WO2011108701A1 - セラミック電子部品、及びセラミック電子部品の製造方法 - Google Patents
セラミック電子部品、及びセラミック電子部品の製造方法 Download PDFInfo
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- WO2011108701A1 WO2011108701A1 PCT/JP2011/055061 JP2011055061W WO2011108701A1 WO 2011108701 A1 WO2011108701 A1 WO 2011108701A1 JP 2011055061 W JP2011055061 W JP 2011055061W WO 2011108701 A1 WO2011108701 A1 WO 2011108701A1
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- 239000000919 ceramic Substances 0.000 title claims abstract description 88
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 42
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 40
- 239000001301 oxygen Substances 0.000 claims abstract description 40
- 239000000463 material Substances 0.000 claims abstract description 33
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 33
- 239000012298 atmosphere Substances 0.000 claims abstract description 30
- 229910052742 iron Inorganic materials 0.000 claims abstract description 21
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 19
- 150000001875 compounds Chemical class 0.000 claims description 38
- 238000010304 firing Methods 0.000 claims description 33
- 239000000843 powder Substances 0.000 claims description 10
- 238000001354 calcination Methods 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 3
- 238000009413 insulation Methods 0.000 abstract description 27
- 229910052802 copper Inorganic materials 0.000 abstract description 10
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 abstract 2
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(I) oxide Inorganic materials [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 abstract 1
- GEYXPJBPASPPLI-UHFFFAOYSA-N manganese(III) oxide Inorganic materials O=[Mn]O[Mn]=O GEYXPJBPASPPLI-UHFFFAOYSA-N 0.000 abstract 1
- 239000010949 copper Substances 0.000 description 78
- 230000035699 permeability Effects 0.000 description 49
- 238000000034 method Methods 0.000 description 35
- 239000000203 mixture Substances 0.000 description 32
- 239000004020 conductor Substances 0.000 description 11
- 230000007423 decrease Effects 0.000 description 10
- 101000993059 Homo sapiens Hereditary hemochromatosis protein Proteins 0.000 description 9
- 230000003247 decreasing effect Effects 0.000 description 8
- 239000007772 electrode material Substances 0.000 description 8
- 239000000696 magnetic material Substances 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 229910018605 Ni—Zn Inorganic materials 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 229910052596 spinel Inorganic materials 0.000 description 4
- 239000011029 spinel Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
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- 238000010344 co-firing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
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- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000002966 varnish Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
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- 239000002003 electrode paste Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- 230000001771 impaired effect Effects 0.000 description 1
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- 238000002844 melting Methods 0.000 description 1
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- 229910052759 nickel Inorganic materials 0.000 description 1
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- 229910052709 silver Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
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- B32B15/00—Layered products comprising a layer of metal
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Definitions
- the present invention relates to a ceramic electronic component and a method for manufacturing the ceramic electronic component. More specifically, the present invention relates to a ceramic electronic component such as a coil component having a magnetic part made of a ferrite material and a conductive part mainly composed of Cu, and a method for manufacturing the same. About.
- Patent Document 1 discloses that the raw material composition of the ferrite base is a copper conductor integrated firing in which a PbO component is added in a proportion of 0.3 part by weight or more and 5.0 parts by weight or less with respect to 100 parts by weight of Ni—Zn ferrite.
- Type ferrite elements have been proposed.
- the raw material composition of the ferrite base is such that the PbO component is 0.3 parts by weight or more and 5.0 parts by weight or less and the B 2 O 3 component is 0 parts by weight with respect to 100 parts by weight of the Ni—Zn ferrite.
- a copper conductor-integrated sintered ferrite element to which 0.03 to 1.5 parts by weight and a SiO 2 component are added in a proportion of 0.03 to 1.5 parts by weight has been proposed.
- Patent Document 2 discloses that Mn as an auxiliary component is 44 to 47 mol% Fe 2 O 3 , 5 to 13 mol% CuO, 15 to 23 mol% ZnO, and the balance is substantially NiO.
- An oxide magnetic material having a composition containing 2 to 3 0.1 to 0.5 wt% and composed of a sintered body having an average crystal grain size of 0.7 to 1.2 ⁇ m has been proposed.
- Patent Document 2 describes that a Cu-based material can be used as the internal electrode material.
- Ni—Zn based ferrite is generally fired in an air atmosphere.
- Ag is usually used as the internal electrode material, and the ferrite material and the internal are formed at a low temperature of 930 ° C. or lower. The electrode material is fired simultaneously.
- Patent Document 1 Although Cu and ferrite material are simultaneously fired in a nitrogen atmosphere, there is no region where Cu and Fe 2 O 3 coexist, so that a reducing atmosphere in which Cu does not oxidize is disclosed. When the calcination is performed, Fe 2 O 3 is reduced to Fe 3 O 4 , so that the specific resistance ⁇ is lowered, which may cause deterioration of electrical characteristics.
- Patent Document 1 since glass components PbO, B 2 O 3 , and SiO 2 are added, these glass components cause abnormal grain growth during the firing process, resulting in a decrease in magnetic permeability, etc. For this reason, it is difficult to obtain desired good magnetic properties, and since PbO is contained in ferrite, there is a problem in terms of environmental load.
- Patent Document 2 describes that a Cu-based material can be used as an internal electrode material, only an example in which Ag is used as an internal electrode material and is fired in an air atmosphere is described.
- Patent Document 2 does not describe any of the above-described problems that occur when a Cu-based material is used for a conductive part. Therefore, Patent Document 2 discloses that a Cu-based material is used for a conductive part. Even in such a case, it is difficult to obtain a ceramic electronic component having good insulating properties and good electrical characteristics such as impedance characteristics.
- An object of the present invention is to provide a ceramic electronic component such as a coil component, and a method for manufacturing the ceramic electronic component.
- the Fe content is preferably 25 to 47% in terms of molar ratio in terms of Fe 2 O 3 .
- the Fe content is more preferably 30 to 46% in terms of molar ratio in terms of Fe 2 O 3 .
- the content of Fe 2 O 3 is in the range of 20 to 48 mol% described above, the ratio of Mn to the total amount of Fe and Mn is converted to Mn 2 O 3 and Fe 2 O 3 , and in molar ratio. It has been found that by setting the content to 2% or more, good insulating properties can be secured and at the same time the magnetic permeability is improved.
- the magnetic part has a ratio of Mn to the total of Fe and Mn in terms of Mn 2 O 3 and Fe 2 O 3 , and a molar ratio of 2% or more.
- the magnetic part contains 10% or less of Cu in terms of molar ratio in terms of CuO.
- the magnetic body portion contains 33% or less Zn in terms of molar ratio in terms of ZnO.
- the ZnO content is desirably 6 mol% or more in consideration of the permeability ⁇ of ferrite.
- the ceramic electronic component of the present invention is preferably formed by simultaneously firing the magnetic body portion and the conductive portion.
- the ceramic electronic component of the present invention it is preferable that a plurality of the magnetic parts and a plurality of the conductive parts are alternately laminated.
- the ceramic electronic component of the present invention is preferably a coil component.
- the divalent element compound containing the Fe compound and at least the Ni compound is converted to Fe 2 O 3 so that the Fe compound is in a molar ratio of 20 to 48%.
- the Fe compound and the divalent element compound are weighed, and the ratio of the Mn to the total amount of Fe and Mn is converted to Mn 2 O 3 and Fe 2 O 3 in a molar ratio of less than 50% (including 0%).
- the magnetic body portion includes a magnetic body portion made of a ferrite material and a conductive portion mainly composed of Cu, and the magnetic body portion includes a divalent element including trivalent Fe and at least divalent Ni.
- the Fe content is 20 to 48% (preferably 25 to 47%, more preferably 30 to 46%) in terms of molar ratio in terms of Fe 2 O 3 and
- the magnetic body portion is such that the ratio of Mn to the total amount of Fe and Mn is less than 50% (including 0%) in terms of molar ratio when converted to Mn 2 O 3 and Fe 2 O 3 , respectively. Since Mn is contained, the specific resistance ⁇ can be improved and desired insulation can be ensured even if the Cu-based material and the ferrite material are simultaneously fired.
- the specific resistance ⁇ can be a log ⁇ with a good insulating property of 5.0 or more. This makes it possible to obtain a desired ceramic electronic component having good electrical characteristics such as impedance characteristics.
- the magnetic body portion contains Mn so that the ratio of Mn to the total amount of Fe and Mn is 2% or more in terms of molar ratio in terms of Mn 2 O 3 and Fe 2 O 3. As a result, better insulating properties can be secured, and the magnetic permeability can be improved as compared with the case where Mn is not added.
- the magnetic body portion contains Cu in a molar ratio of 10% or less in terms of CuO, a ceramic electronic component having good impedance characteristics can be obtained.
- the magnetic part contains Zn of 33% or less in terms of ZnO, a sufficient Curie point can be secured, and operation under conditions of high temperature during use is possible. A guaranteed ceramic electronic component can be obtained.
- Cu is oxidized even if it is fired simultaneously with the magnetic part using a conductive part mainly composed of Cu. And can be sintered.
- a multilayer ceramic electronic component such as a coil component having good insulation and good electrical characteristics such as impedance characteristics is obtained. be able to.
- a divalent element compound containing an Fe compound and at least a Ni compound is converted to Fe 2 O 3 so that the Fe compound is in a molar ratio of 20 to 48%.
- the Fe compound and the divalent element compound are weighed, and the ratio of the Mn to the total of Fe and Mn is converted to Mn 2 O 3 and Fe 2 O 3 , and the molar ratio is less than 50% (0% Mn compound is weighed so as to include, and after mixing these weighed products, a calcining step of calcining to produce a calcined powder, and a ceramic green sheet for producing a ceramic green sheet from the calcined powder
- a conductive film forming process in which a conductive paste having a predetermined pattern is formed by applying a conductive paste containing Cu as a main component to the ceramic green sheet; The Nshito laminated in a predetermined order, and the laminate formation step of forming a laminate, and firing the laminate at the firing atmosphere
- composition of the magnetic body portion is a diagram showing an example of the impedance characteristics when fired at equilibrium oxygen partial pressure of Cu-Cu 2 O in the case of outside the present invention.
- Composition of the magnetic body portion is a diagram showing an example of the impedance characteristics when fired at equilibrium oxygen partial pressure of Cu-Cu 2 O in the case within the scope the present invention.
- Composition of the magnetic body portion is a diagram showing an example of the impedance characteristics when fired at 1/100 of Cu-Cu 2 O equilibrium oxygen partial pressure in the case of outside the present invention.
- Composition of the magnetic body portion is a diagram showing an example of the impedance characteristics when fired at 1/100 of Cu-Cu 2 O equilibrium oxygen partial pressure in the case within the scope the present invention.
- FIG. 1 is a cross-sectional view showing an embodiment of a laminated coil component as a ceramic electronic component according to the present invention.
- the ferrite element body 1 has a magnetic body portion 2 and a coil conductor (conductive portion) 3 mainly composed of Cu embedded in the magnetic body portion 2.
- lead electrodes 4a and 4b are formed at both ends of the coil conductor 3
- external electrodes 5a and 5b made of Ag or the like are formed at both ends of the ferrite element body 1, and the external electrodes 5a and 5b and the lead electrodes are formed. 4a and 4b are electrically connected.
- the magnetic part 2 is formed of a ferrite material having a spinel crystal structure (general formula X 2 O 3 ⁇ MeO), and is composed of at least a trivalent elemental compound Fe 2 O 3 and a divalent elemental compound NiO. As necessary, it contains Mn 2 O 3 which is a trivalent element compound and ZnO and CuO which are divalent element compounds.
- the reason why the molar content of Fe 2 O 3 in the magnetic part 2 is set to 20 to 48 mol% is as follows.
- the stoichiometric composition is the ratio of X 2 O 3 (X: Fe, Mn) to MeO (Me: Ni, Zn, Cu). Is 50:50, and X 2 O 3 and MeO are usually blended so as to have a substantially stoichiometric composition.
- Fe 2 O 3 containing trivalent Fe is sufficiently reduced with respect to the stoichiometric composition, and NiO containing a divalent element, for example, divalent Ni, is substituted for Fe 2 O 3.
- NiO containing a divalent element for example, divalent Ni
- Fe 2 O 3 is difficult to be reduced to Fe 3 O 4 because it is contained in a sufficiently larger amount than the stoichiometric composition. That is, Fe 3 O 4 can be represented by Fe 2 O 3 .FeO.
- NiO which is a divalent Ni compound
- NiO is present in an excessive amount more than the stoichiometric composition, it is the same divalent as Ni. Production of FeO is prevented. For this reason, Fe 2 O 3 can be maintained in the state of Fe 2 O 3 without being reduced to Fe 3 O 4 .
- the content of Fe 2 O 3 is sufficiently reduced from the stoichiometric composition, and the divalent elemental compound is sufficiently increased with respect to the stoichiometric composition, thereby simultaneously firing Cu and the ferrite material.
- Fe 2 O 3 is to maintain the state of the Fe 2 O 3 without being reduced to Fe 3 O 4. Therefore, since Fe 2 O 3 does not have to be reduced to Fe 3 O 4 , it is possible to avoid a decrease in specific resistance ⁇ , thereby ensuring a desired good insulating property, and as a result, good It becomes possible to obtain a laminated coil component having excellent electrical characteristics.
- the molar content of Fe 2 O 3 needs to be 48 mol% or less.
- Fe 2 O 3 exceeds 48 mol%, Fe 2 O 3 is reduced by less than 2 mol% from the stoichiometric composition, and the molar content of Fe 2 O 3 is too large.
- Fe 2 O 3 is easily reduced to produce Fe 3 O 4 , causing a decrease in specific resistance ⁇ , making it difficult to obtain a desired laminated coil component.
- the content molar amount of Fe 2 O 3 needs to be at least 20 mol%. This is because if the molar content of Fe 2 O 3 is less than 20 mol%, the specific resistance ⁇ may be lowered, and desired insulation may not be ensured.
- the molar content of Fe 2 O 3 in the magnetic body portion 2 is 20 to 48 mol%, and from the viewpoint of ensuring better insulation, it is preferably 25 to 47 mol%. More preferably, it is 30 to 46 mol%.
- the coercive force is reduced and the magnetic flux density is increased, so that the magnetic permeability ⁇ can be improved.
- the Mn 2 O 3 in order that the ratio of Mn 2 O 3 to the total of Fe 2 O 3 and Mn 2 O 3 (hereinafter, referred to as "A value”.) As is 2% or more in a molar ratio It is preferable to contain.
- the content of Mn 2 O 3 is larger than the content of Fe 2 O 3 , and there is a possibility that the insulation is deteriorated. Therefore, when Mn 2 O 3 is contained, it is necessary to control the Mn 2 O 3 content so that the A value is 2% or more and less than 50%.
- the molar content of Fe 2 O 3 is in the range of 20 to 48 mol%, the amount of Mn 2 O 3 is increased in place of the divalent element compound in such a form that part of Fe is replaced with Mn. Therefore, it is possible to improve the specific resistance ⁇ , and it is also possible to obtain a desired good insulating property.
- Mn 2 O 3 becomes a reducing atmosphere at a higher oxygen partial pressure than Fe 2 O 3 . Therefore, at an oxygen partial pressure equal to or lower than the equilibrium oxygen partial pressure of Cu—Cu 2 O, Mn 2 O 3 becomes a strongly reducing atmosphere compared to Fe 2 O 3 , and therefore Mn 2 O 3 is preferentially reduced and burned. The result can be completed. In other words, since the Mn 2 O 3 it is preferentially reduced as compared with Fe 2 O 3, Fe 2 O 3 it is possible to complete the baking process before being reduced to Fe 3 O 4.
- Mn 2 O 3 By including Mn 2 O 3 in the magnetic body part 2 in this way, even if the Cu-based material and the ferrite material are simultaneously fired below the equilibrium oxygen partial pressure of Cu—Cu 2 O, the Mn 2 O 3 Since it is preferentially reduced, sintering can be completed before Fe 2 O 3 is reduced, and Cu metal and Fe 2 O 3 can coexist more effectively. And it can avoid that specific resistance (rho) falls by this, and can improve insulation. As a result, a chevron-shaped impedance characteristic having a peak in a specific frequency range can be obtained, and the electrical characteristics can be improved.
- the A value is 50% or more
- the content of Mn 2 O 3 is larger than the content of Fe 2 O 3 , which may cause a decrease in insulation, and the A value is 2%. If it is less than 1, the effect of adding Mn 2 O 3 cannot be sufficiently obtained. Therefore, even when a part of trivalent Fe is substituted with trivalent Mn, in order to obtain desired insulation, the Mn 2 O 3 content is set so that the A value is 2% or more and less than 50%. It is preferable to control.
- the magnetic body portion 2 contains Fe 2 O 3 and NiO, Fe 2 O 3 is 20 to 48 mol%, and the A value is less than 50%. And / or by increasing the amount of Mn 2 O 3 , it is possible to avoid the decrease in the specific resistance ⁇ without impairing the magnetic permeability ⁇ and to ensure insulation, thereby improving the electrical characteristics. It becomes.
- the specific resistance ⁇ can be improved to 5.0 or more by log ⁇ without impairing the magnetic characteristics, and a laminated coil component suitable for noise absorption having high impedance in a specific frequency range can be obtained. .
- a laminated coil component having a high impedance in a specific frequency region and having a chevron-shaped impedance characteristic.
- NiO, ZnO, and CuO in the magnetic part 2 are not particularly limited and can be set as appropriate according to the molar amount of Fe 2 O 3. When contained, it is preferably blended so that ZnO: 6 to 33 mol%, CuO: 0 to 10 mol%, and NiO: balance.
- the content of ZnO is preferably 33 mol% or less.
- ZnO has the effect of contributing to the improvement of the magnetic permeability ⁇ , but in order to exert such an effect, the molar amount of ZnO needs to be 6 mol%.
- the content molar amount is preferably 6 to 33 mol%.
- the CuO content molar amount exceeds 10 mol%, the specific resistance ⁇ may be lowered. Therefore, the CuO content is preferably 10 mol% or less.
- these weighed materials are put in a pot mill together with pure water and cobblestones such as PSZ (partially stabilized zirconia) balls, thoroughly mixed and pulverized in a wet manner, evaporated and dried, and then temporarily heated at a temperature of 800 to 900 ° C. Bake.
- PSZ partially stabilized zirconia
- these calcined materials are again put into a pot mill together with an organic binder such as polyvinyl butyral, an organic solvent such as ethanol and toluene, and PSZ balls, and sufficiently mixed and pulverized to prepare a ceramic slurry.
- an organic binder such as polyvinyl butyral
- an organic solvent such as ethanol and toluene
- PSZ balls PSZ balls
- magnetic sheets 6a to 6h having a predetermined film thickness are produced.
- via holes are formed at predetermined positions of the magnetic sheets 6b to 6g by using a laser processing machine so that the magnetic sheets 6b to 6g can be electrically connected to each other.
- a conductive paste for coil conductors containing Cu as a main component is prepared. Then, screen printing is performed using the conductive paste, coil patterns 8a to 8f are formed on the magnetic sheets 6b to 6g, and via holes are filled with the conductive paste to produce via hole conductors 7a to 7e. .
- the coil patterns 8a and 8f formed on the magnetic sheet 6b and the magnetic sheet 6g are formed with lead portions 8a 'and 8f' so as to be electrically connected to external electrodes.
- the magnetic sheets 6b to 6g on which the coil patterns 8a to 8f are formed are laminated, and these are sandwiched between the magnetic sheets 6a and 6h on which the coil patterns are not formed, and are crimped.
- Crimp blocks in which 8a to 8f are connected via via-hole conductors 7a to 7e are manufactured. Thereafter, the pressure-bonded block is cut into a predetermined size to produce a ceramic laminate.
- an atmosphere such as the ceramic laminate Cu was sufficiently degreased at a predetermined temperature, so that the equilibrium oxygen partial pressure of a Cu-Cu 2 O N 2 -H 2 -H 2 O Is supplied to a firing furnace whose atmosphere is adjusted with the above gas mixture, and fired at 900 to 1050 ° C. for a predetermined time, whereby the ferrite body 1 in which the coil conductor 3 is embedded in the magnetic body portion 2 is obtained.
- a conductive paste for external electrodes mainly composed of Ag or the like is applied to both ends of the ferrite element body 1 and dried, and then baked at 750 ° C. to form external electrodes 5a and 5b.
- a coil component is produced.
- the Fe compound and the divalent element compound containing at least the Ni compound are converted to Fe 2 O 3 , and the Fe compound and the Fe compound are adjusted so that the Fe compound has a molar ratio of 20 to 48%. While the divalent element compound is weighed, the ratio of Mn to the total amount of Fe and Mn is converted to Mn 2 O 3 and Fe 2 O 3 so that the molar ratio is less than 50% (including 0%). The Mn compound is weighed and mixed, and then calcined to prepare a calcined powder, a ceramic green sheet producing process for producing a ceramic green sheet from the calcined powder, and Cu.
- the Fe 2 O 3 is reduced to Fe 3 O 4 even if the laminate is fired in a firing atmosphere of Cu-Cu 2 O below the equilibrium oxygen partial pressure.
- sintering can be performed in a state where Cu and Fe 2 O 3 coexist. Therefore, it is possible to avoid a decrease in the specific resistance ⁇ and ensure insulation, thereby improving electrical characteristics.
- the specific resistance ⁇ can be improved to 5.0 or more by log ⁇ , and a laminated coil component suitable for noise absorption having high impedance in a specific frequency range can be obtained.
- a laminated coil component suitable for noise absorption having high impedance in a specific frequency range can be obtained.
- the present invention is not limited to the above embodiment.
- the laminated coil component of the present invention has been described, but it goes without saying that it can be applied to a laminated composite component such as a single plate coil component or a laminated LC component.
- Fe 2 O 3 , NiO, ZnO, and CuO were prepared as ceramic raw materials. Then, these ceramic raw materials were weighed so that ZnO: 25 mol% and CuO: 1 mol%, and the molar amounts of Fe 2 O 3 and NiO were as shown in Table 1. Next, these weighed materials were put together with pure water and PSZ balls into a pot mill made of vinyl chloride, thoroughly mixed and pulverized in a wet manner, evaporated and dried, and then calcined at a temperature of 850 ° C.
- the ceramic slurry was formed into a sheet shape so as to have a thickness of 25 ⁇ m, and this was punched into a size of 50 mm in length and 50 mm in width to produce a magnetic sheet.
- a plurality of the magnetic sheets thus prepared were laminated so that the total thickness was 0.5 mm, heated to 60 ° C., and pressed and pressed at a pressure of 100 MPa for 60 seconds. And cut out into a disk shape having a diameter of 10 mm to obtain a ceramic molded body.
- the obtained ceramic molded body was heated and fully degreased. Then, a mixed gas of N 2 —H 2 —H 2 O was supplied to the firing furnace to adjust the oxygen partial pressure to 1.8 ⁇ 10 ⁇ 1 Pa, and then the ceramic compact was put into the firing furnace, and 950 Firing was carried out at a temperature of 0 ° C. for 2 hours. That is, the oxygen partial pressure of 1.8 ⁇ 10 ⁇ 1 Pa is the equilibrium oxygen partial pressure of Cu—Cu 2 O at 950 ° C., and the ceramic compact is fired at the equilibrium oxygen partial pressure of Cu—Cu 2 O for 2 hours. As a result, disk-shaped samples of sample numbers 1 to 13 were obtained.
- a plurality of magnetic sheets obtained in the same manner as described above were laminated so that the total thickness was 1.0 mm, heated to 60 ° C., and pressed and pressed at a pressure of 100 MPa for 60 seconds, Then, it cut out in the ring shape so that the outer diameter 20 might be set to mm and an internal diameter might be set to 12 mm, and the ceramic molded object was obtained.
- the obtained ceramic molded body was degreased and fired under the same conditions as described above, and thereby ring-shaped samples of sample numbers 1 to 13 were obtained.
- Table 1 shows the composition of the magnetic part of Sample Nos. 1 to 13, the A value (Mn 2 O 3 content relative to the total of Fe 2 O 3 and Mn 2 O 3 ), specific resistance log ⁇ , and magnetic permeability ⁇ . Yes.
- Sample No. 1 had a specific resistance log ⁇ as low as 3.5. This is because the content of Fe 2 O 3 is as large as 49.0 mol%, and when calcined at 1.8 ⁇ 10 ⁇ 1 Pa which is the equilibrium oxygen partial pressure of Cu—Cu 2 O at 950 ° C., Fe 2 O 3 Is reduced to Fe 3 O 4 , and as a result, it is considered that the specific resistance log ⁇ is lowered.
- Sample No. 13 had a low content of Fe 2 O 3 of 15.0 mol%, and in this case, the specific resistance log ⁇ was as low as 4.5.
- Sample Nos. 2 to 12 do not contain Mn 2 O 3, but the content of Fe 2 O 3 is 20.0 to 48.0 mol%, which is within the range of the present invention. As a result, it was found that a satisfactory result was obtained with a magnetic permeability ⁇ of 35 to 290.
- Table 2 shows the composition, A value, specific resistance log ⁇ , and magnetic permeability ⁇ of the magnetic body parts of sample numbers 21 to 33.
- Sample No. 21 had a high Fe 2 O 3 content of 49.0 mol%, and for this reason, the specific resistance log ⁇ was as low as 3.6 for the same reason as Sample No. 1 in Example 1 above.
- Sample No. 33 has a low content of Fe 2 O 3 of 15.0 mol%, and thus the specific resistance log ⁇ was found to be as low as 4.6.
- Sample Nos. 22 to 32 have an A value of 2.0 to 4.8 and a content of Fe 2 O 3 of 20 to 48 mol% within the scope of the present invention. It was found that a sufficient insulation property could be ensured with a large value of .4 to 8.7.
- Sample Nos. 23 to 31 having an Fe 2 O 3 content of 25 to 47 mol% have a specific resistance log ⁇ of 7.3 or more, and a more preferable result is obtained, and the Fe 2 O 3 content is 30. It was found that Sample Nos. 24 to 30 of ⁇ 46 mol% had a specific resistance log ⁇ of 7.9 or more and a more preferable result was obtained.
- the magnetic permeability ⁇ was 38 to 330, and the magnetic permeability ⁇ was improved as compared with Example 1 where the Fe 2 O 3 content was the same. I understood that.
- Disc-shaped and ring-shaped samples with sample numbers 41 to 53 were prepared in the same manner and procedure as in Example 1 except that 2.0 mol% of Mn 2 O 3 was contained and the content of NiO was adjusted accordingly. did.
- Table 3 shows the composition, A value, specific resistance log ⁇ , and magnetic permeability ⁇ of the magnetic parts of sample numbers 41 to 53.
- Sample No. 41 has a high Fe 2 O 3 content of 49.0 mol%, and therefore the specific resistance log ⁇ was as low as 3.7 for the same reason as Sample No. 1 in Example 1 above.
- Sample No. 53 had a low Fe 2 O 3 content of 15.0 mol% and a low specific resistance log ⁇ of 4.7.
- Sample Nos. 42 to 52 have an A value of 4.0 to 9.1 and an Fe 2 O 3 content of 20 to 48 mol% within the scope of the present invention. It was found that a sufficient insulation property could be ensured at a large value of .8 to 8.9.
- Sample Nos. 43 to 51 having an Fe 2 O 3 content of 25 to 47 mol% have a specific resistance log ⁇ of 7.7 or more, and a more preferable result is obtained, and an Fe 2 O 3 content of 30 is obtained. It was found that Sample Nos. 44 to 50 of ⁇ 46 mol% had a specific resistance log ⁇ of 8.2 or more and a more preferable result was obtained.
- the magnetic permeability ⁇ was also 42 to 500, and the magnetic permeability ⁇ was improved as compared with Example 2 where the Fe 2 O 3 content was the same. I understood that.
- Disc-shaped and ring-shaped samples with sample numbers 61 to 73 were prepared by the same method and procedure as in Example 1 except that 5.0 mol% of Mn 2 O 3 was contained and the content of NiO was adjusted accordingly. did.
- Table 4 shows the composition, A value, specific resistance log ⁇ , and magnetic permeability ⁇ of the magnetic parts of sample numbers 61 to 73.
- Sample No. 61 has a high Fe 2 O 3 content of 49.0 mol%, and therefore the specific resistance log ⁇ was as low as 3.6 for the same reason as Sample No. 1 of Example 1.
- Sample No. 73 had a low Fe 2 O 3 content of 15.0 mol% and a low specific resistance log ⁇ of 4.8.
- Sample Nos. 62 to 72 have an A value of 9.4 to 20.0 and an Fe 2 O 3 content of 20 to 48 mol%, which is within the range of the present invention. It has been found that sufficient insulation can be ensured at a large value of .4 to 8.6.
- Sample Nos. 63 to 71 having an Fe 2 O 3 content of 25 to 47 mol% have a specific resistance log ⁇ of 7.4 or more, and a more preferable result is obtained, and the Fe 2 O 3 content is 30. It was found that more preferable results were obtained with the sample numbers 64 to 70 of ⁇ 46 mol% because the specific resistance log ⁇ was 7.8 or more.
- the magnetic permeability ⁇ was 50 to 640, and the magnetic permeability ⁇ was improved as compared with Example 3 in the case where the Fe 2 O 3 content was the same. I understood that.
- Disc-shaped and ring-shaped samples with sample numbers 81 to 93 were prepared by the same method and procedure as in Example 1 except that 7.5 mol% of Mn 2 O 3 was contained and the content of NiO was adjusted accordingly. did.
- Table 5 shows the composition, A value, specific resistance log ⁇ , and magnetic permeability ⁇ of the magnetic body parts of sample numbers 81 to 93.
- Sample No. 81 had a high Fe 2 O 3 content of 49.0 mol%, and therefore the specific resistance log ⁇ was as low as 3.5 for the same reason as Sample No. 1 in Example 1.
- Sample No. 93 had an Fe 2 O 3 content as low as 15.0 mol%, and the specific resistance log ⁇ decreased to 4.8.
- Sample Nos. 82 to 92 have an A value of 13.5 to 27.3 and a Fe 2 O 3 content of 20 to 48 mol%, which is within the range of the present invention. It was found that a sufficient insulation property could be ensured at a large value of 0.0 to 8.2.
- Sample Nos. 83 to 91 having an Fe 2 O 3 content of 25 to 47 mol% have a specific resistance log ⁇ of 7.0 or more, and a more preferable result is obtained, and the Fe 2 O 3 content is 30. It was found that the sample numbers 84 to 90 of ⁇ 46 mol% had a specific resistance log ⁇ of 7.3 or more and more preferable results were obtained.
- the magnetic permeability ⁇ was 55 to 760, and the magnetic permeability ⁇ was improved as compared with Example 4 where the Fe 2 O 3 content was the same. I understood that.
- Disc-shaped and ring-shaped samples with sample numbers 101 to 113 were prepared by the same method and procedure as in Example 1 except that 10.0 mol% of Mn 2 O 3 was contained and the content of NiO was adjusted accordingly. did.
- Table 6 shows the composition, A value, specific resistance log ⁇ , and magnetic permeability ⁇ of the magnetic parts of sample numbers 101 to 113.
- Sample No. 101 had a high content of Fe 2 O 3 as 49.0 mol%, and therefore the specific resistance log ⁇ was as low as 3.4 for the same reason as Sample No. 1 in Example 1.
- Sample No. 113 had a small content of Fe 2 O 3 of 15.0 mol%, and the specific resistance log ⁇ decreased to 4.3.
- sample numbers 102 to 112 have an A value of 17.2 to 33.3 and a content of Fe 2 O 3 of 20 to 48 mol%, which is within the range of the present invention. It was found that a sufficient insulation property could be ensured as large as .6 to 7.5.
- Sample Nos. 103 to 111 having a Fe 2 O 3 content of 25 to 47 mol% have a specific resistance log ⁇ of 6.4 or more, and a more preferable result is obtained, and the Fe 2 O 3 content is 30. It was found that the sample numbers 104 to 110 of ⁇ 46 mol% had a specific resistance log ⁇ of 6.7 or more, and a more preferable result was obtained.
- the magnetic permeability ⁇ was also 70 to 900, and the magnetic permeability ⁇ was improved as compared with Example 5 where the Fe 2 O 3 content was the same. I understood that.
- Disc-shaped and ring-shaped samples with sample numbers 121 to 133 were prepared in the same manner and procedure as in Example 1 except that 13.0 mol% of Mn 2 O 3 was contained and the content of NiO was adjusted accordingly. did.
- Table 7 shows the composition, A value, specific resistance log ⁇ , and magnetic permeability ⁇ of the magnetic part of sample numbers 121 to 133.
- Sample No. 133 had a small content of Fe 2 O 3 of 15.0 mol%, and the specific resistance log ⁇ decreased to 3.6.
- Sample Nos. 122 to 132 have an A value of 21.3 to 39.4 and an Fe 2 O 3 content of 20 to 48 mol%, which is within the range of the present invention. It was found that a sufficient insulation property could be ensured as large as 0.0 to 6.7.
- Sample Nos. 123 to 131 having an Fe 2 O 3 content of 25 to 47 mol% have a specific resistance log ⁇ of 5.6 or more, and a more preferable result is obtained, and the Fe 2 O 3 content is 30. It was found that the sample numbers 124 to 130 of ⁇ 46 mol% had a specific resistance log ⁇ of 6.0 or more and a more preferable result was obtained.
- the magnetic permeability ⁇ was 87 to 1050, and the magnetic permeability ⁇ was improved as compared with Example 6 where the Fe 2 O 3 content was the same. I understood that.
- NiO 26.0mol%, ZnO: and 25.0 mol%, free of CuO, Fe 2 portion of O 3 these in a form substituted by Mn 2 O 3 Fe 2 O 3 and Mn 2 O 3 Table 8 It weighed so that it might become a composition as shown in.
- disk-shaped samples with sample numbers 141 to 154 were prepared in the same manner as in Example 1, and the specific resistance log ⁇ was determined.
- Table 8 shows the composition, A value, and specific resistance log ⁇ of the magnetic body portions of sample numbers 141 to 154.
- Sample Nos. 141 and 142 have a high Fe 2 O 3 content of 49.0 mol% and 48.5 mol%. Therefore, for the same reason as Sample No. 1 in Example 1, the specific resistance log ⁇ is 4.0, 4 It became low with .9.
- Sample numbers 153 and 154 have an A value of 50% or more, and the Mn 2 O 3 content in the magnetic material is larger than the Fe 2 O 3 content, so that the specific resistance log ⁇ is 4.8, 4. On the contrary, it decreased.
- Sample Nos. 143 to 152 have an Fe 2 O 3 content of 29.0 to 48.0 mol% and an A value of 2.0 to 40.8%, both within the scope of the present invention. Therefore, the specific resistance log ⁇ was 5.3 to 7.9, and it was found that good insulation was obtained.
- Disc-shaped samples Nos. 161 to 174 were prepared by the same method and procedure as in Example 1 except that the CuO content was 5.0 mol% in Example 8 and the NiO content was adjusted accordingly. The specific resistance ⁇ was determined.
- Table 9 shows the composition, A value, and specific resistance log ⁇ of the magnetic body parts of sample numbers 161 to 174.
- Sample Nos. 161 and 162 have a high Fe 2 O 3 content of 49.0 mol% and 48.5 mol%. It became low with .5.
- Disc-shaped samples of sample numbers 181 to 194 were prepared by the same method and procedure as in Example 1, except that the CuO content was 10.0 mol% in Example 8 and the NiO content was adjusted accordingly. The specific resistance ⁇ was determined.
- Table 10 shows the composition, A value, and specific resistance log ⁇ of the magnetic body parts of sample numbers 181 to 194.
- Sample Nos. 181 and 182 have a high Fe 2 O 3 content of 49.0 mol% and 48.5 mol%. Therefore, for the same reason as Sample No. 1 in Example 1, the specific resistance log ⁇ is 3.2, 4 .2 was low.
- Sample numbers 193 and 194 have an A value of 50% or more, and the Mn 2 O 3 content in the magnetic material is larger than the Fe 2 O 3 content, so that the specific resistance log ⁇ is 4.8, 4. On the contrary, it decreased.
- Sample Nos. 183 to 192 have an Fe 2 O 3 content of 29.0 to 48.0 mol% and an A value of 2.0 to 40.8% within the scope of the present invention.
- the resistance log ⁇ was 5.0 to 7.6, and it was found that good insulation was obtained.
- Example 2 the temperature characteristic of the magnetic permeability ⁇ was measured for each ring-shaped sample, the maximum temperature of the magnetic permeability ⁇ was obtained, and this was set as the Curie point Tc.
- Table 11 shows the composition, A value, permeability ⁇ , and Curie point of the magnetic part of sample numbers 201 to 210.
- sample numbers 201 to 209 have a ZnO content of 33.0 mol% or less, it was found that a Curie point Tc of 130 ° C. or higher can be secured.
- Sample Nos. 201 and 202 had a ZnO content of 3.0 mol% and the permeability decreased to 20, and 1.0 mol% and the permeability ⁇ decreased to 15.
- the content of ZnO is preferably 33.0 mol% or less, and more preferably 6.0 to 33.0 mol%.
- FIG. 3 is a diagram showing the relationship between the ZnO content, the Curie point Tc, and the magnetic permeability ⁇ .
- the horizontal axis represents the ZnO content (mol%)
- the left vertical axis represents the Curie point Tc (° C.)
- the right horizontal axis represents the permeability.
- Magnetic susceptibility ⁇ is shown.
- the ⁇ mark is the Curie point
- the ⁇ mark is the magnetic permeability.
- the magnetic permeability ⁇ increases with increasing ZnO content, but the Curie point Tc decreases, and in order to ensure an operation guarantee temperature of 125 ° C., the ZnO content is 33 mol%. The above is necessary.
- the ZnO content decreases, the magnetic permeability ⁇ decreases, and the ZnO content is less than 35 by less than 6 mol%. Therefore, it was found that the content of ZnO was 6 to 33 mol%, preferably 9 to 33 mol%.
- Sample number 161 used in Example 9 (Fe 2 O 3 : 49.0 mol%, Mn 2 O 3 : 0 mol%, ZnO: 25.0 mol%, NiO: 21.0 mol%, CuO: 5.0 mol%) and A magnetic sheet of sample number 167 (Fe 2 O 3 : 44.0 mol%, Mn 2 O 3 : 5.0 mol%, ZnO: 25.0 mol%, NiO: 21.0 mol%, CuO: 5.0 mol%) Prepared.
- Cu paste containing Cu powder, varnish, and an organic solvent is screen-printed on the surface of a magnetic material sheet, and said Cu paste Was filled in the via hole, thereby forming a coil pattern and a via hole conductor having a predetermined shape.
- this ceramic laminate was sufficiently degreased by heating in an atmosphere in which Cu as an internal conductor was not oxidized. Thereafter, the ceramic laminate is put into a firing furnace in which the oxygen partial pressure is controlled by a mixed gas of N 2 —H 2 —H 2 O, and the temperature is raised to 950 ° C. at a rate of 3 ° C./min.
- the ferrite body with the coil conductor embedded in the magnetic body portion was produced by maintaining the time and firing.
- the oxygen partial pressure was set to 1.8 ⁇ 10 ⁇ 1 Pa which is the equilibrium oxygen partial pressure of Cu—Cu 2 O at 950 ° C.
- a conductive paste for external electrodes containing Ag powder, glass frit, varnish, and organic solvent is prepared.
- the conductive paste for external electrodes is applied to both ends of the ferrite element body, dried, and baked at 750 ° C.
- external electrodes were formed, thereby preparing samples Nos. 161 ′ and 167 ′.
- the outer diameters of the samples of sample numbers 161 ′ and 167 ′ were length: 1.6 mm, width: 0.8 mm, thickness: 0.8 mm, and the number of turns of the coil was 9.5 turns. .
- Sample No. 161 ′ has a high Fe 2 O 3 content of 49.0 mol% and a low specific resistance log ⁇ . Therefore, as apparent from FIG. 4, the impedance is about 220 ⁇ at the maximum, and a desired high impedance is obtained. I could't.
- Sample No. 167 ′ has an Fe 2 O 3 content of 44.0 mol% and an A value of 10.2%, which is within the scope of the present invention, so that the specific resistance log ⁇ is increased.
- the impedance characteristic has a notable mountain shape. It was found that a maximum impedance of about 520 ⁇ was obtained and a high impedance was obtained in a specific frequency range.
- Sample number 161 ′′ was obtained by the same method and procedure as in Example 12 except that the oxygen partial pressure was set to 1.8 ⁇ 10 ⁇ 3 Pa which is 1/100 of the Cu—Cu 2 O equilibrium oxygen partial pressure at 950 ° C. , 167 ′′ samples were prepared, and impedance characteristics were measured.
- FIG. 6 shows the impedance characteristic of sample number 161 ′′
- FIG. 7 shows the impedance characteristic of sample number 167 ′′.
- the horizontal axis is frequency (Hz)
- the vertical axis is impedance ( ⁇ ).
- Sample No. 167 ′′ has an Fe 2 O 3 content of 44.0 mol%, an A value of 10.2%, and is within the scope of the present invention, so that the specific resistance log ⁇ is also increased.
- the impedance characteristic has a notable mountain shape substantially the same as the sample number 167 'of Example 12. A maximum impedance of about 570 ⁇ is obtained at a maximum, and a high impedance is obtained in a specific frequency range. Was found to be obtained.
- the ceramic electronic component having the magnetic composition of the present invention has a good specific resistance log ⁇ and can secure a high impedance without impairing the magnetic permeability. That is, it was confirmed that even when a material mainly composed of Cu was used as the internal electrode material, a laminated coil component having good insulation and good impedance characteristics was obtained.
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Abstract
Description
3 コイル導体(導電部)
Claims (12)
- フェライト材料からなる磁性体部と、Cuを主成分とする導電部とを有し、
前記磁性体部は、3価のFeと少なくとも2価のNiを含む2価元素とを含有すると共に、前記Feの含有量が、Fe2O3に換算し、モル比で20~48%であり、
かつ、Fe及びMnの総計に対するMnの比率が、Mn2O3及びFe2O3にそれぞれ換算し、モル比で50%未満(0%を含む。)となるように、前記磁性体部は前記Mnを含有していることを特徴とするセラミック電子部品。 - 前記Feの含有量が、Fe2O3に換算し、モル比で25~47%であることを特徴とする請求項1記載のセラミック電子部品。
- 前記Feの含有量が、Fe2O3に換算し、モル比で30~46%であることを特徴とする請求項1又は請求項2記載のセラミック電子部品。
- 前記磁性体部は、前記Fe及び前記Mnの総計に対する前記Mnの比率が、Mn2O3及びFe2O3にそれぞれ換算し、モル比で2%以上であることを特徴とする請求項1乃至請求項3のいずれかに記載のセラミック電子部品。
- 前記磁性体部は、CuOに換算し、モル比で10%以下のCuを含有していることを特徴とする請求項1乃至請求項4のいずれかに記載のセラミック電子部品。
- 前記磁性体部は、ZnOに換算し、モル比で33%以下のZnを含有していることを特徴とする請求項1乃至請求項5のいずれかに記載のセラミック電子部品。
- 前記磁性体部は、ZnOに換算し、モル比で6%以上のZnを含有していることを特徴とする請求項1乃至請求項6のいずれかに記載のセラミック電子部品。
- Cu-Cu2Oの平衡酸素分圧以下の雰囲気で焼成されてなることを特徴とする請求項1乃至請求項7のいずれかに記載のセラミック電子部品。
- 前記磁性体部と前記導電部とが同時焼成されてなることを特徴とする請求項1乃至請求項8のいずれかに記載のセラミック電子部品。
- 複数の前記磁性体部と複数の前記導電部とが交互に積層されていることを特徴とする請求項1乃至請求項9のいずれかに記載のセラミック電子部品。
- コイル部品であることを特徴とする請求項1乃至請求項11のいずれかに記載のセラミック電子部品。
- Fe化合物及び少なくともNi化合物を含む2価元素化合物を、Fe2O3に換算し、Fe化合物がモル比で20~48%となるように前記Fe化合物及び前記2価元素化合物を秤量すると共に、Fe及びMnの総計に対する前記Mnの比率が、Mn2O3及びFe2O3に換算し、モル比で50%未満(0%を含む。)となるようにMn化合物を秤量し、これら秤量物を混合した後、仮焼して仮焼粉末を作製する仮焼工程と、
前記仮焼粉末からセラミックグリーンシートを作製するセラミックグリーンシート作製工程と、
Cuを主成分とする導電性ペーストを前記セラミックグリーンシートに塗布して所定パターンの導電膜を形成する導電膜形成工程と、
前記導電膜が形成されたセラミックグリーンシートを所定順序に積層し、積層体を形成する積層体形成工程と、
Cu-Cu2Oの平衡酸素分圧以下の焼成雰囲気で前記積層体を焼成し、前記セラミックグリーンシートと前記導電膜とを同時焼成する焼成工程とを含んでいることを特徴とするセラミック電子部品の製造方法。
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JP2014165307A (ja) * | 2013-02-25 | 2014-09-08 | Murata Mfg Co Ltd | フェライト磁器組成物、及びセラミック電子部品 |
JP2015023275A (ja) * | 2013-07-19 | 2015-02-02 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | フェライト及びこれを適用したインダクタ |
US20150022305A1 (en) * | 2013-07-19 | 2015-01-22 | Samsung Electro-Mechanics Co., Ltd. | Ferrite and inductor including the same |
US10236104B2 (en) * | 2013-07-19 | 2019-03-19 | Samsung Electro-Mechanics Co., Ltd. | Ferrite and inductor including the same |
JP2015095512A (ja) * | 2013-11-11 | 2015-05-18 | 株式会社村田製作所 | 積層コイル部品およびその製造方法 |
JP2015214434A (ja) * | 2014-05-08 | 2015-12-03 | 株式会社村田製作所 | フェライト磁器、コイル装置およびフェライト磁器の作製方法 |
Also Published As
Publication number | Publication date |
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JPWO2011108701A1 (ja) | 2013-06-27 |
JP2014179621A (ja) | 2014-09-25 |
US9595377B2 (en) | 2017-03-14 |
JP5979609B2 (ja) | 2016-08-24 |
US20120326828A1 (en) | 2012-12-27 |
JP5556880B2 (ja) | 2014-07-23 |
EP2544200B1 (en) | 2020-08-26 |
KR101673727B1 (ko) | 2016-11-07 |
KR20140078715A (ko) | 2014-06-25 |
CN102792395A (zh) | 2012-11-21 |
KR101475129B1 (ko) | 2014-12-22 |
US20170140871A1 (en) | 2017-05-18 |
US9741489B2 (en) | 2017-08-22 |
KR20120123540A (ko) | 2012-11-08 |
EP2544200A1 (en) | 2013-01-09 |
CN102792395B (zh) | 2016-07-06 |
EP2544200A4 (en) | 2017-12-13 |
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