WO2011009446A3 - Berührungsloser vakuumgreifer - Google Patents
Berührungsloser vakuumgreifer Download PDFInfo
- Publication number
- WO2011009446A3 WO2011009446A3 PCT/DE2010/000860 DE2010000860W WO2011009446A3 WO 2011009446 A3 WO2011009446 A3 WO 2011009446A3 DE 2010000860 W DE2010000860 W DE 2010000860W WO 2011009446 A3 WO2011009446 A3 WO 2011009446A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- gripper
- vacuum gripper
- workpiece
- suction opening
- recess
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/386,593 US20120274011A1 (en) | 2009-07-22 | 2010-07-22 | Vacuum-gripper |
CN201080042938.XA CN102639415B (zh) | 2009-07-22 | 2010-07-22 | 无接触式真空夹持器 |
JP2012520905A JP5752119B2 (ja) | 2009-07-22 | 2010-07-22 | 真空グリッパー |
KR1020127004511A KR101759357B1 (ko) | 2009-07-22 | 2010-07-22 | 비접촉 진공 그리퍼 |
US14/259,699 US9266686B2 (en) | 2009-07-22 | 2014-04-23 | Vacuum gripper |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009039474.8 | 2009-07-22 | ||
DE102009034474 | 2009-07-22 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/386,593 A-371-Of-International US20120274011A1 (en) | 2009-07-22 | 2010-07-22 | Vacuum-gripper |
US14/259,699 Continuation US9266686B2 (en) | 2009-07-22 | 2014-04-23 | Vacuum gripper |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2011009446A2 WO2011009446A2 (de) | 2011-01-27 |
WO2011009446A3 true WO2011009446A3 (de) | 2011-03-24 |
Family
ID=43466897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2010/000860 WO2011009446A2 (de) | 2009-07-22 | 2010-07-22 | Vakuum-greifer |
Country Status (7)
Country | Link |
---|---|
US (2) | US20120274011A1 (de) |
EP (1) | EP2456694A2 (de) |
JP (1) | JP5752119B2 (de) |
KR (1) | KR101759357B1 (de) |
CN (1) | CN102639415B (de) |
TW (1) | TWI571418B (de) |
WO (1) | WO2011009446A2 (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011051786A1 (de) * | 2011-07-12 | 2013-01-17 | Q-Cells Se | Transport- und/oder Greifvorrichtung für Halbleiterwafer-Solarzellen oder für Vorprodukte von Halbleiterwafer-Solarzellen |
US8858744B2 (en) | 2011-11-18 | 2014-10-14 | Nike, Inc. | Multi-functional manufacturing tool |
US9010827B2 (en) | 2011-11-18 | 2015-04-21 | Nike, Inc. | Switchable plate manufacturing vacuum tool |
DE102013100051B4 (de) | 2012-02-16 | 2018-02-08 | Hamberger Industriewerke Gmbh | Demontierbarer Outdoor-Bodenbelag |
DE102012215798B4 (de) * | 2012-09-06 | 2016-08-11 | J. Schmalz Gmbh | Flächensauggreifer |
DE102012019841B4 (de) * | 2012-10-09 | 2022-01-05 | Grenzebach Maschinenbau Gmbh | Verfahren und Vorrichtung für das Umsetzen großflächiger Platten in extremer Übergröße |
DE202012010508U1 (de) * | 2012-10-25 | 2012-11-12 | BANDELIN patent GmbH & Co. KG | Vorrichtung zur Beaufschlagung flüssiger Medien mitUltraschall durch eine Membran sowie Ultraschallsystem |
JP6012907B2 (ja) | 2013-07-22 | 2016-10-25 | ツェットエス−ハンドリング ゲゼルシャフト ミット ベシュレンクテル ハフツングZS−Handling GmbH | 表面処理または表面加工のための装置 |
KR101729454B1 (ko) | 2013-07-22 | 2017-04-21 | 제트에스-핸들링 게엠베하 | 공작물 표면과 스트립 재료 검사 장치 |
KR20170085543A (ko) | 2014-11-17 | 2017-07-24 | 코닝 인코포레이티드 | 초음파 근접장 고온 유리 운반 및 성형 |
JP6169627B2 (ja) * | 2015-01-23 | 2017-07-26 | 黒田テクノ株式会社 | 回転体の装着装置及び方法 |
US9553010B2 (en) * | 2015-06-25 | 2017-01-24 | Coreflow Ltd. | Wafer gripper with non-contact support platform |
JP6781339B2 (ja) | 2016-09-09 | 2020-11-04 | ザ プロクター アンド ギャンブル カンパニーThe Procter & Gamble Company | 伸張可能なスカートガスケット付き真空ホルダ |
EP3548229B1 (de) | 2016-12-01 | 2023-08-02 | Touchless Automation GmbH | Vorrichtung zur berührungslosen objekthandhabung |
US9889995B1 (en) * | 2017-03-15 | 2018-02-13 | Core Flow Ltd. | Noncontact support platform with blockage detection |
DE102017115738B4 (de) * | 2017-07-13 | 2021-07-22 | J. Schmalz Gmbh | Bernoulli-Greifer |
EP3712929B1 (de) * | 2017-11-17 | 2023-09-13 | Hamamatsu Photonics K.K. | Absaugverfahren |
US10814459B2 (en) * | 2018-02-09 | 2020-10-27 | The Boeing Company | Apparatus and method for holding a workpiece |
CN108996242B (zh) * | 2018-08-17 | 2021-04-09 | 通彩智能科技集团有限公司 | 一种非接触式的气浮爪装置 |
DE102018125682B4 (de) * | 2018-10-16 | 2023-01-19 | Asm Assembly Systems Gmbh & Co. Kg | Ejektorvorrichtung sowie Verfahren zum Unterstützen eines Ablösens eines auf einer Haltefolie angeordneten elektrischen Bauteils |
US10821611B1 (en) * | 2019-04-08 | 2020-11-03 | Amazon Technologies, Inc. | Multi-zone end effector |
KR20200142622A (ko) * | 2019-06-12 | 2020-12-23 | 삼성디스플레이 주식회사 | 기판 이송 장치 및 이를 이용한 기판 이송 방법 |
KR102377826B1 (ko) * | 2020-03-06 | 2022-03-23 | 세메스 주식회사 | 다이 이송 모듈 및 이를 포함하는 다이 본딩 장치 |
KR102377825B1 (ko) * | 2020-03-06 | 2022-03-23 | 세메스 주식회사 | 다이 이송 모듈 및 이를 포함하는 다이 본딩 장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1400501A (fr) * | 1964-04-16 | 1965-05-28 | Procédé d'attraction contrôlée et dispositif pour sa mise en oeuvre | |
EP0201240A1 (de) * | 1985-05-04 | 1986-11-12 | Kabushiki Kaisha Seibu Giken | Vorrichtung zum Halten und/oder Fördern einer Platte mittels eines Fluids ohne körperliche Berührung |
EP0383336A2 (de) * | 1989-02-17 | 1990-08-22 | Hitachi, Ltd. | Produktzusammenbauvorrichtung |
WO1999033725A1 (en) * | 1997-12-30 | 1999-07-08 | Krytek Corporation | Contactless wafer pick-up chuck |
EP1461826A1 (de) * | 2001-12-27 | 2004-09-29 | Coreflow Scientific Solutions Ltd. | Kontaktlose hochleistungsträgerplatform |
DE202009002567U1 (de) * | 2009-02-23 | 2009-06-25 | Grenzebach Maschinenbau Gmbh | Vorrichtung zum berührungslosen Erfassen von Glasplatten |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4618292A (en) * | 1977-02-28 | 1986-10-21 | International Business Machines Corporation | Controls for semiconductor wafer orientor |
JPS62211236A (ja) * | 1986-03-12 | 1987-09-17 | Hitachi Ltd | 板状体の保持装置 |
JP2619436B2 (ja) * | 1987-11-30 | 1997-06-11 | 株式会社日立製作所 | 板状体の保持装置 |
JPH05301190A (ja) * | 1992-04-23 | 1993-11-16 | Sony Corp | 真空吸着搬送機構 |
IL131591A (en) * | 1999-08-25 | 2008-03-20 | Yuval Yassour | Adaptive vacuum grip system |
US6515288B1 (en) * | 2000-03-16 | 2003-02-04 | Applied Materials, Inc. | Vacuum bearing structure and a method of supporting a movable member |
US6781684B1 (en) * | 2000-11-07 | 2004-08-24 | Donald L. Ekhoff | Workpiece levitation using alternating positive and negative pressure flows |
DE10121742A1 (de) * | 2001-05-04 | 2003-01-23 | Bosch Gmbh Robert | Vorrichtung zum berührungslosen Greifen und Halten eines Gegenstandes |
US6899765B2 (en) * | 2002-03-29 | 2005-05-31 | Applied Materials Israel, Ltd. | Chamber elements defining a movable internal chamber |
JP2003321117A (ja) * | 2002-05-07 | 2003-11-11 | Mineya Mori | フラットパネルと保持機器との間の圧力域によってフラットパネルを保持する機器及びロボットハンド |
US6808358B1 (en) * | 2003-06-12 | 2004-10-26 | Lockheed Martin Corporation | Conveyor system having inclined structure utilizing vacuum and air bearing means for facilitating edgewise product transportation |
JP4376737B2 (ja) * | 2004-08-31 | 2009-12-02 | 学校法人東京理科大学 | 非接触チャック |
US7908885B2 (en) * | 2004-11-08 | 2011-03-22 | New Way Machine Components, Inc. | Non-contact porous air bearing and glass flattening device |
KR101234442B1 (ko) * | 2005-06-20 | 2013-02-18 | 엘지디스플레이 주식회사 | 비접촉 반송 장치에서의 지지플랫폼 |
KR101234475B1 (ko) * | 2005-06-20 | 2013-02-18 | 엘지디스플레이 주식회사 | 비접촉 반송 장치에서의 지지플랫폼 |
KR20070092648A (ko) * | 2006-03-09 | 2007-09-13 | 세이코 엡슨 가부시키가이샤 | 워크 반송 장치 및 워크 반송 방법 |
WO2009113066A2 (en) * | 2008-03-11 | 2009-09-17 | Coreflow Ltd. | Method and system for locally controlling support of a flat object |
-
2010
- 2010-07-22 KR KR1020127004511A patent/KR101759357B1/ko active IP Right Grant
- 2010-07-22 TW TW099124118A patent/TWI571418B/zh not_active IP Right Cessation
- 2010-07-22 JP JP2012520905A patent/JP5752119B2/ja active Active
- 2010-07-22 US US13/386,593 patent/US20120274011A1/en not_active Abandoned
- 2010-07-22 EP EP10768366A patent/EP2456694A2/de not_active Withdrawn
- 2010-07-22 WO PCT/DE2010/000860 patent/WO2011009446A2/de active Application Filing
- 2010-07-22 CN CN201080042938.XA patent/CN102639415B/zh not_active Expired - Fee Related
-
2014
- 2014-04-23 US US14/259,699 patent/US9266686B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1400501A (fr) * | 1964-04-16 | 1965-05-28 | Procédé d'attraction contrôlée et dispositif pour sa mise en oeuvre | |
EP0201240A1 (de) * | 1985-05-04 | 1986-11-12 | Kabushiki Kaisha Seibu Giken | Vorrichtung zum Halten und/oder Fördern einer Platte mittels eines Fluids ohne körperliche Berührung |
EP0383336A2 (de) * | 1989-02-17 | 1990-08-22 | Hitachi, Ltd. | Produktzusammenbauvorrichtung |
WO1999033725A1 (en) * | 1997-12-30 | 1999-07-08 | Krytek Corporation | Contactless wafer pick-up chuck |
EP1461826A1 (de) * | 2001-12-27 | 2004-09-29 | Coreflow Scientific Solutions Ltd. | Kontaktlose hochleistungsträgerplatform |
DE202009002567U1 (de) * | 2009-02-23 | 2009-06-25 | Grenzebach Maschinenbau Gmbh | Vorrichtung zum berührungslosen Erfassen von Glasplatten |
Also Published As
Publication number | Publication date |
---|---|
US9266686B2 (en) | 2016-02-23 |
KR101759357B1 (ko) | 2017-07-18 |
CN102639415A (zh) | 2012-08-15 |
JP2012533491A (ja) | 2012-12-27 |
US20120274011A1 (en) | 2012-11-01 |
WO2011009446A2 (de) | 2011-01-27 |
TWI571418B (zh) | 2017-02-21 |
US20150015013A1 (en) | 2015-01-15 |
KR20120051025A (ko) | 2012-05-21 |
JP5752119B2 (ja) | 2015-07-22 |
EP2456694A2 (de) | 2012-05-30 |
CN102639415B (zh) | 2015-05-20 |
TW201116468A (en) | 2011-05-16 |
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