WO2010012548A3 - Verkapselung, mems sowie verfahren zum selektiven verkapseln - Google Patents
Verkapselung, mems sowie verfahren zum selektiven verkapseln Download PDFInfo
- Publication number
- WO2010012548A3 WO2010012548A3 PCT/EP2009/057994 EP2009057994W WO2010012548A3 WO 2010012548 A3 WO2010012548 A3 WO 2010012548A3 EP 2009057994 W EP2009057994 W EP 2009057994W WO 2010012548 A3 WO2010012548 A3 WO 2010012548A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- encapsulation
- mems
- selective
- component structure
- film
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3135—Double encapsulation or coating and encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/315—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the encapsulation having a cavity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0109—Bonding an individual cap on the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0172—Seals
- B81C2203/019—Seals characterised by the material or arrangement of seals between parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Abstract
Die Erfindung betrifft eine Verkapselung (4) einer empfindliehen Bauelementstruktur (3) auf einem Halbleitersubstrat (2) mit einer die Bauelementstruktur (3) überdeckenden Folie (5). Erfindungsgemäß ist vorgesehen, dass in der Folie (5) eine Kavität (8) für die Bauelementstruktur (3) vorgesehen ist. Ferner betrifft die Erfindung ein MEMS (1) sowie ein Verfahren zum Verkapseln einer empfindlichen Bauelementstruktur (3).
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09779956A EP2303769A2 (de) | 2008-07-28 | 2009-06-25 | Verkapselung, mems sowie verfahren zum selektiven verkapseln |
US13/055,987 US8242569B2 (en) | 2008-07-28 | 2009-06-25 | Encapsulation, MEMS and method of selective encapsulation |
CN2009801294226A CN102105390A (zh) | 2008-07-28 | 2009-06-25 | 封装装置、mems以及用于选择性封装的方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008040775.5 | 2008-07-28 | ||
DE102008040775A DE102008040775A1 (de) | 2008-07-28 | 2008-07-28 | Verkapselung, MEMS sowie Verfahren zum selektiven Verkapseln |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2010012548A2 WO2010012548A2 (de) | 2010-02-04 |
WO2010012548A3 true WO2010012548A3 (de) | 2010-12-23 |
Family
ID=41461706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2009/057994 WO2010012548A2 (de) | 2008-07-28 | 2009-06-25 | Verkapselung, mems sowie verfahren zum selektiven verkapseln |
Country Status (6)
Country | Link |
---|---|
US (1) | US8242569B2 (de) |
EP (1) | EP2303769A2 (de) |
CN (1) | CN102105390A (de) |
DE (1) | DE102008040775A1 (de) |
TW (1) | TW201012740A (de) |
WO (1) | WO2010012548A2 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008042106A1 (de) * | 2008-09-15 | 2010-03-18 | Robert Bosch Gmbh | Verkapselung, MEMS sowie Verfahren zum Verkapseln |
DE102008054415A1 (de) * | 2008-12-09 | 2010-06-10 | Robert Bosch Gmbh | Anordnung zweier Substrate mit einer SLID-Bondverbindung und Verfahren zur Herstellung einer solchen Anordnung |
DE102011112476A1 (de) * | 2011-09-05 | 2013-03-07 | Epcos Ag | Bauelement und Verfahren zum Herstellen eines Bauelements |
US9627349B2 (en) | 2013-09-13 | 2017-04-18 | Ev Group E. Thallner Gmbh | Method for applying a bonding layer |
US10224260B2 (en) * | 2013-11-26 | 2019-03-05 | Infineon Technologies Ag | Semiconductor package with air gap |
US10732809B2 (en) | 2015-12-30 | 2020-08-04 | Google Llc | Systems and methods for selective retention and editing of images captured by mobile image capture device |
US10225511B1 (en) | 2015-12-30 | 2019-03-05 | Google Llc | Low power framework for controlling image sensor mode in a mobile image capture device |
CN105762019B (zh) * | 2016-03-16 | 2018-01-30 | 中国电子科技集团公司第五十四研究所 | 一种lcp基材的rf mems开关制备方法 |
DE102016112200A1 (de) * | 2016-07-04 | 2018-01-04 | Endress+Hauser Gmbh+Co. Kg | Druckaufnehmer |
DE102016112198A1 (de) * | 2016-07-04 | 2018-01-04 | Endress+Hauser Gmbh+Co. Kg | Druckaufnehmer |
GB2575999A (en) * | 2018-07-31 | 2020-02-05 | Ucl Business Ltd | Method of fabricating a fibre-optic pressure and temperature sensor |
CN111010101A (zh) * | 2019-03-12 | 2020-04-14 | 天津大学 | 带弧形结构的薄膜封装的mems器件组件及电子设备 |
DE102020205490A1 (de) * | 2020-04-30 | 2021-11-04 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zum Herstellen einer Drucksensoreinrichtung und Drucksensoreinrichtung |
CN116670067A (zh) * | 2021-05-07 | 2023-08-29 | 华为技术有限公司 | 一种封装结构及其制作方法、电子设备 |
US20230067539A1 (en) * | 2021-08-27 | 2023-03-02 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor structure and formation thereof |
DE102022113498B3 (de) | 2022-05-30 | 2023-09-14 | Lisa Dräxlmaier GmbH | Leiterplattenbaugruppe mit einer eine ausbuchtung aufweisenden elektrisch isolierenden decklage und verfahren zum herstellen einer leitplattenbaugruppe |
CN115235299B (zh) * | 2022-06-30 | 2024-07-23 | 四川航天川南火工技术有限公司 | 一种火工阵列微推进器封装结构及封装方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5410789A (en) * | 1992-11-13 | 1995-05-02 | Murata Manufacturing Co., Ltd. | Method of manufacturing piezoelectric-resonator having vibrating spaces formed therein |
US5831369A (en) * | 1994-05-02 | 1998-11-03 | Siemens Matsushita Components Gmbh & Co. Kg | Encapsulation for electronic components and method for producing the encapsulation |
US6429506B1 (en) * | 1999-03-19 | 2002-08-06 | Denso Corporation | Semiconductor device produced by dicing |
JP2003254988A (ja) * | 2002-03-01 | 2003-09-10 | Denso Corp | 力学量センサおよびその製造方法 |
US20070007607A1 (en) * | 2005-07-06 | 2007-01-11 | Denso Corporation | Semiconductor sensor and manufacturing mehtod therefor |
DE102006019080B3 (de) * | 2006-04-25 | 2007-08-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Herstellungsverfahren für ein gehäustes Bauelement |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6229534B1 (en) * | 1998-02-27 | 2001-05-08 | Sabre Inc. | Methods and apparatus for accessing information from multiple remote sources |
DE10006446A1 (de) | 2000-02-14 | 2001-08-23 | Epcos Ag | Verkapselung für ein elektrisches Bauelement und Verfahren zur Herstellung |
FR2911865B1 (fr) * | 2007-01-26 | 2009-04-17 | Commissariat Energie Atomique | Procede de realisation d'un capot de protection de composant sur un substrat |
-
2008
- 2008-07-28 DE DE102008040775A patent/DE102008040775A1/de not_active Withdrawn
-
2009
- 2009-06-25 CN CN2009801294226A patent/CN102105390A/zh active Pending
- 2009-06-25 US US13/055,987 patent/US8242569B2/en not_active Expired - Fee Related
- 2009-06-25 EP EP09779956A patent/EP2303769A2/de not_active Withdrawn
- 2009-06-25 WO PCT/EP2009/057994 patent/WO2010012548A2/de active Application Filing
- 2009-07-27 TW TW098125138A patent/TW201012740A/zh unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5410789A (en) * | 1992-11-13 | 1995-05-02 | Murata Manufacturing Co., Ltd. | Method of manufacturing piezoelectric-resonator having vibrating spaces formed therein |
US5831369A (en) * | 1994-05-02 | 1998-11-03 | Siemens Matsushita Components Gmbh & Co. Kg | Encapsulation for electronic components and method for producing the encapsulation |
US6429506B1 (en) * | 1999-03-19 | 2002-08-06 | Denso Corporation | Semiconductor device produced by dicing |
JP2003254988A (ja) * | 2002-03-01 | 2003-09-10 | Denso Corp | 力学量センサおよびその製造方法 |
US20070007607A1 (en) * | 2005-07-06 | 2007-01-11 | Denso Corporation | Semiconductor sensor and manufacturing mehtod therefor |
DE102006019080B3 (de) * | 2006-04-25 | 2007-08-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Herstellungsverfahren für ein gehäustes Bauelement |
Non-Patent Citations (3)
Title |
---|
CHEN ET AL: "Design and Development of a Package Using LCP for RF/Microwave MEMS Switches", IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, IEEE SERVICE CENTER, PISCATAWAY, NJ, US LNKD- DOI:10.1109/TMTT.2006.884639, vol. 54, no. 11, 1 November 2006 (2006-11-01), pages 4009 - 4015, XP011149887, ISSN: 0018-9480 * |
CHEN M J ET AL: "Multilayer Organic Multichip Module Implementing Hybrid Microelectromechanical Systems", IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 56, no. 4, 1 April 2008 (2008-04-01), pages 952 - 958, XP011205832, ISSN: 0018-9480 * |
KINGSLEY N ET AL: "Organic Wafer-Scale Packaged Miniature 4-bit RF MEMS Phase Shifter", IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, IEEE SERVICE CENTER, PISCATAWAY, NJ, US LNKD- DOI:10.1109/TMTT.2005.864099, vol. 54, no. 3, 1 March 2006 (2006-03-01), pages 1229 - 1236, XP001524258, ISSN: 0018-9480 * |
Also Published As
Publication number | Publication date |
---|---|
TW201012740A (en) | 2010-04-01 |
US8242569B2 (en) | 2012-08-14 |
US20110121414A1 (en) | 2011-05-26 |
DE102008040775A1 (de) | 2010-02-04 |
WO2010012548A2 (de) | 2010-02-04 |
EP2303769A2 (de) | 2011-04-06 |
CN102105390A (zh) | 2011-06-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2010012548A3 (de) | Verkapselung, mems sowie verfahren zum selektiven verkapseln | |
WO2010028884A3 (de) | Verkapselung, mems sowie verfahren zum verkapseln | |
TW200709360A (en) | Semiconductor die package and method for making the same | |
WO2013003784A3 (en) | Process for a sealed mems device with a portion exposed to the environment | |
WO2009142391A3 (ko) | 발광소자 패키지 및 그 제조방법 | |
WO2009071595A3 (fr) | Dispositif a circuit integre et n/mems encapsule et procede de realisation | |
WO2009092361A3 (de) | Mems-bauelement, verfahren zur herstellung eines mems-bauelements und verfahren zur handhabung eines mems-bauelements | |
WO2009086289A3 (en) | Solar cell package for solar concentrator | |
WO2010016975A3 (en) | Method of passivating and encapsulating cdte and czt segmented detectors | |
HK1117270A1 (en) | Substrate and method of fabricating the same, and semiconductor device and method of fabricating the same | |
TW200704582A (en) | Semiconductor composite device and method of manufacturing the same | |
WO2007011511A3 (en) | Die package with asymmetric leadframe connection | |
WO2009042028A3 (en) | Lanthanide dielectric with controlled interfaces | |
EP2301906A4 (de) | Siliciumnitridplatte, verfahren zur herstellung der siliciumnitridplatte und siliciumnitrid-leiterplatte und halbleitermodul unter verwendung der siliciumnitridplatte | |
EP2239773A4 (de) | Halbleiter-chippaket und herstellungsverfahren dafür | |
TW200730007A (en) | Organic light-emitting display device and manufacturing method of the same | |
WO2011154360A3 (fr) | Circuit integre a dispositif de type fet sans jonction et a depletion | |
WO2009105367A3 (en) | Integrated circuit package and method of manufacturing same | |
WO2011037938A3 (en) | A method for encapsulation of organic electronic devices | |
WO2012071289A3 (en) | Semiconductor inks, films and processes for preparing coated substrates and photovoltaic devices | |
WO2007124209A3 (en) | Stressor integration and method thereof | |
WO2009005017A1 (ja) | 半導体パッケージおよびその製造方法 | |
WO2007087047A3 (en) | Interconnect structure for mems device | |
WO2009120011A3 (ko) | 발광소자 및 그 제조방법 | |
WO2010143895A3 (en) | Semiconductor substrate, semiconductor device, and manufacturing methods thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200980129422.6 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09779956 Country of ref document: EP Kind code of ref document: A2 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2009779956 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13055987 Country of ref document: US |