WO2011009446A3 - Berührungsloser vakuumgreifer - Google Patents

Berührungsloser vakuumgreifer Download PDF

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Publication number
WO2011009446A3
WO2011009446A3 PCT/DE2010/000860 DE2010000860W WO2011009446A3 WO 2011009446 A3 WO2011009446 A3 WO 2011009446A3 DE 2010000860 W DE2010000860 W DE 2010000860W WO 2011009446 A3 WO2011009446 A3 WO 2011009446A3
Authority
WO
WIPO (PCT)
Prior art keywords
gripper
vacuum gripper
workpiece
suction opening
recess
Prior art date
Application number
PCT/DE2010/000860
Other languages
English (en)
French (fr)
Other versions
WO2011009446A2 (de
Inventor
Michael Schilp
Josef Zimmermann
Adolf Zitzmann
Original Assignee
Zimmermann & Schilp Handhabungstechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zimmermann & Schilp Handhabungstechnik Gmbh filed Critical Zimmermann & Schilp Handhabungstechnik Gmbh
Priority to US13/386,593 priority Critical patent/US20120274011A1/en
Priority to CN201080042938.XA priority patent/CN102639415B/zh
Priority to JP2012520905A priority patent/JP5752119B2/ja
Priority to KR1020127004511A priority patent/KR101759357B1/ko
Publication of WO2011009446A2 publication Critical patent/WO2011009446A2/de
Publication of WO2011009446A3 publication Critical patent/WO2011009446A3/de
Priority to US14/259,699 priority patent/US9266686B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Die vorliegende Erfindung bezieht sich auf einen Vakuum-Greifer und insbesondere auf einen Vakuum-Greifer zum schonenden Greifen von oberflächenempfindlichen Werkstücken, wie z.B. Solarzellen, Wafer oder Panels für Flachbildschirme, ebenso zum Greifen von schweren Glasplatten oder Platten aus anderem Material mit sehr glatter Oberfläche, welche auf einander gestapelt sind und von oben abgenommen werden sollen, wobei der Vakuum-Greifer nachfolgende Merkmale aufweist: eine gerade oder gewölbte Greiferplatte (2), wenigstens eine Ansaugöffnung (3; 3a), die in der Greiferplatte (2) vorgesehen ist, wobei um die Ansaugöffnung (3) herum eine Werkstück-Drossel-Fläche (6) ausgebildet ist, wenigstens eine Ausnehmung (4), die in der dem Werkstück zugewandten Seite der Greiferplatte (2) bezüglich der Ansaugöffnung (3) außerhalb der Werkstück-Drossel-Fläche (6) vorgesehen ist und wenigstens ein Entlüftungsloch (5), welches innerhalb jeder Ausnehmung (4) vorgesehen ist.
PCT/DE2010/000860 2009-07-22 2010-07-22 Vakuum-greifer WO2011009446A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US13/386,593 US20120274011A1 (en) 2009-07-22 2010-07-22 Vacuum-gripper
CN201080042938.XA CN102639415B (zh) 2009-07-22 2010-07-22 无接触式真空夹持器
JP2012520905A JP5752119B2 (ja) 2009-07-22 2010-07-22 真空グリッパー
KR1020127004511A KR101759357B1 (ko) 2009-07-22 2010-07-22 비접촉 진공 그리퍼
US14/259,699 US9266686B2 (en) 2009-07-22 2014-04-23 Vacuum gripper

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009039474.8 2009-07-22
DE102009034474 2009-07-22

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US13/386,593 A-371-Of-International US20120274011A1 (en) 2009-07-22 2010-07-22 Vacuum-gripper
US14/259,699 Continuation US9266686B2 (en) 2009-07-22 2014-04-23 Vacuum gripper

Publications (2)

Publication Number Publication Date
WO2011009446A2 WO2011009446A2 (de) 2011-01-27
WO2011009446A3 true WO2011009446A3 (de) 2011-03-24

Family

ID=43466897

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2010/000860 WO2011009446A2 (de) 2009-07-22 2010-07-22 Vakuum-greifer

Country Status (7)

Country Link
US (2) US20120274011A1 (de)
EP (1) EP2456694A2 (de)
JP (1) JP5752119B2 (de)
KR (1) KR101759357B1 (de)
CN (1) CN102639415B (de)
TW (1) TWI571418B (de)
WO (1) WO2011009446A2 (de)

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DE102011051786A1 (de) * 2011-07-12 2013-01-17 Q-Cells Se Transport- und/oder Greifvorrichtung für Halbleiterwafer-Solarzellen oder für Vorprodukte von Halbleiterwafer-Solarzellen
US8858744B2 (en) 2011-11-18 2014-10-14 Nike, Inc. Multi-functional manufacturing tool
US9010827B2 (en) 2011-11-18 2015-04-21 Nike, Inc. Switchable plate manufacturing vacuum tool
DE102013100051B4 (de) 2012-02-16 2018-02-08 Hamberger Industriewerke Gmbh Demontierbarer Outdoor-Bodenbelag
DE102012215798B4 (de) * 2012-09-06 2016-08-11 J. Schmalz Gmbh Flächensauggreifer
DE102012019841B4 (de) * 2012-10-09 2022-01-05 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung für das Umsetzen großflächiger Platten in extremer Übergröße
DE202012010508U1 (de) * 2012-10-25 2012-11-12 BANDELIN patent GmbH & Co. KG Vorrichtung zur Beaufschlagung flüssiger Medien mitUltraschall durch eine Membran sowie Ultraschallsystem
JP6012907B2 (ja) 2013-07-22 2016-10-25 ツェットエス−ハンドリング ゲゼルシャフト ミット ベシュレンクテル ハフツングＺＳ−Ｈａｎｄｌｉｎｇ ＧｍｂＨ 表面処理または表面加工のための装置
KR101729454B1 (ko) 2013-07-22 2017-04-21 제트에스-핸들링 게엠베하 공작물 표면과 스트립 재료 검사 장치
KR20170085543A (ko) 2014-11-17 2017-07-24 코닝 인코포레이티드 초음파 근접장 고온 유리 운반 및 성형
JP6169627B2 (ja) * 2015-01-23 2017-07-26 黒田テクノ株式会社 回転体の装着装置及び方法
US9553010B2 (en) * 2015-06-25 2017-01-24 Coreflow Ltd. Wafer gripper with non-contact support platform
JP6781339B2 (ja) 2016-09-09 2020-11-04 ザ プロクター アンド ギャンブル カンパニーＴｈｅ Ｐｒｏｃｔｅｒ ＆ Ｇａｍｂｌｅ Ｃｏｍｐａｎｙ 伸張可能なスカートガスケット付き真空ホルダ
EP3548229B1 (de) 2016-12-01 2023-08-02 Touchless Automation GmbH Vorrichtung zur berührungslosen objekthandhabung
US9889995B1 (en) * 2017-03-15 2018-02-13 Core Flow Ltd. Noncontact support platform with blockage detection
DE102017115738B4 (de) * 2017-07-13 2021-07-22 J. Schmalz Gmbh Bernoulli-Greifer
EP3712929B1 (de) * 2017-11-17 2023-09-13 Hamamatsu Photonics K.K. Absaugverfahren
US10814459B2 (en) * 2018-02-09 2020-10-27 The Boeing Company Apparatus and method for holding a workpiece
CN108996242B (zh) * 2018-08-17 2021-04-09 通彩智能科技集团有限公司 一种非接触式的气浮爪装置
DE102018125682B4 (de) * 2018-10-16 2023-01-19 Asm Assembly Systems Gmbh & Co. Kg Ejektorvorrichtung sowie Verfahren zum Unterstützen eines Ablösens eines auf einer Haltefolie angeordneten elektrischen Bauteils
US10821611B1 (en) * 2019-04-08 2020-11-03 Amazon Technologies, Inc. Multi-zone end effector
KR20200142622A (ko) * 2019-06-12 2020-12-23 삼성디스플레이 주식회사 기판 이송 장치 및 이를 이용한 기판 이송 방법
KR102377826B1 (ko) * 2020-03-06 2022-03-23 세메스 주식회사 다이 이송 모듈 및 이를 포함하는 다이 본딩 장치
KR102377825B1 (ko) * 2020-03-06 2022-03-23 세메스 주식회사 다이 이송 모듈 및 이를 포함하는 다이 본딩 장치

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FR1400501A (fr) * 1964-04-16 1965-05-28 Procédé d'attraction contrôlée et dispositif pour sa mise en oeuvre
EP0201240A1 (de) * 1985-05-04 1986-11-12 Kabushiki Kaisha Seibu Giken Vorrichtung zum Halten und/oder Fördern einer Platte mittels eines Fluids ohne körperliche Berührung
EP0383336A2 (de) * 1989-02-17 1990-08-22 Hitachi, Ltd. Produktzusammenbauvorrichtung
WO1999033725A1 (en) * 1997-12-30 1999-07-08 Krytek Corporation Contactless wafer pick-up chuck
EP1461826A1 (de) * 2001-12-27 2004-09-29 Coreflow Scientific Solutions Ltd. Kontaktlose hochleistungsträgerplatform
DE202009002567U1 (de) * 2009-02-23 2009-06-25 Grenzebach Maschinenbau Gmbh Vorrichtung zum berührungslosen Erfassen von Glasplatten

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Publication number Priority date Publication date Assignee Title
FR1400501A (fr) * 1964-04-16 1965-05-28 Procédé d'attraction contrôlée et dispositif pour sa mise en oeuvre
EP0201240A1 (de) * 1985-05-04 1986-11-12 Kabushiki Kaisha Seibu Giken Vorrichtung zum Halten und/oder Fördern einer Platte mittels eines Fluids ohne körperliche Berührung
EP0383336A2 (de) * 1989-02-17 1990-08-22 Hitachi, Ltd. Produktzusammenbauvorrichtung
WO1999033725A1 (en) * 1997-12-30 1999-07-08 Krytek Corporation Contactless wafer pick-up chuck
EP1461826A1 (de) * 2001-12-27 2004-09-29 Coreflow Scientific Solutions Ltd. Kontaktlose hochleistungsträgerplatform
DE202009002567U1 (de) * 2009-02-23 2009-06-25 Grenzebach Maschinenbau Gmbh Vorrichtung zum berührungslosen Erfassen von Glasplatten

Also Published As

Publication number Publication date
US9266686B2 (en) 2016-02-23
KR101759357B1 (ko) 2017-07-18
CN102639415A (zh) 2012-08-15
JP2012533491A (ja) 2012-12-27
US20120274011A1 (en) 2012-11-01
WO2011009446A2 (de) 2011-01-27
TWI571418B (zh) 2017-02-21
US20150015013A1 (en) 2015-01-15
KR20120051025A (ko) 2012-05-21
JP5752119B2 (ja) 2015-07-22
EP2456694A2 (de) 2012-05-30
CN102639415B (zh) 2015-05-20
TW201116468A (en) 2011-05-16

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