WO2013005527A1 - 光走査装置、画像表示装置および光走査方法 - Google Patents
光走査装置、画像表示装置および光走査方法 Download PDFInfo
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- WO2013005527A1 WO2013005527A1 PCT/JP2012/064800 JP2012064800W WO2013005527A1 WO 2013005527 A1 WO2013005527 A1 WO 2013005527A1 JP 2012064800 W JP2012064800 W JP 2012064800W WO 2013005527 A1 WO2013005527 A1 WO 2013005527A1
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- optical scanning
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Definitions
- the present invention relates to an optical scanning device, an image display device, and an optical scanning method.
- Optical scanning devices that scan light with mirrors are widely used in digital copying machines, laser printers, bar code readers, scanners, projectors, and the like.
- the mainstream of optical scanning devices is to rotate a polygon mirror or galvanometer mirror by a motor, but in recent years, along with the development of microfabrication technology, those using MEMS (Micro Electro Mechanical Systems). Attention has been paid.
- both ends of a movable portion provided with a mirror and a magnet are supported by a coupling portion formed of an elastic material, and a magnetic field is applied to the magnet to thereby move the movable portion around the coupling portion.
- a mechanical drive mechanism such as a motor is not required, so the structure is simple, and miniaturization and cost reduction are achieved.
- the movable part is provided with a mirror and a magnet, the moment of inertia of the movable part is large. For this reason, in order to vibrate a movable part, big driving force is needed and there exists a problem that the drive efficiency which drives a movable part is low.
- An object of the present invention is to provide an optical scanning device, an image display device, and an optical scanning method capable of solving the above-mentioned problem that drive efficiency is low.
- An optical scanning device includes a support portion, a movable portion having a reflecting surface that reflects light, a pair of connecting portions that connect both ends of the movable portion to the support portion, and vibrates the movable portion.
- Each of the connecting portions is a permanent magnet, a first elastic body portion that connects the permanent magnet to the support portion so as to vibrate, and the movable portion to the permanent magnet.
- a second elastic body portion that is coupled so as to vibrate, and the drive portion generates a magnetic field that acts on the permanent magnet to vibrate the permanent magnet, thereby moving the movable portion. Vibrate.
- An image display device includes the optical scanning device.
- An optical scanning method is an optical scanning method by an optical scanning element having a movable part having a reflecting surface for reflecting light, a permanent magnet, and an elastic body part connecting the permanent magnet and the movable part. Generating a magnetic field that acts on the permanent magnet, vibrating the permanent magnet, and transmitting the vibration of the permanent magnet to the movable portion via the elastic body portion, thereby vibrating the movable portion and moving the movable magnet The light is incident on the reflection surface of the part.
- FIG. 1 is a top view of an optical scanning device according to a first embodiment of the present invention. It is a perspective view which shows a part of optical scanning device of the 1st Embodiment of this invention. It is sectional drawing of the optical scanning device of the 1st Embodiment of this invention. It is a figure which shows an example of the state which the movable mirror part is moving. It is a figure which shows the other example of the state which the movable mirror part is moving. It is a figure which shows the relationship between the drive frequency which is the frequency of the alternating current applied to a coil, and the inclination angle of a movable mirror part. It is a figure which shows an example of the image display apparatus using an optical scanning device.
- FIG. 1 is a top view of the optical scanning device according to the first embodiment of the present invention
- FIG. 2 is a perspective view showing a part of the optical scanning device shown in FIG.
- the optical scanning device 1 of the present embodiment includes a movable mirror unit 11, a pair of connecting units 12, a pair of support units 13, and a pair of drive units 14.
- the movable mirror unit 11 includes a reflective surface that reflects light, and is a movable unit that scans light using the reflective surface. More specifically, as shown in FIG. 2, the movable mirror unit 11 includes a mirror 102 having a reflecting surface 101 that reflects light, and a mirror frame unit 103 into which the mirror 102 is fitted.
- the mirror 102 is fitted into the mirror frame 103 so that the reflection surface 101 is exposed, and is fixed to the magnet frame 202B with an adhesive or the like.
- the reflecting surface 101 and the mirror 102 are formed in an elliptical shape.
- the mirror length which is the length of the major axis of the reflecting surface 101 is 6 mm
- the mirror width which is the length of the minor axis of the reflecting surface 101 is 3 mm
- the thickness is 0.3 mm. It is.
- the pair of connecting portions 12 connects both ends of the movable mirror portion 11 to the support portion 13 respectively. More specifically, the pair of connecting portions 12 are connected to both ends of the movable mirror portion 11 so as to face each other, and further extend until they are connected to the support portion 13 in the minor axis direction of the mirror 102. Yes.
- the support portion 13 may be connected in either the short axis direction or the long axis direction of the mirror 102, but the drive rate can be improved more by connecting in the short axis direction.
- Each connecting portion 12 has a magnet portion 21, a first spring portion 22, and a second spring portion.
- the magnet unit 21 includes a permanent magnet. More specifically, the magnet part 21 has the permanent magnet 201 and the magnet frame part 202 by which the permanent magnet 201 is fitted, as shown in FIG.
- the permanent magnet 201 is fitted into the magnet frame portion 202 so that the magnetization direction thereof is perpendicular or substantially perpendicular to the extending direction of the connecting portion 12, and is fixed to the magnet frame portion 202B using an adhesive or the like.
- the first spring portion 22 is a first elastic body portion that extends in the minor axis direction of the mirror 102 and connects the magnet portion 21 to the support portion 13 so as to vibrate.
- the second spring portion 23 extends in the same direction as the first spring portion 22, that is, the minor axis direction of the mirror 102, and connects the movable mirror portion 11 to the magnet portion 21 so as to vibrate. It is an elastic body part.
- the member which connects the magnet part 21 to the support part 13 and the member which connects the movable mirror part 11 to a magnet should just be an elastic body not only with a spring.
- first spring portion 22 may have a configuration in which a plurality of elastic bodies connected to the permanent magnet 201 and the support portion 13 are arranged in parallel.
- the first spring portion 22 shown in FIG. 1 has two springs (springs B1 and B2) that are elastic bodies as described above.
- Each drive unit 14 is provided so as to surround the magnet unit 21 of each connecting unit 12, and a magnetic field is applied to the enclosed magnet unit 21 to move the movable mirror unit 11 with the minor axis direction of the mirror 102 as the vibration axis X. Vibrate.
- FIG. 3 is a diagram for explaining the configuration of the drive unit 14 in more detail, and shows a cross section taken along the line A-A ′ of the optical scanning device 1 shown in FIG. 1.
- the drive unit 14 includes a yoke unit 30 that is a magnetic circuit, and a coil 34 wound around the yoke unit 30.
- the yoke portion 30 is composed of three portions (yokes 31 to 33) that are magnetically coupled.
- the yoke 31 has an end portion 31A in the vicinity of one of the poles of the permanent magnet 201, and the yoke 32 has an end portion facing the end portion 32A in the vicinity of the other of the poles of the permanent magnet 201 with the permanent magnet 201 interposed therebetween. 32A.
- the yoke 33 has an end portion 33A in a direction orthogonal to the magnetization direction of the permanent magnet (more specifically, in the vicinity of the lower surface of the permanent magnet 201).
- the coil 34 is wound around the yoke 33.
- the coil 34 When the coil 34 is energized, the coil portion 30 is excited to generate a magnetic field that acts on the permanent magnet 201.
- the coil 34 is wound around the yoke 33 so that the magnetic poles of the end portions 31A and 32A and the magnetic pole of the end portion 33A are different from each other.
- the optical scanning device 1 configured as described above, when the coil 34 is conducted, a magnetic flux is generated in the yoke portion 30, and magnetic poles are generated in the end portions 31A to 33A of the yokes 31 to 33. At this time, as described above, since the magnetic poles different from each other are formed at the end portions 31A and 32A and the end portion 33A, between the end portions 31A and 33A, the end portions 32A and the end portions 33A A magnetic field is generated in each of them.
- the magnet unit 21 vibrates around the vibration axis X.
- the vibration of the magnet portion 21 is transmitted to the movable mirror portion 11 by twisting the second spring portion 23, and the movable mirror portion 11 also vibrates around the vibration axis X.
- the waveform of the alternating current is preferably sinusoidal.
- I 1 is the moment of inertia of the magnet portion 21, 2 I 2 is the moment of inertia of the movable mirror portion 11, c is the damping coefficient of the vibration system, ⁇ 1 is the vibration angle of the magnet portion 21, and ⁇ 2 is the vibration of the movable mirror portion.
- k1 is according to the spring constant
- k2 is a spring constant of the second spring portion 23
- omega is the driving frequency is the frequency of the alternating current applied to the coil 34
- T q magnet portion 21 of the first spring portion 22 Represents torque. It is assumed that the same alternating current flows through the coil 34 of each magnet part 21 and that the vibration angle ⁇ 1 and the moment of inertia I 1 of each magnet part 21 are the same.
- the movable mirror unit 11 When the movable mirror unit 11 vibrates as described above, the movable mirror unit 11 can reflect light incident at a certain angle in various directions. For example, the movable mirror unit 11 can reflect light incident at a certain angle at a shallow angle as shown in FIG. 4 or reflect at a deep angle as shown in FIG. In this way, by changing the direction and magnitude of the current flowing through the coil 34, the angle of the scanning light can be arbitrarily changed.
- FIG. 6 is a diagram showing the relationship between the drive frequency and the tilt angle of the movable mirror unit 11.
- an optical scanning device having a movable mirror portion provided with both a mirror and a magnet in FIG. 6, a comparison. The relationship between the operating frequency in the structure) and the tilt angle of the movable part is also shown.
- the optical scanning device 1 of the present embodiment has the same drive as the optical scanning device of the comparative structure.
- the tilt angle of the movable mirror unit 11 is also increased by force. This is because the movable mirror portion 11 is vibrated via the second spring portion 23 by vibrating the permanent magnet 201. For this reason, drive efficiency can be improved.
- FIG. 7 is a diagram illustrating an example of an image display device using the optical scanning device 1.
- the image display device converts a light beam generation device P1 that generates a light beam of each color modulated according to a video signal input from the outside, and a parallel light beam generated by the light beam generation device P1.
- the image display device scans in the vertical direction the horizontal scanning unit P4 that scans in the horizontal direction in order to display the image of the light beam synthesized by the synthesis optical system P3, and the light beam scanned in the horizontal direction in the horizontal scanning unit P4.
- an optical system (not shown) for emitting light beams scanned in the horizontal and vertical directions onto the screen.
- the optical scanning device 1 of this embodiment is incorporated in an image display device as a scanning mirror P41 of a horizontal scanning unit P4.
- the luminous flux generation device P1 receives a video signal, generates a signal as an element for constructing an image based on the input signal, and uses a horizontal synchronization signal used in the horizontal scanning unit and a vertical scanning unit. Signal processing circuits for outputting the vertical synchronizing signals respectively. In this signal processing circuit, red (R), green (G), and blue (B) video signals are generated.
- the light flux generation device P1 has a light source part P11 for making three video signals (R, G, B) output from the signal processing circuit into light fluxes, respectively.
- the light source unit P11 includes a laser P12 that generates a light beam for each color of the video signal and a laser drive system P13 that drives the laser P12.
- a semiconductor laser or a solid-state laser with a harmonic generation mechanism (SHG) is preferably used as each laser.
- the light beams of the respective colors emitted from the respective lasers P12 of the light beam generation device P1 are collimated by the collimating optical system P2, and then enter the dichroic mirrors corresponding to the respective colors of the combining optical system P3.
- the light beams of the respective colors incident on these three dichroic mirrors are reflected or transmitted in a wavelength-selective manner and output to the horizontal scanning unit P4.
- the light beam incident on the horizontal scanning unit P4 is projected as an image by scanning the scanning mirrors P41 and P51 in the horizontal direction and the vertical direction.
- Each of the scanning mirrors P41 and P51 is driven by a scanning drive circuit based on a synchronization signal output from the signal processing circuit.
- the movable mirror unit 11 is vibrated by transmitting the vibration of the permanent magnet 201 to the movable mirror unit 11, the moment of inertia of the vibration system can be reduced. It becomes possible to improve drive efficiency.
- FIG. 8 is a top view of the optical scanning device of the present embodiment.
- the optical scanning device 1 ⁇ / b> A according to the present embodiment includes a pair of driving units 14 ⁇ / b> A instead of the pair of driving units 14, as compared with the optical scanning device 1 illustrated in FIG. 1. It is different in point.
- Each drive unit 14A is provided so as to surround the magnet unit 21 of each coupling unit 12, and causes the magnetic unit 21 to act on a magnetic field to vibrate the movable mirror unit 11 with the minor axis direction of the mirror 102 as the vibration axis X.
- FIG. 9 is a diagram for explaining the configuration of the drive unit 14A in more detail, and shows a cross section taken along line B-B ′ of the optical scanning device 1A shown in FIG.
- drive parts have the yoke part 40 which is a magnetic circuit, and the coil 44 wound around the yoke part 40. As shown in FIG.
- the yoke portion 40 is composed of three portions (yokes 41 to 43) that are magnetically coupled.
- the yoke 41 has an end portion 41A in the vicinity of the upper surface of the permanent magnet 201, and the yoke 42 has an end portion 42A that faces the end portion 41A in the vicinity of the lower surface of the permanent magnet 201 with the permanent magnet 201 interposed therebetween. Therefore, the yoke portion 40 has a pair of end portions (end portions 41A and 42A) facing each other with the permanent magnet 201 interposed therebetween in a direction orthogonal to the magnetization direction of the permanent magnet 201.
- the yoke 43 does not have an end near the permanent magnet 201.
- the coil 44 is wound around the yoke 43.
- the coil 44 When the coil 44 is energized, the coil portion 40 is excited to generate a magnetic field that acts on the permanent magnet 201.
- the coil 44 is configured such that the magnetic poles of the end portions 41A and 42A are different from each other.
- the driving efficiency can be improved.
- the end portions 41A and 42A can be brought closer to each other, so that a magnetic field applied to the permanent magnet 201 can be generated efficiently.
- FIG. 10 is a top view of the optical scanning device of the present embodiment.
- the optical scanning device 1 ⁇ / b> B of this embodiment has a pair of connecting portions 12 ⁇ / b> A instead of the pair of connecting portions 12, as compared with the optical scanning device 1 ⁇ / b> A shown in FIG. 8. It is different in point.
- the pair of connecting portions 12A connect both ends of the movable mirror portion 11 to the support portion 13 respectively. More specifically, the pair of connecting portions 12A are connected to both ends of the movable mirror portion 11 so as to face each other, extend in the minor axis direction of the mirror 102, and bend in the straight axis direction of the mirror 102 in the middle. It is extended until it is connected to the support part 13.
- Each connecting portion 12 ⁇ / b> A includes a magnet portion 21, a first spring portion 22 ⁇ / b> A, and a second spring portion 23.
- the first spring portion 22A is a first elastic body portion that extends in the direction of the straight axis of the mirror 102 and connects the magnet portion 21 to the support portion 13 so as to vibrate.
- the first spring portion 22A is composed of a single spring.
- the drive efficiency can be improved. Further, since the first spring portion 22A and the second spring portion 23 extend in different directions, the length in the lateral direction (X-axis direction) can be shortened.
- FIG. 12 is a top view of the optical scanning device of the present embodiment.
- the optical scanning device 1C shown in FIG. 12 has a first spring having a plurality of springs in which a plurality of spring portions are arranged in parallel instead of the first spring portion 22A.
- the difference is that the spring portion 22B is provided. More specifically, the first spring portion 22B has two springs (springs B3 and B4) as described above.
- the length of the first spring portion 22B can be shortened.
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Abstract
Description
11 可動ミラー部
12、12A 連結部
13 支持部
14、14A 駆動部
21 磁石部
22、22A、22B 第1のバネ部
23 第2のバネ部
30、40 ヨーク部
31~33、41~43 ヨーク
31A、32A、33A、41A、42A 端部
34 コイル
101 反射面
102 ミラー
103 ミラー枠部
201 永久磁石
202 磁石枠部
Claims (10)
- 支持部と、光を反射する反射面を備えた可動部と、前記可動部の両端をそれぞれ前記支持部に連結する1対の連結部と、前記可動部を振動させる駆動部と、を有し、
各連結部は、
永久磁石と、
前記永久磁石を前記支持部に対して振動可能に連結する第1の弾性体部と、
前記可動部を前記永久磁石に対して振動可能に連結する第2の弾性体部と、を有し、
前記駆動部は、前記永久磁石に対して作用する磁場を発生させて、前記永久磁石を振動させることにより、前記可動部を振動させる、光走査装置。 - 前記駆動部は、
ヨーク部と、
前記ヨーク部に巻きつけられ、導通されると、前記ヨーク部を励磁して、前記磁場を発生させるコイルと、を有する請求項1に記載の光走査装置。 - 前記ヨーク部は、
前記永久磁石の磁化方向に、前記永久磁石を挟んで対向する1対の第1の端部と、
前記永久磁石の磁化方向と直交する方向に配置された第2の端部と、を有し、
前記コイルは、前記第1の端部および前記第2の端部に互いに異なる磁極が形成されるように、前記ヨーク部に巻きつけられている、請求項2に記載の光走査装置。 - 前記ヨーク部は、前記永久磁石の磁化方向と直交する方向に、前記永久磁石を挟んで対向する1対の端部を有し、
前記コイルは、各端部に互いに異なる磁極が形成されるように、前記ヨーク部に巻きつけられている、請求項2に記載の光走査装置。 - 前記第1の弾性体部および前記第2の弾性体部は、互いに同一方向に延在している、請求項1ないし4のいずれか1項に記載の光走査装置。
- 前記第1の弾性体部および前記第2の弾性体部は、互いに直交する方向に延在している、請求項1ないし4のいずれか1項に記載の光走査装置。
- 前記第1の弾性体部では、前記永久磁石と前記支持部とに接続された複数の弾性体が並列に並んでいる、請求項1ないし5のいずれか1項に記載の光走査装置。
- 前記可動部は、前記反射面を備えた楕円形状のミラーを有し、
前記第2の弾性体部は、前記ミラーの短軸方向に延在している、請求項1ないし7のいずれか1項に記載の光走査装置。 - 請求項1ないし8のいずれか1項に記載の光走査装置を有する画像表示装置。
- 光を反射する反射面を備えた可動部と、永久磁石と、前記永久磁石と可動部を連結する弾性体部とを有する光走査素子による光走査方法であって、
前記永久磁石に作用する磁場を発生させて、前記永久磁石を振動させ、当該永久磁石の振動を前記弾性体部を介して前記可動部に伝えることで、前記可動部を振動させ、
前記可動部の反射面に光を入射させる、光走査方法。
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CN201280026645.1A CN103582840A (zh) | 2011-07-06 | 2012-06-08 | 光学扫描装置、图像显示设备和光学扫描方法 |
US14/128,512 US20140118809A1 (en) | 2011-07-06 | 2012-06-08 | Optical scanning device, image display apparatus and optical scanning method |
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JP2011150227 | 2011-07-06 | ||
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JP2019074766A (ja) * | 2014-06-30 | 2019-05-16 | 浜松ホトニクス株式会社 | ミラー駆動装置及びその製造方法 |
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JP6289253B2 (ja) * | 2014-05-02 | 2018-03-07 | オリンパス株式会社 | 光ファイバ走査装置、および光走査型内視鏡 |
CN108535969B (zh) * | 2018-04-11 | 2020-06-26 | 天津商业大学 | 一种摇摆振动装置 |
EP3817204A4 (en) * | 2018-06-26 | 2022-03-09 | Mitsumi Electric Co., Ltd. | ROTARY RETRACTOR DRIVE ACTUATOR |
CN110456500A (zh) * | 2019-07-31 | 2019-11-15 | 深圳市镭神智能***有限公司 | 谐振式扫描镜及激光雷达 |
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- 2012-06-08 JP JP2013522565A patent/JPWO2013005527A1/ja active Pending
- 2012-06-08 WO PCT/JP2012/064800 patent/WO2013005527A1/ja active Application Filing
- 2012-06-08 CN CN201280026645.1A patent/CN103582840A/zh active Pending
- 2012-06-08 US US14/128,512 patent/US20140118809A1/en not_active Abandoned
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