WO2013065126A1 - Actuator - Google Patents
Actuator Download PDFInfo
- Publication number
- WO2013065126A1 WO2013065126A1 PCT/JP2011/075185 JP2011075185W WO2013065126A1 WO 2013065126 A1 WO2013065126 A1 WO 2013065126A1 JP 2011075185 W JP2011075185 W JP 2011075185W WO 2013065126 A1 WO2013065126 A1 WO 2013065126A1
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- WO
- WIPO (PCT)
- Prior art keywords
- drive coil
- coil
- magnetic field
- power supply
- actuator
- Prior art date
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K21/00—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets
- H02K21/02—Details
- H02K21/04—Windings on magnets for additional excitation ; Windings and magnets for additional excitation
- H02K21/042—Windings on magnets for additional excitation ; Windings and magnets for additional excitation with permanent magnets and field winding both rotating
Definitions
- the present invention relates to a technical field of an actuator such as a MEMS scanner that drives a movable part provided with, for example, a mirror.
- a MEMS scanner used for scanning a laser beam As such a MEMS device, a MEMS scanner used for scanning a laser beam is known.
- a two-axis drive type MEMS scanner includes a movable plate, a frame-like movable inner frame surrounding the movable plate, and an inner torsion that pivotally supports the movable plate with respect to the movable inner frame.
- a mirror is formed at the center of the surface of the movable plate, and a drive coil is formed around the mirror.
- a driving coil is also formed on the movable inner frame.
- a pair of permanent magnets for generating a static magnetic field for each drive coil is disposed on the fixed outer frame.
- an electromagnetic driving force (Lorentz force) is generated in the driving coil by supplying a control current to the two driving coils. Therefore, the movable inner frame and the movable plate on which the driving coil is formed are moved. As a result, the movable plate can be driven biaxially.
- a driving control current is supplied to the driving coil formed on the movable plate from a power source formed outside the movable plate, for example, via a wiring formed on the inner torsion bar or the movable inner frame. It is common.
- the drive coil formed on the movable inner frame receives a drive control current from a power source formed outside the movable inner frame, for example, via a wiring formed on the outer torsion bar or the fixed outer frame. It is common to be supplied.
- the driving coil is formed on the movable plate and the wiring is formed on the inner torsion bar (or the driving coil is formed on the movable inner frame and the wiring is formed on the outer torsion bar).
- a drive coil is formed only on one of the movable inner frame and the movable plate, and an alternating current including a high frequency component and a low frequency component is supplied to the drive coil.
- a MEM scanner that realizes two-axis driving of the movable plate has been proposed.
- the driving coil is formed only on the movable inner frame
- the driving of the movable plate is controlled by the slight vibration generated in the movable inner frame. Therefore, compared with a MEMS scanner in which a driving coil is directly formed on a movable plate, the accuracy of driving the movable plate (and also the accuracy of driving a movable inner frame that controls the driving of the movable plate is also improved. ) A new technical problem will arise that will worsen.
- the driving coil is formed only on the movable plate
- the driving of the movable inner frame is controlled by the slight vibration generated on the movable plate.
- the first torsion bar and the second torsion bar as described above. It becomes necessary to form wiring on both sides of the bar. However, as described above, it is preferable not to form the wiring on the inner torsion bar or the outer torsion bar from the viewpoint of design flexibility.
- the movable plate (or any movable part) is not limited to the MEMS scanner that swings the movable plate (or any movable part) so as to rotate. The same can occur for a MSMS actuator that is swung.
- the present invention has been made in view of the above-described conventional problems, for example, and provides an actuator capable of swinging a movable part with relatively high accuracy while improving the degree of freedom of design, for example. Is an issue.
- the first actuator includes a movable part, a support part surrounding the movable part, and a torsion bar connecting the movable part and the support part so that the movable part can swing.
- a drive coil that is formed on the movable part and does not extend outside the movable part, and a power supply coil that is formed on the support part and is supplied with a control current for swinging the movable part
- a magnetic field application unit that applies a static magnetic field to the drive coil.
- the second actuator has a movable part, an inner support part that surrounds the movable part, and an inner side that connects the movable part and the inner support part so that the movable part can swing.
- a torsion bar, an outer support portion that surrounds the inner support portion, an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and the movable portion are formed.
- a drive coil that does not extend to the outside of the movable part, and a power supply coil that is formed on the inner support part and is supplied with a control current for swinging the movable part and the inner support part.
- a third actuator comprising a first magnetic field applying unit that applies a first static magnetic field to the drive coil and a second magnetic field applying unit that applies a second static magnetic field to the power supply coil.
- a movable part an inner support part surrounding the movable part, an inner torsion bar connecting the movable part and the inner support part so that the movable part can swing, and an outer support part surrounding the inner support part
- an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and is formed on the movable portion and does not extend outside the movable portion.
- the actuator according to the first embodiment includes a movable part, a support part surrounding the movable part, a torsion bar that connects the movable part and the support part so that the movable part can swing, and a movable part.
- a drive coil that is formed and does not extend outside the movable part; a power supply coil that is formed in the support part and that is supplied with a control current for swinging the movable part; and the drive coil And a magnetic field applying unit for applying a static magnetic field.
- the movable part suspended by the torsion bar swings.
- the movable portion may be swung so as to rotate about the direction in which the torsion bar extends as a central axis, or along the direction in which the torsion bar extends or in the direction intersecting with the direction in which the torsion bar extends. You may swing to move along.
- the torsion bar may directly connect the movable part and the support part.
- the torsion bar may indirectly connect the movable part and the support part (in other words, with an arbitrary member interposed therebetween).
- a drive coil is formed on the movable part.
- the drive coil may be formed on the surface of the movable part, or may be formed so as to be embedded in the movable part.
- the drive coil does not extend to the outside of the movable part. In other words, the drive coil extends only on or within the movable part. In other words, the drive coil is not formed on the torsion bar or the support portion.
- a power supply coil is formed in the support portion.
- a control current for swinging the movable part is supplied to the power supply coil.
- the control current is supplied to the power coil from a power source provided in the actuator or prepared outside the actuator.
- the drive coil does not extend to the outside of the movable part. Therefore, the power supply coil is not electrically connected to the drive coil. For this reason, the control current is not supplied to the drive coil.
- the power supply coil (or the wiring connected to the power supply coil) is not formed on the torsion bar as long as the necessity of extending the power supply coil toward the drive coil is small or not.
- the movable part swings as follows. First, a control current is supplied to the power supply coil. As a result, a magnetic field (or lines of magnetic force) is generated from the power supply coil in accordance with Ampere's law. Part or all of the magnetic field generated from the power supply coil also reaches the movable part surrounded by the support part (in other words, surrounded by the power supply coil formed on the support part). That is, part or all of the magnetic field generated from the power supply coil also reaches the drive coil formed in the movable part.
- an induced current due to the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the drive coil.
- a static magnetic field is applied to the drive coil by a magnetic field application unit. Therefore, a force (that is, a Lorentz force) is generated in the drive coil due to electromagnetic interaction between the static magnetic field applied from the magnetic field application unit and the induced current generated in the drive coil.
- the movable part in which the drive coil is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the magnetic field application part and the induced current generated in the drive coil.
- the drive coil can be formed on the movable part to be moved. Therefore, the movable part can be swung (that is, driven) with relatively high accuracy.
- the movable part is swayed using the induced current generated in the drive coil (in other words, using the power or current wirelessly transmitted from the power coil as the power source). Therefore, the drive coil does not need to extend outside the movable part. Therefore, it is not necessary to form wiring connected to the drive coil on the torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, it is possible to swing (i.e., drive) the movable portion with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
- an induced current is generated in the drive coil when the magnetic field generated from the power supply coil passes through the drive coil, and the movable part is applied from the magnetic field application part.
- the magnetic field is oscillated by electromagnetic interaction between the static magnetic field generated and the induced current generated in the drive coil.
- the movable part swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the magnetic field applying part and the induced current generated in the drive coil. Therefore, the various effects described above can be suitably enjoyed.
- the drive coil and the power supply coil have a positional relationship in which a magnetic field generated from the power supply coil passes through the drive coil when the control current is supplied. It is formed.
- part or all of the magnetic field generated from the power supply coil suitably reaches the drive coil formed in the movable part.
- an induced current due to the magnetic field generated from the power supply coil is suitably generated in the drive coil.
- the movable part is suitably swung by the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the magnetic field application part and the induced current generated in the drive coil. Therefore, the various effects described above can be suitably enjoyed.
- the movable part includes a magnetic material.
- an induced current caused by a magnetic field generated from the power supply coil is likely to be generated in the drive coil formed in the movable part.
- a larger induced current is likely to be generated in the drive coil formed in the movable part.
- a larger Lorentz force is likely to be generated in the drive coil. Therefore, the movable part can be moved far efficiently.
- a plurality of the power supply coils are formed in the support portion.
- the magnetic field generated from the plurality of power supply coils can easily pass through the drive coil.
- one power supply coil includes a plurality of power supply coils.
- a state including a coil portion is also assumed.
- the actuator of the second embodiment includes a movable part, an inner support part that surrounds the movable part, an inner torsion bar that connects the movable part and the inner support part so that the movable part can swing, An outer support portion that surrounds the inner support portion, an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and a movable portion that is formed on the movable portion.
- a drive coil that does not extend outside the power supply unit, a power supply coil that is formed on the inner support part and that is supplied with a control current for swinging the movable part and the inner support part, and the drive coil.
- a first magnetic field applying unit that applies a first static magnetic field
- a second magnetic field applying unit that applies a second static magnetic field to the power supply coil.
- the movable part suspended by the inner torsion bar swings.
- the movable portion may be swung so as to rotate about the direction in which the inner torsion bar extends, or along the direction in which the inner torsion bar extends or in the direction in which the inner torsion bar extends. You may swing so that it may move along the crossing direction.
- the inner torsion bar may directly connect the movable part and the inner support part.
- the inner torsion bar may indirectly connect the movable portion and the inner support portion (in other words, with an arbitrary member interposed therebetween).
- the inner support portion suspended by the outer torsion bar swings.
- the inner support portion may be swung so as to rotate about the direction in which the outer torsion bar extends, or the direction in which the outer torsion bar extends or the direction in which the outer torsion bar extends. You may swing so that it may move along the direction which intersects.
- the outer torsion bar may directly connect the inner support portion and the outer support portion.
- an outer side torsion bar may connect an inner side support part and an outer side support part indirectly (in other words, interposing any member in between).
- a drive coil is formed on the movable part.
- the drive coil may be formed on the surface of the movable part, or may be formed so as to be embedded in the movable part.
- the drive coil does not extend to the outside of the movable part. In other words, the drive coil extends only on or within the movable part. In other words, the drive coil is not formed on the inner torsion bar, the inner support part, the outer torsion bar, or the outer support part.
- a power supply coil is formed on the inner support portion.
- a control current for swinging both the movable part and the inner support part is supplied to the power supply coil.
- the control current is supplied to the power coil from a power source provided in the actuator or prepared outside the actuator.
- the drive coil does not extend to the outside of the movable part. Therefore, the power supply coil is not electrically connected to the drive coil. For this reason, the control current is not supplied to the drive coil.
- the power supply coil (or the wiring connected to the power supply coil) is not formed on the inner torsion bar as long as the necessity of extending the power supply coil toward the drive coil is small or not.
- the movable part swings as follows. First, a control current is supplied to the power supply coil. On the other hand, the second static magnetic field is applied to the power supply coil by the second magnetic field application unit. Therefore, a force (that is, a Lorentz force) is generated in the power supply coil due to electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the control current supplied to the power supply coil. As a result, the inner support portion on which the power supply coil is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the second static magnetic field applied from the second magnetic field application portion and the control current supplied to the power supply coil. To do.
- the movable part is connected to the inner support part via the inner torsion bar. For this reason, as the inner support portion swings, the movable portion also swings.
- a magnetic field (lines of magnetic force) is generated from the power supply coil according to Ampere's law.
- Part or all of the magnetic field generated from the power supply coil also reaches the movable part surrounded by the inner support part (in other words, surrounded by the power supply coil formed on the inner support part). That is, part or all of the magnetic field generated from the power supply coil also reaches the drive coil formed in the movable part.
- an induced current due to the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the drive coil.
- a first static magnetic field is applied to the drive coil by the first magnetic field application unit. Therefore, a force (that is, Lorentz force) resulting from electromagnetic interaction between the first static magnetic field applied from the first magnetic field application unit and the induced current generated in the drive coil is generated in the drive coil.
- Lorentz force a force resulting from electromagnetic interaction between the first static magnetic field applied from the first magnetic field application unit and the induced current generated in the drive coil.
- the drive coil is formed on the movable part to be swung, and the power supply coil (that is, substantially acts as the drive coil) on the inner support part to be swung.
- Power supply coil can be formed. Therefore, both the movable part and the inner support part can be swung (that is, driven) with relatively high accuracy.
- the movable part is swung using the induced current generated in the drive coil (in other words, using the power or current wirelessly transmitted from the power supply coil as the power source). Therefore, the drive coil does not need to extend outside the movable part. Therefore, it is not necessary to form the wiring connected to the drive coil on the inner torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, it is possible to swing (i.e., drive) the movable portion with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
- a magnetic field generated from the power supply coil passes through the drive coil, so that an induced current is generated in the drive coil, and the movable part is configured to be the first magnetic field application part.
- the inner support portion swings by an electromagnetic interaction between the first static magnetic field applied from the first induction magnetic field and the induced current generated in the drive coil, and the second static magnetic field applied from the second magnetic field application portion It swings due to electromagnetic interaction with the control current supplied to the power supply coil.
- the movable portion swings due to the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application unit and the induced current generated in the drive coil.
- the inner support portion swings due to the Lorentz force resulting from the electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the control current supplied to the power supply coil. Therefore, the various effects described above can be suitably enjoyed.
- the drive coil and the power supply coil have a positional relationship in which a magnetic field generated from the power supply coil passes through the drive coil when the control current is supplied. It is formed.
- part or all of the magnetic field generated from the power supply coil suitably reaches the drive coil formed in the movable part.
- an induced current due to the magnetic field generated from the power supply coil is suitably generated in the drive coil.
- the movable part suitably swings due to the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the drive coil. Therefore, the various effects described above can be suitably enjoyed.
- control current is superimposed with a current component for swinging the movable portion and a current component for swinging the inner support portion.
- the movable part includes a magnetic material.
- an induced current caused by a magnetic field generated from the power supply coil is likely to be generated in the drive coil formed in the movable part.
- a larger induced current is likely to be generated in the drive coil formed in the movable part.
- a larger Lorentz force is likely to be generated in the drive coil. Therefore, the movable part can be moved far efficiently.
- a plurality of the power supply coils are formed on the inner support portion.
- the magnetic field generated from the plurality of power supply coils can easily pass through the drive coil.
- one power supply coil includes a plurality of power supply coils.
- a state including a coil portion is also assumed.
- the actuator of the third embodiment includes a movable part, an inner support part that surrounds the movable part, an inner torsion bar that connects the movable part and the inner support part so that the movable part can swing, An outer support portion that surrounds the inner support portion, an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and a movable portion that is formed on the movable portion.
- a first drive coil that does not extend outside the part
- a second drive coil that is formed on the inner support part, and that does not extend outside the inner support part, and is formed on the outer support part.
- a power supply coil to which a control current for swinging the movable part and the inner support part is supplied; a first magnetic field application part for applying a first static magnetic field to the first drive coil; and the second drive coil. 2nd Shizu And a second magnetic field application unit for applying the field.
- the movable part suspended by the inner torsion bar swings.
- the movable portion may be swung so as to rotate about the direction in which the inner torsion bar extends, or along the direction in which the inner torsion bar extends or in the direction in which the inner torsion bar extends. You may swing so that it may move along the crossing direction.
- the inner torsion bar may directly connect the movable part and the inner support part.
- the inner torsion bar may indirectly connect the movable portion and the inner support portion (in other words, with an arbitrary member interposed therebetween).
- the inner support portion suspended by the outer torsion bar swings.
- the inner support portion may be swung so as to rotate about the direction in which the outer torsion bar extends, or the direction in which the outer torsion bar extends or the direction in which the outer torsion bar extends. You may swing so that it may move along the direction which intersects.
- the outer torsion bar may directly connect the inner support portion and the outer support portion.
- an outer side torsion bar may connect an inner side support part and an outer side support part indirectly (in other words, interposing any member in between).
- a first drive coil is formed on the movable part.
- the 1st drive coil may be formed on the surface of a movable part, and may be formed so that it may be embedded inside a movable part.
- the first drive coil does not extend to the outside of the movable part. In other words, the first drive coil extends only on or within the movable part. In other words, the first drive coil is not formed on the inner torsion bar, the inner support part, the outer torsion bar, or the outer support part.
- a second drive coil is formed on the inner support portion.
- the 2nd drive coil may be formed on the surface of an inner side support part, and may be formed so that it may be embedded inside an inner side support part.
- the second drive coil does not extend to the outside of the inner support portion. In other words, the second drive coil extends only on or within the inner support. In other words, the second drive coil is not formed on the movable part, the inner torsion bar, the outer torsion bar, or the outer support part.
- a power supply coil is formed on the outer support portion.
- a control current for swinging both the movable part and the inner support part is supplied to the power supply coil.
- the control current is supplied to the power coil from a power source provided in the actuator or prepared outside the actuator.
- the first drive coil does not extend outside the movable part.
- the second drive coil does not extend to the outside of the inner support portion. Therefore, the power supply coil is not electrically connected to both the first drive coil and the second drive coil. For this reason, the control current is not supplied to each of the first drive coil and the second drive coil.
- the power supply coil (or the wiring connected to the power supply coil) is also connected to the inner torsion bar and the outer torsion bar. It is preferably not formed on the bar.
- the movable part swings as follows. First, a control current is supplied to the power supply coil. A magnetic field (or lines of magnetic force) is generated from the power supply coil in accordance with Ampere's law. Part or all of the magnetic field generated from the power supply coil also reaches the movable part surrounded by the outer support part (in other words, surrounded by the power supply coil formed on the outer support part). That is, part or all of the magnetic field generated from the power supply coil also reaches the first drive coil formed in the movable part. As a result, an induced current due to the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the first drive coil.
- a force that is, a Lorentz force
- the movable part in which the first drive coil is formed is caused by the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the first drive coil. Fluctuate.
- a part or all of the magnetic field generated from the power supply coil reaches the inner support portion surrounded by the outer support portion (in other words, surrounded by the power supply coil formed on the outer support portion). That is, part or all of the magnetic field generated from the power supply coil also reaches the second drive coil formed on the inner support portion.
- an induced current caused by the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the second drive coil.
- a second static magnetic field is applied to the second drive coil by the second magnetic field application unit.
- a force that is, a Lorentz force
- the inner support portion on which the second drive coil is formed is far away by the Lorentz force due to the electromagnetic interaction between the second static magnetic field applied from the second magnetic field application portion and the induced current generated in the drive coil.
- the movable part is connected to the inner support part via the inner torsion bar. For this reason, as the inner support portion swings, the movable portion also swings.
- the first drive coil can be formed on the movable part to be swung, and the second drive coil can be formed on the inner support part to be swung. Therefore, both the movable part and the inner support part can be swung (that is, driven) with relatively high accuracy.
- the movable part is moved far away using the induced current generated in the first drive coil (in other words, using the power or current wirelessly transmitted from the power coil as the power source). Since the first drive coil can be moved, the first drive coil does not have to extend outside the movable portion. Therefore, it is not necessary to form the wiring connected to the first drive coil on the inner torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, it is possible to swing (i.e., drive) the movable portion with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
- the inner support portion is further disengaged using the induced current generated in the second drive coil (in other words, using the power or current wirelessly transmitted from the power coil as the power source). Since the second drive coil can be moved, the second drive coil need not extend to the outside of the inner support portion. Therefore, it is not necessary to form the wiring connected to the second drive coil in the inner torsion bar or the outer torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, the inner support portion can be swung (that is, driven) with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
- a magnetic field generated from the power supply coil passes through the first drive coil and the second drive coil, so that the first drive coil and the second drive coil Inductive currents are generated respectively, and the movable part swings due to electromagnetic interaction between the first static magnetic field applied from the first magnetic field applying part and the induced current generated in the first drive coil, The inner support part swings due to electromagnetic interaction between the second static magnetic field applied from the second magnetic field application part and the induced current generated in the second drive coil.
- the movable part is far away by the Lorentz force caused by the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the first drive coil.
- the inner support portion swings due to Lorentz force caused by electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the induced current generated in the second drive coil. Therefore, the various effects described above can be suitably enjoyed.
- the first drive coil, the second drive coil, and the power supply coil are such that a magnetic field generated in the power supply coil when the control current is supplied is generated in the first drive coil. And a positional relationship passing through both the inside and the inside of the second drive coil.
- part or all of the magnetic field generated from the power supply coil suitably reaches the first drive coil formed on the movable part and the second drive coil formed on the inner support part.
- an induced current caused by the magnetic field generated from the power supply coil is suitably generated in the first drive coil and the second drive coil.
- the movable part suitably swings by the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the first drive coil.
- the inner support portion is suitably swung by a Lorentz force caused by electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the induced current generated in the second drive coil. Therefore, the various effects described above can be suitably enjoyed.
- a current component for swinging the movable portion and a current component for swinging the inner support portion are superimposed on the control current.
- At least one of the movable part and the inner support part includes a magnetic material.
- the first drive coil formed in the movable part is connected to the power coil from the case where the movable part does not include the magnetic material.
- An induced current due to the generated magnetic field is likely to be generated.
- the movable part includes a magnetic material
- a larger induced current is generated in the first drive coil formed in the movable part than when the movable part does not include a magnetic material. It becomes easy.
- the movable part includes a magnetic material, a larger Lorentz force is more likely to be generated in the first drive coil than when the movable part does not include a magnetic material. Therefore, the movable part can be moved far efficiently.
- the second drive coil formed on the inner support portion includes a power supply coil as compared with a case where the inner support portion does not include a magnetic material.
- An induced current due to the generated magnetic field is likely to be generated.
- the inner support portion includes a magnetic material
- a larger induced current is generated in the second drive coil formed on the inner support portion than when the inner support portion does not include a magnetic material. Is likely to occur.
- the inner support portion includes a magnetic material, a larger Lorentz force is more likely to be generated in the second drive coil than when the inner support portion does not include a magnetic material. Therefore, the inner support portion can be efficiently swung.
- a plurality of the power supply coils are formed on the outer support portion.
- the magnetic field generated from the plurality of power supply coils can easily pass through the first drive coil and the second drive coil.
- one power supply coil includes a plurality of power supply coils.
- a state including a coil portion is also assumed.
- the movable part, the support part, the torsion bar, the drive coil, the power supply coil, and the magnetic field application part are provided.
- the movable part, the inner support part, the inner torsion bar, the outer support part, the outer torsion bar, the drive coil, the power supply coil, the first magnetic field application part, Two magnetic field application units are provided.
- the movable part, the inner support part, the inner torsion bar, the outer support part, the outer torsion bar, the first drive coil, the second drive coil, the power supply coil, A first magnetic field application unit and a second magnetic field application unit are provided. Therefore, it is possible to move the movable part with relatively high accuracy while improving the degree of freedom in design.
- FIG. 1 is a plan view showing an example of the configuration of the actuator 100 of the first embodiment.
- the actuator 100 is a planar electromagnetic drive actuator (that is, a MEMS scanner) used for scanning of laser light, for example.
- the actuator 100 includes a support part 110, a movable part 120, a pair of torsion bars 130, and a pair of permanent magnets 160.
- the support portion 110, the movable portion 120, and the pair of torsion bars 130 are integrally formed from a nonmagnetic substrate such as a silicon substrate, for example. That is, the support part 110, the movable part 120, and the pair of torsion bars 130 are formed by forming a gap by removing a part of a nonmagnetic substrate such as a silicon substrate. A MEMS process is preferably used as the formation process at this time. Instead of the silicon substrate, the support portion 110, the movable portion 120, and the pair of torsion bars 130 may be integrally formed from an arbitrary elastic material.
- the support part 110 has a frame shape surrounding the movable part 120, and is connected to the movable part 120 by a pair of torsion bars 130.
- a power supply coil 150 is formed on the surface of the support portion 110. However, the power supply coil 150 may be formed inside the support portion 110.
- the power supply coil 150 is a coil that extends along the frame shape of the support portion 110.
- the power supply coil 150 may be formed using, for example, a material having relatively high conductivity (for example, gold or copper).
- the power supply coil 150 may be formed using a semiconductor manufacturing process such as a plating process or a sputtering method.
- the power supply coil 150 may be embedded in a silicon substrate for forming the support part 110, the movable part 120, and the pair of torsion bars 130 using an implant method.
- a control current is supplied to the power supply coil 150 from a power supply via a power supply terminal 151 formed on the support portion 110.
- the control current is a control current for swinging the movable portion 120, and is typically an alternating current including a signal component having a frequency synchronized with the frequency at which the movable portion 120 swings.
- the power source may be a power source provided in the actuator 100 itself, or may be a power source prepared outside the actuator 100.
- the power supply coil 150 is not electrically or physically connected to the drive coil 140. Accordingly, the power coil 150 (or the wiring connected to the power coil 150) is not formed on the pair of torsion bars 130 as long as the necessity of the power coil 150 extending toward the movable portion 120 is small or not. Is preferred.
- the movable part 120 is pivotally supported on the support part 110 by a pair of torsion bars 130 so as to be swingable.
- a mirror (not shown) that reflects the laser light is formed on the surface of the movable portion 120.
- a drive coil 140 is further formed on the surface of the movable portion 120. However, the drive coil 140 may be formed inside the movable part 120.
- the drive coil 140 is, for example, a coil that extends so as to surround a mirror (not shown) formed on the surface of the movable part 120.
- the drive coil 140 may be formed using, for example, a material having relatively high conductivity (for example, gold or copper).
- the drive coil 140 may be formed using a semiconductor manufacturing process such as a plating process or a sputtering method.
- the drive coil 140 may be embedded in a silicon substrate for forming the support part 110, the movable part 120, and the pair of torsion bars 130 using an implant method.
- the drive coil 140 extends only within the movable part 120. In other words, the drive coil 140 does not extend toward the outside of the movable part 120. More specifically, the drive coil 140 is not formed on the pair of torsion bars 130 or the support portion 110. For this reason, the drive coil 140 is not electrically connected to the power supply coil 150. Alternatively, the drive coil 140 is not physically connected to the power supply coil 150. Accordingly, the control current is not directly supplied to the drive coil 140 via the power supply terminal 151.
- the pair of torsion bars 130 connect the movable portion 120 and the support portion 110 so that the movable portion 120 can swing with respect to the support portion 110. Due to the elasticity of the pair of torsion bars 130, the movable portion 120 swings so as to rotate about an axis along the direction in which the pair of torsion bars 130 extends as a central axis (in other words, a rotation axis). That is, the movable unit 120 swings so as to rotate around the central axis with the axis along the left-right direction in FIG. 1 as the central axis.
- the pair of permanent magnets 160 are attached to the outside of the support part 110.
- the pair of permanent magnets 160 preferably have their magnetic poles appropriately set so that a predetermined static magnetic field can be applied to the drive coil 140.
- a yoke may be added to the pair of permanent magnets 160 in order to increase the strength of the static magnetic field.
- FIG. 2A is a plan view showing directions of currents and magnetic fields during the operation of the actuator 100 of the first embodiment
- FIG. 2B is a cross-sectional view taken along the line II-II ′ of FIG. FIG.
- a control current is supplied from the power supply to the power supply coil 150 via the power supply terminal 151. Is done.
- a magnetic field (lines of magnetic force) is generated from the power supply coil 150 in accordance with Ampere's law (or right-handed screw law). Specifically, a magnetic field is generated around the power supply coil 150 along the clockwise direction with the power supply coil 150 as the central axis in the traveling direction of the control current.
- a part or all of the magnetic field generated from the power supply coil 150 is surrounded by the support 110 on which the power supply coil 150 is formed. Part 120 is also reached. Then, a part or all of the magnetic field generated from the power supply coil 150 reaches the drive coil 140 formed in the movable portion 120 as shown in FIGS. 2 (a) and 2 (b).
- the power supply coil 150 and the drive coil 140 allow part or all of the magnetic field generated from the power supply coil 150 to pass through the inside of the drive coil 140. It is preferable to be formed so as to have a positional relationship that can be achieved. In other words, the power supply coil 150 and the drive coil 140 preferably do not have a positional relationship in which the entire magnetic field generated from the power supply coil 150 cannot pass through the inside of the drive coil 140.
- the range, strength, etc., to which the magnetic field generated from the power supply coil 150 reaches are (i) the size of the support unit 110, (ii) the size of the movable unit 120, and (iii) between the support unit 110 and the movable unit 120.
- (Iv) Parameters of control current supplied to the power supply coil 150 for example, current value and voltage value
- (v) Parameters of the power supply coil 150 itself for example, size and winding of the power supply coil 150)
- the number of lines may vary. Further, it is preferable that the parameter of the control current supplied to the power supply coil 150 and the parameter of the power supply coil 150 itself are set to appropriate values that generate Lorentz force that appropriately swings the movable portion 120.
- the intensity of the Lorentz force that appropriately swings the movable portion 120 is also affected by (vi) parameters of the drive coil 140 itself (for example, the size of the drive coil 140 and the number of windings).
- parameters of the drive coil 140 itself for example, the size of the drive coil 140 and the number of windings.
- the drive coil 140 and the power supply coil 150 are controlled in consideration of parameters of the control current supplied to the power supply coil 150, (v) parameters of the power supply coil 150 itself, (vi) parameters of the drive coil 140 itself, and the like. It is preferable that the magnetic field generated from the power supply coil 150 by supplying a current has a positional relationship of passing through the inside of the drive coil 140.
- the drive coil 140 When a part or all of the magnetic field generated from the power supply coil 150 passes through the inside of the drive coil 140, the drive coil 140 has an induced current caused by the magnetic field generated from the power supply coil 150 (that is, a magnetic field generated from the power supply coil 150. Generated by the electromagnetic induction action). This is because, since the control current supplied to the power supply coil 150 is typically an alternating current, the strength and direction of the magnetic field generated from the power supply coil 150 also varies according to the alternating current.
- a static magnetic field is applied to the drive coil 140 by a pair of permanent magnets 160.
- a force (that is, Lorentz force) is generated in the drive coil 140 due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140.
- the movable part 120 in which the drive coil 140 is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140. . That is, the movable part 120 swings so as to rotate about the axis along the left and right direction in FIG.
- the drive coil 140 can be formed on the movable portion 120 to be swayed. Therefore, the movable unit 120 is swung (that is, driven) with relatively high accuracy compared to the actuator of the comparative example that swings the movable unit 120 without forming the drive coil 140 in the movable unit 120. Can do.
- the movable portion 120 is generated using the induced current generated in the drive coil 140 (in other words, using the power or current wirelessly transmitted from the power supply coil 150 as a power source). Can be swung. For this reason, the drive coil 140 does not have to extend outside the movable portion 120. Therefore, since the drive coil 140 does not extend to the outside of the movable part 120, it is not necessary to form a wire connected to the drive coil 140 in the pair of torsion bars 130 (and further the support part 110). In other words, according to the actuator 100 of the first embodiment, by supplying a control current to the power supply coil 150, the movable part 120 on which the drive coil 140 is formed can be moved far.
- the control current need not be supplied.
- the actuator 100 of the first embodiment it is not necessary to form the wiring connected to the drive coil 140 in the pair of torsion bars 130. Therefore, the structure of the actuator 100 is simplified and the manufacturing process of the actuator 100 is also simplified as compared with the actuator of the comparative example in which the wiring is formed on the pair of torsion bars 130. For this reason, it is the same as the actuator of the comparative example that relatively increases the degree of freedom in designing the actuator as compared with the actuator of the comparative example that moves the movable part 120 without forming the drive coil 140 in the movable part 120.
- the movable part 120 can be swung (that is, driven) with relatively high accuracy while enjoying the effect accordingly.
- the movable portion 120 is swung relatively accurately with respect to the actuator of the comparative example in which the wiring connected to the drive coil 140 is formed on the pair of torsion bars 130 while the drive coil 140 is formed on the movable portion 120.
- the degree of freedom of design of the actuator 100 can be relatively increased while appropriately enjoying the same effect as that of the actuator of the comparative example that can be driven (that is, driven).
- the durability (or failure resistance) of the actuator 100 can be improved as compared with the actuator of the comparative example in which the wiring connected to the drive coil 140 is formed on the pair of torsion bars 130.
- the magnitude (for example, amplitude) of the induced current generated in the drive coil 140 is one of the important elements for causing the movable part 120 to move.
- the movable portion 120 is made of a magnetic material (for example, a material including a ferromagnetic material or a relatively high permeability). High material).
- a magnetic member made of a magnetic material may be embedded in the movable unit 120.
- a magnetic film made of a magnetic material may be attached to the surface of the movable part 120.
- an induced current due to a magnetic field generated from the power supply coil 150 is likely to be generated in the drive coil 140 formed in the movable portion 120.
- an induced current having a larger amplitude is likely to be generated in the drive coil 140 formed in the movable part 120.
- a larger Lorentz force is likely to be generated in the drive coil 140. Accordingly, the movable part 120 can be efficiently swung.
- FIG. 3 is a modification showing an example of the configuration of the actuator 100a of the first modification. Note that the same reference numerals are assigned to the same components as those included in the actuator 100 of the first embodiment, and the detailed description thereof is omitted.
- the actuator 100a according to the first modification is different from the actuator 100 according to the first embodiment in that the winding shape of the power supply coil 150a is different.
- the power supply coil 150a includes one spiral winding.
- the power supply coil 150 includes a plurality of single windings.
- the power supply coil 150 has any shape other than the shape including one spiral winding shown in the first embodiment and the shape including a plurality of one winding shown in the first modification. Also good. More specifically, the power supply coil 150 has an arbitrary shape as long as the condition that part or all of the magnetic field generated from the power supply coil 150 can pass through the inside of the drive coil 140 is satisfied. Also good. Alternatively, the power supply coil 150 has a condition that part or all of the magnetic field generated from the power supply coil 150 can pass through the inside of the drive coil 140, and the power supply coil 150 itself and wiring connected to the power supply coil 150. May have an arbitrary shape so as not to be formed on the pair of torsion bars 130.
- the drive coil 140 has an arbitrary shape (for example, a shape including one spiral winding or a shape including one or a plurality of windings). You may have.
- the drive coil 140 has a condition that part or all of the magnetic field generated from the power supply coil 150 can pass through the inside of the drive coil 140 and that the drive coil 140 does not extend outside the movable portion 120. As long as the condition is satisfied, it may have an arbitrary shape.
- FIG. 4 is a modification showing an example of the configuration of the actuator 100b of the second modification. Note that the same reference numerals are assigned to the same components as those included in the actuator 100 of the first embodiment, and the detailed description thereof is omitted.
- the actuator 100b according to the second modification is different from the actuator 100 according to the first embodiment in that the winding shape of the power supply coil 150b is different.
- the second modification is different from the actuator 100 of the first embodiment in that the power supply coil 150b includes a plurality of coil portions 151b.
- the constituent elements other than the winding shape of the power coil 150b provided in the actuator 100b of the second modification may be the same as the constituent elements provided in the actuator 100 of the first embodiment.
- the actuator 100b of the second modified example by forming the plurality of coil portions 151b, the magnetic field generated from the plurality of coil portions 151b can easily pass through the inside of the drive coil 140. At this time, it is preferable that the arrangement positions, shapes, sizes, and the like of the plurality of coil portions 151b are appropriately adjusted so that the magnetic fields generated from the plurality of coil portions 151b appropriately pass through the inside of the drive coil 140.
- a plurality of power supply coils 150 may be formed.
- FIG. 5 is a plan view showing an example of the configuration of the actuator 200 of the second embodiment.
- special description is abbreviate
- the actuator 200 of the second embodiment is a planar electromagnetic drive actuator (that is, a MEMS scanner) used for, for example, laser beam scanning.
- the actuator 200 includes an outer support portion 211, an inner support portion 212, a movable portion 120, a pair of outer torsion bars 231, a pair of inner torsion bars 232, a pair of permanent magnets 160, and a pair of permanent magnets 260. It has.
- the outer support portion 211, the inner support portion 212, the movable portion 120, the pair of outer torsion bars 231 and the pair of inner torsion bars 232 are integrally formed from a nonmagnetic substrate such as a silicon substrate, for example. That is, the outer support portion 211, the inner support portion 212, the movable portion 120, the pair of outer torsion bars 231 and the pair of inner torsion bars 232 have a gap by removing a part of a nonmagnetic substrate such as a silicon substrate. It is formed by being formed. A MEMS process is preferably used as the formation process at this time. Instead of the silicon substrate, the outer support part 211, the inner support part 212, the movable part 120, the pair of outer torsion bars 231 and the pair of inner torsion bars 232 may be integrally formed from an arbitrary elastic material. .
- the outer support portion 211 has a frame shape surrounding the inner support portion 212, and is connected to the inner support portion 212 by a pair of outer torsion bars 231.
- the inner support portion 212 is pivotally supported on the outer support portion 212 by a pair of outer torsion bars 231 so as to be swingable.
- the inner support portion 212 has a frame shape surrounding the movable portion 120, and is connected to the movable portion 120 by a pair of inner torsion bars 232.
- a power coil 150 is formed on the surface of the inner support portion 212. However, the power supply coil 150 may be formed inside the inner support portion 212.
- the power supply coil 150 is a coil that extends along the frame shape of the inner support portion 212.
- a control current is supplied to the power supply coil 150 from a power supply via a power supply terminal 151 formed on the outer support 211 and wiring formed on the outer support 211 and the outer torsion bar 231.
- the control current is a control current for swinging the movable part 120 and the inner support part 212.
- Such a control current is typically an alternating current in which a signal component having a frequency synchronized with the frequency at which the movable portion 120 swings and a signal component having a frequency synchronized with the frequency at which the inner support portion 212 swings are superimposed. Current.
- the power supply coil 150 is not electrically or physically connected to the drive coil 140 as in the first embodiment. Therefore, as long as the power supply coil 150 does not need to extend toward the movable portion 120, the power supply coil 150 (or the wiring connected to the power supply coil 150) is not formed on the pair of inner torsion bars 232. preferable.
- the movable part 120 is pivotally supported on the inner support part 212 by a pair of inner torsion bars 232 so as to be swingable.
- a drive coil 140 is formed on the surface of the movable portion 120. Also in the second embodiment, like the first embodiment, the drive coil 140 extends only within the movable portion 120. More specifically, the drive coil 140 is not formed on the pair of inner torsion bars 232, the inner support part 212, the pair of outer torsion bars 231, or the outer support part 211.
- the pair of outer torsion bars 231 connect the inner support portion 212 and the outer support portion 211 so that the inner support portion 212 can swing with respect to the outer support portion 211. Due to the elasticity of the pair of outer torsion bars 231, the inner support section 212 swings so as to rotate about the axis along the direction in which the pair of outer torsion bars 231 extends as a central axis (in other words, a rotation axis). That is, the inner support portion 212 swings so as to rotate around the central axis with the axis along the vertical direction in FIG. 5 as the central axis. At this time, the movable portion 120 is connected to the inner support portion 212 via a pair of inner torsion bars 232. Therefore, as the inner support portion 212 swings, the movable portion 120 substantially swings around the central axis about the axis along the vertical direction in FIG. 5 as the central axis. To do.
- the pair of inner torsion bars 232 connect the movable part 120 and the inner support part 212 so that the movable part 120 can swing relative to the inner support part 212. Due to the elasticity of the pair of inner torsion bars 232, the movable part 120 swings so as to rotate about the axis along the direction in which the pair of inner torsion bars 232 extends as a central axis (in other words, a rotation axis). That is, the movable unit 120 swings so as to rotate around the central axis with the axis along the left-right direction in FIG. 5 as the central axis.
- the biaxial drive of the movable part 120 is realized (that is, the movable part 120 is rotated about the axis along the vertical direction in FIG. 5 as the central axis, and the axis along the horizontal direction in FIG. 5 is rotated. Therefore, the direction in which the pair of outer torsion bars 231 extends is preferably different from the direction in which the pair of inner torsion bars 232 extends. Typically, the direction in which the pair of outer torsion bars 231 extends is preferably orthogonal to the direction in which the pair of inner torsion bars 232 extends.
- the pair of permanent magnets 160 are attached to the outside of the outer support portion 211.
- the pair of permanent magnets 160 preferably have their magnetic poles appropriately set so that a predetermined static magnetic field can be applied to the drive coil 140.
- a yoke may be added to the pair of permanent magnets 160 in order to increase the strength of the static magnetic field.
- the pair of permanent magnets 260 are attached to the outside of the outer support portion 211.
- the pair of permanent magnets 260 preferably have their magnetic poles appropriately set so that a predetermined static magnetic field can be applied to the power supply coil 150. Note that a yoke may be added to the pair of permanent magnets 260 in order to increase the strength of the static magnetic field.
- a static magnetic field is applied to the power supply coil 150 by a pair of permanent magnets 260.
- the power coil 150 generates a force (that is, Lorentz force) due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 260 and the control current supplied to the power coil 150.
- the inner support part 212 on which the power supply coil 150 is formed is far away by Lorentz force due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 260 and the control current supplied to the power supply coil 150.
- the movable portion 120 is connected to the inner support portion 212 via a pair of inner torsion bars 232. Therefore, as the inner support portion 212 swings, the movable portion 120 substantially swings around the central axis about the axis along the vertical direction in FIG. 5 as the central axis. To do.
- a magnetic field (lines of magnetic force) is generated from the power supply coil 150. Part or all of the magnetic field generated from the power supply coil 150 reaches the drive coil 140 formed in the movable portion 120.
- the power supply coil 150 and the drive coil 140 allow part or all of the magnetic field generated from the power supply coil 150 to pass through the inside of the drive coil 140. It is preferable that they are formed so as to have a positional relationship capable of The range, strength, etc., to which the magnetic field generated from the power supply coil 150 reaches are as follows: (i) the size of the inner support portion 212; (ii) the size of the movable portion 120; And (iv) a parameter of a control current supplied to the power supply coil 150, and (v) a parameter of the power supply coil 150 itself.
- the size of the inner support portion 212 (i) the size of the movable portion 120, and (iii) the inner support portion 212 and the movable portion 120.
- parameters of the control current supplied to the power supply coil 150 (v) parameters of the power supply coil 150 itself, (vi) parameters of the drive coil 140 itself, etc.
- the drive coil 140 and the power supply coil 150 are preferably formed such that a magnetic field generated from the power supply coil 150 passes through the inside of the drive coil 140 when a control current is supplied.
- the drive coil 140 is formed on the movable portion 120 to be swung, and the power supply coil 150 (that is, substantially the inner support portion 212 to be swung). Can form a power coil 150) that can also act as a drive coil 140. Therefore, compared with the actuator of the comparative example in which the movable part 120 is swayed (specifically, driven in two axes) without forming the drive coil 140 in either the movable part 120 or the inner support part 212, The movable part 120 and the inner support part 212 can be swung (that is, driven) with relatively high accuracy. As a result, the accuracy of the biaxial drive of the movable part 120 can be relatively improved.
- the movable part 120 is used by using the induced current generated in the drive coil 140 (in other words, using power or current wirelessly transmitted from the power supply coil 150 as a power source). Can be swung. For this reason, the drive coil 140 does not have to extend outside the movable portion 120. Therefore, it is not necessary to form wiring connected to the drive coil 140 in the pair of inner torsion bars 232 (further, the inner support portion 212, the pair of outer torsion bars 231 and the outer support portion 211).
- the movable portion 120 on which the drive coil 140 is formed can be moved by supplying a control current to the power supply coil 150, Therefore, the control current need not be supplied.
- the wiring connected to the drive coil 140 need not be formed on the pair of inner torsion bars 232. Therefore, the structure of the actuator 200 is simplified and the manufacturing process of the actuator 200 is also simplified as compared with the actuator of the comparative example in which the wiring is formed on the pair of inner torsion bars 230.
- the actuator of the comparative example that relatively increases the degree of freedom in designing the actuator as compared with the actuator of the comparative example that moves the movable part 120 without forming the drive coil 140 in the movable part 120.
- the movable part 120 can be swung (that is, driven) with relatively high accuracy while enjoying the effect accordingly.
- the movable portion 120 is relatively highly accurate.
- the degree of freedom in designing the actuator 200 can be relatively enhanced while appropriately enjoying the same effect as the actuator of the comparative example that can be moved (that is, driven).
- the durability (or failure resistance) of the actuator 200 can be improved as compared with the actuator of the comparative example in which the wiring connected to the drive coil 140 is formed on the pair of inner torsion bars 232.
- the movable part 120 may contain a magnetic material, the shape of the power supply coil 150 (or the drive coil 140) may be changed, or the power supply coil 150 may have a plurality of coil portions. 151b may be provided.
- FIG. 6 is a modification showing an example of the configuration of the actuator 200a of the first modification. Note that the same reference numerals are assigned to the same components as those included in the actuator 200 of the second embodiment, and detailed description thereof is omitted.
- the actuator 200a of the first modification is different from the actuator 200 of the second embodiment in that the arrangement positions of the pair of permanent magnets 160 are different.
- the pair of permanent magnets 160 are disposed further inside the inner support portion 212 so as to be adjacent to the movable portion 120.
- the arrangement positions of the pair of permanent magnets 160 may be positions other than the arrangements shown in FIGS. More specifically, the pair of permanent magnets 160 may be disposed at any position as long as a static magnetic field of an appropriate direction and an appropriate intensity can be applied to the drive coil 140. In the first embodiment, it goes without saying that the arrangement positions of the pair of permanent magnets 160 may be appropriately changed.
- the pair of permanent magnets 160 may be arranged at arbitrary positions. More specifically, the pair of permanent magnets 260 may be disposed at any position as long as a static magnetic field having an appropriate direction and an appropriate strength can be applied to the power supply coil 150.
- FIG. 7 is a plan view showing an example of the configuration of the actuator 300 of the third embodiment. Note that the description of the same components as those of the actuator 100 of the first embodiment and the actuator 200 of the second embodiment is omitted.
- the actuator 300 of the third embodiment is a planar electromagnetic drive actuator (that is, a MEMS scanner) used for, for example, scanning of laser light.
- the actuator 300 includes an outer support section 211, an inner support section 212, a movable section 120, a pair of outer torsion bars 231, a pair of inner torsion bars 232, a pair of permanent magnets 160, and a pair of permanent magnets 260. It has.
- the power supply coil 150 is formed on the surface of the outer support portion 211.
- the power supply coil 150 may be formed inside the outer support portion 211.
- the power supply coil 150 is a coil that extends along the frame shape of the outer support portion 212.
- a control current is supplied to the power supply coil 150 from a power supply via a power supply terminal 151 formed on the outer support portion 211.
- the control current is a control current for swinging the movable part 120 and the inner support part 212, as in the second embodiment.
- the power supply coil 150 is not electrically or physically connected to the drive coil 140 and the drive coil 340, which will be described later, as in the first and second embodiments. Therefore, as long as the power supply coil 150 does not need to extend toward the inner support portion 212 and the movable portion 120, the power supply coil 150 (or the wiring connected to the power supply coil 150) is placed on the pair of outer torsion bars 231. It is preferably not formed on the pair of inner torsion bars 232.
- a drive coil 340 is formed on the surface of the inner support portion 212.
- the drive coil 340 may be formed inside the inner support portion 212.
- the drive coil 340 is, for example, a coil that extends along the frame shape of the inner support portion 212.
- the drive coil 340 may be formed by the same process as the drive coil 140. Further, the drive coil 340 extends only within the inner support 212. In other words, the drive coil 340 does not extend toward the outside of the inner support portion 212.
- the drive coil 340 is not formed on the pair of outer torsion bars 231, the pair of inner torsion bars 232, the outer support part 211, or the movable part 120. For this reason, the drive coil 340 is not electrically connected to the power supply coil 150 or the drive coil 140. Alternatively, the drive coil 340 is not physically connected to the power supply coil 150 or the drive coil 140. Accordingly, the control current is not directly supplied to the drive coil 340 via the power supply terminal 151.
- a drive coil 140 is formed on the surface of the movable portion 120 as in the first and second embodiments. Also in the third embodiment, as in the first and second embodiments, the drive coil 140 extends only within the movable portion 120. More specifically, the drive coil 140 is not formed on the pair of inner torsion bars 232, the inner support part 212, the pair of outer torsion bars 231, or the outer support part 211. Furthermore, the drive coil 140 is not electrically and physically connected to the drive coil 340 as well as the power supply coil 150.
- the power coil 150, the drive coil 140, and the drive coil 340 are driven by a part or all of the magnetic field generated from the power coil 150. It is preferably formed so as to have a positional relationship capable of passing through at least one of the inside of the coil 140 and the inside of the driving coil 340.
- the range, strength, and the like that the magnetic field generated from the power supply coil 150 reaches include (i) the size of the outer support portion 211, (ii) the size of the inner support portion 212, (iii) the size of the movable portion 120, and ( iv) positional relationship between the outer support portion 211 and the inner support portion 212, (v) positional relationship between the inner support portion 212 and the movable portion 120, and (vi) a control current supplied to the power supply coil 150. And (vii) parameters of the power supply coil 150 itself.
- the power supply coil 150 has a positional relationship in which a magnetic field generated from the power supply coil 150 by supplying a control current passes through at least one of the inside of the drive coil 140 and the inside of the drive coil 340. It is preferably formed so that.
- the inner support portion 212 on which the drive coil 340 is formed swings due to Lorentz force due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 260 and the induced current generated in the drive coil 340.
- the movable portion 120 is connected to the inner support portion 212 via a pair of inner torsion bars 232. Therefore, as the inner support portion 212 swings, the movable portion 120 substantially swings around the central axis about the axis along the vertical direction in FIG. To do.
- the movable part 120 in which the drive coil 140 is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140. . That is, the movable unit 120 swings so as to rotate about the axis along the left-right direction in FIG. 7 as the central axis.
- the drive coil 140 can be formed on the movable part 120 to be swung, and the drive coil 340 can be formed on the inner support part 212 to be swung. . Therefore, compared with the actuator of the comparative example in which the movable part 120 is swayed (specifically, driven in two axes) without forming the drive coil 140 in either the movable part 120 or the inner support part 212, The movable part 120 and the inner support part 212 can be swung (that is, driven) with relatively high accuracy. As a result, the accuracy of the biaxial drive of the movable part 120 can be relatively improved.
- the movable part 120 is used by using the induced current generated in the drive coil 140 (in other words, using power or current wirelessly transmitted from the power supply coil 150 as a power source). Can be swung. For this reason, the drive coil 140 does not have to extend outside the movable portion 120. Therefore, it is not necessary to form wiring connected to the drive coil 140 in the pair of inner torsion bars 232 (further, the inner support portion 212, the pair of outer torsion bars 231 and the outer support portion 211). In other words, according to the actuator 300 of the third embodiment, by supplying the control current to the power supply coil 150, the movable part 120 on which the drive coil 140 is formed can be moved far.
- the control current need not be supplied.
- the actuator 300 of the third embodiment it is not necessary to form the wiring connected to the drive coil 140 in the pair of inner torsion bars 232 and the pair of outer torsion bars 231. Therefore, the structure of the actuator 300 is simplified and the manufacturing process of the actuator 300 is also simplified as compared with the actuator of the comparative example in which wiring is formed on the pair of inner torsion bars 230 and the pair of outer torsion bars 231. To do. For this reason, it is the same as the actuator of the comparative example that relatively increases the degree of freedom in designing the actuator as compared with the actuator of the comparative example that moves the movable part 120 without forming the drive coil 140 in the movable part 120.
- the movable part 120 can be swung (that is, driven) with relatively high accuracy while enjoying the effect accordingly.
- the degree of freedom in designing the actuator 300 can be relatively increased while appropriately enjoying the same effect as that of the actuator of the comparative example that can be swung (that is, driven) with relatively high accuracy.
- the inner support 212 is used by using the induced current generated in the drive coil 340 (in other words, using power or current wirelessly transmitted from the power supply coil 150 as a power source).
- the movable part 120 connected to the inner support part 212 can be swung.
- the drive coil 340 does not need to extend outside the inner support portion 212. Therefore, it is not necessary to form wiring connected to the drive coil 340 on the pair of outer torsion bars 231 (moreover, the movable part 120, the pair of inner torsion bars 232, and the outer support part 211).
- the actuator 300 of the third embodiment by supplying a control current to the power supply coil 150, the inner support portion 212 on which the drive coil 340 is formed can be swung, so the drive coil 340 On the other hand, it is not necessary to supply a control current.
- the actuator 300 of the third embodiment it is not necessary to form the wiring connected to the drive coil 340 in the pair of inner torsion bars 232 and the pair of outer torsion bars 231. Therefore, the structure of the actuator 300 is simplified and the manufacturing process of the actuator 300 is also simplified as compared with the actuator of the comparative example in which wiring is formed on the pair of inner torsion bars 230 and the pair of outer torsion bars 231. To do.
- the inner support 212 can be swung (that is, driven) with relatively high accuracy while enjoying the same effect accordingly.
- the degree of freedom in designing the actuator 300 can be relatively increased. it can.
- the durability (or failure resistance) of the actuator 300 can be improved as compared with the actuator of the comparative example in which the wiring connected to at least one of the drive coil 140 and the drive coil 340 is formed on the pair of inner torsion bars 232. it can.
- the durability (or fault tolerance) of the actuator 300 can be improved as compared with the actuator of the comparative example in which the wiring connected to at least one of the drive coil 140 and the drive coil 340 is formed on the pair of outer torsion bars 231. it can.
- the movable part 120 may contain a magnetic material, the shape of the power coil 150 (or the drive coil 140 or the drive coil 340) may be changed, and the power coil 150 A plurality of coil portions 151b may be provided, and the arrangement positions of the pair of permanent magnets 160 (or the pair of permanent magnets 260) may be changed.
- the description is advanced focusing on the MEMS scanner in which the movable portion rotates about the axis along the direction in which the torsion bar extends.
- the various configurations described above may be applied to any actuator, not limited to the MEMS scanner.
- the various configurations described above may be applied to a MEMS actuator that moves so that the movable portion moves in parallel according to the movement of the torsion bar. Even in this case, the above-described various effects are favorably enjoyed.
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Abstract
An actuator (100) is provided with a movable part (130), a support part (110) that surrounds the movable part, a torsion bar (120) for coupling the movable part and the support part so as to enable the movable part to swing, a drive coil (140) which is formed in the movable part and does not extend to the exterior of the movable part, a power source coil (150) which is formed in the support part and by which a control current for causing the movable part to swing is supplied, and a magnetic field applier (160) for applying a static magnetic field to the drive coil.
Description
本発明は、例えばミラー等が設けられた可動部を駆動するMEMSスキャナ等のアクチュエータの技術分野に関する。
The present invention relates to a technical field of an actuator such as a MEMS scanner that drives a movable part provided with, for example, a mirror.
例えば、ディスプレイ、プリンティング装置、精密測定、精密加工、情報記録再生などの多様な技術分野において、半導体プロセス技術によって製造されるMEMS(Micro Electro Mechanical System)デバイスについての研究が活発に進められている。このようなMEMSデバイスとして、レーザ光のスキャニングに用いられるMEMSスキャナが知られている。このようなMEMSスキャナのうち2軸駆動型のMEMSスキャナは、可動板と、可動板を取り囲む枠状の可動内枠と、可動板を可動内枠に対して揺動可能に軸支する内側トーションバーと、可動内枠を取り囲む枠状の固定外枠と、可動内枠を固定外枠に対して揺動可能に軸支する外側トーションバーとを備えている。
For example, in various technical fields such as displays, printing apparatuses, precision measurement, precision processing, and information recording / reproduction, research on MEMS (Micro Electro Mechanical System) devices manufactured by semiconductor process technology has been actively promoted. As such a MEMS device, a MEMS scanner used for scanning a laser beam is known. Among such MEMS scanners, a two-axis drive type MEMS scanner includes a movable plate, a frame-like movable inner frame surrounding the movable plate, and an inner torsion that pivotally supports the movable plate with respect to the movable inner frame. A bar-shaped fixed outer frame surrounding the movable inner frame; and an outer torsion bar that pivotally supports the movable inner frame with respect to the fixed outer frame.
ここで、一般的な2軸駆動型のMEMSスキャナでは、可動板の表面の中央にはミラーが形成され、当該ミラーの周囲に駆動用コイルが形成される。可動内枠にもまた、駆動用コイルが形成される。そして、各駆動用コイルに対して静磁界を発生させるための1対の永久磁石が、固定外枠に配置される。このように構成されたMEMSスキャナによれば、2つの駆動用コイルに対して制御電流が供給されることで、駆動用コイルに電磁駆動力(ローレンツ力)が発生する。従って、駆動用コイルが形成されている可動内枠及び可動板が遥動される。その結果、可動板の2軸駆動が可能となる。
Here, in a general two-axis drive type MEMS scanner, a mirror is formed at the center of the surface of the movable plate, and a drive coil is formed around the mirror. A driving coil is also formed on the movable inner frame. A pair of permanent magnets for generating a static magnetic field for each drive coil is disposed on the fixed outer frame. According to the MEMS scanner configured as described above, an electromagnetic driving force (Lorentz force) is generated in the driving coil by supplying a control current to the two driving coils. Therefore, the movable inner frame and the movable plate on which the driving coil is formed are moved. As a result, the movable plate can be driven biaxially.
ところで、可動板に形成される駆動用コイルには、可動板の外部に形成される電源から、例えば内側トーションバーや可動内枠に形成される配線を介して駆動用の制御電流が供給されるのが一般的である。同様に、可動内枠に形成される駆動用コイルには、可動内枠の外部に形成される電源から、例えば外側トーションバーや固定外枠に形成される配線を介して駆動用の制御電流が供給されるのが一般的である。しかしながら、可動板に駆動用コイルが形成され且つ内側トーションバーに配線が形成される(或いは、可動内枠に駆動用コイルが形成され且つ外側トーションバーに配線が形成される)ため、MEMSスキャナの設計の自由度が低くなってしまうという技術的問題点が生ずる。
By the way, a driving control current is supplied to the driving coil formed on the movable plate from a power source formed outside the movable plate, for example, via a wiring formed on the inner torsion bar or the movable inner frame. It is common. Similarly, the drive coil formed on the movable inner frame receives a drive control current from a power source formed outside the movable inner frame, for example, via a wiring formed on the outer torsion bar or the fixed outer frame. It is common to be supplied. However, the driving coil is formed on the movable plate and the wiring is formed on the inner torsion bar (or the driving coil is formed on the movable inner frame and the wiring is formed on the outer torsion bar). There arises a technical problem that the degree of freedom of design becomes low.
そこで、特許文献1に開示されているように、可動内枠及び可動板のいずれか一方のみに駆動コイル形成すると共に当該駆動コイルに対して高周波成分と低周波成分を含む交流電流を供給することで、可動板の2軸駆動を実現するMEMスキャナが提案されている。
Therefore, as disclosed in Patent Document 1, a drive coil is formed only on one of the movable inner frame and the movable plate, and an alternating current including a high frequency component and a low frequency component is supplied to the drive coil. Thus, a MEM scanner that realizes two-axis driving of the movable plate has been proposed.
しかしながら、例えば駆動用コイルが可動内枠のみに形成される場合には、可動板の駆動は、可動内枠に生ずる微振動によって制御される。従って、可動板上に駆動用コイルが直接形成されているMEMSスキャナと比較して、可動板の駆動の精度が(更には、当該可動板の駆動を制御する可動内枠の駆動の精度もまた)悪化してしまうという新たな技術的問題点が生ずる。同様に、例えば駆動用コイルが可動板のみに形成される場合には、可動内枠の駆動は、可動板に生ずる微振動によって制御される。従って、可動内枠上に駆動用コイルが直接形成されているMEMSスキャナと比較して、可動内枠の駆動の精度が(更には、当該可動内枠の駆動を制御することになる可動板の駆動の精度もまた)悪化してしまうという新たな技術的問題点が生ずる。
However, for example, when the driving coil is formed only on the movable inner frame, the driving of the movable plate is controlled by the slight vibration generated in the movable inner frame. Therefore, compared with a MEMS scanner in which a driving coil is directly formed on a movable plate, the accuracy of driving the movable plate (and also the accuracy of driving a movable inner frame that controls the driving of the movable plate is also improved. ) A new technical problem will arise that will worsen. Similarly, for example, when the driving coil is formed only on the movable plate, the driving of the movable inner frame is controlled by the slight vibration generated on the movable plate. Therefore, compared with a MEMS scanner in which a driving coil is directly formed on the movable inner frame, the accuracy of driving the movable inner frame is further improved (and the movable plate that controls the driving of the movable inner frame is also controlled). A new technical problem arises that the drive accuracy also deteriorates.
一方で、可動板や可動内枠の駆動の精度を向上させるために可動板及び可動内枠の双方に駆動用コイルを形成しようとすれば、上述したように、第1トーションバーや第2トーションバーの双方の上に配線を形成する必要が出てきてしまう。しかしながら、設計の自由度の観点からは、内側トーションバー又は外側トーションバーの上に配線を形成しない方が好ましいことは上述した通りである。
On the other hand, if a drive coil is formed on both the movable plate and the movable inner frame in order to improve the driving accuracy of the movable plate and the movable inner frame, the first torsion bar and the second torsion bar as described above. It becomes necessary to form wiring on both sides of the bar. However, as described above, it is preferable not to form the wiring on the inner torsion bar or the outer torsion bar from the viewpoint of design flexibility.
尚、上述した技術的な問題点は、回転するように可動板(或いは、任意の可動部)を遥動させるMEMSスキャナのみならず、任意の態様で可動板(或いは、任意の可動部)を遥動させるMSMSアクチュエータに対しても同様に生じ得る。
The above-mentioned technical problem is that the movable plate (or any movable part) is not limited to the MEMS scanner that swings the movable plate (or any movable part) so as to rotate. The same can occur for a MSMS actuator that is swung.
本発明は、例えば前述した従来の問題点に鑑みなされたものであり、例えば設計の自由度を向上させつつも可動部を相対的に高精度に遥動させることが可能なアクチュエータを提供することを課題とする。
The present invention has been made in view of the above-described conventional problems, for example, and provides an actuator capable of swinging a movable part with relatively high accuracy while improving the degree of freedom of design, for example. Is an issue.
第1のアクチュエータは上記課題を解決するために、可動部と、当該可動部を取り囲む支持部と、前記可動部が揺動可能なように前記可動部と前記支持部とを接続するトーションバーと、前記可動部に形成されると共に、前記可動部の外部に伸長していない駆動コイルと、前記支持部に形成されると共に、前記可動部を揺動させるための制御電流が供給される電源コイルと、前記駆動コイルに静磁界を印加する磁界印加部とを備える。
In order to solve the above problems, the first actuator includes a movable part, a support part surrounding the movable part, and a torsion bar connecting the movable part and the support part so that the movable part can swing. A drive coil that is formed on the movable part and does not extend outside the movable part, and a power supply coil that is formed on the support part and is supplied with a control current for swinging the movable part And a magnetic field application unit that applies a static magnetic field to the drive coil.
第2のアクチュエータは上記課題を解決するために、可動部と、当該可動部を取り囲む内側支持部と、前記可動部が揺動可能なように前記可動部と前記内側支持部とを接続する内側トーションバーと、当該内側支持部を取り囲む外側支持部と、前記内側支持部が揺動可能なように前記内側支持部と前記外側支持部とを接続する外側トーションバーと、前記可動部に形成されると共に、前記可動部の外部に伸長していない駆動コイルと、前記内側支持部に形成されると共に、前記可動部及び前記内側支持部を揺動させるための制御電流が供給される電源コイルと、前記駆動コイルに第1静磁界を印加する第1磁界印加部と、前記電源コイルに第2静磁界を印加する第2磁界印加部とを備える
第3のアクチュエータは上記課題を解決するために、可動部と、当該可動部を取り囲む内側支持部と、前記可動部が揺動可能なように前記可動部と前記内側支持部とを接続する内側トーションバーと、当該内側支持部を取り囲む外側支持部と、前記内側支持部が揺動可能なように前記内側支持部と前記外側支持部とを接続する外側トーションバーと、前記可動部に形成されると共に、前記可動部の外部に伸長していない第1駆動コイルと、前記内側支持部に形成されると共に、前記内側支持部の外部に伸長していない第2駆動コイルと、前記外側支持部に形成されると共に、前記可動部及び前記内側支持部を揺動させるための制御電流が供給される電源コイルと、前記第1駆動コイルに第1静磁界を印加する第1磁界印加部と、前記第2駆動コイルに第2静磁界を印加する第2磁界印加部とを備える。 In order to solve the above problems, the second actuator has a movable part, an inner support part that surrounds the movable part, and an inner side that connects the movable part and the inner support part so that the movable part can swing. A torsion bar, an outer support portion that surrounds the inner support portion, an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and the movable portion are formed. And a drive coil that does not extend to the outside of the movable part, and a power supply coil that is formed on the inner support part and is supplied with a control current for swinging the movable part and the inner support part. A third actuator comprising a first magnetic field applying unit that applies a first static magnetic field to the drive coil and a second magnetic field applying unit that applies a second static magnetic field to the power supply coil. , A movable part, an inner support part surrounding the movable part, an inner torsion bar connecting the movable part and the inner support part so that the movable part can swing, and an outer support part surrounding the inner support part And an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and is formed on the movable portion and does not extend outside the movable portion. A first drive coil, a second drive coil formed on the inner support portion and not extending outside the inner support portion, and formed on the outer support portion, and the movable portion and the inner support. A power supply coil to which a control current for swinging the unit is supplied, a first magnetic field application unit for applying a first static magnetic field to the first drive coil, and a second static magnetic field to the second drive coil With a second magnetic field application unit That.
第3のアクチュエータは上記課題を解決するために、可動部と、当該可動部を取り囲む内側支持部と、前記可動部が揺動可能なように前記可動部と前記内側支持部とを接続する内側トーションバーと、当該内側支持部を取り囲む外側支持部と、前記内側支持部が揺動可能なように前記内側支持部と前記外側支持部とを接続する外側トーションバーと、前記可動部に形成されると共に、前記可動部の外部に伸長していない第1駆動コイルと、前記内側支持部に形成されると共に、前記内側支持部の外部に伸長していない第2駆動コイルと、前記外側支持部に形成されると共に、前記可動部及び前記内側支持部を揺動させるための制御電流が供給される電源コイルと、前記第1駆動コイルに第1静磁界を印加する第1磁界印加部と、前記第2駆動コイルに第2静磁界を印加する第2磁界印加部とを備える。 In order to solve the above problems, the second actuator has a movable part, an inner support part that surrounds the movable part, and an inner side that connects the movable part and the inner support part so that the movable part can swing. A torsion bar, an outer support portion that surrounds the inner support portion, an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and the movable portion are formed. And a drive coil that does not extend to the outside of the movable part, and a power supply coil that is formed on the inner support part and is supplied with a control current for swinging the movable part and the inner support part. A third actuator comprising a first magnetic field applying unit that applies a first static magnetic field to the drive coil and a second magnetic field applying unit that applies a second static magnetic field to the power supply coil. , A movable part, an inner support part surrounding the movable part, an inner torsion bar connecting the movable part and the inner support part so that the movable part can swing, and an outer support part surrounding the inner support part And an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and is formed on the movable portion and does not extend outside the movable portion. A first drive coil, a second drive coil formed on the inner support portion and not extending outside the inner support portion, and formed on the outer support portion, and the movable portion and the inner support. A power supply coil to which a control current for swinging the unit is supplied, a first magnetic field application unit for applying a first static magnetic field to the first drive coil, and a second static magnetic field to the second drive coil With a second magnetic field application unit That.
本発明の作用及び他の利得は次に説明する実施形態から明らかにされる。
The operation and other advantages of the present invention will be clarified from the embodiments described below.
以下、アクチュエータの実施形態について順に説明する。
Hereinafter, embodiments of the actuator will be described in order.
第1実施形態のアクチュエータは、可動部と、当該可動部を取り囲む支持部と、前記可動部が揺動可能なように前記可動部と前記支持部とを接続するトーションバーと、前記可動部に形成されると共に、前記可動部の外部に伸長していない駆動コイルと、前記支持部に形成されると共に、前記可動部を揺動させるための制御電流が供給される電源コイルと、前記駆動コイルに静磁界を印加する磁界印加部とを備える。
The actuator according to the first embodiment includes a movable part, a support part surrounding the movable part, a torsion bar that connects the movable part and the support part so that the movable part can swing, and a movable part. A drive coil that is formed and does not extend outside the movable part; a power supply coil that is formed in the support part and that is supplied with a control current for swinging the movable part; and the drive coil And a magnetic field applying unit for applying a static magnetic field.
第1実施形態のアクチュエータによれば、トーションバーによって懸架された可動部が遥動する。可動部は、例えば、トーションバーが伸長する方向を中心軸として回転するように遥動してもよいし、或いは、トーションバーが伸長する方向に沿って又はトーションバーが伸長する方向と交わる方向に沿って移動するように遥動してもよい。
According to the actuator of the first embodiment, the movable part suspended by the torsion bar swings. For example, the movable portion may be swung so as to rotate about the direction in which the torsion bar extends as a central axis, or along the direction in which the torsion bar extends or in the direction intersecting with the direction in which the torsion bar extends. You may swing to move along.
このとき、トーションバーは、可動部と支持部とを直接的に接続していてもよい。或いは、トーションバーは、可動部と支持部とを間接的に(言い換えれば、間に任意の部材を介在させた上で)接続してもよい。
At this time, the torsion bar may directly connect the movable part and the support part. Alternatively, the torsion bar may indirectly connect the movable part and the support part (in other words, with an arbitrary member interposed therebetween).
第1実施形態のアクチュエータでは、可動部には、駆動コイルが形成されている。このとき、駆動コイルは、可動部の表面上に形成されていてもよいし、可動部の内部に埋め込まれるように形成されていてもよい。第1実施形態では特に、駆動コイルは、可動部の外部に伸長していない。言い換えれば、駆動コイルは、可動部上で又は可動部内でのみ伸長している。更に言い換えれば、駆動コイルは、トーションバーや支持部には形成されない。
In the actuator of the first embodiment, a drive coil is formed on the movable part. At this time, the drive coil may be formed on the surface of the movable part, or may be formed so as to be embedded in the movable part. Particularly in the first embodiment, the drive coil does not extend to the outside of the movable part. In other words, the drive coil extends only on or within the movable part. In other words, the drive coil is not formed on the torsion bar or the support portion.
更に、第1実施形態のアクチュエータでは、支持部には、電源コイルが形成されている。電源コイルには、可動部を遥動させるための制御電流が供給される。制御電流は、例えば、アクチュエータが備える又はアクチュエータの外部に用意される電源から電源コイルに対して供給される。尚、上述したように、駆動コイルは、可動部の外部に伸長していない。従って、電源コイルは、駆動コイルに対して、電気的に接続されていない。このため、制御電流は、駆動コイルに対しては供給されない。加えて、電源コイルが駆動コイル側に向かって伸長する必要性が薄い又はない以上、電源コイル(或いは、当該電源コイルにつながる配線)もまた、トーションバー上には形成されないことが好ましい。
Furthermore, in the actuator of the first embodiment, a power supply coil is formed in the support portion. A control current for swinging the movable part is supplied to the power supply coil. For example, the control current is supplied to the power coil from a power source provided in the actuator or prepared outside the actuator. As described above, the drive coil does not extend to the outside of the movable part. Therefore, the power supply coil is not electrically connected to the drive coil. For this reason, the control current is not supplied to the drive coil. In addition, it is preferable that the power supply coil (or the wiring connected to the power supply coil) is not formed on the torsion bar as long as the necessity of extending the power supply coil toward the drive coil is small or not.
このような第1実施形態のアクチュエータでは、以下のように可動部が遥動する。まず、電源コイルに制御電流が供給される。その結果、電源コイルからは、アンペールの法則に従って、磁界(或いは、磁力線)が生ずる。電源コイルから生ずる磁界の一部又は全部は、支持部によって取り囲まれている(言い換えれば、支持部に形成されている電源コイルによって取り囲まれている)可動部にも到達する。つまり、電源コイルから生ずる磁界の一部又は全部は、可動部に形成されている駆動コイルにも到達する。その結果、駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流(つまり、電源コイルから生ずる磁界に起因した電磁誘導作用による電流)が発生する。一方で、駆動コイルには、磁界印加部によって静磁界が印加されている。従って、駆動コイルには、磁界印加部から印加される静磁界と駆動コイルに発生する誘導電流との電磁相互作用に起因した力(つまり、ローレンツ力)が生ずる。その結果、駆動コイルが形成されている可動部は、磁界印加部から印加される静磁界と駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。
In the actuator according to the first embodiment, the movable part swings as follows. First, a control current is supplied to the power supply coil. As a result, a magnetic field (or lines of magnetic force) is generated from the power supply coil in accordance with Ampere's law. Part or all of the magnetic field generated from the power supply coil also reaches the movable part surrounded by the support part (in other words, surrounded by the power supply coil formed on the support part). That is, part or all of the magnetic field generated from the power supply coil also reaches the drive coil formed in the movable part. As a result, an induced current due to the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the drive coil. On the other hand, a static magnetic field is applied to the drive coil by a magnetic field application unit. Therefore, a force (that is, a Lorentz force) is generated in the drive coil due to electromagnetic interaction between the static magnetic field applied from the magnetic field application unit and the induced current generated in the drive coil. As a result, the movable part in which the drive coil is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the magnetic field application part and the induced current generated in the drive coil.
このように、第1実施形態のアクチュエータによれば、遥動させるべき可動部に駆動コイルを形成することができる。従って、可動部を相対的に高精度に遥動させる(つまり、駆動する)ことができる。
Thus, according to the actuator of the first embodiment, the drive coil can be formed on the movable part to be moved. Therefore, the movable part can be swung (that is, driven) with relatively high accuracy.
その一方で、第1実施形態のアクチュエータによれば、駆動コイルに生ずる誘導電流を用いて(言い換えれば、電源コイルから無線伝送される電力ないしは電流を動力源として用いて)可動部を遥動させることができるため、駆動コイルが可動部の外部に伸長しなくともよくなる。従って、駆動コイルにつながる配線をトーションバーに形成しなくともよくなる。従って、アクチュエータの構造が単純化すると共に、アクチュエータの製造工程もまた単純化する。このため、アクチュエータの設計の自由度を相対的に高めつつ、可動部を相対的に高精度に遥動させる(つまり、駆動する)ことができる。
On the other hand, according to the actuator of the first embodiment, the movable part is swayed using the induced current generated in the drive coil (in other words, using the power or current wirelessly transmitted from the power coil as the power source). Therefore, the drive coil does not need to extend outside the movable part. Therefore, it is not necessary to form wiring connected to the drive coil on the torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, it is possible to swing (i.e., drive) the movable portion with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
更には、ねじれ等の応力が加わり且つ相対的に幅が狭いトーションバーに配線を形成しなくともよくなるため、配線の断線を考慮しなくともよくなる。つまり、アクチュエータの耐久性(或いは、耐故障性)を相対的に向上させることができる。
Furthermore, since it is not necessary to form wiring on a torsion bar having a relatively narrow width due to stress such as torsion, it is not necessary to consider disconnection of wiring. That is, the durability (or fault tolerance) of the actuator can be relatively improved.
第1実施形態のアクチュエータの他の態様では、前記電源コイルから生ずる磁界が前記駆動コイル内を通過することで、前記駆動コイルに誘導電流が発生し、前記可動部は、前記磁界印加部から印加される前記静磁界と前記駆動コイルに発生する前記誘導電流との電磁相互作用によって遥動する。
In another aspect of the actuator of the first embodiment, an induced current is generated in the drive coil when the magnetic field generated from the power supply coil passes through the drive coil, and the movable part is applied from the magnetic field application part. The magnetic field is oscillated by electromagnetic interaction between the static magnetic field generated and the induced current generated in the drive coil.
この態様によれば、上述したように、可動部は、磁界印加部から印加される静磁界と駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。従って、上述した各種効果を好適に享受することができる。
According to this aspect, as described above, the movable part swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the magnetic field applying part and the induced current generated in the drive coil. Therefore, the various effects described above can be suitably enjoyed.
第1実施形態のアクチュエータの他の態様では、前記駆動コイル及び前記電源コイルは、前記制御電流が供給されることで前記電源コイルから生ずる磁界が前記駆動コイル内を通過する位置関係を有するように形成される。
In another aspect of the actuator of the first embodiment, the drive coil and the power supply coil have a positional relationship in which a magnetic field generated from the power supply coil passes through the drive coil when the control current is supplied. It is formed.
この態様によれば、電源コイルから生ずる磁界の一部又は全部は、可動部に形成されている駆動コイルに好適に到達する。その結果、駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流が好適に発生する。このため、可動部は、磁界印加部から印加される静磁界と駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって好適に遥動する。従って、上述した各種効果を好適に享受することができる。
According to this aspect, part or all of the magnetic field generated from the power supply coil suitably reaches the drive coil formed in the movable part. As a result, an induced current due to the magnetic field generated from the power supply coil is suitably generated in the drive coil. For this reason, the movable part is suitably swung by the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the magnetic field application part and the induced current generated in the drive coil. Therefore, the various effects described above can be suitably enjoyed.
第1実施形態のアクチュエータの他の態様では、前記可動部は、磁性材料を含む。
In another aspect of the actuator of the first embodiment, the movable part includes a magnetic material.
この態様によれば、可動部が磁性材料を含んでいない場合と比較して、可動部に形成される駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流が発生しやすくなる。或いは、可動部が磁性材料を含んでいない場合と比較して、可動部に形成される駆動コイルには、より大きな誘導電流が発生しやすくなる。その結果、可動部が磁性材料を含んでいない場合と比較して、駆動コイルには、より大きなローレンツ力が生じやすくなる。従って、可動部を効率的に遥動させることができる。
According to this aspect, in comparison with a case where the movable part does not contain a magnetic material, an induced current caused by a magnetic field generated from the power supply coil is likely to be generated in the drive coil formed in the movable part. Or, compared with a case where the movable part does not contain a magnetic material, a larger induced current is likely to be generated in the drive coil formed in the movable part. As a result, as compared with the case where the movable part does not contain a magnetic material, a larger Lorentz force is likely to be generated in the drive coil. Therefore, the movable part can be moved far efficiently.
第1実施形態のアクチュエータの他の態様では、前記支持部には、前記電源コイルが複数形成される。
In another aspect of the actuator of the first embodiment, a plurality of the power supply coils are formed in the support portion.
この態様によれば、複数の電源コイルを形成することで、複数の電源コイルから生ずる磁界が駆動コイル内を通過しやすくなる。このとき、駆動コイル内を磁界が適切に通過するように、複数の電源コイルの配置を好適に調整することが好ましい。
According to this aspect, by forming the plurality of power supply coils, the magnetic field generated from the plurality of power supply coils can easily pass through the drive coil. At this time, it is preferable to suitably adjust the arrangement of the plurality of power supply coils so that the magnetic field appropriately passes through the drive coil.
尚、電源コイルが複数形成される状態として、文字通り、夫々が独立した(例えば、電気的に又は物理的に分離した)電源コイルが複数形成される状態の他に、1つの電源コイルが複数のコイル部分を含んでいる状態も想定される。
In addition, as a state where a plurality of power supply coils are formed, literally, in addition to a state where a plurality of power supply coils that are independent of each other (for example, electrically or physically separated) are formed, one power supply coil includes a plurality of power supply coils. A state including a coil portion is also assumed.
第2実施形態のアクチュエータは、可動部と、当該可動部を取り囲む内側支持部と、前記可動部が揺動可能なように前記可動部と前記内側支持部とを接続する内側トーションバーと、当該内側支持部を取り囲む外側支持部と、前記内側支持部が揺動可能なように前記内側支持部と前記外側支持部とを接続する外側トーションバーと、前記可動部に形成されると共に、前記可動部の外部に伸長していない駆動コイルと、前記内側支持部に形成されると共に、前記可動部及び前記内側支持部を揺動させるための制御電流が供給される電源コイルと、前記駆動コイルに第1静磁界を印加する第1磁界印加部と、前記電源コイルに第2静磁界を印加する第2磁界印加部とを備える。
The actuator of the second embodiment includes a movable part, an inner support part that surrounds the movable part, an inner torsion bar that connects the movable part and the inner support part so that the movable part can swing, An outer support portion that surrounds the inner support portion, an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and a movable portion that is formed on the movable portion. A drive coil that does not extend outside the power supply unit, a power supply coil that is formed on the inner support part and that is supplied with a control current for swinging the movable part and the inner support part, and the drive coil. A first magnetic field applying unit that applies a first static magnetic field; and a second magnetic field applying unit that applies a second static magnetic field to the power supply coil.
第2実施形態のアクチュエータによれば、内側トーションバーによって懸架された可動部が遥動する。可動部は、例えば、内側トーションバーが伸長する方向を中心軸として回転するように遥動してもよいし、或いは、内側トーションバーが伸長する方向に沿って又は内側トーションバーが伸長する方向と交わる方向に沿って移動するように遥動してもよい。
According to the actuator of the second embodiment, the movable part suspended by the inner torsion bar swings. For example, the movable portion may be swung so as to rotate about the direction in which the inner torsion bar extends, or along the direction in which the inner torsion bar extends or in the direction in which the inner torsion bar extends. You may swing so that it may move along the crossing direction.
このとき、内側トーションバーは、可動部と内側支持部とを直接的に接続していてもよい。或いは、内側トーションバーは、可動部と内側支持部とを間接的に(言い換えれば、間に任意の部材を介在させた上で)接続してもよい。
At this time, the inner torsion bar may directly connect the movable part and the inner support part. Alternatively, the inner torsion bar may indirectly connect the movable portion and the inner support portion (in other words, with an arbitrary member interposed therebetween).
更に、第2実施形態のアクチュエータによれば、外側トーションバーによって懸架された内側支持部が遥動する。内側支持部は、例えば、外側トーションバーが伸長する方向を中心軸として回転するように遥動してもよいし、或いは、外側トーションバーが伸長する方向に沿って又は外側トーションバーが伸長する方向と交わる方向に沿って移動するように遥動してもよい。
Furthermore, according to the actuator of the second embodiment, the inner support portion suspended by the outer torsion bar swings. For example, the inner support portion may be swung so as to rotate about the direction in which the outer torsion bar extends, or the direction in which the outer torsion bar extends or the direction in which the outer torsion bar extends. You may swing so that it may move along the direction which intersects.
このとき、外側トーションバーは、内側支持部と外側支持部とを直接的に接続していてもよい。或いは、外側トーションバーは、内側支持部と外側支持部とを間接的に(言い換えれば、間に任意の部材を介在させた上で)接続してもよい。
At this time, the outer torsion bar may directly connect the inner support portion and the outer support portion. Or an outer side torsion bar may connect an inner side support part and an outer side support part indirectly (in other words, interposing any member in between).
第2実施形態のアクチュエータでは、可動部には、駆動コイルが形成されている。このとき、駆動コイルは、可動部の表面上に形成されていてもよいし、可動部の内部に埋め込まれるように形成されていてもよい。第2実施形態では特に、駆動コイルは、可動部の外部に伸長していない。言い換えれば、駆動コイルは、可動部上で又は可動部内でのみ伸長している。更に言い換えれば、駆動コイルは、内側トーションバーや内側支持部や外側トーションバーや外側支持部には形成されない。
In the actuator of the second embodiment, a drive coil is formed on the movable part. At this time, the drive coil may be formed on the surface of the movable part, or may be formed so as to be embedded in the movable part. Particularly in the second embodiment, the drive coil does not extend to the outside of the movable part. In other words, the drive coil extends only on or within the movable part. In other words, the drive coil is not formed on the inner torsion bar, the inner support part, the outer torsion bar, or the outer support part.
更に、第2実施形態のアクチュエータでは、内側支持部には、電源コイルが形成されている。電源コイルには、可動部及び内側支持部の双方を遥動させるための制御電流が供給される。制御電流は、例えば、アクチュエータが備える又はアクチュエータの外部に用意される電源から電源コイルに対して供給される。尚、上述したように、駆動コイルは、可動部の外部に伸長していない。従って、電源コイルは、駆動コイルに対して、電気的に接続されていない。このため、制御電流は、駆動コイルに対しては供給されない。加えて、電源コイルが駆動コイル側に向かって伸長する必要性が薄い又はない以上、電源コイル(或いは、当該電源コイルにつながる配線)もまた、内側トーションバー上には形成されないことが好ましい。
Furthermore, in the actuator of the second embodiment, a power supply coil is formed on the inner support portion. A control current for swinging both the movable part and the inner support part is supplied to the power supply coil. For example, the control current is supplied to the power coil from a power source provided in the actuator or prepared outside the actuator. As described above, the drive coil does not extend to the outside of the movable part. Therefore, the power supply coil is not electrically connected to the drive coil. For this reason, the control current is not supplied to the drive coil. In addition, it is preferable that the power supply coil (or the wiring connected to the power supply coil) is not formed on the inner torsion bar as long as the necessity of extending the power supply coil toward the drive coil is small or not.
このような第2実施形態のアクチュエータでは、以下のように可動部が遥動する。まず、電源コイルに制御電流が供給される。一方で、電源コイルには、第2磁界印加部によって第2静磁界が印加されている。従って、電源コイルには、第2磁界印加部から印加される第2静磁界と電源コイルに供給される制御電流との電磁相互作用に起因した力(つまり、ローレンツ力)が生ずる。その結果、電源コイルが形成されている内側支持部は、第2磁界印加部から印加される第2静磁界と電源コイルに供給される制御電流との電磁相互作用に起因したローレンツ力によって遥動する。ここで、内側支持部には内側トーションバーを介して可動部が接続されている。このため、内側支持部の遥動に伴って、可動部もまた遥動する。
In the actuator according to the second embodiment, the movable part swings as follows. First, a control current is supplied to the power supply coil. On the other hand, the second static magnetic field is applied to the power supply coil by the second magnetic field application unit. Therefore, a force (that is, a Lorentz force) is generated in the power supply coil due to electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the control current supplied to the power supply coil. As a result, the inner support portion on which the power supply coil is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the second static magnetic field applied from the second magnetic field application portion and the control current supplied to the power supply coil. To do. Here, the movable part is connected to the inner support part via the inner torsion bar. For this reason, as the inner support portion swings, the movable portion also swings.
加えて、電源コイルに制御電流が供給されると、電源コイルからは、アンペールの法則に従って、磁界(磁力線)が生ずる。電源コイルから生ずる磁界の一部又は全部は、内側支持部によって取り囲まれている(言い換えれば、内側支持部に形成されている電源コイルによって取り囲まれている)可動部にも到達する。つまり、電源コイルから生ずる磁界の一部又は全部は、可動部に形成されている駆動コイルにも到達する。その結果、駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流(つまり、電源コイルから生ずる磁界に起因した電磁誘導作用による電流)が発生する。一方で、駆動コイルには、第1磁界印加部によって第1静磁界が印加されている。従って、駆動コイルには、第1磁界印加部から印加される第1静磁界と駆動コイルに発生する誘導電流との電磁相互作用に起因した力(つまり、ローレンツ力)が生ずる。その結果、駆動コイルが形成されている可動部は、第1磁界印加部から印加される第1静磁界と駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。
In addition, when a control current is supplied to the power supply coil, a magnetic field (lines of magnetic force) is generated from the power supply coil according to Ampere's law. Part or all of the magnetic field generated from the power supply coil also reaches the movable part surrounded by the inner support part (in other words, surrounded by the power supply coil formed on the inner support part). That is, part or all of the magnetic field generated from the power supply coil also reaches the drive coil formed in the movable part. As a result, an induced current due to the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the drive coil. On the other hand, a first static magnetic field is applied to the drive coil by the first magnetic field application unit. Therefore, a force (that is, Lorentz force) resulting from electromagnetic interaction between the first static magnetic field applied from the first magnetic field application unit and the induced current generated in the drive coil is generated in the drive coil. As a result, the movable part in which the drive coil is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the drive coil.
このように、第2実施形態のアクチュエータによれば、遥動させるべき可動部に駆動コイルを形成し且つ遥動させるべき内側支持部に電源コイル(つまり、実質的には駆動コイルとしても作用し得る電源コイル)を形成することができる。従って、可動部及び内側支持部の双方を相対的に高精度に遥動させる(つまり、駆動する)ことができる。
As described above, according to the actuator of the second embodiment, the drive coil is formed on the movable part to be swung, and the power supply coil (that is, substantially acts as the drive coil) on the inner support part to be swung. Power supply coil) can be formed. Therefore, both the movable part and the inner support part can be swung (that is, driven) with relatively high accuracy.
その一方で、第2実施形態のアクチュエータによれば、駆動コイルに生ずる誘導電流を用いて(言い換えれば、電源コイルから無線伝送される電力ないしは電流を動力源として用いて)可動部を遥動させることができるため、駆動コイルが可動部の外部に伸長しなくともよくなる。従って、駆動コイルにつながる配線を内側トーションバーに形成しなくともよくなる。従って、アクチュエータの構造が単純化すると共に、アクチュエータの製造工程もまた単純化する。このため、アクチュエータの設計の自由度を相対的に高めつつ、可動部を相対的に高精度に遥動させる(つまり、駆動する)ことができる。
On the other hand, according to the actuator of the second embodiment, the movable part is swung using the induced current generated in the drive coil (in other words, using the power or current wirelessly transmitted from the power supply coil as the power source). Therefore, the drive coil does not need to extend outside the movable part. Therefore, it is not necessary to form the wiring connected to the drive coil on the inner torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, it is possible to swing (i.e., drive) the movable portion with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
更には、ねじれ等の応力が加わり且つ相対的に幅が狭い内側トーションバーに配線を形成しなくともよくなるため、配線の断線を考慮しなくともよくなる。つまり、アクチュエータの耐久性(或いは、耐故障性)を向上させることができる。
Furthermore, since it is not necessary to form wiring on the inner torsion bar having a relatively narrow width due to stress such as torsion, it is not necessary to consider disconnection of the wiring. That is, the durability (or fault tolerance) of the actuator can be improved.
第2実施形態のアクチュエータの他の態様では、前記電源コイルから生ずる磁界が前記駆動コイル内を通過することで、前記駆動コイルに誘導電流が発生し、前記可動部は、前記第1磁界印加部から印加される前記第1静磁界と前記駆動コイルに発生する前記誘導電流との電磁相互作用によって遥動し、前記内側支持部は、前記第2磁界印加部から印加される第2静磁界と前記電源コイルに供給される前記制御電流との電磁相互作用によって遥動する。
In another aspect of the actuator of the second embodiment, a magnetic field generated from the power supply coil passes through the drive coil, so that an induced current is generated in the drive coil, and the movable part is configured to be the first magnetic field application part. The inner support portion swings by an electromagnetic interaction between the first static magnetic field applied from the first induction magnetic field and the induced current generated in the drive coil, and the second static magnetic field applied from the second magnetic field application portion It swings due to electromagnetic interaction with the control current supplied to the power supply coil.
この態様によれば、上述したように、可動部は、第1磁界印加部から印加される第1静磁界と駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。内側支持部は、第2磁界印加部から印加される第2静磁界と電源コイルに供給される制御電流との電磁相互作用に起因したローレンツ力によって遥動する。従って、上述した各種効果を好適に享受することができる。
According to this aspect, as described above, the movable portion swings due to the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application unit and the induced current generated in the drive coil. . The inner support portion swings due to the Lorentz force resulting from the electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the control current supplied to the power supply coil. Therefore, the various effects described above can be suitably enjoyed.
第2実施形態のアクチュエータの他の態様では、前記駆動コイル及び前記電源コイルは、前記制御電流が供給されることで前記電源コイルから生ずる磁界が前記駆動コイル内を通過する位置関係を有するように形成される。
In another aspect of the actuator of the second embodiment, the drive coil and the power supply coil have a positional relationship in which a magnetic field generated from the power supply coil passes through the drive coil when the control current is supplied. It is formed.
この態様によれば、電源コイルから生ずる磁界の一部又は全部は、可動部に形成されている駆動コイルに好適に到達する。その結果、駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流が好適に発生する。このため、可動部は、第1磁界印加部から印加される第1静磁界と駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって好適に遥動する。従って、上述した各種効果を好適に享受することができる。
According to this aspect, part or all of the magnetic field generated from the power supply coil suitably reaches the drive coil formed in the movable part. As a result, an induced current due to the magnetic field generated from the power supply coil is suitably generated in the drive coil. For this reason, the movable part suitably swings due to the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the drive coil. Therefore, the various effects described above can be suitably enjoyed.
第2実施形態のアクチュエータの他の態様では、前記制御電流には、前記可動部を遥動させるための電流成分と前記内側支持部を遥動させるための電流成分とが重畳されている。
In another aspect of the actuator of the second embodiment, the control current is superimposed with a current component for swinging the movable portion and a current component for swinging the inner support portion.
この態様によれば、このような制御電流を電源コイルに供給することで、可動部及び内側支持部の双方を好適に遥動させることができる。
According to this aspect, by supplying such a control current to the power supply coil, it is possible to suitably swing both the movable portion and the inner support portion.
第2実施形態のアクチュエータの他の態様では、前記可動部は、磁性材料を含む。
In another aspect of the actuator of the second embodiment, the movable part includes a magnetic material.
この態様によれば、可動部が磁性材料を含んでいない場合と比較して、可動部に形成される駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流が発生しやすくなる。或いは、可動部が磁性材料を含んでいない場合と比較して、可動部に形成される駆動コイルには、より大きな誘導電流が発生しやすくなる。その結果、可動部が磁性材料を含んでいない場合と比較して、駆動コイルには、より大きなローレンツ力が生じやすくなる。従って、可動部を効率的に遥動させることができる。
According to this aspect, in comparison with a case where the movable part does not contain a magnetic material, an induced current caused by a magnetic field generated from the power supply coil is likely to be generated in the drive coil formed in the movable part. Or, compared with a case where the movable part does not contain a magnetic material, a larger induced current is likely to be generated in the drive coil formed in the movable part. As a result, as compared with the case where the movable part does not contain a magnetic material, a larger Lorentz force is likely to be generated in the drive coil. Therefore, the movable part can be moved far efficiently.
第2実施形態のアクチュエータの他の態様では、前記内側支持部には、前記電源コイルが複数形成される。
In another aspect of the actuator of the second embodiment, a plurality of the power supply coils are formed on the inner support portion.
この態様によれば、複数の電源コイルを形成することで、複数の電源コイルから生ずる磁界が駆動コイル内を通過しやすくなる。このとき、駆動コイル内を磁界が適切に通過するように、複数の電源コイルの配置を好適に調整することが好ましい。
According to this aspect, by forming the plurality of power supply coils, the magnetic field generated from the plurality of power supply coils can easily pass through the drive coil. At this time, it is preferable to suitably adjust the arrangement of the plurality of power supply coils so that the magnetic field appropriately passes through the drive coil.
尚、電源コイルが複数形成される状態として、文字通り、夫々が独立した(例えば、電気的に又は物理的に分離した)電源コイルが複数形成される状態の他に、1つの電源コイルが複数のコイル部分を含んでいる状態も想定される。
In addition, as a state where a plurality of power supply coils are formed, literally, in addition to a state where a plurality of power supply coils that are independent of each other (for example, electrically or physically separated) are formed, one power supply coil includes a plurality of power supply coils. A state including a coil portion is also assumed.
第3実施形態のアクチュエータは、可動部と、当該可動部を取り囲む内側支持部と、前記可動部が揺動可能なように前記可動部と前記内側支持部とを接続する内側トーションバーと、当該内側支持部を取り囲む外側支持部と、前記内側支持部が揺動可能なように前記内側支持部と前記外側支持部とを接続する外側トーションバーと、前記可動部に形成されると共に、前記可動部の外部に伸長していない第1駆動コイルと、前記内側支持部に形成されると共に、前記内側支持部の外部に伸長していない第2駆動コイルと、前記外側支持部に形成されると共に、前記可動部及び前記内側支持部を揺動させるための制御電流が供給される電源コイルと、前記第1駆動コイルに第1静磁界を印加する第1磁界印加部と、前記第2駆動コイルに第2静磁界を印加する第2磁界印加部とを備える。
The actuator of the third embodiment includes a movable part, an inner support part that surrounds the movable part, an inner torsion bar that connects the movable part and the inner support part so that the movable part can swing, An outer support portion that surrounds the inner support portion, an outer torsion bar that connects the inner support portion and the outer support portion so that the inner support portion can swing, and a movable portion that is formed on the movable portion. A first drive coil that does not extend outside the part, a second drive coil that is formed on the inner support part, and that does not extend outside the inner support part, and is formed on the outer support part. A power supply coil to which a control current for swinging the movable part and the inner support part is supplied; a first magnetic field application part for applying a first static magnetic field to the first drive coil; and the second drive coil. 2nd Shizu And a second magnetic field application unit for applying the field.
第3実施形態のアクチュエータによれば、内側トーションバーによって懸架された可動部が遥動する。可動部は、例えば、内側トーションバーが伸長する方向を中心軸として回転するように遥動してもよいし、或いは、内側トーションバーが伸長する方向に沿って又は内側トーションバーが伸長する方向と交わる方向に沿って移動するように遥動してもよい。
According to the actuator of the third embodiment, the movable part suspended by the inner torsion bar swings. For example, the movable portion may be swung so as to rotate about the direction in which the inner torsion bar extends, or along the direction in which the inner torsion bar extends or in the direction in which the inner torsion bar extends. You may swing so that it may move along the crossing direction.
このとき、内側トーションバーは、可動部と内側支持部とを直接的に接続していてもよい。或いは、内側トーションバーは、可動部と内側支持部とを間接的に(言い換えれば、間に任意の部材を介在させた上で)接続してもよい。
At this time, the inner torsion bar may directly connect the movable part and the inner support part. Alternatively, the inner torsion bar may indirectly connect the movable portion and the inner support portion (in other words, with an arbitrary member interposed therebetween).
更に、第3実施形態のアクチュエータによれば、外側トーションバーによって懸架された内側支持部が遥動する。内側支持部は、例えば、外側トーションバーが伸長する方向を中心軸として回転するように遥動してもよいし、或いは、外側トーションバーが伸長する方向に沿って又は外側トーションバーが伸長する方向と交わる方向に沿って移動するように遥動してもよい。
Furthermore, according to the actuator of the third embodiment, the inner support portion suspended by the outer torsion bar swings. For example, the inner support portion may be swung so as to rotate about the direction in which the outer torsion bar extends, or the direction in which the outer torsion bar extends or the direction in which the outer torsion bar extends. You may swing so that it may move along the direction which intersects.
このとき、外側トーションバーは、内側支持部と外側支持部とを直接的に接続していてもよい。或いは、外側トーションバーは、内側支持部と外側支持部とを間接的に(言い換えれば、間に任意の部材を介在させた上で)接続してもよい。
At this time, the outer torsion bar may directly connect the inner support portion and the outer support portion. Or an outer side torsion bar may connect an inner side support part and an outer side support part indirectly (in other words, interposing any member in between).
第3実施形態のアクチュエータでは、可動部には、第1駆動コイルが形成されている。このとき、第1駆動コイルは、可動部の表面上に形成されていてもよいし、可動部の内部に埋め込まれるように形成されていてもよい。第3実施形態では特に、第1駆動コイルは、可動部の外部に伸長していない。言い換えれば、第1駆動コイルは、可動部上で又は可動部内でのみ伸長している。更に言い換えれば、第1駆動コイルは、内側トーションバーや内側支持部や外側トーションバーや外側支持部には形成されない。
In the actuator of the third embodiment, a first drive coil is formed on the movable part. At this time, the 1st drive coil may be formed on the surface of a movable part, and may be formed so that it may be embedded inside a movable part. Particularly in the third embodiment, the first drive coil does not extend to the outside of the movable part. In other words, the first drive coil extends only on or within the movable part. In other words, the first drive coil is not formed on the inner torsion bar, the inner support part, the outer torsion bar, or the outer support part.
更に、第3実施形態のアクチュエータでは、内側支持部には、第2駆動コイルが形成されている。このとき、第2駆動コイルは、内側支持部の表面上に形成されていてもよいし、内側支持部の内部に埋め込まれるように形成されていてもよい。第3実施形態では特に、第2駆動コイルは、内側支持部の外部に伸長していない。言い換えれば、第2駆動コイルは、内側支持部上で又は内側支持部内でのみ伸長している。更に言い換えれば、第2駆動コイルは、可動部や内側トーションバーや外側トーションバーや外側支持部には形成されない。
Furthermore, in the actuator of the third embodiment, a second drive coil is formed on the inner support portion. At this time, the 2nd drive coil may be formed on the surface of an inner side support part, and may be formed so that it may be embedded inside an inner side support part. Particularly in the third embodiment, the second drive coil does not extend to the outside of the inner support portion. In other words, the second drive coil extends only on or within the inner support. In other words, the second drive coil is not formed on the movable part, the inner torsion bar, the outer torsion bar, or the outer support part.
更に、第3実施形態のアクチュエータでは、外側支持部には、電源コイルが形成されている。電源コイルには、可動部及び内側支持部の双方を遥動させるための制御電流が供給される。制御電流は、例えば、アクチュエータが備える又はアクチュエータの外部に用意される電源から電源コイルに対して供給される。尚、上述したように、第1駆動コイルは、可動部の外部に伸長していない。同様に、第2駆動コイルは、内側支持部の外部に伸長していない。従って、電源コイルは、第1駆動コイル及び第2駆動コイルの双方に対して、電気的に接続されていない。このため、制御電流は、第1駆動コイル及び第2駆動コイルの夫々に対しては供給されない。加えて、電源コイルが第1駆動コイル及び第2駆動コイル側に向かって伸長する必要性が薄い又はない以上、電源コイル(或いは、当該電源コイルにつながる配線)もまた、内側トーションバーや外側トーションバー上には形成されないことが好ましい。
Furthermore, in the actuator of the third embodiment, a power supply coil is formed on the outer support portion. A control current for swinging both the movable part and the inner support part is supplied to the power supply coil. For example, the control current is supplied to the power coil from a power source provided in the actuator or prepared outside the actuator. As described above, the first drive coil does not extend outside the movable part. Similarly, the second drive coil does not extend to the outside of the inner support portion. Therefore, the power supply coil is not electrically connected to both the first drive coil and the second drive coil. For this reason, the control current is not supplied to each of the first drive coil and the second drive coil. In addition, since the necessity of extending the power supply coil toward the first drive coil and the second drive coil is small or not, the power supply coil (or the wiring connected to the power supply coil) is also connected to the inner torsion bar and the outer torsion bar. It is preferably not formed on the bar.
このような第3実施形態のアクチュエータでは、以下のように可動部が遥動する。まず、電源コイルに制御電流が供給される。電源コイルからは、アンペールの法則に従って、磁界(或いは、磁力線)が生ずる。電源コイルから生ずる磁界の一部又は全部は、外側側支持部によって取り囲まれている(言い換えれば、外側支持部に形成されている電源コイルによって取り囲まれている)可動部にも到達する。つまり、電源コイルから生ずる磁界の一部又は全部は、可動部に形成されている第1駆動コイルにも到達する。その結果、第1駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流(つまり、電源コイルから生ずる磁界に起因した電磁誘導作用による電流)が発生する。一方で、第1駆動コイルには、第1磁界印加部によって第1静磁界が印加されている。従って、第1駆動コイルには、第1磁界印加部から印加される第1静磁界と駆動コイルに発生する誘導電流との電磁相互作用に起因した力(つまり、ローレンツ力)が生ずる。その結果、第1駆動コイルが形成されている可動部は、第1磁界印加部から印加される第1静磁界と第1駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。
In such an actuator of the third embodiment, the movable part swings as follows. First, a control current is supplied to the power supply coil. A magnetic field (or lines of magnetic force) is generated from the power supply coil in accordance with Ampere's law. Part or all of the magnetic field generated from the power supply coil also reaches the movable part surrounded by the outer support part (in other words, surrounded by the power supply coil formed on the outer support part). That is, part or all of the magnetic field generated from the power supply coil also reaches the first drive coil formed in the movable part. As a result, an induced current due to the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the first drive coil. On the other hand, a first static magnetic field is applied to the first drive coil by the first magnetic field application unit. Therefore, a force (that is, a Lorentz force) is generated in the first drive coil due to an electromagnetic interaction between the first static magnetic field applied from the first magnetic field application unit and the induced current generated in the drive coil. As a result, the movable part in which the first drive coil is formed is caused by the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the first drive coil. Fluctuate.
更に、電源コイルから生ずる磁界の一部又は全部は、外側支持部によって取り囲まれている(言い換えれば、外側支持部に形成されている電源コイルによって取り囲まれている)内側支持部にも到達する。つまり、電源コイルから生ずる磁界の一部又は全部は、内側支持部に形成されている第2駆動コイルにも到達する。その結果、第2駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流(つまり、電源コイルから生ずる磁界に起因した電磁誘導作用による電流)が発生する。一方で、第2駆動コイルには、第2磁界印加部によって第2静磁界が印加されている。従って、第2駆動コイルには、第2磁界印加部から印加される第2静磁界と第2駆動コイルに発生する誘導電流との電磁相互作用に起因した力(つまり、ローレンツ力)が生ずる。その結果、第2駆動コイルが形成されている内側支持部は、第2磁界印加部から印加される第2静磁界と駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。ここで、内側支持部には内側トーションバーを介して可動部が接続されている。このため、内側支持部の遥動に伴って、可動部もまた遥動する。
Furthermore, a part or all of the magnetic field generated from the power supply coil reaches the inner support portion surrounded by the outer support portion (in other words, surrounded by the power supply coil formed on the outer support portion). That is, part or all of the magnetic field generated from the power supply coil also reaches the second drive coil formed on the inner support portion. As a result, an induced current caused by the magnetic field generated from the power supply coil (that is, a current due to electromagnetic induction caused by the magnetic field generated from the power supply coil) is generated in the second drive coil. On the other hand, a second static magnetic field is applied to the second drive coil by the second magnetic field application unit. Accordingly, a force (that is, a Lorentz force) is generated in the second drive coil due to an electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the induced current generated in the second drive coil. As a result, the inner support portion on which the second drive coil is formed is far away by the Lorentz force due to the electromagnetic interaction between the second static magnetic field applied from the second magnetic field application portion and the induced current generated in the drive coil. Move. Here, the movable part is connected to the inner support part via the inner torsion bar. For this reason, as the inner support portion swings, the movable portion also swings.
このように、第3実施形態のアクチュエータによれば、遥動させるべき可動部に第1駆動コイルを形成し且つ遥動させるべき内側支持部に第2駆動コイルを形成することができる。従って、可動部及び内側支持部の双方を相対的に高精度に遥動させる(つまり、駆動する)ことができる。
Thus, according to the actuator of the third embodiment, the first drive coil can be formed on the movable part to be swung, and the second drive coil can be formed on the inner support part to be swung. Therefore, both the movable part and the inner support part can be swung (that is, driven) with relatively high accuracy.
その一方で、第3実施形態のアクチュエータによれば、第1駆動コイルに生ずる誘導電流を用いて(言い換えれば、電源コイルから無線伝送される電力ないしは電流を動力源として用いて)可動部を遥動させることができるため、第1駆動コイルが可動部の外部に伸長しなくともよくなる。従って、第1駆動コイルにつながる配線を内側トーションバーに形成しなくともよくなる。従って、アクチュエータの構造が単純化すると共に、アクチュエータの製造工程もまた単純化する。このため、アクチュエータの設計の自由度を相対的に高めつつ、可動部を相対的に高精度に遥動させる(つまり、駆動する)ことができる。
On the other hand, according to the actuator of the third embodiment, the movable part is moved far away using the induced current generated in the first drive coil (in other words, using the power or current wirelessly transmitted from the power coil as the power source). Since the first drive coil can be moved, the first drive coil does not have to extend outside the movable portion. Therefore, it is not necessary to form the wiring connected to the first drive coil on the inner torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, it is possible to swing (i.e., drive) the movable portion with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
加えて、第3実施形態のアクチュエータによれば、第2駆動コイルに生ずる誘導電流を用いて(言い換えれば、電源コイルから無線伝送される電力ないしは電流を動力源として用いて)内側支持部を遥動させることができるため、第2駆動コイルが内側支持部の外部に伸長しなくともよくなる。従って、第2駆動コイルにつながる配線を内側トーションバーや外側トーションバーに形成しなくともよくなる。従って、アクチュエータの構造が単純化すると共に、アクチュエータの製造工程もまた単純化する。このため、アクチュエータの設計の自由度を相対的に高めつつ、内側支持部を相対的に高精度に遥動させる(つまり、駆動する)ことができる。
In addition, according to the actuator of the third embodiment, the inner support portion is further disengaged using the induced current generated in the second drive coil (in other words, using the power or current wirelessly transmitted from the power coil as the power source). Since the second drive coil can be moved, the second drive coil need not extend to the outside of the inner support portion. Therefore, it is not necessary to form the wiring connected to the second drive coil in the inner torsion bar or the outer torsion bar. Therefore, the structure of the actuator is simplified, and the manufacturing process of the actuator is also simplified. For this reason, the inner support portion can be swung (that is, driven) with relatively high accuracy while relatively increasing the degree of freedom in designing the actuator.
更には、ねじれ等の応力が加わり且つ相対的に幅が狭い内側トーションバー及び外側トーションバーの双方に配線を形成しなくともよくなるため、配線の断線を考慮しなくともよくなる。つまり、アクチュエータの耐久性(或いは、耐故障性)を向上させることができる。
Furthermore, since it is not necessary to form wiring on both the inner torsion bar and the outer torsion bar which are subjected to stress such as torsion and have a relatively narrow width, it is not necessary to consider disconnection of the wiring. That is, the durability (or fault tolerance) of the actuator can be improved.
第3実施形態のアクチュエータの他の態様では、前記電源コイルから生ずる磁界が前記第1駆動コイル内及び前記第2駆動コイル内を通過することで、前記第1駆動コイル及び前記第2駆動コイルの夫々に誘導電流が発生し、前記可動部は、前記第1磁界印加部から印加される前記第1静磁界と前記第1駆動コイルに発生する前記誘導電流との電磁相互作用によって遥動し、前記内側支持部は、前記第2磁界印加部から印加される前記第2静磁界と前記第2駆動コイルに発生する前記誘導電流との電磁相互作用によって遥動する。
In another aspect of the actuator of the third embodiment, a magnetic field generated from the power supply coil passes through the first drive coil and the second drive coil, so that the first drive coil and the second drive coil Inductive currents are generated respectively, and the movable part swings due to electromagnetic interaction between the first static magnetic field applied from the first magnetic field applying part and the induced current generated in the first drive coil, The inner support part swings due to electromagnetic interaction between the second static magnetic field applied from the second magnetic field application part and the induced current generated in the second drive coil.
この態様によれば、上述したように、可動部は、第1磁界印加部から印加される第1静磁界と第1駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。内側支持部は、第2磁界印加部から印加される第2静磁界と第2駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。従って、上述した各種効果を好適に享受することができる。
According to this aspect, as described above, the movable part is far away by the Lorentz force caused by the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the first drive coil. Move. The inner support portion swings due to Lorentz force caused by electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the induced current generated in the second drive coil. Therefore, the various effects described above can be suitably enjoyed.
第3実施形態のアクチュエータの他の態様では、前記第1駆動コイル、前記第2駆動コイル及び前記電源コイルは、前記制御電流が供給されることで前記電源コイルに生ずる磁界が前記第1駆動コイル内及び前記第2駆動コイル内の双方を通過する位置関係を有するように形成される。
In another aspect of the actuator of the third embodiment, the first drive coil, the second drive coil, and the power supply coil are such that a magnetic field generated in the power supply coil when the control current is supplied is generated in the first drive coil. And a positional relationship passing through both the inside and the inside of the second drive coil.
この態様によれば、電源コイルから生ずる磁界の一部又は全部は、可動部に形成されている第1駆動コイルや内側支持部に形成されている第2駆動コイルに好適に到達する。その結果、第1駆動コイルや第2駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流が好適に発生する。このため、可動部は、第1磁界印加部から印加される第1静磁界と第1駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって好適に遥動する。加えて、内側支持部は、第2磁界印加部から印加される第2静磁界と第2駆動コイルに発生する誘導電流との電磁相互作用に起因したローレンツ力によって好適に遥動する。従って、上述した各種効果を好適に享受することができる。
According to this aspect, part or all of the magnetic field generated from the power supply coil suitably reaches the first drive coil formed on the movable part and the second drive coil formed on the inner support part. As a result, an induced current caused by the magnetic field generated from the power supply coil is suitably generated in the first drive coil and the second drive coil. For this reason, the movable part suitably swings by the Lorentz force resulting from the electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the first drive coil. In addition, the inner support portion is suitably swung by a Lorentz force caused by electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the induced current generated in the second drive coil. Therefore, the various effects described above can be suitably enjoyed.
第3実施形態のアクチュエータの他の態様では、前記制御電流には、前記可動部を遥動させるための電流成分と前記内側支持部を遥動させるための電流成分とが重畳されている。
In another aspect of the actuator of the third embodiment, a current component for swinging the movable portion and a current component for swinging the inner support portion are superimposed on the control current.
この態様によれば、このような制御電流を電源コイルに供給することで、可動部及び内側支持部の双方を好適に遥動させることができる。
According to this aspect, by supplying such a control current to the power supply coil, it is possible to suitably swing both the movable portion and the inner support portion.
第3実施形態のアクチュエータの他の態様では、前記可動部及び前記内側支持部の少なくとも一方は、磁性材料を含む。
In another aspect of the actuator of the third embodiment, at least one of the movable part and the inner support part includes a magnetic material.
この態様によれば、可動部が磁性材料を含んでいる場合には、可動部が磁性材料を含んでいない場合と比較して、可動部に形成される第1駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流が発生しやすくなる。或いは、可動部が磁性材料を含んでいる場合には、可動部が磁性材料を含んでいない場合と比較して、可動部に形成される第1駆動コイルには、より大きな誘導電流が発生しやすくなる。その結果、可動部が磁性材料を含んでいる場合には、可動部が磁性材料を含んでいない場合と比較して、第1駆動コイルには、より大きなローレンツ力が生じやすくなる。従って、可動部を効率的に遥動させることができる。
According to this aspect, when the movable part includes the magnetic material, the first drive coil formed in the movable part is connected to the power coil from the case where the movable part does not include the magnetic material. An induced current due to the generated magnetic field is likely to be generated. Alternatively, when the movable part includes a magnetic material, a larger induced current is generated in the first drive coil formed in the movable part than when the movable part does not include a magnetic material. It becomes easy. As a result, when the movable part includes a magnetic material, a larger Lorentz force is more likely to be generated in the first drive coil than when the movable part does not include a magnetic material. Therefore, the movable part can be moved far efficiently.
同様に、内側支持部が磁性材料を含んでいる場合には、内側支持部が磁性材料を含んでいない場合と比較して、内側支持部に形成される第2駆動コイルには、電源コイルから生ずる磁界に起因した誘導電流が発生しやすくなる。或いは、内側支持部が磁性材料を含んでいる場合には、内側支持部が磁性材料を含んでいない場合と比較して、内側支持部に形成される第2駆動コイルには、より大きな誘導電流が発生しやすくなる。その結果、内側支持部が磁性材料を含んでいる場合には、内側支持部が磁性材料を含んでいない場合と比較して、第2駆動コイルには、より大きなローレンツ力が生じやすくなる。従って、内側支持部を効率的に遥動させることができる。
Similarly, when the inner support portion includes a magnetic material, the second drive coil formed on the inner support portion includes a power supply coil as compared with a case where the inner support portion does not include a magnetic material. An induced current due to the generated magnetic field is likely to be generated. Alternatively, when the inner support portion includes a magnetic material, a larger induced current is generated in the second drive coil formed on the inner support portion than when the inner support portion does not include a magnetic material. Is likely to occur. As a result, when the inner support portion includes a magnetic material, a larger Lorentz force is more likely to be generated in the second drive coil than when the inner support portion does not include a magnetic material. Therefore, the inner support portion can be efficiently swung.
第3実施形態のアクチュエータの他の態様では、前記外側支持部には、前記電源コイルが複数形成される。
In another aspect of the actuator of the third embodiment, a plurality of the power supply coils are formed on the outer support portion.
この態様によれば、複数の電源コイルを形成することで、複数の電源コイルから生ずる磁界が第1駆動コイル内や第2駆動コイル内を通過しやすくなる。このとき、第1駆動コイル内や第2駆動コイル内を磁界が適切に通過するように、複数の電源コイルの配置を好適に調整することが好ましい。
According to this aspect, by forming the plurality of power supply coils, the magnetic field generated from the plurality of power supply coils can easily pass through the first drive coil and the second drive coil. At this time, it is preferable to suitably adjust the arrangement of the plurality of power supply coils so that the magnetic field appropriately passes through the first drive coil and the second drive coil.
尚、電源コイルが複数形成される状態として、文字通り、夫々が独立した(例えば、電気的に又は物理的に分離した)電源コイルが複数形成される状態の他に、1つの電源コイルが複数のコイル部分を含んでいる状態も想定される。
In addition, as a state where a plurality of power supply coils are formed, literally, in addition to a state where a plurality of power supply coils that are independent of each other (for example, electrically or physically separated) are formed, one power supply coil includes a plurality of power supply coils. A state including a coil portion is also assumed.
本実施形態のこのような作用及び他の利得は次に説明する実施例から明らかにされる。
Such an operation and other advantages of the present embodiment will be clarified from examples described below.
以上説明したように、第1実施形態のアクチュエータによれば、可動部と、支持部と、トーションバーと、駆動コイルと、電源コイルと、磁界印加部とを備えている。第2実施形態のアクチュエータによれば、可動部と、内側支持部と、内側トーションバーと、外側支持部と、外側トーションバーと、駆動コイルと、電源コイルと、第1磁界印加部と、第2磁界印加部を備えている。第3実施形態のアクチュエータによれば、可動部と、内側支持部と、内側トーションバーと、外側支持部と、外側トーションバーと、第1駆動コイルと、第2駆動コイルと、電源コイルと、第1磁界印加部と、第2磁界印加部を備えている。従って、設計の自由度を向上させつつも可動部を相対的に高精度に遥動させることができる。
As described above, according to the actuator of the first embodiment, the movable part, the support part, the torsion bar, the drive coil, the power supply coil, and the magnetic field application part are provided. According to the actuator of the second embodiment, the movable part, the inner support part, the inner torsion bar, the outer support part, the outer torsion bar, the drive coil, the power supply coil, the first magnetic field application part, Two magnetic field application units are provided. According to the actuator of the third embodiment, the movable part, the inner support part, the inner torsion bar, the outer support part, the outer torsion bar, the first drive coil, the second drive coil, the power supply coil, A first magnetic field application unit and a second magnetic field application unit are provided. Therefore, it is possible to move the movable part with relatively high accuracy while improving the degree of freedom in design.
以下、実施例について図を参照しつつ説明する。
Hereinafter, examples will be described with reference to the drawings.
(1)第1実施例
以下、図1から図4を参照して、第1実施例のアクチュエータ100について説明する。 (1) First Example Hereinafter, anactuator 100 according to a first example will be described with reference to FIGS. 1 to 4.
以下、図1から図4を参照して、第1実施例のアクチュエータ100について説明する。 (1) First Example Hereinafter, an
(1-1)構成
初めに、図1を参照して、第1実施例のアクチュエータ100の構成について説明する。図1は、第1実施例のアクチュエータ100の構成の一例を示す平面図である。 (1-1) Configuration First, the configuration of theactuator 100 according to the first embodiment will be described with reference to FIG. FIG. 1 is a plan view showing an example of the configuration of the actuator 100 of the first embodiment.
初めに、図1を参照して、第1実施例のアクチュエータ100の構成について説明する。図1は、第1実施例のアクチュエータ100の構成の一例を示す平面図である。 (1-1) Configuration First, the configuration of the
図1に示すように、第1実施例のアクチュエータ100は、例えばレーザ光のスキャニングに用いられるプレーナ型電磁駆動アクチュエータ(即ち、MEMSスキャナ)である。アクチュエータ100は、支持部110と、可動部120と、一対のトーションバー130と、一対の永久磁石160とを備えている。
As shown in FIG. 1, the actuator 100 according to the first embodiment is a planar electromagnetic drive actuator (that is, a MEMS scanner) used for scanning of laser light, for example. The actuator 100 includes a support part 110, a movable part 120, a pair of torsion bars 130, and a pair of permanent magnets 160.
支持部110、可動部120及び一対のトーションバー130は、例えばシリコン基板等の非磁性基板から一体的に形成されている。即ち、支持部110、可動部120及び一対のトーションバー130は、例えばシリコン基板等の非磁性基板の一部が除去されることにより間隙が形成されることで形成されている。このときの形成プロセスとして、MEMSプロセスが用いられることが好ましい。尚、シリコン基板に代えて、任意の弾性材料から、支持部110、可動部120及び一対のトーションバー130が一体的に形成されてもよい。
The support portion 110, the movable portion 120, and the pair of torsion bars 130 are integrally formed from a nonmagnetic substrate such as a silicon substrate, for example. That is, the support part 110, the movable part 120, and the pair of torsion bars 130 are formed by forming a gap by removing a part of a nonmagnetic substrate such as a silicon substrate. A MEMS process is preferably used as the formation process at this time. Instead of the silicon substrate, the support portion 110, the movable portion 120, and the pair of torsion bars 130 may be integrally formed from an arbitrary elastic material.
支持部110は、可動部120を取り囲むような枠形状を有しており、一対のトーションバー130によって可動部120と接続されている。支持部110の表面には、電源コイル150が形成されている。但し、電源コイル150は、支持部110の内部に形成されてもよい。
The support part 110 has a frame shape surrounding the movable part 120, and is connected to the movable part 120 by a pair of torsion bars 130. A power supply coil 150 is formed on the surface of the support portion 110. However, the power supply coil 150 may be formed inside the support portion 110.
電源コイル150は、支持部110の枠形状に沿って伸長するコイルである。電源コイル150は、例えば相対的に導電率の高い材料(例えば、金や銅等)を用いて形成されてもよい。また、電源コイル150は、めっきプロセスやスパッタリング法等の半導体製造プロセスを用いて形成されてもよい。或いは、電源コイル150は、支持部110、可動部120及び一対のトーションバー130を形成するためのシリコン基板に対してインプラント法を用いて埋め込まれてもよい。
The power supply coil 150 is a coil that extends along the frame shape of the support portion 110. The power supply coil 150 may be formed using, for example, a material having relatively high conductivity (for example, gold or copper). The power supply coil 150 may be formed using a semiconductor manufacturing process such as a plating process or a sputtering method. Alternatively, the power supply coil 150 may be embedded in a silicon substrate for forming the support part 110, the movable part 120, and the pair of torsion bars 130 using an implant method.
電源コイル150には、支持部110上に形成されている電源端子151を介して、電源から制御電流が供給される。制御電流は、可動部120を遥動させるための制御電流であって、典型的には、可動部120が遥動する周波数と同期した周波数の信号成分を含む交流電流である。尚、電源は、アクチュエータ100自身が備えている電源であってもよいし、アクチュエータ100の外部に用意される電源であってもよい。
A control current is supplied to the power supply coil 150 from a power supply via a power supply terminal 151 formed on the support portion 110. The control current is a control current for swinging the movable portion 120, and is typically an alternating current including a signal component having a frequency synchronized with the frequency at which the movable portion 120 swings. The power source may be a power source provided in the actuator 100 itself, or may be a power source prepared outside the actuator 100.
また、電源コイル150は、駆動コイル140と電気的に又は物理的に接続されていない。従って、電源コイル150が可動部120側に向かって伸長する必要性が薄い又はない以上、電源コイル150(或いは、当該電源コイル150につながる配線)は、一対のトーションバー130上には形成されないことが好ましい。
Further, the power supply coil 150 is not electrically or physically connected to the drive coil 140. Accordingly, the power coil 150 (or the wiring connected to the power coil 150) is not formed on the pair of torsion bars 130 as long as the necessity of the power coil 150 extending toward the movable portion 120 is small or not. Is preferred.
可動部120は、揺動可能なように一対のトーションバー130によって支持部110に軸支されている。可動部120の表面には、レーザ光を反射する不図示のミラーが形成される。可動部120の表面には、更に、駆動コイル140が形成されている。但し、駆動コイル140は、可動部120の内部に形成されてもよい。
The movable part 120 is pivotally supported on the support part 110 by a pair of torsion bars 130 so as to be swingable. A mirror (not shown) that reflects the laser light is formed on the surface of the movable portion 120. A drive coil 140 is further formed on the surface of the movable portion 120. However, the drive coil 140 may be formed inside the movable part 120.
駆動コイル140は、例えば、可動部120の表面に形成される不図示のミラーを取り囲むように伸長するコイルである。駆動コイル140は、例えば相対的に導電率の高い材料(例えば、金や銅等)を用いて形成されてもよい。また、駆動コイル140は、めっきプロセスやスパッタリング法等の半導体製造プロセスを用いて形成されてもよい。或いは、駆動コイル140は、支持部110、可動部120及び一対のトーションバー130を形成するためのシリコン基板に対してインプラント法を用いて埋め込まれてもよい。
The drive coil 140 is, for example, a coil that extends so as to surround a mirror (not shown) formed on the surface of the movable part 120. The drive coil 140 may be formed using, for example, a material having relatively high conductivity (for example, gold or copper). The drive coil 140 may be formed using a semiconductor manufacturing process such as a plating process or a sputtering method. Alternatively, the drive coil 140 may be embedded in a silicon substrate for forming the support part 110, the movable part 120, and the pair of torsion bars 130 using an implant method.
第1実施例では、駆動コイル140は、可動部120内でのみ伸長している。言い換えれば、駆動コイル140は、可動部120の外部に向かって伸長していない。より具体的には、駆動コイル140は、一対のトーションバー130や支持部110には形成されない。このため、駆動コイル140は、電源コイル150とは電気的に接続されていない。或いは、駆動コイル140は、電源コイル150とは物理的に接続されていない。従って、駆動コイル140には、電源端子151を介して制御電流が直接的に供給されることはない。
In the first embodiment, the drive coil 140 extends only within the movable part 120. In other words, the drive coil 140 does not extend toward the outside of the movable part 120. More specifically, the drive coil 140 is not formed on the pair of torsion bars 130 or the support portion 110. For this reason, the drive coil 140 is not electrically connected to the power supply coil 150. Alternatively, the drive coil 140 is not physically connected to the power supply coil 150. Accordingly, the control current is not directly supplied to the drive coil 140 via the power supply terminal 151.
一対のトーションバー130は、可動部120が支持部110に対して揺動可能なように、可動部120と支持部110とを接続する。一対のトーションバー130の弾性によって、可動部120は、一対のトーションバー130が伸長する方向に沿った軸を中心軸(言い換えれば、回転軸)として回転するように遥動する。つまり、可動部120は、図1における左右の方向に沿った軸を中心軸として、当該中心軸の周りで回転するように遥動する。
The pair of torsion bars 130 connect the movable portion 120 and the support portion 110 so that the movable portion 120 can swing with respect to the support portion 110. Due to the elasticity of the pair of torsion bars 130, the movable portion 120 swings so as to rotate about an axis along the direction in which the pair of torsion bars 130 extends as a central axis (in other words, a rotation axis). That is, the movable unit 120 swings so as to rotate around the central axis with the axis along the left-right direction in FIG. 1 as the central axis.
一対の永久磁石160は、支持部110の外部に取り付けられている。一対の永久磁石160は、駆動コイル140に対して所定の静磁界を印加することができるように、その磁極の向きが適切に設定されていることが好ましい。尚、一対の永久磁石160には、静磁界の強度を高めるために、ヨークが付加されていてもよい。
The pair of permanent magnets 160 are attached to the outside of the support part 110. The pair of permanent magnets 160 preferably have their magnetic poles appropriately set so that a predetermined static magnetic field can be applied to the drive coil 140. Note that a yoke may be added to the pair of permanent magnets 160 in order to increase the strength of the static magnetic field.
(1-2)動作態様
続いて、図2を参照して、第1実施例のアクチュエータ100の動作態様について説明する。図2(a)は、第1実施例のアクチュエータ100の動作中の各電流及び各磁界の向きを示す平面図であり、図2(b)は、図2(a)のII-II’断面図である。 (1-2) Operation Mode Next, with reference to FIG. 2, the operation mode of theactuator 100 of the first embodiment will be described. FIG. 2A is a plan view showing directions of currents and magnetic fields during the operation of the actuator 100 of the first embodiment, and FIG. 2B is a cross-sectional view taken along the line II-II ′ of FIG. FIG.
続いて、図2を参照して、第1実施例のアクチュエータ100の動作態様について説明する。図2(a)は、第1実施例のアクチュエータ100の動作中の各電流及び各磁界の向きを示す平面図であり、図2(b)は、図2(a)のII-II’断面図である。 (1-2) Operation Mode Next, with reference to FIG. 2, the operation mode of the
第1実施例のアクチュエータ100が動作する(具体的には、可動部120が遥動する)場合には、まず、電源から、電源端子151を介して、電源コイル150に対して制御電流が供給される。
When the actuator 100 of the first embodiment operates (specifically, the movable part 120 swings), first, a control current is supplied from the power supply to the power supply coil 150 via the power supply terminal 151. Is done.
その結果、図2(a)及び図2(b)に示すように、電源コイル150からは、アンペールの法則(ないしは、右ねじの法則)に従って、磁界(磁力線)が生ずる。具体的には、電源コイル150の周囲には、電源コイル150を中心軸として、当該制御電流の進行方向に向かって時計回りの方向に沿った磁界が生ずる。
As a result, as shown in FIGS. 2A and 2B, a magnetic field (lines of magnetic force) is generated from the power supply coil 150 in accordance with Ampere's law (or right-handed screw law). Specifically, a magnetic field is generated around the power supply coil 150 along the clockwise direction with the power supply coil 150 as the central axis in the traveling direction of the control current.
ここで、電源コイル150から生ずる磁界の一部又は全部は、図2(a)及び図2(b)に示すように、当該電源コイル150が形成されている支持部110によって取り囲まれている可動部120にも到達する。そうすると、電源コイル150から生ずる磁界の一部又は全部は、図2(a)及び図2(b)に示すように、可動部120に形成されている駆動コイル140にも到達する。
Here, as shown in FIG. 2A and FIG. 2B, a part or all of the magnetic field generated from the power supply coil 150 is surrounded by the support 110 on which the power supply coil 150 is formed. Part 120 is also reached. Then, a part or all of the magnetic field generated from the power supply coil 150 reaches the drive coil 140 formed in the movable portion 120 as shown in FIGS. 2 (a) and 2 (b).
このため、電源コイル150と駆動コイル140とは、図2(a)及び図2(b)に示すように、電源コイル150から生ずる磁界の一部又は全部が駆動コイル140のコイル内部を通過することができる位置関係を有して形成されていることが好ましい。言い換えれば、電源コイル150と駆動コイル140とは、電源コイル150から生ずる磁界の全部が駆動コイル140のコイル内部を通過することができない位置関係を有していないことが好ましい。
For this reason, as shown in FIGS. 2A and 2B, the power supply coil 150 and the drive coil 140 allow part or all of the magnetic field generated from the power supply coil 150 to pass through the inside of the drive coil 140. It is preferable to be formed so as to have a positional relationship that can be achieved. In other words, the power supply coil 150 and the drive coil 140 preferably do not have a positional relationship in which the entire magnetic field generated from the power supply coil 150 cannot pass through the inside of the drive coil 140.
尚、電源コイル150から生ずる磁界が到達する範囲や強度等は、(i)支持部110のサイズや、(ii)可動部120のサイズや、(iii)支持部110と可動部120との間の位置関係や、(iv)電源コイル150に供給される制御電流のパラメータ(例えば、電流値や電圧値等)や、(v)電源コイル150そのもののパラメータ(例えば、電源コイル150のサイズや巻き線数等)によって変動し得る。また、電源コイル150に供給される制御電流のパラメータや電源コイル150そのもののパラメータは、可動部120を適切に遥動させるローレンツ力が発生するような適切な値に設定されることが好ましい。一方で、可動部120を適切に遥動させるローレンツ力の強度等は、(vi)駆動コイル140そのもののパラメータ(例えば、駆動コイル140のサイズや巻き線数等)等にも影響を受ける。このため、第1実施例では、(i)支持部110のサイズや、(ii)可動部120のサイズや、(iii)支持部110と可動部120との間の位置関係や、(iv)電源コイル150に供給される制御電流のパラメータや、(v)電源コイル150そのもののパラメータや、(vi)駆動コイル140そのもののパラメータ等を考慮した上で、駆動コイル140及び電源コイル150は、制御電流が供給されることで電源コイル150から生ずる磁界が駆動コイル140のコイル内部を通過する位置関係を有するように形成されることが好ましい。
The range, strength, etc., to which the magnetic field generated from the power supply coil 150 reaches are (i) the size of the support unit 110, (ii) the size of the movable unit 120, and (iii) between the support unit 110 and the movable unit 120. (Iv) Parameters of control current supplied to the power supply coil 150 (for example, current value and voltage value), (v) Parameters of the power supply coil 150 itself (for example, size and winding of the power supply coil 150) The number of lines may vary. Further, it is preferable that the parameter of the control current supplied to the power supply coil 150 and the parameter of the power supply coil 150 itself are set to appropriate values that generate Lorentz force that appropriately swings the movable portion 120. On the other hand, the intensity of the Lorentz force that appropriately swings the movable portion 120 is also affected by (vi) parameters of the drive coil 140 itself (for example, the size of the drive coil 140 and the number of windings). For this reason, in the first embodiment, (i) the size of the support portion 110, (ii) the size of the movable portion 120, (iii) the positional relationship between the support portion 110 and the movable portion 120, (iv) The drive coil 140 and the power supply coil 150 are controlled in consideration of parameters of the control current supplied to the power supply coil 150, (v) parameters of the power supply coil 150 itself, (vi) parameters of the drive coil 140 itself, and the like. It is preferable that the magnetic field generated from the power supply coil 150 by supplying a current has a positional relationship of passing through the inside of the drive coil 140.
電源コイル150から生ずる磁界の一部又は全部が駆動コイル140のコイル内部を通過すると、駆動コイル140には、電源コイル150から生ずる磁界に起因した誘導電流(つまり、電源コイル150から生ずる磁界に起因した電磁誘導作用による電流)が発生する。というのも、電源コイル150に供給される制御電流が典型的には交流電流であるがゆえに、電源コイル150から生ずる磁界の強度や方向もまた当該交流電流に従って変動するからである。
When a part or all of the magnetic field generated from the power supply coil 150 passes through the inside of the drive coil 140, the drive coil 140 has an induced current caused by the magnetic field generated from the power supply coil 150 (that is, a magnetic field generated from the power supply coil 150. Generated by the electromagnetic induction action). This is because, since the control current supplied to the power supply coil 150 is typically an alternating current, the strength and direction of the magnetic field generated from the power supply coil 150 also varies according to the alternating current.
一方で、駆動コイル140には、一対の永久磁石160によって静磁界が印加されている。
On the other hand, a static magnetic field is applied to the drive coil 140 by a pair of permanent magnets 160.
従って、駆動コイル140には、一対の永久磁石160から印加される静磁界と駆動コイル140に発生する誘導電流との電磁相互作用に起因した力(つまり、ローレンツ力)が生ずる。その結果、駆動コイル140が形成されている可動部120は、一対の永久磁石160から印加される静磁界と駆動コイル140に発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。つまり、可動部120は、図2(a)における左右の方向に沿った軸を中心軸として回転するように遥動する。
Therefore, a force (that is, Lorentz force) is generated in the drive coil 140 due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140. As a result, the movable part 120 in which the drive coil 140 is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140. . That is, the movable part 120 swings so as to rotate about the axis along the left and right direction in FIG.
以上説明したように、第1実施例のアクチュエータ100によれば、遥動させるべき可動部120に駆動コイル140を形成することができる。従って、可動部120に駆動コイル140を形成することなく可動部120を遥動させる比較例のアクチュエータと比較して、可動部120を相対的に高精度に遥動させる(つまり、駆動する)ことができる。
As described above, according to the actuator 100 of the first embodiment, the drive coil 140 can be formed on the movable portion 120 to be swayed. Therefore, the movable unit 120 is swung (that is, driven) with relatively high accuracy compared to the actuator of the comparative example that swings the movable unit 120 without forming the drive coil 140 in the movable unit 120. Can do.
その一方で、第1実施例のアクチュエータ100によれば、駆動コイル140に生ずる誘導電流を用いて(言い換えれば、電源コイル150から無線伝送される電力ないしは電流を動力源として用いて)可動部120を遥動させることができる。このため、駆動コイル140が可動部120の外部に伸長しなくともよくなる。従って、駆動コイル140が可動部120の外部に伸長しないがゆえに、駆動コイル140につながる配線を一対のトーションバー130(更には、支持部110)に形成しなくともよくなる。言い換えれば、第1実施例のアクチュエータ100によれば、電源コイル150に制御電流を供給することで駆動コイル140が形成されている可動部120を遥動させることができるため、駆動コイル140に対して制御電流を供給しなくともよくなる。その結果、第1実施例のアクチュエータ100によれば、駆動コイル140につながる配線を一対のトーションバー130に形成しなくともよくなる。従って、一対のトーションバー130上に配線を形成する比較例のアクチュエータと比較して、アクチュエータ100の構造が単純化すると共に、アクチュエータ100の製造工程もまた単純化する。このため、可動部120に駆動コイル140を形成することなく可動部120を遥動させる比較例のアクチュエータと比較して、アクチュエータの設計の自由度を相対的に高めるという比較例のアクチュエータと同様の効果を相応に享受しつつ、可動部120を相対的に高精度に遥動させる(つまり、駆動する)ことができる。或いは、可動部120に駆動コイル140を形成しつつ当該駆動コイル140につながる配線を一対のトーションバー130に形成する比較例のアクチュエータと比較して、可動部120を相対的に高精度に遥動させる(つまり、駆動する)ことができるという比較例のアクチュエータと同様の効果を相応に享受しつつ、アクチュエータ100の設計の自由度を相対的に高めることができる。
On the other hand, according to the actuator 100 of the first embodiment, the movable portion 120 is generated using the induced current generated in the drive coil 140 (in other words, using the power or current wirelessly transmitted from the power supply coil 150 as a power source). Can be swung. For this reason, the drive coil 140 does not have to extend outside the movable portion 120. Therefore, since the drive coil 140 does not extend to the outside of the movable part 120, it is not necessary to form a wire connected to the drive coil 140 in the pair of torsion bars 130 (and further the support part 110). In other words, according to the actuator 100 of the first embodiment, by supplying a control current to the power supply coil 150, the movable part 120 on which the drive coil 140 is formed can be moved far. Therefore, the control current need not be supplied. As a result, according to the actuator 100 of the first embodiment, it is not necessary to form the wiring connected to the drive coil 140 in the pair of torsion bars 130. Therefore, the structure of the actuator 100 is simplified and the manufacturing process of the actuator 100 is also simplified as compared with the actuator of the comparative example in which the wiring is formed on the pair of torsion bars 130. For this reason, it is the same as the actuator of the comparative example that relatively increases the degree of freedom in designing the actuator as compared with the actuator of the comparative example that moves the movable part 120 without forming the drive coil 140 in the movable part 120. The movable part 120 can be swung (that is, driven) with relatively high accuracy while enjoying the effect accordingly. Alternatively, the movable portion 120 is swung relatively accurately with respect to the actuator of the comparative example in which the wiring connected to the drive coil 140 is formed on the pair of torsion bars 130 while the drive coil 140 is formed on the movable portion 120. The degree of freedom of design of the actuator 100 can be relatively increased while appropriately enjoying the same effect as that of the actuator of the comparative example that can be driven (that is, driven).
更には、ねじれ等の応力が加わり且つ相対的に幅が狭い一対のトーションバー130に配線を形成しなくともよくなるため、配線の断線を考慮しなくともよくなる。つまり、駆動コイル140につながる配線を一対のトーションバー130に形成する比較例のアクチュエータと比較して、アクチュエータ100の耐久性(或いは、耐故障性)を向上させることができる。
Furthermore, since it is not necessary to form the wiring on the pair of torsion bars 130 to which stress such as torsion is applied and the width is relatively narrow, it is not necessary to consider the disconnection of the wiring. That is, the durability (or failure resistance) of the actuator 100 can be improved as compared with the actuator of the comparative example in which the wiring connected to the drive coil 140 is formed on the pair of torsion bars 130.
尚、第1実施例のアクチュエータ100では、駆動コイル140に生ずる誘導電流の大きさ(例えば、振幅)等が、可動部120を遥動させるための重要な要素の一つとなる。このため、駆動コイル140に生ずる誘導電流の大きさ(例えば、振幅)を相対的に大きくするために、可動部120は、磁性材料(例えば、強磁性体を含む材料又は透磁率が相対的に高い材料)を含んでいてもよい。例えば、可動部120の内部に、磁性材料からなる磁性部材が埋め込まれてもよい。或いは、可動部120の表面に、磁性材料からなる磁性膜が貼り付けられてもよい。このように構成すれば、可動部120に形成される駆動コイル140には、電源コイル150から生ずる磁界に起因した誘導電流が発生しやすくなる。或いは、可動部120が磁性材料を含んでいない場合と比較して、可動部120に形成される駆動コイル140には、より振幅が大きな誘導電流が発生しやすくなる。その結果、可動部120が磁性材料を含んでいない場合と比較して、駆動コイル140には、より大きなローレンツ力が生じやすくなる。従って、可動部120を効率的に遥動させることができる。
In the actuator 100 according to the first embodiment, the magnitude (for example, amplitude) of the induced current generated in the drive coil 140 is one of the important elements for causing the movable part 120 to move. For this reason, in order to relatively increase the magnitude (for example, amplitude) of the induced current generated in the drive coil 140, the movable portion 120 is made of a magnetic material (for example, a material including a ferromagnetic material or a relatively high permeability). High material). For example, a magnetic member made of a magnetic material may be embedded in the movable unit 120. Alternatively, a magnetic film made of a magnetic material may be attached to the surface of the movable part 120. With this configuration, an induced current due to a magnetic field generated from the power supply coil 150 is likely to be generated in the drive coil 140 formed in the movable portion 120. Or, compared with a case where the movable part 120 does not contain a magnetic material, an induced current having a larger amplitude is likely to be generated in the drive coil 140 formed in the movable part 120. As a result, compared with the case where the movable part 120 does not contain a magnetic material, a larger Lorentz force is likely to be generated in the drive coil 140. Accordingly, the movable part 120 can be efficiently swung.
(1-3)第1変形例
続いて、図3を参照して、第1実施例のアクチュエータ100に関連する第1変形例のアクチュエータ100aについて説明する。図3は、第1変形例のアクチュエータ100aの構成の一例を示す変形例である。尚、第1実施例のアクチュエータ100が備える構成要素と同一の構成要素については、同一の参照符号を付してその詳細な説明については省略する。 (1-3) First Modification Next, anactuator 100a of a first modification related to the actuator 100 of the first embodiment will be described with reference to FIG. FIG. 3 is a modification showing an example of the configuration of the actuator 100a of the first modification. Note that the same reference numerals are assigned to the same components as those included in the actuator 100 of the first embodiment, and the detailed description thereof is omitted.
続いて、図3を参照して、第1実施例のアクチュエータ100に関連する第1変形例のアクチュエータ100aについて説明する。図3は、第1変形例のアクチュエータ100aの構成の一例を示す変形例である。尚、第1実施例のアクチュエータ100が備える構成要素と同一の構成要素については、同一の参照符号を付してその詳細な説明については省略する。 (1-3) First Modification Next, an
図3に示すように、第1変形例のアクチュエータ100aは、第1実施例のアクチュエータ100と比較して、電源コイル150aの巻き線の形状が異なるという点で異なっている。具体的には、第1変形例では、電源コイル150aは、1本のらせん状の巻き線を含んでいる。一方で、第1実施例では、電源コイル150は、1巻きの巻き線を複数本含んでいる。尚、第1変形例のアクチュエータ100aが備える、電源コイル150aの巻き線の形状以外の構成要素については、第1実施例のアクチュエータ100が備える構成要素と同一であってもよい。
As shown in FIG. 3, the actuator 100a according to the first modification is different from the actuator 100 according to the first embodiment in that the winding shape of the power supply coil 150a is different. Specifically, in the first modification, the power supply coil 150a includes one spiral winding. On the other hand, in the first embodiment, the power supply coil 150 includes a plurality of single windings. In addition, about the components other than the shape of the winding of the power supply coil 150a with which the actuator 100a of a 1st modification is provided, you may be the same as the component with which the actuator 100 of a 1st Example is provided.
このような第1変形例のアクチュエータ100aであっても、第1実施例のアクチュエータ100が享受することができる各種効果を好適に享受することができる。
Even with the actuator 100a of the first modified example, various effects that can be enjoyed by the actuator 100 of the first embodiment can be suitably enjoyed.
尚、電源コイル150は、第1実施例に示す1本のらせん状の巻き線を含む形状及び第1変形例に示す1巻きの巻き線を複数本含む形状以外の任意の形状を有してもよい。より具体的には、電源コイル150は、電源コイル150から生ずる磁界の一部又は全部が駆動コイル140のコイル内部を通過することができるという条件を満たす限りは、任意の形状を有していてもよい。或いは、電源コイル150は、電源コイル150から生ずる磁界の一部又は全部が駆動コイル140のコイル内部を通過することができるという条件に加えて、当該電源コイル150そのもの及び当該電源コイル150につながる配線が一対のトーションバー130上に形成されないという条件を満たすように、任意の形状を有していてもよい。
The power supply coil 150 has any shape other than the shape including one spiral winding shown in the first embodiment and the shape including a plurality of one winding shown in the first modification. Also good. More specifically, the power supply coil 150 has an arbitrary shape as long as the condition that part or all of the magnetic field generated from the power supply coil 150 can pass through the inside of the drive coil 140 is satisfied. Also good. Alternatively, the power supply coil 150 has a condition that part or all of the magnetic field generated from the power supply coil 150 can pass through the inside of the drive coil 140, and the power supply coil 150 itself and wiring connected to the power supply coil 150. May have an arbitrary shape so as not to be formed on the pair of torsion bars 130.
また、電源コイル150に限らず、駆動コイル140もまた、任意の形状(例えば、1本のらせん状の巻き線を含む形状や、1巻きの巻き線を1本又は複数本含む形状等)を有していてもよい。具体的には、駆動コイル140は、電源コイル150から生ずる磁界の一部又は全部が駆動コイル140のコイル内部を通過することができるという条件及び駆動コイル140が可動部120の外部に伸長しないという条件を満たす限りは、任意の形状を有していてもよい。
Further, not only the power supply coil 150 but also the drive coil 140 has an arbitrary shape (for example, a shape including one spiral winding or a shape including one or a plurality of windings). You may have. Specifically, the drive coil 140 has a condition that part or all of the magnetic field generated from the power supply coil 150 can pass through the inside of the drive coil 140 and that the drive coil 140 does not extend outside the movable portion 120. As long as the condition is satisfied, it may have an arbitrary shape.
(1-4)第2変形例
続いて、図4を参照して、第1実施例のアクチュエータ100に関連する第2変形例のアクチュエータ100bについて説明する。図4は、第2変形例のアクチュエータ100bの構成の一例を示す変形例である。尚、第1実施例のアクチュエータ100が備える構成要素と同一の構成要素については、同一の参照符号を付してその詳細な説明については省略する。 (1-4) Second Modification Next, anactuator 100b of a second modification related to the actuator 100 of the first embodiment will be described with reference to FIG. FIG. 4 is a modification showing an example of the configuration of the actuator 100b of the second modification. Note that the same reference numerals are assigned to the same components as those included in the actuator 100 of the first embodiment, and the detailed description thereof is omitted.
続いて、図4を参照して、第1実施例のアクチュエータ100に関連する第2変形例のアクチュエータ100bについて説明する。図4は、第2変形例のアクチュエータ100bの構成の一例を示す変形例である。尚、第1実施例のアクチュエータ100が備える構成要素と同一の構成要素については、同一の参照符号を付してその詳細な説明については省略する。 (1-4) Second Modification Next, an
図4に示すように、第2変形例のアクチュエータ100bは、第1実施例のアクチュエータ100と比較して、電源コイル150bの巻き線の形状が異なるという点で異なっている。具体的には、第2変形例では、第1実施例のアクチュエータ100と比較して、電源コイル150bが複数のコイル部分151bを含んでいるという点で異なっている。尚、第2変形例のアクチュエータ100bが備える、電源コイル150bの巻き線の形状以外の構成要素については、第1実施例のアクチュエータ100が備える構成要素と同一であってもよい。
As shown in FIG. 4, the actuator 100b according to the second modification is different from the actuator 100 according to the first embodiment in that the winding shape of the power supply coil 150b is different. Specifically, the second modification is different from the actuator 100 of the first embodiment in that the power supply coil 150b includes a plurality of coil portions 151b. The constituent elements other than the winding shape of the power coil 150b provided in the actuator 100b of the second modification may be the same as the constituent elements provided in the actuator 100 of the first embodiment.
このような第2変形例のアクチュエータ100bであっても、第1実施例のアクチュエータ100が享受することができる各種効果を好適に享受することができる。
Even in the actuator 100b of the second modified example, various effects that can be enjoyed by the actuator 100 of the first embodiment can be suitably enjoyed.
加えて、第2変形例のアクチュエータ100bによれば、複数のコイル部分151bを形成することで、複数のコイル部分151bから生ずる磁界が駆動コイル140のコイル内部を通過しやすくなる。このとき、駆動コイル140のコイル内部を複数のコイル部分151bから生ずる磁界が適切に通過するように、複数のコイル部分151bの配置位置や形状やサイズ等が適切に調整されることが好ましい。
In addition, according to the actuator 100b of the second modified example, by forming the plurality of coil portions 151b, the magnetic field generated from the plurality of coil portions 151b can easily pass through the inside of the drive coil 140. At this time, it is preferable that the arrangement positions, shapes, sizes, and the like of the plurality of coil portions 151b are appropriately adjusted so that the magnetic fields generated from the plurality of coil portions 151b appropriately pass through the inside of the drive coil 140.
尚、複数のコイル部分151bを形成することに加えて又は代えて、複数の電源コイル150を形成してもよい。
In addition to or instead of forming the plurality of coil portions 151b, a plurality of power supply coils 150 may be formed.
(2)第2実施例
続いて、図5から図6を参照して、第2実施例のアクチュエータ200について説明する。 (2) Second Example Next, anactuator 200 according to a second example will be described with reference to FIGS.
続いて、図5から図6を参照して、第2実施例のアクチュエータ200について説明する。 (2) Second Example Next, an
(2-1)構成
初めに、図5を参照して、第2実施例のアクチュエータ200の構成について説明する。図5は、第2実施例のアクチュエータ200の構成の一例を示す平面図である。尚、第1実施例のアクチュエータ100が備える構成要素と同一の構成要素については、特段の説明を省略する。 (2-1) Configuration First, the configuration of theactuator 200 of the second embodiment will be described with reference to FIG. FIG. 5 is a plan view showing an example of the configuration of the actuator 200 of the second embodiment. In addition, special description is abbreviate | omitted about the component same as the component with which the actuator 100 of 1st Example is provided.
初めに、図5を参照して、第2実施例のアクチュエータ200の構成について説明する。図5は、第2実施例のアクチュエータ200の構成の一例を示す平面図である。尚、第1実施例のアクチュエータ100が備える構成要素と同一の構成要素については、特段の説明を省略する。 (2-1) Configuration First, the configuration of the
図5に示すように、第2実施例のアクチュエータ200は、例えばレーザ光のスキャニングに用いられるプレーナ型電磁駆動アクチュエータ(即ち、MEMSスキャナ)である。アクチュエータ200は、外側支持部211と、内側支持部212と、可動部120と、一対の外側トーションバー231と、一対の内側トーションバー232と、一対の永久磁石160と、一対の永久磁石260とを備えている。
As shown in FIG. 5, the actuator 200 of the second embodiment is a planar electromagnetic drive actuator (that is, a MEMS scanner) used for, for example, laser beam scanning. The actuator 200 includes an outer support portion 211, an inner support portion 212, a movable portion 120, a pair of outer torsion bars 231, a pair of inner torsion bars 232, a pair of permanent magnets 160, and a pair of permanent magnets 260. It has.
外側支持部211、内側支持部212、可動部120、一対の外側トーションバー231及び一対の内側トーションバー232は、例えばシリコン基板等の非磁性基板から一体的に形成されている。即ち、外側支持部211、内側支持部212、可動部120、一対の外側トーションバー231及び一対の内側トーションバー232は、例えばシリコン基板等の非磁性基板の一部が除去されることにより間隙が形成されることで形成されている。このときの形成プロセスとして、MEMSプロセスが用いられることが好ましい。尚、シリコン基板に代えて、任意の弾性材料から、外側支持部211、内側支持部212、可動部120、一対の外側トーションバー231及び一対の内側トーションバー232が一体的に形成されてもよい。
The outer support portion 211, the inner support portion 212, the movable portion 120, the pair of outer torsion bars 231 and the pair of inner torsion bars 232 are integrally formed from a nonmagnetic substrate such as a silicon substrate, for example. That is, the outer support portion 211, the inner support portion 212, the movable portion 120, the pair of outer torsion bars 231 and the pair of inner torsion bars 232 have a gap by removing a part of a nonmagnetic substrate such as a silicon substrate. It is formed by being formed. A MEMS process is preferably used as the formation process at this time. Instead of the silicon substrate, the outer support part 211, the inner support part 212, the movable part 120, the pair of outer torsion bars 231 and the pair of inner torsion bars 232 may be integrally formed from an arbitrary elastic material. .
外側支持部211は、内側支持部212を取り囲むような枠形状を有しており、一対の外側トーションバー231によって内側支持部212と接続されている。
The outer support portion 211 has a frame shape surrounding the inner support portion 212, and is connected to the inner support portion 212 by a pair of outer torsion bars 231.
内側支持部212は、揺動可能なように一対の外側トーションバー231によって外側支持部212に軸支されている。内側支持部212は、可動部120を取り囲むような枠形状を有しており、一対の内側トーションバー232によって可動部120と接続されている。内側支持部212の表面には、電源コイル150が形成されている。但し、電源コイル150は、内側支持部212の内部に形成されてもよい。
The inner support portion 212 is pivotally supported on the outer support portion 212 by a pair of outer torsion bars 231 so as to be swingable. The inner support portion 212 has a frame shape surrounding the movable portion 120, and is connected to the movable portion 120 by a pair of inner torsion bars 232. A power coil 150 is formed on the surface of the inner support portion 212. However, the power supply coil 150 may be formed inside the inner support portion 212.
電源コイル150は、内側支持部212の枠形状に沿って伸長するコイルである。電源コイル150には、外側支持部211上に形成されている電源端子151並びに外側支持部211及び外側トーションバー231上に形成されている配線を介して、電源から制御電流が供給される。制御電流は、可動部120及び内側支持部212を遥動させるための制御電流である。このような制御電流は、典型的には、可動部120が遥動する周波数と同期した周波数の信号成分と内側支持部212が遥動する周波数と同期した周波数の信号成分とが重畳された交流電流である。
The power supply coil 150 is a coil that extends along the frame shape of the inner support portion 212. A control current is supplied to the power supply coil 150 from a power supply via a power supply terminal 151 formed on the outer support 211 and wiring formed on the outer support 211 and the outer torsion bar 231. The control current is a control current for swinging the movable part 120 and the inner support part 212. Such a control current is typically an alternating current in which a signal component having a frequency synchronized with the frequency at which the movable portion 120 swings and a signal component having a frequency synchronized with the frequency at which the inner support portion 212 swings are superimposed. Current.
また、電源コイル150は、第1実施例と同様に、駆動コイル140と電気的に又は物理的に接続されていない。従って、電源コイル150が可動部120側に向かって伸長する必要性がない以上、電源コイル150(或いは、当該電源コイル150につながる配線)は、一対の内側トーションバー232上には形成されないことが好ましい。
Further, the power supply coil 150 is not electrically or physically connected to the drive coil 140 as in the first embodiment. Therefore, as long as the power supply coil 150 does not need to extend toward the movable portion 120, the power supply coil 150 (or the wiring connected to the power supply coil 150) is not formed on the pair of inner torsion bars 232. preferable.
可動部120は、揺動可能なように一対の内側トーションバー232によって内側支持部212に軸支されている。可動部120の表面には、駆動コイル140が形成されている。第2実施例においても、第1実施例と同様に、駆動コイル140は、可動部120内でのみ伸長している。より具体的には、駆動コイル140は、一対の内側トーションバー232や内側支持部212や一対の外側トーションバー231や外側支持部211には形成されない。
The movable part 120 is pivotally supported on the inner support part 212 by a pair of inner torsion bars 232 so as to be swingable. A drive coil 140 is formed on the surface of the movable portion 120. Also in the second embodiment, like the first embodiment, the drive coil 140 extends only within the movable portion 120. More specifically, the drive coil 140 is not formed on the pair of inner torsion bars 232, the inner support part 212, the pair of outer torsion bars 231, or the outer support part 211.
一対の外側トーションバー231は、内側支持部212が外側支持部211に対して揺動可能なように、内側支持部212と外側支持部211とを接続する。一対の外側トーションバー231の弾性によって、内側支持部212は、一対の外側トーションバー231が伸長する方向に沿った軸を中心軸(言い換えれば、回転軸)として回転するように遥動する。つまり、内側支持部212は、図5における上下の方向に沿った軸を中心軸として、当該中心軸の周りで回転するように遥動する。このとき、可動部120は、一対の内側トーションバー232を介して内側支持部212に接続されている。従って、内側支持部212の遥動に伴って、可動部120は、実質的には、図5における上下の方向に沿った軸を中心軸として、当該中心軸の周りで回転するように遥動する。
The pair of outer torsion bars 231 connect the inner support portion 212 and the outer support portion 211 so that the inner support portion 212 can swing with respect to the outer support portion 211. Due to the elasticity of the pair of outer torsion bars 231, the inner support section 212 swings so as to rotate about the axis along the direction in which the pair of outer torsion bars 231 extends as a central axis (in other words, a rotation axis). That is, the inner support portion 212 swings so as to rotate around the central axis with the axis along the vertical direction in FIG. 5 as the central axis. At this time, the movable portion 120 is connected to the inner support portion 212 via a pair of inner torsion bars 232. Therefore, as the inner support portion 212 swings, the movable portion 120 substantially swings around the central axis about the axis along the vertical direction in FIG. 5 as the central axis. To do.
一対の内側トーションバー232は、可動部120が内側支持部212に対して揺動可能なように、可動部120と内側支持部212とを接続する。一対の内側トーションバー232の弾性によって、可動部120は、一対の内側トーションバー232が伸長する方向に沿った軸を中心軸(言い換えれば、回転軸)として回転するように遥動する。つまり、可動部120は、図5における左右の方向に沿った軸を中心軸として、当該中心軸の周りで回転するように遥動する。
The pair of inner torsion bars 232 connect the movable part 120 and the inner support part 212 so that the movable part 120 can swing relative to the inner support part 212. Due to the elasticity of the pair of inner torsion bars 232, the movable part 120 swings so as to rotate about the axis along the direction in which the pair of inner torsion bars 232 extends as a central axis (in other words, a rotation axis). That is, the movable unit 120 swings so as to rotate around the central axis with the axis along the left-right direction in FIG. 5 as the central axis.
このとき、可動部120の2軸駆動を実現する(つまり、可動部120を、図5における上下の方向に沿った軸を中心軸として回転させると共に、図5における左右の方向に沿った軸を中心軸として回転させる)ために、一対の外側トーションバー231が伸長する方向と一対の内側トーションバー232が伸長する方向とは異なっていることが好ましい。典型的には、一対の外側トーションバー231が伸長する方向は、一対の内側トーションバー232が伸長する方向と直交していることが好ましい。
At this time, the biaxial drive of the movable part 120 is realized (that is, the movable part 120 is rotated about the axis along the vertical direction in FIG. 5 as the central axis, and the axis along the horizontal direction in FIG. 5 is rotated. Therefore, the direction in which the pair of outer torsion bars 231 extends is preferably different from the direction in which the pair of inner torsion bars 232 extends. Typically, the direction in which the pair of outer torsion bars 231 extends is preferably orthogonal to the direction in which the pair of inner torsion bars 232 extends.
一対の永久磁石160は、外側支持部211の外部に取り付けられている。一対の永久磁石160は、駆動コイル140に対して所定の静磁界を印加することができるように、その磁極の向きが適切に設定されていることが好ましい。尚、一対の永久磁石160には、静磁界の強度を高めるために、ヨークが付加されていてもよい。
The pair of permanent magnets 160 are attached to the outside of the outer support portion 211. The pair of permanent magnets 160 preferably have their magnetic poles appropriately set so that a predetermined static magnetic field can be applied to the drive coil 140. Note that a yoke may be added to the pair of permanent magnets 160 in order to increase the strength of the static magnetic field.
一対の永久磁石260は、外側支持部211の外部に取り付けられている。一対の永久磁石260は、電源コイル150に対して所定の静磁界を印加することができるように、その磁極の向きが適切に設定されていることが好ましい。尚、一対の永久磁石260には、静磁界の強度を高めるために、ヨークが付加されていてもよい。
The pair of permanent magnets 260 are attached to the outside of the outer support portion 211. The pair of permanent magnets 260 preferably have their magnetic poles appropriately set so that a predetermined static magnetic field can be applied to the power supply coil 150. Note that a yoke may be added to the pair of permanent magnets 260 in order to increase the strength of the static magnetic field.
(2-2)動作態様
このような第2実施例のアクチュエータ200が動作する(具体的には、可動部120が遥動する)場合には、まず、電源から、電源端子151を介して、電源コイル150に対して制御電流が供給される。 (2-2) Operation Mode When theactuator 200 of the second embodiment operates as described above (specifically, the movable unit 120 swings), first, from the power supply via the power supply terminal 151, A control current is supplied to the power supply coil 150.
このような第2実施例のアクチュエータ200が動作する(具体的には、可動部120が遥動する)場合には、まず、電源から、電源端子151を介して、電源コイル150に対して制御電流が供給される。 (2-2) Operation Mode When the
ここで、電源コイル150には、一対の永久磁石260によって静磁界が印加されている。従って、電源コイル150には、一対の永久磁石260から印加される静磁界と電源コイル150に供給される制御電流との電磁相互作用に起因した力(つまり、ローレンツ力)が生ずる。その結果、電源コイル150が形成されている内側支持部212は、一対の永久磁石260から印加される静磁界と電源コイル150に供給される制御電流との電磁相互作用に起因したローレンツ力によって遥動する。このとき、可動部120は、一対の内側トーションバー232を介して内側支持部212に接続されている。従って、内側支持部212の遥動に伴って、可動部120は、実質的には、図5における上下の方向に沿った軸を中心軸として、当該中心軸の周りで回転するように遥動する。
Here, a static magnetic field is applied to the power supply coil 150 by a pair of permanent magnets 260. Accordingly, the power coil 150 generates a force (that is, Lorentz force) due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 260 and the control current supplied to the power coil 150. As a result, the inner support part 212 on which the power supply coil 150 is formed is far away by Lorentz force due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 260 and the control current supplied to the power supply coil 150. Move. At this time, the movable portion 120 is connected to the inner support portion 212 via a pair of inner torsion bars 232. Therefore, as the inner support portion 212 swings, the movable portion 120 substantially swings around the central axis about the axis along the vertical direction in FIG. 5 as the central axis. To do.
更に、電源コイル150に対して制御電流が供給されると、電源コイル150からは、磁界(磁力線)が生ずる。このような電源コイル150から生ずる磁界の一部又は全部は、可動部120に形成されている駆動コイル140にも到達する。
Furthermore, when a control current is supplied to the power supply coil 150, a magnetic field (lines of magnetic force) is generated from the power supply coil 150. Part or all of the magnetic field generated from the power supply coil 150 reaches the drive coil 140 formed in the movable portion 120.
ここで、第2実施例においても、第1実施例と同様に、電源コイル150と駆動コイル140とは、電源コイル150から生ずる磁界の一部又は全部が駆動コイル140のコイル内部を通過することができる位置関係を有して形成されていることが好ましい。尚、電源コイル150から生ずる磁界が到達する範囲や強度等は、(i)内側支持部212のサイズや、(ii)可動部120のサイズや、(iii)内側支持部212と可動部120との間の位置関係や、(iv)電源コイル150に供給される制御電流のパラメータや、(v)電源コイル150そのもののパラメータによって変動し得る。このため、第2実施例においても、第1実施例と同様に、(i)内側支持部212のサイズや、(ii)可動部120のサイズや、(iii)内側支持部212と可動部120との間の位置関係や、(iv)電源コイル150に供給される制御電流のパラメータや、(v)電源コイル150そのもののパラメータや、(vi)駆動コイル140そのもののパラメータ等を考慮した上で、駆動コイル140及び電源コイル150は、制御電流が供給されることで電源コイル150から生ずる磁界が駆動コイル140のコイル内部を通過する位置関係を有するように形成されることが好ましい。
Here, also in the second embodiment, as in the first embodiment, the power supply coil 150 and the drive coil 140 allow part or all of the magnetic field generated from the power supply coil 150 to pass through the inside of the drive coil 140. It is preferable that they are formed so as to have a positional relationship capable of The range, strength, etc., to which the magnetic field generated from the power supply coil 150 reaches are as follows: (i) the size of the inner support portion 212; (ii) the size of the movable portion 120; And (iv) a parameter of a control current supplied to the power supply coil 150, and (v) a parameter of the power supply coil 150 itself. Therefore, also in the second embodiment, as in the first embodiment, (i) the size of the inner support portion 212, (ii) the size of the movable portion 120, and (iii) the inner support portion 212 and the movable portion 120. And (iv) parameters of the control current supplied to the power supply coil 150, (v) parameters of the power supply coil 150 itself, (vi) parameters of the drive coil 140 itself, etc. The drive coil 140 and the power supply coil 150 are preferably formed such that a magnetic field generated from the power supply coil 150 passes through the inside of the drive coil 140 when a control current is supplied.
電源コイル150から生ずる磁界の一部又は全部が駆動コイル140のコイル内部を通過すると、駆動コイル140には、電源コイル150から生ずる磁界に起因した誘導電流する。一方で、駆動コイル140には、一対の永久磁石160によって静磁界が印加されている。従って、駆動コイル140には、一対の永久磁石160から印加される静磁界と駆動コイル140に発生する誘導電流との電磁相互作用に起因した力(つまり、ローレンツ力)が生ずる。その結果、駆動コイル140が形成されている可動部120は、一対の永久磁石160から印加される静磁界と駆動コイル140に発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。つまり、可動部120は、図5における左右の方向に沿った軸を中心軸として回転するように遥動する。
When a part or all of the magnetic field generated from the power supply coil 150 passes through the inside of the drive coil 140, an induced current is generated in the drive coil 140 due to the magnetic field generated from the power supply coil 150. On the other hand, a static magnetic field is applied to the drive coil 140 by a pair of permanent magnets 160. Therefore, a force (that is, a Lorentz force) is generated in the drive coil 140 due to an electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140. As a result, the movable part 120 in which the drive coil 140 is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140. . That is, the movable part 120 swings so as to rotate about the axis along the left-right direction in FIG.
以上説明したように、第2実施例のアクチュエータ200によれば、遥動させるべき可動部120に駆動コイル140を形成し且つ遥動させるべき内側支持部212に電源コイル150(つまり、実質的には、駆動コイル140としても作用し得る電源コイル150)を形成することができる。従って、可動部120及び内側支持部212のいずれか一方に駆動コイル140を形成することなく可動部120を遥動させる(具体的には、2軸駆動させる)比較例のアクチュエータと比較して、可動部120及び内側支持部212を相対的に高精度に遥動させる(つまり、駆動する)ことができる。その結果、可動部120の2軸駆動の精度を相対的に向上させることができる。
As described above, according to the actuator 200 of the second embodiment, the drive coil 140 is formed on the movable portion 120 to be swung, and the power supply coil 150 (that is, substantially the inner support portion 212 to be swung). Can form a power coil 150) that can also act as a drive coil 140. Therefore, compared with the actuator of the comparative example in which the movable part 120 is swayed (specifically, driven in two axes) without forming the drive coil 140 in either the movable part 120 or the inner support part 212, The movable part 120 and the inner support part 212 can be swung (that is, driven) with relatively high accuracy. As a result, the accuracy of the biaxial drive of the movable part 120 can be relatively improved.
その一方で、第2実施例のアクチュエータ200によれば、駆動コイル140に生ずる誘導電流を用いて(言い換えれば、電源コイル150から無線伝送される電力ないしは電流を動力源として用いて)可動部120を遥動させることができる。このため、駆動コイル140が可動部120の外部に伸長しなくともよくなる。従って、駆動コイル140につながる配線を一対の内側トーションバー232(更には、内側支持部212や一対の外側トーションバー231や外側支持部211)に形成しなくともよくなる。言い換えれば、第2実施例のアクチュエータ200によれば、電源コイル150に制御電流を供給することで駆動コイル140が形成されている可動部120を遥動させることができるため、駆動コイル140に対して制御電流を供給しなくともよくなる。その結果、第2実施例のアクチュエータ200によれば、駆動コイル140につながる配線を一対の内側トーションバー232に形成しなくともよくなる。従って、一対の内側トーションバー230上に配線を形成する比較例のアクチュエータと比較して、アクチュエータ200の構造が単純化すると共に、アクチュエータ200の製造工程もまた単純化する。このため、可動部120に駆動コイル140を形成することなく可動部120を遥動させる比較例のアクチュエータと比較して、アクチュエータの設計の自由度を相対的に高めるという比較例のアクチュエータと同様の効果を相応に享受しつつ、可動部120を相対的に高精度に遥動させる(つまり、駆動する)ことができる。或いは、可動部120に駆動コイル140を形成しつつ当該駆動コイル140につながる配線を一対の内側トーションバー232に形成する比較例のアクチュエータと比較して、可動部120を相対的に高精度に遥動させる(つまり、駆動する)ことができるという比較例のアクチュエータと同様の効果を相応に享受しつつ、アクチュエータ200の設計の自由度を相対的に高めることができる。
On the other hand, according to the actuator 200 of the second embodiment, the movable part 120 is used by using the induced current generated in the drive coil 140 (in other words, using power or current wirelessly transmitted from the power supply coil 150 as a power source). Can be swung. For this reason, the drive coil 140 does not have to extend outside the movable portion 120. Therefore, it is not necessary to form wiring connected to the drive coil 140 in the pair of inner torsion bars 232 (further, the inner support portion 212, the pair of outer torsion bars 231 and the outer support portion 211). In other words, according to the actuator 200 of the second embodiment, the movable portion 120 on which the drive coil 140 is formed can be moved by supplying a control current to the power supply coil 150, Therefore, the control current need not be supplied. As a result, according to the actuator 200 of the second embodiment, the wiring connected to the drive coil 140 need not be formed on the pair of inner torsion bars 232. Therefore, the structure of the actuator 200 is simplified and the manufacturing process of the actuator 200 is also simplified as compared with the actuator of the comparative example in which the wiring is formed on the pair of inner torsion bars 230. For this reason, it is the same as the actuator of the comparative example that relatively increases the degree of freedom in designing the actuator as compared with the actuator of the comparative example that moves the movable part 120 without forming the drive coil 140 in the movable part 120. The movable part 120 can be swung (that is, driven) with relatively high accuracy while enjoying the effect accordingly. Alternatively, compared to the actuator of the comparative example in which the wiring connected to the driving coil 140 is formed on the pair of inner torsion bars 232 while the driving coil 140 is formed on the movable portion 120, the movable portion 120 is relatively highly accurate. The degree of freedom in designing the actuator 200 can be relatively enhanced while appropriately enjoying the same effect as the actuator of the comparative example that can be moved (that is, driven).
更には、ねじれ等の応力が加わり且つ相対的に幅が狭い一対の内側トーションバー232に配線を形成しなくともよくなるため、配線の断線を考慮しなくともよくなる。つまり、駆動コイル140につながる配線を一対の内側トーションバー232に形成する比較例のアクチュエータと比較して、アクチュエータ200の耐久性(或いは、耐故障性)を向上させることができる。
Furthermore, since it is not necessary to form wiring on the pair of inner torsion bars 232 to which stress such as torsion is applied and the width is relatively narrow, it is not necessary to consider disconnection of the wiring. That is, the durability (or failure resistance) of the actuator 200 can be improved as compared with the actuator of the comparative example in which the wiring connected to the drive coil 140 is formed on the pair of inner torsion bars 232.
尚、第2実施例のアクチュエータ200においても、第1実施例のアクチュエータ100が取り得る各種態様を適宜採用してもよい。例えば、第2実施例においても、可動部120が磁性材料を含んでいてもよいし、電源コイル150(或いは、駆動コイル140)の形状を変えてもよいし、電源コイル150が複数のコイル部分151bを備えていてもよい。
In the actuator 200 of the second embodiment, various modes that can be taken by the actuator 100 of the first embodiment may be appropriately adopted. For example, also in the second embodiment, the movable part 120 may contain a magnetic material, the shape of the power supply coil 150 (or the drive coil 140) may be changed, or the power supply coil 150 may have a plurality of coil portions. 151b may be provided.
(2-3)第1変形例
続いて、図6を参照して、第2実施例のアクチュエータ200に関連する第1変形例のアクチュエータ200aについて説明する。図6は、第1変形例のアクチュエータ200aの構成の一例を示す変形例である。尚、第2実施例のアクチュエータ200が備える構成要素と同一の構成要素については、同一の参照符号を付してその詳細な説明については省略する。 (2-3) First Modification Next, anactuator 200a of a first modification related to the actuator 200 of the second embodiment will be described with reference to FIG. FIG. 6 is a modification showing an example of the configuration of the actuator 200a of the first modification. Note that the same reference numerals are assigned to the same components as those included in the actuator 200 of the second embodiment, and detailed description thereof is omitted.
続いて、図6を参照して、第2実施例のアクチュエータ200に関連する第1変形例のアクチュエータ200aについて説明する。図6は、第1変形例のアクチュエータ200aの構成の一例を示す変形例である。尚、第2実施例のアクチュエータ200が備える構成要素と同一の構成要素については、同一の参照符号を付してその詳細な説明については省略する。 (2-3) First Modification Next, an
図6に示すように、第1変形例のアクチュエータ200aは、第2実施例のアクチュエータ200と比較して、一対の永久磁石160の配置位置が異なるという点で異なっている。具体的には、第1変形例では、一対の永久磁石160は、可動部120に隣接するように内側支持部212の更に内側に配置されている。尚、第1変形例のアクチュエータ200aが備える一対の永久磁石160の配置位置以外の構成要素については、第2実施例のアクチュエータ200が備える構成要素と同一であってもよい。
As shown in FIG. 6, the actuator 200a of the first modification is different from the actuator 200 of the second embodiment in that the arrangement positions of the pair of permanent magnets 160 are different. Specifically, in the first modification, the pair of permanent magnets 160 are disposed further inside the inner support portion 212 so as to be adjacent to the movable portion 120. In addition, about components other than the arrangement position of a pair of permanent magnet 160 with which the actuator 200a of a 1st modification is provided, you may be the same as the component with which the actuator 200 of a 2nd Example is provided.
このような第1変形例のアクチュエータ100aであっても、第1実施例のアクチュエータ100が享受することができる各種効果を好適に享受することができる。
Even with the actuator 100a of the first modified example, various effects that can be enjoyed by the actuator 100 of the first embodiment can be suitably enjoyed.
尚、一対の永久磁石160の配置位置は、図5及び図6に示す配置以外の位置であってもよい。より具体的には、一対の永久磁石160は、駆動コイル140に対して適切な方向の且つ適切な強度の静磁界を印加することができる限りは、任意の位置に配置されてもよい。尚、第1実施例においても、一対の永久磁石160の配置位置を適宜変えてもよいことは言うまでもない。
It should be noted that the arrangement positions of the pair of permanent magnets 160 may be positions other than the arrangements shown in FIGS. More specifically, the pair of permanent magnets 160 may be disposed at any position as long as a static magnetic field of an appropriate direction and an appropriate intensity can be applied to the drive coil 140. In the first embodiment, it goes without saying that the arrangement positions of the pair of permanent magnets 160 may be appropriately changed.
また、一対の永久磁石160に限らず、一対の永久磁石260についても、任意の位置に配置してもよい。より具体的には、一対の永久磁石260は、電源コイル150に対して適切な方向の且つ適切な強度の静磁界を印加することができる限りは、任意の位置に配置されてもよい。
Further, not only the pair of permanent magnets 160 but also the pair of permanent magnets 260 may be arranged at arbitrary positions. More specifically, the pair of permanent magnets 260 may be disposed at any position as long as a static magnetic field having an appropriate direction and an appropriate strength can be applied to the power supply coil 150.
(3)第3実施例
続いて、図7を参照して、第3実施例のアクチュエータ300について説明する。図7は、第3実施例のアクチュエータ300の構成の一例を示す平面図である。尚、第1実施例のアクチュエータ100や第2実施例のアクチュエータ200が備える構成要素と同一の構成要素については、特段の説明を省略する。 (3) Third Example Next, anactuator 300 according to a third example will be described with reference to FIG. FIG. 7 is a plan view showing an example of the configuration of the actuator 300 of the third embodiment. Note that the description of the same components as those of the actuator 100 of the first embodiment and the actuator 200 of the second embodiment is omitted.
続いて、図7を参照して、第3実施例のアクチュエータ300について説明する。図7は、第3実施例のアクチュエータ300の構成の一例を示す平面図である。尚、第1実施例のアクチュエータ100や第2実施例のアクチュエータ200が備える構成要素と同一の構成要素については、特段の説明を省略する。 (3) Third Example Next, an
図7に示すように、第3実施例のアクチュエータ300は、例えばレーザ光のスキャニングに用いられるプレーナ型電磁駆動アクチュエータ(即ち、MEMSスキャナ)である。アクチュエータ300は、外側支持部211と、内側支持部212と、可動部120と、一対の外側トーションバー231と、一対の内側トーションバー232と、一対の永久磁石160と、一対の永久磁石260とを備えている。
As shown in FIG. 7, the actuator 300 of the third embodiment is a planar electromagnetic drive actuator (that is, a MEMS scanner) used for, for example, scanning of laser light. The actuator 300 includes an outer support section 211, an inner support section 212, a movable section 120, a pair of outer torsion bars 231, a pair of inner torsion bars 232, a pair of permanent magnets 160, and a pair of permanent magnets 260. It has.
第3実施例では、外側支持部211の表面には、電源コイル150が形成されている。但し、電源コイル150は、外側支持部211の内部に形成されてもよい。電源コイル150は、外側支持部212の枠形状に沿って伸長するコイルである。電源コイル150には、外側支持部211上に形成されている電源端子151を介して、電源から制御電流が供給される。制御電流は、第2実施例と同様に、可動部120及び内側支持部212を遥動させるための制御電流である。
In the third embodiment, the power supply coil 150 is formed on the surface of the outer support portion 211. However, the power supply coil 150 may be formed inside the outer support portion 211. The power supply coil 150 is a coil that extends along the frame shape of the outer support portion 212. A control current is supplied to the power supply coil 150 from a power supply via a power supply terminal 151 formed on the outer support portion 211. The control current is a control current for swinging the movable part 120 and the inner support part 212, as in the second embodiment.
また、電源コイル150は、第1実施例及び第2実施例と同様に、後述する駆動コイル140及び駆動コイル340と電気的に又は物理的に接続されていない。従って、電源コイル150が内側支持部212及び可動部120側に向かって伸長する必要性がない以上、電源コイル150(或いは、当該電源コイル150につながる配線)は、一対の外側トーションバー231上や一対の内側トーションバー232上には形成されないことが好ましい。
Further, the power supply coil 150 is not electrically or physically connected to the drive coil 140 and the drive coil 340, which will be described later, as in the first and second embodiments. Therefore, as long as the power supply coil 150 does not need to extend toward the inner support portion 212 and the movable portion 120, the power supply coil 150 (or the wiring connected to the power supply coil 150) is placed on the pair of outer torsion bars 231. It is preferably not formed on the pair of inner torsion bars 232.
更に、第3実施例では、内側支持部212の表面には、駆動コイル340が形成されている。但し、駆動コイル340は、内側支持部212の内部に形成されてもよい。駆動コイル340は、例えば、内側支持部212の枠形状に沿って伸長するコイルである。第3実施例においても、第1実施例及び第2実施例と同様に、駆動コイル340は、駆動コイル140と同様のプロセスで形成されてもよい。更に、駆動コイル340は、内側支持部212内でのみ伸長している。言い換えれば、駆動コイル340は、内側支持部212の外部に向かって伸長していない。より具体的には、駆動コイル340は、一対の外側トーションバー231や一対の内側トーションバー232や外側支持部211や可動部120には形成されない。このため、駆動コイル340は、電源コイル150や駆動コイル140とは電気的に接続されていない。或いは、駆動コイル340は、電源コイル150や駆動コイル140とは物理的に接続されていない。従って、駆動コイル340には、電源端子151を介して制御電流が直接的に供給されることはない。
Furthermore, in the third embodiment, a drive coil 340 is formed on the surface of the inner support portion 212. However, the drive coil 340 may be formed inside the inner support portion 212. The drive coil 340 is, for example, a coil that extends along the frame shape of the inner support portion 212. Also in the third embodiment, as in the first and second embodiments, the drive coil 340 may be formed by the same process as the drive coil 140. Further, the drive coil 340 extends only within the inner support 212. In other words, the drive coil 340 does not extend toward the outside of the inner support portion 212. More specifically, the drive coil 340 is not formed on the pair of outer torsion bars 231, the pair of inner torsion bars 232, the outer support part 211, or the movable part 120. For this reason, the drive coil 340 is not electrically connected to the power supply coil 150 or the drive coil 140. Alternatively, the drive coil 340 is not physically connected to the power supply coil 150 or the drive coil 140. Accordingly, the control current is not directly supplied to the drive coil 340 via the power supply terminal 151.
また、第3実施例では、第1実施例及び第2実施例と同様に、可動部120の表面には、駆動コイル140が形成されている。第3実施例においても、第1実施例及び第2実施例と同様に、駆動コイル140は、可動部120内でのみ伸長している。より具体的には、駆動コイル140は、一対の内側トーションバー232や内側支持部212や一対の外側トーションバー231や外側支持部211には形成されない。更には、駆動コイル140は、電源コイル150のみならず、駆動コイル340とも電気的に且つ物理的に接続されていない。
Further, in the third embodiment, a drive coil 140 is formed on the surface of the movable portion 120 as in the first and second embodiments. Also in the third embodiment, as in the first and second embodiments, the drive coil 140 extends only within the movable portion 120. More specifically, the drive coil 140 is not formed on the pair of inner torsion bars 232, the inner support part 212, the pair of outer torsion bars 231, or the outer support part 211. Furthermore, the drive coil 140 is not electrically and physically connected to the drive coil 340 as well as the power supply coil 150.
(3-2)動作態様
このような第3実施例のアクチュエータ300が動作する(具体的には、可動部120が遥動する)場合には、まず、電源から、電源端子151を介して、電源コイル150に対して制御電流が供給される。その結果、電源コイル150からは、磁界(磁力線)が生ずる。このような電源コイル150から生ずる磁界の一部又は全部は、可動部120に形成されている駆動コイル140や内側支持部212に形成されている駆動コイル340にも到達する。 (3-2) Operation Mode When such anactuator 300 of the third embodiment operates (specifically, the movable part 120 swings), first, from the power supply via the power supply terminal 151, A control current is supplied to the power supply coil 150. As a result, a magnetic field (lines of magnetic force) is generated from the power supply coil 150. Part or all of the magnetic field generated from the power supply coil 150 reaches the drive coil 140 formed on the movable portion 120 and the drive coil 340 formed on the inner support portion 212.
このような第3実施例のアクチュエータ300が動作する(具体的には、可動部120が遥動する)場合には、まず、電源から、電源端子151を介して、電源コイル150に対して制御電流が供給される。その結果、電源コイル150からは、磁界(磁力線)が生ずる。このような電源コイル150から生ずる磁界の一部又は全部は、可動部120に形成されている駆動コイル140や内側支持部212に形成されている駆動コイル340にも到達する。 (3-2) Operation Mode When such an
ここで、第3実施例においても、第1実施例及び第2実施例と同様に、電源コイル150と駆動コイル140及び駆動コイル340とは、電源コイル150から生ずる磁界の一部又は全部が駆動コイル140のコイル内部及び駆動コイル340のコイル内部の少なくとも一方を通過することができる位置関係を有して形成されていることが好ましい。尚、電源コイル150から生ずる磁界が到達する範囲や強度等は、(i)外側支持部211のサイズや、(ii)内側支持部212のサイズや、(iii)可動部120のサイズや、(iv)外側支持部211と内側支持部212との間の位置関係や、(v)内側支持部212と可動部120との間の位置関係や、(vi)電源コイル150に供給される制御電流のパラメータや、(vii)電源コイル150そのもののパラメータによって変動し得る。このため、第3実施例においても、第1実施例と同様に、(i)外側支持部211のサイズや、(ii)内側支持部212のサイズや、(iii)可動部120のサイズや、(iv)外側支持部211と内側支持部212との間の位置関係や、(v)内側支持部212と可動部120との間の位置関係や、(vi)電源コイル150に供給される制御電流のパラメータや、(vii)電源コイル150そのもののパラメータや、(viii)駆動コイル140そのもののパラメータや、(ix)駆動コイル340そのもののパラメータ等を考慮した上で、駆動コイル140及び駆動コイル340並びに電源コイル150は、制御電流が供給されることで電源コイル150から生ずる磁界が駆動コイル140のコイル内部及び駆動コイル340のコイル内部の少なくとも一方を通過する位置関係を有するように形成されることが好ましい。
In the third embodiment, as in the first and second embodiments, the power coil 150, the drive coil 140, and the drive coil 340 are driven by a part or all of the magnetic field generated from the power coil 150. It is preferably formed so as to have a positional relationship capable of passing through at least one of the inside of the coil 140 and the inside of the driving coil 340. The range, strength, and the like that the magnetic field generated from the power supply coil 150 reaches include (i) the size of the outer support portion 211, (ii) the size of the inner support portion 212, (iii) the size of the movable portion 120, and ( iv) positional relationship between the outer support portion 211 and the inner support portion 212, (v) positional relationship between the inner support portion 212 and the movable portion 120, and (vi) a control current supplied to the power supply coil 150. And (vii) parameters of the power supply coil 150 itself. Therefore, also in the third embodiment, as in the first embodiment, (i) the size of the outer support portion 211, (ii) the size of the inner support portion 212, (iii) the size of the movable portion 120, (iv) positional relationship between the outer support portion 211 and the inner support portion 212, (v) positional relationship between the inner support portion 212 and the movable portion 120, and (vi) control supplied to the power supply coil 150. In consideration of current parameters, (vii) parameters of the power supply coil 150 itself, (viii) parameters of the drive coil 140 itself, (ix) parameters of the drive coil 340 itself, and the like, the drive coil 140 and the drive coil 340 are considered. In addition, the power supply coil 150 has a positional relationship in which a magnetic field generated from the power supply coil 150 by supplying a control current passes through at least one of the inside of the drive coil 140 and the inside of the drive coil 340. It is preferably formed so that.
電源コイル150から生ずる磁界の一部又は全部が駆動コイル340のコイル内部を通過すると、駆動コイル340には、電源コイル150から生ずる磁界に起因した誘導電流する。一方で、駆動コイル340には、一対の永久磁石260によって静磁界が印加されている。従って、駆動コイル340には、一対の永久磁石260から印加される静磁界と駆動コイル340に発生する誘導電流との電磁相互作用に起因した力(つまり、ローレンツ力)が生ずる。その結果、駆動コイル340が形成されている内側支持部212は、一対の永久磁石260から印加される静磁界と駆動コイル340に発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。このとき、可動部120は、一対の内側トーションバー232を介して内側支持部212に接続されている。従って、内側支持部212の遥動に伴って、可動部120は、実質的には、図7における上下の方向に沿った軸を中心軸として、当該中心軸の周りで回転するように遥動する。
When a part or all of the magnetic field generated from the power supply coil 150 passes through the inside of the drive coil 340, an induced current is generated in the drive coil 340 due to the magnetic field generated from the power supply coil 150. On the other hand, a static magnetic field is applied to the drive coil 340 by a pair of permanent magnets 260. Therefore, a force (that is, a Lorentz force) is generated in the drive coil 340 due to an electromagnetic interaction between a static magnetic field applied from the pair of permanent magnets 260 and an induced current generated in the drive coil 340. As a result, the inner support portion 212 on which the drive coil 340 is formed swings due to Lorentz force due to electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 260 and the induced current generated in the drive coil 340. To do. At this time, the movable portion 120 is connected to the inner support portion 212 via a pair of inner torsion bars 232. Therefore, as the inner support portion 212 swings, the movable portion 120 substantially swings around the central axis about the axis along the vertical direction in FIG. To do.
更に、電源コイル150から生ずる磁界の一部又は全部が駆動コイル140のコイル内部を通過すると、駆動コイル140には、電源コイル150から生ずる磁界に起因した誘導電流する。一方で、駆動コイル140には、一対の永久磁石160によって静磁界が印加されている。従って、駆動コイル140には、一対の永久磁石160から印加される静磁界と駆動コイル140に発生する誘導電流との電磁相互作用に起因した力(つまり、ローレンツ力)が生ずる。その結果、駆動コイル140が形成されている可動部120は、一対の永久磁石160から印加される静磁界と駆動コイル140に発生する誘導電流との電磁相互作用に起因したローレンツ力によって遥動する。つまり、可動部120は、図7における左右の方向に沿った軸を中心軸として回転するように遥動する。
Furthermore, when a part or all of the magnetic field generated from the power supply coil 150 passes through the inside of the drive coil 140, an induced current is generated in the drive coil 140 due to the magnetic field generated from the power supply coil 150. On the other hand, a static magnetic field is applied to the drive coil 140 by a pair of permanent magnets 160. Therefore, a force (that is, a Lorentz force) is generated in the drive coil 140 due to an electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140. As a result, the movable part 120 in which the drive coil 140 is formed swings due to the Lorentz force resulting from the electromagnetic interaction between the static magnetic field applied from the pair of permanent magnets 160 and the induced current generated in the drive coil 140. . That is, the movable unit 120 swings so as to rotate about the axis along the left-right direction in FIG. 7 as the central axis.
以上説明したように、第3実施例のアクチュエータ300によれば、遥動させるべき可動部120に駆動コイル140を形成し且つ遥動させるべき内側支持部212に駆動コイル340を形成することができる。従って、可動部120及び内側支持部212のいずれか一方に駆動コイル140を形成することなく可動部120を遥動させる(具体的には、2軸駆動させる)比較例のアクチュエータと比較して、可動部120及び内側支持部212を相対的に高精度に遥動させる(つまり、駆動する)ことができる。その結果、可動部120の2軸駆動の精度を相対的に向上させることができる。
As described above, according to the actuator 300 of the third embodiment, the drive coil 140 can be formed on the movable part 120 to be swung, and the drive coil 340 can be formed on the inner support part 212 to be swung. . Therefore, compared with the actuator of the comparative example in which the movable part 120 is swayed (specifically, driven in two axes) without forming the drive coil 140 in either the movable part 120 or the inner support part 212, The movable part 120 and the inner support part 212 can be swung (that is, driven) with relatively high accuracy. As a result, the accuracy of the biaxial drive of the movable part 120 can be relatively improved.
その一方で、第3実施例のアクチュエータ300によれば、駆動コイル140に生ずる誘導電流を用いて(言い換えれば、電源コイル150から無線伝送される電力ないしは電流を動力源として用いて)可動部120を遥動させることができる。このため、駆動コイル140が可動部120の外部に伸長しなくともよくなる。従って、駆動コイル140につながる配線を一対の内側トーションバー232(更には、内側支持部212や一対の外側トーションバー231や外側支持部211)に形成しなくともよくなる。言い換えれば、第3実施例のアクチュエータ300によれば、電源コイル150に制御電流を供給することで駆動コイル140が形成されている可動部120を遥動させることができるため、駆動コイル140に対して制御電流を供給しなくともよくなる。その結果、第3実施例のアクチュエータ300によれば、駆動コイル140につながる配線を一対の内側トーションバー232や一対の外側トーションバー231に形成しなくともよくなる。従って、一対の内側トーションバー230上や一対の外側トーションバー231上に配線を形成する比較例のアクチュエータと比較して、アクチュエータ300の構造が単純化すると共に、アクチュエータ300の製造工程もまた単純化する。このため、可動部120に駆動コイル140を形成することなく可動部120を遥動させる比較例のアクチュエータと比較して、アクチュエータの設計の自由度を相対的に高めるという比較例のアクチュエータと同様の効果を相応に享受しつつ、可動部120を相対的に高精度に遥動させる(つまり、駆動する)ことができる。或いは、可動部120に駆動コイル140を形成しつつ当該駆動コイル140につながる配線を一対の内側トーションバー232や一対の外側トーションバー231に形成する比較例のアクチュエータと比較して、可動部120を相対的に高精度に遥動させる(つまり、駆動する)ことができるという比較例のアクチュエータと同様の効果を相応に享受しつつ、アクチュエータ300の設計の自由度を相対的に高めることができる。
On the other hand, according to the actuator 300 of the third embodiment, the movable part 120 is used by using the induced current generated in the drive coil 140 (in other words, using power or current wirelessly transmitted from the power supply coil 150 as a power source). Can be swung. For this reason, the drive coil 140 does not have to extend outside the movable portion 120. Therefore, it is not necessary to form wiring connected to the drive coil 140 in the pair of inner torsion bars 232 (further, the inner support portion 212, the pair of outer torsion bars 231 and the outer support portion 211). In other words, according to the actuator 300 of the third embodiment, by supplying the control current to the power supply coil 150, the movable part 120 on which the drive coil 140 is formed can be moved far. Therefore, the control current need not be supplied. As a result, according to the actuator 300 of the third embodiment, it is not necessary to form the wiring connected to the drive coil 140 in the pair of inner torsion bars 232 and the pair of outer torsion bars 231. Therefore, the structure of the actuator 300 is simplified and the manufacturing process of the actuator 300 is also simplified as compared with the actuator of the comparative example in which wiring is formed on the pair of inner torsion bars 230 and the pair of outer torsion bars 231. To do. For this reason, it is the same as the actuator of the comparative example that relatively increases the degree of freedom in designing the actuator as compared with the actuator of the comparative example that moves the movable part 120 without forming the drive coil 140 in the movable part 120. The movable part 120 can be swung (that is, driven) with relatively high accuracy while enjoying the effect accordingly. Or, compared with the actuator of the comparative example in which the wiring connected to the driving coil 140 is formed on the pair of inner torsion bars 232 and the pair of outer torsion bars 231 while the driving coil 140 is formed on the movable part 120, The degree of freedom in designing the actuator 300 can be relatively increased while appropriately enjoying the same effect as that of the actuator of the comparative example that can be swung (that is, driven) with relatively high accuracy.
同様に、第3実施例のアクチュエータ300によれば、駆動コイル340に生ずる誘導電流を用いて(言い換えれば、電源コイル150から無線伝送される電力ないしは電流を動力源として用いて)内側支持部212(更には、内側支持部212とつながっている可動部120)を遥動させることができる。このため、駆動コイル340が内側支持部212の外部に伸長しなくともよくなる。従って、駆動コイル340につながる配線を一対の外側トーションバー231(更には、可動部120や一対の内側トーションバー232や外側支持部211)に形成しなくともよくなる。言い換えれば、第3実施例のアクチュエータ300によれば、電源コイル150に制御電流を供給することで駆動コイル340が形成されている内側支持部212を遥動させることができるため、駆動コイル340に対して制御電流を供給しなくともよくなる。その結果、第3実施例のアクチュエータ300によれば、駆動コイル340につながる配線を一対の内側トーションバー232や一対の外側トーションバー231に形成しなくともよくなる。従って、一対の内側トーションバー230上や一対の外側トーションバー231上に配線を形成する比較例のアクチュエータと比較して、アクチュエータ300の構造が単純化すると共に、アクチュエータ300の製造工程もまた単純化する。このため、内側支持部212に駆動コイル340を形成することなく内側支持部212を遥動させる比較例のアクチュエータと比較して、アクチュエータの設計の自由度を相対的に高めるという比較例のアクチュエータと同様の効果を相応に享受しつつ、内側支持部212を相対的に高精度に遥動させる(つまり、駆動する)ことができる。或いは、内側支持部212に駆動コイル340を形成しつつ当該駆動コイル340につながる配線を一対の内側トーションバー232や一対の外側トーションバー231に形成する比較例のアクチュエータと比較して、内側支持部212を相対的に高精度に遥動させる(つまり、駆動する)ことができるという比較例のアクチュエータと同様の効果を相応に享受しつつ、アクチュエータ300の設計の自由度を相対的に高めることができる。
Similarly, according to the actuator 300 of the third embodiment, the inner support 212 is used by using the induced current generated in the drive coil 340 (in other words, using power or current wirelessly transmitted from the power supply coil 150 as a power source). (Furthermore, the movable part 120 connected to the inner support part 212) can be swung. For this reason, the drive coil 340 does not need to extend outside the inner support portion 212. Therefore, it is not necessary to form wiring connected to the drive coil 340 on the pair of outer torsion bars 231 (moreover, the movable part 120, the pair of inner torsion bars 232, and the outer support part 211). In other words, according to the actuator 300 of the third embodiment, by supplying a control current to the power supply coil 150, the inner support portion 212 on which the drive coil 340 is formed can be swung, so the drive coil 340 On the other hand, it is not necessary to supply a control current. As a result, according to the actuator 300 of the third embodiment, it is not necessary to form the wiring connected to the drive coil 340 in the pair of inner torsion bars 232 and the pair of outer torsion bars 231. Therefore, the structure of the actuator 300 is simplified and the manufacturing process of the actuator 300 is also simplified as compared with the actuator of the comparative example in which wiring is formed on the pair of inner torsion bars 230 and the pair of outer torsion bars 231. To do. For this reason, compared with the actuator of the comparative example in which the inner support portion 212 is swung without forming the drive coil 340 in the inner support portion 212, The inner support 212 can be swung (that is, driven) with relatively high accuracy while enjoying the same effect accordingly. Alternatively, as compared with the actuator of the comparative example in which the drive coil 340 is formed in the inner support portion 212 and the wiring connected to the drive coil 340 is formed in the pair of inner torsion bars 232 and the pair of outer torsion bars 231, While relatively enjoying the same effect as the actuator of the comparative example that 212 can be swung (that is, driven) with relatively high accuracy, the degree of freedom in designing the actuator 300 can be relatively increased. it can.
更には、ねじれ等の応力が加わり且つ相対的に幅が狭い一対の内側トーションバー232に配線を形成しなくともよくなるため、配線の断線を考慮しなくともよくなる。つまり、駆動コイル140及び駆動コイル340の少なくとも一方につながる配線を一対の内側トーションバー232に形成する比較例のアクチュエータと比較して、アクチュエータ300の耐久性(或いは、耐故障性)を向上させることができる。
Furthermore, since it is not necessary to form wiring on the pair of inner torsion bars 232 to which stress such as torsion is applied and the width is relatively narrow, it is not necessary to consider disconnection of the wiring. That is, the durability (or failure resistance) of the actuator 300 can be improved as compared with the actuator of the comparative example in which the wiring connected to at least one of the drive coil 140 and the drive coil 340 is formed on the pair of inner torsion bars 232. it can.
更には、ねじれ等の応力が加わり且つ相対的に幅が狭い一対の外側トーションバー231に配線を形成しなくともよくなるため、配線の断線を考慮しなくともよくなる。つまり、駆動コイル140及び駆動コイル340の少なくとも一方につながる配線を一対の外側トーションバー231に形成する比較例のアクチュエータと比較して、アクチュエータ300の耐久性(或いは、耐故障性)を向上させることができる。
Furthermore, since it is not necessary to form wiring on the pair of outer torsion bars 231 to which stress such as torsion is applied and the width is relatively narrow, it is not necessary to consider disconnection of the wiring. That is, the durability (or fault tolerance) of the actuator 300 can be improved as compared with the actuator of the comparative example in which the wiring connected to at least one of the drive coil 140 and the drive coil 340 is formed on the pair of outer torsion bars 231. it can.
尚、第3実施例のアクチュエータ300においても、第1実施例のアクチュエータ100や第2実施例のアクチュエータ200が取り得る各種態様を適宜採用してもよい。例えば、第3実施例においても、可動部120が磁性材料を含んでいてもよいし、電源コイル150(或いは、駆動コイル140ないしは駆動コイル340)の形状を変えてもよいし、電源コイル150が複数のコイル部分151bを備えていてもよいし、一対の永久磁石160(或いは、一対の永久磁石260)の配置位置を変えてもよい。
In the actuator 300 of the third embodiment, various modes that the actuator 100 of the first embodiment and the actuator 200 of the second embodiment can take may be employed as appropriate. For example, also in the third embodiment, the movable part 120 may contain a magnetic material, the shape of the power coil 150 (or the drive coil 140 or the drive coil 340) may be changed, and the power coil 150 A plurality of coil portions 151b may be provided, and the arrangement positions of the pair of permanent magnets 160 (or the pair of permanent magnets 260) may be changed.
尚、上述の説明では、可動部がトーションバーの伸長する方向に沿った軸を中心軸として回転するMEMSスキャナに着目して説明を進めている。しかしながら、MEMSスキャナに限らず、任意のアクチュエータに対して上述した各種構成が適用されてもよい。例えば、可動部がトーションバーの遥動に従って平行移動するように遥動するMEMSアクチュエータに対して、上述した各種構成が適用されてもよい。この場合であっても、上述した各種効果は好適に享受される。
In the above description, the description is advanced focusing on the MEMS scanner in which the movable portion rotates about the axis along the direction in which the torsion bar extends. However, the various configurations described above may be applied to any actuator, not limited to the MEMS scanner. For example, the various configurations described above may be applied to a MEMS actuator that moves so that the movable portion moves in parallel according to the movement of the torsion bar. Even in this case, the above-described various effects are favorably enjoyed.
本発明は、前述した実施例に限られるものではなく、請求の範囲及び明細書全体から読み取れる発明の要旨或いは思想に反しない範囲で適宜変更可能であり、そのような変更を伴うアクチュエータもまた本発明の技術的範囲に含まれるものである。
The present invention is not limited to the above-described embodiments, and can be appropriately changed without departing from the spirit or concept of the invention which can be read from the claims and the entire specification. It is included in the technical scope of the invention.
110 支持部
120 可動部
130 トーションバー
140 駆動用コイル
150 電源用コイル
160 永久磁石 DESCRIPTION OFSYMBOLS 110 Support part 120 Movable part 130 Torsion bar 140 Driving coil 150 Power supply coil 160 Permanent magnet
120 可動部
130 トーションバー
140 駆動用コイル
150 電源用コイル
160 永久磁石 DESCRIPTION OF
Claims (17)
- 可動部と、
当該可動部を取り囲む支持部と、
前記可動部が揺動可能なように前記可動部と前記支持部とを接続するトーションバーと、
前記可動部に形成されると共に、前記可動部の外部に伸長していない駆動コイルと、
前記支持部に形成されると共に、前記可動部を揺動させるための制御電流が供給される電源コイルと、
前記駆動コイルに静磁界を印加する磁界印加部と
を備えることを特徴とするアクチュエータ。 Moving parts;
A support part surrounding the movable part;
A torsion bar that connects the movable part and the support part so that the movable part can swing;
A drive coil formed on the movable part and not extending to the outside of the movable part;
A power supply coil that is formed on the support portion and is supplied with a control current for swinging the movable portion;
An actuator comprising: a magnetic field applying unit that applies a static magnetic field to the drive coil. - 前記電源コイルから生ずる磁界が前記駆動コイル内を通過することで、前記駆動コイルに誘導電流が発生し、
前記可動部は、前記磁界印加部から印加される前記静磁界と前記駆動コイルに発生する前記誘導電流との電磁相互作用によって遥動することを特徴とする請求項1に記載のアクチュエータ。 When a magnetic field generated from the power supply coil passes through the drive coil, an induced current is generated in the drive coil,
2. The actuator according to claim 1, wherein the movable portion swings by electromagnetic interaction between the static magnetic field applied from the magnetic field applying unit and the induced current generated in the drive coil. - 前記駆動コイル及び前記電源コイルは、前記制御電流が供給されることで前記電源コイルから生ずる磁界が前記駆動コイル内を通過する位置関係を有するように形成されることを特徴とする請求項1に記載のアクチュエータ。 The drive coil and the power supply coil are formed such that a magnetic field generated from the power supply coil passes through the drive coil when the control current is supplied. The actuator described.
- 前記可動部は、磁性材料を含むことを特徴とする請求項1に記載のアクチュエータ。 The actuator according to claim 1, wherein the movable part includes a magnetic material.
- 前記支持部には、前記電源コイルが複数形成されることを特徴とする請求項1に記載のアクチュエータ。 The actuator according to claim 1, wherein a plurality of the power supply coils are formed on the support portion.
- 可動部と、
当該可動部を取り囲む内側支持部と、
前記可動部が揺動可能なように前記可動部と前記内側支持部とを接続する内側トーションバーと、
当該内側支持部を取り囲む外側支持部と、
前記内側支持部が揺動可能なように前記内側支持部と前記外側支持部とを接続する外側トーションバーと、
前記可動部に形成されると共に、前記可動部の外部に伸長していない駆動コイルと、
前記内側支持部に形成されると共に、前記可動部及び前記内側支持部を揺動させるための制御電流が供給される電源コイルと、
前記駆動コイルに第1静磁界を印加する第1磁界印加部と、
前記電源コイルに第2静磁界を印加する第2磁界印加部と
を備えることを特徴とするアクチュエータ。 Moving parts;
An inner support surrounding the movable part;
An inner torsion bar that connects the movable part and the inner support part so that the movable part can swing;
An outer support that surrounds the inner support;
An outer torsion bar connecting the inner support portion and the outer support portion so that the inner support portion can swing;
A drive coil formed on the movable part and not extending to the outside of the movable part;
A power supply coil that is formed on the inner support and is supplied with a control current for swinging the movable part and the inner support;
A first magnetic field application unit that applies a first static magnetic field to the drive coil;
An actuator comprising: a second magnetic field application unit that applies a second static magnetic field to the power supply coil. - 前記電源コイルから生ずる磁界が前記駆動コイル内を通過することで、前記駆動コイルに誘導電流が発生し、
前記可動部は、前記第1磁界印加部から印加される前記第1静磁界と前記駆動コイルに発生する前記誘導電流との電磁相互作用によって遥動し、
前記内側支持部は、前記第2磁界印加部から印加される第2静磁界と前記電源コイルに供給される前記制御電流との電磁相互作用によって遥動することを特徴とする請求項6に記載のアクチュエータ。 When a magnetic field generated from the power supply coil passes through the drive coil, an induced current is generated in the drive coil,
The movable portion swings due to electromagnetic interaction between the first static magnetic field applied from the first magnetic field application unit and the induced current generated in the drive coil,
The said inner side support part swings by the electromagnetic interaction of the 2nd static magnetic field applied from the said 2nd magnetic field application part, and the said control current supplied to the said power supply coil, It is characterized by the above-mentioned. Actuator. - 前記駆動コイル及び前記電源コイルは、前記制御電流が供給されることで前記電源コイルから生ずる磁界が前記駆動コイル内を通過する位置関係を有するように形成されることを特徴とする請求項6に記載のアクチュエータ。 The drive coil and the power supply coil are formed such that a magnetic field generated from the power supply coil passes through the drive coil when the control current is supplied. The actuator described.
- 前記制御電流には、前記可動部を遥動させるための電流成分と前記内側支持部を遥動させるための電流成分とが重畳されていることを特徴とする請求項6に記載のアクチュエータ。 The actuator according to claim 6, wherein a current component for swinging the movable portion and a current component for swinging the inner support portion are superimposed on the control current.
- 前記可動部は、磁性材料を含むことを特徴とする請求項6に記載のアクチュエータ。 The actuator according to claim 6, wherein the movable part includes a magnetic material.
- 前記内側支持部には、前記電源コイルが複数形成されることを特徴とする請求項6に記載のアクチュエータ。 The actuator according to claim 6, wherein a plurality of the power supply coils are formed on the inner support portion.
- 可動部と、
当該可動部を取り囲む内側支持部と、
前記可動部が揺動可能なように前記可動部と前記内側支持部とを接続する内側トーションバーと、
当該内側支持部を取り囲む外側支持部と、
前記内側支持部が揺動可能なように前記内側支持部と前記外側支持部とを接続する外側トーションバーと、
前記可動部に形成されると共に、前記可動部の外部に伸長していない第1駆動コイルと、
前記内側支持部に形成されると共に、前記内側支持部の外部に伸長していない第2駆動コイルと、
前記外側支持部に形成されると共に、前記可動部及び前記内側支持部を揺動させるための制御電流が供給される電源コイルと、
前記第1駆動コイルに第1静磁界を印加する第1磁界印加部と、
前記第2駆動コイルに第2静磁界を印加する第2磁界印加部と、
を備えることを特徴とするアクチュエータ。 Moving parts;
An inner support surrounding the movable part;
An inner torsion bar that connects the movable part and the inner support part so that the movable part can swing;
An outer support that surrounds the inner support;
An outer torsion bar connecting the inner support portion and the outer support portion so that the inner support portion can swing;
A first drive coil formed on the movable part and not extending to the outside of the movable part;
A second drive coil formed on the inner support and not extending to the outside of the inner support;
A power supply coil that is formed on the outer support and is supplied with a control current for swinging the movable part and the inner support;
A first magnetic field application unit for applying a first static magnetic field to the first drive coil;
A second magnetic field application unit for applying a second static magnetic field to the second drive coil;
An actuator comprising: - 前記電源コイルから生ずる磁界が前記第1駆動コイル内及び前記第2駆動コイル内を通過することで、前記第1駆動コイル及び前記第2駆動コイルの夫々に誘導電流が発生し、
前記可動部は、前記第1磁界印加部から印加される前記第1静磁界と前記第1駆動コイルに発生する前記誘導電流との電磁相互作用によって遥動し、
前記内側支持部は、前記第2磁界印加部から印加される前記第2静磁界と前記第2駆動コイルに発生する前記誘導電流との電磁相互作用によって遥動することを特徴とする請求項12に記載のアクチュエータ。 When a magnetic field generated from the power supply coil passes through the first drive coil and the second drive coil, an induced current is generated in each of the first drive coil and the second drive coil,
The movable part swings due to electromagnetic interaction between the first static magnetic field applied from the first magnetic field application part and the induced current generated in the first drive coil,
13. The inner support portion swings due to electromagnetic interaction between the second static magnetic field applied from the second magnetic field application unit and the induced current generated in the second drive coil. Actuator. - 前記第1駆動コイル、前記第2駆動コイル及び前記電源コイルは、前記制御電流が供給されることで前記電源コイルに生ずる磁界が前記第1駆動コイル内及び前記第2駆動コイル内の双方を通過する位置関係を有するように形成されることを特徴とする請求項12に記載のアクチュエータ。 In the first drive coil, the second drive coil, and the power supply coil, the magnetic field generated in the power supply coil when the control current is supplied passes through both the first drive coil and the second drive coil. The actuator according to claim 12, wherein the actuator is formed to have a positional relationship.
- 前記制御電流には、前記可動部を遥動させるための電流成分と前記内側支持部を遥動させるための電流成分とが重畳されていることを特徴とする請求項12に記載のアクチュエータ。 13. The actuator according to claim 12, wherein a current component for swinging the movable portion and a current component for swinging the inner support portion are superimposed on the control current.
- 前記可動部及び前記内側支持部の少なくとも一方は、磁性材料を含むことを特徴とする請求項12に記載のアクチュエータ。 The actuator according to claim 12, wherein at least one of the movable part and the inner support part includes a magnetic material.
- 前記外側支持部には、前記電源コイルが複数形成されることを特徴とする請求項12に記載のアクチュエータ。 The actuator according to claim 12, wherein a plurality of the power supply coils are formed on the outer support portion.
Priority Applications (2)
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PCT/JP2011/075185 WO2013065126A1 (en) | 2011-11-01 | 2011-11-01 | Actuator |
JP2012503828A JP4968760B1 (en) | 2011-11-01 | 2011-11-01 | Actuator |
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PCT/JP2011/075185 WO2013065126A1 (en) | 2011-11-01 | 2011-11-01 | Actuator |
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Cited By (4)
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EP2990375A3 (en) * | 2014-09-01 | 2016-06-08 | MEMS Technology Ltd. | Electromagnetically actuated mems |
WO2018168349A1 (en) * | 2017-03-13 | 2018-09-20 | パイオニア株式会社 | Drive device and distance measuring device |
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Publication number | Priority date | Publication date | Assignee | Title |
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EP2990375A3 (en) * | 2014-09-01 | 2016-06-08 | MEMS Technology Ltd. | Electromagnetically actuated mems |
WO2018168349A1 (en) * | 2017-03-13 | 2018-09-20 | パイオニア株式会社 | Drive device and distance measuring device |
JPWO2018168349A1 (en) * | 2017-03-13 | 2020-01-16 | パイオニア株式会社 | Drives and distance measuring devices |
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CH715874A1 (en) * | 2019-02-26 | 2020-08-31 | Sercalo Microtechnology Ltd | Micromechanical coil device. |
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CN112305750A (en) * | 2019-08-02 | 2021-02-02 | 上海汽车集团股份有限公司 | MEMS galvanometer and optical system |
Also Published As
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JPWO2013065126A1 (en) | 2015-04-02 |
JP4968760B1 (en) | 2012-07-04 |
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