WO2013123105A3 - Method of manufacturing a chemical mechanical planarization pad - Google Patents
Method of manufacturing a chemical mechanical planarization pad Download PDFInfo
- Publication number
- WO2013123105A3 WO2013123105A3 PCT/US2013/026015 US2013026015W WO2013123105A3 WO 2013123105 A3 WO2013123105 A3 WO 2013123105A3 US 2013026015 W US2013026015 W US 2013026015W WO 2013123105 A3 WO2013123105 A3 WO 2013123105A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- chemical mechanical
- mechanical planarization
- planarization pad
- manufacturing
- temperature
- Prior art date
Links
- 239000000126 substance Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000011159 matrix material Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 229920000642 polymer Polymers 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Abstract
The present disclosure relates to a process for forming a chemical mechanical planarization pad. The process includes forming a chemical mechanical planarization pad including a polymer matrix and an embedded structure by heating the polymer matrix and the embedded structure at a first temperature T1 and a first pressure P1. The chemical mechanical planarization pad is then allowed to deform at a second temperature T2 and a second pressure P2. The chemical mechanical planarization pad is then compressed at given mold cavity thickness by applying heat at a third temperature T3, wherein T1> T2, P1>P2, T1≤T3.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261598476P | 2012-02-14 | 2012-02-14 | |
US61/598,476 | 2012-02-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2013123105A2 WO2013123105A2 (en) | 2013-08-22 |
WO2013123105A3 true WO2013123105A3 (en) | 2015-06-18 |
Family
ID=48944458
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2013/026015 WO2013123105A2 (en) | 2012-02-14 | 2013-02-14 | Method of manufacturing a chemical mechanical planarization pad |
Country Status (3)
Country | Link |
---|---|
US (1) | US20130205679A1 (en) |
TW (1) | TW201402272A (en) |
WO (1) | WO2013123105A2 (en) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020182867A1 (en) * | 2001-06-04 | 2002-12-05 | Multi Planar Technologies, Inc. | Chemical mechanical polishing apparatus and method having a retaining ring with a contoured surface |
US7048610B1 (en) * | 2005-01-26 | 2006-05-23 | Intel Corporation | Conditioning polishing pad for chemical-mechanical polishing |
US20080085661A1 (en) * | 2006-07-19 | 2008-04-10 | Innopad, Inc. | Polishing Pad Having Micro-Grooves On The Pad Surface |
US20090170413A1 (en) * | 2007-12-31 | 2009-07-02 | Innopad, Inc. | Chemical-mechanical planarization pad |
US20090258588A1 (en) * | 2008-04-11 | 2009-10-15 | Innopad, Inc. | Chemical Mechanical Planarization Pad With Void Network |
US20110171883A1 (en) * | 2010-01-13 | 2011-07-14 | Nexplanar Corporation | CMP pad with local area transparency |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6017265A (en) * | 1995-06-07 | 2000-01-25 | Rodel, Inc. | Methods for using polishing pads |
US6964604B2 (en) * | 2000-06-23 | 2005-11-15 | International Business Machines Corporation | Fiber embedded polishing pad |
US6641471B1 (en) * | 2000-09-19 | 2003-11-04 | Rodel Holdings, Inc | Polishing pad having an advantageous micro-texture and methods relating thereto |
US6863774B2 (en) * | 2001-03-08 | 2005-03-08 | Raytech Innovative Solutions, Inc. | Polishing pad for use in chemical-mechanical planarization of semiconductor wafers and method of making same |
US8758659B2 (en) * | 2010-09-29 | 2014-06-24 | Fns Tech Co., Ltd. | Method of grooving a chemical-mechanical planarization pad |
SG190249A1 (en) * | 2010-11-18 | 2013-06-28 | Cabot Microelectronics Corp | Polishing pad comprising transmissive region |
-
2013
- 2013-02-14 US US13/766,930 patent/US20130205679A1/en not_active Abandoned
- 2013-02-14 WO PCT/US2013/026015 patent/WO2013123105A2/en active Application Filing
- 2013-02-18 TW TW102105509A patent/TW201402272A/en unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020182867A1 (en) * | 2001-06-04 | 2002-12-05 | Multi Planar Technologies, Inc. | Chemical mechanical polishing apparatus and method having a retaining ring with a contoured surface |
US7048610B1 (en) * | 2005-01-26 | 2006-05-23 | Intel Corporation | Conditioning polishing pad for chemical-mechanical polishing |
US20080085661A1 (en) * | 2006-07-19 | 2008-04-10 | Innopad, Inc. | Polishing Pad Having Micro-Grooves On The Pad Surface |
US20090170413A1 (en) * | 2007-12-31 | 2009-07-02 | Innopad, Inc. | Chemical-mechanical planarization pad |
US20090258588A1 (en) * | 2008-04-11 | 2009-10-15 | Innopad, Inc. | Chemical Mechanical Planarization Pad With Void Network |
US20110171883A1 (en) * | 2010-01-13 | 2011-07-14 | Nexplanar Corporation | CMP pad with local area transparency |
Also Published As
Publication number | Publication date |
---|---|
US20130205679A1 (en) | 2013-08-15 |
WO2013123105A2 (en) | 2013-08-22 |
TW201402272A (en) | 2014-01-16 |
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