WO2014139347A1 - 一种滑动摩擦纳米发电机及发电方法 - Google Patents
一种滑动摩擦纳米发电机及发电方法 Download PDFInfo
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- WO2014139347A1 WO2014139347A1 PCT/CN2014/071474 CN2014071474W WO2014139347A1 WO 2014139347 A1 WO2014139347 A1 WO 2014139347A1 CN 2014071474 W CN2014071474 W CN 2014071474W WO 2014139347 A1 WO2014139347 A1 WO 2014139347A1
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- Prior art keywords
- layer
- friction
- conductive layer
- conductive
- generator according
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/04—Friction generators
Definitions
- the present invention relates to a generator and a power generation method, and more particularly to a sliding friction nanogenerator that converts mechanical energy that applies an external force into electrical energy and a method of generating electricity using the same.
- the present invention provides a sliding friction nano-generator capable of converting mechanical energy of a tangential force applied to a frictional nanogenerator into electrical energy.
- the present invention provides a friction nanogenerator, including
- Friction layer a conductive element placed in contact with the underside of the friction layer
- the upper surface of the friction layer is placed opposite the lower surface of the conductive layer
- the upper surface of the friction layer and the lower surface of the conductive layer are relatively slid under the action of an external force, and generate sliding friction tangential to the contact surface, while the friction area changes during sliding, and passes through the conductive element And the conductive layer outputs an electrical signal to the outer circuit; preferably, there is a friction electrode sequence difference between the upper surface material of the friction layer and the lower surface material of the conductive layer;
- the upper surface of the friction layer is placed in contact with the lower surface of the conductive layer; preferably, when there is no external force, the upper surface of the friction layer is separated from the lower surface of the conductive layer, and the external force acts Lower, the upper surface of the friction layer contacts the lower surface of the conductive layer and generates relative sliding friction that is tangent to the contact surface;
- the friction layer is an insulating material or a semiconductor material
- the insulating material is selected from the group consisting of polytetrafluoroethylene, polydimethylsiloxane, polyimide, polydiphenylpropionate carbonate, polyethylene terephthalate, aniline formaldehyde resin, Polyoxymethylene, ethyl cellulose, polyamide, melamine formaldehyde, polyethylene glycol succinate, cellulose, cellulose acetate, polyethylene adipate, diallyl polyphthalate , recycled fiber sponge, polyurethane elastomer, styrene propylene copolymer, styrene butadiene copolymer, rayon, polymethyl, methacrylate, polyvinyl alcohol, polyester, polyisobutylene, polyurethane flexible sponge, poly Ethylene terephthalate, polyvinyl butyral, phenolic resin, neoprene, butadiene propylene copolymer, natural rubber, polyacrylonitrile, poly(vin)
- the semiconductor material is selected from the group consisting of silicon, germanium, Group III and V compounds, Group II and Group VI compounds, solid solutions composed of Group III-V compounds and Group II-VI compounds, Crystalline glass semiconductors and organic semiconductors;
- the Group III and Group V compounds are selected from the group consisting of gallium arsenide and gallium phosphide;
- the Group II and Group VI compounds are selected from the group consisting of cadmium sulfide and zinc sulfide; and the oxide is selected from the group consisting of manganese, chromium, and iron.
- the solid solution composed of the III-V compound and the II-VI compound is selected from the group consisting of gallium aluminum arsenide and gallium arsenide phosphorus;
- the friction layer is a non-conductive oxide, a semiconductor oxide or a complex oxide, including silicon oxide, aluminum oxide, manganese oxide, chromium oxide, iron oxide, titanium oxide, copper oxide, zinc oxide, Bi0 2 and Y. 2 0 3 .
- the upper surface of the friction layer and/or the lower surface of the conductive layer are distributed with microstructures on the order of micrometers or sub-micrometers;
- the microstructure is selected from the group consisting of nanowires, nanotubes, nanoparticles, nanochannels, microchannels, nanocones, microcones, nanospheres, and microspheres;
- the upper surface of the friction layer and/or the lower surface of the conductive layer have an embellishment or coating of nano material
- the upper surface of the friction layer and/or the lower surface of the conductive layer are chemically modified such that a material capable of obtaining electrons and/or a lower surface of the conductive layer are introduced on the upper surface of the friction layer.
- the material introduces a functional group that easily loses electrons;
- the functional group that easily loses electrons includes an amino group, a hydroxyl group or a decyloxy group; preferably, the electron-donating functional group includes an acyl group, a carboxyl group, a nitro group or a sulfonic acid group;
- the upper surface of the friction layer and/or the lower surface of the conductive layer are chemically modified such that a negative charge is introduced to the upper surface material of the friction layer and/or a positive charge is introduced to the lower surface material of the conductive layer.
- the chemical modification is achieved by chemically bonding a charged group;
- the conductive layer is a conductive material, the conductive material is selected from the group consisting of a metal and a conductive oxygen, preferably the metal is selected from the group consisting of Gold, silver, platinum, aluminum, nickel, copper, titanium, chromium or selenium, and alloys formed from the above metals;
- the conductive element is selected from the group consisting of a metal and a conductive oxide;
- the conductive element is selected from the group consisting of gold, silver, platinum, aluminum, nickel, copper, titanium, chromium or selenium, and an alloy formed of the above metal;
- the conductive element, the friction layer and/or the conductive layer are thin films
- the friction layer, the conductive layer and/or the conductive element are rigid;
- the friction layer, the conductive layer and/or the conductive element are flexible;
- the conductive element is fixed on a lower surface of the friction layer
- the conductive element is prepared on the lower surface of the friction layer by deposition; preferably, the conductive element is the same size and shape as the friction layer;
- the conductive element, the friction layer and the conductive layer are both planar structures;
- the conductive element and the friction layer are curved structures and/or the conductive layer is a curved structure.
- the present invention also provides a power generation method using any of the generators disclosed in the present invention, including the following steps:
- a force applied in the step (6) is a continuous external force in which the direction is periodically reversed or the magnitude is periodically changed.
- the generator of the present invention does not require a gap between the two friction layers during the working process, and the devices with periodic full contact and full separation of the two friction layers are different in power generation principle, which provides a new design idea for the society.
- the gapless design omits the installation of the elastic distance holder and also facilitates the packaging technology, enabling it to be applied in a wider field.
- the generator of the invention does not need large-scale, high-intensity energy input, and only the input mechanical energy can drive the relative sliding between the friction layer and the conductive layer, thereby effectively collecting various strengths generated by nature and people's daily life.
- Mechanical energy and convert it into electrical energy for efficient use of energy;
- the generator of the invention does not need magnets, coils, rotors and the like, has a simple structure, small volume, is convenient to manufacture, low in cost, and can be mounted on various devices which can make the friction layer and the conductive layer slide relative to each other, and does not require special work. The environment is therefore highly compatible.
- the generator of the invention combines the friction layer and the conductive layer which are easy to lose electrons into one, which can meet the working requirements of the generator, simplify the structure and save the cost, and is very advantageous for popularization and application in actual production. .
- the generator of the present invention can be used not only as a small power source but also as a high power power generation.
- 1 is a schematic view showing a typical structure of a friction nano-generator of the present invention
- 2 is a schematic cross-sectional view showing the principle of power generation of a friction nano-generator of the present invention
- FIG. 3 is a schematic view showing another typical structure of the friction nano-generator of the present invention:
- FIG. 4 is a schematic view showing another typical structure of the friction nano-generator of the present invention:
- FIG. 5 is a short-circuit current output diagram of a friction nano-generator at a relative average slip rate of 0.6 m / sec according to an embodiment of the present invention
- FIG. 6 is a current output diagram of a frictional nanogenerator passing through a full bridge rectifier at a relative average slip rate of 0.6 m/sec in accordance with an embodiment of the present invention.
- the present invention provides a simple structured friction nanogenerator that converts naturally occurring mechanical energy, such as motion and vibration, into electrical energy, which provides a matched power source for microelectronic devices.
- the friction nanogenerator of the present invention utilizes a phenomenon in which surface charge transfer occurs when a material having a difference in polarity in a friction electrode sequence is contacted, and mechanical energy of an external force is converted into electric energy.
- the “friction electrode sequence” as used in the present invention refers to the order of the materials according to their degree of attraction to the charge.
- the negative charge on the friction surface is compared with the polarity of the friction electrode sequence.
- the positive material surface is transferred to the surface of the material that is more polar in the friction electrode sequence.
- the friction electrode sequence is only an empirically based statistical result, that is, the further the difference between the two materials in the sequence, the greater the positive and negative charge generated after the contact and the probability of the sequence being coincident, and Actual results are subject to The effects of various factors, such as material surface roughness, ambient humidity and relative friction. A further explanation is that the transfer of charge does not require relative friction between the two materials as long as they are in contact with each other.
- the "contact charge” as used in the present invention refers to the charge on the surface of a material having a difference in polarity between two kinds of friction electrode sequences after contact friction and separation, and it is generally considered that the charge is only distributed on the surface of the material. The maximum depth of distribution is only about 10 nanometers. It should be noted that the sign of the contact charge is a sign of the net charge, that is, there may be a concentrated region of negative charge in a local region of the surface of the material with a positive contact charge, but the sign of the net charge of the entire surface is positive.
- FIG. 1 is a typical structure of a frictional nanogenerator of the present invention.
- the contact interface with the conductive layer 20 can be relatively slid while the contact area is changed, thereby outputting an electrical signal to the external circuit through the conductive element 11 and the conductive layer 20.
- the working principle and power generation method of the friction nanogenerator of the present invention will be described with reference to FIG.
- the electrons are induced.
- the conductive layer 20 is directly transferred to the upper surface of the friction layer 10 at the contact surface and is possessed by the surface of the friction layer 10 (see FIG. 2(a)), in order to shield the surface charge remaining in the friction layer 10 and the conductive layer 20 due to misalignment.
- the friction layer 10 and the conductive layer 20 are placed in contact with each other, and whether or not an external force is applied thereto, the two are always in surface contact.
- This is the most typical structure of the generator of the present invention.
- the present invention does not limit the friction layer 10 and the conductive layer 20 to maintain surface contact from beginning to end. As long as the external force acts, the two can contact and generate relative sliding friction tangent to the contact surface, and when there is no external force, the friction Layer 10 and conductive layer 20 can be completely separated. This design can meet the situation where interval power generation is required. Moreover, the friction process can have both contact friction and sliding friction.
- conventional members for controlling the distance in the art can be employed, for example, an insulating spring is respectively connected to the lower surface of the friction layer 10 and the upper surface of the conductive layer 20, but the spring to be used should not be limited. Relative sliding between the friction layer 10 and the conductive layer 20.
- this embodiment is advantageous for generators used in combination with other products, and the friction layer 10 and the conductive layer 20 can be respectively connected to two mutually separated components of other products, and the intermittent contact of the two components is utilized. Relative sliding to drive the generator to work, thus achieving intermittent power generation.
- the upper surface of the friction layer 10 is composed of an insulating material
- the lower surface of the conductive layer 20 is made of a conductive material, which have different triboelectric characteristics, that is, the two are in different positions in the friction electrode sequence, thereby making the friction layer
- the upper surface of 10 and the lower surface of the conductive layer 20 are capable of generating contact charges on the surface during the occurrence of friction.
- Conventional insulating materials have triboelectric properties and can generate a negative surface charge on the surface after rubbing against the conductor, and thus can be used as a material for preparing the upper surface of the friction layer 10 of the present invention.
- Teflon polydimethyl siloxane, polyimide, polydiphenyl propylene carbonate, polyethylene terephthalate, aniline formaldehyde resin, polyoxymethylene, ethyl cellulose, polyamide, melamine formaldehyde , polyethylene glycol succinate, cellulose, cellulose acetate, polyethylene adipate Ester, diallyl polyphthalate, recycled fiber sponge, polyurethane elastomer, styrene propylene copolymer, styrene butadiene copolymer, rayon, polymethacrylate, polyvinyl alcohol, polyester, Polyisobutylene, polyurethane flexible sponge, polyethylene terephthalate, polyvinyl butyral, phenolic resin, neoprene, butadiene propylene copolymer, natural rubber, polyacrylonitrile, poly(vinylidene chloride) -co-acrylonitrile
- Semiconductor materials also have triboelectric properties, often located between the insulator and the conductor in the list of friction electrode sequences, which can generate a negative contact charge on the surface after rubbing against the conductor material. Therefore, a semiconductor can also be used as a raw material for preparing the friction layer 10.
- Commonly used semiconductors include silicon, germanium; Group III and V compounds such as gallium arsenide, gallium phosphide, etc.; Group II and Group VI compounds such as cadmium sulfide, zinc sulfide, etc.; and III-V compounds and A solid solution composed of II-VI compounds, such as gallium aluminum arsenide, gallium arsenide phosphorus, and the like.
- Non-conductive oxides, semiconducting oxides, and complex oxides also have triboelectric properties and are capable of forming surface charges during the rubbing process, and thus can also be used as the friction layer of the present invention, such as oxides of manganese, chromium, iron, and copper. Also included are silicon oxide, manganese oxide, chromium oxide, iron oxide, copper oxide, zinc oxide, Bi0 2 and ⁇ 2 0 3 .
- the conductive layer 20 not only provides a lower surface for triboelectric generation in the generator, but also functions as an electrode, and it is necessary to transmit electrons through an external circuit when the electric field constituted by the surface charge is unbalanced. Therefore, the conductive layer 20 needs to be composed of a conductive material, and a general metal can be selected. Common metals include gold, silver, platinum, aluminum, nickel, copper, titanium, chromium or selenium, as well as alloys formed from the above metals. Of course, other materials having electrically conductive properties can also be used as a friction layer that easily loses electrons, such as indium tin oxide antimony and doped semiconductors.
- the friction layer 10 and the conductive layer 20 can be prepared according to actual needs, and a suitable material can be selected to obtain a better output effect.
- the material having the negative polarity friction electrode sequence is preferably polystyrene, polyethylene, polypropylene, polydiphenylpropionate carbonate, polyethylene terephthalate, polyimide, polyvinyl chloride, polydimethylene Siloxane, polychlorotrifluoroethylene and polytetrafluoroethylene and parylene, including parylene C, parylene, parylene D, parylene HT or parylene AF4;
- the friction electrode sequence material is preferably copper, aluminum, gold, silver and steel.
- the upper surface of the friction layer 10 and/or the lower surface of the conductive layer 20 may also be physically modified to have a micro- or sub-micron array of microstructures distributed on the surface thereof to increase the contact between the friction layer 10 and the conductive layer 20.
- the area thereby increasing the amount of contact charge.
- Specific modification methods include photolithography, chemical etching, and ion etching.
- One method is to introduce a more electron-releasing functional group (ie, a strong electron donating group) on the surface of the positive polarity material for the friction layer 10 and the conductive layer 20 material that are in contact with each other, or to introduce the surface of the material with a negative polarity.
- Electron-functional groups ie, strong electron-withdrawing groups
- Strong electron donating groups include: amino group, hydroxyl group, decyloxy group, etc.
- strong electron withdrawing group includes: acyl group, carboxyl group, nitro group, sulfonic acid group and the like.
- the introduction of the functional group can be carried out by a conventional method such as plasma surface modification. For example, a mixture of oxygen and nitrogen can be used to generate a plasma at a certain power to introduce an amino group on the surface of the friction layer material.
- Another method is to introduce a positive charge on the surface of the friction layer material with positive polarity and a negative charge on the surface of the friction layer material with negative polarity.
- it can be achieved by chemical bonding.
- ethyl orthosilicate English abbreviated as TEOS
- TEOS ethyl orthosilicate
- sol-gel hydrolysis-condensation
- CTAB hexadecanyltrimethylammonium bromide
- the invention does not limit the friction layer 10 and the conductive layer 20 to be a hard material, and a flexible material may also be selected, because the hardness of the material does not affect the sliding friction effect between the two, and those skilled in the art may perform the actual situation. select.
- the thicknesses of the first friction layer 10 and the conductive layer 20 have no significant effect on the practice of the present invention.
- both of the invention are films having a thickness of 50 nm to 5 mm, preferably 100 nm to 2 mm, more preferably 1 ⁇ m to 800 ⁇ m, which are all in the present invention. The technical solutions are applicable.
- the conductive element 11 may be selected from a metal, an indium tin oxide or a doped semiconductor, and may be a flat plate, a sheet or a film, and the thickness may be selected from the range of 10 nm to 5 mm. It is preferably 50 nm to 1 mm, preferably 100 ⁇ to 500 ⁇ m. Commonly used metals include gold, silver, platinum, aluminum, nickel, copper, titanium, chromium or selenium, and alloys formed from the above metals, preferably metal films such as aluminum films, gold films, and copper films.
- the electrode layer is in close contact with the surface of the friction layer to ensure charge transfer efficiency.
- a preferred method is to deposit a conductive material on the surface of the friction layer by deposition; the specific deposition method may be electron beam evaporation, plasma. Sputtering, magnetron sputtering or evaporation.
- the conductive element 11 and the conductive layer 20 may be connected to the external circuit in such a manner as to be connected to the external circuit through a wire or a metal film.
- a support layer may be provided in contact with the lower surface of the conductive member and/or the upper surface of the conductive layer, preferably an insulating material or a semiconductor material such as a plastic plate or a silicon wafer.
- the present invention does not limit the friction layer, the conductive layer, and the conductive member to be a hard material, and a flexible material may also be selected because the hardness of the material does not affect the effects of sliding friction and electrical signal output.
- the advantage of the generator made of flexible material is that the soft and thin friction layer is deformed by a slight external force, and the deformation causes the relative displacement of the two friction layers, thereby outputting an electric signal outward by sliding friction.
- the use of flexible materials makes the nanogenerators of the present invention also very useful in the field of biology and medicine. In the process of use, it can also be made of a polymer material which is ultra-thin, soft, elastic and/or transparent. Packed for ease of use and increased strength. Obviously, all the structures disclosed in the present invention can be made of corresponding ultra-soft and elastic materials to form a flexible nano-generator, which will not be repeated here, but the various designs derived therefrom should include Within the scope of protection of this patent.
- the invention does not limit that the conductive element, the friction layer and the conductive layer must all be planar structures, because the curved structure can also achieve relative sliding friction, but the friction layer and the conductive element should be the same as a planar or curved structure to ensure the closeness of the two. contact.
- the conductive element and the friction layer can be set as a curved structure according to the situation, and the conductive layer is set to a planar or curved structure; of course, the opposite arrangement can also be adopted, that is, the conductive layer is set as a curved structure, and the conductive layer is electrically conductive.
- the component and friction layer are curved or planar.
- Figure 3 is a typical embodiment of the friction layer and the conductive layer in incomplete contact of the present invention.
- the main part of this embodiment is the same as the embodiment shown in Fig. 1, and only the differences between the two will be described here.
- the upper surface of the friction layer 10 of the embodiment shown in FIG. 3 is relatively small, and the upper surface thereof and the lower surface of the conductive layer 20 are each formed as an uneven surface, and the contact area can be formed during the relative sliding after the contact therebetween. Change, thereby achieving the purpose of outputting an electrical signal to the outside.
- This embodiment can be used because the upper surface of the friction layer 10 is too small or the relative position of the friction layer 10 and the conductive layer 20 can be relatively small, and the magnitude of the external force or the space in which the friction layer can move is insufficient for the generator to output a suitable electrical signal.
- the contact area of the friction layer 10 with the conductive layer 20 and the effective relative displacement required to generate an electrical signal are effectively controlled by the arrangement of the uneven surface.
- the surface of the conductive layer 20 can be completely used to achieve the object of the present invention, and the setting of the surface unevenness pattern can also be selected according to actual conditions, and therefore these deformations are all in this case. Within the scope of protection of the invention.
- Fig. 4 is a view showing an exemplary embodiment in which the surface of the friction layer of the present invention is provided with a microstructure.
- the main part of this embodiment is the same as the embodiment shown in Fig. 1, and only the differences between the two are described herein.
- the embodiment shown in Fig. 4 is provided with micron-sized linear structures 12 and 22 on the upper surface of the friction layer 10 and the lower surface of the conductive layer 20, respectively.
- the microstructures of the surface are interspersed or overlapped with each other, which greatly increases the area of contact friction, thereby effectively improving the output performance of the generator.
- microstructure For the specific form of the microstructure, a person skilled in the art can select a conventional rod shape, a line shape or a flower shape or the like according to the preparation conditions or actual needs. Although at The effect of simultaneously providing the microstructures on the surfaces of the friction layer 10 and the conductive layer 20 is best, but it is apparent that a similar effect can be obtained by providing the microstructure only on the surface of any one of them.
- the invention also provides a power generation method, in particular to use the above sliding friction nano-generator for power generation, which mainly comprises the following steps:
- the material is first selected according to the foregoing principles, and is prepared into a friction layer of a suitable size and shape.
- the conductive member 11 placed in contact with it is formed on the lower surface of the friction layer 10, preferably fixedly placed, for example, by directly depositing the conductive member 11 on the lower surface of the friction layer 10.
- the lower surface of the conductive layer 20 is placed in contact with the upper surface of the friction layer 10 so that sliding friction can be formed between the two.
- This step is the premise that the power generation method of the present invention can be realized, and is also the key to distinguishing from the power generation of the contact and separation type nano-generators.
- the power generation method of the present invention is There is no need to form a gap between the conductive layer 20 and the friction layer 10, and during the generation of the electrical signal, the conductive layer 20 and the friction layer 10 are in a direct contact state.
- the upper surface of the friction layer 10 and the lower surface of the conductive layer 20 have the same shape and size and are completely in contact to maximize the friction area, and at the same time, in the subsequent power generation process, the friction area can be changed as long as an external force is applied. , thereby generating an electrical signal to be output to the outside.
- the conductive member 11 and the conductive layer 20 are electrically connected to an external circuit, which is a necessary condition for externally outputting electric energy generated by the generator.
- an external circuit which is a necessary condition for externally outputting electric energy generated by the generator.
- electrical connections such as the most conventional wire connections, or thin layer connections, which can be chosen according to actual requirements.
- the periodicity can be matched with the change of the area of the relative sliding friction, and the time from the maximum to the minimum or from the minimum to the maximum of the area of the relative sliding friction is one cycle, thus ensuring The generation of the pulse electric signal always occurs during the application of the external force, preventing the friction layer 10 and the conductive layer 20 from being contacted or rubbed due to the change of the direction of the external force.
- the friction layer 10 and the conductive layer 20 can be automatically returned to the original position after the external force is removed.
- the upper surface of the friction layer 10 and the lower surface of the conductive layer 20 are in full contact, and an insulating spring is attached to one end of the conductive layer 20, and the friction layer 10 and the conductive member 11 of the lower surface thereof are kept in a fixed position, then An external force is applied to the other end of the conductive layer 20 to gradually stretch the insulating spring, and the contact friction area between the conductive layer 20 and the friction layer 10 is gradually reduced.
- the conductive element is a metal copper film layer with a thickness of 100 nm
- the friction layer is a Teflon (polytetrafluoroethylene) film with a thickness of 25 ⁇ m
- the conductive layer is a metal aluminum film layer with a thickness of 100 nm.
- the macroscopic dimensions of these layers are 5cmX 7cm.
- the Teflon film and the metal aluminum film are placed in a relatively completely overlapping contact position, and after the wire is drawn through the metal aluminum film layer and the metal copper film layer of the above friction nano-generator, the frictional nanometer is irradiated under the relative sliding speed of 0.6 m/sec.
- the short-circuit current output diagram generated by the generator is shown in Figure 5.
- the output of the friction nano-generator is connected to the full-bridge rectifier, and the AC current output generated by the friction nano-generator is converted into a DC current output, and the obtained current output is shown in FIG. 6. It can be seen that the generator of the present invention can The input of periodic mechanical energy is converted into an electrical signal output.
- Example 2 Since the polytetrafluoroethylene has a very negative polarity in the friction electrode sequence, and the polarity of the metal aluminum in the electrode sequence is relatively positive, the material combination of the embodiment is advantageous for improving the output of the friction nano-generator, but actually rubbing The use of insulators for the layers is also fully achievable.
- Example 2 Since the polytetrafluoroethylene has a very negative polarity in the friction electrode sequence, and the polarity of the metal aluminum in the electrode sequence is relatively positive, the material combination of the embodiment is advantageous for improving the output of the friction nano-generator, but actually rubbing The use of insulators for the layers is also fully achievable.
- Example 2 Example 2
- the polytetrafluoroethylene film is modified on the basis of the first embodiment, and the others are the same as those in the first embodiment, and are not described herein again.
- the nanowire array was prepared by inductively coupled plasma etching on the surface of the PTFE film. First, about 10 nm thick gold was deposited on the surface of the PTFE by a sputter, and then the PTFE film was placed in the inductor.
- the side deposited with gold is etched, and 0 2 , Ar and CF 4 gases are introduced, the flow rates are controlled at 10 sccm, 15 sccm and 30 sccm, respectively, the pressure is controlled at 15 mTorr, and the operating temperature is controlled at 55 °. C, using 400 watts of power to generate plasma, 100 watts of power to accelerate the plasma, and etching for about 5 minutes to obtain a polymer polytetrafluoroethylene nanometer having a length of about 1.5 micrometers substantially perpendicular to the insulating film layer. Rod array.
- the friction nano-generator of the invention can use the translational motion to generate electric energy by the generator, provide power for the small-sized electric appliance, and does not need a power supply such as a battery, and is a convenient generator.
- the friction nano-generator of the invention is simple in preparation method and low in preparation cost, and is a widely used friction nano-generator and generator set.
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Abstract
Description
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JP6510429B2 (ja) | 2019-05-08 |
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