WO2012055859A3 - Verfahren zur regelung einer vorspannung für einen kapazitiven mikromechanischen ultraschallwandler - Google Patents

Verfahren zur regelung einer vorspannung für einen kapazitiven mikromechanischen ultraschallwandler Download PDF

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Publication number
WO2012055859A3
WO2012055859A3 PCT/EP2011/068636 EP2011068636W WO2012055859A3 WO 2012055859 A3 WO2012055859 A3 WO 2012055859A3 EP 2011068636 W EP2011068636 W EP 2011068636W WO 2012055859 A3 WO2012055859 A3 WO 2012055859A3
Authority
WO
WIPO (PCT)
Prior art keywords
bias
capacitive micromechanical
controlling
ultrasonic transducer
micromechanical ultrasonic
Prior art date
Application number
PCT/EP2011/068636
Other languages
English (en)
French (fr)
Other versions
WO2012055859A2 (de
Inventor
Peter-Christian Eccardt
Hubert Mooshofer
Marcel THRÄNHARDT
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Publication of WO2012055859A2 publication Critical patent/WO2012055859A2/de
Publication of WO2012055859A3 publication Critical patent/WO2012055859A3/de

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00—Circuits for transducers, loudspeakers or microphones
    • H04R3/04—Circuits for transducers, loudspeakers or microphones for correcting frequency response
    • H04R3/06—Circuits for transducers, loudspeakers or microphones for correcting frequency response of electrostatic transducers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

Die Erfindung bezieht sich auf ein Verfahren zur Kalibrierung eines Arbeitspunktes eines kapazitiven mikromechanischen Wandlers, wobei eine Vorspannung an eine Membran des kapazitiven mikromechanischen Wandlers angelegt wird, mindestens eine Kapazität des kapazitiven mikromechanischen Wandlers bestimmt wird, und die Vorspannung in Abhängigkeit von der bestimmten Kapazität geregelt wird.
PCT/EP2011/068636 2010-10-25 2011-10-25 Verfahren zur regelung einer vorspannung für einen kapazitiven mikromechanischen ultraschallwandler WO2012055859A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010042875.2 2010-10-25
DE201010042875 DE102010042875A1 (de) 2010-10-25 2010-10-25 Verfahren zur Regelung einer Vorspannung für einen kapazitiven mikromechanischen Ultraschallwandler

Publications (2)

Publication Number Publication Date
WO2012055859A2 WO2012055859A2 (de) 2012-05-03
WO2012055859A3 true WO2012055859A3 (de) 2013-01-24

Family

ID=44906060

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2011/068636 WO2012055859A2 (de) 2010-10-25 2011-10-25 Verfahren zur regelung einer vorspannung für einen kapazitiven mikromechanischen ultraschallwandler

Country Status (2)

Country Link
DE (1) DE102010042875A1 (de)
WO (1) WO2012055859A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019126795A1 (de) * 2019-10-04 2021-04-08 Technische Universität Darmstadt Akustischer Wandler und Verfahren zum Erzeugen/Empfangen einer akustischen Welle
CN112218220B (zh) * 2020-11-12 2022-07-12 诺思(天津)微***有限责任公司 基于mems超声波换能器的微型扬声器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1932476A1 (de) * 2005-09-05 2008-06-18 Hitachi Medical Corporation Ultraschallgerät
EP1952767A1 (de) * 2005-11-18 2008-08-06 Hitachi Medical Corporation Ultraschall-diagnosegerät und kalibrationsverfahren dafür
US20100168583A1 (en) * 2006-11-03 2010-07-01 Research Triangle Institute Enhanced ultrasound imaging probes using flexure mode piezoelectric transducers
EP2223654A1 (de) * 2007-12-13 2010-09-01 Hitachi Medical Corporation Ultraschall-diagnosegerät und ultraschallkopf

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6443901B1 (en) * 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US7872399B2 (en) * 2005-11-11 2011-01-18 Hitachi Medical Corporation Ultrasonic probe and ultrasonic diagnosis apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1932476A1 (de) * 2005-09-05 2008-06-18 Hitachi Medical Corporation Ultraschallgerät
EP1952767A1 (de) * 2005-11-18 2008-08-06 Hitachi Medical Corporation Ultraschall-diagnosegerät und kalibrationsverfahren dafür
US20100168583A1 (en) * 2006-11-03 2010-07-01 Research Triangle Institute Enhanced ultrasound imaging probes using flexure mode piezoelectric transducers
EP2223654A1 (de) * 2007-12-13 2010-09-01 Hitachi Medical Corporation Ultraschall-diagnosegerät und ultraschallkopf

Also Published As

Publication number Publication date
WO2012055859A2 (de) 2012-05-03
DE102010042875A1 (de) 2012-04-26

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