WO2013108573A1 - Piezoelectric vibration device - Google Patents

Piezoelectric vibration device Download PDF

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Publication number
WO2013108573A1
WO2013108573A1 PCT/JP2012/084074 JP2012084074W WO2013108573A1 WO 2013108573 A1 WO2013108573 A1 WO 2013108573A1 JP 2012084074 W JP2012084074 W JP 2012084074W WO 2013108573 A1 WO2013108573 A1 WO 2013108573A1
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WO
WIPO (PCT)
Prior art keywords
diaphragm
piezoelectric
weight member
input electrode
contact
Prior art date
Application number
PCT/JP2012/084074
Other languages
French (fr)
Japanese (ja)
Inventor
哲司 横江
忠男 砂原
清 有沢
雅英 田村
修 川崎
Original Assignee
北陸電気工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北陸電気工業株式会社 filed Critical 北陸電気工業株式会社
Priority to CN201280067426.8A priority Critical patent/CN104053511B/en
Priority to JP2013554229A priority patent/JP5992928B2/en
Publication of WO2013108573A1 publication Critical patent/WO2013108573A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
    • B06B1/0666—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface used as a diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders

Definitions

  • the present invention relates to a piezoelectric vibration device in which a piezoelectric vibrating body is formed on a diaphragm having one end fixed, and a weight member is fixed to the other end of the diaphragm.
  • a method of notifying a user by vibrating a device itself instead of a ringing tone according to a use environment is adopted in a mobile phone.
  • an electromagnetic vibrator is usually used.
  • the electromagnetic vibrator is constructed by joining an eccentric weight to the shaft of the electromagnetic motor, and when calling, the eccentric weight provided on the shaft of the electromagnetic motor rotates to generate vibration, which vibrates the device main body to the user.
  • the response speed is slow, the user senses with a slight delay, and the power consumption is large and the battery usage time is shortened.
  • FIG. 1 of Japanese Patent Laid-Open No. 11-244783 Patent Document 1
  • a piezoelectric body 5 is formed on a plate spring 1 to which one end 2 is fixed, and a weight 4 is fixed to the other end 3 of the plate spring 1.
  • a structure of a piezoelectric vibrator is disclosed.
  • FIG. 3 of JP-A-8-314467 Patent Document 2
  • a piezoelectric diaphragm 2 having one end fixed, a weight 3 fixed to the other end of the piezoelectric diaphragm 2, and conductors 7 and 7 are shown.
  • a structure of a piezoelectric vibration sounding device including connection terminal portions 5 and 5 connected to a piezoelectric diaphragm 2 via a connection.
  • piezoelectric vibration devices are used in small electronic devices such as mobile phones and smartphones in order to solve the problems of electromagnetic vibrators.
  • a voltage is applied to the piezoelectric member, the vibration plate vibrates in the thickness direction, and the electronic device By applying vibration to the electronic device, it is used for the purpose of imparting sensory sensibility due to vibration to the user of the electronic device.
  • the conventional piezoelectric vibration device solves the problem of poor durability because a connection failure is likely to occur at the connection portion between the piezoelectric member and the connection terminal for external connection due to vibration of the diaphragm.
  • an object of the present invention is to provide a piezoelectric vibration device having excellent body sensibility and a short vibration convergence time.
  • Another object of the present invention is to provide a piezoelectric vibration device having high durability.
  • a piezoelectric vibrating device to be improved by the present invention includes a diaphragm having one end fixed, a piezoelectric vibrating body formed on the diaphragm, and a weight member fixed to the other end of the diaphragm.
  • “on the diaphragm” means either one or both of the surface of the diaphragm facing the weight member and the surface of the diaphragm opposite to the surface facing the weight member.
  • any arrangement structure of a unimorph structure in which the piezoelectric vibrator is provided on the front surface or the back surface in the thickness direction of the diaphragm and a bimorph structure provided on both the front surface and the back surface in the thickness direction of the diaphragm is used. It may be adopted.
  • the piezoelectric vibrator may have a multilayer structure.
  • the weight member fixed to the other end of the diaphragm has a rigidity higher than that of the diaphragm, and is spaced from the diaphragm toward one end of the diaphragm.
  • the shape extends.
  • the natural frequency of the weight member is preferably determined to be at least three times the natural frequency of the diaphragm in which the piezoelectric vibrator is formed.
  • the natural frequency of the diaphragm in a state where the piezoelectric vibrator is formed means the natural frequency of the diaphragm obtained in a state where the piezoelectric vibrator is formed on the diaphragm. If a weight member whose natural frequency is not three times that of the diaphragm in which the piezoelectric vibrator is formed is used, the diaphragm and the weight member resonate and the vibration energy of the diaphragm is easily absorbed by the weight member.
  • the natural frequency of the weight member is set within 10 times (that is, 3 to 10 times) the natural frequency of the diaphragm in a state where the piezoelectric vibrator is formed. If a weight member having a natural frequency exceeding 10 times the natural frequency of the diaphragm in which the piezoelectric vibrator is formed is used, the vibration mode of the diaphragm changes, and consequently no large vibration energy can be generated. Because.
  • the natural frequency of the weight member is 7 times or less (that is, 3 to 7 times) the natural frequency of the diaphragm in a state where the piezoelectric vibrating body is formed. More preferably,
  • the vibration of the diaphragm is greater on the surface facing the weight member than on the surface opposite to the surface facing the weight member. Tend to be. Therefore, if a piezoelectric vibrating body is formed on the surface of the diaphragm that is more bent than the weight member, a large driving force can be applied to the piezoelectric vibrating body. That is, by forming the piezoelectric vibrating body on the surface facing the weight member, it is possible to improve the sensibility of a person who uses the piezoelectric vibrating device.
  • the piezoelectric vibrator is formed on the surface of the diaphragm opposite to the surface facing the weight member, the piezoelectric vibrator is formed in comparison with the case where the piezoelectric vibrator is formed on the surface of the diaphragm facing the weight member.
  • the driving force for obtaining the vibrating body is reduced, the life of the piezoelectric vibrating body can be extended. That is, the long-term reliability of the piezoelectric vibrating device can be improved by forming the piezoelectric vibrating body on the surface of the diaphragm opposite to the surface facing the weight member.
  • the weight member has a shape extending toward one end side of the diaphragm with a space between the diaphragm and the diaphragm, the weight member is difficult to hit the diaphragm even if the volume of the weight member is increased. Therefore, the vibration width of the diaphragm can be increased without damaging the piezoelectric vibrating body. Furthermore, if the shape of the weight member is narrowed toward the one end side of the diaphragm, the resonance frequency can be increased when the volume is the same (same), so the range of design is expanded.
  • the mode of fixing the weight member to the diaphragm is arbitrary.
  • one or more through holes that penetrate the diaphragm in the thickness direction are formed at the other end of the diaphragm.
  • the weight member is formed to include a thermally deformable material, and the weight member is provided with one or more protrusions that are fitted into the one or more through holes and the tip protrudes from the through hole of the diaphragm. Then, the weight member may be fixed to the diaphragm by thermally deforming the tips of the one or more protrusions fitted in the one or more through holes.
  • high specific gravity and high-strength metal for example, tungsten, molybdenum, brass, iron-based alloy, etc.
  • high heat resistance and high-strength thermoplastic resin for example, polyamide, epoxy, etc.
  • the weight member may have a shape having a base portion having a contact surface from which one or more protrusions protrude and come into contact with the diaphragm, and a main body portion provided integrally with the base portion and extending along the diaphragm.
  • an inclined surface inclined at a certain angle is formed on the surface of the main body portion facing the diaphragm.
  • the inclined surface is formed so that the distance between the surface of the diaphragm facing the weight member and the surface of the main body facing the diaphragm gradually increases from the other end of the diaphragm toward one end of the diaphragm. Tilt.
  • the mode of fixing one end of the diaphragm is arbitrary.
  • a metal plate formed so that one end of the diaphragm constitutes a terminal portion of the piezoelectric vibrator, and further, a metal plate fixed so as to leave the terminal portion at one end of the diaphragm is used.
  • the mounting holder is integrally provided with a plate-like welded portion having a welding surface welded on one of a pair of side surfaces facing the thickness direction of the diaphragm, and the welded portion. It is preferable to form an attached portion.
  • “on one of the pair of side surfaces facing in the thickness direction of the diaphragm” means on the surface facing the weight member of the diaphragm and on the surface opposite to the surface facing the weight member of the diaphragm. Mean either. Since a metal diaphragm (metal plate) is joined to the welded portion (weld surface) of the mounting holder by welding, one end of the diaphragm can be securely fixed. Further, the mounted portion of the mounting holder has a structure that allows the piezoelectric vibration device of the present invention to be mounted on an electronic device. Since the attached portion is provided integrally with the welded portion, the piezoelectric vibrating device can be reliably attached to the electronic apparatus by using this attachment holder.
  • the welded part is further curved with no edges between the side surface located on one end side of the diaphragm and the welding surface and between the side surface located on the other end side of the diaphragm and the welding surface.
  • the surface is formed.
  • an edge is formed between the side surface located on one end side of the diaphragm and the welding surface and between the side surface located on the other end side of the diaphragm and the welding surface. Is not formed, it is possible to provide a piezoelectric vibration device in which the vibration width of the diaphragm is difficult to change.
  • the curved surface may be any shape as long as it is difficult to be deformed or worn by vibration of the diaphragm, such as a shape processed into an R surface or a C surface that does not have burrs on the diaphragm side. May be.
  • the piezoelectric vibrating device targeted by the present invention it is necessary to electrically connect a lead wire for applying (inputting) a voltage to the piezoelectric vibrating body.
  • the lead wire is directly connected to the input power of the piezoelectric vibrating body, so the bending force is repeatedly applied to the connecting portion between the piezoelectric vibrating body and the lead wire due to vibration of the diaphragm, resulting in poor connection.
  • the bending force is repeatedly applied to the connecting portion between the piezoelectric vibrating body and the lead wire due to vibration of the diaphragm, resulting in poor connection.
  • such a problem of poor connection becomes more prominent when the vibration width of the diaphragm is increased.
  • the piezoelectric vibrator includes a piezoelectric ceramic layer and one electrode layer formed on a surface of the piezoelectric ceramic layer facing the weight member.
  • the diaphragm constitutes the first input electrode of the piezoelectric vibrator
  • one electrode layer constitutes the second input electrode of the piezoelectric vibrator.
  • a conductive brush in contact with the second input electrode is further provided.
  • the conductive brush includes a contact portion that slidably contacts the second input electrode, a leaf spring portion that is provided integrally with the contact portion and generates a pressing force that presses the contact portion against the second input electrode, A connection terminal portion that is provided integrally with the leaf spring portion and is attached to a fixing member that is fixed to one end of the diaphragm and that is connected to a lead wire can be provided.
  • the connection portion between the piezoelectric vibrating body and the lead wire is structured using such a conductive brush, the conductive brush is surely connected to the second input electrode of the piezoelectric vibrating body even if the vibration width of the diaphragm increases.
  • the poor connection is unlikely to occur at the electrical connection portion between the piezoelectric vibrating body and the lead wire.
  • the leaf spring portion of the conductive brush can reliably contact the contact portion of the brush portion of the conductive brush with the second input electrode of the piezoelectric vibrator even when the diaphragm is vibrating. Occurrence of poor contact at the connecting portion with the lead wire can be effectively prevented.
  • conductive rubber is formed on the contact portion of the brush portion of the conductive brush that contacts the second input electrode of the piezoelectric vibrating body.
  • the fixing member is preferably insert-molded with an electrically insulating material using a pair of conductive brushes as inserts.
  • the fixing member has such a configuration, the conductive brush can be reliably fixed to the fixing member.
  • a flexible wiring board having conductivity may be used instead of the conductive brush.
  • the flexible wiring board includes a wiring that is connected to the second input electrode and does not contact the diaphragm. Specifically, one end of the flexible wiring board is connected to the second input electrode, and the flexible wiring board and the wiring extend beyond one end of the diaphragm. Since the flexible wiring board itself has flexibility, it can be deformed according to the bending of the diaphragm. For this reason, when a structure using such a flexible wiring board is employed for the connection portion between the piezoelectric vibrating body and the lead wire, the conductive brush becomes the second input of the piezoelectric vibrating body even if the vibration width of the diaphragm increases.
  • the contact portion of the flexible wiring board can be reliably brought into contact with the second input electrode of the piezoelectric vibrator even when the diaphragm is vibrating. It is possible to effectively prevent the occurrence of poor contact at the connecting portion. Further, by using the flexible wiring board, the wear of the contact portion of the second input electrode with the flexible wiring board is reduced as compared with the case where the conductive brush is used, so that long-term reliability is further improved.
  • the flexible wiring board when a flexible wiring board is used instead of the conductive brush, the flexible wiring board can be securely fixed to the fixing member by insert molding using the flexible wiring board as an insert.
  • the aspect which fixes the fixing member with which the conductive brush was inserted to the end of a diaphragm is arbitrary.
  • one or more through holes penetrating in the thickness direction of the diaphragm are formed at one end of the diaphragm.
  • the mounting holder is formed with one or more through holes that are concentrically penetrating with the through holes of the diaphragm in the thickness direction of the mounting holder in a state where the diaphragm is fixed to the mounting holder.
  • the fixing member is formed using a heat-deformable material (for example, many plastic materials such as nylon, ABS, PET, PPS) as the electrical insulating material.
  • the fixing member is fitted into the through hole of the diaphragm and the mounting holder with one end of the diaphragm attached to the mounting holder, and from the through hole of the diaphragm and the mounting holder.
  • One or more protruding protrusions are provided.
  • the fixing member is attached to one end of the diaphragm while the diaphragm is fixed to the mounting holder. Fix it.
  • the conductive brush can be fixed to the mounting holder to which the diaphragm is fixed via the fixing member. Therefore, it is possible to prevent contact failure due to a shift in the contact position between the contact portion of the brush portion of the conductive brush and the input electrode of the piezoelectric vibrating body.
  • FIG. 5 is a cutaway cross-sectional view of FIG. 4 as viewed from the front by enlarging a cross-section taken along the line VV. It is the bottom view which looked at the perspective view of FIG. 1 from the lower side. It is a perspective view which shows other embodiment of the piezoelectric vibration device of this invention.
  • FIG. 1 is a perspective view of an embodiment of a piezoelectric vibration device of the present invention.
  • FIG. 2 is an exploded perspective view showing the piezoelectric vibration device (perspective view) of FIG. 1 in an exploded manner.
  • 3 is a front view of the perspective view of FIG. 1 viewed from the front side.
  • the piezoelectric vibration device shown in FIGS. 1 to 3 includes a vibration plate 1, a piezoelectric vibration member 3, a weight member 5, a conductive brush 7, and a mounting holder 9.
  • the diaphragm 1 is composed of a metal plate made of phosphor bronze, iron-based material, stainless steel, nickel alloy or the like so that one end 1a of the diaphragm 1 constitutes a terminal portion of the piezoelectric vibrator 3, and a metal described in detail later. It is fixed to a mounting holder 9 made of metal.
  • the piezoelectric vibrator 3 includes a piezoelectric ceramic layer 3a made of lead zirconate titanate (PZT), lead titanate (PT) or the like, and one electrode layer 3b is formed on the piezoelectric ceramic layer 3a. have.
  • the piezoelectric vibrator 3 is bonded onto the diaphragm 1 using an adhesive.
  • a piezoelectric vibrator having a unimorph structure provided on the back surface in the thickness direction of the diaphragm 1 (a surface facing a weight member 5 described later) 1b is employed as the piezoelectric vibrator 3.
  • the deflection of the diaphragm 1 is larger on the back surface 1b than the surface 1e in the thickness direction of the diaphragm 1 described later (the surface opposite to the surface facing the weight member 5) 1e (that is, the piezoelectric vibrating body 3). Since the driving force to obtain the piezoelectric vibrating body 3 is larger when the is formed on the back surface 1b in the thickness direction of the diaphragm 1 than when it is formed on the front surface 1e in the thickness direction of the diaphragm 1) Can improve the sensibility.
  • a unimorph structure in which the piezoelectric vibrating body 3 is formed on the surface 1e in the thickness direction of the diaphragm 1 may be employed.
  • the deflection of the diaphragm 1 is smaller on the front surface 1e than on the back surface 1b in the thickness direction of the diaphragm 1 (that is, the diaphragm 1 is formed more than when the piezoelectric vibrating body 3 is formed on the back surface 1b in the thickness direction of the diaphragm 1).
  • the driving force for obtaining the piezoelectric vibrating body 3 is smaller when it is formed on the surface 1e in the thickness direction of 1).
  • the piezoelectric vibrator is composed of two piezoelectric vibrators including a first piezoelectric vibrator and a second piezoelectric vibrator, and the first piezoelectric vibrator is formed on the surface 1 e in the thickness direction of the diaphragm 1.
  • the second piezoelectric vibrator may have a bimorph structure formed on the back surface 1b in the thickness direction of the diaphragm 1.
  • the weight member 5 is fixed to the other end 1c of the diaphragm 1 (a specific fixing method will be described later).
  • the weight member 5 is formed to include a heat-deformable material as will be described in detail later.
  • a molding material in which tungsten powder is mixed with polyamide resin, epoxy resin or the like (high heat resistance and high strength thermoplastic resin) is used as the thermally deformable material.
  • Tungsten is a very hard and heavy metal. Therefore, the weight member 5 mainly composed of a metal having such a high strength and high specific gravity has a bending rigidity larger than that of the diaphragm 1 due to the shape design centered on the thickness.
  • the natural frequency of the weight member 5 is determined to be 3 to 10 times the natural frequency of the diaphragm 1 on which the piezoelectric vibrating body 3 is formed. If the bending rigidity of the weight member 5 is larger than the bending rigidity of the diaphragm 1 as in this example, resonance between the diaphragm 1 and the weight member 5 is difficult to occur (that is, the vibration energy of the diaphragm 1 is less than the weight). It becomes difficult to be absorbed by the member 5). As a result, the vibration width of the diaphragm 1 can be increased with a small electric input, and the convergence time of vibration is shortened.
  • the weight member 5 has a shape extending toward the one end 1a of the diaphragm 1 with a space between the diaphragm member 1 and the diaphragm 1. Specifically, the weight member 5 has a shape having a base portion 5 c having a contact surface 5 b that comes into contact with the diaphragm 1 and a main body portion 5 d that is provided integrally with the base portion 5 c and extends along the diaphragm 1. It has become. As shown in FIGS. 2 to 4, one protrusion 5a is formed from the contact surface 5b of the base portion 5c.
  • a surface (opposing surface) 5e facing the diaphragm 1 (back surface 1b of the diaphragm 1) of the main body 5d is an inclined surface 5f that is inclined at a constant angle.
  • the inclined surface 5f is such that the gap between the back surface 1b of the diaphragm 1 and the facing surface 5e of the weight member 5 (main body portion 5d) is from the other end 1c side of the diaphragm 1 toward the one end 1b side of the diaphragm 1. Inclined to gradually increase.
  • the angle ⁇ between the back surface 1b of the diaphragm 1 and the facing surface 5e of the weight member 5 (main body portion 5d) is set so that the weight member 5 does not come into contact when the weight member 5 vibrates due to vibration of the diaphragm 1. Therefore, in this example, due to the presence of the inclined surface 5f formed on the weight member 5, the vibration plate 1 and the weight member 5 do not come into contact with each other even if the vibration width of the vibration plate 1 is increased. Further, by providing the inclined surface 5 f on the weight member 5, a space can be secured between the diaphragm 1 and the weight member 5.
  • the weight member 5 is not in contact with the piezoelectric vibrating body 3, so that the piezoelectric vibrating body 3 is not damaged. .
  • FIG. 4 is a plan view showing the embodiment of the piezoelectric vibrating device of the present invention (a plan view of the perspective view of FIG. 1 as viewed from above).
  • one through hole 1 d that penetrates the diaphragm 1 in the thickness direction is formed in the other end 1 c of the diaphragm 1.
  • the protrusion 5a of the weight member 5 is fitted into the through hole 1d of the diaphragm 1, and the tip of the protrusion 5a protrudes from the through hole 1d of the diaphragm 1.
  • a protrusion 5a of the weight member 5 is configured.
  • the weight member 5 is made of a material mainly composed of polyamide (high heat resistance and high strength thermoplastic resin), the weight member 5 fitted in the through hole 1d of the diaphragm 1 is used.
  • the weight member 5 can be easily and reliably attached to the diaphragm 1 by thermally deforming the tip of the projection 5a and cooling it at room temperature.
  • the through hole 1d has a non-circular shape, and the protrusion 5a has a non-circular cross-sectional shape to prevent the weight member 5 from rotating.
  • FIG. 5 is an enlarged perspective view showing a part (a mounting holder) of the piezoelectric vibration device (an exploded perspective view) of FIG. 2 in an enlarged manner.
  • FIG. 6 is a cut-away cross-sectional view of the piezoelectric vibration device (plan view) of FIG.
  • the mounting holder 9 is fixed so as to leave the terminal portion 3 d of the piezoelectric vibrating body 3 at one end 1 a of the diaphragm 1.
  • the mounting holder 9 is integrally formed with a plate-shaped welded portion 9a and a mounted portion 9b. As shown in FIG.
  • the welded portion 9a includes a welded surface 9c welded on a surface in the thickness direction of the diaphragm 1 (surface opposite to the surface facing the weight member 5) 1e, and the welded portion 9a. Is provided with one through hole 9d for fixing a fixing member 11 to be described later.
  • the surface 1e of the diaphragm 1 is joined to the welded portion 9a by, for example, spot welding via the welding surface 9c.
  • the attached portion 9b is provided with one through hole 9e for attaching the piezoelectric vibration device of this example to an electronic apparatus.
  • the welded portion 9a further includes a gap between the side surface 9f located on the one end 1a side of the diaphragm 1 and the welding surface 9c, and a side face 9g located on the other end 1c side of the diaphragm 1 and the welding surface 9c.
  • the curved surfaces 9h and 9i are respectively formed.
  • the gap between the side surface 9f located on the one end 1a side of the diaphragm 1 and the welding surface 9c and the other end 1c of the diaphragm 1 are set. Edges (corners or burrs) are not formed between the side surface 9g located on the side and the welding surface 9c.
  • the R surface may be used instead of the C surface.
  • FIG. 7 is a bottom view showing the embodiment of the piezoelectric vibrating device (a bottom view of the perspective view of FIG. 1 as viewed from below).
  • the diaphragm 1 constitutes a first input electrode of the piezoelectric vibrating body 3, and one electrode layer 3 b constituting a part of the piezoelectric vibrating body 3. Constitutes a second input electrode of the piezoelectric vibrator 3.
  • the contact portion 7a of the conductive brush 7 is in contact with the second input electrode (one electrode layer 3b). Specifically, the contact portion 7a of the conductive brush 7 is in contact with the end portion 3c of the second input electrode (one electrode layer 3b).
  • the conductive brush 7 is made of phosphor bronze, iron, stainless steel, or the like, and has a structure in which a contact portion 7a, a leaf spring portion 7b, and a connection terminal portion 7c are integrally formed.
  • the contact portion 7a of the conductive brush 7 is slidably in contact with the electrode layer 3b.
  • the leaf spring portion 7b is provided integrally with the contact portion 7a and generates a pressing force that presses the contact portion 7a against the electrode layer 3b.
  • the connecting terminal portion 7c is provided integrally with the leaf spring portion 7b and fixed to the fixing member 11, and a lead wire (not shown) is connected to the connecting terminal portion 7c.
  • the fixing member 11 is insert-molded with an electrically insulating material (insulating resin) using the conductive brush 7 (specifically, the connecting terminal portion 7c) as an insert. Therefore, the conductive brush 7 is securely fixed to the fixing member 11.
  • the fixing member 11 is formed using an electrically insulating material that can be thermally deformed (for example, various plastic materials such as nylon, ABS, PET, and PPS).
  • one through hole 1 f that penetrates in the thickness direction of the diaphragm 1 is formed at one end 1 a of the diaphragm 1.
  • the fixing member 11 is fitted into the through hole 1 f of the diaphragm 1 and the through hole 9 d of the mounting holder 9 with one end 1 a of the diaphragm 1 attached to the mounting holder 9, and the diaphragm 1.
  • the protrusion 11a is fitted into the through hole 1f of the diaphragm 1 and the through hole 9d of the mounting holder 9, and the tip of the protrusion 11a is connected to the through hole 1f and the through hole 1f.
  • the fixing member 11 is fixed to one end 1a of the diaphragm 1 fixed to the mounting holder 9 by thermally deforming the tip of the protrusion 11a while protruding from the through hole 9d. That is, the conductive brush 7 is fixed to the mounting holder 9 to which the diaphragm 1 is fixed via the fixing member 11.
  • the diaphragm 1 is used as the first input electrode of the piezoelectric vibrator 3 and the conductive brush 7 is brought into contact with the electrode layer 3b.
  • the brush 7 By bringing the brush 7 into sliding contact with the electrode layer 3b (second input electrode) of the piezoelectric vibrating body 3, electrical conduction can be reliably ensured.
  • the contact portion 7 a of the brush portion of the conductive brush 7 is reliably brought into contact with the electrode layer 3 b of the piezoelectric vibrating body 3 even when the diaphragm 1 vibrates by the leaf spring portion 7 b of the conductive brush 7. Can do.
  • the contact surface of the conductive brush 7 with the electrode layer 3b can be plated with gold, or conductive rubber can be used.
  • FIG. 8 is a perspective view of another embodiment of the piezoelectric vibration device of the present invention.
  • the same reference numerals as those used in FIGS. 1 to 7 are assigned to the same components as those described in FIGS. 1 to 7, and the description thereof is omitted.
  • the illustration of the fixing member 111 is omitted in order to facilitate explanation of other examples.
  • a conductive material having a wiring (not shown) whose one end is connected to the second input electrode (one electrode layer 103 b) and does not contact the diaphragm 101.
  • the flexible wiring board 107 is used.
  • the flexible wiring board 107 is made of polyimide, polyester, polyethylene terephthalate, liquid crystal polymer, or the like, and has a structure in which a contact portion 107a, a non-contact portion 107b, and a connection terminal portion 107c are integrally formed.
  • the contact portion 107a is provided at the other end of the flexible wiring board 107 and is in contact with the electrode layer 103b.
  • the non-contact portion 107b is provided integrally with the contact portion 107a and is configured to be deformable together with the contact portion so as to maintain contact between the contact portion 107a and the second input electrode.
  • connection terminal portion 107c is provided integrally with the non-contact portion 107b at one end of the flexible wiring board 107 and fixed to the fixing member 111, and a wiring (lead wire) (not shown) is connected to the connection terminal portion 107c. It is connected.
  • the flexible wiring board 107 (connecting terminal portion 107 c) and the wiring (lead wire) are configured to extend beyond one end 101 a of the diaphragm 101.
  • the fixing member 111 is insert-molded with an electrically insulating material (insulating resin) using the flexible wiring board 107 (specifically, the connecting terminal portion 107c) as an insert. Therefore, the flexible wiring board 107 is securely fixed to the fixing member 111.
  • the flexible wiring board 107 having flexibility when the flexible wiring board 107 having flexibility is brought into contact with the electrode layer 103b, the flexible wiring board 107 is deformed according to the bending of the vibration plate 101. As a result, even when the vibration width of the vibration plate 101 is increased, the flexible wiring board 107 is brought into contact with the electrode layer 103b (second input electrode) of the piezoelectric vibration member 103 to ensure electrical continuity. be able to.
  • the non-contact part 107 b of the flexible wiring board 107 ensures that the contact part 107 a of the brush part of the flexible wiring board 107 contacts the electrode layer 103 b of the piezoelectric vibrating body 103 even when the diaphragm 101 vibrates. Can be made.
  • connection failure hardly occurs in the electrical connection portion between the piezoelectric vibration member 103 and the lead wire.
  • the flexible wiring board 107 since the wear of the contact portion of the second input electrode (electrode layer 103b) with the flexible wiring board 107 is less than when the conductive brush 7 is used, long-term reliability is improved. Further improve.
  • the present invention can also be expressed as follows.
  • a piezoelectric vibrating device comprising a diaphragm having one end fixed, a piezoelectric vibrating body formed on the diaphragm, and a weight member fixed to the other end of the diaphragm,
  • the weight member has rigidity larger than that of the diaphragm, and has a shape extending toward the one end side of the diaphragm with a gap between the weight member and the diaphragm. Piezoelectric vibration device.
  • the weight member includes one or more protrusions that are formed by including a heat-deformable material and that are fitted into the one or more through-holes and have tips that protrude from the through-holes.
  • the weight member includes a base portion having a contact surface from which the one or more protrusions protrude and in contact with the diaphragm, and a main body portion provided integrally with the base portion and extending along the diaphragm.
  • the piezoelectric vibration device according to (5) wherein an inclined surface that is inclined at a certain angle is formed on a surface of the main body portion that faces the vibration plate.
  • the diaphragm is formed of a metal plate having one end constituting a terminal portion of the piezoelectric vibrator, A metal mounting holder fixed so as to leave the terminal portion at the one end of the diaphragm;
  • the mounting holder includes a plate-like welded portion having a welding surface welded on one of a pair of side surfaces opposed in the thickness direction of the diaphragm, and an attached portion provided integrally with the welded portion.
  • Part The welded portion has edges between the side surface located on the one end side of the diaphragm and the welding surface and between the side surface located on the other end side of the diaphragm and the welding surface, respectively.
  • the piezoelectric vibrator includes a piezoelectric ceramic layer and one electrode layer formed on a surface of the piezoelectric ceramic layer facing the weight member,
  • the diaphragm constitutes a first input electrode of the piezoelectric vibrator;
  • the one electrode layer constitutes a second input electrode of the piezoelectric vibrator;
  • the conductive brush includes a contact portion that slidably contacts the input electrode, a leaf spring portion that is provided integrally with the contact portion and generates a pressing force that presses the contact portion against the input electrode, and the leaf spring.
  • the piezoelectric vibration device according to any one of (1) to (7), further including a connection terminal portion that is provided integrally with a portion and attached to a fixing member that is fixed to the one end of the diaphragm.
  • the fixing member is made of an electrically insulating material, The piezoelectric vibration device according to (8), wherein the fixing member is insert-molded using the conductive brush as an insert.
  • the weight member having the bending rigidity larger than that of the diaphragm since the weight member having the bending rigidity larger than that of the diaphragm is adopted, it is possible to prevent the vibration member and the weight member from resonating to absorb the vibration of the diaphragm. For this reason, it is possible to reduce the decrease in the vibration width of the diaphragm and shorten the vibration convergence time. Further, since the weight member has a shape extending toward one end side of the diaphragm with a space between the diaphragm and the diaphragm, even if the volume of the weight member is increased, the weight member is separated from the diaphragm. It becomes difficult to hit. Therefore, the vibration width of the diaphragm can be increased without damaging the piezoelectric vibrating body.

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Abstract

Provided is a piezoelectric vibration device with vibrations that are easily sensed by a user and a short dissipation time for vibration. A vibration plate (1) is affixed on one end (1a). A piezoelectric oscillator (3) is formed on top of the vibration plate (1). An attachment holder (9) is affixed to the one end (1a) of the vibration plate (1) such that a terminal part (3d) of the piezoelectric oscillator (3) is left. A weight member (5) is attached to the other end (1c) of the vibration plate (1). The weight member (5) has a greater rigidity than the vibration plate (1). The natural frequency for the weight member (5) is set at three or more times the natural frequency of the vibration plate (1) on which the piezoelectric oscillator (3) is formed. The weight member (5) has a base part (5c) having a contact surface (5b) that is in contact with the vibration plate (1) and a main body part (5d) provided integrally with the base part (5c) and extending parallel to the vibration plate (1). An inclined surface (5f) is formed on a surface (5e) of the main body part (5d) that faces the vibration plate (1).

Description

圧電振動デバイスPiezoelectric vibration device
　本発明は、一端が固定された振動板の上に圧電振動体が形成され、振動板の他端に錘部材が固定されてなる圧電振動デバイスに関するものである。 The present invention relates to a piezoelectric vibration device in which a piezoelectric vibrating body is formed on a diaphragm having one end fixed, and a weight member is fixed to the other end of the diaphragm.
　近年、移動体通信機器である携帯電話の一形態であるスマートフォンが広く普及している。携帯電話において、使用環境により呼び出し音の代わりに機器自体を振動させて、使用者に通知する方法が採用されている。振動手段としては、通常、電磁式バイブレータが使用されている。電磁式バイブレータは、電磁モータのシャフトに偏心おもりを接合して構成され、呼び出し時には、電磁モータのシャフトに設けた偏心おもりが回転して振動を発生し、これが機器本体を振動させて使用者に知らせるものであるが、応答速度が遅く、使用者は若干遅れて検知する、また、消費電力が大きく電池使用時間が短くなるという問題がある。 In recent years, smartphones, which are one form of mobile phones that are mobile communication devices, have become widespread. A method of notifying a user by vibrating a device itself instead of a ringing tone according to a use environment is adopted in a mobile phone. As the vibration means, an electromagnetic vibrator is usually used. The electromagnetic vibrator is constructed by joining an eccentric weight to the shaft of the electromagnetic motor, and when calling, the eccentric weight provided on the shaft of the electromagnetic motor rotates to generate vibration, which vibrates the device main body to the user. As a notification, there is a problem that the response speed is slow, the user senses with a slight delay, and the power consumption is large and the battery usage time is shortened.
　特開平１１－２４４７８３号公報（特許文献１）の図１には、一端２が固定された板ばね１の上に圧電体５が形成され、板ばね１の他端３に重り４が固定された圧電バイブレータの構造が開示されている。 In FIG. 1 of Japanese Patent Laid-Open No. 11-244783 (Patent Document 1), a piezoelectric body 5 is formed on a plate spring 1 to which one end 2 is fixed, and a weight 4 is fixed to the other end 3 of the plate spring 1. A structure of a piezoelectric vibrator is disclosed.
　また、特開平８－３１４４６７号（特許文献２）の図３には、一端が固定された圧電振動板２と、圧電振動板２の他端に固定された錘３と、導体７，７を介して圧電振動板２に接続された接続端子部５，５とを備える圧電振動発音装置の構造が開示されている。 Further, in FIG. 3 of JP-A-8-314467 (Patent Document 2), a piezoelectric diaphragm 2 having one end fixed, a weight 3 fixed to the other end of the piezoelectric diaphragm 2, and conductors 7 and 7 are shown. There is disclosed a structure of a piezoelectric vibration sounding device including connection terminal portions 5 and 5 connected to a piezoelectric diaphragm 2 via a connection.
　これらの圧電振動デバイスは、電磁式バイブレータの問題を解決するために、携帯電話、スマートフォン等の小型電子機器に利用され、圧電部材に電圧を印加すると振動板が厚み方向に振動して、電子機器に振動を与えることにより、電子機器の利用者に対して振動による体感性を付与する用途で使用される。 These piezoelectric vibration devices are used in small electronic devices such as mobile phones and smartphones in order to solve the problems of electromagnetic vibrators. When a voltage is applied to the piezoelectric member, the vibration plate vibrates in the thickness direction, and the electronic device By applying vibration to the electronic device, it is used for the purpose of imparting sensory sensibility due to vibration to the user of the electronic device.
特開平１１－２４４７８３号公報Japanese Patent Laid-Open No. 11-244783 特開平８－３１４４６７号公報JP-A-8-314467
　しかしながら、携帯電話などの電子機器は薄型化、小型化、軽量化が商品開発の前提となり、また、従来の圧電振動デバイスでは錘を振動部の先端部のみに構成していたために、振動板に固定する錘の体積、すなわち重量を増やすには限界があった。加えて、圧電体の破壊限界のために、振動板の振動幅を大きくすることができず、圧電振動デバイスの発生する振動エネルギーは重量と振動振幅の２乗に比例するため、体感性に欠けるという問題があった。 However, electronic devices such as mobile phones are premised on product development in terms of thinning, miniaturization, and weight reduction, and in the conventional piezoelectric vibration device, the weight is configured only at the tip of the vibration part. There was a limit to increasing the volume of the weight to be fixed, that is, the weight. In addition, the vibration width of the diaphragm cannot be increased due to the fracture limit of the piezoelectric body, and the vibration energy generated by the piezoelectric vibration device is proportional to the square of the weight and the vibration amplitude, and thus lacks sensory sensibility. There was a problem.
　近年のスマートフォン等のタッチパネルを採用した電子機器では、画面へのタッチ時に即時に振動を発生させ、短い時間で振動を収束させることが要求されることに対応するものである。 In recent years, electronic devices employing touch panels such as smartphones respond to demands that vibrations are generated immediately upon touching the screen and the vibrations are converged in a short time.
　また、従来の圧電振動デバイスでは、振動板の振動により圧電部材と外部接続用の接続端子との接続部分で接続不良が発生し易いため、耐久性に劣るという問題を解決するものである。 Also, the conventional piezoelectric vibration device solves the problem of poor durability because a connection failure is likely to occur at the connection portion between the piezoelectric member and the connection terminal for external connection due to vibration of the diaphragm.
　すなわち、本発明の目的は、体感性に優れ、且つ振動の収束時間が短い圧電振動デバイスを提供することにある。 That is, an object of the present invention is to provide a piezoelectric vibration device having excellent body sensibility and a short vibration convergence time.
　本発明の他の目的は、耐久性が高い圧電振動デバイスを提供することにある。 Another object of the present invention is to provide a piezoelectric vibration device having high durability.
　本発明が改良の対象とする圧電振動デバイスは、一端が固定された振動板と、振動板の上に形成された圧電振動体と、振動板の他端に固定された錘部材とを備えている。ここで、振動板の上とは、振動板の錘部材と対向する面上及び振動板の錘部材と対向する面と反対側の面上のいずれか、または両方を意味する。すなわち、圧電振動体の配置構造としては、圧電振動体を振動板の厚み方向の表面または裏面に設けるユニモルフ構造、振動板の厚み方向の表面及び裏面の両方に設けるバイモルフ構造のいずれの配置構造を採用してもよい。また振動板の片面に設ける場合において、圧電振動体を多層構造としてもよい。 A piezoelectric vibrating device to be improved by the present invention includes a diaphragm having one end fixed, a piezoelectric vibrating body formed on the diaphragm, and a weight member fixed to the other end of the diaphragm. Yes. Here, “on the diaphragm” means either one or both of the surface of the diaphragm facing the weight member and the surface of the diaphragm opposite to the surface facing the weight member. That is, as the arrangement structure of the piezoelectric vibrator, any arrangement structure of a unimorph structure in which the piezoelectric vibrator is provided on the front surface or the back surface in the thickness direction of the diaphragm and a bimorph structure provided on both the front surface and the back surface in the thickness direction of the diaphragm is used. It may be adopted. In the case of providing on one side of the diaphragm, the piezoelectric vibrator may have a multilayer structure.
　本発明の圧電振動デバイスでは、振動板の他端部に固定された錘部材が振動板よりも大きな剛性を有しており、振動板との間に間隔を開けて振動板の一端側に向かって延びる形状を有している。振動板よりも大きな剛性を有する錘部材を採用すると、振動板と錘部材とが共振して振動板の振動エネルギーを錘部材が吸収するのを防ぐことができるため、振動板の振動幅の低下を小さくすることができる。また、振動の収束時間を短くすることができる。 In the piezoelectric vibration device of the present invention, the weight member fixed to the other end of the diaphragm has a rigidity higher than that of the diaphragm, and is spaced from the diaphragm toward one end of the diaphragm. The shape extends. When a weight member having rigidity greater than that of the diaphragm is adopted, the vibration member can be prevented from resonating and absorbing the vibration energy of the diaphragm, so that the vibration width of the diaphragm is reduced. Can be reduced. Further, the vibration convergence time can be shortened.
　なお、錘部材の固有振動数は、圧電振動体が形成された状態の振動板の固有振動数の３倍以上に定めるのが好ましい。ここで、「圧電振動体が形成された状態の振動板の固有振動数」とは、振動板に圧電振動体が形成された状態で得られる振動板の固有振動数を意味する。固有振動数が圧電振動体が形成された状態の振動板の３倍に未たない錘部材を用いると、振動板と錘部材とが共振して振動板の振動エネルギーが錘部材に吸収され易くなり、振動板の全体振動を大きくするために大きな駆動エネルギーが必要になる。つまり、駆動効率が低下し消費電力が大きくなる。また、錘部材自身の共振による振動が振動板に過度な力を加え、振動板の機械損失を誘発するという問題もある。さらに、錘部材の固有振動数は、圧電振動体が形成された状態の振動板の固有振動数の１０倍以内（すなわち３倍乃至１０倍）に定めるのが好ましい。固有振動数が圧電振動体が形成された状態の振動板の固有振動数の１０倍を超える錘部材を用いると、振動板の振動モードが変化してしまい、結局、大きな振動エネルギーを発生できなくなるからである。また、錘部材から振動板に与えられる力が大きくなる機械破壊を誘発することになるからである。加えて、振動の収束時間が却って長くなって好ましくないからである。なお、これらの問題点を確実に解消するためには、錘部材の固有振動数は、圧電振動体が形成された状態の振動板の固有振動数の７倍以下（すなわち３倍乃至７倍）に定めるのがより好ましい。 It should be noted that the natural frequency of the weight member is preferably determined to be at least three times the natural frequency of the diaphragm in which the piezoelectric vibrator is formed. Here, “the natural frequency of the diaphragm in a state where the piezoelectric vibrator is formed” means the natural frequency of the diaphragm obtained in a state where the piezoelectric vibrator is formed on the diaphragm. If a weight member whose natural frequency is not three times that of the diaphragm in which the piezoelectric vibrator is formed is used, the diaphragm and the weight member resonate and the vibration energy of the diaphragm is easily absorbed by the weight member. Therefore, a large drive energy is required to increase the overall vibration of the diaphragm. That is, drive efficiency is reduced and power consumption is increased. There is also a problem that vibration due to resonance of the weight member itself applies an excessive force to the diaphragm and induces mechanical loss of the diaphragm. Furthermore, it is preferable that the natural frequency of the weight member is set within 10 times (that is, 3 to 10 times) the natural frequency of the diaphragm in a state where the piezoelectric vibrator is formed. If a weight member having a natural frequency exceeding 10 times the natural frequency of the diaphragm in which the piezoelectric vibrator is formed is used, the vibration mode of the diaphragm changes, and consequently no large vibration energy can be generated. Because. Moreover, it is because the mechanical destruction to which the force given to a diaphragm from a weight member becomes large will be induced. In addition, the convergence time of vibration is undesirably long. In order to surely solve these problems, the natural frequency of the weight member is 7 times or less (that is, 3 to 7 times) the natural frequency of the diaphragm in a state where the piezoelectric vibrating body is formed. More preferably,
　なお、錘部材を固定した状態で振動板を振動させると、振動板の撓みは、錘部材と対向する面の撓みの方が、錘部材と対向する面と反対側の面の撓みよりも大きくなる傾向がある。そこで、より撓みが大きい振動板の錘部材と対向する面上に圧電振動体を形成すれば、圧電振動体により大きな駆動力を与えることができる。すなわち、圧電振動体を錘部材と対向する面上に形成することにより、圧電振動デバイスを利用する者の体感性を向上させることができる。 When the diaphragm is vibrated with the weight member fixed, the vibration of the diaphragm is greater on the surface facing the weight member than on the surface opposite to the surface facing the weight member. Tend to be. Therefore, if a piezoelectric vibrating body is formed on the surface of the diaphragm that is more bent than the weight member, a large driving force can be applied to the piezoelectric vibrating body. That is, by forming the piezoelectric vibrating body on the surface facing the weight member, it is possible to improve the sensibility of a person who uses the piezoelectric vibrating device.
　また、振動板の錘部材と対向する面とは反対側の面上に圧電振動体を形成すれば、振動板の錘部材と対向する面上に圧電振動体を形成した場合に比べて、圧電振動体が得られる駆動力は低下するものの、圧電振動体の寿命を長くすることができる。すなわち、圧電振動体を振動板の錘部材と対向する面とは反対側の面上に形成することにより、圧電振動デバイスの長期信頼性を高めることができる。 Also, if the piezoelectric vibrator is formed on the surface of the diaphragm opposite to the surface facing the weight member, the piezoelectric vibrator is formed in comparison with the case where the piezoelectric vibrator is formed on the surface of the diaphragm facing the weight member. Although the driving force for obtaining the vibrating body is reduced, the life of the piezoelectric vibrating body can be extended. That is, the long-term reliability of the piezoelectric vibrating device can be improved by forming the piezoelectric vibrating body on the surface of the diaphragm opposite to the surface facing the weight member.
　また、錘部材の形状を、振動板との間に間隔を開けて振動板の一端側に向かって延びる形状にすると、錘部材の体積を大きくしても、錘部材が振動板と当たり難くなるため、圧電振動体に損傷を与えることなく、振動板の振動幅を大きくすることができる。さらに、錘部材の形状を振動板の一端側に向かって細くなる形状にすると、同一体積（同一）のときに共振周波数を高くできるので設計の範囲が広がる。 In addition, when the weight member has a shape extending toward one end side of the diaphragm with a space between the diaphragm and the diaphragm, the weight member is difficult to hit the diaphragm even if the volume of the weight member is increased. Therefore, the vibration width of the diaphragm can be increased without damaging the piezoelectric vibrating body. Furthermore, if the shape of the weight member is narrowed toward the one end side of the diaphragm, the resonance frequency can be increased when the volume is the same (same), so the range of design is expanded.
　錘部材を振動板に固定する態様は任意である。例えば、振動板の他端に厚み方向に振動板を貫通する１以上の貫通孔を形成する。また、錘部材を熱変形可能な材料を含んで形成し且つ錘部材に１以上の貫通孔に嵌合されて先端が振動板の貫通孔から突出する１以上の突起を設ける。そして、１以上の貫通孔に嵌合された１以上の突起の先端を熱変形することにより、錘部材を振動板に固定してもよい。熱変形可能な材料としては、高比重かつ高強度の金属（例えばタングステン、モリブデン、真鍮、鉄系合金等）の粉末を、高耐熱性及び高強度の熱可塑性樹脂（例えばポリアミド、エポキシなど）に混ぜて成形したものを用いるのが好ましい。このような方法を用いると、振動板に対して錘部材を簡単かつ確実に取り付けることができる。 The mode of fixing the weight member to the diaphragm is arbitrary. For example, one or more through holes that penetrate the diaphragm in the thickness direction are formed at the other end of the diaphragm. In addition, the weight member is formed to include a thermally deformable material, and the weight member is provided with one or more protrusions that are fitted into the one or more through holes and the tip protrudes from the through hole of the diaphragm. Then, the weight member may be fixed to the diaphragm by thermally deforming the tips of the one or more protrusions fitted in the one or more through holes. As a heat-deformable material, high specific gravity and high-strength metal (for example, tungsten, molybdenum, brass, iron-based alloy, etc.) powder is converted into high heat resistance and high-strength thermoplastic resin (for example, polyamide, epoxy, etc.). It is preferable to use a mixture molded. When such a method is used, the weight member can be easily and reliably attached to the diaphragm.
　錘部材は、１以上の突起が突出し且つ振動板と接触する接触面を有する基部と、該基部と一体に設けられて振動板に沿って延びる本体部とを有する形状とすることができる。そして、この場合、本体部の振動板と対向する面には、一定の角度で傾斜する傾斜面が形成する。傾斜面は、振動板の錘部材に対向する面と本体部の振動板に対向する面との間の間隔が振動板の他端側から振動板の一端側に向かって徐々に大きくなるように傾斜させる。錘部材にこのような傾斜面を設けると、振動板の振動幅が大きくなっても振動板と錘部材とが接触し難しくなるため、振動幅の低下を防ぐことができる。また、振動板と錘部材との間にスペースを確保することができるため、振動板の錘部材に対向する面に圧電振動体を形成した場合でも、圧電振動体に錘部材が接触し難くなり、圧電振動体の損傷の発生を防ぐことができる。 The weight member may have a shape having a base portion having a contact surface from which one or more protrusions protrude and come into contact with the diaphragm, and a main body portion provided integrally with the base portion and extending along the diaphragm. In this case, an inclined surface inclined at a certain angle is formed on the surface of the main body portion facing the diaphragm. The inclined surface is formed so that the distance between the surface of the diaphragm facing the weight member and the surface of the main body facing the diaphragm gradually increases from the other end of the diaphragm toward one end of the diaphragm. Tilt. Providing such an inclined surface on the weight member makes it difficult for the diaphragm and the weight member to come into contact with each other even if the vibration width of the diaphragm is increased, so that a reduction in the vibration width can be prevented. In addition, since a space can be secured between the diaphragm and the weight member, even when a piezoelectric vibrator is formed on the surface of the diaphragm facing the weight member, the weight member is difficult to contact the piezoelectric vibrator. The occurrence of damage to the piezoelectric vibrator can be prevented.
　振動板の一端を固定する態様は任意である。本発明では、振動板として、振動板の一端が圧電振動体の端子部を構成するように形成された金属板を用い、さらに、振動板の一端に端子部を残すように固定された金属製の取付用ホルダを用いる。この場合、取付用ホルダには、振動板の厚み方向に対向する一対の側面の一方の上に溶接される溶接面を備えた板状の被溶接部と、該被溶接部と一体に設けられた被取付部とを形成するのが好ましい。ここで「振動板の厚み方向に対向する一対の側面の一方の上」とは、振動板の錘部材と対向する面上及び振動板の錘部材と対向する面と反対側の面上とのいずれかを意味する。取付用ホルダの被溶接部（溶接面）には、溶接により、金属製の振動板（金属板）が接合されるため、振動板の一端を確実に固定することができる。また、取付用ホルダの被取付部は、本発明の圧電振動デバイスを電子機器に取り付けることができる構造になっている。被取付部は被溶接部と一体に設けられているため、この取付用ホルダを用いることにより圧電振動デバイスを電子機器に確実に取り付けることができる。 ¡The mode of fixing one end of the diaphragm is arbitrary. In the present invention, as the diaphragm, a metal plate formed so that one end of the diaphragm constitutes a terminal portion of the piezoelectric vibrator, and further, a metal plate fixed so as to leave the terminal portion at one end of the diaphragm is used. Use the mounting holder. In this case, the mounting holder is integrally provided with a plate-like welded portion having a welding surface welded on one of a pair of side surfaces facing the thickness direction of the diaphragm, and the welded portion. It is preferable to form an attached portion. Here, “on one of the pair of side surfaces facing in the thickness direction of the diaphragm” means on the surface facing the weight member of the diaphragm and on the surface opposite to the surface facing the weight member of the diaphragm. Mean either. Since a metal diaphragm (metal plate) is joined to the welded portion (weld surface) of the mounting holder by welding, one end of the diaphragm can be securely fixed. Further, the mounted portion of the mounting holder has a structure that allows the piezoelectric vibration device of the present invention to be mounted on an electronic device. Since the attached portion is provided integrally with the welded portion, the piezoelectric vibrating device can be reliably attached to the electronic apparatus by using this attachment holder.
　金属製の取付用ホルダは、金属加工により製造された際に、取付用ホルダの溶接面と側面との間に角部及び／またはバリが生じる場合がある。このような角部またはバリは、振動板が振動することによって変形または摩耗して、振動板の振動特性を変化させてしまう。そのため、このような角部及び／またはバリの存在は、圧電振動デバイスの性能を低下させる原因となる。そこで、被溶接部には、さらに、振動板の一端側に位置する側面と溶接面との間及び振動板の他端側に位置する側面と溶接面との間に、それぞれエッジを有しない湾曲面を形成するのが好ましい。このような湾曲面を形成すると、振動板の一端側に位置する側面と溶接面との間及び振動板の他端側に位置する側面と溶接面との間に、エッジ（角部またはバリ）が形成されないため、振動板の振動幅が変化し難い圧電振動デバイスを提供することができる。なお、湾曲面の形状は、例えばＲ面または振動板側にバリの出ないＣ面に加工した形状のように、振動板の振動により変形または摩耗し難い形状であれば、どのような形状にしても良い。 When a metal mounting holder is manufactured by metal processing, corners and / or burrs may occur between the welding surface and the side surface of the mounting holder. Such corners or burrs are deformed or worn by the vibration of the diaphragm, and change the vibration characteristics of the diaphragm. Therefore, the presence of such corners and / or burrs causes the performance of the piezoelectric vibration device to deteriorate. Therefore, the welded part is further curved with no edges between the side surface located on one end side of the diaphragm and the welding surface and between the side surface located on the other end side of the diaphragm and the welding surface. Preferably, the surface is formed. When such a curved surface is formed, an edge (corner or burr) is formed between the side surface located on one end side of the diaphragm and the welding surface and between the side surface located on the other end side of the diaphragm and the welding surface. Is not formed, it is possible to provide a piezoelectric vibration device in which the vibration width of the diaphragm is difficult to change. The curved surface may be any shape as long as it is difficult to be deformed or worn by vibration of the diaphragm, such as a shape processed into an R surface or a C surface that does not have burrs on the diaphragm side. May be.
　本発明が対象とする圧電振動デバイスでは、圧電振動体に電圧を印加（入力）するためのリード線を圧電振動体に電気的に接続する必要がある。しかしながら、従来の圧電振動デバイスでは、リード線を圧電振動体の入力電力に直接接続していたので、振動板の振動により圧電振動体とリード線の接続部分に繰り返し曲げ力が加わるため、接続不良が発生し易いという問題がある。また、このような接続不良の問題は、振動板の振動幅を大きくする場合に一層顕著になる。そこで、このような問題を解決するためには、圧電振動体とリード線との接続部分に導電性ブラシを用いるのが好ましい。具体的には、圧電振動体は、圧電セラミック層と、この圧電セラミック層の錘部材と対向する面上に形成された１つの電極層とを備えている。この場合は、振動板が圧電振動体の第１の入力電極を構成し、１つの電極層が圧電振動体の第２の入力電極を構成する。この第２の入力電極に接触する導電性ブラシをさらに設ける。この導電性ブラシは、第２の入力電極とスライド可能に接触する接触部と、該接触部と一体に設けられて接触部を第２の入力電極に押しつける押圧力を発生する板バネ部と、該板バネ部と一体に設けられて振動板の一端に固定された固定部材に取り付けられてリード線と接続する接続用端子部とを備えた構成にすることができる。圧電振動体とリード線との接続部分をこのような導電性ブラシを用いた構造にすると、振動板の振動幅が大きくなっても、導電性ブラシが圧電振動体の第２の入力電極に確実に接触して電気的な導通を確保できるため、圧電振動体とリード線との電気的な接続部分に接続不良が発生し難い。また、導電性ブラシの板バネ部により、振動板の振動時でも導電性ブラシのブラシ部の接触部を圧電振動体の第２の入力電極に確実に接触させることができるため、圧電振動体とリード線との接続部分の接触不良の発生を有効に防ぐことができる。より高い信頼性を実現するためには、圧電振動体の第２の入力電極に接触する導電性ブラシのブラシ部の接触部に導電性ゴムを形成する。 In the piezoelectric vibrating device targeted by the present invention, it is necessary to electrically connect a lead wire for applying (inputting) a voltage to the piezoelectric vibrating body. However, in the conventional piezoelectric vibrating device, the lead wire is directly connected to the input power of the piezoelectric vibrating body, so the bending force is repeatedly applied to the connecting portion between the piezoelectric vibrating body and the lead wire due to vibration of the diaphragm, resulting in poor connection. There is a problem that is likely to occur. Further, such a problem of poor connection becomes more prominent when the vibration width of the diaphragm is increased. Therefore, in order to solve such a problem, it is preferable to use a conductive brush at the connection portion between the piezoelectric vibrator and the lead wire. Specifically, the piezoelectric vibrator includes a piezoelectric ceramic layer and one electrode layer formed on a surface of the piezoelectric ceramic layer facing the weight member. In this case, the diaphragm constitutes the first input electrode of the piezoelectric vibrator, and one electrode layer constitutes the second input electrode of the piezoelectric vibrator. A conductive brush in contact with the second input electrode is further provided. The conductive brush includes a contact portion that slidably contacts the second input electrode, a leaf spring portion that is provided integrally with the contact portion and generates a pressing force that presses the contact portion against the second input electrode, A connection terminal portion that is provided integrally with the leaf spring portion and is attached to a fixing member that is fixed to one end of the diaphragm and that is connected to a lead wire can be provided. When the connection portion between the piezoelectric vibrating body and the lead wire is structured using such a conductive brush, the conductive brush is surely connected to the second input electrode of the piezoelectric vibrating body even if the vibration width of the diaphragm increases. Since electrical continuity can be ensured by contacting, the poor connection is unlikely to occur at the electrical connection portion between the piezoelectric vibrating body and the lead wire. Further, the leaf spring portion of the conductive brush can reliably contact the contact portion of the brush portion of the conductive brush with the second input electrode of the piezoelectric vibrator even when the diaphragm is vibrating. Occurrence of poor contact at the connecting portion with the lead wire can be effectively prevented. In order to achieve higher reliability, conductive rubber is formed on the contact portion of the brush portion of the conductive brush that contacts the second input electrode of the piezoelectric vibrating body.
　固定部材は、一対の導電性ブラシをインサートとして、電気絶縁材料によりインサート成形するのが好ましい。固定部材をこのような構成にすると、導電性ブラシを固定部材に確実に固定することができる。 The fixing member is preferably insert-molded with an electrically insulating material using a pair of conductive brushes as inserts. When the fixing member has such a configuration, the conductive brush can be reliably fixed to the fixing member.
　また、導電性ブラシの代わりに導電性を有するフレキシブル配線基板を用いてもよい。このフレキシブル配線基板は、第２の入力電極に接続され且つ振動板とは接触しない配線を備えている。具体的には、フレキシブル配線基板の一端が第２の入力電極に接続し、フレキシブル配線基板及び配線は振動板の一端を越えて延びる構成を有する。フレキシブル配線基板は、それ自体が可撓性を有するため、振動板の撓みに応じて変形することができる。そのため、圧電振動体とリード線との接続部分をこのようなフレキシブル配線基板を用いた構造を採用すると、振動板の振動幅が大きくなっても、導電性ブラシが圧電振動体の第２の入力電極に確実に接触して電気的な導通を確保できるため、圧電振動体とリード線との電気的な接続部分に接続不良が発生し難くなる。また、導電性ブラシを用いる場合と同様に、振動板の振動時でもフレキシブル配線基板の接触部を圧電振動体の第２の入力電極に確実に接触させることができるため、圧電振動体とリード線との接続部分の接触不良の発生を有効に防ぐことができる。さらに、フレキシブル配線基板を用いることにより、導電性ブラシを用いる場合に比べて、第２の入力電極のフレキシブル配線基板との接触部分の摩耗が少なくなるため、長期信頼性がさらに向上する。 Also, a flexible wiring board having conductivity may be used instead of the conductive brush. The flexible wiring board includes a wiring that is connected to the second input electrode and does not contact the diaphragm. Specifically, one end of the flexible wiring board is connected to the second input electrode, and the flexible wiring board and the wiring extend beyond one end of the diaphragm. Since the flexible wiring board itself has flexibility, it can be deformed according to the bending of the diaphragm. For this reason, when a structure using such a flexible wiring board is employed for the connection portion between the piezoelectric vibrating body and the lead wire, the conductive brush becomes the second input of the piezoelectric vibrating body even if the vibration width of the diaphragm increases. Since it is possible to ensure electrical continuity by reliably contacting the electrode, poor connection is less likely to occur at the electrical connection portion between the piezoelectric vibrating body and the lead wire. Further, as in the case of using the conductive brush, the contact portion of the flexible wiring board can be reliably brought into contact with the second input electrode of the piezoelectric vibrator even when the diaphragm is vibrating. It is possible to effectively prevent the occurrence of poor contact at the connecting portion. Further, by using the flexible wiring board, the wear of the contact portion of the second input electrode with the flexible wiring board is reduced as compared with the case where the conductive brush is used, so that long-term reliability is further improved.
　また、導電性ブラシの代わりにフレキシブル配線基板を用いる場合は、フレキシブル配線基板をインサートとしてインサート成形すれば、フレキシブル配線基板を固定部材に確実に固定することができる。 Also, when a flexible wiring board is used instead of the conductive brush, the flexible wiring board can be securely fixed to the fixing member by insert molding using the flexible wiring board as an insert.
　なお、導電性ブラシがインサートされた固定部材を振動板の一端に固定する態様は任意である。本発明では、振動板の一端に振動板の厚み方向に貫通する１以上の貫通孔を形成する。また、取付用ホルダには、取付用ホルダに振動板が固定された状態で取付用ホルダの厚み方向に振動板の貫通孔と同心円状に貫通する１以上の貫通孔を形成する。さらに、電気絶縁材料として熱変形可能な材料（例えば、ナイロン、ＡＢＳ、ＰＥＴ、ＰＰＳなどの多くのプラスチック材料）を用いて固定部材を形成する。固定部材には、振動板の一端が取付用ホルダに取り付けられた状態で振動板の貫通孔及び取付用ホルダの貫通孔に嵌合され、かつ振動板の貫通孔及び取付用ホルダの貫通孔から突出する１以上の突起を設ける。そして、振動板の貫通孔及び取付用ホルダの貫通孔から突出する１以上の突起の先端を熱変形することにより、振動板が取付用ホルダに固定された状態で固定部材を振動板の一端に固定すればよい。このような固定部材を用いると、振動板が固定された取付用ホルダに固定部材を介して導電性ブラシを固定することができる。そのため、導電性ブラシのブラシ部の接触部と圧電振動体の入力電極との接触位置がずれることによる接触不良を防ぐことができる。 In addition, the aspect which fixes the fixing member with which the conductive brush was inserted to the end of a diaphragm is arbitrary. In the present invention, one or more through holes penetrating in the thickness direction of the diaphragm are formed at one end of the diaphragm. Further, the mounting holder is formed with one or more through holes that are concentrically penetrating with the through holes of the diaphragm in the thickness direction of the mounting holder in a state where the diaphragm is fixed to the mounting holder. Further, the fixing member is formed using a heat-deformable material (for example, many plastic materials such as nylon, ABS, PET, PPS) as the electrical insulating material. The fixing member is fitted into the through hole of the diaphragm and the mounting holder with one end of the diaphragm attached to the mounting holder, and from the through hole of the diaphragm and the mounting holder. One or more protruding protrusions are provided. Then, by thermally deforming the tip of one or more projections protruding from the through hole of the diaphragm and the through hole of the mounting holder, the fixing member is attached to one end of the diaphragm while the diaphragm is fixed to the mounting holder. Fix it. When such a fixing member is used, the conductive brush can be fixed to the mounting holder to which the diaphragm is fixed via the fixing member. Therefore, it is possible to prevent contact failure due to a shift in the contact position between the contact portion of the brush portion of the conductive brush and the input electrode of the piezoelectric vibrating body.
本発明の圧電振動デバイスの実施の形態を示す斜視図である。It is a perspective view which shows embodiment of the piezoelectric vibration device of this invention. 図１の斜視図を分解した分解斜視図である。It is the disassembled perspective view which decomposed | disassembled the perspective view of FIG. 図１の斜視図を正面側から見た正面図である。It is the front view which looked at the perspective view of FIG. 1 from the front side. 図１の斜視図を上側から見た平面図である。It is the top view which looked at the perspective view of FIG. 1 from the upper side. 図２の分解斜視図の一部を拡大して示した拡大斜視図である。It is the expansion perspective view which expanded and showed a part of exploded perspective view of FIG. 図４をＶ－Ｖ線に沿って切り欠いた断面を拡大して正面から見た切り欠き断面図である。FIG. 5 is a cutaway cross-sectional view of FIG. 4 as viewed from the front by enlarging a cross-section taken along the line VV. 図１の斜視図を下側から見た底面図である。It is the bottom view which looked at the perspective view of FIG. 1 from the lower side. 本発明の圧電振動デバイスの他の実施の形態を示す斜視図である。It is a perspective view which shows other embodiment of the piezoelectric vibration device of this invention.
　以下、図面を参照して本発明の実施の形態について説明する。図１は、本発明の圧電振動デバイスの一実施の形態の斜視図である。図２は、図１の圧電振動デバイス（斜視図）を分解して示した分解斜視図である。図３は、図１の斜視図を正面側から見た正面図である。図１乃至図３に示す圧電振動デバイスは、振動板１、圧電振動体３、錘部材５、導電性ブラシ７及び取付用ホルダ９を含んで構成されている。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of an embodiment of a piezoelectric vibration device of the present invention. FIG. 2 is an exploded perspective view showing the piezoelectric vibration device (perspective view) of FIG. 1 in an exploded manner. 3 is a front view of the perspective view of FIG. 1 viewed from the front side. The piezoelectric vibration device shown in FIGS. 1 to 3 includes a vibration plate 1, a piezoelectric vibration member 3, a weight member 5, a conductive brush 7, and a mounting holder 9.
　振動板１は、振動板１の一端１ａが圧電振動体３の端子部を構成するようにリン青銅、鉄系材料、ステンレス、ニッケル合金などからなる金属板で構成されおり、後に詳しく説明する金属製の取付用ホルダ９に固定されている。 The diaphragm 1 is composed of a metal plate made of phosphor bronze, iron-based material, stainless steel, nickel alloy or the like so that one end 1a of the diaphragm 1 constitutes a terminal portion of the piezoelectric vibrator 3, and a metal described in detail later. It is fixed to a mounting holder 9 made of metal.
　圧電振動体３は、チタン酸ジルコン酸鉛（ＰＺＴ）製、チタン酸鉛（ＰＴ）製などの圧電セラミック層３ａを含み、この圧電セラミック層３ａの上に１つの電極層３ｂが形成された構造を有している。圧電振動体３は、振動板１の上に接着剤を用いて接合されている。本例では、圧電振動体３として、振動板１の厚み方向の裏面（後述の錘部材５と対向する面）１ｂに設けられたユニモルフ構造の圧電振動体が採用されている。振動板１の撓みは、後述する振動板１の厚み方向の表面（錘部材５と対向する面とは反対側の面）１ｅよりも裏面１ｂの方が大きくなるため（すなわち、圧電振動体３を振動板１の厚み方向の表面１ｅに形成した場合よりも、振動板１の厚み方向の裏面１ｂに形成した場合の方が、圧電振動体３が得られる駆動力は大きくなるため）、ユーザの体感性を高めることができる。 The piezoelectric vibrator 3 includes a piezoelectric ceramic layer 3a made of lead zirconate titanate (PZT), lead titanate (PT) or the like, and one electrode layer 3b is formed on the piezoelectric ceramic layer 3a. have. The piezoelectric vibrator 3 is bonded onto the diaphragm 1 using an adhesive. In this example, as the piezoelectric vibrator 3, a piezoelectric vibrator having a unimorph structure provided on the back surface in the thickness direction of the diaphragm 1 (a surface facing a weight member 5 described later) 1b is employed. The deflection of the diaphragm 1 is larger on the back surface 1b than the surface 1e in the thickness direction of the diaphragm 1 described later (the surface opposite to the surface facing the weight member 5) 1e (that is, the piezoelectric vibrating body 3). Since the driving force to obtain the piezoelectric vibrating body 3 is larger when the is formed on the back surface 1b in the thickness direction of the diaphragm 1 than when it is formed on the front surface 1e in the thickness direction of the diaphragm 1) Can improve the sensibility.
　また、特に図示していないが、圧電振動体３が振動板１の厚み方向の表面１ｅに形成されたユニモルフ構造を採用してもよい。振動板１の撓みは、振動板１の厚み方向の裏面１ｂよりも表面１ｅの方が小さくなる（すなわち圧電振動体３を振動板１の厚み方向の裏面１ｂに形成した場合よりも、振動板１の厚み方向の表面１ｅに形成した場合の方が、圧電振動体３が得られる駆動力が小さくなる）。そのため、圧電振動体３を振動板１の厚み方向の表面１ｅに形成することにより、圧電振動デバイスを使用する者の体感性は低下するものの、圧電振動デバイスの製品寿命を長くすることができる。また、圧電振動体を第１の圧電振動体と第２の圧電振動体からなる二つの圧電振動体で構成し、第１の圧電振動体を振動板１の厚み方向の表面１ｅに形成した上で、さらに第２の圧電振動体を振動板１の厚み方向の裏面１ｂに形成したバイモルフ構造としてもよいのは勿論である。 Although not particularly illustrated, a unimorph structure in which the piezoelectric vibrating body 3 is formed on the surface 1e in the thickness direction of the diaphragm 1 may be employed. The deflection of the diaphragm 1 is smaller on the front surface 1e than on the back surface 1b in the thickness direction of the diaphragm 1 (that is, the diaphragm 1 is formed more than when the piezoelectric vibrating body 3 is formed on the back surface 1b in the thickness direction of the diaphragm 1). The driving force for obtaining the piezoelectric vibrating body 3 is smaller when it is formed on the surface 1e in the thickness direction of 1). Therefore, by forming the piezoelectric vibrating body 3 on the surface 1e in the thickness direction of the diaphragm 1, although the sensibility of the person using the piezoelectric vibrating device is lowered, the product life of the piezoelectric vibrating device can be extended. In addition, the piezoelectric vibrator is composed of two piezoelectric vibrators including a first piezoelectric vibrator and a second piezoelectric vibrator, and the first piezoelectric vibrator is formed on the surface 1 e in the thickness direction of the diaphragm 1. Of course, the second piezoelectric vibrator may have a bimorph structure formed on the back surface 1b in the thickness direction of the diaphragm 1.
　錘部材５は、振動板１の他端１ｃに固定されている（具体的な固定方法は後述する）。錘部材５は、後に詳しく説明するように熱変形可能な材料を含んで形成されている。熱変形可能な材料として、本例では、タングステンの粉末をポリアミド樹脂、エポキシ樹脂等（高耐熱性及び高強度の熱可塑性樹脂）に混ぜた成形材料を用いる。タングステンは非常に硬く重い金属である。したがって、このような高強度及び高比重の金属を主成分とする錘部材５は、厚みを中心とした形状設計により振動板１よりも大きな曲げ剛性を有する。具体的には、錘部材５の固有振動数が、圧電振動体３が形成された振動板１の固有振動数の３倍から１０倍になるように定められている。本例のように、錘部材５の曲げ剛性を振動板１の曲げ剛性よりも大きくすると、振動板１と錘部材５との共振が発生し難くなる（すなわち、振動板１の振動エネルギーが錘部材５に吸収され難くなる）。その結果、小さな電気入力で振動板１の振動幅を増大させることができる上に、振動の収束時間が短くなる。 The weight member 5 is fixed to the other end 1c of the diaphragm 1 (a specific fixing method will be described later). The weight member 5 is formed to include a heat-deformable material as will be described in detail later. In this example, a molding material in which tungsten powder is mixed with polyamide resin, epoxy resin or the like (high heat resistance and high strength thermoplastic resin) is used as the thermally deformable material. Tungsten is a very hard and heavy metal. Therefore, the weight member 5 mainly composed of a metal having such a high strength and high specific gravity has a bending rigidity larger than that of the diaphragm 1 due to the shape design centered on the thickness. Specifically, the natural frequency of the weight member 5 is determined to be 3 to 10 times the natural frequency of the diaphragm 1 on which the piezoelectric vibrating body 3 is formed. If the bending rigidity of the weight member 5 is larger than the bending rigidity of the diaphragm 1 as in this example, resonance between the diaphragm 1 and the weight member 5 is difficult to occur (that is, the vibration energy of the diaphragm 1 is less than the weight). It becomes difficult to be absorbed by the member 5). As a result, the vibration width of the diaphragm 1 can be increased with a small electric input, and the convergence time of vibration is shortened.
　錘部材５は、振動板１との間に間隔を開けて振動板１の一端１ａ側に向かって延びる形状を有している。具体的には、錘部材５の形状は、振動板１と接触する接触面５ｂを有する基部５ｃと、基部５ｃと一体に設けられて振動板１に沿って延びる本体部５ｄとを有する形状になっている。図２乃至図４に示すように、基部５ｃの接触面５ｂから１つの突起５ａが形成されている。本体部５ｄの振動板１（振動板１の裏面１ｂ）と対向する面（対向面）５ｅは、一定の角度で傾斜する傾斜面５ｆになっている。この傾斜面５ｆは、振動板１の裏面１ｂと錘部材５（本体部５ｄ）の対向面５ｅとの間の間隙が振動板１の他端１ｃ側から振動板１の一端１ｂ側に向かって徐々に大きくなるように傾斜している。振動板１の裏面１ｂと錘部材５（本体部５ｄ）の対向面５ｅとの間の角度θは、振動板１の振動によって錘部材５が振動する時に両者が接触しないように設定する。従って、本例では、錘部材５に形成された傾斜面５ｆの存在により、振動板１の振動幅が大きくなっても振動板１と錘部材５とが接触することはない。また、錘部材５に傾斜面５ｆを設けることによって、振動板１と錘部材５との間にスペースを確保することができる。そのため、本例のように圧電振動体３が振動板１の裏面１ｂに形成されている場合でも、圧電振動体３に錘部材５が接触しないので、圧電振動体３が損傷を受けることはない。 The weight member 5 has a shape extending toward the one end 1a of the diaphragm 1 with a space between the diaphragm member 1 and the diaphragm 1. Specifically, the weight member 5 has a shape having a base portion 5 c having a contact surface 5 b that comes into contact with the diaphragm 1 and a main body portion 5 d that is provided integrally with the base portion 5 c and extends along the diaphragm 1. It has become. As shown in FIGS. 2 to 4, one protrusion 5a is formed from the contact surface 5b of the base portion 5c. A surface (opposing surface) 5e facing the diaphragm 1 (back surface 1b of the diaphragm 1) of the main body 5d is an inclined surface 5f that is inclined at a constant angle. The inclined surface 5f is such that the gap between the back surface 1b of the diaphragm 1 and the facing surface 5e of the weight member 5 (main body portion 5d) is from the other end 1c side of the diaphragm 1 toward the one end 1b side of the diaphragm 1. Inclined to gradually increase. The angle θ between the back surface 1b of the diaphragm 1 and the facing surface 5e of the weight member 5 (main body portion 5d) is set so that the weight member 5 does not come into contact when the weight member 5 vibrates due to vibration of the diaphragm 1. Therefore, in this example, due to the presence of the inclined surface 5f formed on the weight member 5, the vibration plate 1 and the weight member 5 do not come into contact with each other even if the vibration width of the vibration plate 1 is increased. Further, by providing the inclined surface 5 f on the weight member 5, a space can be secured between the diaphragm 1 and the weight member 5. Therefore, even when the piezoelectric vibrating body 3 is formed on the back surface 1b of the diaphragm 1 as in this example, the weight member 5 is not in contact with the piezoelectric vibrating body 3, so that the piezoelectric vibrating body 3 is not damaged. .
　つぎに、錘部材５を振動板１に固定する構造を説明する。図４は、本発明の圧電振動デバイスの実施の形態を示す平面図（図１の斜視図を上側から見た平面図）である。図２に示すように、まず振動板１の他端１ｃに厚み方向に振動板１を貫通する１つの貫通孔１ｄを形成する。そして、図３及び図４に示すように、錘部材５の突起５ａが振動板１の貫通孔１ｄに嵌合されて、突起５ａの先端が振動板１の貫通孔１ｄから突出するように、錘部材５の突起５ａを構成する。上述のように、錘部材５はポリアミド（高耐熱性及び高強度の熱可塑性樹脂）を主成分とする材料により形成しているため、振動板１の貫通孔１ｄに嵌合された錘部材５の突起５ａの先端を熱変形して室温で冷却することにより、錘部材５を振動板１に対して簡単かつ確実に取り付けることができる。なお貫通孔１ｄの形状を非円形とし、且つ突起５ａの横断面形状を非円形とすることにより、錘部材５の回り止めが図られている。 Next, a structure for fixing the weight member 5 to the diaphragm 1 will be described. FIG. 4 is a plan view showing the embodiment of the piezoelectric vibrating device of the present invention (a plan view of the perspective view of FIG. 1 as viewed from above). As shown in FIG. 2, first, one through hole 1 d that penetrates the diaphragm 1 in the thickness direction is formed in the other end 1 c of the diaphragm 1. 3 and 4, the protrusion 5a of the weight member 5 is fitted into the through hole 1d of the diaphragm 1, and the tip of the protrusion 5a protrudes from the through hole 1d of the diaphragm 1. A protrusion 5a of the weight member 5 is configured. As described above, since the weight member 5 is made of a material mainly composed of polyamide (high heat resistance and high strength thermoplastic resin), the weight member 5 fitted in the through hole 1d of the diaphragm 1 is used. The weight member 5 can be easily and reliably attached to the diaphragm 1 by thermally deforming the tip of the projection 5a and cooling it at room temperature. The through hole 1d has a non-circular shape, and the protrusion 5a has a non-circular cross-sectional shape to prevent the weight member 5 from rotating.
　図５は、図２の圧電振動デバイス（分解斜視図）の一部（取付用ホルダ）を拡大して示した拡大斜視図である。図６は、図４の圧電振動デバイス（平面図）をＶ－Ｖ線に沿って切り欠いた断面を拡大した正面から見た切り欠き断面図である。図２、図４、図５及び図６に示すように、本実施の形態では、振動板１の一端１ａに圧電振動体３の端子部３ｄを残すように取付用ホルダ９が固定されている。取付用ホルダ９には、板状の被溶接部９ａと被取付部９ｂとが一体に形成されている。被溶接部９ａは、図５に示すように、振動板１の厚み方向の表面（錘部材５と対向する面と反対側の面）１ｅ上に溶接される溶接面９ｃと、被溶接部９ａのほぼ中心部に後述の固定部材１１を固定するための１つの貫通孔９ｄとを備えている。被溶接部９ａには、溶接面９ｃを介して、例えば、スポット溶接により、振動板１の表面１ｅが接合される。また、被取付部９ｂには、図５に示すように、本例の圧電振動デバイスを電子機器に取り付けるための１つの貫通孔９ｅが設けられている。 FIG. 5 is an enlarged perspective view showing a part (a mounting holder) of the piezoelectric vibration device (an exploded perspective view) of FIG. 2 in an enlarged manner. FIG. 6 is a cut-away cross-sectional view of the piezoelectric vibration device (plan view) of FIG. As shown in FIGS. 2, 4, 5, and 6, in the present embodiment, the mounting holder 9 is fixed so as to leave the terminal portion 3 d of the piezoelectric vibrating body 3 at one end 1 a of the diaphragm 1. . The mounting holder 9 is integrally formed with a plate-shaped welded portion 9a and a mounted portion 9b. As shown in FIG. 5, the welded portion 9a includes a welded surface 9c welded on a surface in the thickness direction of the diaphragm 1 (surface opposite to the surface facing the weight member 5) 1e, and the welded portion 9a. Is provided with one through hole 9d for fixing a fixing member 11 to be described later. The surface 1e of the diaphragm 1 is joined to the welded portion 9a by, for example, spot welding via the welding surface 9c. Further, as shown in FIG. 5, the attached portion 9b is provided with one through hole 9e for attaching the piezoelectric vibration device of this example to an electronic apparatus.
　被溶接部９ａには、さらに、振動板１の一端１ａ側に位置する側面９ｆと溶接面９ｃとの間及び振動板１の他端１ｃ側に位置する側面９ｇと溶接面９ｃとの間に、それぞれ湾曲面９ｈ及び９ｉが形成されている。本例では、湾曲面９ｈ及び９ｉがＣ面に面取り加工されて形成されているため、振動板１の一端１ａ側に位置する側面９ｆと溶接面９ｃとの間及び振動板１の他端１ｃ側に位置する側面９ｇと溶接面９ｃとの間に、エッジ（角部またはバリ）が形成されることはない。その結果、振動板が振動しても、取付用ホルダ９が変形または摩耗し難くなり、振動板１の振動幅を一定に保つことができる。ここでＣ面ではなく、Ｒ面でも良いことは言うまでもない。 The welded portion 9a further includes a gap between the side surface 9f located on the one end 1a side of the diaphragm 1 and the welding surface 9c, and a side face 9g located on the other end 1c side of the diaphragm 1 and the welding surface 9c. The curved surfaces 9h and 9i are respectively formed. In this example, since the curved surfaces 9h and 9i are formed by chamfering the C surface, the gap between the side surface 9f located on the one end 1a side of the diaphragm 1 and the welding surface 9c and the other end 1c of the diaphragm 1 are set. Edges (corners or burrs) are not formed between the side surface 9g located on the side and the welding surface 9c. As a result, even if the vibration plate vibrates, the mounting holder 9 is hardly deformed or worn, and the vibration width of the vibration plate 1 can be kept constant. Needless to say, the R surface may be used instead of the C surface.
　つぎに、圧電振動体３と図示しないリード線との接続部分の構造について説明する。図７は、圧電振動デバイスの実施の形態を示す底面図（図１の斜視図を下側から見た底面図）である。図１、図２及び図７に示すように、本例では、振動板１は圧電振動体３の第１の入力電極を構成し、圧電振動体３の一部を構成する１つの電極層３ｂは圧電振動体３の第２の入力電極を構成している。 Next, the structure of the connection portion between the piezoelectric vibrating body 3 and a lead wire (not shown) will be described. FIG. 7 is a bottom view showing the embodiment of the piezoelectric vibrating device (a bottom view of the perspective view of FIG. 1 as viewed from below). As shown in FIGS. 1, 2, and 7, in this example, the diaphragm 1 constitutes a first input electrode of the piezoelectric vibrating body 3, and one electrode layer 3 b constituting a part of the piezoelectric vibrating body 3. Constitutes a second input electrode of the piezoelectric vibrator 3.
　この第２の入力電極（１つの電極層３ｂ）には、導電性ブラシ７の接触部７ａが接触している。具体的には、導電性ブラシ７の接触部７ａは、第２の入力電極（１つの電極層３ｂ）の端部３ｃに接触している。導電性ブラシ７は、リン青銅、鉄、ステンレスなどからなり、接触部７ａと板バネ部７ｂと接続用端子部７ｃとが一体に形成された構造を有している。導電性ブラシ７の接触部７ａは、電極層３ｂとスライド可能に接触している。また板バネ部７ｂは、接触部７ａと一体に設けられて接触部７ａを電極層３ｂに押しつける押圧力を発生する。さらに、接続用端子部７ｃは、板バネ部７ｂと一体に設けられて固定部材１１に固定されており、接続用端子部７ｃには図示しないリード線が接続される。本例では、導電性ブラシ７（具体的には接続用端子部７ｃ）をインサートとして、固定部材１１が電気絶縁材料（絶縁樹脂）によりインサート成形されている。そのため、固定部材１１に対して導電性ブラシ７が確実に固定されている。なお、固定部材１１は、熱変形可能な電気絶縁材料（例えば、ナイロン、ＡＢＳ、ＰＥＴ、ＰＰＳなどの種々のプラスチック材料）を用いて形成されている。 The contact portion 7a of the conductive brush 7 is in contact with the second input electrode (one electrode layer 3b). Specifically, the contact portion 7a of the conductive brush 7 is in contact with the end portion 3c of the second input electrode (one electrode layer 3b). The conductive brush 7 is made of phosphor bronze, iron, stainless steel, or the like, and has a structure in which a contact portion 7a, a leaf spring portion 7b, and a connection terminal portion 7c are integrally formed. The contact portion 7a of the conductive brush 7 is slidably in contact with the electrode layer 3b. The leaf spring portion 7b is provided integrally with the contact portion 7a and generates a pressing force that presses the contact portion 7a against the electrode layer 3b. Furthermore, the connecting terminal portion 7c is provided integrally with the leaf spring portion 7b and fixed to the fixing member 11, and a lead wire (not shown) is connected to the connecting terminal portion 7c. In this example, the fixing member 11 is insert-molded with an electrically insulating material (insulating resin) using the conductive brush 7 (specifically, the connecting terminal portion 7c) as an insert. Therefore, the conductive brush 7 is securely fixed to the fixing member 11. The fixing member 11 is formed using an electrically insulating material that can be thermally deformed (for example, various plastic materials such as nylon, ABS, PET, and PPS).
　図２に示すように、本例では、振動板１の一端１ａに振動板１の厚み方向に貫通する１つ貫通孔１ｆが形成されている。また、固定部材１１には、振動板１の一端１ａが取付用ホルダ９に取り付けられた状態で振動板１の貫通孔１ｆ及び取付用ホルダ９の貫通孔９ｄに嵌合され、かつ振動板１の貫通孔１ｆ及び取付用ホルダ９（被溶接部９ａ）の貫通孔９ｄから突出する１つの突起１１ａが設けられている。本例では、図２，図４及び図６に示すように、突起１１ａを振動板１の貫通孔１ｆ及び取付用ホルダ９の貫通孔９ｄに嵌合し、突起１１ａの先端が貫通孔１ｆ及び貫通孔９ｄから突出した状態で、突起１１ａの先端を熱変形することにより、取付用ホルダ９に固定された振動板１の一端１ａに固定部材１１が固定される。すなわち、振動板１が固定された取付用ホルダ９に固定部材１１を介して導電性ブラシ７が固定される。その結果、導電性ブラシ７の接触部７ａと振動板１に形成された圧電振動体３の電極層３ｂ（第２の入力電極３ｂ）との接触位置の位置ずれによる接触不良を防ぐことができる。 As shown in FIG. 2, in this example, one through hole 1 f that penetrates in the thickness direction of the diaphragm 1 is formed at one end 1 a of the diaphragm 1. Further, the fixing member 11 is fitted into the through hole 1 f of the diaphragm 1 and the through hole 9 d of the mounting holder 9 with one end 1 a of the diaphragm 1 attached to the mounting holder 9, and the diaphragm 1. There is provided one protrusion 11a protruding from the through hole 1f and the through hole 9d of the mounting holder 9 (welded portion 9a). In this example, as shown in FIGS. 2, 4 and 6, the protrusion 11a is fitted into the through hole 1f of the diaphragm 1 and the through hole 9d of the mounting holder 9, and the tip of the protrusion 11a is connected to the through hole 1f and the through hole 1f. The fixing member 11 is fixed to one end 1a of the diaphragm 1 fixed to the mounting holder 9 by thermally deforming the tip of the protrusion 11a while protruding from the through hole 9d. That is, the conductive brush 7 is fixed to the mounting holder 9 to which the diaphragm 1 is fixed via the fixing member 11. As a result, it is possible to prevent contact failure due to displacement of the contact position between the contact portion 7 a of the conductive brush 7 and the electrode layer 3 b (second input electrode 3 b) of the piezoelectric vibrating body 3 formed on the vibration plate 1. .
　このように本例では、振動板１を圧電振動体３の第１の入力電極とし、導電性ブラシ７を電極層３ｂに接触させたため、振動板１の振動幅が大きくなっても、導電性ブラシ７を圧電振動体３の電極層３ｂ（第２の入力電極）とスライド接触させることにより、確実に電気的な導通を確保することができる。また、本例では、導電性ブラシ７の板バネ部７ｂによって、振動板１の振動時でも導電性ブラシ７のブラシ部の接触部７ａを圧電振動体３の電極層３ｂに確実に接触させることができる。そのため、本例の圧電振動デバイスでは、圧電振動体３とリード線との電気的接続部分に接続不良が発生し難い。ここで、長期信頼性の向上には、導電性ブラシ７の電極層３ｂとの接触面に金メッキを施す、あるいは導電性のゴムを用いることができる。 As described above, in this example, the diaphragm 1 is used as the first input electrode of the piezoelectric vibrator 3 and the conductive brush 7 is brought into contact with the electrode layer 3b. By bringing the brush 7 into sliding contact with the electrode layer 3b (second input electrode) of the piezoelectric vibrating body 3, electrical conduction can be reliably ensured. Further, in this example, the contact portion 7 a of the brush portion of the conductive brush 7 is reliably brought into contact with the electrode layer 3 b of the piezoelectric vibrating body 3 even when the diaphragm 1 vibrates by the leaf spring portion 7 b of the conductive brush 7. Can do. For this reason, in the piezoelectric vibration device of this example, a connection failure hardly occurs in the electrical connection portion between the piezoelectric vibrating body 3 and the lead wire. Here, in order to improve long-term reliability, the contact surface of the conductive brush 7 with the electrode layer 3b can be plated with gold, or conductive rubber can be used.
　図８は、本発明の圧電振動デバイスの他の実施の形態の斜視図である。なお、図８では、図１乃至７で説明した構成部分と共通する構成部分に、図１乃至７で用いた符号の数に１００の符号を付して説明を省略する。また、他の例の説明を容易にするため、固定部材１１１の図示を省略している。図８に示す例では、導電性ブラシ７の代わりに、一端が第２の入力電極（１つの電極層１０３ｂ）に接続され且つ振動板１０１とは接触しない配線（図示せず）を有する導電性のフレキシブル配線基板１０７を採用している。フレキシブル配線基板１０７は、ポリイミド、ポリエステル、ポリエチレンテレフタレート、液晶ポリマー等からなり、接触部１０７ａと非接触部１０７ｂと接続用端子部１０７ｃとが一体に形成された構造を有している。接触部１０７ａは、フレキシブル配線基板１０７の他端に設けられて、電極層１０３ｂと接触している。また、非接触部１０７ｂは、接触部１０７ａと一体に設けられて接触部１０７ａと第２の入力電極との接触を維持するように接触部と一緒に変形し得るように構成されている。さらに、接続用端子部１０７ｃは、フレキシブル配線基板１０７の一端に非接触部１０７ｂと一体に設けられて固定部材１１１に固定されており、接続用端子部１０７ｃには図示しない配線（リード線）が接続されている。フレキシブル配線基板１０７（接続用端子部１０７ｃ）及び配線（リード線）は、振動板１０１の一端１０１ａを越えて延びるように構成されている。 FIG. 8 is a perspective view of another embodiment of the piezoelectric vibration device of the present invention. In FIG. 8, the same reference numerals as those used in FIGS. 1 to 7 are assigned to the same components as those described in FIGS. 1 to 7, and the description thereof is omitted. Further, the illustration of the fixing member 111 is omitted in order to facilitate explanation of other examples. In the example shown in FIG. 8, instead of the conductive brush 7, a conductive material having a wiring (not shown) whose one end is connected to the second input electrode (one electrode layer 103 b) and does not contact the diaphragm 101. The flexible wiring board 107 is used. The flexible wiring board 107 is made of polyimide, polyester, polyethylene terephthalate, liquid crystal polymer, or the like, and has a structure in which a contact portion 107a, a non-contact portion 107b, and a connection terminal portion 107c are integrally formed. The contact portion 107a is provided at the other end of the flexible wiring board 107 and is in contact with the electrode layer 103b. The non-contact portion 107b is provided integrally with the contact portion 107a and is configured to be deformable together with the contact portion so as to maintain contact between the contact portion 107a and the second input electrode. Further, the connection terminal portion 107c is provided integrally with the non-contact portion 107b at one end of the flexible wiring board 107 and fixed to the fixing member 111, and a wiring (lead wire) (not shown) is connected to the connection terminal portion 107c. It is connected. The flexible wiring board 107 (connecting terminal portion 107 c) and the wiring (lead wire) are configured to extend beyond one end 101 a of the diaphragm 101.
　この他の例では、フレキシブル配線基板１０７（具体的には接続用端子部１０７ｃ）をインサートとして、固定部材１１１が電気絶縁材料（絶縁樹脂）によりインサート成形されている。そのため、固定部材１１１に対してフレキシブル配線基板１０７が確実に固定される。 In this other example, the fixing member 111 is insert-molded with an electrically insulating material (insulating resin) using the flexible wiring board 107 (specifically, the connecting terminal portion 107c) as an insert. Therefore, the flexible wiring board 107 is securely fixed to the fixing member 111.
　この他の例のように、可撓性を有するフレキシブル配線基板１０７を電極層１０３ｂに接触させると、フレキシブル配線基板１０７が振動板１０１の撓みに応じて変形する。その結果、振動板１０１の振動幅が大きくなっても、フレキシブル配線基板１０７を圧電振動体１０３の電極層１０３ｂ（第２の入力電極）と接触させることにより、確実に電気的な導通を確保することができる。また、この他の例では、フレキシブル配線基板１０７の非接触部１０７ｂによって、振動板１０１の振動時でもフレキシブル配線基板１０７のブラシ部の接触部１０７ａを圧電振動体１０３の電極層１０３ｂに確実に接触させることができる。そのため、本例の圧電振動デバイスでは、圧電振動体１０３とリード線との電気的接続部分に接続不良が発生し難い。フレキシブル配線基板１０７を用いる場合は、導電性ブラシ７を用いる場合に比べて、第２の入力電極（電極層１０３ｂ）のフレキシブル配線基板１０７との接触部分の摩耗が少なくなるため、長期信頼性がさらに向上する。 As in this other example, when the flexible wiring board 107 having flexibility is brought into contact with the electrode layer 103b, the flexible wiring board 107 is deformed according to the bending of the vibration plate 101. As a result, even when the vibration width of the vibration plate 101 is increased, the flexible wiring board 107 is brought into contact with the electrode layer 103b (second input electrode) of the piezoelectric vibration member 103 to ensure electrical continuity. be able to. In another example, the non-contact part 107 b of the flexible wiring board 107 ensures that the contact part 107 a of the brush part of the flexible wiring board 107 contacts the electrode layer 103 b of the piezoelectric vibrating body 103 even when the diaphragm 101 vibrates. Can be made. For this reason, in the piezoelectric vibration device of this example, connection failure hardly occurs in the electrical connection portion between the piezoelectric vibration member 103 and the lead wire. When the flexible wiring board 107 is used, since the wear of the contact portion of the second input electrode (electrode layer 103b) with the flexible wiring board 107 is less than when the conductive brush 7 is used, long-term reliability is improved. Further improve.
　なお、本発明は、以下のように表現することも可能である。 The present invention can also be expressed as follows.
　（１）一端が固定された振動板と、前記振動板の上に形成された圧電振動体と、前記振動板の他端に固定された錘部材とを備えた圧電振動デバイスであって、
　前記錘部材は、前記振動板よりも大きな剛性を有しており、且つ前記振動板との間に間隔を開けて前記振動板の前記一端側に向かって延びる形状を有していることを特徴とする圧電振動デバイス。 (1) A piezoelectric vibrating device comprising a diaphragm having one end fixed, a piezoelectric vibrating body formed on the diaphragm, and a weight member fixed to the other end of the diaphragm,
The weight member has rigidity larger than that of the diaphragm, and has a shape extending toward the one end side of the diaphragm with a gap between the weight member and the diaphragm. Piezoelectric vibration device.
　（２）前記錘部材の固有振動数が、前記圧電振動体が形成された状態の前記振動板の固有振動数の３倍乃至１０倍に定められている上記（１）に記載の圧電振動デバイス。 (2) The piezoelectric vibration device according to (1), wherein the natural frequency of the weight member is set to 3 to 10 times the natural frequency of the diaphragm in a state where the piezoelectric vibrating body is formed. .
　（３）前記圧電振動体が、前記振動板の前記錘部材と対向する面とは反対側の面上に形成されている上記（１）または（２）に記載の圧電振動デバイス。 (3) The piezoelectric vibration device according to (1) or (2), wherein the piezoelectric vibrating body is formed on a surface of the diaphragm opposite to the surface facing the weight member.
　（４）前記圧電振動体が、前記振動板の前記錘部材と対向する面上に形成されている上記（１）または（２）に記載の圧電振動デバイス。 (4) The piezoelectric vibrating device according to (1) or (2), wherein the piezoelectric vibrating body is formed on a surface of the vibrating plate facing the weight member.
　（５）前記振動板の前記他端には厚み方向に前記振動板を貫通する１以上の貫通孔が形成されており、
　前記錘部材は、熱変形可能な材料を含んで形成され且つ前記１以上の貫通孔に嵌合されて先端が前記貫通孔から突出する１以上の突起を有しており、
　前記１以上の貫通孔に嵌合された前記１以上の突起の前記先端が熱変形させられて、前記錘部材が前記振動板に固定されている上記（１）または（２）に記載の圧電振動デバイス。 (5) One or more through holes penetrating the diaphragm in the thickness direction are formed at the other end of the diaphragm,
The weight member includes one or more protrusions that are formed by including a heat-deformable material and that are fitted into the one or more through-holes and have tips that protrude from the through-holes.
The piezoelectric element according to (1) or (2), wherein the tip end of the one or more protrusions fitted in the one or more through holes is thermally deformed, and the weight member is fixed to the diaphragm. Vibration device.
　（６）前記錘部材は、前記１以上の突起が突出し且つ前記振動板と接触する接触面を有する基部と、該基部と一体に設けられて前記振動板に沿って延びる本体部とを有しており、
　前記本体部の前記振動板と対向する面には、一定の角度で傾斜する傾斜面が形成されている上記（５）に記載の圧電振動デバイス。 (6) The weight member includes a base portion having a contact surface from which the one or more protrusions protrude and in contact with the diaphragm, and a main body portion provided integrally with the base portion and extending along the diaphragm. And
The piezoelectric vibration device according to (5), wherein an inclined surface that is inclined at a certain angle is formed on a surface of the main body portion that faces the vibration plate.
　（７）前記振動板は前記一端が前記圧電振動体の端子部を構成する金属板から形成され、
　前記振動板の前記一端に前記端子部を残すように固定された金属製の取付用ホルダを更に備え、
　前記取付用ホルダは、前記振動板の厚み方向に対向する一対の側面の一方の上に溶接される溶接面を備えた板状の被溶接部及び該被溶接部と一体に設けられた被取付部を備え、
　前記被溶接部には、前記振動板の前記一端側に位置する側面と前記溶接面との間及び前記振動板の前記他端側に位置する側面と前記溶接面との間に、それぞれエッジを有しない湾曲面が形成されていることを特徴とする上記（１）乃至（６）のいずれかに記載の圧電振動デバイス。 (7) The diaphragm is formed of a metal plate having one end constituting a terminal portion of the piezoelectric vibrator,
A metal mounting holder fixed so as to leave the terminal portion at the one end of the diaphragm;
The mounting holder includes a plate-like welded portion having a welding surface welded on one of a pair of side surfaces opposed in the thickness direction of the diaphragm, and an attached portion provided integrally with the welded portion. Part
The welded portion has edges between the side surface located on the one end side of the diaphragm and the welding surface and between the side surface located on the other end side of the diaphragm and the welding surface, respectively. The piezoelectric vibration device according to any one of (1) to (6) above, wherein a curved surface that does not have is formed.
　（８）前記圧電振動体は、圧電セラミック層と、該圧電セラミック層の前記錘部材と対向する面上に形成された１つの電極層とを備えており、
　前記振動板が前記圧電振動体の第１の入力電極を構成し、
　前記１つの電極層が前記圧電振動体の第２の入力電極を構成し、
　前記第２の入力電極に接触する導電性ブラシをさらに備え、
　前記導電性ブラシは、前記入力電極とスライド可能に接触する接触部と、該接触部と一体に設けられて前記接触部を前記入力電極に押しつける押圧力を発生する板バネ部と、該板バネ部と一体に設けられて前記振動板の前記一端に固定された固定部材に取り付けられた接続用端子部とを備えている上記（１）乃至（７）のいずれかに記載の圧電振動デバイス。 (8) The piezoelectric vibrator includes a piezoelectric ceramic layer and one electrode layer formed on a surface of the piezoelectric ceramic layer facing the weight member,
The diaphragm constitutes a first input electrode of the piezoelectric vibrator;
The one electrode layer constitutes a second input electrode of the piezoelectric vibrator;
A conductive brush in contact with the second input electrode;
The conductive brush includes a contact portion that slidably contacts the input electrode, a leaf spring portion that is provided integrally with the contact portion and generates a pressing force that presses the contact portion against the input electrode, and the leaf spring. The piezoelectric vibration device according to any one of (1) to (7), further including a connection terminal portion that is provided integrally with a portion and attached to a fixing member that is fixed to the one end of the diaphragm.
　（９）前記固定部材は、電気絶縁材料により形成されており、
　前記固定部材は、前記導電性ブラシをインサートとして、インサート成形されている上記（８）に記載の圧電振動デバイス。 (9) The fixing member is made of an electrically insulating material,
The piezoelectric vibration device according to (8), wherein the fixing member is insert-molded using the conductive brush as an insert.
　以上、本発明の実施の形態について具体的に説明したが、本発明は、これらの実施の形態及び実施例に限定されるものではなく、本発明の技術的思想の範囲内で変更が可能であるのは勿論である。 Although the embodiments of the present invention have been specifically described above, the present invention is not limited to these embodiments and examples, and can be modified within the scope of the technical idea of the present invention. Of course there is.
　本発明によれば、振動板よりも大きな曲げ剛性を有する錘部材を採用するため、振動板と錘部材とが共振して振動板の振動を錘部材が吸収するのを防ぐことができる。そのため、振動板の振動幅の低下を小さくすることができる上に、振動の収束時間を短くすることができる。また、錘部材の形状が、振動板との間に間隔を開けて振動板の一端側に向かって延びる形状になっているため、錘部材の体積を大きくしても、錘部材が振動板と当たり難くなる。そのため、圧電振動体に損傷を与えることなく、振動板の振動幅を大きくすることができる。 According to the present invention, since the weight member having the bending rigidity larger than that of the diaphragm is adopted, it is possible to prevent the vibration member and the weight member from resonating to absorb the vibration of the diaphragm. For this reason, it is possible to reduce the decrease in the vibration width of the diaphragm and shorten the vibration convergence time. Further, since the weight member has a shape extending toward one end side of the diaphragm with a space between the diaphragm and the diaphragm, even if the volume of the weight member is increased, the weight member is separated from the diaphragm. It becomes difficult to hit. Therefore, the vibration width of the diaphragm can be increased without damaging the piezoelectric vibrating body.
　１　振動板（第１の入力電極）
　１ａ　一端
　１ｃ　他端
　１ｄ　貫通孔
　３　圧電振動体
　３ａ　圧電セラミック層
　３ｂ　電極層（第２の入力電極）
　３ｄ　端子部
　５　錘部材
　５ａ　突起
　５ｂ　接触面
　５ｃ　基部
　５ｄ　本体部
　５ｆ　傾斜面
　７　導電性ブラシ
　７ａ　接触部
　７ｂ　板バネ部
　７ｃ　接続用端子部
　９　取付用ホルダ
　９ａ　被溶接部
　９ｂ　被取付部
　９ｃ　溶接面
　９ｆ，９ｇ　側面
　９ｉ　湾曲面
　１１　固定部材 1 Diaphragm (first input electrode)
1a one end 1c other end 1d through hole 3 piezoelectric vibrating body 3a piezoelectric ceramic layer 3b electrode layer (second input electrode)
3d terminal portion 5 weight member 5a protrusion 5b contact surface 5c base portion 5d body portion 5f inclined surface 7 conductive brush 7a contact portion 7b leaf spring portion 7c connecting terminal portion 9 mounting holder 9a welded portion 9b attached portion 9c welding surface 9f, 9g Side surface 9i Curved surface 11 Fixing member

Claims (12)

  1. 　一端が固定された金属製の振動板と、
    　前記振動板の上に形成された圧電振動体と、
    　前記振動板の他端に固定された錘部材とを備えた圧電振動デバイスであって、
    　前記錘部材は、前記振動板よりも大きな剛性を有しており、前記錘部材の固有振動数が、前記圧電振動体が形成された状態の前記振動板の固有振動数の３倍乃至１０倍に定められており、
    　前記錘部材は、前記振動板と接触する接触面を有する基部と、該基部と一体に設けられて前記振動板に沿って延びる本体部とを有しており、前記本体部の前記振動板と対向する面には、傾斜面が形成されており、
    　前記圧電振動体が、前記振動板の前記錘部材と対向する面とは反対側の面上及び／または前記振動板の前記錘部材と対向する面上に形成されており、
    　前記振動板の前記他端には厚み方向に前記振動板を貫通する１以上の貫通孔が形成されており、
    　前記錘部材は、熱変形可能な材料を含んで形成され且つ前記１以上の貫通孔に嵌合されて先端が前記貫通孔から突出する１以上の突起を有しており、
    　前記１以上の貫通孔に嵌合された前記１以上の突起の前記先端が熱変形させられて、前記錘部材が前記振動板に固定されており、
    　前記振動板は前記一端が前記圧電振動体の端子部を構成する金属板から形成され、
    　前記振動板の前記一端に前記端子部を残すように固定された金属製の取付用ホルダを更に備え、
    　前記取付用ホルダは、前記振動板の厚み方向に対向する一対の側面の一方の上に溶接される溶接面を備えた板状の被溶接部及び該被溶接部と一体に設けられた被取付部を備え、
    　前記被溶接部には、前記振動板の前記一端側に位置する側面と前記溶接面との間及び前記振動板の前記他端側に位置する側面と前記溶接面との間に、それぞれエッジを有しない湾曲面が形成されており、
    　前記圧電振動体は、圧電セラミック層と、該圧電セラミック層の前記錘部材と対向する面上に形成された１つの電極層とを備えており、
    　前記振動板が前記圧電振動体の第１の入力電極を構成し、
    　前記１つの電極層が前記圧電振動体の第２の入力電極を構成している圧電振動デバイス。     A metal diaphragm with one end fixed;
    A piezoelectric vibrator formed on the diaphragm;
    A piezoelectric vibration device comprising a weight member fixed to the other end of the diaphragm,
    The weight member has greater rigidity than the diaphragm, and the natural frequency of the weight member is 3 to 10 times the natural frequency of the diaphragm in a state where the piezoelectric vibrator is formed. It is stipulated in
    The weight member includes a base portion having a contact surface that comes into contact with the diaphragm, and a main body portion that is provided integrally with the base portion and extends along the diaphragm, and the diaphragm member of the main body portion includes: An inclined surface is formed on the opposite surface,
    The piezoelectric vibrating body is formed on a surface of the diaphragm opposite to the surface facing the weight member and / or on a surface facing the weight member of the diaphragm;
    One or more through holes penetrating the diaphragm in the thickness direction are formed at the other end of the diaphragm,
    The weight member includes one or more protrusions that are formed by including a heat-deformable material and that are fitted into the one or more through-holes and have tips that protrude from the through-holes.
    The tip of the one or more protrusions fitted in the one or more through-holes is thermally deformed, and the weight member is fixed to the diaphragm;
    The diaphragm is formed of a metal plate whose one end constitutes a terminal portion of the piezoelectric vibrator,
    A metal mounting holder fixed so as to leave the terminal portion at the one end of the diaphragm;
    The mounting holder includes a plate-like welded portion having a welding surface welded on one of a pair of side surfaces opposed in the thickness direction of the diaphragm, and an attached portion provided integrally with the welded portion. Part
    The welded portion has edges between the side surface located on the one end side of the diaphragm and the welding surface and between the side surface located on the other end side of the diaphragm and the welding surface, respectively. A curved surface that does not have is formed,
    The piezoelectric vibrating body includes a piezoelectric ceramic layer and one electrode layer formed on a surface of the piezoelectric ceramic layer facing the weight member,
    The diaphragm constitutes a first input electrode of the piezoelectric vibrator;
    The piezoelectric vibrating device in which the one electrode layer constitutes a second input electrode of the piezoelectric vibrating body.
  2. [規則91に基づく訂正 08.04.2013]　
    　一端が固定された金属製の振動板と、
    　前記振動板の上に形成された圧電振動体と、
    　前記振動板の他端に固定された錘部材とを備えた圧電振動デバイスであって、
    　前記錘部材は、前記振動板よりも大きな剛性を有しており、前記錘部材の固有振動数が、前記圧電振動体が形成された状態の前記振動板の固有振動数の３倍以上に定められており、
    　前記錘部材は、前記振動板と接触する接触面を有する基部と、該基部と一体に設けられて前記振動板に沿って延びる本体部とを有しており、前記本体部の前記振動板と対向する面には、傾斜面が形成されている圧電振動デバイス。     [Correction 08.04.2013 based on Rule 91]
    A metal diaphragm with one end fixed;
    A piezoelectric vibrator formed on the diaphragm;
    A piezoelectric vibration device comprising a weight member fixed to the other end of the diaphragm,
    The weight member has a rigidity greater than that of the diaphragm, and the natural frequency of the weight member is determined to be three times or more the natural frequency of the diaphragm in a state where the piezoelectric vibrator is formed. And
    The weight member includes a base portion having a contact surface that comes into contact with the diaphragm, and a main body portion that is provided integrally with the base portion and extends along the diaphragm, and the diaphragm member of the main body portion includes: A piezoelectric vibration device in which inclined surfaces are formed on opposite surfaces.
  3. 　前記錘部材の固有振動数が、前記圧電振動体が形成された状態の前記振動板の固有振動数の３倍乃至１０倍に定められている請求項２に記載の圧電振動デバイス。 3. The piezoelectric vibration device according to claim 2, wherein the natural frequency of the weight member is determined to be 3 to 10 times the natural frequency of the diaphragm in a state where the piezoelectric vibrating body is formed.
  4. 　前記圧電振動体が、前記振動板の前記錘部材と対向する面とは反対側の面上または前記振動板の前記錘部材と対向する面上に形成されている請求項２または３に記載の圧電振動デバイス。 The said piezoelectric vibrating body is formed on the surface on the opposite side to the surface facing the said weight member of the said diaphragm, or on the surface facing the said weight member of the said diaphragm. Piezoelectric vibration device.
  5. 　前記圧電振動体が、前記振動板の前記錘部材と対向する面とは反対側の面上及び前記振動板の前記錘部材と対向する面上に形成されている請求項２または３に記載の圧電振動デバイス。 4. The piezoelectric vibrator according to claim 2, wherein the piezoelectric vibrating body is formed on a surface of the diaphragm opposite to the surface facing the weight member and on a surface of the diaphragm facing the weight member. 5. Piezoelectric vibration device.
  6. 　前記振動板の前記他端には厚み方向に前記振動板を貫通する１以上の貫通孔が形成されており、
    　前記錘部材は、熱変形可能な材料を含んで形成され且つ前記１以上の貫通孔に嵌合されて先端が前記貫通孔から突出する１以上の突起を有しており、
    　前記１以上の貫通孔に嵌合された前記１以上の突起の前記先端が熱変形させられて、前記錘部材が前記振動板に固定されている請求項２または３に記載の圧電振動デバイス。     One or more through holes penetrating the diaphragm in the thickness direction are formed at the other end of the diaphragm,
    The weight member includes one or more protrusions that are formed by including a heat-deformable material and that are fitted into the one or more through-holes and have tips that protrude from the through-holes.
    4. The piezoelectric vibration device according to claim 2, wherein the tip of the one or more protrusions fitted in the one or more through holes is thermally deformed, and the weight member is fixed to the diaphragm. 5.
  7. 　前記振動板は前記一端が前記圧電振動体の端子部を構成する金属板から形成され、
    　前記振動板の前記一端に前記端子部を残すように固定された金属製の取付用ホルダを更に備え、
    　前記取付用ホルダは、前記振動板の厚み方向に対向する一対の側面の一方の上に溶接される溶接面を備えた板状の被溶接部及び該被溶接部と一体に設けられた被取付部を備え、
    　前記被溶接部には、前記振動板の前記一端側に位置する側面と前記溶接面との間及び前記振動板の前記他端側に位置する側面と前記溶接面との間に、それぞれエッジを有しない湾曲面が形成されていることを特徴とする請求項２または３に記載の圧電振動デバイス。     The diaphragm is formed of a metal plate whose one end constitutes a terminal portion of the piezoelectric vibrator,
    A metal mounting holder fixed so as to leave the terminal portion at the one end of the diaphragm;
    The mounting holder includes a plate-like welded portion having a welding surface welded on one of a pair of side surfaces opposed in the thickness direction of the diaphragm, and an attached portion provided integrally with the welded portion. Part
    The welded portion has edges between the side surface located on the one end side of the diaphragm and the welding surface and between the side surface located on the other end side of the diaphragm and the welding surface, respectively. The piezoelectric vibration device according to claim 2, wherein a curved surface that does not have is formed.
  8. 　前記圧電振動体は、圧電セラミック層と、該圧電セラミック層の前記錘部材と対向する面上に形成された１つの電極層とを備えており、
    　前記振動板が前記圧電振動体の第１の入力電極を構成し、
    　前記１つの電極層が前記圧電振動体の第２の入力電極を構成し、
    　前記第２の入力電極に接触する導電性ブラシをさらに備え、
    　前記導電性ブラシは、前記第２の入力電極とスライド可能に接触する接触部と、該接触部と一体に設けられて前記接触部を前記入力電極に押しつける押圧力を発生する板バネ部と、該板バネ部と一体に設けられて前記振動板の前記一端に固定された固定部材に取り付けられた接続用端子部とを備えている請求項２または３に記載の圧電振動デバイス。     The piezoelectric vibrating body includes a piezoelectric ceramic layer and one electrode layer formed on a surface of the piezoelectric ceramic layer facing the weight member,
    The diaphragm constitutes a first input electrode of the piezoelectric vibrator;
    The one electrode layer constitutes a second input electrode of the piezoelectric vibrator;
    A conductive brush in contact with the second input electrode;
    The conductive brush includes a contact portion that slidably contacts the second input electrode, a leaf spring portion that is provided integrally with the contact portion and generates a pressing force that presses the contact portion against the input electrode, 4. The piezoelectric vibration device according to claim 2, further comprising a connection terminal portion that is provided integrally with the leaf spring portion and is attached to a fixing member that is fixed to the one end of the vibration plate.
  9. 　前記圧電振動体は、圧電セラミック層と、該圧電セラミック層の前記錘部材と対向する面上に形成された１つの電極層とを備えており、
    　前記振動板が前記圧電振動体の第１の入力電極を構成し、
    　前記１つの電極層が前記圧電振動体の第２の入力電極を構成し、
    　前記第２の入力電極に接触する導電性ブラシをさらに備え、
    　前記導電性ブラシは、前記第２の入力電極とスライド可能に接触する接触部と、該接触部と一体に設けられて前記接触部を前記入力電極に押しつける押圧力を発生する板バネ部と、該板バネ部と一体に設けられて前記振動板の前記一端に固定された固定部材に取り付けられた接続用端子部とを備えており、
    　前記固定部材は、電気絶縁材料により形成されており、
    　前記固定部材は、前記導電性ブラシをインサートとして、インサート成形されている請求項２または３に記載の圧電振動デバイス。     The piezoelectric vibrating body includes a piezoelectric ceramic layer and one electrode layer formed on a surface of the piezoelectric ceramic layer facing the weight member,
    The diaphragm constitutes a first input electrode of the piezoelectric vibrator;
    The one electrode layer constitutes a second input electrode of the piezoelectric vibrator;
    A conductive brush in contact with the second input electrode;
    The conductive brush includes a contact portion that slidably contacts the second input electrode, a leaf spring portion that is provided integrally with the contact portion and generates a pressing force that presses the contact portion against the input electrode, A connecting terminal portion provided integrally with the leaf spring portion and attached to a fixing member fixed to the one end of the diaphragm;
    The fixing member is made of an electrically insulating material,
    The piezoelectric vibration device according to claim 2, wherein the fixing member is insert-molded using the conductive brush as an insert.
  10. 　前記圧電振動体は、圧電セラミック層と、該圧電セラミック層の前記錘部材と対向する面上に形成された１つの電極層とを備えており、
    　前記振動板が前記圧電振動体の第１の入力電極を構成し、
    　前記１つの電極層が前記圧電振動体の第２の入力電極を構成し、
    　前記第２の入力電極に接続され且つ前記振動板とは接触しない配線を有するフレキシブル配線基板をさらに備えている請求項２または３に記載の圧電振動デバイス。
    請求項２または３に記載の圧電振動デバイス。     The piezoelectric vibrating body includes a piezoelectric ceramic layer and one electrode layer formed on a surface of the piezoelectric ceramic layer facing the weight member,
    The diaphragm constitutes a first input electrode of the piezoelectric vibrator;
    The one electrode layer constitutes a second input electrode of the piezoelectric vibrator;
    4. The piezoelectric vibration device according to claim 2, further comprising a flexible wiring board having a wiring connected to the second input electrode and not in contact with the diaphragm. 5.
    The piezoelectric vibration device according to claim 2 or 3.
  11. 　前記圧電振動体は、圧電セラミック層と、該圧電セラミック層の前記錘部材と対向する面上に形成された１つの電極層とを備えており、
    　前記振動板が前記圧電振動体の第１の入力電極を構成し、
    　前記１つの電極層が前記圧電振動体の第２の入力電極を構成し、
    　一端が前記第２の入力電極に接続され且つ前記振動板とは接触しない配線を有するフレキシブル配線基板をさらに備えており、
    　前記フレキシブル配線基板及び前記配線は前記振動板の前記一端を越えて延びている請求項２または３に記載の圧電振動デバイス。     The piezoelectric vibrating body includes a piezoelectric ceramic layer and one electrode layer formed on a surface of the piezoelectric ceramic layer facing the weight member,
    The diaphragm constitutes a first input electrode of the piezoelectric vibrator;
    The one electrode layer constitutes a second input electrode of the piezoelectric vibrator;
    A flexible wiring board having a wiring having one end connected to the second input electrode and not in contact with the diaphragm;
    The piezoelectric vibration device according to claim 2, wherein the flexible wiring board and the wiring extend beyond the one end of the diaphragm.
  12. 　前記圧電振動体は、圧電セラミック層と、該圧電セラミック層の前記錘部材と対向する面上に形成された１つの電極層とを備えており、
    　前記振動板が前記圧電振動体の第１の入力電極を構成し、
    　前記１つの電極層が前記圧電振動体の第２の入力電極を構成し、
    　一端が前記第２の入力電極に接続され且つ前記振動板とは接触しない配線を有するフレキシブル配線基板をさらに備えており、
    　前記フレキシブル配線基板及び前記配線は前記振動板の前記一端を越えて延びており、
    　前記固定部材は、電気絶縁材料により形成されており、
    　前記固定部材は、フレキシブル配線基板をインサートとして、インサート成形されている請求項２または３に記載の圧電振動デバイス。     The piezoelectric vibrating body includes a piezoelectric ceramic layer and one electrode layer formed on a surface of the piezoelectric ceramic layer facing the weight member,
    The diaphragm constitutes a first input electrode of the piezoelectric vibrator;
    The one electrode layer constitutes a second input electrode of the piezoelectric vibrator;
    A flexible wiring board having a wiring having one end connected to the second input electrode and not in contact with the diaphragm;
    The flexible wiring board and the wiring extend beyond the one end of the diaphragm,
    The fixing member is made of an electrically insulating material,
    The piezoelectric vibration device according to claim 2, wherein the fixing member is insert-molded using a flexible wiring board as an insert.
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