WO2011115249A1 - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- WO2011115249A1 WO2011115249A1 PCT/JP2011/056544 JP2011056544W WO2011115249A1 WO 2011115249 A1 WO2011115249 A1 WO 2011115249A1 JP 2011056544 W JP2011056544 W JP 2011056544W WO 2011115249 A1 WO2011115249 A1 WO 2011115249A1
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- screen
- user
- data
- authentication data
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F21/30—Authentication, i.e. establishing the identity or authorisation of security principals
- G06F21/31—User authentication
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F21/30—Authentication, i.e. establishing the identity or authorisation of security principals
- G06F21/31—User authentication
- G06F21/34—User authentication involving the use of external additional devices, e.g. dongles or smart cards
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F21/30—Authentication, i.e. establishing the identity or authorisation of security principals
- G06F21/44—Program or device authentication
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2221/00—Indexing scheme relating to security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F2221/21—Indexing scheme relating to G06F21/00 and subgroups addressing additional information or applications relating to security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F2221/2101—Auditing as a secondary aspect
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2221/00—Indexing scheme relating to security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F2221/21—Indexing scheme relating to G06F21/00 and subgroups addressing additional information or applications relating to security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F2221/2105—Dual mode as a secondary aspect
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2221/00—Indexing scheme relating to security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F2221/21—Indexing scheme relating to G06F21/00 and subgroups addressing additional information or applications relating to security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
- G06F2221/2129—Authenticate client device independently of the user
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L63/00—Network architectures or network communication protocols for network security
- H04L63/08—Network architectures or network communication protocols for network security for authentication of entities
- H04L63/0853—Network architectures or network communication protocols for network security for authentication of entities using an additional device, e.g. smartcard, SIM or a different communication terminal
Definitions
- the present invention relates to operability associated with login processing or logout processing in a substrate processing apparatus.
- the login process in the conventional substrate processing apparatus is performed by displaying an authentication screen (login screen) provided in the operation unit (see, for example, Patent Document 1).
- a login screen is displayed, and a user ID and password are input on the login screen from an input device such as a keyboard provided in the substrate processing apparatus.
- a logout process is automatically performed when a predetermined time elapses without any operation due to a safety problem of the substrate processing apparatus.
- An object of the present invention is to provide a substrate processing apparatus capable of improving the operability associated with login processing or logout processing.
- an operation unit including an operation screen for creating or editing a file for processing a substrate, and a mounting unit for mounting an external storage unit and an input unit.
- the operation unit includes data for device authentication registered in the operation unit and authentication data incorporated in the device And the data authentication means for completing the login if the authentication data incorporated in the device is registered in the device authentication data, and when the login is completed, at least a part of the operation screen
- a substrate processing apparatus comprising display control means for switching the display state.
- the screen operation associated with the login process or the logout process can be omitted, the operability is improved.
- the safety of the apparatus can be ensured more reliably.
- by restricting screen operations erroneous operations by other users can be suppressed, and the safety of the apparatus can be ensured more reliably.
- operations by other users can be restricted or prohibited during execution of specific processing.
- FIG. 1A is a diagram showing a menu screen and an authentication screen as operation screens displayed when a predetermined process is performed on a substrate processing apparatus according to a first embodiment of the present invention.
- FIG. FIG. 1B shows an authentication screen. It is explanatory drawing which shows the memory area and memory content of the USB device of the substrate processing apparatus which concerns on the modification of the 1st Embodiment of this invention. It is a figure which shows the operation screen of the substrate processing apparatus which concerns on the 1st Embodiment of this invention, and its modification, Comprising: (a) is a data backup screen, (b) is a maintenance screen, (c) is in an operation screen.
- FIG. 4D is an explanatory diagram when a predetermined button is inactive, FIG.
- FIG. 4D is an explanatory diagram when the predetermined button is active on the operation screen
- FIG. 5E is an explanatory diagram of a warning display example related to a specific button on the operation screen.
- It is the block diagram which showed centering on the control system about schematic structure of the substrate processing apparatus which concerns on the 1st Embodiment of this invention.
- It is a block diagram of the USB device of the substrate processing apparatus which concerns on the 1st Embodiment of this invention.
- FIG. 1 shows the function structure of the control program performed by the control part of the substrate processing apparatus which concerns on the 1st Embodiment of this invention. It is a flowchart of the user login of the substrate processing apparatus which concerns on the 1st Embodiment of this invention. It is another block diagram of the USB device of the substrate processing apparatus which concerns on the modification of the 1st Embodiment of this invention. It is a flowchart of the data backup performed continuously after completion of user switching of the substrate processing apparatus which concerns on the modification of the 1st Embodiment of this invention. It is a flowchart of the maintenance performed continuously after the user switching of the substrate processing apparatus which concerns on the modification of the 1st Embodiment of this invention is completed.
- the substrate processing apparatus of this embodiment is a semiconductor manufacturing apparatus that manufactures semiconductor elements such as ICs from a wafer such as silicon (Si).
- Semiconductor manufacturing apparatuses include both vertical and single wafer types.
- the device authentication data registered in the operation unit and the authentication data incorporated in the device If the authentication data incorporated in the device is registered in the device authentication data, the login process is completed. In this way, the login process can be performed simply by inserting a predetermined device into the mounting portion.
- the login process using the predetermined device may be performed after another user has already logged in.
- the login process in this case may be referred to as a user switching process or a user interrupt process.
- the login process will be mainly described below, but it goes without saying that the configuration described below can be applied to the user switching process and the user interrupt process.
- FIG. 1 shows an operation screen displayed on the display unit of the operation unit in the substrate processing apparatus according to the first embodiment of the present invention.
- FIG. 1A shows a menu screen displayed when a predetermined process is performed on the substrate processing apparatus, and
- FIG. 1B shows an authentication data input screen (login screen) for user login.
- the menu screen includes a plurality of buttons for designating processes such as initialization processing, recipe editing processing, parameter editing processing,.
- the user When editing a driving recipe or device parameters, the user performs a process by pressing a button corresponding to a desired process on the menu screen.
- the operation change screen is switched from the menu screen of FIG. 1A to the authentication screen (login screen) shown in FIG. Enter authentication data such as passwords and user passwords.
- the logout process is automatically completed by simply removing the device from the operation unit mounting part without opening the authentication screen.
- the logout button is pressed after displaying the login screen as before.
- the login process can be completed without changing the menu screen, and it is not necessary to input authentication data, so that the user ID, password, etc. during the login process can be saved. Is done. Further, since it is not necessary to input authentication data, the operation is not prohibited due to an input error or the like. Further, a message indicating that the login process is being performed or has been logged in may be displayed on the menu screen. Further, the screen may be switched to a predetermined screen during the login process or after login.
- the operation authority is set to a user level based on the authentication data when the device is inserted into the mounting unit and authenticated.
- the user can continue to perform specific processing (for example, recipe editing, parameter editing, etc.) selected according to the user level.
- a monitor screen for monitoring data detected by each component can be displayed.
- data such as daily inspection parameters (daily inspection data) relating to equipment (utility) can be displayed.
- a specific screen display function for displaying daily inspection parameters and the like it is possible to obtain information on equipment incidental to the substrate processing apparatus on the operation screen.
- the operation authority is returned to the previous user because the previous user does not need to log in again.
- the devices include storage means for storing predetermined data in addition to simple authentication data. Therefore, when the device having the storage means for storing such predetermined data is inserted into the mounting portion, the predetermined data of the substrate processing apparatus is stored in the storage means.
- the predetermined data stored in the storage area of the storage means includes at least production information (production data) indicating a past production state of the device, and failure information (device data when a failure occurs). Failure data), trace data, key logging data, event logging data, and error logging data, preferably one or more of them.
- production data production data
- failure information device data when a failure occurs
- Failure data trace data
- key logging data key logging data
- event logging data event logging data
- error logging data preferably one or more of them.
- the login process can be performed simply by inserting the device into the mounting unit, and predetermined data of the substrate processing apparatus can be stored.
- the device having the storage means can execute a specific operation by further storing additional information in the storage area in advance.
- the additional information is information (herein, information is a generic name for data such as instructions and commands) that, after login processing, issues a command to the operation unit to execute a function for operating the operation unit. For example, it is information that the designated screen is continuously opened after the user switching. Therefore, if the operation unit is configured to realize the specific operation using a device storing such additional information, the operability associated with user switching can be further improved.
- Examples of specific operations include opening a data collection screen for various data, opening a data backup screen, opening a maintenance screen, opening a recipe editing screen, and opening a parameter editing screen. .
- the operation unit when the operation unit is configured to open the data backup screen after the user switching, when a device storing additional information for opening the data backup screen is inserted into the mounting unit, the user switching, FIG.
- the data backup screen shown in (a) is automatically displayed.
- the operation unit can start backup of the data when a data backup start input is made from the data backup screen. If a device is selected as a backup destination, the predetermined data can be stored in the device as backup data.
- the operation screen is automatically switched to the data backup screen after switching the user. Therefore, the data backup operation can be simplified, and the data can be easily backed up by the device.
- the operation unit can start the maintenance when a maintenance start input is made from the maintenance screen.
- a device may be prepared for each component to be maintained, or the component may be selected on the maintenance screen.
- the operation screen can be switched to the maintenance screen to perform a specific operation, so the maintenance operation can be simplified and maintenance can be started easily. can do. Thereby, the operativity accompanying user switching can be further improved.
- the operation unit when the device is inserted into the mounting unit during the substrate processing, the operation unit can be configured such that execution of a file for processing the substrate is stopped. Further, the operation unit can be configured to execute a file for shifting the apparatus state to a safe state after stopping execution of the file for processing the substrate. In this case, for example, a command for forcibly shifting to the end step, a command for temporarily waiting at the step when an error occurs, or the like is specified as additional information. In this way, when a device for performing a specific operation is inserted during substrate processing, the execution of the file for processing the substrate is stopped after user switching, so that other users can You can prevent this file from being accidentally continued.
- an instruction to execute an alarm recipe or abort recipe is included as additional information to execute a file for shifting the device state to a safe state
- the device state can be changed to a safe state simply by plugging in the device. Can be migrated to.
- an operation screen for executing an alarm recipe or an abort recipe may be displayed simply by inserting a device. Thereby, since these recipes can be executed, the apparatus can be quickly returned to a safe state.
- the file can be re-executed, such as when the device is removed, the device state is returned from the safe state to the original state so that the file for processing the substrate can be continued again. It is preferable.
- a predetermined button on the operation screen is inactively displayed so that the button cannot be pressed.
- the color of a predetermined button is the same color as the background color of the screen.
- the predetermined button may be a button for initialization, recipe editing, parameter editing, or the like described above (FIG. 1A), or may be a button 51 displayed in a predetermined area of the operation screen. (Fig. 3 (c)).
- the predetermined button 51 on the operation screen which can be selected at a user level based on the authentication data of the device, is actively displayed, It is preferable that the button 51 is configured to be pressed. Further, as shown in FIG. 3D, in a region (fixed display region) that is not switched by a predetermined operation on the operation screen or a switching display operation of the operation screen for monitoring the operating state of the substrate processing apparatus. It is preferable that the predetermined button 51 is configured to be actively displayed. As described above, when the predetermined button 51 that can be selected by the inserted device is displayed in the fixed display area so that the button 51 can be pressed, the authority of the user becomes clear and the operation screen is switched. This makes it easy for the user who plugged in the device to execute an authorized process. Thereby, the operativity accompanying user switching can be further improved.
- the operation screen It is preferable to issue a warning notifying that the specific button 52 has been extracted without pressing down.
- a warning for example, a warning may be displayed on the operation screen.
- a warning is given on the operation screen notifying that the device is removed without pressing the specific button 52. It is possible to effectively protect the predetermined data stored in the means.
- it is desirable that the logout process is not completed when the device is extracted without pressing the specific button 52. Then, after the user reliably presses down the specific button 52, the user extracts the device.
- the safety of the apparatus is further maintained.
- it may be canceled by inserting a predetermined release device.
- the logout process may be completed when the release device is removed.
- the step of checking the specific button 52 in the step of completing the logout process when the device is extracted is further effective for data protection.
- the operativity and safety accompanying user switching can be further improved.
- the operation impossible means that no input on the operation screen is accepted.
- the substrate processing apparatus includes a process apparatus 1 (see FIGS. 6 and 7) that processes a substrate in accordance with a file for processing the substrate, and a control unit 200 (see FIG. 4) that controls the process apparatus 1. Yes.
- the process apparatus 1 and the control unit 200 are electrically connected to each other.
- the control unit 200 is provided with a mounting unit 211 for mounting, for example, an external storage unit 212 and an input unit 213.
- the mounting unit 211 is configured so that the device 214 in which the authentication data is incorporated can be inserted and removed.
- the control unit 200 may be incorporated in the process apparatus 1, and in this case, the process apparatus 1 in which the control unit 200 is incorporated is referred to as a substrate processing apparatus.
- FIG. 6 and FIG. 7 show a vertical process apparatus 1 that performs a film forming process by, for example, a thermal CVD (Chemical Vapor Deposition) method as an example of the process apparatus.
- a thermal CVD Chemical Vapor Deposition
- a wafer 18 made of silicon or the like is shown.
- the process apparatus 1 includes a housing 2, and a front maintenance port 4 serving as an opening provided for maintenance can be opened at a lower portion of the front wall 3 of the housing 2, and the front maintenance port 4 is a front maintenance door 5. It is comprised so that it may be opened and closed by.
- a pod loading / unloading port 6 is opened on the front wall 3 of the housing 2 so as to communicate with the inside and outside of the housing 2, and the pod loading / unloading port 6 is opened and closed by a front shutter (loading / unloading opening / closing mechanism) 7. It is configured as follows.
- a load port (substrate transfer container delivery table) 8 is installed in front of the front side of the pod loading / unloading port 6, and the load port 8 is configured to align the placed pod 9.
- the pod 9 is a hermetically sealed substrate transfer container, and is configured to be loaded onto the load port 8 and unloaded from the load port 8 by an in-process transfer device (not shown).
- a rotary pod shelf (substrate transfer container storage shelf) 11 is installed at an upper portion of the housing 2 at a substantially central portion in the front-rear direction.
- the rotary pod shelf 11 stores a plurality of pods 9. It is configured like this.
- the rotary pod shelf 11 is a vertically-supported support column 12 that is erected vertically, and a plurality of shelves (substrate transfer container mounting shelves) that are radially supported by the support column 12 at the upper, middle, and lower positions. 13 and the shelf board 13 is configured to store a plurality of pods 9 mounted thereon.
- a pod opener (substrate transfer container lid opening / closing mechanism) 14 is provided below the rotary pod shelf 11.
- the pod opener 14 is configured to place the pod 9 and to open and close the lid of the pod 9. .
- a pod transfer device (container transfer device) 15 is installed between the load port 8, the rotary pod shelf 11, and the pod opener 14.
- the pod transfer device 15 holds the pod 9 and moves up and down in the CZ axis direction.
- the pod 9 can be moved between the load port 8, the rotary pod shelf 11, and the pod opener 14.
- a sub-housing 16 is provided over the rear end of the lower portion of the housing 2 at the substantially central portion in the front-rear direction.
- a pair of wafer loading / unloading ports (substrate loading / unloading ports) 19 for loading / unloading wafers (substrates) 18 into / from the sub-casing 16 are arranged on the front wall 17 of the sub-casing 16 in two vertical stages.
- a pod opener 14 is provided for each of the upper and lower wafer loading / unloading openings 19, 19.
- the pod opener 14 includes a mounting table 21 on which the pod 9 is mounted and an opening / closing mechanism 22 that opens and closes the lid of the pod 9.
- the pod opener 14 is configured to open and close the wafer doorway of the pod 9 by opening and closing the lid of the pod 9 mounted on the mounting table 21 by the opening and closing mechanism 22.
- the sub-casing 16 constitutes a transfer chamber 23 that is airtight from a space (pod transfer space) in which the pod transfer device 15 and the rotary pod shelf 11 are disposed.
- a wafer transfer mechanism (substrate transfer mechanism) 24 is installed in the front region of the transfer chamber 23, and the wafer transfer mechanism 24 mounts a required number of wafers (5 in the drawing) on which the wafers 18 are mounted.
- a wafer mounting plate 25 is provided, and the wafer mounting plate 25 can be moved and rotated in the horizontal direction and can be moved up and down.
- a notch alignment device (not shown) as a substrate alignment device for aligning the circumferential position of the wafer 18 between the wafer transfer mechanism 24, that is, between the wafer transfer mechanism 24 and a clean unit 35 described later. Is installed.
- the wafer transfer mechanism 24 is configured to load and unload the wafer 18 with respect to a boat (substrate holder) 26 described later.
- the wafer transfer mechanism 24 has an axis for adjusting the operation of the wafer mounting plate 25 when the wafer mounting plate 25 holding the wafer 18 picks up the wafer 18 from a predetermined location and places it at the predetermined location.
- a certain X axis, a Y axis which is an axis for adjusting an approach angle when the wafer mounting plate 25 transfers the wafer 18 to the boat 26, and a case where the wafer mounting plate 25 transfers the wafer 18 to the boat 26.
- Four parameters are set: a Z-axis, which is an axis for adjusting the height of entry, and a V-axis, which finely adjusts the Z-axis to adjust the insertion interval of the wafer 18 into the boat 26.
- a standby unit 27 that accommodates and waits for the boat 26 is configured, and a vertical processing furnace 28 is provided above the standby unit 27.
- the processing furnace 28 has a processing chamber 29 formed therein, the lower end portion of the processing chamber 29 is a furnace port portion, and the furnace port portion is configured to be opened and closed by a furnace port shutter (furnace port opening / closing mechanism) 31. ing.
- a boat elevator (substrate holder lifting device) 32 that lifts and lowers the boat 26 is installed.
- a seal cap 34 as a lid is horizontally attached to the arm 33 connected to the elevator platform of the boat elevator 32, and the seal cap 34 supports the boat 26 vertically, and the boat 26 is mounted in the processing chamber 29. It is configured so that the furnace port portion can be airtightly closed in the inserted state.
- the boat 26 is configured to hold a plurality of (for example, about 50 to 125) wafers 18 in a horizontal posture with the wafers 18 aligned in the center.
- a clean unit 35 is disposed at a position facing the boat elevator 32 side, and the clean unit 35 is configured by a supply fan and a dustproof filter so as to supply clean air 36 such as a cleaned atmosphere or an inert gas. .
- Clean air 36 blown out from the clean unit 35 is circulated through a notch aligner (not shown), the wafer transfer mechanism 24, and the boat 26, and then sucked in through a duct (not shown) and exhausted outside the housing 2. Or is blown into the transfer chamber 23 by the clean unit 35.
- the pod loading / unloading port 6 When the pod 9 is supplied to the load port 8 shown in FIGS. 6 and 7, the pod loading / unloading port 6 is opened by the front shutter 7.
- the pod 9 on the load port 8 is loaded into the housing 2 through the pod loading / unloading port 6 by the pod conveying device 15 and placed on the designated shelf 13 of the rotary pod rack 11.
- the pod 9 After the pod 9 is temporarily stored in the rotary pod shelf 11, the pod 9 is transferred from the shelf plate 13 to one of the pod openers 14 by the pod transfer device 15 and transferred to the mounting table 21, or the load port. 8 is directly transferred to the mounting table 21.
- the wafer loading / unloading port 19 is closed by the opening / closing mechanism 22, and clean air 36 is circulated and filled in the transfer chamber 23.
- clean air 36 is filled with nitrogen (N 2 ) gas
- the oxygen (O 2 ) concentration in the transfer chamber 23 is 20 ppm or less, which is far from the oxygen concentration inside the housing 2 (atmosphere). Is set low.
- the opening side end surface of the pod 9 placed on the placing table 21 is pressed against the opening edge of the wafer loading / unloading port 19 in the front wall 17 of the sub-housing 16, and the lid of the pod 9 is opened by the opening / closing mechanism 22. It is removed and the wafer entrance is opened.
- the wafer 18 is taken out of the pod 9 by the wafer transfer mechanism 24 and transferred to a notch aligner (not shown). After aligning the wafers 18 with the notch alignment device, the wafer transfer mechanism 24 carries the wafers 18 into the standby unit 27 located behind the transfer chamber 23 and charges (charges) the boat 26.
- the wafer transfer mechanism 24 that delivered the wafer 18 to the boat 26 returns to the pod 9 and loads the next wafer 18 into the boat 26.
- the other (lower or upper) pod opener 14 is separated from the rotary pod shelf 11.
- the pod 9 is transferred and transferred by the pod transfer device 15, and the opening operation of the pod 9 by the other pod opener 14 is simultaneously performed.
- the furnace port portion of the processing furnace 28 closed by the furnace port shutter 31 is opened. Subsequently, the boat 26 is raised by the boat elevator 32 and is loaded into the processing chamber 29.
- the furnace port is hermetically closed by the seal cap 34.
- the processing chamber 29 is evacuated by a gas evacuation mechanism (not shown) so that a desired pressure (degree of vacuum) is obtained. Further, the inside of the processing chamber 29 is heated to a predetermined temperature by a heater driving unit (not shown) so as to have a desired temperature distribution.
- a process gas controlled to a predetermined flow rate is supplied by a gas supply mechanism (not shown), and the process gas contacts with the surface of the wafer 18 in the process of flowing through the process chamber 29, and at this time A thin film is formed on the surface of the wafer 18 by the CVD reaction. Further, the processed gas after the reaction is exhausted from the processing chamber 29 by the gas exhaust mechanism.
- an inert gas is supplied from an inert gas supply source (not shown) by the gas supply mechanism, the inside of the processing chamber 29 is replaced with the inert gas, and the inside of the processing chamber 29 Is restored to normal pressure.
- the boat 26 is lowered by the boat elevator 32 through the seal cap 34.
- the wafer 18 and the pod 9 are dispensed to the outside of the housing 2 in the reverse order of the above description. Unprocessed wafers 18 are further loaded into the boat 26, and batch processing of the wafers 18 is repeated.
- the control unit 200 included in the substrate processing apparatus includes an operation unit 201 provided with a display unit 210 that displays an operation screen for creating or editing a file for processing a substrate.
- the operation unit 201 is provided with a mounting unit 211 for mounting the external storage unit 212 and the input unit 213.
- the external storage unit 212 is, for example, FD, MO, HD, or the like.
- the input unit 213 is a mouse or a keyboard for inputting characters from the operation screen of the display unit 210.
- One or more mounting portions 211 are provided.
- the mounting unit 211 is configured such that the device 214 in which the authentication data is incorporated can be inserted and removed.
- the authentication data is data including, for example, a user ID and a user password.
- the device 214 is, for example, a USB device. At this time, the mounting unit 211 is a USB port.
- control unit 200 gives instructions to the sub-controller 203 that controls various process control mechanisms 204 in accordance with instructions from the operation unit 201, and processes the substrate by executing the file created or edited by the operation unit 201.
- a process system controller (PMC) 202 is controlled.
- control unit 200 gives instructions to the transport control module 206 that controls various transport mechanisms 208 in accordance with instructions from the operation unit 201, and transports a substrate by executing a file created or edited by the operation unit 201. It has a transport system controller 205 to control.
- the various transport mechanisms 208 include various sensors 209.
- a file including an operation recipe and device parameters is created or edited using the operation screen of the display unit 210, and this file is downloaded from the operation unit 201 to the process system controller 202.
- the process system controller 202 Based on the contents of the operation recipe and the like in the file downloaded from the operation unit 201, the process system controller 202 gives a predetermined instruction to the sub-controller 203 to control various process control mechanisms 204.
- the file is downloaded from the operation unit 201 to the transport system controller 205.
- the transport system controller 205 gives a predetermined instruction to the transport control module 206 to control various transport mechanisms 208. At the time of this control, detection data of various sensors 209 provided in various transport mechanisms 208 to be controlled are fed back to the transport control module 206.
- the operation unit 201 including the display unit 210, the process system controller 202, the sub-controller 203, the transfer system controller 205, and the transfer control module 206 constitute a control unit 200, which is used for operating recipes, control parameters and the like for the substrate processing apparatus. Based on this, a processing instruction for the substrate is issued.
- FIG. 5 shows an example in which the above-described device 214 is a USB device.
- This USB device includes a connector 53 and a recognition unit 54 connected to the connector 53.
- the recognition unit 54 includes at least a vendor ID, a product ID, a serial number. have. Vendor ID, Product ID, Serial No. Are respectively assigned to the user ID and user password of the substrate processing apparatus. Serial No. Some USB devices do not have a serial number. Security is lower than those that have Therefore, when high security is required as in the substrate processing apparatus, serial No. USB devices with are preferred.
- the operation unit 201 When the USB device is inserted into the mounting unit 211, the operation unit 201 displays the ID and No. of the USB device. And the control program 40 (FIG. 8) is executed to recognize the USB device as a unique key.
- a storage unit for storing predetermined data may be configured. The USB device having the storage means will be described later.
- FIG. 8 is a diagram showing a functional configuration of the control program 40 executed by the operation unit 201 of the substrate processing apparatus according to the first embodiment of the present invention.
- the control program 40 includes a user interface (UI) unit 400, an authentication unit 402, a user DB 404, a setting unit 406, a recipe storage unit 408, a parameter storage unit 410, an apparatus control unit 412, and an operation control unit 414.
- UI user interface
- storage unit 408 has the memory
- the control program 40 is supplied to the substrate processing apparatus, loaded into a memory (not shown) in the operation unit 201, and specifically uses hardware on an OS (not shown) operating on the operation unit 201. It is configured to be executed.
- the user interface (UI) unit 400, the authentication unit 402, the setting unit 406, and the operation control unit 414 are configured to be realized by the operation unit 201 illustrated in FIG. Further, the user DB 404, the recipe storage unit 408, the parameter storage unit 410, and the storage unit 411 are configured to be realized by the memory in the operation unit 201 or the external storage unit 212.
- the apparatus control unit 412 is configured to be realized by the process system controller 202, the sub controller 203, the transport system controller 205, and the transport control module 206 shown in FIG.
- the UI unit 400 is configured to accept user operations on the external storage unit 212, the input unit 213, and the device 214 described above, and to output the operation to each component of the control program 40. Further, the UI unit 400 is configured to display information / data created by each component of the control program 40 and processing contents of each component on the display unit 210 of the operation unit 201 shown in FIG. ing.
- the user DB 404 stores authentication data such as a plurality of user identifiers (IDs) and passwords of each user, and the user's authentication data based on the authentication data for each process such as a recipe editing process and a parameter editing process. It is configured to store the authority (user level).
- a device 214 having authentication data stored in advance in the user DB 404 in this way is referred to as a registered device 214.
- the user ID is an identifier for uniquely identifying the user.
- the password is a character string of a predetermined length made up of alphanumeric characters, for example, for authenticating the user.
- the “edit” authority for referring to and editing the operation recipe, the “reference” authority for referring to the operation recipe, and the reference / editing are all Any of the “prohibited” authorities that cannot be performed.
- the user is assigned any authority for each process.
- the authentication unit 402 is configured to accept a user ID and a user password of the device 214 and authenticate the user by referring to the user DB 404 when the device 214 is inserted into the mounting unit 211. Specifically, when receiving authentication data such as a user ID and a user password, the authentication unit 402 is configured to determine whether or not the password is correct with respect to the ID. When it is determined that the password is correct with respect to the ID, the authentication unit 402 is configured to permit execution of a user level process based on the authentication data.
- the authentication unit 402 is configured to return the user authority to the previous user when the device 214 is extracted from the mounting unit 211. Specifically, when the authentication unit 402 confirms the removal of the device 214, the authentication unit 402 reads the user ID and user password of the user before the device 214 is inserted into the mounting unit 211 from the user DB 404, and sets the user authority to the previous user. Is configured to set to
- the recipe storage unit 408 is configured to store an operation recipe in which processing contents of a plurality of processes are described.
- the parameter storage unit 410 is configured to store parameters for executing the driving recipe.
- the parameter storage unit 410 is configured to store apparatus parameters for changing the state of the substrate processing apparatus, usable functions, and the like.
- the recipe storage unit 408 and the parameter storage unit 410 constitute a data storage unit that stores data relating to the function of the substrate processing apparatus.
- the storage unit 411 is configured to temporarily store data collected in the substrate processing apparatus.
- the setting unit 406 constitutes a reception unit that receives an operation for editing data stored in the recipe storage unit 408 or the parameter storage unit 410. Specifically, the setting unit 406 accepts an operation input by the user via a recipe editing screen (not shown) or a parameter editing screen (not shown), and the driving recipe and parameters stored in the recipe storage unit 408 are received. It is configured to register, delete, and update device parameters stored in the storage unit 410.
- the operation control unit 414 controls the authentication unit 402 to display an initial screen such as a menu screen or an authentication screen on the display unit 210 of the operation unit 201. Further, for example, when the device 214 is inserted (login operation), the operation control unit 414 is configured to control the authentication unit 402 and accept the user ID and the user password without displaying the authentication screen. ing. Further, for example, the operation control unit 414 is configured to control the authentication unit 402 to display an authentication screen and input a user ID and a user password when a user login operation is performed without inserting the device 214. ing. On the other hand, the apparatus control unit 412 is configured to output instructions related to substrate processing and control them.
- FIG. 9 is a flowchart showing the control process of the login process by the control program 40 executed by the substrate processing apparatus according to the present embodiment.
- a login process switching process
- a user non-administrator
- a user login user switching
- the operation control unit 414 of the control program 40 displays an initial screen (FIG. 1A) such as a menu screen on the display unit 210 of the operation unit 201.
- the operation control unit 414 determines whether or not the USB device has been inserted into the USB port (step 91). If the USB device has been inserted, the process proceeds to step 92; The process returns to step 90.
- the authentication unit 402 controls the operation control unit 414 to hold the state where the initial screen (FIG. 1A) is displayed on the display unit 210 of the operation unit 201.
- the authentication unit 402 receives the user ID and user password read from the USB device and performs authentication processing. Specifically, the authentication unit 402 refers to the user DB 404 and determines whether the user password is correct for the user ID (step 93). If it is determined to be correct, login to the user level based on the user authentication level is permitted (step 94), and the user login is completed. As a result, if another user has logged in before, the user is switched to the user identified by the user ID incorporated in the USB device.
- step 95 If it is determined that it is not correct, login is not permitted (step 95), and user login is completed.
- login is not permitted, a new user ID and user password can be input again, or another USB device can be inserted into the mounting unit 211 again to perform user login processing.
- a USB device it is preferable to exclude the USB device whose login is not permitted.
- the setting unit 406 is controlled by the operation control unit 414 to display the operation screen on the display unit 210. indicate.
- the user opens the editing screen as the operation screen, the user performs predetermined processing, for example, setting of a desired control parameter or setting of a desired device parameter via the editing screen.
- the setting unit 406 determines whether or not an operation by the user has been accepted.
- the control program 40 stores the recipe storage unit 408, the parameter storage unit 410, and the like based on the accepted operation. The stored data is referenced and updated.
- the user switching process can be easily executed by simply omitting the display of the authentication screen (login screen) and the input of authentication data and simply inserting the USB device into the USB port. Therefore, it is possible to effectively avoid the troublesome input of the authentication data such as the user ID and password and the prohibition of the screen operation caused by inputting an incorrect password.
- the operation control unit 414 of the control program 40 determines whether or not a registered USB device is removed from the USB port while the menu screen (FIG. 1A) is displayed on the display unit 210, for example.
- the user authority is returned to the user before insertion, and the logout process is completed.
- a step of checking the specific button 52 described above may be added.
- the logout process can be easily executed by simply extracting the USB device without displaying the authentication screen (login screen) on the display unit 210.
- the USB device when the USB device is extracted, it can be automatically returned to the previous user, so that the user does not forget to return. Therefore, if the user level of the user who has used the device before is lower than the user level of the user who has extracted the USB device, the previous user will not erroneously execute unauthorized processing. Therefore, the operability is remarkably improved while ensuring the safety of the apparatus.
- the input method for logging in (switching) without using the USB device has been described.
- the reason for leaving such a conventional user ID and password input method is that the USB device is lost. This is because the apparatus can be operated even when the login of the USB device is not permitted.
- a USB device when a USB device is inserted, it is changed to the user level based on the authentication data of the USB device, and when the USB device is extracted, the user can be returned to the previous (original) user, so that the user level is not forgotten.
- the apparatus is a substrate processing apparatus
- a user with a low authority level usually operates the apparatus, so when special work such as recipe editing or parameter setting change is performed, a user with a high authority level I'm doing special work after the login process.
- special work such as recipe editing or parameter setting change
- a user with a high authority level I'm doing special work after the login process.
- the user logs out after that, and a user with a low authority level logs in again to operate the apparatus.
- the USB device is extracted as in the present embodiment, there is a great merit if it can be returned to the user who has been used before, and the operability associated with user switching can be further improved.
- the storage unit of the device 214 has not been described in detail, but if the device having the storage unit has an additional function, Usability associated with login processing, for example, operability associated with user switching can be further improved.
- the USB device having the storage unit according to the modified example of the first embodiment has a controller 55 connected to the connector 53, as shown in FIG. 10.
- the controller 55 is connected to a flash memory 56 as storage means.
- the flash memory 56 stores additional information (FIG. 2) in addition to a storage area for storing predetermined data.
- Additional information includes, for example, a function to continue data backup after switching users (data backup function), a function to start maintenance (maintenance function), a function to execute files such as recipe files (file execution function), and recipe editing
- data backup function data backup function
- maintenance function maintenance function
- file execution function file execution function
- recipe editing A function for causing the substrate processing apparatus to perform specific operations such as data backup, maintenance, file execution, recipe editing, parameter editing, such as a start function and a parameter edit start function can be provided. It is preferable to prepare a plurality of USB devices having such additional information according to the purpose of the operation start control.
- the function of the control program 40 is improved in accordance with the additional function of the USB device having the storage means.
- a storage unit 411 for transferring data collected from the substrate processing apparatus to the USB device is required between the setting unit 406 and the apparatus control unit 412.
- the authentication unit 402 reads the additional information held by the USB device, controls the operation control unit 414, and after the user switching, causes the display unit 210 of the operation unit 201 to continuously display the designation screen designated by the additional information.
- the authentication unit 402 changes the backup data storage destination set in the setting unit 406 via the operation control unit 414 to the storage unit of the USB device.
- the read additional information is a maintenance function
- an apparatus part to be maintained is set by the setting unit 406, and the set part is stored in the storage unit 411.
- the operation control unit 414 is configured to stop the execution of the file for processing the substrate stored in the recipe storage unit 408 and the parameter storage unit 410 when the USB device is inserted into the USB port during the substrate processing. It is. Further, when the execution of the file is stopped, the operation control unit 414 outputs an instruction regarding a safe process to the device control unit 412 using a safe file stored in the storage unit 411 in advance, and the device control unit 412 is controlled.
- the functions defined by the additional information described above are merely examples, and it goes without saying that the functions are not limited to these.
- a data backup function, a maintenance function, and a safe file migration function will be described in detail.
- step 110 the operation control unit 414 of the control program 40 stores data in a predetermined storage area of the USB device. It is determined whether or not the data backup function is assigned. If it is determined that the data backup function is assigned, the process proceeds to step 111; otherwise, the process returns to the normal mode in step 114.
- the normal mode 114 here is a state in which the user login is completed in FIG. 9 described above. Therefore, an initial screen at the user level based on the authentication data is displayed.
- step 111 the operation control unit 414 displays a data backup screen (FIG. 3A) on the display unit 210.
- the operation control unit 414 determines whether or not the start button has been selected and the backup mode has been selected by the input unit 213 (step 112), and the portion to be backed up read from the storage unit 411 has been selected. In such a case, the process proceeds to the data backup execution process in step 113, and if not, the process proceeds to step 114.
- step 113 the setting unit 406 controlled by the apparatus control unit 412 takes the selected data to be backed up from the storage unit 411 into the USB device via the user interface unit (UI unit) 400 (FIG. 2).
- UI unit user interface unit
- the user backup is completed after the user switching is completed simply by plugging in the USB device, thereby further improving the operability associated with the user switching. Can do.
- the user can perform an operation limited to a specific operation, the possibility of an erroneous operation and the outflow of screen information is reduced, and the reliability and safety of the apparatus are more reliably ensured.
- step 120 the operation control unit 414 of the control program 40 assigns the maintenance function to a predetermined storage area of the USB device. If it is determined that the maintenance function is assigned, the process proceeds to step 121. If not, the process returns to the normal mode in step 124. Since the normal mode 124 here is in the same state as the user login completion of FIG. 9 described above, an initial screen is displayed here.
- step 121 the operation control unit 414 displays a maintenance screen (FIG. 3B) on the display unit 210.
- the operation control unit 414 determines whether or not the start button has been selected and the maintenance mode has been selected by the input unit 213 (step 122). Proceed to the process of 123, otherwise proceed to the process of step 124 if canceled. If the process is canceled and the process proceeds to step 124, the process does not return to step 122. Therefore, if the device is canceled by mistake, it is necessary to insert and remove the USB device again.
- step 123 the setting unit 406 controlled by the apparatus control unit 412 instructs the substrate processing apparatus to specify an apparatus part to be maintained, and performs maintenance.
- the maintenance screen is opened after the user switching is completed simply by inserting the USB device, so that the operability associated with the user switching can be further improved.
- an operation screen for executing a cleaning recipe or executing a recipe for purging the inside of the processing chamber 29 with N 2 to release the atmosphere is displayed.
- the specific operation can be automatically performed after the user switching.
- the accompanying operability can be further improved.
- a specific screen for allowing the user to perform a specific operation can be displayed, and the user can perform an operation limited to the specific operation. Therefore, it is not possible to cause an operation impossible state due to a user's erroneous operation, and it is possible to prevent important information from being unintentionally leaked from the screen.
- USB device may be inadvertently inserted into the USB port during substrate processing, which may be a problem. Therefore, in this modification, when a USB device is inserted into the USB port during substrate processing, execution of a file for processing the substrate is stopped.
- the operation control unit 414 of the control program 40 normally has the operation unit 201.
- a screen for monitoring the operating state of the substrate processing apparatus (FIG. 3D) is displayed on the display unit 210.
- the operation control unit 414 determines whether or not the USB device is inserted into the USB port (step 131). If the USB device is a registered USB device, the device control unit 412 An instruction to stop execution of a file for processing the substrate is output to the apparatus, and the substrate processing apparatus is controlled (step 132).
- the execution file is changed from the file for processing the substrate stored in the recipe storage unit 408 and the parameter storage unit 410 to the substrate processing apparatus stored in the storage unit 411.
- a file for shifting to a safe state is executed by switching to a file for shifting to a state, for example, an idle state (step 132a). In this case, the apparatus state can be further shifted to a safe state.
- the operation control unit 414 of the control program 40 controls the authentication unit 402 to display a predetermined button on an initial screen (operation screen) such as a menu screen.
- the button 210 is inactively displayed so that the button cannot be pressed (FIG. 3C).
- the predetermined button is, for example, a button 52 that displays whether or not an unmount operation can be performed (FIG. 3E).
- the color of the predetermined button is the same color as the background color of the screen. As a result, a predetermined button can be ignored when not inserted.
- the operation control unit 414 controls the authentication unit 402 to perform a predetermined operation on the operation screen of the display unit 210 or the substrate processing apparatus.
- the predetermined button is configured to be actively displayed in an area (part) that is not switched even by the switching display operation of the operation screen for monitoring the operation state (FIG. 3D). This can alert you whenever you plug in.
- the operation control unit 414 When the USB device is removed from the USB port without pressing the unmountable button 52, the operation control unit 414 is removed without pressing the button 52 on the operation screen of the display unit 210. It is preferable to display a warning that informs the user (FIG. 3E). Thereby, the safety
- the safety of the apparatus is further secured.
- the system is configured such that the system lock can be released by inserting a USB device for unlocking the system, and the logout process is completed by extracting the USB device for releasing the system lock, the operability is greatly improved. Needless to say.
- the operation screen displayed on the display unit 210 wants to be known to third parties, such as operation recipes and device parameters based on various knowledge, information indicating device downtime and trouble contents that can be a clue to know device performance, etc. Not much information is included. For this reason, if the operation screen is left displayed, there is a risk that important information may be stolen or rewritten by a person without user authority.
- the screen saver screen is activated to hide the operation screen of the display unit, etc. Is possible. Further, when the operation screen is displayed again, if the user ID, password, and approval are required, the risk of information leakage or the like is further reduced.
- the above method of inputting a password may have the same problem as that in the first embodiment. For example, there is a restriction that the display state of the display unit cannot be switched until a certain time has elapsed, or that the above method cannot be applied to a substrate processing apparatus that does not have an input device such as a keyboard. Insufficient avoidance of On the other hand, if the set time is shortened, the user ID and password must be input many times, and the operability is poor.
- control program 40 executed by the operation unit 210 of the substrate processing apparatus according to the present embodiment
- the control program 40 according to the present embodiment also has the same function as that of the first embodiment.
- the authentication unit 402 as a data authentication unit completes the login process in the same manner as in the first embodiment, and when the device 214 is removed from the mounting unit 211. , Configured to complete the logout process.
- the logout process is completed when the authority for device operation at all user levels has been revoked, that is, nobody is logged in, the user has returned to the previous user level, etc. Point to.
- the operation control unit 414 serving as a display control unit is configured to display at least a part of a predetermined operation screen on the display unit 210 of the operation unit 201 when the device 214 is inserted and the login process is completed. .
- the operation control unit 414 is configured to control the display state on the display unit 210 based on the user level authenticated by the authentication unit 402, for example. That is, for example, a part of the operation screen that can be disclosed to a user with a low user level, specifically, a fixed display area that cannot be switched even by an operation screen switching display operation, a warning display, or the like, It is configured to perform control such as displaying the entire operation screen in accordance with a high user.
- the operation control unit 414 is configured to switch the display state of at least a part of the operation screen of the display unit 210 when the device 214 is extracted and the logout process is completed. Examples of switching of the display state include switching from a predetermined operation screen to another predetermined screen, switching to a non-display state of the predetermined operation screen, and the like. At this time, the operation control unit 414, for example, only the portion of the operation screen displayed on the display unit 210 that prohibits disclosure in the logout state, specifically, other than the fixed display area and the warning display described above. It is configured to control the display state on the display unit 210, such as hiding only a part, hiding the entire operation screen, or switching to another predetermined screen.
- the screen is blacked out, the screen is in a low brightness state, a screen that covers the entire operation screen such as a screen saver, etc. is displayed and the operation screen is not displayed.
- These display state switching settings and activation programs are stored in the storage unit 411 so as to be readable, for example, and are read out and executed by the operation control unit 414 via the setting unit 408 when switching the display state of the operation screen. It is comprised so that.
- the operation control unit 414 determines whether or not the device 214 is inserted into the mounting unit 211, and the display unit is configured to switch at least a part of the display state of the operation screen when the device 214 is removed. It is comprised so that 210 may be controlled.
- the state in which the device 214 is extracted includes not only the case where the device 214 that has been inserted is extracted but also the state in which no one has logged in after the substrate processing apparatus is started up.
- the operation screen includes a data backup screen, a maintenance screen, an apparatus operating status monitoring screen, an editing screen for recipes and parameters, an authentication screen (login screen), an initial screen (for example, a menu screen), and the like. It is.
- the operation control unit 414 is configured to display an arbitrary operation screen on the display unit 210 according to the situation or setting at that time. For example, an operation screen other than a predetermined screen such as an initial screen may be hidden until the login process is completed after the substrate processing apparatus is started up. In addition, when the login process is completed, a predetermined operation screen is always displayed, an operation screen corresponding to the user level is displayed, or an operation screen displayed before the latest logout process is displayed. It may be configured.
- FIG. 14 is a flowchart showing a control process for displaying an operation screen by the substrate processing apparatus according to the present embodiment. This is a function corresponding to FIG. 9 of the first embodiment, but is different in that a predetermined operation screen is displayed along with a login process by inserting a USB device.
- a state may be a state in which no one has logged in after the substrate processing apparatus is started up, or a state after the inserted USB device is removed and the logout process is completed, as will be described later.
- the operation control unit 414 determines whether or not the USB device is inserted into the USB port (step 291). If the USB device is inserted, the process proceeds to step 292. If not, the operation control unit 414 proceeds to step 292. Step 290 and step 291 are repeated while maintaining the non-display state of the operation screen.
- the authentication unit 402 reads the user password or the like from the USB device without displaying the authentication screen (login screen) in the same manner as in the above-described embodiment (step 292), and determines whether the authentication data is correct or not. .
- a screen indicating “verifying” for example, a message screen
- the login process is completed (step 294), and the operation control unit 414 displays an operation screen corresponding to the authenticated user level (step 296). If it is determined to be incorrect (NG), login is not permitted (step 295), and the process returns to step 290 without displaying the operation screen.
- a screen indicating “verification NG” for example, a message screen
- a user who is permitted to log in can perform various operations, for example, by selecting a function button that can be used on the menu screen.
- FIG. 15 is a flowchart showing the switching control process of the display state of the operation screen by the substrate processing apparatus according to the present embodiment. This control process is characterized in that the display state of the operation screen is switched along with the logout process by extracting the USB device.
- step 300 shown in FIG. 15 for example, a predetermined operation screen is displayed on the display unit 210 of the operation unit 201.
- This state is a state in which, for example, a USB device is inserted and the login process is completed.
- the operation control unit 414 determines whether or not the registered USB device is extracted from the USB port (step 301).
- the authentication unit 402 completes the logout process without displaying the authentication screen (login screen) (step 302), and the operation control unit 414 displays the operation unit 201.
- the operation screen displayed on the unit 210 is hidden (step 303). Otherwise, step 300 and step 301 are repeated while maintaining the display state of the operation screen.
- a predetermined extraction procedure may be added according to the type of USB device.
- the operation screen can be hidden, for example, by simply removing the USB device from the USB port, so that the operability associated with the logout process can be further improved.
- the logout process is completed (the USB device is removed), that is, when there is a high possibility that no one is operating the substrate processing apparatus, the operation screen is hidden, etc. It is possible to reduce the risk of the operation screen being stolen or rewritten by a third party or the like who does not have the user authority since the screen is not displayed and left unattended.
- the substrate processing apparatus can display the operation screen by inputting a password or the like via the input unit 213 without using a USB device from a state where the operation screen is not displayed. It may be configured.
- the authentication data such as a password to be input may be the same as or different from the authentication data included in the USB device, and is used for device authentication or input content authentication registered in advance in the operation unit 201 of the substrate processing apparatus. It is preferable that the log-in process is completed when the data is collated and the data is matched.
- the operation unit 201 may be configured not to accept all inputs via the mounting unit 211, the display unit 210, and the like in a state where the USB device is extracted.
- Such input can include insertion of a USB device.
- the operation control unit 414 is configured to display at least a part of a predetermined operation screen when the USB device is extracted, and to switch a display state of at least a part of the operation screen when the USB device is inserted. May be.
- a worker who wants to start work corresponding thereto inserts the USB device, so that a third party can not see a predetermined operation screen, This is useful when, for example, prohibiting a predetermined operation from the operation screen by three parties.
- the operation control unit 414 is configured to switch the display state of a predetermined operation screen when the device 214 is extracted and the logout process is completed. As a result, the operability associated with the logout process can be further improved.
- the operation control unit 414 is configured to switch the display state of at least a part of the operation screen.
- information according to the user level can be selectively displayed, or information related to ensuring safety can be actively displayed, so that a desired operation can be performed with a simple mechanism regardless of the level of each user. As a result, the operability is greatly improved.
- the operation control unit 414 is configured to hide a predetermined operation screen when the device 214 is extracted. As a result, when the logout process is completed, that is, when there is a high possibility that no one is operating the substrate processing apparatus, it is less likely that the operation screen remains displayed, and the previous user is Even when the user authority has been restored, it is still in a non-display state, so that the risk of information leakage or rewriting on the operation screen can be reduced.
- the operation control unit 414 is configured to be in a blackout state, a low luminance state, a screen saver screen activation state, or the like when the operation screen is set to a non-display state. Thereby, the lifetime of the display unit 210 can be extended.
- the operation unit 201 is configured not to accept an input to the operation unit 201 when the device 214 is extracted. This can further reduce the risk of information leakage and rewriting on the operation screen.
- the operation unit 201 when the device 214 is extracted, requires that the authentication data be input from the input unit 213 or the like or the login process such as loading the device is completed.
- the predetermined operation screen is not displayed. This can further reduce the risk of information leakage and rewriting on the operation screen.
- the device according to the present modification includes a flash memory 56 as a storage unit, for example, like the USB device shown in FIG. 10 of the first embodiment.
- the flash memory 56 stores additional information for adding an additional function to the USB device. Some of the additional functions given by the additional information are exemplified below.
- an operation screen switching function for displaying a predetermined operation screen after completion of the login process by inserting the USB device will be described.
- FIG. 16 showing the state after the login process is completed (corresponding to step 294 in FIG. 14)
- the inserted USB device has an operation screen switching function (from step 294a to YES)
- the stored information on the predetermined operation screen is read by the authentication unit 402 and executed by the operation control unit 414.
- the predetermined operation screen is designated (step 296a) and displayed (step 296). If the USB device does not have an operation screen switching function (from step 294a to NO), a predetermined operation screen such as a login process completion screen is displayed without designating the operation screen (step 296). ).
- a display state setting function for performing settings related to display state switching performed after the USB device is extracted will be described.
- FIG. 17 showing the state after completion of the login process (corresponding to step 294 in FIG. 14)
- the USB device flash memory 56 is preliminarily stored.
- Stored information on predetermined switching settings for example, information on settings for switching to a predetermined screen or switching to a blackout state, a low luminance state, a screen saver screen activation state, or the like is read by the authentication unit 402 to control operation.
- the unit 414 writes or rewrites data in the storage unit 411 and the like via the setting unit 406 (step 294c).
- step 296 the operation screen is displayed (step 296).
- step 296 may be performed before step 294b or may be performed in parallel with steps 294b to 294c. Thereafter, when the USB device is extracted, the display state of the operation screen is switched according to the new setting written in the storage unit 411 or the like.
- the USB device having the flash memory 56 to share a part of the functions of the substrate processing apparatus that performs specific operations such as operation screen switching and display state setting, the storage capacity of the substrate processing apparatus can be reduced. It becomes possible.
- the operations associated with login processing and logout processing can be made multifunctional without having to change functions and settings of the substrate processing apparatus itself. Therefore, the operability can be further improved.
- the device according to the present embodiment has the same configuration as the USB device shown in FIG.
- the flash memory 56 as a storage unit included in the USB device stores an operation procedure for causing the operation unit 201 of the substrate processing apparatus to perform a specific operation such as collection of error logging data.
- the operation control unit 414 realized by the operation unit 201 is configured to read and execute an operation procedure included in the flash memory 56.
- the operation control unit 414 serving as a display control unit is configured to hide at least a part of the operation screen while performing the specific operation.
- the non-display state of the operation screen includes a blackout screen similar to that when the power of the substrate processing apparatus is turned off, a low-brightness screen, a screen saver screen, or the like. Thereby, during automatic operation according to the operation procedure, it is possible to reduce the risk of information snooping or rewriting by a third party. Further, the non-display state of the operation screen may be automatically canceled when the specific operation is completed. However, upon receipt of an operation end notification described later, the worker can hide the operation screen from the input unit 213. It is preferable that the non-display state is maintained until the state release operation is performed or the USB device is removed. In addition, when the specific operation is normally completed, the USB device may be configured to be automatically removable.
- the operation control unit 414 is configured to notify the end of the specific operation by a predetermined means.
- the predetermined notification means include auditory means such as an alarm sound and visual means such as a warning light.
- auditory means such as an alarm sound
- visual means such as a warning light.
- it is configured to be able to determine the end state of the operation, that is, whether it ended normally or abnormally, depending on the tone of the alarm sound, the color and flashing of the warning light, or the proper use of the alarm sound and the warning light. Also good.
- the operation control unit 414 is configured to display a specific operation screen designated in advance when the specific operation ends abnormally. That is, even when the non-display state of the operation screen is maintained even after the specific operation is finished, the specific operation screen is displayed at the abnormal end. For example, an error message etc. is displayed on the operation screen, and an abnormal situation grasping screen that can grasp the abnormal situation, a button for canceling or resetting a specific operation, etc. are displayed, and abnormality recovery that promotes recovery of the abnormal state There are screens.
- an operation procedure for causing the substrate processing apparatus to perform a specific operation may be stored in the storage unit 411 provided in the substrate processing apparatus.
- the operation control unit 414 is configured to read and execute a predetermined operation procedure stored in the storage unit 411 or the like when the USB device is inserted and the login process is completed.
- data for a predetermined operation procedure is registered in advance in the storage unit 411 and a specific operation is performed when the unique identification information of the USB device such as authentication data incorporated in the USB device matches this. It may be configured as follows.
- the operation unit 201 has an operation screen non-display function that hides the operation screen via the operation control unit 414, a notification function that notifies the end of the specific operation, and an abnormality that displays the predetermined screen when the operation ends abnormally.
- the USB device may be provided with a time operation screen display function and the like.
- the operation control unit 414 implements the above functions according to the instruction information from the USB device.
- the USB device has a specific operation execution function, specifically, error logging.
- the operation control unit 414 that has read the operation procedure causes the setting unit 406 to read error logging data from the storage unit 411 according to the operation procedure, for example.
- a specific operation is executed by causing the USB device to collect via the UI unit 400 (step 495a).
- the operation control unit 414 hides the operation screen at least during that time (step 495b), and preferably maintains the non-display state even after the end of the specific operation.
- the operation control unit 414 determines whether the operation ends normally or abnormally (step 496), and if it is normal end, notifies the end of the operation (step 497a). If the operation is abnormally ended, an operation end is notified (step 497b), and an operation screen at the time of abnormality is displayed (step 498). Thus, the automatic execution of the specific operation is finished. If the USB device does not have an operation execution function (from step 494 to NO), the process ends without executing a specific operation.
- data collection is automatically performed according to a predetermined operation procedure. For example, it is not necessary for a worker to perform work on a regular basis, and the load on the worker can be reduced. Efficiency can be improved. Therefore, the operability associated with the login process can be further improved.
- the specific operation to be performed by the substrate processing apparatus in the present embodiment may be, for example, data backup and maintenance as described in the above-described embodiment, transition to a safe state, or the like.
- a specific operation is automatically performed by the operation control unit 414.
- the operation unit 201 is configured to perform a specific operation when a USB device is inserted into the mounting unit 211 and login is completed.
- a specific operation can be executed and terminated simply by inserting the USB device, and the operability associated with the login process can be further improved.
- the operation control unit 414 hides the display state of at least a part of the operation screen, and the operation unit 201 Is configured to remain hidden while performing a specific operation. This reduces the risk of information leakage or information rewriting. Such a function is even more useful when, for example, the operation is being executed automatically and the worker is not on the side.
- the operation unit 201 is configured to notify the end of a specific operation or the end state of the operation by audio means or visual means. Thereby, it is possible to know the end of the operation, which is particularly useful when the operation screen is in a non-display state. In addition, it can be determined whether the operation has ended normally or abnormally.
- the operation control unit 414 is configured to display a specific operation screen designated in advance, such as an abnormal situation grasping screen or an abnormality recovery screen, when a specific operation ends abnormally. . Thereby, even if some abnormality occurs, it can be dealt with immediately. In particular, when the operation screen is in a non-display state, an abnormal state is displayed immediately, which is useful.
- the USB device is provided with an operation execution function that causes the operation unit 201 to perform a specific operation, and is configured to cause the operation unit 201 to perform a specific operation.
- the operativity accompanying a login process can be improved further.
- a specific operation can be performed simply by inserting the USB device, if the USB device is managed, a desired operation can be performed regardless of the user level, which is a preferable form in terms of user manageability. .
- the film formation process includes, for example, a process for forming a CVD, PVD, oxide film, and nitride film, a process for forming a film containing a metal, and the like.
- the vertical apparatus has been described.
- the present invention can be applied to a single wafer apparatus, and can also be applied to other substrate processing apparatuses (such as an exposure apparatus, a lithography apparatus, and a coating apparatus).
- the present invention can also be applied to an apparatus (management server) that is connected to a plurality of substrate processing apparatuses via a communication line and manages the state of each substrate processing apparatus.
- the first aspect of the present invention is: Having an operation unit with an operation screen for creating or editing a file for processing a substrate;
- the operation unit is a mounting unit for mounting an external storage unit and an input unit, and is configured to be able to insert / remove a device in which data including at least authentication data such as a user ID and a user password is incorporated. ,
- the device authentication data registered in the operation unit and the authentication data incorporated in the device are collated, and the authentication data incorporated in the device is used for the device authentication.
- Data authentication means to complete the login if registered in the data Display control means for switching a display state of at least a part of the operation screen when the login is completed;
- the substrate processing apparatus includes execution means (for example, the operation unit) that performs a specific operation in accordance with data different from the authentication data incorporated in the device.
- the display control means includes When the device is inserted into the mounting unit and the login is completed, the display state of at least part of the operation screen is hidden, and the non-display state is performed while the operation unit performs the specific operation. Configured to keep
- the operation unit is The end of the specific operation is notified by audio means or visual means.
- the display control means includes When the specific operation ends abnormally, a specific operation screen designated in advance, such as an abnormal situation grasp screen or an abnormality recovery screen, is displayed.
- the device includes An operation execution function for causing the operation unit to perform the specific operation; An operation screen non-display function for causing the display control means to hide the operation screen; A notification function for notifying the operation unit of the end of the specific operation; Data for causing the display control means to execute at least one of an abnormal operation screen display function for displaying the specific operation screen is incorporated.
- Causing the operation unit to perform the specific operation causing the display control unit to hide the operation screen, causing the operation unit to notify the end of the specific operation, or causing the display control unit to perform the specific operation. It is configured to display a screen.
- the second aspect of the present invention is: Having an operation unit with an operation screen for creating or editing a file for processing a substrate;
- the operation unit is A mounting unit configured to be able to insert and remove a device in which data including authentication data such as at least a user ID and a user password is embedded; Display control means for switching a display state of at least a part of the operation screen when the device is inserted into the mounting unit; And a data authentication unit that completes logout of the user when the device is extracted from the mounting unit.
- the display control means includes The substrate processing apparatus according to the second aspect, configured to display at least a part of a predetermined operation screen when the device is inserted into the mounting portion.
- the display control means includes The substrate processing apparatus according to the second aspect, configured to hide at least a part of the operation screen when the device is extracted from the mounting portion.
- the display control means includes The substrate processing apparatus according to the second aspect, configured to display a screen saver screen and hide at least a part of the operation screen when the device is extracted from the mounting portion.
- the third aspect of the present invention is:
- the operation unit is The substrate processing apparatus according to the first aspect or the second aspect, configured to not accept an input to the operation unit in a state where the device is extracted.
- the fourth aspect of the present invention is:
- the data authentication means includes In the state where the device is extracted, when the authentication data for the operation unit or the authentication data different from the authentication data is input from the input unit provided in the mounting unit, the device is registered in the operation unit.
- the authentication data and the input authentication data are collated, and if the input authentication data is registered in the operation unit, the log-in is completed.
- the display control means includes The substrate processing apparatus according to the second aspect, which is configured to display at least a part of the predetermined operation screen when the login is completed.
- the device has an operation screen display function for instructing the display control means to display the predetermined operation screen, It is preferable that the predetermined operation screen is displayed when the device having the operation screen display function is inserted into the mounting portion.
- the device has a display state setting function for instructing the display control means to set a predetermined display state, It is preferable that the predetermined display state is set to be switched when the device having the display state setting function is inserted into the mounting portion.
- the predetermined display state switching setting is a switching setting to at least one of a blackout state, a low luminance state, and a screen saver screen activation state.
- Operation Unit 202 Process System Controller 205 Transport System Controller 210 Display Unit 211 Mounting Unit 212 External Storage Unit 213 Input Unit 214 Device
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Abstract
Description
以下に、本発明の第1の実施の形態について説明する。
まずは、本発明の実施の形態の概要を説明する。本実施の形態の基板処理装置は、例えば、シリコン(Si)などのウエハよりIC等の半導体素子を製造する半導体製造装置である。半導体製造装置には、縦型、枚葉型のいずれも含まれる。
図1は、本発明の第1の実施の形態の基板処理装置における操作部の表示部に表示される操作画面を示す。図1(a)は、基板処理装置に対して所定の処理を行う際に表示されるメニュー画面、図1(b)はユーザログインのための認証データの入力画面(ログイン画面)をそれぞれ示す。
このように構成すれば、デバイスを装着部に差し込むだけで、ログイン処理ができると共に、基板処理装置の所定のデータを記憶させることができ、ログイン処理に伴う操作性、ユーザ切り替えに伴う操作性を一層向上させることができる。
このように、データバックアップ機能を割り当てたデバイスを装着部に差し込むと、ユーザ切り替え後、操作画面が自動的にデータバックアップ画面に切り替わるように構成される。よって、データバックアップ操作を簡略化でき、デバイスに容易にデータをバックアップさせることができる。これにより、ユーザ切り替えに伴う操作性を一層向上させことができる。この場合、例えば基板処理装置のトラブル時などに、障害情報やエラーロギングのような特定のデータしか収集できないようにしておくと、さらにデータ流出の心配が抑えられ、よりいっそう安全性が確保される。
このように、メンテナンス機能を割り当てたデバイスを装着部に差し込むと、操作画面を、特定の操作を行わせるためメンテナンス画面に切り替えることができるので、メンテナンス操作を簡略化でき、さらにメンテナンスを容易に開始することができる。これにより、ユーザ切り替えに伴う操作性を一層向上させることができる。
このように、基板処理中に特定の操作を行わせるためのデバイスが差し込まれた場合には、ユーザ切り替え後、前記基板を処理するためのファイルの実行が停止されるので、他のユーザによって、誤ってこのファイルが継続されることを防止できる。さらに、装置状態を安全な状態に移行させるためのファイルを実行するように、付加情報としてアラームレシピやアボートレシピを実行させる指示も含まれるようにすると、デバイスを差し込むだけで装置状態を安全な状態に移行させることができる。但し、一般的に、装置状態を安全な状態に移行するレシピは、特定のユーザにしか実行できないようにデバイス管理をしておくのが好ましい。なお、基板処理装置にエラーが発生したときに、デバイスを差し込むだけでアラームレシピやアボートレシピを実行するための操作画面を表示してもよい。これにより、これらのレシピを実行できるので、迅速に装置を安全な状態に戻すことができる。
なお、前記デバイスが抜き出される等、ファイルの再実行が可能な状態になったら、装置状態を安全な状態から元の状態に戻して、再度基板を処理するためのファイルを継続できるようにすることが好ましい。
このように、差し込まれたデバイスによって選択可能な所定のボタン51を、固定表示領域にアクティブ表示させて、ボタン51を押下できるようにすると、ユーザの権限が明確になり、操作画面が切り替わっても、前記デバイスを差し込んだ当該ユーザが、権限のある処理を実行することを容易にする。これにより、ユーザ切り替えに伴う操作性を一層向上させることができる。
このように、前記デバイスが特定のボタン52を押下しないで抜き出されたとき、前記操作画面上に前記特定のボタン52を押下しないで取り外されたことを知らせる警告を発すると、前記デバイスの記憶手段に記憶された所定のデータ等を有効に保護することができる。好ましくは、特定のボタン52が押下されないで前記デバイスが抜き出されると、ログアウト処理が完了しないように構成することが望ましい。そうすると、ユーザは確実に前記特定のボタン52を押下した後、前記デバイスを抜き出す。さらに、ログアウト処理が未完了状態では、操作不可とすることが望ましい。そうすると、よりいっそう装置の安全性が保たれる。例えば、操作不可を解除するには、所定の解除用デバイスを挿入することで解除できるようにすればよい。そして、この解除用デバイスを抜くと、ログアウト処理が完了するようにすればよい。そのように、デバイスを抜き出すとログアウト処理が完了するという工程に、特定のボタン52をチェックする工程を設けるだけで、さらにデータ保護に有効となる。これにより、ユーザ切り替えに伴う操作性や安全性を一層向上させることができる。ここで、操作不可とは、操作画面上での入力が全く受け付けられないことを示す。
主に図4を参照して、本実施の形態に係る基板処理装置の構成について概略を説明する。図4の詳細については、後述する。
図6、図7にて、本実施の形態に係る基板処理装置が備えるプロセス装置1について説明する。
次に、運転レシピ、装置パラメータなどに基づいて制御されるプロセス装置1の動作を、図6及び図7を参照して詳細に説明する。なお、このような動作は、後述する制御プログラム40の装置制御部412により制御される。
図4を用いて、本発明の第1の実施の形態に係る基板処理装置のブロック構成について制御系を中心にしてさらに詳述する。
第1の実施の形態に係るデバイス214は、それが持つ一意の情報を認識し、これに関連づけてユーザレベルでシステムの制御を行うことを可能としている。デバイス214は、ユーザID及びパスワード代替キーとして使用される。
図5に、上述したデバイス214がUSBデバイスである場合の例を示す。このUSBデバイスは、コネクタ53とコネクタ53に接続された認識部54とを備える。この認識部54は、少なくともベンダID、プロダクトID、シリアルNo.を有している。ベンダID、プロダクトID、シリアルNo.は、それぞれ基板処理装置のユーザID、ユーザパスワードに割り当てられる。なお、シリアルNo.を持っていないUSBデバイスもあるが、その場合、シリアルNo.を持っているものと比べてセキュリティが低くなる。したがって、基板処理装置のような高いセキュリティを必要とする場合は、シリアルNo.を持っているUSBデバイスが好ましい。このUSBデバイスが、装着部211に差し込まれると、操作部201はUSBデバイスのID及びNo.を取得して、制御プログラム40(図8)を実行して、USBデバイスを固有のキーとして認識する。図示されてはいないが、上述の認証データとしての認識部54の他に、所定のデータを記憶するための記憶手段を構成してもよい。なお、記憶手段を有するUSBデバイスについては後述する。
図8は、本発明の第1の実施の形態に係る基板処理装置の操作部201により実行される制御プログラム40の機能構成を示す図である。
図8に示すように、制御プログラム40は、ユーザインタフェース(UI)部400、認証部402、ユーザDB404、設定部406、レシピ記憶部408、パラメータ記憶部410、装置制御部412、操作制御部414を有する。また、必要に応じて記憶部411を有する。制御プログラム40は、基板処理装置に供給され、操作部201内のメモリ(図示せず)にロードされて、操作部201上で動作する図示しないOS上で、ハードウェアを具体的に利用して実行されるように構成されている。
一方、装置制御部412に対しては、基板の処理に関する指示を出力し、これらを制御するように構成されている。
次に、本発明の第1の実施の形態に係る基板処理装置の制御処理を説明する。なお、以下の説明において、デバイス214はUSBデバイスであるものとし、装着部211はUSBポートであるものとする。
図9は、本実施の形態に係る基板処理装置で実行される制御プログラム40によるログイン処理の制御処理を示すフローチャートである。ここでは主に、ユーザ(非管理者)によるログイン処理(切り替え処理)、つまり、ユーザログイン(ユーザ切り替え)について説明する。
制御プログラム40の操作制御部414は、例えば表示部210にメニュー画面(図1(a))を表示したままの状態で、登録済みUSBデバイスがUSBポートから抜き出されたか否かを判定する。登録済みUSBデバイスが抜き出された場合には、ユーザ権限を差し込み前のユーザに戻し、ログアウト処理を完了する。なお、上述の特定のボタン52をチェックする工程を追加してもよい。
以上述べたごとく本実施の形態によれば、少なくとも認証データを組み込んだUSBデバイスを挿入したり抜き出したりするだけでユーザログイン及びユーザログアウトを実行できるので、認証データであるユーザIDおよびパスワード入力の煩わしさ、および誤ったパスワードを入力することによる画面操作の禁止状態を回避することができるようになる。したがって、ログイン処理に伴う操作性、例えば、ユーザ切り替えに伴う操作性を向上できる。
上述した第1の実施の形態では、デバイス214の記憶手段について特に詳細には触れなかったが、記憶手段を有するデバイスに付加機能を持たせると、ログイン処理に伴う操作性、例えば、ユーザ切り替えに伴う操作性をより向上できる。
図5に示したデバイス214としてのUSBデバイスの変形例として図10に示すように、第1の実施の形態の変形例に係る記憶手段を有するUSBデバイスは、コネクタ53にコントローラ55が接続され、コントローラ55から記憶手段であるフラッシュメモリ56に接続された構造をしている。このフラッシュメモリ56には、所定のデータを記憶させる記憶領域の他に、付加情報(図2)が記憶されている。付加情報には、例えばユーザ切り替え後に、引き続きデータバックアップを開始する機能(データバックアップ機能)、メンテナンスを開始する機能(メンテナンス機能)、レシピファイル等のファイルを実行する機能(ファイル実行機能)、レシピ編集開始機能、パラメータ編集開始機能など、データバックアップ、メンテナンス、ファイル実行、レシピ編集、パラメータ編集等の特定の操作を基板処理装置に行わせる機能を持たせることができる。このような付加情報をもつUSBデバイスは、その動作開始制御の目的に応じて、複数個用意しておくことが好ましい。
認証部402は、USBデバイスが有する付加情報を読み取り、操作制御部414を制御して、ユーザ切り替え後、引き続き付加情報で指定された指定画面を、操作部201の表示部210に表示させる。読み取った付加情報がデータバックアップ機能である場合、認証部402は、操作制御部414を介して設定部406に設定されているバックアップデータの格納先を、USBデバイスの記憶手段に変更する。また、読み取った付加情報がメンテナンス機能である場合、メンテナンスすべき装置部位が、設定部406で設定されて、その設定部位が記憶部411に格納される。また、操作制御部414は、基板処理中にUSBデバイスがUSBポートに差し込まれた場合、レシピ記憶部408、パラメータ記憶部410に記憶された基板を処理するためのファイルの実行を停止するよう構成してある。さらに操作制御部414は、当該ファイルの実行が停止されるとき、装置制御部412に対して、前記記憶部411に予め記憶させた安全なファイルによって安全な処理に関する指示を出力し、装置制御部412を制御する。なお、上述した付加情報で定義される機能は一例であって、これらに限定されないことはいうまでもない。
以下、データバックアップ機能、メンテナンス機能、安全なファイルの移行機能を例にとって具体的に説明する。
まず、USBデバイスのデータバックアップ機能について説明すると、図11に示すように、ログイン処理(ユーザ切り替え)完了後、ステップ110において、制御プログラム40の操作制御部414は、USBデバイスの所定の記憶領域にデータバックアップ機能が割り当てられているか否かを判定し、データバックアップ機能が割り当てられていると判断した場合には、ステップ111に進み、そうでない場合にはステップ114の通常モードに戻る。ここでの通常モード114は、上述した図9で、ユーザログインが完了した状態である。よって、認証データに基づいたユーザレベルでの初期画面が表示される。
次に、USBデバイスのメンテナンス機能について説明すると、図12に示すように、ユーザ切り替え完了後、ステップ120において、制御プログラム40の操作制御部414は、USBデバイスの所定の記憶領域にメンテナンス機能が割り当てられているか否かを判定し、メンテナンス機能が割り当てられていると判断した場合には、ステップ121に進み、そうでない場合にはステップ124の通常モードに戻る。ここでの通常モード124は、上述した図9のユーザログイン完了と同じ状態であるので、ここでは初期画面が表示される。
ところで、本実施の形態のように、USBデバイスを用いて各種機能を実行できるようにすると、USBデバイスが基板処理中に不用意にUSBポートに差し込まれて問題になる場合がある。そこで、本変形例では、基板処理中にUSBデバイスが前記USBポートに差し込まれると、基板を処理するためのファイルの実行が停止されるよう構成してある。
ところで、上述したように記憶手段を有するUSBデバイスをUSBポートから抜き出す際には、アンマウント操作を行わなければならず、いきなり抜き出してしまうとUSBデバイスが故障してデータが失われる可能性がある。そのため、アンマウント操作を安全に行うための、制御プログラムを追加し、操作画面上のボタンの表示を次のように工夫した。
次に、本発明の第2の実施の形態について説明する。本実施の形態においては、さらに操作画面の表示状態の切り替えを行うように構成されている点が、第1の実施の形態とは異なる。以下の説明では、上述の第1の実施の形態と同様の構成については、上述と同様の機能を有する構成要件に同一の符号を付して説明を省略する。
以下に、本実施の形態に係る基板処理装置の操作部210により実行される制御プログラム40の機能について、図8を参照して説明する。本実施の形態に係る制御プログラム40も、第1の実施の形態と同様の機能を備える。
次に、本実施の形態に係る基板処理装置の制御処理について説明する。なお、以下の説明において、デバイス214はUSBデバイスであるものとし、装着部211はUSBポートであるものとする。
図14は、本実施の形態に係る基板処理装置による操作画面の表示の制御処理を示すフローチャートである。これは、第1の実施の形態の図9に相当する機能であるが、USBデバイスの差し込みによるログイン処理に伴って、所定の操作画面が表示される点が異なる。
図15は、本実施の形態に係る基板処理装置による操作画面の表示状態の切り替え制御処理を示すフローチャートである。係る制御処理により、USBデバイスの抜き出しによるログアウト処理に伴って、操作画面の表示状態が切り替わる点が特徴である。
本実施の形態においては、第1の実施の形態の効果に加えて、さらに以下に挙げる1つ又は複数の効果を奏する。
次に、本実施の形態の変形例に係るデバイスについて、以下に説明する。
次に、本発明の第3の実施の形態について説明する。本実施の形態では、デバイスが差し込まれてログイン処理(ユーザ割り込み処理等も含む)が完了すると、自動的に特定の操作を実行する。このとき、操作画面を非表示とするように構成されている点が、上述の実施の形態とは異なる。操作画面は、例えば第3者に開示したくない情報等を含む少なくとも一部または全体を非表示とする。以下の説明では、上述の実施の形態と同様の構成については、上述と同様の機能を有する構成要件に同一の符号を用いて説明を省略する。
以上、本発明の実施の形態を具体的に説明したが、本発明は上述の実施の形態に限定されるものではない。本発明は、このほかにもその要旨を逸脱しない範囲で種々様々変形実施可能なことは勿論である。
以下に、本発明の好ましい態様を付記する。
基板を処理するためのファイルの作成又は編集を行う操作画面を備えた操作部を有し、
前記操作部は、外部記憶手段及び入力手段を装備するための装着部であって、少なくともユーザIDやユーザパスワード等の認証データを含むデータが組み込まれたデバイスを抜き差し可能に構成された装着部と、
前記装着部に前記デバイスが差し込まれると、前記操作部に登録されたデバイス認証用のデータと前記デバイスに組み込まれた認証データとが照合され、前記デバイスに組み込まれた認証データが前記デバイス認証用のデータに登録されていればログインを完了するデータ認証手段と、
前記ログインが完了されると、前記操作画面の少なくとも一部の表示状態を切り替える表示制御手段と、
前記ログインが完了されると、前記デバイスに組み込まれた前記認証データとは異なるデータに従い、特定の操作を行う実行手段(例えば前記操作部等)と、を備えた
基板処理装置である。
前記表示制御手段は、
前記装着部に前記デバイスが差し込まれて前記ログインが完了されると、前記操作画面の少なくとも一部の表示状態を非表示とし、前記操作部が前記特定の操作を行う間、前記非表示の状態を保つように構成される。
前記操作部は、
前記特定の操作の終了を、聴覚的手段または視覚的手段により通知するように構成される。
前記表示制御手段は、
前記特定の操作が異常終了すると、異常状況把握画面または異常回復画面などの予め指定された特定の操作画面を表示するように構成される。
前記デバイスには、前記認証データの他に、
前記操作部に前記特定の操作を行わせる操作実行機能、
前記表示制御手段に前記操作画面を非表示とさせる操作画面非表示機能、
前記操作部に前記特定の操作の終了を通知させる通知機能、
前記表示制御手段に前記特定の操作画面を表示させる異常時操作画面表示機能、の少なくともいずれかを実行させるためのデータが組み込まれる。
前記操作部に前記特定の操作を行わせ、前記表示制御手段に前記操作画面を非表示とさせ、前記操作部に前記特定の操作の終了を通知させ、または前記表示制御手段に前記特定の操作画面を表示させるように構成される。
基板を処理するためのファイルの作成又は編集を行う操作画面を備えた操作部を有し、
前記操作部は、
少なくともユーザIDやユーザパスワード等の認証データを含むデータが組み込まれたデバイスを抜き差し可能に構成された装着部と、
前記装着部に前記デバイスが差し込まれると、前記操作画面の少なくとも一部の表示状態を切り替える表示制御手段と、
前記装着部から前記デバイスが抜き出されると、前記ユーザのログアウトを完了するデータ認証手段と、を備えた
基板処理装置である。
前記表示制御手段は、
前記装着部に前記デバイスが差し込まれると、所定の操作画面の少なくとも一部を表示するように構成されている
第2の態様に記載の基板処理装置である。
前記表示制御手段は、
前記装着部から前記デバイスが抜き出されると、前記操作画面の少なくとも一部を非表示とするように構成されている
第2の態様に記載の基板処理装置である。
前記表示制御手段は、
前記装着部から前記デバイスが抜き出されると、スクリーンセーバ画面を表示して前記操作画面の少なくとも一部を非表示とするように構成されている
第2の態様に記載の基板処理装置である。
前記操作部は、
前記デバイスが抜き出された状態では、前記操作部に対する入力を受け付けないように構成されている
第1の態様又は第2の態様に記載の基板処理装置である。
前記データ認証手段は、
前記デバイスが抜き出された状態では、前記操作部に対する前記認証データ又は前記認証データとは異なる認証データが前記装着部に装備された前記入力手段から入力されたとき、前記操作部に登録された認証用のデータと入力された前記認証データとが照合され、入力された前記認証データが前記操作部に登録されていればログインを完了するように構成され、
前記表示制御手段は、
前記ログインが完了すると、前記所定の操作画面の少なくとも一部を表示するように構成されている
第2の態様に記載の基板処理装置である。
前記デバイスは、前記表示制御手段に前記所定の操作画面の表示を指示する操作画面表示機能を有し、
前記操作画面表示機能を有する前記デバイスが前記装着部に差し込まれると、前記所定の操作画面が表示されるように構成されていることが好ましい。
前記デバイスは、前記表示制御手段に所定の表示状態の切り替え設定を指示する表示状態設定機能を有し、
前記表示状態設定機能を有する前記デバイスが前記装着部に差し込まれると、前記所定の表示状態の切り替え設定がされるように構成されていることが好ましい。
前記所定の表示状態の切り替え設定は、ブラックアウト状態、低輝度状態、スクリーンセーバ画面起動状態の少なくともいずれかの状態への切り替え設定であることがより好ましい。
202 プロセス系コントローラ
205 搬送系コントローラ
210 表示部
211 装着部
212 外部記憶手段
213 入力手段
214 デバイス
Claims (9)
- 基板を処理するためのファイルの作成又は編集を行う操作画面と、外部記憶手段及び入力手段を装備するための装着部と、を備えた操作部を有し、
前記操作部は、
少なくともユーザIDやユーザパスワード等の認証データが組み込まれたデバイスが前記装着部に差し込まれると、前記操作部に登録されたデバイス認証用のデータと前記デバイスに組み込まれた認証データとが照合され、前記デバイスに組み込まれた認証データが前記デバイス認証用のデータに登録されていればログインを完了するデータ認証手段と、
前記ログインが完了されると、前記操作画面の少なくとも一部の表示状態を切り替える表示制御手段と、を備えた
基板処理装置。 - 前記操作部は、
前記ログインが完了されると、前記認証データに応じて特定の操作を行わせるように構成される
請求項1に記載の基板処理装置。 - 前記デバイスには、前記認証データの他に、前記特定の操作として、
日常点検パラメータ等のデータを確認するための画面を表示させる特定画面表示機能、
ロギングデータ等のデータを収集する収集機能、
ロギングデータ等のデータをバックアップするデータバックアップ機能、
所定のレシピファイル等のファイルを実行させるファイル実行機能、の少なくともいずれかを前記操作部に実行させるためのデータが組み込まれる
請求項2に記載の基板処理装置。 - 前記データ認証手段は、
前記装着部から前記デバイスが抜き出されると、ログアウトを完了するように構成されている
請求項1に記載の基板処理装置。 - 前記表示制御手段は、
前記装着部から前記デバイスが抜き出されると、前記操作画面の少なくとも一部を非表示とするように構成されている
請求項1に記載の基板処理装置。 - 前記操作部は、
前記装着部から前記デバイスが抜き出されると、前記操作部に対する入力を受け付けないように構成されている
請求項1に記載の基板処理装置。 - 基板を処理するためのファイルの作成又は編集を行う操作画面と、外部記憶手段及び入力手段を装備するための装着部と、を備えた操作部を有し、
前記操作部は、
少なくともユーザIDやユーザパスワード等の認証データが組み込まれたデバイスが前記装着部に差し込まれると、前記操作部に登録されたデバイス認証用のデータと前記デバイスに組み込まれた認証データとが照合され、前記デバイスに組み込まれた認証データが前記デバイス認証用のデータに登録されていれば割り込み処理を完了するデータ認証手段と、
前記割り込み処理が完了されると、前記操作画面の少なくとも一部の表示状態を切り替える表示制御手段と、を備えた
基板処理装置。 - 基板を処理するためのファイルの作成又は編集を行う操作画面と、外部記憶手段及び入力手段を装備するための装着部と、を備えた操作部を有する基板処理装置の制御方法であって、
少なくともユーザIDやユーザパスワード等の認証データが組み込まれたデバイスが前記装着部に差し込まれると、前記操作部に登録された前記デバイス認証用のデータと前記デバイスに組み込まれた認証データとが照合され、前記デバイスに組み込まれた認証データが前記デバイス認証用のデータに登録されていればログインを完了する工程と、
前記ログインが完了されると、前記操作画面の少なくとも一部の表示状態を切り替える工程と、を有する
基板処理装置の制御方法。 - 基板を処理するためのファイルの作成又は編集を行う操作画面と、外部記憶手段及び入力手段を装備するための装着部と、備えた操作部を有する基板処理装置で実施される表示方法であって、
少なくともユーザIDやユーザパスワード等の認証データが組み込まれたデバイスが前記装着部に差し込まれると、前記操作部に登録された前記デバイス認証用のデータと前記デバイスに組み込まれた認証データとが照合され、前記デバイスに組み込まれた認証データが前記デバイス認証用のデータに登録されていればログインを完了し、前記ログインが完了されると、前記操作画面の少なくとも一部の表示状態を切り替えて表示する
基板処理装置で実施される表示方法。
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