WO2010032676A1 - 両面吸着構造体及びこれを用いた展示・掲示装置、集塵装置、及び植物育成装置 - Google Patents
両面吸着構造体及びこれを用いた展示・掲示装置、集塵装置、及び植物育成装置 Download PDFInfo
- Publication number
- WO2010032676A1 WO2010032676A1 PCT/JP2009/065837 JP2009065837W WO2010032676A1 WO 2010032676 A1 WO2010032676 A1 WO 2010032676A1 JP 2009065837 W JP2009065837 W JP 2009065837W WO 2010032676 A1 WO2010032676 A1 WO 2010032676A1
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- WIPO (PCT)
- Prior art keywords
- double
- sided
- electrostatic chuck
- adsorption structure
- dust collecting
- Prior art date
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Classifications
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- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
- A01G7/00—Botany in general
- A01G7/04—Electric or magnetic or acoustic treatment of plants for promoting growth
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/02—Plant or installations having external electricity supply
- B03C3/04—Plant or installations having external electricity supply dry type
- B03C3/08—Plant or installations having external electricity supply dry type characterised by presence of stationary flat electrodes arranged with their flat surfaces parallel to the gas stream
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/40—Electrode constructions
- B03C3/45—Collecting-electrodes
- B03C3/47—Collecting-electrodes flat, e.g. plates, discs, gratings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/40—Electrode constructions
- B03C3/60—Use of special materials other than liquids
- B03C3/62—Use of special materials other than liquids ceramics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/40—Electrode constructions
- B03C3/60—Use of special materials other than liquids
- B03C3/64—Use of special materials other than liquids synthetic resins
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/23—Chucks or sockets with magnetic or electrostatic means
Definitions
- the present invention relates to a double-sided adsorption structure that has an electrostatic chuck function and can be used for various purposes, and an exhibition / posting device, a dust collecting device, and a plant growing device using the same.
- the posting of temporary posts outdoors such as a route guide map that informs the examinee of the route to the examination venue at a university or the like is generally a point by creating a simple standing signboard It is done using gate pillars, building walls, trees, simple piles, etc.
- the posting of postings in this way is troublesome because it is cumbersome to store the produced signboards, and the fact is that the production and disposal of the signboards is repeated every year. There are various problems such as wasted labor.
- a dust collection ventilation system that is connected to the outside air inlet of this ventilation unit and that has a dust collector that collects dust, pollen and other dust in the outside air that is introduced from this outside air inlet.
- a dust collector used in this type of conventional dust collector ventilation equipment is a large one such as a cyclone dust collector (Patent Document 1), it is difficult to secure the installation space. Not only is there a great burden on the maintenance of the filter, but if it is a simple dust collection filter installed at the outside air intake, the dust collection function is insufficient and sufficient dust is collected. There is a problem that you can not.
- the present inventor pays attention to an adsorption function of an electrostatic chuck used for adsorption / holding of a semiconductor substrate, which is widely used in an ion implantation apparatus, an ion doping apparatus, a plasma immersion apparatus, etc. in a semiconductor manufacturing process. Focusing on the self-power generation function, as a result of intensive studies on solving various problems in exhibition / posting devices, dust collectors, plant growing devices, etc., the electrostatic chuck has a double-sided adsorption function.
- the double-sided adsorption function is activated by utilizing the self-power generation function of the solar cell, so that one adsorption surface is detachably adsorbed to the adsorption surface made of an electrical insulator and the other adsorption surface has the desired function.
- the present invention was completed by developing a double-sided adsorption structure that can be expressed and that can supply energy necessary for this purpose from a solar cell.
- the object of the present invention is that it can be used repeatedly very easily, and there is no problem such as material waste, there is no energy problem, and there are various display / posting devices, dust collecting devices, plant growing devices, etc.
- Another object of the present invention is to provide a double-sided adsorption structure that can be used for the above-mentioned purposes.
- another object of the present invention is formed using the above-described double-sided adsorption structure, and can be easily installed in various places such as a gate pole and an outer wall of a building.
- the object is to provide a display / posting device that can be used.
- Another object of the present invention is to form a dust collection which is formed by using the above double-sided adsorption structure, has an excellent dust collection function, secures installation space and is easy to maintain, and has no energy problem. To provide an apparatus.
- Still another object of the present invention is to provide an electrical stimulus for promoting the growth of seedlings that are formed using the above-mentioned double-sided adsorption structure and germinate or grow in a seedling box or the like.
- An object of the present invention is to provide a plant growing apparatus capable of performing the above.
- the present invention has a dielectric having a flat surface made of an insulating material and having both front and back surfaces and an internal electrode embedded in the dielectric, and the dielectric is applied when a voltage is applied to the internal electrode.
- An electrostatic chuck portion whose front and back surfaces of the body are suction surfaces, and a power supply portion for applying a voltage to the internal electrode of the electrostatic chuck portion, wherein the power supply portion is a solar cell and electric power generated by the solar cell.
- a double-sided adsorption structure comprising a booster circuit for boosting the pressure.
- the present invention is an exhibition / posting apparatus provided with display means for display / posting formed using such a double-sided adsorption structure, and formed using such a double-sided adsorption structure.
- a dust collecting device comprising the dust collecting means, and further comprising an electric stimulation means formed by using such a double-sided adsorption structure and applying an electric stimulation by an electric field to a plant when a voltage is applied. It is a plant growing device.
- the electrostatic chuck part constituting the double-sided adsorption structure has a dielectric having a flat surface formed of at least an insulating material and having both front and back surfaces and an internal electrode embedded in the dielectric, It is only necessary that both the front and back surfaces of the dielectric become adsorption surfaces when a voltage is applied to the internal electrode.
- the internal electrode is a bipolar type having a positive electrode and a negative electrode, the internal electrode is positive. Although it may be a monopolar type that has only a (negative) electrode and the negative (positive) pole side is grounded, it is advantageous for developing stronger double-sided adsorption performance and requires grounding. Therefore, the bipolar type is preferable.
- the thickness of such an electrostatic chuck portion is appropriately selected depending on the use of the double-sided adsorption structure. From the viewpoint of handling and durability, the thickness is preferably 0.2 mm or more and 3 mm or less, More preferably, it is formed in a sheet shape or a thin plate shape of 0.5 mm to 1 mm. If the thickness of the electrostatic chuck is less than 0.2 mm, it becomes too thin and inconvenient to handle, and there is a problem that the durability is uneasy. On the other hand, if it is thicker than 3 mm, the weight becomes heavy. There is also a problem that it is difficult to handle.
- the dielectric material of the electrostatic chuck is generally made of synthetic resin or ceramics.
- the entire dielectric material may be made of synthetic resin or ceramics.
- one of the adsorption surfaces may be formed of a synthetic resin and the other adsorption surface may be formed of ceramics with an internal electrode embedded therein as a boundary.
- the atmosphere of the double-sided adsorption structure is used indoors, used outdoors where there is a roof, etc. or used in a vacuum, and the atmosphere is normal and the humidity is not high.
- the double-sided adsorption structure is used outdoors where there is no roof, etc., used in the factory, or generates plasma in vacuum If it is hot and humid, such as those used in the vicinity, metal dust or corrosive chemicals, or where gas is handled, it is better to form the whole with ceramics Furthermore, even if the application of the double-sided adsorption structure is the latter, when attaching to a wall or the like where the atmosphere is stable only in one direction, one side of the adsorption surface is formed of synthetic resin and the other Preferably formed of ceramics of the suction surface side.
- the dielectric is preferably formed on a synthetic resin resin sheet, more preferably a flexible resin sheet, and the thickness of the entire electrostatic chuck portion including the internal electrode is set to 0. 0. 0. It should be 2 mm or more and 3 mm or less.
- the dielectric is formed on a flexible resin sheet and the thickness of the entire electrostatic chuck portion is 0.2 mm or more and 0.5 mm or less, the entire electrostatic chuck portion is along the mounting surface of the double-sided adsorption structure. Therefore, even if the mounting portion of the double-sided adsorption structure is curved or bent, the mounting is easy.
- the power supply unit constituting the double-sided adsorption structure includes at least a solar cell that generates light by converting light energy into electric energy, and supplies the electric power generated by the solar cell to the electrostatic chuck unit. It is only necessary to have a booster circuit that boosts the voltage up to the voltage required to develop the double-sided adsorption function on the double-sided adsorption surface, and the conventional solar cell and booster circuit are used according to the application of the double-sided adsorption structure. It can be used by appropriately selecting from known ones.
- a double-sided adsorption structure is a case of an application such as an exhibition / posting device, a dust collector, a plant growing device, etc., and the solar cell uses daytime sunlight.
- a battery for storing the power generated by the solar cell a power storage means such as a large-capacity capacitor is provided, and a double-sided adsorption structure even when the power generation function of the solar cell at night or in the rain is degraded It is preferable to develop the double-sided adsorption function of the body.
- Such an electricity storage means varies depending on the use of the double-sided adsorption structure.
- the double-sided adsorption structure has a predetermined adsorption force of 2
- the energy capacity is preferably 200 mWh or more so that it can be exhibited over a period of days.
- a power switch for on / off may be provided so that power can be supplied to the double-sided adsorption structure or the power supply can be cut off.
- the power switch of the power supply unit is turned on / off when the postal matter sucked on the display means is replaced.
- the power switch must be turned on when replacing the filter paper that is detachably attached to the suction surface of the electrostatic chuck. It is better to turn it off.
- the electrostatic chuck part and the power supply part constituting the double-sided adsorption structure need only be connected so that power is supplied from the power supply part to the electrostatic chuck part.
- the electrostatic chuck part and the power supply part may be formed integrally or may be arranged together, and the electrostatic chuck part and the power supply part are connected with a relatively long connection cable.
- the power supply unit may be installed at a location convenient for power generation by a solar cell.
- the solar cell and the booster circuit constituting the power supply unit If necessary, these may be formed integrally, or may be arranged together, or may be connected by a connection cable and arranged separately from each other.
- the double-sided adsorption structure itself is used as the display means, and one of the adsorption surfaces is made of ceramic or Adhere to fixed places such as gateposts, exterior walls of buildings, windowpanes, or conventional bulletin boards and walls made of metal structures, made of an electrically insulating dielectric material such as synthetic resin.
- the other adsorption surface may be fixed by adsorbing temporarily posted items such as posters and route guides, etc., and the double-sided adsorption structure may be attached to a predetermined display frame, etc.
- the display means is built in, and one suction surface is sucked and fixed at the installation location, and the display frame is held by the other suction surface, and the display frame is held by this display frame. It may be.
- the double-sided adsorption structure when using the double-sided adsorption structure as a display means for such an exhibition / posting device, use the power from the power supply unit of the double-sided adsorption structure as illumination or illumination of the posted items. You can also.
- the double-sided adsorption structure itself may constitute a dust collecting means that exhibits a dust collecting function
- the dust collecting means may be configured by attaching to the surface of a support having a predetermined shape using the double-sided adsorption function of the double-sided adsorption structure, and the adsorption surface for adsorbing dust in the double-sided adsorption structure.
- the filter paper may be adsorbed to form a dust collecting means.
- the electrical stimulation means that is formed using the double-sided adsorption structure of the present invention and applies electrical stimulation to the plant by applying an electric field when voltage is applied, for example, the plant growing device grows seedlings that are germinated or growing.
- the plant growing device grows seedlings that are germinated or growing.
- the plant growing device grows seedlings that are germinated or growing.
- the plant growing device grows seedlings that are germinated or growing.
- the plant growing device grows seedlings that are germinated or growing.
- the plant growing device grows seedlings that are germinated or growing.
- a protective case that accommodates these seedling boxes, for example, it is formed on a synthetic resin flat resin plate or flexible resin sheet, and the side walls of the protective case It may be used by adsorbing it to a part or all of the body and lid, and in the case of a flexible resin sheet, it may be used by covering it from above the protective case.
- the double-sided adsorbing structure of the present invention is driven by a solar cell and exhibits a double-sided adsorbing function on both the front and back sides, so that it can be used very easily and there are no problems such as material waste and energy consumption. There is no problem, and it can be applied to many uses such as an exhibition / posting device and a dust collecting device.
- the display / posting apparatus of the present invention is driven by a solar cell, and is formed by using a double-sided adsorption structure that expresses a double-sided adsorption function on both the front and back surfaces thereof, such as a gate pillar, an outer wall of a building, etc.
- a double-sided adsorption structure that expresses a double-sided adsorption function on both the front and back surfaces thereof, such as a gate pillar, an outer wall of a building, etc.
- the dust collector of the present invention is driven by a solar cell, and is formed by using a double-sided adsorption structure that expresses a double-sided adsorption function on both the front and back sides, and thus has an excellent dust collection function,
- the installation space is easily secured and maintained, and there is no energy problem.
- it is extremely useful as a dust collector for a dust collection ventilation facility provided in a building such as a house.
- the dust collector of the present invention can also be applied to a particle removing device in a processing chamber or beam line of a semiconductor manufacturing apparatus.
- the electrical stimulation means for applying an electrical stimulation consisting of an electric field to a plant such as a seedling to be grown is formed of the double-sided adsorption structure of the present invention and is driven by a solar cell. In addition to being easy to install outdoors, there is no energy problem and it can be used repeatedly.
- FIG. 1 is an explanatory diagram for explaining a double-sided adsorption structure employed as a display means in the display / posting apparatus according to the first embodiment of the present invention.
- FIG. 2 is an explanatory diagram including a plan explanatory diagram (a) and a side explanatory diagram (b) for explaining the display / posting apparatus according to the first embodiment of the present invention.
- FIG. 3 is an explanatory view including a perspective explanatory view (a) and a partially enlarged explanatory view (b) for explaining the dust collecting apparatus according to the second embodiment of the present invention.
- FIG. 4 is an explanatory view showing a test apparatus for a plant growing apparatus for producing radish radish according to Embodiment 3 of the present invention.
- FIG. 5 is a graph which shows the result of the plant growth test implemented using the testing apparatus of the plant growing apparatus for a radish production based on Example 3 of this invention.
- Example 1 and 2 show an exhibition / posting apparatus using the double-sided adsorption structure 1 according to the first embodiment of the present invention as display means for display / posting.
- the double-sided adsorption structure 1 as the display means is formed in a flat plate shape with an insulating material, and has a dielectric 3 having both front and back surfaces and embedded in the dielectric 3.
- An electrostatic chuck portion 2 having an internal electrode 4, and when the voltage is applied to the internal electrode 4, the front and back surfaces of the dielectric 3 become adsorption surfaces 3 a and 3 b, respectively, a solar cell 6, and the solar cell 6
- a power supply unit 5 that applies a voltage to the internal electrode 4 of the electrostatic chuck unit 2.
- the electrostatic chuck portion 2 of the double-sided adsorption structure (display means) 1 has a size of 600 mm in length, 850 mm in width, and 100 ⁇ m in thickness, and has two polyethylene resin sheets constituting the dielectric 3. Between the two electrodes, the copper positive electrode layer 4a and the negative electrode layer 4b each having a size of 500 mm in length, 400 mm in width, and 1 ⁇ m in thickness are sandwiched as an internal electrode 4 at an interval of 5 mm. It has a so-called bipolar electrostatic chuck structure formed by integrally bonding a polyethylene resin sheet and two copper positive electrode layers 4a and negative electrode layers 4b via an adhesive sheet. .
- the internal electrode 4 is composed of two substantially rectangular positive electrode layers 4a and negative electrode layers 4b sandwiched by 5 mm from each other. With respect to the electrode layer 4a and / or the negative electrode layer 4b, a greater gradient force is manifested at a lower applied voltage on the attracting surfaces 3a and 3b formed on the front and back surfaces of the dielectric 3 of the electrostatic chuck portion 2. It may be formed in a predetermined pattern shape so as to exert a large adsorption force.
- the power source 5 that applies a voltage to the internal electrode 4 of the electrostatic chuck portion 2 includes a solar cell 6 between the solar cell 6 and the booster circuit 7.
- a large-capacity capacitor having an energy capacity of 200 mWh so that the power generated by the solar cell 6 can be stored and the power generation capacity of the solar cell 6 can be temporarily stopped or can be supplied to the electrostatic chuck unit 2 even when the power is reduced. 8 is provided, and power supply to the electrostatic chuck unit 2 is turned on / off to the booster circuit 7, and thereby, an attracting force is expressed on both front and back surfaces of the dielectric 3 of the electrostatic chuck unit 2.
- a power switch 9 is provided to cut off this adsorption force.
- the electrostatic chuck unit 2 and the power source unit 5 constituting the double-sided suction structure 1 are integrally formed. It suffices that the power supply is connected to the unit 5, and the electrostatic chuck unit 2 and the power supply unit 5 are connected by a relatively long connection cable. Installed in a convenient place to display and display posters, paintings, directions guides, and other exhibits and bulletins, and installed the power supply unit 5 in a convenient location for power generation by the solar cell 6 Also good.
- the display means comprising the double-sided adsorption structure 1 is, for example, an electrostatic chuck section such as a university ceramic school gate.
- the power switch 9 is turned on, and the positive electrode layer 4a and the negative electrode layer 4b of the electrostatic chuck unit 2 are connected to the solar cell 6 and the booster.
- the electric power from the circuit 7 is supplied to cause an attracting force to be exerted on the back surface side attracting surface 3b of the dielectric 3 of the electrostatic chuck unit 2, thereby attaching the double sided attracting structure 1 (display means) to the installation place,
- a posting 11 such as a route guide map to the examination site for informing the examination student to the university examination student is pasted and posted.
- the display / posting apparatus is made of a material that can be acted on by the chucking force of the electrostatic chuck portion 2 such as a conventional bulletin board or wall made of plastics, ceramics, window glass, or a metallic structure. If there is an existing object, it can be installed anywhere using such an object, and it is very easy to use repeatedly, there is no problem of material waste, etc., and there is no energy problem Have advantages.
- FIG. 3 shows a dust collector that uses the double-sided adsorption structure 1 according to the second embodiment of the present invention as dust collecting means.
- This dust collector is, for example, a dust collection ventilation facility provided in a house or the like. Used with a ventilation unit (not shown).
- the double-sided adsorption structure 1 used in the second embodiment is substantially the same as that of the first embodiment shown in FIG. 1, but four electrostatic chuck portions 2 are provided for one power supply portion 5. It has a structure (dust collecting means) connected in parallel.
- the four electrostatic chuck portions 2 are erected on the upper surface of the flat support 12 to form a dust collecting portion, as shown in FIG.
- the filter paper 13 is detachably attached to the suction surfaces 3a and 3b on both the front and back surfaces of each electrostatic chuck portion 2 standing on the support 12 by the suction force of the electrostatic chuck portion 2.
- the support 12 is provided with an attachment means (not shown) for attaching the double-sided adsorption structure (dust collection means) 1 to the duct 14 of the ventilation unit in a detachable manner.
- the power source unit 5 is connected to the four electrostatic chuck units 2 (dust collecting unit) by a relatively long connection cable 15. At least the solar cell 6 of the power supply unit 5 is installed, for example, on the roof of a house so as to easily receive sunlight.
- the ventilation unit of the dust collecting ventilation facility when driven in a house or the like and the outside air is taken into the room through the duct 14, it is installed in the duct 14.
- the electrostatic chuck portion 2 of the double-sided suction structure (dust collecting means) 1 exerts a suction force through the filter paper 13 on the suction surfaces 3a and 3b, and thereby dust in the outside air introduced into the duct 14; Dust such as pollen is collected on the filter paper 13 to clean the outside air taken indoors.
- the electrostatic chuck unit 2 (dust collecting unit) is provided from the duct 14 to the support 12 together. Then, the power switch 9 is turned off and the filter paper 13 is peeled off from the suction surfaces 3a and 3b of the electrostatic chuck portions 2, and then the power switch 9 is turned on again to attract the suction surfaces of the electrostatic chuck portions 2.
- the filter paper 13 is affixed to 3a and 3b, and the four electrostatic chuck portions 2 (dust collecting portions) are attached to the duct 14 via the support 12.
- an installation space for attaching a large cyclone dust collector or the like is substantially unnecessary, filter maintenance is easy, and the electrostatic chuck Various dusts can be easily and reliably collected using the adsorption force.
- Example 3 In FIG. 4, a test apparatus for a plant growing apparatus for producing radish radish according to Example 3 of the present invention is shown.
- the test apparatus for the plant growing apparatus contains absorbent cotton and water absorbed by the absorbent cotton.
- a plate-like double-sided adsorption structure 1 that functions as an electrical stimulation means for applying electrical stimulation by an electric field to seedlings seeded and grown in a seedling box 20 is adsorbed.
- the seeds for producing the radish radish P are sown in absorbent cotton containing water in each seedling box 20, and the peripheral wall portion 22 of the protective case 21 is formed from the sown seeds.
- the tip of the spruce radish P (the top of the spruce height) is positioned so as to be located in the region of the electric field from the double-sided adsorption structure 1 that functions as an electrical stimulation means. The height is adjusted.
- the protective case 21 has a size of 20 cm ⁇ 30 cm and a height from 3 cm to 10 cm.
- a corrugated cardboard protective case having an adjustable peripheral wall portion 22 and a lid body 23 placed on the information of the peripheral wall portion 22 is used.
- a double-sided adsorption structure 1 having an electrostatic chuck portion having a carbon electrode with a gap of 1 mm and an overlap portion of 1 mm is adsorbed, and the upper end of the plant height and both sides are adsorbed until the plant height reaches a predetermined size from the time when the radish P is seeded.
- a plant growth test in which a voltage of ⁇ 900 V is constantly applied between the structure 1 and within 2 cm is performed from August 20, 2008 to August 21, 2008, and in the case of a comparative example in which no voltage is applied. Compared.
- the results are as shown in FIG. 5.
- the growth rate was about 1.7 times on average as compared with the case of the comparative example in which no voltage was applied.
- SYMBOLS 1 Double-sided adsorption structure (display means or dust collection means), 2 ... Electrostatic chuck part, 3 ... Dielectric, 3a, 3b ... Adsorption surface, 4 ... Internal electrode, 4a ... Positive electrode layer, 4b ... Negative electrode layer DESCRIPTION OF SYMBOLS 5 ... Power supply part, 6 ... Solar cell, 7 ... Boost circuit, 8 ... Large capacity capacitor, 9 ... Power switch, 10 ... Installation place, 11 ... Post, 12 ... Support, 13 ... Filter paper, 14 ... Ventilation Unit duct, 15 ... connecting cable, P ... radish radish, 20 ... nursery box, 21 ... protective case, 22 ... peripheral wall, 23 ... lid.
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Abstract
Description
図1及び図2において、本発明の実施例1に係る両面吸着構造体1を展示・掲示用の表示手段として利用する展示・掲示装置が示されている。
この実施例1の展示・掲示装置において、上記表示手段としての両面吸着構造体1は、絶縁材料で平板状に形成されて表裏両面を有する誘電体3とこの誘電体3の内部に埋設された内部電極4とを有し、上記内部電極4に電圧を印加した際に上記誘電体3の表裏両面がそれぞれ吸着面3a,3bとなる静電チャック部2と、太陽電池6とこの太陽電池6で発電された電力を昇圧する昇圧回路7を備え、上記静電チャック部2の内部電極4に電圧を印加する電源部5とで構成されている。
図3において、本発明の実施例2に係る両面吸着構造体1を集塵手段として利用する集塵装置が示されており、この集塵装置は、例えば住宅等に設けられる集塵換気設備において、図示外の換気ユニットと共に使用される。なお、この実施例2で用いられる両面吸着構造体1は、図1に示す実施例1のものと実質的に同じであるが、1つの電源部5に対して4つの静電チャック部2が並列に接続された構造(集塵手段)を有している。
図4において、本発明の実施例3に係るカイワレ大根製造用の植物育成装置の試験装置が示されており、この植物育成装置の試験装置は、脱脂綿とこの脱脂綿に吸収された水を収容し、カイワレ大根Pの種子を播種し発芽したカイワレ大根Pを所定の大きさまで育成する複数の育苗箱20と、これら複数の育苗箱20の周囲に高さ調節可能に立設された周壁部22とこの周壁部22の上端に載置された蓋体23とで構成され、外部からの光を遮蔽する保護ケース21とで構成されており、上記保護ケース21の蓋体23の内面側には、育苗箱20内に播種されて生育する種苗に対して電界による電気刺激を付与する電気刺激手段として機能する板状の両面吸着構造体1が吸着されている。
Claims (9)
- 絶縁材料で平板状に形成されて表裏両面を有する誘電体とこの誘電体の内部に埋設された内部電極とを有し、上記内部電極に電圧を印加した際に上記誘電体の表裏両面がそれぞれ吸着面となる静電チャック部と、この静電チャック部の内部電極に電圧を印加する電源部とを備え、
上記電源部が太陽電池とこの太陽電池で発電された電力を昇圧する昇圧回路を備えていることを特徴とする両面吸着構造体。 - 電源部が、太陽電池で発電された電力を蓄電する蓄電手段を備えている請求項1に記載の両面吸着構造体。
- 静電チャック部は、その厚さが0.2~3mmのシート状又は薄板状に形成されている請求項1又は2に記載の両面吸着構造体。
- 静電チャック部の誘電体が、合成樹脂製及び/又はセラミックス製である請求項3に記載の両面吸着構造体。
- 静電チャック部の誘電体が、可撓性を有する合成樹脂製の樹脂シートに形成されている請求項3に記載の両面吸着構造体。
- 請求項1~5のいずれかに記載の両面吸着構造体を用いて形成された展示・掲示用の表示手段を備えていることを特徴とする展示・掲示装置。
- 請求項1~5のいずれかに記載の両面吸着構造体を用いて形成された集塵手段を備えていることを特徴とする集塵装置。
- 両面吸着構造体を用いて形成された集塵手段が、両面吸着構造体の電源部のオン・オフにより静電チャック部の吸着面に着脱可能なフィルターペーパーを有する請求項7に記載の集塵装置。
- 請求項1~5のいずれかに記載の両面吸着構造体を用いて形成され、電圧印加時に植物に対して電界による電気刺激を付与する電気刺激手段を備えていることを特徴とする植物育成装置。
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US13/119,347 US8690997B2 (en) | 2008-09-17 | 2009-09-10 | Two-sided attraction structure, exhibiting or indicating apparatus using same, dust collecting apparatus, and plant growing apparatus |
JP2010529732A JP5692700B2 (ja) | 2008-09-17 | 2009-09-10 | 両面吸着構造体を備えた植物育成装置 |
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CN102160275B (zh) | 2015-04-08 |
TW201030928A (en) | 2010-08-16 |
KR20110074525A (ko) | 2011-06-30 |
TWI497681B (zh) | 2015-08-21 |
CN102160275A (zh) | 2011-08-17 |
US20110162526A1 (en) | 2011-07-07 |
US8690997B2 (en) | 2014-04-08 |
JP5692700B2 (ja) | 2015-04-01 |
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EP2339741A1 (en) | 2011-06-29 |
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