WO2012124753A1 - セラミックス磁気光学材料及びその選定方法 - Google Patents
セラミックス磁気光学材料及びその選定方法 Download PDFInfo
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Definitions
- the present invention relates to a ceramic magneto-optical material used for constituting a magneto-optical device (for example, a Faraday rotator) such as an optical isolator and a selection method thereof.
- a magneto-optical device for example, a Faraday rotator
- magneto-optical devices using the interaction between light and magnetism have attracted attention.
- One of them is an isolator. This is because an unstable oscillation state occurs when light oscillated from a laser light source is reflected by an intermediate optical system and returns to the light source, disturbing the light oscillated from the laser light source. It suppresses the phenomenon that becomes. Therefore, using this action, the optical isolator is used by being disposed between the laser light source and the optical component.
- the optical isolator has three parts: a Faraday rotator, a polarizer disposed on the light incident side of the Faraday rotator, and an analyzer disposed on the light exit side of the Faraday rotator.
- the optical isolator utilizes the so-called Faraday effect that the plane of polarization rotates in the Faraday rotator when light is incident on the Faraday rotator while a magnetic field is applied to the Faraday rotator in parallel with the traveling direction of light. To do. That is, of the incident light, light having the same polarization plane as the polarizer passes through the polarizer and is incident on the Faraday rotator. This light is rotated by plus 45 degrees in the Faraday rotator and emitted.
- the return light incident on the Faraday rotator from the direction opposite to the incident direction first passes through the analyzer, only the component light having the same polarization plane as the analyzer passes through the analyzer. Incident to the Faraday rotator. Next, in the Faraday rotator, the polarization plane of the return light is further rotated by plus 45 degrees from the first plus 45 degrees, so that it becomes a polarization plane perpendicular to the polarizer plus 90 degrees. Cannot pass through.
- a material used as a Faraday rotator of the optical isolator as described above needs to have a large Faraday effect and a high transmittance at the wavelength used.
- the different polarized component is transmitted through the polarizer, so that the return light is not sufficiently blocked.
- the evaluation of the state of occurrence of the different polarization components is as follows.
- the material used as the Faraday rotator is incident with 0 to 90 degrees of polarized light, and the emitted light is incident on the receiver through the polarizer.
- the light intensity is measured, and the extinction ratio (S) is calculated from the maximum value (Imax) and the minimum value (Imin) and evaluated by the following equation.
- S -10 log (Imin / Imax) [unit dB]
- the extinction ratio is desirably large, but generally 30 dB or more is required.
- JP 2010-285299 A discloses oxide single crystals and transparent oxide ceramics of (Tb x Re 1-x ) 2 O 3 : 0.4 ⁇ x ⁇ 1.0 as materials having a large Verdet constant. Has been.
- Transparent oxide ceramics are industrially promising because the reaction temperature can be kept low compared to oxide single crystals, so that mass production can be performed with simple equipment and the cost is low.
- the rare earth oxide represented by the general formula R 2 O 3 (R is a rare earth element) has a cubic crystal structure and no birefringence. Therefore, it is described that a sintered body having excellent transparency can be obtained by completely removing pores and segregation of impurities.
- JP-A-5-330913 the addition of a sintering aid is effective for removing pores. Furthermore, as disclosed in Japanese Patent No. 2638669, a method of removing pores by performing re-sintering after the hot isostatic pressing process is also disclosed.
- An object of the present invention is to provide a ceramic magneto-optical material having a good polarization state and a large extinction ratio, and a selection method thereof.
- terbium oxide and rare earth which have a large Verday constant and are paramagnetic elements (scandium, yttrium, lanthanum, europium, gadolinium, ytterbium, holmium, and lutetium).
- sintering aids When manufacturing ceramics with oxide as the main component, adding one or more sintering aids to this, mixing, forming, calcining, sintering under vacuum, and further annealing after HIP treatment
- the refractive index difference should be smaller than 0.004.
- the present inventors have found that a material that is very homogeneous and has an excellent extinction ratio can be obtained with little segregation of a sintering aid or the like to the grain boundary.
- the present invention provides the following ceramic magneto-optical material and selection method thereof.
- [1] Following formula (1) (Tb x Re 1-x ) 2 O 3 (1)
- Re represents at least one element selected from scandium, yttrium, lanthanum, europium, gadolinium, ytterbium, holmium, and lutetium, and 0.4 ⁇ x ⁇ 1.0.
- the difference between the refractive index of the grain boundary and the refractive index of the main phase of the oxide ceramic crystal at 25 ° C. is 0.004 or less.
- Ceramics magneto-optical material [2] The ceramic magneto-optical material according to [1], which is used for an optical isolator Faraday rotator.
- ceramic magneto-optical materials such as for optical isolator Faraday rotators, with a favorable polarization state and a large extinction ratio can be provided reliably, and the optical isolator used for fiber lasers for processing machines can be made compact. It has become possible to provide
- the ceramic magneto-optical element for an optical isolator Faraday rotator is: Following formula (1) (Tb x Re 1-x ) 2 O 3 (1) (In the formula, Re represents at least one element selected from scandium, yttrium, lanthanum, europium, gadolinium, ytterbium, holmium, and lutetium, and 0.4 ⁇ x ⁇ 1.0.)
- the Verdet constant at a wavelength of 1.065 ⁇ m is preferably 0.18 min / Oe.
- the difference between the refractive index of the grain boundary of the oxide ceramic crystal and the refractive index of the crystal main phase at 25 ° C.
- x may be 0.4 or more, preferably 0.5 to 0.9, and more preferably 0.5 to 0.7.
- Re is the above element, and Y and Gd are particularly preferable.
- the oxide ceramics includes an oxide such as titanium, zirconium, hafnium and calcium, and a sintering aid such as fluoride or nitride, and if necessary, is oxidized with respect to 100 parts by mass of the oxide of formula (1). 0.0001 to 0.01 part by mass of an oxide of an alkaline earth metal such as magnesium, strontium oxide or barium oxide can be contained.
- the oxide ceramics can basically adopt the method described in JP 2010-285299 A, and is a conventional method that is conventionally used and is a terbium oxide having a large Verdey constant and a paramagnetic element. And a rare earth (scandium, yttrium, lanthanum, europium, gadolinium, ytterbium, holmium and lutetium) oxide as main components and sintering aids such as those disclosed in JP-A-5-330913.
- a rare earth (scandium, yttrium, lanthanum, europium, gadolinium, ytterbium, holmium and lutetium) oxide as main components and sintering aids such as those disclosed in JP-A-5-330913.
- One or more additives such as oxides, particularly oxides such as titanium, zirconium, hafnium, calcium, fluoride or nitride, and mixed, molded, calcined, sintered under vacuum, Further, it can be processed by HIP processing.
- those having a difference between the refractive index of the grain boundary of the oxide ceramics and the refractive index of the crystal main phase of 0.004 or less have high homogeneity. Select and sample with a large extinction ratio.
- the difference in refractive index between the main phase and the grain boundary is determined by the following method shown in FIG. 1 because the reflected light intensity varies depending on the refractive index.
- the end surface of the ceramic (measuring object) 1 to be measured is mirror-polished and placed on the moving stage 2.
- the moving stage 2 is attached to a ball screw 4 attached to a motor 3 and is movable.
- Reference numeral 5 denotes a base.
- the measurement object 1 is irradiated with measurement light from the light source 6 obliquely from above.
- the measurement light is magnified by the beam expander 7, reflected by the mirror 8, and irradiated on the object 1 to be measured 1 with the objective lens 9, thereby enabling measurement of a minute region.
- the shorter the measurement wavelength the more minute the region can be measured.
- the reflected light is received by a light receiver (power meter) 10 to detect the intensity.
- FIG. 2 shows an example of the relationship between position information from the motor and reflected light intensity from the power meter.
- the measurement optical system changes the relationship between the amount of change in the refractive index and the amount of change in the signal of the light receiver, so a material with a known refractive index is bonded, and the sample is mirror-polished perpendicular to the bonded surface. By doing so, the relationship between the two can be calibrated.
- the refractive index difference can be evaluated qualitatively by visual observation by observing the object to be measured in a thin piece and using a microscope.
- CIP was performed as secondary molding to obtain a molded body.
- the obtained molded body was calcined at 400 to 1,000 ° C. in the air, and then fired (main firing) at 1,600 to 1,800 ° C. in a predetermined atmosphere. Further, the obtained fired body was further subjected to HIP treatment and, if necessary, annealed to obtain 15 types of ceramics (size: diameter 6 mm ⁇ , length 10 mm). With respect to the obtained ceramic, the refractive index difference between the refractive index of the grain boundary and the refractive index of the main phase and the extinction ratio were measured. The results are shown in the figure.
- the refractive index was determined by measuring the Brewster angle at 25 ° C. using an “ellipsometer” as a refractometer.
- the extinction ratio is evaluated by applying 0 to 90 degrees of polarized light to the material used as the Faraday rotator, allowing the emitted light to enter the light receiver through the polarizer, and increasing the light intensity with the light receiver.
- the refractive index difference By setting the refractive index difference to 0.004 or less, it is recognized that the extinction ratio is 30 dB or more, and the extinction ratio is improved as the refractive index difference is reduced.
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Abstract
Description
S=-10log(Imin/Imax) [単位dB]
消光比は、大きいことが望ましいが、一般的には、30dB以上が求められている。
〔1〕
下記式(1)
(TbxRe1-x)2O3 (1)
(式中、Reはスカンジウム、イットリウム、ランタン、ユウロピウム、ガドリニウム、イッテルビウム、ホルミウム、ルテチウムより選ばれる少なくとも1つの元素を示し、0.4≦x≦1.0である。)
で示される酸化物を主成分とする酸化物セラミックスからなり、25℃における上記酸化物セラミックス結晶の粒界の屈折率と主相の屈折率との差が0.004以下であることを特徴とするセラミックス磁気光学材料。
〔2〕
光アイソレータファラデー回転子用である〔1〕記載のセラミックス磁気光学材料。
〔3〕
下記式(1)
(TbxRe1-x)2O3 (1)
(式中、Reはスカンジウム、イットリウム、ランタン、ユウロピウム、ガドリニウム、イッテルビウム、ホルミウム、ルテチウムより選ばれる少なくとも1つの元素を示し、0.4≦x≦1.0である。)
で示される酸化物を主成分とする酸化物セラミックスより、25℃における上記酸化物セラミックス結晶の粒界の屈折率と主相の屈折率との差が0.004以下である酸化物セラミックスを選定することを特徴とする消光比の大きいセラミックス磁気光学材料の選定方法。
〔4〕
セラミックス磁気光学材料が光アイソレータファラデー回転子用である〔3〕記載の選定方法。
下記式(1)
(TbxRe1-x)2O3 (1)
(式中、Reはスカンジウム、イットリウム、ランタン、ユウロピウム、ガドリニウム、イッテルビウム、ホルミウム、ルテチウムより選ばれる少なくとも1つの元素を示し、0.4≦x≦1.0である。)
で示される酸化物を主成分とし、好ましくは波長1.065μmでのベルデー定数が0.18min/Oe.cm以上である酸化物セラミックスからなり、25℃における該酸化物セラミックス結晶の粒界の屈折率と結晶主相の屈折率との差が0.004以下であり、好ましくは消光比25dB以上、より好ましくは30dB以上、特に35dB以上であることを特徴とする。
上記式(1)において、xは0.4以上であればよいが、好ましくは0.5~0.9、更に好ましくは0.5~0.7である。Reは上記元素であるが、特にY、Gdが好ましい。
測定するセラミックス(被測定物)1の端面を鏡面研磨し、これを移動するステージ2に設置する。この移動ステージ2は、モータ3に取り付けられたボールねじ4に取り付けられ、移動可能になっている。なお、5は基台である。
そして、上記被測定物1には、光源6からの測定光を斜め上方から照射する。測定光はビームエクスパンダ7で拡大した後、ミラー8で反射させ、対物レンズ9で被測定物1に照射することにより微小領域の測定が可能になる。また、測定波長は短いほどより微小領域の測定が可能になる。そして、反射した光を受光器(パワーメータ)10で受けて強度を検知する。
よって、受光器の信号の変化量から屈折率を求めることができる。
なお、図2は、モータからの位置情報とパワーメータからの反射光強度との関係の一例を示す。
種々粒子サイズの酸化テルビウム粉末とY2O3又はGd2O3粉末とをモル比(40~70%:60~30%)の割合で使用し、これに焼結助剤としてZrO2、HfO2又はTiO2を0.5質量%で添加し、更に分散剤及びバインダーとしてのエチルセルロースとポリビニルアルコールを有効量添加した後、これらをポットミルで混合することにより混合物を得た。次いで、上記混合物をスプレードライすることによって、粒径数十μmの顆粒を得た。前記顆粒を用い、一次成形として、金型成形を行った後、二次成形として、CIPを行うことにより成形体を得た。得られた成形体を大気中400~1,000℃で仮焼した後、所定の雰囲気中1,600~1,800℃で焼成(本焼成)した。更に、得られた焼成体を更にHIP処理を行い、必要によりアニール処理することにより、15種類のセラミックス(サイズ:直径6mmφ、長さ10mm)を得た。得られたセラミックスに対し、その粒界の屈折率と主相の屈折率との屈折率差及び消光比を測定した。結果を図に示す。
なお、屈折率は、屈折率計として「エリプソメータ」を用いて、25℃における、ブリュスター角を測定し、屈折率を求めた。また、消光比の評価は、ファラデー回転子として用いられる材料に対して、0度~90度の偏光を入射し、出射光を偏光子を通して受光器に入射して、受光器で光の強度を測定し、最大値(Imax)と最小値(Imin)より、消光比(S)を次式で計算して評価する。
S=-10log(Imin/Imax) [単位dB]
結果を図3に示す。
2 移動ステージ
3 モータ
4 ボールねじ
5 基台
6 光源
7 ビームエクスパンダ
8 ミラー
9 対物レンズ
10 受光器
Claims (4)
- 下記式(1)
(TbxRe1-x)2O3 (1)
(式中、Reはスカンジウム、イットリウム、ランタン、ユウロピウム、ガドリニウム、イッテルビウム、ホルミウム、ルテチウムより選ばれる少なくとも1つの元素を示し、0.4≦x≦1.0である。)
で示される酸化物を主成分とする酸化物セラミックスからなり、25℃における上記酸化物セラミックス結晶の粒界の屈折率と主相の屈折率との差が0.004以下であることを特徴とするセラミックス磁気光学材料。 - 光アイソレータファラデー回転子用である請求項1記載のセラミックス磁気光学材料。
- 下記式(1)
(TbxRe1-x)2O3 (1)
(式中、Reはスカンジウム、イットリウム、ランタン、ユウロピウム、ガドリニウム、イッテルビウム、ホルミウム、ルテチウムより選ばれる少なくとも1つの元素を示し、0.4≦x≦1.0である。)
で示される酸化物を主成分とする酸化物セラミックスより、25℃における上記酸化物セラミックス結晶の粒界の屈折率と主相の屈折率との差が0.004以下である酸化物セラミックスを選定することを特徴とする消光比の大きいセラミックス磁気光学材料の選定方法。 - セラミックス磁気光学材料が光アイソレータファラデー回転子用である請求項3記載の選定方法。
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EP3290997B1 (en) | 2016-09-02 | 2020-07-01 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Magneto-optical light modulator |
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