WO2012055859A3 - Verfahren zur regelung einer vorspannung für einen kapazitiven mikromechanischen ultraschallwandler - Google Patents
Verfahren zur regelung einer vorspannung für einen kapazitiven mikromechanischen ultraschallwandler Download PDFInfo
- Publication number
- WO2012055859A3 WO2012055859A3 PCT/EP2011/068636 EP2011068636W WO2012055859A3 WO 2012055859 A3 WO2012055859 A3 WO 2012055859A3 EP 2011068636 W EP2011068636 W EP 2011068636W WO 2012055859 A3 WO2012055859 A3 WO 2012055859A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- bias
- capacitive micromechanical
- controlling
- ultrasonic transducer
- micromechanical ultrasonic
- Prior art date
Links
- 239000012528 membrane Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R3/00—Circuits for transducers, loudspeakers or microphones
- H04R3/04—Circuits for transducers, loudspeakers or microphones for correcting frequency response
- H04R3/06—Circuits for transducers, loudspeakers or microphones for correcting frequency response of electrostatic transducers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Die Erfindung bezieht sich auf ein Verfahren zur Kalibrierung eines Arbeitspunktes eines kapazitiven mikromechanischen Wandlers, wobei eine Vorspannung an eine Membran des kapazitiven mikromechanischen Wandlers angelegt wird, mindestens eine Kapazität des kapazitiven mikromechanischen Wandlers bestimmt wird, und die Vorspannung in Abhängigkeit von der bestimmten Kapazität geregelt wird.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010042875.2 | 2010-10-25 | ||
DE201010042875 DE102010042875A1 (de) | 2010-10-25 | 2010-10-25 | Verfahren zur Regelung einer Vorspannung für einen kapazitiven mikromechanischen Ultraschallwandler |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2012055859A2 WO2012055859A2 (de) | 2012-05-03 |
WO2012055859A3 true WO2012055859A3 (de) | 2013-01-24 |
Family
ID=44906060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2011/068636 WO2012055859A2 (de) | 2010-10-25 | 2011-10-25 | Verfahren zur regelung einer vorspannung für einen kapazitiven mikromechanischen ultraschallwandler |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102010042875A1 (de) |
WO (1) | WO2012055859A2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019126795A1 (de) * | 2019-10-04 | 2021-04-08 | Technische Universität Darmstadt | Akustischer Wandler und Verfahren zum Erzeugen/Empfangen einer akustischen Welle |
CN112218220B (zh) * | 2020-11-12 | 2022-07-12 | 诺思(天津)微***有限责任公司 | 基于mems超声波换能器的微型扬声器 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1932476A1 (de) * | 2005-09-05 | 2008-06-18 | Hitachi Medical Corporation | Ultraschallgerät |
EP1952767A1 (de) * | 2005-11-18 | 2008-08-06 | Hitachi Medical Corporation | Ultraschall-diagnosegerät und kalibrationsverfahren dafür |
US20100168583A1 (en) * | 2006-11-03 | 2010-07-01 | Research Triangle Institute | Enhanced ultrasound imaging probes using flexure mode piezoelectric transducers |
EP2223654A1 (de) * | 2007-12-13 | 2010-09-01 | Hitachi Medical Corporation | Ultraschall-diagnosegerät und ultraschallkopf |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6443901B1 (en) * | 2000-06-15 | 2002-09-03 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasonic transducers |
US7872399B2 (en) * | 2005-11-11 | 2011-01-18 | Hitachi Medical Corporation | Ultrasonic probe and ultrasonic diagnosis apparatus |
-
2010
- 2010-10-25 DE DE201010042875 patent/DE102010042875A1/de not_active Withdrawn
-
2011
- 2011-10-25 WO PCT/EP2011/068636 patent/WO2012055859A2/de active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1932476A1 (de) * | 2005-09-05 | 2008-06-18 | Hitachi Medical Corporation | Ultraschallgerät |
EP1952767A1 (de) * | 2005-11-18 | 2008-08-06 | Hitachi Medical Corporation | Ultraschall-diagnosegerät und kalibrationsverfahren dafür |
US20100168583A1 (en) * | 2006-11-03 | 2010-07-01 | Research Triangle Institute | Enhanced ultrasound imaging probes using flexure mode piezoelectric transducers |
EP2223654A1 (de) * | 2007-12-13 | 2010-09-01 | Hitachi Medical Corporation | Ultraschall-diagnosegerät und ultraschallkopf |
Also Published As
Publication number | Publication date |
---|---|
WO2012055859A2 (de) | 2012-05-03 |
DE102010042875A1 (de) | 2012-04-26 |
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