WO2013054629A1 - 静電気対策素子 - Google Patents
静電気対策素子 Download PDFInfo
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- WO2013054629A1 WO2013054629A1 PCT/JP2012/073408 JP2012073408W WO2013054629A1 WO 2013054629 A1 WO2013054629 A1 WO 2013054629A1 JP 2012073408 W JP2012073408 W JP 2012073408W WO 2013054629 A1 WO2013054629 A1 WO 2013054629A1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T4/00—Overvoltage arresters using spark gaps
- H01T4/10—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T4/00—Overvoltage arresters using spark gaps
- H01T4/10—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel
- H01T4/12—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel hermetically sealed
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T1/00—Details of spark gaps
- H01T1/20—Means for starting arc or facilitating ignition of spark gap
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T1/00—Details of spark gaps
- H01T1/24—Selection of materials for electrodes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0254—High voltage adaptations; Electrical insulation details; Overvoltage or electrostatic discharge protection ; Arrangements for regulating voltages or for using plural voltages
- H05K1/0257—Overvoltage protection
- H05K1/026—Spark gaps
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0175—Inorganic, non-metallic layer, e.g. resist or dielectric for printed capacitor
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0209—Inorganic, non-metallic particles
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09218—Conductive traces
- H05K2201/09272—Layout details of angles or corners
Definitions
- the present invention relates to an anti-static element, and more particularly to an anti-static element useful for use in a high-speed transmission system or in combination with a common mode filter.
- an electrostatic countermeasure element with a low electrostatic capacity an element having electrodes arranged opposite to each other and having a composite of a conductive inorganic material and an insulating inorganic material between the electrodes as a discharge inducing portion has been proposed. Yes.
- This type of anti-static element is provided between a line where static electricity enters and the ground, like a multilayer varistor. When an excessive voltage is applied, discharge occurs between the electrodes of the antistatic element, and the static electricity can be guided to the ground side.
- An electrostatic countermeasure element equipped with this kind of so-called gap-type electrode has characteristics such as a large insulation resistance, a small capacitance, and a good response.
- the conductive inorganic materials in the electrode and the discharge inducing portion are aggregated due to heat and stress generated by the discharge and a short circuit occurs.
- Patent Document 1 describes an anti-static component characterized in that, in a gap discharge element having a pair of discharge electrodes in a cavity, a metal oxide such as aluminum or magnesium is adhered to the surface of the discharge electrode. ing. With this configuration, since the oxide attached to the discharge electrode is an oxide having a high insulation resistance value, it is possible to prevent a short circuit between the opposing discharge electrodes and to improve durability against repeated application of static electricity. Has been.
- the present invention has been made in view of such circumstances, and an object of the present invention is to provide an anti-static element excellent in durability of repeated use.
- an anti-static element of the present invention has a pair of discharge electrodes and a discharge inducing portion in an insulating laminate, and an insulating layer containing vitreous is partially formed on the discharge electrodes. It is characterized by arranging.
- the inventors measured the characteristics of the anti-static element configured as described above, and found that the durability of repeated use was enhanced. The details of the mechanism of action that produces this effect are estimated as follows.
- the electrostatic protection element having the above-described configuration is provided with an insulating layer containing glass on the surface of a pair of discharge electrodes formed in the insulating laminate, thereby causing a discharge inducing portion of the conductive inorganic material in the discharge electrode by discharge. Outflow to is suppressed. Furthermore, since the insulating layer contains glass, the adhesion between the insulating layer and the discharge electrode is improved. For this reason, the insulation layer is prevented from falling off or peeling off from the discharge electrode due to an impact accompanied by heat or stress during discharge. As a result, it is presumed that short-circuiting between the discharge electrodes during repeated use is suppressed and durability is enhanced.
- the insulating layer containing vitreous is preferably provided on both surfaces of the pair of discharge electrodes.
- the insulating layer containing vitreous has the insulating layer in at least a part of a portion in contact with a pair of discharge electrodes and the discharge inducing portion. Furthermore, it is preferable that the insulating layer is provided in all portions in contact with the discharge electrode and the discharge inducing portion.
- the glassy components contained in the insulating layer are SiO 2 , Al 2 O 3 , B 2 O 3 , MgO, CaO, SrO, BaO, Li 2 O, Na 2 O, K 2 O, ZnO, and ZrO 2. It is preferably at least one selected from the group consisting of:
- the insulating layer containing these oxides containing vitreous has excellent insulating properties, denseness, and adhesion to the discharge electrode, and thus effectively functions as a material for the insulating layer covering the discharge electrode. Therefore, it is possible to realize a high-performance anti-static element that is excellent in durability during repeated use.
- vitreous contained in the insulating layer include silicate glass, alumina silicate glass, borate glass, borosilicate glass, soda lime glass, phosphate glass, lead salt glass and other inorganic acids. It is preferable to contain at least one salt glass. Since these insulating layers containing glass are excellent in insulating properties, denseness, and adhesion to the discharge electrode, they function effectively as a material constituting the insulating layer covering the discharge electrode. It is possible to realize a high-performance anti-static element with excellent durability.
- the glassy ratio contained in the insulating layer is preferably 10 wt% or more and 100 wt% or less.
- An insulating layer containing a glassy material in this range has excellent insulating properties, denseness, and adhesion to the discharge electrode, so it effectively functions as an insulating layer that covers the discharge electrode, resulting in durability during repeated use. Can be realized.
- components other than glassy are contained in the insulating layer, as components other than glassy, Al 2 O 3 , SrO, CaO, BaO, TiO 2 , SiO 2 , ZnO, In 2 are used from the viewpoint of insulation.
- O 3 , NiO, CoO, SnO 2 , V 2 O 5 , CuO, MgO, ZrO 2 , and metal nitride are preferably AlN and BN, and may be carbide such as SiC. These may be used alone or in combination of two or more.
- the “insulating layer” does not necessarily have a dense structure, and may include a net-like or patchy state. Furthermore, it may be formed as an insulating inorganic material particle or an aggregate of particles, and its properties are not particularly limited.
- FIG. 1 is a schematic cross-sectional view schematically showing an electrostatic protection element 100 of Example 1.
- FIG. 6 is a schematic cross-sectional view schematically showing an antistatic element 200 of Example 2.
- FIG. 6 is a schematic cross-sectional view schematically showing an anti-static element 300 of Example 3.
- FIG. 6 is a schematic cross-sectional view schematically showing an antistatic element 400 of Example 4.
- 6 is a schematic cross-sectional view schematically showing an anti-static element 500 of Example 5.
- FIG. 6 is a schematic cross-sectional view schematically showing an antistatic element 600 of Comparative Example 1.
- FIG. It is a circuit diagram in an electrostatic discharge test.
- FIG. 1 is a schematic cross-sectional view schematically showing an antistatic element 100 of the present embodiment.
- the electrostatic protection element 100 includes an insulating laminate 11, and a pair of rectangular discharge electrodes 12, 13 disposed with a gap distance ⁇ G (not shown) in the same plane of the insulating laminate 11, A discharge inducing portion 14 disposed in a gap located between the discharge electrodes 12, 13; insulating layers 15, 16 between the discharge electrodes 12, 13 and the discharge inducing portion 14 and covering the surfaces of the electrodes; And terminal electrodes (not shown) electrically connected to the electrodes 12 and 13.
- the electrostatic protection element 100 is produced by a lamination method, and a pair of discharge electrodes 12 and 13 are embedded in the insulating laminate 11.
- the discharge electrodes 12 and 13 are electrically connected to an external circuit via the terminal electrodes, and the discharge inducing portion 14 functions as an electrostatic protection material capable of discharging even at a relatively low voltage.
- an overvoltage such as static electricity is applied from the outside, an initial discharge is secured between the discharge electrodes 12 and 13 via the discharge inducing portion 14.
- the insulating laminate 11 serving as the insulating substrate can support at least the discharge electrodes 12 and 13 and the discharge inducing portion 14, the dimensions and the number of the laminated laminates 11 are not particularly limited.
- the insulating laminate 11 includes not only a substrate made of an insulating material but also a substrate in which an insulating film is formed on a part or the entire surface of the substrate.
- substrate with the insulating film may be sufficient.
- the insulating laminate 11 include a low dielectric constant material having a dielectric constant of 50 or less, preferably 20 or less, such as Al 2 O 3 , SiO 2 , MgO, AlN, Mg 2 SiO 4 (forsterite).
- a pair of discharge electrodes 12, 13 are disposed apart from each other.
- the pair of discharge electrodes 12 and 13 are disposed on the insulating laminate 11 with a gap distance ⁇ G.
- the gap distance ⁇ G means the shortest distance between the pair of discharge electrodes 12 and 13.
- the material constituting the discharge electrodes 12 and 13 include at least one metal selected from C, Ni, Al, Fe, Cu, Ti, Cr, Au, Ag, Pd, and Pt, or alloys thereof. Although it is mentioned, it is not specifically limited to these.
- the discharge electrodes 12 and 13 are formed in a rectangular shape in plan view, but the shape thereof is not particularly limited.
- the discharge electrodes 12 and 13 may be formed in a comb-tooth shape or a saw-tooth shape. Good.
- the gap distance ⁇ G between the electrodes 12 and 13 may be appropriately set in consideration of desired discharge characteristics, and is not particularly limited, but is usually about 1 to 50 ⁇ m, and from the viewpoint of ensuring low voltage initial discharge. More preferably, it is about 5 to 40 ⁇ m, more preferably about 8 to 30 ⁇ m.
- the thickness of the discharge electrodes 12 and 13 can be appropriately set and is not particularly limited, but is usually about 1 to 20 ⁇ m.
- the formation method of the discharge electrodes 12 and 13 is not specifically limited, A well-known method can be selected suitably. Specifically, for example, there is a method of forming the discharge electrodes 12 and 13 having a desired thickness on the insulating laminate 11 by coating, transferring, electrolytic plating, electroless plating, vapor deposition, sputtering, or the like. Further, the shape of the discharge electrodes 12 and 13 and the gap distance ⁇ G can be processed using a known method such as ion milling, etching, or laser processing. Alternatively, the discharge electrodes 12 and 13 may be formed by performing baking after forming an electrode layer on the substrate by screen printing using a plate making in which a gap portion between the discharge electrodes 12 and 13 is patterned. . Alternatively, an element may be formed by a lamination method using an electrode layer formed by screen printing on a green sheet made of an insulator.
- examples of the vitreous include silicate glass and alumina silicate glass, but are not particularly limited thereto.
- SiO 2 as a component of the vitreous, Al 2 O 3, B 2 O 3, MgO, CaO, SrO, BaO, Li 2 O, Na 2 O, K 2 O, from ZnO and ZrO 2
- it contains at least one selected from silicate glass, alumina silicate glass, borate glass, borosilicate glass, soda lime glass, phosphate glass, lead acid glass and other inorganic acid salt glass. Is preferred.
- these may be used individually by 1 type, or may use 2 or more types together.
- the metal nitride is preferably AlN or BN, and may be a carbide such as SiC. . These may be used alone or in combination of two or more.
- the insulating inorganic material contained in the insulating layers 15 and 16 has a resistivity of 10 6 ⁇ m or more from the viewpoint of realizing the electrostatic protection device 100 having excellent durability and discharge characteristics during repeated use with good reproducibility. It is preferable.
- the insulating layers 15 and 16 do not necessarily have a dense structure, and are not limited to layers or films. It may include a net-like or patchy state. Furthermore, it may be formed as an insulating inorganic material particle or an aggregate of particles, and its properties are not particularly limited.
- the glassy content contained in the insulating layers 15 and 16 is 10 wt% or more and 100 wt% or less from the viewpoint of realizing the antistatic element 100 having excellent durability and discharge characteristics during repeated use with good reproducibility. Is preferred.
- insulating layer on both discharge electrodes. More preferably, the entire interface between the discharge electrodes 12 and 13 and the discharge inducing portion 14 is covered with the insulating layers 15 and 16.
- the relative arrangement (positional relationship) of the pair of discharge electrodes 12 and 13 is not particularly limited.
- As the positional relationship for example, a case where both discharge electrodes as shown in FIG. 1 are arranged in an insulating laminate in the same plane can be mentioned.
- the case where both the discharge electrodes shown in FIG. 2 and FIG. 3 exist in the insulation laminated body of a different plane is mentioned.
- the thickness of the insulating layers 15 and 16 from the surface of the discharge electrodes 12 and 13 is 0.01 ⁇ m or more and 10 ⁇ m or less from the viewpoint of realizing the antistatic device 100 having excellent durability and discharge characteristics during repeated use with good reproducibility. Is preferable
- the formation method of the insulating layers 15 and 16 is not particularly limited, and a known thin film formation method can be applied. From the viewpoint of easily obtaining the high-performance discharge inducing portion 14 with good reproducibility, a method of firing after applying the above-described mixture containing the insulating inorganic material to be the insulating layer to the surface of the discharge electrode is preferable. Hereinafter, a preferable method for forming the insulating layers 15 and 16 will be described.
- a mixture containing at least the insulating inorganic material is prepared, and the mixture is formed by coating, printing, or the like between the discharge electrodes 12, 13 and the gap so that the surface of the discharge electrodes 12, 13 is covered. Thereafter, the insulating layer forming mixture formed in the gap portion is removed by laser irradiation so that the insulating layer has a desired thickness. Thereby, while obtaining the insulating layer which covers an electrode part, the space for forming a discharge induction part is obtained. 2 is obtained by first forming the discharge electrode 12 and the insulating layer 15 and then forming the discharge inducing portion 14 and then forming the discharge electrode 13 and the insulating layer 16.
- the discharge inducing portion 14 is made of a composite in which an insulating inorganic material and a conductive inorganic material are dispersed. Further, the discharge inducing portion 14 may be formed of a cavity or a void, or a composite in which the cavity or void, the insulating inorganic material and the conductive inorganic material are dispersed may coexist.
- the content of the conductive inorganic material is preferably 20 vol% or more and 90 vol% or less.
- the discharge electrode is covered with a highly dense insulating layer, thereby suppressing the connection between the discharge electrode and the conductive inorganic material of the discharge inducing portion in the firing process at the time of element creation. .
- the content of the conductive inorganic material in the discharge inducing portion can be increased, and the discharge characteristics can be improved.
- the conductive inorganic material constituting the discharge inducing portion include, for example, metals, alloys, metal carbides, metal borides and the like, but are not particularly limited thereto.
- C, Ni, Al, Fe, Cu, Ti, Cr, Au, Ag, Pd and Pt, or alloys thereof are preferable.
- the insulating inorganic material constituting the discharge inducing portion include, but are not limited to, metal oxides and metal nitrides such as AlN.
- metal oxides and metal nitrides such as AlN.
- Al 2 O 3 , SrO, CaO, BaO, TiO 2 , SiO 2 , ZnO, In 2 O 3 , NiO, CoO, SnO 2 , Bi 2 O 3 , Mg 2 SiO 4 , V 2 O 5 , CuO, MgO, ZrO 2 , Mg 2 SiO 4 , AlN, BN and SiC are preferable. These may be used alone or in combination of two or more.
- the insulating inorganic material may be formed as a uniform film or may be formed as an aggregate of particles, and its properties are not particularly limited. Among these, it is more preferable to use Al 2 O 3 , SiO 2 , Mg 2 SiO 4 or the like from the viewpoint of imparting a high degree of insulation.
- the thickness of the discharge inducing portion 14 is not particularly limited, and can be set as appropriate. Specifically, the thickness is preferably 10 nm to 60 ⁇ m, and more preferably 100 nm to 50 ⁇ m.
- the formation method of the discharge induction part 14 is not specifically limited, A well-known thin film formation method is applicable. From the viewpoint of easily obtaining a high-performance discharge inducing portion 14 with good reproducibility, a method of firing after applying the above-described mixture containing at least the insulating inorganic material and the conductive inorganic material is preferable. Hereinafter, a preferable method for forming the discharge inducing portion 14 will be described.
- a mixture containing at least an insulating inorganic material and a conductive inorganic material is prepared, this mixture is formed between the gaps between the discharge electrodes 12 and 13 by coating or printing, and then baked.
- blend various additives such as a solvent and a binder, in the case of preparation of a mixture, or the application or printing of a mixture.
- the treatment conditions at the time of firing are not particularly limited, but considering productivity and economy, it is preferably about 10 minutes to 5 hours at 500 to 1200 ° C. in an air atmosphere.
- the electrostatic protection element 100 of this embodiment includes a pair of discharge electrodes 12 and 13 and a discharge inducing portion 14, and has insulating layers 15 and 16 that cover the surface of the discharge electrode. Therefore, it is possible to prevent the connection between the discharge electrode and the conductive inductive material of the discharge inducing part due to the destruction of the discharge electrode and the discharge inducing part at the time of discharge, and to prevent the occurrence of a short circuit. Can be obtained.
- the present invention can be variously modified without departing from the gist thereof, and is not limited to the above-described first embodiment.
- FIGS. 1 to 6 are schematic diagrams of examples and comparative examples.
- Example 1 First, as the insulating laminate 11, a green sheet in which a material composed mainly of Al 2 O 3 and a glass component is formed as a sheet is prepared, and Ag paste is screen-printed on one surface thereof to a thickness of about 30 ⁇ m.
- the pair of discharge electrodes 12 and 13 was patterned.
- the discharge electrodes 12 and 13 had a length of 0.6 mm, a width of 0.4 mm, and a gap distance ⁇ G between the electrodes 12 and 13 of 30 ⁇ m.
- the insulating layers 15 and 16 were formed on the insulating laminate 11 and the discharge electrodes 12 and 13 by the following procedure.
- an alumina silicate glass mainly composed of Al 2 O 3 , SiO 2 , and SrO was used as the insulating inorganic material.
- An ethyl cellulose resin as a binder and terpineol as a solvent were kneaded to prepare a lacquer having a solid content concentration of 8 wt%.
- the insulating inorganic material paste was prepared by kneading.
- the obtained paste-like mixture was applied by screen printing so as to cover the insulating surface of the insulating laminate 11 and the surfaces of the discharge electrodes 12 and 13.
- the insulating layer was formed by cutting the center part of the electrode gap with a YAG laser so that the thickness of the insulating layer was 2 ⁇ m from the surface of the discharge electrode.
- the discharge inducing portion 14 was formed on the insulating laminate 11 and the discharge electrodes 12 and 13 by the following procedure.
- 70 vol% of glass particles manufactured by Yamamura Glass Co., Ltd., product number: ME13
- SiO 2 as an insulating inorganic material
- Ag particles having an average particle diameter of 1 ⁇ m as a conductive inorganic material Mitsubishi Metal Mining Co., Ltd. Company product, product number: SPQ05S
- the discharge induction part paste was prepared by mix
- the obtained paste-like mixture was applied by screen printing so as to fill a gap between the pair of discharge electrodes 12 and 13 to form a mixture layer (a precursor of the discharge inducing portion 14). Further, a green sheet was laminated on the mixture layer, and then a hot press was performed to produce a laminate. Thereafter, the obtained laminate was cut into a predetermined size and separated into pieces.
- the individualized laminate is subjected to heat treatment (debinding treatment) at 200 ° C. for 1 hour, and then heated at 10 ° C. per minute and held at 950 ° C. for 30 minutes in the atmosphere. Obtained.
- the gap distance ⁇ G between the pair of discharge electrodes 12 and 13 after firing is 15 ⁇ m, the thickness is 20 ⁇ m, and the thickness of the insulating layers 15 and 16 is 1 ⁇ m from the surface of the discharge electrode.
- the antistatic element 100 of Example 1 was obtained by forming the terminal electrode which has Ag as a main component so that it might connect to the outer peripheral edge part of the discharge electrodes 12 and 13.
- FIG. 1 the terminal electrode which has Ag as a main component so that it might connect to the outer peripheral edge part of the discharge electrodes 12 and 13.
- Example 2 For the insulating laminate 11, the same substrate as in Example 1 was used.
- the Ag electrode paste used for forming the discharge electrodes 12 and 13, the insulating inorganic material paste used for forming the insulating layers 15 and 16, and the discharge inducing portion paste used for forming the discharge inducing portion 14 are the same pastes as in Example 1.
- the discharge electrode 12, the insulating layer 15, the discharge inducing portion 14, the insulating layer 16, and the discharge electrode 13 were formed in this order on the insulating laminate 11 by screen printing.
- the discharge electrodes 12 and 13 had a thickness of 30 ⁇ m, a length of 0.6 mm, and a width of 0.4 mm.
- the insulating layers 15 and 16 were formed on the surfaces of the discharge electrodes 12 and 13, and the thickness from the surface of the discharge electrodes was 2 ⁇ m and the width was 0.4 mm. And after laminating
- heat treatment debinding treatment
- the thickness of the pair of discharge electrodes 12 and 13 after firing is 20 ⁇ m, the gap distance ⁇ G is 15 ⁇ m, and the thickness of the insulating layers 15 and 16 is 1 ⁇ m from the surface of the discharge electrode.
- a terminal electrode was formed on the obtained fired body to obtain an antistatic element 200 of Example 2.
- Example 3 For the insulating laminate 11, the same substrate as in Example 1 was used.
- the Ag electrode paste used for forming the discharge electrodes 12 and 13, the insulating inorganic material paste used for forming the insulating layers 15 and 16, and the discharge inducing portion paste used for forming the discharge inducing portion 14 are the same pastes as in Example 1.
- the discharge electrode 12, the insulating layer 15, the discharge inducing portion 14, the insulating layer 16, and the discharge electrode 13 were formed in this order on the insulating laminate 11 by screen printing.
- the discharge electrodes 12 and 13 had a thickness of 30 ⁇ m, a length of 0.65 mm, and a width of 0.4 mm.
- the thickness of the insulating layers 15 and 16 was 2 ⁇ m from the surface of the discharge electrode, and the width was 0.4 mm.
- the laminated body was produced by performing hot press. Thereafter, the obtained laminate was cut into a predetermined size and separated into pieces. Thereafter, the individualized laminate is subjected to heat treatment (debinding treatment) at 200 ° C. for 1 hour, and then heated at 10 ° C. per minute and held at 950 ° C. for 30 minutes in the atmosphere. Obtained.
- the gap distance ⁇ G between the pair of electrodes 12 and 13 after firing is 15 ⁇ m, the thickness is 20 ⁇ m, and the thickness of the insulating layers 15 and 16 is 1 ⁇ m from the surface of the discharge electrode.
- a terminal electrode was formed on the obtained fired body to obtain an antistatic device 300 of Example 3.
- Example 4 In order to prevent direct contact between the discharge electrode and the discharge inducing portion, an insulating layer is first formed on both discharge electrode surfaces, and then the insulating layer paste used in Example 1 is applied to the upper portion of the discharge electrode by screen printing. Added. Except this, it operated similarly to Example 1, and obtained the antistatic element 400 as shown in FIG.
- Example 5 Except that the discharge electrode is inclined by laser processing, the same operation as in Example 1 was performed to obtain an antistatic element 500 as shown in FIG.
- Example 6 Instead of the alumina silicate glass whose main component is Al 2 O 3 , SiO 2 , and SrO, the insulating inorganic material used for the insulating layers 15 and 16 is a boron whose main component is B 2 O 3 , SiO 2 , and SrO. Except using silicate glass, it operated similarly to Example 1 and obtained the antistatic element 100 shown in FIG.
- Example 7 Instead of the alumina silicate glass whose main component is Al 2 O 3 , SiO 2 , and SrO, the insulating inorganic material used for the insulating layers 15 and 16 is a boron whose main component is B 2 O 3 , SiO 2 , and BaO. Except using silicate glass, it operated similarly to Example 1 and obtained the antistatic element 100 shown in FIG.
- Example 8 Instead of the alumina silicate glass whose main component is Al 2 O 3 , SiO 2 , SrO, the insulating inorganic material used for the insulating layers 15, 16 is a boron whose main component is B 2 O 3 , SiO 2 , ZnO. Except using silicate glass, it operated similarly to Example 1 and obtained the antistatic element 100 shown in FIG.
- Example 9 The insulating inorganic material used for the insulating layers 15 and 16 is replaced with alumina silicate glass mainly composed of Al 2 O 3 , SiO 2 , and SrO, and alumina mainly composed of Al 2 O 3 , SiO 2 , and BaO. Except using silicate glass, it operated similarly to Example 1 and obtained the antistatic element 100 shown in FIG.
- Example 10 The insulating inorganic material used for the insulating layers 15 and 16 is replaced with alumina silicate glass containing Al 2 O 3 , SiO 2 and SrO as main components, and alumina containing Al 2 O 3 , SiO 2 and ZnO as main components. Except using silicate glass, it operated similarly to Example 1 and obtained the antistatic element 100 shown in FIG.
- Example 11 The insulating inorganic material used for the insulating layers 15 and 16 is replaced with alumina silicate glass mainly composed of Al 2 O 3 , SiO 2 and SrO, and alumina mainly composed of Al 2 O 3 , SiO 2 and MgO. Except using silicate glass, it operated similarly to Example 1 and obtained the antistatic element 100 shown in FIG.
- Example 12 instead of the alumina silicate glass whose main component is Al 2 O 3 , SiO 2 , and SrO, the insulating inorganic material used for the insulating layers 15 and 16 is mainly composed of B 2 O 3 , SiO 2 , and Li 2 O. 1 was obtained in the same manner as in Example 1 except that borosilicate glass was used.
- Example 13 The insulating inorganic material used for the insulating layers 15 and 16 is replaced with alumina silicate glass mainly composed of Al 2 O 3 , SiO 2 , and SrO, and mainly composed of B 2 O 3 , SiO 2 , and K 2 O. 1 was obtained in the same manner as in Example 1 except that borosilicate glass was used.
- Example 14 The insulating inorganic material used for the insulating layers 15 and 16 is replaced with alumina silicate glass containing Al 2 O 3 , SiO 2 , and SrO as main components, and B 2 O 3 , SiO 2 , and Na 2 O as main components. 1 was obtained in the same manner as in Example 1 except that borosilicate glass was used.
- Example 15 Instead of the alumina silicate glass whose main component is Al 2 O 3 , SiO 2 , and SrO, the insulating inorganic material used for the insulating layers 15 and 16 is a boron whose main component is B 2 O 3 , SiO 2 , and CaO. Except using silicate glass, it operated similarly to Example 1 and obtained the antistatic element 100 shown in FIG.
- Insulating inorganic materials used for the insulating layers 15 and 16 are replaced with alumina silicate glass mainly containing Al 2 O 3 , SiO 2 , and SrO, soda lime mainly containing CaO, SiO 2 , and Na 2 O. Except using glass, it operated similarly to Example 1 and obtained the antistatic element 100 shown in FIG.
- Example 17 The insulating inorganic material used for the insulating layers 15 and 16 is replaced with alumina silicate glass containing Al 2 O 3 , SiO 2 and SrO as main components, and soda lime containing CaO, SiO 2 and K 2 O as main components. Except using glass, it operated similarly to Example 1 and obtained the antistatic element 100 shown in FIG.
- Example 1 Except for omitting the formation of the insulating layer, the same operation as in Example 1 was performed to obtain an antistatic element 600 as shown in FIG.
- Example 2 The insulating inorganic material used for the insulating layers 15 and 16 is the same as that of Example 1 except that Al 2 O 3 is used instead of alumina silicate glass containing Al 2 O 3 , SiO 2 , and SrO as main components. 1 to obtain the ESD protection device 100 shown in FIG.
- Example 3 With respect to the insulating inorganic material used for the insulating layers 15 and 16, the same operation as in Example 1 was performed except that MgO was used instead of the alumina silicate glass mainly composed of Al 2 O 3 , SiO 2 , and SrO. Thus, an antistatic element 100 shown in FIG. 1 was obtained.
- This electrostatic discharge test was conducted in accordance with a human body model (discharge resistance 330 ⁇ , discharge capacity 150 pF, applied voltage 8 kV, contact discharge) based on the electrostatic discharge immunity test and noise test of international standard IEC61000-4-2. Specifically, as shown in the electrostatic test circuit of FIG. 7, one terminal electrode of the electrostatic countermeasure element to be evaluated is grounded, and an electrostatic pulse applying unit is connected to the other terminal electrode, An electrostatic pulse was applied by bringing a discharge gun into contact with the application section. In the electrostatic discharge test, 100 samples were prepared, and the electrostatic discharge test was repeated 100 times at 8.0 kV each. The discharge characteristics were evaluated by the Peak voltage at the first discharge test. Furthermore, in terms of discharge durability, after the test was repeated 100 times, the number of short-circuits between the discharge electrodes was counted and evaluated based on the magnitude of the number.
- Example 18 The material used for the discharge inducing portion 14, the insulating glass particles and SiO 2 as a main component of the inorganic material (Nippon Yamamura Glass Co., product number: ME13) and 80 vol% of an average particle size 1 ⁇ m conductive inorganic material
- the antistatic element 100 shown in FIG. 1 was obtained in the same manner as in Example 1 except that the Ag particles (manufactured by Mitsui Metal Mining Co., Ltd., product number: SPQ05S) were changed to 20 vol%.
- the material used for the discharge inducing portion 14 is 50 vol% of glass particles (manufactured by Yamamura Glass Co., Ltd., product number: ME13) mainly composed of insulating inorganic material SiO 2 , and the average particle size of the conductive inorganic material is 1 ⁇ m.
- the antistatic element 100 shown in FIG. 1 was obtained by operating in the same manner as in Example 1 except that the Ag particles (product number: SPQ05S, manufactured by Mitsui Mining & Smelting Co., Ltd.) were changed to 50 vol%.
- the material used for the discharge inducing part 14 is 30 vol% of glass particles (manufactured by Nippon Yamamura Glass Co., Ltd., product number: ME13) mainly composed of insulating inorganic material SiO 2 , and the average particle size of the conductive inorganic material is 1 ⁇ m.
- the antistatic element 100 shown in FIG. 1 was obtained in the same manner as in Example 1 except that the Ag particles (manufactured by Mitsui Mining & Smelting Co., Ltd., product number: SPQ05S) were changed to 70 vol%.
- the material used for the discharge inducing portion 14 is 10 vol% of glass particles (manufactured by Yamamura Glass Co., Ltd., product number: ME13) mainly composed of insulating inorganic material SiO 2 , and the average particle size of the conductive inorganic material is 1 ⁇ m.
- the antistatic element 100 shown in FIG. 1 was obtained in the same manner as in Example 1 except that the Ag particles (product number: SPQ05S, manufactured by Mitsui Mining & Smelting Co., Ltd.) were changed to 90 vol%.
- the material used for the discharge inducing portion 14 is 90 vol% of glass particles (manufactured by Yamamura Glass Co., Ltd., product number: ME13) mainly composed of insulating inorganic material SiO 2 , and the average particle size of the conductive inorganic material is 1 ⁇ m.
- the antistatic element 100 shown in FIG. 1 was obtained in the same manner as in Example 1 except that the Ag particles (Mitsui Metal Mining Co., Ltd., product number: SPQ05S) were changed to 10 vol%.
- the material used for the discharge inducing part 14 is 5 vol% of glass particles (Nihon Yamamura Glass Co., Ltd., product number: ME13) mainly composed of insulating inorganic material SiO 2 , and the average particle size of the conductive inorganic material is 1 ⁇ m.
- the antistatic element 100 shown in FIG. 1 was obtained in the same manner as in Example 1 except that the Ag particles (product number: SPQ05S, manufactured by Mitsui Mining & Smelting Co., Ltd.) were changed to 95 vol%.
- the antistatic elements of Examples 1 and 18 to 23 increase the proportion of the conductive inorganic material of the discharge inducing portion 14 by providing the discharge electrodes 12 and 13 with the insulating layers 15 and 16 containing glass. It was confirmed that it was excellent in durability for repeated use, and also had a low peak voltage and excellent discharge characteristics.
- the anti-static element of Example 22 was good in terms of durability for repeated use, but the peak voltage was large compared to Examples 1 and 18 to 21 and the discharge characteristics were inferior. It was confirmed that. Since the antistatic element of Example 23 has a high peak of conductive inorganic material, the Peak voltage is good, but there are many occurrences of short circuit between electrodes after firing, and no short circuit after firing occurs. It confirmed that it was inferior to durability of repeated use.
- the anti-static element of the present invention has the characteristics that the discharge characteristics and the durability of repeated use are enhanced, and further, the discharge characteristics are enhanced. It can be widely and effectively used for devices and various devices, facilities, systems and the like equipped with them.
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Abstract
Description
静電気対策素子100は、絶縁性積層体11と、この絶縁性積層体11の同一平面内でギャップ距離ΔG(図示せず)を置いて配置された一対の矩形状の放電電極12、13と、これら放電電極12、13の間に位置するギャップ内に配設された放電誘発部14と、放電電極12、13と放電誘発部14の間にあって電極の表面を覆う絶縁層15、16と、放電電極12、13と電気的に接続された端子電極(図示せず)とを備える。この静電気対策素子100は、積層工法により作成されており、一対の放電電極12、13が絶縁性積層体11中に埋設された態様となっている。そして、この静電気対策素子100においては、放電電極12、13が端子電極を介して外部回路と電気的に接続され、放電誘発部14が比較的に低い電圧でも放電可能な静電気保護材料として機能することにより、静電気などの過電圧が外部から印加された際に放電誘発部14を介して放電電極12、13間で初期放電が確保されるように構成されている。
まず、絶縁層の有無、絶縁層に含まれる絶縁性無機材料の種類の違いによる放電に対する繰り返し耐久性への影響を確認した。
まず、絶縁性積層体11として、主成分がAl2O3とガラス成分より構成される材料をシート化したグリーンシートを用意し、その一方の表面に、Agペーストをスクリーン印刷により、厚み30μm程度となるように印刷し、一対の放電電極12、13をパターン形成した。放電電極12、13の長さは0.6mm、幅は0.4mm、電極12、13間のギャップ距離ΔGは、30μmとした。
次いで、得られたペースト状混合物を、一対の放電電極12、13のギャップ間を埋めるように、スクリーン印刷により塗布し、混合物層(放電誘発部14の前駆体)を形成した。さらに混合物層上にグリーンシートを積層した後、熱プレスを行うことにより、積層体を作製した。その後、得られた積層体を所定の大きさに切断し、個片化を行った。しかる後、個片化された積層体に200℃で1時間の熱処理(脱バインダー処理)を施し、その後、毎分10℃で昇温し、大気中950℃で30分間保持し、焼成体を得た。なお、焼成後の一対の放電電極12、13間のギャップ距離ΔGは15μm、厚みは20μm、絶縁層15、16の厚みは放電電極表面から1μmとなる。
絶縁性積層体11は実施例1と同様の基板を用いた。放電電極12、13の形成に用いるAg電極ペースト、絶縁層15、16の形成に用いる絶縁性無機材料ペースト、放電誘発部14の形成に用いる放電誘発部ペーストはそれぞれ実施例1と同様のペーストを用いた。図2に示すように、絶縁性積層体11上にスクリーン印刷により放電電極12、絶縁層15、放電誘発部14、絶縁層16、放電電極13の順に形成した。放電電極12、13の厚みは30μm、長さは0.6mm、幅は0.4mmとした。また絶縁層15、16は放電電極12、13の表面に形成し、放電電極表面からの厚みは2μm、幅は0.4mmとした。そしてさらにその上にグリーンシートを積層した後、熱プレスを行うことにより、積層体を作製した。その後、得られた積層体を所定の大きさに切断し、個片化を行った。しかる後、個片化された積層体に200℃で1時間の熱処理(脱バインダー処理)を施し、その後、毎分10℃で昇温し、大気中950℃で30分間保持し、焼成体を得た。なお、焼成後の一対の放電電極12、13の厚みは20μm、ギャップ距離ΔGは15μm、絶縁層15、16の厚みは放電電極表面から1μmとなる。得られた焼成体に実施例1同様、端子電極を形成することで実施例2の静電気対策素子200を得た。
絶縁性積層体11は実施例1と同様の基板を用いた。放電電極12、13の形成に用いるAg電極ペースト、絶縁層15、16の形成に用いる絶縁性無機材料ペースト、放電誘発部14の形成に用いる放電誘発部ペーストはそれぞれは実施例1と同様のペーストを用いた。図3に示すように、絶縁性積層体11上にスクリーン印刷により放電電極12、絶縁層15、放電誘発部14、絶縁層16、放電電極13の順に重ねて形成した。放電電極12、13の厚みは30μm、長さは0.65mm、幅は0.4mmとした。絶縁層15、16の厚みは放電電極の表面から2μm、幅は0.4mmとした。そしてさらにその上にグリーンシートを積層した後、熱プレスを行うことにより、積層体を作製した。その後、得られた積層体を所定の大きさに切断し、個片化を行った。しかる後、個片化された積層体に200℃で1時間の熱処理(脱バインダー処理)を施し、その後、毎分10℃で昇温し、大気中950℃で30分間保持し、焼成体を得た。なお、焼成後の一対の電極12、13間のギャップ距離ΔGは15μm、厚みは20μm、絶縁層15、16の厚みは放電電極の表面から1μmとなる。得られた焼成体に実施例1同様、端子電極を形成することで実施例3の静電気対策素子300を得た。
放電電極と放電誘発部が直接接しないようにするために、先ず双方の放電電極表面に絶縁層を形成した後に、放電電極上部にスクリーン印刷により実施例1で用いた絶縁層ペーストを塗布する工程を追加した。これ以外は実施例1と同様に操作して、図4に示すように、静電気対策素子400を得た。
放電電極のレーザー加工により傾斜をつけること以外は、実施例1と同様に操作して、図5に示すように、静電気対策素子500を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、B2O3、SiO2、SrOを主成分とするホウ珪酸塩ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、B2O3、SiO2、BaOを主成分とするホウ珪酸塩ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、B2O3、SiO2、ZnOを主成分とするホウ珪酸塩ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、Al2O3、SiO2、BaOを主成分とするアルミナ珪酸塩ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、Al2O3、SiO2、ZnOを主成分とするアルミナ珪酸塩ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、Al2O3、SiO2、MgOを主成分とするアルミナ珪酸塩ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、B2O3、SiO2、Li2Oを主成分とするホウ珪酸塩ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、B2O3、SiO2、K2Oを主成分とするホウ珪酸塩ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、B2O3、SiO2、Na2Oを主成分とするホウ珪酸塩ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、B2O3、SiO2、CaOを主成分とするホウ珪酸塩ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、CaO、SiO2、Na2Oを主成分とするソーダ石灰ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料を、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、CaO、SiO2、K2Oを主成分とするソーダ石灰ガラスを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層の形成を省略すること以外は、実施例1と同様に操作して、図6に示すように静電気対策素子600を得た。
絶縁層15、16に用いる絶縁性無機材料に関して、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、Al2O3を用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
絶縁層15、16に用いる絶縁性無機材料に関して、Al2O3、SiO2、SrOを主成分とするアルミナ珪酸塩ガラスに代えて、MgOを用いること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
次に、上記のようにして得られた実施例1~17及び比較例1~3の静電気対策素子について、図7に示す静電気試験回路を用いて、静電気放電試験を実施した。表1に、試験結果を示す。
放電誘発部14に用いる材料を、絶縁性無機材料のSiO2を主成分とするガラス粒子(日本山村硝子株式会社製、商品番号:ME13)を80vol%と、導電性無機材料の平均粒径1μmのAg粒子(三井金属鉱業株式会社製、商品番号:SPQ05S)を20vol%に変えること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
放電誘発部14に用いる材料を、絶縁性無機材料のSiO2を主成分とするガラス粒子(日本山村硝子株式会社製、商品番号:ME13)を50vol%と、導電性無機材料の平均粒径1μmのAg粒子(三井金属鉱業株式会社製、商品番号:SPQ05S)を50vol%に変えること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
放電誘発部14に用いる材料を、絶縁性無機材料のSiO2を主成分とするガラス粒子(日本山村硝子株式会社製、商品番号:ME13)を30vol%と、導電性無機材料の平均粒径1μmのAg粒子(三井金属鉱業株式会社製、商品番号:SPQ05S)を70vol%に変えること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
放電誘発部14に用いる材料を、絶縁性無機材料のSiO2を主成分とするガラス粒子(日本山村硝子株式会社製、商品番号:ME13)を10vol%と、導電性無機材料の平均粒径1μmのAg粒子(三井金属鉱業株式会社製、商品番号:SPQ05S)を90vol%に変えること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
放電誘発部14に用いる材料を、絶縁性無機材料のSiO2を主成分とするガラス粒子(日本山村硝子株式会社製、商品番号:ME13)を90vol%と、導電性無機材料の平均粒径1μmのAg粒子(三井金属鉱業株式会社製、商品番号:SPQ05S)を10vol%に変えること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
放電誘発部14に用いる材料を、絶縁性無機材料のSiO2を主成分とするガラス粒子(日本山村硝子株式会社製、商品番号:ME13)を5vol%と、導電性無機材料の平均粒径1μmのAg粒子(三井金属鉱業株式会社製、商品番号:SPQ05S)を95vol%に変えること以外は、実施例1と同様に操作して、図1に示す静電気対策素子100を得た。
12、13 放電電極
14 放電誘発部
15、16 絶縁層
100、200、300、400、500、600 静電気対策素子
Claims (6)
- 絶縁積層体内に、一対の放電電極と、放電誘発部とを有し、前記放電電極の少なくとも一部にガラス質を含む絶縁層を配していることを特徴とする静電気対策素子。
- 前記放電誘発部を前記一対の放電電極間及び該放電電極端部周辺に設けたことを特徴とする、請求項1記載の静電気対策素子。
- 前記ガラス質を含む絶縁層は、前記一対の放電電極双方の表面に有することを特徴とする、請求項1乃至請求項2記載の静電気対策素子。
- 前記ガラス質を含む絶縁層は、前記一対の放電電極と前記放電誘発部に接する部位の少なくとも一部に有することを特徴とする、請求項1乃至請求項3記載の静電気対策素子。
- 前記ガラス質はその成分として、SiO2、Al2O3、B2O3、MgO、CaO、SrO、BaO、Li2O、Na2O、K2O、ZnO及びZrO2よりなる群から選択される少なくとも1種を含む、請求項1乃至請求項4記載の静電気対策素子。
- 前記ガラス質は、シリケートガラス、アルミナ珪酸塩ガラス、ホウ酸塩ガラス、ホウ珪酸塩ガラス、ソーダ石灰ガラス、リン酸塩ガラス、鉛酸塩ガラス及び他の無機酸塩ガラスの選択される少なくとも1種を含む、請求項1乃至請求項4記載の静電気対策素子。
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PCT/JP2012/073408 WO2013054629A1 (ja) | 2011-10-14 | 2012-09-13 | 静電気対策素子 |
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US (1) | US9497837B2 (ja) |
EP (1) | EP2768093B1 (ja) |
JP (1) | JP2013101911A (ja) |
KR (1) | KR20140059860A (ja) |
CN (1) | CN103875142B (ja) |
WO (1) | WO2013054629A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016042436A (ja) * | 2014-08-19 | 2016-03-31 | Tdk株式会社 | 静電気対策素子 |
CN105514104A (zh) * | 2014-10-08 | 2016-04-20 | Tdk株式会社 | 静电放电保护元件 |
WO2016203976A1 (ja) * | 2015-06-15 | 2016-12-22 | 株式会社村田製作所 | Esd保護装置 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6075481B2 (ja) * | 2015-02-10 | 2017-02-08 | Tdk株式会社 | ガラスセラミックス組成物およびコイル電子部品 |
JP6468054B2 (ja) * | 2015-04-28 | 2019-02-13 | 富士通株式会社 | プリント基板及びシールド板金固定方法 |
KR101808794B1 (ko) * | 2015-05-07 | 2018-01-18 | 주식회사 모다이노칩 | 적층체 소자 |
KR20180001033A (ko) * | 2016-06-24 | 2018-01-04 | 삼성전기주식회사 | 복합 전자 부품 및 그의 제조 방법 |
KR101808021B1 (ko) * | 2017-06-22 | 2018-01-18 | 주식회사 아모텍 | 감전보호소자 및 이를 구비한 휴대용 전자장치 |
KR101969020B1 (ko) * | 2017-12-05 | 2019-04-15 | 주식회사 아모텍 | 감전보호소자 및 이를 구비한 휴대용 전자장치 |
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WO2011096335A1 (ja) | 2010-02-04 | 2011-08-11 | 株式会社 村田製作所 | Esd保護装置の製造方法及びesd保護装置 |
JP5515929B2 (ja) | 2010-03-25 | 2014-06-11 | Tdk株式会社 | 静電気対策素子 |
JP5649391B2 (ja) * | 2010-09-29 | 2015-01-07 | 株式会社村田製作所 | Esd保護デバイス |
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- 2012-09-06 JP JP2012196259A patent/JP2013101911A/ja active Pending
- 2012-09-13 EP EP12840734.3A patent/EP2768093B1/en not_active Not-in-force
- 2012-09-13 US US14/351,682 patent/US9497837B2/en active Active
- 2012-09-13 KR KR1020147009619A patent/KR20140059860A/ko not_active Application Discontinuation
- 2012-09-13 WO PCT/JP2012/073408 patent/WO2013054629A1/ja active Application Filing
- 2012-09-13 CN CN201280050447.9A patent/CN103875142B/zh not_active Expired - Fee Related
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JPH0536460A (ja) * | 1991-07-31 | 1993-02-12 | Okaya Electric Ind Co Ltd | 放電型サージ吸収素子 |
JP2002015831A (ja) * | 2000-06-30 | 2002-01-18 | Mitsubishi Materials Corp | チップ型サージアブソーバ及びその製造方法 |
JP2006049064A (ja) * | 2004-08-04 | 2006-02-16 | Mitsubishi Materials Corp | サージアブソーバ |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016042436A (ja) * | 2014-08-19 | 2016-03-31 | Tdk株式会社 | 静電気対策素子 |
CN105514104A (zh) * | 2014-10-08 | 2016-04-20 | Tdk株式会社 | 静电放电保护元件 |
US10271413B2 (en) | 2014-10-08 | 2019-04-23 | Tdk Corporation | ESD protection device |
WO2016203976A1 (ja) * | 2015-06-15 | 2016-12-22 | 株式会社村田製作所 | Esd保護装置 |
JPWO2016203976A1 (ja) * | 2015-06-15 | 2017-12-21 | 株式会社村田製作所 | Esd保護装置 |
Also Published As
Publication number | Publication date |
---|---|
US20140313633A1 (en) | 2014-10-23 |
CN103875142B (zh) | 2016-05-04 |
US9497837B2 (en) | 2016-11-15 |
JP2013101911A (ja) | 2013-05-23 |
EP2768093B1 (en) | 2017-03-01 |
EP2768093A4 (en) | 2015-07-15 |
KR20140059860A (ko) | 2014-05-16 |
CN103875142A (zh) | 2014-06-18 |
EP2768093A1 (en) | 2014-08-20 |
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