WO2009125882A1 - Fabrication d’affichages luminescents organiques de grande taille - Google Patents

Fabrication d’affichages luminescents organiques de grande taille Download PDF

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Publication number
WO2009125882A1
WO2009125882A1 PCT/KR2008/002031 KR2008002031W WO2009125882A1 WO 2009125882 A1 WO2009125882 A1 WO 2009125882A1 KR 2008002031 W KR2008002031 W KR 2008002031W WO 2009125882 A1 WO2009125882 A1 WO 2009125882A1
Authority
WO
WIPO (PCT)
Prior art keywords
mask
sections
shadow mask
shadow
mask frame
Prior art date
Application number
PCT/KR2008/002031
Other languages
English (en)
Inventor
Kug Weon Kim
Byoung Min Moon
Nam Heui Jung
Hwan Kyu Chun
Chang Sang Jo
Original Assignee
Soonchunhyang University Industry Academy Cooperation Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soonchunhyang University Industry Academy Cooperation Foundation filed Critical Soonchunhyang University Industry Academy Cooperation Foundation
Priority to PCT/KR2008/002031 priority Critical patent/WO2009125882A1/fr
Publication of WO2009125882A1 publication Critical patent/WO2009125882A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Definitions

  • the described technology relates to Organic Light Emitting displays (OLEDs), and more particularly to apparatuses and methods for manufacturing large size OLED displays.
  • Figure 1 shows a conventional process of assembling a substrate, a shadow mask and a mask frame for manufacturing large size OLED panels
  • Figure 2 shows a state in which a substrate, a shadow mask and a mask frame in
  • Figure 3 is a top view of a shadow mask and its divided sections in accordance with one embodiment
  • Figure 4 is a top view of a mask frame in accordance with one embodiment
  • Figure 5 is a perspective view of a mask frame assembled with a plurality of shadow mask sections in accordance with one embodiment
  • Figure 6 shows a process of mounting a shadow mask section within a mask frame in accordance with one embodiment
  • Figure 7 is a sectional view of shadow masks in accordance with one embodiment.
  • Figure 8 shows a flow diagram of a method for manufacturing a mask frame in accordance with one embodiment.
  • An OLED display refers to a light-emitting display whose emissive electroluminescent layer comprises a film of organic materials. Recently, OLED displays are increasingly being used in consumer electronics products, such as mobile phones, personal digital assistants (PDA), digital cameras, and various other high-performance display devices in light of their fast response, low power consumption, light weight, wide viewing angle, and the like.
  • PDA personal digital assistants
  • OLED displays are manufactured through a series of vapor deposition processes to apply thin coatings of organic materials through a shadow mask onto a substrate (such as glass). Shadow masks with aperture patterns are used to pattern the organic electroluminescent layers onto a substrate; and a thermal physical vapor deposition (PVD) process is generally used to pattern organic thin films and metal electrode layers on the substrate.
  • PVD thermal physical vapor deposition
  • Figures 1 shows a typical process of assembling a substrate, a shadow mask and a mask frame, for fabricating large size OLED panels.
  • organic materials are deposited on a substrate 110 through a plurality of aperture sections 120 in a shadow mask 130, which is fitted rigidly to a mask frame 140.
  • Such rigid mask frame is designed to support the shadow mask with a minimal level of mask sag when held in a horizontal orientation.
  • the shadow mask 130 has four sections of aperture patterns, for fabricating four OLED panels during the vapor deposition process.
  • Figure 2 shows the state in which the substrate 110, the shadow mask 130 and the mask frame 140 in Figure 1 are all assembled. As shown in Figure 2, as the size of the shadow mask increases, the inner region 210 of the shadow mask 130 would sag under its own weight, making it difficult to deposit precise patterns of organic materials onto the substrate 110.
  • an apparatus includes a plurality of shadow mask sections for forming precise patterns on a single, large substrate, and a mask frame for supporting the shadow mask sections.
  • a shadow mask frame for slidably mounting and supporting a plurality of shadow mask sections is disclosed.
  • shadow mask sections each with a pair of opposite edges bent to a predetermined degree are disclosed.
  • a method for manufacturing a mask frame includes the steps of providing a mask frame body; forming two or more opening portions in the mask frame body; and forming grooves in each opening portion.
  • each opening portion of the mask frame body may be for mounting and securing shadow mask sections, and the grooves are to guide and receive edges of the shadow mask sections.
  • Figure 3 is one embodiment of a shadow mask 300 in accordance with the present disclosure, before and after it is divided into a plurality of shadow mask sections 310.
  • the shadow mask 300 is divided into four different sections in this embodiment, it is possible to divide it into any number of two or more sections, each with coating apertures for precision patterning organic electroluminescent layers on a substrate.
  • the shadow mask 300 before it is divided, has a plurality of aperture sections, which are separated from each other by blocking (ineffective) regions 320 and 330 without any apertures.
  • the shadow mask sections 310 can have different aperture patterns, sizes or shapes.
  • FIG. 4 is a top view of one embodiment of a mask frame 400 in accordance with the present disclosure.
  • the mask frame 400 is a support frame for fastening or slidably receiving and securing the shadow mask 300, and is generally provided for structural integrity needed to facilitate the handling of shadow masks without causing damage, and aligning the shadow mask 300 on a substrate for precision patterning.
  • the mask frame 400 is designed to hold a plurality of shadow mask sections, and each shadow mask section 310 can be mounted within each opening portion 410 of the mask frame 400.
  • each shadow mask section 310 can be mounted within each opening portion 410 of the mask frame 400.
  • four shadow mask sections and opening portions are shown, but a different number of shadow mask sections or opening portions (e.g., 7) may be used.
  • Figure 4 depicts opening portions 410 of rectangular shape, its shape can be varied depending on the shape of the mask section to be mounted therein. Further, as long as the shadow mask sections can be mounted and secured within the opening portions of the mask frame, the opening portions may have shapes different from those of the shadow mask sections.
  • FIG. 5 is a perspective view of the mask frame 400 with shadow mask sections 310 mounted therein in accordance with one embodiment.
  • Each shadow mask section 310 is mounted and secured within each opening portion 410 of the mask frame 400, with mask junction frames 510 combined to close the opening portions.
  • the shadow mask 300 Upon mounting the shadow mask 300 (with a plurality of mask sections) within the mask frame 400, various traditional fastening methods can also be employed, such as welding, clamping, bolding and the like. For example, certain edges of a shadow mask section 310 can be welded onto the mask frame 400. Further, in this embodiment, although the mask junction frames 510 are used to secure the shadow mask sections 310 to the mask frame 400, they may not be used if the mask sections 310 are fastened to the mask frame 400 with other means for securing the mask sections 310, such as welding, clamping, or other mechanical securing means.
  • Figure 6 shows the process of fabricating a shadow mask and frame assembly in accordance with one embodiment of the present disclosure, wherein the shadow mask section 310 is slidably mounted within the mask frame 400.
  • the mask frame 400 has grooves 610 and 620 for guiding and receiving the edges of the shadow mask section 310 to be mounted within the mask frame 400. This embodiment eliminates the need for welding the shadow mask 300 to the mask frame 400.
  • a mask junction frame 510 may be combined with the mask frame 400 to complete the shadow mask and frame assembly.
  • the shadow mask 300 can be mounted within the mask frame 400 without the use of mask junction frames, by employing various traditional fastening methods, such as welding, bolting, clamping and the like.
  • Figure 7 is a sectional view of grooves 620 when seen from the "A" side in Figure 6. As shown in Figure 7, the grooves 620 as well as the edges of the shadow mask section 310 are not completely horizontal in this embodiment but are bent to a predetermined degree. With this structure, the shadow mask section 310 has an arch like shape, thereby further limiting sagging of the shadow mask 300 under its own weight.
  • FIG. 8 shows a flow diagram 800 of a method for manufacturing a mask frame in accordance with one embodiment.
  • a mask frame body is provided.
  • two or more opening portions are formed in the mask frame body. Each opening portion of the mask frame is for mounting and securing shadow mask sections.
  • grooves for guiding and receiving edges of the shadow mask sections are provided in the insides of the opening portions of the mask frame body.
  • the grooves are introduced as means for guiding and receiving edges of shadow mask sections, other means may be used if it can be used to mount and secure the shadow mask sections within each opening section of the mask frame.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

L’invention concerne des techniques permettant de déposer un motif précis de matériaux organiques sur un substrat. Dans un mode de réalisation, un appareil comprend un masque d’ombrage pour délimiter des motifs sur le substrat, et une structure de masque recevant le masque d’ombrage. Le masque d’ombrage comporte au moins deux sections de masque d’ombrage, chacune avec un motif d’ouverture à travers lequel les matériaux seront déposés sur le substrat. La structure de masque est configurée pour recevoir les sections du masque d’ombrage.
PCT/KR2008/002031 2008-04-10 2008-04-10 Fabrication d’affichages luminescents organiques de grande taille WO2009125882A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/KR2008/002031 WO2009125882A1 (fr) 2008-04-10 2008-04-10 Fabrication d’affichages luminescents organiques de grande taille

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2008/002031 WO2009125882A1 (fr) 2008-04-10 2008-04-10 Fabrication d’affichages luminescents organiques de grande taille

Publications (1)

Publication Number Publication Date
WO2009125882A1 true WO2009125882A1 (fr) 2009-10-15

Family

ID=41162012

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2008/002031 WO2009125882A1 (fr) 2008-04-10 2008-04-10 Fabrication d’affichages luminescents organiques de grande taille

Country Status (1)

Country Link
WO (1) WO2009125882A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109440061A (zh) * 2018-11-12 2019-03-08 京东方科技集团股份有限公司 掩膜板、掩膜装置、掩膜板的制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030101932A1 (en) * 2001-12-05 2003-06-05 Samsung Nec Mobile Display Co., Ltd. Tension mask assembly for use in vacuum deposition of thin film of organic electroluminescent device
US20030221614A1 (en) * 2002-06-03 2003-12-04 Samsung Nec Mobile Display Co., Ltd., Ulsan-City, Republic Of Korea Mask and mask frame assembly for evaporation
US20050072359A1 (en) * 2003-10-04 2005-04-07 Seon-Hee Kim Mask frame assembly for depositing a thin layer of an organic electroluminescent device and method for depositing a thin layer using the same
US20060103289A1 (en) * 2004-11-18 2006-05-18 Eui-Gyu Kim Mask frame assembly

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030101932A1 (en) * 2001-12-05 2003-06-05 Samsung Nec Mobile Display Co., Ltd. Tension mask assembly for use in vacuum deposition of thin film of organic electroluminescent device
US20030221614A1 (en) * 2002-06-03 2003-12-04 Samsung Nec Mobile Display Co., Ltd., Ulsan-City, Republic Of Korea Mask and mask frame assembly for evaporation
US20050072359A1 (en) * 2003-10-04 2005-04-07 Seon-Hee Kim Mask frame assembly for depositing a thin layer of an organic electroluminescent device and method for depositing a thin layer using the same
US20060103289A1 (en) * 2004-11-18 2006-05-18 Eui-Gyu Kim Mask frame assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109440061A (zh) * 2018-11-12 2019-03-08 京东方科技集团股份有限公司 掩膜板、掩膜装置、掩膜板的制备方法

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