層がA層とB層との間に設けられたC層をさらに含むことであり、C層がMcLczc(Mcは元素の周期表の第4族元素、第5族元素および第6族元素、AlならびにSiの1種以上を表わし、LcはB、C、NおよびOの1種以上を表わし、zcは0以上0.85以下である)からなることである。これにより、A層とB層との密着性を高めることができる。また、A層がB層よりも表面側に設けられている場合には、A層で発生したクラックの基材側への伝搬をC層で止めることができる。
好ましくは、被覆層が基材とB層との間に設けられたD層をさらに含むことであり、D層がMdLdzd(Mdは元素の周期表の第4族元素、第5族元素および第6族元素、AlならびにSiの1種以上を表わし、LdはB、C、NおよびOの1種以上を表わし、zdは0.85以上1.0以下である)からなることである。このようなD層はcBN焼結体との密着性に優れる。よって、被覆層がD層をさらに含むのであれば、cBN焼結体と被覆層との密着性を高めることができる。より好ましくは、LdがNであることである。
本発明にかかる表面被覆窒化硼素焼結体工具の製造方法は、たとえば、cBN焼結体を少なくとも切れ刃部分に有する基材を準備する工程と、少なくともcBN焼結体の表面上に被覆層を形成する工程とを含む。基材を準備する工程は、cBN焼結体を形成する工程を含むことが好ましく、cBN焼結体を形成する工程は、cBN粒子と結合相の原料粉末との混合物を高温高圧下で焼結させる工程を含むことが好ましい。基材を準備する方法は、所定の形状を有する基材本体にcBN焼結体を接合させる工程をさらに含むことがより好ましい。
図1は、実施例における表面被覆窒化硼素焼結体工具の構成の一例を示す断面図である。図2は、実施例における表面被覆窒化硼素焼結体工具の要部の構成の一例を示す断面図である。
<cBN焼結体Aの形成>
まず、原子比でTi:N=1:0.6となるように、平均粒子径が1μmのTiN粉末と平均粒子径が3μmのTi粉末とを混合した。得られた混合物を真空中で1200℃で30分間、熱処理してから、粉砕した。これにより、TiN0.6からなる金属間化合物粉末を得た。
形状がISO規格のCNGA12048であり、超硬合金材料(K10相当)からなる基材本体を準備した。準備した基材本体の刃先(コーナ部分)に上記cBN焼結体A(形状:頂角が80°であり当該頂角を挟む両辺がそれぞれ2mmである二等辺三角形を底面とし、厚さが2mmの三角柱状のもの)を接合した。接合には、Ti-Zr-Cuからなる口ウ材を用いた。接合体の外周面、上面および下面を研削し、刃先にネガランド形状(ネガランド幅が150μmであり、ネガランド角が25°)を形成した。このようにして、切れ刃部分がcBN焼結体Aからなる基材3を得た。
<D層の形成>
上記成膜装置内でD層20を基材3上に形成した。具体的には、以下に示す条件で、厚さが0.2μmであるD層を蒸着により形成した。
ターゲット:Alを65原子%、Crを35原子%含む
導入ガス:N2
成膜圧力:4Pa
アーク放電電流:120A
基板バイアス電圧:-50V
テーブル回転速度:3rpm。
上記成膜装置内でB層30をD層20上に形成した。具体的には、まず、以下に示す条件で、全体の厚さが50nmであるB1薄膜層31を蒸着により形成した。このとき、B1a化合物層31Aの厚さが4nmとなるように、且つ、B1b化合物層31Bの厚さが6nmとなるように、ターゲットB1a、B1bのアーク電流と基材をセットした回転テーブルの回転速度とを調整した。
ターゲットB1a:Tiを90原子%、Siを3原子%、Crを7原子%含む
ターゲットB1b:Alを65原子%、Crを35原子%含む
導入ガス:N2
成膜圧力:3Pa
基板バイアス電圧:-50V。
ターゲットB2:Alを65原子%、Crを35原子%含む
導入ガス:N2
成膜圧力:3Pa
アーク放電電流:120A
基板バイアス電圧:-75V
テーブル回転速度:3rpm。
上記成膜装置内でC層40をB層30上に形成した。具体的には、以下に示す条件で、厚さが0.2μmであるC層40を蒸着により形成した。
ターゲット:Ti
導入ガス:Ar
成膜圧力:2Pa
アーク放電電流:150A
基板バイアス電圧:-70V
テーブル回転速度:3rpm。
上記成膜装置内でA層50をC層40上に形成した。具体的には、以下に示す条件で、厚さが0.1μmであるA層を蒸着により形成した。
ターゲット:Ti50原子%、Al50原子%を含む。
導入ガス:N2
成膜圧力:4Pa
アーク放電電流:120A
基板バイアス電圧:-600V
テーブル回転速度:3rpm。
A層の厚さを表1に示す数値となるように変更したことを除いては上記試料1の製造方法にしたがって、試料2~7を製造した。
cBN焼結体におけるcBN含有率が表3に示す数値となるようにcBN粒子と結合相の原料粉末とを配合したことを除いては上記cBN焼結体Aの形成方法にしたがって、cBN焼結体Dを得た。得られたcBN焼結体Dを用いて、上記試料1の基材の製造方法にしたがって、試料8の基材を形成した。
TiN0.5からなるC層を形成したことを除いては上記試料8の製造方法にしたがって、試料9~13を製造した。
cBN焼結体におけるcBN含有率が表3に示す数値となるようにcBN粒子と結合相の原料粉末とを配合したことを除いては上記cBN焼結体Aの形成方法にしたがって、cBN焼結体Cを得た。得られたcBN焼結体Cを用いて、上記試料1の基材の製造方法にしたがって、試料14~19の基材を形成した。
cBN焼結体におけるcBN含有率が表3に示す数値となるようにcBN粒子と結合相の原料粉末とを配合したことを除いては上記cBN焼結体Aの形成方法にしたがって、cBN焼結体Bを得た。得られたcBN焼結体Bを用いて、上記試料1の基材の製造方法にしたがって、試料20~25の基材を形成した。
cBN焼結体におけるcBN含有率が表3に示す数値となるようにcBN粒子と結合相の原料粉末とを配合したことを除いては上記cBN焼結体Aの形成方法にしたがって、cBN焼結体Eを得た。得られたcBN焼結体Eを用いて、上記試料1の基材の製造方法にしたがって、試料26の基材を形成した。
平均粒径が0.5μmのcBN粒子と結合相の原料粉末とを配合したことを除いては上記cBN焼結体Dの形成方法にしたがって、cBN焼結体Fを得た。得られたcBN焼結体Fを用いて、上記試料1の基材の製造方法にしたがって、試料31~35の基材を形成した。
平均粒径が3μmのcBN粒子と結合相の原料粉末とを配合したことを除いては上記cBN焼結体Dの形成方法にしたがって、cBN焼結体Gを得た。得られたcBN焼結体Gを用いて、上記試料1の基材の製造方法にしたがって、試料36~40の基材を形成した。
まず、原子比でTi:C:N=1:0.3:0.3となるように、平均粒子径が1μmのTiCN粉末と平均粒子径が3μmのTi粉末とを混合した。得られた混合物を真空中で1200℃で30分間、熱処理してから、粉砕した。これにより、TiC0.3N0.3からなる金属間化合物粉末を得た。
表1に示すcBN焼結体を用いて、上記試料1の基材の製造方法にしたがって、試料46~53の基材を形成した。次に、上記試料1、8の製造方法にしたがって、D層、B層およびA層を順に形成した。これにより、試料46~53を製造した。
まず、原子比でTi:C=1:0.6となるように、平均粒子径が1μmのTiC粉末と平均粒子径が3μmのTi粉末とを混合した。得られた混合物を真空中で1200℃で30分間、熱処理してから、粉砕した。これにより、TiC0.6からなる金属間化合物粉末を得た。
B層、C層およびD層を形成しなかったことを除いては上記試料1の製造方法にしたがって、試料55を製造した。
A層およびC層を形成しなかったことを除いては上記試料1の製造方法にしたがって、試料56を製造した。
製造された試料1~56を用いて、以下に示す切削条件にしたがって切削加工(切削距離:2km)を行った。そののち、光学顕微鏡を用いて逃げ面摩耗量VBを測定し、JIS規格にしたがって被削材表面の面粗度Rzを測定した。逃げ面摩耗量VBの測定結果を表5の「VB(mm)」の欄に示し、被削材表面の面粗度Rzの測定結果を表5の「Rz(μm)」の欄に示す。VBが小さいほど、表面被覆窒化硼素焼結体工具は耐逃げ面摩耗性に優れる。Rzが小さいほど、被削材の面粗度を表面被覆窒化硼素焼結体工具の寿命判定基準とする高精度加工において工具性能が優れる。
被削材:高硬度鋼(SCM415H/HRC60)(外径φ30mm、長手切削長さ10mm)
工具:CNGA120408ワイパー
切削速度:150mm/min
送り:f=0.2mm/rev
切り込み:ap=0.2mm
切削油:エマルジョン(日本フルードシステム製造の商品名「システムカット96」)を20倍希釈したもの(wet状態)。
製造された試料1~56を用いて、上記切削条件にしたがって切削加工を行った。そして、表面粗さ計を用いて被削材の面粗度Rzを測定し、被削材の面粗度Rzが3.2μmとなった時点の切削距離を測定した。その結果を表5の「切削距離(km)」の欄に示す。切削距離が長いほど、表面被覆窒化硼素焼結体工具は耐逃げ面摩耗性、耐クレータ摩耗性および耐境界摩耗性に優れる。
結果を表5に示す。
まず、試料8と試料56とについて考察する。B層の組成、B層の厚さ、D層の組成およびD層の厚さは、試料8と試料56とで互いに酷似しているが、A層は、試料8では設けられているのに対して試料56では設けられていない。そして、試料8では、Rzは1μm以下であり切削距離は8.5km以上であるのに対し、試料56では、VBは試料8の2倍程度でありRzは試料8の2倍以上であった。
試料1~7では、A層の厚さが互いに異なる。試料1、7では、Rzは2.2μmよりも大きく、切削距離は4km程度であった。一方、試料2~6では、Rzは1μm以下であり、切削距離は8km以上であった。これらのことから、A層の厚さが0.2μm以上10μm以下であれば、設備剛性またはワーク剛性などが低い環境下で焼入鋼の加工等を行った場合において、表面被覆窒化硼素焼結体工具の耐逃げ面摩耗性、耐クレータ摩耗性および耐境界摩耗性が高まることが分かった。
試料8~13では、C層の厚さが互いに異なるが、Rzは1μm以下であり、切削距離は8.5km以上であった。また、試料9~11では、Rzは0.8μm以下であり、切削距離は9km程度であった。これらのことから、C層の厚さは、0.005μm以上0.5μm以下であることが好ましく、0.005μm以上0.2μm以下であることがより好ましく、0.01μm以上0.2μm以下であることがさらに好ましいということが分かった。
試料14~19では、B1a化合物層の組成が互いに異なる。試料14、19では、Rzは2μmよりも大きく、切削距離は4km程度であった。一方、試料15~18では、Rzは1μm以下であり、切削距離は9km程度であった。これらのことから、B1a化合物層のSi組成が0.01以上0.25以下であれば、設備剛性またはワーク剛性などが低い環境下で焼入鋼の加工等を行った場合において、表面被覆窒化硼素焼結体工具の耐逃げ面摩耗性、耐クレータ摩耗性および耐境界摩耗性が高まることが分かった。
試料20~25では、B1a化合物層およびB1b化合物層のそれぞれの厚さが互いに異なる。試料20、25では、Rzは2.2μmよりも大きく、切削距離は3~4km程度であった。一方、試料21~24では、Rzは1.1μm以下であり、切削距離は7km以上であった。これらのことから、B1a化合物層の厚さおよびB1b化合物層の厚さのそれぞれが0.5nm以上30nm未満であれば、設備剛性またはワーク剛性などが低い環境下で焼入鋼の加工等を行った場合において、表面被覆窒化硼素焼結体工具の耐逃げ面摩耗性、耐クレータ摩耗性および耐境界摩耗性が高まることが分かった。
試料26~30では、B1b化合物層およびB2薄膜層のそれぞれの組成が互いに異なる。試料26、30では、Rzは3μm以上であり、切削距離は3km程度であった。一方、試料27~29では、Rzは1.1μm以下であり、切削距離は8km以上であった。これらのことから、B1b化合物層およびB2薄膜層のそれぞれのAl組成が0.23以上0.8以下であれば、設備剛性またはワーク剛性などが低い環境下で焼入鋼の加工等を行った場合において、表面被覆窒化硼素焼結体工具の耐逃げ面摩耗性、耐クレータ摩耗性および耐境界摩耗性が高まることが分かった。
試料31~35では、B1薄膜層の厚さが互いに異なる。試料31、35では、Rzは2.2μmよりも大きく、切削距離は3~4km程度であった。一方、試料32~34では、Rzは1.1μm以下であり、切削距離は8km以上であった。これらのことから、B1薄膜層の厚さが30nmよりも大きく200nm未満であれば、設備剛性またはワーク剛性などが低い環境下で焼入鋼の加工等を行った場合において、表面被覆窒化硼素焼結体工具の耐逃げ面摩耗性、耐クレータ摩耗性および耐境界摩耗性が高まることが分かった。
試料36~40では、B2薄膜層の厚さが互いに異なる。試料36、40では、Rzは2.2μmよりも大きく、切削距離は3~4km程度であった。一方、試料37~39では、Rzは1μm以下であり、切削距離は8km以上であった。これらのことから、B2薄膜層の厚さが30nmよりも大きく200nm未満であれば、設備剛性またはワーク剛性などが低い環境下で焼入鋼の加工等を行った場合において、表面被覆窒化硼素焼結体工具の耐逃げ面摩耗性、耐クレータ摩耗性および耐境界摩耗性が高まることが分かった。
試料41~45では、B1薄膜層およびB2薄膜層のそれぞれの層数が互いに異なるので、B層の厚さが互いに異なる。試料41、45では、Rzは2.5μm以上であり、切削距離は3km程度であった。一方、試料42~44では、Rzは1μm程度であり、切削距離は8km程度であった。これらのことから、B層の厚さが0.06μm以上5μm以下であれば、設備剛性またはワーク剛性などが低い環境下で焼入鋼の加工等を行った場合において、表面被覆窒化硼素焼結体工具の耐逃げ面摩耗性、耐クレータ摩耗性および耐境界摩耗性が高まることが分かった。
試料46~54では、cBN焼結体の組成が互いに異なるが、Rzは0.8μm以下であり、切削距離は8.5km以上であった。これらのことから、立方晶窒化硼素焼結体における立方晶窒化硼素の体積含有率は、30体積%以上85体積%以下であることが好ましいということがわかった。
Claims (21)
- 少なくとも切れ刃部分が立方晶窒化硼素焼結体と前記立方晶窒化硼素焼結体の表面上に形成された被覆層とを含む表面被覆窒化硼素焼結体工具であって、
前記立方晶窒化硼素焼結体は、立方晶窒化硼素を30体積%以上80体積%以下含み、元素の周期表の第4族元素、第5族元素および第6族元素の窒化物、炭化物、硼化物、酸化物ならびにこれらの固溶体からなる群の中から選択された少なくとも1種の化合物とアルミニウム化合物と不可避不純物とを含む結合相をさらに含み、
前記被覆層は、A層とB層とを含み、
前記A層は、MLaza1(Mは元素の周期表の第4族元素、第5族元素および第6族元素、AlならびにSiの1種以上を表わし、LaはB、C、NおよびOの1種以上を表わし、za1は0.85以上1.0以下である)からなり、
前記B層は、組成の異なる2種以上の薄膜層が交互にそれぞれ1つ以上積層されてなり、
前記薄膜層のそれぞれの厚さは、30nmよりも大きく200nm未満であり、
前記薄膜層の1種であるB1薄膜層は、組成の異なる2種以上の化合物層が交互にそれぞれ1つ以上積層されてなり、
前記化合物層のそれぞれの厚さは、0.5nm以上30nm未満であり、
前記化合物層の1種であるB1a化合物層は、(Ti1-xb1-yb1Sixb1M1yb1)(C1-zb1Nzb1)(M1はTiを除く元素の周期表の第4族元素、第5族元素および第6族元素ならびにAlの1種以上を表わし、xb1は0.01以上0.25以下であり、yb1は0以上0.7以下であり、zb1は0.4以上1以下である)からなり、
前記化合物層の1種であって前記B1a化合物層とは異なるB1b化合物層は、(Al1-xb2M2xb2)(C1-zb2Nzb2)(M2は元素の周期表の第4族元素、第5族元素および第6族元素ならびにSiの1種以上を表わし、xb2は0.2以上0.77以下であり、zb2は0.4以上1以下である)からなり、
前記薄膜層の1種であって前記B1薄膜層とは異なるB2薄膜層は、(Al1-xb3M3xb3)(C1-zb3Nzb3)(M3は元素の周期表の第4族元素、第5族元素および第6族元素ならびにSiの1種以上を表わし、xb3は0.2以上0.77以下であり、zb3は0.4以上1以下である)からなり、
前記A層の厚さは、0.2μm以上10μm以下であり、
前記B層の厚さは、0.06μm以上5μm以下であり、
前記被覆層全体の厚さは、0.26μm以上15μm以下である表面被覆窒化硼素焼結体工具。 - 前記A層は、(Ti1-xaMaxa)(C1-za2Nza2)(MaはTiを除く元素の周期表の第4族元素、第5族元素および第6族元素、AlならびにSiの1種以上を表わし、xaは0以上0.7以下であり、za2は0以上1以下である)からなる請求項1に記載の表面被覆窒化硼素焼結体工具。
- 前記A層では、Nの組成za2が、前記立方晶窒化硼素焼結体側から当該A層の表面側へ向かってステップ状または傾斜状に変化する請求項2に記載の表面被覆窒化硼素焼結体工具。
- 前記A層は、当該A層の表面側に、前記立方晶窒化硼素焼結体側よりもCの組成の高い領域を有する請求項2または3に記載の表面被覆窒化硼素焼結体工具。
- 前記M2はTiおよびCrの少なくとも1つを表わし、前記M2の組成xb2は0.25以上0.5以下である請求項1~4のいずれか1項に記載の表面被覆窒化硼素焼結体工具。
- 前記M3はTiおよびCrの少なくとも1つを表わし、前記M3の組成xb3は0.25以上0.5以下である請求項1~5のいずれか1項に記載の表面被覆窒化硼素焼結体工具。
- 前記M3は前記M2と同一の元素を表わし、前記M3の組成xb3は前記M2の組成xb2と同一の値である請求項6に記載の表面被覆窒化硼素焼結体工具。
- 前記B1薄膜層の平均厚さt1と前記B2薄膜層の平均厚さt2との比であるt2/t1が、0.5<t2/t1≦10.0を満たす請求項1~7のいずれか1項に記載の表面被覆窒化硼素焼結体工具。
- 前記t2/t1は、0.7<t2/t1≦5.0を満たす請求項8に記載の表面被覆窒化硼素焼結体工具。
- 前記B層は、前記A層よりも前記立方晶窒化硼素焼結体側に設けられており、
前記t2/t1は、前記立方晶窒化硼素焼結体側では1.1<t2/t1≦5.0を満たし、前記A層側に向かうにつれて小さくなり、前記A層側では0.7<t2/t1<2を満たす請求項8または9に記載の表面被覆窒化硼素焼結体工具。 - 前記B層全体におけるSi組成の平均値は、0.003以上0.1以下である請求項1~10のいずれか1項に記載の表面被覆窒化硼素焼結体工具。
- 前記B層全体におけるSi組成の平均値は、0.005以上0.07以下である請求項11に記載の表面被覆窒化硼素焼結体工具。
- 前記A層は、前記B層よりも前記表面被覆窒化硼素焼結体工具の表面側に設けられている請求項1~12のいずれか1項に記載の表面被覆窒化硼素焼結体工具。
- 前記被覆層は、前記A層と前記B層との間に設けられたC層をさらに含み、
前記C層は、McLczc(Mcは元素の周期表の第4族元素、第5族元素および第6族元素、AlならびにSiの1種以上を表わし、LcはB、C、NおよびOの1種以上を表わし、zcは0以上0.85以下である)からなり、
前記C層の厚さは、0.005μm以上0.5μm以下である請求項1~13のいずれか1項に記載の表面被覆窒化硼素焼結体工具。 - 前記Lcの組成zcは0よりも大きく0.7未満である請求項14に記載の表面被覆窒化硼素焼結体工具。
- 前記C層は、前記A層および前記B層を構成する元素の少なくとも1種以上を含む請求項14または15に記載の表面被覆窒化硼素焼結体工具。
- 前記被覆層は、前記立方晶窒化硼素焼結体と前記B層との間に設けられたD層をさらに含み、
前記D層は、MdLdzd(Mdは元素の周期表の第4族元素、第5族元素および第6族元素、AlならびにSiの1種以上を表わし、LdはB、C、NおよびOの1種以上を表わし、zdは0.85以上1以下である)からなる請求項1~16のいずれか1項に記載の表面被覆窒化硼素焼結体工具。 - 前記立方晶窒化硼素焼結体は、前記立方晶窒化硼素を50体積%以上65体積%以下含む請求項1~17のいずれか1項に記載の表面被覆窒化硼素焼結体工具。
- 前記立方晶窒化硼素焼結体と前記被覆層との界面では、
前記立方晶窒化硼素からなる粒子が前記結合相よりも前記被覆層側に突出しており、
前記立方晶窒化硼素からなる粒子と前記結合相との段差が0.05μm以上1.0μm以下である請求項1~18のいずれか1項に記載の表面被覆窒化硼素焼結体工具。 - 前記立方晶窒化硼素焼結体における前記立方晶窒化硼素の体積含有率は、前記立方晶窒化硼素焼結体と前記被覆層との界面から前記立方晶窒化硼素焼結体の内部に向かって高くなる請求項1~19のいずれか1項に記載の表面被覆窒化硼素焼結体工具。
- 前記立方晶窒化硼素焼結体に含まれる前記立方晶窒化硼素の粒径は、前記立方晶窒化硼素焼結体と前記被覆層との界面から前記立方晶窒化硼素焼結体の内部に向かって大きくなる請求項1~20のいずれか1項に記載の表面被覆窒化硼素焼結体工具。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20180243837A1 (en) * | 2015-09-04 | 2018-08-30 | Osg Corporation | Hard coating and hard coating-covered member |
US20180251884A1 (en) * | 2015-09-04 | 2018-09-06 | Osg Corporation | Hard coating and hard coating-covered member |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5663815B2 (ja) * | 2013-07-03 | 2015-02-04 | 住友電工ハードメタル株式会社 | 表面被覆窒化硼素焼結体工具 |
JP6507399B2 (ja) * | 2017-03-28 | 2019-05-08 | 株式会社タンガロイ | 被覆切削工具 |
CN111621752B (zh) * | 2020-06-10 | 2022-04-12 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | AlCrSiN/AlCrN/AlCrON/AlCrN多层纳米复合涂层的制备工艺 |
CN112264648B (zh) * | 2020-09-04 | 2022-09-06 | 山东国晶新材料有限公司 | 一种t型夹持杆的加工方法 |
CN112264647B (zh) * | 2020-09-04 | 2022-09-06 | 山东国晶新材料有限公司 | 一种弧型夹持杆的加工方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006137982A (ja) * | 2004-11-11 | 2006-06-01 | Hitachi Tool Engineering Ltd | 硬質皮膜被覆部材及びその被覆方法 |
JP2008188689A (ja) | 2007-02-01 | 2008-08-21 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
JP2008534297A (ja) | 2005-04-01 | 2008-08-28 | エーリコン・トレイディング・アーゲー・トリューバッハ | 工具のための多層硬物質被覆 |
WO2010140959A1 (en) * | 2009-06-01 | 2010-12-09 | Seco Tools Ab | Nanolaminated coated cutting tool |
WO2010150335A1 (ja) | 2009-06-22 | 2010-12-29 | 株式会社タンガロイ | 被覆立方晶窒化硼素焼結体工具 |
JP2011083879A (ja) * | 2009-10-19 | 2011-04-28 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
WO2012005275A1 (ja) | 2010-07-06 | 2012-01-12 | 株式会社タンガロイ | 被覆cBN焼結体工具 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2793773B2 (ja) * | 1994-05-13 | 1998-09-03 | 神鋼コベルコツール株式会社 | 耐摩耗性に優れた硬質皮膜、硬質皮膜被覆工具及び硬質皮膜被覆部材 |
JP4185172B2 (ja) * | 1997-06-19 | 2008-11-26 | 住友電工ハードメタル株式会社 | 被覆硬質工具 |
JP4294162B2 (ja) * | 1999-05-17 | 2009-07-08 | 株式会社住友金属ファインテック | 両面研摩装置 |
JP3343727B2 (ja) * | 1999-05-19 | 2002-11-11 | 日立ツール株式会社 | 硬質皮膜被覆工具 |
JP3347687B2 (ja) * | 1999-05-19 | 2002-11-20 | 日立ツール株式会社 | 硬質皮膜被覆工具 |
CA2327092C (en) * | 1999-12-03 | 2004-04-20 | Sumitomo Electric Industries, Ltd. | Coated pcbn cutting tools |
JP3417907B2 (ja) * | 2000-07-13 | 2003-06-16 | 日立ツール株式会社 | 多層皮膜被覆工具 |
CN100419117C (zh) * | 2004-02-02 | 2008-09-17 | 株式会社神户制钢所 | 硬质叠层被膜、其制造方法及成膜装置 |
CN101804467B (zh) * | 2004-04-30 | 2012-05-02 | 住友电工硬质合金株式会社 | 表面被覆立方晶氮化硼烧结体工具及其制造方法 |
JP5005262B2 (ja) * | 2006-05-26 | 2012-08-22 | 三菱マテリアル株式会社 | 高硬度鋼の高速切削加工できわめて優れた仕上げ面精度を長期にわたって発揮する表面被覆立方晶窒化ほう素基超高圧焼結材料製切削工具 |
JP2008238392A (ja) * | 2007-02-28 | 2008-10-09 | Kyocera Corp | 切削工具 |
KR100876366B1 (ko) * | 2008-04-24 | 2008-12-31 | 한국야금 주식회사 | 절삭공구용 다층경질 박막 |
JP5353613B2 (ja) * | 2009-10-01 | 2013-11-27 | 株式会社豊田中央研究所 | 被覆超硬合金部材 |
EP2631027B1 (en) * | 2010-10-18 | 2015-09-30 | Sumitomo Electric Hardmetal Corp. | Cubic boron nitride sintered body and cubic boron nitride sintered body tool |
MX346949B (es) * | 2010-11-26 | 2017-04-06 | Sumitomo Electric Hardmetal Corp | Cuerpo sinterizado de superficie revestida. |
JP5286626B2 (ja) * | 2011-01-31 | 2013-09-11 | 住友電工ハードメタル株式会社 | 表面被覆切削工具およびその製造方法 |
JP5841170B2 (ja) * | 2011-11-29 | 2016-01-13 | 京セラ株式会社 | 被覆工具 |
-
2013
- 2013-03-29 JP JP2013073493A patent/JP6016270B2/ja active Active
-
2014
- 2014-02-26 CN CN201480018940.1A patent/CN105073312A/zh active Pending
- 2014-02-26 KR KR1020157030388A patent/KR20150132582A/ko not_active Application Discontinuation
- 2014-02-26 WO PCT/JP2014/054685 patent/WO2014156447A1/ja active Application Filing
- 2014-02-26 EP EP14775614.2A patent/EP2979788A4/en not_active Withdrawn
- 2014-02-26 US US14/780,169 patent/US20160040279A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006137982A (ja) * | 2004-11-11 | 2006-06-01 | Hitachi Tool Engineering Ltd | 硬質皮膜被覆部材及びその被覆方法 |
JP2008534297A (ja) | 2005-04-01 | 2008-08-28 | エーリコン・トレイディング・アーゲー・トリューバッハ | 工具のための多層硬物質被覆 |
JP2008188689A (ja) | 2007-02-01 | 2008-08-21 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
WO2010140959A1 (en) * | 2009-06-01 | 2010-12-09 | Seco Tools Ab | Nanolaminated coated cutting tool |
WO2010150335A1 (ja) | 2009-06-22 | 2010-12-29 | 株式会社タンガロイ | 被覆立方晶窒化硼素焼結体工具 |
JP2011083879A (ja) * | 2009-10-19 | 2011-04-28 | Sumitomo Electric Hardmetal Corp | 表面被覆切削工具 |
WO2012005275A1 (ja) | 2010-07-06 | 2012-01-12 | 株式会社タンガロイ | 被覆cBN焼結体工具 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2979788A4 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20180243837A1 (en) * | 2015-09-04 | 2018-08-30 | Osg Corporation | Hard coating and hard coating-covered member |
US20180251884A1 (en) * | 2015-09-04 | 2018-09-06 | Osg Corporation | Hard coating and hard coating-covered member |
EP3346021A4 (en) * | 2015-09-04 | 2019-03-06 | OSG Corporation | HARD COATING AND COVERED HARD COVERED ELEMENT |
US10675690B2 (en) | 2015-09-04 | 2020-06-09 | Osg Corporation | Hard coating and hard coating-covered member |
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