WO2013057065A3 - Keramisches erzeugnis zur verwendung als target - Google Patents

Keramisches erzeugnis zur verwendung als target Download PDF

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Publication number
WO2013057065A3
WO2013057065A3 PCT/EP2012/070373 EP2012070373W WO2013057065A3 WO 2013057065 A3 WO2013057065 A3 WO 2013057065A3 EP 2012070373 W EP2012070373 W EP 2012070373W WO 2013057065 A3 WO2013057065 A3 WO 2013057065A3
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WIPO (PCT)
Prior art keywords
ceramic product
target
electrical conductivity
substrate
ceramic
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PCT/EP2012/070373
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English (en)
French (fr)
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WO2013057065A2 (de
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Jochen Langguth
Dietrich Mund
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Vaciontec GmbH
Sintertechnik Gmbh
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Publication of WO2013057065A2 publication Critical patent/WO2013057065A2/de
Publication of WO2013057065A3 publication Critical patent/WO2013057065A3/de

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  • Chemical & Material Sciences (AREA)
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  • Compositions Of Oxide Ceramics (AREA)
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Abstract

Die Erfindung betrifft ein keramisches Erzeugnis, welches als Target für die Beschichtung von Substraten eingesetzt werden kann, sowie ein Verfahren zu dessen Herstellung. Das keramische Erzeugnis ist geeignet, als Target in Sputter-Prozessen eingesetzt zu werden und dient der Erzeugung einer Schicht auf einem Substrat, wobei die erzeugte Schicht eine hohe Transparenz sowie eine geringe elektrische Leitfähigkeit aufweist. Das keramische Erzeugnis besteht bevorzugt aus Zinkoxid und ist nicht oder nur geringfügig dotiert. Mittels einer Sauerstoffreduktion während eines Wärmebehandlungsprozesses wird die elektrische Leitfähigkeit des keramischen Erzeugnisses derart gesteigert, dass es für ein Sputter-Prozess geeignet ist. Während des Sputter-Prozesses wird gezielt eine Aufoxidation durchgeführt, um eine extrem geringe elektrische Leitfähigkeit des keramischen Materials in der auf dem Substrat erzeugten Schicht zu erhalten.
PCT/EP2012/070373 2011-10-18 2012-10-15 Keramisches erzeugnis zur verwendung als target WO2013057065A2 (de)

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Application Number Priority Date Filing Date Title
DE102011116062.4 2011-10-18
DE201110116062 DE102011116062A1 (de) 2011-10-18 2011-10-18 Keramisches Erzeugnis zur Verwendung als Target

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WO2013057065A2 WO2013057065A2 (de) 2013-04-25
WO2013057065A3 true WO2013057065A3 (de) 2013-07-25

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RU2015104044A (ru) * 2012-07-09 2016-08-27 Конинклейке Филипс Н.В. Способ обработки поверхностного слоя устройства, состоящего из глинозема, и соответствующее устройство, в частности, компонент рентгеновской трубки
DE102014118487A1 (de) 2014-12-12 2016-06-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Abscheiden eines transparenten Mehrschichtsystems mit Kratzschutzeigenschaften
CN113337800A (zh) * 2020-03-02 2021-09-03 杭州海康微影传感科技有限公司 薄膜吸气剂及其制备方法

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