WO2013058429A1 - Appareil pour séparer des particules, et procédé pour séparer des particules fibreuses au moyen de cet appareil - Google Patents

Appareil pour séparer des particules, et procédé pour séparer des particules fibreuses au moyen de cet appareil Download PDF

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Publication number
WO2013058429A1
WO2013058429A1 PCT/KR2011/008502 KR2011008502W WO2013058429A1 WO 2013058429 A1 WO2013058429 A1 WO 2013058429A1 KR 2011008502 W KR2011008502 W KR 2011008502W WO 2013058429 A1 WO2013058429 A1 WO 2013058429A1
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Prior art keywords
electrode
outlet
aerosol
inner electrode
particles
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PCT/KR2011/008502
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English (en)
Korean (ko)
Inventor
안강호
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한양대학교 산학협력단
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Publication of WO2013058429A1 publication Critical patent/WO2013058429A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/36—Controlling flow of gases or vapour
    • B03C3/361—Controlling flow of gases or vapour by static mechanical means, e.g. deflector
    • B03C3/363—Controlling flow of gases or vapour by static mechanical means, e.g. deflector located before the filter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/36—Controlling flow of gases or vapour
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/36—Controlling flow of gases or vapour
    • B03C3/361—Controlling flow of gases or vapour by static mechanical means, e.g. deflector
    • B03C3/366—Controlling flow of gases or vapour by static mechanical means, e.g. deflector located in the filter, e.g. special shape of the electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/41—Ionising-electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/45—Collecting-electrodes
    • B03C3/49—Collecting-electrodes tubular
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution

Definitions

  • the present invention relates to a particle separation device, and more particularly, to a particle separation device that can classify particles using the difference in the mobility of the particles according to the electric field.
  • the measurement of particles in a clean space is a very important factor in the semiconductor production process, and the technology that can measure particles in nano units as the line width of semiconductors decreases due to the development of semiconductor technology. Is being requested.
  • An electrical particle classifier which is a type of particle separation device, classifies particles by using the difference in particle mobility due to electrostatic force. It is also called differential electric mobility analyzer or differential type electric classifier. .
  • DMA is a device for selecting mono-disperse particles having a desired diameter from poly-disperse particles by using the moving speed of the charged particles as a function of the particle diameter.
  • FIG. 6 is a diagram showing the structure of a conventional general DMA.
  • Conventional DMA is composed of a cylindrical inner electrode (1) located inside and an outer electrode (2) surrounding the inner electrode (1), generally applying a high voltage to the inner electrode (1) and the outer electrode (2) ) Is grounded.
  • the monodispersed aerosol Q mo containing only particles of a desired size is separated through the slit between the inner electrode 1 and the guide 6. And the remaining residual aerosol (Q ex ) is discharged separately. This allows only particles of the desired size to be classified and can also be measured by sending the sorted aerosol to a particle counter.
  • Republic of Korea Patent No. 10-567788 is an invention in which the conventional DMA is improved, the pipe structure is maintained in the longitudinal direction.
  • the DMA of this structure moves inside the mixed gas at a constant speed, it must have a considerable length in the longitudinal direction to effectively classify the particles, resulting in a problem that the equipment is too large.
  • the fibrous particles are easy to classify in the DMA only when the dipole moment (dipole moment) must be formed, but the conventional DMA does not classify the fibrous particles because they do not form a dipole moment in the particles because the electric field formed inside is uniform. can not do it.
  • the present invention has been made in view of the above-mentioned problems of the prior art, and an object thereof is to provide a particle separation device having a small size and capable of classifying fibrous particles.
  • the axial symmetrical internal electrode for achieving the above object, the axial symmetrical internal electrode; And an external electrode spaced apart from the internal electrode by a predetermined distance to surround the internal electrode, and an upper outflow for introducing or discharging an aerosol into a space between the internal electrode and the external electrode at upper and lower portions of the external electrode.
  • An inlet and a lower outlet inlet are formed, and the distance from the symmetry axis to the side of the inner electrode is longer than the distance from the symmetry axis to the ends of the upper outlet and the lower outlet inlet.
  • the inventors of the present invention have contemplated a method of reducing the moving speed of the aerosol containing particles in order to increase the residence time of the particles in the space between the inner electrode and the outer electrode in the particle separation device.
  • the inventors of the present invention is that the axially symmetric internal electrode is extended laterally than the outlet of the aerosol Has developed a particle separation device.
  • the width of the inner electrode is greater than the distance from the axis of symmetry to the end of the outlet, the total width of the outlet when the aerosol outlet is formed on the axis of symmetry, the aerosol introduced through the outlet is radial on the surface of the inner electrode.
  • the movement speed is reduced while spreading.
  • the aerosol, which has been decelerated in the radial direction, is lowered through the side of the inner electrode and then moved downward toward the center while the traveling direction is changed by 180 °.
  • the surface area of the inner surface of the outer electrode disposed at a predetermined distance from the inner electrode is larger than the surface area of the inner electrode. Due to this difference in area, there is a non-uniform portion of the electric field formed between the inner electrode and the outer electrode, which induces a dipole moment in the fibrous particles, thereby making it possible to classify the fibrous particles.
  • the upper outlet is composed of the upper inner outlet and the upper outer outlet, it is preferable that the upper inner outlet is located closer to the axis of symmetry than the upper outer outlet.
  • the lower outlet may be configured as a lower inner outlet and a lower outer outlet, and the lower inner outlet may be located closer to the axis of symmetry than the lower outer outlet, and may be spaced apart from the inner electrode and connected to the lower outer outlet. It is desirable to separate the flow of aerosol by installing a.
  • a concave space is formed in the lower portion of the inner electrode, and a guide is positioned in the concave space, and a slit is formed between the concave space and the guide.
  • a flow homogenizing device is provided for forming a differential pressure between the lower outer inlet and the slit to maintain the axial fluid flow uniformly.
  • the internal electrode of the particle separation device of the present invention has a disk shape and the side surface is curved.
  • the upper and lower inlet and outlet for inlet or outflow of the aerosol is formed, the external electrode having a space therein; And an inner electrode disposed in a space inside the outer electrode and spaced apart from the inner surface of the outer electrode by a predetermined distance, and the aerosol introduced into the space spaced apart from the outer electrode and the inner electrode through the upper outlet.
  • the flow rate of the introduced aerosol is reduced by including a portion in which the flow path through which the aerosol introduced into the space spaced apart from the external electrode and the external electrode moves gradually through the lower outlet opening.
  • the inner surface of the outer electrode is wider than the surface of the inner electrode facing each other, it is preferable to include a portion generating a non-uniform electric field between the inner electrode and the outer electrode.
  • the separation method of the fibrous particles of the present invention uses a particle separation device in which a non-uniform electric field is generated between the inner electrode and the outer electrode by a difference in the area of the inner electrode and the inner area of the outer electrode which are opposed to each other.
  • a method for separating the fibrous particles contained in the aerosol comprising the steps of: charging the spherical particles contained in the aerosol with a negative or positive charge; Charging an internal electrode with a charge opposite to that of the spherical particles; And moving an aerosol between the inner electrode and the outer electrode, wherein the fibrous particles having a dipole moment are attached to the inner electrode and removed by a non-uniform electric field generated between the inner electrode and the outer electrode. It is characterized by.
  • the present invention configured as described above has the effect of increasing the time that the dispersed particles are affected by the electric field by slowing down the moving speed of the aerosol by providing an internal electrode wider than the outlet of the aerosol.
  • the particle separation device of the present invention not only exerts a sufficient effect even with a small size, but also significantly reduces the manufacturing cost.
  • the presence of a non-uniform electric field induces a dipole moment in the particles, thereby having the effect of classifying or removing the fibrous particles.
  • FIG. 1 is a front sectional view showing a structure and a method of operating the particle separation device according to an embodiment of the present invention.
  • FIG. 2 is a plan sectional view showing the flow of aerosol introduced into the particle separation device according to the present embodiment.
  • FIG 3 is a front sectional view showing a state of an electric field formed in the particle separation device according to the present embodiment.
  • FIG. 4 is a graph showing the results of classifying particles using the particle separation device according to the present embodiment.
  • FIG. 5 is a front sectional view showing another method of operating the particle separation device according to the present embodiment.
  • FIG. 6 is a diagram showing the structure of a conventional general DMA.
  • FIG. 1 is a front sectional view showing a structure and a method of operating the particle separation device according to an embodiment of the present invention.
  • the particle separation device of this embodiment includes an inner electrode 10 and an outer electrode 20 surrounding the outside thereof.
  • the inner electrode 10 is axially symmetrical disc-shaped, the outer electrode 20 is positioned around the inner electrode 10 spaced apart from the inner electrode 10 by a predetermined distance.
  • the internal electrode 10 is connected to the power supply 100, the external electrode 20 is grounded, and when a high voltage is applied to the internal electrode 10, the internal electrode 10 is located in a classification area that is a space between the internal electrode 10 and the external electrode 20. An electric field is formed.
  • the strength and direction of the electric field generated in the classification region are determined by the voltage applied to the internal electrode 10.
  • the intensity of the electric field is controlled by the size of the particle that is subject to classification or measurement.
  • the external electrode 20 has an outlet opening through which an aerosol flows into or out of the classification region, respectively, at the top and bottom thereof.
  • the upper outlet 30 is composed of an upper inner outlet 32 formed closer to the axis of symmetry of the inner electrode 10 and an upper outer outlet 34 formed at a symmetrical axis than the upper inner outlet 34.
  • FIG. 1 illustrates a device in which the aerosol to be classified is introduced through the upper outlet 30, in which case sheath air (Q sh ) is introduced into the upper inner outlet 32, and the upper outer outlet is introduced.
  • the inlet 34 introduces a polydispersion aerosol (Q po ) to be classified.
  • a flow straightener 50 is formed between the upper outer outlet opening 34 and the upper inner outlet opening 32 to form a differential pressure to uniformly maintain the fluid flow in the axial direction.
  • Q sh ensures a uniform laminar flow in the classification zone.
  • the polydispersed aerosol (Q po ) introduced into the upper outer outlet inlet (34) is mixed with the protective air (Q sh ) for uniform laminar flow past the flow homogenizer (50), and the mixed gas is contained in the classification zone. It moves to a uniform laminar flow.
  • the lower outlet inlet 40 is configured as a lower inner outlet inlet 42 formed closer to the axis of symmetry of the inner electrode 10 and a lower outer outlet inlet 44 formed at a position farther from the axis of symmetry.
  • the monodisperse aerosol Q mo in which the target particles P are dispersed flows out into the lower inner outlet inlet 42, and the remaining aerosol Q other than the object to be classified into the lower outer outlet inlet 44. ex ) is leaked.
  • the target particle (P) moves closer to the inner electrode 10, and other particles move closer to the outer electrode 20 side, thereby forming a guide 60 in the classification region to separate the flow of the fluid.
  • the guide 60 is set to a distance from the internal electrode 10 so as to separate the gas in which the target particles are dispersed.
  • a concave space 12 is formed inward in the center portion of the lower surface of the inner electrode 10, and the guide 60 is positioned in this space.
  • the monodisperse aerosol Q mo in which the target particles P are dispersed is introduced through the slit between the concave space 12 and the guide 60, and the residual aerosol Q ex is not disturbed by the flow.
  • FIG. 1 illustrates a method of operating the case of introducing the polydispersed aerosol Q po and the protective air Q sh through the upper outlet inlet 30.
  • the protective air (Q sh ) introduced from the center of the circle is mixed with the polydisperse aerosol (Q po ), and this mixed gas moves in a radial spread.
  • FIG. 2 is a plan sectional view showing the flow of aerosol introduced into the particle separation device according to the present embodiment.
  • the protective air entering from the center is radially diffused while mixing with the aerosol and proceeding in a radial direction, and the traveling speed decreases gradually.
  • the speed reduction in the classification zone increases the time that the dispersed particles are affected by the electric field, thereby improving the effect of particle movement by the electric field, so that the same classification effect can be obtained with a smaller size than the conventional DMA.
  • This slowed aerosol travels along the sides of the classification zone and is affected by an uneven electric field.
  • FIG 3 is a front sectional view showing a state of an electric field formed in the particle separation device according to the present embodiment.
  • the inner electrode 10 has the same distance from the outer electrode 20, so that the upper and lower portions of the classification area having the same width of the surface where both electrodes face each other exhibit a constant electric field. However, since the outer electrode 20 has a larger area than the area of the inner electrode 10 at the side of the classification region, the electric field toward the inner electrode 10 is stronger.
  • the fibrous particles contained in the polydisperse aerosol are affected by the electric field by forming a dipole moment in the non-uniform electric field. Therefore, the particle separation device of the present embodiment can classify or measure the uncharged fibrous particles unlike the conventional DMA.
  • the aerosol past the side of the classification zone runs from the bottom of the inner electrode 10 toward the center.
  • the target particles (P) dispersed in the aerosol is moved close to the internal electrode 10 by the electric field, other particles are attached to the internal electrode 10 or the external electrode 20 compared to the target particle (P). Move from side.
  • the mono-disperse aerosol in which the target particles P are dispersed by separating the flow of the aerosol by the guide 60 installed between the inner electrode 10 and the outer electrode 20 and connected to the lower outer outlet opening 44 ( Q mo ) is discharged through the lower inner outlet inlet 42, and the remaining aerosol Q ex in which the target particles P are not dispersed is discharged through the lower outer outlet inlet 44.
  • FIG. 4 is a graph showing the results of classifying particles using the particle separation device according to the present embodiment.
  • the particle separation device of this embodiment exhibits a performance similar to that of a conventional pipe-type DMA having a length of 50 cm.
  • the particle separation device of this embodiment has a diameter of about 10 cm. It can be seen that there is an excellent classification effect.
  • FIG. 5 is a front sectional view showing another method of operating the particle separation device according to the present embodiment.
  • FIG. 5 illustrates a method of operating the case of introducing the polydispersed aerosol (Q po ) and the protective air (Q sh ) through the lower outlet inlet (40). Then, a charge, such as a charge charged by the target particle P, is applied to the internal electrode 10 so that the target particle P gradually moves away from the internal electrode 10 to classify the target particle P.
  • a charge such as a charge charged by the target particle P
  • the protective air Q sh is introduced into the lower outer outlet 44, and the polydispersed aerosol Q is classified as the lower inner outlet 42. po ) is introduced.
  • the protective air Q sh introduced into the lower outer inlet 44 passes through the flow homogenizing device 50 provided between the lower outer inlet 44 and the slit, thereby providing a uniform laminar flow in the classification zone. .
  • the polydispersed aerosol Q po introduced into the lower inner outlet inlet 42 is mixed with the protective air Q sh flowing through the slit through the slit in the classification zone through the concave space 12 of the inner electrode 10. .
  • the traveling speed is gradually reduced as in the case of FIG. 2.
  • the dipole moment can be formed in the fibrous particles.
  • the target particles P charged with the same charge as the inner electrode 10 are pushed by the inner electrode and gradually move toward the outer electrode 20.
  • the monodisperse aerosol Q mo in which the target particles P are dispersed is discharged from the upper outer outlet 34, and the remaining aerosol Q ex is discharged through the upper inner outlet 32.
  • the operation method of FIG. 1 and the operation method of FIG. 5 may be selectively applied according to the characteristics of particles and the purpose of classification or measurement.
  • the operating method of FIG. 5 is suitable for use for sorting or removing fibrous particles in polydisperse aerosols.
  • the spherical particles charged with negative or positive charges repulse with the internal electrode charged with the opposite charge, but the fibrous particles form a dipole moment, which attracts the internal electrodes regardless of the polarity of the internal electrodes. do. Therefore, the aerosol from which all the fibrous particles have been removed can be collected using the particle separation device of this embodiment, and on the other hand, only the fibrous particles attached to the internal electrode can be collected. In this way, it is possible to classify or remove fibrous particles such as carbon nanotubes or asbestos particles.
  • the lower outer outlet 42 and the inner electrode 10 contact each other, and the lower outer outlet 42 is in contact with the inner electrode 10.
  • a plurality of fine through holes or fine slits are formed in the portion, through which fluid may flow.

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  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electrostatic Separation (AREA)

Abstract

La présente invention concerne un appareil, qui est conçu pour séparer des particules, et qui est capable de séparer des particules fibreuses de petites dimensions. Cet appareil de séparation de particules comporte, d'une part une électrode de forme axialement symétrique, et d'autre part une électrode externe séparée d'une distance prédéterminée de l'électrode interne de façon à entourer l'électrode interne. Une entrée de décharge supérieure et une entrée de décharge inférieure servant à l'introduction ou à la décharge d'un aérosol vers l'intérieur ou à partir de l'espace compris entre l'électrode interne et l'électrode externe sont réalisées respectivement dans les parties supérieure et inférieure de l'électrode externe. En outre, la distance mesurée depuis l'axe de symétrie jusqu'à une surface latérale de l'électrode interne est supérieure à celle mesurée depuis l'axe de symétrie jusqu'aux extrémités des entrées de décharge supérieure et inférieure. La présente invention permet de réaliser une électrode interne présentant une zone plus grande que le diamètre de l'entrée prévue pour l'aérosol, de façon à diminuer le flux de l'aérosol, augmentant ainsi l'effet d'un champ électrique sur les particules dispersées.
PCT/KR2011/008502 2011-10-21 2011-11-09 Appareil pour séparer des particules, et procédé pour séparer des particules fibreuses au moyen de cet appareil WO2013058429A1 (fr)

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KR1020110107969A KR101179039B1 (ko) 2011-10-21 2011-10-21 입자 분리 장치 및 이를 이용한 섬유형상 입자의 분리방법
KR10-2011-0107969 2011-10-21

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019073006A1 (fr) 2017-10-12 2019-04-18 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode et dispositif de tri de fibres en suspension dans un aerosol par la combinaison de forces electrostatiques et de gravite
WO2019073009A1 (fr) 2017-10-12 2019-04-18 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode et dispositif de tri de fibres en suspension dans un aerosol par la combinaison de forces electrostatiques et centrifuge

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101460311B1 (ko) 2013-03-18 2014-11-14 한양대학교 에리카산학협력단 입자 분급장치
KR101528773B1 (ko) 2014-05-16 2015-06-15 연세대학교 산학협력단 대기중의 바이오 입자 및 넌바이오 입자 실시간 검출장치 및 이를 이용한 검출방법
KR101558480B1 (ko) 2014-09-29 2015-10-07 한국에너지기술연구원 섬유상 입자 분리 장치 및 분리 방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0755689A (ja) * 1993-08-16 1995-03-03 Agency Of Ind Science & Technol エアロゾル粒子質量分析器
KR20010101080A (ko) * 1998-11-25 2001-11-14 리우, 벤자민 와이. 에이치. 전기 집진기
US6761752B2 (en) * 2002-01-17 2004-07-13 Rupprecht & Patashnick Company, Inc. Gas particle partitioner
JP2008096322A (ja) * 2006-10-13 2008-04-24 Shimadzu Corp 粒子分級装置
JP2008096169A (ja) * 2006-10-06 2008-04-24 Shimadzu Corp 粒子分級装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0755689A (ja) * 1993-08-16 1995-03-03 Agency Of Ind Science & Technol エアロゾル粒子質量分析器
KR20010101080A (ko) * 1998-11-25 2001-11-14 리우, 벤자민 와이. 에이치. 전기 집진기
US6761752B2 (en) * 2002-01-17 2004-07-13 Rupprecht & Patashnick Company, Inc. Gas particle partitioner
JP2008096169A (ja) * 2006-10-06 2008-04-24 Shimadzu Corp 粒子分級装置
JP2008096322A (ja) * 2006-10-13 2008-04-24 Shimadzu Corp 粒子分級装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019073006A1 (fr) 2017-10-12 2019-04-18 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode et dispositif de tri de fibres en suspension dans un aerosol par la combinaison de forces electrostatiques et de gravite
WO2019073009A1 (fr) 2017-10-12 2019-04-18 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode et dispositif de tri de fibres en suspension dans un aerosol par la combinaison de forces electrostatiques et centrifuge
US20200261923A1 (en) * 2017-10-12 2020-08-20 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method and device for sorting fibers in suspension in an aerosol through the combination of electrostatic and gravitational forces
US11396025B2 (en) 2017-10-12 2022-07-26 Commissariat A L'energie Atomique Et Aux Energies Alternatives Method and device for sorting fibers in suspension in an aerosol through the combination of electrostatic and centrifugal forces

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