WO2012075992A3 - Verfahren und vorrichtung zum aufbringen von schichten auf ein bauteil - Google Patents

Verfahren und vorrichtung zum aufbringen von schichten auf ein bauteil Download PDF

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Publication number
WO2012075992A3
WO2012075992A3 PCT/DE2011/002046 DE2011002046W WO2012075992A3 WO 2012075992 A3 WO2012075992 A3 WO 2012075992A3 DE 2011002046 W DE2011002046 W DE 2011002046W WO 2012075992 A3 WO2012075992 A3 WO 2012075992A3
Authority
WO
WIPO (PCT)
Prior art keywords
component
coating substance
layer
applying layers
plasma
Prior art date
Application number
PCT/DE2011/002046
Other languages
English (en)
French (fr)
Other versions
WO2012075992A2 (de
Inventor
Stefan Laure
Dirk Kiesel
Original Assignee
Dr. Laure Plasmatechnologie Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr. Laure Plasmatechnologie Gmbh filed Critical Dr. Laure Plasmatechnologie Gmbh
Publication of WO2012075992A2 publication Critical patent/WO2012075992A2/de
Publication of WO2012075992A3 publication Critical patent/WO2012075992A3/de

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065—After-treatment
    • B05D3/067—Curing or cross-linking the coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/50—Multilayers
    • B05D7/52—Two layers
    • B05D7/54—No clear coat specified
    • B05D7/546—No clear coat specified each layer being cured, at least partially, separately
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Es werden ein Verfahren und eine Vorrichtung zum Aufbringen von Schichten auf ein Bauteil vorgeschlagen. Dabei wird zunächst eine erste Schicht (12, 25) aus einem ersten Beschichtungsstoff auf das Bauteil (1, 24) aufgetragen. Dann wird eine zweite Schicht (13, 26) auf die erste Schicht (12, 25) mittels eines Plasmagenerators durch Einleiten eines zweiten Beschichtungsstoffs oder eines Gemischs aus einem zweiten Beschichtungsstoff und einem Prozessgas in das mittels des Plasmagenerators erzeugte Plasma aufgetragen. Durch den Beschichtungsstoff oder durch das Gemisch aus Beschichtungsstoff und Prozessgas wird in dem Plasma eine UV-Strahlung erzeugt, mit der die erste Schicht (12, 25) behandelt und/oder bearbeitet wird.
PCT/DE2011/002046 2010-11-29 2011-11-29 Verfahren und vorrichtung zum aufbringen von schichten auf ein bauteil WO2012075992A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010052637 2010-11-29
DE102010052637.1 2010-11-29

Publications (2)

Publication Number Publication Date
WO2012075992A2 WO2012075992A2 (de) 2012-06-14
WO2012075992A3 true WO2012075992A3 (de) 2012-08-09

Family

ID=45952808

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2011/002046 WO2012075992A2 (de) 2010-11-29 2011-11-29 Verfahren und vorrichtung zum aufbringen von schichten auf ein bauteil

Country Status (2)

Country Link
DE (1) DE102011119597A1 (de)
WO (1) WO2012075992A2 (de)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5211995A (en) * 1991-09-30 1993-05-18 Manfred R. Kuehnle Method of protecting an organic surface by deposition of an inorganic refractory coating thereon
EP1354640A1 (de) * 2002-04-19 2003-10-22 Dürr Systems GmbH Verfahren und Vorrichtung zum Härten einer Beschichtung
WO2005106917A1 (de) * 2004-04-30 2005-11-10 Unaxis Balzers Aktiengesellschaft Verfahren zur herstellung eines scheibenförmigen werkstückes auf der basis eines dielektrischen substrates sowie vakuumbehandlungsanlage hierfür
WO2008110151A2 (de) * 2007-03-09 2008-09-18 Dr. Laure Plasmatechnologie Gmbh VERFAHREN UND VORRICHTUNG ZUR PLASMAGESTÜTZTEN OBERFLÄCHENBEHANDLUNG GROßVOLUMIGER BAUTEILE

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5211995A (en) * 1991-09-30 1993-05-18 Manfred R. Kuehnle Method of protecting an organic surface by deposition of an inorganic refractory coating thereon
EP1354640A1 (de) * 2002-04-19 2003-10-22 Dürr Systems GmbH Verfahren und Vorrichtung zum Härten einer Beschichtung
WO2005106917A1 (de) * 2004-04-30 2005-11-10 Unaxis Balzers Aktiengesellschaft Verfahren zur herstellung eines scheibenförmigen werkstückes auf der basis eines dielektrischen substrates sowie vakuumbehandlungsanlage hierfür
WO2008110151A2 (de) * 2007-03-09 2008-09-18 Dr. Laure Plasmatechnologie Gmbh VERFAHREN UND VORRICHTUNG ZUR PLASMAGESTÜTZTEN OBERFLÄCHENBEHANDLUNG GROßVOLUMIGER BAUTEILE

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOUHENG WU ED - SOUHENG WU: "Polymer interface and adhesion", 1 January 1982, POLYMER INTERFACE AND ADHESION, NEW YORK, MARCEL DEKKER, US, PAGE(S) 300, XP002166082 *

Also Published As

Publication number Publication date
WO2012075992A2 (de) 2012-06-14
DE102011119597A1 (de) 2012-05-31

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