WO2014069810A1 - Thin plate storage container - Google Patents

Thin plate storage container Download PDF

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Publication number
WO2014069810A1
WO2014069810A1 PCT/KR2013/009001 KR2013009001W WO2014069810A1 WO 2014069810 A1 WO2014069810 A1 WO 2014069810A1 KR 2013009001 W KR2013009001 W KR 2013009001W WO 2014069810 A1 WO2014069810 A1 WO 2014069810A1
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WO
WIPO (PCT)
Prior art keywords
thin plate
container
support
storage container
support piece
Prior art date
Application number
PCT/KR2013/009001
Other languages
French (fr)
Korean (ko)
Inventor
박정우
유재흥
Original Assignee
주식회사 삼에스코리아
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Application filed by 주식회사 삼에스코리아 filed Critical 주식회사 삼에스코리아
Publication of WO2014069810A1 publication Critical patent/WO2014069810A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus

Definitions

  • the present invention relates to a thin plate storage container, and more particularly, to a structure of a thin plate supporting member provided inside a thin plate storage container that can be used for storing or transporting a thin plate such as a semiconductor wafer, a storage disk, a liquid crystal glass substrate, or a manufacturing process. It's about improvement.
  • a thin plate storage container capable of storing precision thin plates such as semiconductor wafers, memory disks, and liquid crystal glass substrates basically includes a container body having a thin plate accommodation space with at least one side opening, and a door for opening and closing the opening of the container body. It has a form.
  • the thin wafer storage container for a semiconductor wafer includes a front opening shipping box (FOOSB) and a front opening Unified Pod (FOUP) method in which the door is opened and closed from the front, the semiconductor wafer of the door is opened and closed from the top and / or bottom, side It may be a thin plate storage container.
  • FOOSB front opening shipping box
  • FOUP front opening Unified Pod
  • the conventional thin plate storage container 101 has a thin plate A inserted and supported by support slots 115 formed on both inner sidewalls of the container body 110.
  • the thin plate A is stored in the form.
  • the support slot 115 is formed by the spaced interval of the support pieces 113 formed on both inner walls of the container body 110, the support pieces 113 on the inner wall surface of the container body 110 that is an injection product It may be formed integrally, or the thin plate supporting member 111 having the support pieces 113 may be formed on the inner wall of the container body 110 by being coupled to the inner wall of the container body 110 by a detachable structure or insert injection.
  • one side of the support piece 113 in contact with the thin plate (A) is formed of a thin plate support surface.
  • the upper surface of the support pieces 113 is formed of a thin plate support surface.
  • the thin plate supporting member is detachable or insert-coupled to the inner wall of the container body, since one side of the support pieces that the thin plate contacts is formed as a thin plate supporting surface, the thin plates on both sides of the container body There is a problem that the support member is incompatible with each other.
  • both side plate supporting members coupled to the left and right inner walls of the container body are respectively changed to the left side plate supporting member and the right side plate supporting member to the container body inner wall. It cannot be combined.
  • both thin plate supporting members have to be provided as separate parts, product cost increases due to an increase in parts manufacturing cost, and a problem arises in terms of convenience in terms of management and assembly of parts.
  • an object of the present invention is to provide a thin plate storage container that is compatible with the thin plate supporting members on both sides of the container body irrespective of each other, thereby lowering the product cost and improving the convenience of parts management and assembly.
  • the thin plate storage container having a container body having a thin plate storage space, and a pair of thin plate support members coupled to at least mutually opposite inner surfaces of the thin plate storage space to support the thin plate
  • the two thin plate supporting members are each achieved by a thin plate storage container having a mutually symmetrical structure so as to be compatible with both inner surfaces thereof.
  • each of the thin plate supporting members is a container coupling portion coupled to the inner surface of the thin plate receiving space, and at least one support piece having both sides extending from the container coupling portion in a direction parallel to the plate surface of the thin plate. It is preferable to include a thin plate support having.
  • the support pieces are formed in plurality so as to form at least one support slot spaced apart from each other in a direction orthogonal to the plate surface of the thin plate accommodated in the thin plate receiving space.
  • the container coupling portion is more preferably formed in a symmetrical structure on both sides of the thin plate support in a direction orthogonal to the plate surface of the thin plate.
  • a detachable coupling structure for detachably coupling the thin plate support member to the inner surface may be formed.
  • the thin plate supporting member may be inserted into the container body so that the container coupling portion is integrally coupled to the inner surface of the thin plate receiving space.
  • the container body forms a thin plate receiving space with a front opening
  • the thin plate supporting member is preferably coupled to the left and right inner side of the thin plate receiving space having a vertically symmetrical structure.
  • the support piece is formed in the form of at least one rib toward the inner rear of the thin plate receiving space from the region adjacent to the opening is effective to support a portion of the peripheral region of the thin plate.
  • the thin plate supporting member is formed of an electrostatic dissipating material in at least a portion of the support piece to which the thin plate is in contact.
  • the thin plate contact portion is formed symmetrically at least in the upper and lower portions of the support piece in the region where the thin plate is in contact.
  • the thin plate contact portion is made of an engineering plastic material.
  • the upper and lower surfaces of the support piece corresponding to the thin plate contact portion preferably has a minimum contact portion symmetrically formed on the upper and lower surfaces to form a minimum contact portion with respect to the thin plate.
  • the minimum contact part which forms the minimum contact part with respect to the said thin plate in the upper and lower surface of the said support piece is formed symmetrically on the said upper and lower surface.
  • the thin plate supporting members of both sides of the container body are compatible with each other irrespective of positions, and at the same time, a thin sheet storage container is provided, which lowers the cost of the product and improves the ease of parts management and assembly.
  • FIG. 1 is a perspective view of a general thin storage container
  • FIG. 2 is a perspective view of a thin plate supporting member of a conventional thin plate storage container
  • FIG. 3 is a perspective view of a thin plate supporting member of a thin plate storage container according to an embodiment of the present invention.
  • FIG. 4 is a perspective view of a thin plate supporting member of a thin plate storage container according to another embodiment of the present invention.
  • FIG. 5 is a perspective view showing another example of the support piece of the thin plate supporting member of FIGS. 3 and 4;
  • FIG. 6 is an enlarged perspective view of a support piece in region A of FIGS. 3 to 5;
  • FIG. 7 is an enlarged perspective view of the support piece in region B of FIGS. 3 to 5;
  • FIG. 8 is an enlarged perspective view of a support piece of region A of FIGS. 3 to 5 according to another embodiment of the present invention.
  • FIG. 9 is an enlarged perspective view of a supporting piece of region B of FIGS. 3 to 5 according to another embodiment of the present invention.
  • FIG. 10 is an enlarged perspective view of a support piece of region A of FIGS. 3 to 5 according to another embodiment of the present invention.
  • FIG. 11 is an enlarged perspective view of a support piece of region B of FIGS. 3 and 5 according to another embodiment of the present invention.
  • the thin plate storage container 1 is a container body 10 for receiving the thin plate (A), a door (not shown) for opening and closing the container body 10, the container body And a pair of thin plate supporting members 30 provided on both mutually opposing inner surfaces of the 10 to support the thin plates A.
  • the container body 10 has a structure in which a thin plate access opening 11 opening and closing with a door (not shown) is almost formed in a cube, and a thin plate storage space 13 is formed therein. have.
  • the container body 10 may be a form formed in the thin plate access opening 11, the top, the thin plate access opening 11 may be formed in the front surface of the container body 10.
  • the thin plate access opening 11 is formed on the front surface of the container body 10 will be described as a preferred example.
  • the thin plate supporting members 30 are respectively coupled to opposite inner surfaces of the container body 10, that is, left and right inner surfaces of the thin plate storage space 13. At this time, the thin plate supporting member 30 may be coupled to the container body 10 in a detachable coupling structure (31a) or insert injection method.
  • a detachable coupling structure 31a
  • various detachable coupling structures 31a such as coupling protrusions and coupling grooves, hooks and hook grooves, which are detachably coupled to the inner surface of the thin plate supporting member 30 and the container body 10, are selectively selected. It can be formed as.
  • the detachable coupling structure 31a formed on both inner surfaces of the container body 10 is also symmetrically formed so as to correspond to the symmetrical structure of both thin plate supporting members 30 to be described later.
  • the door (not shown) has a form corresponding to the thin plate access opening 11 of the container body 10, and in some cases a locking means (not shown) for locking and unlocking the closed state of the door (not shown) It may include.
  • the door (not shown) opens and closes the thin plate access opening 11 of the container body 10 at a position corresponding to the position of the thin plate access opening 11 of the container body 10.
  • Such a door (not shown) may have the same structure and configuration as the door (not shown) of various conventional thin plate storage containers 1 including a semiconductor wafer container, and a detailed description thereof will be omitted.
  • both the thin plate support member 30 has a mutually symmetrical structure so as to be compatible with each other regardless of position on the inner surface of the thin plate storage space 13 of the container body 10, respectively.
  • Each of the thin plate supporting members 30 includes a container coupling portion 31 coupled to the inner surface of the thin plate storage space 13, and a thin plate supporting portion 33 for supporting the thin plate A.
  • the container coupling portion 31 and the thin plate supporting portion 33 are preferably formed integrally with each other, and in some cases, the container coupling portion 31 and the thin plate supporting portion 33 may be formed as separate components to form the thin plate supporting member 30 by mutual coupling.
  • the container coupling portion 31 is formed in a symmetrical structure on both sides of the thin plate supporting portion 33 in a direction orthogonal to the plate surface of the thin plate A.
  • the thin plate supporting member 30 coupled to the container body 10 having the thin plate access opening 11 formed on the front surface thereof is formed such that the container coupling portion 31 is symmetrically formed at least on the upper and lower portions of the thin plate supporting portion 33.
  • the thin plate supporting member 30 coupled to the container body 10 having the thin plate access opening 11 formed thereon has the container coupling portion 31 symmetrical with each other on at least the left and right sides or the front and rear sides of the thin plate supporting portion 33. Is formed.
  • the container coupling part 31 may have various structures according to the manner in which the thin plate supporting member 30 is coupled to the container body 10.
  • the thin plate supporting member 30 is detachably coupled to the container body 10, as shown in FIG. 3, the amount of the thin plate storage space 13 of the container coupling portion 31 and the corresponding container body 10 is increased.
  • Various detachable coupling structures 31a such as coupling protrusions and coupling grooves, hooks and hook grooves, are formed on the inner surface as a detachable coupling structure 31a that is detachably coupled to each other.
  • the removable coupling structure (31a) is formed corresponding to the symmetrical structure of the container coupling portion (31).
  • the container coupling portion 31 is formed in a plate shape, as shown in Figs. 4 and 5, the corresponding container body ( Insert injection regions corresponding to the container coupling portion 31 are formed on both inner surfaces of the thin sheet storage space 13 of 10).
  • the insert injection region may also be formed to correspond to the symmetrical structure of the container coupling portion 31.
  • the insert injection region may be an opening structure corresponding to the container coupling portion 31 or a recessed region.
  • the container coupling portion 31 may be formed in other forms according to the structure of the thin plate support portion (33).
  • the support piece 34 to be described later formed on the thin plate support part 33 is formed of one support piece 34 supporting a single thin plate A
  • the container coupling part 31 is formed in addition to the above-described form. It is provided in the form of protrusions or ribs protruding from the thin plate support part 33 to the inner surface of the thin plate storage space 13 of the container body 10, and as described above, is detachably coupled to the container body 10 or an insert injection method. Can be combined.
  • the container coupling part 31 may be formed in various structures within the range in which the thin plate supporting member 30 can be interchangeably coupled to both inner surfaces of the thin plate accommodation space 13.
  • the thin plate support part 33 may be provided as at least one support piece 34 supporting the thin plate A accommodated in the container body 10. That is, in the case of the thin plate storage container 1 for storing a single thin plate A in the container body 10, each of the thin plate supporting members 30 has a single support piece 34 in the container coupling part 31.
  • the thin plate support part 33 is formed in the structure extended in the direction parallel to the plate surface of the thin plate A from the side.
  • the container body 10 having the thin plate access opening 11 formed on the front surface thereof is accommodated such that a plurality of thin plates A are arranged to be spaced apart from each other in parallel in the vertical direction.
  • the support pieces 34 formed on each of the thin plate supporting members 30 are spaced apart from each other in a thin plate alignment direction orthogonal to the plate surface of the thin plate A, ie, in an up and down direction, to form a plurality of support slots 35.
  • the support piece 34 is formed in the thin plate support surface of the upper and lower surfaces parallel to the plate surface of the thin plate (A) mutually symmetrical structure.
  • the thin plate supporting member 30 may support the thin plate A regardless of the position where the thin plate supporting member 30 is coupled to both inner surfaces of the container body 10.
  • each support piece 34 is formed in the shape of a single rib from the front thin plate access opening 11 side of the container body 10 to the inner rear opposite side as shown in FIGS. 3 and 4 to form the inside of the container body 10. Both side peripheral areas of the thin plate A can be supported on the left and right sides.
  • each support piece 34 is formed in the form of a pair of ribs in the region adjacent to the front thin plate access opening 11 of the container body 10 and the inner rear region of the container body 10, as shown in FIG. Both side peripheral areas of the thin plate A may be supported forward and backward on the inner left and right sides of the main body 10.
  • each support piece 34 is a plurality of ribs formed in a pair or more formed at a predetermined distance from the region adjacent to the front thin plate access opening 11 of the container body 10 toward the inner rear region of the container body 10. It may also be in the form.
  • each support piece 34 may be a variety of protruding structure that can support the thin plate (A), including a rib shape.
  • the region in contact with the circumferential end portion of the thin plate A is rearward in the support piece 34 of the rear region, regardless of various forms of the support piece 34. It may be formed as an inclined surface 36 inclined upward.
  • the wafer retainer (not shown) provided on the inner side of the door (not shown) and
  • the inclined surface 36 formed in the rear region of the support piece 34 allows the wafer A, which is a thin plate A, to be supported in the form of a floating interposed portion in the support slot 35 space between the adjacent support pieces 34. For sake.
  • the support piece 34 at least in the region for supporting the thin plate A, the thin plate contact portion 37 in contact with the thin plate A is provided symmetrically on both upper and lower sides. desirable.
  • the thin plate contact portion 37 has a low friction and heat resistance and abrasion resistance so that when the door (not shown) of the thin plate storage container 1 is closed, the thin plate A can move smoothly in the process of being interposed in the support slot 35 space. It is desirable to be provided with this excellent engineering plastics material.
  • the minimum contact portion 38 forming the minimum contact portion with respect to the thin plate A is formed of the support piece 34. It is preferable that the upper and lower surfaces are formed symmetrically. This minimum contact portion 38 prevents damage to the thin plate A by minimizing the contact area of the support piece 34 with respect to the thin plate A. As shown in FIG.
  • the minimum contact portion 38 may be formed in the form of protrusions or beads protruding from the plate surface of the support piece 34.
  • the support piece 34 or the thin plate supporting member 30 is made of an electrostatic dissipating material, the container body 10 or the container body 10. It is preferable to discharge the static electricity by grounding to the outside through a separate ground path provided on the outside. Thereby, damage to the thin plate A by static electricity can be prevented.
  • the electrostatic dissipation material region is preferably the thin plate contact region of the support piece 34 described above, and the thin plate contact portion 37 and the minimum contact portion 38 region are the electrostatic hydroxide material region.
  • each thin plate supporting member 30 has a thin plate storage of the container body 10.
  • the space 13 may be coupled to a removable structure or an insert injection method regardless of positions on both inner surfaces.
  • each thin plate supporting member 30 is inverted up and down, as shown in FIG.
  • the left and right inner walls of the left and right positions can be combined.
  • each of the thin plate support members 30 in the form of inverted back and forth or left and right reversed on both side walls of the container body (10) They can be combined regardless of their position.
  • the two thin plate supporting members 30 can be manufactured as a single compatible part using one mold without providing the separate parts using separate molds, thereby reducing component manufacturing cost and product cost. It is possible to improve the convenience in terms of component management and assembly.
  • the thin plate supporting members on both sides of the container body are compatible with each other regardless of position, and at the same time, a thin sheet storage container is provided, which lowers the unit cost and improves component management and assembly convenience.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Packaging Frangible Articles (AREA)

Abstract

The present invention relates to a thin plate storage container including: a container main body having a thin plate storage space; and at least a pair of thin plate supporting members coupled to opposite inner surfaces facing each other inside the thin plate storage space, wherein the opposite thin plate supporting members have a mutually symmetrical structure such that they can be interchanged on each of the opposite inner surfaces. Accordingly, the thin plate supporting members on the opposite inner surfaces inside the container main body can be interchanged regardless of their mutual positions, and also, a thin plate storage container is provided having reduced product cost and improved convenience for managing parts and assembly.

Description

박판 수납용기Thin plate storage container
본 발명은 박판 수납용기에 관한 것으로서, 보다 상세하게는 반도체 웨이퍼, 기억디스크, 액정유리기판 등의 박판을 보관 또는 수송하거나 제조 공정 등에서 사용될 수 있는 박판 수납용기의 내부에 마련되는 박판지지부재의 구조 개선에 관한 것이다.The present invention relates to a thin plate storage container, and more particularly, to a structure of a thin plate supporting member provided inside a thin plate storage container that can be used for storing or transporting a thin plate such as a semiconductor wafer, a storage disk, a liquid crystal glass substrate, or a manufacturing process. It's about improvement.
일반적으로 반도체 웨이퍼나 기억디스크, 액정유리기판 등의 정밀 박판을 수납할 수 있는 박판 수납용기는 기본적으로 적어도 일 측이 개구된 박판 수용 공간을 갖는 용기본체와, 용기본체의 개구를 개폐하는 도어를 구비한 형태를 가지고 있다. Generally, a thin plate storage container capable of storing precision thin plates such as semiconductor wafers, memory disks, and liquid crystal glass substrates basically includes a container body having a thin plate accommodation space with at least one side opening, and a door for opening and closing the opening of the container body. It has a form.
이러한 박판 수납용기에 대해 이하에서는 편의 상 반도체 웨이퍼용 박판 수납용기를 예로 하여 설명한다. 이때, 반도체 웨이퍼용 박판 수납용기는 도어가 전면에서 개폐되는 FOSB(Front Opening Shipping Box) 및 FOUP(Front Opening Unified Pod) 방식을 포함하여 도어가 상부 및/또는 하부, 측면에서 개폐되는 방식의 반도체 웨이퍼용 박판 수납용기일 수 있다. Such a thin plate storage container will be described below with reference to the thin plate storage container for a semiconductor wafer for convenience. At this time, the thin wafer storage container for a semiconductor wafer includes a front opening shipping box (FOOSB) and a front opening Unified Pod (FOUP) method in which the door is opened and closed from the front, the semiconductor wafer of the door is opened and closed from the top and / or bottom, side It may be a thin plate storage container.
전술한 바와 같은, 도 1 및 도 2에 도시된 바와 같이, 통상의 박판 수납용기(101)는 용기본체(110)의 내부 양 측벽에 형성된 지지슬롯(115)에 박판(A)이 삽입 지지되는 형태로 박판(A)을 수납한다. As described above, as shown in FIGS. 1 and 2, the conventional thin plate storage container 101 has a thin plate A inserted and supported by support slots 115 formed on both inner sidewalls of the container body 110. The thin plate A is stored in the form.
여기서, 지지슬롯(115)은 용기본체(110)의 양측 내벽에 형성되는 지지편(113)들의 이격 간격에 의해 형성되는데, 지지편(113)들은 사출품인 용기본체(110)의 내벽면에 일체로 형성되거나, 지지편(113)들을 갖는 박판지지부재(111)가 용기본체(110)의 내벽에 착탈 구조 또는 인서트 사출에 의해 결합됨으로써 용기본체(110) 내측벽에 형성될 수 있다.Here, the support slot 115 is formed by the spaced interval of the support pieces 113 formed on both inner walls of the container body 110, the support pieces 113 on the inner wall surface of the container body 110 that is an injection product It may be formed integrally, or the thin plate supporting member 111 having the support pieces 113 may be formed on the inner wall of the container body 110 by being coupled to the inner wall of the container body 110 by a detachable structure or insert injection.
이때, 지지편(113)들은 박판(A)과 접하는 일 측면이 박판 지지면으로 형성된다. 예컨대, 박판 수납용기(101)가 FOSB 또는 FOUP 방식일 경우, 지지편(113)들의 상부면이 박판 지지면으로 형성된다. At this time, one side of the support piece 113 in contact with the thin plate (A) is formed of a thin plate support surface. For example, when the thin plate storage container 101 is FOSB or FOUP type, the upper surface of the support pieces 113 is formed of a thin plate support surface.
그런데, 박판지지부재가 용기본체 내측벽에 착탈 또는 인서트 결합되는 형태의 종래 박판 수납용기에 있어서는 박판이 접하는 지지편들의 일측면이 박판 지지면으로 형성되는 방향성을 갖기 때문에, 용기본체의 양측의 박판지지부재는 상호 호환이 불가능한 문제점이 발생한다. However, in the conventional thin plate storage container in which the thin plate supporting member is detachable or insert-coupled to the inner wall of the container body, since one side of the support pieces that the thin plate contacts is formed as a thin plate supporting surface, the thin plates on both sides of the container body There is a problem that the support member is incompatible with each other.
예컨대, 박판 수납용기가 FOSB 또는 FOUP 방식일 경우, 용기본체의 좌우 내측벽에 결합되는 양측 박판지지부재는 각각 좌측용 박판지지부재와 우측용 박판지지부재로 상호 위치를 변경하여 용기본체 내측벽에 결합될 수 없는 것이다. For example, when the thin plate storage container is a FOSB or FOUP type, both side plate supporting members coupled to the left and right inner walls of the container body are respectively changed to the left side plate supporting member and the right side plate supporting member to the container body inner wall. It cannot be combined.
이에 따라, 양측 박판지지부재를 별개의 부품으로 마련해야 하기 때문에, 부품 제조 비용 상승에 따른 제품 단가 상승을 초래하고, 부품의 관리적인 측면 및 조립성 측면 등에서 편의성이 저하되는 문제점이 발생한다. Accordingly, since both thin plate supporting members have to be provided as separate parts, product cost increases due to an increase in parts manufacturing cost, and a problem arises in terms of convenience in terms of management and assembly of parts.
따라서 본 발명의 목적은 용기본체 내부 양측의 박판지지부재가 상호 위치 상관없이 호환 가능도록 함으로써, 제품 단가를 낮추고 부품 관리 및 조립 편의성이 향상되는 박판 수납용기를 제공하는 것이다. Accordingly, an object of the present invention is to provide a thin plate storage container that is compatible with the thin plate supporting members on both sides of the container body irrespective of each other, thereby lowering the product cost and improving the convenience of parts management and assembly.
상기 목적은 본 발명에 따라, 박판 수납공간을 갖는 용기본체와, 상기 박판 수납공간의 적어도 상호 대향하는 양 내측면에 결합되어 박판을 지지하는 한 쌍의 박판지지부재를 갖는 박판 수납용기에 있어서, 상기 양 박판지지부재는 각각 상기 양 내측면에 호환 가능하게 결합되도록 상호 대칭 구조를 갖는 것을 특징으로 하는 박판 수납용기에 의해 달성된다.According to the present invention, in the thin plate storage container having a container body having a thin plate storage space, and a pair of thin plate support members coupled to at least mutually opposite inner surfaces of the thin plate storage space to support the thin plate, The two thin plate supporting members are each achieved by a thin plate storage container having a mutually symmetrical structure so as to be compatible with both inner surfaces thereof.
여기서, 상기 각 박판지지부재는 상기 박판 수납공간의 내측면에 결합되는 용기결합부와, 상기 용기결합부로부터 상기 박판의 판면에 평행한 방향으로 연장된 양 측면이 대칭구조인 적어도 하나의 지지편을 갖는 박판지지부를 포함하는 것이 바람직하다. Here, each of the thin plate supporting members is a container coupling portion coupled to the inner surface of the thin plate receiving space, and at least one support piece having both sides extending from the container coupling portion in a direction parallel to the plate surface of the thin plate. It is preferable to include a thin plate support having.
이때, 상기 지지편은 상기 박판 수납공간에 수납되는 박판의 판면에 직교하는 방향으로 상호 이격되어 적어도 하나의 지지슬롯을 형성하도록 복수로 형성된 것이 효과적이다. At this time, it is effective that the support pieces are formed in plurality so as to form at least one support slot spaced apart from each other in a direction orthogonal to the plate surface of the thin plate accommodated in the thin plate receiving space.
그리고 상기 용기결합부는 상기 박판의 판면에 직교하는 방향으로 상기 박판지지부의 양측에 대칭구조로 형성되어 있는 것이 보다 바람직하다. And the container coupling portion is more preferably formed in a symmetrical structure on both sides of the thin plate support in a direction orthogonal to the plate surface of the thin plate.
한편, 상기 용기결합부와 이에 대응하는 상기 박판 수납공간의 양 내측면에는 상기 박판지지부재를 상기 내측면에 착탈 가능하게 결합하는 착탈결합구조가 형성될 수 있다. On the other hand, on both inner surfaces of the container coupling portion and the thin plate receiving space corresponding thereto, a detachable coupling structure for detachably coupling the thin plate support member to the inner surface may be formed.
또는, 상기 박판지지부재는 상기 용기결합부가 상기 박판 수납공간의 내측면에 일체로 결합되도록 상기 용기본체에 인서트 사출될 수 있다. Alternatively, the thin plate supporting member may be inserted into the container body so that the container coupling portion is integrally coupled to the inner surface of the thin plate receiving space.
한편, 상기 용기본체는 전면 개구된 박판 수용공간을 형성하며, 상기 박판지지부재는 적어도 상하 대칭구조를 가지고 상기 박판 수용공간의 좌우 내측면에 결합되는 것이 바람직하다. On the other hand, the container body forms a thin plate receiving space with a front opening, the thin plate supporting member is preferably coupled to the left and right inner side of the thin plate receiving space having a vertically symmetrical structure.
이때, 상기 지지편은 상기 개구에 인접한 영역으로부터 상기 박판 수용공간의 내측 후방을 향해 적어도 하나의 리브 형태로 형성되어 상기 박판의 둘레영역 일부를 지지하는 것이 효과적이다.At this time, the support piece is formed in the form of at least one rib toward the inner rear of the thin plate receiving space from the region adjacent to the opening is effective to support a portion of the peripheral region of the thin plate.
그리고 상기 박판지지부재는 적어도 상기 박판이 접촉되는 상기 지지편의 일부 영역이 정전기 소산 재료로 형성되는 것을 특징으로 하는 박판 수납용기. And wherein the thin plate supporting member is formed of an electrostatic dissipating material in at least a portion of the support piece to which the thin plate is in contact.
또한, 적어도 상기 박판이 접촉되는 영역의 상기 지지편 상하부에는 박판접촉부가 대칭되게 형성되어 있는 것이 보다 바람직하다. Further, it is more preferable that the thin plate contact portion is formed symmetrically at least in the upper and lower portions of the support piece in the region where the thin plate is in contact.
이때, 상기 박판접촉부는 엔지니어링 플라스틱 재질로 마련되는 것이 보다 효과적이다.At this time, it is more effective that the thin plate contact portion is made of an engineering plastic material.
또한, 상기 박판접촉부에 대응하는 상기 지지편의 상하부면에는 상기 박판에 대해 최소 접촉부분을 형성하는 최소접촉부가 상기 상하부면에 대칭되게 형성되어 있는 것이 바람직하다. In addition, the upper and lower surfaces of the support piece corresponding to the thin plate contact portion preferably has a minimum contact portion symmetrically formed on the upper and lower surfaces to form a minimum contact portion with respect to the thin plate.
또한, 상기 지지편의 상하부면에는 상기 박판에 대해 최소 접촉부분을 형성하는 최소접촉부가 상기 상하부면에 대칭되게 형성되어 있는 것이 효과적이다. Moreover, it is effective that the minimum contact part which forms the minimum contact part with respect to the said thin plate in the upper and lower surface of the said support piece is formed symmetrically on the said upper and lower surface.
본 발명에 따르면, 용기본체 내부 양측의 박판지지부재가 상호 위치 상관없이 호환 가능함과 동시에, 제품 단가를 낮추고 부품 관리 및 조립 편의성이 향상되는 박판 수납용기가 제공된다. According to the present invention, the thin plate supporting members of both sides of the container body are compatible with each other irrespective of positions, and at the same time, a thin sheet storage container is provided, which lowers the cost of the product and improves the ease of parts management and assembly.
도 1은 일반적인 박판 수납용기의 사시도, 1 is a perspective view of a general thin storage container,
도 2는 종래 박판 수납용기의 박판지지부재 사시도, 2 is a perspective view of a thin plate supporting member of a conventional thin plate storage container;
도 3은 본 발명의 일실시예에 따른 박판 수납용기의 박판지지부재 사시도,3 is a perspective view of a thin plate supporting member of a thin plate storage container according to an embodiment of the present invention;
도 4은 본 발명의 다른 실시예에 따른 박판 수납용기의 박판지지부재 사시도,4 is a perspective view of a thin plate supporting member of a thin plate storage container according to another embodiment of the present invention;
도 5는 도 3 및 도 4의 박판지지부재의 지지편에 대한 다른 예를 도시한 사시도,5 is a perspective view showing another example of the support piece of the thin plate supporting member of FIGS. 3 and 4;
도 6는 도 3 내지 도 5의 A영역의 지지편 확대 사시도,6 is an enlarged perspective view of a support piece in region A of FIGS. 3 to 5;
도 7은 도 3 내지 도 5의 B영역의 지지편 확대 사시도,7 is an enlarged perspective view of the support piece in region B of FIGS. 3 to 5;
도 8은 본 발명의 다른 형태에 따른 도 3 내지 도 5의 A영역의 지지편 확대 사시도,8 is an enlarged perspective view of a support piece of region A of FIGS. 3 to 5 according to another embodiment of the present invention;
도 9는 본 발명의 다른 형태에 따른 도 3 내지 도 5의 B영역의 지지편 확대 사시도,9 is an enlarged perspective view of a supporting piece of region B of FIGS. 3 to 5 according to another embodiment of the present invention;
도 10은 본 발명의 다른 형태에 따른 도 3 내지 도 5의 A영역의 지지편 확대 사시도,10 is an enlarged perspective view of a support piece of region A of FIGS. 3 to 5 according to another embodiment of the present invention;
도 11은 본 발명의 다른 형태에 따른 도 3 및 도 5의 B영역의 지지편 확대 사시도.11 is an enlarged perspective view of a support piece of region B of FIGS. 3 and 5 according to another embodiment of the present invention;
도 3에 도시된 바와 같이, 본 발명에 따른 박판 수납용기(1)는 박판(A)을 수납하는 용기본체(10)와, 용기본체(10)를 개폐하는 도어(미도시)와, 용기본체(10)의 상호 대향하는 양 내측면에 마련되어 박판(A)을 지지하는 한 쌍의 박판지지부재(30)를 포함한다. As shown in Figure 3, the thin plate storage container 1 according to the present invention is a container body 10 for receiving the thin plate (A), a door (not shown) for opening and closing the container body 10, the container body And a pair of thin plate supporting members 30 provided on both mutually opposing inner surfaces of the 10 to support the thin plates A.
용기본체(10)는 거의 입방체로 형성되며, 일 측에 도어(미도시)로 개폐되는 박판 출입 개구(11)가 형성되어 있고, 그 내부에 박판 수납공간(13)이 형성되어 있는 구조를 가지고 있다. 이때, 용기본체(10)는 박판 출입 개구(11)가 상부에 형성된 형태일 수도 있으며, 박판 출입 개구(11)가 용기본체(10)의 전면에 형성된 형태일 수 있다. 이하에서는 설명의 편의상 박판 출입 개구(11)가 용기본체(10)의 전면에 형성된 예를 바람직한 예로 설명한다. The container body 10 has a structure in which a thin plate access opening 11 opening and closing with a door (not shown) is almost formed in a cube, and a thin plate storage space 13 is formed therein. have. In this case, the container body 10 may be a form formed in the thin plate access opening 11, the top, the thin plate access opening 11 may be formed in the front surface of the container body 10. Hereinafter, for convenience of description, an example in which the thin plate access opening 11 is formed on the front surface of the container body 10 will be described as a preferred example.
이러한 용기본체(10)의 상호 대향하는 양 내측면 즉, 박판 수납공간(13)의 좌,우 내측면에 각각 박판지지부재(30)가 결합된다. 이때, 박판지지부재(30)는 착탈결합구조(31a) 또는 인서트 사출 등의 방식으로 용기본체(10)에 결합될 수 있다. 착탈결합구조(31a)의 경우 박판지지부재(30)와 용기본체(10) 내측면에 각각 상호 착탈 가능하게 결합되는 결합돌기와 결합홈, 후크와 후크홈 등의 다양한 착탈결합구조(31a)를 선택적으로 형성할 수 있다. 이때, 용기본체(10)의 양 내측면에 형성되는 착탈결합구조(31a)는 후술할 양 박판지지부재(30)의 대칭구조에 대응하도록 역시 대칭되게 형성된다. The thin plate supporting members 30 are respectively coupled to opposite inner surfaces of the container body 10, that is, left and right inner surfaces of the thin plate storage space 13. At this time, the thin plate supporting member 30 may be coupled to the container body 10 in a detachable coupling structure (31a) or insert injection method. In the case of the detachable coupling structure 31a, various detachable coupling structures 31a, such as coupling protrusions and coupling grooves, hooks and hook grooves, which are detachably coupled to the inner surface of the thin plate supporting member 30 and the container body 10, are selectively selected. It can be formed as. At this time, the detachable coupling structure 31a formed on both inner surfaces of the container body 10 is also symmetrically formed so as to correspond to the symmetrical structure of both thin plate supporting members 30 to be described later.
도어(미도시)는 용기본체(10)의 박판 출입 개구(11)에 대응하는 형태를 가지고 있으며, 경우에 따라서 도어(미도시)의 폐쇄상태를 잠금 및 잠금 해제하는 잠금수단(미도시)을 포함할 수 있다. 이러한 도어(미도시)는 용기본체(10)의 박판 출입 개구(11)의 위치에 대응하는 위치에서 용기본체(10)의 박판 출입 개구(11)를 개폐한다. 이러한 도어(미도시)는 반도체 웨이퍼 용기를 포함한 통상적인 다양한 박판 수납용기(1)의 도어(미도시)와 마찬가지의 구조 및 구성을 가질 수 있는 것으로서, 본 발명에서는 구체적인 설명을 생략한다. The door (not shown) has a form corresponding to the thin plate access opening 11 of the container body 10, and in some cases a locking means (not shown) for locking and unlocking the closed state of the door (not shown) It may include. The door (not shown) opens and closes the thin plate access opening 11 of the container body 10 at a position corresponding to the position of the thin plate access opening 11 of the container body 10. Such a door (not shown) may have the same structure and configuration as the door (not shown) of various conventional thin plate storage containers 1 including a semiconductor wafer container, and a detailed description thereof will be omitted.
한편, 양 박판지지부재(30)는 각각 용기본체(10)의 박판 수납공간(13) 양 내측면에 위치 상관없이 호환 가능하게 결합되도록 상호 대칭 구조를 가지고 있다. On the other hand, both the thin plate support member 30 has a mutually symmetrical structure so as to be compatible with each other regardless of position on the inner surface of the thin plate storage space 13 of the container body 10, respectively.
이들 각 박판지지부재(30)는 박판 수납공간(13)의 내측면에 결합되는 용기결합부(31)와, 박판(A)을 지지하기 위한 박판지지부(33)를 포함한다. 이 용기결합부(31)와 박판지지부(33)는 상호 일체로 형성되어 있는 것이 바람직하며, 경우에 따라서는 별개의 부품으로 마련되어 상호 결합에 의해 박판지지부재(30)를 형성할 수 있다. Each of the thin plate supporting members 30 includes a container coupling portion 31 coupled to the inner surface of the thin plate storage space 13, and a thin plate supporting portion 33 for supporting the thin plate A. The container coupling portion 31 and the thin plate supporting portion 33 are preferably formed integrally with each other, and in some cases, the container coupling portion 31 and the thin plate supporting portion 33 may be formed as separate components to form the thin plate supporting member 30 by mutual coupling.
용기결합부(31)는 박판(A)의 판면에 직교하는 방향으로 박판지지부(33)의 양측에 대칭구조로 형성된다. 바람직한 예로서 박판 출입 개구(11)가 전면에 형성된 용기본체(10)에 결합되는 박판지지부재(30)는 용기결합부(31)가 박판지지부(33)의 적어도 상하부에 상호 대칭되게 형성된다. 또는, 박판 출입 개구(11)가 상부에 형성된 용기본체(10)에 결합되는 박판지지부재(30)는 용기결합부(31)가 박판지지부(33)의 적어도 좌우 측, 또는 전후 측에 상호 대칭되게 형성된다. The container coupling portion 31 is formed in a symmetrical structure on both sides of the thin plate supporting portion 33 in a direction orthogonal to the plate surface of the thin plate A. As a preferred example, the thin plate supporting member 30 coupled to the container body 10 having the thin plate access opening 11 formed on the front surface thereof is formed such that the container coupling portion 31 is symmetrically formed at least on the upper and lower portions of the thin plate supporting portion 33. Alternatively, the thin plate supporting member 30 coupled to the container body 10 having the thin plate access opening 11 formed thereon has the container coupling portion 31 symmetrical with each other on at least the left and right sides or the front and rear sides of the thin plate supporting portion 33. Is formed.
그리고 용기결합부(31)는 전술한 바와 같이, 박판지지부재(30)가 용기본체(10)에 결합되는 방식에 따라서 다양한 구조를 가질 수 있다. As described above, the container coupling part 31 may have various structures according to the manner in which the thin plate supporting member 30 is coupled to the container body 10.
예컨대, 박판지지부재(30)가 용기본체(10)에 착탈 가능하게 결합될 경우, 도 3과 같이, 용기결합부(31)와 이에 대응하는 용기본체(10)의 박판 수납공간(13) 양 내측면에는 상호 착탈 가능하게 결합되는 착탈결합구조(31a)로서 결합돌기와 결합홈, 후크와 후크홈 등의 다양한 착탈결합구조(31a)가 형성된다. 이때, 착탈결합구조(31a)는 용기결합부(31)의 대칭구조에 대응하게 형성된다. For example, when the thin plate supporting member 30 is detachably coupled to the container body 10, as shown in FIG. 3, the amount of the thin plate storage space 13 of the container coupling portion 31 and the corresponding container body 10 is increased. Various detachable coupling structures 31a, such as coupling protrusions and coupling grooves, hooks and hook grooves, are formed on the inner surface as a detachable coupling structure 31a that is detachably coupled to each other. At this time, the removable coupling structure (31a) is formed corresponding to the symmetrical structure of the container coupling portion (31).
또는, 박판지지부재(30)가 용기본체(10)에 인서트 사출 방식으로 결합될 경우, 용기결합부(31)는 도 4 및 도 5와 같이, 판 형상으로 형성되고, 이에 대응하는 용기본체(10)의 박판 수납공간(13) 양 내측면에는 용기결합부(31)에 대응하는 인서트 사출 영역이 형성된다. 이때, 인서트 사출 영역 역시 용기결합부(31)의 대칭구조에 대응하게 형성될 수 있다. 여기서, 인서트 사출 영역은 용기결합부(31)에 대응하는 개구 구조이거나 함몰된 영역일 수 있다. Or, when the thin plate supporting member 30 is coupled to the container body 10 by the insert injection method, the container coupling portion 31 is formed in a plate shape, as shown in Figs. 4 and 5, the corresponding container body ( Insert injection regions corresponding to the container coupling portion 31 are formed on both inner surfaces of the thin sheet storage space 13 of 10). In this case, the insert injection region may also be formed to correspond to the symmetrical structure of the container coupling portion 31. Here, the insert injection region may be an opening structure corresponding to the container coupling portion 31 or a recessed region.
물론, 용기결합부(31)는 박판지지부(33)의 구조에 따라 다른 형태로 형성될 수도 있다. 일 예로 박판지지부(33)에 형성되는 후술할 지지편(34)이 단일의 박판(A)을 지지하는 하나의 지지편(34)으로 형성될 경우, 용기결합부(31)는 전술한 형태 외에도 박판지지부(33)로부터 용기본체(10)의 박판 수납공간(13) 내측면으로 돌출된 돌기나 리브 등의 형태로 마련되어 전술한 바와 같이, 용기본체(10)에 착탈 가능하게 결합되거나 인서트 사출 방식으로 결합될 수 있는 것이다. Of course, the container coupling portion 31 may be formed in other forms according to the structure of the thin plate support portion (33). For example, when the support piece 34 to be described later formed on the thin plate support part 33 is formed of one support piece 34 supporting a single thin plate A, the container coupling part 31 is formed in addition to the above-described form. It is provided in the form of protrusions or ribs protruding from the thin plate support part 33 to the inner surface of the thin plate storage space 13 of the container body 10, and as described above, is detachably coupled to the container body 10 or an insert injection method. Can be combined.
이 외에도 용기결합부(31)는 박판지지부재(30)가 박판 수납공간(13)의 양 내측면에 위치 상관없이 호환 가능하게 결합될 수 있는 범위 내에서 다양한 구조로 형성될 수 있다. In addition, the container coupling part 31 may be formed in various structures within the range in which the thin plate supporting member 30 can be interchangeably coupled to both inner surfaces of the thin plate accommodation space 13.
박판지지부(33)는 용기본체(10) 내에 수납되는 박판(A)을 지지하는 적어도 하나의 지지편(34)으로 마련될 수 있다. 즉, 용기본체(10) 내에 단일의 박판(A)이 수납되는 용도의 박판 수납용기(1)의 경우에는 각 박판지지부재(30)에는 단일의 지지편(34)이 용기결합부(31)로부터 박판(A)의 판면에 평행한 방향으로 연장되어 있는 구조로 박판지지부(33)를 형성한다. The thin plate support part 33 may be provided as at least one support piece 34 supporting the thin plate A accommodated in the container body 10. That is, in the case of the thin plate storage container 1 for storing a single thin plate A in the container body 10, each of the thin plate supporting members 30 has a single support piece 34 in the container coupling part 31. The thin plate support part 33 is formed in the structure extended in the direction parallel to the plate surface of the thin plate A from the side.
바람직한 예로서 전면에 박판 출입 개구(11)가 형성된 용기본체(10)는 그 내부에 복수의 박판(A)이 상하 방향으로 상호 평행하게 이격 정렬되도록 수납되는데, 이 경우 도 3 내지 도 5와 같이, 각 박판지지부재(30)에 형성되는 지지편(34)은 박판(A)의 판면에 직교하는 박판 정렬 방향 즉, 상하 방향으로 상호 이격되어 복수의 지지슬롯(35)을 형성한다. As a preferred example, the container body 10 having the thin plate access opening 11 formed on the front surface thereof is accommodated such that a plurality of thin plates A are arranged to be spaced apart from each other in parallel in the vertical direction. In this case, as shown in FIGS. 3 to 5. , The support pieces 34 formed on each of the thin plate supporting members 30 are spaced apart from each other in a thin plate alignment direction orthogonal to the plate surface of the thin plate A, ie, in an up and down direction, to form a plurality of support slots 35.
그리고 지지편(34)은 박판(A)의 판면에 평행한 상하부 양 면이 상호 대칭 구조의 박판 지지면으로 형성된다. 이에 의해, 박판지지부재(30)가 용기본체(10)의 양 내측면에 결합되는 위치와 상관없이 박판(A)을 지지할 수 있다. And the support piece 34 is formed in the thin plate support surface of the upper and lower surfaces parallel to the plate surface of the thin plate (A) mutually symmetrical structure. As a result, the thin plate supporting member 30 may support the thin plate A regardless of the position where the thin plate supporting member 30 is coupled to both inner surfaces of the container body 10.
여기서, 각 지지편(34)은 도 3 및 도 4와 같이, 용기본체(10)의 전면 박판 출입 개구(11) 측으로부터 내측 후방 반대측까지 단일의 리브 형태로 형성되어 용기본체(10)의 내부 좌우 측에서 박판(A)의 양측 둘레 영역을 지지할 수 있다. Here, each support piece 34 is formed in the shape of a single rib from the front thin plate access opening 11 side of the container body 10 to the inner rear opposite side as shown in FIGS. 3 and 4 to form the inside of the container body 10. Both side peripheral areas of the thin plate A can be supported on the left and right sides.
또는, 각 지지편(34)은 도 5와 같이, 용기본체(10)의 전면 박판 출입 개구(11)에 인접한 영역과 용기본체(10)의 내측 후방 영역에 한 쌍의 리브 형태로 형성되어 용기본체(10)의 내부 좌우 측에서 박판(A)의 양측 둘레 영역을 전후방을 지지할 수 있다. Alternatively, each support piece 34 is formed in the form of a pair of ribs in the region adjacent to the front thin plate access opening 11 of the container body 10 and the inner rear region of the container body 10, as shown in FIG. Both side peripheral areas of the thin plate A may be supported forward and backward on the inner left and right sides of the main body 10.
물론, 각 지지편(34)은 용기본체(10)의 전면 박판 출입 개구(11)에 인접한 영역으로부터 용기본체(10)의 내측 후방 영역을 향해 소정의 이격을 두고 형성된 한 쌍 이상의 복수로 형성된 리브 형태일 수도 있다. Of course, each support piece 34 is a plurality of ribs formed in a pair or more formed at a predetermined distance from the region adjacent to the front thin plate access opening 11 of the container body 10 toward the inner rear region of the container body 10. It may also be in the form.
또한, 각 지지편(34)은 리브 형태를 포함하여 박판(A)을 지지할 수 있는 다양한 돌출 구조일 수 있음은 물론이다. In addition, each support piece 34 may be a variety of protruding structure that can support the thin plate (A), including a rib shape.
여기서, 지지편(34)의 다양한 형태에 상관없이 후방 영역의 지지편(34)에는 도 7, 도 9, 도 11에 도시된 바와 같이, 박판(A)의 둘레 단부에 접하는 영역이 후방으로 갈수록 상향 경사진 경사면(36)으로 형성될 수 있다. 이는 웨이퍼용 박판 수납용기(1)에서 도어(미도시)로 용기본체(10)의 박판 출입 개구(11)를 폐쇄할 때, 도어(미도시)의 내측면에 마련된 웨이퍼 리테이너(미도시)와 지지편(34)의 후방 영역에 형성된 경사면(36) 구조에 의해 박판(A)인 웨이퍼가 인접하는 지지편(34) 사이의 지지슬롯(35) 공간에 부상 개재된 형태로 지지될 수 있도록 하기 위함이다. Here, as shown in FIGS. 7, 9, and 11, the region in contact with the circumferential end portion of the thin plate A is rearward in the support piece 34 of the rear region, regardless of various forms of the support piece 34. It may be formed as an inclined surface 36 inclined upward. When the thin plate access opening 11 of the container body 10 is closed from the thin plate storage container 1 for a wafer to a door (not shown), the wafer retainer (not shown) provided on the inner side of the door (not shown) and The inclined surface 36 formed in the rear region of the support piece 34 allows the wafer A, which is a thin plate A, to be supported in the form of a floating interposed portion in the support slot 35 space between the adjacent support pieces 34. For sake.
한편, 지지편(34)에는 도 6 내지 도 11에 도시된 바와 같이, 적어도 박판(A)을 지지하는 영역에 박판(A)에 접촉하는 박판접촉부(37)가 상하부 양측면에 대칭되게 마련되어 있는 것이 바람직하다. On the other hand, the support piece 34, as shown in Figs. 6 to 11, at least in the region for supporting the thin plate A, the thin plate contact portion 37 in contact with the thin plate A is provided symmetrically on both upper and lower sides. desirable.
이 박판접촉부(37)는 박판 수납용기(1)의 도어(미도시) 폐쇄시 박판(A)이 지지슬롯(35) 공간에 부상 개재되는 과정에서 원활하게 움직일 수 있도록 마찰력이 적으면서 내열 및 내마모성이 우수한 엔지니어링플라스틱 재질로 마련되는 것이 바람직하다. The thin plate contact portion 37 has a low friction and heat resistance and abrasion resistance so that when the door (not shown) of the thin plate storage container 1 is closed, the thin plate A can move smoothly in the process of being interposed in the support slot 35 space. It is desirable to be provided with this excellent engineering plastics material.
또한, 지지편(34)의 적어도 박판(A)을 지지하는 영역에는 도 8 내지 도 11과 같이, 박판(A)에 대한 최소 접촉부분을 형성하는 최소접촉부(38)가 지지편(34)의 상하부면에 대칭되게 형성되는 것이 바람직하다. 이 최소접촉부(38)는 박판(A)에 대한 지지편(34)의 접촉 영역을 최소화함으로써 박판(A)의 손상을 방지한다. 이 최소접촉부(38)는 지지편(34)의 판면에서 돌출된 돌기나 비드 등의 형태로 형성될 수 있다. In addition, in the region supporting at least the thin plate A of the support piece 34, as shown in FIGS. 8 to 11, the minimum contact portion 38 forming the minimum contact portion with respect to the thin plate A is formed of the support piece 34. It is preferable that the upper and lower surfaces are formed symmetrically. This minimum contact portion 38 prevents damage to the thin plate A by minimizing the contact area of the support piece 34 with respect to the thin plate A. As shown in FIG. The minimum contact portion 38 may be formed in the form of protrusions or beads protruding from the plate surface of the support piece 34.
한편, 본 발명에 따른 박판 수납용기(1)의 박판지지부재(30)는 적어도 지지편(34) 또는 박판지지부재(30) 전체가 정전기 소산 재료로 마련되어 용기본체(10) 또는 용기본체(10) 외부에 마련되는 별도의 접지경로를 통해 외부로 접지되어 정전기를 방전하는 것이 바람직하다. 이에 의해, 정전기에 의한 박판(A)의 손상을 방지할 수 있다. On the other hand, in the thin plate supporting member 30 of the thin plate storage container 1 according to the present invention, at least the support piece 34 or the thin plate supporting member 30 is made of an electrostatic dissipating material, the container body 10 or the container body 10. It is preferable to discharge the static electricity by grounding to the outside through a separate ground path provided on the outside. Thereby, damage to the thin plate A by static electricity can be prevented.
이때, 정전기 소산 재료 영역은 전술한 지지편(34)의 박판 접촉 영역으로서 박판접촉부(37) 및 최소접촉부(38) 영역이 정전기 수산 재료 영역인 것이 바람직하다. At this time, the electrostatic dissipation material region is preferably the thin plate contact region of the support piece 34 described above, and the thin plate contact portion 37 and the minimum contact portion 38 region are the electrostatic hydroxide material region.
이러한 구성을 갖는 본 발명에 따른 박판 수납용기(1)는 양 박판지지부재(30)가 상호 대칭 구조에 의해 방향성을 갖지 않기 때문에, 각 박판지지부재(30)가 용기본체(10)의 박판 수납공간(13) 양 내측면에 위치 상관없이 착탈구조 또는 인서트 사출 방식으로 결합될 수 있다. In the thin plate storage container 1 according to the present invention having such a configuration, since the two thin plate supporting members 30 do not have directionality due to mutual symmetrical structures, each thin plate supporting member 30 has a thin plate storage of the container body 10. The space 13 may be coupled to a removable structure or an insert injection method regardless of positions on both inner surfaces.
예컨대, 박판 수납용기(1)가 FOSB 또는 FOUP 등과 같은 전면 개폐 방식의 박판 수납용기(1)일 경우, 각 박판지지부재(30)는 도 3과 같이, 상하 반전되는 형태로 용기본체(10)의 좌우 내측벽에 좌우 위치 상관없이 결합될 수 있는 것이다. For example, when the thin plate storage container 1 is a front-opening type thin plate storage container 1 such as FOSB or FOUP, each thin plate supporting member 30 is inverted up and down, as shown in FIG. The left and right inner walls of the left and right positions can be combined.
물론, 박판 수납용기(1)가 상부 개방된 형태의 박판 수납용기(1)일 경우에는 각 박판지지부재(30)는 전후 반전 또는 좌우 반전되는 형태로 용기본체(10)의 대향 하는 양 측벽에 양측 위치 상관없이 결합될 수 있다.Of course, when the thin plate storage container (1) is a thin plate storage container (1) of the upper open form, each of the thin plate support members 30 in the form of inverted back and forth or left and right reversed on both side walls of the container body (10) They can be combined regardless of their position.
이에 따라, 양 박판지지부재(30)를 별개의 금형을 이용하여 별개의 부품으로 마련하지 않고, 하나의 금형을 이용하여 단일의 호환 부품으로 제작할 수 있기 때문에, 부품 제조 비용 및 제품 단가를 절감할 수 있고, 부품의 관리 및 조립성 측면 등에서 편의성이 향상된다. Accordingly, the two thin plate supporting members 30 can be manufactured as a single compatible part using one mold without providing the separate parts using separate molds, thereby reducing component manufacturing cost and product cost. It is possible to improve the convenience in terms of component management and assembly.
이와 같이, 본 발명에 따르면, 용기본체 내부 양측의 박판지지부재가 상호 위치 상관없이 호환 가능함과 동시에, 제품 단가를 낮추고 부품 관리 및 조립 편의성이 향상되는 박판 수납용기가 제공된다.As described above, according to the present invention, the thin plate supporting members on both sides of the container body are compatible with each other regardless of position, and at the same time, a thin sheet storage container is provided, which lowers the unit cost and improves component management and assembly convenience.

Claims (13)

  1. 박판 수납공간을 갖는 용기본체와, 상기 박판 수납공간의 적어도 상호 대향하는 양 내측면에 결합되어 박판을 지지하는 한 쌍의 박판지지부재를 갖는 박판 수납용기에 있어서, In a thin plate storage container having a container body having a thin plate storage space and a pair of thin plate supporting members coupled to at least mutually opposite inner surfaces of the thin plate storage space to support the thin plate,
    상기 양 박판지지부재는 각각 상기 양 내측면에 호환 가능하게 결합되도록 상호 대칭 구조를 갖는 것을 특징으로 하는 박판 수납용기. Each of the two thin plate supporting members has a mutually symmetrical structure so as to be compatible with both inner surfaces thereof.
  2. 제1항에 있어서, The method of claim 1,
    상기 각 박판지지부재는Each thin plate supporting member
    상기 박판 수납공간의 내측면에 결합되는 용기결합부와, A container coupling part coupled to an inner surface of the thin plate accommodation space;
    상기 용기결합부로부터 상기 박판의 판면에 평행한 방향으로 연장된 양 측면이 대칭구조인 적어도 하나의 지지편을 갖는 박판지지부를 포함하는 것을 특징으로 하는 박판 수납용기.And a thin plate support having at least one support piece having symmetrical structures on both sides extending from the container coupling portion in a direction parallel to the plate surface of the thin plate.
  3. 제2항에 있어서, The method of claim 2,
    상기 지지편은 상기 박판 수납공간에 수납되는 박판의 판면에 직교하는 방향으로 상호 이격되어 적어도 하나의 지지슬롯을 형성하도록 복수로 형성된 것을 특징으로 하는 박판 수납용기. The support piece is a thin plate storage container, characterized in that formed in plurality to be spaced apart from each other in a direction orthogonal to the plate surface of the thin plate accommodated in the thin plate storage space to form at least one support slot.
  4. 제3항에 있어서, The method of claim 3,
    상기 용기결합부는 상기 박판의 판면에 직교하는 방향으로 상기 박판지지부의 양측에 대칭구조로 형성되어 있는 것을 특징으로 하는 박판 수납용기. And the container coupling portion is formed in a symmetrical structure on both sides of the thin plate support in a direction orthogonal to the plate surface of the thin plate.
  5. 제4항에 있어서, The method of claim 4, wherein
    상기 용기결합부와 이에 대응하는 상기 박판 수납공간의 양 내측면에는 상기 박판지지부재를 상기 내측면에 착탈 가능하게 결합하는 착탈결합구조가 형성되어 있는 것을 특징으로 하는 박판 수납용기.Both inner side surfaces of the container coupling portion and the thin plate receiving space corresponding to the thin plate storage container characterized in that the detachable coupling structure for detachably coupling the thin plate support member to the inner surface.
  6. 제4항에 있어서, The method of claim 4, wherein
    상기 박판지지부재는 상기 용기결합부가 상기 박판 수납공간의 내측면에 일체로 결합되도록 상기 용기본체에 인서트 사출되는 것을 특징으로 하는 박판 수납용기. The thin plate supporting member is a thin plate storage container, characterized in that the insert is injected into the container body so that the container coupling portion is integrally coupled to the inner surface of the thin plate storage space.
  7. 제2항 내지 제6항 중 어느 한 항에 있어서, The method according to any one of claims 2 to 6,
    상기 용기본체는 전면 개구된 박판 수용공간을 형성하며, 상기 박판지지부재는 적어도 상하 대칭구조를 가지고 상기 박판 수용공간의 좌우 내측면에 결합되는 것을 특징으로 하는 박판 수납용기. The container body forms a thin plate receiving space with a front opening, and the thin plate supporting member has at least a vertical symmetrical structure and is coupled to the left and right inner surfaces of the thin plate receiving space.
  8. 제7항에 있어서, The method of claim 7, wherein
    상기 지지편은 상기 개구에 인접한 영역으로부터 상기 박판 수용공간의 내측 후방을 향해 적어도 하나의 리브 형태로 형성되어 상기 박판의 둘레영역 일부를 지지하는 것을 특징으로 하는 박판 수납용기. The support piece is a thin plate storage container, characterized in that formed in the form of at least one rib toward the inner rear of the thin plate receiving space from the region adjacent to the opening to support a portion of the peripheral region of the thin plate.
  9. 제8항에 있어서, The method of claim 8,
    상기 박판지지부재는 적어도 상기 박판이 접촉되는 상기 지지편의 일부 영역이 정전기 소산 재료로 형성되는 것을 특징으로 하는 박판 수납용기. The thin plate supporting member is a thin plate storage container, characterized in that at least a portion of the support piece to which the thin plate is in contact is formed of an electrostatic dissipating material.
  10. 제9항에 있어서, The method of claim 9,
    적어도 상기 박판이 접촉되는 영역의 상기 지지편 상하부에는 박판접촉부가 대칭되게 형성되어 있는 것을 특징으로 하는 박판 수납용기. A thin plate storage container, characterized in that a thin plate contact portion is symmetrically formed on at least the upper and lower portions of the support piece in a region where the thin plate is in contact.
  11. 제10항에 있어서, The method of claim 10,
    상기 박판접촉부는 엔지니어링 플라스틱 재질로 마련되는 것을 특징으로 하는 박판 수납용기. The thin plate contact container is characterized in that the thin plastic contact portion is provided with an engineering plastic material.
  12. 제10항에 있어서, The method of claim 10,
    상기 박판접촉부에 대응하는 상기 지지편의 상하부면에는 상기 박판에 대해 최소 접촉부분을 형성하는 최소접촉부가 상기 상하부면에 대칭되게 형성되어 있는 것을 특징으로 하는 박판 수납용기. The upper and lower surfaces of the support piece corresponding to the thin plate contact portion, the thin plate storage container, characterized in that the minimum contact portion forming a minimum contact portion with respect to the thin plate is formed symmetrically on the upper and lower surfaces.
  13. 제9항에 있어서, The method of claim 9,
    상기 박판이 접촉되는 상기 지지편의 상하부면에는 상기 박판에 대해 최소 접촉부분을 형성하는 최소접촉부가 상기 상하부면에 대칭되게 형성되어 있는 것을 특징으로 하는 박판 수납용기.The upper and lower surfaces of the support piece that the thin plate is in contact with the thin plate storage container, characterized in that the minimum contact portion forming a minimum contact portion with respect to the thin plate is formed symmetrically on the upper and lower surfaces.
PCT/KR2013/009001 2012-10-30 2013-10-08 Thin plate storage container WO2014069810A1 (en)

Applications Claiming Priority (2)

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KR10-2012-0120900 2012-10-30
KR1020120120900A KR101408669B1 (en) 2012-10-30 2012-10-30 Thin plate storage container

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