WO2011095386A3 - Production method for a porous micro needle assembly having rear face connection and corresponding porous micro needle assembly - Google Patents
Production method for a porous micro needle assembly having rear face connection and corresponding porous micro needle assembly Download PDFInfo
- Publication number
- WO2011095386A3 WO2011095386A3 PCT/EP2011/050549 EP2011050549W WO2011095386A3 WO 2011095386 A3 WO2011095386 A3 WO 2011095386A3 EP 2011050549 W EP2011050549 W EP 2011050549W WO 2011095386 A3 WO2011095386 A3 WO 2011095386A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- micro needle
- needle assembly
- rear face
- porous micro
- region
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00111—Tips, pillars, i.e. raised structures
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0023—Drug applicators using microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/003—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles having a lumen
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0046—Solid microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0053—Methods for producing microneedles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/055—Microneedles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0111—Bulk micromachining
- B81C2201/0115—Porous silicon
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Anesthesiology (AREA)
- Heart & Thoracic Surgery (AREA)
- Analytical Chemistry (AREA)
- Dermatology (AREA)
- Medical Informatics (AREA)
- Chemical & Material Sciences (AREA)
- Biomedical Technology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Hematology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Micromachines (AREA)
- Media Introduction/Drainage Providing Device (AREA)
Abstract
The invention relates to a production method for a porous micro needle assembly having rear face connection and corresponding porous micro needle assembly. The method comprises the following steps: forming a micro needle assembly (4) having at least one micro needle (4a; 4b) on the front face (VS) of a semiconductor substrate (1) which rises from a supporting region (1b) of the semiconductor substrate (1); forming a masking layer (2) on the rear face of the semiconductor substrate (1), wherein the masking layer (2) has a through passage (3a; 3b) in the rear face region (RS'; RS") of the at least one micro needle (4a; 4b); and porosifying the micro needle assembly (4) and at least one part of the supporting region (1b) in an anodic etching process, which etches the micro needle assembly (4) and the supporting layer (4) selectively opposite the masking layer (2), wherein a current flow (I) runs through the through passage (3a; 3b) starting from the micro needle assembly (4); wherein the at least one micro needle (4a; 4b) and a region of the supporting layer (1b) located above the through passage (3a; 3b) in the rear face region (RS'; RS") thereof are positioned so that a porous micro needle (4a1; 4b') is created having the through passage (3a; 3b) as a rear face connection.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201010001667 DE102010001667A1 (en) | 2010-02-08 | 2010-02-08 | A method of manufacturing a porous microneedle assembly with backside connector and corresponding porous microneedle assembly |
DE102010001667.5 | 2010-02-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2011095386A2 WO2011095386A2 (en) | 2011-08-11 |
WO2011095386A3 true WO2011095386A3 (en) | 2012-03-01 |
Family
ID=44316388
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2011/050549 WO2011095386A2 (en) | 2010-02-08 | 2011-01-17 | Production method for a porous micro needle assembly having rear face connection and corresponding porous micro needle assembly |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE102010001667A1 (en) |
WO (1) | WO2011095386A2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6317690B2 (en) | 2015-03-03 | 2018-04-25 | 富士フイルム株式会社 | Transdermal absorption sheet and method for producing the same |
JP6482323B2 (en) * | 2015-03-03 | 2019-03-13 | 富士フイルム株式会社 | Transdermal absorption sheet |
CN104707240B (en) * | 2015-03-06 | 2017-09-22 | 中山大学 | The preparation method that magnetic guides the connected porous microneedle array of nanometer |
JP6411395B2 (en) | 2015-03-10 | 2018-10-24 | 富士フイルム株式会社 | Method for producing transdermal absorption sheet |
WO2017104144A1 (en) * | 2015-12-18 | 2017-06-22 | 株式会社ラボ・ジュヴェルサ | Microneedle and microneedle patch |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006028781A1 (en) * | 2006-06-23 | 2007-12-27 | Robert Bosch Gmbh | Process for making porous microneedles and their use |
EP1187653B1 (en) * | 1999-06-04 | 2010-03-31 | Georgia Tech Research Corporation | Devices for enhanced microneedle penetration of biological barriers |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4241045C1 (en) | 1992-12-05 | 1994-05-26 | Bosch Gmbh Robert | Process for anisotropic etching of silicon |
-
2010
- 2010-02-08 DE DE201010001667 patent/DE102010001667A1/en not_active Withdrawn
-
2011
- 2011-01-17 WO PCT/EP2011/050549 patent/WO2011095386A2/en active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1187653B1 (en) * | 1999-06-04 | 2010-03-31 | Georgia Tech Research Corporation | Devices for enhanced microneedle penetration of biological barriers |
DE102006028781A1 (en) * | 2006-06-23 | 2007-12-27 | Robert Bosch Gmbh | Process for making porous microneedles and their use |
Also Published As
Publication number | Publication date |
---|---|
DE102010001667A1 (en) | 2011-08-11 |
WO2011095386A2 (en) | 2011-08-11 |
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