WO2011076050A1 - Dispositif de mesure de spectre bidimensionnel - Google Patents

Dispositif de mesure de spectre bidimensionnel Download PDF

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Publication number
WO2011076050A1
WO2011076050A1 PCT/CN2010/079174 CN2010079174W WO2011076050A1 WO 2011076050 A1 WO2011076050 A1 WO 2011076050A1 CN 2010079174 W CN2010079174 W CN 2010079174W WO 2011076050 A1 WO2011076050 A1 WO 2011076050A1
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WIPO (PCT)
Prior art keywords
dimensional
slit
measured
spectrometer
lens
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Application number
PCT/CN2010/079174
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English (en)
Chinese (zh)
Inventor
潘建根
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杭州远方光电信息股份有限公司
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Publication of WO2011076050A1 publication Critical patent/WO2011076050A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0248—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using a sighting port, e.g. camera or human eye
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection

Definitions

  • the present invention relates to the field of optical radiation measurement, and in particular to a spectral measuring device that integrates image and spectral measurement into one.
  • Brightness and color parameters directly reflect the perception of light by the human eye and are widely used in the fields of flat panel display, lighting engineering and light source design.
  • the commonly used devices for measuring these parameters include a sight-point luminance meter and an image luminance meter.
  • the aiming point luminance meter can only align the brightness and chromaticity of the measurement point at a time, and the efficiency of measuring the entire two-dimensional plane is relatively low.
  • An image luminance meter can measure the brightness of each point in a two-dimensional plane by one imaging, but the chromaticity of the existing image luminance meter is generally realized by a tristimulus value method: one is set in front of the array detector of the image luminance meter A set of color filters is used to match the overall relative spectral sensitivity of the array detector with the color tristimulus value ⁇ (, by measuring the tristimulus values X, ⁇ , ⁇ of the light source, and calculating the chromaticity coordinates of the measured light. Color temperature parameters such as color temperature.
  • there will be detector spectral mismatch error in the method and there is a difference in the relative spectral sensitivity of one pixel of the array detector. This difference will cause the spectral mismatch error of the detector. Further intensification leads to low final measurement accuracy; on the other hand, the method cannot obtain the spectral information of the measured light source, and thus cannot perform detailed light color analysis on the measured light source.
  • the present invention aims to provide an accurate and square A two-dimensional spectrum measuring device that measures the light color parameters such as spectral power, brightness, color, etc. of each point of the measured two-dimensional target.
  • a two-dimensional spectrum measuring device comprising: a casing, a lens is arranged on the casing, and the measured light beam emitted by the measured two-dimensional target enters the casing from the lens, and is imaged Inside the casing; an observer and a spectrometer are arranged in the casing, the spectrometer consists of a slit, a dispersing component and a two-dimensional multi-channel detector, and the measured light enters the spectrometer from the slit; and is composed of a plane mirror with a slit
  • the slit or the optical splitter disposed on the optical path behind the lens divides the light emitted from the lens into at least two paths, one of which is received by the observer, and the other of which passes through the slit into the spectrometer to be spectroscopically measured, the slit Located in the image plane position imaged by the lens of the measured two-dimensional object; a scanning mechanism is disposed in the casing
  • the measured two-dimensional targets are respectively imaged through the lens to the slits and the viewer of the spectrometer.
  • the two-dimensional area of the desired measurement is observed and aligned by the observer, and the observer can also assist in adjusting the focal length of the lens, so that the slit and the measured two-dimensional object form a good optical imaging conjugate relationship.
  • the spectrometer measures the optical parameters such as the spectrum and brightness and color of each point of the measured two-dimensional target.
  • the slit of the spectrometer is located on the image surface of the two-dimensional target to be measured, and only a part of the light beam on the image surface passes.
  • the slit is a rectangular slit, so only one row/column or some of the measured two-dimensional targets
  • the measured beam emitted from each point in a partial region of a row/column enters the slit through the lens, and the dispersive component of the spectrometer disperses the beam of the row/column source in a spectral order in a direction perpendicular to the row/column, and
  • the astigmatic light is projected onto a two-dimensional multi-channel detector.
  • One dimension in a two-dimensional multi-channel detector represents each point of a row/column source of the measured two-dimensional target entering the slit, and the other dimension represents the power of the light emitted by the point source at a different wavelength, ie, the spectrum.
  • the spectrometer can measure The luminescence spectrum and brightness of each point on a certain row/column or a certain row/column of the measured two-dimensional target.
  • the image plane of the measured two-dimensional object moves relative to the slit by the scanning mechanism, and each row/column of the image plane of the measured two-dimensional light source enters the spectrometer sequentially for spectrometry.
  • the complete optical parameters such as the spectral distribution, brightness and color of the measured beam at each point on the measured two-dimensional target can be obtained, and the operation is convenient. , the measurement is accurate and high.
  • the translation mechanism drives the spectrometer to shift, so that the slit of the spectrometer moves in the image plane of the measured two-dimensional object, so that light of different regions in the image plane enters the spectrometer through the slit.
  • the translation mechanism may be disposed inside the casing or outside the casing, and the translation mechanism has a motor or a motor with a reducer and a motor drive circuit, a motor drive mechanism and the above-mentioned two-dimensional multi-channel detector Both are connected to the microprocessor or the host computer or through the microprocessor and the upper computer.
  • the microprocessor or the host computer controls the operation of the translation mechanism and the spectrometer, and performs data processing to synthesize the measured two-dimensional target measured by the spectrometer.
  • the spectral distribution of each point in each region and calculate the complete optical parameters such as brightness, spectral radiance and color parameters of each point on the measured two-dimensional target in the measured direction, and can be performed in any sub-area Analysis of the optical parameters of the comparison.
  • the scanning mechanism is a rotating platform connected to the casing or the spectrometer, and the rotating platform drives the casing to rotate integrally, so that the lens is successively aligned with different regions of the measured two-dimensional target, or the spectrometer and the lens are relatively rotated, thereby The relative displacement of the slit and the measured two-dimensional target image plane is realized.
  • the rotating shaft pass through the center of the slit.
  • the electric machine or the electric motor with the reducer and the motor drive circuit, the motor drive mechanism and the two-dimensional multi-channel detector in the spectrometer are all connected with the microprocessor or the upper electromechanical in the casing, or are connected to the upper electromechanical through the microprocessor.
  • the microprocessor or the host computer controls the two to work and performs data processing, synthesizes the spectral distribution of each point in each region of the measured two-dimensional target measured by the spectrometer, and calculates the points on the measured two-dimensional target by calculation.
  • Complete optical parameters such as brightness, spectral radiance and color parameters in the measured direction, and analysis and comparison of optical parameters in any sub-area.
  • the scanning mechanism described above is an optical rotating mirror disposed inside the casing, the optical rotating mirror is located on the optical path between the lens and the slit, and the optical rotating mirror rotates to cause the image of the measured two-dimensional object to be displaced at the slit position.
  • the slit sequentially receives optical signals from various regions of the measured two-dimensional target.
  • the optical rotating mirror comprises a motor or a motor with a speed reducer and a motor driving circuit, and the optical rotating mirror rotates around the rotating shaft under the motor driving circuit.
  • the two-dimensional multi-channel detector of the motor drive circuit and the spectrometer is connected to the microprocessor or the upper electromechanical in the casing, or is connected to the upper electromechanical through the microprocessor, and the optical rotating mirror and the spectrometer are controlled by the microprocessor or the upper computer. And performing data processing, synthesizing the measured optical parameter information of each part of the measured two-dimensional target.
  • the image of the measured two-dimensional object formed by the lens can be curved, which just ensures that the slit is in the image plane position during the rotation of the optical rotating mirror, so that the measurement is more accurate.
  • the above optical path from the lens to the spectrometer and the viewer is arranged in the following manner:
  • the slit is a slitted planar mirror, a part of the light beam from the lens passes through the slit into the spectrometer, and the other part of the beam from the lens is narrowed.
  • the slit plane mirror is partially reflected into the viewer.
  • the spectrometer when the scanning mechanism is in a certain position, the spectrometer only measures optical parameters such as the spectrum and brightness of a certain row/column of the measured two-dimensional target or one region of a certain row/column; the mirror will enter the lens other The observer to which the beam is reflected, because the light passing through the area of the slit does not participate in the reflection, The viewer does not receive this part of the beam, so in the viewer, there will be a black slit-type area, which is the area measured by the spectrometer at this time. With this phenomenon, the measurement state of the two-dimensional spectrum measuring device of the present invention can be obtained more accurately and accurately.
  • the optical path of the lens to the spectrometer and the viewer can also be arranged in the following manner:
  • the above-mentioned lens and the spectrometer have a beam splitter on the optical path between the slits.
  • the beam splitter is a planar beam splitter that is partially transmissive.
  • the beam splitter is a planar beam splitter, the viewer and the slit are in a conjugate position of the optical imaging, both of which are at the image plane position of the image formed by the measured two-dimensional object through the lens.
  • the beam splitter is a plane mirror capable of cutting into or cutting away from the optical path, so that the beam from the lens selectively enters the viewer or the spectrometer.
  • the beam splitter is a plane mirror capable of cutting into or cutting away from the optical path, so that the beam from the lens selectively enters the viewer or the spectrometer.
  • the spectrometer is matched with the scanning mechanism to measure the complete optical parameters such as the spectral distribution and brightness of each point of the measured two-dimensional target.
  • the optical path of the lens to the entrance of the viewer or the light receiving device and the slit is the same, and the adjustment of the focal length by the observer allows the image of the measured two-dimensional object to fall at the slit.
  • the observer in the two-dimensional spectrum measuring apparatus of the present invention is an eyepiece system, and the human eye observes the overall information of the measured two-dimensional object through the eyepiece system.
  • the observer is also a two-dimensional photodetector array, and the two-dimensional photodetector array is located at an image plane position of the measured two-dimensional target, and the image plane of the measured two-dimensional target refers to passing the lens
  • the image plane of the image may also be referred to as a secondary optical imaging device in the two-dimensional photodetector array, and the image plane formed by the measured two-dimensional object through the lens and the secondary optical imaging device.
  • the measured values of the two-dimensional photodetector array can be intuitively in the data output device, such as In the display unit provided on the housing.
  • a color filter is disposed on the optical path between the lens and the viewer.
  • the color filter can match the relative spectral sensitivity of the two-dimensional photodetector array with the human visual efficiency function ⁇ ( ⁇ ) or other prescribed functions.
  • ⁇ ( ⁇ ) human visual efficiency function
  • the spectral sensitivity curve of the dimensional photodetector array is matched with the ⁇ ( ⁇ ) function, it can realize the measurement function of the image luminance meter, and quickly and conveniently measure the brightness and brightness distribution of each point of the measured two-dimensional target.
  • the two-dimensional spectrum measuring apparatus of the present invention is provided with a microprocessor, and the above-described spectrometer and motor drive circuit of the scanning mechanism are electrically connected to the microprocessor.
  • a display unit, display spectrometer, and other devices, such as a two-dimensional photodetector array, can be placed on the device housing as a measurement of the viewer.
  • the spectrometer wavelength measurement range in the two-dimensional spectroscopic measuring device of the present invention is any one of the wavelength bands from the ultraviolet-visible-infrared range.
  • the two-dimensional multi-channel detector in the spectrometer is a two-dimensional photocoupler (CCD) or photodiode array or CMOS photo array.
  • the two-dimensional spectrum measuring device of the present invention can combine the spectrometer with the two-dimensional multi-channel detector and the scanning mechanism to conveniently, quickly and accurately measure the spectral distribution and brightness of each point of the measured two-dimensional target. And complete optical parameters such as color parameters; at the same time, by the setting of the observer, the two-dimensional spectral measuring device of the invention can be accurately aligned with the target to be measured, and the measuring operation is convenient and the repeatability is high.
  • Figure 1 is a schematic view of Embodiment 1 of the present invention.
  • Figure 2 is a schematic view of Embodiment 2 of the present invention.
  • Figure 3 is a schematic view of Embodiment 3 of the present invention.
  • Figure 4 is a schematic view of Embodiment 4 of the present invention
  • Figure 5 is a schematic view of Embodiment 5 of the present invention
  • Figure 6 is a schematic view of Embodiment 6 of the present invention.
  • 1 to 6 are schematic views of several embodiments of the present invention.
  • the present embodiment includes a casing 1, and a lens 2 is disposed on the casing 1, and the measured light beam of the measured two-dimensional object 20 enters the casing 1 from the lens 2.
  • a spectrometer 7 is disposed in the casing 1, the spectrometer has a slit 4, the slit 4 is a mirror with a rectangular slit in the middle, the mirror is at an angle of 45 degrees with the horizontal direction, and the rectangular slit in the mirror is horizontal direction.
  • a part of the light beam incident from the lens 2 passes through the slit 4 into the spectrometer 7 for spectroscopic measurement, and the other part of the light beam is reflected to an observer 3, which is a visual system 3, the visual system 3 also has an optical mirror 3-1 for changing the optical path and an eyepiece 3-2, and the human eye 9 is imaged by the visual system 3 to measure the two-dimensional object 20.
  • a dispersing member 5 and a two-dimensional multi-channel detector 6 are provided in the spectrometer of the present embodiment, the two-dimensional multi-channel detector 6 is an area array CCD 6, and the dispersing member 5 is a flat field concave grating 5 which receives through The light beam incident on the slit 4 is dispersed and reflected onto the area array CCD 6, and the respective pixels of the area array CCD 6 receive the scattered light.
  • the wavelength measurement range of the spectrometer 7 is in the visible range.
  • the spectrometer 7 is integrally placed on a scanning mechanism 8, which is a translation mechanism 8, and a translation mechanism 8 is coupled to the casing 1.
  • the translating mechanism 8 has a motor 8-1, and the motor driving unit 8-2 is electrically connected to the microprocessor 10 in the casing, and the area array CCD 6 is also electrically connected to the microprocessor 10.
  • the microprocessor 10 and the host computer 12 Electrical connection.
  • the human eye 9 When measuring the measured two-dimensional object 20, the human eye 9 first observes and aligns the back side two-dimensional object 20 through the visual system 3, and adjusts the focal length of the lens 2 so that the observed image of the measured two-dimensional object 20 is the most For clarity, at this time, the slit 4 is located on the image plane of the two-dimensional object 20 to be measured, forming an optical imaging conjugate relationship.
  • the slit 4 only enters the spectrometer from the partial region of the two-dimensional target 20, as shown in FIG. 1. When the spectrometer 7 is at a certain position, only one row of the light source 21 in the two-dimensional target 20 is passed.
  • the lenses enter the slit 4 together and enter the spectrometer 7, which is dispersed by the flat field concave grating 5 in the vertical direction, and the scattered light is reflected together to the area array CCD 6, which is received by the pixels of the area array CCD 6.
  • the position of each point in the illuminating line corresponds.
  • the light color parameters such as the spectral distribution, the brightness, and the color of each point in the two-dimensional target 21 to be measured can be obtained.
  • the microprocessor 10 controls the translation mechanism 8 through the motor driving unit 8-2 to drive the vertical shift of the entire spectrometer 7.
  • the slit 4 is always on the image surface of the measured two-dimensional target 20, and the measured two-dimensional target 20
  • the relative displacement of the image is such that the beams of the rows on the measured two-dimensional object 20 are sequentially entered into the spectrometer for spectroscopic measurement to obtain the spectral power distribution direction motion, and each row of the detected two-dimensional target 20 is scanned and measured.
  • the host computer 12 connects the measurement results of the respective rows of the measured two-dimensional object 20 by software to obtain the spectral power of each point of the measured two-dimensional target, that is, the two-dimensional spectrum.
  • the host computer 14 can further calculate detailed light color parameters such as brightness, color coordinates, and uniformity of light color of each point of the measured two-dimensional object in the measurement direction.
  • the basic structure of this embodiment is similar to that of Embodiment 1, but in the present embodiment, the viewer 3 is not a visual system, but a two-dimensional observation CCD 3, that is, reflected by a slit.
  • the beam of light does not enter the visual system as viewed by the human eye, but as shown in Figure 2, through a secondary light
  • the imaging device 3-2 enters a two-dimensional observation CCD 3, and the secondary optical imaging device 3-2 re-images the light imaged on the slit 4 onto the two-dimensional CCD 3.
  • the two-dimensional observation CCD 3 and the two-dimensional multi-channel detector 6 of the spectrometer 7 are electrically connected to the microprocessor 10 in the casing 1.
  • a display 13 is also arranged on the casing 1, and the display is also electrically connected to the microprocessor 10.
  • the slit direction in the embodiment is at an angle of 45 degrees with the horizontal direction.
  • the spectrometer 7 is located at a certain position, only one column of the light source 21 of the two-dimensional object 20 to be measured passes through the lens and enters the slit 4. as shown in picture 2.
  • the light is dispersed by the flat field concave grating 5 in the horizontal direction in the spectral order, and the dispersed light is again reflected to the area array CCD 6, which is received by the pixels of the array CCD 6.
  • the horizontal direction of the area array CCD 6 corresponds to the dispersion direction of the light, indicating the wavelength; the vertical direction corresponds to the position of each point in the light-emitting line entering the slit 4.
  • the two-dimensional spectrum measuring apparatus of the present embodiment first aligns and focuses when measuring the two-dimensional object 20 to be measured. Switch the display to the interface that displays the 2D observation CCD 3 measurement results, align and adjust the lens focal length so that the image of the measured 2D target 20 is displayed in the display.
  • the display screen is switched to the interface for displaying the measurement result of the spectrometer 7, and the measured two-dimensional target 20 is subjected to scanning spectrum measurement according to the method described in Embodiment 1, and the measurement results of the respective columns are connected by software to obtain the measured two-dimensional target 20 Detailed optical parameters such as the spectral distribution of each point, the brightness in the measurement direction, and the color.
  • the present embodiment includes a casing 1 on which a lens 2 is disposed, and a measured light beam of the measured two-dimensional object 20 enters the casing 1 from the lens 2.
  • a beam splitter 11 is disposed on the optical path behind the lens in the casing 1.
  • the beam splitter 11 is a partially diffused portion of the plane beam splitter 11 and the reflected light of the plane beam splitter 11 is received by a viewer 3.
  • Viewer 3 is a two-dimensional view
  • the CCD 3 is measured, and the transmitted light of the plane beam splitter 11 is directed to the vertical slit 4 of the spectrometer 7. Both the slit 4 and the two-dimensional observation CCD 3 are in an optically conjugated relationship at the opposite surface position of the measured two-dimensional object 20 through the lens.
  • the slit 4 only causes light emitted by a column of light sources in the measured two-dimensional object 20 to enter the spectrometer 7, and the spectrometer has a dispersive element 5 and a two-dimensional multi-channel detector 6, which is a flat field concave grating 5
  • the two-dimensional multi-channel detector 6 is an area array CCD 6.
  • the light entering a column of the measured two-dimensional target of the slit 4 is dispersed in the horizontal direction in the spectral order and received by the area array CCD 6, and the one-dimensional pixel coordinates of the area array CCD 6 correspond to the wavelength, and the other dimension pixel coordinates Corresponds to each point of the measured column.
  • the spectrometer 7 is placed on a scanning mechanism 8, which is a translation mechanism 8, which translates the spectrometer in a horizontal direction, keeping the slit 4 always on the image plane.
  • the two-dimensional observation CCD 3, the motor drive circuit 8-2 of the spectrometer 7 and the translation mechanism are electrically connected to the microprocessor 10 in the casing 1, the microprocessor 10 is electrically connected to the upper computer 12, and the upper computer 12 implements the present. Control and result calculation of the two-dimensional spectrometry device of the embodiment.
  • the measurement method of the two-dimensional spectrum measuring apparatus of this embodiment is similar to that of Embodiment 2, but the measurement result of this embodiment is displayed by the host computer. Firstly, the two-dimensional observation CCD 3 measurement result is displayed by the upper computer, the measured two-dimensional target 20 is aligned, and the lens focal length is adjusted; then the spectrometer 7 and the translation mechanism 8 are used to measure the spectral distribution of each point in each column of the measured two-dimensional target 20 In the host computer, each measurement result is connected by software, and the detailed optical parameters such as the spectral distribution of the points on the measured two-dimensional target 20, the brightness and the color in the measurement direction are obtained.
  • the present embodiment includes a casing 1, and the measured light beam of the measured two-dimensional object 20 enters the casing 1 from the lens 2.
  • a beam splitter 11 is disposed on the optical path behind the lens in the casing 1, and the beam splitter 11 is a rotatable mirror 11.
  • the rotatable mirror When aligned, the rotatable mirror will come from the lens
  • the light beam of 2 is reflected onto an observer 3, which is a visual system as described in Embodiment 1; during measurement, the rotatable mirror 11 is cut away from the optical path, the light beam from the lens 2 It is incident on the plane of the slit 4 of the spectrometer 7, at which time the slit 4 is located on the image plane imaged by the lens of the measured two-dimensional object 20, and the slit 4 and the two-dimensional observation CCD 3 are in an optically conjugate relationship.
  • the slit 4 only causes the light emitted by a column of the two-dimensional target 20 to enter the spectrometer 7.
  • the spectrometer 7 has a dispersive element 5 and a two-dimensional multi-channel detector 6, which can measure a column of the measured two-dimensional target 20 Parameters such as spectral distribution and brightness at each point.
  • the casing 1 is integrally placed on a scanning mechanism 8, which is a translation mechanism 8, which translates the spectrometer 7 in the horizontal direction and keeps the slit 4 always on the image plane.
  • the two-dimensional multi-channel detector 6 in the spectrometer 7 is electrically connected to the microprocessor 10 in the casing 1.
  • the microprocessor 10 and the motor drive circuit 8-2 of the translation mechanism are both electrically connected to a host computer 12, and the rotation of the rotary platform 8 is controlled by the upper computer, and the measurement results of the columns are connected by software to obtain the measured two-dimensional.
  • Detailed optical parameters such as the spectral distribution at each point of the target 20, the brightness in the measurement direction, and the color.
  • the structure of this embodiment is similar to that of Embodiment 2. However, in this embodiment, no translation mechanism is disposed inside the casing 1, and a scanning mechanism 8 is disposed outside the casing 1.
  • the scanning mechanism 8 is a rotating platform 8. As shown in FIG. 5, the entire casing 1 is placed. In the rotating platform 8, the rotating platform is rotated about the rotating shaft under the driving of the motor 8.1, so that the lens is aligned with different regions of the measured two-dimensional target 20, and the image of the measured two-dimensional target 20 is realized by this method.
  • the slit 4 of the spectrometer 7 produces a relative displacement, thereby scanning the spectral distribution and brightness of each of the columns in the two-dimensional target 20 to be measured.
  • the slit 4 of the spectrometer 7 is vertical, and a rotatable mirror 11 similar to that of the embodiment 4 is provided as the spectroscope 11 in front of the slit 4.
  • Viewer 3 in this embodiment It is a two-dimensional observation CCD3, and a color filter 15 is arranged in front of the two-dimensional observation CCD 3, so that the relative sensitivity of the two-dimensional observation CCD 3 to the incident lens is matched with the human visual efficiency function ⁇ ( ⁇ ), that is,
  • the two-dimensional observation CCD 3 in the embodiment can provide the image brightness of the measured two-dimensional object.
  • a display screen 13 is disposed on the casing 1, the display screen 13, the two-dimensional observation CCD 3, and the two-dimensional multi-channel detector 6 in the spectrometer are electrically connected to the microprocessor 10 in the casing 1, and The measurement results of the two-dimensional observation CCD 3 and the spectrometer 7 are displayed on the display screen 13 by the microprocessor 10.
  • the microprocessor 10 is electrically connected to the upper computer 12, and the motor driving mechanism 8-2 of the rotating platform 8 is also electrically connected to the upper position, and the rotation of the rotating platform 8 is controlled by the upper computer, and the measurement results of the columns are connected by software to obtain Detailed optical parameters such as the spectral distribution of each point of the measured 2D target 20, the brightness and color in the measurement direction.
  • the present embodiment includes a housing 1 through which the measured light beam of the measured two-dimensional object 20 enters the inside of the housing 1.
  • a beam splitter 11 is disposed in the optical path behind the lens, the beam splitter 1 1 is a half mirror 11 and the light beam reflected by the half mirror 11 is incident on an observer 3, the viewer is The two-dimensional observation CCD 3; the light beam transmitted by the half mirror 11 is incident on a scanning mechanism 8, which is an optical rotating mirror 8, which is reflected by the optical rotating mirror 8 to the slit 4 of the spectrometer 7.
  • the plane, the two-dimensional observation CCD 3 and the slit 4 are both located on the image plane of the side by the side two-dimensional object 20.
  • the color filter 15 is disposed in front of the two-dimensional observation CCD 3, so that the relative sensitivity of the two-dimensional observation CCD 3 to the optical response of the incident lens is matched with the human visual efficiency function ⁇ ( ⁇ ), that is, this embodiment
  • the two-dimensional observation CCD 3 in the middle can provide the image brightness of the measured two-dimensional object.
  • the spectrometer in this embodiment has a collimating mirror 13, a dispersing element 5, and a two-dimensional multi-channel detector 6, and the two-dimensional multi-channel detector 6 is a two-dimensional area array CCD 6. At the optical rotating mirror 8 At a certain angle, the measured beam of only one row of the measured two-dimensional target passes through the slit into the spectrometer.
  • the spectrometer disperses the light of each point according to the spectral order, and measures the dispersive light with the two-dimensional array CCD 6.
  • one-dimensional CCD pixel coordinates correspond to wavelengths
  • another dimension CCD pixel coordinates correspond to points on the side-by-side two-dimensional target 20 of the measured line, so that the spectrometer can obtain a certain measurement at a time.
  • the spectral distribution and brightness of each point in the horizontal two-dimensional object 20 are shifted by the rotation of the optical rotating mirror, and the image of the side two-dimensional object 20 is displaced from the slit 4, and the slit 4 can receive the side of each row.
  • the beam emitted by the target 20 are shifted by the rotation of the optical rotating mirror, and the image of the side two-dimensional object 20 is displaced from the slit 4, and the slit 4 can receive the side of each row.
  • the beam emitted by the target 20 is shifted by the rotation of the optical rotating mirror, and the image of the side two
  • the measuring method of this embodiment is similar to the above several embodiments, and the two-dimensional observation of the measurement result of the CCD 3 is aimed at the measured two-dimensional target 20 to adjust the focal length; the spectrometer 7 and the optical rotating mirror 8 are combined to measure the measured two-dimensional target.
  • the spectral distribution of each point in each row is connected by the upper computer to obtain detailed optical parameters such as spectral distribution, brightness and color of each point on the measured two-dimensional target 20.

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  • Spectrometry And Color Measurement (AREA)

Abstract

L'invention concerne un dispositif de mesure de spectre bidimensionnel, le dispositif comportant un boîtier (1), un dispositif d'observation (3), un spectromètre (7) et un mécanisme de balayage (8). Le faisceau de lumière mesuré d'une cible bidimensionnelle mesurée (20) entre dans le boîtier par une lentille (2) et est divisé en deux faisceaux de lumière mesurés. Les deux faisceaux de lumière mesurés sont reçus respectivement par le dispositif d'observation et par le spectromètre se trouvant dans le boîtier. Le dispositif d'observation est utilisé pour effectuer un alignement avec la cible mesurée et/ou pour mesurer des informations de brillance d'image de la cible mesurée. Le spectromètre comprend une fente (4), un composant de dispersion chromatique (5) et un détecteur bidimensionnel à plusieurs passages; une distribution spectrale de chaque point en ligne/rangée (21) peut être obtenue à chaque mesure. Le mécanisme de balayage est disposé dans ou sur le boîtier, ce qui permet un déplacement relatif entre la fente et la surface d'image de la cible bidimensionnelle mesurée à générer.
PCT/CN2010/079174 2009-12-23 2010-11-26 Dispositif de mesure de spectre bidimensionnel WO2011076050A1 (fr)

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EP2851662A3 (fr) * 2013-08-30 2015-07-08 Spekled GmbH Dispositif et procédé d'enregistrement d'une image hyperspectrale
WO2015154875A1 (fr) * 2014-04-11 2015-10-15 Jenoptik Optical Systems Gmbh Caméra avec spectromètre intégré
WO2015183074A1 (fr) * 2014-05-28 2015-12-03 Quest Photonic Devices B.V. Système d'imagerie bidimensionnelle, dispositif comprenant un système d'imagerie, et procédé de calcul de paramètre pour une plage bidimensionnelle
WO2017156400A1 (fr) * 2016-03-10 2017-09-14 Regents Of The University Of Minnesota Dispositif d'imagerie spectrale-spatiale

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CN102374900A (zh) * 2011-09-22 2012-03-14 西安炬光科技有限公司 一种多发光单元半导体激光器空间光谱测试方法及装置
CN105092034B (zh) * 2015-09-08 2017-08-15 四川双利合谱科技有限公司 一种推扫型成像光谱仪
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DE102021112970A1 (de) 2021-05-19 2022-11-24 Karl Storz Se & Co. Kg Verfahren zur medizinischen Bildgebung und medizinische Bildgebungsvorrichtung zur Ausführung dessen

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EP0059025A1 (fr) * 1981-02-24 1982-09-01 The Commonwealth Of Australia Système optique pour un spectrophotomètre
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2851662A3 (fr) * 2013-08-30 2015-07-08 Spekled GmbH Dispositif et procédé d'enregistrement d'une image hyperspectrale
WO2015154875A1 (fr) * 2014-04-11 2015-10-15 Jenoptik Optical Systems Gmbh Caméra avec spectromètre intégré
WO2015183074A1 (fr) * 2014-05-28 2015-12-03 Quest Photonic Devices B.V. Système d'imagerie bidimensionnelle, dispositif comprenant un système d'imagerie, et procédé de calcul de paramètre pour une plage bidimensionnelle
WO2017156400A1 (fr) * 2016-03-10 2017-09-14 Regents Of The University Of Minnesota Dispositif d'imagerie spectrale-spatiale
US10837830B2 (en) 2016-03-10 2020-11-17 Regents Of The University Of Minnesota Spectral-spatial imaging device
AU2020202458B2 (en) * 2016-03-10 2021-03-25 Regents Of The University Of Minnesota Spectral-spatial imaging device
CN113520301A (zh) * 2016-03-10 2021-10-22 明尼苏达大学董事会 空间-光谱成像方法和视网膜成像设备
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AU2021204326B2 (en) * 2016-03-10 2023-04-13 Regents Of The University Of Minnesota Spectral-spatial imaging device

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