WO2014054590A1 - Roller conveyor, plate body inspecting device, and glass plate manufacturing device - Google Patents

Roller conveyor, plate body inspecting device, and glass plate manufacturing device Download PDF

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Publication number
WO2014054590A1
WO2014054590A1 PCT/JP2013/076582 JP2013076582W WO2014054590A1 WO 2014054590 A1 WO2014054590 A1 WO 2014054590A1 JP 2013076582 W JP2013076582 W JP 2013076582W WO 2014054590 A1 WO2014054590 A1 WO 2014054590A1
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WO
WIPO (PCT)
Prior art keywords
glass plate
flow path
liquid
plate
roller conveyor
Prior art date
Application number
PCT/JP2013/076582
Other languages
French (fr)
Japanese (ja)
Inventor
一朗 中山
Original Assignee
旭硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 旭硝子株式会社 filed Critical 旭硝子株式会社
Priority to CN201380052211.3A priority Critical patent/CN104703898A/en
Priority to JP2014539735A priority patent/JPWO2014054590A1/en
Priority to KR1020157008606A priority patent/KR20150066530A/en
Publication of WO2014054590A1 publication Critical patent/WO2014054590A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/102—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for travelling sheets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/62—Selection of substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/66—Special parts or details in view of lubrication
    • F16C33/6637—Special parts or details in view of lubrication with liquid lubricant
    • F16C33/6659—Details of supply of the liquid to the bearing, e.g. passages or nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position

Definitions

  • the present invention relates to a roller conveyor, a plate-shaped inspection apparatus, and a glass plate manufacturing apparatus.
  • a float manufacturing method using a forming method called a float method is known.
  • the float manufacturing method is a forming step in which molten glass is supplied to the surface of a molten metal stored in a float bath and formed into a strip-shaped glass plate, and the strip-shaped glass plate is cut into a rectangular glass plate of a predetermined size and cut.
  • a cutting and chamfering step for grinding the peripheral edge of the glass plate, a polishing step for polishing and removing fine irregularities and undulations on the polished surface of the glass plate by a polishing apparatus, and an inspection step are provided.
  • the inspection process is a cleaning process of cleaning the glass plate after polishing with a high pressure water, and a drying / cleaning process of drying / cleaning the glass plate by spraying compressed air from an air knife nozzle onto the glass plate. And a flatness measuring step for measuring the flatness of the surface to be polished (ratio of the waviness height to the waviness pitch).
  • the glass plate is manufactured into a glass plate having a thickness of 0.2 to 1.5 mm suitable for an FPD glass plate and high flatness.
  • Patent Document 1 discloses a batch-type polishing apparatus for an FPD glass plate.
  • the polishing apparatus of Patent Document 1 includes a film body including an adsorption sheet that adsorbs and holds a glass plate, and a film frame on which the adsorption sheet is stretched.
  • the pressurized fluid is supplied between the film body and the carrier to which the film body is attached, and the surface to be polished of the glass plate adsorbed and held by the adsorption sheet is applied to the polishing pad by the pressure of the pressurized fluid. While pressing, the surface to be polished is polished by relatively rotating (spinning and / or revolving) the glass plate and the polishing pad.
  • the surface to be polished of the glass plate polished by the polishing pad is a surface on which TFT (Thin Film Transistor) or CF (Color Filter) is manufactured in the FPD manufacturing process, and high-precision flatness is required. Surface.
  • TFT Thin Film Transistor
  • CF Color Filter
  • the flatness measurement step it is inspected whether the flatness of the polished surface of the polished glass plate is within a standard value suitable for the production of TFT or CF.
  • This flatness inspection is performed using, for example, a flatness measuring device (inspection device) disclosed in Patent Document 2.
  • a pattern having periodic brightness and darkness is irradiated onto a glass plate, a pattern transmitted through the glass plate or a reflected pattern is received, and a shift in the brightness cycle in the received light image (glass plate)
  • the light and dark of the region in the received light image having a size corresponding to the light and dark period in the pattern irradiated to the glass plate is averaged, and the glass is calculated based on the averaged signal. Calculate the flatness of the plate.
  • the glass plate whose surface to be polished has been polished in the polishing step is inspected for the flatness of the surface to be polished by the inspection step (flatness measuring device), but the polished glass plate Since the slurry is adhered to the slurry, the slurry adhered to the glass plate is washed away by the cleaning process of the inspection process. Thereafter, in the flatness measuring device, in order to prevent erroneous detection due to water droplets and dust remaining on the glass plate, the water droplets and dust are removed by compressed air from the air knife nozzle in the drying / cleaning process of the inspection process, and the glass After the plate is dried and cleaned, the flatness is measured by a flatness measuring device. The flatness measurement is also performed by a glass plate manufacturing method that does not polish the glass plate, for example, a fusion method.
  • the glass plate is continuously conveyed from the polishing device to the flatness measuring device by a roller conveyor composed of a plurality of rollers, but the roller bearing laid on the drying line having the air knife nozzle leaked from the bearing.
  • a roller conveyor composed of a plurality of rollers
  • resin bearings self-lubricating fluororesin or other bearings that do not use grease or bearings coated with resin such as fluororesin are used (hereinafter referred to as resin bearings).
  • resin bearings self-lubricating fluororesin or other bearings that do not use grease or bearings coated with resin such as fluororesin are used (hereinafter referred to as resin bearings).
  • resin bearings there is also a resin bearing having a ceramic rolling element.
  • the present invention has been made in view of such circumstances, and is a roller conveyor in which rollers are supported by a resin bearing, and a roller conveyor and a plate-shaped body inspection device that can suppress scattering of dust generated from the resin bearing. And it aims at providing the manufacturing apparatus of a glass plate.
  • the present invention provides a roller conveyor for transporting a plate-like body by means of a roller, a plurality of rollers arranged along a transport path of the plate-like body, a rolling element, and the rolling element.
  • a resin bearing having an outer ring and an inner ring that are accommodated so as to be sandwiched and rollable, and rotatably supporting the shafts of the plurality of rollers, or a resin bearing coated with resin, the rolling element, and the rolling element
  • a roller conveyor including a raceway surface of the outer ring in contact, a liquid supply device for supplying a liquid to the raceway surface of the inner ring in contact with the rolling element, and a cover surrounding the resin bearing.
  • the liquid is supplied from the liquid supply device to the rolling element of the resin bearing, the raceway surface of the outer ring in contact with the rolling element, and the raceway surface of the inner ring in contact with the rolling element.
  • Resin dust can be mixed into the liquid, and since the resin bearing is surrounded by the cover, scattering of the dust can be suppressed. Furthermore, since the liquid functions as a lubricant, the service life of the resin bearing is extended.
  • the resin bearing is composed of an outer ring, an inner ring, a rolling element, and a cage.
  • the raceway is a dust spot. It is a feature of the present invention that liquid is supplied to the dust generation location and the generated resin dust is contained in the liquid.
  • the resin bearing of the present invention refers to one in which at least one member among the outer ring, inner ring, rolling element, and cage constituting the bearing is made of resin or coated with resin. However, if at least one of the members is exposed from bearing steel that is not coated with resin, the self-lubricating property of the resin bearing is reduced. For this reason, as a preferable structure of the resin bearing, all members are made of resin, or the bearing steel is coated with resin.
  • the material of the resin when all the members of the resin bearing are made of resin is not particularly limited, but ultra high molecular weight polyethylene (UHMW-PE: ultra high molecular weight-polyethylene), polytetrafluoroethylene (PTFE: polytetrafluoroethylene), or poly Ether ether ketone (PEEK: polyetheretherketone) is preferred.
  • UHMW-PE ultra high molecular weight polyethylene
  • PTFE polytetrafluoroethylene
  • PEEK poly Ether ether ketone
  • the material of the resin to be coated is not particularly limited, but a fluororesin or a polyimide resin having self-lubricating properties is preferable.
  • the material of the bearings (rolling elements, outer ring, and inner ring) is not particularly limited, but is preferably hard and wear-resistant ceramic or high carbon chrome steel.
  • the outer ring, the inner ring, and the cage are made of ultra high molecular weight polyethylene, and the rolling elements are made of ceramics.
  • the liquid supply device includes a holder member that holds the outer ring of the resin bearing, a holder member that includes the liquid flow path, and the liquid supplied to the inlet of the flow path of the holder member. It is preferable that a liquid circulation supply unit that supplies and circulates the liquid discharged from the outlet of the flow path to the inlet of the flow path is provided.
  • the holder member that includes the holding portion that holds and fixes the outer ring of the resin bearing is provided with the liquid flow path, and therefore it is not necessary to provide the flow path separately from the holder member.
  • the number of parts can be reduced.
  • the liquid is supplied to the inlet of the flow path by the liquid circulation supply means, and is supplied to the rolling element of the resin bearing, the raceway surface of the outer ring in contact with the rolling element, and the raceway surface of the inner ring in contact with the rolling element while passing through the flow path. Is done.
  • the liquid discharged from the outlet of the flow path is circulated and supplied to the inlet of the flow path by the liquid circulation supply means.
  • a filter is provided in the liquid circulation path and dust mixed in the liquid is captured by this filter, a clean liquid can always be supplied to the flow path.
  • the flow path of the holder member is provided on one side with the holding portion interposed therebetween, and the first flow path communicated with the inlet of the flow path and the holding portion sandwiched between A second flow path provided on the other side and communicated with an outlet of the flow path, and the first flow path and the second flow path are communicated via the holding portion. It is preferable.
  • the liquid supplied from the inlet of the flow channel to the first flow channel flows through the first flow channel and flows into the holding unit.
  • the liquid is supplied to the resin bearing held by the holding portion.
  • the liquid supplied to the resin bearing flows into the second flow path from the holding portion, flows through the second flow path, and is discharged from the outlet of the flow path.
  • the holder is closed with the liquid between the first flow path and the holding section and between the holding section and the second flow path.
  • a dam member is provided, and a part of the rolling element of the resin bearing, a part of the raceway surface of the outer ring, and a part of the raceway surface of the inner ring are immersed in the liquid blocked by the holding part. It is preferred that
  • the liquid supplied to the holding portion is blocked by the dam member, a part of the rolling element of the resin bearing, a part of the raceway surface of the outer ring, and a part of the raceway surface of the inner ring Is always immersed in the liquid. Thereby, scattering of the dust from a resin bearing can be suppressed significantly.
  • the shaft of the roller is inserted into the inner ring of the resin bearing, and the shaft located on both sides of the inner ring is provided with a sliding prevention member, and the sliding prevention It is preferable that the end surface of the member is brought into contact with the end surface of the inner ring and fixed to the shaft by a stopper.
  • the stopper action of the anti-sliding member prevents the roller shaft from sliding in the axial direction with respect to the inner ring, thereby preventing dust generation due to sliding.
  • the amount of dust generation can be reduced compared to the conventional method. Thereby, scattering of dust can be further suppressed.
  • the present invention provides a cleaning unit that cleans the plate-shaped body while transporting the plate-shaped body, and a drying unit that cleans the plate-shaped body cleaned by the cleaning unit while transporting the plate-shaped body.
  • the plate-like body inspection apparatus comprising: a cleaning unit; and an inspection unit that inspects the plate-like body that has been dried and cleaned by the drying / cleaning unit.
  • the roller conveyor of the invention is arranged in the drying / cleaning section, the frequency of occurrence of erroneous detection of the inspection apparatus due to the dust adhering to the plate-like body is reduced. It can be greatly reduced.
  • the plate-like body is preferably a glass plate.
  • the roller conveyor of the present invention is disposed in the drying / cleaning section of the glass plate inspection apparatus, the inspection accuracy of the glass plate is greatly improved.
  • the present invention provides a molding part for molding molten glass into a strip-shaped glass plate, Cutting the chamfered glass plate into a rectangular glass plate of a predetermined size, and cutting and chamfering to grind the peripheral edge of the cut glass plate; A cleaning unit that cleans the peripheral edge of the glass plate while transporting, a drying / cleaning unit that cleans the glass plate cleaned by the cleaning unit while drying, and the drying / cleaning In the manufacturing apparatus of the glass plate provided with the inspection part which inspects the glass plate dried and cleaned by the chemical conversion part, A glass plate manufacturing apparatus in which a roller conveyor of the present invention is disposed in the drying / cleaning section is provided.
  • the roller conveyor of the present invention is disposed in the drying / cleaning section of the glass plate inspection apparatus, it is possible to manufacture a glass plate with greatly improved inspection accuracy of the glass plate.
  • roller conveyor of the present invention scattering of resin dust generated from the resin bearing can be suppressed.
  • the inspection apparatus of the plate-shaped object of the present invention it is possible to greatly reduce the occurrence frequency of erroneous detection caused by the dust adhering to the plate-shaped object.
  • FIG. 1 is a block diagram showing each process of a glass plate manufacturing apparatus and a glass plate inspection apparatus for a liquid crystal display.
  • FIG. 2 is a plan view showing the configuration of the glass plate inspection apparatus of FIG.
  • FIG. 3 is a side view showing the configuration of the cleaning device and the drying / cleaning device of the glass plate inspection device of FIG.
  • FIG. 4 is a plan view showing the configuration of the roller conveyor in detail.
  • FIG. 5 is a front view of the roller conveyor as viewed from line AA ′ in FIG.
  • FIG. 6 is an assembled perspective view of the resin bearing and the holder member as viewed from above.
  • FIG. 7 is a perspective view of the holder member of FIG. 6 as viewed from below.
  • FIG. 5 is a front view of the roller conveyor as viewed from line AA ′ in FIG.
  • FIG. 6 is an assembled perspective view of the resin bearing and the holder member as viewed from above.
  • FIG. 7 is a perspective view of the holder member of FIG. 6 as
  • FIG. 8 is a block diagram showing a configuration of a liquid supply apparatus including a holder member.
  • FIG. 9 is a perspective view in which a resin bearing fixed to a holder member is surrounded by a cover.
  • FIG. 10 is a side view of the resin bearing and the holder member with the cover removed in FIG.
  • a roller conveyor applied to a glass plate inspection apparatus (plate body inspection apparatus) installed in a glass plate manufacturing apparatus for a liquid crystal display
  • the apparatus to which the roller conveyor of the present invention is applied is not limited to the glass plate inspection apparatus. That is, the roller conveyor of the present invention can be applied as long as it is a device that prevents dust generated from the bearings that support the rollers of the roller conveyor from adhering to the plate-like body.
  • the glass plate for liquid crystal displays is illustrated as a plate-shaped object, other FPD glass plates, such as a plasma display and an organic electroluminescent display, may be sufficient.
  • it is not limited to a glass plate A metal or resin plate-shaped body may be sufficient.
  • FIG. 1 is a block diagram showing respective steps of a glass plate manufacturing apparatus 10 for a liquid crystal display and a glass plate inspection apparatus 12.
  • the manufacturing process of the glass plate manufacturing apparatus 10 includes a molding process 14 by a molding apparatus (molding section), a cutting / chamfering process 16 by a cutting / chamfering apparatus (cutting / chamfering section), and polishing by a polishing apparatus disclosed in Patent Document 1 Step 18, a cleaning step 20 by a cleaning device (cleaning unit), a drying / cleaning step 22 by a drying / cleaning device (drying / cleaning unit), and a flatness measuring device (inspection unit) disclosed in Patent Document 2, etc. ).
  • the inspection process of the glass plate inspection apparatus 12 includes a cleaning process 20, a drying / cleaning process 22, and a flatness measurement process 24.
  • the forming step 14 is a step of supplying molten glass to the surface of the molten metal stored in the float bath and forming it into a strip-shaped glass plate.
  • the cutting / chamfering step 16 is a step of cutting the strip-shaped glass plate into a rectangular glass plate having a predetermined size and grinding the peripheral edge of the cut glass plate.
  • the polishing step 18 is a step of polishing and removing minute irregularities and undulations on the surface to be polished of the glass plate.
  • the cleaning step 20 is a step of removing the slurry and polishing debris attached to the glass plate by brush cleaning the glass plate after polishing and then cleaning with high-pressure water.
  • the drying / cleaning step 22 is a step of spraying compressed air onto the glass plate to dry / clean the glass plate.
  • the flatness measuring step 24 is a step of measuring the flatness of the polished surface of the glass plate. By passing through these steps, a glass plate having a thickness that is suitable for a glass plate for a liquid crystal display and a high flatness can be obtained.
  • the above glass plate manufacturing method is based on the float method, this embodiment can also be applied to the fusion method and the like.
  • polishing process 18 is abbreviate
  • FIG. 2 is a plan view schematically showing the configuration of the glass plate inspection apparatus 12, and FIG. 3 is a cleaning device (cleaning step 20: see FIG. 1) 26 of the glass plate inspection apparatus 12, and drying / cleaning.
  • FIG. 2 is a side view showing the configuration of an apparatus (drying / cleaning step 22: see FIG. 1) 28;
  • the glass plate 30 whose surface to be polished has been polished in the polishing step 18 is cleaned by a roller conveyor 32 with a brush cleaning unit 34 and high-pressure water jets 40 and 42 (see FIG. 3) constituting the cleaning device 26. And it passes in the drying / cleaning apparatus 28 sequentially, and is carried in to the flatness measuring apparatus of the flatness measuring process 24.
  • the roller conveyor 36 laid in the drying / cleaning apparatus 28 among the roller conveyors 32 is a roller conveyor according to the embodiment provided with a resin bearing.
  • the glass plate 30 is shown by a two-dot chain line instead of a solid line.
  • FIG. 4 is a plan view showing the configuration of the roller conveyor 36 in detail
  • FIG. 5 is a front view seen from the line AA ′ of FIG.
  • Each roller of the roller conveyor 36 is composed of a shaft 58 and a plurality of disc bodies 60, 60... That are in contact with the lower surface of the glass plate 30, and the plurality of disc bodies 60 are arranged on the shaft 58 at a predetermined interval. Yes.
  • FIG. 2 the illustration of the disk body 60 is omitted to avoid complexity, and only the resin bearing 56 and the shaft 58 having a smaller diameter than the disk body 60 are schematically illustrated.
  • a rubber or resin ring-shaped buffer member 61 is attached to the outer periphery of the disc body 60 that contacts the lower surface of the glass plate 30. The bottom surface is prevented from being scratched.
  • both end portions of the shaft 58 are disposed so as to protrude outward from the casing 48 of the drying / cleaning device 28, and are connected to the drive portion 59 via the gear mechanism 57.
  • the shaft 58 is rotationally driven when power from the drive unit 59 is transmitted through the gear mechanism 57, whereby the disk body 60 is rotated and the glass plate 30 is conveyed.
  • the brush cleaning unit 34 shown in FIG. 2 is provided above the roller conveyor 32 and includes a plurality of rotating brushes 38, 38... That rotate in the horizontal direction about the vertical direction of the surface to be polished of the glass plate 30. . Slurry and polishing dust adhering to the surface to be polished are removed by rotating brushes 38, 38... That are rotated by contacting the glass plate 30 while being conveyed by the roller conveyor 32.
  • the high-pressure water injection device 40 is disposed above the roller conveyor 32, and the high-pressure water injection device 42 is disposed below the roller conveyor 32.
  • the surface to be polished (upper surface) is cleaned by the high-pressure water sprayed from the nozzle 44 of the high-pressure water spray device 40, and the high-pressure water The lower surface is washed with high-pressure water jetted from the nozzle 46 of the water jet device 42.
  • the glass plate 30 that has passed through the cleaning device 26 is carried into the casing 48 of the drying / cleaning device 28 by the roller conveyor 32. Then, during conveyance by the roller conveyor 36 disposed in the casing 48, water droplets, dust, etc. adhering to the glass plate 30 are discharged from the plurality of air knife nozzles 50, 52 (one in each of FIGS. 2 and 3). Is removed by compressed air. As shown by the lower arrow in FIG. 2 and the right arrow in FIG. 3, the glass plate 30 that has passed through the air knife nozzles 50 and 52 is conveyed to the flatness measurement step 24. The drying / cleaning space 49 in which the air knife nozzles 50 and 52 are arranged is sealed by a casing 48.
  • a pair of air knife nozzles 50 and 52 are arranged vertically, but a plurality of pairs of air knife nozzles may be arranged in the casing 48 at intervals.
  • the air knife nozzle 50 is installed above the roller conveyor 36 and along the conveying direction of the glass plate 30.
  • the air knife nozzle 52 is disposed below the roller conveyor 36 and along the conveying direction of the glass plate 30.
  • the air knife nozzle 50 and the air knife nozzle 52 are installed so as to make a pair in the vertical direction.
  • the air knife nozzles 50 and 52 are disposed at a predetermined angle with respect to the conveying direction of the glass plate 30 as shown in FIG. 2 in order to efficiently remove water droplets, dust and the like attached to the glass plate 30.
  • roller conveyor 36 has a portion where the air knife nozzle 52 is disposed as shown in FIGS. 2, 4 and 5 so that the compressed air from the air knife nozzle 52 is efficiently injected onto the lower surface of the glass plate 30. It is divided.
  • the roller 54 avoids the position where the air knife nozzle 52 is disposed, and the two rollers 54A, It is divided into 54B.
  • the left end portion of the roller 54A protruding outward from the casing 48 is supported by a general bearing (not shown) (bearing steel bearing), and the right end portion of the roller 54A located in the casing 48 is the resin of the embodiment. It is supported by the bearing 56.
  • the right end portion of the roller 54B protruding outward from the casing 48 is supported by a general bearing (not shown) (bearing steel bearing), and the left end portion of the roller 54B located in the casing 48 is supported by the resin bearing 56.
  • a general bearing (not shown) (bearing steel bearing)
  • the resin bearing 56 is applied to the bearing disposed in the casing.
  • roller conveyor 36 since it is the structure similar to the roller 54 fundamentally, the description is abbreviate
  • FIG. 6 is an assembled perspective view of the holder member 62 having a substantially rectangular parallelepiped shape that supports the resin bearing 56 and the resin bearing 56 as viewed from above
  • FIG. 7 is a perspective view of the holder member 62 as viewed from below
  • FIG. FIG. 7 is a block diagram showing a configuration of a liquid supply device 64 including a member 62, which is a front view of the holder member 62, and is partially cut away to show the dam member 100 shown in FIG. 6.
  • . 9 is a perspective view in which the resin bearing 56 fixed to the holder member 62 is surrounded by a cover 66 made of transparent resin.
  • FIG. 10 is a perspective view of the resin bearing 56 and the holder member 62 from which the cover 66 is removed in FIG. It is a side view.
  • the roller conveyor 36 according to the embodiment shown in FIG. 4 and FIG. 5 has a grease as a bearing arranged in the casing 48 so that the grease leaked from the bearing in the casing 48 does not adhere to the glass plate 30 before the inspection.
  • a resin bearing 56 having a self-lubricating property that does not use any of the above is used. 6
  • the rolling element 68 of the resin bearing 56 the raceway surface 72 that is the inner peripheral surface of the outer ring 70 with which the rolling element 68 contacts, the raceway surface 76 that is the outer peripheral surface of the inner ring 74 with which the rolling element 68 contacts, and the rolling element.
  • liquid for example, water such as pure water, city water, or ground water
  • a cover 66 surrounding the resin bearing 56 is provided. 6 indicates the assembly direction of the resin bearing 56 with respect to the holder member 62, and the thin arrow indicates the flow direction of the liquid in the holder member 62.
  • the rolling element 68 of the resin bearing 56 the raceway surface 72 of the outer ring 70 in contact with the rolling element 68, the raceway surface 76 of the inner ring 74 in contact with the rolling element 68, and the cage Since the liquid is supplied from the liquid supply device 64, the resin dust generated by the abrasion of the resin bearing 56 is mixed into the liquid. As a result, the amount of dust generated from the resin bearing 56 can be reduced. Of the dust generated from the resin bearing 56, the dust that has not been mixed in the liquid is surrounded by the cover 66. Do not scatter outside 66. Therefore, according to the roller conveyor 36 of the embodiment, scattering of dust generated from the resin bearing 56 can be suppressed.
  • the occurrence frequency of erroneous detection in the flatness measurement step 24 caused by the dust adhering to the glass plate 30 is greatly increased. Since it can reduce, the test
  • the outer ring 70, the inner ring 74, and the cage are made of ultra high molecular weight polyethylene, and the rolling elements 68 are made of ceramics from the viewpoint of strength, life, and weight reduction. Moreover, since the liquid supplied to the resin bearing 56 functions as a lubricant, there is an advantage that the service life of the resin bearing 56 is extended.
  • the liquid supply device 64 includes a holder member 62 having a substantially rectangular parallelepiped shape and a liquid circulation device (liquid circulation supply means) 78 as shown in FIG.
  • the holder member 62 includes, on its upper surface, a holding portion 80 having an arc-shaped concave curved surface that holds the lower half of the outer ring 70 of the resin bearing 56 by fitting, and as shown in FIG. It has. Further, an inlet 84 of the flow path 82 (see FIG. 6) is provided at one end of the lower portion of the holder member 62 shown in FIG. 7, and an outlet 86 of the flow path 82 is provided at the other end.
  • the liquid circulation device 78 of FIG. 8 includes a pump 88 that supplies the liquid to the inlet 84 of the flow path 82 and circulates and supplies the liquid discharged from the outlet 86 of the flow path 82 to the inlet 84 of the flow path 82.
  • a circulation path 90 is provided.
  • the liquid supplied from the inlet 84 of the flow path 82 is supplied to the flow path 82 on the upper surface of the holder member 62 via the ascending path 92 provided in the holder member 62, and after passing through the flow path 82, the holder member The gas is discharged from the outlet 86 through a descending path 94 provided in 62.
  • the holder member 62 including the holding portion 80 to which the resin bearing 56 is fixed includes the liquid channel 82. There is no need to provide them separately, so the number of parts can be reduced.
  • the liquid is a rolling element 68 of the resin bearing 56, a raceway surface 72 of the outer ring 70 in contact with the rolling element 68, and a raceway surface 76 of the inner ring 74 in contact with the rolling element 68. And supplied to.
  • the liquid discharged from the outlet 86 of the flow path 82 is circulated and supplied to the inlet 84 of the flow path 82 by the pump 88.
  • the liquid circulation path 90 if a filter is provided in the liquid circulation path 90 and the dust mixed in the liquid is captured by the filter, the liquid having a small amount of dust can always be supplied to the flow path 82.
  • the flow path 82 of the holder member 62 includes a first flow path 96 and a second flow path 98 as shown in FIG. Further, the first flow path 96 and the second flow path 98 are communicated with each other via the holding unit 80.
  • the first flow path 96 is provided on one side with the arcuate concave curved surface of the holding portion 80 interposed therebetween, and is communicated with the inlet 84 of the flow path 82 via the ascending path 92.
  • the second flow path 98 is provided on the other side across the arc-shaped concave curved surface of the holding portion 80 and communicates with the outlet 86 of the flow path 82 via the descending path 94.
  • the ascending path 92 is provided at one end of the first channel 96, and the descending path 94 is provided at the other end of the second channel 98. It is not limited, You may provide in the center of each flow path.
  • the other end of the second channel 98 is the side opposite to the side where the one end of the first channel 96 is provided.
  • a dam member between the first flow path 96 and the holding section 80 of the holder member 62 and between the holding section 80 and the second flow path 98 to block (store) liquid in the holding section 80. 100 and 102 are provided. Thereby, a part of the rolling element 68 of the resin bearing 56, a part of the raceway surface 72 of the outer ring 70, and a part of the raceway surface 76 of the inner ring 74 are immersed in the liquid blocked by the holding portion 80. Yes.
  • the liquid supplied to the holding unit 80 by the dam members 100 and 102 can be blocked. Therefore, the rolling element 68 located below the resin bearing 56, the raceway surface 72 of the outer ring 70 in contact with the rolling element 68, and the raceway surface 76 of the inner ring 74 in contact with the rolling element 68 are always immersed in the liquid. It becomes the state. Thereby, scattering of the dust from the resin bearing 56 can be significantly suppressed.
  • a concave notch 104 is provided in the upper center of the dam member 100 to allow liquid to flow from the first flow path 96 to the holding portion 80.
  • a concave notch 106 for pouring liquid into the flow path 98 is provided.
  • the height of the bottoms of the notches 104 and 106, that is, the water surface of the liquid blocked by the holding unit 80 is the raceway surface of the inner ring 74 indicated by a two-dot chain line in FIG. 8 of the resin bearing 56 fixed to the holding unit 80. It is set above the lowest point 76A of 76.
  • the roller shaft 58 of the roller conveyor 36 is fixed to the inner ring 74 of the resin bearing 56 via a pair of anti-sliding members 108 and 108. That is, in the fixing method, first, the shaft 58 is inserted through the inner ring 74. Next, the ring-shaped anti-slip members 108 and 108 are fitted to the shaft 58 from the directions of the both end faces of the inner ring 74. Next, the end surfaces of the anti-sliding members 108, 108 facing the inner ring 74 are brought into contact with both end surfaces of the inner ring 74. That is, the inner ring 74 is sandwiched between the sliding prevention members 108 and 108.
  • the outer diameter of the sliding preventing member 108 is preferably equal to or smaller than the outer diameter of the inner ring 74. If the outer diameter of the sliding preventing member 108 is equal to or smaller than the outer diameter of the inner ring 74, the liquid flow is not hindered.
  • the screws (stoppers) 110 and 110 are inserted into the through screw holes provided from the outer peripheral surface to the inner peripheral surface of the anti-slip member 108, and the two anti-slip members 108 and 108 are attached.
  • the shaft 58 is fixed.
  • the roller shaft 58 of the roller conveyor 36 is fixed to the inner ring 74 of the resin bearing 56 via the anti-sliding members 108 and 108.
  • the roller shaft 58 does not slide in the axial direction with respect to the inner ring 74 due to the stopper action of the sliding prevention members 108 and 108. Accordingly, dust generation from the inner ring 74 of the resin bearing 56 due to the sliding can be prevented, and the scattering of dust can be further suppressed.
  • the liquid supply device 64 includes an electromagnetic valve (valve) 112 that starts and stops the supply of liquid to the circulation path 90 of the liquid circulation device 78.
  • the liquid supply can be started and stopped by opening and closing the electromagnetic valve 112 as necessary.
  • the start and stop operations of the liquid supply by the electromagnetic valve 112 are controlled by the control unit 114.
  • the controller 114 may perform opening / closing control of the electromagnetic valve 112 at predetermined time intervals to start and stop the liquid supply.
  • the control unit 114 operates the pump 88 only when necessary for power saving. That is, the control unit 114 also controls the operation / stop of the pump 88.

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Abstract

The present invention pertains to a roller conveyor for transporting a plate body (30) with rollers (54), said roller conveyor comprising: a plurality of rollers (54) disposed along the transport path of the plate body (30); a plastic bearing (56) that is made of resin or coated by a resin, has a rolling body (68), and an outer ring (70) and an inner ring (74) accommodating the rolling body (68) therebetween so that the same can roll, and rotatably supports a shaft (58) of each of the plurality of rollers (54); a liquid supplying device (64) that supplies a liquid to the rolling body (68), the race face (72) of the outer ring (70) contacting the rolling body (68), and to the race face (76) of the inner ring (74) contacting the rolling body (68); and a cover (66) enclosing the plastic bearing (56).

Description

ローラコンベア及び板状体の検査装置、並びにガラス板の製造装置Roller conveyor, plate-like body inspection device, and glass plate manufacturing device
　本発明は、ローラコンベア及び板状体の検査装置、並びにガラス板の製造装置に関する。 The present invention relates to a roller conveyor, a plate-shaped inspection apparatus, and a glass plate manufacturing apparatus.
　液晶ディスプレイ等のＦＰＤ（Ｆｌａｔ　Ｐａｎｅｌ　Ｄｉｓｐｌａｙ）用ガラス板の製造方法の一例として、フロート法と称される成形法を用いたフロート製造方法が知られている。 As an example of a method for manufacturing a glass plate for FPD (Flat Panel Display) such as a liquid crystal display, a float manufacturing method using a forming method called a float method is known.
　フロート製造方法は、フロートバスに溜められた溶融金属の表面に溶融ガラスを供給して帯状ガラス板に成形する成形工程、前記帯状ガラス板を所定サイズの矩形状のガラス板に切断し、切断したガラス板の周縁部を研削する切断・面取り工程、前記ガラス板の被研磨面を研磨装置によってその被研磨面の微小な凹凸やうねりを研磨して除去する研磨工程、及び検査工程を備える。 The float manufacturing method is a forming step in which molten glass is supplied to the surface of a molten metal stored in a float bath and formed into a strip-shaped glass plate, and the strip-shaped glass plate is cut into a rectangular glass plate of a predetermined size and cut. A cutting and chamfering step for grinding the peripheral edge of the glass plate, a polishing step for polishing and removing fine irregularities and undulations on the polished surface of the glass plate by a polishing apparatus, and an inspection step are provided.
　前記検査工程は、研磨終了したガラス板をブラシ洗浄した後、高圧水によって洗浄する洗浄工程、エアナイフノズルからの圧縮空気をガラス板に噴射してガラス板を乾燥・清浄化する乾燥・清浄化工程、及び被研磨面の平坦度（うねりピッチに対するうねり高さの比率）を測定する平坦度測定工程を備える。 The inspection process is a cleaning process of cleaning the glass plate after polishing with a high pressure water, and a drying / cleaning process of drying / cleaning the glass plate by spraying compressed air from an air knife nozzle onto the glass plate. And a flatness measuring step for measuring the flatness of the surface to be polished (ratio of the waviness height to the waviness pitch).
　これらの工程を経ることによって、ガラス板が、ＦＰＤ用ガラス板に適した厚さ０．２～１．５ｍｍであって平坦度の高いガラス板に製造される。 Through these steps, the glass plate is manufactured into a glass plate having a thickness of 0.2 to 1.5 mm suitable for an FPD glass plate and high flatness.
　特許文献１には、ＦＰＤ用ガラス板を対象とするバッチ式の研磨装置が開示されている。特許文献１の研磨装置は、ガラス板を吸着して保持する吸着シートと、この吸着シートが張設された膜枠とからなる膜体を備えている。この研磨装置によれば、膜体と膜体が取り付けられるキャリアとの間に加圧流体を供給し、吸着シートに吸着保持されたガラス板の被研磨面を加圧流体の圧力によって研磨パッドに押し付けるとともに、ガラス板と研磨パッドとを相対的に回転（自転及び／又は公転）させて被研磨面を研磨する。また、研磨時には、スラリが研磨パッドと被研磨面との間に供給される。なお、研磨パッドによって研磨されるガラス板の被研磨面は、ＦＰＤの製造工程においてＴＦＴ（Ｔｈｉｎ　Ｆｉｌｍ　Ｔｒａｎｓｉｓｔｏｒ）又はＣＦ（Ｃｏｌｏｒ　Ｆｉｌｔｅｒ）が作製される面であり、高精度の平坦度が要求される面である。 Patent Document 1 discloses a batch-type polishing apparatus for an FPD glass plate. The polishing apparatus of Patent Document 1 includes a film body including an adsorption sheet that adsorbs and holds a glass plate, and a film frame on which the adsorption sheet is stretched. According to this polishing apparatus, the pressurized fluid is supplied between the film body and the carrier to which the film body is attached, and the surface to be polished of the glass plate adsorbed and held by the adsorption sheet is applied to the polishing pad by the pressure of the pressurized fluid. While pressing, the surface to be polished is polished by relatively rotating (spinning and / or revolving) the glass plate and the polishing pad. Also, during polishing, slurry is supplied between the polishing pad and the surface to be polished. The surface to be polished of the glass plate polished by the polishing pad is a surface on which TFT (Thin Film Transistor) or CF (Color Filter) is manufactured in the FPD manufacturing process, and high-precision flatness is required. Surface.
　一方、平坦度測定工程では、研磨後のガラス板の被研磨面の平坦度がＴＦＴ又はＣＦの作製に適した規格値内に収まっているか否かが検査される。この平坦度の検査は、例えば特許文献２に開示された平坦度測定装置（検査装置）を用いて行われる。 On the other hand, in the flatness measurement step, it is inspected whether the flatness of the polished surface of the polished glass plate is within a standard value suitable for the production of TFT or CF. This flatness inspection is performed using, for example, a flatness measuring device (inspection device) disclosed in Patent Document 2.
　特許文献２の平坦度測定装置によれば、周期的な明暗を有するパターンをガラス板に照射し、ガラス板を透過したパターン又は反射したパターンを受光し、受光画像における明暗周期のずれ（ガラス板に照射されたパターンにおける明暗周期に対するずれ）を検出するためにガラス板に照射されたパターンにおける明暗周期に対応したサイズの受光画像における領域の明暗を平均化し、平均化された信号に基づいてガラス板の平坦度を算出する。 According to the flatness measuring apparatus of Patent Document 2, a pattern having periodic brightness and darkness is irradiated onto a glass plate, a pattern transmitted through the glass plate or a reflected pattern is received, and a shift in the brightness cycle in the received light image (glass plate) In order to detect the shift of the pattern irradiated to the light and dark period), the light and dark of the region in the received light image having a size corresponding to the light and dark period in the pattern irradiated to the glass plate is averaged, and the glass is calculated based on the averaged signal. Calculate the flatness of the plate.
　上記のように、研磨工程（研磨装置）にて被研磨面が研磨されたガラス板は、検査工程（平坦度測定装置）によって被研磨面の平坦度が検査されるが、研磨終了したガラス板にはスラリが付着しているため、検査工程の前記洗浄工程によってガラス板に付着したスラリが洗い落とされる。その後、平坦度測定装置において、ガラス板に残存した水滴、塵による誤検出を防止するために、検査工程の前記乾燥・清浄化工程においてエアナイフノズルからの圧縮空気によって水滴、塵を除去し、ガラス板を乾燥・清浄化した後に、平坦度測定装置による平坦度測定を実施している。なお、平坦度測定は、ガラス板を研磨しないガラス板の製造方法、例えばフュージョン法でも実施される。 As described above, the glass plate whose surface to be polished has been polished in the polishing step (polishing apparatus) is inspected for the flatness of the surface to be polished by the inspection step (flatness measuring device), but the polished glass plate Since the slurry is adhered to the slurry, the slurry adhered to the glass plate is washed away by the cleaning process of the inspection process. Thereafter, in the flatness measuring device, in order to prevent erroneous detection due to water droplets and dust remaining on the glass plate, the water droplets and dust are removed by compressed air from the air knife nozzle in the drying / cleaning process of the inspection process, and the glass After the plate is dried and cleaned, the flatness is measured by a flatness measuring device. The flatness measurement is also performed by a glass plate manufacturing method that does not polish the glass plate, for example, a fusion method.
　また、ガラス板は、研磨装置から平坦度測定装置まで、複数本のローラからなるローラコンベアによって連続搬送されるが、前記エアナイフノズルを有する乾燥ラインに敷設されたローラの軸受は、軸受から漏れたグリスがガラス板に付着しないように、グリスを使用しない自己潤滑性のあるフッ素樹脂等の樹脂製、又はフッ素樹脂等の樹脂が軸受鋼にコーティングされたベアリング（以下、樹脂ベアリングという）が使用されている。また、セラミックス製の転動体を有する樹脂ベアリングもある。 Further, the glass plate is continuously conveyed from the polishing device to the flatness measuring device by a roller conveyor composed of a plurality of rollers, but the roller bearing laid on the drying line having the air knife nozzle leaked from the bearing. To prevent grease from adhering to the glass plate, self-lubricating fluororesin or other bearings that do not use grease or bearings coated with resin such as fluororesin are used (hereinafter referred to as resin bearings). ing. There is also a resin bearing having a ceramic rolling element.
日本国特開２００４－１２２３５１号公報Japanese Unexamined Patent Publication No. 2004-122351 日本国特許第３４１１８２９号公報Japanese Patent No. 3411829
　しかしながら、グリスを使用しない樹脂ベアリングであっても、樹脂ベアリングの磨耗によって樹脂の粉塵が発生し、その粉塵が飛散してガラス板に付着した場合には、平坦度測定装置による検査工程で誤検出を招くという問題があった。 However, even with resin bearings that do not use grease, if resin dust is generated due to wear of the resin bearings and the dust is scattered and adheres to the glass plate, it will be detected incorrectly in the inspection process using the flatness measuring device. There was a problem of inviting.
　本発明は、このような事情に鑑みてなされたもので、ローラが樹脂ベアリングによって支持されたローラコンベアであって、樹脂ベアリングから発生した粉塵の飛散を抑制できるローラコンベア及び板状体の検査装置、並びにガラス板の製造装置を提供することを目的とする。 The present invention has been made in view of such circumstances, and is a roller conveyor in which rollers are supported by a resin bearing, and a roller conveyor and a plate-shaped body inspection device that can suppress scattering of dust generated from the resin bearing. And it aims at providing the manufacturing apparatus of a glass plate.
　本発明は、前記目的を達成するために、板状体をローラで搬送するローラコンベアにおいて、前記板状体の搬送経路に沿って配置された複数本のローラと、転動体と当該転動体を挟み転動可能に収容する外輪と内輪とを有し、前記複数本のローラの各々の軸を回転自在に支持する樹脂製又は樹脂がコーティングされた樹脂ベアリングと、前記転動体、前記転動体が接する前記外輪の軌道面、及び前記転動体が接する前記内輪の軌道面に液体を供給する液体供給装置と、前記樹脂ベアリングを囲むカバーと、を備えたローラコンベアを提供する。 In order to achieve the above object, the present invention provides a roller conveyor for transporting a plate-like body by means of a roller, a plurality of rollers arranged along a transport path of the plate-like body, a rolling element, and the rolling element. A resin bearing having an outer ring and an inner ring that are accommodated so as to be sandwiched and rollable, and rotatably supporting the shafts of the plurality of rollers, or a resin bearing coated with resin, the rolling element, and the rolling element There is provided a roller conveyor including a raceway surface of the outer ring in contact, a liquid supply device for supplying a liquid to the raceway surface of the inner ring in contact with the rolling element, and a cover surrounding the resin bearing.
　本発明によれば、樹脂ベアリングの転動体と、転動体が接する外輪の軌道面と、転動体が接する内輪の軌道面とに、液体供給装置から液体を供給したので、樹脂の磨耗によって発生した樹脂の粉塵を液体に混入させることができ、また、樹脂ベアリングはカバーによって囲まれているので、前記粉塵の飛散を抑制できる。更に、液体が潤滑剤として機能するので、樹脂ベアリングの使用寿命が延びる。 According to the present invention, the liquid is supplied from the liquid supply device to the rolling element of the resin bearing, the raceway surface of the outer ring in contact with the rolling element, and the raceway surface of the inner ring in contact with the rolling element. Resin dust can be mixed into the liquid, and since the resin bearing is surrounded by the cover, scattering of the dust can be suppressed. Furthermore, since the liquid functions as a lubricant, the service life of the resin bearing is extended.
　樹脂ベアリングは、外輪、内輪、転動体、及び保持器から構成されており、転動体、転動体と保持器との摺動面、転動体が接する外輪の軌道面、及び転動体が接する内輪の軌道面は発塵箇所である。この発塵箇所に液体を供給して、発生した樹脂の粉塵を液体に封じ込めることが本発明の特徴である。 The resin bearing is composed of an outer ring, an inner ring, a rolling element, and a cage. The raceway is a dust spot. It is a feature of the present invention that liquid is supplied to the dust generation location and the generated resin dust is contained in the liquid.
　〔樹脂ベアリングの定義〕
　本発明の樹脂ベアリングとは、ベアリングを構成する外輪、内輪、転動体、及び保持器のうち少なくとも一つの部材が樹脂製又は樹脂がコーティングされたものをいう。しかしながら、前記部材のうち少なくとも一つの部材を、樹脂がコーティングされていない軸受鋼が露出したものとすると、樹脂ベアリングの自己潤滑性が低下する。このため、好適な樹脂ベアリングの構成としては、全ての部材が樹脂製、又は軸受鋼に樹脂がコーティングされたものがよい。 [Definition of resin bearing]
The resin bearing of the present invention refers to one in which at least one member among the outer ring, inner ring, rolling element, and cage constituting the bearing is made of resin or coated with resin. However, if at least one of the members is exposed from bearing steel that is not coated with resin, the self-lubricating property of the resin bearing is reduced. For this reason, as a preferable structure of the resin bearing, all members are made of resin, or the bearing steel is coated with resin.
　樹脂ベアリングの全ての部材が樹脂製のときの樹脂の材料は特に限定されないが、超高分子量ポリエチレン（ＵＨＭＷ‐ＰＥ：ｕｌｔｒａ　ｈｉｇｈ　ｍｏｌｅｃｕｌａｒ　ｗｅｉｇｈｔ‐ｐｏｌｙｅｔｈｙｌｅｎｅ）、ポリテトラフルオロエチレン(ＰＴＦＥ：ｐｏｌｙｔｅｔｒａｆｌｕｏｒｏｅｔｈｙｌｅｎｅ)、またはポリエーテルエーテルケトン（ＰＥＥＫ：ｐｏｌｙｅｔｈｅｒｅｔｈｅｒｋｅｔｏｎｅ）が好ましい。コーティングする樹脂の材料は特に限定されないが、自己潤滑性を有する、フッ素樹脂またはポリイミド樹脂が好ましい。軸受（転動体、外輪、及び内輪）の材料は、特に限定されないが、硬くて耐摩耗性を有する、セラミックまたは高炭素クロム鋼が好ましい。 The material of the resin when all the members of the resin bearing are made of resin is not particularly limited, but ultra high molecular weight polyethylene (UHMW-PE: ultra high molecular weight-polyethylene), polytetrafluoroethylene (PTFE: polytetrafluoroethylene), or poly Ether ether ketone (PEEK: polyetheretherketone) is preferred. The material of the resin to be coated is not particularly limited, but a fluororesin or a polyimide resin having self-lubricating properties is preferable. The material of the bearings (rolling elements, outer ring, and inner ring) is not particularly limited, but is preferably hard and wear-resistant ceramic or high carbon chrome steel.
　また、強度、寿命、及び軽量化の観点から、外輪、内輪、及び保持器を超高分子量ポリエチレン製とし、転動体をセラミックス製とすることが更に好適である。 Further, from the viewpoint of strength, life, and weight reduction, it is more preferable that the outer ring, the inner ring, and the cage are made of ultra high molecular weight polyethylene, and the rolling elements are made of ceramics.
　本発明の一態様は、前記液体供給装置は、前記樹脂ベアリングの前記外輪を保持する保持部及び前記液体の流路を備えたホルダ部材と、前記ホルダ部材の前記流路の入口に前記液体を供給するとともに前記流路の出口から排出された前記液体を前記流路の入口に循環供給する液体循環供給手段と、を備えることが好ましい。 In one aspect of the present invention, the liquid supply device includes a holder member that holds the outer ring of the resin bearing, a holder member that includes the liquid flow path, and the liquid supplied to the inlet of the flow path of the holder member. It is preferable that a liquid circulation supply unit that supplies and circulates the liquid discharged from the outlet of the flow path to the inlet of the flow path is provided.
　本発明の一態様によれば、樹脂ベアリングの外輪を保持し固定する保持部を備えたホルダ部材に、液体の流路を備えたので、流路をホルダ部材と別に設ける必要はなく、よって、部品点数を削減できる。液体は、液体循環供給手段によって流路の入口に供給され、流路を通過中に樹脂ベアリングの転動体と、転動体が接する外輪の軌道面と、転動体が接する内輪の軌道面とに供給される。そして、流路の出口から排出された液体は、液体循環供給手段によって流路の入口に循環供給される。なお、液体の循環路にフィルタを設け、このフィルタによって液体に混入している粉塵を捕獲すれば、常にクリーンな液体を流路に供給できる。 According to one aspect of the present invention, the holder member that includes the holding portion that holds and fixes the outer ring of the resin bearing is provided with the liquid flow path, and therefore it is not necessary to provide the flow path separately from the holder member. The number of parts can be reduced. The liquid is supplied to the inlet of the flow path by the liquid circulation supply means, and is supplied to the rolling element of the resin bearing, the raceway surface of the outer ring in contact with the rolling element, and the raceway surface of the inner ring in contact with the rolling element while passing through the flow path. Is done. The liquid discharged from the outlet of the flow path is circulated and supplied to the inlet of the flow path by the liquid circulation supply means. In addition, if a filter is provided in the liquid circulation path and dust mixed in the liquid is captured by this filter, a clean liquid can always be supplied to the flow path.
　本発明の一態様は、前記ホルダ部材の前記流路は、前記保持部を挟んで一方側に備えられるとともに前記流路の入口に連通された第１の流路と、前記保持部を挟んで他方側に備えられるとともに前記流路の出口に連通された第２の流路とを有し、前記第１の流路と前記第２の流路とは、前記保持部を介して連通されることが好ましい。 In one aspect of the present invention, the flow path of the holder member is provided on one side with the holding portion interposed therebetween, and the first flow path communicated with the inlet of the flow path and the holding portion sandwiched between A second flow path provided on the other side and communicated with an outlet of the flow path, and the first flow path and the second flow path are communicated via the holding portion. It is preferable.
　本発明の一態様によれば、流路の入口から第１の流路に供給された液体は、第１の流路を流れて保持部に流入する。これによって、保持部に保持されている樹脂ベアリングに液体が供給される。そして、樹脂ベアリングに供給された液体は、保持部から第２の流路に流入して第２の流路を流れ、流路の出口から排出される。このような第１の流路及び第２の流路をホルダ部材に備えることによって、樹脂ベアリングに液体を円滑に供給できる。 According to one aspect of the present invention, the liquid supplied from the inlet of the flow channel to the first flow channel flows through the first flow channel and flows into the holding unit. As a result, the liquid is supplied to the resin bearing held by the holding portion. Then, the liquid supplied to the resin bearing flows into the second flow path from the holding portion, flows through the second flow path, and is discharged from the outlet of the flow path. By providing such a first flow path and a second flow path in the holder member, the liquid can be smoothly supplied to the resin bearing.
　本発明の一態様は、前記ホルダ部材の前記第１の流路と前記保持部との間、及び前記保持部と前記第２の流路との間には、前記保持部に前記液体を塞き止める堰堤部材が夫々備えられ、前記保持部に塞き止められる前記液体に、前記樹脂ベアリングの転動体の一部、前記外輪の軌道面の一部及び前記内輪の軌道面の一部が浸漬されることが好ましい。 In one aspect of the present invention, the holder is closed with the liquid between the first flow path and the holding section and between the holding section and the second flow path. A dam member is provided, and a part of the rolling element of the resin bearing, a part of the raceway surface of the outer ring, and a part of the raceway surface of the inner ring are immersed in the liquid blocked by the holding part. It is preferred that
　本発明の一態様によれば、堰堤部材によって保持部に供給された液体を塞き止めたので、樹脂ベアリングの転動体の一部、外輪の軌道面の一部及び内輪の軌道面の一部が液体に常に浸漬された状態となる。これにより、樹脂ベアリングからの粉塵の飛散を大幅に抑制できる。 According to one aspect of the present invention, since the liquid supplied to the holding portion is blocked by the dam member, a part of the rolling element of the resin bearing, a part of the raceway surface of the outer ring, and a part of the raceway surface of the inner ring Is always immersed in the liquid. Thereby, scattering of the dust from a resin bearing can be suppressed significantly.
　本発明の一態様は、前記ローラの前記軸は、前記樹脂ベアリングの前記内輪に挿通され、前記内輪を挟んで両側に位置する前記軸には、摺動防止部材が設けられ、前記摺動防止部材の端面が前記内輪の端面に当接されるとともに止め具によって前記軸に固定されることが好ましい。 In one aspect of the present invention, the shaft of the roller is inserted into the inner ring of the resin bearing, and the shaft located on both sides of the inner ring is provided with a sliding prevention member, and the sliding prevention It is preferable that the end surface of the member is brought into contact with the end surface of the inner ring and fixed to the shaft by a stopper.
　本発明の一態様によれば、摺動防止部材のストッパ作用によって、ローラの軸が内輪に対して軸方向に摺動せず、摺動に起因する発塵を防止できるので、樹脂ベアリングからの発塵量を従来よりも低減できる。これによって、粉塵の飛散をより一層抑制できる。 According to one aspect of the present invention, the stopper action of the anti-sliding member prevents the roller shaft from sliding in the axial direction with respect to the inner ring, thereby preventing dust generation due to sliding. The amount of dust generation can be reduced compared to the conventional method. Thereby, scattering of dust can be further suppressed.
　また、本発明は、前記目的を達成するために、板状体を搬送しながら洗浄する洗浄部と、前記洗浄部によって洗浄された前記板状体を搬送しながら乾燥して清浄化する乾燥・清浄化部と、前記乾燥・清浄化部によって乾燥されて清浄化された前記板状体を検査する検査部とを備えた板状体の検査装置において、本発明のローラコンベアが前記乾燥・清浄化部に配置されている板状体の検査装置を提供する。 In order to achieve the above object, the present invention provides a cleaning unit that cleans the plate-shaped body while transporting the plate-shaped body, and a drying unit that cleans the plate-shaped body cleaned by the cleaning unit while transporting the plate-shaped body. In the plate-like body inspection apparatus comprising: a cleaning unit; and an inspection unit that inspects the plate-like body that has been dried and cleaned by the drying / cleaning unit. Provided is an inspection apparatus for a plate-like body arranged in a conversion unit.
　本発明の板状体の検査装置によれば、発明のローラコンベアを乾燥・清浄化部に配置したので、板状体に前記粉塵が付着することに起因する検査装置の誤検出の発生頻度を大幅に低減できる。 According to the inspection apparatus for a plate-like body of the present invention, since the roller conveyor of the invention is arranged in the drying / cleaning section, the frequency of occurrence of erroneous detection of the inspection apparatus due to the dust adhering to the plate-like body is reduced. It can be greatly reduced.
　本発明の一態様は、前記板状体が、ガラス板であることが好ましい。 In one embodiment of the present invention, the plate-like body is preferably a glass plate.
　本発明の一態様によれば、ガラス板の検査装置の乾燥・清浄化部に本発明のローラコンベアを配置したので、ガラス板の検査精度が大幅に向上する。 According to one aspect of the present invention, since the roller conveyor of the present invention is disposed in the drying / cleaning section of the glass plate inspection apparatus, the inspection accuracy of the glass plate is greatly improved.
　また、本発明は、溶融ガラスを帯状ガラス板に成形する成形部と、
　前記帯状ガラス板を所定サイズの矩形状のガラス板に切断し、切断された前記ガラス板の周縁部を研削する切断・面取り部と、
　周縁部を研削された前記ガラス板を搬送しながら洗浄する洗浄部と、前記洗浄部によって洗浄された前記ガラス板を搬送しながら乾燥して清浄化する乾燥・清浄化部と、前記乾燥・清浄化部によって乾燥されて清浄化された前記ガラス板を検査する検査部とを備えたガラス板の製造装置において、
　本発明のローラコンベアが前記乾燥・清浄化部に配置されているガラス板の製造装置を提供する。 Further, the present invention provides a molding part for molding molten glass into a strip-shaped glass plate,
Cutting the chamfered glass plate into a rectangular glass plate of a predetermined size, and cutting and chamfering to grind the peripheral edge of the cut glass plate;
A cleaning unit that cleans the peripheral edge of the glass plate while transporting, a drying / cleaning unit that cleans the glass plate cleaned by the cleaning unit while drying, and the drying / cleaning In the manufacturing apparatus of the glass plate provided with the inspection part which inspects the glass plate dried and cleaned by the chemical conversion part,
A glass plate manufacturing apparatus in which a roller conveyor of the present invention is disposed in the drying / cleaning section is provided.
　本発明の一態様によれば、ガラス板の検査装置の乾燥・清浄化部に本発明のローラコンベアを配置したので、ガラス板の検査精度が大幅に向上したガラス板を製造できる。 According to one aspect of the present invention, since the roller conveyor of the present invention is disposed in the drying / cleaning section of the glass plate inspection apparatus, it is possible to manufacture a glass plate with greatly improved inspection accuracy of the glass plate.
　本発明のローラコンベアによれば、樹脂ベアリングから発生した樹脂の粉塵の飛散を抑制できる。これにより、本発明の板状体の検査装置によれば、板状体に前記粉塵が付着したことに起因する誤検出の発生頻度を大幅に低減できる。 According to the roller conveyor of the present invention, scattering of resin dust generated from the resin bearing can be suppressed. Thereby, according to the inspection apparatus of the plate-shaped object of the present invention, it is possible to greatly reduce the occurrence frequency of erroneous detection caused by the dust adhering to the plate-shaped object.
図１は、液晶ディスプレイ用のガラス板製造装置及びガラス板検査装置の各工程を示したブロック図である。FIG. 1 is a block diagram showing each process of a glass plate manufacturing apparatus and a glass plate inspection apparatus for a liquid crystal display. 図２は、図１のガラス板検査装置の構成を示した平面図である。FIG. 2 is a plan view showing the configuration of the glass plate inspection apparatus of FIG. 図３は、図１のガラス板検査装置の洗浄装置及び乾燥・清浄化装置の構成を示した側面図である。FIG. 3 is a side view showing the configuration of the cleaning device and the drying / cleaning device of the glass plate inspection device of FIG. 図４は、ローラコンベアの構成を詳細に示した平面図である。FIG. 4 is a plan view showing the configuration of the roller conveyor in detail. 図５は、図４のＡ－Ａ′線から見たローラコンベアの正面図である。FIG. 5 is a front view of the roller conveyor as viewed from line AA ′ in FIG. 図６は、樹脂ベアリング及びホルダ部材を上方から見た組立斜視図である。FIG. 6 is an assembled perspective view of the resin bearing and the holder member as viewed from above. 図７は、図６のホルダ部材を下方から見た斜視図である。FIG. 7 is a perspective view of the holder member of FIG. 6 as viewed from below. 図８は、ホルダ部材を含む液体供給装置の構成を示したブロック図である。FIG. 8 is a block diagram showing a configuration of a liquid supply apparatus including a holder member. 図９は、ホルダ部材に固定された樹脂ベアリングがカバーによって囲まれた斜視図である。FIG. 9 is a perspective view in which a resin bearing fixed to a holder member is surrounded by a cover. 図１０は、図９においてカバーを取り外した樹脂ベアリング及びホルダ部材の側面図である。FIG. 10 is a side view of the resin bearing and the holder member with the cover removed in FIG.
　以下、添付図面に従って本発明に係るローラコンベア及び板状体の検査装置の好ましい実施の形態を詳説する。 Hereinafter, preferred embodiments of a roller conveyor and a plate-shaped inspection apparatus according to the present invention will be described in detail with reference to the accompanying drawings.
　実施の形態では、液晶ディスプレイ用のガラス板製造装置に設置されたガラス板検査装置（板状体の検査装置）に適用されるローラコンベアについて説明する。しかしながら、本発明のローラコンベアが適用される装置は、ガラス板検査装置に限定されない。つまり、ローラコンベアのローラを支持するベアリングから発生した粉塵が、板状体に付着することを防止する装置であれば、本発明のローラコンベアを適用できる。また、板状体として液晶ディスプレイ用のガラス板を例示するが、プラズマディスプレイ、有機ＥＬディスプレイ等の他のＦＰＤ用ガラス板でもよい。また、ガラス板に限定されるものではなく、金属製、又は樹脂製の板状体であってもよい。 In the embodiment, a roller conveyor applied to a glass plate inspection apparatus (plate body inspection apparatus) installed in a glass plate manufacturing apparatus for a liquid crystal display will be described. However, the apparatus to which the roller conveyor of the present invention is applied is not limited to the glass plate inspection apparatus. That is, the roller conveyor of the present invention can be applied as long as it is a device that prevents dust generated from the bearings that support the rollers of the roller conveyor from adhering to the plate-like body. Moreover, although the glass plate for liquid crystal displays is illustrated as a plate-shaped object, other FPD glass plates, such as a plasma display and an organic electroluminescent display, may be sufficient. Moreover, it is not limited to a glass plate, A metal or resin plate-shaped body may be sufficient.
　図１は、液晶ディスプレイ用のガラス板製造装置１０、及びガラス板検査装置１２の各工程を示したブロック図である。 FIG. 1 is a block diagram showing respective steps of a glass plate manufacturing apparatus 10 for a liquid crystal display and a glass plate inspection apparatus 12.
　ガラス板製造装置１０の製造工程は、成形装置（成形部）による成形工程１４、切断・面取り装置（切断・面取り部）による切断・面取り工程１６、特許文献１等に開示された研磨装置による研磨工程１８、洗浄装置（洗浄部）による洗浄工程２０、乾燥・清浄化装置（乾燥・清浄化部）による乾燥・清浄化工程２２、及び特許文献２等に開示された平坦度測定装置（検査部）による平坦度測定工程２４からなる。また、ガラス板検査装置１２の検査工程は洗浄工程２０、乾燥・清浄化工程２２、及び平坦度測定工程２４からなる。 The manufacturing process of the glass plate manufacturing apparatus 10 includes a molding process 14 by a molding apparatus (molding section), a cutting / chamfering process 16 by a cutting / chamfering apparatus (cutting / chamfering section), and polishing by a polishing apparatus disclosed in Patent Document 1 Step 18, a cleaning step 20 by a cleaning device (cleaning unit), a drying / cleaning step 22 by a drying / cleaning device (drying / cleaning unit), and a flatness measuring device (inspection unit) disclosed in Patent Document 2, etc. ). The inspection process of the glass plate inspection apparatus 12 includes a cleaning process 20, a drying / cleaning process 22, and a flatness measurement process 24.
　成形工程１４は、フロートバスに溜められた溶融金属の表面に溶融ガラスを供給して帯状ガラス板に成形する工程である。切断・面取り工程１６は、前記帯状ガラス板を所定サイズの矩形状のガラス板に切断し、切断したガラス板の周縁部を研削する工程である。研磨工程１８は、ガラス板の被研磨面の微小な凹凸やうねりを研磨して除去する工程である。洗浄工程２０は、研磨終了したガラス板をブラシ洗浄した後、高圧水によって洗浄し、ガラス板に付着したスラリ、研磨屑を除去する工程である。乾燥・清浄化工程２２は、圧縮空気をガラス板に噴射してガラス板を乾燥・清浄化する工程である。平坦度測定工程２４は、ガラス板の被研磨面の平坦度を測定する工程である。これらの工程を経ることによってガラス板が、液晶ディスプレイ用のガラス板に適した厚さであって平坦度の高いガラス板を得ることができる。
　上記のガラス板の製造方法はフロート法によるものだが、本実施形態はフュージョン法などにも適用できる。なお、フュージョン法など、火造り面を素子形成面とする製造方法によってガラス板を製造する場合、研磨工程１８は省略される。 The forming step 14 is a step of supplying molten glass to the surface of the molten metal stored in the float bath and forming it into a strip-shaped glass plate. The cutting / chamfering step 16 is a step of cutting the strip-shaped glass plate into a rectangular glass plate having a predetermined size and grinding the peripheral edge of the cut glass plate. The polishing step 18 is a step of polishing and removing minute irregularities and undulations on the surface to be polished of the glass plate. The cleaning step 20 is a step of removing the slurry and polishing debris attached to the glass plate by brush cleaning the glass plate after polishing and then cleaning with high-pressure water. The drying / cleaning step 22 is a step of spraying compressed air onto the glass plate to dry / clean the glass plate. The flatness measuring step 24 is a step of measuring the flatness of the polished surface of the glass plate. By passing through these steps, a glass plate having a thickness that is suitable for a glass plate for a liquid crystal display and a high flatness can be obtained.
Although the above glass plate manufacturing method is based on the float method, this embodiment can also be applied to the fusion method and the like. In addition, when manufacturing a glass plate by the manufacturing method which uses a fire-making surface as an element formation surface, such as a fusion method, the grinding | polishing process 18 is abbreviate | omitted.
　図２は、ガラス板検査装置１２の構成を概略的に示した平面図であり、図３は、ガラス板検査装置１２の洗浄装置（洗浄工程２０：図１参照）２６、及び乾燥・清浄化装置（乾燥・清浄化工程２２：図１参照）２８の構成を示した側面図である。 FIG. 2 is a plan view schematically showing the configuration of the glass plate inspection apparatus 12, and FIG. 3 is a cleaning device (cleaning step 20: see FIG. 1) 26 of the glass plate inspection apparatus 12, and drying / cleaning. FIG. 2 is a side view showing the configuration of an apparatus (drying / cleaning step 22: see FIG. 1) 28;
　図２の如く、研磨工程１８で被研磨面が研磨されたガラス板３０は、ローラコンベア３２によって、洗浄装置２６を構成するブラシ洗浄部３４と高圧水噴射装置４０、４２（図３参照）、及び乾燥・清浄化装置２８を順次通過して平坦度測定工程２４の平坦度測定装置に搬入される。なお、ローラコンベア３２のうち、乾燥・清浄化装置２８に敷設されるローラコンベア３６が樹脂ベアリングを備えた実施の形態のローラコンベアである。また、図２では、ガラス板３０を分かり易く図示するために、実線ではなく二点鎖線で示している。 As shown in FIG. 2, the glass plate 30 whose surface to be polished has been polished in the polishing step 18 is cleaned by a roller conveyor 32 with a brush cleaning unit 34 and high-pressure water jets 40 and 42 (see FIG. 3) constituting the cleaning device 26. And it passes in the drying / cleaning apparatus 28 sequentially, and is carried in to the flatness measuring apparatus of the flatness measuring process 24. In addition, the roller conveyor 36 laid in the drying / cleaning apparatus 28 among the roller conveyors 32 is a roller conveyor according to the embodiment provided with a resin bearing. Moreover, in FIG. 2, in order to show the glass plate 30 in an easy-to-understand manner, the glass plate 30 is shown by a two-dot chain line instead of a solid line.
　図４は、ローラコンベア３６の構成を詳細に示した平面図であり、図５は、図４のＡ－Ａ′線から見た正面図である。 FIG. 4 is a plan view showing the configuration of the roller conveyor 36 in detail, and FIG. 5 is a front view seen from the line AA ′ of FIG.
　ローラコンベア３６の各ローラは、軸５８とガラス板３０の下面に当接される複数の円盤体６０、６０…とから構成され、複数の円盤体６０が軸５８に所定の間隔をもって配置されている。図２では煩雑さを避けるため円盤体６０の図示を省略し、円盤体６０よりも径の小さい樹脂ベアリング５６及び軸５８のみを概略的に図示している。また、図４及び図５に示すように、ガラス板３０の下面に当接する円盤体６０の外周部には、ゴム製又は樹脂製のリング状緩衝部材６１が取り付けられており、ガラス板３０の下面に傷が付くのを防止している。 Each roller of the roller conveyor 36 is composed of a shaft 58 and a plurality of disc bodies 60, 60... That are in contact with the lower surface of the glass plate 30, and the plurality of disc bodies 60 are arranged on the shaft 58 at a predetermined interval. Yes. In FIG. 2, the illustration of the disk body 60 is omitted to avoid complexity, and only the resin bearing 56 and the shaft 58 having a smaller diameter than the disk body 60 are schematically illustrated. As shown in FIGS. 4 and 5, a rubber or resin ring-shaped buffer member 61 is attached to the outer periphery of the disc body 60 that contacts the lower surface of the glass plate 30. The bottom surface is prevented from being scratched.
　図４及び図５の如く軸５８の両端部は、乾燥・清浄化装置２８のケーシング４８から外方に突出して配置され、ギア機構５７を介して駆動部５９に連結されている。軸５８は、駆動部５９からの動力がギア機構５７を介して伝達されることにより回転駆動され、これによって円盤体６０が回転されてガラス板３０が搬送される。 4 and 5, both end portions of the shaft 58 are disposed so as to protrude outward from the casing 48 of the drying / cleaning device 28, and are connected to the drive portion 59 via the gear mechanism 57. The shaft 58 is rotationally driven when power from the drive unit 59 is transmitted through the gear mechanism 57, whereby the disk body 60 is rotated and the glass plate 30 is conveyed.
　図２に示したブラシ洗浄部３４は、ローラコンベア３２の上方に配置され、ガラス板３０の被研磨面の鉛直方向を軸に、水平方向に回転する複数台の回転ブラシ３８、３８…を備える。ガラス板３０は、ローラコンベア３２によって搬送されながら被研磨面に当接されて回転される回転ブラシ３８、３８…によって、被研磨面に付着したスラリ及び研磨塵が除去される。 The brush cleaning unit 34 shown in FIG. 2 is provided above the roller conveyor 32 and includes a plurality of rotating brushes 38, 38... That rotate in the horizontal direction about the vertical direction of the surface to be polished of the glass plate 30. . Slurry and polishing dust adhering to the surface to be polished are removed by rotating brushes 38, 38... That are rotated by contacting the glass plate 30 while being conveyed by the roller conveyor 32.
　高圧水噴射装置４０は、図３に示すようにローラコンベア３２を挟んで上方に配置され、高圧水噴射装置４２は、ローラコンベア３２を挟んで下方に配置されている。図３の左側の矢印で示すように、ガラス板３０はローラコンベア３２によって搬送されながら、高圧水噴射装置４０のノズル４４から噴射された高圧水によってその被研磨面（上面）が洗浄され、高圧水噴射装置４２のノズル４６から噴射された高圧水によってその下面が洗浄される。 As shown in FIG. 3, the high-pressure water injection device 40 is disposed above the roller conveyor 32, and the high-pressure water injection device 42 is disposed below the roller conveyor 32. As indicated by the arrow on the left side of FIG. 3, while the glass plate 30 is being conveyed by the roller conveyor 32, the surface to be polished (upper surface) is cleaned by the high-pressure water sprayed from the nozzle 44 of the high-pressure water spray device 40, and the high-pressure water The lower surface is washed with high-pressure water jetted from the nozzle 46 of the water jet device 42.
　洗浄装置２６を通過したガラス板３０は、乾燥・清浄化装置２８のケーシング４８内にローラコンベア３２によって搬入される。そして、ケーシング４８内に配置されたローラコンベア３６による搬送中に、ガラス板３０に付着している水滴、塵等が複数本のエアナイフノズル５０、５２（図２及び図３では各１本）からの圧縮空気によって除去される。図２の下側の矢印及び図３の右側の矢印で示すように、エアナイフノズル５０、５２を通過したガラス板３０は、平坦度測定工程２４に搬送される。なお、エアナイフノズル５０、５２が配置された乾燥・清浄化空間４９は、ケーシング４８によって密閉されている。よって、乾燥・清浄化空間４９には、ケーシング４８の外に浮遊する粉塵は侵入しない。また、図２～図４では、エアナイフノズル５０、５２を上下に一対配置しているが、間隔をもって複数対のエアナイフノズルをケーシング４８内に配置してもよい。 The glass plate 30 that has passed through the cleaning device 26 is carried into the casing 48 of the drying / cleaning device 28 by the roller conveyor 32. Then, during conveyance by the roller conveyor 36 disposed in the casing 48, water droplets, dust, etc. adhering to the glass plate 30 are discharged from the plurality of air knife nozzles 50, 52 (one in each of FIGS. 2 and 3). Is removed by compressed air. As shown by the lower arrow in FIG. 2 and the right arrow in FIG. 3, the glass plate 30 that has passed through the air knife nozzles 50 and 52 is conveyed to the flatness measurement step 24. The drying / cleaning space 49 in which the air knife nozzles 50 and 52 are arranged is sealed by a casing 48. Therefore, the dust floating outside the casing 48 does not enter the drying / cleaning space 49. 2 to 4, a pair of air knife nozzles 50 and 52 are arranged vertically, but a plurality of pairs of air knife nozzles may be arranged in the casing 48 at intervals.
　エアナイフノズル５０はローラコンベア３６の上方であってガラス板３０の搬送方向に沿って設置される。エアナイフノズル５２はローラコンベア３６の下方であってガラス板３０の搬送方向に沿って設置されている。また、エアナイフノズル５０とエアナイフノズル５２とは上下方向で対をなすように設置されている。更に、エアナイフノズル５０、５２は、ガラス板３０に付着した水滴、塵等を効率よく除去するために、図２の如くガラス板３０の搬送方向に対して所定角度傾斜して配置されている。 The air knife nozzle 50 is installed above the roller conveyor 36 and along the conveying direction of the glass plate 30. The air knife nozzle 52 is disposed below the roller conveyor 36 and along the conveying direction of the glass plate 30. Moreover, the air knife nozzle 50 and the air knife nozzle 52 are installed so as to make a pair in the vertical direction. Further, the air knife nozzles 50 and 52 are disposed at a predetermined angle with respect to the conveying direction of the glass plate 30 as shown in FIG. 2 in order to efficiently remove water droplets, dust and the like attached to the glass plate 30.
　更にまた、ローラコンベア３６は、エアナイフノズル５２からの圧縮空気がガラス板３０の下面に効率よく噴射されるように、図２、図４及び図５の如くエアナイフノズル５２が配設される部分が分断されている。 Furthermore, the roller conveyor 36 has a portion where the air knife nozzle 52 is disposed as shown in FIGS. 2, 4 and 5 so that the compressed air from the air knife nozzle 52 is efficiently injected onto the lower surface of the glass plate 30. It is divided.
　すなわち、ローラコンベア３６を構成する複数本のローラのうち、図２の符号の５４で示したローラに着目すると、このローラ５４は、エアナイフノズル５２の配設位置を避けて２本のローラ５４Ａ、５４Ｂに分割されている。そして、ケーシング４８から外部に突出したローラ５４Ａの左端部は不図示の一般的なベアリング（軸受鋼製のベアリング）に支持され、ケーシング４８内に位置するローラ５４Ａの右端部が実施の形態の樹脂ベアリング５６に支持されている。また、ケーシング４８から外部に突出したローラ５４Ｂの右端部は不図示の一般的なベアリング（軸受鋼製のベアリング）に支持され、ケーシング４８内に位置するローラ５４Ｂの左端部が樹脂ベアリング５６に支持されている。すなわち、ケーシング内に配置されたベアリングに樹脂ベアリング５６が適用されている。 That is, paying attention to the roller indicated by reference numeral 54 in FIG. 2 among the plurality of rollers constituting the roller conveyor 36, the roller 54 avoids the position where the air knife nozzle 52 is disposed, and the two rollers 54A, It is divided into 54B. The left end portion of the roller 54A protruding outward from the casing 48 is supported by a general bearing (not shown) (bearing steel bearing), and the right end portion of the roller 54A located in the casing 48 is the resin of the embodiment. It is supported by the bearing 56. Further, the right end portion of the roller 54B protruding outward from the casing 48 is supported by a general bearing (not shown) (bearing steel bearing), and the left end portion of the roller 54B located in the casing 48 is supported by the resin bearing 56. Has been. That is, the resin bearing 56 is applied to the bearing disposed in the casing.
　なお、ローラコンベア３６を構成する他の複数本のローラについては、基本的にはローラ５４と同様の構成なので、その説明は省略する。 In addition, about the other several roller which comprises the roller conveyor 36, since it is the structure similar to the roller 54 fundamentally, the description is abbreviate | omitted.
　次に、樹脂ベアリング５６を備えたローラコンベア３６の基本的な構成、及び作用について説明する。 Next, the basic configuration and operation of the roller conveyor 36 provided with the resin bearing 56 will be described.
　図６は、樹脂ベアリング５６及び樹脂ベアリング５６を支持する略直方体形状のホルダ部材６２を上方から見た組立斜視図、図７は、ホルダ部材６２を下方から見た斜視図、図８は、ホルダ部材６２を含む液体供給装置６４の構成を示したブロック図であり、ホルダ部材６２においては正面図であって、図６に示した堰堤部材１００を見せるために一部を破断して示している。図９は、ホルダ部材６２に固定された樹脂ベアリング５６が透明樹脂製のカバー６６によって囲まれた斜視図であり、図１０は、図９においてカバー６６を取り外した樹脂ベアリング５６及びホルダ部材６２の側面図である。 6 is an assembled perspective view of the holder member 62 having a substantially rectangular parallelepiped shape that supports the resin bearing 56 and the resin bearing 56 as viewed from above, FIG. 7 is a perspective view of the holder member 62 as viewed from below, and FIG. FIG. 7 is a block diagram showing a configuration of a liquid supply device 64 including a member 62, which is a front view of the holder member 62, and is partially cut away to show the dam member 100 shown in FIG. 6. . 9 is a perspective view in which the resin bearing 56 fixed to the holder member 62 is surrounded by a cover 66 made of transparent resin. FIG. 10 is a perspective view of the resin bearing 56 and the holder member 62 from which the cover 66 is removed in FIG. It is a side view.
　図４及び図５に示した実施の形態のローラコンベア３６は、ケーシング４８内でベアリングから漏出したグリスが検査前のガラス板３０に付着しないように、ケーシング４８内に配置されるベアリングとして、グリスを使用しない自己潤滑性を備えた樹脂ベアリング５６が使用されている。そして、図６の如く樹脂ベアリング５６の転動体６８、転動体６８が接する外輪７０の内周面である軌道面７２、転動体６８が接する内輪７４の外周面である軌道面７６、及び転動体６８を保持する保持器（不図示）に液体（例えば純水、市水、または地下水等の水）を供給する、図８の液体供給装置６４が設けられている。また、図９の如く樹脂ベアリング５６を囲むカバー６６が設けられている。なお、図６に示した太矢印は、ホルダ部材６２に対する樹脂ベアリング５６の組み付け方向を示し、細矢印は、ホルダ部材６２における前記液体の流れ方向を示している。 The roller conveyor 36 according to the embodiment shown in FIG. 4 and FIG. 5 has a grease as a bearing arranged in the casing 48 so that the grease leaked from the bearing in the casing 48 does not adhere to the glass plate 30 before the inspection. A resin bearing 56 having a self-lubricating property that does not use any of the above is used. 6, the rolling element 68 of the resin bearing 56, the raceway surface 72 that is the inner peripheral surface of the outer ring 70 with which the rolling element 68 contacts, the raceway surface 76 that is the outer peripheral surface of the inner ring 74 with which the rolling element 68 contacts, and the rolling element. The liquid supply device 64 shown in FIG. 8 is provided to supply liquid (for example, water such as pure water, city water, or ground water) to a holder (not shown) that holds 68. Further, as shown in FIG. 9, a cover 66 surrounding the resin bearing 56 is provided. 6 indicates the assembly direction of the resin bearing 56 with respect to the holder member 62, and the thin arrow indicates the flow direction of the liquid in the holder member 62.
　上記構成により実施の形態のローラコンベア３６によれば、樹脂ベアリング５６の転動体６８、転動体６８が接する外輪７０の軌道面７２、転動体６８が接する内輪７４の軌道面７６、及び保持器に、液体供給装置６４から液体が供給されるので、樹脂ベアリング５６の磨耗によって発生した樹脂の粉塵が液体に混入する。これにより、樹脂ベアリング５６からの発塵量を低減でき、また、樹脂ベアリング５６から発生した粉塵のうち、液体に混入されなかった粉塵は、樹脂ベアリング５６がカバー６６によって囲まれているため、カバー６６の外に飛散しない。したがって、実施の形態のローラコンベア３６によれば、樹脂ベアリング５６から発生した粉塵の飛散を抑制できる。 According to the roller conveyor 36 of the embodiment with the above configuration, the rolling element 68 of the resin bearing 56, the raceway surface 72 of the outer ring 70 in contact with the rolling element 68, the raceway surface 76 of the inner ring 74 in contact with the rolling element 68, and the cage Since the liquid is supplied from the liquid supply device 64, the resin dust generated by the abrasion of the resin bearing 56 is mixed into the liquid. As a result, the amount of dust generated from the resin bearing 56 can be reduced. Of the dust generated from the resin bearing 56, the dust that has not been mixed in the liquid is surrounded by the cover 66. Do not scatter outside 66. Therefore, according to the roller conveyor 36 of the embodiment, scattering of dust generated from the resin bearing 56 can be suppressed.
　また、実施の形態のローラコンベア３６を備えたガラス板検査装置１２によれば、ガラス板３０に前記粉塵が付着することに起因する、平坦度測定工程２４での誤検出の発生頻度を大幅に低減できるので、平坦度測定装置によるガラス板３０の検査精度が大幅に向上する。 Moreover, according to the glass plate inspection apparatus 12 provided with the roller conveyor 36 of the embodiment, the occurrence frequency of erroneous detection in the flatness measurement step 24 caused by the dust adhering to the glass plate 30 is greatly increased. Since it can reduce, the test | inspection precision of the glass plate 30 by a flatness measuring apparatus improves significantly.
　なお、実施の形態の樹脂ベアリング５６は、強度、寿命、及び軽量化の観点から外輪７０、内輪７４、及び前記保持器が超高分子量ポリエチレン製であり、転動体６８がセラミックス製である。また、樹脂ベアリング５６に供給された液体が潤滑剤として機能するので、樹脂ベアリング５６の使用寿命が延びるという利点もある。 In the resin bearing 56 of the embodiment, the outer ring 70, the inner ring 74, and the cage are made of ultra high molecular weight polyethylene, and the rolling elements 68 are made of ceramics from the viewpoint of strength, life, and weight reduction. Moreover, since the liquid supplied to the resin bearing 56 functions as a lubricant, there is an advantage that the service life of the resin bearing 56 is extended.
　次に、液体供給装置６４の特徴について説明する。 Next, features of the liquid supply device 64 will be described.
　液体供給装置６４は、図８の如く略直方体形状のホルダ部材６２と液体循環装置（液体循環供給手段）７８とを備える。ホルダ部材６２は、その上面に、樹脂ベアリング５６の外輪７０の下半分を嵌合によって保持する円弧状の凹曲面を有する保持部８０を備えるとともに、図６の如く液体の溝状の流路８２を備えている。また、図７に示すホルダ部材６２の下部の一方端には、流路８２（図６参照）の入口８４が設けられるとともに、他方端には流路８２の出口８６が設けられている。 The liquid supply device 64 includes a holder member 62 having a substantially rectangular parallelepiped shape and a liquid circulation device (liquid circulation supply means) 78 as shown in FIG. The holder member 62 includes, on its upper surface, a holding portion 80 having an arc-shaped concave curved surface that holds the lower half of the outer ring 70 of the resin bearing 56 by fitting, and as shown in FIG. It has. Further, an inlet 84 of the flow path 82 (see FIG. 6) is provided at one end of the lower portion of the holder member 62 shown in FIG. 7, and an outlet 86 of the flow path 82 is provided at the other end.
　図８の液体循環装置７８は、流路８２の入口８４に液体を供給するとともに、流路８２の出口８６から排出された液体を流路８２の入口８４に循環供給する、ポンプ８８を備えた循環路９０を有する。流路８２の入口８４から供給された液体は、ホルダ部材６２に備えられた上昇路９２を介して、ホルダ部材６２の上面の流路８２に供給され、流路８２を通過した後、ホルダ部材６２に備えられた下降路９４を介して出口８６から排出される。 The liquid circulation device 78 of FIG. 8 includes a pump 88 that supplies the liquid to the inlet 84 of the flow path 82 and circulates and supplies the liquid discharged from the outlet 86 of the flow path 82 to the inlet 84 of the flow path 82. A circulation path 90 is provided. The liquid supplied from the inlet 84 of the flow path 82 is supplied to the flow path 82 on the upper surface of the holder member 62 via the ascending path 92 provided in the holder member 62, and after passing through the flow path 82, the holder member The gas is discharged from the outlet 86 through a descending path 94 provided in 62.
　このように構成された液体供給装置６４によれば、樹脂ベアリング５６が固定される保持部８０を備えたホルダ部材６２に、液体の流路８２を備えたので、流路８２をホルダ部材６２と別に設ける必要はなく、よって、部品点数を削減できる。 According to the liquid supply device 64 configured as described above, the holder member 62 including the holding portion 80 to which the resin bearing 56 is fixed includes the liquid channel 82. There is no need to provide them separately, so the number of parts can be reduced.
　また、液体は、液体循環装置７８によって流路８２を通過中に樹脂ベアリング５６の転動体６８と、転動体６８が接する外輪７０の軌道面７２と、転動体６８が接する内輪７４の軌道面７６とに供給される。そして、流路８２の出口８６から排出された液体は、ポンプ８８によって流路８２の入口８４に循環供給される。なお、液体の循環路９０にフィルタを設け、このフィルタによって液体に混入している粉塵を捕獲すれば、常に粉塵の含有量が少ない液体を流路８２に供給できる。 Further, while the liquid is passing through the flow path 82 by the liquid circulation device 78, the liquid is a rolling element 68 of the resin bearing 56, a raceway surface 72 of the outer ring 70 in contact with the rolling element 68, and a raceway surface 76 of the inner ring 74 in contact with the rolling element 68. And supplied to. The liquid discharged from the outlet 86 of the flow path 82 is circulated and supplied to the inlet 84 of the flow path 82 by the pump 88. In addition, if a filter is provided in the liquid circulation path 90 and the dust mixed in the liquid is captured by the filter, the liquid having a small amount of dust can always be supplied to the flow path 82.
　次に、流路８２の特徴について説明する。 Next, features of the flow path 82 will be described.
　ホルダ部材６２の流路８２は、図６の如く第１の流路９６と第２の流路９８とを備えている。また、第１の流路９６と第２の流路９８とは保持部８０を介して連通されている。 The flow path 82 of the holder member 62 includes a first flow path 96 and a second flow path 98 as shown in FIG. Further, the first flow path 96 and the second flow path 98 are communicated with each other via the holding unit 80.
　第１の流路９６は、保持部８０の円弧状の凹曲面を挟んで一方側に備えられるとともに、流路８２の入口８４に上昇路９２を介して連通されている。第２の流路９８は、保持部８０の円弧状の凹曲面を挟んで他方側に備えられるとともに、下降路９４を介して流路８２の出口８６に連通されている。上昇路９２は、第１の流路９６の一端に設けられ、下降路９４は、第２の流路９８の他端に設けられているが、上昇路９２及び下降路９４の設置場所は特に限定されず、各流路の中央に設けてもよい。なお、第２の流路９８の他端とは、前記第１の流路９６の一端が設けられている側とは反対側のことである。 The first flow path 96 is provided on one side with the arcuate concave curved surface of the holding portion 80 interposed therebetween, and is communicated with the inlet 84 of the flow path 82 via the ascending path 92. The second flow path 98 is provided on the other side across the arc-shaped concave curved surface of the holding portion 80 and communicates with the outlet 86 of the flow path 82 via the descending path 94. The ascending path 92 is provided at one end of the first channel 96, and the descending path 94 is provided at the other end of the second channel 98. It is not limited, You may provide in the center of each flow path. The other end of the second channel 98 is the side opposite to the side where the one end of the first channel 96 is provided.
　このように構成された流路８２によれば、流路８２の入口８４から上昇路９２を介して第１の流路９６に供給された液体は、第１の流路９６を流れて、保持部８０に流入する。これによって、保持部８０に保持されている樹脂ベアリング５６に液体が供給される。そして、樹脂ベアリング５６に供給された液体は、保持部８０から第２の流路９８に流入して第２の流路９８を流れ、下降路９４を介して流路８２の出口８６から排出される。このような第１の流路９６、及び第２の流路９８をホルダ部材６２に備えることによって、樹脂ベアリング５６に液体を円滑に供給できる。 According to the flow path 82 configured in this manner, the liquid supplied from the inlet 84 of the flow path 82 to the first flow path 96 via the ascending path 92 flows through the first flow path 96 and is retained. Flows into the section 80. As a result, the liquid is supplied to the resin bearing 56 held by the holding unit 80. Then, the liquid supplied to the resin bearing 56 flows into the second flow path 98 from the holding portion 80, flows through the second flow path 98, and is discharged from the outlet 86 of the flow path 82 through the descending path 94. The By providing the first flow path 96 and the second flow path 98 in the holder member 62, the liquid can be smoothly supplied to the resin bearing 56.
　次に、第１の流路９６と第２の流路９８の特徴について説明する。 Next, features of the first channel 96 and the second channel 98 will be described.
　ホルダ部材６２の第１の流路９６と保持部８０との間、及び保持部８０と第２の流路９８との間には、保持部８０に液体を塞き止める（貯留する）堰堤部材１００、１０２が夫々備えられている。これにより、保持部８０に塞き止められた液体に、樹脂ベアリング５６の転動体６８の一部、外輪７０の軌道面７２の一部、及び内輪７４の軌道面７６の一部が浸漬されている。 A dam member between the first flow path 96 and the holding section 80 of the holder member 62 and between the holding section 80 and the second flow path 98 to block (store) liquid in the holding section 80. 100 and 102 are provided. Thereby, a part of the rolling element 68 of the resin bearing 56, a part of the raceway surface 72 of the outer ring 70, and a part of the raceway surface 76 of the inner ring 74 are immersed in the liquid blocked by the holding portion 80. Yes.
　このような堰堤部材１００、１０２を備えた第１の流路９６、及び第２の流路９８によれば、堰堤部材１００、１０２によって保持部８０に供給された液体を塞き止めることができるので、樹脂ベアリング５６の下部に位置する転動体６８、その転動体６８が接する外輪７０の軌道面７２、及びその転動体６８が接する内輪７４の軌道面７６が液体に常に液没（浸漬）された状態となる。これにより、樹脂ベアリング５６からの粉塵の飛散を大幅に抑制できる。 According to the first flow path 96 and the second flow path 98 including the dam members 100 and 102, the liquid supplied to the holding unit 80 by the dam members 100 and 102 can be blocked. Therefore, the rolling element 68 located below the resin bearing 56, the raceway surface 72 of the outer ring 70 in contact with the rolling element 68, and the raceway surface 76 of the inner ring 74 in contact with the rolling element 68 are always immersed in the liquid. It becomes the state. Thereby, scattering of the dust from the resin bearing 56 can be significantly suppressed.
　なお、堰堤部材１００の上部中央には、第１の流路９６から保持部８０に液体を流し込む凹状の切欠き１０４が備えられ、堰堤部材１０２の上部中央には、保持部８０から第２の流路９８に液体を流し込む凹状の切欠き１０６が備えられている。切欠き１０４、１０６の底部の高さ、すなわち、保持部８０に塞き止められる液体の水面が、保持部８０に固定された樹脂ベアリング５６の図８中二点鎖線で示す内輪７４の軌道面７６の最下点７６Ａよりも上方に設定されている。これによって、樹脂ベアリング５６の転動体６８の一部、その転動体６８が接する外輪７０の軌道面７２の一部、及びその転動体６８が接する内輪７４の軌道面７６の一部が液体に常に浸漬される。 A concave notch 104 is provided in the upper center of the dam member 100 to allow liquid to flow from the first flow path 96 to the holding portion 80. A concave notch 106 for pouring liquid into the flow path 98 is provided. The height of the bottoms of the notches 104 and 106, that is, the water surface of the liquid blocked by the holding unit 80 is the raceway surface of the inner ring 74 indicated by a two-dot chain line in FIG. 8 of the resin bearing 56 fixed to the holding unit 80. It is set above the lowest point 76A of 76. As a result, a part of the rolling element 68 of the resin bearing 56, a part of the raceway surface 72 of the outer ring 70 in contact with the rolling element 68, and a part of the raceway surface 76 of the inner ring 74 in contact with the rolling element 68 are always in liquid. Soaked.
　ところで、図１０の如くローラコンベア３６のローラの軸５８は、一対の摺動防止部材１０８、１０８を介して樹脂ベアリング５６の内輪７４に固定されている。すなわち、その固定方法は、まず、軸５８を内輪７４に挿通させる。次に、内輪７４の両端面それぞれの方向から、軸５８に円輪状の摺動防止部材１０８、１０８を嵌める。次いで、それぞれの摺動防止部材１０８、１０８の内輪７４に対向する端面を内輪７４の両側端面に接触させる。つまり、摺動防止部材１０８、１０８によって内輪７４を挟む。なお、摺動防止部材１０８の外径は内輪７４の外径以下が好ましい。摺動防止部材１０８の外径が内輪７４の外径以下であれば、液体の流れを阻害しない。そして最後に、摺動防止部材１０８の外周面から内周面に向けて設けられた貫通ねじ孔に、ねじ（止め具）１１０、１１０を挿通して、２つの摺動防止部材１０８、１０８を軸５８に固定する。これによって、ローラコンベア３６のローラの軸５８が、摺動防止部材１０８、１０８を介して樹脂ベアリング５６の内輪７４に固定される。 Incidentally, as shown in FIG. 10, the roller shaft 58 of the roller conveyor 36 is fixed to the inner ring 74 of the resin bearing 56 via a pair of anti-sliding members 108 and 108. That is, in the fixing method, first, the shaft 58 is inserted through the inner ring 74. Next, the ring-shaped anti-slip members 108 and 108 are fitted to the shaft 58 from the directions of the both end faces of the inner ring 74. Next, the end surfaces of the anti-sliding members 108, 108 facing the inner ring 74 are brought into contact with both end surfaces of the inner ring 74. That is, the inner ring 74 is sandwiched between the sliding prevention members 108 and 108. The outer diameter of the sliding preventing member 108 is preferably equal to or smaller than the outer diameter of the inner ring 74. If the outer diameter of the sliding preventing member 108 is equal to or smaller than the outer diameter of the inner ring 74, the liquid flow is not hindered. Finally, the screws (stoppers) 110 and 110 are inserted into the through screw holes provided from the outer peripheral surface to the inner peripheral surface of the anti-slip member 108, and the two anti-slip members 108 and 108 are attached. The shaft 58 is fixed. As a result, the roller shaft 58 of the roller conveyor 36 is fixed to the inner ring 74 of the resin bearing 56 via the anti-sliding members 108 and 108.
　ローラの軸５８は内輪７４に対し、摺動防止部材１０８、１０８のストッパ作用によって軸方向に摺動しない。よって、前記摺動に起因する樹脂ベアリング５６の内輪７４からの発塵も防止できるので、粉塵の飛散をより一層抑制できる。 The roller shaft 58 does not slide in the axial direction with respect to the inner ring 74 due to the stopper action of the sliding prevention members 108 and 108. Accordingly, dust generation from the inner ring 74 of the resin bearing 56 due to the sliding can be prevented, and the scattering of dust can be further suppressed.
　また、図８の如く液体供給装置６４は、液体循環装置７８の循環路９０に液体の供給を開始及び停止する電磁バルブ（バルブ）１１２を備えている。電磁バルブ１１２を必要に応じて開閉することによって、液体の供給を開始及び停止できる。 Further, as shown in FIG. 8, the liquid supply device 64 includes an electromagnetic valve (valve) 112 that starts and stops the supply of liquid to the circulation path 90 of the liquid circulation device 78. The liquid supply can be started and stopped by opening and closing the electromagnetic valve 112 as necessary.
　更に、電磁バルブ１１２による液体の供給の開始動作及び停止動作は、制御部１１４によって制御されている。樹脂ベアリング５６に液体を常に供給する必要がない場合には、制御部１１４によって電磁バルブ１１２を所定時間毎に開閉制御して、液体の供給の開始動作及び停止動作を行えばよい。また、制御部１１４は、節電のために必要時のみポンプ８８を稼働する。すなわち、制御部１１４は、ポンプ８８の稼働／停止も制御する。 Furthermore, the start and stop operations of the liquid supply by the electromagnetic valve 112 are controlled by the control unit 114. When it is not necessary to always supply the liquid to the resin bearing 56, the controller 114 may perform opening / closing control of the electromagnetic valve 112 at predetermined time intervals to start and stop the liquid supply. The control unit 114 operates the pump 88 only when necessary for power saving. That is, the control unit 114 also controls the operation / stop of the pump 88.
　本発明を詳細に、また特定の実施態様を参照して説明したが、本発明の範囲と精神を逸脱することなく、様々な修正や変更を加えることができることは、当業者にとって明らかである。
　本出願は、２０１２年１０月５日出願の日本特許出願２０１２－２２２７６１に基づくものであり、その内容はここに参照として取り込まれる。 Although the present invention has been described in detail and with reference to specific embodiments, it will be apparent to those skilled in the art that various modifications and variations can be made without departing from the scope and spirit of the invention.
This application is based on Japanese Patent Application No. 2012-222761 filed on Oct. 5, 2012, the contents of which are incorporated herein by reference.
　１０…ガラス板製造装置、１２…ガラス板検査装置、１４…成形工程、１６…切断・面取り工程、１８…研磨工程、２０…洗浄工程、２２…乾燥・清浄化工程、２４…平坦度測定工程、２６…洗浄装置、２８…乾燥・清浄化装置、３０…ガラス板、３２…ローラコンベア、３４…ブラシ洗浄部、３６…ローラコンベア、３８…回転ブラシ、４０、４２…高圧水噴射装置、４４、４６…ノズル、４８…ケーシング、４９…乾燥・清浄化空間、５０、５２…エアナイフノズル、５４…ローラ、５４Ａ、５４Ｂ、５４Ｃ…ローラ、５６…樹脂ベアリング、５７…ギア機構、５８…軸、５９…駆動部、６０…円盤体、６１…リング状緩衝部材、６２…ホルダ部材、６４…液体供給装置、６６…カバー、６８…転動体、７０…外輪、７２…軌道面、７４…内輪、７６…軌道面、７６Ａ…最下点、７８…液体循環装置、８０…保持部、８２…流路、８４…流路の入口、８６…流路の出口、８８…ポンプ、９０…循環路、９２…上昇路、９４…下降路、９６…第１の流路、９８…第２の流路、１００、１０２…堰堤部材、１０４、１０６…切欠き、１０８…摺動防止部材、１１０…ねじ、１１２…電磁バルブ、１１４…制御部 DESCRIPTION OF SYMBOLS 10 ... Glass plate manufacturing apparatus, 12 ... Glass plate inspection apparatus, 14 ... Molding process, 16 ... Cutting and chamfering process, 18 ... Polishing process, 20 ... Cleaning process, 22 ... Drying / cleaning process, 24 ... Flatness measurement process , 26 ... cleaning device, 28 ... drying / cleaning device, 30 ... glass plate, 32 ... roller conveyor, 34 ... brush cleaning section, 36 ... roller conveyor, 38 ... rotating brush, 40, 42 ... high pressure water injection device, 44 46 ... Nozzle, 48 ... Casing, 49 ... Drying / cleaning space, 50, 52 ... Air knife nozzle, 54 ... Roller, 54A, 54B, 54C ... Roller, 56 ... Resin bearing, 57 ... Gear mechanism, 58 ... Shaft 59... Drive unit, 60. Disk body, 61. Ring-shaped buffer member, 62. Holder member, 64. Liquid supply device, 66. Cover, 68. ... inner ring, 76 ... raceway surface, 76A ... lowest point, 78 ... liquid circulation device, 80 ... holding part, 82 ... flow path, 84 ... inlet of flow path, 86 ... outlet of flow path, 88 ... pump, 90 ... Circulating path, 92 ... Ascending path, 94 ... Downstream path, 96 ... First channel, 98 ... Second channel, 100, 102 ... Dam member, 104, 106 ... Notch, 108 ... Anti-sliding member, 110 ... Screw, 112 ... Electromagnetic valve, 114 ... Control unit

Claims (8)

  1. 　板状体をローラで搬送するローラコンベアにおいて、
    　前記板状体の搬送経路に沿って配置された複数本のローラと、
    　転動体と当該転動体を挟み転動可能に収容する外輪と内輪とを有し、前記複数本のローラの各々の軸を回転自在に支持する樹脂製又は樹脂がコーティングされた樹脂ベアリングと、
    　前記転動体、前記転動体が接する前記外輪の軌道面、及び前記転動体が接する前記内輪の軌道面に液体を供給する液体供給装置と、
    　前記樹脂ベアリングを囲むカバーと、
    　を備えたローラコンベア。     In a roller conveyor that transports plate-like bodies with rollers,
    A plurality of rollers arranged along the conveying path of the plate-like body;
    A resin bearing that has a rolling element and an outer ring and an inner ring that sandwich the rolling element and accommodates the rolling element, and rotatably supports the shafts of the plurality of rollers, or a resin bearing coated with resin;
    A liquid supply device for supplying liquid to the rolling element, the raceway surface of the outer ring in contact with the rolling element, and the raceway surface of the inner ring in contact with the rolling element;
    A cover surrounding the resin bearing;
    With roller conveyor.
  2. 　前記液体供給装置は、
    　前記樹脂ベアリングの前記外輪を保持する保持部及び前記液体の流路を備えたホルダ部材と、
    　前記ホルダ部材の前記流路の入口に前記液体を供給するとともに前記流路の出口から排出された前記液体を前記流路の入口に循環供給する液体循環供給手段と、
    　を備える請求項１に記載のローラコンベア。     The liquid supply device includes:
    A holder member having the holding portion for holding the outer ring of the resin bearing and the liquid flow path;
    Liquid circulation supply means for supplying the liquid to the inlet of the flow path of the holder member and circulatingly supplying the liquid discharged from the outlet of the flow path to the inlet of the flow path;
    A roller conveyor according to claim 1.
  3. 　前記ホルダ部材の前記流路は、前記保持部を挟んで一方側に備えられるとともに前記流路の入口に連通された第１の流路と、前記保持部を挟んで他方側に備えられるとともに前記流路の出口に連通された第２の流路とを有し、
    　前記第１の流路と前記第２の流路とは、前記保持部を介して連通される請求項２に記載のローラコンベア。     The flow path of the holder member is provided on one side across the holding portion, and is provided on the other side across the holding portion and a first flow path communicating with the inlet of the flow path and the A second flow path communicated with the outlet of the flow path,
    The roller conveyor according to claim 2, wherein the first flow path and the second flow path are communicated with each other via the holding portion.
  4. 　前記ホルダ部材の前記第１の流路と前記保持部との間、及び前記保持部と前記第２の流路との間には、前記保持部に前記液体を塞き止める堰堤部材が夫々備えられ、前記保持部に塞き止められる前記液体に、前記転動体の一部、前記外輪の軌道面の一部、及び前記内輪の軌道面の一部が浸漬される請求項３に記載のローラコンベア。 Between the first flow path and the holding section of the holder member and between the holding section and the second flow path, there are provided dam members that block the liquid in the holding section, respectively. The roller according to claim 3, wherein a part of the rolling element, a part of the raceway surface of the outer ring, and a part of the raceway surface of the inner ring are immersed in the liquid that is blocked by the holding unit. Conveyor.
  5. 　前記ローラの前記軸は、前記樹脂ベアリングの前記内輪に挿通され、
    　前記内輪を挟んで両側に位置する前記軸には、摺動防止部材が設けられ、
    　前記摺動防止部材の端面が前記内輪の端面に当接されるとともに止め具によって前記軸に固定される請求項１から４のいずれか１項に記載のローラコンベア。     The shaft of the roller is inserted through the inner ring of the resin bearing,
    The shaft located on both sides across the inner ring is provided with a sliding prevention member,
    The roller conveyor according to any one of claims 1 to 4, wherein an end face of the anti-slip member is brought into contact with an end face of the inner ring and is fixed to the shaft by a stopper.
  6. 　板状体を搬送しながら洗浄する洗浄部と、前記洗浄部によって洗浄された前記板状体を搬送しながら乾燥して清浄化する乾燥・清浄化部と、前記乾燥・清浄化部によって乾燥されて清浄化された前記板状体を検査する検査部とを備えた板状体の検査装置において、
    　請求項１から５のいずれか１項に記載のローラコンベアが前記乾燥・清浄化部に配置されている板状体の検査装置。     It is dried by the cleaning unit that transports the plate-shaped body while transporting it, the drying / cleaning unit that cleans the plate-shaped body that has been cleaned by the cleaning unit by drying and transporting, and the drying / cleaning unit. In a plate-shaped body inspection apparatus comprising an inspection unit that inspects the cleaned plate-shaped body,
    An inspection apparatus for a plate-like body in which the roller conveyor according to any one of claims 1 to 5 is disposed in the drying / cleaning section.
  7. 　前記板状体は、ガラス板である請求項６に記載の板状体の検査装置。 The plate-shaped body inspection apparatus according to claim 6, wherein the plate-shaped body is a glass plate.
  8. 　溶融ガラスを帯状ガラス板に成形する成形部と、
    　前記帯状ガラス板を所定サイズの矩形状のガラス板に切断し、切断された前記ガラス板の周縁部を研削する切断・面取り部と、
    　周縁部を研削された前記ガラス板を搬送しながら洗浄する洗浄部と、
    　前記洗浄部によって洗浄された前記ガラス板を搬送しながら乾燥して清浄化する乾燥・清浄化部と、
    　前記乾燥・清浄化部によって乾燥されて清浄化された前記ガラス板を検査する検査部と、を備えたガラス板の製造装置において、
    　請求項１から５のいずれか１項に記載のローラコンベアが前記乾燥・清浄化部に配置されているガラス板の製造装置。     A molding part for molding molten glass into a strip-shaped glass plate;
    Cutting the chamfered glass plate into a rectangular glass plate of a predetermined size, and cutting and chamfering to grind the peripheral edge of the cut glass plate;
    A cleaning section that cleans the peripheral edge of the glass plate while conveying the glass plate;
    A drying / cleaning unit for drying and cleaning while conveying the glass plate cleaned by the cleaning unit;
    In an apparatus for manufacturing a glass plate, comprising: an inspection unit that inspects the glass plate that has been dried and cleaned by the drying / cleaning unit,
    The manufacturing apparatus of the glass plate by which the roller conveyor of any one of Claim 1 to 5 is arrange | positioned in the said drying and cleaning part.
PCT/JP2013/076582 2012-10-05 2013-09-30 Roller conveyor, plate body inspecting device, and glass plate manufacturing device WO2014054590A1 (en)

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