WO2012073009A3 - Nanopore devices - Google Patents

Nanopore devices Download PDF

Info

Publication number
WO2012073009A3
WO2012073009A3 PCT/GB2011/052344 GB2011052344W WO2012073009A3 WO 2012073009 A3 WO2012073009 A3 WO 2012073009A3 GB 2011052344 W GB2011052344 W GB 2011052344W WO 2012073009 A3 WO2012073009 A3 WO 2012073009A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrodes
nanopore devices
pore
particle beam
deposition
Prior art date
Application number
PCT/GB2011/052344
Other languages
French (fr)
Other versions
WO2012073009A2 (en
Inventor
Tim Albrecht
Aleksandar Petrov Ivanov
Joshua Benno Edel
Original Assignee
Imperial Innovations Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imperial Innovations Limited filed Critical Imperial Innovations Limited
Publication of WO2012073009A2 publication Critical patent/WO2012073009A2/en
Publication of WO2012073009A3 publication Critical patent/WO2012073009A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087—Holes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/047—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0353—Holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/0143—Focussed beam, i.e. laser, ion or e-beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Urology & Nephrology (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Biophysics (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

A method of fabricating a nanopore device comprises: providing a layer of substrate material having a pore through it, and depositing a pair of electrodes on the surface of the substrate material such that the electrodes are located adjacent to the pore. The electrodes are deposited by particle beam induced deposition.The deposition may be induced using a particle beam that is non-perpendicular to the surface of the substrate.
PCT/GB2011/052344 2010-12-03 2011-11-28 Nanopore devices WO2012073009A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB201020503A GB201020503D0 (en) 2010-12-03 2010-12-03 Nanopore devices
GB1020503.7 2010-12-03

Publications (2)

Publication Number Publication Date
WO2012073009A2 WO2012073009A2 (en) 2012-06-07
WO2012073009A3 true WO2012073009A3 (en) 2012-09-07

Family

ID=43531410

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2011/052344 WO2012073009A2 (en) 2010-12-03 2011-11-28 Nanopore devices

Country Status (2)

Country Link
GB (1) GB201020503D0 (en)
WO (1) WO2012073009A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3105584B1 (en) 2014-02-14 2020-08-12 Ecole Polytechnique Federale de Lausanne (EPFL) Molecular sensing device
EP2908128A1 (en) * 2014-02-14 2015-08-19 Ecole Polytechnique Federale de Lausanne (EPFL) Molecular sensing device
JP6610858B2 (en) * 2014-03-31 2019-11-27 国立大学法人大阪大学 Sample preparation apparatus and sample preparation method
GB201510322D0 (en) * 2015-06-12 2015-07-29 Imp Innovations Ltd Apparatus and method
US20200326325A1 (en) 2019-04-12 2020-10-15 Lisa Diamond Nanosensor chip with compound nanopores
CN113406162B (en) * 2021-06-03 2022-10-21 浙江大学 Preparation method for forming nano-gap electrode pair
CN114235037A (en) * 2021-12-06 2022-03-25 中国科学院物理研究所 High-aspect-ratio nano-gap multi-physical-field coupling detection platform and detection method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6627067B1 (en) * 1999-06-22 2003-09-30 President And Fellows Of Harvard College Molecular and atomic scale evaluation of biopolymers
US20060243919A1 (en) * 2005-04-27 2006-11-02 Systems On Silicon Manufacturing Company Pte. Ltd. TEM sample preparation from a circuit layer structure
US20070138132A1 (en) * 2003-06-12 2007-06-21 Barth Phillip W Nanopore with resonant tunneling electrodes
US20090136682A1 (en) * 2007-10-02 2009-05-28 President And Fellows Of Harvard College Carbon nanotube synthesis for nanopore devices

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6627067B1 (en) * 1999-06-22 2003-09-30 President And Fellows Of Harvard College Molecular and atomic scale evaluation of biopolymers
US20070138132A1 (en) * 2003-06-12 2007-06-21 Barth Phillip W Nanopore with resonant tunneling electrodes
US20060243919A1 (en) * 2005-04-27 2006-11-02 Systems On Silicon Manufacturing Company Pte. Ltd. TEM sample preparation from a circuit layer structure
US20090136682A1 (en) * 2007-10-02 2009-05-28 President And Fellows Of Harvard College Carbon nanotube synthesis for nanopore devices

Also Published As

Publication number Publication date
WO2012073009A2 (en) 2012-06-07
GB201020503D0 (en) 2011-01-19

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