WO2014131385A1 - Système de micro-détecteur optique multifonctionnel - Google Patents

Système de micro-détecteur optique multifonctionnel Download PDF

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Publication number
WO2014131385A1
WO2014131385A1 PCT/DE2014/000024 DE2014000024W WO2014131385A1 WO 2014131385 A1 WO2014131385 A1 WO 2014131385A1 DE 2014000024 W DE2014000024 W DE 2014000024W WO 2014131385 A1 WO2014131385 A1 WO 2014131385A1
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WO
WIPO (PCT)
Prior art keywords
better
transmitter
wavelength
receiver
compensation
Prior art date
Application number
PCT/DE2014/000024
Other languages
German (de)
English (en)
Inventor
Michael Hase
Michael Domokos
Uwe Hendrik Hill
Original Assignee
Elmos Semiconductor Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elmos Semiconductor Ag filed Critical Elmos Semiconductor Ag
Priority to US14/384,217 priority Critical patent/US9300397B2/en
Priority to PCT/DE2014/000046 priority patent/WO2014131386A1/fr
Priority to US14/770,904 priority patent/US9577750B2/en
Priority to DE202014007446.1U priority patent/DE202014007446U1/de
Priority to DE102014002486.5A priority patent/DE102014002486B4/de
Priority to DE202014007445.3U priority patent/DE202014007445U1/de
Priority to DE102014002788.0A priority patent/DE102014002788A1/de
Publication of WO2014131385A1 publication Critical patent/WO2014131385A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G01S7/4813—Housing arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/04—Systems determining the presence of a target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/497—Means for monitoring or calibrating

Definitions

  • Detecting three-dimensional gestures requires sensors capable of detecting the position, motion and orientation of hands.
  • a generator (G) generates a transmission signal (S5), with which a transmitter (H) is fed.
  • This transmitter (H) radiates into a receiver (D) after passing through the transmission link to be measured, comprising at least a first partial transmission path (11) and a second partial transmission path (12).
  • the receiver output signal (SO) of the receiver (D) is processed by a controller (CT) to a compensation signal (S3), with which a compensation transmitter (K) is fed, again typically linearly superimposed over the transmission path (13) also in the receiver (D) einstahlt.
  • the compensation signal (S3) is generated in the manner by the controller (CT) from the receiver output signal (SO) and the transmission signal (S5) that the transmission output signal (SO) except for a control error and the Systemrau- See no components of the transmission signal ( S5) contains more.
  • HALIOS systems are particularly robust against sources of interference, such as sunlight while at the same time being robust against soiling and a drift of the receiver (D).
  • D drift of the receiver
  • HALIOS system is known for example from DE102010014462A1 or EP2418512A1.
  • two different basic system variants of Halios systems are known from the prior art, which can also be mixed, for example, by switching or weighted adjustment of the control properties. Since the first claim relates to these Halios systems in general, a definition of such known from the prior art Halios systems is given below in order to make the claims compact.
  • a. it has at least one signal generator (G) which can generate at least one transmission signal (S5) which controls at least one transmitter (H) which radiates into at least one receiver (D), and
  • CT controller
  • S3 compensation transmission signal
  • K compensation transmitter
  • said controller (CT) comprises at least one receiver output signal (SO) of said receiver (D) and at least one of said transmit signals (S5) forming at least one of said compensation transmit signal (S3) and d. and that the controller (CT) at least one of said
  • the e. it has at least one signal generator (G) which can generate at least one compensation transmission signal (S3) with which at least one compensation transmitter (K) is irradiated, which at least radiates into a receiver (D) and f. it has at least one controller (CT) which outputs at least one transmission signal (S5) which controls at least one transmitter (H), which also radiates superimposing into at least one receiver (D), and
  • At least one of said controllers comprises at least one receiver output signal (SO) of one of said receivers (D) and at least one said compensation transmission signal (S3) of at least one of said transmission signal (S5) and
  • controller (CT) at least one of said transmitter (H) by means of at least one of said transmission signal (S5) controls so that the receiver output of said receiver (D) except for a control error and system noise no shares of the compensation transmission signal (S3) more contains
  • At least said optical transmitter (H) can transmit into at least a first transmission path (11) which is only part of the device, and
  • At least one object (O), which is not part of the device, can transmit light into at least one second transmission path (12) which is only part of the device at the end of this first optical transmission path (11) said receiver (D), which is part of the device, ends and
  • At least this receiver (D) can receive at least the transmission signal (S5) modified by the passage through the first transmission path (11) and / or the second transmission path (12) and / or the reflection at the object (O) and into at least one receiver output signal (SO) converts and
  • one of said controllers (CT), which is part of the device outputs at least one signaling (S4) which can be reused outside the device, and vi. in that this signaling (S4) has a representative measured value for at least one property of at least one first transmission path (11) or a second transmission path (12) or a representative measured value for at least one property of at least one object (O) at the end of a said first transmission path (11). or at the beginning of said second transmission path (12) and is output via a signaling (S4) at least on request, and
  • this compensation transmitter (K) transmits into at least one third transmission link (13) which is completely part of the device and
  • At least this receiver (D) can receive at least the signal of said compensating transmitter (K) superimposed on the signal of at least one of the transmitters (H)
  • Halios system If such a Halios system to be installed in a single small SMD housing, so there are various challenges in terms of appearance and processability.
  • a maximum of the transmission energy to reach the object to be detected and a maximum of the reflected light of the object to be detected by a receiver are provided in the prior art, for example by DE102012210891A1, which is arranged coaxially to the transmitter or receiver center of gravity (FIG. 3 of DE102012210891A1).
  • a problem of the technique disclosed in DE102012210891 A1 is that the illumination of the space in relation to the device according to the invention is substantially lower.
  • the lenses are countersunk over the lid (reference numerals 219 and 319 of DE102012210891A1) by a small margin. This further limits the illumination.
  • the necessary spatial illumination is achieved by a complex three-dimensional arrangement of a plurality of sensor modules according to DE102012210891A1 (FIG. 6 of DE102012210891A1).
  • the disclosure DE102010027499A1 solves this illumination problem (FIG. 1 of DE102010027499A1) by multiple use of a module corresponding to DE102010027499A1.
  • the illumination problem described in European published patent application EP2549652A2 similarly solves the described illumination problem.
  • the three-dimensional arrangement does not take place at the module level but at the component level.
  • This complex three-dimensional arrangement of transmitters and receivers already achieves a better spatial illumination than in DE102012210891A1 (FIGS. 5a and 5b of FIGS EP2549652A2).
  • the lenses are always coaxial with the transmitters or receivers as in DE102012210891 A1 (FIGS. 2 and 4 of EP2549652A2).
  • a U-shaped housing results in shadowing of the receiver (reference numeral 200 of EP2549652A2), the receiving lobe of which is confined by the trough walls.
  • the document WO20131134456A1 discloses an arrangement in which a HALIOS system utilizes the glass fibers within a printed circuit board.
  • the transmitting diode (reference number 102 of WO20131134456A1) is shown in FIG. 1 of said disclosure with a lens, which in turn is arranged centrically.
  • Said Abschattungsproblem through the walls of the mounting hole (reference 109 of WO20131134456A1).
  • the illumination is not optimal here.
  • the free space above the system should not be monitored here, but only an area immediately above the sensor system.
  • the central lens (reference numerals 21 and 53 of DE102006020570A1) is arranged centrically to the receiver (reference E of DE102006020570A1). An asymmetric illumination is therefore not possible with this solution.
  • the transmitters have no lenses.
  • the light of the compensation transmitter is destroyed within the system so that it can not come to a situational change in the basic coupling as in the prior art i o.
  • Figure 1 is a device according to the invention.
  • the receiver (D) is symbolized by a photodiode with series resistor between ground and supply voltage VDD.
  • an optical barrier B is drawn in, inter alia, in FIG. 1, which prevents the light of the compensation transmitter, the compensation diode K, from falling directly onto the object (O).
  • the function of this barrier known from EP2418512A1 is as follows: In order for the transmitter (H) to be able to irradiate the object (O) via the transmission path (11), the barrier (B) must have an optical transmission path window
  • the barrier (B) in the region of the second transmission path (12) must have a second optical receiving path window (WD), which is to be detected for the
  • This wavelength of the radiation to be detected is typically of the same wavelength as the radiation of the transmitter (H), ie the transmitter wavelength. But this does not necessarily have to be the case.
  • the ob- (O) under the irradiation by the transmitter (H) fluoresces and that only this fluorescence is to be measured.
  • the window in the reception path (WD) is typically selected such that it is transparent only to the wavelength of this fluorescence radiation, that is to say the fluorescence wavelength.
  • the light of the compensation transmitter (K) should not escape to the outside. Therefore, it makes sense that the receive path window (WD) and the transmit path window (WH) for the wavelength of this light of the compensation transmitter (K), so the compensation transmitter wavelength, are not souläs- io sig, but preferably absorb These are also the Do not reflect the compensation transmitter light (K) to eliminate the light from the system and not remain in the system due to multiple reflection resulting in signal corruption.
  • the receive path window (WD) in front of the detector must be set for the wavelength of the
  • the compensation transmitter (K) expediently transmits on a different wavelength than the transmitter H.
  • the windows are preferably provided with filters, namely a transmit path filter (FH) for the transmit path and a receive path filter (FD) for the receiver path, in order to be able to meet these transmissivity requirements and these reflectivity requirements in an exemplary manner.
  • FH transmit path filter
  • FD receive path filter
  • transmissivity is the common factor by which the intensity (energy) of a light beam having a given center wavelength when passing through a filter or device component is weakened as compared to the intensity (energy) of the light source
  • the transmissivity is thus for example 50%.
  • reflectivity is the factor by which the intensity (energy) of a light beam with a given center-of-mass wavelength is reflected on a filter or a device component.
  • the reflectivity is thus for example 50%.
  • the factor by absorption factor is the factor by which the intensity (energy) of a light beam with a given center of gravity length when reflected on a filter or a housing component and simultaneous transmission through this filter or housing component is weakened in comparison with the intensity ( Energy) of the incident light beam before reflection on the object.
  • This energy of the light beam thus remains in the filter or in the housing component and is not reflected or transmitted.
  • the absorption factor is thus for example 50%.
  • the transmission path filter (FH) is preferably intended for the wavelength of the light of the transmitter (H), ie for the transmitter wavelength, a transmissivity of optimally 100%, of at least 50% or better at least 75% or better at least 88 % or better at least 95% or better at least 98% or better at least 99%.
  • the transmission path filter (FH) is preferably for the wavelength of the light of the transmitter (H), ie for the transmitter wavelength, a reflectivity of 0% optimal, but at most 50% or better at most 25% or better at most 12% or better at most 5% or better at most 2% or better at most 1%.
  • the transmit path filter (FH) should at the same time preferably for the wavelength of the light of the compensation transmitter (K), ie for the compensation transmitter wavelength, a transmissivity of 0%, but at most 50% or better at most 25% or better at most 12% or better at most 5 % or better at most 2% or better at most 1%.
  • the transmit path filter (FH) should at the same time preferably for the wavelength of the light of the compensation transmitter (K), ie for the compensation transmitter wavelength, an absorption factor of optimally 100% of at least 25% or better at least 50% or better at least 75% or better at least 88% or better at least 95% or better at least 98% or better at least 99%.
  • the receive path filter (FD) should preferably be for the wavelength of the
  • the reception path filter (FH) should at the same time preferably for the wavelength of the light of the compensation transmitter (K), that is to say for the compensation transmitter wavelength, have a transmissivity of optimally 0%, but at most 50% or better at most 25% or better at most 12% or better not more than 5% or better, not more than 2% or better, not more than 1%.
  • the reception path filter (FH) should at the same time preferably for the wavelength of the light of the compensation transmitter (K), ie for the compensation transmitter wavelength, an absorption factor of optimally 100%, of at least 25% or better at least 50% or better at least 75% or better at least 88% or better at least 95% or better at least 98% or better at least 99%.
  • the receiver (D) is in any case able to receive both the signal of the compensation transmitter (K) and the compensation transmitter, as well as the signal of the transmitter (H).
  • the receiver (D) must therefore both for the compensation wavelength and for the
  • Wavelength of the radiation to be detected so typically the transmitter wavelength and / or the fluorescence wavelength to be sensitive.
  • receive path filters are already known from US20050184301 A1 (eg, FIG. 12, reference numerals 85 to 89 of US20050184301 A1).
  • their task is only the selection of entering and previously from a measurement object (eg, Fig. 18, reference numeral 146 of US20050184301 A1) reflected back light of a transmitter (eg, Fig. 18, reference numerals 132-136 of US20050184301 A1).
  • the comparably reflected light of the transmitter (H) can enter the device according to the invention and thus reach the receiver (D) and, on the other hand, the light of the compensation transmitter (K) on the one hand just can not escape from the system and on the other hand as quickly as possible, so with as few reflections within the system can be eliminated from the system.
  • the spectral regions with a low absorption factor are first the wavelength of the transmitter (H), that is to say the transmitters
  • the materials of the walls of the housing should at all wavelengths have an absorption factor of at least 100%, but at least 25% or better at least 50% or better at least 75% or better at least 88% or better at least 95% or better at least 98% or better at least 99%. Of course, this does not apply to optically transparent parts, such as lenses etc.
  • a further barrier (B2) as is known, for example, from EP2418512A1, makes sense. This prevents this or at least extends the optical path or otherwise attenuates the unwanted direct signal.
  • the compensation transmitter (K) can only radiate into the receiver (D) via a reflection at a reflector (R), it is accommodated in a compensation transmitter cavity (CAV_K) and thus surrounded by a third optical barrier (B3).
  • This has a compensation path window (WK), by means of which the compensation transmitter (K) can irradiate the receiver (D), which lies in its own receiver cavity (CAV_D), via a reflector (R).
  • the compensation path window (WK) fulfills the function of a diaphragm which prevents the light from the compensation transmitter (K) from being fed into other optical paths, which could end on the object (O), for example. This is especially important if the wavelength selectivity of the previously mentioned filters (FD, FH) is insufficient.
  • EP2418512A1 Although a barrier (FIG. 2 or FIG. 3, reference numeral 40, of EP2418512A1) is already known from EP2418512A1, the function of this additional third optical barrier (B3) to EP2418512A1 is known from US Pat
  • EP2418512A1 not disclosed.
  • a barrier can be taken from DE102010028967A1 (FIG. 14, reference number 264 of DE102010028967A1).
  • their function as a diaphragm is not explicitly disclosed there.
  • FIG. 2 shows the device according to the invention in accordance with FIG. 1, wherein, in contrast to FIG. 1, the transmitter (H) is now regulated instead of the compensation transmitter (K).
  • FIG. 3 shows the device according to the invention in an exemplary plan view.
  • the exemplary device (1) for example, there are three LEDs (2, 3, 4) as transmitter (H) and a photodiode (9) as receiver (D).
  • the controller (CT) and, if necessary, the generator (G) must also be adapted.
  • the photodiode (9) receives the light emitted by the object (O) back from the transmitter H, the LEDs (2, 3, 4).
  • the object (O) is not shown in the figure and is thought to be above the plane of the drawing in the direction of the viewer.
  • an integrated preamplifier (8) is located in the device (1). Likewise located in the device (1) of the compensation transmitter
  • All elements (2, 3, 4, 10, 9, 8) are mounted on top of a common leadframe.
  • the electrical connection is made by bonding, preferably a gold wire bond.
  • a lip (17) is drawn in, as a second barrier (B2) the transmitting diodes (2, 3, 4) as a transmitter (H) of the photodiode (10), which is the receiver (D), optically separates.
  • Above each of the transmitting diodes (2, 3, 4) is in each case a lens (5, 6, 7), which serves for the light beam shaping.
  • the packaging technology used is that of the Molded Interconnection Device.
  • a three-dimensionally deformed leadframe is overmolded with molding compound.
  • MID technology is the possibility of direct implementation of electrical circuits, which would otherwise typically be made in PCB or FPCB technology, where the implementation is done without additional materials only by means of a special leadframe structure.
  • an integrated evaluation circuit (12) for controlling the transmitter (2, 3, 4), the evaluation of the signals of the receiver (D), here the photodiode (10), the control of the Compensation transmitter (K), here the compensation transmission diode (9), and the communication with the computer of the payload system (via S4), such as a mobile phone placed.
  • the circuit (12) thus typically includes the controller CT.
  • the contacts (eg 14) of this evaluation circuit (12) are connected to the contacts (eg 13) of the lead frame by bonding.
  • the evaluation circuit (12) is preferably in a recess of the housing, so that the bonding wires are covered after molding by molding compound.
  • the housing has an optical barrier (17), which extends the optical path between the transmitters (2, 3, 4) and the receiver (D), here the photodiode (10), and thus reduces the coupling via parasitic paths.
  • the optical barrier (17) can be designed in a relatively large number of degrees of freedom.
  • the said barrier (17) can be provided with slightly slanted walls to ensure that the entire housing can be easily removed from an injection molding tool.
  • Figure 4 shows once again the exemplary position and shape of the barrier (17) on top of the housing from two different sides. This prolongs the parasitic optical path.
  • the lenses (5, 6, 7, 40). are made of an optically transparent material. With regard to the transparency of these lenses, reference is made to the remarks on the transmit path filters and the receive path filters. On the transmitter side, they provide (5, 6, 7, 40) for alignment and shaping of the light beam (beam) (36, 37, 38 in FIG. 8) emitted by the respective transmitter (2, 3, 4) in a preferred direction.
  • the focal points (18, 20, 22) of the transmitter (2, 3, 4) relative to the respective optical axis (19, 21, 23) of the associated lens (5, 6, 7) are typically offset. Depending on the amount and
  • Alignment of the offset of the respective lens (5, 6, 7). changes the orientation of the Abstrahlkeule (36, 37, 38) of the associated transmitter diode (2, 3, 4).
  • the size and focal length of the respective lens (5, 6, 7) determine the shape of the respective beam (36, 37, 38).
  • Such lenses are known, for example, from US20050184301 A1.
  • the lenses (5, 6, 7, 40) must may not necessarily be cylindrically symmetric. It is quite conceivable that they can also have other shapes, for example, be elliptical. Also, the lenses (5, 6, 7, 40) can have more than two focal lengths.
  • the lenses can be made, for example, by injection molding of transparent plastics. Transparency refers to the radiation used for transmission and reception.
  • lenses (40) may be used on the receiver side to form a sensitivity lobe.
  • the focal points (24) of the receiver, here the photodiodes (10), relative to the optical axis (25) of the associated lens (40) may be offset analogously to the above-described method of Abstrahlkeulenformung for the transmitting diodes.
  • this center of gravity (24) and the point of impact of the optical axis (25) are located one above the other. This, as explained, does not necessarily have to be the case, depending on the application.
  • the sensitivity lobe or lobes are shaped in such a way that the degree of coverage of the sensitivity lobes and the emission lobes in the region of interest above the sensor is maximized. This maximizes the sensitivity of the system, which is important for motion detection, for example.
  • the system If the system is to be used, for example, for gesture recognition, it makes sense for the emission lobes (36, 37, 38) to point in different directions, ie for three emission lobes, for example, to show directions rotated by 120 ° about the axis perpendicular to the upper side. In that case, it makes sense if the emission lobes overlap a little, but this overlap should preferably be no more than 60 °. An emission lobe should therefore not be wider than 240 °.
  • the sensitivity lobe should cover the entire relevant area.
  • the respective lens (40) of the respective receiver (D) is transparent only for the wavelengths used for the transmitting diodes (2, 3, 4).
  • the wavelengths of the transmitting diodes (2, 3, 4) do not have to be identical. It is quite conceivable that quite deliberately different colors or wavelengths for several transmitting diodes (2, 3, 4) are selected. This makes it possible to produce a miniaturized color sensor. deliver.
  • a compensation transmitter (D, 9) then 5 for example, an infrared LED can be used.
  • Figure 6 shows a cross section through the device.
  • the leadframe is guided on two levels (27, 26).
  • a wall (52) surrounds the cavities (28), in which the components (2, 3, 4, 8, 9, 10, i o 12) are introduced.
  • the photodiode (10) both the transmitter cavity and the compensation transmitter cavity (CAV_K) are typically filled with a transparent potting compound (28) with a high refractive index , In the area of the compensation transmitter (K), here the compensation diode (9), this is
  • Figure 7 shows a horizontal section through the device. To recognize are different lines (29), which are part of the MID leadframe.
  • the transmitters (2, 3, 4) are typically on die islands (32, 33, 34)
  • the compensation transmitter here the compensation diode (9)
  • the receiver (D) here the photodiode (10)
  • the preamplifier (8) is applied to its (30) die paddle.
  • FIG. 9 illustrates how the alignment of the transmit and receive lobes is accomplished.
  • the transmitting diode it is expedient for the transmitting diode to be moved out of the axis by 15 °.
  • the lens has, for example, a diameter of about 200 ⁇ .
  • the optical axis of the transmitter (18, 20, 22) or receiver (24) is at the height of the transmitter (2, 3, 4) or receiver (D), (photodiode (10)) by a distance (b1) offset from the optical axis (19, 21, 23, 25) of the lens.
  • the light of the transmitter (18, 20, 22) or receiver (24) enters through the underside (41) of the lens in this and is emitted by this in the direction opposite to the transmitter.
  • FIG. 10 shows another horizontal cross section through the device (1) according to the invention.
  • the transmitters (2, 3, 4) are housed in separate transmitter cavities (53, 54, 55). These lead to a good optical decoupling.
  • the compensating transmitter (K) also has a compensation transmitter cavity (CAV_K), here the cavity (57) for the compensation diode (9), which through a web (48) from the corresponding receiver cavity (CAV_D), here the cavity (56) for the photodiode (10) is disconnected.
  • this web (48) is modified in height such that light from the compensation transmitter (K), here the compensation diode (9), to the receiver (D), i. to the photodiode (10), in the manner described below can get.
  • the cavities are optically open up to the compensation transmitter cavity (CAV_K), here the cavity (57) of the compensation transmitter diode (9).
  • Figure 11 shows a cross section of the exemplary device (1) through the compensation transmitter (K), here the compensation diode (9), and the receiver (D), here the photodiode (10).
  • the receiver (D), in this case the photodiode (10) must be irradiated, if possible, from above and not from the side with the light of the compensation transmitter (K), here the compensation diode (9), since the photosensitive layers of the Fo todiode (10) typically located on the surface thereof.
  • This problem is solved in the exemplary device (1) according to the invention such that the compensation transmitter (K), here the compensation diode
  • the light Due to the different refractive index between the transparent cover compound (28) and air, the light is reflected back into the housing. This reflection occurs when the angle of incidence of the light of the compensation transmitter (K), here the compensation transmitting diode (9), on the interface of the transparent potting compound (28) is so flat that total reflection occurs. This reflected-back light thus naturally falls, as desired, from above onto the receiver (D), the photodiode (10) (see also FIG. 12). Light that can pass directly from the compensation transmitter (K), here the compensation transmitter diode (9), to the receiver (D), the photodiode (10), could be scattered at this, fall on the object to be measured (O) and back fall on the photodetector (10) and thus disturb the measuring signal (S4) and the controller (CT).
  • CAV_D in this case the cavity (56), is designed in such a way that the receiver (D), in this case the photodiode (10), is irradiated as exclusively as possible by the light transmitted in this way.
  • the region (49) thus works like an optical waveguide.
  • the material of the housing of the device (1) is preferably carried out in a material which absorbs all radiation, in the wavelength range in which this radiation can escape from the housing and in all wavelength ranges in which the transmitter (2, 3, 4, 9) send, absorbed.
  • optical user surfaces such as the upper boundary layer of the transparent potting compound (28) on which total reflection is to occur, and the surfaces of the optical windows (WD, WH) or filters (FD, FH) or lenses (5, 6, 7 , 40).
  • an absorber (51) is applied to the upper boundary layer which reflects the radiation of the compensation transmitting diode (9), which is not reflected by total reflection on the receiver (D), here the photodiode (10), and therefore out of the housing Device (1) would leak uncontrolled, absorbed and thus eliminated from the system.
  • angles and shapes of the housing surfaces should be designed so that multiple reflection can not possibly result in a light path that ends on the receiver (D), here the photodiode (10).
  • Receiver (D) here the silicon of the photodiode (10), can enter, it must be irradiated at an angle which is as perpendicular as possible, since the speed of light in the material of the receiver (D) and in particular in the silicon of the photodiode (10) considerably smaller than in the waveguide. 25 It makes sense, but not necessarily, to do this
  • This tilting would lead to a reduced sensitivity of the receiver (D), here the photodiode (10), with respect to 30 the reception of optical radiation, which is reflected back from the object (O). Therefore, it is also useful to optimize the coupling into the receiver (D), here the photodiode (10) by an oblique prism as for the transmitter (H), here the transmitter diodes (2, 3, 4).
  • the receiver (D), and in this case in particular, the photodiode (10), which is typically made of silicon. is made for a portion of the radiation can be transparent. In this case, there may be a reflection of the light at the bottom of the receiver (D), so the photodiode (10) come. Although this increases the efficiency of the receiver, so the photodiode (10), but ultimately leads to a distortion of the receiver output signal (SO). Therefore, it makes sense to attach the receiver (D), in this case the photodiode (10), to the die paddle (31) with an adhesive which is suitable for those wavelength ranges which comprise the receiver (D), ie the photodiode (10). , can happen, has an absorbent effect.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Communication System (AREA)

Abstract

L'invention concerne un système Halios servant à mesurer une voie de transmission optique. Ce système diffère des autres systèmes Halios de l'état de la technique, en ce qu'un couplage de l'émetteur de compensation (K) avec le récepteur (D) par l'intermédiaire d'une lumière diffusée sur l'objet (O) est empêché par un filtre (FD) situé sur le trajet de réception à l'emplacement de la fenêtre de récepteur correspondante (WD) et la lumière de l'émetteur de compensation (K) est absorbée. Ainsi, le couplage de base est encore plus indépendant de la situation de mesure respective.
PCT/DE2014/000024 2013-02-27 2014-01-22 Système de micro-détecteur optique multifonctionnel WO2014131385A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
US14/384,217 US9300397B2 (en) 2013-02-27 2014-01-22 Multifunctional optical micro sensor system
PCT/DE2014/000046 WO2014131386A1 (fr) 2013-02-27 2014-02-07 Système de micro-détecteur optique multifonctionnel
US14/770,904 US9577750B2 (en) 2013-02-27 2014-02-07 Multifunctional micro sensor system
DE202014007446.1U DE202014007446U1 (de) 2013-02-27 2014-02-12 Kompensierendes optisches Sensorsystem
DE102014002486.5A DE102014002486B4 (de) 2013-02-27 2014-02-12 Kompensierendes optisches Sensorsystem
DE202014007445.3U DE202014007445U1 (de) 2013-02-27 2014-02-20 Multifunktionales optisches Mikro-Sensor-System
DE102014002788.0A DE102014002788A1 (de) 2013-02-27 2014-02-20 Multifunktionales optisches Mikro-Sensor-System

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
DE102013003791.3 2013-02-27
DE102013003791 2013-02-27
DE102013005787 2013-03-28
DE102013005787.6 2013-03-28
DE2013000495 2013-08-29
DEPCT/DE2013/000495 2013-08-29

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US20050184301A1 (en) 2004-02-25 2005-08-25 Sharp Kabushiki Kaisha Multiple ranging apparatus
DE102006003269A1 (de) * 2006-01-24 2007-07-26 Mechaless Systems Gmbh Verfahren zur Lichtlaufzeitmessung
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