WO2012121499A2 - 거울의 곡률 조정장치 및 이를 구비한 거울 조정시스템 - Google Patents
거울의 곡률 조정장치 및 이를 구비한 거울 조정시스템 Download PDFInfo
- Publication number
- WO2012121499A2 WO2012121499A2 PCT/KR2012/001350 KR2012001350W WO2012121499A2 WO 2012121499 A2 WO2012121499 A2 WO 2012121499A2 KR 2012001350 W KR2012001350 W KR 2012001350W WO 2012121499 A2 WO2012121499 A2 WO 2012121499A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mirror
- block
- pair
- curvature
- blocks
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/185—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/185—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface
- G02B7/188—Membrane mirrors
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/067—Construction details
Definitions
- the present invention relates to a mirror curvature adjusting device and a mirror adjusting system having the same, and more particularly, the mirror adjusting process including the position adjustment, the angle adjustment, and the curvature adjustment of the mirror can be easily and easily performed. It relates to a mirror curvature adjusting device and a mirror adjusting system having the same that can further improve the reliability.
- the mirror and the position of the mirror are focused on a radiation beam accelerator, which can accelerate electrons at a speed close to the speed of light and rotate them using electromagnets to obtain high-intensity electromagnetic waves in a wide energy range such as ultraviolet rays and X-rays. It is equipped with a mirror adjustment system that can adjust the angle and curvature.
- This conventional mirror adjustment system is composed of a position adjusting device for adjusting the position of the mirror, an angle adjusting device for adjusting the angle of the mirror, and a curvature adjusting device for adjusting the curvature of the mirror, among which the conventional The curvature adjusting device is as shown in Figs.
- Conventional curvature adjusting device is fixed to a pair of rotation block 30, a pair of rotation block 30, respectively, which is connected to the base block 20, the base block 20 by a cantilever 31 so as to be rotatable. And a pair of driving units 50 which rotate by applying an external force to the pair of support blocks 40 and the pair of rotation blocks 30 respectively supporting both ends of the mirror 10.
- the pair of rotating blocks 30 includes a pair of driving units each consisting of the first and second leaf springs 51 and 52 and the driver 53.
- the rotational force RP rotates around the mirror 10, respectively, and when the applied external force is released, the external force returns to its original position due to the elastic force of the cantilever 31.
- the conventional curvature adjusting device adjusts the curvature of the mirror 10 to a desired value by appropriately controlling the magnitude of the external force applied by the pair of driving units 50 to the pair of rotating blocks 30, respectively.
- the mirror adjustment process using a conventional mirror adjustment system including such a curvature adjustment device by adjusting the position and angle of the mirror 10, the electromagnetic wave incident on the mirror 10 to the center point (MC) of the mirror reflection surface It is roughly classified into a job of making the incident and a job of adjusting the pitch angle and curvature of the mirror 10 to focus the electromagnetic waves reflected from the mirror 10.
- the curvature adjusting device provided in the conventional mirror adjustment system, as shown in Figure 3, as the bending force is applied to both ends of the mirror 10, the center of the mirror 10 is bent downward, so the curvature changes As the curvature is adjusted to be smaller or larger in the operation of adjusting the curvature of the mirror 10, the position of the center point MC of the mirror 10 to which the electromagnetic wave is incident moves upward or downward with reference to FIG. 3.
- the curvature adjustment width is large during the operation of adjusting the curvature of the mirror 10 so that the position of the center point MC of the mirror 10 is large.
- the position and angle adjustment work of the mirror which has already been performed so that the electromagnetic wave is incident on the center point MC of the mirror 10, has to be performed again.
- the conventional curvature adjusting device since a pair of support blocks 40 supporting both ends of the mirror 10 form an assembly with the mirror 10, they are fixedly installed in the pair of rotation blocks 30 as they are. If the length of the assembly of the pair of support blocks 40 and the mirror 10 does not exactly match the corresponding distance of the pair of pivot blocks 30, an unintentional bending deformation in the mirror 10 may occur. As such, there is a disadvantage that the reliability of the device may be degraded due to the bending deformation.
- the assembly is connected to the pair of pivot blocks 30.
- the bending deformation may occur.
- the present invention can be fixed so that the position of the mirror center point is not moved when adjusting the curvature of the mirror, it is possible to prevent unintentional bending deformation in the mirror during the mirror installation process
- the operation of adjusting the curvature of the mirror can be proceeded to the input adjustment to a single driver.
- the apparatus for adjusting the curvature of a mirror by applying or releasing a bending force on both ends of the mirror, the base block;
- a pair of pivot blocks each connected to the base block through one or more first elastic bodies, the pivot blocks pivoting or elastically returning around the connection portion of the base block and the first elastic body when an external force is applied or released;
- a pair of support blocks installed at each of the pair of rotation blocks to support both ends of the mirror, and applying a bending force to both ends of the mirror as the pair of rotation blocks are rotated;
- a driving unit for rotating the pair of pivot blocks wherein the first elastic body includes a direction in which the support point of the support block with respect to the mirror is changed by a curvature change as the pivot block is rotated.
- the pivot block is connected to the base block to be moved in the opposite direction with respect to.
- the first elastic body has a cantilever shape, forms a right angle with respect to a reflecting surface of the mirror located at an opening formed at one side of the base block, and faces a first pivot point, which is a connection portion with the base block, from the front. It may be provided on the reflective surface of the mirror or adjacent to the reflective surface of the mirror.
- the pivot block and the first elastic body may be integrally formed with the base block.
- At least one of the pair of support blocks may be installed in the pivot block via a connection block fixed to be adjustable in the pivot block.
- the driving unit may include a pair of first plate springs, each of which has one end fixed to the rotation block to rotate the pair of rotation blocks; A second leaf spring installed through a connecting member to be fixed to the other end of the first leaf spring in a state spaced apart by a predetermined distance in parallel to the first leaf spring; And a driver for pressing or releasing the other end portion of the second leaf spring to the first leaf spring.
- Apparatus for adjusting the curvature of a mirror according to another embodiment of the present invention, the device for adjusting the curvature by applying or releasing a bending force on both ends of the mirror, the base block;
- a pair of pivot blocks each connected to the base block through one or more first elastic bodies, the pivot blocks pivoting or elastically returning around the connection portion of the base block and the first elastic body when an external force is applied or released;
- a pair of support blocks installed at each of the pair of rotation blocks to support both ends of the mirror, and applying a bending force to both ends of the mirror as the pair of rotation blocks are rotated;
- a conveying member provided to be reciprocally conveyed in one direction, a single driver for conveying the conveying member, and provided at both ends of the conveying member, and transferring the conveying force of the conveying member by the driver to the pair of rotating blocks.
- a driving unit including a pair of transmission parts configured to transmit and rotate the pair of pivot blocks, respectively, wherein the first elastic body has a curvature point of the support block for the mirror as the pivot block is rotated.
- the pivot block is connected to the base block to be moved in a direction opposite to the direction of movement of the center point of the mirror due to the change.
- the pair of transmission parts are connected to the base block through one or more second elastic bodies, respectively, and are connected to the transfer member by a hinge so that the transfer force of the transfer member is applied or released. It may include; each of the transfer block to rotate around the connecting portion of the elastic body to apply an external force to the rotating block or elastically return.
- the pair of transmission parts may further include an elastic member having a variable length by elastic deformation, and the transmission block may be connected to the transfer member through the elastic member.
- the driving unit may include one or more guide shafts fixed to the base block along the transfer direction of the transfer member, and one or more guide bodies engaged with the one or more guide shafts and coupled to the transfer member, respectively. It may further include a guide portion for guiding the reciprocating conveyance of the member.
- the sliding member may be formed to correspond to a predetermined design value and have a curved contact portion with the transfer block or the rotation block.
- the transfer block and the second elastic body may be formed integrally with the base block.
- the first elastic body has a cantilever shape, forms a right angle with respect to a reflecting surface of the mirror located at an opening formed at one side of the base block, and faces a first pivot point, which is a connection portion with the base block, from the front. It may be provided on the reflective surface of the mirror or adjacent to the reflective surface of the mirror.
- the pivot block and the first elastic body may be integrally formed with the base block.
- At least one of the pair of support blocks may be installed in the pivot block via a connection block fixed to be adjustable in the pivot block.
- Mirror adjustment system a system for adjusting the position, angle and curvature of the mirror, a support installed on the bottom surface; A position adjusting device fixed to the support and configured to transfer the installation plate to the support, forward, backward, left and right, and up and down and adjust the inclination thereof; An angle adjusting device fixed to the mounting plate and adjusting a rotation angle of the upper surface with respect to the lower surface; And a base block installed on an upper surface of the angle adjusting device, each of which is connected to the base block through at least one first elastic body, and is connected to the base block and the first elastic body as an external force is applied or released.
- a pair of rotating blocks that rotate or return elastically, respectively, are installed on the pair of rotating blocks to support both ends of the mirror, and as long as the pair of rotating blocks rotate, the bending force is applied to both ends of the mirror.
- a curvature adjusting device including a pair of support blocks, and a driving unit for rotating the pair of rotating blocks, wherein the first elastic body of the curvature adjusting device is configured to rotate the rotating block with respect to the mirror.
- the pivot block can be moved such that the support point of the support block can be moved in a direction opposite to the moving direction of the center point of the mirror due to the change in curvature. It is connected to the base block.
- the first elastic body of the curvature adjusting device is provided in the form of a cantilever, at a right angle to the reflective surface of the mirror located in the opening formed on one side of the base block, the first portion which is a connection with the base block When the pivot point is viewed from the front, it may be provided on the reflective surface of the mirror or adjacent to the reflective surface of the mirror.
- a system for adjusting the position, angle and curvature of the mirror a support installed on the bottom surface;
- a position adjusting device fixed to the support and configured to transfer the installation plate to the support, forward, backward, left and right, and up and down and adjust the inclination thereof;
- An angle adjusting device fixed to the mounting plate and adjusting a rotation angle of the upper surface with respect to the lower surface;
- a base block installed on an upper surface of the angle adjusting device, each of which is connected to the base block through at least one first elastic body, and is connected to the base block and the first elastic body as an external force is applied or released.
- a pair of rotating blocks that rotate or return elastically, respectively, are installed on the pair of rotating blocks to support both ends of the mirror, and as long as the pair of rotating blocks rotate, the bending force is applied to both ends of the mirror.
- a curvature adjusting device of the mirror including a driving unit for rotating the pair of rotating blocks, wherein the driving unit includes a transfer member provided to reciprocate in one direction, and a single driver for reciprocating the transfer member; And a pair of transmission parts respectively provided at both ends of the transfer member to transfer the transfer force of the transfer member by the driver to the pair of rotation blocks to rotate the pair of rotation blocks, respectively.
- the first elastic body, the rotation block is rotated by the base block so that the support point of the support block with respect to the mirror can be moved in a direction opposite to the direction of movement of the center point of the mirror due to the curvature change Connect to
- the pair of transmission parts are connected to the base block through one or more second elastic bodies, respectively, and are connected to the transfer member by a hinge so that the transfer force of the transfer member is applied or released. It may include; each of the transfer block to rotate around the connecting portion of the elastic body to apply an external force to the rotating block or elastically return.
- the pair of transmission units may further include an elastic member that is variable in length by elastic deformation, and the transmission block may be connected to the transfer member through the elastic member.
- the support point of the support block for the mirror is changed in the curvature change. Since the mirror can be moved in a direction opposite to the direction of movement of the mirror center point, even if the mirror curvature is adjusted, the movement of the mirror center point due to the curvature change is offset by the movement of the support points located at both ends of the mirror to minimize absolute displacement of the mirror center point can do.
- the position of the mirror center point can be fixed so that the mirror curvature is not moved when adjusting the curvature of the mirror, it is necessary to redo the mirror position and angle adjustment work to position the electromagnetic wave at the center point of the mirror reflection surface after adjusting the mirror curvature.
- the mirror adjustment process is easy and simple.
- the drive unit for rotating the pair of rotating blocks for adjusting the curvature of the mirror is provided to be implemented as a single driver having a pair of the transmission unit and the transfer member, thereby adjusting the curvature of the mirror single driver This can be done simply by adjusting the input to.
- the mirror adjustment process including the curvature adjustment of the mirror for focusing the electromagnetic waves can be easily performed.
- the feed force of the transfer member by the driver is applied to the pair of transfer blocks through the pair of elastic members, respectively, thereby adjusting the rotation angle of the rotation block and the curvature of the mirror according to the displacement of the transfer member. Since it can proceed very finely, the precision of mirror curvature adjustment can be improved.
- the driving unit for adjusting the rotation angle of the rotation block to determine the curvature of the mirror by applying an external force to the rotation block includes a first and a second leaf spring and a driver, one end of which is installed in parallel with each other. Compared with the displacement of the other end of the second leaf spring, the rotation angle of the rotation block can be adjusted very finely, and the curvature of the mirror can be finely adjusted.
- At least one of the pair of supporting blocks is installed in the rotating block through a connecting block fixedly adjustable in position to the rotating block, thereby preventing unintentional bending deformation in the mirror during the mirror installation process. Therefore, the reliability of the device can be improved.
- FIG. 1 is a front view of a curvature adjusting device of a mirror provided in a conventional mirror adjusting system
- FIG. 2 is a plan view of a curvature adjusting device of a mirror provided in a conventional mirror adjusting system
- FIG. 3 is a front view showing an operating state of a curvature adjusting device of a mirror provided in a conventional mirror adjusting system
- FIG. 4 is a front view of a curvature adjusting device of a mirror according to a first embodiment of the present invention
- FIG. 5 is a plan view of a curvature adjusting device of a mirror according to a first embodiment of the present invention
- FIG. 6 is a perspective view illustrating a base block provided in a device for adjusting the curvature of a mirror according to a first embodiment of the present invention with a rotating block;
- FIG. 7 is a front view illustrating a base block provided in a device for adjusting the curvature of a mirror according to a first embodiment of the present invention with a rotating block;
- FIG. 8 is a front view showing an operating state of the curvature adjusting device of the mirror according to the first embodiment of the present invention.
- FIG. 9 is a front view schematically showing a mirror adjusting system according to a first embodiment of the present invention.
- FIG. 10 is a front view of a curvature adjusting device of a mirror according to a second embodiment of the present invention.
- FIG. 11 is a plan view of a curvature adjusting device of a mirror according to a second embodiment of the present invention.
- FIG. 12 is a perspective view showing a base block provided in a device for adjusting the curvature of a mirror according to a second embodiment of the present invention with a rotation block and a transmission block;
- FIG. 13 is a front view showing an operating state of the curvature adjusting device of the mirror according to the second embodiment of the present invention.
- FIG. 14 is a front view schematically showing a mirror adjusting system according to a second embodiment of the present invention.
- opening 112 rib
- first elastic body 122 screw hole
- step 123-1 fastening hole
- first leaf spring 141-1 connecting member
- the apparatus for adjusting the curvature of the mirror and the mirror adjusting system having the same according to the present invention, by accelerating electrons at a speed close to the speed of light and rotating them using electromagnets, radiated light capable of obtaining high luminance electromagnetic waves in a wide energy range such as ultraviolet rays and X-rays
- Apparatus for adjusting the curvature of a mirror installed in an accelerator or the like and focusing the radiated light and a system for adjusting the position, angle and curvature of the mirror including such a device.
- Apparatus for adjusting the curvature of the mirror 100 according to the first embodiment of the present invention, the base block 110, a pair of rotating blocks (120a, 120b), a pair of support blocks 130, a drive unit 140 and It comprises a pair of displacement sensor 150.
- the base block 110 is a member that becomes the body of the device, made of a rectangular tubular shape so that the drive unit 140 is installed therein, the opening 111 is located on one side of the mirror 10 Is formed.
- a pair of ribs 112 may be connected to each other through a plurality of first elastic bodies 121, as shown in FIG. 6. Are formed to face each other.
- the shape of the base block 110 is exemplary, and can be implemented in various other forms, of course.
- the pair of rotating blocks 120a and 120b are connected to the ribs 112 of the base block 110 through first elastic bodies 121 formed of cantilevered elastic materials, respectively, and the base block 110 and the first block. It is provided to be rotated around the first pivot point (RP1), which is a connecting portion of the elastic body 121.
- RP1 first pivot point
- the pair of rotating blocks 120a and 120b are applied with an external force in one direction by the driving unit 140, and the first elastic body 121 is rotated by the external force.
- the pair of rotating blocks 120a and 120b are returned to their original positions by the elastic restoring force of the first elastic body 121.
- the first elastic body 121 is a mirror 10 by the change of the curvature of the mirror 10, the support point (SP) of the support block 130 with respect to the mirror 10 as the rotation block (120a, 120b) is rotated
- the pivot blocks 120a and 120b are connected to the base block 110 so that they can be moved in the opposite direction to the moving direction of the center point MC (hereinafter, the center point of the mirror is defined as the center point of the mirror reflection surface).
- the first elastic body 121 is provided in a cantilever shape and is connected to the lower side of the rib 112 so as to be perpendicular to the reflective surface of the mirror 10.
- the single pivot point RP1 is provided to be located on the front side adjacent to the reflecting surface of the mirror 10 when viewed from the front.
- the support points SP of the support block 130 for the mirror 10 move upward. Is moved.
- a bending force is applied to the mirror 10 by the rotation of the rotation blocks 120a and 120b so that the mirror 10 is concave and the curvature increases.
- the center point MC of the mirror 10 is a support point. It is moved downward with respect to SP.
- the movement of the center point MC of the mirror 10 is offset by the movement of the support point SP in the opposite direction, so that there is almost no absolute displacement of the center point MC of the mirror 10 relative to the base block 110. do.
- the mirror ( 10) The position of the center point MC can be fixed without being moved.
- the first elastic body 121 is formed integrally with the base block 110 and the rotation blocks 120a and 120b in a cantilever shape.
- the present invention is not limited thereto, and may be manufactured as a separate member so as to be fixedly installed on the base block 110 and the rotation blocks 120a and 120b, respectively, and may be implemented in various forms other than cantilever.
- the first elastic body 121 is implemented to be perpendicular to the reflective surface of the mirror 10 when viewed from the front, but is not limited thereto. Instead, the angle formed by the reflective surface of the mirror 10 may be implemented at a different angle or horizontally with respect to the reflective surface of the mirror 10. In this case, the position of the first elastic body 121 should be appropriately changed. something to do.
- the movement of the center point (MC) of the mirror 10 may be determined as the position where the absolute displacement of the center point (MC) of the mirror 10 with respect to the base block 110 is minimized.
- the position of the first pivot point RP1 is in the vertical direction, as shown in FIG. It is often determined on the slope or adjacent to the reflective surface. In other words, the position of the first pivot point RP1 is often determined in front of, on or behind the reflecting surface adjacent to the reflecting surface of the mirror 10.
- the position of the first pivot point RP1 is often determined to be adjacent to a quarter point or a point at each end of the mirror 10 in the left and right directions.
- the adjusting device 100 may be implemented such that the first pivot point RP1 is located at a position different from the above-described position, and the position of the pair of first pivot points RP1 is adjusted to the curvature adjusting device 100. In this case, it may be determined symmetrically, but may be determined asymmetrically according to the result of the structural analysis.
- the positions of the first elastic body 121 and the first pivot point RP1 may be determined in other ways, such as in accordance with the empirical rules of the experimental method, not by the structural analysis.
- the apparatus for adjusting the curvature of the mirror according to the first embodiment of the present invention has been described as an example of adjusting the curvature to concave the mirror 10, but to adjust the curvature to make the mirror 10 convex Of course, it may be implemented. In this case, it is possible to apply the external force applied to the rotation blocks 120a and 120b in the opposite direction to adjust the concave curvature.
- the pair of support blocks 130 are fixed to the pair of rotation blocks 120a and 120b through screws SW fastened to the screw holes 122 formed in the rotation blocks 120a and 120b, respectively, to provide a mirror 10. And both ends of the mirror block 10a and 120b, and a bending force is applied to both ends of the mirror 10 as the rotation blocks 120a and 120b are rotated.
- the pair of support blocks 130 are first assembled with the mirror 10 to form an assembly, and then installed in the pair of rotation blocks 120a and 120b.
- the assembly is connected to the pair of rotation blocks 120a and 120b.
- at least one of the pair of support blocks 130 is fixed to be adjustable in the rotation block 120b, as shown in FIG. It may be installed in the rotation block 120b through the connection block 131.
- the rotation block 120b has a stepped portion 123 formed at one end thereof in an outer direction thereof, and a fastening hole 123-1 for fastening the screw SW to the stepped portion 123. It is formed vertically, the connection block 131 is provided with a long hole (131-1) formed along the longitudinal direction of the mirror 10 as a hole through which the screw (SW) penetrates, the connection block 131 is a rotation block It can be fixed to the position adjustable to (120b).
- connection block 131 for the pivot block 120b By adjusting the installation position of), it is possible to effectively prevent unnecessary bending deformation in the mirror 10 during installation of the mirror 10.
- the support block 130 is implemented so that the installation position can be adjusted with respect to the rotation block 120b through a connection block 131 which is a separate member, but is not limited thereto.
- the support block 130 may be provided in a 'b' shape and a long hole is formed so as to be directly installed so that the position can be adjusted to the rotation block (120b).
- the driving unit 140 rotates the pair of rotation blocks 120a and 120b symmetrically with each other by applying an external force to the pair of rotation blocks 120a and 120b, respectively. Accordingly, the pair of support blocks 130 rotate with the rotation blocks 120a and 120b to apply symmetrical bending forces to both ends of the mirror 10.
- the driving unit 140 may include a pair of first and second leaf springs 141 and 142 and a pair of drivers 143 connected to the connecting members 141-1, respectively.
- the first leaf spring 141 is fixed to one end of the rotation blocks 120a and 120b in parallel with the mirror 10, and the second leaf spring 142 is connected to the first through the connecting member 141-1.
- One end is fixed to the other end of the first leaf spring 141 side by side in a state spaced apart from the spring 141 by a predetermined distance.
- the pair of drivers 143 serves to press or release the other end of the second leaf spring 142 to the first spring plate 141 by transferring the pressing member 143-1.
- the pressing member 143-1 may have a second leaf spring ( The magnitude of the force applied to the rotation blocks 120a and 120b may be finely adjusted compared to the length of the 141.
- the first leaf spring 141 is pressed by a much shorter length by the elastic deformation of the second leaf spring 142. As the first leaf spring 141 also elastically deforms, the final force transmitted to the rotation blocks 120a and 120b becomes very small.
- the rotation angle of the rotation blocks 120a and 120b may be finely adjusted, and thus the curvature of the mirror 10 may be very finely adjusted.
- the drive unit 140 is implemented in the form including the first and second leaf springs (141, 142), but the number of leaf springs provided is not limited thereto, one or Three or more may be provided.
- the driving unit 140 may be implemented to finely adjust the curvature of the mirror 10 by using various kinds of elastic members instead of the leaf spring.
- the pair of displacement sensors 150 are installed to be connected to the pair of drivers 143, respectively, so that the pair of drivers 143 are connected to the second plate through the pressing member 143-1.
- the displacement which pressurized the spring 142 is measured, respectively.
- the measured value of the displacement sensor 150 Since the measured value of the displacement sensor 150, the rotated values of the rotation blocks 120a and 120b, and the curvature adjustment value of the mirror 10 are all linearly proportional to each other, the measured value of the displacement sensor 150 is confirmed.
- the curvature of the mirror 10 can be adjusted by operating the driver 143.
- the displacement sensor 150 is not an essential component in the apparatus for adjusting the curvature of the mirror according to the present invention, and another sensor for directly measuring the rotation angle of the rotation blocks 120a and 120b may be provided. have.
- the driver 143 of the driving unit 140 is operated to press one end of the second leaf spring 142 with the pressing member 143-1. Then, the second plate spring 142 is elastically deformed as it is pressed by the pressing member 143-1, and the other end connected to the first plate spring 141 and the connecting member 141-1 is lowered.
- the first plate spring 141 is elastically deformed by the lowering of one end of the first leaf spring 141 and a moment is applied to the rotation blocks 120a and 120b connected to the other end thereof.
- the rotation blocks 120a and 120b are elastically deformed by the moment applied through the first leaf spring 141 and rotate about the first pivot point RP1.
- the support block 130 fixed to the rotation blocks 120a and 120b is also rotated.
- the support points SP of the support blocks 130 at both ends of the mirror 10 are moved upwards based on FIG. 8, and the mirrors are supported by the bending force applied through the pair of support blocks 130. 10) concave curvature is adjusted.
- the curvature of the mirror 10 is concave, and the center point MC of the mirror 10 is moved downward relative to both ends of the mirror 10, but this is because of the support points SP of both ends of the mirror 10.
- the position of the center point (MC) of the mirror 10 with respect to the base block 110 is fixed without moving.
- the mirror adjustment system includes a support 200, a position adjusting device 300, an angle adjusting device 400, and the curvature adjusting device 100 as described above.
- the support 200 is installed on the bottom surface and serves to support other components.
- the blocking portion 210 of a predetermined thickness forms a chamber 213 on an upper surface of the support 200.
- the chamber 213 formed by the blocking unit 210 protects the position adjusting device 300, the angle adjusting device 400, and the curvature adjusting device 100 provided therein from the outside, and is an inert gas. Filled with helium or the like is formed in a vacuum, thereby reducing the attenuation of electromagnetic waves by the atmosphere and delaying corrosion of the mirror 10 surface by air.
- the blocking unit 210 is provided with a light entrance port 211 and a light exit port 212 to emit the electromagnetic wave reflected from the mirror 10 so that electromagnetic waves can enter the mirror 10, such a
- the light incident sphere 211 and the light outlet sphere 212 may be formed by a captone film or a beryllium window.
- the position adjusting device 300 is fixedly installed on the upper surface of the support 200 in the chamber 213 through the support frame 220, and before and after the mounting plate 310 provided on the upper side with respect to the support 200, Transfer to left and right and up and down.
- the position adjustment device 300 is provided to adjust the front, rear, left and right tilts.
- the angle adjusting device 400, the curvature adjusting device 100, and the mirror 10, which are provided on the upper side of the installation plate 310, are all moved together by the position adjusting device 300 back and forth, left and right and up and down. The front, rear, left and right tilts are also adjusted.
- the angle adjusting device 400 is fixedly installed on the mounting plate 310, and provided to be able to adjust the rotation angle of the upper surface relative to the lower surface, the curvature adjusting device 100 and the mirror 10 provided on the upper surface Adjust the pitch angle.
- the curvature adjusting device 100 as described above is installed on the upper surface of the angle adjusting device 400, and focuses electromagnetic waves by adjusting the curvature of the installed mirror 10. Since the specific configuration and operation of the curvature adjusting device 100 of the mirror has been sufficiently described above, it will be referred to and a detailed description thereof will be omitted in describing the mirror adjusting system.
- the mirror adjusting system includes a feed for connecting and installing electric wires for controlling driving devices for driving the adjusting device 300, the angle adjusting device 400, and the curvature adjusting device 100 between the inside and the outside of the chamber 213. Feedthrough 500 may be provided.
- the operation of matching the electromagnetic wave incoming through the light incident sphere 211 with the center point MC of the mirror 10 is performed. Since the radiated light is not visible light and the light streaks at this stage are also very small, the relative position of the electromagnetic wave relative to the mirror 10 is measured by measuring the electromagnetic wave reflected from the mirror 10 with a light quantity meter and analyzing a plurality of measured light quantity values. It can be seen.
- the position adjusting device 300 that can adjust the front, rear, left and right positions of the mirror 10 and the tilt of the mirror 10, the angle adjusting device 400 for adjusting the pitch angle of the mirror 10, and the amount of light described above.
- the electromagnetic wave incident on the mirror 10 is matched with the center point MC of the mirror 10.
- the size of the light stem is reduced by performing the operation of focusing the electromagnetic waves reflected from the mirror 10. Since the size of the light stem is a function of not only the curvature of the mirror 10 but also the pitch angle of the mirror 10, the curvature adjusting device 100 and the angle adjusting device 400 are alternately repeatedly used, and the size of the light stem. Finally, by minimizing the curvature and pitch angle of the mirror 10 to minimize the size of the light streaks.
- the apparatus for adjusting the curvature of the mirror according to the present invention is fixed even without adjusting the position of the center point MC of the mirror 10, which has undergone the position adjustment and the angle adjustment, even though the curvature of the mirror 10 is adjusted.
- the operation for injecting electromagnetic waves into the center point MC of the mirror 10 does not need to be redone, thereby greatly simplifying the adjustment process of the mirror 10.
- a mirror adjustment system for a horizontal mirror in which the reflection surface of the mirror 10 is observed from the front side has been described, but the reflection surface of the mirror 10 is observed in a plane or side view.
- the mirror adjustment system for the vertical mirror can be implemented in a similar manner as described above, and installed along with the mirror adjustment system for the horizontal mirror in the chamber 213 of the mirror adjustment system according to the first embodiment of the present invention described above May be used.
- the apparatus 100 for adjusting the curvature of the mirror and the mirror adjusting system having the same, connecting the rotation blocks 120a and 120b provided with the support block 130 to the base block 110.
- the support point SP of the support block 130 with respect to the mirror 10 is moved in the direction of movement of the center point MC of the mirror 10 due to the curvature change. Since it can be moved in the opposite direction with respect to the mirror 10, even if the curvature of the mirror 10 is adjusted, the movement of the center point MC of the mirror 10 due to the curvature change is offset by the movement of the support points SP located at both ends of the mirror 10. Since the absolute displacement of the center point MC of the mirror 10 can be minimized, that is, the position of the center point MC of the mirror 10 can be fixed when the curvature of the mirror 10 is adjusted. You can easily proceed.
- Apparatus for adjusting the curvature of the mirror 100 ′ according to the second embodiment of the present invention includes a base block 110 ′, a pair of rotation blocks 120a ′, 120 b ′, a pair of support blocks 130, and a driving unit. 140 'and the displacement sensor 150 are included.
- the base block 110 ' is a member that becomes the body of the apparatus, and is formed in a rectangular tubular shape so that the driving unit 140' can be installed therein, and an opening 111 having a mirror 10 located at one side thereof. ) Is formed.
- a pair of ribs 120a 'and 120b' may be connected to each other through a plurality of first elastic bodies 121. 112 is formed to face each other.
- a supporting member 113 is installed at the center of the base block 110 'to install the driver 143' of the driving unit 140 'to be described later.
- the shape of the base block 110 ′ is exemplary and may be implemented in various other forms.
- the pair of pivot blocks 120a 'and 120b' are connected to the ribs 112 of the base block 110 'through first elastic bodies 121 formed of cantilevered elastic materials, respectively, and the base blocks 110'.
- the first pivot point RP1 which is a connecting portion of the first elastic body 121, may be rotated about each other.
- the pair of rotating blocks (120a ', 120b') is provided with a downwardly extending shape, as shown in Figure 10, the external force from the drive unit 140 'is implemented to be applied to the extended end.
- the pair of rotating blocks 120a 'and 120b' are applied with an external force in one direction to the extended ends thereof by the driving unit 140 ', respectively, by the first elastic body 121 by the external force. Is rotated while elastically deforming. When the applied external force is released, the pair of rotating blocks 120a 'and 120b' are returned to their original positions by the elastic restoring force of the first elastic body 121, respectively.
- the first elastic body 121 is a mirror due to the change in the curvature of the mirror 10, the support point (SP) of the support block 130 with respect to the mirror 10 as the rotating blocks (120a ', 120b') is rotated
- the rotation blocks 120a 'and 120b' may be moved in a direction opposite to the moving direction of the center point MC (hereinafter, the center point of the mirror is defined as the center point of the mirror reflection surface) of the base block 110 '. ).
- the first elastic body 121 is provided in a cantilever shape and is connected to the lower side of the rib 112 so as to be perpendicular to the reflective surface of the mirror 10, thereby providing a front surface.
- the first pivot point (RP1) is provided to be located on the front side adjacent to the reflective surface of the mirror (10).
- the movement of the center point MC of the mirror 10 is offset by the movement of the support point SP, which is the opposite direction, so that the absolute displacement of the center point MC of the mirror 10 relative to the base block 110 'is almost There will be no.
- the curvature of the mirror 10 is adjusted by rotating the rotation blocks 120a 'and 120b' due to the embodiment of the first elastic body 121 and the position of the first pivot point RP1.
- the position of the center point MC of the mirror 10 may be fixed without being moved.
- the first elastic body 121 is integral with the base block 110' and the rotation blocks 120a 'and 120b' in the form of a cantilever.
- the present invention is not limited thereto, and may be manufactured as a separate member to be fixedly installed on the base block 110 'and the rotation block 120a' and 120b ', respectively. May be
- first elastic bodies 121 are provided in total, two for each of the pair of rotation blocks 120a 'and 120b', but the number of the first elastic bodies 121 is not limited thereto.
- the first elastic body 121 is implemented to be perpendicular to the reflective surface of the mirror 10 when viewed from the front, but is not limited thereto. Instead, the angle formed by the reflective surface of the mirror 10 may be implemented at a different angle or horizontally with respect to the reflective surface of the mirror 10. In this case, the position of the first elastic body 121 should be appropriately changed. something to do.
- the movement of the center point (MC) of the mirror 10 may be determined to the position where the absolute displacement of the center point (MC) of the mirror 10 with respect to the base block (110 ') is minimized.
- the position of the first pivot point RP1 is in the vertical direction, as shown in FIG. It is often determined on the slope or adjacent to the reflective surface. In other words, the position of the first pivot point RP1 is often determined in front of, on or behind the reflecting surface adjacent to the reflecting surface of the mirror 10.
- the position of the first pivot point RP1 is often determined to be adjacent to a quarter point or a point at each end of the mirror 10 in the left and right directions.
- the curvature adjustment of the mirror according to the present invention may be implemented such that the first pivot point RP1 is located at a position different from the position described above, and the position of the pair of first pivot points RP1 is the curvature adjusting device 100'. It may be determined symmetrically in terms of, but may be determined asymmetrically depending on the result of the structural analysis.
- the positions of the first elastic body 121 and the first pivot point RP1 may be determined in other ways, such as in accordance with the empirical rules of the experimental method, not by the structural analysis.
- the apparatus for adjusting the curvature of the mirror 100 ′ according to the second embodiment of the present invention has been described taking the case of adjusting the curvature so that the mirror 10 is concave, but the mirror 10 is convex.
- it may be implemented to adjust the curvature.
- the external force applied to the rotation blocks 120a 'and 120b' may be applied in the opposite direction to adjust the concave curvature.
- the pair of support blocks 130 are fixedly installed in the pair of rotation blocks 120a 'and 120b' through screws SW fastened to the screw holes 122 formed in the rotation blocks 120a 'and 120b', respectively. To support both ends of the mirror 10 and apply bending force to both ends of the mirror 10 as the rotation blocks 120a 'and 120b' are rotated.
- the pair of support blocks 130 are first assembled with the mirror 10 to form an assembly, and then installed on the pair of rotation blocks 120a 'and 120b', and the assembly is connected to the pair of rotation blocks 120a. At least one of the pair of support blocks 130 is located at the rotation block 120b ', as shown in FIG. 10, in order to prevent initial deformation of the mirror 10 when installed at the' 120b '. It is preferable to be installed in the rotation block (120b ') through the connection block 131 is fixed to be adjustable.
- the rotation block 120b ' has a stepped portion 123 formed at one end thereof in an outer direction thereof, and a fastening hole 123-1 to allow the screw SW to be fastened to the stepped portion 123.
- the connection block 131 is provided with a long hole (131-1) formed along the longitudinal direction of the mirror 10 as a hole through which the screw (SW) penetrates, the connection block 131 is rotated It may be fixed to the block (120b ') adjustable position.
- the support block 130 is implemented so that the installation position can be adjusted with respect to the rotation block 120b 'through a connecting block 131 which is a separate member, but is not limited thereto. no.
- the support block 130 may be provided in a 'b' shape and a long hole is formed so as to be directly installed so that the position can be adjusted to the rotating block (120b).
- the driving unit 140 ' rotates the pair of rotation blocks 120a' and 120b 'symmetrically with each other by applying an external force to the pair of rotation blocks 120a' and 120b ', respectively. Accordingly, the pair of support blocks 130 rotates together with the rotation blocks 120a 'and 120b' to apply symmetrical bending forces to both ends of the mirror 10.
- the drive unit 140 ′ may include a transfer member 144, a guide unit 145, a single driver 143 ′, and a pair of transfer units 146.
- the transfer member 144 is provided in a plate shape having a predetermined width and length, and a driving shaft 143-2 of the driver 143 ′, which will be described later, is coupled to a central portion thereof so that the driving shaft 143-2 is a driver ( Reciprocated by 143 ', it is provided to be reciprocated in one direction.
- the transfer member 144 is coupled to the drive shaft 143-2, but is not limited thereto, and the drive shaft 143-2 may be in simple contact with the transfer member 144. It may be implemented. Even if this is implemented, the transfer member 144 may be raised by the pressing force of the drive shaft 143-2 and lowered and returned by the elastic force of the elastic member 146-3, which will be described later.
- the transfer member 144 is provided with a groove portion into which an end of the drive shaft 143-2 may be inserted into a contact portion with the drive shaft 143-2, thereby driving the drive shaft 143-2 and the transfer member 144. ) May be implemented to maintain a stable contact state.
- the guide unit 145 serves to stably guide the reciprocation of the transfer member 144.
- the guide unit 145 includes a plurality of guide shafts 145-1 and a plurality of guide bodies 145-2.
- the plurality of guide shafts 145-1 are provided in a shaft shape, and are positioned symmetrically with respect to the pair of transmission units 146 on the side of the driver 143 ′ installed in the support member 113, and a transport member. It is fixed to the support member 113 side by side along the transport direction of (144).
- the plurality of guide bodies 145-2 are engaged with the plurality of guide shafts 145-1 and reciprocated to each other, and are coupled to the transfer member 144.
- the plurality of guide bodies 145-2 are provided symmetrically on both sides of the transfer member 144 about the connection portion of the drive shaft 143-2 and the transfer member 144 provided in the driver 143 ′. As a result, the transfer member 144 can be reciprocally transported stably.
- the guide shaft 145-1 is provided in the shape of a shaft, four pairs are provided on each side of each transmission unit 146, and the guide body 145-2 engaged therewith. Four are provided, but the shape and number of provided is not limited thereto.
- the guide shaft 145-1 may be provided in a straight rail shape, and the guide shaft 145-1 and the guide body 145-2 may be provided in a singular number instead of a plurality.
- the driver 143 ' is fixedly installed on the support member 113 formed at the center of the base block 110', and is provided as a single unit and connected to and transported through the transfer member 144 and the drive shaft 143-2.
- the member 144 is reciprocated.
- the driver 143 ' is provided with a pair of rotating blocks 120a' and 120b 'through a pair of transfer units 146 connected to the transfer member 144 by reciprocating the transfer member 144 even if one is provided. External force can be applied to
- the pair of transmission units 146 described above transmits the transfer force of the conveying member 144 by the driver 143 'to the pair of rotating blocks 120a' and 120b ', respectively, to provide a pair of rotating blocks 120a. ', 120b') are rotated respectively.
- the pair of delivery units 146 may include a delivery block 146-1 and an elastic member 146-3, respectively.
- the transfer block 146-1 is connected to the base block 110 ′ through a second elastic body 146-2, and a connecting body 146-4 and an elastic member ( 146-3 is connected to the conveying member 144 by a hinge (HG), the conveying force of the conveying member 144 is applied as the connection portion of the base block 110 'and the second elastic body (146-2) Rotating around the second pivot point RP2 is provided to apply an external force or elastically return to the rotation block (120a ', 120b').
- the transfer block 146-1 smoothly makes sliding contact with the rotation blocks 120a 'and 120a' when applying an external force to the rotation blocks 120a 'and 120b' and elastically returns them.
- Sliding member 146-5 is provided so that the space
- the sliding member 146-5 is provided with a contact portion with a curved surface so as to be in contact with the end portions of the extended shapes of the rotation blocks 120a 'and 120b', respectively.
- the sliding member 146-5 may be provided to be freely rotatable in the transfer block 146-1.
- the rotation block (120a ', 120b') When the sliding member 146-5 is described in more detail with respect to the role of forming a distance from the rotation block (120a ', 120b') corresponding to a predetermined design value, the rotation block (120a ', 120b'), The first elastic body 121, the transfer block 146-1 and the second elastic body 146-2 may be integrally formed with the base block 110 ′ through wire discharge machining, in which case the rotation block 120 a ′. , 120b ') and the transfer block 146-1 are inaccurate depending on the diameter of the wire used for wire discharge machining rather than the design value.
- the outer shape of the sliding member (146-5) is accurately machined and installed in the transmission block (146-1), the transmission block (146-1) and the rotation block (120a) by the sliding member (146-5). ', 120b') may be accurately set to correspond to the design value.
- the sliding member 146-5 is installed in the transfer block 146-1, but the rotation blocks 120a 'and 120b' adjacent to the transfer block 146-1. It may be provided at the end of the extended shape.
- the second elastic body 146-2 is formed integrally with the base block 110 'and the transfer block 146-1 in the form of a cantilever, but is not limited thereto.
- the member may be manufactured to be fixed to the base block 110 ′ and the transfer block 146-1, respectively, and the shape may be variously modified without being limited to cantilever beams.
- the elastic member 146-3 absorbs the conveying distance of the conveying member 144 while the conveying block 146-1 is slightly rotated and its length is changed through the elastic deformation even if the conveying member 144 is conveyed a lot.
- the transfer distance of the transfer member 144 that is, the magnitude of the force transmitted to the transfer block 146-1 as compared to the displacement of the transfer member 144
- the angle at which the transfer block 146-1 is rotated the rotation angles of the rotation blocks 120a 'and 120b' and the curvature of the mirror 10 can be finely adjusted. Thereby, the precision of the curvature adjustment of the mirror 10 can be improved.
- the elastic member 146-3 is provided with an element that is variable in length by elastic deformation, such as a tension spring, one end of the transfer block 146 through a connecting member 146-4 connected by a hinge (HG) -1), the other end of which is connected to one side of the conveying member 144 by a hinge HG.
- an element that is variable in length by elastic deformation such as a tension spring
- the elastic member 146-3 may be formed of an element having a different elasticity from that of the tension spring, and a number thereof may also be provided.
- the elastic member 146-3 and the connecting member 146-4 are components for improving the precision or ease of assembly of the curvature adjustment of the mirror 10, and the curvature adjusting device 100 'of the mirror according to the present invention. It is not an essential component of.
- the pair of transfer unit 146 is implemented to include a transfer block 146-1 installed in the base block 110 'by the second elastic body 146-2.
- the transfer unit 146 may appropriately transfer the transfer force to the rotation blocks 120a 'and 120b' so that the rotation blocks 120a 'and 120b' may be rotated by the transfer force of the transfer member 144.
- the implementation is sufficient, and the implementation manner is not limited thereto.
- the displacement sensor 150 is installed to be connected to the drive shaft 143-2 of the driver 143 ′, thereby displacing the displacement of the drive shaft 143-2, that is, the transfer member 144.
- the measured value of the displacement sensor 150 Since the measured value of the displacement sensor 150, the rotated values of the rotation blocks 120a 'and 120b', and the curvature adjustment value of the mirror 10 are all linearly proportional to each other, the measured value of the displacement sensor 150 is measured.
- the curvature of the mirror 10 can be adjusted by operating the driver 143 '.
- the displacement sensor 150 is not an essential component in the apparatus for adjusting the curvature of the mirror according to the present invention, and another sensor that directly measures the rotation angles of the rotation blocks 120a 'and 120b' may be replaced. May be
- each of the first pivot points RP1 for the pair of rotation blocks 120a' and 120b ' is the mirror 10. It is provided symmetrically with respect to the center point (MC) of, in this case it is difficult to obtain the elliptic curvature required when focusing the electromagnetic wave by adjusting the curvature of the mirror 10 with a single driver (143 ').
- a mirror width mirror whose width is changed so that it can be deformed to elliptic curvature when moments of the same magnitude are applied to both ends.
- each first pivot point RP1 relative to the pair of pivot blocks 120a 'and 120b' is obtained through dynamic structural analysis to obtain an elliptic curvature. It would be desirable to implement asymmetrically.
- the driving member 143 ′ of the driving unit 140 ′ is operated to refer to the conveying member 144 connected to the driving shaft 143-2 with reference to FIG. 13. To the upper side. Then, the conveying member 144 is conveyed upward while being stably guided by the guide part 145 formed of the guide shaft 145-1 and the guide body 145-2.
- the length of the elastic member 146-3 connected to both sides of the transfer member 144 is elastically deformed under tensile force, and the length is increased, and the transfer force of the transfer member 144 is reduced in its size.
- the second elastic body 146-2 is elastically deformed and the transfer block 146-1 rotates about the second pivot point RP2.
- the transfer block 146-1 rotates about the second pivot point RP2
- the extended ends of the pivot blocks 120a 'and 120b' are pressed through the sliding member 146-5.
- the rotation blocks 120a 'and 120b' rotate about the first pivot point RP1.
- the support block 130 fixed to the rotation blocks 120a 'and 120b' is also rotated.
- the curvature of the mirror 10 is concave, and the center point MC of the mirror 10 is moved downward relative to both ends of the mirror 10, but this is because of the support points SP of both ends of the mirror 10.
- the position of the center point MC of the mirror 10 with respect to the base block 110 ' is fixed without being moved.
- Mirror adjustment system comprises a support 200, the position adjusting device 300, the angle adjusting device 400 and the above-described mirror curvature adjusting device (100 '). .
- the support 200 is installed on the bottom surface and serves to support other components.
- the blocking portion 210 of a predetermined thickness forms a chamber 213 on an upper surface of the support 200.
- the chamber 213 formed by the blocking unit 210 protects the position adjusting device 300, the angle adjusting device 400, and the curvature adjusting device 100 ′ provided therein from the outside, and at the same time. Is filled with helium or the like, which is an inert gas, or is formed in a vacuum, thereby reducing the attenuation of electromagnetic waves by the atmosphere and delaying corrosion of the mirror 10 surface by air.
- the blocking unit 210 is provided with a light entrance port 211 and a light exit port 212 to emit the electromagnetic wave reflected from the mirror 10 so that electromagnetic waves can enter the mirror 10, such a
- the light incident sphere 211 and the light outlet sphere 212 may be formed by a captone film or a beryllium window.
- the position adjusting device 300 is fixedly installed on the upper surface of the support 200 in the chamber 213 through the support frame 220, and before and after the mounting plate 310 provided on the upper side with respect to the support 200, Transfer to left and right and up and down.
- the position adjusting device 300 also adjusts the front, rear, left and right tilts of the installation plate 310. It is provided to be.
- the angle adjusting device 400, the curvature adjusting device 100 ′ and the mirror 10 which are provided on the upper side of the installation plate 310 are all moved forward, backward, left and right together by the position adjusting device 300. Conveyed, and the front and rear and right and left tilts are also adjusted.
- the angle adjusting device 400 is fixedly installed on the mounting plate 310, and provided to be able to adjust the rotation angle of the upper surface with respect to the lower surface, the curvature adjusting device 100 'and the mirror 10 provided on the upper surface Adjust the pitch angle.
- the curvature adjusting device 100 ′ adjusts the curvature of the mirror 10 to focus the electromagnetic waves. Since the specific configuration and operation of the mirror curvature adjusting device 100 ′ has been sufficiently described above, it will be referred to and a detailed description thereof will be omitted in describing the mirror adjusting system.
- the mirror adjustment system connects and installs electric wires for controlling driving devices for driving the position adjusting device 300, the angle adjusting device 400, and the curvature adjusting device 100 ′ between the inside and the outside of the chamber 213. Feedthroughs 500 may be provided.
- the operation of matching the electromagnetic wave incoming through the light incident sphere 211 with the center point MC of the mirror 10 is performed. Since the radiated light is not visible light and the light streaks at this stage are also very small, the position of the mirror 10 relative to the electromagnetic wave is measured by measuring the electromagnetic wave passing through the mirror 10 with a light quantity meter and analyzing a plurality of measured light quantity values. It can be seen.
- the position adjusting device 300 that can adjust the front, rear, left and right positions of the mirror 10 and the tilt of the mirror 10, the angle adjusting device 400 for adjusting the pitch angle of the mirror 10, and the amount of light described above.
- the electromagnetic wave incident on the mirror 10 is matched with the center point MC of the mirror 10.
- the size of the light stem is reduced by performing the operation of focusing the electromagnetic waves reflected from the mirror 10. Since the size of the light stem is a function of not only the curvature of the mirror 10, but also the pitch angle of the mirror 10, the curvature adjusting device 100 'and the angle adjusting device 400 are alternately repeatedly used, and the Finally, the size of the light streaks is minimized by searching for the curvature and the pitch angle of the mirror 10 to minimize the size.
- the mirror adjustment system according to the present invention reflects from the mirror 10 while adjusting only two input variables for a single driver for adjusting the curvature of the mirror 10 and a driver for adjusting the pitch angle of the mirror 10. Since the electromagnetic waves can be focused, the work can be easily performed compared to the conventional mirror adjustment system that requires three input parameters to be adjusted.
- the curvature adjusting device 100 ′ provided in the mirror adjusting system according to the present invention even if the curvature of the mirror 10 is adjusted, the position of the center point MC of the mirror 10 which has undergone the position adjustment and the angle adjustment beforehand is adjusted. Since it is fixed without moving, it is not necessary to perform the operation for injecting electromagnetic waves into the center point MC of the mirror 10 like the existing curvature adjusting device, so that the process of adjusting the mirror 10 can be greatly simplified.
- the mirror adjustment system for the horizontal mirror in which the reflective surface of the mirror 10 is observed from the front has been described, but the vertical mirror in which the reflective surface of the mirror 10 is observed in the plane
- the mirror adjustment system for the implementation can be implemented in a similar manner as described above, and used in conjunction with the mirror mirror adjustment system for the horizontal mirror in the chamber 213 of the mirror adjustment system according to the second embodiment of the present invention described above It may be.
- a pair of rotating blocks 120a' and 120b ' is used to adjust the curvature of the mirror 10.
- the driving unit 140 ' which rotates is provided with a pair of the transmission unit 146 and the conveying member 144 to be implemented as a single driver 143', thereby adjusting the curvature of the mirror 10 Since only a single input of the driver 143 'can be easily proceeded, the adjustment process of the mirror 10 for focusing electromagnetic waves can be easily performed, and the transfer member 144 of the driver 143'
- the feed force is applied to the pair of transfer blocks 146-1 through the pair of elastic members 146-3, respectively, so that the rotation blocks 120a 'and 120b' are compared with the transfer displacement of the transfer member 144.
- the adjustment of the curvature of the mirror 10 can be performed very finely.
- the first elastic body 121 connecting the rotating blocks 120a 'and 120b' provided with the support block 130 to the base block 110 ' is adjusted to the mirror 10 when the curvature of the mirror 10 is adjusted.
- the support point SP of the support block 130 with respect to the movement direction of the center point MC of the mirror 10 due to the curvature change is provided so that it can be moved, thereby adjusting the curvature of the mirror 10 10) Since the position of the center point (MC) can be fixed, the mirror 10 can be easily adjusted.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Rear-View Mirror Devices That Are Mounted On The Exterior Of The Vehicle (AREA)
Abstract
Description
Claims (19)
- 거울 양단에 굽힘력을 인가 또는 해제하여 곡률을 조정하는 장치에 있어서,베이스블록;상기 베이스블록에 하나 이상의 제1탄성체를 통해 각각 연결 구비되고, 외력이 인가 또는 해제됨에 따라 상기 베이스블록과 상기 제1탄성체의 연결부분을 중심으로 회동 또는 탄성 복귀하는 한 쌍의 회동블록;상기 한 쌍의 회동블록에 각각 설치되어 상기 거울의 양단을 지지하며, 상기 한 쌍의 회동블록이 회동됨에 따라 상기 거울의 양단에 굽힘력을 인가하는 한 쌍의 지지블록; 및상기 한 쌍의 회동블록을 회동시키는 구동부;를 포함하되,상기 제1탄성체는, 상기 회동블록이 회동됨에 따라 상기 거울에 대한 상기 지지블록의 지지점이 곡률 변화에 의한 상기 거울의 중심점의 이동 방향에 대해 반대 방향으로 이동될 수 있게 상기 회동블록을 상기 베이스블록에 연결하는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제1항에 있어서,상기 제1탄성체는,외팔보 형태로 구비되고, 상기 베이스블록의 일측에 형성된 개방구에 위치되는 상기 거울의 반사면에 대해 직각을 이루며, 상기 베이스블록과의 연결부분인 제1회동점이 정면에서 바라볼 때에 상기 거울의 반사면 상 또는 상기 거울의 반사면에 인접되게 구비되는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제1항 또는 제2항에 있어서,상기 회동블록과 상기 제1탄성체는,상기 베이스블록과 일체로 형성되는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제1항 또는 제2항에 있어서,상기 한 쌍의 지지블록 중 적어도 하나는,상기 회동블록에 위치 조절될 수 있게 고정되는 연결블록을 통해 상기 회동블록에 설치되는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제1항 또는 제2항에 있어서,상기 구동부는,상기 한 쌍의 회동블록을 각각 회동시키도록 한 쌍이 구비되며,일단이 상기 회동블록에 고정된 제1판스프링;상기 제1판스프링에 나란하게 소정의 거리만큼 이격된 상태로 상기 제1판스프링의 타단에 고정되도록 연결부재를 통해 설치되는 제2판스프링; 및상기 제2판스프링의 타단부를 상기 제1판스프링 측으로 가압 또는 해제하는 구동기;를 각각 포함하는 것을 특징으로 하는 거울의 곡률 조정장치.
- 거울 양단에 굽힘력을 인가 또는 해제하여 곡률을 조정하는 장치에 있어서,베이스블록;상기 베이스블록에 하나 이상의 제1탄성체를 통해 각각 연결 구비되고, 외력이 인가 또는 해제됨에 따라 상기 베이스블록과 상기 제1탄성체의 연결부분을 중심으로 회동 또는 탄성 복귀하는 한 쌍의 회동블록;상기 한 쌍의 회동블록에 각각 설치되어 상기 거울의 양단을 지지하며, 상기 한 쌍의 회동블록이 회동됨에 따라 상기 거울의 양단에 굽힘력을 인가하는 한 쌍의 지지블록; 및일 방향으로 왕복 이송되게 구비된 이송부재, 상기 이송부재를 이송하는 단일의 구동기, 및 상기 이송부재의 양단부에 각각 구비되며 상기 구동기에 의한 상기 이송부재의 이송력을 상기 한 쌍의 회동블록에 전달하여 상기 한 쌍의 회동블록을 각각 회동시키는 한 쌍의 전달부를 포함하여 이루어진 구동부;를 포함하되,상기 제1탄성체는, 상기 회동블록이 회동됨에 따라 상기 거울에 대한 상기 지지블록의 지지점이 곡률 변화에 의한 상기 거울의 중심점의 이동 방향에 대해 반대 방향으로 이동될 수 있게 상기 회동블록을 상기 베이스블록에 연결하는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제6항에 있어서,상기 한 쌍의 전달부는,상기 베이스블록에 하나 이상의 제2탄성체를 통해 각각 연결 구비되고, 상기 이송부재에 힌지로 연결되어 상기 이송부재의 이송력이 인가 또는 해제됨에 따라 상기 베이스블록과 상기 제2탄성체의 연결부분을 중심으로 회동하여 상기 회동블록에 외력을 인가하거나 탄성 복귀하는 전달블록;을 각각 포함하는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제7항에 있어서,상기 한 쌍의 전달부는,탄성 변형으로 길이가 가변되는 탄성부재;를 각각 더 포함하며,상기 전달블록은 상기 탄성부재를 통해 상기 이송부재에 연결되는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제6항 내지 제8항 중 어느 한 항에 있어서,상기 구동부는,상기 이송부재의 이송방향을 따라 상기 베이스블록에 고정된 하나 이상의 가이드축, 및 상기 하나 이상의 가이드축에 각각 맞물려 왕복 이송되며 상기 이송부재에 결합된 하나 이상의 가이드체를 포함하여 상기 이송부재의 왕복 이송을 안내하는 가이드부;를 더 포함하는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제7항에 있어서,상기 전달블록과 상기 회동블록 중 어느 하나는,상기 전달블록이 상기 회동블록에 외력을 인가하거나 탄성 복귀할 때에 상기 회동블록과의 슬라이딩 접촉을 원활하게 하고, 상기 회동블록과 상기 전달블록의 간격을 소정의 설계값에 대응되게 형성하며, 상기 전달블록 또는 상기 회동블록과의 접촉부위가 곡면인 슬라이딩 부재;를 포함하는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제7항에 있어서,상기 전달블록과 상기 제2탄성체는,상기 베이스블록과 일체로 형성되는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제6항 내지 제8항 중 어느 한 항에 있어서,상기 제1탄성체는,외팔보 형태로 구비되고, 상기 베이스블록의 일측에 형성된 개방구에 위치되는 상기 거울의 반사면에 대해 직각을 이루며, 상기 베이스블록과의 연결부분인 제1회동점이 정면에서 바라볼 때에 상기 거울의 반사면 상 또는 상기 거울의 반사면에 인접되게 구비되는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제6항 내지 제8항 중 어느 한 항에 있어서,상기 회동블록과 상기 제1탄성체는,상기 베이스블록과 일체로 형성되는 것을 특징으로 하는 거울의 곡률 조정장치.
- 제6항 내지 제8항 중 어느 한 항에 있어서,상기 한 쌍의 지지블록 중 적어도 하나는,상기 회동블록에 위치 조절될 수 있게 고정되는 연결블록을 통해 상기 회동블록에 설치되는 것을 특징으로 하는 거울의 곡률 조정장치.
- 거울의 위치, 각도 및 곡률을 조정하는 시스템에 있어서,바닥면에 설치된 지지대;상기 지지대에 고정 설치되며, 상기 지지대에 대해 설치플레이트를 전후, 좌우 및 상하로 이송하고 기울기를 조정하는 위치 조정장치;상기 설치플레이트에 고정 설치되며, 하면에 대해 상면의 회전 각도를 조정하는 각도 조정장치; 및상기 각도 조정장치의 상면에 설치되는 베이스블록, 상기 베이스블록에 하나 이상의 제1탄성체를 통해 각각 연결 구비되고, 외력이 인가 또는 해제됨에 따라 상기 베이스블록과 상기 제1탄성체의 연결부분을 중심으로 회동 또는 탄성 복귀하는 한 쌍의 회동블록, 상기 한 쌍의 회동블록에 각각 설치되어 상기 거울의 양단을 지지하며, 상기 한 쌍의 회동블록이 회동됨에 따라 상기 거울의 양단에 굽힘력을 인가하는 한 쌍의 지지블록, 및 상기 한 쌍의 회동블록을 회동시키는 구동부를 포함하는 곡률 조정장치;를 포함하되,상기 곡률 조정장치의 상기 제1탄성체는, 상기 회동블록이 회동됨에 따라 상기 거울에 대한 상기 지지블록의 지지점이 곡률 변화에 의한 상기 거울의 중심점의 이동 방향에 대해 반대 방향으로 이동될 수 있게 상기 회동블록을 상기 베이스블록에 연결하는 것을 특징으로 하는 거울 조정시스템.
- 제15항에 있어서,상기 곡률 조정장치의 상기 제1탄성체는,외팔보 형태로 구비되고, 상기 베이스블록의 일측에 형성된 개방구에 위치되는 상기 거울의 반사면에 대해 직각을 이루며, 상기 베이스블록과의 연결부분인 제1회동점이 정면에서 바라볼 때에 상기 거울의 반사면 상 또는 상기 거울의 반사면에 인접되게 구비되는 것을 특징으로 하는 거울 조정시스템.
- 거울의 위치, 각도 및 곡률을 조정하는 시스템에 있어서,바닥면에 설치된 지지대;상기 지지대에 고정 설치되며, 상기 지지대에 대해 설치플레이트를 전후, 좌우 및 상하로 이송하고 기울기를 조정하는 위치 조정장치;상기 설치플레이트에 고정 설치되며, 하면에 대해 상면의 회전 각도를 조정하는 각도 조정장치; 및상기 각도 조정장치의 상면에 설치되는 베이스블록, 상기 베이스블록에 하나 이상의 제1탄성체를 통해 각각 연결 구비되고, 외력이 인가 또는 해제됨에 따라 상기 베이스블록과 상기 제1탄성체의 연결부분을 중심으로 회동 또는 탄성 복귀하는 한 쌍의 회동블록, 상기 한 쌍의 회동블록에 각각 설치되어 상기 거울의 양단을 지지하며, 상기 한 쌍의 회동블록이 회동됨에 따라 상기 거울의 양단에 굽힘력을 인가하는 한 쌍의 지지블록; 및 상기 한 쌍의 회동블록을 회동시키는 구동부를 포함하는 거울의 곡률 조정장치;를 포함하되,상기 구동부는, 일 방향으로 왕복 이송되게 구비된 이송부재, 상기 이송부재를 왕복 이송하는 단일의 구동기, 및 상기 이송부재의 양단부에 각각 구비되며 상기 구동기에 의한 상기 이송부재의 이송력을 상기 한 쌍의 회동블록에 전달하여 상기 한 쌍의 회동블록을 각각 회동시키는 한 쌍의 전달부를 포함하여 이루어지고,상기 제1탄성체는, 상기 회동블록이 회동됨에 따라 상기 거울에 대한 상기 지지블록의 지지점이 곡률 변화에 의한 상기 거울의 중심점의 이동 방향에 대해 반대 방향으로 이동될 수 있게 상기 회동블록을 상기 베이스블록에 연결하는 것을 특징으로 하는 거울 조정시스템.
- 제17항에 있어서,상기 한 쌍의 전달부는,상기 베이스블록에 하나 이상의 제2탄성체를 통해 각각 연결 구비되고, 상기 이송부재에 힌지로 연결되어 상기 이송부재의 이송력이 인가 또는 해제됨에 따라 상기 베이스블록과 상기 제2탄성체의 연결부분을 중심으로 회동하여 상기 회동블록에 외력을 인가하거나 탄성 복귀하는 전달블록;을 각각 포함하는 것을 특징으로 하는 거울 조정시스템.
- 제18항에 있어서,상기 한 쌍의 전달부는,탄성 변형으로 길이가 가변되는 탄성부재;를 각각 더 포함하며,상기 전달블록은 상기 탄성부재를 통해 상기 이송부재에 연결되는 것을 특징으로 하는 거울 조정시스템.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013557638A JP6018592B2 (ja) | 2011-03-08 | 2012-02-22 | ミラーの曲率調整装置及びこれを備えたミラー調整システム |
US14/008,570 US9435999B2 (en) | 2011-03-08 | 2012-02-22 | Device for adjusting curvature of mirror while avoiding movement of central point of mirror, and mirror adjustment system comprising same |
EP12755269.3A EP2685461B1 (en) | 2011-03-08 | 2012-02-22 | Device for adjusting curvature of mirror, and mirror adjustment system comprising same |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020110020364A KR101156563B1 (ko) | 2011-03-08 | 2011-03-08 | 거울의 곡률 조정장치 및 이를 구비한 거울 조정시스템 |
KR10-2011-0020364 | 2011-03-08 | ||
KR10-2011-0039126 | 2011-04-26 | ||
KR1020110039126A KR101156564B1 (ko) | 2011-04-26 | 2011-04-26 | 단일 구동기를 가진 거울의 곡률 조정장치 및 이를 구비한 거울 조정시스템 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2012121499A2 true WO2012121499A2 (ko) | 2012-09-13 |
WO2012121499A3 WO2012121499A3 (ko) | 2012-11-08 |
Family
ID=46798624
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2012/001350 WO2012121499A2 (ko) | 2011-03-08 | 2012-02-22 | 거울의 곡률 조정장치 및 이를 구비한 거울 조정시스템 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9435999B2 (ko) |
EP (1) | EP2685461B1 (ko) |
JP (1) | JP6018592B2 (ko) |
WO (1) | WO2012121499A2 (ko) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103529537A (zh) * | 2013-10-21 | 2014-01-22 | 中国科学院光电技术研究所 | 一种运动平台上平面反射镜的支撑结构 |
JP2014085194A (ja) * | 2012-10-23 | 2014-05-12 | Jtec Corp | 形状可変x線ミラーシステム |
US9150157B1 (en) | 2014-04-14 | 2015-10-06 | Ford Global Technologies, Llc | Convertible vanity mirror assembly |
CN115097592A (zh) * | 2022-07-27 | 2022-09-23 | 洛伦兹(北京)科技有限公司 | 镜片角度调节装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9874817B2 (en) | 2013-08-26 | 2018-01-23 | Nikon Corporation | Microelectromechanical mirror assembly |
CN112635095B (zh) * | 2020-12-09 | 2022-07-19 | 中国科学院上海应用物理研究所 | 一种动态压弯调节装置及动态稳定微米聚焦*** |
FR3117618B1 (fr) * | 2020-12-11 | 2022-12-02 | Commissariat Energie Atomique | Actionneur de couple et élément de transmission associé. |
CN112596198B (zh) * | 2020-12-28 | 2022-06-21 | 中国科学院长春光学精密机械与物理研究所 | 一种大口径拼接式反射镜的曲率误差调整装置及其方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57135037A (en) * | 1981-02-13 | 1982-08-20 | Hitachi Ltd | Mechanism for introducing linear motion in vacuum |
JPH05346498A (ja) * | 1992-06-16 | 1993-12-27 | Nkk Corp | ミラ−装置 |
FR2703777A1 (fr) * | 1993-04-06 | 1994-10-14 | Commissariat Energie Atomique | Lame à rayon de courbure réglable et monochromateur utilisant cette lame. |
DE4425594C2 (de) * | 1994-07-06 | 1999-07-29 | Deutsches Elektronen Synchr | Monochromatorkristall-Einrichtung für Synchrotronstrahlung |
JPH08152575A (ja) * | 1994-09-30 | 1996-06-11 | Toppan Printing Co Ltd | 光ビーム偏向器 |
JPH08162300A (ja) * | 1994-12-07 | 1996-06-21 | Ishikawajima Harima Heavy Ind Co Ltd | 分光器 |
JPH07294699A (ja) * | 1995-05-29 | 1995-11-10 | Hitachi Ltd | 全反射鏡装置 |
JPH09251098A (ja) * | 1996-03-13 | 1997-09-22 | Kawasaki Heavy Ind Ltd | 全反射ミラーの曲率調整機構 |
US5784925A (en) | 1996-12-13 | 1998-07-28 | Etec Systems, Inc. | Vacuum compatible linear motion device |
JPH11162807A (ja) * | 1997-11-25 | 1999-06-18 | Nec Corp | X線露光装置の倍率補正方法及びその装置 |
JP2001059896A (ja) * | 1999-08-23 | 2001-03-06 | Ishikawajima Harima Heavy Ind Co Ltd | 放射光ビームライン分光器 |
JP2002131490A (ja) * | 2000-10-24 | 2002-05-09 | Ishikawajima Harima Heavy Ind Co Ltd | 集光形分光器 |
KR100453657B1 (ko) * | 2002-01-23 | 2004-10-20 | 에이엔지 주식회사 | 진공내부의 직선이동장치 |
US8390912B2 (en) * | 2007-01-10 | 2013-03-05 | Seiko Epson Corporation | Actuator, optical scanner and image forming device |
-
2012
- 2012-02-22 US US14/008,570 patent/US9435999B2/en active Active
- 2012-02-22 JP JP2013557638A patent/JP6018592B2/ja not_active Expired - Fee Related
- 2012-02-22 WO PCT/KR2012/001350 patent/WO2012121499A2/ko active Application Filing
- 2012-02-22 EP EP12755269.3A patent/EP2685461B1/en not_active Not-in-force
Non-Patent Citations (2)
Title |
---|
None |
See also references of EP2685461A4 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014085194A (ja) * | 2012-10-23 | 2014-05-12 | Jtec Corp | 形状可変x線ミラーシステム |
CN103529537A (zh) * | 2013-10-21 | 2014-01-22 | 中国科学院光电技术研究所 | 一种运动平台上平面反射镜的支撑结构 |
US9150157B1 (en) | 2014-04-14 | 2015-10-06 | Ford Global Technologies, Llc | Convertible vanity mirror assembly |
CN115097592A (zh) * | 2022-07-27 | 2022-09-23 | 洛伦兹(北京)科技有限公司 | 镜片角度调节装置 |
Also Published As
Publication number | Publication date |
---|---|
JP6018592B2 (ja) | 2016-11-02 |
EP2685461A2 (en) | 2014-01-15 |
US9435999B2 (en) | 2016-09-06 |
US20140049850A1 (en) | 2014-02-20 |
EP2685461A4 (en) | 2014-08-20 |
JP2014508971A (ja) | 2014-04-10 |
WO2012121499A3 (ko) | 2012-11-08 |
EP2685461B1 (en) | 2017-04-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2012121499A2 (ko) | 거울의 곡률 조정장치 및 이를 구비한 거울 조정시스템 | |
WO2017150933A1 (ko) | 가변형 중력토크 보상장치 및 이의 제어 방법 | |
WO2018155766A1 (ko) | 차량용 헤드 업 디스플레이 | |
WO2019225978A1 (en) | Camera and terminal including the same | |
WO2009096754A2 (ko) | 태양 위치 추적 장치 | |
WO2021137478A1 (ko) | 탄성 부재 | |
WO2017204455A1 (ko) | 힌지 레버 타입 변위 확대를 이용한 젯 디스펜서 | |
WO2018038334A1 (ko) | 틸팅 스테이지 시스템 | |
WO2015167276A1 (ko) | 필름부착장치 | |
WO2021132779A1 (ko) | 디스플레이 디바이스 | |
CN107208837A (zh) | 夹持结构及具有所述夹持结构的可移动平台 | |
WO2022015032A1 (ko) | 잉크젯 다파장 경화기 | |
WO2016017885A1 (en) | Screen and laser display apparatus using the same | |
WO2019112132A1 (en) | Lens curvature variation apparatus | |
WO2014089801A1 (zh) | 检测方法及检测装置 | |
WO2020231113A1 (ko) | 치수 측정용 지그 및 그를 포함하는 치수 측정 장치 | |
WO2020242084A1 (ko) | 벤딩 머신 | |
WO2018199363A1 (ko) | 물품 검사 방법 및 물품 검사 장치 | |
WO2022240069A1 (ko) | 모터 고정자 함침 장치 및 시스템 | |
WO2022182106A1 (ko) | 전극의 사행 보정장치 및 전극의 사행 보정방법 | |
WO2018004035A1 (ko) | 카메라 모듈 및 그의 오토 포커스 방법 | |
WO2011149300A2 (en) | Mems actuator mounted camera module having sag compensation and sag compensation method using the same | |
WO2019225928A1 (ko) | 카메라, 및 이를 구비하는 단말기 | |
WO2019190159A1 (en) | Prism apparatus, and camera apparatus including the same | |
WO2020222454A1 (ko) | 두께 측정 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 12755269 Country of ref document: EP Kind code of ref document: A2 |
|
ENP | Entry into the national phase |
Ref document number: 2013557638 Country of ref document: JP Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
REEP | Request for entry into the european phase |
Ref document number: 2012755269 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2012755269 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14008570 Country of ref document: US |