WO2014043907A1 - 玻璃基板卡匣的承载装置及仓储设备 - Google Patents

玻璃基板卡匣的承载装置及仓储设备 Download PDF

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Publication number
WO2014043907A1
WO2014043907A1 PCT/CN2012/081818 CN2012081818W WO2014043907A1 WO 2014043907 A1 WO2014043907 A1 WO 2014043907A1 CN 2012081818 W CN2012081818 W CN 2012081818W WO 2014043907 A1 WO2014043907 A1 WO 2014043907A1
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WO
WIPO (PCT)
Prior art keywords
horizontal direction
glass substrate
carrier
substrate cassette
carrying
Prior art date
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PCT/CN2012/081818
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English (en)
French (fr)
Inventor
陈增宏
吴俊豪
林昆贤
齐明虎
郭振华
杨卫兵
Original Assignee
深圳市华星光电技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Priority to US13/642,536 priority Critical patent/US20140079516A1/en
Publication of WO2014043907A1 publication Critical patent/WO2014043907A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/28—Impact protection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/42—Soft elements to prevent damage to articles, e.g. bristles, foam

Definitions

  • the present invention relates to the field of liquid crystal displays, and in particular to a storage device for storing a glass substrate and a carrier device for the glass substrate cassette in the storage device.
  • glass substrates are usually temporarily stored using a glass substrate cassette.
  • the glass substrate cassette is stored in a series of storage devices that form an automated material handling system.
  • Each storage facility includes a storage bin, a boom and a carrier.
  • the storage cabinet is used for storing the glass substrate cassette; the carrying device is connected to the boom and the glass substrate cassette is lifted under the driving of the boom and carried into the storage cabinet.
  • the carrying device comprises a carrying arm and a positioning mechanism.
  • the carrier device approaches and further lifts the glass substrate cassette in a predetermined direction.
  • the carrying arm carries the glass substrate cassette and prevents the glass substrate from being jammed from the carrying device from a predetermined direction or a direction opposite to the predetermined direction by a positioning mechanism.
  • the glass substrate cassette is in rigid contact with the positioning mechanism; if the pick-and-place operation of the carrying device is slightly deviated or the pick-and-place speed is fast, the collision between the glass substrate cassette and the positioning mechanism may easily cause the glass substrate to be displaced or scrap.
  • the technical problem to be solved by the present invention is to provide a carrier device and a storage device for a glass substrate cassette, which can effectively reduce the probability of fragmentation during the handling of the glass substrate loaded in the glass substrate cassette.
  • a technical solution adopted by the present invention is to provide a carrier device for a glass substrate cassette, comprising: at least two carrier elements for carrying a glass substrate cassette, at least two carrier elements along the first Extending in a horizontal direction and spaced apart in a second horizontal direction perpendicular to the first horizontal direction; at least one pair of buffer positioning elements spaced apart from each other on the carrier element in a first horizontal direction, at least one pair of buffer positioning elements for use along the first level
  • the direction elastically positions the glass substrate cassette; the connecting member, the connecting member extends in the second horizontal direction and is connected between the two carrying members.
  • the bottom of the glass substrate cassette is provided with at least two support strips extending along the second horizontal direction and spaced apart along the first horizontal direction, and each pair of buffer positioning elements elastically clamping the corresponding support strips in the first horizontal direction. On both sides.
  • the buffer positioning element comprises a fixing member, an elastic member and a sliding member disposed on the carrying member in a first horizontal direction, the fixing member is fixed on the carrying member, the sliding member is slidable along the carrying member, and the elastic member is disposed on the sliding member and fixed Between the pieces, the slider is elastically supported on one side of the corresponding support strip.
  • the sliding member comprises a guiding portion for guiding the glass substrate cassette to be carried on the carrying member in a vertical direction.
  • the guiding portion is a curved surface.
  • the elastic member is a spring.
  • a carrier device for a glass substrate cassette comprising: at least one carrier member for carrying a glass substrate cassette; at least one pair of buffer positioning members, On the carrier member, for elastically positioning the glass substrate cassette in the horizontal direction.
  • the carrying device comprises at least two carrying elements extending along the first horizontal direction and spaced apart in a second horizontal direction perpendicular to the first horizontal direction, the buffer positioning element elastically positioning the glass substrate cassette in the first horizontal direction.
  • the carrying device comprises at least one pair of buffer positioning elements spaced apart in a first horizontal direction, each pair of cushioning positioning elements elastically clamping a portion of the glass substrate cassette in a first horizontal direction.
  • the bottom of the glass substrate cassette is provided with at least two support strips extending along the second horizontal direction and spaced apart along the first horizontal direction, and each pair of buffer positioning elements elastically clamping the corresponding support strips in the first horizontal direction. On both sides.
  • the buffer positioning element comprises a fixing member, an elastic member and a sliding member disposed on the carrying member in a first horizontal direction, the fixing member is fixed on the carrying member, the sliding member is slidable along the carrying member, and the elastic member is disposed on the sliding member and fixed Between the pieces, the slider is elastically supported on one side of the corresponding support strip.
  • the sliding member comprises a guiding portion for guiding the glass substrate cassette to be carried on the carrying member in a vertical direction.
  • the guiding portion is a curved surface.
  • the elastic element is a spring.
  • the carrying device further comprises a connecting element extending in the second horizontal direction and connected between the two carrying elements.
  • a storage device including a storage device of a storage cabinet, a boom and a glass substrate cassette; the carrying device comprises at least one carrying member and at least one pair is disposed on a buffer positioning member on the carrier member, at least one carrier member for carrying the glass substrate cassette, at least one pair of buffer positioning members for elastically positioning the glass substrate cassette in the horizontal direction; the carrier device being coupled to the boom and driving at the boom Move in or out of the glass substrate cassette from the storage cabinet.
  • the invention has the beneficial effects that, in the case of the prior art, when the carrying device of the glass substrate cassette of the present invention carries the glass substrate, the glass substrate cassette is elastically contacted with the buffer positioning element, so that the glass substrate is jammed and buffered. There is a buffering process between the components, so that the glass substrate carried in the glass substrate cassette is not displaced or fragmented.
  • FIG. 1 is a perspective view of a carrying device carrying a glass substrate cassette of the present invention
  • Figure 2 is a plan view of the carrying device of Figure 1 carrying a glass substrate cassette
  • Figure 3 is a perspective view of the carrying device of Figure 1;
  • Figure 4 is a perspective view of the warehousing apparatus of the present invention.
  • a carrier device 100 of a glass substrate cassette 200 includes at least one carrier member 1 and at least one pair of buffer positioning members 2.
  • the carrier element 1 is used to carry a glass substrate cassette 200.
  • the cushion positioning member 2 is disposed on the carrier member 1 for elastically positioning the glass substrate cassette 200 in the horizontal direction.
  • the carrier device 100 includes two carrier elements 1 extending along the first horizontal direction X and spaced apart in a second horizontal direction Y perpendicular to the first horizontal direction X.
  • the carrier element 1 is a strip. Structure.
  • the carrier device 100 picks up the glass substrate cassette 200 along the first horizontal direction X, and the buffer positioning member 2 elastically positions the glass substrate cassette 200 along the first horizontal direction X to prevent the glass substrate cassette 200 from being in the first horizontal direction of the pick-and-place.
  • the X slides off the self-supporting device 100.
  • the number of carrier elements 1 may be any number different from two, for example, the number of carrier elements 1 is one or three, and the like.
  • the carrier member 1 is a plate-like structure that extends in the first horizontal direction X and in the second horizontal direction Y at the same time.
  • the plurality of carrier members 1 may also be in an arrangement extending in the second horizontal direction Y and spaced apart in the first horizontal direction X.
  • the carrier device 100 may further comprise at least one connecting element 3 connecting the plurality of carrier elements 1.
  • the carrier element 1 extends in a first horizontal direction X
  • the connecting element 3 extends in a second horizontal direction Y
  • the connecting element 3 vertically connects the two carrier elements 1.
  • the number of connecting elements 3 is two.
  • the bottom of the glass substrate cassette 200 is provided with at least two support bars 201 extending in the second horizontal direction Y and spaced apart in the first horizontal direction X. Each support bar 201 is held by at least one pair of cushioning positioning elements 2.
  • each of the support bars 201 is clamped by two pairs of buffer positioning elements 2; the two pairs of buffer positioning elements 2 that hold the same support bar 201 are respectively disposed on different bearing elements 1.
  • the top surface 10 of the carrier element 1 is a bearing surface.
  • the damping positioning element 2 is arranged above the bearing surface 10.
  • Each pair of cushioning positioning members 2 are spaced apart in the first horizontal direction X to elastically hold the support bars 201 of the glass substrate cassette 200 in the first horizontal direction X.
  • the number of pairs of the buffer positioning elements 2 that hold the same support bar 201 is not limited. At the same time, there is no limitation on the number of support bars 201 for positioning. Further, whether or not the glass substrate cassette 200 is provided with the support bar 201 for positioning is not limited by the present invention; for example, at least one pair of the cushioning positioning members 2 elastically sandwiches both outer sides of the glass substrate cassette 200.
  • each of the cushioning positioning members 2 includes a fixing member 21, an elastic member 22, and a slider 23 which are disposed on the carrier member 1 in the first horizontal direction X.
  • the fastening element 21 is fastened to the bearing surface 10 of the carrier element 1 .
  • the slider 23 is slidable relative to the carrier element 1 in the first horizontal direction X.
  • the elastic member 22 is disposed between the slider 23 and the fixing member 21 and connects the slider 23 and the fixing member 21 to elastically support the slider 23 on one side of the clamped support bar 201.
  • the two sliding members 23 of the two cushioning positioning elements 2 are spaced apart from each other and disposed close to each other, and the two fixing members 21 of the two cushioning positioning elements 2 are disposed away from each other.
  • the slider 23 is provided with a guiding portion 231.
  • the guiding portion 231 has a smoothly connected circular arc surface.
  • the guiding portion 231 is used for guiding the glass substrate cassette 200 to be carried on the bearing member 1 in the vertical direction; during the process of the carrier member 1 receiving the glass substrate cassette 200, the guiding portion 231 guides the supporting strip 201 to smoothly slide in.
  • a pair of cushioning positioning members 2 are elastically held by a pair of cushioning positioning members 2.
  • the elastic member 22 is a spring.
  • the elastic member 22 may be any member made of an elastic material or having an elastic structure.
  • the elastic member 22 and the sliding member 23 may also be a unitary mechanism, as long as the pair of cushioning positioning members 2 and the supporting bar 201 clamped therein are carried when the glass substrate cassette 200 is carried on the carrier member 1. The other portions of the glass substrate cassette 200 may be in elastic contact.
  • the present invention further provides a storage device 4.
  • the warehousing apparatus 4 includes a storage cabinet 41, a boom 42 and a carrying device 100.
  • the carrier device 100 is coupled to the boom 42 and is carried into or out of the glass substrate cassette 200 from the magazine 41 under the drive of the boom 42.
  • the structure of the carrying device 100 has been described in detail in the previous section and will not be described herein.
  • the carrying device 100 of the glass substrate cassette of the present invention carries the glass substrate cassette 200
  • the glass substrate cassette 200 is elastically contacted with the buffer positioning member 2, and between the glass substrate cassette 200 and the buffer positioning member 2 Since there is a buffering process, there is no possibility that the glass substrate (not shown) carried in the glass substrate cassette 200 is displaced or fragmented.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
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  • Mechanical Engineering (AREA)
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

一种玻璃基板卡匣（200）的承载装置（100）及仓储设备（4），承载装置（100）包括：承载元件（1），用于承载玻璃基板卡匣（200）；缓冲定位元件（2），设置于承载元件（1）上，用于沿水平方向弹性定位玻璃基板卡匣（200）。通过上述方式，承载装置（100）的缓冲定位元件（2）承载玻璃基板卡匣（200）时存在一个缓冲过程，不会出现承载于玻璃基板卡匣（200）中的玻璃基板移位或破片的情况。

Description

玻璃基板卡匣的承载装置及仓储设备
【技术领域】
本发明涉及液晶显示器领域，特别是涉及一种储存玻璃基板的仓储设备及应用于仓储设备中玻璃基板卡匣的承载装置。
【背景技术】
在液晶面板制造行业中，玻璃基板通常利用玻璃基板卡匣进行暂存。玻璃基板卡匣存储于一系列仓储设备中，该一系列仓储设备构成了一个自动化物料搬送***。
每一仓储设备均包括仓储柜、吊臂和承载装置。仓储柜用于储存玻璃基板卡匣；承载装置连接至吊臂且在吊臂的驱动下托举玻璃基板卡匣并将其搬运至仓储柜中。
现有技术中，承载装置包括承载臂和定位机构。承载装置托举玻璃基板卡匣的过程中，承载装置沿一预定方向靠近并进一步托举玻璃基板卡匣。当玻璃基板卡匣被承载装置托举后，承载臂承载玻璃基板卡匣并通过定位机构防止玻璃基板卡匣自预定方向或与预定方向相反的方向自承载装置滑落。
然而，上述托举过程中，玻璃基板卡匣与定位机构刚性接触；若承载装置取放动作稍有偏差或取放速度较快，玻璃基板卡匣与定位机构碰撞极易引发玻璃基板移位或破片。
【发明内容】
本发明主要解决的技术问题是提供一种玻璃基板卡匣的承载装置及仓储设备，能够有效降低装载于玻璃基板卡匣中的玻璃基板搬运过程中的破片产生几率。
为解决上述技术问题，本发明采用的一个技术方案是：提供一种玻璃基板卡匣的承载装置，包括：至少两个承载元件，用于承载玻璃基板卡匣，至少两个承载元件沿第一水平方向延伸且沿垂直于第一水平方向的第二水平方向间隔设置；至少一对缓冲定位元件，沿第一水平方向间隔设置于承载元件上，至少一对缓冲定位元件用于沿第一水平方向弹性定位玻璃基板卡匣；连接元件，连接元件沿第二水平方向延伸且连接与两个承载元件之间。
其中，玻璃基板卡匣的底部设置有沿第二水平方向延伸且沿第一水平方向间隔设置的至少两个支撑条，每对缓冲定位元件沿第一水平方向弹性夹持对应的支撑条的相对两侧。
其中，缓冲定位元件包括沿第一水平方向设置于承载元件上的固定件、弹性件和滑动件，固定件固定于承载元件上，滑动件可沿承载元件滑动，弹性件设置于滑动件与固定件之间，以使滑动件弹性支撑于对应的支撑条的一侧上。
其中，滑动件包括导引部，导引部用于导引玻璃基板卡匣沿竖直方向承载于承载元件上。
其中，导引部为一弧面。
其中，弹性件为弹簧。
为解决上述技术问题，本发明采用的另一个技术方案是：提供一种玻璃基板卡匣的承载装置，包括：至少一承载元件，用于承载玻璃基板卡匣；至少一对缓冲定位元件，设置于承载元件上，用于沿水平方向弹性定位玻璃基板卡匣。
其中，承载装置包括沿第一水平方向延伸且沿垂直于第一水平方向的第二水平方向间隔设置的至少两个承载元件，缓冲定位元件沿第一水平方向弹性定位玻璃基板卡匣。
其中，承载装置包括沿第一水平方向间隔设置的至少一对缓冲定位元件，每对缓冲定位元件沿第一水平方向弹性夹持玻璃基板卡匣的一部分。
其中，玻璃基板卡匣的底部设置有沿第二水平方向延伸且沿第一水平方向间隔设置的至少两个支撑条，每对缓冲定位元件沿第一水平方向弹性夹持对应的支撑条的相对两侧。
其中，缓冲定位元件包括沿第一水平方向设置于承载元件上的固定件、弹性件和滑动件，固定件固定于承载元件上，滑动件可沿承载元件滑动，弹性件设置于滑动件与固定件之间，以使滑动件弹性支撑于对应的支撑条的一侧上。
其中，滑动件包括导引部，导引部用于导引玻璃基板卡匣沿竖直方向承载于承载元件上。
其中，导引部为一弧面。
其中，弹性元件为弹簧。
其中，承载装置进一步包括连接元件，连接元件沿第二水平方向延伸且连接于两个承载元件之间。
为解决上述技术问题，本发明采用的另一个技术方案是：提供一种仓储设备，包括仓储柜、吊臂和玻璃基板卡匣的承载装置；承载装置包括至少一承载元件和至少一对设置于承载元件上的缓冲定位元件，至少一承载元件用于承载玻璃基板卡匣，至少一对缓冲定位元件用于沿水平方向弹性定位玻璃基板卡匣；承载装置连接至吊臂且在吊臂的驱动下自仓储柜搬入或搬出玻璃基板卡匣。
本发明的有益效果是：区别于现有技术的情况，本发明玻璃基板卡匣的承载装置承载玻璃基板卡匣时，玻璃基板卡匣与缓冲定位元件弹性接触，使玻璃基板卡匣与缓冲定位元件之间存在一个缓冲过程，因此不会出现承载于玻璃基板卡匣中的玻璃基板移位或破片的情况。
【附图说明】
图1是本发明承载装置承载玻璃基板卡匣的立体图；
图2是图1所示承载装置承载玻璃基板卡匣的俯视图；
图3是图1所述承载装置的立体图；
图4是本发明仓储设备的立体图。
【具体实施方式】
参阅图1，本发明一具体实施方式玻璃基板卡匣200的承载装置100包括至少一承载元件1和至少一对缓冲定位元件2。承载元件1用于承载玻璃基板卡匣200。缓冲定位元件2设置于承载元件1上，用于沿水平方向弹性定位玻璃基板卡匣200。
具体来说，本实施例中，承载装置100包括沿第一水平方向X延伸且沿垂直于第一水平方向X的第二水平方向Y间隔设置的两个承载元件1，承载元件1为长条状结构。承载装置100沿第一水平方向X取放玻璃基板卡匣200，缓冲定位元件2沿第一水平方向X弹性定位玻璃基板卡匣200，以防止玻璃基板卡匣200沿取放的第一水平方向X上自承载装置100上滑落。
实际应用中，承载元件1的数目可以为不同于两个的任意个数，例如，承载元件1的数目为1个或3个等等。当承载元件1的数目仅为一个时，承载元件1为同时沿第一水平方向X和沿第二水平方向Y延伸的板状结构。当承载元件1的数目为两个以上时，多个承载元件1亦可以为沿第二水平方向Y延伸且沿第一水平方向X间隔设置的排列形式。
对于承载元件1的数目为两个以上的情况来说，承载装置100还可以进一步包括连接多个承载元件1的至少一个连接元件3。本实施例中，承载元件1沿第一水平方向X延伸，连接元件3沿第二水平方向Y延伸，连接元件3垂直连接两承载元件1。连接元件3的数目为两个。
玻璃基板卡匣200的底部设置有沿第二水平方向Y延伸且沿第一水平方向X间隔设置的至少两个支撑条201。每一支撑条201被至少一对缓冲定位元件2夹持。
本实施例中，每一支撑条201被两对缓冲定位元件2夹持；夹持同一支撑条201的两对缓冲定位元件2分别设置于不同的承载元件1之上。承载元件1的顶面10为承载面。缓冲定位元件2设置于承载面10之上。每对缓冲定位元件2沿第一水平方向X间隔设置，沿第一水平方向X弹性夹持玻璃基板卡匣200的支撑条201。
实际应用中，对夹持同一支撑条201的缓冲定位元件2的对数不做限制。同时，对用于定位的支撑条201的数目亦不做限制。更进一步来说，对玻璃基板卡匣200是否设置用于定位的支撑条201也不受本发明的限制；例如，至少一对缓冲定位元件2弹性夹持玻璃基板卡匣200的两外侧。
请一并参照图2和图3，每一缓冲定位元件2包括沿第一水平方向X设置于承载元件1上的固定件21、弹性件22和滑动件23。其中，固定件21固定于承载元件1的承载面10上。滑动件23可沿第一水平方向X相对承载元件1滑动。弹性件22设置于滑动件23和固定件21之间并连接滑动件23和固定件21，以使滑动件23弹性支撑于被夹持的支撑条201的一侧上。
换句话说，对于一对缓冲定位元件2来说，该两缓冲定位元件2的两滑动件23相互间隔且彼此靠近设置，而该两缓冲定位元件2的两固定件21则彼此远离设置。
为了顺利取放玻璃基板卡匣200，滑动件23上设置导引部231。优选地，导引部231具有一平滑连接的圆弧面。导引部231用于导引玻璃基板卡匣200沿竖直方向承载于承载元件1上；在承载元件1承接玻璃基板卡匣200的过程中，导引部231导引支撑条201顺利滑入一对缓冲定位元件2之间并被一对缓冲定位元件2弹性夹持。
本实施例中，弹性件22是弹簧。实际应用中，弹性件22可以是任何由弹性材料制成或具有弹性结构的元件。具体应用中，弹性件22和滑动件23也可以是结合为一体的机构，只要在玻璃基板卡匣200被承载至承载元件1上时一对缓冲定位元件2与夹持其中的支撑条201或玻璃基板卡匣200的其他部分弹性接触即可。
请进一步参照图4，本发明进一步提供一种仓储设备4。仓储设备4包括仓储柜41、吊臂42和承载装置100。承载装置100连接至吊臂42且在吊臂42的驱动下自仓储柜41搬入或搬出玻璃基板卡匣200。承载装置100的结构在前一部分已经详细描述过，此处不再赘述。
区别于现有技术，本发明玻璃基板卡匣的承载装置100承载玻璃基板卡匣200时，玻璃基板卡匣200与缓冲定位元件2弹性接触，使玻璃基板卡匣200与缓冲定位元件2之间存在一个缓冲过程，因此不会出现承载于玻璃基板卡匣200中的玻璃基板（未图示）移位或破片的情况。
以上所述仅为本发明的实施方式，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (16)

  1. 一种玻璃基板卡匣的承载装置，其中，所述承载装置包括：
    至少两个承载元件，用于承载所述玻璃基板卡匣，所述至少两个承载元件沿第一水平方向延伸且沿垂直于所述第一水平方向的第二水平方向间隔设置；
    至少一对缓冲定位元件，沿所述第一水平方向间隔设置于所述承载元件上，所述至少一对缓冲定位元件用于沿所述第一水平方向弹性定位所述玻璃基板卡匣；
    连接元件，所述连接元件沿所述第二水平方向延伸且连接与两个所述承载元件之间。
  2. 根据权利要求1所述的承载装置，其中，所述玻璃基板卡匣的底部设置有沿所述第二水平方向延伸且沿所述第一水平方向间隔设置的至少两个支撑条，每对所述缓冲定位元件沿所述第一水平方向弹性夹持对应的所述支撑条的相对两侧。
  3. 根据权利要求2所述的承载装置，其中，所述缓冲定位元件包括沿所述第一水平方向设置于所述承载元件上的固定件、弹性件和滑动件，所述固定件固定于所述承载元件上，所述滑动件可沿所述承载元件滑动，所述弹性件设置于所述滑动件与所述固定件之间，以使所述滑动件弹性支撑于对应的所述支撑条的一侧上。
  4. 根据权利要求3所述的承载装置，其中，所述滑动件包括导引部，所述导引部用于导引所述玻璃基板卡匣沿竖直方向承载于所述承载元件上。
  5. 根据权利要求4所述的承载装置，其中，所述导引部为一弧面。
  6. 根据权利要求3所述的承载装置，其中，所述弹性件为弹簧。
  7. 一种玻璃基板卡匣的承载装置，其中，所述承载装置包括：
    至少一承载元件，用于承载所述玻璃基板卡匣；
    至少一对缓冲定位元件，设置于所述承载元件上，用于沿水平方向弹性定位所述玻璃基板卡匣。
  8. 根据权利要求7所述的承载装置，其中，所述承载装置包括沿第一水平方向延伸且沿垂直于所述第一水平方向的第二水平方向间隔设置的至少两个所述承载元件，所述缓冲定位元件沿所述第一水平方向弹性定位所述玻璃基板卡匣。
  9. 根据权利要求8所述的承载装置，其中，所述承载装置包括沿所述第一水平方向间隔设置的至少一对所述缓冲定位元件，每对所述缓冲定位元件沿所述第一水平方向弹性夹持所述玻璃基板卡匣的一部分。
  10. 根据权利要求9所述的承载装置，其中，所述玻璃基板卡匣的底部设置有沿所述第二水平方向延伸且沿所述第一水平方向间隔设置的至少两个支撑条，每对所述缓冲定位元件沿所述第一水平方向弹性夹持对应的所述支撑条的相对两侧。
  11. 根据权利要求10所述的承载装置，其中，所述缓冲定位元件包括沿所述第一水平方向设置于所述承载元件上的固定件、弹性件和滑动件，所述固定件固定于所述承载元件上，所述滑动件可沿所述承载元件滑动，所述弹性件设置于所述滑动件与所述固定件之间，以使所述滑动件弹性支撑于对应的所述支撑条的一侧上。
  12. 根据权利要求11所述的承载装置，其中，所述滑动件包括导引部，所述导引部用于导引所述玻璃基板卡匣沿竖直方向承载于所述承载元件上。
  13. 根据权利要求12所述的承载装置，其中，所述导引部为一弧面。
  14. 根据权利要求11所述的承载装置，其中，所述弹性元件为弹簧。
  15. 根据权利要求8所述的承载装置，其中，所述承载装置进一步包括连接元件，所述连接元件沿所述第二水平方向延伸且连接于两个所述承载元件之间。
  16. 一种仓储设备，其中，所述仓储设备包括仓储柜、吊臂和承载装置；所述承载装置包括至少一承载元件和至少一对设置于所述承载元件上的缓冲定位元件，所述至少一承载元件用于承载所述玻璃基板卡匣，所述至少一对缓冲定位元件用于沿水平方向弹性定位所述玻璃基板卡匣；所述承载装置连接至所述吊臂且在所述吊臂的驱动下自所述仓储柜搬入或搬出所述玻璃基板卡匣。
PCT/CN2012/081818 2012-09-19 2012-09-24 玻璃基板卡匣的承载装置及仓储设备 WO2014043907A1 (zh)

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