WO2011095386A3 - Production method for a porous micro needle assembly having rear face connection and corresponding porous micro needle assembly - Google Patents

Production method for a porous micro needle assembly having rear face connection and corresponding porous micro needle assembly Download PDF

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Publication number
WO2011095386A3
WO2011095386A3 PCT/EP2011/050549 EP2011050549W WO2011095386A3 WO 2011095386 A3 WO2011095386 A3 WO 2011095386A3 EP 2011050549 W EP2011050549 W EP 2011050549W WO 2011095386 A3 WO2011095386 A3 WO 2011095386A3
Authority
WO
WIPO (PCT)
Prior art keywords
micro needle
needle assembly
rear face
porous micro
region
Prior art date
Application number
PCT/EP2011/050549
Other languages
German (de)
French (fr)
Other versions
WO2011095386A2 (en
Inventor
Michael Stumber
Ando Feyh
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2011095386A2 publication Critical patent/WO2011095386A2/en
Publication of WO2011095386A3 publication Critical patent/WO2011095386A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00111—Tips, pillars, i.e. raised structures
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0023—Drug applicators using microneedles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/003—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles having a lumen
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0046—Solid microneedles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0053—Methods for producing microneedles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/055—Microneedles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0111—Bulk micromachining
    • B81C2201/0115—Porous silicon

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Anesthesiology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Analytical Chemistry (AREA)
  • Dermatology (AREA)
  • Medical Informatics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Hematology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Micromachines (AREA)
  • Media Introduction/Drainage Providing Device (AREA)

Abstract

The invention relates to a production method for a porous micro needle assembly having rear face connection and corresponding porous micro needle assembly. The method comprises the following steps: forming a micro needle assembly (4) having at least one micro needle (4a; 4b) on the front face (VS) of a semiconductor substrate (1) which rises from a supporting region (1b) of the semiconductor substrate (1); forming a masking layer (2) on the rear face of the semiconductor substrate (1), wherein the masking layer (2) has a through passage (3a; 3b) in the rear face region (RS'; RS") of the at least one micro needle (4a; 4b); and porosifying the micro needle assembly (4) and at least one part of the supporting region (1b) in an anodic etching process, which etches the micro needle assembly (4) and the supporting layer (4) selectively opposite the masking layer (2), wherein a current flow (I) runs through the through passage (3a; 3b) starting from the micro needle assembly (4); wherein the at least one micro needle (4a; 4b) and a region of the supporting layer (1b) located above the through passage (3a; 3b) in the rear face region (RS'; RS") thereof are positioned so that a porous micro needle (4a1; 4b') is created having the through passage (3a; 3b) as a rear face connection.
PCT/EP2011/050549 2010-02-08 2011-01-17 Production method for a porous micro needle assembly having rear face connection and corresponding porous micro needle assembly WO2011095386A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201010001667 DE102010001667A1 (en) 2010-02-08 2010-02-08 A method of manufacturing a porous microneedle assembly with backside connector and corresponding porous microneedle assembly
DE102010001667.5 2010-02-08

Publications (2)

Publication Number Publication Date
WO2011095386A2 WO2011095386A2 (en) 2011-08-11
WO2011095386A3 true WO2011095386A3 (en) 2012-03-01

Family

ID=44316388

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2011/050549 WO2011095386A2 (en) 2010-02-08 2011-01-17 Production method for a porous micro needle assembly having rear face connection and corresponding porous micro needle assembly

Country Status (2)

Country Link
DE (1) DE102010001667A1 (en)
WO (1) WO2011095386A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6317690B2 (en) 2015-03-03 2018-04-25 富士フイルム株式会社 Transdermal absorption sheet and method for producing the same
JP6482323B2 (en) * 2015-03-03 2019-03-13 富士フイルム株式会社 Transdermal absorption sheet
CN104707240B (en) * 2015-03-06 2017-09-22 中山大学 The preparation method that magnetic guides the connected porous microneedle array of nanometer
JP6411395B2 (en) 2015-03-10 2018-10-24 富士フイルム株式会社 Method for producing transdermal absorption sheet
WO2017104144A1 (en) * 2015-12-18 2017-06-22 株式会社ラボ・ジュヴェルサ Microneedle and microneedle patch

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006028781A1 (en) * 2006-06-23 2007-12-27 Robert Bosch Gmbh Process for making porous microneedles and their use
EP1187653B1 (en) * 1999-06-04 2010-03-31 Georgia Tech Research Corporation Devices for enhanced microneedle penetration of biological barriers

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4241045C1 (en) 1992-12-05 1994-05-26 Bosch Gmbh Robert Process for anisotropic etching of silicon

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1187653B1 (en) * 1999-06-04 2010-03-31 Georgia Tech Research Corporation Devices for enhanced microneedle penetration of biological barriers
DE102006028781A1 (en) * 2006-06-23 2007-12-27 Robert Bosch Gmbh Process for making porous microneedles and their use

Also Published As

Publication number Publication date
DE102010001667A1 (en) 2011-08-11
WO2011095386A2 (en) 2011-08-11

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