WO2012118037A1 - Method and apparatus for manufacturing functional film - Google Patents

Method and apparatus for manufacturing functional film Download PDF

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Publication number
WO2012118037A1
WO2012118037A1 PCT/JP2012/054832 JP2012054832W WO2012118037A1 WO 2012118037 A1 WO2012118037 A1 WO 2012118037A1 JP 2012054832 W JP2012054832 W JP 2012054832W WO 2012118037 A1 WO2012118037 A1 WO 2012118037A1
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WO
WIPO (PCT)
Prior art keywords
protective film
base material
film
detection
substrate
Prior art date
Application number
PCT/JP2012/054832
Other languages
French (fr)
Japanese (ja)
Inventor
崇 片岡
Original Assignee
富士フイルム株式会社
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Filing date
Publication date
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Publication of WO2012118037A1 publication Critical patent/WO2012118037A1/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/345—Silicon nitride
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H18/00—Winding webs
    • B65H18/08—Web-winding mechanisms
    • B65H18/10—Mechanisms in which power is applied to web-roll spindle
    • B65H18/103—Reel-to-reel type web winding and unwinding mechanisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H41/00—Machines for separating superposed webs
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/511—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning
    • B65H2301/5112—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning removing material from outer surface
    • B65H2301/51122—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning removing material from outer surface peeling layer of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/511—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning
    • B65H2301/5114—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning coating
    • B65H2301/51145—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning coating by vapour deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/50—Occurence
    • B65H2511/51—Presence
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/50—Occurence
    • B65H2511/515—Absence
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2513/00—Dynamic entities; Timing aspects
    • B65H2513/10—Speed
    • B65H2513/11—Speed angular
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2515/00—Physical entities not provided for in groups B65H2511/00 or B65H2513/00
    • B65H2515/30—Forces; Stresses
    • B65H2515/32—Torque e.g. braking torque
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/40—Sensing or detecting means using optical, e.g. photographic, elements
    • B65H2553/41—Photoelectric detectors
    • B65H2553/412—Photoelectric detectors in barrier arrangements, i.e. emitter facing a receptor element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/40—Sensing or detecting means using optical, e.g. photographic, elements
    • B65H2553/41—Photoelectric detectors
    • B65H2553/414—Photoelectric detectors involving receptor receiving light reflected by a reflecting surface and emitted by a separate emitter

Definitions

  • the present invention relates to a functional film manufacturing method and a manufacturing apparatus in which a protective film is peeled off from a laminate formed by laminating a base material and a protective film in a vacuum, and the surface of the base material is processed.
  • a film that expresses the desired function (hereinafter referred to as “functional film” for convenience) such as a gas barrier film, a light reflection film, an antireflection film, and a surface protection film on the surface of the substrate.
  • Functional films are used for various purposes.
  • various surface treatments such as smoothing, activation, cleaning, roughening, surface modification, and adhesion imparting may be performed on the surface of the substrate. ing.
  • a gas barrier is formed by feeding a long base material from a base material roll that is wound in a roll shape and conveying it in the longitudinal direction.
  • RtoR roll-to-roll
  • the functional film having the intended performance May become impossible to manufacture.
  • the surface to be processed and the back surface of the base material are in sliding contact with each other by winding the base material, so that the base material is easily damaged.
  • the loading space of the base material roll is evacuated for film formation or the like, the air between the base materials escapes, so-called winding tightening occurs, and the treated surface of the wound base material and the back surface thereof are strong.
  • a protective film (laminate film) is attached to the treated surface of the substrate, and the substrate is treated. Protecting the surface is done.
  • the laminate of the substrate and the protective film is usually loaded in a substrate processing apparatus such as a film forming apparatus or a surface treatment apparatus. Inside, the protective film is peeled off and the surface to be treated of the substrate is treated.
  • Patent Document 1 discloses that a protective material is laminated and a roll-out base material that is wound together with the protective material, and a base material that is unwound from the unwinding roll together with the protective material.
  • Protective material separation that separates the protective material from the base material when the base material passes through the unwinding side support roll together with the protective material. It describes that the surface of the base material is protected until just before film formation by having an unwinding portion provided with means.
  • Patent Documents 2 and 3 a support having a laminated film continuously applied from a film roll is sent out, the laminate film is peeled off, an inorganic film is formed on the coating film of the support, It describes that the surface of a support is protected by winding it on a film roll.
  • film formation of various functional films such as a gas barrier film is often performed in a vacuum such as plasma CVD or vacuum deposition.
  • surface treatment of the substrate such as activation treatment and cleaning treatment is often performed by plasma irradiation or ion irradiation in a vacuum.
  • a vacuum in a laminate roll obtained by winding a laminate formed by laminating a base material and a protective film in a roll shape, air existing between the laminates is released and wound. Tightening occurs. Therefore, a base material and a protective film are pressed and the adhesive force of a base material and a protective film becomes high.
  • Patent Documents 1 to 3 in the case where film formation is performed in a vacuum while transporting a substrate with a protective film attached thereto using an RtoR apparatus, In order to peel off the protective film and the protective film, the adhesion force between the substrate and the protective film becomes higher than the pulling force (peeling force) of the protective film. As a result, when the force (peeling force) for pulling the protective film is constant, the protective film may not be peeled from the substrate.
  • the protective film can be peeled off even if the force for pulling the protective film (peeling force) is sufficiently large so that the adhesive film has high adhesive strength, the protective film Since the substrate is pulled excessively, the conveyance tension of the substrate is loosened, wrinkles (wrinkles in the conveyance direction) are generated on the substrate, and the substrate is damaged.
  • peeling force force for pulling the protective film
  • the protective film Since the substrate is pulled excessively, the conveyance tension of the substrate is loosened, wrinkles (wrinkles in the conveyance direction) are generated on the substrate, and the substrate is damaged.
  • film formation is performed by winding a base material around a drum, the close contact between the base material and the drum may be loosened, and normal film formation may not be possible.
  • the adhesion between the substrate and the drum is loosened, the substrate is not sufficiently cooled, is deformed by heat, and is damaged.
  • An object of the present invention is to solve the problems of the prior art, and in the production of a functional film using a laminate on which a substrate and a protective film are adhered, the substrate and the protective film are arranged in the longitudinal direction of the laminate. Even when the adhesion force between the base material and the protective film changes, the base material and the protective film can be properly peeled off, the base material transport tension is loosened, the base material is wrinkled, film formation, etc.
  • a functional film manufacturing method and a manufacturing apparatus capable of stably manufacturing a functional film having a target performance by preventing damage to the base material due to damage caused by heat generated by the treatment It is to provide.
  • the method for producing a functional film of the present invention is a laminate in which a laminate formed by laminating a protective film having adhesiveness on a surface to be treated is adhered in a roll in a vacuum.
  • the protective film is peeled off from the base material and the surface to be treated of the base material is processed.
  • the presence or absence of a protective film on the substrate is detected at the first detection position, and the protective film on the substrate is detected at a predetermined second detection position between the first detection position and the processing position.
  • the presence or absence is detected, and the protective film is peeled from the base material between the first detection position and the second detection position according to the detection results at the first detection position and the second detection position. , Characterized by controlling the peeling force.
  • control is performed so that the peeling force when peeling the protective film is increased (control to increase the peeling force from the current level). More preferably, when the protective film is not detected at the first detection position, control is performed such that the peeling force when peeling the protective film is reduced (control to reduce the peeling force from the current level). Do).
  • the treatment is performed by a processing means arranged so as to face the peripheral surface of the drum while the base material is wound around the peripheral surface of the cylindrical drum and conveyed in the longitudinal direction.
  • the second detection position is between the processing means and a transport roll disposed immediately upstream of the drum (the processing roller and the transport roller closest to the processing means on the upstream side of the processing means). Between). More preferably, the second detection position is a position where the substrate is wound around the drum. More preferably, the base material wound around the drum is cooled on the peripheral surface of the drum.
  • the peeling force when peeling off the protective film is controlled by controlling at least one of the torque of the winding means of the protective film and the rotational speed. More preferably, the first detection means for detecting the presence / absence of the protective film at the first detection position and the second detection means for detecting the presence / absence of the protection film at the second detection position have the light transmittance. The presence or absence of the protective film is detected by measuring.
  • the functional film manufacturing apparatus of the present invention is a laminate in which a laminate formed by laminating and sticking a protective film having adhesive properties on a surface to be treated of a base material is wound in a roll shape in a vacuum.
  • the protective film is peeled off from the base material in a functional film manufacturing apparatus that pulls out the laminate from the body roll and transports it in the longitudinal direction while peeling the protective film from the base material and processing the surface to be treated of the base material.
  • the second detection means that is disposed between the processing means and the first detection means and detects the presence or absence of the protective film on the substrate, and the detection results of the first detection means and the second detection means Between the first detection means and the second detection means As the protective film is peeled off from the substrate, and having a control means for controlling the release force of the winding means.
  • the control unit performs control so that at least one of the torque of the winding unit and the rotation speed is increased when the second detection unit detects the protective film. More preferably, the control means performs control so that at least one of the torque of the winding means and the rotation speed is reduced when the first detection means does not detect the protective film.
  • the second detection means is disposed between the processing means and the transport roll immediately upstream of the processing means. More preferably, it has a cylindrical drum which is arranged so that the peripheral surface faces the processing means, and the substrate is wound around a predetermined area of the peripheral surface and conveyed. More preferably, a 2nd detection means detects the presence or absence of the protective film on a base material in the position where the base material is wound around the drum. More preferably, it has a cooling means for cooling the peripheral surface of the drum.
  • the first detection means and the second detection means detect the presence or absence of the protective film by measuring the light transmittance.
  • the production method and the production apparatus of the functional film of the present invention draws a laminate from a laminate roll formed by winding a laminate formed by sticking a protective film on a base material in a roll in a vacuum,
  • the protective film is peeled from the substrate while being conveyed in the longitudinal direction.
  • the presence or absence of the protective film on the substrate is detected at a predetermined first detection position
  • the presence or absence of the protective film on the substrate is detected at a predetermined second detection position between the first detection position and the processing position.
  • the peeling force is controlled so that the protective film is peeled from the base material between the first detection position and the second detection position.
  • the protective film peel strength is controlled so that the protective film peels off at an appropriate position. It can prevent that a film does not peel from a board
  • FIG. 1 is a conceptual diagram of a production apparatus for carrying out an example of the method for producing a functional film of the present invention.
  • the manufacturing apparatus 10 shown in FIG. 1 uses a laminate 16 formed by laminating and adhering a protective film 14 on the surface of a base material 12, and peeling the protective film 14 from the base material 12 in a vacuum.
  • the surface of the material 12 is processed to produce a functional film (including an intermediate of the functional film) 20.
  • the surface of the base material 12 is a surface to be processed, that is, a surface on which processing such as film formation and various surface treatments described later is performed.
  • the manufacturing apparatus 10 shown in FIG. 1 performs processing of the base material 12 by so-called roll-to-roll (Roll to Roll), and the long base material 12 (web-like base material) and the long protection.
  • the protective film 14 is removed from the laminated body 16 while the laminated body 16 is pulled out from the base roll 24 formed by laminating the long laminated body 16 formed by laminating the film 14 in a roll shape and conveyed in the longitudinal direction.
  • the surface of the base material 12 is treated, and the treated base material 12, that is, the functional film 20 according to the production method of the present invention is wound again in a roll shape.
  • the manufacturing apparatus 10 shown in FIG. 1 includes a vacuum chamber 26, a rotary shaft 28, a tension pickup roll 30, a drum 32, a processing means 34, a winding shaft 36, and a tension pickup disposed in the vacuum chamber 26.
  • the manufacturing apparatus 10 which implements the manufacturing method of the functional film of this invention is not only these members, but the laminated body 16 and the conveyance guides of the base material 12, various sensors, etc. in the vacuum, the laminated body 16 and You may further have various members which can arrange
  • the substrate 12 is not particularly limited, and various sheet-like materials can be used as long as film formation and surface treatment in vacuum can be performed.
  • plastic (resin) films made of organic substances such as polyethylene terephthalate (PET), polyethylene naphthalate, polyethylene, polypropylene, polystyrene, polyamide, polyvinyl chloride, polycarbonate, polyacrylonitrile, polyimide, polyacrylate, polymethacrylate, Metal sheets such as aluminum and stainless steel can be suitably used as the substrate 12.
  • such a plastic film is used as a support, and a protective layer, an adhesive layer, a light reflection layer, a light shielding layer, a planarization layer, a buffer layer, a stress relaxation layer, a gas barrier film, etc.
  • a functional film functional layer
  • the surface of these films is usually the surface of the substrate 12.
  • a substrate in which only one layer of a functional film is formed on the support may be used as the substrate 12, or a plurality of functional films (layers) are formed on the support. A thing may be used as the substrate 12.
  • the base material 12 when the base material 12 is a substrate in which a plurality of functional films (layers) are formed on a support, it may have a plurality of the same layers, for example, a planarization layer and a gas barrier film. And a combination of two or more layers may be repeatedly laminated a plurality of times.
  • the protective film (laminate film) 14 is for protecting the surface of such a base material 12, is in contact with the surface of the base material 12, and is laminated and adhered to the base material 12.
  • the protective film 14 is not particularly limited, and various protective films having adhesiveness that are used in the production of the functional film can be used. Therefore, even if the protective film 14 has an adhesive layer (adhesive layer / adhesive layer) formed on the contact surface with the surface of the substrate 12, the protective film 14 itself has adhesiveness. It may be a thing.
  • the protective film 14 is laminated for the purpose of protecting the surface of the base material 12, it is common to use a material having lower rigidity or hardness than the base material 12 (the surface of the base material 12). It is.
  • the base material roll 24 formed by winding such a laminate 16 is loaded on the rotary shaft 28.
  • the laminate 16 is pulled out from the base roll 24 loaded on the rotating shaft 28 and guided in the longitudinal direction while being guided by the tension pick-up roll 30 and the guide roller 44, and then the protective film 14 from the base 12. Is peeled off.
  • the base material 12 from which the protective film 14 has been peeled is conveyed while being wound around a drum 32, and after being subjected to processing such as film formation and surface treatment by the processing means 34, it is guided to the tension pickup roll 38. Then, it is wound on the winding shaft 36.
  • the protective film 14 peeled off from the substrate 12 is wound around the second winding shaft 40.
  • the first detection means 46 and the second detection means 48 detect the presence or absence of the protective film 14, and according to the detection result, the second winding shaft 40.
  • the protective film 14 and the substrate 12 are peeled off within a predetermined range. It is what you want to do. This will be described in detail later.
  • the tension pick-up roll 30 is used for guiding the transported laminate 16 to a predetermined path and for measuring the tension applied to the transported laminate 16 (base material 12). is there.
  • the tension measurement result measured by the tension pickup roll 30 and the tension pickup roll 38, which will be described later, is sent to a conveyance control means (not shown), and the conveyance control means causes the rotary shaft 28 and the winding to reach a predetermined tension.
  • the shaft 36 may be controlled.
  • tension pickup roll 30 for measuring the tension of the laminate 16 (base material 12) roll-to-roll, such as one that detects the tension with a load cell, one that detects the tension by measuring the displacement of the roller, etc.
  • Various known tension pick-up rolls used in the film forming apparatus can be used. This also applies to the tension pickup roll 38 described later.
  • the guide roller 44 is a normal guide roller that guides the laminated body 16 along a predetermined conveyance path.
  • the second winding shaft 40 winds up the protective film 14 peeled from the substrate 12. Further, the second winding shaft 40 is controlled by the control means 50 described later at least one of the torque of the winding rotation shaft and the rotation speed. Thereby, the peeling force of the protective film 14 is controlled so that peeling with the protective film 14 and the base material 12 occurs in a predetermined position. This will be described in detail later.
  • the first detection means 46 detects the presence or absence of the protective film 14 on the substrate 12, and is arranged between the guide roller 44 and the second detection means 48 in the conveyance direction of the substrate 12.
  • the 1st detection means 46 has the light irradiation part 46a and the light-receiving part 46b.
  • the light irradiation part 46a and the light receiving part 46b are arranged so as to sandwich the base material 12 (laminated body 16).
  • the light irradiation part 46a irradiates light toward the light receiving part 46b arranged with the base material 12 (laminated body 16) interposed therebetween.
  • the light irradiation part 46a Various well-known light sources, such as a laser light source and a LED light source, can be used.
  • the light receiving unit 46b receives light emitted from the light irradiation unit 46a.
  • the peeling point P which is the position where the protective film 14 peels from the base material 12
  • the light irradiated by the light irradiation unit 46a has been peeled off.
  • the protective film 14 and the laminate 16 (the base material 12 and the protective film 14) pass through and are received by the light receiving unit 46b.
  • the peeling point P is on the upstream side in the transport direction from the first detection means 46, the light irradiated by the light irradiation unit 46a passes only through the base material 12 and is received by the light receiving unit 46b. .
  • the peeling point P can be detected by the 1st detection means 46, it will not be restricted to the aspect of FIG. That is, according to the position of the 2nd winding shaft 40, the object through which the light irradiated from the light irradiation part 46a passes may differ from the said aspect.
  • the state of the light received by the light receiving unit 46b varies depending on the film through which light passes depending on the position of the peeling point P and the second winding shaft 40, so that the light receiving unit 46b Whether or not the protective film 14 is stuck on the substrate 12 is detected depending on the state.
  • the protective film 14 is formed on the base material 12 when the light receiving unit 46b receives light. If the light is not received, it is detected that the protective film 14 is on the substrate 12.
  • the intensity (transmittance) of the light received by the light receiving unit 46b changes depending on the presence or absence of the protective film 14, so that depending on the intensity of the received light, What is necessary is just to detect the presence or absence of the protective film 14.
  • the light receiving unit 46 b supplies the detection result to the control unit 50.
  • the second detection unit 48 detects the presence or absence of the protective film 14 on the substrate 12, and is disposed between the first detection unit 46 and the processing unit 34 in the conveyance direction of the substrate 12.
  • the second detection means 48 is disposed facing the base material 12 at a position where the base material 12 is wound around the drum 32.
  • the second detection means 48 irradiates light toward the base material 12, and receives light reflected through the base material 12 and reflected from the drum 32.
  • the peeling point P which is the position where the protective film 14 is peeled from the substrate 12
  • the light emitted by the second detecting means 48 is The light passes through only the material 12, is reflected by the drum 32, passes through the base material 12 again, and is received by the second detection means 48.
  • the peeling point P is on the downstream side in the transport direction with respect to the second detection means 48
  • the light irradiated by the second detection means 48 is separated from the protective film 14 and the laminate 16 (base material 12 and protective film). 14) and reflected by the drum 32, may pass through the laminate 16 and the peeled protective film 14 again, and may be received by the second detection means 48.
  • the second detection unit 48 since the state of the light received by the second detection unit 48 changes according to the position of the peeling point P and the second winding shaft 40, the second detection unit 48 depends on the state of the received light. It can be detected whether or not the protective film 14 is stuck on the surface 12.
  • Both the first detection means 46 and the second detection means 48 may detect the protective film 14 by transmitting light, like the first detection means 46.
  • the protective film 14 may be detected by reflecting light.
  • the means for reflecting the light to detect the presence or absence of the protective film 14 is preferable because the light reciprocates and passes through each film twice, so that the detection ability is improved.
  • the drum 32 is irradiated with light at the position where the substrate 12 is wound around the drum 32 and the reflected light is detected as in the second detection means, the drum 32 (reflecting material) and the substrate 12 ( Since air does not intervene between the laminated body 16) and the reflected light is detected, an error hardly occurs and the detection performance is improved.
  • the second detection unit 48 supplies the detection result to the control unit 50.
  • the control unit 50 controls at least one of the torque of the second winding shaft 40 and the rotation speed according to the detection result of the presence or absence of the protective film 14 detected by the first detection unit 46 and the second detection unit 48. To do. Specifically, when the first detection unit 46 detects the protective film 14 and the second detection unit 48 does not detect the protective film 14, the peeling point P is the first detection unit 46 and the second detection unit 48. Therefore, it is determined that peeling is normally performed, and neither the torque of the second winding shaft 40 nor the rotation speed is controlled.
  • the peeling point P is on the upstream side of the first detection means 46. That is, there is a possibility that the force (peeling force) for pulling the protective film 14 is too large. Therefore, control is performed such that at least one of the torque of the second winding shaft 40 and the rotational speed is reduced to reduce the peeling force.
  • the peeling point P is on the downstream side of the second detection unit 48. That is, since the peeling force of the protective film 14 is too small, at least one of the torque of the second winding shaft 40 and the rotation speed is increased so that the peeling force is increased.
  • a laminate formed by laminating the base material and the protective film is rolled.
  • air existing between the laminates of the laminate roll is released, and winding tightening occurs. Therefore, a base material and a protective film are pressed and the adhesive force of a base material and a protective film becomes high.
  • tightening becomes stronger toward the inner diameter side of the laminate roll
  • the laminate on the inner diameter side of the laminate roll has a higher adhesion between the substrate and the protective film, and in the longitudinal direction of the laminate, The adhesion between the substrate and the protective film changes.
  • the adhesion between the base material and the protective film is higher than the pulling force of the protective film (peeling force) in order to peel off the base material and the protective film as the processing proceeds.
  • the protective film is not peeled off from the substrate.
  • the force to pull the protective film peeling force
  • the protective film pulls the substrate excessively, the conveyance tension of the substrate is loosened. Thereby, a wrinkle generate
  • the adhesion between the substrate and the drum is loosened, the substrate is not cooled sufficiently, and the substrate is deformed by heat generated in the film formation process. Take damage.
  • the first detection means 46 and the second detection means 48 detect the presence or absence of the protective film 14, and the second winding is performed according to the detection result.
  • the shaft 40 controls at least one of the torque of the second winding shaft 40 and the rotational speed when the protective film 14 is wound up.
  • the protective film 14 is not transported without being peeled off.
  • the base material 12 can be stably conveyed while peeling the protective film 14, the functional film which has the target performance can be manufactured stably.
  • the base material 12 from which the protective film 14 has been peeled is conveyed to the drum 32.
  • the drum 32 is a cylindrical object that is transported in the longitudinal direction while the base material 12 is positioned at a predetermined processing position.
  • the base material 12 is wound around a predetermined region of the drum 32 and is subjected to processing such as film formation and surface treatment by the processing means 34 while being conveyed in the longitudinal direction.
  • the treatment applied to the surface of the substrate 12 is not particularly limited, and any of various film formations and surface treatments performed in a vacuum can be used. These processes may be performed by a known method. Therefore, the processing means 34 has a known configuration corresponding to the processing performed on the surface of the base material 12 by the manufacturing apparatus 10.
  • the processing means 34 includes an induction coil for forming an induction magnetic field and a raw material in the film formation region. It has gas supply means for supplying gas and the like. If the manufacturing apparatus 10 is an apparatus for forming a film by the CCP-CVD method (capacitive coupling type plasma CVD), the processing means 34 has a hollow shape with a large number of small holes and functions as an electrode and a source gas supply unit. A shower electrode, a high-frequency power source (such as 13.56 MHz) that supplies plasma excitation power, or a source gas supply unit is configured.
  • the processing means 34 is configured to include a target holding means, a high-frequency electrode, a sputtering gas supply means, and the like. If the processing means 34 forms a film by reactive sputtering, the processing means 34 is further configured to have a reaction gas supply means. If the manufacturing apparatus 10 is an apparatus in which the film formation chamber performs film formation by vacuum vapor deposition, the processing means 34 may be an evaporation source (crucible), a heating means for film forming materials such as an electron gun or a resistance heating power source, or evaporation. It has a source shutter and the like.
  • the surface treatment of the substrate 12 is not limited to film formation, and known surface treatments such as activation, cleaning, roughening, and flattening can be suitably performed as long as the treatment is performed in a vacuum.
  • the degassing treatment of the substrate 12 can be suitably used.
  • the manufacturing apparatus 10 is an apparatus that activates or cleans the surface with plasma, a shower electrode, a high-frequency power source (such as 13.56 MHz) that supplies plasma excitation power, or a process gas It has a supply means and the like.
  • the manufacturing apparatus 10 is an apparatus for flattening the surface by thermal annealing or degassing from the base material 12, the manufacturing apparatus 10 includes a sheath heater, a thermocouple for measuring temperature, and the like.
  • the surface of the base material 12 can be protected with the protective film 14 until it peels by a predetermined peeling process. Therefore, the method for producing a functional film of the present invention is suitable for applications in which high smoothness or the like is required on the substrate surface, such as production of a gas barrier film by forming a gas barrier film.
  • the drum 32 may have a cooling unit to cool the base material 12.
  • the tension pick-up roll 38 is for guiding the base material 12 processed on the drum 32 to a predetermined path and for measuring the tension applied to the transported base material 12.
  • the tension measurement result measured by the tension pickup roll 38 is sent to a conveyance control means (not shown).
  • the vacuum exhaust means 42 exhausts the inside of the vacuum chamber 26 to a predetermined pressure corresponding to the processing to be performed.
  • the vacuum evacuation means 42 is not particularly limited, and a vacuum pump such as a turbo pump, a mechanical booster pump, a dry pump, and a rotary pump, an auxiliary means such as a cryocoil, a means for adjusting the ultimate vacuum and the exhaust amount, Various known (vacuum) evacuation means used in the vacuum film forming apparatus can be used.
  • the base material 12 that has been subjected to processing such as film formation by the processing means 34 while being wound around the drum 32 and conveyed in the longitudinal direction, that is, the functional film 20 according to the manufacturing method of the present invention is placed on the tension pickup roll 38. It is guided, wound by the winding shaft 36, and rolled again.
  • the long laminate 16 is wound into a roll and supplied as the base roll 24.
  • the base material roll 24 is rotatably loaded on the rotary shaft 28 of the manufacturing apparatus 10.
  • the substrate roll 24 is loaded on the rotary shaft 28, the laminate 16 is pulled out and wound around the tension pickup roll 30 and the guide roller 44, and then the substrate 12 and the protective film 14 are peeled off.
  • the protective film 14 peeled off from the substrate 12 is sent to the second winding shaft 40 and is inserted through a predetermined conveyance path.
  • the base material 12 is wound around a predetermined region of the drum 32 from the guide roller 44, guided by the tension pickup roll 38, and inserted through a predetermined conveyance path wound around the winding shaft 36.
  • the vacuum chamber 26 is closed, and the vacuum exhaust means 42 is driven to start exhausting the vacuum chamber 26.
  • the processing means 34 preparation for processing to be performed on the surface of the substrate 12 is started.
  • winding by the winding shaft 36 and the second winding shaft 40 and transport of the substrate 12 by the drum 32 are performed.
  • the feeding of the laminated body 16 from the base material roll 24 by the rotating shaft 28 is performed in synchronization, and the transport of the base material 12 and the like is started.
  • the processing means 34 processes the base material 12 such as film formation.
  • the processed base material 12, ie, the functional film 20 by the manufacturing method of this invention is wound up by the winding shaft 36, and it is set as the roll of the functional film 20.
  • the first detection means 46 and the second detection means 48 that are disposed between the guide roller 44 and the processing means 34 in the conveyance direction of the base material 12.
  • the torque of the second winding shaft 40 when the second winding shaft 40 winds the protective film 14 By controlling at least one of the rotational speeds, peeling between the protective film 14 and the base material 12 occurs between the predetermined first detection means 46 and the second detection means 48.
  • the peeling force for peeling the protective film 14 can be set to an appropriate value, and the base material 12 and the protective film 14 The predetermined position It can be peeled off. Therefore, the protective film 14 is not transported without being peeled off. In addition, it is possible to prevent the base material 12 from being damaged due to the peeling force being too large, the transport tension of the base material 12 is loosened, and wrinkles are generated or heat damage is caused.
  • the manufacturing apparatus 10 shown in FIG. 1 is an example in which the base material is wound around the drum 32 and conveyed in the longitudinal direction while being used for processing, but the present invention is not limited thereto.
  • the present invention can be suitably used for an apparatus that peels off a protective film and processes the surface of a substrate while conveying a long laminate linearly in the longitudinal direction using a pair of conveying rollers or the like. It is.
  • the first detection unit 46 a unit that detects the protective film 14 by transmitting light to the base material 12 (laminated body 16) is used, and as the second detection unit 48, although the means which reflects the light which permeate
  • the position of the peeling point P is set to the position immediately before the base material 12 is wound around the drum 32.
  • the present invention is not limited to this, and the peeling point P is peeled off.
  • the position of the point P may be a position where the substrate 12 is wound around the drum. That is, the protective film 14 may be peeled from the substrate 12 at a position where the laminate 16 is wound around the drum 32.
  • FIG. 2 is a diagram conceptually illustrating another example of a manufacturing apparatus that performs the manufacturing method of the present invention.
  • the manufacturing apparatus 80 shown in FIG. 2 has the same configuration as the manufacturing apparatus 10 shown in FIG. 1 except that it has the first detection means 82 instead of the first detection means 46.
  • the same reference numerals are given, and the following description mainly focuses on different parts.
  • the manufacturing apparatus 80 has a configuration in which the first detection unit 82 is disposed at a position facing the laminated body 16 (base material 12) wound around the drum 32.
  • the first detection means 82 detects the presence or absence of the protective film 14 on the substrate 12, and protects the substrate 12 by irradiating light toward the substrate 12 and receiving light reflected from the drum 32. The presence or absence of the film 14 is detected.
  • the first detection unit 82 supplies the detection result to the control unit 50.
  • the base material 12 is wound around the drum 32.
  • the protective film 14 can be peeled off from the base material 12 in the state of being applied. Thereby, at the time of peeling of the protective film 14, it can prevent that the base material 12 rock
  • the first detection means 82 and the second detection means 48 are arranged between the guide roller 44 and the drum 32 immediately upstream of the drum 32.
  • the present invention is not limited to this, and it may be disposed upstream of the processing unit 34.
  • it may be disposed between the guide roller 44 and the tension pickup roll 30.
  • FIG. 3 is a diagram conceptually illustrating another example of a manufacturing apparatus that performs the method for manufacturing a functional film of the present invention. 3 is different from the manufacturing apparatus 10 shown in FIG. 1 in that the peeling point P and the first detection means 46 are arranged between the tension pickup roll 30 and the guide roller 44, and the second detection means 48 is used. Instead of having the second detection means 104, the same configuration is provided, so the same parts are denoted by the same reference numerals, and the following description will mainly be made on different parts.
  • the manufacturing apparatus 100 has a configuration in which the first detection unit 46, the second detection unit 104, and the peeling point P are disposed between the tension pickup roll 30 and the guide roller 44.
  • the 2nd detection means 104 detects the presence or absence of the protective film 14 on the base material 12, and has the light irradiation part 104a and the light-receiving part 104b.
  • the light irradiation unit 104a and the light receiving unit 104b are arranged so as to sandwich the substrate 12 (laminated body 16), and the light irradiation unit 104a is arranged to sandwich the substrate 12 (laminated body 16). It irradiates light toward.
  • the light receiving unit 104b detects the presence or absence of the protective film 14 from the state of the light irradiated from the light irradiation unit 104a.
  • the second detection unit 104 supplies the detection result to the control unit 50.
  • the peeling force for peeling the protective film 14 is an appropriate value.
  • the base material 12 and the protective film 14 can be peeled at a predetermined position. Therefore, the protective film 14 is not transported without being peeled off.
  • Example 1 The laminated body 16 was conveyed using the manufacturing apparatus 10 shown in FIG. A PET film having a thickness of 100 ⁇ m and a width of 700 mm was prepared as the substrate 12. As the protective film 14, PAC-2-50TH manufactured by Sanei Kaken Co., Ltd. having a width of 700 mm was prepared. The adhesive strength of this adhesive sheet is 0.04 N / 25 mm. The degree of vacuum in the vacuum chamber 26 was 5 ⁇ 10 ⁇ 4 Pa. Further, as a treatment by the treatment means 34, a SiN film was formed by a plasma CVD method. The drum 32 has a cooling means to cool the substrate 12. Moreover, the conveyance speed was 1 m / min, the conveyance tension was 50 N / 700 mm, and the laminate 16 of 500 m was conveyed.
  • the presence or absence of thermal damage of the base material 12, the presence or absence of wrinkles of the base material 12, and the presence or absence of peeling abnormality (non-peeling state) of the protective film 14 were evaluated every 50 m.
  • the presence or absence of the thermal damage of the base material 12 pulled out the base material 12 after the process, and confirmed.
  • the presence or absence of wrinkles on the base material 12 and the presence or absence of peeling abnormality of the protective film 14 were evaluated by visually observing the base material 12 from a window formed in the vacuum chamber 26. “A” indicates that thermal damage has occurred on the base material 12
  • “B” indicates that wrinkle has occurred on the base material 12
  • “C” indicates that the protective film 14 has peeled abnormally
  • “No” indicates that there is no abnormality. N ”.
  • the evaluation results are shown in Table 1. When the evaluation is “C”, the conveyance of the laminated body is stopped, and the subsequent evaluation is not performed.
  • Example 2 Production of the functional film 20 in the same manner as in Example 1 except that the first detection unit 46 and the second detection unit 104 are arranged between the tension pickup roll 30 and the guide roller 44 (FIG. 3). Then, the presence or absence of thermal damage of the base material 12, the presence or absence of wrinkles of the base material 12, and the presence or absence of abnormal peeling of the protective film 14 were evaluated every 50 m. The evaluation results are also shown in Table 1.
  • Example 1 The functional film 20 is manufactured in the same manner as in Example 1 except that the first detection unit is not provided and only the second detection unit 48 is provided. The presence or absence of 12 wrinkles and the presence or absence of peeling abnormality of the protective film 14 were evaluated every 50 m. The evaluation results are also shown in Table 1.
  • Example 2 The functional film 20 is manufactured in the same manner as in Example 2 except that the first detection unit 46 is not provided and only the second detection unit 104 is provided. The presence or absence of wrinkles of the material 12 and the presence or absence of abnormal peeling of the protective film 14 were evaluated every 50 m. The evaluation results are also shown in Table 1.
  • Example 3 The functional film 20 is manufactured in the same manner as in Example 1 except that the first detection unit 46 and the second detection unit 48 are not provided. The presence or absence of wrinkles and the presence or absence of peeling abnormality of the protective film 14 were evaluated every 50 m. The evaluation results are also shown in Table 1.
  • Example 4 The functional film 20 was manufactured in the same manner as in Example 2 except that the first detection unit 46 and the second detection unit 104 were not included, and the presence or absence of thermal damage to the substrate 12 was confirmed. The presence or absence of wrinkles of the substrate 12 and the presence or absence of abnormal peeling of the protective film 14 were evaluated every 50 m. The evaluation results are also shown in Table 1.
  • the first detection means and the second detection means detect the presence or absence of a protective film, and the second winding is performed according to the detection result.
  • the protective film and the substrate are peeled off within a predetermined range. Therefore, the peeling force at which the protective film peels from the base material becomes an appropriate value, the transport tension of the base material does not loosen, and the adhesion between the base material and the drum does not loosen.
  • Example 2 in which the first detection means and the second detection means are arranged between the tension pickup roll 30 and the guide roller 44, in order to prevent damage to the surface of the substrate 12 from which the protective film 14 has been peeled off.
  • a stepped roller was used as the guide roller 44, a slight nick occurred at the position of the guide roller 44.
  • the first detection means and the second detection means are arranged immediately upstream of the drum 32 (processing means 34)
  • the surface of the substrate 12 is covered with the protective film 14 until just before the processing means 34. Therefore, it is not necessary to use a stepped roller as the guide roller 44, and damage to the base material 12 can be prevented more suitably.
  • Comparative Examples 1 and 2 with one detection means although the peeling abnormality of the protective film can be suppressed, the peeling force becomes too large and the transport tension of the base material is loosened. In addition, heat damage of the base material and wrinkles of the base material occurred intermittently. Moreover, in Comparative Examples 3 and 4 having no detection means, the protective film was not peeled from the base material after 200 m, and peeling abnormality occurred. From the above results, the effects of the present invention are clear.

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Abstract

In this method for manufacturing a functional film, at the time of treating a base material surface to be treated by peeling an adhesive protection film from a base material, while pulling out a laminated body from a laminated body roll formed by winding the laminated body in a roll shape, and transferring the laminated body in the longitudinal direction, said laminated body being formed by laminating and adhering in vacuum the protection film on the base material surface to be treated, the presence/absence of the protection film on the base material is detected at a predetermined first detection position, while transferring the laminated body before performing the treatment, the presence/absence of the protection film on the base material is detected at a second detection position between the first detection position and the position where the treatment is to be performed, and corresponding to the detection results obtained at the first detection position and the second detection position, a peeling force is controlled such that the protection film is peeled from the base material between the first detection position and the second detection position.

Description

機能性フィルムの製造方法および製造装置Functional film manufacturing method and manufacturing apparatus
　本発明は、真空中において、基材と保護フィルムとを積層してなる積層体から保護フィルムを剥離して、基材の表面に処理を行なう、機能性フィルムの製造方法および製造装置に関する。 The present invention relates to a functional film manufacturing method and a manufacturing apparatus in which a protective film is peeled off from a laminate formed by laminating a base material and a protective film in a vacuum, and the surface of the base material is processed.
　基材の表面に、ガスバリア膜、光反射膜、光反射防止膜、表面保護膜など、目的とする機能を発現する膜（以下、便宜的に『機能膜』とする）を成膜して得られる機能性フィルムが、各種の用途に利用されている。
　さらに、機能性フィルムの製造においては、基材の表面に、平滑化、活性化、清浄化、粗面化、表面改質、貼着性付与などの各種の表面処理を施すことも、行われている。 Obtained by forming a film that expresses the desired function (hereinafter referred to as “functional film” for convenience) such as a gas barrier film, a light reflection film, an antireflection film, and a surface protection film on the surface of the substrate. Functional films are used for various purposes.
Furthermore, in the production of a functional film, various surface treatments such as smoothing, activation, cleaning, roughening, surface modification, and adhesion imparting may be performed on the surface of the substrate. ing.
　また、機能性フィルムを、高い生産性や生産効率での製造を可能とする方法として、長尺な基材を、ロール状に巻回してなる基材ロールから送り出し、長手方向に搬送しつつガスバリア膜の成膜等を行って機能性フィルムを作製し、得られた機能性フィルムをロール状に巻き取る、いわゆるロール・ツー・ロール(Roll to Roll　以下、ＲｔｏＲともいう)による成膜を行なう機能性フィルムの製造装置が知られている。 In addition, as a method for enabling the production of functional films with high productivity and production efficiency, a gas barrier is formed by feeding a long base material from a base material roll that is wound in a roll shape and conveying it in the longitudinal direction. A function to form a functional film by forming a film, etc., and winding the obtained functional film in a roll shape, forming a film by so-called roll-to-roll (hereinafter also referred to as RtoR) An apparatus for producing a conductive film is known.
　このような機能性フィルムの製造において、搬送ローラ対による搬送や、他の部材との接触等に起因して基材の表面（被処理面）が損傷すると、目的とする性能を有する機能性フィルムが製造できなくなってしまう可能性が生じる。
　特に、ＲｔｏＲによる装置では、基材の巻回によって、基材の被処理面とその裏面とが摺接するので、基材の損傷が生じ易い。さらに、成膜等のために基材ロールの装填空間を真空にすると、基材間の空気が抜けて、いわゆる巻き締まりが生じ、巻回された基材の被処理面とその裏面とが強く摺接して、基材の被処理面を損傷してしまい、目的とする性能を有する機能性フィルムが製造できなくなってしまう可能性が高くなる。
　また、高品質な製品を製造するためには、基材の被処理面は、清浄に保つのが好ましい。 In the production of such a functional film, if the surface of the substrate (surface to be treated) is damaged due to conveyance by a pair of conveyance rollers, contact with other members, or the like, the functional film having the intended performance May become impossible to manufacture.
In particular, in the RtoR apparatus, the surface to be processed and the back surface of the base material are in sliding contact with each other by winding the base material, so that the base material is easily damaged. Furthermore, when the loading space of the base material roll is evacuated for film formation or the like, the air between the base materials escapes, so-called winding tightening occurs, and the treated surface of the wound base material and the back surface thereof are strong. There is a high possibility that the functional film having the intended performance cannot be manufactured due to the sliding contact, which damages the surface to be treated of the substrate.
Moreover, in order to manufacture a high quality product, it is preferable to keep the to-be-processed surface of a base material clean.
　そのため、ガスバリアフィルム等の機能性フィルムの製造においては、基材の被処理面を保護するために、基材の被処理面に保護フィルム（ラミネートフィルム）を貼着して、基材の被処理面を保護することが行われている。
　このような積層体を用いる機能性フィルムの製造においては、通常、この基材と保護フィルムとの積層体のまま、成膜装置や表面処理装置等の基材の処理装置に装填し、処理装置中において、保護フィルムを剥離して、基材の被処理面に処理を施す。 Therefore, in the production of functional films such as gas barrier films, in order to protect the treated surface of the substrate, a protective film (laminate film) is attached to the treated surface of the substrate, and the substrate is treated. Protecting the surface is done.
In the production of a functional film using such a laminate, the laminate of the substrate and the protective film is usually loaded in a substrate processing apparatus such as a film forming apparatus or a surface treatment apparatus. Inside, the protective film is peeled off and the surface to be treated of the substrate is treated.
　例えば、特許文献１には、保護材が積層され、ロール状に巻かれた基材を保護材と共に巻き出す巻き出しロールと、巻き出しロールから前記保護材と共に巻き出された基材を保護材が接触するように回転自在に支持し、下流側へ搬送する巻出側支持ロールと、基材が保護材と共に巻出側支持ロールを通過する際、基材から保護材を分離する保護材分離手段を備えた巻き出し部とを有することにより、成膜を行なう直前まで基材の表面を保護することが記載されている。 For example, Patent Document 1 discloses that a protective material is laminated and a roll-out base material that is wound together with the protective material, and a base material that is unwound from the unwinding roll together with the protective material. Protective material separation that separates the protective material from the base material when the base material passes through the unwinding side support roll together with the protective material. It describes that the surface of the base material is protected until just before film formation by having an unwinding portion provided with means.
　また、特許文献２および３には、フィルムロールから連続的にラミネートフィルムが付与された支持体を送り出し、ラミネートフィルムを剥離し、支持体のコーティング膜上に無機膜を成膜し、支持体をフィルムロールに巻き取ることにより、支持体の表面を保護することが記載されている。 In Patent Documents 2 and 3, a support having a laminated film continuously applied from a film roll is sent out, the laminate film is peeled off, an inorganic film is formed on the coating film of the support, It describes that the surface of a support is protected by winding it on a film roll.
特開２００８－１８９９５７号公報JP 2008-189957 A 特開２０１０－２２２７０２号公報JP 2010-222702 A 特開２０１０－２３４３４０号公報JP 2010-234340 A
　ところで、ガスバリア膜等の各種の機能膜の成膜は、プラズマＣＶＤや真空蒸着など、真空中で行われる場合が多い。また、活性化処理や清浄化処理等の基材の表面処理も、真空中でのプラズマ照射やイオン照射などによって行われる場合が多い。
　ここで、前述のように、真空中においては、基材と保護フィルムとを積層してなる積層体をロール状に巻回した積層体ロールにおいて、積層体間に存在する空気が抜けて、巻き締まりが生じる。そのため、基材と保護フィルムとが押圧されて、基材と保護フィルムとの密着力が高くなる。特に、積層体ロールの内径側に向かうに従って、巻き締まりが強くなるため、積層体ロールの内径側の積層体ほど、基材と保護フィルムとの密着力が高くなる。すなわち、積層体の長手方向に、基材と保護フィルムとの密着力が変化している。 By the way, film formation of various functional films such as a gas barrier film is often performed in a vacuum such as plasma CVD or vacuum deposition. Further, surface treatment of the substrate such as activation treatment and cleaning treatment is often performed by plasma irradiation or ion irradiation in a vacuum.
Here, as described above, in a vacuum, in a laminate roll obtained by winding a laminate formed by laminating a base material and a protective film in a roll shape, air existing between the laminates is released and wound. Tightening occurs. Therefore, a base material and a protective film are pressed and the adhesive force of a base material and a protective film becomes high. In particular, since tightening becomes stronger as it goes toward the inner diameter side of the laminate roll, the closer the laminate on the inner diameter side of the laminate roll, the higher the adhesion between the substrate and the protective film. That is, the adhesive force between the base material and the protective film changes in the longitudinal direction of the laminate.
　そのため、特許文献１～３に記載されるように、保護フィルムを貼着した基材を、ＲｔｏＲの装置で搬送しつつ、真空中で成膜を行なう場合には、処理が進むに従って、基材と保護フィルムとを剥離するために、保護フィルムを引っ張る力（剥離力）に対して、基材と保護フィルムとの密着力が高くなる。その結果、保護フィルムを引っ張る力（剥離力）が一定である場合、保護フィルムが基材から剥離されなくなることがある。
　また、保護フィルムを引っ張る力（剥離力）を十分に大きくして、密着力が高くても保護フィルムを剥離できるようにした場合、基材と保護フィルムとの密着力が弱い箇所では、保護フィルムが基材を過剰に引っ張るので、基材の搬送テンションが緩み、基材にシワ（搬送方向のシワ）が発生して基材が損傷する。また、基材をドラムに巻き掛けて成膜を行なう場合には、基材とドラムとの密着が緩み、正常な成膜ができないおそれがある。また、ドラムによって基材を冷却している場合には、基材とドラムとの密着が緩み、基材が十分に冷却されず、熱によって変形し、ダメージを受ける。 Therefore, as described in Patent Documents 1 to 3, in the case where film formation is performed in a vacuum while transporting a substrate with a protective film attached thereto using an RtoR apparatus, In order to peel off the protective film and the protective film, the adhesion force between the substrate and the protective film becomes higher than the pulling force (peeling force) of the protective film. As a result, when the force (peeling force) for pulling the protective film is constant, the protective film may not be peeled from the substrate.
In addition, if the protective film can be peeled off even if the force for pulling the protective film (peeling force) is sufficiently large so that the adhesive film has high adhesive strength, the protective film Since the substrate is pulled excessively, the conveyance tension of the substrate is loosened, wrinkles (wrinkles in the conveyance direction) are generated on the substrate, and the substrate is damaged. In addition, when film formation is performed by winding a base material around a drum, the close contact between the base material and the drum may be loosened, and normal film formation may not be possible. In addition, when the substrate is cooled by the drum, the adhesion between the substrate and the drum is loosened, the substrate is not sufficiently cooled, is deformed by heat, and is damaged.
　本発明の目的は、従来技術の問題点を解決することにあり、基材と保護フィルムを貼着した積層体を用いる機能性フィルムの製造において、積層体の長手方向に、基材と保護フィルムとの密着力が変化した場合であっても、基材と保護フィルムとを適正に剥離させることができ、基材の搬送テンションが緩んで、基材にシワが発生したり、成膜等の処理で発生する熱によってダメージを受けたりして、基材が損傷することを防止して、目的とする性能を有する機能性フィルムを、安定して製造できる機能性フィルムの製造方法および製造装置を提供することにある。 An object of the present invention is to solve the problems of the prior art, and in the production of a functional film using a laminate on which a substrate and a protective film are adhered, the substrate and the protective film are arranged in the longitudinal direction of the laminate. Even when the adhesion force between the base material and the protective film changes, the base material and the protective film can be properly peeled off, the base material transport tension is loosened, the base material is wrinkled, film formation, etc. A functional film manufacturing method and a manufacturing apparatus capable of stably manufacturing a functional film having a target performance by preventing damage to the base material due to damage caused by heat generated by the treatment It is to provide.
　本発明の機能性フィルムの製造方法は、真空中において、貼着性を有する保護フィルムを基材の被処理面に積層して貼着してなる積層体を、ロール状に巻回してなる積層体ロールから、積層体を引き出し、長手方向に搬送しつつ、基材から保護フィルムを剥離し、基材の被処理面に処理を行なうに際し、処理を行なう前の積層体の搬送中に、所定の第１の検出位置で、基材上の保護フィルムの有無を検出し、第１の検出位置と処理の位置との間の、所定の第２の検出位置で、基材上の保護フィルムの有無を検出し、第１の検出位置と第２の検出位置での検出結果に応じて、第１の検出位置と第２の検出位置との間で、保護フィルムが基材から剥離するように、剥離力を制御することを特徴とする。 The method for producing a functional film of the present invention is a laminate in which a laminate formed by laminating a protective film having adhesiveness on a surface to be treated is adhered in a roll in a vacuum. When the laminate is pulled out from the body roll and transported in the longitudinal direction, the protective film is peeled off from the base material and the surface to be treated of the base material is processed. The presence or absence of a protective film on the substrate is detected at the first detection position, and the protective film on the substrate is detected at a predetermined second detection position between the first detection position and the processing position. The presence or absence is detected, and the protective film is peeled from the base material between the first detection position and the second detection position according to the detection results at the first detection position and the second detection position. , Characterized by controlling the peeling force.
　好ましくは、第２の検出位置で、保護フィルムが検出された場合に、保護フィルムを剥離させる際の剥離力が大きくなるように制御する（剥離力を現状よりも増加させる制御を行う）。
　また、さらに好ましくは、第１の検出位置で、保護フィルムが検出されなかった場合に、保護フィルムを剥離させる際の剥離力が小さくなるように制御する（剥離力を現状よりも減少させる制御を行う）。 Preferably, when the protective film is detected at the second detection position, control is performed so that the peeling force when peeling the protective film is increased (control to increase the peeling force from the current level).
More preferably, when the protective film is not detected at the first detection position, control is performed such that the peeling force when peeling the protective film is reduced (control to reduce the peeling force from the current level). Do).
　さらに好ましくは、処理は、基材を円筒状のドラムの周面に巻き掛けて、長手方向に搬送しつつ、ドラムの周面に対面して配置された処理手段によって行なう。
　さらに好ましくは、第２の検出位置は、処理手段とドラムの直上流側に配置された搬送ロールとの間（処理手段と、処理手段の上流側であって、処理手段に最も近接した搬送ローラとの間）である。
　さらに好ましくは、第２の検出位置は、基材がドラムに巻き掛けられる位置である。
　また、さらに好ましくは、ドラムに巻き掛けられる基材が、ドラムの周面で冷却される。 More preferably, the treatment is performed by a processing means arranged so as to face the peripheral surface of the drum while the base material is wound around the peripheral surface of the cylindrical drum and conveyed in the longitudinal direction.
More preferably, the second detection position is between the processing means and a transport roll disposed immediately upstream of the drum (the processing roller and the transport roller closest to the processing means on the upstream side of the processing means). Between).
More preferably, the second detection position is a position where the substrate is wound around the drum.
More preferably, the base material wound around the drum is cooled on the peripheral surface of the drum.
　また、さらに好ましくは、保護フィルムの巻取り手段のトルクと、回転速度の少なくともいずれか一方を制御することにより、保護フィルムを剥離させる際の剥離力を制御する。
　また、さらに好ましくは、第１の検出位置で保護フィルムの有無を検出する第１検出手段、および、第２の検出位置で保護フィルムの有無を検出する第２検出手段が、光の透過率を測定することにより、保護フィルムの有無を検出する。 More preferably, the peeling force when peeling off the protective film is controlled by controlling at least one of the torque of the winding means of the protective film and the rotational speed.
More preferably, the first detection means for detecting the presence / absence of the protective film at the first detection position and the second detection means for detecting the presence / absence of the protection film at the second detection position have the light transmittance. The presence or absence of the protective film is detected by measuring.
　本発明の機能性フィルムの製造装置は、真空中で、貼着性を有する保護フィルムを基材の被処理面に積層して貼着してなる積層体を、ロール状に巻回してなる積層体ロールから、積層体を引き出し、長手方向に搬送しつつ、基材から保護フィルムを剥離し、基材の被処理面に処理を行なう機能性フィルムの製造装置において、基材から剥離した保護フィルムを巻き取る巻取り手段と、基材に所定の処理を行なう処理手段と、基材の搬送方向において、処理手段よりも上流側に配置され、基材上の保護フィルムの有無を検出する第１検出手段と、処理手段と第１検出手段との間に配置され、基材上の保護フィルムの有無を検出する第２検出手段と、第１検出手段および第２検出手段の検出結果に応じて、第１検出手段と第２検出手段との間で、保護フィルムが基材から剥離するように、巻取り手段の剥離力を制御する制御手段とを有することを特徴とする。 The functional film manufacturing apparatus of the present invention is a laminate in which a laminate formed by laminating and sticking a protective film having adhesive properties on a surface to be treated of a base material is wound in a roll shape in a vacuum. The protective film is peeled off from the base material in a functional film manufacturing apparatus that pulls out the laminate from the body roll and transports it in the longitudinal direction while peeling the protective film from the base material and processing the surface to be treated of the base material. A winding means for winding the substrate, a processing means for performing a predetermined process on the base material, and a first means for detecting the presence or absence of a protective film on the base material, arranged upstream of the processing means in the transport direction of the base material. According to detection results of the detection means, the second detection means that is disposed between the processing means and the first detection means and detects the presence or absence of the protective film on the substrate, and the detection results of the first detection means and the second detection means Between the first detection means and the second detection means As the protective film is peeled off from the substrate, and having a control means for controlling the release force of the winding means.
　好ましくは、制御手段は、第２検出手段が保護フィルムを検出した場合に、巻取り手段のトルクと、回転速度の少なくともいずれか一方が大きくなるように制御する。
　また、さらに好ましくは、制御手段は、第１検出手段が保護フィルムを検出しなかった場合に、巻取り手段のトルクと、回転速度の少なくともいずれか一方が小さくなるように制御する。
　また、さらに好ましくは、第２検出手段は、処理手段と処理手段の直上流側の搬送ロールとの間に配置される。
　また、さらに好ましくは、周面が処理手段に対面するように配置され、基材が周面の所定領域に巻き掛けられて搬送する円筒状のドラムを有する。
　さらに好ましくは、第２検出手段は、基材がドラムに巻き掛けられている位置で、基材上の保護フィルムの有無を検出する。
　また、さらに好ましくは、ドラムの周面を冷却する冷却手段を有する。 Preferably, the control unit performs control so that at least one of the torque of the winding unit and the rotation speed is increased when the second detection unit detects the protective film.
More preferably, the control means performs control so that at least one of the torque of the winding means and the rotation speed is reduced when the first detection means does not detect the protective film.
More preferably, the second detection means is disposed between the processing means and the transport roll immediately upstream of the processing means.
More preferably, it has a cylindrical drum which is arranged so that the peripheral surface faces the processing means, and the substrate is wound around a predetermined area of the peripheral surface and conveyed.
More preferably, a 2nd detection means detects the presence or absence of the protective film on a base material in the position where the base material is wound around the drum.
More preferably, it has a cooling means for cooling the peripheral surface of the drum.
　また、さらに好ましくは、第１検出手段、および、第２検出手段が、光の透過率を測定することにより、保護フィルムの有無を検出する。 More preferably, the first detection means and the second detection means detect the presence or absence of the protective film by measuring the light transmittance.
　本発明の機能性フィルムの製造方法および製造装置は、真空中で、基材に保護フィルムを貼着してなる積層体を、ロール状に巻回してなる積層体ロールから、積層体を引き出し、長手方向に搬送しつつ、基材から保護フィルムを剥離する。保護フィルムを剥離した基材の被処理面に処理を行なうに際し、処理を行なう前の積層体の搬送中に、所定の第１の検出位置で、基材上の保護フィルムの有無を検出し、第１の検出位置と処理位置との間の、所定の第２の検出位置で、基材上の保護フィルムの有無を検出する。第１の検出位置と第２の検出位置での検出結果に応じて、第１の検出位置と第２の検出位置との間で、保護フィルムが基材から剥離するように、剥離力を制御する制御工程を有する。 The production method and the production apparatus of the functional film of the present invention draws a laminate from a laminate roll formed by winding a laminate formed by sticking a protective film on a base material in a roll in a vacuum, The protective film is peeled from the substrate while being conveyed in the longitudinal direction. When carrying out the treatment on the surface to be treated of the substrate from which the protective film has been peeled off, during the transport of the laminate before carrying out the treatment, the presence or absence of the protective film on the substrate is detected at a predetermined first detection position, The presence or absence of the protective film on the substrate is detected at a predetermined second detection position between the first detection position and the processing position. According to the detection results at the first detection position and the second detection position, the peeling force is controlled so that the protective film is peeled from the base material between the first detection position and the second detection position. A control step for
　そのため、積層体の長手方向に、基材と保護フィルムとの密着力が変化する場合であっても、保護フィルムが適正な位置で剥離するように、保護フィルムの剥離力を制御するので、保護フィルムが基板から剥離しないことを防止できる。また、剥離力が過剰となって、保護フィルムが基材を引っ張り、基材の搬送テンションが緩んでしまうことを防止できるので、基材にシワが発生したり、ドラムとの密着が緩んで基材が冷却されず熱によって変形したりすることを防止できる。これにより、本発明の製造方法は、目的とする性能を有する機能性フィルムを、安定して製造できる。 Therefore, even if the adhesion force between the base material and the protective film changes in the longitudinal direction of the laminate, the protective film peel strength is controlled so that the protective film peels off at an appropriate position. It can prevent that a film does not peel from a board | substrate. In addition, it is possible to prevent the peeling force from becoming excessive and the protective film from pulling the base material to loosen the transport tension of the base material. It is possible to prevent the material from being cooled and deformed by heat. Thereby, the manufacturing method of this invention can manufacture the functional film which has the target performance stably.
本発明の機能性フィルムの製造方法を実施する製造装置の一例を概念的に示す図である。It is a figure which shows notionally an example of the manufacturing apparatus which enforces the manufacturing method of the functional film of this invention. 本発明の機能性フィルムの製造方法を実施する製造装置の他の一例を概念的に示す図である。It is a figure which shows notionally another example of the manufacturing apparatus which enforces the manufacturing method of the functional film of this invention. 本発明の機能性フィルムの製造方法を実施する製造装置の他の一例を概念的に示す図である。It is a figure which shows notionally another example of the manufacturing apparatus which enforces the manufacturing method of the functional film of this invention.
　以下、本発明の機能性フィルムの製造方法および製造装置について、添付の図面に示される好適例を基に、詳細に説明する。 Hereinafter, the functional film production method and production apparatus of the present invention will be described in detail on the basis of preferred examples shown in the accompanying drawings.
　図１は、本発明の機能性フィルムの製造方法の一例を実施する製造装置の概念図である。
　図１に示す製造装置１０は、基材１２の表面に保護フィルム１４を積層して貼着してなる積層体１６を用い、真空中において、基材１２から保護フィルム１４を剥離して、基材１２の表面を処理して、機能性フィルム（機能性フィルムの中間体も含む）２０を製造するものである。
　なお、基材１２の表面とは、被処理面であり、すなわち、後述する成膜や各種の表面処理等の処理が施される面である。 FIG. 1 is a conceptual diagram of a production apparatus for carrying out an example of the method for producing a functional film of the present invention.
The manufacturing apparatus 10 shown in FIG. 1 uses a laminate 16 formed by laminating and adhering a protective film 14 on the surface of a base material 12, and peeling the protective film 14 from the base material 12 in a vacuum. The surface of the material 12 is processed to produce a functional film (including an intermediate of the functional film) 20.
In addition, the surface of the base material 12 is a surface to be processed, that is, a surface on which processing such as film formation and various surface treatments described later is performed.
　図１に示す製造装置１０は、いわゆるロール・ツー・ロール(Roll to Roll)によって、基材１２の処理を行なうもので、長尺な基材１２（ウエブ状の基材）と長尺な保護フィルム１４とを積層してなる長尺な積層体１６を、ロール状に巻回してなる基材ロール２４から、積層体１６を引き出して、長手方向に搬送しつつ、積層体１６から保護フィルム１４を剥離して、基材１２の表面を処理して、処理済の基材１２、すなわち、本発明の製造方法による機能性フィルム２０を、再度、ロール状に巻回する。 The manufacturing apparatus 10 shown in FIG. 1 performs processing of the base material 12 by so-called roll-to-roll (Roll to Roll), and the long base material 12 (web-like base material) and the long protection. The protective film 14 is removed from the laminated body 16 while the laminated body 16 is pulled out from the base roll 24 formed by laminating the long laminated body 16 formed by laminating the film 14 in a roll shape and conveyed in the longitudinal direction. And the surface of the base material 12 is treated, and the treated base material 12, that is, the functional film 20 according to the production method of the present invention is wound again in a roll shape.
　図１に示す製造装置１０は、一例として、真空チャンバ２６と、この真空チャンバ２６内に配置される、回転軸２８、テンションピックアップロール３０、ドラム３２、処理手段３４、巻取り軸３６、テンションピックアップロール３８、第２巻取り軸４０、ガイドローラ４４、第１検出手段４６、および、第２検出手段４８と、真空チャンバ２６内を排気する真空排気手段４２と、第１検出手段４６および第２検出手段４８の検出結果から第２巻取り軸４０のトルクと、回転速度の少なくともいずれか一方を制御する制御手段５０とを有して構成される。
　なお、本発明の機能性フィルムの製造方法を実施する製造装置１０は、これらの部材以外にも、積層体１６や基材１２の搬送ガイド、各種のセンサなど、真空中において、積層体１６および基材１２を長手方向に搬送しつつ、保護フィルム１４を剥離して、基材１２の表面を処理する装置に配置することが出来る各種の部材をさらに有してもよい。 As an example, the manufacturing apparatus 10 shown in FIG. 1 includes a vacuum chamber 26, a rotary shaft 28, a tension pickup roll 30, a drum 32, a processing means 34, a winding shaft 36, and a tension pickup disposed in the vacuum chamber 26. The roll 38, the second winding shaft 40, the guide roller 44, the first detection means 46, the second detection means 48, the vacuum exhaust means 42 for exhausting the inside of the vacuum chamber 26, the first detection means 46 and the second detection means 46. From the detection result of the detection means 48, it has the control means 50 which controls the torque of the 2nd winding shaft 40, and at least any one of rotational speed.
In addition, the manufacturing apparatus 10 which implements the manufacturing method of the functional film of this invention is not only these members, but the laminated body 16 and the conveyance guides of the base material 12, various sensors, etc. in the vacuum, the laminated body 16 and You may further have various members which can arrange | position to the apparatus which peels the protective film 14 and processes the surface of the base material 12, conveying the base material 12 to a longitudinal direction.
　本発明において、基材１２には、特に限定はなく、真空中での成膜や表面処理を行なうことが可能であるならば、各種のシート状物が利用可能である。
　具体的には、ポリエチレンテレフタレート（ＰＥＴ）、ポリエチレンナフタレート、ポリエチレン、ポリプロピレン、ポリスチレン、ポリアミド、ポリ塩化ビニル、ポリカーボネート、ポリアクリロニトリル、ポリイミド、ポリアクリレート、ポリメタクリレートなどの有機物からなるプラスチック（樹脂）フィルムや、アルミニウム、ステンレスなどの金属シート状物等が、基材１２として、好適に利用可能である。 In the present invention, the substrate 12 is not particularly limited, and various sheet-like materials can be used as long as film formation and surface treatment in vacuum can be performed.
Specifically, plastic (resin) films made of organic substances such as polyethylene terephthalate (PET), polyethylene naphthalate, polyethylene, polypropylene, polystyrene, polyamide, polyvinyl chloride, polycarbonate, polyacrylonitrile, polyimide, polyacrylate, polymethacrylate, Metal sheets such as aluminum and stainless steel can be suitably used as the substrate 12.
　また、本発明においては、このようなプラスチックフィルム等を支持体として、その上に、保護層、貼着層、光反射層、遮光層、平坦化層、緩衝層、応力緩和層、ガスバリア膜等の、各種の機能を得るための機能膜（機能層）が成膜されているものを、基材１２として用いてもよい。この場合には、通常、これらの膜の表面が、基材１２の表面となる。
　この際においては、支持体の上に１層のみ機能膜が成膜されたものを基材１２として用いてもよく、あるいは、支持体の上に複数の機能膜（層）が成膜されたものを基材１２として用いてもよい。また、基材１２が、支持体の上に複数の機能膜（層）が成膜されたものである場合には、同じ層を複数層有してもよく、例えば、平坦化層とガスバリア膜との組み合わせを複数回繰り返し積層した構成のように、２層以上を組み合わせてなる膜を、複数回、繰り返し積層したものであってもよい。 In the present invention, such a plastic film is used as a support, and a protective layer, an adhesive layer, a light reflection layer, a light shielding layer, a planarization layer, a buffer layer, a stress relaxation layer, a gas barrier film, etc. Those having a functional film (functional layer) for obtaining various functions may be used as the substrate 12. In this case, the surface of these films is usually the surface of the substrate 12.
In this case, a substrate in which only one layer of a functional film is formed on the support may be used as the substrate 12, or a plurality of functional films (layers) are formed on the support. A thing may be used as the substrate 12. Moreover, when the base material 12 is a substrate in which a plurality of functional films (layers) are formed on a support, it may have a plurality of the same layers, for example, a planarization layer and a gas barrier film. And a combination of two or more layers may be repeatedly laminated a plurality of times.
　保護フィルム（ラミネートフィルム）１４は、このような基材１２の表面を保護するためのものであり、基材１２の表面に当接して、基材１２に積層され貼着している。
　本発明の機能性フィルムの製造方法において、保護フィルム１４には、特に限定はなく、機能性フィルムの製造において利用されている、粘着性を有する保護フィルムが、各種、利用可能である。
　従って、保護フィルム１４は、基材１２の表面との当接面に貼着剤層（粘着剤層／接着剤層）が形成されたものであっても、保護フィルム１４自身が粘着性を有するものであってもよい。 The protective film (laminate film) 14 is for protecting the surface of such a base material 12, is in contact with the surface of the base material 12, and is laminated and adhered to the base material 12.
In the method for producing a functional film of the present invention, the protective film 14 is not particularly limited, and various protective films having adhesiveness that are used in the production of the functional film can be used.
Therefore, even if the protective film 14 has an adhesive layer (adhesive layer / adhesive layer) formed on the contact surface with the surface of the substrate 12, the protective film 14 itself has adhesiveness. It may be a thing.
　なお、保護フィルム１４は、基材１２の表面を保護する目的で積層されることを考慮すると、基材１２（基材１２の表面）よりも剛性や硬さの低い物を用いるのが一般的である。 In consideration of the fact that the protective film 14 is laminated for the purpose of protecting the surface of the base material 12, it is common to use a material having lower rigidity or hardness than the base material 12 (the surface of the base material 12). It is.
　図１に示す製造装置１０において、このような積層体１６を巻回してなる基材ロール２４は、回転軸２８に装填される。
　積層体１６は、この回転軸２８に装填された基材ロール２４から引き出されて、長手方向に搬送されつつ、テンションピックアップロール３０およびガイドローラ４４に案内された後、基材１２から保護フィルム１４が剥離される。
　保護フィルム１４が剥離された基材１２は、ドラム３２に巻き掛けられた状態で搬送され、処理手段３４によって、成膜や表面処理等の処理が行われた後、テンションピックアップロール３８に案内されて、巻取り軸３６に巻き取られる。 In the manufacturing apparatus 10 shown in FIG. 1, the base material roll 24 formed by winding such a laminate 16 is loaded on the rotary shaft 28.
The laminate 16 is pulled out from the base roll 24 loaded on the rotating shaft 28 and guided in the longitudinal direction while being guided by the tension pick-up roll 30 and the guide roller 44, and then the protective film 14 from the base 12. Is peeled off.
The base material 12 from which the protective film 14 has been peeled is conveyed while being wound around a drum 32, and after being subjected to processing such as film formation and surface treatment by the processing means 34, it is guided to the tension pickup roll 38. Then, it is wound on the winding shaft 36.
　他方、基材１２から剥離された保護フィルム１４は、第２巻取り軸４０に巻き取られる。
　ここで、本発明の機能性フィルムの製造方法においては、第１検出手段４６および第２検出手段４８が、保護フィルム１４の有無を検出し、この検出結果に応じて、第２巻取り軸４０が保護フィルム１４を巻き取る際の、第２巻取り軸４０のトルクと、回転速度の少なくともいずれか一方を制御することによって、保護フィルム１４と基材１２との剥離が所定の範囲内で起こるようにするものである。この点に関しては後に詳述する。 On the other hand, the protective film 14 peeled off from the substrate 12 is wound around the second winding shaft 40.
Here, in the method for producing a functional film of the present invention, the first detection means 46 and the second detection means 48 detect the presence or absence of the protective film 14, and according to the detection result, the second winding shaft 40. When at least one of the torque of the second winding shaft 40 and the rotation speed when the protective film 14 is wound is controlled, the protective film 14 and the substrate 12 are peeled off within a predetermined range. It is what you want to do. This will be described in detail later.
　テンションピックアップロール３０は、搬送される積層体１６を所定の経路に案内するためのものであると共に、搬送される積層体１６（基材１２）にかかるテンション（張力）を測定するためのものである。テンションピックアップロール３０、および、後述するテンションピックアップロール３８が測定したテンションの測定結果は、図示しない搬送制御手段に送られ、所定のテンションとなるように、搬送制御手段により、回転軸２８および巻取り軸３６を制御してもよい。 The tension pick-up roll 30 is used for guiding the transported laminate 16 to a predetermined path and for measuring the tension applied to the transported laminate 16 (base material 12). is there. The tension measurement result measured by the tension pickup roll 30 and the tension pickup roll 38, which will be described later, is sent to a conveyance control means (not shown), and the conveyance control means causes the rotary shaft 28 and the winding to reach a predetermined tension. The shaft 36 may be controlled.
　積層体１６（基材１２）の張力を測定するためのテンションピックアップロール３０としては、ロードセルにより張力を検出するものや、ローラの変位を測定して張力を検出するもの等、ロール・ツー・ロールの成膜装置等に利用されている公知のテンションピックアップロールが、各種利用可能である。この点に関しては、後述するテンションピックアップロール３８も同様である。 As the tension pickup roll 30 for measuring the tension of the laminate 16 (base material 12), roll-to-roll, such as one that detects the tension with a load cell, one that detects the tension by measuring the displacement of the roller, etc. Various known tension pick-up rolls used in the film forming apparatus can be used. This also applies to the tension pickup roll 38 described later.
　ガイドローラ４４は、積層体１６を所定の搬送経路で案内する通常のガイドローラである。 The guide roller 44 is a normal guide roller that guides the laminated body 16 along a predetermined conveyance path.
　第２巻取り軸４０は、基材１２から剥離された保護フィルム１４を巻き取るものである。
　また、第２巻取り軸４０は、巻取り回転軸のトルクと、回転速度の少なくともいずれか一方が、後述する制御手段５０によって制御される。これにより、保護フィルム１４と基材１２との剥離が所定の位置で起こるように、保護フィルム１４の剥離力が制御される。この点に関しては、後に詳述する。 The second winding shaft 40 winds up the protective film 14 peeled from the substrate 12.
Further, the second winding shaft 40 is controlled by the control means 50 described later at least one of the torque of the winding rotation shaft and the rotation speed. Thereby, the peeling force of the protective film 14 is controlled so that peeling with the protective film 14 and the base material 12 occurs in a predetermined position. This will be described in detail later.
　第１検出手段４６は、基材１２上の保護フィルム１４の有無を検出するものであり、基材１２の搬送方向において、ガイドローラ４４と第２検出手段４８との間に配置される。
　第１検出手段４６は、光照射部４６ａと受光部４６ｂとを有する。 The first detection means 46 detects the presence or absence of the protective film 14 on the substrate 12, and is arranged between the guide roller 44 and the second detection means 48 in the conveyance direction of the substrate 12.
The 1st detection means 46 has the light irradiation part 46a and the light-receiving part 46b.
　光照射部４６ａと受光部４６ｂとは、基材１２（積層体１６）を挟むように配置されている。
　光照射部４６ａは基材１２（積層体１６）を挟んで配置される受光部４６ｂに向かって光を照射するものである。
　光照射部４６ａとしては、特に限定はなく、レーザ光源やＬＥＤ光源等の種々の公知の光源を用いることができる。 The light irradiation part 46a and the light receiving part 46b are arranged so as to sandwich the base material 12 (laminated body 16).
The light irradiation part 46a irradiates light toward the light receiving part 46b arranged with the base material 12 (laminated body 16) interposed therebetween.
There is no limitation in particular as the light irradiation part 46a, Various well-known light sources, such as a laser light source and a LED light source, can be used.
　受光部４６ｂは、光照射部４６ａが照射した光を受光するものである。
　ここで、保護フィルム１４が基材１２から剥離する位置である剥離点Ｐが第１検出手段４６よりも、搬送方向下流側である場合には、光照射部４６ａが照射した光は、剥離済みの保護フィルム１４と積層体１６（基材１２と保護フィルム１４）とを通過して、受光部４６ｂにて受光される。他方、剥離点Ｐが第１検出手段４６よりも搬送方向上流側である場合には、光照射部４６ａが照射した光は、基材１２のみを通過して、受光部４６ｂにて受光される。なお、本発明では、第１検出手段４６によって剥離点Ｐを検出できれば、図１の態様に限られない。すなわち、第２巻取り軸４０の位置に応じて、光照射部４６ａから照射された光が通過する対象は上記態様と異なってもよい。 The light receiving unit 46b receives light emitted from the light irradiation unit 46a.
Here, when the peeling point P, which is the position where the protective film 14 peels from the base material 12, is downstream in the transport direction from the first detection means 46, the light irradiated by the light irradiation unit 46a has been peeled off. The protective film 14 and the laminate 16 (the base material 12 and the protective film 14) pass through and are received by the light receiving unit 46b. On the other hand, when the peeling point P is on the upstream side in the transport direction from the first detection means 46, the light irradiated by the light irradiation unit 46a passes only through the base material 12 and is received by the light receiving unit 46b. . In addition, in this invention, if the peeling point P can be detected by the 1st detection means 46, it will not be restricted to the aspect of FIG. That is, according to the position of the 2nd winding shaft 40, the object through which the light irradiated from the light irradiation part 46a passes may differ from the said aspect.
　すなわち、剥離点Ｐと第２巻取り軸４０の位置に応じて、光が通過するフィルムが異なることにより、受光部４６ｂが受光する光の状態が変化するので、受光部４６ｂは、受光した光の状態によって、基材１２上に保護フィルム１４が貼着しているか否かを検出する。
　例えば、基材１２が光を透過する材料で形成され、保護フィルム１４が光を透過しない材料で形成される場合には、受光部４６ｂが光を受光した場合に保護フィルム１４が基材１２上に無いことを検出し、光を受光しない場合に保護フィルム１４が基材１２上に在ることを検出する。あるいは、基材１２および保護フィルム１４共に光を透過する場合には、保護フィルム１４の有無によって、受光部４６ｂが受光する光の強度（透過率）が変化するので、受光した光の強度によって、保護フィルム１４の有無を検出すればよい。
　受光部４６ｂは、検出結果を制御手段５０に供給する。 That is, the state of the light received by the light receiving unit 46b varies depending on the film through which light passes depending on the position of the peeling point P and the second winding shaft 40, so that the light receiving unit 46b Whether or not the protective film 14 is stuck on the substrate 12 is detected depending on the state.
For example, when the base material 12 is formed of a material that transmits light and the protective film 14 is formed of a material that does not transmit light, the protective film 14 is formed on the base material 12 when the light receiving unit 46b receives light. If the light is not received, it is detected that the protective film 14 is on the substrate 12. Alternatively, when both the base material 12 and the protective film 14 transmit light, the intensity (transmittance) of the light received by the light receiving unit 46b changes depending on the presence or absence of the protective film 14, so that depending on the intensity of the received light, What is necessary is just to detect the presence or absence of the protective film 14.
The light receiving unit 46 b supplies the detection result to the control unit 50.
　第２検出手段４８は、基材１２上の保護フィルム１４の有無を検出するものであり、基材１２の搬送方向において、第１検出手段４６と処理手段３４との間に配置される。
　図１に示す製造装置１０においては、第２検出手段４８は、基材１２がドラム３２に巻き掛けられた位置で、基材１２に対面して配置されている。
　第２検出手段４８は、基材１２に向かって光を照射すると共に、基材１２を透過し、ドラム３２から反射された光を受光するものである。 The second detection unit 48 detects the presence or absence of the protective film 14 on the substrate 12, and is disposed between the first detection unit 46 and the processing unit 34 in the conveyance direction of the substrate 12.
In the manufacturing apparatus 10 shown in FIG. 1, the second detection means 48 is disposed facing the base material 12 at a position where the base material 12 is wound around the drum 32.
The second detection means 48 irradiates light toward the base material 12, and receives light reflected through the base material 12 and reflected from the drum 32.
　ここで、保護フィルム１４が基材１２から剥離する位置である剥離点Ｐが第２検出手段４８よりも、搬送方向上流側である場合には、第２検出手段４８が照射した光は、基材１２のみを通過してドラム３２に反射され、再び、基材１２を通過して、第２検出手段４８にて受光される。他方、剥離点Ｐが第２検出手段４８よりも搬送方向下流側である場合には、第２検出手段４８が照射した光は、剥離した保護フィルム１４と積層体１６（基材１２と保護フィルム１４）とを通過して、ドラム３２に反射されて、再び、積層体１６と剥離した保護フィルム１４とを通過して、第２検出手段４８にて受光される場合がある。
　すなわち、剥離点Ｐと第２巻取り軸４０の位置に応じて、第２検出手段４８が受光する光の状態が変化するので、第２検出手段４８は、受光した光の状態によって、基材１２上に保護フィルム１４が貼着しているか否かを検出できる。 Here, when the peeling point P, which is the position where the protective film 14 is peeled from the substrate 12, is upstream of the second detecting means 48, the light emitted by the second detecting means 48 is The light passes through only the material 12, is reflected by the drum 32, passes through the base material 12 again, and is received by the second detection means 48. On the other hand, when the peeling point P is on the downstream side in the transport direction with respect to the second detection means 48, the light irradiated by the second detection means 48 is separated from the protective film 14 and the laminate 16 (base material 12 and protective film). 14) and reflected by the drum 32, may pass through the laminate 16 and the peeled protective film 14 again, and may be received by the second detection means 48.
That is, since the state of the light received by the second detection unit 48 changes according to the position of the peeling point P and the second winding shaft 40, the second detection unit 48 depends on the state of the received light. It can be detected whether or not the protective film 14 is stuck on the surface 12.
　なお、第１検出手段４６および第２検出手段４８はいずれも、第１検出手段４６のように、光を透過させて保護フィルム１４を検出するものであってもよく、第２検出手段４８のように、光を反射させて保護フィルム１４を検出するものであってもよい。ここで、光を反射させて保護フィルム１４の有無を検出する手段は、光が往復して各フィルムを２度通過するため、検出能が向上し、好ましい。 Both the first detection means 46 and the second detection means 48 may detect the protective film 14 by transmitting light, like the first detection means 46. As described above, the protective film 14 may be detected by reflecting light. Here, the means for reflecting the light to detect the presence or absence of the protective film 14 is preferable because the light reciprocates and passes through each film twice, so that the detection ability is improved.
　また、第２検出手段のように、基材１２をドラム３２に巻き掛けた位置で、ドラム３２に光を照射し、その反射光を検出すれば、ドラム３２（反射物）と基材１２（積層体１６）との間に空気が介在しないので、反射した光を検出する際に、誤差が生じにくく、検出能が向上する。
　第２検出手段４８は、検出結果を制御手段５０に供給する。 Moreover, if the drum 32 is irradiated with light at the position where the substrate 12 is wound around the drum 32 and the reflected light is detected as in the second detection means, the drum 32 (reflecting material) and the substrate 12 ( Since air does not intervene between the laminated body 16) and the reflected light is detected, an error hardly occurs and the detection performance is improved.
The second detection unit 48 supplies the detection result to the control unit 50.
　制御手段５０は、第１検出手段４６および第２検出手段４８が検出した保護フィルム１４の有無の検出結果に応じて、第２巻取り軸４０のトルクと、回転速度の少なくともいずれか一方を制御するものである。
　具体的には、第１検出手段４６が保護フィルム１４を検出し、第２検出手段４８が保護フィルム１４を検出しない場合には、剥離点Ｐが、第１検出手段４６と第２検出手段４８との間に在るので、正常に剥離が行なわれていると判断して、第２巻取り軸４０のトルクと、回転速度のいずれをも制御しない。 The control unit 50 controls at least one of the torque of the second winding shaft 40 and the rotation speed according to the detection result of the presence or absence of the protective film 14 detected by the first detection unit 46 and the second detection unit 48. To do.
Specifically, when the first detection unit 46 detects the protective film 14 and the second detection unit 48 does not detect the protective film 14, the peeling point P is the first detection unit 46 and the second detection unit 48. Therefore, it is determined that peeling is normally performed, and neither the torque of the second winding shaft 40 nor the rotation speed is controlled.
　これに対して、第１検出手段４６が保護フィルム１４を検出しなかった場合には、剥離点Ｐが第１検出手段４６よりも上流側に在る。すなわち、保護フィルム１４を引っ張る力（剥離力）が大きすぎるおそれがある。したがって、第２巻取り軸４０のトルクと、回転速度の少なくともいずれか一方を小さくして、剥離力が小さくなるように制御する。他方、第２検出手段４８が保護フィルム１４を検出した場合には、剥離点Ｐが第２検出手段４８よりも下流側に在る。すなわち、保護フィルム１４の剥離力が小さすぎるので、第２巻取り軸４０のトルクと、回転速度の少なくともいずれか一方大きくして、剥離力が大きくなるように制御する。 On the other hand, when the first detection means 46 does not detect the protective film 14, the peeling point P is on the upstream side of the first detection means 46. That is, there is a possibility that the force (peeling force) for pulling the protective film 14 is too large. Therefore, control is performed such that at least one of the torque of the second winding shaft 40 and the rotational speed is reduced to reduce the peeling force. On the other hand, when the second detection unit 48 detects the protective film 14, the peeling point P is on the downstream side of the second detection unit 48. That is, since the peeling force of the protective film 14 is too small, at least one of the torque of the second winding shaft 40 and the rotation speed is increased so that the peeling force is increased.
　前述のとおり、真空中で、ＲｔｏＲによって長尺な基材に連続的に処理を行なう装置において、基材の表面を保護するために、基材と保護フィルムとを積層してなる積層体をロール状に巻回した積層体ロールを用いる場合には、積層体ロールの積層体間に存在する空気が抜けて、巻き締まりが生じる。そのため、基材と保護フィルムとが押圧されて、基材と保護フィルムとの密着力が高くなる。特に、積層体ロールの内径側に向かうに従って、巻き締まりが強くなるので、積層体ロールの内径側の積層体ほど、基材と保護フィルムとの密着力が高くなり、積層体の長手方向に、基材と保護フィルムとの密着力が変化する。 As described above, in an apparatus that continuously processes a long base material with RtoR in a vacuum, in order to protect the surface of the base material, a laminate formed by laminating the base material and the protective film is rolled. When a laminate roll wound in a shape is used, air existing between the laminates of the laminate roll is released, and winding tightening occurs. Therefore, a base material and a protective film are pressed and the adhesive force of a base material and a protective film becomes high. In particular, as tightening becomes stronger toward the inner diameter side of the laminate roll, the laminate on the inner diameter side of the laminate roll has a higher adhesion between the substrate and the protective film, and in the longitudinal direction of the laminate, The adhesion between the substrate and the protective film changes.
　そのため、従来の成膜方法では、処理が進むに従って、基材と保護フィルムとを剥離するために、保護フィルムを引っ張る力（剥離力）に対して、基材と保護フィルムとの密着力が高くなり、保護フィルムが基材から剥離されなくなってしまう。
　また、保護フィルムを引っ張る力（剥離力）を十分に大きくして、密着力が高くても保護フィルムを剥離できるようにした場合には、基材と保護フィルムとの密着力が弱い箇所では、保護フィルムが基材を過剰に引っ張るので、基材の搬送テンションが緩む。これにより、基材にシワが発生して基材が損傷する。また、ドラムによって基材を冷却している場合には、基材とドラムとの密着が緩み、基材が十分に冷却されず、成膜処理で発生する熱によって基材が変形するなどの熱ダメージを受けてしまう。 Therefore, in the conventional film formation method, the adhesion between the base material and the protective film is higher than the pulling force of the protective film (peeling force) in order to peel off the base material and the protective film as the processing proceeds. Thus, the protective film is not peeled off from the substrate.
In addition, when the force to pull the protective film (peeling force) is sufficiently large so that the protective film can be peeled even if the adhesive force is high, in the place where the adhesive force between the substrate and the protective film is weak, Since the protective film pulls the substrate excessively, the conveyance tension of the substrate is loosened. Thereby, a wrinkle generate | occur | produces in a base material and a base material is damaged. In addition, when the substrate is cooled by the drum, the adhesion between the substrate and the drum is loosened, the substrate is not cooled sufficiently, and the substrate is deformed by heat generated in the film formation process. Take damage.
　これに対して、本発明の機能性フィルムの製造方法においては、第１検出手段４６および第２検出手段４８が、保護フィルム１４の有無を検出し、この検出結果に応じて、第２巻取り軸４０が保護フィルム１４を巻き取る際の、第２巻取り軸４０のトルクと、回転速度の少なくともいずれか一方を制御する。これにより、保護フィルム１４と基材１２との剥離が所定の範囲内で起こるように制御できるので、積層体の長手方向に、基材１２と保護フィルム１４との密着力が変化した場合であっても、保護フィルム１４を剥離させる剥離力を適正な値にすることができ、基材１２と保護フィルム１４とを所定の位置で剥離させることができる。すなわち、保護フィルム１４が剥離されずに搬送されてしまうことがない。また、剥離力が大きすぎて、基材１２の搬送テンションが緩み、シワが発生したり、熱ダメージを受けたりして、基材１２が損傷することを防止できる。また、保護フィルム１４を剥離しつつ、基材１２を安定して搬送することができるので、目的とする性能を有する機能性フィルムを、安定して製造することができる。 On the other hand, in the method for producing a functional film of the present invention, the first detection means 46 and the second detection means 48 detect the presence or absence of the protective film 14, and the second winding is performed according to the detection result. The shaft 40 controls at least one of the torque of the second winding shaft 40 and the rotational speed when the protective film 14 is wound up. Thereby, since it can control so that peeling with the protective film 14 and the base material 12 may occur within a predetermined range, it was a case where the adhesive force of the base material 12 and the protective film 14 changed to the longitudinal direction of the laminated body. Even if it is, the peeling force which peels the protective film 14 can be made into an appropriate value, and the base material 12 and the protective film 14 can be peeled in a predetermined position. That is, the protective film 14 is not transported without being peeled off. In addition, it is possible to prevent the base material 12 from being damaged due to the peeling force being too large, the transport tension of the base material 12 is loosened, and wrinkles are generated or heat damage is caused. Moreover, since the base material 12 can be stably conveyed while peeling the protective film 14, the functional film which has the target performance can be manufactured stably.
　前述のように、製造装置１０において、保護フィルム１４が剥離された基材１２は、ドラム３２に搬送される。
　ドラム３２は、基材１２を所定の処理位置に位置させつつ、長手方向に搬送する円筒状の物である。基材１２は、ドラム３２の所定領域に巻き掛けられて、長手方向に搬送されつつ、処理手段３４によって、成膜や表面処理等の処理に供される。 As described above, in the manufacturing apparatus 10, the base material 12 from which the protective film 14 has been peeled is conveyed to the drum 32.
The drum 32 is a cylindrical object that is transported in the longitudinal direction while the base material 12 is positioned at a predetermined processing position. The base material 12 is wound around a predetermined region of the drum 32 and is subjected to processing such as film formation and surface treatment by the processing means 34 while being conveyed in the longitudinal direction.
　本発明の機能性フィルムの製造方法において、基材１２の表面に施す処理には、特に限定はなく、真空中で行なう各種の成膜や表面処理が、いずれも利用可能である。また、これらの処理は、公知の方法で行えばよい。
　従って、処理手段３４は、製造装置１０で基材１２の表面に施す処理に応じた、公知の構成を有する。 In the method for producing a functional film of the present invention, the treatment applied to the surface of the substrate 12 is not particularly limited, and any of various film formations and surface treatments performed in a vacuum can be used. These processes may be performed by a known method.
Therefore, the processing means 34 has a known configuration corresponding to the processing performed on the surface of the base material 12 by the manufacturing apparatus 10.
　一例として、製造装置１０が、ＩＣＰ－ＣＶＤ法（誘導結合型プラズマＣＶＤ）によって成膜を行なう装置であれば、処理手段３４は、誘導磁場を形成するための誘導コイルや、成膜領域に原料ガスを供給するためのガス供給手段等を有して構成される。
　製造装置１０が、ＣＣＰ－ＣＶＤ法（容量結合型プラズマＣＶＤ）によって成膜を行なう装置であれば、処理手段３４は、中空状で多数の小孔を有し電極および原料ガス供給部として作用するシャワー電極、プラズマ励起電力を供給する高周波電源（１３．５６ＭＨｚ等）、または、原料ガスの供給手段等を有して構成される。
　製造装置１０が、スパッタリングによって成膜を行なう装置であれば、処理手段３４は、ターゲットの保持手段や高周波電極、または、スパッタガスの供給手段等を有して構成される。処理手段３４が、反応性スパッタリングによって成膜を行なうものであれば、さらに、反応ガスの供給手段を有して構成される。
　製造装置１０が、成膜室が真空蒸着によって成膜を行なう装置であれば、処理手段３４は、蒸発源（ルツボ）、電子銃や抵抗加熱電源などの成膜材料の加熱手段、または、蒸発源のシャッタ等を有して構成される。 As an example, if the manufacturing apparatus 10 is an apparatus that forms a film by an ICP-CVD method (inductively coupled plasma CVD), the processing means 34 includes an induction coil for forming an induction magnetic field and a raw material in the film formation region. It has gas supply means for supplying gas and the like.
If the manufacturing apparatus 10 is an apparatus for forming a film by the CCP-CVD method (capacitive coupling type plasma CVD), the processing means 34 has a hollow shape with a large number of small holes and functions as an electrode and a source gas supply unit. A shower electrode, a high-frequency power source (such as 13.56 MHz) that supplies plasma excitation power, or a source gas supply unit is configured.
If the manufacturing apparatus 10 is an apparatus that forms a film by sputtering, the processing means 34 is configured to include a target holding means, a high-frequency electrode, a sputtering gas supply means, and the like. If the processing means 34 forms a film by reactive sputtering, the processing means 34 is further configured to have a reaction gas supply means.
If the manufacturing apparatus 10 is an apparatus in which the film formation chamber performs film formation by vacuum vapor deposition, the processing means 34 may be an evaporation source (crucible), a heating means for film forming materials such as an electron gun or a resistance heating power source, or evaporation. It has a source shutter and the like.
　また、基材１２の表面の処理は、成膜に限定はされず、真空中で行なう処理であれば、活性化、清浄化、粗面化、平坦化等の公知の表面処理も、好適に利用可能であり、また、基材１２の脱ガス処理も好適に利用可能である。
　一例として、製造装置１０が、プラズマによる表面の活性化や清浄化等を行なう装置である場合には、シャワー電極、プラズマ励起電力を供給する高周波電源（１３．５６ＭＨｚ等）、または、プロセスガスの供給手段等を有して構成される。
　また、製造装置１０が、熱アニールによる表面の平坦化や、基材１２からの脱ガスを行なう装置である場合には、シースヒータや温度を測定する熱電対等を有して構成される。 Further, the surface treatment of the substrate 12 is not limited to film formation, and known surface treatments such as activation, cleaning, roughening, and flattening can be suitably performed as long as the treatment is performed in a vacuum. In addition, the degassing treatment of the substrate 12 can be suitably used.
As an example, when the manufacturing apparatus 10 is an apparatus that activates or cleans the surface with plasma, a shower electrode, a high-frequency power source (such as 13.56 MHz) that supplies plasma excitation power, or a process gas It has a supply means and the like.
Further, when the manufacturing apparatus 10 is an apparatus for flattening the surface by thermal annealing or degassing from the base material 12, the manufacturing apparatus 10 includes a sheath heater, a thermocouple for measuring temperature, and the like.
　ここで、本発明の製造方法によれば、所定の剥離工程によって剥離されるまで、基材１２の表面を保護フィルム１４で保護できる。
　従って、本発明の機能性フィルムの製造方法は、ガスバリア膜の成膜によるガスバリアフィルムの製造のように、基材表面に高い平滑性等を要求される用途には、好適である。 Here, according to the manufacturing method of this invention, the surface of the base material 12 can be protected with the protective film 14 until it peels by a predetermined peeling process.
Therefore, the method for producing a functional film of the present invention is suitable for applications in which high smoothness or the like is required on the substrate surface, such as production of a gas barrier film by forming a gas barrier film.
　また、製造装置１０による処理の際に、基材１２に熱が加わる場合には、ドラム３２が冷却手段を有して、基材１２を冷却する構成としてもよい。 In addition, when heat is applied to the base material 12 during the processing by the manufacturing apparatus 10, the drum 32 may have a cooling unit to cool the base material 12.
　テンションピックアップロール３８は、ドラム３２上で処理された基材１２を所定の経路に案内するものであると共に、搬送される基材１２にかかるテンション（張力）を測定するためのものである。テンションピックアップロール３８が測定したテンションの測定結果は、図示しない搬送制御手段に送られる。 The tension pick-up roll 38 is for guiding the base material 12 processed on the drum 32 to a predetermined path and for measuring the tension applied to the transported base material 12. The tension measurement result measured by the tension pickup roll 38 is sent to a conveyance control means (not shown).
　真空排気手段４２は、真空チャンバ２６内を排気して、実施する処理に応じた所定の圧力にするものである。
　真空排気手段４２には、特に限定はなく、ターボポンプ、メカニカルブースターポンプ、ドライポンプ、ロータリーポンプなどの真空ポンプ、さらには、クライオコイル等の補助手段、到達真空度や排気量の調整手段等を利用する、真空成膜装置に用いられている公知の（真空）排気手段が、各種、利用可能である。 The vacuum exhaust means 42 exhausts the inside of the vacuum chamber 26 to a predetermined pressure corresponding to the processing to be performed.
The vacuum evacuation means 42 is not particularly limited, and a vacuum pump such as a turbo pump, a mechanical booster pump, a dry pump, and a rotary pump, an auxiliary means such as a cryocoil, a means for adjusting the ultimate vacuum and the exhaust amount, Various known (vacuum) evacuation means used in the vacuum film forming apparatus can be used.
　ドラム３２に巻き掛けられて長手方向に搬送されつつ、処理手段３４によって成膜等の処理を行われた基材１２、すなわち、本発明の製造方法による機能性フィルム２０は、テンションピックアップロール３８に案内されて、巻取り軸３６によって巻回され、再度、ロール状にされる。 The base material 12 that has been subjected to processing such as film formation by the processing means 34 while being wound around the drum 32 and conveyed in the longitudinal direction, that is, the functional film 20 according to the manufacturing method of the present invention is placed on the tension pickup roll 38. It is guided, wound by the winding shaft 36, and rolled again.
　以下、図１に示す製造装置１０の作用を説明する。
　前述のように、長尺な積層体１６は、ロール状に巻回されて基材ロール２４として供給される。
　基材ロール２４は、製造装置１０の回転軸２８に回転可能に装填される。基材ロール２４を回転軸２８に装填したら、積層体１６を引き出し、テンションピックアップロール３０およびガイドローラ４４に巻き掛けられた後に、基材１２と保護フィルム１４とが剥離される。基材１２から剥離された保護フィルム１４は、第２巻取り軸４０に送られ、所定の搬送経路で挿通される。一方、基材１２は、ガイドローラ４４から、ドラム３２の所定領域に巻き掛けられ、テンションピックアップロール３８によって案内され、巻取り軸３６に巻き掛けられる、所定の搬送経路で挿通される。 Hereinafter, the operation of the manufacturing apparatus 10 shown in FIG. 1 will be described.
As described above, the long laminate 16 is wound into a roll and supplied as the base roll 24.
The base material roll 24 is rotatably loaded on the rotary shaft 28 of the manufacturing apparatus 10. When the substrate roll 24 is loaded on the rotary shaft 28, the laminate 16 is pulled out and wound around the tension pickup roll 30 and the guide roller 44, and then the substrate 12 and the protective film 14 are peeled off. The protective film 14 peeled off from the substrate 12 is sent to the second winding shaft 40 and is inserted through a predetermined conveyance path. On the other hand, the base material 12 is wound around a predetermined region of the drum 32 from the guide roller 44, guided by the tension pickup roll 38, and inserted through a predetermined conveyance path wound around the winding shaft 36.
　積層体１６、基材１２および保護フィルム１４を挿通したら、真空チャンバ２６を閉塞して、真空排気手段４２を駆動して、真空チャンバ２６内の排気を開始する。並行して、処理手段３４において、基材１２の表面に施す処理の準備を開始する。
　真空チャンバ２６内が所定の圧力で安定し、また、処理手段３４が処理を実施できる状態となったら、巻取り軸３６および第２巻取り軸４０による巻取り、ドラム３２による基材１２の搬送、ならびに、回転軸２８による基材ロール２４からの積層体１６の送り出しを同期して行って、基材１２等の搬送を開始する。 When the laminate 16, the base material 12, and the protective film 14 are inserted, the vacuum chamber 26 is closed, and the vacuum exhaust means 42 is driven to start exhausting the vacuum chamber 26. In parallel, in the processing means 34, preparation for processing to be performed on the surface of the substrate 12 is started.
When the inside of the vacuum chamber 26 is stabilized at a predetermined pressure and the processing means 34 is ready to perform processing, winding by the winding shaft 36 and the second winding shaft 40 and transport of the substrate 12 by the drum 32 are performed. In addition, the feeding of the laminated body 16 from the base material roll 24 by the rotating shaft 28 is performed in synchronization, and the transport of the base material 12 and the like is started.
　基材１２等の搬送が安定したら、基材１２の表面の処理を開始する。
　これにより、積層体１６を長手方向に搬送しつつ、基材１２と保護フィルム１４との剥離を行い、保護フィルム１４を第２巻取り軸４０に巻取り、基材１２を長手方向に搬送しつつ、処理手段３４によって成膜等の基材１２の処理を行なう。また、処理済の基材１２、すなわち、本発明の製造方法による機能性フィルム２０は、巻取り軸３６に巻き取られ、機能性フィルム２０のロールとされる。 When the conveyance of the substrate 12 and the like is stabilized, the surface treatment of the substrate 12 is started.
Thereby, peeling the base material 12 and the protective film 14 while transporting the laminate 16 in the longitudinal direction, winding the protective film 14 around the second winding shaft 40, and transporting the base material 12 in the longitudinal direction. However, the processing means 34 processes the base material 12 such as film formation. Moreover, the processed base material 12, ie, the functional film 20 by the manufacturing method of this invention is wound up by the winding shaft 36, and it is set as the roll of the functional film 20. FIG.
　ここで、本発明の製造方法を実施する製造装置１０では、基材１２の搬送方向において、ガイドローラ４４と処理手段３４との間に配置される第１検出手段４６と第２検出手段４８とによって、基材１２上の保護フィルム１４の有無を検出して、この検出結果に応じて、第２巻取り軸４０が保護フィルム１４を巻き取る際の、第２巻取り軸４０のトルクと、回転速度の少なくともいずれか一方を制御することによって、保護フィルム１４と基材１２との剥離が所定の第１検出手段４６と第２検出手段４８との間で起こるようにするので、積層体の長手方向に、基材１２と保護フィルム１４との密着力が変化した場合であっても、保護フィルム１４を剥離する剥離力を適正な値にすることができ、基材１２と保護フィルム１４とを所定の位置で剥離させることができる。そのため、保護フィルム１４が剥離されずに搬送されてしまうことがない。また、剥離力が大きすぎて、基材１２の搬送テンションが緩み、シワが発生したり、熱ダメージを受けたりして、基材１２が損傷することを防止できる。 Here, in the manufacturing apparatus 10 that performs the manufacturing method of the present invention, the first detection means 46 and the second detection means 48 that are disposed between the guide roller 44 and the processing means 34 in the conveyance direction of the base material 12. By detecting the presence or absence of the protective film 14 on the substrate 12, and depending on the detection result, the torque of the second winding shaft 40 when the second winding shaft 40 winds the protective film 14, and By controlling at least one of the rotational speeds, peeling between the protective film 14 and the base material 12 occurs between the predetermined first detection means 46 and the second detection means 48. Even if the adhesive force between the base material 12 and the protective film 14 changes in the longitudinal direction, the peeling force for peeling the protective film 14 can be set to an appropriate value, and the base material 12 and the protective film 14 The predetermined position It can be peeled off. Therefore, the protective film 14 is not transported without being peeled off. In addition, it is possible to prevent the base material 12 from being damaged due to the peeling force being too large, the transport tension of the base material 12 is loosened, and wrinkles are generated or heat damage is caused.
　以上、本発明の機能性フィルムの製造方法について詳細に説明したが、本発明は、上記実施例に限定はされず、本発明の要旨を逸脱しない範囲において、各種の改良や変更を行なってもよい。 As mentioned above, although the manufacturing method of the functional film of this invention was demonstrated in detail, this invention is not limited to the said Example, Even if various improvement and a change are performed in the range which does not deviate from the summary of this invention. Good.
　例えば、図１に示す製造装置１０においては、ドラム３２に基材を巻き掛けて長手方向に搬送しつつ、処理を行なう装置に利用した例であるが、本発明は、これに限定はされない。例えば、本発明は、搬送ローラ対等を用いて、長尺な積層体を長手方向に直線状に搬送しながら、保護フィルムの剥離や、基材表面の処理を行なう装置にも、好適に利用可能である。 For example, the manufacturing apparatus 10 shown in FIG. 1 is an example in which the base material is wound around the drum 32 and conveyed in the longitudinal direction while being used for processing, but the present invention is not limited thereto. For example, the present invention can be suitably used for an apparatus that peels off a protective film and processes the surface of a substrate while conveying a long laminate linearly in the longitudinal direction using a pair of conveying rollers or the like. It is.
　また、図１に示す製造装置１０においては、第１検出手段４６として、基材１２（積層体１６）に光を透過させて保護フィルム１４を検出する手段を用い、第２検出手段４８として、基材１２（積層体１６）を透過した光をドラム３２に反射させて保護フィルム１４を検出する手段を用いたが、本発明は、これに限定はされず、保護フィルム１４の有無を検出できればよく、第１検出手段４６および第２検出手段４８のいずれも、光を透過させて保護フィルム１４を検出するものであっても、光を反射させて保護フィルム１４を検出するものであってもよい。 Further, in the manufacturing apparatus 10 shown in FIG. 1, as the first detection unit 46, a unit that detects the protective film 14 by transmitting light to the base material 12 (laminated body 16) is used, and as the second detection unit 48, Although the means which reflects the light which permeate | transmitted the base material 12 (laminated body 16) to the drum 32 and detects the protective film 14 was used, this invention is not limited to this, If the presence or absence of the protective film 14 can be detected Both the first detection means 46 and the second detection means 48 may detect the protective film 14 by transmitting light, or may detect the protective film 14 by reflecting light. Good.
　また、図１に示す製造装置１０においては、剥離点Ｐの位置が、基材１２がドラム３２に巻き掛かる直前の位置となるようにしたが、本発明は、これに限定はされず、剥離点Ｐの位置が、基材１２がドラムに巻き掛けられた位置であってもよい。すなわち、積層体１６がドラム３２に巻き掛けられた位置で、保護フィルム１４を基材１２から剥離してもよい。 Moreover, in the manufacturing apparatus 10 shown in FIG. 1, the position of the peeling point P is set to the position immediately before the base material 12 is wound around the drum 32. However, the present invention is not limited to this, and the peeling point P is peeled off. The position of the point P may be a position where the substrate 12 is wound around the drum. That is, the protective film 14 may be peeled from the substrate 12 at a position where the laminate 16 is wound around the drum 32.
　図２は、本発明の製造方法を実施する製造装置の他の一例を概念的に示す図である。
　なお、図２に示す製造装置８０は、図１に示す製造装置１０において、第１検出手段４６に代えて、第１検出手段８２を有する以外は、同じ構成を有するので、同じ部位には、同じ符号を付し、以下の説明は異なる部位を主に行なう。 FIG. 2 is a diagram conceptually illustrating another example of a manufacturing apparatus that performs the manufacturing method of the present invention.
The manufacturing apparatus 80 shown in FIG. 2 has the same configuration as the manufacturing apparatus 10 shown in FIG. 1 except that it has the first detection means 82 instead of the first detection means 46. The same reference numerals are given, and the following description mainly focuses on different parts.
　製造装置８０は、第１検出手段８２が、ドラム３２に巻き掛けられた積層体１６（基材１２）に対面する位置に配置される構成を有する。
　第１検出手段８２は、基材１２上の保護フィルム１４の有無を検出するものであり、基材１２に向かって光を照射すると共に、ドラム３２から反射された光を受光することにより、保護フィルム１４の有無を検出する。
　第１検出手段８２は、検出結果を制御手段５０に供給する。 The manufacturing apparatus 80 has a configuration in which the first detection unit 82 is disposed at a position facing the laminated body 16 (base material 12) wound around the drum 32.
The first detection means 82 detects the presence or absence of the protective film 14 on the substrate 12, and protects the substrate 12 by irradiating light toward the substrate 12 and receiving light reflected from the drum 32. The presence or absence of the film 14 is detected.
The first detection unit 82 supplies the detection result to the control unit 50.
　第１検出手段８２と第２検出手段４８とを、ドラム３２に巻き掛けられた積層体１６（基材１２）に対面する位置に配置する構成とすることで、基材１２がドラム３２に巻き掛かった状態で、保護フィルム１４を基材１２から剥離することができる。これにより、保護フィルム１４の剥離の際に、基材１２が揺動することを防止でき、より好適に安定して基材１２の搬送を行なうことができる。 By arranging the first detection means 82 and the second detection means 48 at a position facing the laminated body 16 (base material 12) wound around the drum 32, the base material 12 is wound around the drum 32. The protective film 14 can be peeled off from the base material 12 in the state of being applied. Thereby, at the time of peeling of the protective film 14, it can prevent that the base material 12 rock | fluctuates, and the base material 12 can be conveyed more stably stably.
　また、図２に示す製造装置８０においては、第１検出手段８２と第２検出手段４８とを、ドラム３２の直上流のガイドローラ４４と、ドラム３２との間に配置したが、本発明はこれに限定はされず、処理手段３４よりも上流側に配置されていればよく、例えば、ガイドローラ４４とテンションピックアップロール３０との間に配置してもよい。 In the manufacturing apparatus 80 shown in FIG. 2, the first detection means 82 and the second detection means 48 are arranged between the guide roller 44 and the drum 32 immediately upstream of the drum 32. However, the present invention is not limited to this, and it may be disposed upstream of the processing unit 34. For example, it may be disposed between the guide roller 44 and the tension pickup roll 30.
　図３は、本発明の機能性フィルムの製造方法を実施する製造装置の他の一例を概念的に示す図である。
　なお、図３に示す製造装置１００は、図１に示す製造装置１０において、剥離点Ｐおよび第１検出手段４６をテンションピックアップロール３０とガイドローラ４４との間に配置し、第２検出手段４８に代えて、第２検出手段１０４を有する以外は、同じ構成を有するので、同じ部位には、同じ符号を付し、以下の説明は異なる部位を主に行なう。 FIG. 3 is a diagram conceptually illustrating another example of a manufacturing apparatus that performs the method for manufacturing a functional film of the present invention.
3 is different from the manufacturing apparatus 10 shown in FIG. 1 in that the peeling point P and the first detection means 46 are arranged between the tension pickup roll 30 and the guide roller 44, and the second detection means 48 is used. Instead of having the second detection means 104, the same configuration is provided, so the same parts are denoted by the same reference numerals, and the following description will mainly be made on different parts.
　製造装置１００は、第１検出手段４６と第２検出手段１０４、および、剥離点Ｐが、テンションピックアップロール３０とガイドローラ４４との間に配置される構成を有する。
　第２検出手段１０４は、基材１２上の保護フィルム１４の有無を検出するものであり、光照射部１０４ａと受光部１０４ｂとを有する。 The manufacturing apparatus 100 has a configuration in which the first detection unit 46, the second detection unit 104, and the peeling point P are disposed between the tension pickup roll 30 and the guide roller 44.
The 2nd detection means 104 detects the presence or absence of the protective film 14 on the base material 12, and has the light irradiation part 104a and the light-receiving part 104b.
　光照射部１０４ａと受光部１０４ｂとは、基材１２（積層体１６）を挟むように配置されており、光照射部１０４ａは基材１２（積層体１６）を挟んで配置される受光部１０４ｂに向かって光を照射するものである。受光部１０４ｂは、光照射部１０４ａから照射された光の状態から、保護フィルム１４の有無を検出する。
　第２検出手段１０４は、検出結果を制御手段５０に供給する。 The light irradiation unit 104a and the light receiving unit 104b are arranged so as to sandwich the substrate 12 (laminated body 16), and the light irradiation unit 104a is arranged to sandwich the substrate 12 (laminated body 16). It irradiates light toward. The light receiving unit 104b detects the presence or absence of the protective film 14 from the state of the light irradiated from the light irradiation unit 104a.
The second detection unit 104 supplies the detection result to the control unit 50.
　このように、第１検出手段４６と第２検出手段１０４とを、テンションピックアップロール３０とガイドローラ４４との間に配置した場合であっても、保護フィルム１４を剥離する剥離力を適正な値にすることができ、基材１２と保護フィルム１４とを所定の位置で剥離することができる。そのため、保護フィルム１４が剥離されずに搬送されてしまうことがない。また、剥離力が大きすぎて、基材１２の搬送テンションが緩み、シワが発生したり、熱ダメージを受けたりして、基材１２が損傷することを防止できる。
　なお、基材１２の表面（被処理面）を好適に保護できる点で、第１検出手段４６と第２検出手段１０４とは、処理手段３４（ドラム３２）の直上流に配置することが好ましい。 Thus, even when the first detection means 46 and the second detection means 104 are arranged between the tension pickup roll 30 and the guide roller 44, the peeling force for peeling the protective film 14 is an appropriate value. The base material 12 and the protective film 14 can be peeled at a predetermined position. Therefore, the protective film 14 is not transported without being peeled off. In addition, it is possible to prevent the base material 12 from being damaged due to the peeling force being too large, the transport tension of the base material 12 is loosened, and wrinkles are generated or heat damage is caused.
In addition, it is preferable to arrange | position the 1st detection means 46 and the 2nd detection means 104 in the immediately upstream of the process means 34 (drum 32) at the point which can protect the surface (surface to be processed) of the base material 12 suitably. .
　以下、本発明の具体的実施例を挙げ、本発明を、より詳細に説明する。
　［実施例１］
　図１に示す製造装置１０を用いて、積層体１６の搬送を行なった。
　基材１２として、厚さ１００μｍ、幅７００ｍｍのＰＥＴフィルムを用意した。
　また、保護フィルム１４として、幅７００ｍｍのサンエー化研社製のＰＡＣ－２－５０ＴＨを用意した。この粘着性シートの粘着力は、０．０４Ｎ／２５ｍｍである。
　また、真空チャンバ２６内の真空度は、５×１０－４Ｐａとした。
　また、処理手段３４による処理として、プラズマＣＶＤ法によるＳｉＮ膜の成膜を行なった。
　また、ドラム３２は冷却手段を有し、基材１２を冷却する構成とした。
　また、搬送速度は、１ｍ／ｍｉｎとし、搬送テンションは、５０Ｎ／７００ｍｍとして、５００ｍの積層体１６の搬送を行なった。 Hereinafter, the present invention will be described in more detail with reference to specific examples of the present invention.
[Example 1]
The laminated body 16 was conveyed using the manufacturing apparatus 10 shown in FIG.
A PET film having a thickness of 100 μm and a width of 700 mm was prepared as the substrate 12.
As the protective film 14, PAC-2-50TH manufactured by Sanei Kaken Co., Ltd. having a width of 700 mm was prepared. The adhesive strength of this adhesive sheet is 0.04 N / 25 mm.
The degree of vacuum in the vacuum chamber 26 was 5 × 10 −4 Pa.
Further, as a treatment by the treatment means 34, a SiN film was formed by a plasma CVD method.
The drum 32 has a cooling means to cool the substrate 12.
Moreover, the conveyance speed was 1 m / min, the conveyance tension was 50 N / 700 mm, and the laminate 16 of 500 m was conveyed.
　基材１２の熱ダメージの有無、基材１２のシワの有無、および、保護フィルム１４の剥離異常（剥離されない状態）の有無を、５０ｍごとに評価した。
　なお、基材１２の熱ダメージの有無は、処理後に基材１２を引き出して確認した。また、基材１２のシワの有無、および、保護フィルム１４の剥離異常の有無は、真空チャンバ２６に形成された除き窓から、基材１２を目視して評価した。
　基材１２に熱ダメージが発生した場合を『Ａ』、基材１２にシワが発生した場合を『Ｂ』、保護フィルム１４の剥離異常が発生した場合を『Ｃ』、異常なしの場合を『Ｎ』と評価した。
　評価結果を、表１に示す。なお、評価が『Ｃ』であるとした場合は、積層体の搬送を停止し、それ以後の評価は行わないものとした。 The presence or absence of thermal damage of the base material 12, the presence or absence of wrinkles of the base material 12, and the presence or absence of peeling abnormality (non-peeling state) of the protective film 14 were evaluated every 50 m.
In addition, the presence or absence of the thermal damage of the base material 12 pulled out the base material 12 after the process, and confirmed. In addition, the presence or absence of wrinkles on the base material 12 and the presence or absence of peeling abnormality of the protective film 14 were evaluated by visually observing the base material 12 from a window formed in the vacuum chamber 26.
“A” indicates that thermal damage has occurred on the base material 12, “B” indicates that wrinkle has occurred on the base material 12, “C” indicates that the protective film 14 has peeled abnormally, and “No” indicates that there is no abnormality. N ”.
The evaluation results are shown in Table 1. When the evaluation is “C”, the conveyance of the laminated body is stopped, and the subsequent evaluation is not performed.
　［実施例２］
　第１検出手段４６および第２検出手段１０４をテンションピックアップロール３０とガイドローラ４４との間に配置する構成（図３）としたこと以外は、実施例１と同様にして機能性フィルム２０の製造を行い、基材１２の熱ダメージの有無、基材１２のシワの有無、および、保護フィルム１４の剥離異常の有無を、５０ｍごとに評価した。評価結果を、表１に併記する。 [Example 2]
Production of the functional film 20 in the same manner as in Example 1 except that the first detection unit 46 and the second detection unit 104 are arranged between the tension pickup roll 30 and the guide roller 44 (FIG. 3). Then, the presence or absence of thermal damage of the base material 12, the presence or absence of wrinkles of the base material 12, and the presence or absence of abnormal peeling of the protective film 14 were evaluated every 50 m. The evaluation results are also shown in Table 1.
　［比較例１］
　第１検出手段を配置せず、第２検出手段４８のみを有する構成とした以外は、実施例１と同様にして機能性フィルム２０の製造を行い、基材１２の熱ダメージの有無、基材１２のシワの有無、および、保護フィルム１４の剥離異常の有無を、５０ｍごとに評価した。評価結果を、表１に併記する。 [Comparative Example 1]
The functional film 20 is manufactured in the same manner as in Example 1 except that the first detection unit is not provided and only the second detection unit 48 is provided. The presence or absence of 12 wrinkles and the presence or absence of peeling abnormality of the protective film 14 were evaluated every 50 m. The evaluation results are also shown in Table 1.
　［比較例２］
　第１検出手段４６を配置せず、第２検出手段１０４のみを有する構成とした以外は、実施例２と同様にして機能性フィルム２０の製造を行い、基材１２の熱ダメージの有無、基材１２のシワの有無、および、保護フィルム１４の剥離異常の有無を、５０ｍごとに評価した。評価結果を、表１に併記する。 [Comparative Example 2]
The functional film 20 is manufactured in the same manner as in Example 2 except that the first detection unit 46 is not provided and only the second detection unit 104 is provided. The presence or absence of wrinkles of the material 12 and the presence or absence of abnormal peeling of the protective film 14 were evaluated every 50 m. The evaluation results are also shown in Table 1.
　［比較例３］
　第１検出手段４６および第２検出手段４８を有さない構成とした以外は、実施例１と同様にして機能性フィルム２０の製造を行い、基材１２の熱ダメージの有無、基材１２のシワの有無、および、保護フィルム１４の剥離異常の有無を、５０ｍごとに評価した。評価結果を、表１に併記する。 [Comparative Example 3]
The functional film 20 is manufactured in the same manner as in Example 1 except that the first detection unit 46 and the second detection unit 48 are not provided. The presence or absence of wrinkles and the presence or absence of peeling abnormality of the protective film 14 were evaluated every 50 m. The evaluation results are also shown in Table 1.
　［比較例４］　第１検出手段４６および第２検出手段１０４を有さない構成とした以外は、実施例２と同様にして機能性フィルム２０の製造を行い、基材１２の熱ダメージの有無、基材１２のシワの有無、および、保護フィルム１４の剥離異常の有無を、５０ｍごとに評価した。評価結果を、表１に併記する。 [Comparative Example 4] The functional film 20 was manufactured in the same manner as in Example 2 except that the first detection unit 46 and the second detection unit 104 were not included, and the presence or absence of thermal damage to the substrate 12 was confirmed. The presence or absence of wrinkles of the substrate 12 and the presence or absence of abnormal peeling of the protective film 14 were evaluated every 50 m. The evaluation results are also shown in Table 1.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
　表１に示されるように、本発明の機能性フィルムの製造方法においては、第１検出手段および第２検出手段が、保護フィルムの有無を検出し、この検出結果に応じて、第２巻取り軸が保護フィルムを巻き取る際の、第２巻取り軸のトルクと、回転速度の少なくともいずれか一方を制御することによって、保護フィルムと基材との剥離が所定の範囲内で起こるようにするので、保護フィルムが基材から剥離する剥離力が適正な値となり、基材の搬送テンションが緩むことがなく、また、基材とドラムとの密着が緩むことがない。したがって、基材はドラムによって十分に冷却されるので基材の熱ダメージを防ぐことができて、基材のシワ、および、保護フィルムの剥離異常を好適に防止できる。
　なお、第１検出手段および第２検出手段をテンションピックアップロール３０とガイドローラ４４との間に配置する実施例２においては、保護フィルム１４を剥離した基材１２の表面の損傷を防止するために、ガイドローラ４４として段付きローラを用いたところ、ガイドローラ４４の位置で若干、クニックが発生した。これに対して、第１検出手段および第２検出手段をドラム３２（処理手段３４）の直上流に配置する実施例１においては、処理手段３４の直前まで、基材１２の表面を保護フィルム１４で保護しているので、ガイドローラ４４として段付きローラを用いる必要がなく、より好適に基材１２の損傷を防止できる。 As shown in Table 1, in the method for producing a functional film of the present invention, the first detection means and the second detection means detect the presence or absence of a protective film, and the second winding is performed according to the detection result. By controlling at least one of the torque of the second winding shaft and the rotation speed when the shaft winds up the protective film, the protective film and the substrate are peeled off within a predetermined range. Therefore, the peeling force at which the protective film peels from the base material becomes an appropriate value, the transport tension of the base material does not loosen, and the adhesion between the base material and the drum does not loosen. Therefore, since the base material is sufficiently cooled by the drum, thermal damage to the base material can be prevented, and the wrinkles of the base material and the peeling abnormality of the protective film can be suitably prevented.
In Example 2 in which the first detection means and the second detection means are arranged between the tension pickup roll 30 and the guide roller 44, in order to prevent damage to the surface of the substrate 12 from which the protective film 14 has been peeled off. When a stepped roller was used as the guide roller 44, a slight nick occurred at the position of the guide roller 44. On the other hand, in the first embodiment in which the first detection means and the second detection means are arranged immediately upstream of the drum 32 (processing means 34), the surface of the substrate 12 is covered with the protective film 14 until just before the processing means 34. Therefore, it is not necessary to use a stepped roller as the guide roller 44, and damage to the base material 12 can be prevented more suitably.
　これに対して、検出手段を１つにした比較例１および２においては、保護フィルムの剥離異常は抑制できるものの、剥離力が大きくなりすぎて基材の搬送テンションが緩んでしまうので、２５０ｍ以降に、基材の熱ダメージや基材のシワが断続的に発生した。
　また、検出手段を有さない比較例３および４においては、２００ｍ以降に、保護フィルムが基材から剥離されず、剥離異常が発生した。
　以上の結果より、本発明の効果は明らかである。 On the other hand, in Comparative Examples 1 and 2 with one detection means, although the peeling abnormality of the protective film can be suppressed, the peeling force becomes too large and the transport tension of the base material is loosened. In addition, heat damage of the base material and wrinkles of the base material occurred intermittently.
Moreover, in Comparative Examples 3 and 4 having no detection means, the protective film was not peeled from the base material after 200 m, and peeling abnormality occurred.
From the above results, the effects of the present invention are clear.
　基材の表面にガスバリア膜を成膜するガスバリアフィルムの製造など、基材の表面に所定の機能を発現する機能性フィルムの製造等に、好適に利用可能である。 It can be suitably used for the production of a functional film that exhibits a predetermined function on the surface of the substrate, such as the production of a gas barrier film in which a gas barrier film is formed on the surface of the substrate.
　１０、８０、１００　製造装置
　１２　基材
　１４　保護フィルム
　１６　積層体
　２０　機能性フィルム
　２４　基材ロール
　２６　真空チャンバ
　２８　回転軸
　３０、３８　テンションピックアップロール
　３２　ドラム
　３６　巻取り軸
　４０　第２巻取り軸　４２　真空排気手段
　４４　ガイドローラ
　４６、８２、　第１検出手段
　４６ａ、１０４ａ　光照射部
　４６ｂ、１０４ｂ　受光部
　４８、１０４　第２検出手段
　５０　制御手段 10, 80, 100 Manufacturing apparatus 12 Base material 14 Protective film 16 Laminate 20 Functional film 24 Base material roll 26 Vacuum chamber 28 Rotating shaft 30, 38 Tension pickup roll 32 Drum 36 Winding shaft 40 Second winding shaft 42 Vacuum Exhaust means 44 Guide rollers 46 and 82, first detection means 46a and 104a Light irradiation parts 46b and 104b Light reception parts 48 and 104 Second detection means 50 Control means

Claims (17)

  1. 　真空中において、
    　貼着性を有する保護フィルムを基材の被処理面に積層して貼着してなる積層体を、ロール状に巻回してなる積層体ロールから、前記積層体を引き出し、長手方向に搬送しつつ、前記基材から前記保護フィルムを剥離し、前記基材の被処理面に処理を行なうに際し、
    　前記処理を行なう前の前記積層体の搬送中に、所定の第１の検出位置で、前記基材上の前記保護フィルムの有無を検出し、
    　前記第１の検出位置と前記処理の位置との間の、所定の第２の検出位置で、前記基材上の前記保護フィルムの有無を検出し、
    　前記第１の検出位置と前記第２の検出位置での検出結果に応じて、前記第１の検出位置と前記第２の検出位置との間で、前記保護フィルムが前記基材から剥離するように、剥離力を制御することを特徴とする機能性フィルムの製造方法。     In vacuum
    A laminate formed by laminating and sticking a protective film having adhesive properties to the surface to be treated is pulled out from a laminate roll obtained by winding the laminate into a roll, and conveyed in the longitudinal direction. While peeling the protective film from the base material, and processing the surface of the base material,
    During the transport of the laminate before performing the treatment, the presence or absence of the protective film on the substrate is detected at a predetermined first detection position,
    Detecting the presence or absence of the protective film on the substrate at a predetermined second detection position between the first detection position and the processing position;
    According to the detection results at the first detection position and the second detection position, the protective film is peeled from the base material between the first detection position and the second detection position. And a method for producing a functional film, wherein the peeling force is controlled.
  2. 　前記第２の検出位置で、前記保護フィルムが検出された場合に、前記保護フィルムを剥離させる際の剥離力が大きくなるように制御する、
    　請求項１に記載の機能性フィルムの製造方法。     When the protective film is detected at the second detection position, control is performed so that the peeling force when peeling the protective film is increased.
    The manufacturing method of the functional film of Claim 1.
  3. 　前記第１の検出位置で、前記保護フィルムが検出されなかった場合に、前記保護フィルムを剥離させる際の剥離力が小さくなるように制御する、
    　請求項１または２に記載の機能性フィルムの製造方法。     When the protective film is not detected at the first detection position, control is performed so that the peeling force when peeling the protective film is reduced.
    The manufacturing method of the functional film of Claim 1 or 2.
  4. 　前記処理は、前記基材を円筒状のドラムの周面に巻き掛けて、長手方向に搬送しつつ、前記ドラムの周面に対面して配置された処理手段によって行なう、
    　請求項１～３のいずれかに記載の機能性フィルムの製造方法。     The processing is performed by processing means disposed so as to face the peripheral surface of the drum while the base material is wound around the peripheral surface of a cylindrical drum and conveyed in the longitudinal direction.
    The method for producing a functional film according to any one of claims 1 to 3.
  5. 　前記第２の検出位置は、前記処理手段と、前記ドラムの直上流側に配置された搬送ロールとの間である、
    　請求項４に記載の機能性フィルムの製造方法。     The second detection position is between the processing means and a transport roll disposed immediately upstream of the drum.
    The manufacturing method of the functional film of Claim 4.
  6. 　前記第２の検出位置は、前記基材が前記ドラムに巻き掛けられる位置である、
    　請求項５に記載の機能性フィルムの製造方法。     The second detection position is a position where the base material is wound around the drum.
    The manufacturing method of the functional film of Claim 5.
  7. 　前記ドラムに巻き掛けられる前記基材が、前記ドラムの周面で冷却される、
    　請求項４～６のいずれかに記載の機能性フィルムの製造方法。     The base material wound around the drum is cooled on the peripheral surface of the drum;
    The method for producing a functional film according to any one of claims 4 to 6.
  8. 　前記保護フィルムの巻取り手段のトルクと回転速度の少なくともいずれか一方を制御することにより、前記保護フィルムを剥離させる際の剥離力を制御する請求項１～７のいずれかに記載の機能性フィルムの製造方法。 The functional film according to any one of claims 1 to 7, wherein a peeling force at the time of peeling off the protective film is controlled by controlling at least one of a torque and a rotation speed of the winding means of the protective film. Manufacturing method.
  9. 　前記第１の検出位置で前記保護フィルムの有無を検出する第１検出手段、および、前記第２の検出位置で前記保護フィルムの有無を検出する第２検出手段が、光の透過率を測定することにより、前記保護フィルムの有無を検出するものである請求項１～８のいずれかに記載の機能性フィルムの製造方法。 First detection means for detecting presence / absence of the protective film at the first detection position and second detection means for detecting presence / absence of the protection film at the second detection position measure light transmittance. The method for producing a functional film according to any one of claims 1 to 8, wherein the presence or absence of the protective film is detected.
  10. 　真空中で、
    　貼着性を有する保護フィルムを基材の被処理面に積層して貼着してなる積層体を、ロール状に巻回してなる積層体ロールから、前記積層体を引き出し、長手方向に搬送しつつ、前記基材から前記保護フィルムを剥離し、前記基材の被処理面に処理を行なう機能性フィルムの製造装置において、
    　前記基材から剥離した前記保護フィルムを巻き取る巻取り手段と、
    　前記基材に所定の処理を行なう処理手段と、
    　前記基材の搬送方向において、前記処理手段よりも上流側に配置され、前記基材上の前記保護フィルムの有無を検出する第１検出手段と、
    　前記処理手段と前記第１検出手段との間に配置され、前記基材上の前記保護フィルムの有無を検出する第２検出手段と、
    　前記第１検出手段および前記第２検出手段の検出結果に応じて、前記第１検出手段と前記第２検出手段との間で、前記保護フィルムが前記基材から剥離するように、前記巻取り手段の剥離力を制御する制御手段とを有することを特徴とする機能性フィルムの製造装置。     In vacuum,
    A laminate formed by laminating and sticking a protective film having adhesive properties to the surface to be treated is pulled out from a laminate roll obtained by winding the laminate into a roll, and conveyed in the longitudinal direction. Meanwhile, in the functional film manufacturing apparatus for peeling the protective film from the base material and processing the surface to be processed of the base material,
    Winding means for winding the protective film peeled off from the substrate;
    Processing means for performing predetermined processing on the base material;
    A first detection means that is disposed upstream of the processing means in the transport direction of the base material and detects the presence or absence of the protective film on the base material;
    A second detection means arranged between the processing means and the first detection means for detecting the presence or absence of the protective film on the substrate;
    In accordance with the detection results of the first detection means and the second detection means, the winding is performed so that the protective film is peeled from the base material between the first detection means and the second detection means. And a control means for controlling the peeling force of the means.
  11. 　前記制御手段は、前記第２検出手段が前記保護フィルムを検出した場合に、前記巻取り手段のトルクと回転速度の少なくともいずれか一方が大きくなるように制御する、
    　請求項１０に記載の機能性フィルムの製造装置。     The control means controls so that at least one of the torque and the rotation speed of the winding means is increased when the second detection means detects the protective film.
    The apparatus for producing a functional film according to claim 10.
  12. 　前記制御手段は、前記第１検出手段が前記保護フィルムを検出しなかった場合に、前記巻取り手段のトルクと回転速度の少なくともいずれか一方が小さくなるように制御する、
    　請求項１０または１１に記載の機能性フィルムの製造装置。     The control means controls so that at least one of the torque and the rotation speed of the winding means becomes small when the first detection means does not detect the protective film.
    The functional film manufacturing apparatus according to claim 10 or 11.
  13. 　前記第２検出手段は、前記処理手段と前記処理手段の直上流側の搬送ロールとの間に配置される、
    　請求項１０～１２のいずれかに記載の機能性フィルムの製造装置。     The second detection means is disposed between the processing means and a transport roll immediately upstream of the processing means.
    The functional film production apparatus according to any one of claims 10 to 12.
  14. 　周面が前記処理手段に対面するように配置され、前記基材が前記周面の所定領域に巻き掛けられて搬送する円筒状のドラムを有する、
    　請求項１０～１３のいずれかに記載の機能性フィルムの製造装置。     A peripheral drum is disposed so as to face the processing means, and the base material has a cylindrical drum that is wound around a predetermined region of the peripheral surface and conveyed.
    The functional film production apparatus according to any one of claims 10 to 13.
  15. 　前記第２検出手段は、前記基材が前記ドラムに巻き掛かけられている位置で、前記基材上の前記保護フィルムの有無を検出する、
    　請求項１４に記載の機能性フィルムの製造装置。     The second detection means detects the presence or absence of the protective film on the substrate at a position where the substrate is wound around the drum.
    The apparatus for producing a functional film according to claim 14.
  16. 　前記ドラムの周面を冷却する冷却手段を有する、
    　請求項１４または１５に記載の機能性フィルムの製造装置。     A cooling means for cooling the peripheral surface of the drum;
    The manufacturing apparatus of the functional film of Claim 14 or 15.
  17. 　前記第１検出手段、および、前記第２検出手段が、光の透過率を測定することにより、前記保護フィルムの有無を検出する、
    　請求項１０～１６のいずれかに記載の機能性フィルムの製造装置。     The first detection means and the second detection means detect the presence or absence of the protective film by measuring light transmittance,
    The functional film production apparatus according to any one of claims 10 to 16.
PCT/JP2012/054832 2011-02-28 2012-02-27 Method and apparatus for manufacturing functional film WO2012118037A1 (en)

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