WO2014014110A9 - パッシベーション層形成用組成物、パッシベーション層付半導体基板、パッシベーション層付半導体基板の製造方法、太陽電池素子、太陽電池素子の製造方法及び太陽電池 - Google Patents
パッシベーション層形成用組成物、パッシベーション層付半導体基板、パッシベーション層付半導体基板の製造方法、太陽電池素子、太陽電池素子の製造方法及び太陽電池 Download PDFInfo
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- WO2014014110A9 WO2014014110A9 PCT/JP2013/069700 JP2013069700W WO2014014110A9 WO 2014014110 A9 WO2014014110 A9 WO 2014014110A9 JP 2013069700 W JP2013069700 W JP 2013069700W WO 2014014110 A9 WO2014014110 A9 WO 2014014110A9
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- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 230000009974 thixotropic effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 230000005068 transpiration Effects 0.000 description 1
- WOZZOSDBXABUFO-UHFFFAOYSA-N tri(butan-2-yloxy)alumane Chemical compound [Al+3].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-] WOZZOSDBXABUFO-UHFFFAOYSA-N 0.000 description 1
- MYWQGROTKMBNKN-UHFFFAOYSA-N tributoxyalumane Chemical compound [Al+3].CCCC[O-].CCCC[O-].CCCC[O-] MYWQGROTKMBNKN-UHFFFAOYSA-N 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
- UAEJRRZPRZCUBE-UHFFFAOYSA-N trimethoxyalumane Chemical compound [Al+3].[O-]C.[O-]C.[O-]C UAEJRRZPRZCUBE-UHFFFAOYSA-N 0.000 description 1
- MDDPTCUZZASZIQ-UHFFFAOYSA-N tris[(2-methylpropan-2-yl)oxy]alumane Chemical compound [Al+3].CC(C)(C)[O-].CC(C)(C)[O-].CC(C)(C)[O-] MDDPTCUZZASZIQ-UHFFFAOYSA-N 0.000 description 1
- XMUJIPOFTAHSOK-UHFFFAOYSA-N undecan-2-ol Chemical compound CCCCCCCCCC(C)O XMUJIPOFTAHSOK-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229920001285 xanthan gum Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
- IHPKGUQCSIINRJ-UHFFFAOYSA-N β-ocimene Natural products CC(C)=CCC=C(C)C=C IHPKGUQCSIINRJ-UHFFFAOYSA-N 0.000 description 1
Images
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- H01L31/02—Details
- H01L31/0216—Coatings
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- H01L31/02008—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules
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Definitions
- the present invention relates to a composition for forming a passivation layer, a semiconductor substrate with a passivation layer, a method for manufacturing a semiconductor substrate with a passivation layer, a solar cell element, a method for manufacturing a solar cell element, and a solar cell.
- n-type diffusion layer is uniformly formed by performing several tens of minutes at 800 ° C. to 900 ° C.
- n-type diffusion layers are formed not only on the front surface, which is the light receiving surface, but also on the side surface and the back surface. Therefore, side etching is performed to remove the n-type diffusion layer formed on the side surface.
- the n-type diffusion layer formed on the back surface needs to be converted into a p + -type diffusion layer.
- an aluminum paste is applied to the entire back surface, and this is heat-treated (fired), thereby forming an aluminum electrode together with the ohmic contact by converting the n-type diffusion layer into the p + -type diffusion layer. It has gained.
- the aluminum electrode formed from the aluminum paste has low conductivity. Therefore, in order to reduce the sheet resistance, the aluminum electrode formed on the entire back surface usually must have a thickness of about 10 ⁇ m to 20 ⁇ m after heat treatment (firing). Furthermore, since the thermal expansion coefficient differs greatly between silicon and aluminum, a large internal stress is generated in the silicon substrate during the heat treatment (firing) and cooling in the silicon substrate on which the aluminum electrode is formed, and the grain boundary Cause damage, increase of crystal defects and warpage.
- a point contact method has been proposed in which an aluminum paste is applied to a part of the surface of a silicon substrate to partially form a p + -type diffusion layer and an aluminum electrode (for example, Japanese Patent No. 3107287). (See the publication).
- an aluminum paste is applied to a part of the surface of a silicon substrate to partially form a p + -type diffusion layer and an aluminum electrode.
- back surface In the case of a solar cell having a point contact structure on the surface opposite to the light receiving surface (hereinafter also referred to as “back surface”), it is necessary to suppress the recombination rate of minority carriers on the surface of the portion other than the aluminum electrode. is there.
- a SiO 2 film or the like has been proposed as a passivation layer (see, for example, JP-A-2004-6565).
- Such a passivation effect is generally called a field effect, and an aluminum oxide (Al 2 O 3 ) film or the like has been proposed as a material having a negative fixed charge (see, for example, Japanese Patent No. 4767110).
- Such a passivation layer is generally formed by a method such as an ALD (Atomic Layer Deposition) method or a CVD (Chemical Vapor Deposition) method (for example, Journal of Applied Physics, 104 (2008), 113703-1). 113703-7).
- the methods described in Journal of Applied Physics, 104 (2008), 113703-1 to 113703-7 involve complicated manufacturing processes such as vapor deposition, and it may be difficult to improve productivity.
- the composition for forming a passivation layer used in the methods described in Thin Solid Films, 517 (2009), 6327-6330 and Chinese Physics Letters, 26 (2009), 088102-1-088102-4 is a gel over time. It is difficult to say that the storage stability is sufficient because of problems such as crystallization.
- a passivation layer having an excellent passivation effect using an oxide containing a metal element other than aluminum has not been sufficiently studied so far.
- the present invention has been made in view of the above conventional problems, and provides a passivation layer forming composition that can form a passivation layer having a desired shape by a simple method and has excellent storage stability. This is the issue.
- Another object of the present invention is to provide a semiconductor substrate with a passivation layer, a solar cell element and a solar cell using the composition for forming a passivation layer. Furthermore, this invention makes it a subject to provide the manufacturing method of a semiconductor substrate with a passivation layer and the manufacturing method of a solar cell element using this composition for formation of a passivation layer.
- each R 2 is independently an alkyl group having 1 to 4 carbon atoms.
- the term “process” is not only an independent process, but is included in this term if the purpose of the process is achieved even if it cannot be clearly distinguished from other processes.
- a numerical range indicated using “to” indicates a range including the numerical values described before and after “to” as the minimum value and the maximum value, respectively.
- the content of each component in the composition is the total amount of the plurality of substances present in the composition unless there is a specific notice when there are a plurality of substances corresponding to each component in the composition. Means.
- the term “layer” includes a configuration of a shape formed in part in addition to a configuration of a shape formed on the entire surface when observed as a plan view.
- the passivation effect of a semiconductor substrate refers to the effective lifetime of minority carriers in a semiconductor substrate provided with a passivation layer by using an apparatus such as Nippon Semilab Co., Ltd., WT-2000PVN, Sinton Instruments, WCT-120, etc. It can be evaluated by using the reflection microwave conductive attenuation method.
- the rate of change in viscosity (%) over time is obtained by dividing the absolute value of the difference in shear viscosity immediately after preparation and 30 days later by the shear viscosity immediately after preparation, and is specifically calculated by the following equation.
- the viscosity change rate of the composition for forming a passivation layer is preferably 30% or less, more preferably 20% or less, and still more preferably 10% or less.
- Viscosity change rate (%)
- the metal oxide formed by heat-treating (firing) the passivation layer-forming composition containing the compound of formula (I) is likely to be in an amorphous state, and causes defects in metal atoms or oxygen atoms, so that a large fixed charge is generated. This is likely to occur.
- This fixed charge generates a charge near the interface of the semiconductor substrate, so that the concentration of minority carriers can be reduced, and as a result, the carrier recombination rate at the interface is suppressed, so that an excellent passivation effect is achieved. It is thought.
- the inside of the passivation layer can be examined.
- the crystal phase near the interface of the passivation layer can be confirmed by measuring an X-ray diffraction spectrum (XRD, X-ray ⁇ ⁇ ⁇ diffraction).
- XRD X-ray diffraction spectrum
- the fixed charge of the passivation layer can be evaluated by the CV method (CapacitanceitVoltage measurement).
- M contains at least one metal element selected from the group consisting of Nb, Ta, V, Y, and Hf.
- M is: It is preferably at least one selected from the group consisting of Nb, Ta and Y, more preferably Nb.
- M preferably contains at least one metal element selected from the group consisting of Nb, Ta, V, and Hf, and Nb, Ta, More preferably, it is at least one selected from the group consisting of VO and Hf.
- each R 1 independently represents an alkyl group having 1 to 8 carbon atoms or an aryl group having 6 to 14 carbon atoms, preferably an alkyl group having 1 to 8 carbon atoms, and preferably having 1 to 4 carbon atoms.
- the alkyl group is more preferable.
- the alkyl group represented by R 1 may be linear or branched. Specific examples of the alkyl group represented by R 1 include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, sec-butyl, t-butyl, hexyl, octyl, 2- An ethylhexyl group etc. can be mentioned.
- aryl group represented by R 1 examples include a phenyl group.
- the alkyl group and aryl group represented by R 1 may have a substituent.
- substituent for the alkyl group include a halogen atom, an amino group, a hydroxyl group, a carboxyl group, a sulfone group, and a nitro group.
- substituent for the aryl group include a halogen atom, a methyl group, an ethyl group, an isopropyl group, an amino group, a hydroxyl group, a carboxyl group, a sulfone group, and a nitro group.
- R 1 is preferably an unsubstituted alkyl group having 1 to 8 carbon atoms, and more preferably an unsubstituted alkyl group having 1 to 4 carbon atoms, from the viewpoint of storage stability and a passivation effect.
- m represents an integer of 1 to 5. From the viewpoint of storage stability, m is preferably 5 when M is Nb, m is preferably 5 when M is Ta, and M is VO. M is preferably 3, m is preferably 3 when M is Y, and m is preferably 4 when M is Hf.
- M preferably contains at least one metal element selected from the group consisting of Nb, Ta and Y.
- R 1 is more preferably at least one selected from the group consisting of compounds each having 1 to 4 carbon atoms and an unsubstituted alkyl group.
- M is at least one selected from the group consisting of Nb, Ta, VO, and Hf, and R 1 has 1 carbon atom. It is preferably at least one selected from the group consisting of compounds that are an unsubstituted alkyl group of ⁇ 4.
- Compounds represented by the general formula (I) are niobium methoxide, niobium ethoxide, niobium isopropoxide, niobium n-propoxide, niobium n-butoxide, niobium t-butoxide, niobium isobutoxide, tantalum methoxide, tantalum.
- tantalum isopropoxide, tantalum n-propoxide, tantalum n-butoxide, tantalum t-butoxide, tantalum isobutoxide, yttrium methoxide, yttrium ethoxide, yttrium isopropoxide, yttrium n-propoxide, yttrium n- Butoxide, yttrium t-butoxide, yttrium isobutoxide, vanadium methoxide oxide, vanadium ethoxide oxide, vanadium isopropoxide oxide, vanadium n-propoxide oxide Vanadium n-butoxide oxide, vanadium t-butoxide oxide, vanadium isobutoxide oxide, hafnium methoxide, hafnium ethoxide, hafnium isopropoxide, hafnium n-propoxide, hafnium n-butoxide, hafnium me
- niobium ethoxide, niobium n-propoxide, niobium n-butoxide, tantalum ethoxide, tantalum n-propoxide, tantalum n-butoxide, vanadium ethoxide oxide, vanadium n-propoxy Preference is given to oxides, vanadium n-butoxide oxide, hafnium ethoxide, hafnium n-propoxide and hafnium n-butoxide.
- the compound represented by the general formula (I) may be a prepared product or a commercially available product.
- Commercially available products include, for example, pentamethoxyniobium, pentaethoxyniobium, penta-i-propoxyniobium, penta-n-propoxyniobium, penta-i-butoxyniobium, penta-n-butoxyniobium from High Purity Chemical Laboratory, Inc.
- Penta-sec-butoxy niobium pentamethoxy tantalum, pentaethoxy tantalum, penta-i-propoxy tantalum, penta-n-propoxy tantalum, penta-i-butoxy tantalum, penta-n-butoxy tantalum, penta-sec-butoxy tantalum , Penta-t-butoxytantalum, vanadium (V) trimethoxide oxide, vanadium (V) triethoxy oxide, vanadium (V) tri-i-propoxide oxide, vanadium (V) tri-n-propoxide oxide, vanadium (V Tri-i-butoxide oxide, vanadium (V) tri-n-butoxide oxide, vanadium (V) tri-sec-butoxide oxide, vanadium (V) tri-t-butoxide oxide, tri-i-propoxy yttrium, tri-n -Butoxy yttrium, tetramethoxy
- the compound represented by the general formula (I) may be used as a compound in which a chelate structure is formed by mixing with a compound having a specific structure having two carbonyl groups.
- a compound having a chelate structure at least a part of the alkoxide group of the compound of formula (I) is substituted with a compound having a specific structure to form a chelate structure.
- a liquid medium may be present, or heat treatment, addition of a catalyst, and the like may be performed.
- the stability of the compound of formula (I) to hydrolysis and polymerization reaction is improved, and the storage stability of the composition for forming a passivation layer containing the compound is further improved. To do.
- the compound having a specific structure having two carbonyl groups is preferably at least one selected from the group consisting of ⁇ -diketone compounds, ⁇ -ketoester compounds and malonic acid diesters from the viewpoint of storage stability.
- ⁇ -diketone compounds include acetylacetone, 3-methyl-2,4-pentanedione, 2,3-pentanedione, 3-ethyl-2,4-pentanedione, and 3-butyl-2,4-pentane.
- Examples include dione, 2,2,6,6-tetramethyl-3,5-heptanedione, 2,6-dimethyl-3,5-heptanedione, 6-methyl-2,4-heptanedione, and the like.
- the number of chelate structures is not particularly limited as long as it is 1 to 5.
- the number of carbonyl groups contributing to the chelate structure is not particularly limited, but when M is Nb, the number of carbonyl groups contributing to the chelate structure is preferably 1 to 5, and when M is Ta, the chelate structure It is preferable that the number of carbonyl groups contributing to 1 is 5 to 1.
- M VO, it contributes to the chelate structure, but preferably 1 to 3, and when M is Y, it contributes to the chelate structure.
- the number of carbonyl groups to be converted is preferably 1 to 3, and when M is Hf, the number of carbonyl groups contributing to the chelate structure is preferably 1 to 4.
- the number of chelate structures can be controlled, for example, by appropriately adjusting the ratio of mixing the compound of formula (I) with a compound capable of forming a chelate with a metal element. Moreover, you may select suitably the compound which has a desired structure from a commercially available metal chelate compound.
- a chelate structure in the compound of formula (I) can be confirmed by a commonly used analytical method. For example, it can be confirmed using an infrared spectrum, a nuclear magnetic resonance spectrum or a melting point.
- the state of the compound of formula (I) may be liquid or solid.
- the compound represented by the general formula (I) is a normal temperature (25 C.) and is preferably liquid.
- the compound of formula (I) is a solid, it is a compound having good solubility or dispersibility in a solvent from the viewpoint of the passivation effect of the formed passivation layer, the storage stability of the composition for forming a passivation layer, and the like. It is preferable that it is a compound that is stable when it is used as a solution or dispersion.
- the content of the compound of the formula (I) contained in the composition for forming a passivation layer can be appropriately selected as necessary.
- the content of the compound of the formula (I) can be 0.1% by mass to 80% by mass in the composition for forming a passivation layer from the viewpoint of storage stability and a passivation effect, and 0.5% by mass to 70% by mass.
- the content is preferably 1% by mass, more preferably 1% by mass to 60% by mass, and still more preferably 1% by mass to 50% by mass.
- composition for forming a passivation layer of the present invention may further contain at least one compound represented by the following general formula (II) (hereinafter referred to as “specific organoaluminum compound”).
- each R 2 independently represents an alkyl group having 1 to 8 carbon atoms.
- n represents an integer of 0 to 3.
- X 2 and X 3 each independently represent an oxygen atom or a methylene group.
- R 3 , R 4 and R 5 each independently represents a hydrogen atom or an alkyl group having 1 to 8 carbon atoms.
- the specific organoaluminum compound includes compounds called aluminum alkoxide, aluminum chelate and the like, and preferably has an aluminum chelate structure in addition to the aluminum alkoxide structure. Further, as described in Nippon Seramikkusu Kyokai Gakujitsu Ronbunshi, vol. 97, pp369-399 (1989), the organoaluminum compound becomes aluminum oxide (Al 2 O 3 ) by heat treatment (firing). At this time, since the formed aluminum oxide is likely to be in an amorphous state, a four-coordinate aluminum oxide layer is easily formed in the vicinity of the interface with the semiconductor substrate, and may have a large negative fixed charge due to the four-coordinate aluminum oxide. It is considered possible. As a result, it is considered that a passivation layer having an excellent passivation effect can be formed.
- the passivation effect is further enhanced by the respective effects in the passivation layer.
- the metal (M) represented by the general formula (I) is heat-treated (fired) in a state where the compound represented by the general formula (I) and the compound represented by the general formula (II) coexist.
- the composite metal alkoxide of aluminum and aluminum (Al) the physical properties such as reactivity and vapor pressure are improved, the denseness of the passivation layer as a heat-treated product (baked product) is improved, and as a result, the passivation effect becomes higher. Conceivable.
- each R 2 independently represents an alkyl group having 1 to 8 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms.
- the alkyl group represented by R 2 may be linear or branched. Specific examples of the alkyl group represented by R 2 include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, sec-butyl, t-butyl, hexyl, octyl, 2- An ethylhexyl group etc. can be mentioned.
- n represents an integer of 0 to 3. n is preferably an integer of 1 to 3 and more preferably 1 or 3 from the viewpoint of storage stability.
- X 2 and X 3 each independently represent an oxygen atom or a methylene group. From the viewpoint of storage stability, at least one of X 2 and X 3 is preferably an oxygen atom.
- R 3 , R 4 and R 5 in the general formula (II) each independently represent a hydrogen atom or an alkyl group having 1 to 8 carbon atoms.
- the alkyl group represented by R 3 , R 4 and R 5 may be linear or branched.
- the alkyl group represented by R 3 , R 4 and R 5 may have a substituent or may be unsubstituted, and is preferably unsubstituted.
- the alkyl group represented by R 3 , R 4 and R 5 is an alkyl group having 1 to 8 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms.
- alkyl group represented by R 3 , R 4 and R 5 include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a sec-butyl group, a t-butyl group, and a hexyl group.
- R 3 and R 4 in the general formula (II) are preferably each independently a hydrogen atom or an unsubstituted alkyl group having 1 to 8 carbon atoms. Or it is more preferably an unsubstituted alkyl group having 1 to 4 carbon atoms.
- R 5 in the general formula (II) is preferably a hydrogen atom or an unsubstituted alkyl group having 1 to 8 carbon atoms from the viewpoint of storage stability and a passivation effect, and is preferably a hydrogen atom or a carbon atom having 1 to 4 carbon atoms. It is more preferably an unsubstituted alkyl group.
- the compound represented by the general formula (II) is a compound in which n is 1 to 3, and R 5 is each independently a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. Preferably there is.
- R 2 is each independently an unsubstituted alkyl group having 1 to 4 carbon atoms
- n is 1 to 3
- R 2 is each independently an unsubstituted alkyl group having 1 to 4 carbon atoms
- at least one of X 2 and X 3 is an oxygen atom
- R 3 or R 4 bonded to the oxygen atom is A group consisting of a compound having a C 1-4 alkyl group, and when X 2 or X 3 is a methylene group, R 3 or R 4 bonded to the methylene group is a hydrogen atom
- R 5 is a hydrogen atom It is at least 1 sort chosen from more.
- n 1 to 3 in the general formula (II)
- a prepared product or a commercially available product may be used as the specific organoaluminum compound in which n is 1 to 3 in the general formula (II).
- commercially available products include Kawaken Fine Chemical Co., Ltd. trade names, ALCH, ALCH-50F, ALCH-75, ALCH-TR, ALCH-TR-20, and the like.
- Examples of the compound having a specific structure having two carbonyl groups include the above-mentioned ⁇ -diketone compound, ⁇ -ketoester compound, malonic acid diester and the like. From the viewpoint of storage stability, ⁇ -diketone compound, ⁇ -ketoester compound, It is preferably at least one selected from the group consisting of malonic acid diesters.
- an aluminum chelate structure in the specific organoaluminum compound can be confirmed by a commonly used analysis method. For example, it can be confirmed using an infrared spectrum, a nuclear magnetic resonance spectrum, a melting point, or the like.
- the specific organoaluminum compound may be liquid or solid, and is not particularly limited. From the viewpoint of the passivation effect and storage stability, a specific organoaluminum compound having good stability at room temperature (25 ° C.) and good solubility or dispersibility is preferable. By using such a specific organoaluminum compound, the homogeneity of the formed passivation layer is further improved, and a desired passivation effect tends to be stably obtained.
- the storage stability of the composition for forming a passivation layer tends to be improved. Moreover, it exists in the tendency for the passivation effect to improve because the content rate of a specific organoaluminum compound shall be 80 mass% or less.
- the content of the specific organoaluminum compound in the composition for forming a passivation layer can be appropriately selected as necessary.
- the content of the specific organoaluminum compound can be 0.1% by mass to 60% by mass in the composition for forming a passivation layer, and 0.5% by mass to It is preferably 55% by mass, more preferably 1% by mass to 50% by mass, and still more preferably 1% by mass to 45% by mass.
- (meth) acrylic acid means at least one of “acrylic acid” and “methacrylic acid”
- (meth) acrylate means at least one of “acrylate” and “methacrylate”. means.
- the molecular weight of these resins is not particularly limited, and is preferably adjusted appropriately in view of the desired viscosity as the composition for forming a passivation layer.
- the weight average molecular weight of the resin is preferably 1,000 to 10,000,000, and more preferably 1,000 to 5,000,000, from the viewpoints of storage stability and pattern formation.
- the weight average molecular weight of resin is calculated
- the calibration curve is approximated by a cubic equation using a standard polystyrene 5 sample set (PStQuick MP-H, PStQuick B [Tosoh Corporation, trade name]).
- PStQuick MP-H PStQuick B [Tosoh Corporation, trade name]
- the content of the resin in the composition for forming a passivation layer can be appropriately selected as necessary.
- the resin content is preferably 0.1% by mass to 50% by mass and more preferably 0.1% by mass to 30% by mass in the total mass of the composition for forming a passivation layer.
- the resin content is more preferably 0.2% by mass to 25% by mass, and more preferably 0.5% by mass to 20% by mass. Is particularly preferable, and it is very preferable that the content is 0.5 to 15% by mass.
- the content ratio of the resin to the compound of the formula (I) (resin / the compound of the formula (I)), and further containing the specific organoaluminum compound, the compound of the formula (I) is preferably 0.001 to 1000, and preferably 0.01 to 100. More preferably, it is 0.05 to 1.
- the composition for forming a passivation layer may further contain a liquid medium (solvent or dispersion medium).
- a liquid medium capable of dissolving a compound of formula (I) and a resin, and a specific organoaluminum compound added as necessary to give a uniform solution is preferable, and more preferably containing at least one organic solvent.
- Some compounds of formula (I) readily undergo hydrolysis, polymerization reaction and the like to solidify as they are, but the reaction is suppressed by dissolving or dispersing the compound of formula (I) in a liquid medium. Storage stability tends to be improved.
- Aprotic polar solvents such as methylene chloride, chloroform, dichloroethane, benzene, toluene, xylene, hexane, octane, ethylbenzene, 2-ethylhexanoic acid, methyl isobutyl ketone, methyl ethyl ketone; methanol, ethanol, n-propanol , Isopropanol, n-butanol, isobutanol, sec-butanol, t-butanol, n-pentanol, isopentanol, 2-methylbutanol, sec-pentano , T-pentanol, 3-methoxybutanol, n-hexanol, 2-methylpentanol, sec-hexanol, 2-ethylbutanol, sec-heptanol, n-oct
- the liquid medium preferably contains at least one selected from the group consisting of a terpene solvent, an ester solvent, and an alcohol solvent, and is selected from the group consisting of a terpene solvent, from the viewpoint of impartability to a semiconductor substrate and pattern formation. More preferably, at least one kind is included.
- a liquid medium having a high viscosity and a low boiling point (high viscosity, low boiling point solvent) may be used.
- the composition for forming a passivation layer containing a high-viscosity low-boiling solvent has a viscosity that can sufficiently maintain the shape of the composition layer formed by applying to the semiconductor substrate, and volatilizes in the middle of the subsequent firing process, so that it depends on the residual solvent. There is an advantage that the influence is suppressed.
- Specific examples of the high-viscosity low-boiling solvent include isobornylcyclohexanol.
- the content of the liquid medium is determined in consideration of the imparting property, pattern forming property, and storage stability.
- the content of the liquid medium is preferably 5% by mass to 98% by mass with respect to the total mass of the composition for forming a passivation layer, from the viewpoint of impartability of the composition and pattern formability, More preferably, it is 95 mass%.
- the composition for forming a passivation layer may contain an acidic compound or a basic compound.
- the content of the acidic compound or the basic compound is 1% by mass or less in the composition for forming a passivation layer, respectively. It is preferable that the content is 0.1% by mass or less.
- Examples of acidic compounds include Bronsted acid and Lewis acid. Specific examples include inorganic acids such as hydrochloric acid and nitric acid, and organic acids such as acetic acid.
- Examples of basic compounds include Bronsted bases and Lewis bases. Specifically, examples of basic compounds include inorganic bases such as alkali metal hydroxides and alkaline earth metal hydroxides, and trialkyls. Examples thereof include organic bases such as amine and pyridine.
- the composition for forming a passivation layer of the present invention may further contain other components that are usually used in the field as necessary, in addition to the components described above.
- other components include plasticizers, dispersants, surfactants, thixotropic agents, fillers, and other metal alkoxide compounds.
- at least 1 sort (s) selected from a thixotropic agent and a filler is included.
- thixotropic agent examples include fatty acid amides, polyalkylene glycol compounds, organic fillers, and inorganic fillers.
- R 6 and R 7 each independently represent a hydrogen atom or an alkyl group, and R 8 represents an alkylene group.
- n is an arbitrary integer of 3 or more.
- a plurality of R 8 may be the same or different.
- fatty acid amides examples include compounds represented by the following general formulas (1), (2), (3) and (4).
- R 9 CONH 2 (1) R 9 CONH-R 10 -NHCOR 9 (2) R 9 NHCO—R 10 —CONHR 9 (3) R 9 CONH—R 10 —N (R 11 ) 2 ... (4)
- organic filler examples include particles or fibrous materials composed of acrylic resin, cellulose resin, polystyrene resin, and the like.
- Examples of the inorganic filler include particles of silicon dioxide, aluminum hydroxide, aluminum nitride, silicon nitride, aluminum oxide, zirconium oxide, silicon carbide, glass, and the like.
- metal alkoxide compounds include titanium alkoxide, zirconium alkoxide, silicon alkoxide and the like.
- the viscosity of the composition for forming a passivation layer is not particularly limited, and can be appropriately selected depending on a method for applying the composition to a semiconductor substrate.
- the viscosity of the composition for forming a passivation layer can be 0.01 Pa ⁇ s to 10,000 Pa ⁇ s.
- the viscosity of the composition for forming a passivation layer is preferably 0.1 Pa ⁇ s to 1000 Pa ⁇ s.
- the viscosity is measured using a rotary shear viscometer at 25 ° C. and a shear rate of 1.0 s ⁇ 1 .
- the shear viscosity of the composition for forming a passivation layer is not particularly limited, and it is preferable that the composition for forming a passivation layer has thixotropy.
- thixotropic ratio calculated by dividing the shear viscosity eta 1 at shear viscosity eta 2 at a shear rate of 10s -1 at a shear rate of 1.0s -1 ( ⁇ 1 / ⁇ 2 ) is 1. It is preferably from 05 to 100, more preferably from 1.1 to 50.
- the shear viscosity is measured at a temperature of 25 ° C. using a rotary shear viscometer equipped with a cone plate (diameter 50 mm, cone angle 1 °).
- the components contained in the composition for forming a passivation layer and the content of each component are determined by thermal analysis such as differential thermal-thermogravimetric simultaneous measurement (TG / DTA), nuclear magnetic resonance (NMR), infrared spectroscopy ( It can be confirmed by spectral analysis such as IR), chromatographic analysis such as high performance liquid chromatography (HPLC), gel permeation chromatography (GPC) and the like.
- thermal analysis such as differential thermal-thermogravimetric simultaneous measurement (TG / DTA), nuclear magnetic resonance (NMR), infrared spectroscopy ( It can be confirmed by spectral analysis such as IR), chromatographic analysis such as high performance liquid chromatography (HPLC), gel permeation chromatography (GPC) and the like.
- Method for producing a composition for forming a passivation layer There is no restriction
- the semiconductor substrate is not particularly limited, and can be appropriately selected from those usually used according to the purpose.
- Examples of the semiconductor substrate include those obtained by doping (diffusing) p-type impurities or n-type impurities into silicon, germanium, or the like. Of these, a silicon substrate is preferable.
- the semiconductor substrate may be a p-type semiconductor substrate or an n-type semiconductor substrate. Among these, from the viewpoint of the passivation effect, it is preferable that the surface on which the passivation layer is formed is a semiconductor substrate having a p-type layer.
- the thickness of the semiconductor substrate is not particularly limited and can be appropriately selected according to the purpose.
- the thickness of the semiconductor substrate can be 50 ⁇ m to 1000 ⁇ m, preferably 75 ⁇ m to 750 ⁇ m.
- the thickness of the passivation layer formed on the semiconductor substrate is not particularly limited and can be appropriately selected depending on the purpose.
- the thickness of the passivation layer is preferably 5 nm to 50 ⁇ m, more preferably 10 nm to 30 ⁇ m, and still more preferably 15 nm to 20 ⁇ m.
- the semiconductor substrate with a passivation layer can be applied to solar cell elements, light emitting diode elements, and the like.
- the solar cell element excellent in conversion efficiency can be obtained by applying to a solar cell element.
- the method for producing a semiconductor substrate with a passivation layer according to the present invention includes a step of forming the composition layer by applying the composition for forming a passivation layer on the entire surface or a part of the semiconductor substrate, and heat-treating the composition layer ( Firing) to form a passivation layer.
- the manufacturing method may further include other steps as necessary.
- the semiconductor substrate is immersed in a mixed solution of ammonia water and hydrogen peroxide solution and treated at 60 ° C. to 80 ° C., thereby removing organic substances and particles and washing the semiconductor substrate.
- the washing time is preferably 10 seconds to 10 minutes, more preferably 30 seconds to 5 minutes.
- the method of forming the composition layer by applying the passivation layer forming composition on the semiconductor substrate there is no particular limitation on the method of forming the composition layer by applying the passivation layer forming composition on the semiconductor substrate.
- a method for applying a composition for forming a passivation layer on a semiconductor substrate using a known application method or the like can be mentioned.
- Specific examples include dipping method, screen printing, ink jet method, dispenser method, spin coating method, brush coating, spray method, doctor blade method, roll coating method and the like.
- a screen printing method, an inkjet method, and the like are preferable.
- the application amount of the composition for forming a passivation layer can be appropriately selected according to the purpose.
- the thickness of the passivation layer to be formed can be appropriately adjusted so as to be a desired thickness described later.
- a passivation layer is formed on a semiconductor substrate by heat-treating (baking) the composition layer formed by the composition for forming a passivation layer to form a heat-treated material layer (baked material layer) derived from the composition layer.
- the heat treatment (firing) conditions for the composition layer are the compound (I) contained in the composition layer and, if necessary, the specific organoaluminum compound contained in the metal oxide or composite oxide that is the heat treatment product (firing product). If it can convert into a thing, it will not restrict
- the heat treatment (firing) temperature is preferably 300 ° C.
- the heat treatment (firing) temperature here means the maximum temperature in the furnace used for the heat treatment (firing).
- the heat treatment (firing) time can be appropriately selected according to the heat treatment (firing) temperature and the like.
- the heat treatment (firing) time can be 0.1 to 10 hours, preferably 0.12 to 5 hours.
- the heat treatment (firing) time here means the holding time at the maximum temperature.
- the thickness of the passivation layer produced by the method for producing a semiconductor substrate with a passivation layer is not particularly limited and can be appropriately selected according to the purpose.
- the average thickness of the passivation layer is preferably 5 nm to 50 ⁇ m, more preferably 10 nm to 30 ⁇ m, and still more preferably 15 nm to 20 ⁇ m.
- the average film thickness of the formed passivation layer measured the thickness of 3 points
- the step of drying the composition layer is not particularly limited as long as at least a part of the liquid medium that may be contained in the passivation layer forming composition can be removed.
- the drying treatment can be, for example, a heat treatment at 30 ° C. to 250 ° C. for 1 minute to 60 minutes, and is preferably a heat treatment at 40 ° C. to 220 ° C. for 3 minutes to 40 minutes.
- the drying treatment may be performed under normal pressure or under reduced pressure.
- the method for manufacturing a semiconductor substrate with a passivation layer includes a step of applying a composition layer comprising a composition for forming a passivation layer after applying a composition for forming a passivation layer and before forming a passivation layer by heat treatment (firing). You may further have the process of degreasing. By having a step of degreasing the composition layer, a passivation layer having a more uniform passivation effect can be formed.
- the step of degreasing the composition layer is not particularly limited as long as at least a part of the resin contained in the composition for forming a passivation layer can be removed.
- the degreasing treatment can be, for example, a heat treatment at 250 ° C. to 450 ° C. for 10 minutes to 120 minutes, and is preferably a heat treatment at 300 ° C. to 400 ° C. for 3 minutes to 60 minutes.
- the degreasing treatment is preferably performed in the presence of oxygen, and more preferably performed in the air.
- the solar cell element of the present invention includes a semiconductor substrate in which a p-type layer and an n-type layer are pn-junction, and a heat treatment product (baked product) of the passivation layer forming composition provided on the entire surface or a part of the semiconductor substrate. ) And an electrode disposed on at least one of the p-type layer and the n-type layer.
- the solar cell element may further include other components as necessary.
- a solar cell element is excellent in conversion efficiency by having the passivation layer formed from the composition for passivation layer formation of this invention.
- the semiconductor substrate to which the composition for forming a passivation layer is applied is not particularly limited, and can be appropriately selected from those usually used according to the purpose.
- a semiconductor substrate what was demonstrated by the semiconductor substrate with a passivation layer can be used, and the thing which can be used conveniently is also the same.
- the surface of the semiconductor substrate on which the passivation layer is provided is preferably a p-type layer.
- the thickness of the passivation layer formed on the semiconductor substrate is not particularly limited and can be appropriately selected depending on the purpose.
- the average thickness of the passivation layer is preferably 5 nm to 50 ⁇ m, more preferably 10 nm to 30 ⁇ m, and still more preferably 15 nm to 20 ⁇ m.
- size of a solar cell element For example, a square having a side of 125 mm to 156 mm is preferable.
- the method for manufacturing a solar cell element of the present invention has a pn junction formed by joining a p-type layer and an n-type layer, and is on one or more layers selected from the group consisting of the p-type layer and the n-type layer
- a step of forming the composition layer by applying the composition for forming a passivation layer on one or both of the surfaces having the electrodes of a semiconductor substrate having electrodes on the substrate, and heat-treating (firing) the composition layer
- a step of forming a passivation layer may further include other steps as necessary.
- a solar cell element having excellent printability and excellent conversion efficiency can be produced by a simple method. Furthermore, the passivation layer can be formed on the semiconductor substrate so as to have a desired shape, and the productivity of the solar cell element is excellent.
- the surface of the semiconductor substrate on which the passivation layer is provided may be a p-type layer or an n-type layer. Among these, a p-type layer is preferable from the viewpoint of conversion efficiency.
- the details of the method for forming a passivation layer using the composition for forming a passivation layer are the same as the method for manufacturing a semiconductor substrate with a passivation layer described above, and the preferred embodiments are also the same.
- the thickness of the passivation layer formed on the semiconductor substrate is not particularly limited and can be appropriately selected according to the purpose.
- the average thickness of the passivation layer is preferably 5 nm to 50 ⁇ m, more preferably 10 nm to 30 ⁇ m, and still more preferably 15 nm to 20 ⁇ m.
- FIG. 1 is a sectional view schematically showing an example of a method for producing a solar cell element having a passivation layer according to this embodiment.
- this process diagram does not limit the present invention at all.
- the p-type semiconductor substrate 1 is washed with an alkaline aqueous solution to remove organic substances, particles and the like on the surface of the p-type semiconductor substrate 1. Thereby, the passivation effect improves more.
- an alkaline aqueous solution generally known RCA cleaning or the like can be used.
- the surface of the p-type semiconductor substrate 1 is subjected to alkali etching or the like to form irregularities (also referred to as texture) on the surface.
- alkali etching an etching solution composed of NaOH and IPA (isopropyl alcohol) can be used.
- a method for diffusing phosphorus for example, a method of performing several tens of minutes at 800 ° C. to 1000 ° C. in a mixed gas atmosphere of phosphorus oxychloride (POCl 3 ), nitrogen, and oxygen can be cited.
- the n + -type diffusion layer 2 is formed not only on the light receiving surface (front surface) but also on the back surface and side surfaces (not shown) as shown in FIG. Is formed.
- a PSG (phosphosilicate glass) layer 3 is formed on the n + -type diffusion layer 2. Therefore, side etching is performed to remove the side PSG layer 3 and the n + -type diffusion layer 2.
- the PSG layer 3 on the light receiving surface and the back surface is removed using an etching solution such as hydrofluoric acid. Further, as shown in FIG. 1 (5), the back surface is separately etched to remove the n + -type diffusion layer 2 on the back surface.
- an antireflection film 4 made of silicon nitride or the like is formed on the n + -type diffusion layer 2 on the light-receiving surface by a PECVD (Plasma Enhanced Chemical Vapor Deposition) method or the like with a film thickness of about 90 nm.
- PECVD Pullasma Enhanced Chemical Vapor Deposition
- the passivation layer forming composition of the present invention is applied to a part of the back surface by screen printing or the like, and after drying, heat treatment (baking) at a temperature of 300 ° C. to 900 ° C. To form a passivation layer 5.
- Dot diameter (L a) and the dot interval (L b) can be arbitrarily set, in view of the recombination-inhibiting passivation effect and minority carriers, it is preferable that L a is L b at 5 [mu] m ⁇ 2 mm is 10 [mu] m ⁇ 3 mm More preferably, L a is 10 ⁇ m to 1.5 mm and L b is 20 ⁇ m to 2.5 mm, and more preferably L a is 20 ⁇ m to 1.3 mm and L b is 30 ⁇ m to 2 mm.
- FIG. 4 is a schematic plan view showing an example of the light receiving surface of the solar cell element.
- the light receiving surface electrode includes a light receiving surface current collecting electrode 8 and a light receiving surface output extraction electrode 9.
- the width of the light receiving surface current collecting electrode 8 is preferably 10 ⁇ m to 250 ⁇ m
- the width of the light receiving surface output extraction electrode 9 is preferably 100 ⁇ m to 2 mm.
- two light receiving surface output extraction electrodes 9 are provided.
- the number of light receiving surface output extraction electrodes 9 may be three or four. it can.
- FIG. 9 is a schematic plan view showing an example of the back surface of the solar cell element.
- the width of the back surface output extraction electrode 7 is not particularly limited, and the width of the back surface output extraction electrode 7 is preferably 100 ⁇ m to 10 mm from the viewpoint of the connectivity of the wiring material in the subsequent manufacturing process of the solar cell.
- the light receiving surface and the back surface After applying the electrode paste to each of the light receiving surface and the back surface, after drying, the light receiving surface and the back surface are both heat-treated (fired) at a temperature of about 450 ° C. to 900 ° C. in the atmosphere, and the light receiving surface collecting electrode 8
- the back surface collecting aluminum electrode 6 and the back surface output extracting electrode 7 are formed on the back surface, respectively.
- the glass particles contained in the silver electrode paste forming the light receiving surface electrode react with the antireflection film 4 (fire through),
- the light-receiving surface electrode (light-receiving surface current collecting electrode 8, light-receiving surface output extraction electrode 9) and the n + -type diffusion layer 2 are electrically connected (ohmic contact).
- the aluminum in the aluminum electrode paste diffuses into the semiconductor substrate 1 by heat treatment (firing). , P + -type diffusion layer 10 is formed.
- FIG. 2 is a cross-sectional view showing another example of a method for manufacturing a solar cell element having a passivation layer according to this embodiment, and the n + -type diffusion layer 2 on the back surface is removed by an etching process.
- the solar battery cell can be manufactured in the same manner as in FIG. 1 except that the back surface is further flattened.
- a technique such as immersing the back surface of the semiconductor substrate in a mixed solution of nitric acid, hydrofluoric acid and acetic acid or a potassium hydroxide solution can be used.
- FIG. 3 is a cross-sectional view showing a process diagram illustrating another example of a method for manufacturing a solar cell element having a passivation layer according to the present embodiment. This method is the same as the method shown in FIG. 1 until the step of forming the texture structure, the n + -type diffusion layer 2 and the antireflection film 4 on the semiconductor substrate 1 (FIGS. 19 (19) to (24)).
- FIG. 6 an example of the formation pattern of the passivation layer in the back surface is shown as a schematic plan view.
- dot-like openings are arranged on the entire back surface, and dot-like openings are also arranged on the portion where the back-surface output extraction electrode is formed in a later step.
- a p + -type diffusion layer 10 is formed by diffusing aluminum from the portion, and then etched with hydrochloric acid or the like to form a heat-treated product layer (baked product layer) derived from the aluminum paste formed on the p + -type diffusion layer 10 A method of removing can be used.
- a silver electrode paste containing glass particles is applied to the light receiving surface by screen printing or the like, and a silver electrode paste containing glass particles is applied to the back surface by screen printing or the like.
- the silver electrode paste on the light receiving surface is applied in a pattern according to the shape of the light receiving surface electrode shown in FIG. 4, and the silver electrode paste on the back surface is applied in a pattern according to the shape of the back electrode shown in FIG.
- the light receiving surface and the back surface are heat-treated (fired) at a temperature of about 450 ° C. to 900 ° C. in air, as shown in FIG.
- a light receiving surface collecting electrode 8 and a light receiving surface output extraction electrode 9 are formed on the light receiving surface, and a back surface collecting electrode 11 and a back surface output extraction electrode 7 are formed on the back surface, respectively.
- the light receiving surface electrode and the n + -type diffusion layer 2 are electrically connected on the light receiving surface, and the back surface collecting electrode 11 and the back surface output extraction electrode 7 formed by vapor deposition are electrically connected on the back surface.
- the back surface collecting electrode 6 or 11 and the back surface output extraction electrode 7 are formed after the passivation layer 5 is formed.
- the passivation layer is formed. 5 may be formed. Alternatively, a semiconductor substrate having electrodes may be obtained, and the passivation layer 5 may be formed thereon.
- Example 1> (Preparation of a composition for forming a passivation layer) 1.2 g of pentaethoxyniobium (Hokuko Chemical Co., Ltd., structural formula: Nb (OC 2 H 5 ) 5 , molecular weight: 318.2), terpineol (Nippon Terpene Chemical Co., Ltd., sometimes abbreviated as TPO) 18.5 g and ethyl cellulose (Nihon Kasei Co., Ltd., trade name: ETHOCEL 200 cps, sometimes abbreviated as EC) were mixed in an amount of 0.3 g to prepare a composition 1 for forming a passivation layer.
- pentaethoxyniobium Hokuko Chemical Co., Ltd., structural formula: Nb (OC 2 H 5 ) 5 , molecular weight: 318.2
- terpineol Nippon Terpene Chemical Co., Ltd., sometimes abbreviated as TPO
- the shear viscosity of the composition 1 for forming a passivation layer prepared above was measured immediately after the preparation (within 12 hours), on a rotary shear viscometer (AntonPaar, MCR301), and a cone plate (diameter 50 mm, cone angle 1 °). It was mounted and measured at a temperature of 25 ° C. and shear rates of 1.0 s ⁇ 1 and 10 s ⁇ 1 .
- the shear viscosity ( ⁇ 1 ) at a shear rate of 1.0 s ⁇ 1 was 35.4 Pa ⁇ s
- the shear viscosity ( ⁇ 2 ) at a shear rate of 10 s ⁇ 1 was 26.8 Pa ⁇ s.
- the thixo ratio ( ⁇ 1 / ⁇ 2 ) when the shear rate was 1.0 s ⁇ 1 and 10 s ⁇ 1 was 1.32.
- the shear viscosity of the composition 1 for forming a passivation layer prepared above was measured immediately after preparation (within 12 hours) and after storage at 25 ° C. for 30 days, respectively.
- the shear viscosity was measured by mounting a cone plate (diameter 50 nm, cone angle 1 °) on Anton Paar, MCR301, at a temperature of 25 ° C. and a shear rate of 1.0 s ⁇ 1 .
- the shear viscosity at 25 ° C. was 35.4 Pa ⁇ s immediately after preparation, and 36.9 Pa ⁇ s after storage at 25 ° C. for 30 days.
- the change rate of the shear viscosity after storage for 30 days is A when the change rate is less than 10%, B is the change rate of 10% or more and less than 30%, and C is 30% or more. If evaluation is A and B, it is favorable as the storage stability of the composition for forming a passivation layer.
- Table 2 the numerical value of the shear viscosity immediately after preparation and the evaluation result of storage stability are shown.
- a semiconductor substrate having a mirror-shaped single crystal p-type silicon substrate 50 mm square, thickness 625 ⁇ m, hereinafter referred to as substrate A
- substrate B Two types of single crystal p-type silicon substrates (50 mm square, thickness 180 ⁇ m, hereinafter referred to as substrate B) on which a texture structure was formed were used.
- the composition 1 for forming a passivation layer 1 prepared above was screen-printed 10 times on each of the substrate A and the substrate B, and the substrate A was 9 sheets and the substrate B was 9 sheets. It was visually confirmed that there was no printing unevenness.
- A is the case where 9 or more out of 10 sheets have no print unevenness during printing
- B is the case of 8 or less and 6 or more
- C is the case of 5 or less. If evaluation is A and B, it is favorable as printing unevenness of the composition for forming a passivation layer.
- uneven printing refers to a phenomenon in which the thickness of the composition for forming a passivation layer varies depending on the location, which is caused when a part of the screen plate is poorly separated when the screen plate is separated from the silicon substrate.
- the prepared composition 1 for forming a passivation layer was printed on the entire surface of the substrate A and the substrate B in a pattern shown in FIG.
- the dot-shaped opening pattern used in the evaluation has a dot diameter (L a ) of 368 ⁇ m and a dot interval (L b ) of 0.5 mm.
- substrate B which provided the composition 1 for passivation layer formation were heated at 150 degreeC for 3 minute (s), and were dried by evaporating a liquid medium.
- the substrate A and the substrate B were heat-treated (fired) at a temperature of 700 ° C. for 10 minutes, and then allowed to cool at room temperature (25 ° C.).
- the effective lifetime of the evaluation substrate obtained above was measured at room temperature (25 ° C.) by the reflected microwave photoconductive decay method using a lifetime measuring device (Nippon Semi-Lab Co., Ltd., WT-2000PVN).
- the effective lifetime of the region to which the composition for forming a passivation layer was applied was 198 ⁇ s.
- the voltage dependence (CV characteristics) of the capacitance of this capacitor was measured with a commercially available prober and LCR meter (HP, 4275A).
- V fb flat band voltage
- ⁇ ms ⁇ 0.81 [V]
- Nf the fixed charge density Nf was calculated from the flat band voltage difference (V fb ⁇ ms ), the measured capacitance value, the area of the aluminum electrode, and the elementary charge.
- the fixed charge density Nf is a negative value when the value of V fb - ⁇ ms is positive, that is, when V fb is larger than ⁇ 0.81 [V], and as a result, the passivation layer exhibits a negative fixed charge. It will be.
- a single crystal p-type semiconductor substrate (125 mm square, thickness 200 ⁇ m) was prepared, and texture structures were formed on the light receiving surface and the back surface by alkali etching.
- a mixed gas atmosphere of phosphorus oxychloride (POCl 3 ), nitrogen and oxygen treatment was performed at a temperature of 900 ° C. for 20 minutes to form n + -type diffusion layers on the light receiving surface, the back surface, and the side surface.
- side etching was performed to remove the side PSG layer and the n + -type diffusion layer, and the PSG layer on the light-receiving surface and the back surface was removed using an etching solution containing hydrofluoric acid.
- the back surface was separately etched to remove the n + -type diffusion layer on the back surface. Thereafter, an antireflection film made of silicon nitride was formed on the n + -type diffusion layer on the light-receiving surface with a thickness of about 90 nm by PECVD.
- the passivation layer forming composition 1 prepared above was applied to the back surface in the pattern of FIGS. 5, 7 and 8, and then dried at a temperature of 150 ° C. for 5 minutes, and a diffusion furnace (ACCURON CQ-1200, The passivation layer 1 was formed by performing a heat treatment (baking) at a maximum temperature of 700 ° C. and a holding time of 10 minutes in the atmosphere using Hitachi Kokusai Electric). 5, 7, and 8, the back surface passivation layer 1 is formed in a pattern in which the p-type semiconductor substrate is exposed in a dot shape except for a portion where the back surface output extraction electrode is formed in a later step.
- the pattern of the dot-shaped openings has the same shape as that used in the printing bleeding evaluation, the dot diameter (L a ) is 368 ⁇ m, and the dot interval (L b ) is 0.5 mm.
- a commercially available silver electrode paste (PV-16A, DuPont) was printed on the light receiving surface with the pattern shown in FIG. 4 by screen printing.
- the electrode pattern is composed of a light receiving surface collecting electrode having a width of 120 ⁇ m and a light receiving surface output extraction electrode having a width of 1.5 mm, and printing conditions (for the screen plate) so that the thickness after heat treatment (firing) is 20 ⁇ m.
- the mesh, printing speed and printing pressure) were adjusted as appropriate. This was heated at a temperature of 150 ° C. for 5 minutes to evaporate the liquid medium, thereby performing a drying treatment.
- a wiring member (solder-plated rectangular wire for solar cell, product name: SSA-TPS 0.2 ⁇ 1.5 (20 ), Specifications of Sn-Ag-Cu lead-free solder plated to a maximum thickness of 20 ⁇ m per side on a copper wire of thickness 0.2mm x width 1.5mm, Hitachi Metals, Ltd. (formerly Hitachi Cable, Ltd.) )), And using a tab wire connection device (NTS-150-M, Tabbing & Stringing Machine, NPC Corporation) and melting the solder under the conditions of a maximum temperature of 250 ° C. and a holding time of 10 seconds, The wiring member was connected to the light receiving surface output extraction electrode and the back surface output extraction electrode.
- glass plate 16 / sealing material 14 / wiring material 13 are connected in the order of solar cell element 12 / sealing material 14 / back sheet 15 and a part of the wiring member is exposed using a vacuum laminator (LM-50 ⁇ 50, NPC Corporation). As described above, vacuum lamination was performed at a temperature of 140 ° C. for 5 minutes to produce a solar cell 1.
- a vacuum laminator LM-50 ⁇ 50, NPC Corporation
- the evaluation of the power generation performance of the produced solar cell was performed using pseudo-sunlight (WXS-155S-10, Wacom Denso Co., Ltd.) and voltage-current (IV) evaluation measuring instrument (IV CURVE TRACER MP-180, This was performed in combination with a measuring device of Eihiro Seiki Co., Ltd.). Jsc (short circuit current), Voc (open voltage), F. F. (Form factor) and ⁇ (conversion efficiency) were obtained by measuring in accordance with JIS-C-8913 (fiscal 2005) and JIS-C-8914 (fiscal 2005), respectively. The obtained measured value was converted into a relative value with the measured value of the solar cell (solar cell C1) produced in Comparative Example 1 shown later as 100.0.
- Example 2 ethyl cellulose (Nihon Kasei Co., Ltd., trade name: ETHOCEL 200 cps) and aluminum ethylacetoacetatodiisopropylate (ALCH) were added to the composition for forming a passivation layer.
- the content of each component is 1.6 g of pentaethoxyniobium (Hokuko Chemical Co., Ltd., structural formula: Nb (OC 2 H 5 ) 5 , molecular weight: 318.2), and 1.0 g of ALCH.
- a composition 2 for forming a passivation layer was prepared in the same manner as in Example 1 except that 17.1 g of terpineol and 0.3 g of ethyl cellulose were changed. Thereafter, in the same manner as in Example 1, evaluation of thixotropy of the passivation layer forming composition 2, evaluation of storage stability, evaluation of printability (printing unevenness and printing bleeding), and effective lifetime of the passivation layer 2 The thickness and the fixed charge density were measured. Further, in the same manner as in Example 1, the solar cell element 2 and the solar cell 2 were produced, and the power generation performance was evaluated.
- Example 3 For each evaluation, the composition for forming a passivation layer prepared in Example 2 was used. Evaluation of printability (printing unevenness and printing bleeding) Preparation of substrate, measurement substrate for measurement of effective lifetime and thickness of passivation layer, heat treatment condition (firing) of passivation layer forming composition 2 in preparation of solar cell element Except that the temperature was changed from 700 ° C. for 10 minutes to 600 ° C. for 15 minutes, in the same manner as in Example 1, evaluation of printability (printing unevenness and printing bleeding) and evaluation of the effective lifetime of the passivation layer 3 The thickness and the fixed charge density were measured, the solar cell element 3 and the solar cell 3 were produced, and the power generation performance was evaluated.
- printability printing unevenness and printing bleeding
- Example 4 For each evaluation, the composition for forming a passivation layer prepared in Example 2 was used. Evaluation of printability (printing unevenness and printing bleeding) Preparation of substrate, preparation of substrate for measuring effective lifetime and thickness of passivation layer, heat treatment (firing) condition of passivation layer forming composition 2 in preparation of solar cell element The evaluation of printability (printing unevenness and printing bleeding) and the evaluation of the passivation layer 4 effective lifetime were performed in the same manner as in Example 1 except that the temperature was changed from 700 ° C. for 10 minutes to 800 ° C. for 8 minutes. The thickness and fixed charge density were measured, the solar cell element 4 and the solar cell 4 were produced, and the power generation performance was evaluated.
- Example 5 The content of each component was 1.2 g of vanadium (V) triethoxide oxide (High Purity Chemical Laboratory Co., Ltd., structural formula: VO (OC 2 H 5 ) 3 , molecular weight: 546.4), aluminum ethylacetate Example 1 except that 0.8 g of acetodiisopropylate (Kawaken Fine Chemical Co., Ltd., trade name: ALCH), 17.7 g of terpineol, and 0.3 g of ethyl cellulose (ETHOCEL 200 cps) were changed. Thus, a passivation layer forming composition 3 was prepared.
- Example 2 Thereafter, in the same manner as in Example 1, evaluation of the thixotropy of the composition 3 for forming a passivation layer, evaluation of storage stability, evaluation of printability (print unevenness and printing bleeding), and effective lifetime of the passivation layer 5 were performed. The thickness and the fixed charge density were measured. Further, in the same manner as in Example 1, a solar cell element 5 and a solar cell 5 were produced, and power generation performance was evaluated.
- Example 2 Thereafter, in the same manner as in Example 1, evaluation of thixotropy of the passivation layer forming composition 4, evaluation of storage stability, evaluation of printability (printing unevenness and printing bleeding), and effective lifetime of the passivation layer 6 were performed. The thickness and the fixed charge density were measured. Further, in the same manner as in Example 1, the solar cell element 6 and the solar cell 6 were produced, and the power generation performance was evaluated.
- Example 7 In the preparation of the composition for forming a passivation layer, pentaethoxyniobium (Hokuko Chemical Co., Ltd., structural formula: Nb (OC 2 H 5 ) 5 , molecular weight: 318.2), penta-n-butoxytantalum (high purity, Inc.) Chemical Laboratory, structural formula: Ta (On-C 4 H 9 ) 5, molecular weight: 546.4), terpineol, and ethyl cellulose (ETHOCEL 200 cps) were used.
- pentaethoxyniobium Hokuko Chemical Co., Ltd., structural formula: Nb (OC 2 H 5 ) 5 , molecular weight: 318.2
- penta-n-butoxytantalum high purity, Inc.
- Ta On-C 4 H 9
- terpineol terpineol
- ETHOCEL 200 cps ETHOCEL 200 cps
- composition 5 for forming a passivation layer was prepared. Thereafter, in the same manner as in Example 1, evaluation of the thixotropy of the passivation layer forming composition 5, evaluation of storage stability, evaluation of printability (printing unevenness and printing bleeding), and effective lifetime of the passivation layer 7 The thickness and the fixed charge density were measured. Further, in the same manner as in Example 1, the solar cell element 7 and the solar cell 7 were produced, and the power generation performance was evaluated.
- each component is 1.6 g of penta-n-butoxyniobium, 0.6 g of vanadium (V) triethoxide oxide, 0.6 g of ALCH, 17.0 g of terpineol, and ethyl cellulose.
- a composition 6 for forming a passivation layer 6 was prepared in the same manner as in Example 1 except that was changed to 0.2 g. Thereafter, in the same manner as in Example 1, evaluation of thixotropy of the composition 6 for forming a passivation layer, evaluation of storage stability, evaluation of printability (printing unevenness and printing bleeding), and effective lifetime of the passivation layer 8 are performed. The thickness and the fixed charge density were measured. Further, in the same manner as in Example 1, the solar cell element 8 and the solar cell 8 were produced, and the power generation performance was evaluated.
- the passivation layer C1 made of aluminum oxide (Al 2 O 3 ) was formed using an ALD (Atomic Layer Deposition) method without using the passivation layer forming composition. Specifically, film formation conditions were adjusted using an atomic layer deposition apparatus so that the Al 2 O 3 layer had a thickness of 20 nm. In addition, the film thickness after film-forming was measured using the interference type film thickness meter (F20 film thickness measurement system, Filmetrics Co., Ltd.).
- the substrate for evaluating the effective lifetime and thickness of the passivation layer C1 and the solar cell element C1 and the solar cell C1 are manufactured by the above method, and the measurement of the effective lifetime, the thickness, and the fixed charge density, and the solar cell C2. The power generation performance of was evaluated.
- the substrate, type, film formation pattern, light receiving surface and back electrode forming method used for each evaluation are the same as those in Examples 1 to 8.
- Example 2 In the preparation of the composition for forming a passivation layer in Example 1, as shown in Table 1, without using the compound of formula (I) (M includes a metal element selected from Nb, Ta, V, Y or Hf).
- a passivation layer-forming composition C2 consisting of triethoxybismuth (High Purity Chemical Laboratory Co., Ltd., structural formula: Bi (OC 2 H 5 ) 3 , molecular weight 344.2, terpineol, and ethyl cellulose (ETHOCEL 200 cps) was prepared.
- Example 2 Thereafter, in the same manner as in Example 1, evaluation of thixotropy of the passivation layer forming composition C2, evaluation of storage stability, evaluation of printability (printing unevenness and printing bleeding), and effective lifetime of the passivation layer C2 The thickness and the fixed charge density were measured. Further, in the same manner as in Example 1, a solar cell element C2 and a solar cell C2 were produced, and the power generation performance was evaluated.
- Example 2 Thereafter, in the same manner as in Example 1, evaluation of thixotropy of the passivation layer forming composition C3, evaluation of storage stability, evaluation of printability (print unevenness and printing bleeding), and effective lifetime of the passivation layer C3 Evaluation and thickness were measured. Further, in the same manner as in Example 1, a solar cell element C3 and a solar cell C3 were produced, and the power generation performance was evaluated.
- a texture structure was formed on the light receiving surface and the back surface, and an antireflection film made of n + -type diffusion layer and silicon nitride was formed on the light receiving surface with a thickness of about 90 nm by PECVD.
- a commercially available silver electrode paste PV-16A, DuPont was printed on the light-receiving surface with the pattern shown in FIG. 4 by screen printing, and this was heated at a temperature of 150 ° C. for 5 minutes to form a liquid medium. Drying was performed by transpiration.
- the effective lifetime and the power generation performance of the solar cell evaluated in Examples 1 to 8 are almost the same as those measured in Comparative Example 1.
- the ALD method It was found that a passivation layer having an excellent passivation effect comparable to that of aluminum oxide (Al 2 O 3 ) was formed. From the measurement results of the fixed charge density, it was found that the passivation layers prepared in Examples 1 to 8 all showed negative fixed charges although the numerical values were different.
- the method for forming the passivation layer is not the screen printing method applied in this example.
- the composition for forming the passivation layer is applied to the entire back surface, and this is heat-treated (fired), and then a desired pattern is formed.
- a method such as removing the passivation layer it is considered that the influence of the printing blur on the power generation performance is reduced.
- the power generation performance of the solar cell itself does not deteriorate.
- the power generation performance of the produced solar cell tended to be relatively high when the passivation layer forming composition containing both the compound of formula (I) and the specific organoaluminum compound was used.
- the composite oxide of the metal derived from a formula (I) compound and aluminum is formed by heat processing (baking) by including both a formula (I) compound and a specific organoaluminum compound in the composition for formation of a passivation layer. It is considered that the passivation effect is further improved, for example, by forming a more dense passivation layer having a large negative fixed charge.
- a passivation film used for a solar cell element including aluminum oxide and niobium oxide and having a silicon substrate.
- ⁇ 3> The passivation film according to ⁇ 1> or ⁇ 2>, in which a total content of the niobium oxide and the aluminum oxide is 90% by mass or more.
- the passivation film according to any one of ⁇ 1> to ⁇ 4> which is a heat-treated product of a coating type material including an aluminum oxide precursor and a niobium oxide precursor.
- An n-type silicon substrate made of single crystal silicon or polycrystalline silicon and having a light receiving surface and a back surface opposite to the light receiving surface;
- a p-type impurity diffusion layer formed on the light-receiving surface side of the silicon substrate;
- a second electrode formed on the back side of the silicon substrate;
- a passivation film formed on the light-receiving surface side surface of the silicon substrate and including a plurality of openings and containing aluminum oxide and niobium oxide;
- a first electrode formed on the surface of the p-type impurity diffusion layer on the light-receiving surface side of the silicon substrate and forming an electrical connection with the surface on the light-receiving surface side of the silicon substrate through the plurality of openings;
- a solar cell element comprising:
- ⁇ 10> The solar cell element according to any one of ⁇ 7> to ⁇ 9>, wherein a mass ratio of niobium oxide to aluminum oxide (niobium oxide / aluminum oxide) in the passivation film is 30/70 to 90/10.
- the mass ratio of niobium oxide and aluminum oxide is 30/70 to 80/20 from the viewpoint that the negative fixed charge can be stabilized. Further, the mass ratio of niobium oxide and aluminum oxide is more preferably 35/65 to 70/30 from the viewpoint that the negative fixed charge can be further stabilized. Further, the mass ratio of niobium oxide and aluminum oxide is preferably 50/50 to 90/10 from the viewpoint that both improvement of carrier lifetime and negative fixed charge can be achieved.
- the mass ratio of niobium oxide to aluminum oxide in the passivation film is measured by energy dispersive X-ray spectroscopy (EDX), secondary ion mass spectrometry (SIMS), and high frequency inductively coupled plasma mass spectrometry (ICP-MS). be able to.
- Specific measurement conditions are as follows. Dissolving the passivation film in acid or alkaline aqueous solution, atomizing this solution and introducing it into Ar plasma, measuring the wavelength and intensity by spectroscopically analyzing the light emitted when the excited element returns to the ground state, Element qualification is performed from the obtained wavelength, and quantification is performed from the obtained intensity.
- the total content of niobium oxide and aluminum oxide in the passivation film can be measured by combining thermogravimetric analysis, fluorescent X-ray analysis, ICP-MS, and X-ray absorption spectroscopy. Specific measurement conditions are as follows.
- the ratio of inorganic components can be calculated by thermogravimetric analysis, the ratio of niobium and aluminum can be calculated by fluorescent X-ray or ICP-MS analysis, and the ratio of oxide can be examined by X-ray absorption spectroscopy.
- components other than niobium oxide and aluminum oxide may be included as organic components from the viewpoint of improving the film quality and adjusting the elastic modulus.
- the presence of the organic component in the passivation film can be confirmed by elemental analysis and measurement of the FT-IR of the film.
- the content of the organic component in the passivation film is more preferably less than 10% by mass, further preferably 5% by mass or less, and particularly preferably 1% by mass or less in the passivation film.
- the passivation film may be obtained as a heat-treated product of a coating type material containing an aluminum oxide precursor and a niobium oxide precursor. Details of the coating type material will be described next.
- the aluminum oxide precursor can be used without particular limitation as long as it produces aluminum oxide.
- As the aluminum oxide precursor it is preferable to use an organic aluminum oxide precursor from the viewpoint of uniformly dispersing aluminum oxide on the silicon substrate and chemically stable.
- organic aluminum oxide precursors include aluminum triisopropoxide (structural formula: Al (OCH (CH 3 ) 2 ) 3 , High Purity Chemical Research Laboratory SYM-AL04, and the like.
- the niobium oxide precursor can be used without particular limitation as long as it produces niobium oxide.
- the niobium oxide precursor it is preferable to use an organic niobium oxide precursor from the viewpoint of uniformly dispersing niobium oxide on the silicon substrate and chemically stable.
- organic niobium oxide precursors include niobium (V) ethoxide (structural formula: Nb (OC 2 H 5 ) 5 , molecular weight: 318.21), High Purity Chemical Laboratory Nb-05, etc. be able to.
- a passivation film is formed by forming a coating type material containing an organic niobium oxide precursor and an organic aluminum oxide precursor using a coating method or a printing method, and then removing organic components by a subsequent heat treatment (firing). Can be obtained. Therefore, as a result, a passivation film containing an organic component may be used.
- silicon substrate (crystalline silicon substrate, semiconductor substrate) 101 used in this embodiment mode either single crystal silicon or polycrystalline silicon may be used. Further, as the silicon substrate 101, either p-type crystalline silicon or n-type crystalline silicon may be used. From the standpoint of exerting the effects of the present embodiment, p-type crystalline silicon is more suitable.
- the single crystal silicon or polycrystalline silicon used for the silicon substrate 101 may be arbitrary, but single crystal silicon or polycrystalline silicon having a resistivity of 0.5 ⁇ ⁇ cm to 10 ⁇ ⁇ cm is preferable.
- a light receiving surface antireflection film 103 such as a silicon nitride (SiN) film, and a first electrode 105 (light receiving surface side electrode, first surface electrode, upper surface electrode) using silver (Ag) or the like. , A light receiving surface electrode) is formed.
- the light receiving surface antireflection film 103 may also have a function as a light receiving surface passivation film. By using the SiN film, both functions of the light receiving surface antireflection film and the light receiving surface passivation film can be provided.
- the solar cell element of the present embodiment may or may not have the light-receiving surface antireflection film 103.
- the light receiving surface of the solar cell element is preferably formed with a concavo-convex structure (texture structure) in order to reduce the reflectance on the surface, but the solar cell element of the present embodiment has a texture structure. It may or may not have.
- a BSF (Back Surface Field) layer 104 which is a layer doped with a group III element such as aluminum or boron, is formed on the back side (lower side, second side, back side in the figure) of the silicon substrate 101.
- the solar cell element of this embodiment may or may not have the BSF layer 104.
- a second surface made of aluminum or the like is used on the back surface side of the silicon substrate 101 to make contact (electrical connection) with the BSF layer 104 (or the surface on the back surface side of the silicon substrate 101 when the BSF layer 104 is not provided). Electrodes 106 (back side electrode, second side electrode, back side electrode) are formed.
- a contact region (a surface on the back side of the silicon substrate 101 when the BSF layer 104 is not provided) and the second electrode 106 are electrically connected (
- a passivation film (passivation layer) 107 containing aluminum oxide and niobium oxide is formed in a portion excluding the opening OA).
- the passivation film 107 of this embodiment can have a negative fixed charge. With this fixed charge, electrons which are minority carriers among the carriers generated in the silicon substrate 101 by light are bounced back to the surface side. For this reason, a short circuit current increases and it is anticipated that photoelectric conversion efficiency will improve.
- the second electrode 106 is formed on the entire surface of the contact region (opening OA) and the passivation film 107.
- the second electrode 106 is formed only in the region (opening OA).
- the second electrode 106 may be formed only in part on the contact region (opening OA) and the passivation film 107. Even with the solar cell element having the configuration shown in FIG. 13, the same effect as in FIG. 12 (first configuration example) can be obtained.
- the BSF layer 104 is formed only on a part of the back surface side including the contact region (opening OA portion) with the second electrode 106, and FIG. 12 (first configuration example). Thus, it is not formed on the entire back surface side. Even with the solar cell element having such a configuration (FIG. 14), the same effect as that of FIG. 12 (first configuration example) can be obtained. Further, according to the solar cell element of the third configuration example of FIG. 14, the BSF layer 104, that is, the impurity is doped at a higher concentration than the silicon substrate 101 by doping a group III element such as aluminum or boron. Since there are few areas, it is possible to obtain higher photoelectric conversion efficiency than that in FIG. 12 (first configuration example).
- the second electrode 106 when the second electrode 106 is applied by a printing method and baked at a high temperature to form the entire surface on the back side, a convex warpage tends to occur in the temperature lowering process. Such warpage may cause damage to the solar cell element, which may reduce the yield. Further, the problem of warpage increases as the silicon substrate becomes thinner. The cause of this warp is that stress is generated because the thermal expansion coefficient of the second electrode 106 made of metal (for example, aluminum) is larger than that of the silicon substrate, and the shrinkage in the temperature lowering process is correspondingly large.
- metal for example, aluminum
- the electrode structure tends to be symmetrical vertically. This is preferable because stress due to the difference in thermal expansion coefficient is unlikely to occur. However, in that case, it is preferable to provide a separate reflective layer.
- a texture structure is formed on the surface of the silicon substrate 101 shown in FIG.
- the texture structure may be formed on both sides of the silicon substrate 101 or only on one side (light receiving side).
- the damaged layer of the silicon substrate 101 is removed by immersing the silicon substrate 101 in a heated potassium hydroxide or sodium hydroxide solution.
- a texture structure is formed on both surfaces or one surface (light receiving surface side) of the silicon substrate 101 by dipping in a solution containing potassium hydroxide and isopropyl alcohol as main components. Note that, as described above, the solar cell element of the present embodiment may or may not have a texture structure, and thus this step may be omitted.
- the phosphorus diffusion layer may be formed so that the depth from the surface of the silicon substrate 101 is in the range of 0.2 ⁇ m to 0.5 ⁇ m, and the sheet resistance is in the range of 40 ⁇ / ⁇ to 100 ⁇ / ⁇ (ohm / square). preferable.
- a BSF layer 104 on the back surface side is formed by applying a coating-type doping material solution containing boron, aluminum or the like to the back surface side of the silicon substrate 101 and performing heat treatment.
- a coating-type doping material solution containing boron, aluminum or the like for the application, methods such as screen printing, inkjet, dispensing, spin coating and the like can be used.
- the BSF layer 104 is formed by removing a layer of boron glass, aluminum, or the like formed on the back surface with hydrofluoric acid, hydrochloric acid, or the like.
- the method for forming the BSF layer 104 is not particularly limited.
- the BSF layer 104 is formed so that the concentration range of boron, aluminum, etc.
- the solar cell element of the present embodiment may or may not have the BSF layer 104, and thus this step may be omitted.
- the diffusion layer 102 on the light-receiving surface and the BSF layer 104 on the back surface are formed using a coating-type doping material solution
- the above-described doping material solution is applied to both sides of the silicon substrate 101 to diffuse.
- the phosphorous diffusion layer (n + layer) and the BSF layer 104 as the layer 102 may be formed in a lump, and then phosphorous glass, boron glass, or the like formed on the surface may be removed all at once.
- a silicon nitride film as the light-receiving surface antireflection film 103 is formed on the diffusion layer 102.
- the method for forming the light receiving surface antireflection film 103 is not particularly limited.
- the light-receiving surface antireflection film 103 is preferably formed to have a thickness in the range of 50 to 100 nm and a refractive index in the range of 1.9 to 2.2.
- the light-receiving surface antireflection film 103 is not limited to a silicon nitride film, and may be a silicon oxide film, an aluminum oxide film, a titanium oxide film, or the like.
- the surface antireflection film 103 such as an silicon nitride film can be formed by a method such as plasma CVD or thermal CVD, and is preferably formed by plasma CVD that can be formed in a temperature range of 350 ° C. to 500 ° C.
- the passivation film 107 contains aluminum oxide and niobium oxide.
- an aluminum oxide precursor typified by an organometallic decomposition coating material from which aluminum oxide can be obtained by heat treatment (firing), and niobium oxide obtained by heat treatment (firing). It is formed by applying a material (passivation material) containing a niobium oxide precursor typified by a commercially available organometallic decomposition coating type material and heat-treating (firing).
- the coating type material is applied to a predetermined pattern including the contact area (opening OA) by a method such as screen printing, offset printing, inkjet printing, or dispenser printing.
- the above-mentioned coating type material is pre-baked in the range of 80 ° C. to 180 ° C. after evaporation to evaporate the solvent, and then at 600 ° C. to 1000 ° C. for 30 minutes to 3 hours in a nitrogen atmosphere or in air. It is preferable to perform a degree of heat treatment (annealing) to form a passivation film 107 (oxide film).
- the mass ratio of niobium oxide to aluminum oxide is preferably 30/70 to 90/10, and preferably 30/70 to 80/20. More preferably, it is more preferably 35/65 to 70/30. Thereby, the negative fixed charge can be stabilized. Further, the mass ratio of niobium oxide and aluminum oxide is preferably 50/50 to 90/10 from the viewpoint that both improvement of carrier lifetime and negative fixed charge can be achieved.
- the total content of niobium oxide and aluminum oxide is preferably 80% by mass or more, and more preferably 90% by mass or more.
- the first electrode 105 which is an electrode on the light receiving surface side is formed.
- the first electrode 105 is formed by forming a paste mainly composed of silver (Ag) on the light-receiving surface antireflection film 103 by screen printing and performing a heat treatment (fire through).
- the shape of the 1st electrode 105 may be arbitrary shapes, for example, may be a known shape which consists of a finger electrode and a bus-bar electrode.
- the second electrode 106 which is an electrode on the back side is formed.
- the second electrode 106 can be formed by applying a paste containing aluminum as a main component using screen printing or a dispenser and heat-treating it.
- the shape of the second electrode 106 is preferably the same shape as the shape of the BSF layer 104, a shape covering the entire back surface, a comb shape, a lattice shape, or the like.
- the paste for forming the first electrode 105 and the second electrode 106, which are the electrodes on the light receiving surface side, is first printed, and then heat-treated (fire-through), whereby the first electrode 105 and the second electrode 106 are formed.
- the two electrodes 106 may be formed together.
- the BSF layer 104 is formed in a contact portion between the second electrode 106 and the silicon substrate 101 in a self-alignment manner. Is formed.
- the BSF layer 104 may be separately formed by applying a coating-type doping material solution containing boron, aluminum, or the like to the back side of the silicon substrate 101 and heat-treating it. .
- the diffusion layer 102 is formed by a layer doped with a group III element such as boron
- the BSF layer 104 is formed by doping a group V element such as phosphorus.
- a leakage current flows through a portion where the inversion layer formed at the interface due to the negative fixed charge and the metal on the back surface are in contact with each other, and the conversion efficiency may be difficult to increase.
- the diffusion layer 102 on the light receiving surface side is p-type doped with boron, and collects holes on the light receiving surface side and electrons on the back surface side of the generated carriers. For this reason, it is preferable that the passivation film 107 having a negative fixed charge is on the light receiving surface side.
- an antireflection film made of SiN or the like may be further formed by CVD or the like.
- the passivation material (a-1) is spin-coated on one side of a 725 ⁇ m-thick 8-inch p-type silicon substrate (8 ⁇ cm to 12 ⁇ cm) from which a natural oxide film has been removed in advance with a hydrofluoric acid having a concentration of 0.049% by mass.
- Pre-baking was performed on the plate at 120 ° C. for 3 minutes.
- the FT-IR of the passivation film was measured, a very few peaks due to alkyl groups were observed in the vicinity of 1200 cm ⁇ 1 .
- a plurality of aluminum electrodes having a diameter of 1 mm were formed on the above-described passivation film through a metal mask by vapor deposition, thereby manufacturing a capacitor having a metal-insulator-semiconductor (MIS) structure.
- the voltage dependence (CV characteristics) of the capacitance of this capacitor was measured with a commercially available prober and LCR meter (HP, 4275A). As a result, it was found that the flat band voltage (Vfb) shifted from an ideal value of ⁇ 0.81V to + 0.32V. From this shift amount, it was found that the passivation film obtained from the passivation material (a-1) showed a negative fixed charge with a fixed charge density (Nf) of ⁇ 7.4 ⁇ 10 11 cm ⁇ 2 .
- the passivation material (a-1) is applied to both sides of an 8-inch p-type silicon substrate, pre-baked, and subjected to a heat treatment (firing) at 650 ° C. for 1 hour in a nitrogen atmosphere.
- a sample in which both surfaces of the substrate were covered with a passivation film was produced.
- the carrier lifetime of this sample was measured using a lifetime measuring device (Kobelco Research Institute, Inc., RTA-540). As a result, the carrier lifetime was 530 ⁇ s.
- the same 8-inch p-type silicon substrate was measured by passivation using the iodine passivation method, and the carrier lifetime was 1100 ⁇ s.
- the passivation film obtained by heat-treating (firing) the passivation material (a-1) showed a certain degree of passivation performance and a negative fixed charge.
- Reference Example 1-2 Similar to Reference Example 1-1, a commercially available organometallic decomposition coating material from which aluminum oxide (Al 2 O 3 ) can be obtained by heat treatment (calcination) [High-Purity Chemical Laboratory, SYM-AL04, concentration 2. 3 mass%] and a commercially available organometallic decomposable coating type material [High Purity Chemical Laboratory, Nb-05, concentration 5 mass%] from which niobium oxide (Nb 2 O 5 ) can be obtained by heat treatment (firing). Passivation materials (a-2) to (a-7) shown in Table 3 were prepared by mixing at different ratios.
- each of the passivation materials (a-2) to (a-7) was applied to one side of a p-type silicon substrate, and heat treatment (firing) was performed to produce a passivation film.
- the voltage dependence of the capacitance of the obtained passivation film was measured, and the fixed charge density was calculated therefrom.
- the carrier lifetime is also increased after heat treatment (firing). Since it showed a certain value, it was suggested that it functions as a passivation film. It was found that all the passivation films obtained from the passivation materials (a-2) to (a-7) stably show negative fixed charges and can be suitably used as a passivation for a p-type silicon substrate. .
- the passivation material (c-1) is spin-coated on one side of a 725 ⁇ m-thick 8-inch p-type silicon substrate (8 ⁇ cm to 12 ⁇ cm) from which a natural oxide film has been removed in advance with a hydrofluoric acid having a concentration of 0.049% by mass.
- Pre-baking was performed at 120 ° C. for 3 minutes on the plate.
- heat treatment was performed at 600 ° C. for 1 hour in a nitrogen atmosphere to obtain a passivation film containing aluminum oxide and niobium oxide. When the film thickness was measured with an ellipsometer, it was 50 nm.
- a plurality of aluminum electrodes having a diameter of 1 mm were formed on the above-described passivation film through a metal mask by vapor deposition, thereby manufacturing a capacitor having a metal-insulator-semiconductor (MIS) structure.
- the voltage dependence (CV characteristics) of the capacitance of this capacitor was measured with a commercially available prober and LCR meter (HP, 4275A). As a result, it was found that the flat band voltage (Vfb) shifted from an ideal value of ⁇ 0.81 V to +4.7 V. From this shift amount, it was found that the passivation film obtained from the passivation material (c-1) showed a negative fixed charge with a fixed charge density (Nf) of ⁇ 3.2 ⁇ 10 12 cm ⁇ 2 .
- the passivation material (c-1) was applied to both sides of an 8-inch p-type silicon substrate, pre-baked, and subjected to heat treatment (baking) at 600 ° C. for 1 hour in a nitrogen atmosphere to obtain silicon.
- a sample in which both surfaces of the substrate were covered with a passivation film was produced.
- the carrier lifetime of this sample was measured using a lifetime measuring device (Kobelco Research Institute, Inc., RTA-540). As a result, the carrier lifetime was 330 ⁇ s.
- the same 8-inch p-type silicon substrate was measured by passivation using the iodine passivation method, and the carrier lifetime was 1100 ⁇ s.
- the passivation film obtained by heat-treating (sintering) the passivation material (c-1) exhibited a certain degree of passivation performance and a negative fixed charge.
- the passivation material (c-2) is spin-coated on one side of a 725 ⁇ m-thick 8-inch p-type silicon substrate (8 ⁇ cm to 12 ⁇ cm) from which a natural oxide film has been removed in advance with a hydrofluoric acid having a concentration of 0.049% by mass.
- Pre-baking was performed at 120 ° C. for 3 minutes on the plate.
- heat treatment was performed at 600 ° C. for 1 hour in a nitrogen atmosphere to obtain a passivation film containing aluminum oxide and niobium oxide. When the film thickness was measured by an ellipsometer, it was 14 nm.
- a plurality of 1 mm diameter aluminum electrodes are deposited on the passivation film through a metal mask to form a MIS (Metal-Insulator-Semiconductor) capacitor.
- the voltage dependence (CV characteristics) of the capacitance of this capacitor was measured with a commercially available prober and LCR meter (HP, 4275A).
- Vfb flat band voltage
- LCR meter HP, 4275A
- Vfb flat band voltage
- the passivation film obtained from the passivation material (c-2) showed a negative fixed charge with a fixed charge density (Nf) of ⁇ 0.8 ⁇ 10 11 cm ⁇ 2 .
- each of the passivation materials (b-1) to (b-7) was applied to one side of a p-type silicon substrate and heat-treated (fired) to produce a passivation film, Using this, the voltage dependence of the capacitance was measured, and the fixed charge density was calculated therefrom.
- the passivation film obtained from the passivation materials (b-1) to (b-6) has a large carrier lifetime and has a function as a passivation.
- the niobium oxide / aluminum oxide ratios were 10/90 and 20/80, the fixed charge density values varied greatly, and a negative fixed charge density could not be stably obtained. It was confirmed that a negative fixed charge density can be realized by using niobium oxide.
- a negative fixed charge is stably generated because a passivation film showing a positive fixed charge is obtained in some cases. It turns out that it has not reached to show.
- a passivation film exhibiting a fixed charge can be used as a passivation for an n-type silicon substrate.
- a negative fixed charge density could not be obtained with the passivation material (b-7) containing 100% by mass of aluminum oxide.
- the passivation films obtained from the passivation materials (d-1) to (d-3) have a small carrier lifetime and an insufficient function as a passivation. It also showed a positive fixed charge.
- the passivation film obtained from the passivation material (d-3) had a negative fixed charge, but its value was small. It was also found that the carrier lifetime was relatively small and the function as a passivation was insufficient.
- an SiN film produced by plasma CVD was formed as the light-receiving surface antireflection film 103 on the light-receiving surface side.
- the passivation material (a-1) prepared in Reference Example 1-1 was applied to the region excluding the contact region (opening OA) on the back surface side of the silicon substrate 101 by the inkjet method. Thereafter, heat treatment was performed to form a passivation film 107 having an opening OA.
- a sample using the passivation material (c-1) prepared in Reference Example 1-3 was separately prepared as the passivation film 107.
- a paste mainly composed of silver was screen-printed in the shape of predetermined finger electrodes and bus bar electrodes.
- a paste mainly composed of aluminum was screen-printed on the entire surface.
- heat treatment fire-through
- electrodes first electrode 105 and second electrode 106
- aluminum is diffused into the opening OA on the back surface to form the BSF layer 104.
- the fire-through process in which the SiN film is not perforated is described, but the opening OA is first formed in the SiN film by etching or the like, and then the silver electrode is formed. You can also.
- the passivation film 107 is not formed in the above manufacturing process, aluminum paste is printed on the entire back surface, and the p + layer 114 corresponding to the BSF layer 104 and the electrode 116 corresponding to the second electrode.
- the characteristic evaluation was performed on the entire surface to form a solar cell element having the structure shown in FIG.
- characteristic evaluation was performed according to JIS-C-8913 (fiscal 2005) and JIS-C-8914 (fiscal 2005). The results are shown in Table 6.
- the solar cell element having the passivation film 107 including the niobium oxide and aluminum oxide layers has both increased short-circuit current and open-circuit voltage as compared with the solar cell element not having the passivation film 107, and the conversion efficiency ( It was found that the photoelectric conversion efficiency was improved by 1% at the maximum.
- ⁇ 2> The passivation film according to ⁇ 1>, wherein a mass ratio of the oxide of the vanadium group element to the aluminum oxide (vanadium group element oxide / aluminum oxide) is 30/70 to 90/10.
- ⁇ 3> The passivation film according to ⁇ 1> or ⁇ 2>, in which the total content of the oxide of the vanadium group element and the aluminum oxide is 90% or more.
- ⁇ 5> Heat treatment of a coating-type material comprising: a precursor of aluminum oxide; and a precursor of an oxide of at least one vanadium group element selected from the group consisting of a precursor of vanadium oxide and a precursor of tantalum oxide.
- a p-type impurity diffusion layer formed on part or all of the second surface side of the silicon substrate and doped with an impurity at a higher concentration than the silicon substrate,
- the said passivation film is a solar cell element containing aluminum oxide and the oxide of the at least 1 sort (s) of vanadium group element selected from the group which consists of vanadium oxide and a tantalum oxide.
- n-type impurity diffusion layer formed on a part or all of the second surface side of the silicon substrate and doped with impurities at a higher concentration than the silicon substrate, The solar cell element according to ⁇ 9>, wherein the second electrode is electrically connected to the n-type impurity diffusion layer through an opening of the passivation film.
- ⁇ 11> The solar cell element according to any one of ⁇ 7> to ⁇ 10>, wherein a mass ratio of the oxide of the vanadium group element and the aluminum oxide in the passivation film is 30/70 to 90/10 .
- ⁇ 12> The solar cell element according to any one of ⁇ 7> to ⁇ 11>, wherein the total content of the oxide of the vanadium group element and the aluminum oxide in the passivation film is 90% or more.
- the oxide of the vanadium group element includes an oxide of two or three vanadium group elements selected from the group consisting of vanadium oxide, niobium oxide, and tantalum oxide, ⁇ 7> to ⁇ 12>
- the solar cell element according to any one of the above.
- ⁇ 14> a silicon substrate;
- a passivation film having a long carrier lifetime of a silicon substrate and having a negative fixed charge can be realized at low cost.
- a coating type material for realizing the formation of the passivation film can be provided.
- a low-cost and highly efficient solar cell element using the passivation film can be realized.
- a silicon substrate with a passivation film having a long carrier lifetime and a negative fixed charge can be realized at low cost.
- the amount of fixed charges possessed by the passivation film can be controlled by changing the composition of the passivation film.
- the vanadium group element is a Group 5 element in the periodic table, and is an element selected from vanadium, niobium, and tantalum.
- the mass ratio of the oxide of vanadium group element to aluminum oxide is preferably 35/65 to 90/10, from the viewpoint that the negative fixed charge can be stabilized, and is preferably 50/50 to 90/10. More preferably.
- the mass ratio of vanadium group element oxide and aluminum oxide in the passivation film is determined by energy dispersive X-ray spectroscopy (EDX), secondary ion mass spectrometry (SIMS), and high frequency inductively coupled plasma mass spectrometry (ICP-MS). ) Can be measured. Specific measurement conditions are as follows in the case of ICP-MS, for example. Dissolving the passivation film in acid or alkaline aqueous solution, atomizing this solution and introducing it into Ar plasma, measuring the wavelength and intensity by spectroscopically analyzing the light emitted when the excited element returns to the ground state, Element qualification is performed from the obtained wavelength, and quantification is performed from the obtained intensity.
- EDX energy dispersive X-ray spectroscopy
- SIMS secondary ion mass spectrometry
- ICP-MS high frequency inductively coupled plasma mass spectrometry
- the total content of the vanadium group element oxide and aluminum oxide in the passivation film is preferably 80% by mass or more, and more preferably 90% by mass or more from the viewpoint of maintaining good characteristics.
- the components other than the oxide of vanadium group elements and aluminum oxide in the passivation film increase, the effect of negative fixed charges increases.
- components other than vanadium group oxide and aluminum oxide may be contained as organic components from the viewpoint of improving the film quality and adjusting the elastic modulus.
- the presence of the organic component in the passivation film can be confirmed by elemental analysis and measurement of the FT-IR of the film.
- vanadium oxide As the oxide of the vanadium group element, it is preferable to select vanadium oxide (V 2 O 5 ) from the viewpoint of obtaining a larger negative fixed charge.
- the passivation film may include two or three vanadium group oxides selected from the group consisting of vanadium oxide, niobium oxide, and tantalum oxide as the vanadium group element oxide.
- the passivation film is preferably obtained by heat-treating a coating-type material, and can be obtained by forming a coating-type material using a coating method or a printing method, and then removing organic components by heat treatment. More preferred. That is, the passivation film may be obtained as a heat-treated product of a coating type material containing an aluminum oxide precursor and a vanadium group element oxide precursor. Details of the coating type material will be described later.
- the coating type material of the present embodiment is a coating type material used for a passivation film for a solar cell element having a silicon substrate, and includes a precursor of aluminum oxide, a precursor of vanadium oxide, and a precursor of tantalum oxide. And a precursor of an oxide of at least one vanadium group element selected from the group.
- a precursor of the oxide of the vanadium group element contained in the coating material a precursor of vanadium oxide (V 2 O 5 ) is selected from the viewpoint of the negative fixed charge of the passivation film formed from the coating material. It is preferable.
- the coating type material is composed of two or three vanadium group elements selected from the group consisting of vanadium oxide precursors, niobium oxide precursors and tantalum oxide precursors as vanadium group oxide precursors. An oxide precursor may also be included.
- the aluminum oxide precursor can be used without particular limitation as long as it produces aluminum oxide.
- As the aluminum oxide precursor it is preferable to use an organic aluminum oxide precursor from the viewpoint of uniformly dispersing aluminum oxide on the silicon substrate and a chemically stable viewpoint.
- Examples of the organic aluminum oxide precursor include aluminum triisopropoxide (structural formula: Al (OCH (CH 3 ) 2 ) 3 , Kojundo Chemical Laboratory Co., Ltd., SYM-AL04.
- the precursor of the oxide of the vanadium group element can be used without particular limitation as long as it generates an oxide of the vanadium group element.
- the vanadium group element oxide precursor is preferably an organic vanadium group oxide oxide precursor from the viewpoint of uniformly dispersing aluminum oxide on the silicon substrate and chemically stable. .
- organic vanadium oxide precursors examples include vanadium (V) oxytriethoxide (structural formula: VO (OC 2 H 5 ) 3 , molecular weight: 202.13), High Purity Chemical Laboratory, V-02 can be mentioned.
- organic tantalum oxide precursors include tantalum (V) methoxide (structural formula: Ta (OCH 3 ) 5 , molecular weight: 336.12), Kojundo Chemical Laboratory, Ta-10-P Can be mentioned.
- organic niobium oxide precursors examples include niobium (V) ethoxide (structural formula: Nb (OC 2 H 5 ) 5 , molecular weight: 318.21), High Purity Chemical Laboratory, Nb-05. Can be mentioned.
- the solar cell element (photoelectric conversion device) of the present embodiment includes the passivation film (insulating film, protective insulating film) described in the above embodiment in the vicinity of the photoelectric conversion interface of the silicon substrate, that is, aluminum oxide and vanadium oxide. And at least one oxide of a vanadium group element selected from the group consisting of tantalum oxide. By containing aluminum oxide and an oxide of at least one vanadium group element selected from the group consisting of vanadium oxide and tantalum oxide, the carrier lifetime of the silicon substrate can be extended and negative fixed charges can be obtained. And the characteristics (photoelectric conversion efficiency) of the solar cell element can be improved.
- Passivation of passivation material (a2-1) on one side of a 725 ⁇ m thick 8-inch p-type silicon substrate (8 ⁇ ⁇ cm to 12 ⁇ ⁇ cm) with natural oxide film removed beforehand with hydrofluoric acid at a concentration of 0.49% by mass It was applied and placed on a hot plate and prebaked at 120 ° C. for 3 minutes. Thereafter, a heat treatment (firing) was performed at 700 ° C. for 30 minutes in a nitrogen atmosphere to obtain a passivation film containing vanadium oxide and vanadium oxide [vanadium oxide / aluminum oxide 63/37 (mass%)]. It was 51 nm when the film thickness was measured with the ellipsometer. When the FT-IR of the passivation film was measured, a very few peaks due to alkyl groups were observed in the vicinity of 1200 cm ⁇ 1 .
- the passivation material (a2-1) was applied to both sides of an 8-inch p-type silicon substrate, pre-baked, and subjected to heat treatment (baking) at 650 ° C. for 1 hour in a nitrogen atmosphere.
- a sample in which both surfaces of the substrate were covered with a passivation film was produced.
- the carrier lifetime of this sample was measured with a lifetime measuring device (Kobelco Research Institute, Inc., RTA-540). As a result, the carrier lifetime was 400 ⁇ s.
- the same 8-inch p-type silicon substrate was measured by passivation using the iodine passivation method, and the carrier lifetime was 1100 ⁇ s.
- the passivation film obtained by heat-treating (sintering) the passivation material (a2-1) showed a certain degree of passivation performance and a negative fixed charge.
- Reference Example 2-2 Similar to Reference Example 2-1, a commercially available organometallic thin film coated material from which aluminum oxide (Al 2 O 3 ) can be obtained by heat treatment (calcination) [High Purity Chemical Laboratory, SYM-AL04, concentration 2 3 mass%] and a commercially available organometallic thin film coating type material [Vitamin Purity Laboratory, V-02, concentration 2 mass%] from which vanadium oxide (V 2 O 5 ) can be obtained by heat treatment, Passivation materials (a2-2) to (a2-7) shown in Table 7 were prepared by mixing at different ratios.
- each of the passivation materials (a2-2) to (a2-7) was applied to one side of a p-type silicon substrate and heat-treated (fired) to produce a passivation film.
- the voltage dependence of the capacitance of the obtained passivation film was measured, and the fixed charge density was calculated therefrom.
- the carrier lifetime was measured using a sample obtained by applying a passivation material to both sides of a p-type silicon substrate and performing heat treatment (firing).
- the passivation film obtained by heat-treating (firing) the passivation material (b2-1) exhibits a certain degree of passivation performance and a negative fixed charge.
- the passivation material (b2-2) was applied to both sides of an 8-inch p-type silicon substrate, pre-baked, and subjected to heat treatment (baking) at 600 ° C. for 1 hour in a nitrogen atmosphere. A sample in which both surfaces of the substrate were covered with a passivation film was produced. The carrier lifetime of this sample was measured by a lifetime measuring device (Kobelco Research Institute, Inc., RTA-540). As a result, the carrier lifetime was 170 ⁇ s. For comparison, the same 8-inch p-type silicon substrate was measured by passivation using the iodine passivation method, and the carrier lifetime was 1100 ⁇ s.
- the passivation film obtained by curing the passivation material (b2-2) exhibited a certain degree of passivation performance and a negative fixed charge.
- Each of the passivation materials (c2-1) to (c2-6) is a 725 ⁇ m-thick 8-inch p-type silicon substrate (8 ⁇ ⁇ cm to 12 ⁇ ) from which a natural oxide film has been removed in advance with hydrofluoric acid having a concentration of 0.49% by mass.
- (Cm) was spin-coated on one side, placed on a hot plate, and pre-baked at 120 ° C. for 3 minutes. Thereafter, a heat treatment (firing) was performed at 700 ° C. for 30 minutes in a nitrogen atmosphere to obtain a passivation film containing aluminum oxide and tantalum oxide. Using this passivation film, the voltage dependence of the capacitance was measured, and the fixed charge density was calculated therefrom.
- each of the passivation materials (c2-1) to (c2-6) is applied to both sides of an 8-inch p-type silicon substrate, pre-baked, and heat-treated (fired) at 650 ° C. for 1 hour in a nitrogen atmosphere. )
- the carrier lifetime of this sample was measured by a lifetime measuring device (Kobelco Research Institute, Inc., RTA-540).
- Al oxide (Al 2 O 3 ) As a compound from which aluminum oxide (Al 2 O 3 ) can be obtained by heat treatment (firing), commercially available aluminum triisopropoxide (structural formula: Al (OCH (CH 3 ) 2 ) 3 , molecular weight: 204.25 2.04 g (0.010 mol) was dissolved in cyclohexane 60 g to prepare a passivation material (d2-1) having a concentration of 5% by mass.
- Al (OCH (CH 3 ) 2 ) 3 As a compound from which aluminum oxide (Al 2 O 3 ) can be obtained by heat treatment (firing), commercially available aluminum triisopropoxide (structural formula: Al (OCH (CH 3 ) 2 ) 3 , molecular weight: 204.25 2.04 g (0.010 mol) was dissolved in cyclohexane 60 g to prepare a passivation material (d2-1) having a concentration of 5% by mass.
- the passivation material (d2-1) was applied to both sides of an 8-inch p-type silicon substrate, pre-baked, and subjected to a heat treatment (firing) at 600 ° C. for 1 hour in a nitrogen atmosphere.
- a sample in which both surfaces of the substrate were covered with a passivation film was produced.
- the carrier lifetime of this sample was measured by a lifetime measuring device (Kobelco Research Institute, Inc., RTA-540). As a result, the carrier lifetime was 610 ⁇ s.
- the same 8-inch p-type silicon substrate was measured by passivation using the iodine passivation method, and the carrier lifetime was 1100 ⁇ s.
- the passivation film obtained by heat-treating the passivation material (d2-1) exhibited a certain degree of passivation performance and a negative fixed charge.
- the passivation material (d2-2) was applied to both sides of an 8-inch p-type silicon substrate, pre-baked, and subjected to heat treatment (baking) at 600 ° C. for 1 hour in a nitrogen atmosphere. A sample in which both surfaces of the substrate were covered with a passivation film was produced. The carrier lifetime of this sample was measured by a lifetime measuring device (Kobelco Research Institute, Inc., RTA-540). As a result, the carrier lifetime was 250 ⁇ s. For comparison, the same 8-inch p-type silicon substrate was measured by passivation using the iodine passivation method, and the carrier lifetime was 1100 ⁇ s.
- the passivation film obtained by heat treatment (firing) the passivation material (d2-2) exhibits a certain degree of passivation performance and a negative fixed charge.
- organometallic thin film coating type material High purity chemical research laboratory SYM-AL04, concentration 2.3 mass%] from which aluminum oxide (Al 2 O 3 ) can be obtained by heat treatment (firing), heat treatment (firing) Niobium oxide (Nb) by commercially available organometallic thin film coating material [Tapurio Chemical Lab. Ta-10-P, concentration 10% by mass] from which tantalum oxide (Ta 2 O 5 ) can be obtained, and heat treatment (firing) 2 O 5 ), a commercially available organometallic thin film coating material [High Purity Chemical Laboratory Nb-05, concentration 5 mass%] is mixed to form a passivation material (e2-3) which is a coating material Was prepared (see Table 9).
- organometallic thin film coating type material High purity chemical research laboratory SYM-AL04, concentration 2.3 mass%
- aluminum oxide Al 2 O 3
- heat treatment firing
- Tantalum oxide Ti 2 O 5
- heat treatment Niobium oxide
- Nb 2 O 5 Niobium oxide
- a commercially available organometallic thin film coating type material [High purity chemical research laboratory Nb-05, concentration 5 mass%] was mixed to prepare a passivation material (e2-4) as a coating type material (see Table 9).
- Each of the passivation materials (e2-1) to (e2-4) was 725 ⁇ m thick and 8 inches thick with the natural oxide film removed beforehand with hydrofluoric acid having a concentration of 0.49% by mass, as in Reference Example 2-1. It was spin-coated on one side of a p-type silicon substrate (8 ⁇ ⁇ cm to 12 ⁇ ⁇ cm), placed on a hot plate and prebaked at 120 ° C. for 3 minutes. Thereafter, a heat treatment (firing) was performed at 650 ° C. for 1 hour in a nitrogen atmosphere to obtain a passivation film containing aluminum oxide and two or more vanadium group element oxides.
- each of the passivation materials (e2-1) to (e2-4) is applied to both sides of an 8-inch p-type silicon substrate, pre-baked, and heat-treated (fired) at 650 ° C. for 1 hour in a nitrogen atmosphere. )
- the carrier lifetime of this sample was measured by a lifetime measuring device (Kobelco Research Institute, Inc., RTA-540).
- each of the passivation materials (f2-1) to (f2-9) was applied to one side of a p-type silicon substrate, and then heat treatment (firing) was performed to form a passivation film. This was used to measure the voltage dependence of the capacitance, and the fixed charge density was calculated therefrom.
- a paste mainly composed of silver was screen-printed in the shape of predetermined finger electrodes and bus bar electrodes.
- a paste mainly composed of aluminum was screen-printed on the entire surface.
- heat treatment fire-through
- electrodes first electrode 105 and second electrode 106
- aluminum is diffused into the opening OA on the back surface to form the BSF layer 104.
- the passivation film 107 is not formed in the above manufacturing process, aluminum paste is printed on the entire back surface, and the p + layer 114 corresponding to the BSF layer 104 and the electrode 116 corresponding to the second electrode. was formed on the entire surface to form a solar cell element having the structure of FIG.
- characteristic evaluation a short circuit current, an open circuit voltage, a fill factor, and conversion efficiency
- the characteristic evaluation was performed according to JIS-C-8913 (fiscal 2005) and JIS-C-8914 (fiscal 2005). The results are shown in Table 11.
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Abstract
Description
まず、光閉じ込め効果を促して高効率化を図るよう、受光面側にテクスチャー構造を形成したp型シリコン基板を準備し、続いてオキシ塩化リン(POCl3)、窒素及び酸素の混合ガス雰囲気において800℃~900℃で数十分の処理を行って一様にn型拡散層を形成する。この従来の方法では、混合ガスを用いてリンの拡散を行うため、受光面である表面のみならず、側面及び裏面にもn型拡散層が形成される。そのため、側面に形成されたn型拡散層を除去するためのサイドエッチングを行っている。また、裏面に形成されたn型拡散層はp+型拡散層へ変換する必要がある。このため、裏面全体にアルミニウムペーストを付与し、これを熱処理(焼成)することで、n型拡散層をp+型拡散層に変換するのと一括して、アルミニウム電極を形成してオーミックコンタクトを得ている。
このような受光面とは反対の面(以下、「裏面」ともいう)にポイントコンタクト構造を有する太陽電池の場合、アルミニウム電極以外の部分の表面において、少数キャリアの再結合速度を抑制する必要がある。そのためのパッシベーション層として、SiO2膜等が提案されている(例えば、特開2004-6565号公報参照)。このようなSiO2膜を形成することによるパッシベーション効果としては、シリコン基板の裏面の表層部におけるケイ素原子の未結合手を終端させ、再結合の原因となる表面準位密度を低減させる効果がある。
このようなパッシベーション層は、一般的にはALD(Atomic Layer Deposition)法、CVD(Chemical Vapor Deposition)法等の方法で形成される(例えば、Journal of Applied Physics, 104(2008), 113703-1~113703-7参照)。また、半導体基板上に酸化アルミニウム膜を形成する簡便な手法として、ゾルゲル法による手法が提案されている(例えば、Thin Solid Films, 517(2009), 6327-6330、及びChinese Physics Letters, 26(2009), 088102-1~088102-4参照)。
<1> 下記一般式(I)で表される化合物と、樹脂と、を含有するパッシベーション層形成用組成物。
前記半導体基板上の全面又は一部に設けられる、前記<1>~<5>のいずれか1項に記載のパッシベーション層形成用組成物の熱処理物であるパッシベーション層と、
を有するパッシベーション層付半導体基板。
前記組成物層を熱処理してパッシベーション層を形成する工程と、
を有するパッシベーション層付半導体基板の製造方法。
前記半導体基板上の全面又は一部に設けられる、前記<1>~<5>のいずれか1項に記載のパッシベーション層形成用組成物の熱処理物であるパッシベーション層と、
前記p型層及び前記n型層からなる群より選択される1以上の層上に配置される電極と、
を有する太陽電池素子。
前記組成物層を熱処理して、パッシベーション層を形成する工程と、を有する太陽電池素子の製造方法。
前記太陽電池素子の電極上に配置される配線材料と、
を有する太陽電池。
本発明のパッシベーション層形成用組成物は、下記一般式(I)で表される化合物(以下、「式(I)化合物」ともいう)と、樹脂と、を含む。前記パッシベーション層形成用組成物は必要に応じてその他の成分を更に含んでいてもよい。
また、本発明のパッシベーション層形成用組成物を用いる手法は、蒸着装置等を必要としない簡便で生産性の高い方法である。更にマスク処理等の煩雑な工程を要することなく、所望の形状にパッシベーション層を形成できる。またパッシベーション層形成用組成物は、式(I)化合物を含むことで、ゲル化等の不具合の発生が抑制されて経時的な保存安定性に優れる。
粘度変化率(%)=|η30-η0|/η0×100 (式)
パッシベーション層形成用組成物は、前記一般式(I)で表される化合物(式(I)化合物)の少なくとも1種を含む。式(I)化合物は、Nb、Ta、V、Y、及びHfからなる群より選択される少なくとも1種の金属元素を含むアルコキシド化合物である。パッシベーション層形成用組成物が式(I)化合物を含有することで、優れたパッシベーション効果を有するパッシベーション層を形成することができる。この理由について以下のように考えることができる。
R1で表されるアリール基として具体的には、フェニル基を挙げることができる。
R1で表されるアルキル基及びアリール基は、置換基を有していてもよい。アルキル基の置換基としては、ハロゲン原子、アミノ基、ヒドロキシル基、カルボキシル基、スルホン基、ニトロ基等が挙げられる。アリール基の置換基としては、ハロゲン原子、メチル基、エチル基、イソプロピル基、アミノ基、ヒドロキシル基、カルボキシル基、スルホン基、ニトロ基等が挙げられる。
中でもR1は、保存安定性とパッシベーション効果の観点から、炭素数1~8の無置換のアルキル基であることが好ましく、炭素数1~4の無置換のアルキル基であることがより好ましい。
本発明のパッシベーション層形成用組成物は、更に、下記一般式(II)で表される化合物(以下、「特定有機アルミニウム化合物」という)の少なくとも1種を含有してもよい。
また一般式(II)におけるR5は、保存安定性及びパッシベーション効果の観点から、水素原子又は炭素数1~8の無置換のアルキル基であることが好ましく、水素原子又は炭素数1~4の無置換のアルキル基であることがより好ましい。
より好ましくは、一般式(II)で表される化合物は、nが0であり、R2がそれぞれ独立して炭素数1~4の無置換のアルキル基である化合物、並びにnが1~3であり、R2がそれぞれ独立して炭素数1~4の無置換のアルキル基であり、X2及びX3の少なくとも一方が酸素原子であり、前記酸素原子に結合するR3又はR4が炭素数1~4のアルキル基であり、X2又はX3がメチレン基の場合、前記メチレン基に結合するR3又はR4が水素原子であり、R5が水素原子である化合物からなる群より選ばれる少なくとも1種である。
特定有機アルミニウム化合物の含有率を0.5質量%以上とすることで、パッシベーション層形成用組成物の保存安定性が向上する傾向にある。また特定有機アルミニウム化合物の含有率を80質量%以下とすることで、パッシベーション効果が向上する傾向にある。
パッシベーション層形成用組成物は、樹脂の少なくとも1種を含有する。樹脂を含むことで、パッシベーション層形成用組成物が半導体基板上に付与されて形成される組成物層の形状安定性がより向上し、組成物層が形成された領域に、パッシベーション層を所望の形状で選択的に形成することができる。
尚、本明細書における「(メタ)アクリル酸」とは「アクリル酸」及び「メタクリル酸」の少なくとも一方を意味し、「(メタ)アクリレート」とは「アクリレート」及び「メタクリレート」の少なくとも一方を意味する。
(検出器:L-2490型RI[株式会社日立ハイテクノロジーズ])
(カラムオーブン:L-2350[株式会社日立ハイテクノロジーズ])
カラム:Gelpack GL-R440 + Gelpack GL-R450 + Gelpack GL-R400M(計3本)(日立化成株式会社、商品名)
カラムサイズ:10.7mm(内径)×300mm
溶離液:テトラヒドロフラン
試料濃度:10mg/2mL
注入量:200μL
流量:2.05mL/分
測定温度:25℃
パッシベーション層形成用組成物は、更に液状媒体(溶媒又は分散媒)を含んでいてもよい。パッシベーション層形成用組成物が液状媒体を含有することで、粘度の調整がより容易になり、付与性がより向上し、より均一なパッシベーション層を形成することができる傾向にある。液状媒体としては特に制限されず、必要に応じて適宜選択することができる。中でも式(I)化合物及び樹脂、並びに必要に応じて添加される特定有機アルミニウム化合物を溶解して均一な溶液を与えることができる液状媒体が好ましく、有機溶剤の少なくとも1種を含むことがより好ましい。
式(I)化合物は、そのままの状態では加水分解、重合反応等を容易に起こし固化するものもあるが、式(I)化合物を液状媒体中に溶解又は分散させることによって反応が抑制されるため保存安定性が向上しやすい傾向がある。
パッシベーション層形成用組成物は、酸性化合物又は塩基性化合物を含有してもよい。パッシベーション層形成用組成物が酸性化合物又は塩基性化合物を含有する場合、保存安定性の観点から、酸性化合物又は塩基性化合物の含有率が、パッシベーション層形成用組成物中にそれぞれ1質量%以下であることが好ましく、0.1質量%以下であることがより好ましい。
R9CONH-R10-NHCOR9・・・・(2)
R9NHCO-R10-CONHR9・・・・(3)
R9CONH-R10-N(R11)2・・・・(4)
パッシベーション層形成用組成物の粘度は特に制限されず、半導体基板への付与方法等に応じて適宜選択することができる。例えば、パッシベーション層形成用組成物の粘度は、0.01Pa・s~10000Pa・sとすることができる。中でもパターン形成性の観点から、パッシベーション層形成用組成物の粘度は0.1Pa・s~1000Pa・sであることが好ましい。尚、粘度は、回転式せん断粘度計を用いて、25℃、せん断速度1.0s-1で測定される。
パッシベーション層形成用組成物の製造方法には特に制限はない。例えば、一般式(I)で表される特定の化合物と、樹脂と、必要に応じて含まれる特定有機アルミニウム化合物と、液状媒体等とを、通常用いられる混合方法で混合することで製造することができる。
本発明のパッシベーション層付半導体基板は、半導体基板と、前記半導体基板上の全面又は一部に設けられる前記パッシベーション層形成用組成物の熱処理物(焼成物)であるパッシベーション層と、を有する。パッシベーション層付半導体基板は、パッシベーション層形成用組成物の熱処理物層(焼成物層)であるパッシベーション層を有することで優れたパッシベーション効果を示す。
本発明のパッシベーション層付半導体基板の製造方法は、半導体基板上の全面又は一部に、前記パッシベーション層形成用組成物を付与して組成物層を形成する工程と、前記組成物層を熱処理(焼成)してパッシベーション層を形成する工程とを有する。前記製造方法は必要に応じてその他の工程を更に含んでいてもよい。
本発明のパッシベーション層形成用組成物を用いることで、優れたパッシベーション効果を有するパッシベーション層を所望の形状に、簡便な方法で形成することができる。
組成物層の熱処理(焼成)条件は、組成物層に含まれる式(I)化合物及び必要に応じて含まれる特定有機アルミニウム化合物を、その熱処理物(焼成物)である金属酸化物又は複合酸化物に変換可能であれば特に制限されない。パッシベーション層に効果的に固定電荷を与え、より優れたパッシベーション効果を得るために、具体的には、熱処理(焼成)温度は300℃~900℃が好ましく、450℃~800℃がより好ましい。ここでいう熱処理(焼成)温度は、熱処理(焼成)に用いる炉の中の最高温度を意味する。また熱処理(焼成)時間は、熱処理(焼成)温度等に応じて適宜選択できる。例えば、熱処理(焼成)時間は0.1時間~10時間とすることができ、0.12時間~5時間であることが好ましい。ここでいう熱処理(焼成)時間は、最高温度での保持時間を意味する。
尚、形成されたパッシベーション層の平均膜厚は、干渉式膜厚計(例えば、F20膜厚測定システム、フィルメトリクス株式会社)を用いて常法により、3点の厚みを測定し、その算術平均値として算出される。
本発明の太陽電池素子は、p型層及びn型層がpn接合されてなる半導体基板と、前記半導体基板上の全面又は一部に設けられる前記パッシベーション層形成用組成物の熱処理物(焼成物)であるパッシベーション層と、前記p型層及びn型層の少なくとも一方の層上に配置される電極とを有する。太陽電池素子は、必要に応じてその他の構成要素を更に有していてもよい。
太陽電池素子は、本発明のパッシベーション層形成用組成物から形成されたパッシベーション層を有することで、変換効率に優れる。
太陽電池素子の形状及び大きさに制限はない。例えば、一辺が125mm~156mmの正方形であることが好ましい。
本発明の太陽電池素子の製造方法は、p型層及びn型層が接合されてなるpn接合を有し、前記p型層及び前記n型層からなる群より選択される1以上の層上に電極を有する半導体基板の、前記電極を有する面の一方又は両方の面上に、前記パッシベーション層形成用組成物を付与して組成物層を形成する工程と、前記組成物層を熱処理(焼成)して、パッシベーション層を形成する工程と、を有する。太陽電池素子の製造方法は、必要に応じてその他の工程を更に有していてもよい。
パッシベーション層形成用組成物を用いてパッシベーション層を形成する方法の詳細は、既述のパッシベーション層付半導体基板の製造方法と同様であり、好ましい態様も同様である。
図1は、本実施形態にかかるパッシベーション層を有する太陽電池素子の製造方法の一例を模式的に示す工程図を断面図として示したものである。但し、この工程図は、本発明をなんら制限するものではない。
太陽電池は、前記太陽電池素子と、太陽電池素子の電極上に設けられる配線材料と、を有する。配線材料が配置される電極は、出力取出し電極等である。太陽電池は更に必要に応じて、配線材料を介して複数の太陽電池素子が連結され、更に封止材で封止されて構成される。前記配線材料及び封止材としては特に制限されず、当業界で通常用いられているものから適宜選択することができる。
(パッシベーション層形成用組成物の調製)
ペンタエトキシニオブ(北興化学工業株式会社、構造式:Nb(OC2H5)5、分子量:318.2)を1.2g、テルピネオール(日本テルペン化学株式会社、TPOと略記することがある)を18.5g、及びエチルセルロース(日進化成株式会社、商品名:ETHOCEL200cps、ECと略記することがある)を0.3g混合して、パッシベーション層形成用組成物1を調製した。
上記で調製したパッシベーション層形成用組成物1のせん断粘度を、調製直後(12時間以内)に、回転式せん断粘度計(AntonPaar社、MCR301)に、コーンプレート(直径50mm、コーン角1°)を装着し、温度25℃で、せん断速度1.0s-1及び10s-1の条件でそれぞれ測定した。
せん断速度が1.0s-1の条件でのせん断粘度(η1)は35.4Pa・s、せん断速度が10s-1の条件でのせん断粘度(η2)は26.8Pa・sとなった。せん断速度が1.0s-1と10s-1の場合でのチキソ比(η1/η2)は1.32となった。
上記で調製したパッシベーション層形成用組成物1のせん断粘度を、調製直後(12時間以内)及び25℃で30日間保存した後にそれぞれ測定した。せん断粘度の測定は、AntonPaar社、MCR301に、コーンプレート(直径50nm、コーン角1°)を装着し、温度25℃でせん断速度1.0s-1で行った。25℃におけるせん断粘度は、調製直後は35.4Pa・s、25℃で30日間保存した後は36.9Pa・sであった。
保存安定性の評価では、30日間保存した後のせん断粘度の変化率が10%未満のものをA、10%以上30%未満のものをB、30%以上のものをCとしている。評価がA及びBであれば、パッシベーション層形成用組成物の保存安定性としては良好である。表2では、調製直後のせん断粘度の数値と、保存安定性の評価結果を示す。
パッシベーション層形成用組成物の印刷性の評価を行う際は、半導体基板として、表面がミラー形状の単結晶p型シリコン基板(50mm角、厚さ625μm、以下、基板Aと呼ぶ)と、表面にテクスチャー構造が形成された単結晶p型シリコン基板(50mm角、厚さ180μm、以下、基板Bと呼ぶ)の2種類を使用した。
ここで、印刷中に目視によって印刷ムラが生じなかったものが10枚中9枚以上の場合をA、8枚以下かつ6枚以上の場合をB、5枚以下の場合をCとしている。評価がA及びBであれば、パッシベーション層形成用組成物の印刷ムラとしては良好である。
尚、印刷ムラとは、スクリーン版がシリコン基板から離れる際に、一部版離れが悪い部分が生じたためにできる、前記パッシベーション層形成用組成物の厚さが場所によりばらつく現象を指す。
その後、パッシベーション層形成用組成物1を付与した基板A及び基板Bを150℃で3分間加熱し、液状媒体を蒸散させることで乾燥処理した。次いで、基板A及び基板Bを700℃の温度で10分間熱処理(焼成)した後、室温(25℃)で放冷した。
ここで、印刷直後のドット径(La)(368μm)に対し、熱処理(焼成)後のドット径(La)の減少率が10%未満のものをA、10%以上30%未満のものをB、30%以上のものをCとしている。評価がA及びBであれば、パッシベーション層形成用組成物の印刷滲みの抑制としては良好である。
尚、印刷滲みとは、基板上に付与したパッシベーション層形成用組成物が広がる現象を言う。
上記印刷ムラの評価で作製したパッシベーション層形成用組成物1を全面に付与した10枚の基板Aのうち1枚を、150℃で3分間加熱し、液状媒体を蒸散させることで乾燥処理した。次いで基板を700℃の温度で10分間熱処理(焼成)した後、室温(25℃)で放冷し、評価用基板とした。熱処理(焼成)は、拡散炉(ACCURON CQ-1200、株式会社日立国際電気)を用いて、大気中雰囲気下、最高温度700℃、保持時間10分間の条件で行った。
上記で得られた評価用基板の実効ライフタイムを、ライフタイム測定装置(日本セミラボ株式会社、WT-2000PVN)を用いて、室温(25℃)で反射マイクロ波光電導減衰法により測定した。得られた評価用基板において、パッシベーション層形成用組成物を付与した領域の実効ライフタイムは、198μsであった。
上記で得られた評価用基板上のパッシベーション層の厚みを、干渉式膜厚計(フィルメトリクス株式会社、F20膜厚測定システム)を用いて測定したところ、膜厚は74nmであった。
上記で得られた評価用基板について、パッシベーション層上にメタルマスクを介して、直径1mmのアルミニウム電極を複数個蒸着し、MIS(Metal-Insulator-Semiconductor;金属-絶縁体-半導体)構造のキャパシタを作製した。
まず、単結晶p型半導体基板(125mm角、厚さ200μm)を用意し、アルカリエッチングにより、受光面及び裏面にテクスチャー構造を形成した。次いでオキシ塩化リン(POCl3)、窒素及び酸素の混合ガス雰囲気において、900℃の温度で20分間処理し、受光面、裏面及び側面にn+型拡散層を形成した。その後、サイドエッチングを行い、側面のPSG層及びn+型拡散層を除去し、そしてフッ酸を含むエッチング溶液を用いて受光面及び裏面のPSG層を除去した。更に裏面については別途エッチング処理を行い、裏面のn+型拡散層を除去した。その後、受光面のn+型拡散層上に窒化ケイ素からなる反射防止膜をPECVDにより約90nmの厚さで形成した。
各電極ペーストを印刷した後、150℃の温度で5分間加熱し、液状媒体を蒸散させることで乾燥処理を行った。
上記で得られた太陽電池素子1の受光面出力取出し電極及び裏面出力取出し電極の上に、配線部材(太陽電池用はんだめっき平角線、製品名:SSA-TPS 0.2×1.5(20)、厚さ0.2mm×幅1.5mmの銅線にSn-Ag-Cu系鉛フリーはんだを片面あたり最大20μmの厚さでめっきした仕様、日立金属株式会社[(旧)日立電線株式会社])を配置し、タブ線接続装置(NTS-150-M、Tabbing & Stringing Machine、株式会社エヌピーシー)を用い、最高温度250℃、保持時間10秒の条件ではんだを溶融させることで、上記配線部材と受光面出力取出し電極及び裏面出力取出し電極とを接続した。
実施例1において、パッシベーション層形成用組成物にエチルセルロース(日進化成株式会社、商品名:ETHOCEL200cps)及びアルミニウムエチルアセトアセタトジイソプロピレート(ALCH)を加えた。具体的には、各成分の含有量を、ペンタエトキシニオブ(北興化学工業株式会社、構造式:Nb(OC2H5)5、分子量:318.2)を1.6g、ALCHを1.0g、テルピネオールを17.1g、及びエチルセルロースを0.3gと変更したこと以外は、実施例1と同様にして、パッシベーション層形成用組成物2を調製した。
その後は、実施例1と同様にして、パッシベーション層形成用組成物2のチキソ性の評価、保存安定性の評価、印刷性(印刷ムラ及び印刷滲み)の評価、及びパッシベーション層2の実効ライフタイムの評価を行い、厚さ及び固定電荷密度を測定した。更に実施例1と同様にして、太陽電池素子2及び太陽電池2を作製し、発電性能を評価した。
各評価には、実施例2において調製したパッシベーション層形成用組成物を用いた。印刷性(印刷ムラ及び印刷滲み)の評価基板の作製、実効ライフタイム及びパッシベーション層の膜厚の測定用基板の作製、太陽電池素子の作製におけるパッシベーション層形成用組成物2の熱処理条件(焼成)を700℃、10分間から、600℃、15分間と変更したこと以外は、実施例1と同様にして、印刷性(印刷ムラ及び印刷滲み)の評価、及びパッシベーション層3の実効ライフタイムの評価を行い、厚さ及び固定電荷密度を測定し、太陽電池素子3及び太陽電池3を作製し、発電性能を評価した。
各評価には、実施例2において調製したパッシベーション層形成用組成物を用いた。印刷性(印刷ムラ及び印刷滲み)の評価基板の作製、実効ライフタイム及びパッシベーション層の膜厚の測定用基板の作製、太陽電池素子の作製におけるパッシベーション層形成用組成物2の熱処理(焼成)条件を700℃、10分間から、800℃、8分間と変更したこと以外は、実施例1と同様にして、印刷性(印刷ムラ及び印刷滲み)の評価、及びパッシベーション層4実効ライフタイムの評価を行い、厚さ及び固定電荷密度を測定し、太陽電池素子4及び太陽電池4を作製し、発電性能を評価した。
各成分の含有量を、バナジウム(V)トリエトキシドオキシド(株式会社高純度化学研究所、構造式:VO(OC2H5)3、分子量:546.4)を1.2g、アルミニウムエチルアセトアセタトジイソプロピレート(川研ファインケミカル株式会社、商品名:ALCH)を0.8g、テルピネオールを17.7g、及びエチルセルロース(ETHOCEL200cps)を0.3gと変更したこと以外は、実施例1と同様にして、パッシベーション層形成用組成物3を調製した。
その後は、実施例1と同様にして、パッシベーション層形成用組成物3のチキソ性の評価、保存安定性の評価、印刷性(印刷ムラ及び印刷滲み)の評価、及びパッシベーション層5の実効ライフタイムの評価を行い、厚さ及び固定電荷密度を測定した。更に実施例1と同様にして、太陽電池素子5及び太陽電池5を作製し、発電性能を評価した。
各成分の含有量を、テトラ-t-ブトキシハフニウム(株式会社高純度化学研究所、構造式:Hf(O-t-C4H9)4、分子量:470.9)を1.2g、アルミニウムトリスエチルアセトアセテート(川研ファインケミカル株式会社、商品名:ALCH-TR)を1.2g、テルピネオールを17.3g、及びエチルセルロース(ETHOCEL200cps)を0.3gと変更したこと以外は、実施例1と同様にして、パッシベーション層形成用組成物4を調製した。
その後は、実施例1と同様にして、パッシベーション層形成用組成物4のチキソ性の評価、保存安定性の評価、印刷性(印刷ムラ及び印刷滲み)の評価、及びパッシベーション層6の実効ライフタイムの評価を行い、厚さ及び固定電荷密度を測定した。更に実施例1と同様にして、太陽電池素子6及び太陽電池6を作製し、発電性能を評価した。
パッシベーション層形成用組成物の調製において、ペンタエトキシニオブ(北興化学工業株式会社、構造式:Nb(OC2H5)5、分子量:318.2)、ペンタ-n-ブトキシタンタル(株式会社高純度化学研究所、構造式:Ta(O-n-C4H9)5、分子量:546.4)、テルピネオール、及びエチルセルロース(ETHOCEL200cps)を用いた。具体的には、各成分の含有量を、ペンタエトキシニオブを1.4g、ペンタ-n-ブトキシタンタルを1.0g、テルピネオールを17.3g、及びエチルセルロースを0.3gと変更したこと以外は、実施例1と同様にして、パッシベーション層形成用組成物5を調製した。
その後は、実施例1と同様にして、パッシベーション層形成用組成物5のチキソ性の評価、保存安定性の評価、印刷性(印刷ムラ及び印刷滲み)の評価、及びパッシベーション層7の実効ライフタイムの評価を行い、厚さ及び固定電荷密度を測定した。更に実施例1と同様にして、太陽電池素子7及び太陽電池7を作製し、発電性能を評価した。
パッシベーション層形成用組成物の調製において、ペンタ-n-ブトキシニオブ(株式会社高純度化学研究所、構造式:Nb(O-n-C4H9)5、分子量:458.5)、バナジウム(V)トリエトキシドオキシド(株式会社高純度化学研究所、構造式:VO(OC2H5)3、分子量:546.4)、アルミニウムエチルアセトアセタトジイソプロピレート(川研ファインケミカル株式会社、商品名:ALCH)、テルピネオール、及びエチルセルロース(ETHOCEL200cps)を用いた。具体的には、各成分の含有量を、ペンタ-n-ブトキシニオブを1.6g、バナジウム(V)トリエトキシドオキシドを0.6g、ALCHを0.6g、テルピネオールを17.0g、及びエチルセルロースを0.2gと変更したこと以外は、実施例1と同様にして、パッシベーション層形成用組成物6を調製した。
その後は、実施例1と同様にして、パッシベーション層形成用組成物6のチキソ性の評価、保存安定性の評価、印刷性(印刷ムラ及び印刷滲み)の評価、及びパッシベーション層8の実効ライフタイムの評価を行い、厚さ及び固定電荷密度を測定した。更に実施例1と同様にして、太陽電池素子8及び太陽電池8を作製し、発電性能を評価した。
半導体基板へのパッシベーション層形成において、パッシベーション層形成用組成物を用いずに、ALD(Atomic Layer Deposition)法を用いて酸化アルミニウム(Al2O3)からなるパッシベーション層C1を形成した。
具体的には、原子層堆積装置を用いて、Al2O3層が20nmの厚さになるよう、成膜条件を調整した。尚、成膜後の膜厚は干渉式膜厚計(F20膜厚測定システム、フィルメトリックス株式会社)を用いて測定した。
実施例1におけるパッシベーション層形成用組成物の調製において、式(I)化合物(MはNb、Ta、V、Y又はHfから選ばれる金属元素を含む)を用いずに、表1に示すように、トリエトキシビスマス(株式会社高純度化学研究所、構造式:Bi(OC2H5)3、分子量344.2、テルピネオール、及びエチルセルロース(ETHOCEL200cps)からなるパッシベーション層形成用組成物C2を調製した。
その後は、実施例1と同様にして、パッシベーション層形成用組成物C2のチキソ性の評価、保存安定性の評価、印刷性(印刷ムラ及び印刷滲み)の評価、及びパッシベーション層C2の実効ライフタイムの評価を行い、厚さ及び固定電荷密度を測定した。更に実施例1と同様にして、太陽電池素子C2及び太陽電池C2を作製し、発電性能を評価した。
実施例1におけるパッシベーション層形成用組成物の調製において、式(I)化合物(MはNb、Ta、V、Y又はHfから選ばれる金属元素を含む)を用いずに、表1に示すように、テトラ-i-プロポキシチタン(株式会社高純度化学研究所、構造式:Ti(O-i-C3H7)4、分子量284.2、テルピネオール、及びエチルセルロース(ETHOCEL200cps)からなるパッシベーション層形成用組成物C3を調製した。
その後は、実施例1と同様にして、パッシベーション層形成用組成物C3のチキソ性の評価、保存安定性の評価、印刷性(印刷ムラ及び印刷滲み)の評価、パッシベーション層C3の実効ライフタイムの評価及び厚さを測定した。更に実施例1と同様にして、太陽電池素子C3及び太陽電池C3を作製し、発電性能を評価した。
太陽電池素子の作製において、裏面にパッシベーション層を形成せず、太陽電池素子C4及び太陽電池C4を作製し、発電性能を評価した。
続いて、トンネル炉(1列搬送W/Bトンネル炉、株式会社ノリタケカンパニーリミテド)を用いて大気中雰囲気下、最高温度800℃、保持時間10秒の条件で熱処理(焼成)を行って、所望の電極が形成された太陽電池素子C4を作製した。
実施例1~8で作製したパッシベーション層用組成は、いずれも保存安定性及び印刷性が良好であることが分かった。
以下は、参考実施形態1に係るパッシベーション膜、塗布型材料、太陽電池素子及びパッシベーション膜付シリコン基板である。
前記シリコン基板の受光面側に形成されたn型の不純物拡散層と、
前記シリコン基板の受光面側の前記n型の不純物拡散層の表面に形成された第1電極と、
前記シリコン基板の裏面側の表面に形成され、複数の開口部を有する酸化アルミニウムと酸化ニオブを含むパッシベーション膜と、
前記複数の開口部を通して、前記シリコン基板の裏面側の表面と電気的な接続を形成している第2電極と、
を備える太陽電池素子。
前記シリコン基板の受光面側に形成されたn型の不純物拡散層と、
前記シリコン基板の受光面側の前記n型の不純物拡散層の表面に形成された第1電極と、
前記シリコン基板の裏面側の一部又は全部に形成され、前記シリコン基板より高濃度に不純物が添加されたp型の不純物拡散層と、
前記シリコン基板の裏面側の表面に形成され、複数の開口部を有する酸化アルミニウムと酸化ニオブを含むパッシベーション膜と、
前記複数の開口部を通して、前記シリコン基板の裏面側の前記p型の不純物拡散層の表面と電気的な接続を形成している第2電極と、
を備える太陽電池素子。
前記シリコン基板の受光面側に形成されたp型の不純物拡散層と、
前記シリコン基板の裏面側に形成された第2電極と、
前記シリコン基板の受光面側の表面に形成され、複数の開口部を有する酸化アルミニウムと酸化ニオブを含むパッシベーション膜と、
前記シリコン基板の受光面側の前記p型の不純物拡散層の表面に形成され、前記複数の開口部を通して前記シリコン基板の受光面側の表面と電気的な接続を形成している第1電極と、
を備える太陽電池素子。
前記シリコン基板上の全面又は一部に設けられる<1>~<5>のいずれか1項に記載のパッシベーション膜と、
を有するパッシベーション膜付シリコン基板。
本実施の形態の太陽電池素子の構造について図12~図15を参照しながら説明する。図12~図15は、本実施の形態の裏面にパッシベーション膜を用いた太陽電池素子の第1~第4構成例を示す断面図である。
次に、上記構成をもつ本実施の形態の太陽電池素子(図12~図15)の製造方法の一例について説明する。ただし、本実施の形態は、以下に述べる方法で作製した太陽電池素子に限るものではない。
熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる市販の有機金属分解塗布型材料[株式会社高純度化学研究所SYM-AL04、濃度2.3質量%]を3.0gと、熱処理(焼成)により酸化ニオブ(Nb2O5)が得られる市販の有機金属分解塗布型材料[株式会社高純度化学研究所Nb-05、濃度5質量%]を3.0gとを混合して、塗布型材料であるパッシベーション材料(a-1)を調製した。
参考実施例1-1と同様に、熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる市販の有機金属分解塗布型材料[株式会社高純度化学研究所、SYM-AL04、濃度2.3質量%]と、熱処理(焼成)により酸化ニオブ(Nb2O5)が得られる市販の有機金属分解塗布型材料[株式会社高純度化学研究所、Nb-05、濃度5質量%]とを、比率を変えて混合して、表3に示すパッシベーション材料(a-2)~(a-7)を調製した。
市販のニオブ(V)エトキシド(構造式:Nb(OC2H5)5、分子量:318.21)を3.18g(0.010mol)と、市販のアルミニウムトリイソプロポキシド(構造式:Al(OCH(CH3)2)3、分子量:204.25)を1.02g(0.005mol)とをシクロヘキサン80gに溶解して、濃度5質量%のパッシベーション材料(c-1)を調製した。
市販のニオブ(V)エトキシド(構造式:Nb(OC2H5)5、分子量:318.21)を2.35g(0.0075mol)と、市販のアルミニウムトリイソプロポキシド(構造式:Al(OCH(CH3)2)3、分子量:204.25)を1.02g(0.005mol)と、ノボラック樹脂10gとを、ジエチレングリコールモノブチルエーテルアセタート10gとシクロヘキサン10gに溶解して、パッシベーション材料(c-2)を調製した。
参考実施例1-1と同様に、熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる市販の有機金属分解塗布型材料[株式会社高純度化学研究所SYM-AL04、濃度2.3質量%]と、熱処理(焼成)により酸化ニオブ(Nb2O5)が得られる市販の有機金属分解塗布型材料[株式会社高純度化学研究所Nb-05、濃度5質量%]とを、比率を変えて混合して、表4に示すパッシベーション材料(b-1)~(b-7)を調製した。
一方、酸化アルミニウムが100質量%となるパッシベーション材料(b-7)では、負の固定電荷密度を得ることができなかった。
パッシベーション材料(d-1)として、熱処理(焼成)により酸化チタン(TiO2)が得られる市販の有機金属分解塗布型材料[株式会社高純度化学研究所Ti-03-P、濃度3質量%]、パッシベーション材料(d-2)として、熱処理(焼成)によりチタン酸バリウム(BaTiO3)が得られる市販の有機金属分解塗布型材料[株式会社高純度化学研究所BT-06、濃度6質量%]、パッシベーション材料(d-3)として、熱処理(焼成)により酸化ハフニウム(HfO2)が得られる市販の有機金属分解塗布型材料[株式会社高純度化学研究所Hf-05、濃度5質量%]を準備した。
シリコン基板101として、ボロンをドーパントした単結晶シリコン基板を用いて、図14に示す構造の太陽電池素子を作製した。シリコン基板101の表面をテクスチャー処理した後、塗布型のリン拡散材を受光面側に付与し、熱処理により拡散層102(リン拡散層)を形成した。その後、塗布型のリン拡散材を希フッ酸で除去した。
また、パッシベーション膜107として、参考実施例1-3で調製したパッシベーション材料(c-1)を用いたサンプルも別途作製した。
以下は、参考実施形態2に係るパッシベーション膜、塗布型材料、太陽電池素子及びパッシベーション膜付シリコン基板である。
前記シリコン基板の受光面側である第1面側に形成されたn型の不純物拡散層と、
前記不純物拡散層上に形成された第1電極と、
前記シリコン基板の受光面側とは逆の第2面側に形成され、開口部を有するパッシベーション膜と、
前記シリコン基板の第2面側に形成され、前記シリコン基板の第2面側と前記パッシベーション膜の開口部を通して電気的に接続されている第2電極と、を備え、
前記パッシベーション膜は、酸化アルミニウムと、酸化バナジウム及び酸化タンタルからなる群より選択される少なくとも1種のバナジウム族元素の酸化物と、を含む太陽電池素子。
前記第2電極は、前記p型の不純物拡散層と前記パッシベーション膜の開口部を通して電気的に接続されている、<7>に記載の太陽電池素子。
前記シリコン基板の受光面側である第1面側に形成されたp型の不純物拡散層と、
前記不純物拡散層上に形成された第1電極と、
前記シリコン基板の受光面側とは逆の第2面側に形成され、開口部を有するパッシベーション膜と、
前記シリコン基板の第2面側に形成され、前記シリコン基板の第2面側と前記パッシベーション膜の開口部を通して電気的に接続されている第2電極と、を備え、
前記パッシベーション膜は、酸化アルミニウムと、酸化バナジウム及び酸化タンタルからなる群より選択される少なくとも1種のバナジウム族元素の酸化物と、を含む太陽電池素子。
前記第2電極は、前記n型の不純物拡散層と前記パッシベーション膜の開口部を通して電気的に接続されている、<9>に記載の太陽電池素子。
前記シリコン基板上の全面又は一部に設けられる<1>~<5>のいずれか1項に記載の太陽電池素子用パッシベーション膜と、
を有するパッシベーション膜付シリコン基板。
[参考実施例2-1]
熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、SYM-AL04、濃度2.3質量%]を3.0gと、熱処理(焼成)により酸化バナジウム(V2O5)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、V-02、濃度2質量%]を6.0gとを混合して、塗布型材料であるパッシベーション材料(a2-1)を調製した。
参考実施例2-1と同様に、熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、SYM-AL04、濃度2.3質量%]と、熱処理により酸化バナジウム(V2O5)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、V-02、濃度2質量%]とを、比率を変えて混合して、表7に示すパッシベーション材料(a2-2)~(a2-7)を調製した。
熱処理(焼成)により酸化バナジウム(V2O5)が得られる化合物として、市販のバナジウム(V)オキシトリエトキシド(構造式:VO(OC2H5)3、分子量:202.13)を1.02g(0.010mol)と、熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる化合物として、市販のアルミニウムトリイソプロポキシド(構造式:Al(OCH(CH3)2)3、分子量:204.25)を2.04g(0.010mol)とをシクロヘキサン60gに溶解して、濃度5質量%のパッシベーション材料(b2-1)を調製した。
市販のバナジウム(V)オキシトリエトキシド(構造式:VO(OC2H5)3、分子量:202.13)を1.52g(0.0075mol)と、市販のアルミニウムトリイソプロポキシド(構造式:Al(OCH(CH3)2)3、分子量:204.25)を1.02g(0.005mol)と、ノボラック樹脂10gとを、ジエチレングリコールモノブチルエーテルアセタート10gとシクロヘキサン10gに溶解して、パッシベーション材料(b2-2)を調製した。
[参考実施例2-5]
熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、SYM-AL04、濃度2.3質量%]と、熱処理により酸化タンタル(Ta2O5)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、Ta-10-P、濃度10質量%]とを比率を変えて混合して、表8に示すパッシベーション材料(c2-1)~(c2-6)を調製した。
熱処理(焼成)により酸化タンタル(Ta2O5)が得られる化合物として、市販のタンタル(V)メトキシド(構造式:Ta(OCH3)5、分子量:336.12)を1.18g(0.0025mol)と、熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる化合物として、市販のアルミニウムトリイソプロポキシド(構造式:Al(OCH(CH3)2)3、分子量:204.25)を2.04g(0.010mol)とをシクロヘキサン60gに溶解して、濃度5質量%のパッシベーション材料(d2-1)を調製した。
熱処理(焼成)により酸化タンタル(Ta2O5)が得られる化合物として、市販のタンタル(V)メトキシド(構造式:Ta(OCH3)5、分子量:336.12)1.18g(0.005mol)と、熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる化合物として、市販のアルミニウムトリイソプロポキシド(構造式:Al(OCH(CH3)2)3、分子量:204.25)を1.02g(0.005mol)と、ノボラック樹脂10gとを、ジエチレングリコールモノブチルエーテルアセタート10gとシクロヘキサン10gの混合物に溶解して、パッシベーション材料(d2-2)を調製した。
[参考実施例2-8]
熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、SYM-AL04、濃度2.3質量%]、熱処理(焼成)により酸化バナジウム(V2O5)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、V-02、濃度2質量%]、及び熱処理(焼成)により酸化タンタル(Ta2O5)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、Ta-10-P、濃度10質量%]を混合して、塗布型材料であるパッシベーション材料(e2-1)を調製した(表9参照)。
参考実施例2-1と同様に、熱処理(焼成)により酸化アルミニウム(Al2O3)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、SYM-AL04、濃度2.3質量%]と、熱処理(焼成)により酸化バナジウム(V2O5)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、V-02、濃度2質量%]、又は熱処理(焼成)により酸化タンタル(Ta2O5)が得られる市販の有機金属薄膜塗布型材料[(株)高純度化学研究所、Ta-10-P、濃度10質量%]を混合して、塗布型材料であるパッシベーション材料(f2-1)~(f2-8)を調製した(表10参照)。
シリコン基板101として、ボロンをドーパントとした単結晶シリコン基板を用いて、図14に示す構造の太陽電池素子を作製した。シリコン基板101の表面をテクスチャー処理した後、塗布型のリン拡散材を受光面側のみに塗布し、熱処理により拡散層102(リン拡散層)を形成した。その後、塗布型のリン拡散材を希フッ酸で除去した。
Claims (10)
- 下記一般式(I)で表される化合物と、樹脂と、を含有するパッシベーション層形成用組成物。
M(OR1)m (I)
[式中、MはNb、Ta、V、Y及びHfからなる群より選択される少なくとも1種の金属元素を含む。R1はそれぞれ独立して炭素数1~8のアルキル基又は炭素数6~14のアリール基を表す。mは1~5の整数を表す。] - 前記樹脂の含有率が0.1質量%~50質量%である請求項1又は請求項2に記載のパッシベーション層形成用組成物。
- 前記一般式(II)において、R2がそれぞれ独立して炭素数1~4のアルキル基である請求項2又は請求項3に記載のパッシベーション層形成用組成物。
- 前記一般式(II)において、nが1~3の整数であり、R5がそれぞれ独立して水素原子又は炭素数1~4のアルキル基である請求項2~請求項4のいずれか1項に記載のパッシベーション層形成用組成物。
- 半導体基板と、
前記半導体基板上の全面又は一部に設けられる、請求項1~請求項5のいずれか1項に記載のパッシベーション層形成用組成物の熱処理物であるパッシベーション層と、
を有するパッシベーション層付半導体基板。 - 半導体基板上の全面又は一部に、請求項1~請求項5のいずれか1項に記載のパッシベーション層形成用組成物を付与して組成物層を形成する工程と、
前記組成物層を熱処理してパッシベーション層を形成する工程と、
を有するパッシベーション層付半導体基板の製造方法。 - p型層及びn型層がpn接合されてなる半導体基板と、
前記半導体基板上の全面又は一部に設けられる、請求項1~請求項5のいずれか1項に記載のパッシベーション層形成用組成物の熱処理物であるパッシベーション層と、
前記p型層及び前記n型層からなる群より選択される1以上の層上に配置される電極と、
を有する太陽電池素子。 - p型層及びn型層が接合されてなるpn接合を有し、前記p型層及び前記n型層からなる群より選択される1以上の層上に電極を有する半導体基板の、前記電極を有する面の一方又は両方の面上に、請求項1~請求項5のいずれか1項に記載のパッシベーション層形成用組成物を付与して組成物層を形成する工程と、
前記組成物層を熱処理して、パッシベーション層を形成する工程と、を有する太陽電池素子の製造方法。 - 請求項8に記載の太陽電池素子と、
前記太陽電池素子の電極上に配置される配線材料と、
を有する太陽電池。
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EP13819813.0A EP2876670A4 (en) | 2012-07-19 | 2013-07-19 | COMPOSITION FOR FORMING PASSIVATION LAYER, SEMICONDUCTOR SUBSTRATE COMPRISING PASSIVATION LAYER, METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE COMPRISING PASSIVATION LAYER, SOLAR CELL MEMBER, METHOD FOR PRODUCING SOLAR CELL ELEMENT , AND SOLAR CELL |
US14/415,091 US20150228812A1 (en) | 2012-07-19 | 2013-07-19 | Composition for forming passivation layer, semiconductor substrate having passivation layer, method of producing semiconductor substrate having passivation layer, photololtaic cell element, method of producing photovoltaic cell element, and photovoltaic cell |
CN201380038010.8A CN104471717A (zh) | 2012-07-19 | 2013-07-19 | 钝化层形成用组合物、带钝化层的半导体基板、带钝化层的半导体基板的制造方法、太阳能电池元件、太阳能电池元件的制造方法及太阳能电池 |
KR1020157003335A KR20150036454A (ko) | 2012-07-19 | 2013-07-19 | 패시베이션층 형성용 조성물, 패시베이션층이 형성된 반도체 기판, 패시베이션층이 형성된 반도체 기판의 제조 방법, 태양 전지 소자, 태양 전지 소자의 제조 방법 및 태양 전지 |
JP2014525894A JPWO2014014110A1 (ja) | 2012-07-19 | 2013-07-19 | パッシベーション層形成用組成物、パッシベーション層付半導体基板、パッシベーション層付半導体基板の製造方法、太陽電池素子、太陽電池素子の製造方法及び太陽電池 |
US15/080,374 US20160211389A1 (en) | 2012-07-19 | 2016-03-24 | Composition for forming passivation layer, semiconductor substrate having passivation layer, method of producing semiconductor substrate having passivation layer, photov oltaic cell element, method of producing photovoltaic cell element, and photovoltaic cell |
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- 2013-07-19 CN CN201380038010.8A patent/CN104471717A/zh active Pending
- 2013-07-19 KR KR1020157003335A patent/KR20150036454A/ko not_active Application Discontinuation
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- 2013-07-19 WO PCT/JP2013/069700 patent/WO2014014110A1/ja active Application Filing
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JPWO2014014110A1 (ja) | 2016-07-07 |
US20150228812A1 (en) | 2015-08-13 |
TW201408675A (zh) | 2014-03-01 |
CN104471717A (zh) | 2015-03-25 |
WO2014014110A1 (ja) | 2014-01-23 |
EP2876670A4 (en) | 2016-03-02 |
US20160211389A1 (en) | 2016-07-21 |
EP2876670A1 (en) | 2015-05-27 |
KR20150036454A (ko) | 2015-04-07 |
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