WO2010073569A1 - Head for thermally assisted recording device, and thermally assisted recording device - Google Patents

Head for thermally assisted recording device, and thermally assisted recording device Download PDF

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Publication number
WO2010073569A1
WO2010073569A1 PCT/JP2009/007007 JP2009007007W WO2010073569A1 WO 2010073569 A1 WO2010073569 A1 WO 2010073569A1 JP 2009007007 W JP2009007007 W JP 2009007007W WO 2010073569 A1 WO2010073569 A1 WO 2010073569A1
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WIPO (PCT)
Prior art keywords
scatterer
magnetic
tip
head
recording
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PCT/JP2009/007007
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French (fr)
Japanese (ja)
Inventor
松本拓也
中村公夫
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株式会社日立製作所
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Publication of WO2010073569A1 publication Critical patent/WO2010073569A1/en

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
    • G11B5/314—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B2005/0002—Special dispositions or recording techniques
    • G11B2005/0005—Arrangements, methods or circuits
    • G11B2005/001—Controlling recording characteristics of record carriers or transducing characteristics of transducers by means not being part of their structure
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B2005/0002—Special dispositions or recording techniques
    • G11B2005/0005—Arrangements, methods or circuits
    • G11B2005/0021—Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal

Definitions

  • the present invention relates to a thermal assist recording apparatus head and a thermal assist recording apparatus.
  • Non-Patent Document 1 a heat-assisted recording method has been proposed as a recording method that realizes a recording density of 1 Tb / in 2 or more (H. Saga, H. Nemoto, H. Sukeda, and M. Takahashi, Jpn. J. Appl. Phys., 38, Part 1, 1839 (1999)): Non-Patent Document 1).
  • the recording density is 1 Tb / in 2 or more
  • loss of recorded information due to thermal fluctuation becomes a problem.
  • the spot diameter of the irradiated light needs to be the same size (several tens of nm) as the recording bit. This is because information on adjacent tracks is erased if the light spot diameter is larger than that.
  • Near-field light is used to heat such a minute region.
  • Near-field light is a localized electromagnetic field (light whose wave number has an imaginary component) existing in the vicinity of a minute object having a wavelength equal to or smaller than the light wavelength, and is generated using a minute aperture or a metal scatterer having a diameter equal to or smaller than the light wavelength.
  • Patent Document 1 proposes a near-field light generator using a triangular metal scatterer as a highly efficient near-field light generator.
  • plasmon resonance is excited in the metal scatterer, and strong near-field light is generated at the apex of the triangle.
  • this near-field light generator light can be efficiently collected in a region of several tens of nm or less.
  • Patent Document 2 Japanese Patent Application Laid-Open No. 2004-151046 has a structure in which a depression is formed on the surface of the metal scatterer on the slider flying surface side other than the apex where near-field light is generated. Proposed. With this structure, the width of the intensity distribution of near-field light generated at the apex can be reduced, and the generation of weak near-field light (background light) generated on the side opposite to the apex can be suppressed.
  • Patent Document 3 discloses a structure in which a magnetic pole is arranged on the upper part of a conductive scatterer having a triangular shape in order to overlap a position of a light spot and a magnetic field application region. Is described in the gazette.
  • the heat-assisted recording apparatus in order to form a recording mark, it is necessary to apply a strong magnetic field to the same place as the heating point at the same time as heating the medium using a near-field light generator. Since the near-field light generating element for generating a minute light spot and the magnetic pole for applying a magnetic field cannot be installed at the same position, it is necessary to install them at positions shifted from each other. At this time, the magnetic field strength at the position of the light spot is weaker than the strength at the magnetic pole center. When the magnetic field strength becomes weak, it is necessary to increase the heating temperature necessary for recording, and for that purpose, it is necessary to increase the power of the light source. As a result, power consumption increases. In addition, if a strong magnetic field is applied to the recording point peripheral part (adjacent track), data written in that part may be erased.
  • the tip of the magnetic pole is separated from the medium by the thickness of the scatterer, and the magnetic field spreads between the magnetic pole and the medium.
  • the distribution of the magnetic field becomes wider, and at the same time, the magnetic field strength on the medium surface also decreases.
  • the publication also describes that a magnetic material is used as the material of the scatterer for generating near-field light.
  • the magnetic field application region is below the scatterer. As a whole, a magnetic field is applied at a point other than the heating point.
  • the apex portion where the near-field light is generated has a narrow width, so that the magnetic flux does not easily flow, and the magnetic field is stronger in the portion opposite to the apex.
  • problems such as erasure of data in adjacent tracks.
  • An object of the present invention is to provide a heat-assisted recording head using a metal scatterer capable of increasing the magnetic field intensity at a position heated by near-field light.
  • a columnar-shaped conductive scatterer in order to generate near-field light, is used, and the tip of the scatterer on the side facing the recording magnetic pole is made of a magnetic material. Constitute. Alternatively, a columnar magnetic material portion is provided at the tip of the scatterer.
  • the scatterer can be configured by a triangular column, a quadrangular column, a cylinder (including an elliptical column), or the like. When light is incident from above the scatterer (opposite the air bearing surface), plasmon resonance is excited in the scatterer, and strong near-field light is generated at the tip of the scatterer.
  • the front end portion of the scatterer means the end portion on the side facing the recording magnetic pole, and in the case of a columnar shape, it is generally the apex on the air bearing surface side.
  • the scatterer is arranged so that the tip of the scatterer is close to the recording magnetic pole of the magnetic head. Therefore, the leakage magnetic flux from the recording magnetic pole is collected by the magnetic material at the tip of the scatterer, and the magnetic field generated from the recording magnetic pole is applied in a superimposed manner at the position where the near-field light is generated. Accordingly, it is possible to increase the magnetic field strength at the apex where the near-field light of the scatterer is generated.
  • the width in the direction perpendicular to the track of the magnetic part at the tip of the scatterer is equal to or smaller than the recording track width in order to suppress application of a magnetic field to the adjacent track and heating in the adjacent track. It is preferable.
  • the recording magnetic pole is formed so that the magnetic pole end portion substantially coincides with the slider air bearing surface.
  • the magnetic field strength at the position of the light spot on the recording medium generated by the near-field light can be further increased by providing the recess from the air bearing surface at the magnetic pole end.
  • the distance between the recording magnetic pole end and the slider air bearing surface is preferably 10 nm or more.
  • the distance between the recording magnetic pole end and the slider air bearing surface is preferably set to 150 nm or less.
  • the distance between the recording magnetic pole and the scatterer tip is preferably set to 70 nm or less.
  • the magnetic material portion at the tip of the scatterer may be disposed in contact with the recording magnetic pole.
  • the magnetic flux in the recording magnetic pole can easily flow to the magnetic part at the tip of the scatterer, and the strength of the magnetic field generated at the tip of the scatterer can be increased.
  • the magnetic part at the tip of the scatterer may be disposed so as to contact the side surface of the recording magnetic pole, or may be disposed so as to contact the lower part of the recording magnetic pole (between the recording magnetic pole tip and the medium).
  • the distance between the recording magnetic pole end and the slider flying surface is It is preferable to set it to 30 nm or more.
  • the shape of the magnetic material portion disposed at the tip of the scatterer may be different from the shape of the scatterer, for example, the length of the magnetic material portion in the track width direction becomes smaller as it approaches the air bearing surface. It may be a shape.
  • a strong magnetic field can be applied to a point where near-field light is generated.
  • FIG. 3 is a side sectional view showing a heat-assisted recording head of the present invention.
  • the perspective view which expanded and showed the main magnetic pole front-end
  • Sectional drawing which expanded and showed the main magnetic pole front-end
  • FIG. 6 is a distribution diagram of magnetic field strength on the medium surface when a scatterer is disposed beside the main magnetic pole. The figure which shows the relationship between the distance from a main pole tip to an air bearing surface, and magnetic field intensity. The figure which shows the magnetic head principal part of the structure where the magnetic body part of the scatterer front-end
  • tip may contact the lower surface of a main pole.
  • the perspective view which shows the magnetic head of the structure where the scatterer by which the material of the front end became a magnetic body is arrange
  • FIG. 6 is a distribution diagram of magnetic field strength on the medium surface when a scatterer is arranged under the main magnetic pole.
  • (A) is the case where the width of the magnetic substance is made larger than the width of the main part of the scatterer, and (b) is the magnetic part.
  • FIG. 5 is a diagram showing a case where the shape of the magnetic body portion at the tip of the scatterer is changed.
  • FIG. 5A shows a case where the width gradually decreases as the slider approaches the air bearing surface
  • FIG. 1 shows the configuration of a thermally-assisted magnetic head 100 according to this embodiment.
  • a semiconductor laser having a wavelength of 780 nm was used as the light source, and was installed near the base of the suspension (see reference numeral 55 in FIG. 14).
  • the polymer waveguide 10 (in the figure, the core portion is shown) was used.
  • the polymer waveguide 10 was disposed on the suspension 16.
  • a 45-degree mirror 12 is formed on the end surface of the polymer waveguide 10 so that light emitted from the polymer waveguide 10 is emitted in a direction perpendicular to the upper surface of the slider 5.
  • the polymer waveguide 10 is used as a waveguide for transmitting light from the light source to the slider 5, but other waveguides such as an optical fiber and a plastic fiber may be used.
  • Reference numeral 11 denotes a polymer waveguide cladding.
  • a recording waveguide 3 (a core portion is shown in the figure) for guiding light from the opposite side of the medium facing surface 17 to the medium facing surface 17 was formed.
  • the material of the core of the recording waveguide 3 in the slider was Ta 2 O 5
  • the material of the cladding part 15 was Al 2 O 3 .
  • the core width in the direction perpendicular to the direction of the recording track was 600 nm
  • the core width in the direction parallel to the direction of the recording track (W 2 in FIG. 1) was 300 nm.
  • the material of the waveguide 3 only needs to have a refractive index of the core larger than the refractive index of the cladding.
  • the material of the cladding may be Al 2 O 3 and the material of the core may be TiO 2 .
  • the cladding material may be SiO 2 and the core material may be Ta 2 O 5 , TiO 2 , SiO x N y , or Ge-doped SiO 2 .
  • Near-field light generating element 1 was formed at the lower part (outgoing end) of waveguide 3 in order to generate a light spot having a diameter of several tens of nanometers.
  • a conductive scatterer was used as the near-field light generating element 1.
  • the recording magnetic field was generated by the magnetic head portion 6 composed of the main magnetic pole 2, the return pole 8 and the coil 7.
  • the magnetic field generated by the coil 7 was guided to the vicinity of the near-field light generating element 1 by the main magnetic pole 2.
  • the medium was heated by the light generated by the near-field light generating element, and at the same time, a magnetic field generated from the main magnetic pole 2 was applied to the medium, thereby writing a recording mark on the recording layer 14 '.
  • a reproducing head including a magnetic reproducing element 4 was formed on the side of the write head as shown in FIG.
  • a Giant Magneto Resistive (GMR) element or a Tunneling Magneto Resistive (TMR) element was used as the magnetic reproducing element 4.
  • a magnetic shield 9 is formed around the magnetic reproducing element 4 to prevent magnetic field leakage.
  • FIG. 2 shows an enlarged view of the tip of the main magnetic pole 2 and the near-field light generating element 1.
  • FIG. 3 shows a cross-sectional view of this portion (a cross-sectional view when cut in a direction parallel to the xz plane).
  • a conductive scatterer having a triangular shape is disposed as the near-field light generating element 1 in the vicinity of the tip of the main magnetic pole 2.
  • the material of the main portion 20 and the tip portion 21 of the scatterer having conductivity is made different, and the material of the tip portion 21 is a magnetic material.
  • the oscillating charge is concentrated on the tip 21 and an electric field localized near the tip 21, that is, near-field light is generated by the concentrated charge.
  • the vibration of the charge in the scatterer has a resonance frequency.
  • the frequency and the frequency of the light coincide with each other, the light energy is efficiently converted into the vibration energy of the charge.
  • very strong near-field light is apex 21. Occurs.
  • the recording medium 14 exists in the vicinity of the near-field light element 1, charges are attracted by the medium, and strong near-field light is generated at the vertex 22 near the medium.
  • the width W x in the x direction of the scatterer including the tip 21 was 90 nm, and the height h 3 of the scatterer was 100 nm.
  • the tip portion 21 has a width W a in the x direction of 10 nm and a width W b in the y direction of 20 nm.
  • the apex angle ⁇ was 50 degrees.
  • the surface 25 on the medium side of the main part 20 of the scatterer is such that the distance between the surface 25 of the scatterer and the medium surface is larger than the distance between the vertex 22 of the scatterer and the medium surface.
  • weak near-field light background light
  • the medium is heated also at portions other than the apex portion 22, and the recorded information may be erased.
  • the surface 25 on the medium side of the main part 20 of the scatterer is sharpened so that the distance between the surface 25 of the scatterer and the medium surface is increased, the weak near field generated on the side 23 on the opposite side of the vertex 22. The light does not reach the medium surface, and the influence of the weak near-field light generated on the side 23 on the medium can be reduced.
  • the amount of recess (recess) h 2 on the surface 25 is 10 nm.
  • the material of the main pole 2 was an FeCo alloy.
  • the width of the main magnetic pole in the y direction was gradually decreased, the width W 1 in the x direction of the tip was 300 nm, and the width W 2 in the y direction was also 300 nm.
  • the distance S between the main pole and the tip 21 of the scatterer was 20 nm.
  • the material around the main magnetic pole 2 and the near-field light generating element 1 was Al 2 O 3 .
  • the distance h 4 between the terminal end of the waveguide core 3 and the slider air bearing surface 17 for guiding the light from the light source to the near-field light generating element 1 was 150 nm.
  • FIG. 4 shows a calculation result of the intensity distribution of the near-field light generated by the above structure (intensity distribution on the surface of the medium 14).
  • the intensity value represents a ratio to the incident light intensity. As shown in this figure, strong near-field light was generated in the vicinity of the tip 22 of the scatterer made of a magnetic material, and its peak intensity was about 350 times the incident light intensity.
  • the magnetization in the heating region is not completely reversed.
  • the magnitude of the recording magnetic field is 3 kOe or more at a position where the temperature gradient at the outflow end side of the temperature distribution is maximum.
  • 5 indicates the magnetic field distribution when the material of the tip 21 of the scatterer is not a magnetic material (the distance h 1 between the tip 27 of the main pole and the slider air bearing surface 17 is 0).
  • the magnetic field strength sharply decreases as it moves away from the magnetic pole, and the magnetic field strength at the position where the temperature gradient on the outflow end side of the temperature distribution becomes maximum is 1.5 kOe or less. Therefore, the magnetization in the heating region cannot be completely reversed.
  • the magnetic field strength difference between the magnetic pole center and the heating point is large, a strong magnetic field is applied around the recording location and data is erased around the recording point (adjacent track). It becomes.
  • the solid curve in FIG. 5 shows the magnetic field distribution generated by the structure of this example.
  • the magnetic flux near the tip 21 of the scatterer gathers at the tip 21.
  • the magnetic field strength at the heating point can be increased.
  • the magnetic field strength at the position where the temperature gradient on the outflow end side of the temperature distribution becomes maximum can be 3 kOe or more.
  • the signal / noise (S / N) ratio of the reproduction signal can be increased as the gradient of the magnetic field distribution increases at the position where the temperature gradient is maximized.
  • the magnetic field strength can be locally increased at the position where the near-field light is generated, so that the position where the temperature gradient is high and the position where the magnetic field gradient is high can be brought close to each other.
  • the S / N ratio can be increased.
  • the distance h 1 between the main magnetic pole end and the slider air bearing surface is 0, but it may be greater than 0.
  • a region recessed from the air bearing surface may be provided at the end of the main magnetic pole.
  • the temperature gradient at the outflow end of the temperature distribution can be the magnetic field strength at the position of maximum than 4 kOe. If the magnetic field strength can be increased in this way, recording can be performed on a medium having a larger coercive force, so that the influence of thermal fluctuation can be reduced. Therefore, the recording density can be increased. Further, since the heating temperature can be lowered by increasing the magnetic field strength, it is possible to perform recording with lower power light.
  • the distance h 1 between the extreme part and the slider air bearing surface is preferably 20 nm or more and 150 nm or less.
  • the distance S between the main magnetic pole and the scatterer tip is 30 nm. However, if the distance S is too large, the magnetic field at the heating position will be insufficient even if the scatterer tip is made of a magnetic material. .
  • the distance S is 70 nm or more, the magnetic field strength at the position where the temperature gradient is maximum (position at the outflow end side) is 3 kOe or less, and it becomes difficult to achieve a recording density of 1 Tb / in 2 or more. Therefore, the distance S between the main magnetic pole and the scatterer tip is preferably 70 nm or less.
  • the width W b in the direction perpendicular to the recording track portions 21 of the scatterer tip magnetic material when smaller than the recording track width, it is possible to apply a strong magnetic field only in the track to be recorded, adjacent The probability that the recorded information written on the track is erased can be reduced. Therefore, it is preferable that the width W b in the direction perpendicular to the recording track of the magnetic portion 21 at the tip of the scatterer is smaller than the recording track width.
  • the track width needs to be 50 nm or less.
  • the width W b of the magnetic part 21 at the tip of the scatterer is 50 nm or less. It is preferable to do this.
  • gold is used as the material of the main part 20 of the scatterer.
  • a material other than gold may be used as long as it is a non-magnetic and conductive metal.
  • a metal such as silver, copper, aluminum, or titanium, or an alloy in which a plurality of metals such as gold and silver or gold and copper are mixed may be used.
  • the material of the tip 21 of the scatterer may be a material other than a metal as long as it is a magnetic material.
  • An FeSiAl alloy, a ferrite compound, or the like may be used.
  • the magnetic material is preferably a soft magnetic material so that the direction of magnetization in the magnetic material can be easily reversed.
  • the material of the main portion 20 is gold scatterers, the material of the tip 21 FeCo, when the incident light wavelength is 780 nm, the optimal length W x but was 90 nm, the optimum value Since it depends on the material constituting the scatterer, the material around the scatterer, and the incident light wavelength, it is preferably adjusted according to the material.
  • the main magnetic pole 2 is disposed on the slider inflow end (leading edge) side with respect to the near-field generating element 1, and the near-field light generating element 1 is disposed on the slider outflow end (trailing) with respect to the main magnetic pole 2.
  • the main magnetic pole 2 may be disposed on the outflow end side of the slider, and the near-field light generating element 1 may be disposed on the inflow end side of the slider.
  • the S / N ratio of the reproduction signal increases as the magnetic field strength applied to the position where the boundary of the recording bit is recorded, that is, the position where the temperature gradient on the outflow end side of the temperature distribution is maximized.
  • the near-field light generating element 1 is arranged on the inflow end side, the position where the temperature gradient becomes maximum is close to the magnetic pole, so that the applied magnetic field can be strengthened.
  • the tip 21 of the scatterer is in contact with the main magnetic pole 2
  • the tip 21 of the scatterer and the main magnetic pole 2 are separated from each other, but the tip 27 of the main magnetic pole 2 and the slider air bearing surface 17 are separated (the main magnetic pole tip 27 and the slider air bearing surface 27).
  • the scatterer tip 21 is in contact with the main pole 2 as shown in FIG. 7A (the distance S between the main pole 2 and the scatterer tip 21 is 0).
  • a scatterer may be arranged.
  • the magnetic flux in the main magnetic pole 2 flows into the magnetic material at the tip of the scatterer, so that it occurs at the vertex 22 on the medium side of the scatterer.
  • the strength of the magnetic field can be increased.
  • the distance h 1 between the tip 27 of the main pole and the slider air bearing surface 17 is 50 nm, and a scatterer having the same dimensions as the embodiment of FIG. Arranged to touch the side.
  • the material of the scatterer was the same as in the embodiment of FIG.
  • the magnetic material portion 21 at the tip of the scatterer is disposed so as to contact the side surface of the main magnetic pole 2.
  • position so that it may be located under the magnetic pole tip 27 (between the main magnetic pole tip 27 and the slider air bearing surface 17).
  • the magnetic part 21 at the tip of the scatterer below the main magnetic pole, the magnetic field strength generated at the vertex 22 on the medium side of the scatterer can be further increased.
  • the distance h 1 between the tip 27 of the main pole and the slider air bearing surface 17 is 50 nm
  • the thickness h 3 of the scatterer is 50 nm
  • the dent amount h 2 of the scatterer main portion 20 is 10 nm. It was.
  • the thickness h 3 of the scatterer may be larger than the distance h 1 between the tip 27 of the main pole and the slider air bearing surface 17.
  • the scatterer thickness h 3 may be set to 100 nm.
  • FIG. 8 shows a diagram of an embodiment in which the main part 20 of the scatterer is placed below the main magnetic pole 2.
  • FIG. 8A is a perspective view
  • FIG. 8B is a cross-sectional view.
  • the shape of the tip of the main pole 2 is assumed to be a triangle, and a conductive scatterer having a triangular shape is disposed below the main pole.
  • the material of the scatterer main unit 20 is gold, the material of the tip 21 and FeCo, width W x of the x-direction of the scatterer includes a tip portion 21 is set to 90 nm, the height h 3 of the scatterer was 50nm.
  • the tip portion 21 has a width W a in the x direction of 10 nm and a width W b in the y direction of 20 nm.
  • the apex angle ⁇ of the triangle was 50 degrees.
  • the amount of depression h 1 of the scatterer main part 20 was set to 50 nm.
  • the width W 4 in the x direction of the main pole on the scatterer was 90 nm, and the height h 6 of the main pole was 150 nm.
  • the distance h 7 from the output end of the core 3 of the waveguide to the slider air bearing surface 17 was 200 nm.
  • the center of the waveguide 3 is positioned at the tip 21 of the scatterer, and the incident light is incident in the direction of the arrow 24 from the top of the magnetic pole. The incident light was polarized in the x direction.
  • the interval W 6 between the waveguide core 3 and the side surface of the main pole 2 is set to 100 nm so that the light intensity guided through the waveguide core 3 does not decrease due to
  • the magnetic field emitted from the main magnetic pole spreads in the horizontal direction (xy direction), and the magnetic field intensity distribution on the surface of the medium 14 is in the horizontal direction as shown by the dotted line in FIG.
  • the distribution spreads out.
  • the material of the tip 21 of the scatterer is a magnetic material
  • the magnetic flux emitted from the main magnetic pole 2 collects at the scatterer tip 21, and as shown by the solid line in FIG.
  • the magnetic field strength at the apex 14 on the medium side can be increased.
  • the shape of the tip of the main pole 2 is a triangular prism, but other shapes may be used. For example, as shown in FIG. By doing so, the magnetic flux easily flows to the scatterer tip 21 and the magnetic field strength at the vertex 22 on the medium side of the scatterer can be increased.
  • the x-direction width W 8 at the tip of the main pole 2 is 100 nm
  • the y-direction width W 7 is also 100 nm.
  • the width W b in the y direction of the magnetic body portion 21 at the tip of the scatterer is assumed to be equal to the width of the tip of the scatterer main portion 20, but as shown in FIG.
  • the width W b in the y direction of the magnetic body portion 21 at the tip of the scatterer may be different from the width W c of the tip of the scatterer main portion 20.
  • W b is set to 25 nm and W c is set to 20 nm. In this way, by increasing the width of the magnetic part 21 at the tip of the scatterer, the strength of the magnetic field generated at the tip of the scatterer can be increased.
  • W b may be set to be smaller than W c.
  • the tip of the magnetic part 21 at the tip of the scatterer may gradually become smaller as it goes to the tip. By doing so, the width of the distribution of the near-field light generated at the scatterer tip can be further reduced.
  • the width W b of 10nm of the tip of the magnetic body portion 21 of the scatterer, the width W c of the scatterer main portion 20 was set to 30 nm.
  • the width of the magnetic part 21 at the tip of the scatterer may be reduced as it approaches the slider air bearing surface 17.
  • the width W b in the y direction of the magnetic body portion 21 at the tip of the scatterer is made smaller as it approaches the slider air bearing surface 17.
  • Width W b of the slider air bearing surface side was set to 20 nm
  • the width W 'b at the opposite side was 60 nm.
  • X direction of width, W a is set to 10nm.
  • the width W b in the y direction is gradually changed, but the width W a in the x direction may be gradually changed. Further, both the widths in the x direction and the y direction may be changed. Further, the width may be changed stepwise instead of gradually.
  • the scatterer tip 21 is a magnetic body from the top to the bottom of the scatterer.
  • the lower part (medium side) of the scatterer is a magnetic body. You may make it become. If this is done, the magnetic field strength will be reduced, but the proportion of materials with high conductivity (such as gold) in the scatterer will increase, so that the charge will tend to vibrate in the scatterer and the generated proximity The field light intensity can be increased.
  • the shape of the scatterer is a triangle, but other shapes such as a quadrangle, a polygon, and an ellipse may be used.
  • the shape of the scatterer is a quadrangle (FIG. 13 is a view of the scatterer viewed from the air bearing surface side).
  • the polarization direction of incident light was in the x direction.
  • width W 10 in the x direction 70 nm, a width W 11 in the y direction was 20 nm, x-direction width W 13 of the portion 21 of the magnetic body and 10 nm.
  • the shape of the scatterer is an ellipse.
  • the polarization direction of incident light was in the x direction.
  • width W 10 in the x direction 70 nm, a width W 11 in the y direction was 20 nm, x-direction width W 13 of the portion 21 of the magnetic body and 10 nm.
  • FIG. 14 shows an overall view of a recording apparatus using the recording head.
  • the flying slider 5 was fixed to the suspension 13 and positioned at a desired track position on the magnetic disk 14 by an actuator comprising a voice coil motor 49.
  • a flying pad was formed on the head surface, and the magnetic disk 14 was floated with a flying height of 10 nm or less.
  • the recording disk 6 was fixed and rotated on a spindle 53 that was rotationally driven by a motor.
  • the semiconductor laser 55 was fixed on the submount 51 with solder, and then the submount 51 was placed at the base of the arm (the part called e-block) to which the suspension was attached.
  • the driver of the semiconductor laser 55 is arranged on the circuit board 52 arranged beside the e-block.
  • the circuit board 52 is also equipped with a driver for a magnetic head.
  • the submount 51 on which the semiconductor laser 55 is mounted may be disposed directly on the e-block or may be disposed on the driver circuit board 52.
  • the light emitted from the semiconductor laser 55 was coupled to the waveguide 10 by directly joining the waveguide 10 to the semiconductor laser or by inserting a lens between the waveguide 10 and the semiconductor laser.
  • the waveguide 10, the semiconductor laser 55, and elements and components for coupling the waveguide 10 may be integrated as a module and disposed on the e-block or on a circuit board next to the e-block. . Further, in order to extend the life of the semiconductor laser 55, the inside of the module may be hermetically sealed.
  • the recording signal was generated by the signal processing LSI 54, and the recording signal and the power for the semiconductor laser were supplied to the driver for the semiconductor laser through the FPC (flexible printed circuit) 50.
  • FPC flexible printed circuit
  • a magnetic field was generated by a coil provided in the flying slider 5 and simultaneously a semiconductor laser was emitted to form a recording mark.
  • Data recorded on the recording medium 6 was reproduced by a magnetic reproducing element (GMR or TMR element) formed in the flying slider 5.
  • the signal processing of the reproduction signal was performed by the signal processing circuit 54.

Abstract

A thermally assisted recording head using a conductive scatterer as a near-field light generating element.  In order to strengthen the field intensity that is at the area where near-field light is generated, the conductive scatterer for generating near-field light has a tip section formed from a magnetic material. This tip section is arranged near a side surface of a main pole of the magnetic head or between the tip of the main pole and the slider air bearing surface.

Description

熱アシスト記録装置用ヘッド及び熱アシスト記録装置Head for thermal assist recording apparatus and thermal assist recording apparatus
　本発明は，熱アシスト記録装置用ヘッド及び熱アシスト記録装置に関する。 The present invention relates to a thermal assist recording apparatus head and a thermal assist recording apparatus.
　近年，１Ｔｂ／ｉｎ２以上の記録密度を実現する記録方式として，熱アシスト記録方式が提案されている（Ｈ．　Ｓａｇａ，　Ｈ．　Ｎｅｍｏｔｏ，　Ｈ．　Ｓｕｋｅｄａ，　ａｎｄ　Ｍ．　Ｔａｋａｈａｓｈｉ，　Ｊｐｎ．　Ｊ．　Ａｐｐｌ．　Ｐｈｙｓ．　３８，　Ｐａｒｔ　１，　１８３９　（１９９９））：非特許文献１）。従来の磁気記録装置では，記録密度が１Ｔｂ／ｉｎ２以上になると，熱揺らぎによる記録情報の消失が問題となる。これを防ぐためには，磁気記録媒体の保磁力を上げる必要があるが，記録ヘッドから発生させることができる磁界の大きさには限りがあるため，保磁力を上げすぎると媒体に記録ビットを形成することが不可能となる。これを解決するために，熱アシスト記録方式では，記録の瞬間，媒体を光で加熱し保磁力を低下させる。これにより，高保磁力媒体への記録が可能となり，１Ｔｂ／ｉｎ２以上の記録密度実現が可能となる。 In recent years, a heat-assisted recording method has been proposed as a recording method that realizes a recording density of 1 Tb / in 2 or more (H. Saga, H. Nemoto, H. Sukeda, and M. Takahashi, Jpn. J. Appl. Phys., 38, Part 1, 1839 (1999)): Non-Patent Document 1). In the conventional magnetic recording apparatus, when the recording density is 1 Tb / in 2 or more, loss of recorded information due to thermal fluctuation becomes a problem. To prevent this, it is necessary to increase the coercive force of the magnetic recording medium. However, since the magnitude of the magnetic field that can be generated from the recording head is limited, if the coercive force is increased too much, a recording bit is formed on the medium. It becomes impossible to do. In order to solve this problem, in the heat-assisted recording method, at the moment of recording, the medium is heated with light to reduce the coercive force. As a result, recording on a high coercive force medium becomes possible, and a recording density of 1 Tb / in 2 or more can be realized.
　この熱アシスト記録装置において，照射する光のスポット径は，記録ビットと同程度の大きさ（数１０ｎｍ）にする必要がある。なぜなら，光スポット径がそれよりも大きいと，隣接トラックの情報を消去してしまうからである。このような微小な領域を加熱するためには，近接場光を用いる。近接場光は，光波長以下の微小物体近傍に存在する局在した電磁場（波数が虚数成分を持つ光）であり，径が光波長以下の微小開口や金属の散乱体を用いて発生させる。例えば，特開２００１－２５５２５４号公報（特許文献１）には，高効率な近接場光発生器として三角形の形状をした金属散乱体を用いた近接場光発生器が提案されている。金属散乱体に光を入射させると，金属散乱体中にプラズモン共鳴が励起され，三角形の頂点に強い近接場光が発生する。この近接場光発生器を用いることにより，光を数１０ｎｍ以下の領域に高効率に集めることが可能になる。 In this heat-assisted recording apparatus, the spot diameter of the irradiated light needs to be the same size (several tens of nm) as the recording bit. This is because information on adjacent tracks is erased if the light spot diameter is larger than that. Near-field light is used to heat such a minute region. Near-field light is a localized electromagnetic field (light whose wave number has an imaginary component) existing in the vicinity of a minute object having a wavelength equal to or smaller than the light wavelength, and is generated using a minute aperture or a metal scatterer having a diameter equal to or smaller than the light wavelength. For example, Japanese Patent Laid-Open No. 2001-255254 (Patent Document 1) proposes a near-field light generator using a triangular metal scatterer as a highly efficient near-field light generator. When light is incident on the metal scatterer, plasmon resonance is excited in the metal scatterer, and strong near-field light is generated at the apex of the triangle. By using this near-field light generator, light can be efficiently collected in a region of several tens of nm or less.
　また，特開２００４－１５１０４６号公報（特許文献２）には，上記金属の散乱体のスライダ浮上面側の表面において、近接場光が発生する頂点以外の部分において表面に窪みを削った構造が提案されている。この構造により、頂点に発生する近接場光の強度分布の幅を小さくすると共に、頂点と反対側の辺に発生する弱い近接場光（バックグランド光）の発生を抑制することが出来る。 Japanese Patent Application Laid-Open No. 2004-151046 (Patent Document 2) has a structure in which a depression is formed on the surface of the metal scatterer on the slider flying surface side other than the apex where near-field light is generated. Proposed. With this structure, the width of the intensity distribution of near-field light generated at the apex can be reduced, and the generation of weak near-field light (background light) generated on the side opposite to the apex can be suppressed.
　更に、特開２００７－１２８５７３号公報（特許文献３）には、光スポットの位置と磁界印加領域を重ねるために、上記三角形の形状をした導電性を有する散乱体の上部に磁極を配置する構造が号公報に記載されている。 Further, Japanese Patent Application Laid-Open No. 2007-128573 (Patent Document 3) discloses a structure in which a magnetic pole is arranged on the upper part of a conductive scatterer having a triangular shape in order to overlap a position of a light spot and a magnetic field application region. Is described in the gazette.
特開２００１－２５５２５４号公報JP 2001-255254 A 特開２００４－１５１０４６号公報JP 2004-151046 A 特開２００７－１２８５７３号公報JP 2007-128573 A
　上記熱アシスト記録装置において，記録マークを形成するためには，近接場光発生器を利用して媒体を加熱すると同時に，加熱点と同じ場所に強い磁場を印加する必要がある。微小な光スポットを発生させるための近接場光発生素子と、磁界を印加するための磁極は、同じ位置に設置することが出来ないので、互いにずれた位置に設置する必要がある。このとき、光スポットの位置における磁界強度は、磁極中心における強度よりも弱くなってしまう。磁界強度が弱くなると、記録のために必要な加熱温度を上げる必要があり、そのためには、光源のパワーを上げる必要がある。その結果、消費電力が上昇してしまう。また、記録点周辺部（隣接トラック）において、強い磁界が印加されると、その部分に書き込まれたデータが消去されてしまう可能性がある。 In the heat-assisted recording apparatus, in order to form a recording mark, it is necessary to apply a strong magnetic field to the same place as the heating point at the same time as heating the medium using a near-field light generator. Since the near-field light generating element for generating a minute light spot and the magnetic pole for applying a magnetic field cannot be installed at the same position, it is necessary to install them at positions shifted from each other. At this time, the magnetic field strength at the position of the light spot is weaker than the strength at the magnetic pole center. When the magnetic field strength becomes weak, it is necessary to increase the heating temperature necessary for recording, and for that purpose, it is necessary to increase the power of the light source. As a result, power consumption increases. In addition, if a strong magnetic field is applied to the recording point peripheral part (adjacent track), data written in that part may be erased.
　特許文献３に記載された方法では、散乱体の厚さ分、磁極先端が媒体から離れてしまい、磁極と媒体の間で磁場が広がってしまう。その結果、磁場の分布が広くなると同時に、媒体表面における磁界強度も下がってしまう。また、同公報には、近接場光を発生させるための散乱体の材料として磁性体を用いる点も記載されているが、散乱体全体が磁性体になると磁場の印加領域は、散乱体の下全体となり、加熱点以外においても磁場が印加されてしまう。特に、近接場光が発生する頂点部は幅が狭くなっているため磁束が流れにくく、頂点と反対側の部分の方が磁場が強くなってしまう。その結果、隣接トラックにおけるデータの消去などの問題点を引き起こす可能性がある。 In the method described in Patent Document 3, the tip of the magnetic pole is separated from the medium by the thickness of the scatterer, and the magnetic field spreads between the magnetic pole and the medium. As a result, the distribution of the magnetic field becomes wider, and at the same time, the magnetic field strength on the medium surface also decreases. The publication also describes that a magnetic material is used as the material of the scatterer for generating near-field light. However, when the entire scatterer becomes a magnetic material, the magnetic field application region is below the scatterer. As a whole, a magnetic field is applied at a point other than the heating point. In particular, the apex portion where the near-field light is generated has a narrow width, so that the magnetic flux does not easily flow, and the magnetic field is stronger in the portion opposite to the apex. As a result, there is a possibility of causing problems such as erasure of data in adjacent tracks.
　本発明は，近接場光によって加熱する位置における磁界強度を大きくすることが可能な金属散乱体を用いた熱アシスト記録用ヘッドを提供することを目的とする。 An object of the present invention is to provide a heat-assisted recording head using a metal scatterer capable of increasing the magnetic field intensity at a position heated by near-field light.
　上記目的を達成するために、本発明では、近接場光を発生するために、柱体形状をした導電性を有する散乱体を用い、散乱体の記録磁極対向面側の先端部を磁性材料で構成する。或いは、散乱体の先端部に柱状の磁性材料部を設ける。（散乱体の）柱体形状としては種々の形状を用いることができ、例えば三角柱、四角柱、円柱（楕円の柱体も含む）などで散乱体を構成することができる。散乱体上部（浮上面の反対側）から光を入射させたとき、散乱体にはプラズモン共鳴が励起され、散乱体の先端部に強い近接場光が発生する。ここで散乱体の先端部とは記録磁極に対する対向面側の端部を意味し、柱体形状の場合は一般に浮上面側の頂点である。 In order to achieve the above object, in the present invention, in order to generate near-field light, a columnar-shaped conductive scatterer is used, and the tip of the scatterer on the side facing the recording magnetic pole is made of a magnetic material. Constitute. Alternatively, a columnar magnetic material portion is provided at the tip of the scatterer. Various shapes can be used as the columnar shape (of the scatterer). For example, the scatterer can be configured by a triangular column, a quadrangular column, a cylinder (including an elliptical column), or the like. When light is incident from above the scatterer (opposite the air bearing surface), plasmon resonance is excited in the scatterer, and strong near-field light is generated at the tip of the scatterer. Here, the front end portion of the scatterer means the end portion on the side facing the recording magnetic pole, and in the case of a columnar shape, it is generally the apex on the air bearing surface side.
　本発明では、散乱体の先端部が磁気ヘッドの記録磁極に近接するように散乱体を配置した。よって、記録磁極からの漏洩磁束が散乱体先端部の磁性体により集められ、記録磁極からの発生磁界が近接場光の発生位置に重畳して印加される。従って、散乱体の近接場光が発生する頂点における磁界強度を強くすることが出来る。 In the present invention, the scatterer is arranged so that the tip of the scatterer is close to the recording magnetic pole of the magnetic head. Therefore, the leakage magnetic flux from the recording magnetic pole is collected by the magnetic material at the tip of the scatterer, and the magnetic field generated from the recording magnetic pole is applied in a superimposed manner at the position where the near-field light is generated. Accordingly, it is possible to increase the magnetic field strength at the apex where the near-field light of the scatterer is generated.
　上記散乱体先端の磁性体の部分のトラックに垂直な方向の幅は，隣接トラックへの磁界の印加および隣接トラックにおける加熱を抑制するために，記録トラック幅に等しいもしくは記録トラック幅よりも小さくすることが好ましい。 The width in the direction perpendicular to the track of the magnetic part at the tip of the scatterer is equal to or smaller than the recording track width in order to suppress application of a magnetic field to the adjacent track and heating in the adjacent track. It is preferable.
　上記の記録磁極は、磁極端部がスライダ浮上面とほぼ一致するように形成される。ただし、磁極端部に浮上面からのリセス部を設けることにより、近接場光により生成される記録媒体上の光スポットの位置における磁界強度をさらに強くすることが出来る。十分な磁界強度を得るためには，記録磁極端部とスライダ浮上面の距離を１０ｎｍ以上にするのが好ましい。また，逆に記録磁極端部とスライダ浮上面の距離の距離が大きすぎると，磁界分布が広がってしまい，記録点における磁界強度が下がってしまう。記録に十分な磁界強度を得るためには，記録磁極端部とスライダ浮上面の距離の距離を１５０ｎｍ以下にするのが好ましい。 The recording magnetic pole is formed so that the magnetic pole end portion substantially coincides with the slider air bearing surface. However, the magnetic field strength at the position of the light spot on the recording medium generated by the near-field light can be further increased by providing the recess from the air bearing surface at the magnetic pole end. In order to obtain a sufficient magnetic field strength, the distance between the recording magnetic pole end and the slider air bearing surface is preferably 10 nm or more. On the other hand, if the distance between the recording magnetic pole end and the slider air bearing surface is too large, the magnetic field distribution spreads and the magnetic field strength at the recording point decreases. In order to obtain a sufficient magnetic field strength for recording, the distance between the recording magnetic pole end and the slider air bearing surface is preferably set to 150 nm or less.
　上記記録磁極と散乱体先端の距離（記録磁極の近接場光発生素子に近い方のエッジから散乱体先端までの距離）は，大きすぎると光スポット位置における磁界強度が下がってしまう。記録に十分な磁界強度を得るためには，上記記録磁極と散乱体先端の距離を７０ｎｍ以下にすることが好ましい。 If the distance between the recording magnetic pole and the scatterer tip (the distance from the edge closer to the near-field light generating element of the recording magnetic pole to the scatterer tip) is too large, the magnetic field strength at the light spot position decreases. In order to obtain a sufficient magnetic field strength for recording, the distance between the recording magnetic pole and the scatterer tip is preferably set to 70 nm or less.
　上記散乱体先端の磁性体の部分は記録磁極に接するように配置しても良い。これにより，記録磁極中の磁束が，散乱体先端の磁性体部に流れやすくなり，散乱体先端に発生する磁界強度を大きくすることが出来る。散乱体先端の磁性体の部分は，記録磁極の側面に接するように配置しても良いし，記録磁極の下部（記録磁極先端と媒体の間）に接するように配置しても良い。 The magnetic material portion at the tip of the scatterer may be disposed in contact with the recording magnetic pole. As a result, the magnetic flux in the recording magnetic pole can easily flow to the magnetic part at the tip of the scatterer, and the strength of the magnetic field generated at the tip of the scatterer can be increased. The magnetic part at the tip of the scatterer may be disposed so as to contact the side surface of the recording magnetic pole, or may be disposed so as to contact the lower part of the recording magnetic pole (between the recording magnetic pole tip and the medium).
　上記のように，散乱体先端の磁性体の部分が記録磁極に接するように配置する場合，十分な強度の近接場光強度を発生させるためには，記録磁極端部とスライダ浮上面の距離は３０ｎｍ以上にすることが好ましい。 As described above, when the magnetic material at the tip of the scatterer is arranged so as to be in contact with the recording magnetic pole, the distance between the recording magnetic pole end and the slider flying surface is It is preferable to set it to 30 nm or more.
　前記散乱体の先端部に配置する磁性材料部の形状は、散乱体の形状と異なっていても良く、例えば、磁性体材料部のトラック幅方向の長さが浮上面に近づくにつれて小さくなるような形状であっても良い。 The shape of the magnetic material portion disposed at the tip of the scatterer may be different from the shape of the scatterer, for example, the length of the magnetic material portion in the track width direction becomes smaller as it approaches the air bearing surface. It may be a shape.
　本発明によると，近接場光発生素子として導電性を有する散乱体を用いた熱アシスト記録用ヘッドにおいて，近接場光が発生する点に強い磁界を印加することが出来る。 According to the present invention, in a heat-assisted recording head using a conductive scatterer as a near-field light generating element, a strong magnetic field can be applied to a point where near-field light is generated.
本発明の熱アシスト記録用ヘッドを示す側断面図。FIG. 3 is a side sectional view showing a heat-assisted recording head of the present invention. 主磁極先端および近接場発生素子を拡大して示した斜視図。The perspective view which expanded and showed the main magnetic pole front-end | tip and a near field generation | occurrence | production element. 主磁極先端および近接場発生素子を拡大して示した断面図。Sectional drawing which expanded and showed the main magnetic pole front-end | tip and a near field generation | occurrence | production element. 媒体表面における近接場光強度の分布図。The near field light intensity distribution map on the medium surface. 主磁極横に散乱体を配置した場合の、媒体表面における磁界強度の分布図。FIG. 6 is a distribution diagram of magnetic field strength on the medium surface when a scatterer is disposed beside the main magnetic pole. 主磁極端から浮上面までの距離と磁界強度の関係を示す図。The figure which shows the relationship between the distance from a main pole tip to an air bearing surface, and magnetic field intensity. 散乱体先端の磁性体部が主磁極のトラック走行側側面に接した構造の磁気ヘッド要部を示す図。The figure which shows the magnetic head principal part of the structure where the magnetic body part of the scatterer front-end | tip contact | connected the track running side surface of the main pole. 散乱体先端の磁性体部が主磁極下面に接するように配置された構造の磁気ヘッド要部を示す図。The figure which shows the magnetic head principal part of a structure arrange | positioned so that the magnetic body part of a scatterer front-end | tip may contact the lower surface of a main pole. 散乱体先端の磁性体部を主磁極下面に接するように配置し、かつ散乱体を主磁極端部と磁性体部の境界を跨ぐように配置した構造の磁気ヘッド要部を示す図。The figure which shows the principal part of a magnetic head of the structure which has arrange | positioned the magnetic body part of a scatterer front-end | tip in contact with the lower surface of a main magnetic pole, and has arrange | positioned the scatterer so that the boundary of a main magnetic pole edge part and a magnetic body part may be straddled. 先端の材質が磁性体となった散乱体が主磁極の下部に配置された構造の磁気ヘッドを示す斜視図。The perspective view which shows the magnetic head of the structure where the scatterer by which the material of the front end became a magnetic body is arrange | positioned under the main magnetic pole. 先端の材質が磁性体となった散乱体が主磁極の下部に配置された構造の磁気ヘッドを示す断面図。Sectional drawing which shows the magnetic head of the structure where the scatterer by which the material of the front end became a magnetic body is arrange | positioned under the main pole. 主磁極下に散乱体を配置した場合の、媒体表面における磁界強度の分布図。FIG. 6 is a distribution diagram of magnetic field strength on the medium surface when a scatterer is arranged under the main magnetic pole. 主磁極の断面形状を四角形にした場合を示す図。The figure which shows the case where the cross-sectional shape of a main pole is made into a square. 散乱体先端の磁性体の部分の寸法、形状を変えた場合を示す図で、(a)は磁性体の分の幅を、散乱体主要部の幅よりも大きくした場合、(b)は磁性体部分の先端を先鋭化した場合を示す図。This figure shows the case where the size and shape of the magnetic part at the tip of the scatterer are changed. (A) is the case where the width of the magnetic substance is made larger than the width of the main part of the scatterer, and (b) is the magnetic part. The figure which shows the case where the front-end | tip of a body part is sharpened. 散乱体先端の磁性体の部分の形状を変えた場合を示す図で、(a)はスライダの浮上面側に近づくにつれて、幅が徐々に小さくなった場合、（ｂ）は先端の磁性体の部分が、スライダの浮上面側にのみ形成された場合を示す図。FIG. 5 is a diagram showing a case where the shape of the magnetic body portion at the tip of the scatterer is changed. FIG. 5A shows a case where the width gradually decreases as the slider approaches the air bearing surface, and FIG. The figure which shows the case where a part is formed only in the air bearing surface side of a slider. 散乱体の形状を三角形以外にした場合を示す図で、(a)は四角形、（ｂ）は楕円にした場合を示す図。The figure which shows the case where the shape of a scatterer is made into other than a triangle, (a) is a square, (b) is a figure which shows the case where it is set as the ellipse. 記録再生装置の構成例を示す図。The figure which shows the structural example of a recording / reproducing apparatus.
　以下、実施例により説明する。 Hereinafter, description will be made by way of examples.
　以下，図面を参照して本実施例の実施の形態を説明する。 Hereinafter, embodiments of the present embodiment will be described with reference to the drawings.
　図１に、本実施例による熱アシスト磁気ヘッド１００の構成を示す。 FIG. 1 shows the configuration of a thermally-assisted magnetic head 100 according to this embodiment.
　光源としては波長７８０ｎｍの半導体レーザを用い、それをサスペンションの根元付近に設置した（図１４の符号５５参照）。光源からスライダ５まで光を伝送させるために、ポリマー導波路１０（図ではコア部を示す）を用いた。ポリマー導波路１０はサスペンション１６上に配置した。ポリマー導波路１０から出射する光は、スライダ５の上面に垂直な方向に出射するように、ポリマー導波路１０の端面には４５度ミラー１２を形成した。本実施例では、光源からスライダ５まで光を伝送させるための導波路として、ポリマー導波路１０を用いたが、光ファイバやプラスチックファイバなど他の導波路を用いても良い。なお、符号１１はポリマー導波路クラッドである。 A semiconductor laser having a wavelength of 780 nm was used as the light source, and was installed near the base of the suspension (see reference numeral 55 in FIG. 14). In order to transmit light from the light source to the slider 5, the polymer waveguide 10 (in the figure, the core portion is shown) was used. The polymer waveguide 10 was disposed on the suspension 16. A 45-degree mirror 12 is formed on the end surface of the polymer waveguide 10 so that light emitted from the polymer waveguide 10 is emitted in a direction perpendicular to the upper surface of the slider 5. In the present embodiment, the polymer waveguide 10 is used as a waveguide for transmitting light from the light source to the slider 5, but other waveguides such as an optical fiber and a plastic fiber may be used. Reference numeral 11 denotes a polymer waveguide cladding.
　浮上スライダ５中には、光を媒体対向面１７の反対側から媒体対向面１７まで導くための記録用導波路３（図ではコア部を示す）を形成した。スライダ中の記録用導波路３のコアの材質はＴａ２Ｏ５とし、クラッド部１５の材質はＡｌ２Ｏ３とした。記録トラックの方向と垂直な方向のコア幅は６００ｎｍ，記録トラックの方向と平行な方向のコア幅（図１中Ｗ２）は３００ｎｍとした。導波路３の材質は、コアの屈折率がクラッドの屈折率よりも大きければ良く、例えば、クラッドの材質をＡｌ２Ｏ３にし、コアの材質をＴｉＯ２にしても良い。またクラッドの材質をＳｉＯ２にし、コアの材質をＴａ２Ｏ５，ＴｉＯ２，ＳｉＯｘＮｙ，ＧｅドープＳｉＯ２にしても良い。 In the flying slider 5, a recording waveguide 3 (a core portion is shown in the figure) for guiding light from the opposite side of the medium facing surface 17 to the medium facing surface 17 was formed. The material of the core of the recording waveguide 3 in the slider was Ta 2 O 5, and the material of the cladding part 15 was Al 2 O 3 . The core width in the direction perpendicular to the direction of the recording track was 600 nm, and the core width in the direction parallel to the direction of the recording track (W 2 in FIG. 1) was 300 nm. The material of the waveguide 3 only needs to have a refractive index of the core larger than the refractive index of the cladding. For example, the material of the cladding may be Al 2 O 3 and the material of the core may be TiO 2 . Alternatively, the cladding material may be SiO 2 and the core material may be Ta 2 O 5 , TiO 2 , SiO x N y , or Ge-doped SiO 2 .
　導波路３下部（出射端）には、径が数１０ｎｍの光スポットを発生させるために近接場光発生素子１を形成した。近接場光発生素子１としては、導電性の散乱体を用いた。記録用磁界は、主磁極２とリターンポール８とコイル７から構成される磁気ヘッド部６により発生させた。コイル７により発生した磁界は，主磁極２によって近接場光発生素子１の近傍に導いた。記録の瞬間に，近接場光発生素子により発生する光により媒体を加熱すると同時に，主磁極２から発生する磁界を媒体に印加することで，記録層１４′に記録マークを書き込んだ。 Near-field light generating element 1 was formed at the lower part (outgoing end) of waveguide 3 in order to generate a light spot having a diameter of several tens of nanometers. As the near-field light generating element 1, a conductive scatterer was used. The recording magnetic field was generated by the magnetic head portion 6 composed of the main magnetic pole 2, the return pole 8 and the coil 7. The magnetic field generated by the coil 7 was guided to the vicinity of the near-field light generating element 1 by the main magnetic pole 2. At the moment of recording, the medium was heated by the light generated by the near-field light generating element, and at the same time, a magnetic field generated from the main magnetic pole 2 was applied to the medium, thereby writing a recording mark on the recording layer 14 '.
　書込ヘッドの脇には、図１に示すように、磁気再生素子４を含む再生ヘッドを形成した。本実施例では、磁気再生素子４としてＧｉａｎｔ　Ｍａｇｎｅｔｏ　Ｒｅｓｉｓｔｉｖｅ（ＧＭＲ）素子又はＴｕｎｎｅｌｉｎｇ　Ｍａｇｎｅｔｏ　Ｒｅｓｉｓｔｉｖｅ（ＴＭＲ）素子を利用した。磁気再生素子４の周辺には、磁界の漏れを防ぐための磁気シールド９を形成した。 A reproducing head including a magnetic reproducing element 4 was formed on the side of the write head as shown in FIG. In this example, a Giant Magneto Resistive (GMR) element or a Tunneling Magneto Resistive (TMR) element was used as the magnetic reproducing element 4. A magnetic shield 9 is formed around the magnetic reproducing element 4 to prevent magnetic field leakage.
　図２に，主磁極２先端部および近接場光発生素子１の拡大図を示す。また、図３に、この部分の断面図（ｘｚ平面に平行な方向に切断したとき断面図）を示す。主磁極２の先端部近傍には近接場光発生素子１として三角形の形状を有する導電性の散乱体を配置した。この導電性を有する散乱体の主要部２０と先端部２１の材質が異なるようにし、先端部２１の材質を磁性材料となるようにした。この散乱体に、図２中のｘ方向に偏光した光を、矢印２４の方向に入射させると、散乱体中の電荷が入射光の偏光方向に平行な方向に振動する。振動する電荷は、先端部２１に集中し、その集中した電荷により先端部２１近傍に局在した電場すなわち近接場光が発生する。散乱体中の電荷の振動には、共鳴周波数が存在し、その周波数と光の周波数が一致すると、光エネルギは電荷の振動エネルギに効率良く変換され、その結果非常に強い近接場光が頂点２１に発生する。特に、記録媒体１４が、近接場光素子１近傍に存在すると、媒体により電荷が引き寄せられ、媒体に近い頂点２２に強い近接場光が発生する。 FIG. 2 shows an enlarged view of the tip of the main magnetic pole 2 and the near-field light generating element 1. FIG. 3 shows a cross-sectional view of this portion (a cross-sectional view when cut in a direction parallel to the xz plane). A conductive scatterer having a triangular shape is disposed as the near-field light generating element 1 in the vicinity of the tip of the main magnetic pole 2. The material of the main portion 20 and the tip portion 21 of the scatterer having conductivity is made different, and the material of the tip portion 21 is a magnetic material. When light polarized in the x direction in FIG. 2 is incident on the scatterer in the direction of the arrow 24, the charge in the scatterer oscillates in a direction parallel to the polarization direction of the incident light. The oscillating charge is concentrated on the tip 21 and an electric field localized near the tip 21, that is, near-field light is generated by the concentrated charge. The vibration of the charge in the scatterer has a resonance frequency. When the frequency and the frequency of the light coincide with each other, the light energy is efficiently converted into the vibration energy of the charge. As a result, very strong near-field light is apex 21. Occurs. In particular, when the recording medium 14 exists in the vicinity of the near-field light element 1, charges are attracted by the medium, and strong near-field light is generated at the vertex 22 near the medium.
　本実施例では、導電性を有する散乱体の主要部２０の材料として金、先端部２１の材料としてＦｅＣｏ合金を用いた。先端部２１を含む散乱体のｘ方向の幅Ｗｘは９０ｎｍとし、散乱体の高さｈ３は１００ｎｍとした。先端部２１のｘ方向の幅Ｗａは１０ｎｍ、ｙ方向の幅Ｗｂは２０ｎｍとした。頂角θは５０度とした。散乱体の主要部２０の媒体側の表面２５は、散乱体の表面２５と媒体表面の距離が、散乱体の頂点部２２と媒体表面の距離よりも大きくなるようにした。光を散乱体に入射させたとき、頂点２２の他に、頂点と反対側の辺２３にも弱い近接場光（バックグランド光）が発生する。このバックグランド光が媒体に当たると、頂点部２２以外においても媒体が加熱されてしまい、そこにおける記録情報が消去されてしまう可能性がある。上記のように、散乱体の表面２５と媒体表面の距離が大きくなるように散乱体の主要部２０の媒体側の表面２５を削ると、頂点２２の反対側の辺２３に発生する弱い近接場光が媒体表面に届かなくなり、辺２３に発生する弱い近接場光が媒体に与える影響を小さくすることが出来る。 In this example, gold was used as the material of the main portion 20 of the conductive scatterer, and FeCo alloy was used as the material of the tip portion 21. The width W x in the x direction of the scatterer including the tip 21 was 90 nm, and the height h 3 of the scatterer was 100 nm. The tip portion 21 has a width W a in the x direction of 10 nm and a width W b in the y direction of 20 nm. The apex angle θ was 50 degrees. The surface 25 on the medium side of the main part 20 of the scatterer is such that the distance between the surface 25 of the scatterer and the medium surface is larger than the distance between the vertex 22 of the scatterer and the medium surface. When light is incident on the scatterer, weak near-field light (background light) is generated not only at the vertex 22 but also at the side 23 opposite to the vertex. When this background light hits the medium, the medium is heated also at portions other than the apex portion 22, and the recorded information may be erased. As described above, if the surface 25 on the medium side of the main part 20 of the scatterer is sharpened so that the distance between the surface 25 of the scatterer and the medium surface is increased, the weak near field generated on the side 23 on the opposite side of the vertex 22. The light does not reach the medium surface, and the influence of the weak near-field light generated on the side 23 on the medium can be reduced.
　本実施例では、表面２５の凹み（リセス）量ｈ２は１０ｎｍとした。主磁極２の材料はＦｅＣｏ合金とした。主磁極のｙ方向の幅は徐々に小さくなるようにし、先端部のｘ方向の幅Ｗ１は３００ｎｍ、ｙ方向の幅Ｗ２も３００ｎｍとなるようにした。主磁極と散乱体の先端部２１の距離Ｓは２０ｎｍとした。主磁極２および近接場光発生素子１周辺の材料はＡｌ２Ｏ３とした。光源からの光を近接場光発生素子１まで導くための導波路コア３の終端部とスライダ浮上面１７の距離ｈ４は１５０ｎｍとした。導波路コア３とクラッドの境界には，エバネッセント光が染み出しているが，導波路コア３と主磁極２が接してしまうと，導波路コア３表面のエバネッセント光がけられてしまい，導波路コア３を伝播する光の強度が低下してしまう。この強度の低下を抑えるために，主磁極２の導波路コア３に近い部分２６の表面を削った。本実施例では，削る量Ｗ３は１００ｎｍとし，削らない部分の高さｈ５は１００ｎｍとした。図４に、上記構造により発生した近接場光の強度分布（媒体１４表面における強度分布）の計算結果を示す。強度の値は、入射光強度との比を表す。この図に示すように、磁性体で出来た散乱体の先端部２２近傍に強い近接場光が発生し、そのピーク強度は、入射光強度の約３５０倍となった。 In the present embodiment, the amount of recess (recess) h 2 on the surface 25 is 10 nm. The material of the main pole 2 was an FeCo alloy. The width of the main magnetic pole in the y direction was gradually decreased, the width W 1 in the x direction of the tip was 300 nm, and the width W 2 in the y direction was also 300 nm. The distance S between the main pole and the tip 21 of the scatterer was 20 nm. The material around the main magnetic pole 2 and the near-field light generating element 1 was Al 2 O 3 . The distance h 4 between the terminal end of the waveguide core 3 and the slider air bearing surface 17 for guiding the light from the light source to the near-field light generating element 1 was 150 nm. The evanescent light oozes out at the boundary between the waveguide core 3 and the clad, but if the waveguide core 3 and the main magnetic pole 2 come into contact with each other, the evanescent light on the surface of the waveguide core 3 is lost, and the waveguide core The intensity of the light propagating through 3 is reduced. In order to suppress this decrease in strength, the surface of the portion 26 of the main pole 2 near the waveguide core 3 was shaved. In this example, the amount W 3 to be cut was set to 100 nm, and the height h 5 of the portion not to be cut was set to 100 nm. FIG. 4 shows a calculation result of the intensity distribution of the near-field light generated by the above structure (intensity distribution on the surface of the medium 14). The intensity value represents a ratio to the incident light intensity. As shown in this figure, strong near-field light was generated in the vicinity of the tip 22 of the scatterer made of a magnetic material, and its peak intensity was about 350 times the incident light intensity.
　ここで、散乱体の頂点２１の材料を磁性材料としたことによる効果を説明する。 Here, the effect of using the magnetic material as the material of the top 21 of the scatterer will be described.
　図５は、主磁極２の先端の幅がＷ１＝３００ｎｍ，Ｗ２＝３００ｎｍであるとき、主磁極下の媒体表面における磁界分布（ｚ方向成分の分布）および媒体表面の温度分布を示す。ｘ座標は、近接場光素子に近い側の磁極のエッジの位置を原点とした。散乱体は磁極脇に形成されているため、図５に示すように、磁極から離れた位置が加熱される。記録ビットは、この加熱領域に形成され、その流出端側の境界は、温度分布の流出端側における温度勾配（温度をＴとしたときのｄＴ／ｄｘの絶対値）が最大となる位置（図５中、ｘ＝３０ｎｍの位置）となる。印加磁界強度は、加熱領域（温度分布の温度勾配が最大になる位置よりも流入端側）において十分大きくないと、加熱領域内の磁化が完全に反転されない。例えば、１Ｔｂ／ｉｎ２以上の記録が可能な媒体に対して記録を行うためには、記録磁界の大きさは、温度分布の流出端側における温度勾配が最大となる位置において、３ｋＯｅ以上である必要がある。図５中一点鎖線は、散乱体の先端部２１の材料が磁性材料ではない場合の磁界分布を示す（主磁極の先端２７とスライダ浮上面１７の距離ｈ１は０とした）。この場合、磁界強度は、磁極から離れると急激に低下し、温度分布の流出端側における温度勾配が最大となる位置における磁界強度は、１．５ｋＯｅ以下となる。したがって加熱領域内の磁化を完全に反転させることが出来ない。また、磁極中心部と加熱点における磁界強度の差が大きいと，記録する場所の周辺に強い磁界が印加されることになり，記録点周辺（隣接トラック）においてデータが消去されてしまうことが問題となる。 FIG. 5 shows a magnetic field distribution (z-direction component distribution) and a medium surface temperature distribution under the main magnetic pole when the width of the tip of the main magnetic pole 2 is W 1 = 300 nm and W 2 = 300 nm. For the x coordinate, the origin is the position of the edge of the magnetic pole on the side close to the near-field light element. Since the scatterer is formed on the side of the magnetic pole, the position away from the magnetic pole is heated as shown in FIG. The recording bit is formed in this heating region, and the boundary on the outflow end side has a position where the temperature gradient on the outflow end side of the temperature distribution (absolute value of dT / dx when temperature is T) is maximized (see FIG. 5, the position of x = 30 nm). If the applied magnetic field intensity is not sufficiently large in the heating region (on the inflow end side from the position where the temperature gradient of the temperature distribution is maximized), the magnetization in the heating region is not completely reversed. For example, in order to perform recording on a medium capable of recording at 1 Tb / in 2 or more, the magnitude of the recording magnetic field is 3 kOe or more at a position where the temperature gradient at the outflow end side of the temperature distribution is maximum. There is a need. 5 indicates the magnetic field distribution when the material of the tip 21 of the scatterer is not a magnetic material (the distance h 1 between the tip 27 of the main pole and the slider air bearing surface 17 is 0). In this case, the magnetic field strength sharply decreases as it moves away from the magnetic pole, and the magnetic field strength at the position where the temperature gradient on the outflow end side of the temperature distribution becomes maximum is 1.5 kOe or less. Therefore, the magnetization in the heating region cannot be completely reversed. In addition, if the magnetic field strength difference between the magnetic pole center and the heating point is large, a strong magnetic field is applied around the recording location and data is erased around the recording point (adjacent track). It becomes.
　図５中の実線の曲線は、本実施例の構造により発生する磁界分布を示す。本実施例の構造の場合、散乱体の先端が磁性体となっているため、散乱体の先端２１付近の磁束が，先端２１に集まる。その結果、加熱点における磁界強度を増すことが出来る。本実施例の場合、温度分布の流出端側における温度勾配が最大となる位置における磁界強度を、３ｋＯｅ以上にすることが出来る。また、熱アシスト磁気記録では、温度勾配が最大になる位置において、磁界分布の勾配が大きいほど再生信号の信号／ノイズ（Ｓ／Ｎ）比を大きくすることが出来る。本実施例の構造では、近接場光が発生する位置において局所的に磁界強度を大きくすることが出来るので、温度勾配が高い位置と、磁界勾配が高い位置を近づけることが出来、その結果再生信号のＳ／Ｎ比を大きくすることが出来る。 The solid curve in FIG. 5 shows the magnetic field distribution generated by the structure of this example. In the case of the structure of this embodiment, since the tip of the scatterer is a magnetic material, the magnetic flux near the tip 21 of the scatterer gathers at the tip 21. As a result, the magnetic field strength at the heating point can be increased. In the case of the present embodiment, the magnetic field strength at the position where the temperature gradient on the outflow end side of the temperature distribution becomes maximum can be 3 kOe or more. In the heat-assisted magnetic recording, the signal / noise (S / N) ratio of the reproduction signal can be increased as the gradient of the magnetic field distribution increases at the position where the temperature gradient is maximized. In the structure of this embodiment, the magnetic field strength can be locally increased at the position where the near-field light is generated, so that the position where the temperature gradient is high and the position where the magnetic field gradient is high can be brought close to each other. The S / N ratio can be increased.
　上記実施例では、主磁極端部とスライダ浮上面の距離ｈ１は０としたが、０よりも大きくなるようにしても良い。言い換えれば、主磁極端部に浮上面からリセスした領域を設けても良い。このようなリセス領域を設けることにより，磁界が磁極横にも広がり，加熱位置における磁界強度をさらに大きくすることが出来る。 In the above embodiment, the distance h 1 between the main magnetic pole end and the slider air bearing surface is 0, but it may be greater than 0. In other words, a region recessed from the air bearing surface may be provided at the end of the main magnetic pole. By providing such a recess region, the magnetic field spreads to the side of the magnetic pole, and the magnetic field strength at the heating position can be further increased.
　図５中の二点鎖線は、散乱体先端を磁性材料にし、主磁極端部とスライダ浮上面の距離ｈ１を５０ｎｍにした場合の磁界分布を示す。このように、主磁極端部とスライダ浮上面の距離ｈ１を大きくすることにより、温度分布の流出端側における温度勾配が最大となる位置における磁界強度を４ｋＯｅ以上にすることが出来る。このように磁界強度を上げることが出来ると、より保磁力の大きな媒体に記録することが出来るので、熱揺らぎの影響を小さくすることが出来る。したがって、記録密度を大きくすることが出来る。また磁界強度を増やすことにより、加熱温度を下げることも出来るので、より低パワーの光で記録することも可能になる。 The two-dot chain line in FIG. 5, the scatterer tip to magnetic material, showing a magnetic field distribution in the case of a 50nm distance h 1 of the main magnetic pole end and the slider air bearing surface. Thus, by increasing the distance h 1 of the main magnetic pole end and the slider air bearing surface, the temperature gradient at the outflow end of the temperature distribution can be the magnetic field strength at the position of maximum than 4 kOe. If the magnetic field strength can be increased in this way, recording can be performed on a medium having a larger coercive force, so that the influence of thermal fluctuation can be reduced. Therefore, the recording density can be increased. Further, since the heating temperature can be lowered by increasing the magnetic field strength, it is possible to perform recording with lower power light.
　上記のように、主磁極端部とスライダ浮上面の距離ｈ１を０よりも大きくする場合、主磁極端部とスライダ浮上面の距離の距離が大きすぎると，磁界分布が広がりすぎてしまい逆に記録点における磁界強度が低下してしまう。図６に、主磁極端部とスライダ浮上面の距離ｈ１と温度勾配が最大となる点（ｘ＝３０ｎｍ）における磁界強度との関係を示す。このように磁界強度を大きくするためには，主磁極端部とスライダ浮上面の距離をある程度大きくするのが好ましが，逆に主磁極端部とスライダ浮上面の距離の距離が大きすぎると，磁界分布が下がってしまう。５Ｔｂ／ｉｎ２以上の記録密度を実現するためには、温度分布の流出端側における温度勾配が最大となる位置における磁界強度を４ｋＯｅ以上にすることが必要となるが、そのためには、主磁極端部とスライダ浮上面の距離ｈ１は２０ｎｍ以上、１５０ｎｍ以下にするのが好ましい。 As described above, when the distance h 1 of the main magnetic pole end and the slider air bearing surface larger than 0, the distance of the distance of the main magnetic pole end and the slider air bearing surface is too large, will be the magnetic field distribution is too wide opposite In addition, the magnetic field strength at the recording point is reduced. FIG. 6 shows the relationship between the distance h 1 between the end of the main magnetic pole and the slider air bearing surface and the magnetic field strength at the point where the temperature gradient is maximum (x = 30 nm). In order to increase the magnetic field strength in this way, it is preferable to increase the distance between the main magnetic pole end and the slider air bearing surface to some extent, but conversely if the distance between the main magnetic pole end and the slider air bearing surface is too large. , Magnetic field distribution will decrease. In order to realize a recording density of 5 Tb / in 2 or more, it is necessary to set the magnetic field strength at a position where the temperature gradient on the outflow end side of the temperature distribution is maximum to 4 kOe or more. The distance h 1 between the extreme part and the slider air bearing surface is preferably 20 nm or more and 150 nm or less.
　上記実施例において、主磁極と散乱体先端の距離Ｓは，３０ｎｍとしたが、距離Ｓが大きすぎると、散乱体先端を磁性体にしたとしても、加熱位置における磁界が不十分となってしまう。距離Ｓが７０ｎｍ以上になると、温度勾配が最大となる位置（流出端側の位置）における磁界強度は３ｋＯｅ以下となるので、１Ｔｂ／ｉｎ２以上の記録密度を実現するのが困難となる。したがって、主磁極と散乱体先端の距離Ｓは７０ｎｍ以下にするのが好ましい。 In the above embodiment, the distance S between the main magnetic pole and the scatterer tip is 30 nm. However, if the distance S is too large, the magnetic field at the heating position will be insufficient even if the scatterer tip is made of a magnetic material. . When the distance S is 70 nm or more, the magnetic field strength at the position where the temperature gradient is maximum (position at the outflow end side) is 3 kOe or less, and it becomes difficult to achieve a recording density of 1 Tb / in 2 or more. Therefore, the distance S between the main magnetic pole and the scatterer tip is preferably 70 nm or less.
　上記実施例において，散乱体先端の磁性体の部分２１の記録トラックに垂直な方向の幅Ｗｂは，記録トラック幅よりも小さくすると，記録するトラックにのみ強い磁界を印加することが出来，隣接トラックに書かれた記録情報が消去される確率を小さくすることが出来る。したがって，散乱体先端の磁性体の部分２１の記録トラックに垂直な方向の幅Ｗｂは，記録トラック幅よりも小さくするのが好ましい。例えば，１Ｔｂ／ｉｎ２以上の記録密度を実現するためにはトラックの幅を５０ｎｍ以下にする必要があり，そのためには，散乱体先端の磁性体の部分２１の幅Ｗｂは，５０ｎｍ以下にするのが好ましい。 In the above embodiment, the width W b in the direction perpendicular to the recording track portions 21 of the scatterer tip magnetic material, when smaller than the recording track width, it is possible to apply a strong magnetic field only in the track to be recorded, adjacent The probability that the recorded information written on the track is erased can be reduced. Therefore, it is preferable that the width W b in the direction perpendicular to the recording track of the magnetic portion 21 at the tip of the scatterer is smaller than the recording track width. For example, in order to realize a recording density of 1 Tb / in 2 or more, the track width needs to be 50 nm or less. For this purpose, the width W b of the magnetic part 21 at the tip of the scatterer is 50 nm or less. It is preferable to do this.
　上記実施例では，散乱体の主要部２０の材料として金を用いたが，非磁性かつ導電性を有する金属であれば金以外の材料でも良い。例えば，銀，銅，アルミ，チタンなどの金属や金と銀，金と銅など複数の金属を混ぜた合金であっても良い。散乱体の先端部２１の材料は，磁性体であれば金属以外の材料でも良く，例えばＦｅＣｏＮｉ合金，ＦｅＮｉ合金，ＦｅＮｉＭｏ合金，ＦｅＮｉＣｒＣｕ合金，ＦｅＮｉＮｂ合金，ＦｅＣｏＰｄ合金，Ｆｅ，ＦｅＳｉ，合金，ＦｅＡｌ合金，ＦｅＳｉＡｌ合金，フェライト化合物などであっても良い。なお，磁性体中の磁化の向きを容易に反転することが出来るように，磁性体の材料は軟磁性体であることが好ましい。 In the above embodiment, gold is used as the material of the main part 20 of the scatterer. However, a material other than gold may be used as long as it is a non-magnetic and conductive metal. For example, a metal such as silver, copper, aluminum, or titanium, or an alloy in which a plurality of metals such as gold and silver or gold and copper are mixed may be used. The material of the tip 21 of the scatterer may be a material other than a metal as long as it is a magnetic material. An FeSiAl alloy, a ferrite compound, or the like may be used. The magnetic material is preferably a soft magnetic material so that the direction of magnetization in the magnetic material can be easily reversed.
　上記散乱体の長さ（頂点とその反対のエッジまでの距離）Ｗｘは，散乱体中の電荷振動の共鳴（プラズモン共鳴）が発生するように調整すると強い近接場光を発生させることが出来る。上記実施例のように，散乱体の主要部２０の材質が金，先端部２１の材質がＦｅＣｏ，入射光波長が７８０ｎｍであるとき，最適な長さＷｘは９０ｎｍであったが，最適値は，散乱体を構成する材質や散乱体周辺の材料，入射光波長に依存するため，材料等に合わせて調整することが好ましい。 When the length of the scatterer (distance between the vertex and the opposite edge) W x is adjusted so as to generate charge oscillation resonance (plasmon resonance) in the scatterer, strong near-field light can be generated. . As in the above embodiment, the material of the main portion 20 is gold scatterers, the material of the tip 21 FeCo, when the incident light wavelength is 780 nm, the optimal length W x but was 90 nm, the optimum value Since it depends on the material constituting the scatterer, the material around the scatterer, and the incident light wavelength, it is preferably adjusted according to the material.
　上記実施例では，主磁極２を近接場発生素子１に対してスライダの流入端（リーディングエッジ）側に配置し，近接場光発生素子１を主磁極２に対してスライダの流出端（トレーリングエッジ）側に配置したが，逆に，主磁極２をスライダの流出端側に配置し，近接場光発生素子１を，スライダの流入端側に配置しても良い。熱アシスト記録においては、記録ビットの境界が記録される位置、すなわち温度分布の流出端側における温度勾配が最大となる位置に印加される磁界強度が大きいほど再生信号のＳ／Ｎ比が大きくなる。近接場光発生素子１を流入端側に配置すると、温度勾配が最大となる位置が磁極に近くなるので、印加磁界を強くすることが出来る。 In the above embodiment, the main magnetic pole 2 is disposed on the slider inflow end (leading edge) side with respect to the near-field generating element 1, and the near-field light generating element 1 is disposed on the slider outflow end (trailing) with respect to the main magnetic pole 2. However, conversely, the main magnetic pole 2 may be disposed on the outflow end side of the slider, and the near-field light generating element 1 may be disposed on the inflow end side of the slider. In the heat-assisted recording, the S / N ratio of the reproduction signal increases as the magnetic field strength applied to the position where the boundary of the recording bit is recorded, that is, the position where the temperature gradient on the outflow end side of the temperature distribution is maximized. . When the near-field light generating element 1 is arranged on the inflow end side, the position where the temperature gradient becomes maximum is close to the magnetic pole, so that the applied magnetic field can be strengthened.
　次に，散乱体の先端２１が主磁極２に接する場合の実施例を示す。実施例１では，散乱体の先端２１と主磁極２の間は離れているとしたが，主磁極２の先端２７とスライダ浮上面１７が離れている場合（主磁極の先端２７とスライダ浮上面１７の距離ｈ１が０よりも大きい場合），図７（ａ）に示すように，散乱体の先端２１が主磁極２に接するように（主磁極２と散乱体先端２１の距離Ｓが０となるように），散乱体を配置しても良い。散乱体の先端に強い近接場光を発生させるためには、散乱体中を振動する電荷が、散乱体の先端部に溜まる必要があるが、主磁極の先端２７とスライダ浮上面１７の距離ｈ１を０にし、散乱体の先端を主磁極に接触するようにすると、電荷が先端に溜まらなくなってしまう。その結果、発生する近接場光強度が低下してしまう。これに対し、主磁極２とスライダ浮上面１７の間にスペースが開いていれば，散乱体中を振動する電荷は，散乱体の先端部２１の磁性体と接していない部分に溜まり，その近傍に近接場光が発生する。このように散乱体先端の磁性体の部分２１と主磁極２が接していれば，主磁極２中の磁束が散乱体先端の磁性体中に流れるため，散乱体の媒体側の頂点２２に発生する磁界強度を強くすることが出来る。本実施例では，主磁極の先端２７とスライダ浮上面１７の距離ｈ１を５０ｎｍとし，その横に，図２の実施例と同じ寸法の散乱体を，散乱体の先端２１が主磁極２の側面に接するように配置した。散乱体の材質は，図２の実施例と同じとした。 Next, an example in which the tip 21 of the scatterer is in contact with the main magnetic pole 2 will be described. In the first embodiment, the tip 21 of the scatterer and the main magnetic pole 2 are separated from each other, but the tip 27 of the main magnetic pole 2 and the slider air bearing surface 17 are separated (the main magnetic pole tip 27 and the slider air bearing surface 27). When the distance h 1 of 17 is larger than 0), the scatterer tip 21 is in contact with the main pole 2 as shown in FIG. 7A (the distance S between the main pole 2 and the scatterer tip 21 is 0). A scatterer may be arranged. In order to generate strong near-field light at the tip of the scatterer, it is necessary for the electric charges that vibrate in the scatterer to accumulate at the tip of the scatterer, but the distance h between the tip 27 of the main pole and the slider air bearing surface 17 If 1 is set to 0 and the tip of the scatterer is brought into contact with the main magnetic pole, the charge will not accumulate at the tip. As a result, the generated near-field light intensity is reduced. On the other hand, if a space is opened between the main magnetic pole 2 and the slider air bearing surface 17, the charges oscillating in the scatterer are accumulated in the portion of the scatterer that is not in contact with the magnetic material at the tip 21 and the vicinity thereof. Near-field light is generated. If the magnetic material portion 21 at the tip of the scatterer and the main magnetic pole 2 are in contact with each other, the magnetic flux in the main magnetic pole 2 flows into the magnetic material at the tip of the scatterer, so that it occurs at the vertex 22 on the medium side of the scatterer. The strength of the magnetic field can be increased. In this embodiment, the distance h 1 between the tip 27 of the main pole and the slider air bearing surface 17 is 50 nm, and a scatterer having the same dimensions as the embodiment of FIG. Arranged to touch the side. The material of the scatterer was the same as in the embodiment of FIG.
　上記実施例では，散乱体先端の磁性体の部分２１は，主磁極２の側面に接するように配置したが，図７（ｂ）に示すように，散乱体先端の磁性体の部分２１が主磁極先端２７の下部（主磁極先端２７とスライダ浮上面１７の間）に位置するように配置しても良い。このように，散乱体先端の磁性体の部分２１を主磁極下部に置くことにより，散乱体の媒体側の頂点２２に発生する磁界強度をさらに強くすることが出来る。本実施例では，本実施例では，主磁極の先端２７とスライダ浮上面１７の距離ｈ１を５０ｎｍとし，散乱体の厚さｈ３を５０ｎｍ，散乱体主要部２０の凹み量ｈ２は１０ｎｍとした。図７（ｃ）に示すように，散乱体の厚さｈ３は，主磁極の先端２７とスライダ浮上面１７の距離ｈ１よりも大きくなるようにしても良い。例えば，距離ｈ１が５０ｎｍであるとき，散乱体の厚さｈ３を１００ｎｍにしても良い。このようにすることで，散乱体中を振動する電荷の量が多くなるため，先端２１に集まる電荷の量が多くなり，発生する近接場光強度を大きくすることが出来る。 In the above embodiment, the magnetic material portion 21 at the tip of the scatterer is disposed so as to contact the side surface of the main magnetic pole 2. However, as shown in FIG. You may arrange | position so that it may be located under the magnetic pole tip 27 (between the main magnetic pole tip 27 and the slider air bearing surface 17). Thus, by placing the magnetic part 21 at the tip of the scatterer below the main magnetic pole, the magnetic field strength generated at the vertex 22 on the medium side of the scatterer can be further increased. In this embodiment, in this embodiment, the distance h 1 between the tip 27 of the main pole and the slider air bearing surface 17 is 50 nm, the thickness h 3 of the scatterer is 50 nm, and the dent amount h 2 of the scatterer main portion 20 is 10 nm. It was. As shown in FIG. 7C, the thickness h 3 of the scatterer may be larger than the distance h 1 between the tip 27 of the main pole and the slider air bearing surface 17. For example, when the distance h 1 is 50 nm, the scatterer thickness h 3 may be set to 100 nm. By doing so, the amount of electric charges oscillating in the scatterer increases, so the amount of electric charges collected at the tip 21 increases, and the generated near-field light intensity can be increased.
　次に，近接場光を発生させるための散乱体の主要部２０が主磁極の下部に置かれた場合の実施例を説明する。 Next, an embodiment in which the main part 20 of the scatterer for generating near-field light is placed below the main magnetic pole will be described.
　図８に、散乱体の主要部２０が主磁極２の下部に置かれた場合の実施例の図を示す。図８（ａ）は、斜視図、図８（ｂ）は断面図を示す。この実施例では、主磁極２の先端の形状は三角形であるとし、その主磁極の下部に、三角形の形状をした導電性を有する散乱体を配置した。散乱体主要部２０の材質は金、先端部２１の材質はＦｅＣｏとし、先端部２１を含む散乱体のｘ方向の幅Ｗｘは９０ｎｍとし、散乱体の高さｈ３は５０ｎｍとした。先端部２１のｘ方向の幅Ｗａは１０ｎｍ、ｙ方向の幅Ｗｂは２０ｎｍとした。三角形の頂角θは５０度とした。散乱体主要部２０の窪み量ｈ１は５０ｎｍとした。散乱体上の主磁極のｘ方向の幅Ｗ４は９０ｎｍ、主磁極の高さｈ６は１５０ｎｍとした。導波路のコア３の出射端からスライダ浮上面１７までの距離ｈ７は、２００ｎｍとした。導波路３の中心は、散乱体の先端２１の位置にくるようにし、入射光は、磁極の上部から矢印２４の方向に入射するようにした。入射光の偏光方法は、ｘ方向となるようにした。主磁極２の影響で、導波路コア３の中を導波する光強度が低下しないように、導波路コア３と主磁極２側面の間隔Ｗ６は１００ｎｍとなるようにした。 FIG. 8 shows a diagram of an embodiment in which the main part 20 of the scatterer is placed below the main magnetic pole 2. FIG. 8A is a perspective view, and FIG. 8B is a cross-sectional view. In this embodiment, the shape of the tip of the main pole 2 is assumed to be a triangle, and a conductive scatterer having a triangular shape is disposed below the main pole. The material of the scatterer main unit 20 is gold, the material of the tip 21 and FeCo, width W x of the x-direction of the scatterer includes a tip portion 21 is set to 90 nm, the height h 3 of the scatterer was 50nm. The tip portion 21 has a width W a in the x direction of 10 nm and a width W b in the y direction of 20 nm. The apex angle θ of the triangle was 50 degrees. The amount of depression h 1 of the scatterer main part 20 was set to 50 nm. The width W 4 in the x direction of the main pole on the scatterer was 90 nm, and the height h 6 of the main pole was 150 nm. The distance h 7 from the output end of the core 3 of the waveguide to the slider air bearing surface 17 was 200 nm. The center of the waveguide 3 is positioned at the tip 21 of the scatterer, and the incident light is incident in the direction of the arrow 24 from the top of the magnetic pole. The incident light was polarized in the x direction. The interval W 6 between the waveguide core 3 and the side surface of the main pole 2 is set to 100 nm so that the light intensity guided through the waveguide core 3 does not decrease due to the influence of the main pole 2.
　上記のように、主磁極２の下部に散乱体を置いた場合も、散乱体側面や主磁極２側面から回り込んで散乱体に入射光する光などにより、散乱体中に電荷振動が励起され、散乱体の媒体１４側の頂点２２に強い近接場光が発生する。このように、散乱体の上に主磁極を配置することにより、磁界が印加される領域と光により加熱される領域を重ねることが出来るが、散乱体の先端２１が磁性体でない場合、主磁極２の先端と媒体１４の間隔ｈ３は、散乱体の厚さｈ２よりも大きくなってしまう。そのために、主磁極２と媒体１４の間において、主磁極から出た磁界が横方向（ｘｙ方向）に広がり、図９中の点線に示すように、媒体１４表面における磁界強度分布は、横方向に広がった分布となる。また、強度も主磁極の先端とスライダの浮上面の距離ｈ３が０である時に比べ、小さくなってしまう（図９において、ｘ方向の原点は、散乱体の頂点２１の位置とした）。これに対して、散乱体の先端２１の材質が磁性体である場合、主磁極２から出た磁束は、散乱体先端部２１に集まるため、図９中の実線に示すように、散乱体の媒体側の頂点１４における磁界強度を増強することが出来る。 As described above, even when a scatterer is placed below the main magnetic pole 2, charge oscillation is excited in the scatterer by light that enters the scatterer from the side surface of the scatterer or the side surface of the main pole 2 and enters the scatterer. A strong near-field light is generated at the vertex 22 on the medium 14 side of the scatterer. As described above, by arranging the main magnetic pole on the scatterer, the region to which the magnetic field is applied and the region heated by light can be overlapped. However, when the tip 21 of the scatterer is not a magnetic material, The distance h 3 between the tip of 2 and the medium 14 becomes larger than the thickness h 2 of the scatterer. Therefore, between the main magnetic pole 2 and the medium 14, the magnetic field emitted from the main magnetic pole spreads in the horizontal direction (xy direction), and the magnetic field intensity distribution on the surface of the medium 14 is in the horizontal direction as shown by the dotted line in FIG. The distribution spreads out. Also, strength as compared to when the distance h 3 of the air bearing surface of the tip and the slider of the main pole is 0, becomes small (in FIG. 9, the origin of the x-direction was set to the position of the vertex 21 of the scatterer). On the other hand, when the material of the tip 21 of the scatterer is a magnetic material, the magnetic flux emitted from the main magnetic pole 2 collects at the scatterer tip 21, and as shown by the solid line in FIG. The magnetic field strength at the apex 14 on the medium side can be increased.
　上記実施例では、主磁極２先端の形状は三角柱であるとしたが、他の形状にしても良い。例えば、図１０に示すように四角柱にしても良い。このようにすることにより、磁束が散乱体先端部２１に流れやすくなり、散乱体の媒体側の頂点２２における磁界強度を強くすることが出来る。本実施例では、主磁極２先端のｘ方向幅Ｗ８を１００ｎｍ、ｙ方向の幅Ｗ７も１００ｎｍとした。 In the above embodiment, the shape of the tip of the main pole 2 is a triangular prism, but other shapes may be used. For example, as shown in FIG. By doing so, the magnetic flux easily flows to the scatterer tip 21 and the magnetic field strength at the vertex 22 on the medium side of the scatterer can be increased. In this embodiment, the x-direction width W 8 at the tip of the main pole 2 is 100 nm, and the y-direction width W 7 is also 100 nm.
　上記図２および図１０の実施例において、散乱体先端の磁性体部２１のｙ方向の幅Ｗｂは、散乱体主要部２０先端の幅に等しいとしたが、図１１（ａ）に示すように、散乱体先端の磁性体部２１のｙ方向の幅Ｗｂが、散乱体主要部２０先端の幅Ｗｃと異なるようにしても良い。例えば、図１１（ａ）の実施例では、Ｗｂを２５ｎｍ、Ｗｃを２０ｎｍとした。このように散乱体先端の磁性体部２１の幅を広げることで、散乱体先端に発生する磁界強度を強くすることが出来る。また、逆にＷｂがＷｃよりも小さくなるようにしても良い。このようにすることにより、散乱体先端に発生する近接場光の分布の幅を小さくすることが出来る。また、図１１（ｃ）に示すように、散乱体先端の磁性体部２１の先が先端に行くに従い徐々に小さくなるようにしても良い。このようにすることにより、散乱体先端に発生する近接場光の分布の幅をさらに小さくすることが出来る。本実施例では，散乱体の磁性体部２１の先端の幅Ｗｂを１０ｎｍ、散乱体主要部２０側の幅Ｗｃを３０ｎｍとした。 2 and 10, the width W b in the y direction of the magnetic body portion 21 at the tip of the scatterer is assumed to be equal to the width of the tip of the scatterer main portion 20, but as shown in FIG. In addition, the width W b in the y direction of the magnetic body portion 21 at the tip of the scatterer may be different from the width W c of the tip of the scatterer main portion 20. For example, in the example of FIG. 11A, W b is set to 25 nm and W c is set to 20 nm. In this way, by increasing the width of the magnetic part 21 at the tip of the scatterer, the strength of the magnetic field generated at the tip of the scatterer can be increased. Moreover, contrary to W b may be set to be smaller than W c. By doing so, it is possible to reduce the width of the distribution of near-field light generated at the tip of the scatterer. Further, as shown in FIG. 11 (c), the tip of the magnetic part 21 at the tip of the scatterer may gradually become smaller as it goes to the tip. By doing so, the width of the distribution of the near-field light generated at the scatterer tip can be further reduced. In this embodiment, the width W b of 10nm of the tip of the magnetic body portion 21 of the scatterer, the width W c of the scatterer main portion 20 was set to 30 nm.
　散乱体先端の磁性体部２１の幅は、スライダ浮上面１７に近づくにつれて小さくなるようにしても良い。例えば図１２（ａ）の実施例では、散乱体先端の磁性体部２１のｙ方向の幅Ｗｂがスライダ浮上面１７に近づくにつれて小さくなるようにした。スライダ浮上面側の幅Ｗｂは２０ｎｍとし、その反対側における幅Ｗ’ｂは６０ｎｍとした。Ｘ方向の幅、Ｗａは１０ｎｍとした。  
このようにすることで、磁束が散乱体先端の磁性体中を流れやすくなり、散乱体の媒体側の頂点２２に発生する磁界強度を強くすることが出来る。図１２（ａ）の実施例では、ｙ方向の幅Ｗｂが徐々に変化するようにしたが、ｘ方向の幅Ｗａが徐々に変化するようにしても良い。また、ｘ方向、ｙ方向の幅を共に変化させても良い。また、幅を徐々に変化させるのではなく、ステップ状に変化させても良い。 The width of the magnetic part 21 at the tip of the scatterer may be reduced as it approaches the slider air bearing surface 17. For example, in the embodiment of FIG. 12A, the width W b in the y direction of the magnetic body portion 21 at the tip of the scatterer is made smaller as it approaches the slider air bearing surface 17. Width W b of the slider air bearing surface side was set to 20 nm, the width W 'b at the opposite side was 60 nm. X direction of width, W a is set to 10nm.
By doing so, the magnetic flux easily flows in the magnetic body at the tip of the scatterer, and the strength of the magnetic field generated at the vertex 22 on the medium side of the scatterer can be increased. In the embodiment of FIG. 12A, the width W b in the y direction is gradually changed, but the width W a in the x direction may be gradually changed. Further, both the widths in the x direction and the y direction may be changed. Further, the width may be changed stepwise instead of gradually.
　上記実施例では、散乱体先端部２１は散乱体の上部から下部にかけて磁性体となるようにしたが、図１２（ｂ）に示すように、散乱体の下部（媒体側）のみが磁性体となるようにしても良い。このようにすると、磁界強度は低下してしまうが、散乱体中において、導電性が高い材料（金など）が占める割合が大きくなるため、散乱体中を電荷が振動しやすくなり、発生する近接場光強度を大きくすることが出来る。 In the above embodiment, the scatterer tip 21 is a magnetic body from the top to the bottom of the scatterer. However, as shown in FIG. 12B, only the lower part (medium side) of the scatterer is a magnetic body. You may make it become. If this is done, the magnetic field strength will be reduced, but the proportion of materials with high conductivity (such as gold) in the scatterer will increase, so that the charge will tend to vibrate in the scatterer and the generated proximity The field light intensity can be increased.
　上記実施例では、散乱体の形状は三角形としたが、四角形、多角形、楕円など他の形状にしても良い。例えば、図１３（ａ）の実施例では、散乱体の形状を四角形とした（図１３は浮上面側から散乱体を見た図）。入射光の偏光方向はｘ方向した。ｘ方向の幅Ｗ１０は７０ｎｍ、ｙ方向の幅Ｗ１１は２０ｎｍ、磁性体の部分２１のｘ方向の幅Ｗ１３は１０ｎｍとした。図１３（ｂ）の実施例では、散乱体の形状を楕円とした。入射光の偏光方向はｘ方向した。ｘ方向の幅Ｗ１０は７０ｎｍ、ｙ方向の幅Ｗ１１は２０ｎｍ、磁性体の部分２１のｘ方向の幅Ｗ１３は１０ｎｍとした。 In the above embodiment, the shape of the scatterer is a triangle, but other shapes such as a quadrangle, a polygon, and an ellipse may be used. For example, in the example of FIG. 13A, the shape of the scatterer is a quadrangle (FIG. 13 is a view of the scatterer viewed from the air bearing surface side). The polarization direction of incident light was in the x direction. width W 10 in the x direction 70 nm, a width W 11 in the y direction was 20 nm, x-direction width W 13 of the portion 21 of the magnetic body and 10 nm. In the example of FIG. 13B, the shape of the scatterer is an ellipse. The polarization direction of incident light was in the x direction. width W 10 in the x direction 70 nm, a width W 11 in the y direction was 20 nm, x-direction width W 13 of the portion 21 of the magnetic body and 10 nm.
　本実施例は、実施例１から３で説明した磁気ヘッドが搭載される熱アシスト記録装置について説明する。図１４に、上記記録ヘッドを用いた記録装置全体図を示す。浮上スライダ５はサスペンション１３に固定し、ボイスコイルモータ４９からなるアクチュエータによって磁気ディスク１４上の所望トラック位置に位置決めした。ヘッド表面には浮上用パッドを形成し、磁気ディスク１４の上を浮上量１０ｎｍ以下で浮上させた。記録ディスク６は、モータによって回転駆動されるスピンドル５３に固定し回転させた。半導体レーザ５５は、サブマウント５１上にはんだで固定後、そのサブマウント５１をサスペンションが取り付けられたアームの根元（ｅ－ｂｌｏｃｋと呼ばれる部分）に配置した。半導体レーザ５５のドライバは、ｅ－ｂｌｏｃｋ横に配置される回路基板５２の上に配置した。この回路基板５２には、磁気ヘッド用のドライバも搭載した。半導体レーザ５５が搭載されたサブマウント５１は、ｅ－ｂｌｏｃｋ上に直接配置しても良いし、ドライバ用回路基板５２の上に配置しても良い。半導体レーザ５５からの出射光は、導波路１０を半導体レーザに直接接合させるか、導波路１０と半導体レーザの間にレンズを入れることで、導波路１０に結合させた。 In this embodiment, a heat-assisted recording apparatus on which the magnetic head described in Embodiments 1 to 3 is mounted will be described. FIG. 14 shows an overall view of a recording apparatus using the recording head. The flying slider 5 was fixed to the suspension 13 and positioned at a desired track position on the magnetic disk 14 by an actuator comprising a voice coil motor 49. A flying pad was formed on the head surface, and the magnetic disk 14 was floated with a flying height of 10 nm or less. The recording disk 6 was fixed and rotated on a spindle 53 that was rotationally driven by a motor. The semiconductor laser 55 was fixed on the submount 51 with solder, and then the submount 51 was placed at the base of the arm (the part called e-block) to which the suspension was attached. The driver of the semiconductor laser 55 is arranged on the circuit board 52 arranged beside the e-block. The circuit board 52 is also equipped with a driver for a magnetic head. The submount 51 on which the semiconductor laser 55 is mounted may be disposed directly on the e-block or may be disposed on the driver circuit board 52. The light emitted from the semiconductor laser 55 was coupled to the waveguide 10 by directly joining the waveguide 10 to the semiconductor laser or by inserting a lens between the waveguide 10 and the semiconductor laser.
　このとき、導波路１０、半導体レーザ５５、及びそれを結合させるための素子や部品は、モジュールとして一体化し、それをｅ－ｂｌｏｃｋ上又は、ｅ－ｂｌｏｃｋ横の回路基板上に配置しても良い。また、半導体レーザ５５の寿命を長くするために、モジュール内を気密封じしても良い。 At this time, the waveguide 10, the semiconductor laser 55, and elements and components for coupling the waveguide 10 may be integrated as a module and disposed on the e-block or on a circuit board next to the e-block. . Further, in order to extend the life of the semiconductor laser 55, the inside of the module may be hermetically sealed.
　記録信号は、信号処理用ＬＳＩ５４で発生し、記録信号及び半導体レーザ用電源は、ＦＰＣ（フレキシブルプリントサーキット）５０を通して半導体レーザ用ドライバに供給した。記録の瞬間、浮上スライダ５中に設けたコイルにより磁界を発生すると同時に、半導体レーザを発光させ、記録マークを形成した。記録媒体６上に記録されたデータは、浮上スライダ５中に形成された磁気再生素子（ＧＭＲ又はＴＭＲ素子）で再生した。再生信号の信号処理は信号処理回路５４により行った。 The recording signal was generated by the signal processing LSI 54, and the recording signal and the power for the semiconductor laser were supplied to the driver for the semiconductor laser through the FPC (flexible printed circuit) 50. At the moment of recording, a magnetic field was generated by a coil provided in the flying slider 5 and simultaneously a semiconductor laser was emitted to form a recording mark. Data recorded on the recording medium 6 was reproduced by a magnetic reproducing element (GMR or TMR element) formed in the flying slider 5. The signal processing of the reproduction signal was performed by the signal processing circuit 54.
１　近接場光発生素子、
２　主磁極、
３　導波路コア、
４　再生素子、
５　スライダ、
６　磁気ヘッド、
７　コイル、
８　リターンポール、
９　シールド、
１０　ポリマー導波路コア、
１１　ポリマー導波路クラッド、
１２　ミラー、
１４　磁気ディスク、
１４’　記録層、
１５　導波路クラッド、
１６　サスペンションのフレクシャー部、
１７　スライダ浮上面、
２０　散乱体主要部、
２１　散乱体先端の磁性体部、
２２　散乱体の媒体側の頂点、
２３　散乱体の近接場光が発生する頂点と反対側の辺、
２４　入射光の入射方向、
２５　散乱体の主要部の媒体側の面、
２６　主磁極の導波路コア側の面、
２７　主磁極の先端部、
４９　ボイスコイルモータ、
５０　ＦＰＣ、
５１　サブマウント、
５２　ドライバ用回路基板、
５３　スピンドルモータ、
５４　信号処理用ＬＳＩ、
５５　半導体レーザ、
１００　熱アシスト磁気ヘッド。 1 near-field light generating element,
2 main pole,
3 waveguide core,
4 reproducing element,
5 Slider,
6 Magnetic head,
7 coils,
8 Return pole,
9 Shield,
10 polymer waveguide core,
11 Polymer waveguide cladding,
12 mirror,
14 Magnetic disk,
14 'recording layer,
15 waveguide cladding,
16 Flexure part of suspension,
17 Slider air bearing surface,
20 Main part of scatterer,
21 Magnetic body part at the tip of the scatterer,
22 Apex on the medium side of the scatterer,
23 Side opposite to the apex where the near-field light of the scatterer is generated,
24 Incident light incident direction,
25 Medium side surface of the main part of the scatterer,
26 The surface of the main pole on the waveguide core side,
27 The tip of the main pole,
49 Voice coil motor,
50 FPC,
51 submount,
52 Circuit board for drivers,
53 spindle motor,
54 LSI for signal processing,
55 Semiconductor laser,
100 Thermally assisted magnetic head.

Claims (9)

  1. 　磁界発生用のコイル及び磁極と近接場光を発生させるための導電性を有する散乱体とを備え，
      前記導電性を有する散乱体上の近接場光が発生する頂点における材料が磁性材料であり，かつ前記導電性を有する散乱体上の近接場光が発生する頂点以外における材料が非磁性材料であり，
      前記散乱体の先端が前記磁極近傍に配置されていることを特徴とする熱アシスト記録装置用ヘッド。     A magnetic field generating coil and magnetic poles, and a conductive scatterer for generating near-field light,
    The material at the apex where the near-field light on the conductive scatterer is generated is a magnetic material, and the material other than the apex where the near-field light is generated on the conductive scatterer is a non-magnetic material. ,
    A head for a heat-assisted recording apparatus, wherein a tip of the scatterer is disposed in the vicinity of the magnetic pole.
  2. 　近接場光と、励磁コイルにより発生した記録磁界とを記録媒体に対する浮上面に放出することにより前記記録媒体に対して記録動作を行う熱アシスト記録装置用ヘッドにおいて、
      前記記録磁界を前記記録媒体の対向面へ導く記録磁極と、
      当該記録磁極のトレーリング側ないしリーディング側近傍に配置された、非磁性かつ導電性を有する金属により構成される柱体状の散乱体とを備え、
      当該柱体状の散乱体は、前記記録磁極への対向面側に形成された磁性材料部を備えることを特徴とする熱アシスト記録装置用ヘッド。     In a thermally assisted recording apparatus head that performs a recording operation on the recording medium by emitting near-field light and a recording magnetic field generated by an excitation coil to the air bearing surface of the recording medium.
    A recording magnetic pole for guiding the recording magnetic field to the opposing surface of the recording medium;
    A columnar scatterer composed of a non-magnetic and conductive metal disposed near the trailing side or leading side of the recording magnetic pole;
    The columnar scatterer includes a magnetic material portion formed on a surface facing the recording magnetic pole, and the head for a heat-assisted recording apparatus.
  3. 　請求項２に記載の熱アシスト記録装置用ヘッドにおいて、
      当該熱アシスト記録装置用ヘッドの浮上面と前記記録磁極の浮上面側端部との距離は、前記浮上面と前記散乱体底面との距離よりも大きいことを特徴とする熱アシスト記録装置用ヘッド。     The head for a heat-assisted recording device according to claim 2,
    The head for a heat-assisted recording apparatus, wherein the distance between the air bearing surface of the head for the heat-assisted recording device and the end of the recording magnetic pole on the air bearing surface side is greater than the distance between the air bearing surface and the bottom surface of the scatterer. .
  4. 　請求項２に記載の熱アシスト記録装置用ヘッドにおいて、
      前記柱体状の散乱体の形状は三角柱であり、
      前記磁性材料部は、当該三角柱の頂角側の稜線に前記三角柱の上面から下面に渡って形成されていることを特徴とする熱アシスト記録装置用ヘッド。     The head for a heat-assisted recording device according to claim 2,
    The shape of the columnar scatterer is a triangular prism,
    The head for a heat-assisted recording apparatus, wherein the magnetic material portion is formed on a ridge line on the apex side of the triangular prism from the upper surface to the lower surface of the triangular prism.
  5. 　請求項１に記載の熱アシスト記録装置用ヘッドにおいて，
      前記磁性材料の部分の記録トラックに垂直な方向の幅が，記録トラック幅に等しいもしくは記録トラック幅よりも小さいことを特徴とする熱アシスト記録装置用ヘッド。     The heat-assisted recording device head according to claim 1,
    A head for a heat-assisted recording apparatus, wherein a width of the magnetic material portion in a direction perpendicular to the recording track is equal to or smaller than the recording track width.
  6. 　請求項１および３記載の熱アシスト記録装置用ヘッドにおいて，
      前記磁極の先端とスライダの浮上面との距離が，２０ｎｍ以上、１５０ｎｍ以下であることを特徴とする熱アシスト記録装置用ヘッド。     The head for a heat-assisted recording device according to claim 1 or 3,
    A head for a thermally assisted recording apparatus, wherein the distance between the tip of the magnetic pole and the flying surface of the slider is 20 nm or more and 150 nm or less.
  7. 　請求項１および３記載の熱アシスト記録装置用ヘッドにおいて，
      前記導電性を有する散乱体先端の磁性体の部分が前記磁極に接していることを特徴とする熱アシスト記録装置用ヘッド。     The head for a heat-assisted recording device according to claim 1 or 3,
    A head for a heat-assisted recording apparatus, wherein a magnetic part at the tip of the conductive scatterer is in contact with the magnetic pole.
  8. 　請求項１記載の熱アシスト記録装置用ヘッドにおいて，
      前記導電性を有する散乱体の先端の磁性体の部分の幅が，前記磁極中の磁束が進む方向に進むに従い徐々に小さくなったことを特徴とする熱アシスト記録装置用ヘッド。     The heat-assisted recording device head according to claim 1,
    A head for a heat-assisted recording apparatus, wherein the width of the magnetic body at the tip of the conductive scatterer gradually decreases as the magnetic flux in the magnetic pole advances in the direction of travel.
  9. 　磁界発生用のコイル及び磁極と近接場光を発生させるための導電性を有する散乱体とを備え，前記導電性を有する散乱体上の近接場光が発生する頂点における材料が磁性材料であり，かつ前記導電性を有する散乱体上の近接場光が発生する頂点以外における材料が非磁性材料であり，前記散乱体の先端が前記磁極近傍に配置されていることを特徴とする熱アシスト記録装置。 A magnetic material generating coil and magnetic poles and a conductive scatterer for generating near-field light, and the material at the apex where the near-field light is generated on the conductive scatterer is a magnetic material, The heat-assisted recording apparatus is characterized in that the material other than the apex where the near-field light is generated on the conductive scatterer is a nonmagnetic material, and the tip of the scatterer is disposed in the vicinity of the magnetic pole. .
PCT/JP2009/007007 2008-12-22 2009-12-18 Head for thermally assisted recording device, and thermally assisted recording device WO2010073569A1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
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JP2012018752A (en) * 2010-07-08 2012-01-26 Headway Technologies Inc Heat-assisted magnetic recording head and method for manufacturing plasmon antenna
JP2012022768A (en) * 2010-07-16 2012-02-02 Headway Technologies Inc Heat-assisted magnetic recording head and manufacturing method thereof

Citations (3)

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JP2007128573A (en) * 2005-11-01 2007-05-24 Hitachi Ltd Head for heat assisted recording device, and heat assisted recording device
JP2008077732A (en) * 2006-09-20 2008-04-03 Seiko Instruments Inc Near-field optical recording element, near-field optical head, and information recording/reproducing device
WO2008143082A1 (en) * 2007-05-21 2008-11-27 Konica Minolta Opto, Inc. Near-field light emitter and plasmon probe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007128573A (en) * 2005-11-01 2007-05-24 Hitachi Ltd Head for heat assisted recording device, and heat assisted recording device
JP2008077732A (en) * 2006-09-20 2008-04-03 Seiko Instruments Inc Near-field optical recording element, near-field optical head, and information recording/reproducing device
WO2008143082A1 (en) * 2007-05-21 2008-11-27 Konica Minolta Opto, Inc. Near-field light emitter and plasmon probe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012018752A (en) * 2010-07-08 2012-01-26 Headway Technologies Inc Heat-assisted magnetic recording head and method for manufacturing plasmon antenna
JP2012022768A (en) * 2010-07-16 2012-02-02 Headway Technologies Inc Heat-assisted magnetic recording head and manufacturing method thereof

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